TWI733142B - Electronic package - Google Patents
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- TWI733142B TWI733142B TW108125254A TW108125254A TWI733142B TW I733142 B TWI733142 B TW I733142B TW 108125254 A TW108125254 A TW 108125254A TW 108125254 A TW108125254 A TW 108125254A TW I733142 B TWI733142 B TW I733142B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3733—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
Abstract
Description
本發明係有關一種封裝結構,尤指一種散熱型電子封裝件。 The present invention relates to a packaging structure, in particular to a heat-dissipating electronic package.
隨著電子產品在功能及處理速度之需求的提升,作為電子產品之核心組件的半導體晶片需具有更高密度之電子電路(Electronic Circuits),故半導體晶片在運作時將隨之產生更大量的熱能。再者,由於傳統包覆該半導體晶片之封裝膠體係為一種導熱係數僅0.8W/mk之不良傳熱材質(即熱量之逸散效率不佳),因而若不能有效逸散半導體晶片所產生之熱量,將會造成半導體晶片之損害與產品信賴性問題。 With the increase in the function and processing speed of electronic products, the semiconductor chip as the core component of the electronic product needs to have higher density electronic circuits (Electronic Circuits), so the semiconductor chip will generate a larger amount of heat energy during operation. . Furthermore, since the traditional encapsulant system for coating the semiconductor chip is a poor heat transfer material with a thermal conductivity of only 0.8W/mk (that is, the heat dissipation efficiency is not good), if the semiconductor chip cannot be effectively dissipated Heat will cause damage to semiconductor chips and product reliability issues.
因此,為了迅速將熱能散逸至外部,業界通常在半導體封裝件中配置散熱片(Heat Sink或Heat Spreader),以藉散熱片逸散出半導體晶片所產生之熱量。 Therefore, in order to quickly dissipate the heat to the outside, the industry usually configures a heat sink (Heat Sink or Heat Spreader) in the semiconductor package to dissipate the heat generated by the semiconductor chip through the heat sink.
隨著科技的演進,電子產品需求趨勢愈做愈小,業界遂將多個晶片組合成具有較多接點(I/O)數之多晶片封裝結構,如多晶片模組(Multi-Chip Module)或多晶片封裝(Multi Chip Package),以大幅增加處理器的運算能力,並減少訊號傳遞的延遲時間,惟因其多晶片運作的需求,故亦需兼顧散熱的設計。然而,如第1A圖所示之多晶片封裝結構(其
圖中省略封裝膠體及散熱件),若在封裝基板10上配置有多個半導體晶片11時,於設置散熱件之過程中,該散熱件會擠壓散熱膠材12a而使該散熱膠材12a擴散出該半導體晶片11,以令原本各自分離佈設的散熱膠材12a(如第1A圖所示)相互連成一大片的散熱膠體12b(如第1B圖所示,其圖中省略封裝膠體及散熱件)。
With the evolution of technology, the demand for electronic products has become smaller and smaller. The industry has combined multiple chips into a multi-chip package structure with a larger number of contacts (I/O), such as a multi-chip module (Multi-Chip Module). ) Or multi-chip package (Multi Chip Package) to greatly increase the computing power of the processor and reduce the delay time of signal transmission. However, due to the requirements of multi-chip operation, it is also necessary to take into account the design of heat dissipation. However, the multi-chip package structure shown in Figure 1A (its
(The packaging glue and heat sink are omitted in the figure). If
然而,隨著功能需求愈來愈多,該半導體晶片11之數量亦愈來愈多,因而該封裝基板10之整體平面封裝面積也愈來愈大,故於該散熱膠體12b之儲存模數(storage modulus)、硬度及熱膨脹係數等材料特徵係與以致該一大片的散熱膠體12b的儲存模數(storage modulus)、硬度及熱膨脹係數(CTE)與該散熱件、半導體晶片11及封裝膠體之間存在的差異亦隨著封裝面積日益放大,反應在該半導體晶片11之角落處之應力會過大,造成於後續製程中,該半導體晶片11或底膠(圖未示)容易碎裂,導致可靠性不佳及製程良率低等問題。
However, with more and more functional requirements, the number of
因此,如何克服上述習知技術之種種問題,實已成為目前業界亟待克服之難題。 Therefore, how to overcome the various problems of the above-mentioned conventional technology has actually become a problem that the industry urgently needs to overcome.
鑑於上述習知技術之種種缺失,本發明提供一種電子封裝件,係包括:多晶片封裝體,包括複數電子元件;至少二種散熱膠材,係佈設於該多晶片封裝體上,其中,該至少二種散熱膠材之材質互異。 In view of the various deficiencies of the above-mentioned conventional technologies, the present invention provides an electronic package including: a multi-chip package including a plurality of electronic components; at least two types of heat-dissipating materials are arranged on the multi-chip package, wherein the The materials of at least two heat-dissipating materials are different from each other.
前述之電子封裝件中,該至少二種散熱膠材之其中一散熱膠材係定義為第一散熱膠材,另外一散熱膠材係定義為第二散熱膠材,該複 數電子元件於同一側之表面之間係定義為佈設區,且令該第一散熱膠材佈設於該複數電子元件上,並令該第二散熱膠材佈設於該第一散熱膠材外圍而位於該佈設區,其中,該第一散熱膠材之熱傳導係數大於該第二散熱膠材之熱傳導係數,且該第二散熱膠材之儲存模數低於該第一散熱膠材之儲存模數。 In the aforementioned electronic package, one of the at least two heat-dissipating glue materials is defined as the first heat-dissipating glue material, and the other heat-dissipating glue material is defined as the second heat-dissipating glue material. Several electronic components are defined as a layout area between the surfaces on the same side, and the first heat-dissipating glue material is arranged on the plurality of electronic components, and the second heat-dissipating glue material is arranged on the periphery of the first heat-dissipating glue material. Located in the deployment area, wherein the thermal conductivity of the first heat-dissipating adhesive material is greater than that of the second heat-dissipating adhesive material, and the storage modulus of the second heat-dissipating adhesive material is lower than the storage modulus of the first heat-dissipating adhesive material .
例如,該第一散熱膠材係佈滿該複數電子元件之表面。該第二散熱膠材係佈滿該佈設區;或者,該第二散熱膠材佈設於對應該複數電子元件之表面邊緣而呈複數環狀,但未佈滿該佈設區;亦或,該第二散熱膠材佈設於該複數電子元件之角落處,但未佈滿該佈設區。 For example, the first heat-dissipating adhesive material covers the surface of the plurality of electronic components. The second heat-dissipating adhesive material is all over the layout area; or, the second heat-dissipating adhesive material is arranged on the edge of the surface corresponding to the plurality of electronic components in a plurality of rings, but does not cover the layout area; or, the first 2. The heat-dissipating glue material is arranged at the corners of the plurality of electronic components, but the arrangement area is not covered.
於另一態樣中,該複數電子元件之至少其中一者之表面上係同時佈設有該第一散熱膠材與該第二散熱膠材。 In another aspect, the surface of at least one of the plurality of electronic components is provided with the first heat-dissipating glue material and the second heat-dissipating glue material at the same time.
於另一態樣中,該複數電子元件之至少其中一者之表面係同時佈設有該第一散熱膠材及第三散熱膠材,且構成該第三散熱膠材之材質不同於構成該第一散熱膠材與該第二散熱膠材之材質。例如,該第三散熱膠材之熱傳導係數介於該第一散熱膠材之熱傳導係數與該第二散熱膠材之熱傳導係數之間,且該第三散熱膠材之儲存模數及該第二散熱膠材之儲存模數皆低於該第一散熱膠材之儲存模數。 In another aspect, the surface of at least one of the plurality of electronic components is provided with the first heat-dissipating glue material and the third heat-dissipating glue material at the same time, and the material constituting the third heat-dissipating glue material is different from that of the first heat-dissipating glue material. The materials of a heat-dissipating glue material and the second heat-dissipating glue material. For example, the thermal conductivity of the third heat-dissipating glue material is between the heat-conductivity of the first heat-dissipating glue and the heat-conductivity of the second heat-dissipating glue, and the storage modulus of the third heat-dissipating glue and the second heat-dissipating glue The storage modulus of the heat-dissipating adhesive material is lower than the storage modulus of the first heat-dissipating adhesive material.
於另一態樣中,該佈設區中復形成有第三散熱膠材,且構成該第三散熱膠材之材質不同於構成該第一散熱膠材與該第二散熱膠材之材質。例如,該第二散熱膠材係沿該電子元件之表面邊緣之非角落處佈設,且該第三散熱膠材係佈設於該電子元件之角落處。再者,該第三散熱膠材之儲存模數低於該第二散熱膠材之儲存模數。 In another aspect, a third heat-dissipating glue material is formed in the arrangement area, and the material constituting the third heat-dissipating glue material is different from the materials constituting the first heat-dissipating glue material and the second heat-dissipating glue material. For example, the second heat-dissipating glue material is arranged along the non-corner of the surface edge of the electronic component, and the third heat-dissipating glue material is arranged at the corner of the electronic component. Furthermore, the storage modulus of the third heat-dissipating glue material is lower than the storage modulus of the second heat-dissipating glue material.
前述之電子封裝件中,該多晶片封裝體復包括承載及電性連接該複數電子元件之承載結構。 In the aforementioned electronic package, the multi-chip package further includes a carrying structure for carrying and electrically connecting the plurality of electronic components.
前述之電子封裝件中,該多晶片封裝體復包括包覆該複數電子元件且使該複數電子元件之上表面外露之封裝層。 In the aforementioned electronic package, the multi-chip package includes a packaging layer covering the plurality of electronic components and exposing the upper surface of the plurality of electronic components.
前述之電子封裝件中,復包括藉由該散熱膠材結合至該複數電子元件上之散熱件。 The aforementioned electronic package includes a heat dissipating element bonded to the plurality of electronic components by the heat dissipating adhesive material.
由上可知,本發明之電子封裝件主要藉由將至少兩種散熱膠材佈設於該多晶片封裝體上,以於設置該散熱件後,即使任一散熱膠材受壓後形成一大面積片體,其面積可小於該多晶片封裝體的上表面之面積,故相較於習知技術,本發明之電子封裝件能避免結構應力集中於該些電子元件之角落處,進而避免於後續製程中,該些電子元件發生碎裂而導致可靠性不佳及製程良率低之問題。 It can be seen from the above that the electronic package of the present invention mainly deploys at least two heat-dissipating materials on the multi-chip package, so that after the heat-dissipating parts are installed, even if any heat-dissipating materials are compressed, a large area is formed. The area of the chip body can be smaller than the area of the upper surface of the multi-chip package. Therefore, compared with the prior art, the electronic package of the present invention can prevent the structural stress from being concentrated on the corners of the electronic components, thereby avoiding subsequent During the manufacturing process, the electronic components are broken, resulting in poor reliability and low process yield.
10‧‧‧封裝基板 10‧‧‧Packaging substrate
11‧‧‧半導體晶片 11‧‧‧Semiconductor chip
12a‧‧‧散熱膠材 12a‧‧‧Thermal plastic material
12b‧‧‧散熱膠體 12b‧‧‧Heat Dissipating Gel
2,2’,2”,6‧‧‧電子封裝件 2,2’,2”,6‧‧‧electronic package
2a‧‧‧多晶片封裝體 2a‧‧‧Multi-chip package
20‧‧‧承載結構 20‧‧‧Bearing structure
20’‧‧‧線路結構 20’‧‧‧Line structure
200‧‧‧導電體 200‧‧‧Conductor
201,202‧‧‧載板 201,202‧‧‧Carrier Board
21,21’‧‧‧電子元件 21,21’‧‧‧Electronic components
21a‧‧‧作用面 21a‧‧‧working surface
21b‧‧‧非作用面 21b‧‧‧Inactive surface
21c‧‧‧側面 21c‧‧‧ side
210‧‧‧導電凸塊 210‧‧‧Conductive bump
211‧‧‧底膠 211‧‧‧ Primer
22‧‧‧封裝層 22‧‧‧Packaging layer
22a‧‧‧第一表面 22a‧‧‧First surface
22b‧‧‧第二表面 22b‧‧‧Second surface
23,23’‧‧‧散熱件 23,23’‧‧‧Radiator
230‧‧‧散熱體 230‧‧‧Radiator
231‧‧‧支撐腳 231‧‧‧Support foot
24‧‧‧黏著層 24‧‧‧Adhesive layer
25‧‧‧導電元件 25‧‧‧Conductive element
31‧‧‧第一散熱膠材 31‧‧‧The first heat dissipation plastic material
32‧‧‧第二散熱膠材 32‧‧‧Second heat-dissipating adhesive material
33‧‧‧第三散熱膠材 33‧‧‧The third heat-dissipating adhesive
S‧‧‧佈設區 S‧‧‧layout area
第1A圖係為習知多晶片封裝結構之局部上視示意圖。 FIG. 1A is a schematic partial top view of the conventional multi-chip package structure.
第1B圖係為第1A圖之多晶片封裝結構於設置散熱件後之局部上視示意圖。 FIG. 1B is a partial top view schematic diagram of the multi-chip package structure of FIG. 1A after the heat sink is installed.
第2圖係為本發明之電子封裝件之剖視示意圖。 Figure 2 is a schematic cross-sectional view of the electronic package of the present invention.
第2’及2”圖係為本發明之電子封裝件之其它實施例之剖視示意圖。 Figures 2'and 2" are schematic cross-sectional views of other embodiments of the electronic package of the present invention.
第3A、3B及3C圖係為第2圖之電子封裝件之不同態樣之局部上視示意圖。 3A, 3B, and 3C are partial top views of different aspects of the electronic package of FIG. 2.
第4A及4B圖係為第2圖之電子封裝件之其中一電子元件上之散熱膠材之各種佈設態樣之局部上視示意圖。 4A and 4B are schematic partial top views of various layout patterns of the heat-dissipating adhesive material on one of the electronic components of the electronic package of FIG. 2.
第5A及5B圖係為第2圖之電子封裝件之所有電子元件上之散熱膠材之各種佈設態樣之局部上視示意圖。 Figures 5A and 5B are schematic partial top views of various layout patterns of heat-dissipating adhesives on all electronic components of the electronic package of Figure 2.
第6圖係為第2圖之另一實施例之剖視示意圖。 Fig. 6 is a schematic cross-sectional view of another embodiment of Fig. 2.
以下藉由特定的具體實施例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點及功效。 The following specific examples illustrate the implementation of the present invention. Those familiar with the art can easily understand the other advantages and effects of the present invention from the contents disclosed in this specification.
須知,本說明書所附圖式所繪示之結構、比例、大小等,均僅用以配合說明書所揭示之內容,以供熟悉此技藝之人士之瞭解與閱讀,並非用以限定本發明可實施之限定條件,故不具技術上之實質意義,任何結構之修飾、比例關係之改變或大小之調整,在不影響本發明所能產生之功效及所能達成之目的下,均應仍落在本發明所揭示之技術內容得能涵蓋之範圍內。同時,本說明書中所引用之如「上」、「下」、「第一」、「第二」及「一」等之用語,亦僅為便於敘述之明瞭,而非用以限定本發明可實施之範圍,其相對關係之改變或調整,在無實質變更技術內容下,當亦視為本發明可實施之範疇。 It should be noted that the structure, ratio, size, etc. shown in the drawings in this manual are only used to match the content disclosed in the manual for the understanding and reading of those who are familiar with the art, and are not intended to limit the implementation of the present invention. Therefore, it does not have any technical significance. Any structural modification, proportional relationship change or size adjustment, without affecting the effects and objectives that can be achieved by the present invention, should still fall within the scope of the present invention. The technical content disclosed by the invention can be covered. At the same time, terms such as "upper", "lower", "first", "second" and "one" cited in this manual are only for ease of description and are not intended to limit the scope of the present invention. The scope of implementation and the change or adjustment of the relative relationship shall be regarded as the scope of the implementation of the present invention without substantive changes to the technical content.
第2圖係為本發明之電子封裝件2之剖面示意圖。如第2圖所示,所述之電子封裝件2係包括:一多晶片封裝體2a(其包括承載結構20、
複數電子元件21,21’及封裝層22)、第一散熱膠材31、第二散熱膠材32以及一散熱件23。
FIG. 2 is a schematic cross-sectional view of the
所述之承載結構20係為單一載板形式(如第2圖所示)或為透過複數導電體200(可由底膠211包覆)相互電性堆疊之多載板201,202形式(如第6圖所示之電子封裝件6),本實施例係以單一載板形式進行說明,該載板例如為具有核心層與線路結構之封裝基板、無核心層(coreless)形式線路結構之封裝基板、具導電矽穿孔(Through-silicon via,簡稱TSV)之矽中介板(Through Silicon interposer,簡稱TSI)或其它板型,其包含至少一絕緣層及至少一結合該絕緣層之線路層,如至少一扇出(fan out)型重佈線路層(redistribution layer,簡稱RDL)。應可理解地,該承載結構20亦可為其它承載晶片之板材,如導線架(lead frame)、晶圓(wafer)、或其它具有金屬佈線(routing)之板體等,並不限於上述。
The carrying
於本實施例中,該承載結構20之載板製程方式繁多,例如,可採用晶圓製程製作線路層,透過化學氣相沉積(Chemical vapor deposition,簡稱CVD)形成氮化矽或氧化矽以作為絕緣層;或者,可採用一般非晶圓製程方式形成線路層,即採用成本較低之高分子介電材作為絕緣層,如聚醯亞胺(Polyimide,簡稱PI)、聚對二唑苯(Polybenzoxazole,簡稱PBO)、預浸材(Prepreg,簡稱PP)、封裝膠體(molding compound)、感光型介電層或其它材質等以塗佈方式形成之。
In this embodiment, the
再者,該承載結構20於其下側可形成複數導電元件25,以供該電子封裝件2可藉由該些導電元件25接置一如電路板之電子裝置(圖略)。
該導電元件25可為如銅柱之金屬柱、包覆有絕緣塊之金屬凸塊、銲球(solder ball)、具有核心銅球(Cu core ball)之銲球或其它導電構造等。
Furthermore, a plurality of
所述之複數電子元件21,21’係相互分離地配置於該承載結構20上側。
The plurality of
該電子元件21,21’係為主動元件、被動元件或其組合者,其中,該主動元件係例如半導體晶片,而該被動元件係例如電阻、電容及電感。於本實施例中,該電子元件21,21’係為半導體晶片,其具有相對之作用面21a與非作用面21b,並使該作用面21a藉由複數如銲錫材料、金屬柱(pillar)或其它等之導電凸塊210以覆晶方式設於該承載結構20之線路層上並電性連接該線路層,且以底膠211包覆該些導電凸塊210;或者,該電子元件21,21’可藉由複數銲線(圖未示)以打線方式電性連接該承載結構20之線路層;亦或,該電子元件21,21’可直接接觸該承載結構20之線路層。因此,可於該承載結構20上接置所需類型及數量之電子元件,以提升其電性功能,且有關電子元件21,21’電性連接承載結構20之方式繁多,並不限於上述。
The
所述之封裝層22係形成於該承載結構20上以包覆該電子元件21,21’。
The
於本實施例中,該封裝層22係具有相對之第一表面22a與第二表面22b,並以該第一表面22a結合該承載結構20,且該電子元件21之非作用面21b齊平該封裝層22之第二表面22b,以令該些電子元件21外露於該封裝層22之第二表面22b,且令該封裝層22之第二表面22b於各該非作用面21b之間定義為佈設區S。
In this embodiment, the
再者,形成該封裝層22之材質係為絕緣材,如聚醯亞胺(PI)、環氧樹脂(epoxy)之封裝膠體或封裝材,其可用模壓(molding)、壓合(lamination)或塗佈(coating)之方式形成之。
Furthermore, the material forming the
所述之第一散熱膠材31係佈設於該電子元件21,21’之非作用面21b上。
The first heat-dissipating
於本實施例中,該第一散熱膠材31係為導熱介面材(Thermal Interface Material,簡稱TIM),如高導熱金屬膠材,其儲存模數約為5~10GPa。
In this embodiment, the first heat-dissipating
所述之第二散熱膠材32係佈設於該第一散熱膠材31外圍並接觸該第一散熱膠材31,如該封裝層22之第二表面22b之佈設區S,其中,該第一散熱膠材31之材質不同於該第二散熱膠材32。
The second heat-dissipating
於本實施例中,該第一散熱膠材31之熱傳導係數大於該第二散熱膠材32之熱傳導係數,且該第二散熱膠材32之儲存模數低於該第一散熱膠材31之儲存模數。例如,該第二散熱膠材32係為矽膠材或如壓克力材之紫外線(UV)膠。具體地,矽膠材之儲存模數約為100MPa,而UV膠之儲存模數範圍甚大(一般採用3~5GPa),但其仍小於高導熱金屬膠材之儲存模數,其中,因矽膠材不僅具有高延展性,且其熱傳導係數亦高於UV膠,故相較於UV膠,該第二散熱膠材32選用矽膠材較佳。
In this embodiment, the thermal conductivity coefficient of the first heat-dissipating
再者,如第3A圖所示(圖中省略散熱件23),該第二散熱膠材32係佈滿該佈設區S,以遮蓋該封裝層22之第二表面22b。或者,如第3B圖所示(圖中省略散熱件23),該第二散熱膠材32未佈滿該佈設區S,且沿該電子元件21,21’同一側之表面邊緣佈設,如環繞該電子元件21,21’之非作
用面21b邊緣。亦或,如第3C圖所示(圖中省略散熱件23),該第二散熱膠材32未佈滿該佈設區S,且佈設於該電子元件21,21’之角落處,如L形或點狀。
Furthermore, as shown in FIG. 3A (the
又,如第3A至3C圖所示,該第一散熱膠材31係佈滿該電子元件21,21’之非作用面21b。或者,如第4A圖所示,較大外露面積之該電子元件21之非作用面21b可圖案化佈設有該第一散熱膠材31與第二散熱膠材32。亦或,如第4B圖所示,該電子元件21之非作用面21b可佈設有該第一散熱膠材31及第三散熱膠材33,且該第三散熱膠材33之材質不同於該第一散熱膠材31與第二散熱膠材32,其中,在此實施態樣下,該第三散熱膠材33之熱傳導係數介於該第一散熱膠材31之熱傳導係數與第二散熱膠材32之熱傳導係數之間,且該第二散熱膠材32之儲存模數及該第三散熱膠材33之儲存模數皆低於該第一散熱膠材31之儲存模數。例如,該第三散熱膠材33係為矽膠材或如壓克力材之紫外線(UV)膠。
Moreover, as shown in FIGS. 3A to 3C, the first heat-dissipating
另外,於其它實施例中,該佈設區S中可形成有第二散熱膠材32與第三散熱膠材33,如第5A及5B圖所示。具體地,該第二散熱膠材32係沿該電子元件21,21’周緣用以構成該佈設區S之表面佈設,且該第三散熱膠材33係佈設於該電子元件21,21’之角落處(如第5A圖所示之點狀或如第5B圖所示之L形),其中,該第二散熱膠材32可沿周緣之非角落處填滿佈設區S(如第5A及5B圖所示)或亦可不填滿(圖未示)。例如,該第三散熱膠材33之儲存模數低於該第二散熱膠材32之儲存模數,其中,該第三散熱膠材33係為矽膠材或如壓克力材之紫外線(UV)膠。
In addition, in other embodiments, a second heat-dissipating
所述之散熱件23係係藉由該第一散熱膠材31與第二散熱膠材32(及第三散熱膠材33)結合至該複數電子元件21,21’之非作用面21b上。
The
於本實施例中,該散熱件23係具有一散熱體230與複數設於該散熱體230下側之支撐腳231,該散熱體230係為散熱片型式,並以下側接觸該第一散熱膠材31與第二散熱膠材32(及第三散熱膠材33),且該支撐腳231係藉由黏著層24結合於該承載結構20上。
In this embodiment, the
應可理解地,有關本發明之電子封裝件2之種類繁多,並不限於上述。例如,第2’圖所示之晶圓級晶片尺寸封裝(Wafer Level Chip Scale Packaging)形式之電子封裝件2’,以令其多晶片封裝體2a之該些電子元件21,21’直接電性連接線路結構20’(或承載結構20),且該散熱件23’係為散熱片形式。或者,如第2”圖所示之電子封裝件2”,其多晶片封裝體2a僅包括該些電子元件21,21’,且該第二散熱膠材32(及第三散熱膠材33)與該第一散熱膠材31連結成一片膠體,以黏結承載該些電子元件21,21’,並可令該第二散熱膠材32(及第三散熱膠材33)進一步延伸至該些電子元件21,21’之側面21c,如虛線所示之第二散熱膠材32,以包覆該些電子元件21,21’,使該第二散熱膠材32(及第三散熱膠材33)作為封裝之用,因而無需採用上述封裝層22,且將該第一散熱膠材31增厚或凹凸化(或粗糙化),以省略上述散熱件23’之使用。
It should be understood that there are many types of
另一方面,有關本發明之電子封裝件2之製法繁多,因此,基於上述散熱膠材之佈設方式,以下列舉製法之部分實施態樣。
On the other hand, there are many manufacturing methods for the
於一實施例中,係先將該些電子元件21,21’設於該承載結構20上,再以該封裝層22包覆該些電子元件21,21’,並研磨移除該封裝層22
之第二表面22b之部分材質以外露出該電子元件21,21’之非作用面21b。接著,將該第一散熱膠材31(高導熱金屬膠材)塗佈於該電子元件21,21’之非作用面21b上,並視該第一散熱膠材31特性,選擇性地進行預烘烤製程。之後,塗佈該第二散熱膠材32(矽膠材或UV膠)於該佈設區S中,其可佈滿該佈設區S(如第3A圖所示)或未佈滿該佈設區S(如第3B或3C圖所示),且若該第二散熱膠材32為UV膠材時,需進行光照固化製程。最後,進行點膠作業以形成黏著層24,再將該散熱件23結合於該黏著層24上,並將該散熱件23熱壓合於該第一散熱膠材31與第二散熱膠材32上,再烘烤該黏著層24與該第一散熱膠材31與第二散熱膠材32。於後續製程中,植設該些導電元件25於該承載結構20下側。
In one embodiment, the
於另一實施例中,係先將該些電子元件21,21’設於該承載結構20上,再以該封裝層22包覆該些電子元件21,21’,並研磨移除該封裝層22之第二表面22b之部分材質以外露出該電子元件21,21’之非作用面21b。接著,將該第一散熱膠材31(高導熱金屬膠材)塗佈於面積較小之電子元件21’之非作用面21b上,而於面積最大之電子元件21之非作用面21b上僅局部形成該第一散熱膠材31,並選擇性地預烘烤該第一散熱膠材31。之後,塗佈該第二散熱膠材32(矽膠材或UV膠)於該佈設區S中,且於面積最大之電子元件21之非作用面21b之剩餘區域上可塗佈該第二散熱膠材32(如第4A圖所示之矽膠材或UV膠)或該第三散熱膠材33(如第4B圖所示之矽膠材或UV膠),其中,該第三散熱膠材33之熱傳導係數介於該第一散熱膠材31之熱傳導係數與第二散熱膠材32之熱傳導係數之間,且該第二散熱膠材32與第三散熱膠材33之儲存模數均低於該第一散熱膠材31之儲存模數,
且若該第二散熱膠材32或該第三散熱膠材33為UV膠材時,需進行光照固化製程。最後,進行點膠作業以形成黏著層24,再將該散熱件23結合於該黏著層24上,並將該散熱件23熱壓合於該第一散熱膠材31與第二散熱膠材32(及該第三散熱膠材33)上,再烘烤該黏著層24與該第一散熱膠材31與第二散熱膠材32(及該第三散熱膠材33)。於後續製程中,植設該些導電元件25於該承載結構20下側。
In another embodiment, the
於又一實施例中,係先將該些電子元件21,21’設於該承載結構20上,再以該封裝層22包覆該些電子元件21,21’,並研磨移除該封裝層22之第二表面22b之部分材質以外露出該電子元件21,21’之非作用面21b。接著,將該第一散熱膠材31(高導熱金屬膠材)塗佈於該電子元件21,21’之非作用面21b上,並選擇性地預烘烤該第一散熱膠材31。之後,塗佈該第二散熱膠材32於該佈設區S之直線處(如第5A及5B圖所示),且於該佈設區S之轉折處(或角落處)塗佈該第三散熱膠材33(如第5A及5B圖所示),其中,該第三散熱膠材33之儲存模數低於該第二散熱膠材32之儲存模數,且若該第二散熱膠材32或該第三散熱膠材33為UV膠材時,需進行光照固化製程。最後,進行點膠作業以形成黏著層24,再將該散熱件23結合於該黏著層24上,並將該散熱件23熱壓合於該第一散熱膠材31與第二散熱膠材32(及該第三散熱膠材33)上,再烘烤該黏著層24與該第一散熱膠材31與第二散熱膠材32(及該第三散熱膠材33)。於後續製程中,植設該些導電元件25於該承載結構20下側。
In another embodiment, the
綜上所述,本發明之電子封裝件2,2’,2”,6,主要藉由至少兩種散熱膠材佈設於該多晶片封裝體2a上,以於設置該散熱件23後,即使任
一散熱膠材受壓後形成一大面積片體,其面積能小於該多晶片封裝體2a的上表面之面積。進一步地,將儲存模數較小之第二散熱膠材32(及該第三散熱膠材33)佈設於儲存模數較大之第一散熱膠材31外圍,以令該第二散熱膠材32(及該第三散熱膠材33)作為擋牆,而於設置該散熱件23後,該第一散熱膠材31因受該第二散熱膠材32(及該第三散熱膠材33)的止擋而不會擴散出該些電子元件21,21’,使該第一散熱膠材31仍保持於預定佈設處而不會相互連成一體,故相較於習知技術,本發明之電子封裝件2,2’,2”,6於該承載結構20之整體平面封裝面積愈大時,仍可避免結構應力集中於該些電子元件21,21’之角落處,進而避免後續製程中,該些電子元件21,21’或底膠211發生碎裂而導致可靠性不佳及製程良率低之問題。
In summary, the
再者,若該電子元件21之非作用面21b之面積較大時,可於該非作用面21b上圖案化形成該第一散熱膠材31,並於該第一散熱膠材31之圖案之間形成該第二散熱膠材32或該第三散熱膠材33,以令該第二散熱膠材32或該第三散熱膠材33作為分隔擋牆,如第4A及4B圖所示,使該第一散熱膠材31不會形成一大面積之膠體,故不僅能避免該電子元件21之非作用面21b發生應力不均之問題,且該電子元件21藉由增設該第二散熱膠材32或該第三散熱膠材33仍可具有良好之散熱效果。
Furthermore, if the area of the
上述實施例係用以例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修改。因此本發明之權利保護範圍,應如後述之申請專利範圍所列。 The above-mentioned embodiments are used to exemplify the principles and effects of the present invention, but not to limit the present invention. Anyone familiar with this technique can modify the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of patent application described later.
2‧‧‧電子封裝件 2‧‧‧Electronic package
2a‧‧‧多晶片封裝體 2a‧‧‧Multi-chip package
20‧‧‧承載結構 20‧‧‧Bearing structure
21,21’‧‧‧電子元件 21,21’‧‧‧Electronic components
21a‧‧‧作用面 21a‧‧‧working surface
21b‧‧‧非作用面 21b‧‧‧Inactive surface
210‧‧‧導電凸塊 210‧‧‧Conductive bump
211‧‧‧底膠 211‧‧‧ Primer
22‧‧‧封裝層 22‧‧‧Packaging layer
22a‧‧‧第一表面 22a‧‧‧First surface
22b‧‧‧第二表面 22b‧‧‧Second surface
23‧‧‧散熱件 23‧‧‧Radiator
230‧‧‧散熱體 230‧‧‧Radiator
231‧‧‧支撐腳 231‧‧‧Support foot
24‧‧‧黏著層 24‧‧‧Adhesive layer
25‧‧‧導電元件 25‧‧‧Conductive element
31‧‧‧第一散熱膠材 31‧‧‧The first heat dissipation plastic material
32‧‧‧第二散熱膠材 32‧‧‧Second Heat Dissipating Adhesive Material
S‧‧‧佈設區 S‧‧‧layout area
Claims (14)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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TW108125254A TWI733142B (en) | 2019-07-17 | 2019-07-17 | Electronic package |
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US20220359339A1 (en) * | 2021-05-05 | 2022-11-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Multi-TIM Packages and Method Forming Same |
US20220367311A1 (en) * | 2021-05-13 | 2022-11-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor package structure and method for forming the same |
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TW200810050A (en) * | 2006-08-14 | 2008-02-16 | Advanced Semiconductor Eng | Package structure and heat sink module thereof |
TWM399588U (en) * | 2010-08-05 | 2011-03-01 | Unimicron Technology Corp | wiring board |
TW201507075A (en) * | 2013-08-12 | 2015-02-16 | 矽品精密工業股份有限公司 | Semiconductor package and manufacturing method thereof |
TWI559468B (en) * | 2015-05-29 | 2016-11-21 | 矽品精密工業股份有限公司 | Electronic package structure and its carrier member |
TWI612638B (en) * | 2017-01-25 | 2018-01-21 | 矽品精密工業股份有限公司 | Electronic package and method for fabricating the same |
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TW200810050A (en) * | 2006-08-14 | 2008-02-16 | Advanced Semiconductor Eng | Package structure and heat sink module thereof |
TWM399588U (en) * | 2010-08-05 | 2011-03-01 | Unimicron Technology Corp | wiring board |
TW201507075A (en) * | 2013-08-12 | 2015-02-16 | 矽品精密工業股份有限公司 | Semiconductor package and manufacturing method thereof |
TWI559468B (en) * | 2015-05-29 | 2016-11-21 | 矽品精密工業股份有限公司 | Electronic package structure and its carrier member |
TWI612638B (en) * | 2017-01-25 | 2018-01-21 | 矽品精密工業股份有限公司 | Electronic package and method for fabricating the same |
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