TW202035330A - Electronic device production method and glass substrate - Google Patents

Electronic device production method and glass substrate Download PDF

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TW202035330A
TW202035330A TW108143989A TW108143989A TW202035330A TW 202035330 A TW202035330 A TW 202035330A TW 108143989 A TW108143989 A TW 108143989A TW 108143989 A TW108143989 A TW 108143989A TW 202035330 A TW202035330 A TW 202035330A
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glass substrate
glass
protective film
film
liquid crystal
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TW108143989A
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稲山尚利
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日商日本電氣硝子股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/25Oxides by deposition from the liquid phase
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

This production method for an electronic device 1 having glass substrates GS1, GS2, comprises a preparation step S1 of preparing a glass substrate GS1 having formed on one surface GS1b of the glass substrate GS1, a protective film 12 protecting the one surface GS1b, and a production step S2 of using the glass substrate GS1 to produce the electronic device 1. In the production step S2, the electronic device 1 is produced by supporting the side on which the protective film 12 of the glass substrate GS1 has been formed.

Description

電子元件的製造方法以及玻璃基板Manufacturing method of electronic component and glass substrate

本發明是有關於一種電子元件(device)的製造方法以及玻璃基板,尤其是有關於一種用於防止製造時玻璃基板的強度下降的技術。The present invention relates to a method for manufacturing an electronic device (device) and a glass substrate, and more particularly to a technology for preventing the strength of the glass substrate from decreasing during manufacturing.

近年來,就省空間化的觀點而言,普及有液晶顯示器(liquid crystal display)、有機電致發光(Electroluminescence,EL)顯示器等平板顯示器(flat panel display)或薄膜電池、觸控面板(touch panel)、有機EL照明等各種電子元件。對於該些電子元件,要求進一步薄型化。為推進所述薄型化,必須使電子元件中所使用的玻璃基板更加薄型化。In recent years, from the viewpoint of space saving, flat panel displays such as liquid crystal displays (liquid crystal displays) and organic electroluminescence (EL) displays, thin-film batteries, and touch panels have become popular. ), various electronic components such as organic EL lighting. For these electronic components, further thinning is required. In order to advance the thinning, it is necessary to make the glass substrates used in electronic components thinner.

然而,在如所述般使構成電子元件的玻璃基板薄化時,玻璃基板的強度會大幅下降,因此存在如下等問題:在落下所產生的衝擊或按壓所產生的彎曲負荷下以玻璃基板為起點導致電子元件破損的擔憂升高。However, when the glass substrate constituting the electronic component is thinned as described above, the strength of the glass substrate is greatly reduced. Therefore, there are problems such as the following: The glass substrate is used as a substrate under the impact of falling or bending load caused by pressing. There is a growing concern that the starting point causes damage to electronic components.

因此,例如專利文獻1中,揭示有設有補強結構的液晶顯示面板的製造方法。所述製造方法按以下順序進行。首先,在兩片玻璃基板的彼此相對向的其中一個表面分別形成規定的積層結構,在該狀態下將所述兩片玻璃基板貼合,並且在貼合的兩片玻璃基板之間封入液晶,藉此形成液晶顯示面板。然後,在指向液晶顯示面板的外側的各玻璃基板的另一個表面,形成由矽系材料形成的硬塗(hard coat)層,藉此製造在外側設有補強結構的液晶顯示面板。 [現有技術文獻] [專利文獻]Therefore, for example, Patent Document 1 discloses a method of manufacturing a liquid crystal display panel provided with a reinforcing structure. The manufacturing method is performed in the following order. First, a predetermined layered structure is formed on one of the two glass substrates facing each other. In this state, the two glass substrates are bonded together, and liquid crystal is sealed between the two bonded glass substrates. Thus, a liquid crystal display panel is formed. Then, on the other surface of each glass substrate directed to the outside of the liquid crystal display panel, a hard coat layer formed of a silicon-based material is formed, thereby manufacturing a liquid crystal display panel provided with a reinforcing structure on the outside. [Prior Art Literature] [Patent Literature]

專利文獻1:日本專利特開2008-262160號公報Patent Document 1: Japanese Patent Laid-Open No. 2008-262160

[發明所欲解決之課題] 此處,實際上對電子元件的製造步驟的玻璃基板的強度下降的原因進行調查,結果瞭解到不僅是玻璃基板的薄壁化,且其製造過程的玻璃基板的操作存在問題。舉出液晶顯示面板的製造步驟為例而言,此種玻璃基板在結束玻璃基板本身的加工之後,在下側表面的至少一部分由規定的搬送裝置支持的狀態下向用於製作液晶面板的步驟搬送。另外,在玻璃基板的貼合步驟等使用所述玻璃基板來製作液晶顯示面板的步驟中,在下側的表面受到支持的狀態下進行玻璃基板的貼合。因此,瞭解到在搬送時或面板製作時,玻璃基板的被支持面(下側表面)與支持玻璃基板的構件等之間會產生摩擦,因該摩擦而對被支持面造成損傷。如此,即便應用專利文獻1中記載的製造方法,亦無法避免在設置補強結構之前對玻璃基板的表面造成損傷,因此需要新的對策。[The problem to be solved by the invention] Here, in fact, the cause of the decrease in the strength of the glass substrate in the manufacturing process of the electronic component was investigated. As a result, it was found that not only the thinning of the glass substrate, but also the handling of the glass substrate in the manufacturing process had problems. Take the manufacturing process of a liquid crystal display panel as an example. After finishing the processing of the glass substrate itself, the glass substrate is conveyed to the process for manufacturing the liquid crystal panel with at least a part of the lower surface supported by a predetermined conveying device. . In addition, in the step of using the glass substrate to produce a liquid crystal display panel such as the bonding step of the glass substrate, the bonding of the glass substrate is performed in a state where the lower surface is supported. Therefore, it is understood that friction occurs between the supported surface (lower surface) of the glass substrate and the member supporting the glass substrate during transportation or panel production, and the supported surface is damaged due to the friction. In this way, even if the manufacturing method described in Patent Document 1 is applied, it is unavoidable that the surface of the glass substrate is damaged before the reinforcement structure is provided. Therefore, a new countermeasure is required.

鑑於以上情況,應解決的技術課題在於在電子元件的製造時防止或抑制對玻璃基板的表面造成損傷的情況,從而確保電子元件的強度。In view of the above, the technical problem to be solved is to prevent or suppress damage to the surface of the glass substrate during the manufacture of the electronic component, thereby ensuring the strength of the electronic component.

[解決課題之手段] 所述課題的解決藉由本發明的電子元件的製造方法而實現。即,該製造方法是電子元件的製造方法,包括:準備步驟,準備玻璃基板;以及製作步驟,使用玻璃基板來製作電子元件;所述製造方法中,在準備步驟中,準備形成有保護其中一個表面的保護膜的玻璃基板作為玻璃基板,在製作步驟中,支持玻璃基板的形成有保護膜的一側而製作電子元件。[Means to solve the problem] The above-mentioned problem is solved by the manufacturing method of the electronic component of the present invention. That is, the manufacturing method is a manufacturing method of electronic components, including: a preparation step of preparing a glass substrate; and a manufacturing step of using the glass substrate to manufacture electronic components; in the manufacturing method, in the preparation step, one of the protective devices is prepared The glass substrate of the protective film on the surface is used as a glass substrate, and in the production step, the side of the glass substrate on which the protective film is formed is supported to produce an electronic component.

如上所述,本發明的電子元件的製造方法中,準備帶保護膜的玻璃基板,該帶保護膜的玻璃基板預先在玻璃基板的其中一個表面形成有保護其中一個表面的保護膜,並且支持該帶保護膜的玻璃基板的形成有保護膜的一側而製作電子元件。若如此,則即便是在玻璃基板的搬送時或使用玻璃基板的電子元件的製作步驟時玻璃基板與支持構件之間產生摩擦的情況,亦可藉由保護膜防止或抑制對玻璃基板表面造成損傷。藉此,可確保包括該玻璃基板的電子元件的強度(例如彎曲強度)。As described above, in the method of manufacturing an electronic component of the present invention, a glass substrate with a protective film is prepared. The glass substrate with a protective film is preliminarily formed with a protective film to protect one of the surfaces of the glass substrate and supports the The protective film is formed on the side of the glass substrate with a protective film to produce an electronic component. If so, even if friction occurs between the glass substrate and the supporting member during the transportation of the glass substrate or the production process of the electronic component using the glass substrate, the protective film can prevent or suppress damage to the surface of the glass substrate. . Thereby, the strength (for example, bending strength) of the electronic component including the glass substrate can be ensured.

另外,本發明的電子元件的製造方法中,保護膜可為呈現較玻璃基板低的靜摩擦係數的低摩擦膜。In addition, in the method of manufacturing an electronic component of the present invention, the protective film may be a low-friction film exhibiting a static friction coefficient lower than that of a glass substrate.

如上所述,藉由將保護膜設為呈現較玻璃基板低的靜摩擦係數的低摩擦膜,在搬送時或面板製作時可使玻璃基板更易滑動。藉此,可更有效地抑制對玻璃基板造成損傷。As described above, by setting the protective film as a low-friction film exhibiting a lower static friction coefficient than the glass substrate, the glass substrate can be made to slide more easily during transportation or during panel production. Thereby, damage to the glass substrate can be suppressed more effectively.

另外,在保護膜為低摩擦膜時,本發明的電子元件的製造方法中,低摩擦膜的靜摩擦係數可為0.42以下。In addition, when the protective film is a low-friction film, the static friction coefficient of the low-friction film may be 0.42 or less in the method for manufacturing an electronic component of the present invention.

具體而言,藉由使用靜摩擦係數為0.42以下的保護膜(低摩擦膜),可確保玻璃基板表面與對象面的充分滑動,因此可充分抑制對玻璃基板的表面造成損傷,從而確保電子元件所需的強度。另外,所述靜摩擦係數是指依照日本工業標準(Japanese Industrial Standard,JIS)K 7125:1999,對成膜於玻璃基板的保護膜與三共理化學股份有限公司製造的包裝膜(wrapping film)LWFS-30#4000之間的靜摩擦係數進行測定所得的值。Specifically, by using a protective film (low-friction film) with a static friction coefficient of 0.42 or less, sufficient sliding between the surface of the glass substrate and the target surface can be ensured. Therefore, damage to the surface of the glass substrate can be sufficiently suppressed, thereby ensuring the cost of electronic components. Required strength. In addition, the static friction coefficient refers to the protective film formed on the glass substrate and the wrapping film (wrapping film) LWFS- manufactured by Sankyo Chemical Co., Ltd. in accordance with Japanese Industrial Standard (JIS) K 7125: 1999. The static friction coefficient between 30#4000 is measured.

另外,所述課題的解決亦藉由本發明的玻璃基板而實現。即,該玻璃基板是電子元件用的玻璃基板,其中在非保證面形成有保護非保證面的保護膜。In addition, the solution of the above-mentioned problem is also achieved by the glass substrate of the present invention. That is, the glass substrate is a glass substrate for electronic components, in which a protective film for protecting the non-guaranteed surface is formed on the non-guaranteed surface.

如上所述,本發明的玻璃基板中,在其非保證面形成有保護非保證面的保護膜。通常,對於此種玻璃基板,儘可能使應保證所需品質的面(保證面)為非接觸狀態來進行玻璃基板的搬送、加工等各步驟。此時,位於保證面的背面側的非保證面成為搬送時或加工等各步驟時的被接觸面。藉此,若為該非保證面經保護膜保護的玻璃基板,則即便是在玻璃基板的搬送時或電子元件的製作步驟時玻璃基板的非保證面與接觸於該非保證面的構件之間產生摩擦的情況,亦可藉由保護膜防止或抑制對玻璃基板表面造成損傷。藉此,可確保包括該玻璃基板的電子元件的強度。As described above, in the glass substrate of the present invention, a protective film for protecting the non-guaranteed surface is formed on the non-guaranteed surface. Generally, for such a glass substrate, the surface (guaranteed surface) for which the required quality should be guaranteed is as non-contact as possible, and each step of the glass substrate is conveyed and processed. At this time, the non-guaranteed surface located on the back side of the guaranteed surface becomes the contacted surface at the time of transportation or processing. Therefore, if the non-guaranteed surface is a glass substrate protected by a protective film, friction will occur between the non-guaranteed surface of the glass substrate and the member contacting the non-guaranteed surface even during the transportation of the glass substrate or the production step of electronic components. In the case of, the protective film can also be used to prevent or suppress damage to the surface of the glass substrate. Thereby, the strength of the electronic component including the glass substrate can be ensured.

[發明的效果] 如以上所述,根據本發明的電子元件的製造方法以及玻璃基板,可防止或抑制在電子元件的製造時對玻璃基板的表面造成損傷的情況,從而確保電子元件的強度。[Effects of the invention] As described above, according to the method for manufacturing an electronic component and the glass substrate of the present invention, it is possible to prevent or suppress damage to the surface of the glass substrate during the manufacture of the electronic component, thereby ensuring the strength of the electronic component.

以下,對本發明的一實施方式進行說明。Hereinafter, an embodiment of the present invention will be described.

圖1表示作為電子元件的一例的液晶顯示面板1,該電子元件成為本發明的應用對象。該液晶顯示面板1包括:第一玻璃基板GS1;第二玻璃基板GS2;間隔件(spacer)SP;液晶層2,配設於第一玻璃基板GS1與第二玻璃基板GS2之間;第一積層部3,配設於第一玻璃基板GS1與液晶層2之間;以及第二積層部4,配設於第二玻璃基板GS2與液晶層2之間。FIG. 1 shows a liquid crystal display panel 1 as an example of an electronic component, which is an application target of the present invention. The liquid crystal display panel 1 includes: a first glass substrate GS1; a second glass substrate GS2; a spacer SP; a liquid crystal layer 2, arranged between the first glass substrate GS1 and the second glass substrate GS2; a first build-up layer The part 3 is arranged between the first glass substrate GS1 and the liquid crystal layer 2; and the second build-up part 4 is arranged between the second glass substrate GS2 and the liquid crystal layer 2.

第一玻璃基板GS1及第二玻璃基板GS2的形狀在本實施方式中為矩形狀,但當然並不限定於該形狀。作為各玻璃基板GS1、玻璃基板GS2的材質,使用矽酸鹽玻璃、二氧化矽玻璃,較佳為使用硼矽酸玻璃、鈉鈣玻璃、鋁矽酸鹽玻璃、化學強化玻璃,最佳為使用無鹼玻璃。藉由使用無鹼玻璃作為各玻璃基板GS1、玻璃基板GS2,可成為化學穩定的玻璃。此處,所謂無鹼玻璃是實質上不含鹼成分(鹼金屬氧化物)的玻璃,具體而言是鹼成分的重量比為3000 ppm以下的玻璃。本發明的鹼成分的重量比較佳為1000 ppm以下,更佳為500 ppm以下,最佳為300 ppm以下。The shapes of the first glass substrate GS1 and the second glass substrate GS2 are rectangular in this embodiment, but of course they are not limited to this shape. As the material of each glass substrate GS1 and glass substrate GS2, silicate glass and silica glass are used, preferably borosilicate glass, soda lime glass, aluminosilicate glass, chemically strengthened glass, and most preferably used Alkali-free glass. By using alkali-free glass as each of the glass substrate GS1 and the glass substrate GS2, it can become a chemically stable glass. Here, the so-called alkali-free glass is a glass that does not substantially contain an alkali component (alkali metal oxide), and specifically refers to a glass in which the weight ratio of the alkali component is 3000 ppm or less. The weight ratio of the alkali component of the present invention is preferably 1000 ppm or less, more preferably 500 ppm or less, and most preferably 300 ppm or less.

各玻璃基板GS1、玻璃基板GS2可藉由公知的浮式法(float method)、碾平法(roll out method)、流孔下引法(slot down draw method)、再曳引法(redraw method)等而成形,但較佳為藉由溢流下拉法(overflow down draw method)而成形。The glass substrate GS1 and the glass substrate GS2 can be made by the well-known float method, roll out method, slot down draw method, and redraw method. It is formed by the like, but it is preferably formed by an overflow down draw method.

各玻璃基板GS1、玻璃基板GS2的厚度設為1000 μm以下,較佳為10 μm以上且700 μm以下,更佳為20 μm以上且500 μm以下,最佳為200 μm以上且500 μm以下。The thickness of each glass substrate GS1 and glass substrate GS2 is set to 1000 μm or less, preferably 10 μm or more and 700 μm or less, more preferably 20 μm or more and 500 μm or less, and most preferably 200 μm or more and 500 μm or less.

第一積層部3形成於第一玻璃基板GS1的內側表面GS1a(此處所謂的內側是指液晶顯示面板1的內側),且例如包括包含透明導電膜TCF的第一電極層5(畫素電極)以及積層於第一電極層5上的第一配向膜6。The first build-up portion 3 is formed on the inner surface GS1a of the first glass substrate GS1 (the inner side here refers to the inner side of the liquid crystal display panel 1), and includes, for example, a first electrode layer 5 (pixel electrode) including a transparent conductive film TCF ) And a first alignment film 6 laminated on the first electrode layer 5.

作為第一電極層5(透明導電膜TCF)的材質,只要具有透光性及導電性,則並無特別限定。第一電極層5例如由摻銦氧化錫(Indium Tin Oxide,ITO)、摻氟氧化錫(Fluorine doped Tin Oxide,FTO)、氧化銦鋅(Indium Zinc Oxide,IZO)、摻鋁氧化鋅(Aluminum doped Zinc Oxide,AZO)等形成。The material of the first electrode layer 5 (transparent conductive film TCF) is not particularly limited as long as it has translucency and conductivity. The first electrode layer 5 is made of, for example, indium tin oxide (ITO), fluorine doped tin oxide (FTO), indium zinc oxide (IZO), aluminum doped zinc oxide (Aluminum doped Zinc Oxide, AZO) and so on.

第一配向膜6為透明膜,例如由經擦摩處理形成有微小槽部的聚醯亞胺膜及其他材料形成。液晶層2中所含的液晶分子可在第一配向膜6的作用下以預傾角(pretilt angle)配向。The first alignment film 6 is a transparent film, and is formed of, for example, a polyimide film having micro grooves formed by rubbing treatment and other materials. The liquid crystal molecules contained in the liquid crystal layer 2 may be aligned at a pretilt angle under the action of the first alignment film 6.

第二積層部4形成於第二玻璃基板GS2的內側表面GS2a,且例如包括彩色濾光片層(color filter layer)7、包含透明導電膜TCF的第二電極層8(相向電極)、以及第二配向膜9。彩色濾光片層7由黑矩陣以及多個著色畫素形成。第二電極層8的材質、厚度及薄片電阻與第一電極層5相同。第二配向膜9的構成、材質及厚度與第一配向膜6相同。The second build-up portion 4 is formed on the inner surface GS2a of the second glass substrate GS2, and includes, for example, a color filter layer (color filter layer) 7, a second electrode layer 8 (opposing electrode) including a transparent conductive film TCF, and a first Two alignment film 9. The color filter layer 7 is formed of a black matrix and a plurality of colored pixels. The material, thickness and sheet resistance of the second electrode layer 8 are the same as those of the first electrode layer 5. The structure, material, and thickness of the second alignment film 9 are the same as those of the first alignment film 6.

密封部S是以包圍液晶層2的周圍的方式形成為框形狀的密封構件。此處,密封部S由紫外線(Ultraviolet,UV)固化樹脂或熱固性樹脂等密封材料形成,但當然並不限定於該些任何材質。另外,間隔件SP例如為球狀,且包含樹脂或二氧化矽。藉由該間隔件SP以分散於液晶層2的方式配置,第一玻璃基板GS1與第二玻璃基板GS2之間隔維持固定。The sealing portion S is a sealing member formed in a frame shape so as to surround the periphery of the liquid crystal layer 2. Here, the sealing portion S is formed of a sealing material such as ultraviolet (Ultraviolet, UV) curable resin or thermosetting resin, but of course it is not limited to any of these materials. In addition, the spacer SP has a spherical shape, for example, and contains resin or silicon dioxide. With the spacers SP arranged in a manner dispersed in the liquid crystal layer 2, the interval between the first glass substrate GS1 and the second glass substrate GS2 is maintained constant.

液晶層2包含向列型液晶等。液晶層2形成於由第一玻璃基板GS1、第二玻璃基板GS2以及密封部S所劃分的空間。The liquid crystal layer 2 contains nematic liquid crystals and the like. The liquid crystal layer 2 is formed in the space partitioned by the first glass substrate GS1, the second glass substrate GS2, and the sealing portion S.

於第一玻璃基板GS1的最外側配設有第一偏光板10,並且於第二玻璃基板GS2的最外側配設有第二偏光板11。另外,雖省略圖示,但可除該些偏光板10、偏光板11以外亦配設有相位差板。The first polarizing plate 10 is arranged on the outermost side of the first glass substrate GS1, and the second polarizing plate 11 is arranged on the outermost side of the second glass substrate GS2. In addition, although illustration is omitted, a retardation plate may be provided in addition to the polarizing plate 10 and the polarizing plate 11.

另外,本實施方式中,在第一玻璃基板GS1的與形成有第一電極層5的一側為相反側的表面(即,外側表面GS1b),形成有保護該外側表面GS1b的保護膜12。此時,保護膜12配設於第一玻璃基板GS1與第一偏光板10之間。In addition, in this embodiment, a protective film 12 for protecting the outer surface GS1b is formed on the surface of the first glass substrate GS1 on the opposite side to the side on which the first electrode layer 5 is formed (ie, the outer surface GS1b). At this time, the protective film 12 is arranged between the first glass substrate GS1 and the first polarizing plate 10.

此處,保護膜12以呈現較第一玻璃基板GS1低的摩擦係數(靜摩擦係數、動摩擦係數)的方式構成(低摩擦膜)。具體而言,由較玻璃低的摩擦係數的材料形成。Here, the protective film 12 is configured to exhibit a lower friction coefficient (static friction coefficient, dynamic friction coefficient) than the first glass substrate GS1 (low friction film). Specifically, it is formed of a material with a lower friction coefficient than glass.

此處,在自摩擦係數的方面選定所述構成的保護膜12(尤其是低摩擦膜的情況)時,例如保護膜12的靜摩擦係數宜呈現0.42以下,較佳為呈現0.35以下,進而較佳為呈現0.30以下。作為呈現此種摩擦係數的材料,可例示氟系材料。Here, when the protective film 12 of the structure is selected in terms of the self-friction coefficient (especially in the case of a low-friction film), for example, the static friction coefficient of the protective film 12 is preferably 0.42 or less, preferably 0.35 or less, and more preferably To show below 0.30. As a material exhibiting such a coefficient of friction, a fluorine-based material can be exemplified.

另一方面,在自特性、性能的方面選定所述構成的保護膜12時,例如保護膜12可為功能性膜。此處所謂的功能性膜中,包含對形成保護膜12而成的玻璃基板GS1賦予如下各種性能的薄膜,即例如:抗反射功能(Anti-reflection,AR)、防指紋等污染的功能(Anti-fingerprint,AF)、防眩光(防眩)功能(Anti-glare,AG)、紅外線截止(Infrared cut)功能(IR)、導電性賦予功能、冷光鏡(cold mirror)功能、紫外線截止功能(UV)等。其中,例如就成膜效率的觀點而言,適宜為可利用噴霧(spray)成膜且具有防污功能的薄膜(防污膜)。On the other hand, when the protective film 12 of the above-mentioned configuration is selected in terms of characteristics and performance, for example, the protective film 12 may be a functional film. The functional film referred to here includes a film that imparts various properties to the glass substrate GS1 formed with the protective film 12, such as anti-reflection (AR) and anti-fingerprint contamination (Anti-reflection). -fingerprint, AF), anti-glare (anti-glare) function (Anti-glare, AG), infrared cut function (IR), conductivity imparting function, cold mirror function, ultraviolet cut function (UV) )Wait. Among them, for example, from the viewpoint of film formation efficiency, a film (anti-fouling film) that can be formed by spraying and has an antifouling function is suitable.

或者,在自材質的方面選定所述構成的保護膜12時,保護膜12可為由有機材料形成的薄膜(有機膜),亦可為由SiO2 、Nb2 O5 、SiNx、ITO等無機材料形成的薄膜(無機膜)。Alternatively, when the protective film 12 of the above-mentioned composition is selected in terms of its material, the protective film 12 may be a thin film (organic film) formed of an organic material, or may be an inorganic material such as SiO 2 , Nb 2 O 5 , SiNx, and ITO. Thin film (inorganic film) formed by material.

以下,對製造所述構成的液晶顯示面板1的方法進行說明。如圖2所示,本實施方式的液晶顯示面板1的製造方法包括:準備步驟S1,準備規定的玻璃基板;以及製作步驟S2,使用所述規定的玻璃基板來製作液晶顯示面板1。Hereinafter, the method of manufacturing the liquid crystal display panel 1 of the above-mentioned structure is demonstrated. As shown in FIG. 2, the manufacturing method of the liquid crystal display panel 1 of the present embodiment includes: a preparation step S1 of preparing a predetermined glass substrate; and a manufacturing step S2 of using the predetermined glass substrate to manufacture the liquid crystal display panel 1.

(S1)準備步驟 如圖3所示,準備步驟S1包括:獲取步驟S3,獲取第一母玻璃GM1及第二母玻璃GM2;以及保護膜形成步驟S4,在所獲取的各母玻璃GM1、母玻璃GM2的至少一者(本實施方式中為第一母玻璃GM1)形成保護膜12。(S1) Preparation steps As shown in FIG. 3, the preparation step S1 includes: obtaining step S3, obtaining first mother glass GM1 and second mother glass GM2; and protective film forming step S4, in which at least one of the obtained mother glass GM1 and mother glass GM2 is obtained Those (in this embodiment, the first mother glass GM1) form the protective film 12.

(S3)母玻璃獲取步驟 該步驟中,獲取規定形狀及規定尺寸的第一母玻璃GM1(參照圖4A)及第二母玻璃GM2(參照圖4B)。此處,第一母玻璃GM1及第二母玻璃GM2均為成為圖1所示的第一玻璃基板GS1及第二玻璃基板GS2的玻璃基板。換言之,圖1所示的第一玻璃基板GS1及第二玻璃基板GS2是在貼合之後(後述的組裝步驟S6後),藉由所謂的多面加工自第一母玻璃GM1及第二母玻璃GM2切割出的玻璃基板(參照圖4A、圖4B中的點鏈線所包圍的區域)。藉此,各母玻璃GM1、母玻璃GM2的厚度尺寸、材質(組成)及成形方法與所述玻璃基板GS1、玻璃基板GS2的厚度尺寸、材質及成形方法基本上相同。此時,分別在母玻璃GM1的其中一個表面GM1a形成第一積層部3、在母玻璃GM2的其中一個表面GM2a形成第二積層部4,且在第一母玻璃GM1的另一個表面GM1b形成有保護膜12。另外,圖4A、圖4B中的點鏈線是後述的切割步驟S7的切斷預定線。圖7A~圖9B中的點鏈線亦同為切斷預定線。(S3) Steps for obtaining mother glass In this step, the first mother glass GM1 (refer to FIG. 4A) and the second mother glass GM2 (refer to FIG. 4B) of a predetermined shape and a predetermined size are obtained. Here, both the first mother glass GM1 and the second mother glass GM2 are glass substrates that become the first glass substrate GS1 and the second glass substrate GS2 shown in FIG. 1. In other words, the first glass substrate GS1 and the second glass substrate GS2 shown in FIG. 1 are processed from the first mother glass GM1 and the second mother glass GM2 by the so-called multi-face processing after bonding (after the assembly step S6 described later). The cut glass substrate (refer to the area surrounded by the dotted chain line in Figure 4A and Figure 4B). Thereby, the thickness dimension, material (composition) and forming method of each mother glass GM1 and mother glass GM2 are basically the same as the thickness dimension, material and forming method of the glass substrate GS1 and the glass substrate GS2. At this time, the first laminated portion 3 is formed on one surface GM1a of the mother glass GM1, the second laminated portion 4 is formed on one surface GM2a of the mother glass GM2, and the other surface GM1b of the first mother glass GM1 is formed with Protective film 12. In addition, the dot chain line in FIG. 4A and FIG. 4B is the planned cutting line of the cutting step S7 mentioned later. The dot chain lines in FIGS. 7A to 9B are also the planned cutting lines.

(S4)保護膜形成步驟 該步驟中,在形成第一積層部3(參照圖1)的第一母玻璃GM1的與其中一個表面GM1a為相反側的表面(另一個表面GM1b),形成保護膜12。此處,保護膜12的形成方法為任意,可根據保護膜12的種類適當選擇公知的成膜方法。例如在利用AF塗層(coat)等防污膜構成保護膜12時,藉由噴霧等方法將保護膜12成膜於另一個表面GM1b的整個面。藉此,如圖5所示,獲得在另一個表面GM1b形成有保護膜12的狀態的第一母玻璃GM1(帶保護膜的玻璃基板)。此處,第一母玻璃GM1的另一個表面GM1b是成為切割目標的第一玻璃基板GS1的外側表面GS1b(此處所謂的外側是指液晶顯示面板1的外側)。另外,該外側表面GS1b亦為非保證面。(S4) Protective film forming step In this step, the protective film 12 is formed on the surface (the other surface GM1b) opposite to the one surface GM1a of the first mother glass GM1 forming the first build-up portion 3 (see FIG. 1). Here, the method of forming the protective film 12 is arbitrary, and a known film-forming method can be appropriately selected according to the type of the protective film 12. For example, when the protective film 12 is formed of an antifouling film such as an AF coating (coat), the protective film 12 is formed on the entire surface of the other surface GM1b by a method such as spraying. Thereby, as shown in FIG. 5, the 1st mother glass GM1 (glass substrate with a protective film) in the state in which the protective film 12 was formed in the other surface GM1b was obtained. Here, the other surface GM1b of the first mother glass GM1 is the outer surface GS1b of the first glass substrate GS1 that is the cutting target (the outer side here refers to the outer side of the liquid crystal display panel 1). In addition, the outer surface GS1b is also a non-guaranteed surface.

(S2)製作步驟 液晶顯示面板1的製作步驟S2包括均作為製造相關處理步驟的積層部形成步驟S5、組裝步驟S6以及切割步驟S7(參照圖6)。(S2) Production steps The manufacturing step S2 of the liquid crystal display panel 1 includes a build-up portion forming step S5, an assembling step S6, and a cutting step S7 (see FIG. 6), which are all manufacturing-related processing steps.

(S5)積層部形成步驟 該步驟中,在形成有保護膜12的第一母玻璃GM1的其中一個表面GM1a側形成第一積層部3,並且在第二母玻璃GM2的其中一個表面GM2a形成第二積層部4(參照圖7A及圖7B)。本實施方式中,包含透明導電膜TCF的第一電極層5以及第一配向膜6作為第一積層部3形成於第一母玻璃GM1的其中一個表面GM1a上。另外,彩色濾光片層7、包含透明導電膜TCF的第二電極層8以及第二配向膜9作為第二積層部4形成於第二母玻璃GM2的其中一個表面GM2a上。(S5) Step of forming build-up portion In this step, the first layered portion 3 is formed on one surface GM1a side of the first mother glass GM1 on which the protective film 12 is formed, and the second layered portion 4 is formed on one surface GM2a of the second mother glass GM2 (refer to FIG. 7A and Figure 7B). In this embodiment, the first electrode layer 5 including the transparent conductive film TCF and the first alignment film 6 are formed as the first layered portion 3 on one of the surfaces GM1a of the first mother glass GM1. In addition, the color filter layer 7, the second electrode layer 8 including the transparent conductive film TCF, and the second alignment film 9 are formed as the second layered portion 4 on one of the surfaces GM2a of the second mother glass GM2.

此處,若對第一積層部3在第一母玻璃GM1的具體形成順序加以敍述,則首先,在形成有保護膜12的第一母玻璃GM1的其中一個表面GM1a形成透明導電膜TCF。其次,在透明導電膜TCF上塗佈光阻劑(光感光性樹脂)而形成抗蝕層之後,在抗蝕層覆蓋光罩且照射紫外線等光,藉此將形成於光罩的規定形狀的圖案轉印於抗蝕層。然後,例如在使用正型光阻劑時,供給抗蝕劑顯影液而去除抗蝕層的曝光部分,並且實施蝕刻處理,藉此去除抗蝕層及透明導電膜TCF的不要部分,而在透明導電膜TCF形成與光罩對應的圖案。然後,藉由將殘存於透明導電膜TCF上的抗蝕層去除,而形成包含透明導電膜TCF且具有規定的電極圖案的第一電極層5(參照圖8A)。之後,以被覆第一電極層5的方式形成第一配向膜6,藉此獲得如下狀態的第一母玻璃GM1,即,於其中一個表面GM1a上形成有第一電極層5由第一配向膜6被覆而成的第一積層部3(參照圖7A及圖8A)。以下,亦將該狀態的第一母玻璃GM1稱為第一積層體LM1。Here, if the specific formation procedure of the first laminated part 3 on the first mother glass GM1 is described, first, a transparent conductive film TCF is formed on one surface GM1a of the first mother glass GM1 on which the protective film 12 is formed. Next, after coating a photoresist (photosensitive resin) on the transparent conductive film TCF to form a resist layer, the resist layer covers the photomask and irradiates the photomask with light such as ultraviolet rays, thereby forming a predetermined shape on the photomask. The pattern is transferred to the resist layer. Then, when a positive photoresist is used, for example, a resist developer is supplied to remove the exposed part of the resist layer, and an etching process is performed to remove unnecessary parts of the resist layer and the transparent conductive film TCF, and the transparent conductive film The conductive film TCF forms a pattern corresponding to the photomask. Then, by removing the resist layer remaining on the transparent conductive film TCF, the first electrode layer 5 including the transparent conductive film TCF and having a predetermined electrode pattern is formed (see FIG. 8A). Afterwards, the first alignment film 6 is formed to cover the first electrode layer 5, thereby obtaining the first mother glass GM1 in a state in which the first electrode layer 5 is formed by the first alignment film on one surface GM1a 6-covered first build-up portion 3 (refer to FIGS. 7A and 8A). Hereinafter, the first mother glass GM1 in this state is also referred to as a first laminate LM1.

另外,對第二積層部4在第二母玻璃GM2的形成順序進行敍述,首先,在第二母玻璃GM2的其中一個表面GM2a形成例如黑矩陣之後,重覆彩色抗蝕劑塗佈步驟、曝光步驟、顯影及烘焙步驟,藉此形成與多色(RGB)對應的彩色濾光片層7。然後,在彩色濾光片層7的表面形成透明導電膜TCF之後,視需要實施與第一母玻璃GM1相同的圖案成形(patterning)處理,藉此形成包含透明導電膜TCF且具有規定的電極圖案的第二電極層8(各電極的延伸方向在第一電極層5與第二電極層8正交)。之後,藉由以被覆第二電極層8的方式形成第二配向膜9,而獲得如下狀態的第二母玻璃GM2,即,在其中一個表面GM2a上形成有第二電極層8由第二配向膜9被覆而成的第二積層部4(參照圖7B及圖8B)。以下,亦將該狀態的第二母玻璃GM2稱為第二積層體LM2。In addition, the procedure for forming the second build-up portion 4 on the second mother glass GM2 will be described. First, after forming, for example, a black matrix on one surface GM2a of the second mother glass GM2, the color resist coating step and exposure are repeated. Steps, developing and baking steps, thereby forming a color filter layer 7 corresponding to multiple colors (RGB). Then, after the transparent conductive film TCF is formed on the surface of the color filter layer 7, if necessary, the same patterning process as that of the first mother glass GM1 is performed, thereby forming the transparent conductive film TCF and having a predetermined electrode pattern The second electrode layer 8 (the extending direction of each electrode is orthogonal to the first electrode layer 5 and the second electrode layer 8). After that, by forming the second alignment film 9 to cover the second electrode layer 8, the second mother glass GM2 is obtained in a state in which the second electrode layer 8 is formed on one surface GM2a by the second alignment The second build-up portion 4 covered with the film 9 (see FIGS. 7B and 8B). Hereinafter, the second mother glass GM2 in this state is also referred to as a second laminate LM2.

另外,在液晶顯示面板1為主動矩陣驅動型而非被動矩陣驅動型時,在第一電極層5,藉由光微影法及其他方法而形成源極、閘極、汲極、絕緣層、開關部件(薄膜電晶體(Thin Film Transistor,TFT)等)。In addition, when the liquid crystal display panel 1 is an active matrix driving type instead of a passive matrix driving type, the first electrode layer 5 is formed by photolithography and other methods to form source, gate, drain, insulating layers, Switch components (Thin Film Transistor (TFT), etc.).

另外,透明導電膜TCF的形成方法為任意,例如可藉由濺鍍法(sputtering)、蒸鍍法、化學氣相沈積(Chemical Vapor Deposition,CVD)法等公知的成膜法而形成。另外,可形成的透明導電膜TCF的種類亦為任意,作為其一例,可列舉ITO膜。In addition, the method of forming the transparent conductive film TCF is arbitrary. For example, it can be formed by a known film forming method such as sputtering, vapor deposition, and chemical vapor deposition (Chemical Vapor Deposition, CVD). In addition, the type of transparent conductive film TCF that can be formed is also arbitrary, and an ITO film can be cited as an example.

另外,第一配向膜6及第二配向膜9的形成方法亦為任意,例如可藉由旋塗法等公知的方法而形成。另外,亦可對各配向膜6、配向膜9實施擦摩處理。雖省略圖示,但藉由該擦摩處理而在各配向膜6、配向膜9的表面形成無數微小的槽部。In addition, the method of forming the first alignment film 6 and the second alignment film 9 is also arbitrary, and for example, they can be formed by a known method such as a spin coating method. In addition, rubbing treatment may be performed on each alignment film 6 and alignment film 9. Although illustration is omitted, countless minute grooves are formed on the surfaces of the alignment film 6 and the alignment film 9 by this rubbing treatment.

(S6)組裝步驟 該步驟中,組裝液晶顯示面板1的集合體13。首先,如圖9A所示,使第一積層體LM1與第二積層體LM2相向,並且對該些積層體LM1、積層體LM2之間,供給形成密封部S的密封材料與間隔件SP。本實施方式中,以俯視狀態下密封部S呈格子狀的方式將形成密封部S的密封材料預先塗佈於第一積層體LM1的第一配向膜6上(參照圖9A)。在由密封部S包圍的多個區域、即成為形成液晶層2的空間(參照圖1)的多個區域填充液晶,並且使間隔件SP分散。此時,將第一積層體LM1配置於較第二積層體LM2靠下方,並且以第一配向膜6與第二配向膜9相向的方式配置第一積層體LM1與第二積層體LM2。藉此,成為在第一積層體LM1的最下側配置有保護膜12的狀態。另外,密封材料S亦可為不塗佈於切斷預定線的部位的形態。換言之,只要將密封材料S在寬度方向(圖9A的紙面的左右方向)設為分割結構,將經分割的密封材料S彼此之間設為空間即可。(S6) Assembly steps In this step, the assembly 13 of the liquid crystal display panel 1 is assembled. First, as shown in FIG. 9A, the first layered body LM1 and the second layered body LM2 are opposed to each other, and between the layered body LM1 and the layered body LM2, the sealing material forming the sealing portion S and the spacer SP are supplied. In this embodiment, the sealing material forming the sealing part S is preliminarily coated on the first alignment film 6 of the first laminate LM1 so that the sealing part S is in a grid shape in a plan view (see FIG. 9A ). A plurality of regions surrounded by the sealing portion S, that is, a plurality of regions forming a space (see FIG. 1) for forming the liquid crystal layer 2 are filled with liquid crystal, and the spacers SP are dispersed. At this time, the first layered body LM1 is arranged below the second layered body LM2, and the first layered body LM1 and the second layered body LM2 are arranged such that the first alignment film 6 and the second alignment film 9 face each other. As a result, the protective film 12 is arranged on the lowermost side of the first laminate LM1. In addition, the sealing material S may be in a form that is not applied to the part of the planned cutting line. In other words, what is necessary is just to make the sealing material S a division structure in the width direction (the left-right direction of the paper surface of FIG. 9A), and what is necessary is just to make a space between the divided sealing materials S.

藉由自該狀態,例如使第一積層體LM1上升而接近於第二積層體LM2,而利用兩積層體LM1、LM2夾持間隔件SP,並且使預先塗佈於第一積層體LM1上的密封部S的密封材料接觸於第二積層體LM2(參照圖9B)。此處,藉由使密封材料固化(例如在密封材料使用UV固化樹脂時,藉由照射紫外線進行固化),而在各積層體LM1、積層體LM2之間形成密封部S,並且與密封材料接觸的各積層體LM1、積層體LM2接著固定於密封部S。藉此,成為第一積層體LM1與第二積層體LM2經由密封部S而相互貼合的狀態。From this state, for example, the first layered body LM1 is raised to approach the second layered body LM2, the spacer SP is sandwiched between the two layered bodies LM1 and LM2, and the pre-coated on the first layered body LM1 The sealing material of the sealing part S contacts the 2nd laminated body LM2 (refer FIG. 9B). Here, by curing the sealing material (for example, when a UV curable resin is used as the sealing material, curing is performed by irradiating ultraviolet rays), a sealing portion S is formed between the laminate LM1 and the laminate LM2, and is in contact with the sealing material Each of the laminated body LM1 and the laminated body LM2 are then fixed to the sealing portion S. As a result, the first layered body LM1 and the second layered body LM2 are bonded to each other via the sealing portion S.

另外,藉由以俯視狀態下密封部S呈格子狀的方式塗佈密封材料,而將第一積層體LM1與第二積層體LM2相互貼合的狀態下,在由第一積層體LM1、第二積層體LM2及密封部S包圍的區域形成多個液晶層2(參照圖9B)。如此,組裝出在第一積層體LM1與第二積層體LM2之間形成多個液晶層2而成的液晶顯示面板1的集合體13(參照圖10)。In addition, by applying the sealing material so that the sealing portion S is grid-like in a plan view, the first layered body LM1 and the second layered body LM2 are bonded to each other. A plurality of liquid crystal layers 2 are formed in the area surrounded by the two-layered body LM2 and the sealing portion S (see FIG. 9B). In this way, the assembly 13 of the liquid crystal display panel 1 in which the plurality of liquid crystal layers 2 are formed between the first laminate LM1 and the second laminate LM2 is assembled (see FIG. 10 ).

此種組裝步驟S6中,第一積層體LM1例如由進行第一積層體LM1的搬入及搬出的搬送裝置的輥(roller)、用於使第一積層體LM1上升的升降構件等自下方支持。In such assembling step S6, the first layered body LM1 is supported from below by, for example, a roller of a conveying device for carrying in and out of the first layered body LM1, an elevating member for raising the first layered body LM1, and the like.

(S7)切割步驟 之後,藉由將集合體13沿規定的切斷預定線(例如圖7A~圖9B的點鏈線所示的切斷預定線)切斷,而切割出將一對玻璃基板GS1、GS2相互貼合而成的多個液晶顯示面板1的基體1a(參照圖11)。然後,藉由在基體1a的兩面固定偏光板10、偏光板11,且安裝所需的電子零件等,而製作出圖1所示的液晶顯示面板1。(S7) Cutting step After that, by cutting the assembly 13 along a predetermined cutting plan line (for example, the cutting plan line shown by the dotted chain line in FIGS. 7A to 9B), a pair of glass substrates GS1 and GS2 are attached to each other. The base body 1a of the multiple liquid crystal display panel 1 (refer FIG. 11) formed together. Then, by fixing the polarizing plate 10 and the polarizing plate 11 on both surfaces of the base 1a, and mounting necessary electronic components, etc., the liquid crystal display panel 1 shown in FIG. 1 is manufactured.

根據以上的說明可知,本發明的電子元件的製造方法中,在製作步驟S2的實施時以前,準備帶保護膜的玻璃基板(形成有保護膜12的第一母玻璃GM1),在該玻璃基板的形成有保護膜12的一側受到支持的狀態下製作液晶顯示面板1。藉此,即便是如下情況,即,例如當在第一母玻璃GM1形成積層部的步驟、使用第一母玻璃GM1的液晶顯示面板1的組裝步驟S6時、將液晶顯示面板1的集合體13沿切斷預定線切斷時,第一母玻璃GM1側與各種支持構件之間產生摩擦,亦可藉由保護膜12防止或抑制對第一母玻璃GM1的表面造成損傷。藉此,可確保包括將該第一母玻璃GM1切割而成的第一玻璃基板GS1的液晶顯示面板1的強度。According to the above description, in the method of manufacturing an electronic component of the present invention, before the implementation of the production step S2, a glass substrate with a protective film (the first mother glass GM1 on which the protective film 12 is formed) is prepared, and the glass substrate The liquid crystal display panel 1 is produced in a state where the side on which the protective film 12 is formed is supported. Thereby, even in the following cases, for example, in the step of forming a laminated portion on the first mother glass GM1, the assembly step S6 of the liquid crystal display panel 1 using the first mother glass GM1, the assembly 13 of the liquid crystal display panel 1 When cutting along the planned cutting line, friction occurs between the first mother glass GM1 side and various supporting members, and the protective film 12 can also prevent or suppress damage to the surface of the first mother glass GM1. Thereby, the strength of the liquid crystal display panel 1 including the first glass substrate GS1 obtained by cutting the first mother glass GM1 can be ensured.

另外,在如本實施方式般第一積層體LM1(第一母玻璃GM1)由搬送裝置的輥支持並搬送時,輥與第一母玻璃GM1側之間的摩擦無法避免,但藉由如所述般在第一母玻璃GM1的支持側(另一個表面GM1b側)形成保護膜12,可防止或抑制因定位停止時的摩擦對第一母玻璃GM1造成損傷。In addition, when the first laminate LM1 (first mother glass GM1) is supported and transported by the rollers of the transport device as in the present embodiment, the friction between the roller and the first mother glass GM1 side cannot be avoided. As described above, the protective film 12 is formed on the supporting side of the first mother glass GM1 (the other surface GM1b side), which can prevent or suppress damage to the first mother glass GM1 due to friction when positioning is stopped.

以上,對本發明的一實施方式進行了說明,但本發明的電子元件的製造方法以及玻璃基板並不限定於所述例示形態。所述製造方法以及玻璃基板可在本發明的範圍內採取各種形態。As mentioned above, although one embodiment of this invention was described, the manufacturing method of the electronic component of this invention, and a glass substrate are not limited to the said illustration form. The manufacturing method and glass substrate can take various forms within the scope of the present invention.

例如所述實施方式中,例示出將保護膜12形成於第一母玻璃GM1的另一個表面GM1b的整個面的情況,但當然並不限於此。亦可根據組裝步驟S6中的輥或升降構件、積層部形成步驟S5中的支持第一母玻璃GM1的構件的支持形態、在該些步驟之間搬送時支持第一母玻璃GM1的構件的支持形態等,在另一個表面GM1b的規定的一部分形成保護膜12。For example, in the above-mentioned embodiment, the case where the protective film 12 is formed on the whole surface of the other surface GM1b of the 1st mother glass GM1 was illustrated, but of course it is not limited to this. The support of the member supporting the first mother glass GM1 in the roller or the lifting member in the assembly step S6, the supporting form of the member supporting the first mother glass GM1 in the layer formation step S5, and the support of the member supporting the first mother glass GM1 when transported between these steps For the form, the protective film 12 is formed on a predetermined part of the other surface GM1b.

另外,所述實施方式中,例示出使作為支持構件的升降構件上升而使第一積層體LM1接近於第二積層體LM2的情況,但例如亦可對於自下方受到支持的狀態的第一積層體LM1,使第二積層體LM2自上方下降而夾持間隔件SP。總之,只要藉由第一積層體LM1與第二積層體LM2的相對移動可夾持間隔件SP,所述移動形態便為任意。In addition, in the above-mentioned embodiment, the case where the lifting member as the supporting member is raised to bring the first laminated body LM1 close to the second laminated body LM2 is illustrated. However, for example, the first laminated body may be supported from below. In the body LM1, the second laminated body LM2 is lowered from above to sandwich the spacer SP. In short, as long as the spacer SP can be sandwiched by the relative movement of the first laminated body LM1 and the second laminated body LM2, the movement form is arbitrary.

另外,所述實施方式中,例示出準備步驟S1中僅在第一母玻璃GM1形成保護膜12的情況,但當然亦可在母玻璃GM1、母玻璃GM2這兩者形成保護膜12。In addition, in the said embodiment, the case where the protective film 12 is formed only on the 1st mother glass GM1 in the preparation step S1 is illustrated, but of course, you may form the protective film 12 on both of the mother glass GM1, and mother glass GM2.

另外,所述實施方式中例示出如下順序,即,在其中一個母玻璃GM1形成保護膜12,並且在母玻璃GM1形成第一積層部3、在母玻璃GM2形成第二積層部4而形成第一積層體LM1及第二積層體LM2,將所製作的積層體LM1、積層體LM2彼此貼合而製作液晶顯示面板1的集合體13之後,進行切割而獲得液晶顯示面板1,但當然亦可基於除此以外的順序。雖省略圖示,但例如亦可首先將各母玻璃GM1、母玻璃GM2切割成各玻璃基板GS1、玻璃基板GS2之後,對各玻璃基板GS1、玻璃基板GS2實施積層部形成步驟S5與組裝步驟S6。此時,可在切割的前後任意階段形成保護膜12。In addition, in the above-mentioned embodiment, the following sequence is illustrated by forming the protective film 12 on one of the mother glass GM1, forming the first layered portion 3 on the mother glass GM1, and forming the second layered portion 4 on the mother glass GM2 to form the second layer. A laminated body LM1 and a second laminated body LM2, the produced laminated body LM1 and the laminated body LM2 are bonded to each other to produce the assembly 13 of the liquid crystal display panel 1, and then cut to obtain the liquid crystal display panel 1, but of course it can be Based on other orders. Although the illustration is omitted, for example, each mother glass GM1 and mother glass GM2 may be cut into each glass substrate GS1 and glass substrate GS2, and then the laminated portion formation step S5 and the assembly step S6 may be performed on each glass substrate GS1 and the glass substrate GS2. . At this time, the protective film 12 can be formed at any stage before and after cutting.

另外,所述實施方式中,例示出準備步驟S1中在母玻璃形成保護膜12,製作步驟S2中不再次形成保護膜12的情況,但亦可視需要在製作步驟S2設置再次形成保護膜12的步驟。In addition, in the above-mentioned embodiment, the case where the protective film 12 is formed on the mother glass in the preparation step S1 and the protective film 12 is not formed again in the manufacturing step S2 is illustrated. However, if necessary, a protective film 12 may be formed in the manufacturing step S2 step.

另外,所述實施方式中,例示出呈矩形狀的單片狀的玻璃基板作為各母玻璃GM1、母玻璃GM2,但當然亦可在呈除此以外的形態的母玻璃GM1、母玻璃GM2形成保護膜12。雖省略圖示,但例如亦可將厚度薄為可捲取的程度的玻璃基板(玻璃膜)作為母玻璃,在該玻璃膜形成保護膜12。此時,保護膜12在玻璃膜的形成步驟可藉由對以所謂的輥對輥方式(roll to roll type)供給的玻璃膜的其中一個表面連續實施成膜處理而進行。只要在連續形成保護膜12之後進行切斷,且依序實施積層部形成步驟S5、組裝步驟S6即可。In addition, in the above embodiment, a rectangular single-piece glass substrate is illustrated as each of the mother glass GM1 and the mother glass GM2, but of course it can also be formed on the mother glass GM1 and the mother glass GM2 in other forms. Protective film 12. Although illustration is omitted, for example, a glass substrate (glass film) whose thickness is so thin that it can be wound is used as the mother glass, and the protective film 12 is formed on the glass film. At this time, the step of forming the protective film 12 in the glass film can be performed by continuously performing a film forming process on one of the surfaces of the glass film supplied by a so-called roll to roll type. It is only necessary to perform cutting after the protective film 12 is continuously formed, and to perform the build-up portion forming step S5 and the assembling step S6 in this order.

另外,以上的說明中,例示出製作液晶顯示面板1作為電子元件的情況,但當然在製造其他電子元件時亦可應用本發明。雖省略圖示,但例如在製作有機EL照明(部件)或觸控面板作為電子元件時亦可應用本發明。 [實施例1]In addition, in the above description, the case where the liquid crystal display panel 1 is produced as an electronic component has been exemplified, but of course the present invention can also be applied when producing other electronic components. Although illustration is omitted, for example, the present invention can also be applied when producing organic EL lighting (components) or touch panels as electronic components. [Example 1]

以下,對用於證明本發明的有用性的實驗內容進行說明。Hereinafter, the contents of experiments to prove the usefulness of the present invention will be described.

本實施例中,準備0.5 t日本電氣硝子股份有限公司製造的OA-11作為玻璃基板,使用作為AF塗佈劑的大金工業(Daikin Industries)股份有限公司製造的奧普次(OPTOOL)UF503與日本3M(3M Japan)股份有限公司製造的諾維克(Novec)72DE的混合液作為保護膜用材料。將所述玻璃基板清洗之後,將所述混合液噴霧塗佈於玻璃基板並擦拭後進行常溫乾燥,然後在150℃下實施30分鐘熱處理,藉此獲得在玻璃基板的表面形成有作為保護膜的AF塗層的狀態的玻璃基板。依照JIS K 7125:1999,對該玻璃基板與三共理化學股份有限公司製造的包裝膜LWFS-30#4000之間的靜摩擦係數進行測定,結果為0.26。In this example, 0.5 t of OA-11 manufactured by NEG Glass Co., Ltd. was prepared as a glass substrate, and OPTOOL UF503 manufactured by Daikin Industries Co., Ltd. was used as an AF coating agent. A mixture of Novec 72DE manufactured by 3M Japan Co., Ltd. is used as a protective film material. After cleaning the glass substrate, spray-coating the mixed solution on the glass substrate and wipe it, dry it at room temperature, and then perform a heat treatment at 150°C for 30 minutes to obtain a protective film formed on the surface of the glass substrate. A glass substrate in the state of AF coating. The coefficient of static friction between the glass substrate and the packaging film LWFS-30#4000 manufactured by Sankyo Rika Chemical Co., Ltd. was measured in accordance with JIS K 7125: 1999, and the result was 0.26.

相對於此,準備在所述玻璃基板未形成任何保護膜的玻璃基板(所述玻璃基板)。利用所述方法對該玻璃基板的靜摩擦係數進行測定,結果為0.59。In contrast, a glass substrate (the glass substrate) on which any protective film is not formed on the glass substrate is prepared. The static friction coefficient of the glass substrate was measured by the method, and the result was 0.59.

出於對帶保護膜的玻璃基板(實施例)與無保護膜的玻璃基板(比較例)再現製造時產生的損傷的目的,進行損傷試驗。損傷試驗藉由將三共理化學股份有限公司製造的包裝膜LWFS-30#4000對各玻璃基板的表面摩擦而進行。對於帶保護膜的玻璃基板,藉由將所述包裝膜對形成有保護膜的一側摩擦而進行損傷試驗。此時的條件是將面負荷設為500 g、移動速度設為3 m/min、摩擦次數設為10個來回。將損傷後的帶保護膜的玻璃基板設為實施例1。另外,將損傷後的無保護膜的玻璃基板設為比較例1。The damage test was performed for the purpose of reproducing the damage that occurred during the production on the glass substrate with a protective film (Example) and the glass substrate without a protective film (Comparative Example). The damage test was performed by rubbing the packaging film LWFS-30#4000 manufactured by Sankyo Chemical Co., Ltd. on the surface of each glass substrate. For a glass substrate with a protective film, a damage test was performed by rubbing the packaging film on the side where the protective film was formed. The conditions at this time are that the surface load is 500 g, the moving speed is 3 m/min, and the number of rubbings is 10 round trips. The damaged glass substrate with a protective film was referred to as Example 1. In addition, the damaged glass substrate without a protective film was referred to as Comparative Example 1.

對於所述三種玻璃基板(實施例、比較例),測定環對環(ring-on-ring)試驗下的破壞負荷。此時的條件是將活塞(piston)側環的直徑尺寸設為12.5 mm、支持側環的直徑尺寸設為25 mm、活塞側環的下降速度設為0.5 mm/s。對各玻璃基板各30片實施所述損傷試驗以及環對環試驗,將測定出的破壞負荷[N]的中位數設為評估值。For the three glass substrates (Examples and Comparative Examples), the breaking load in a ring-on-ring test was measured. The conditions at this time are that the diameter of the piston side ring is 12.5 mm, the diameter of the support side ring is 25 mm, and the lowering speed of the piston side ring is 0.5 mm/s. The damage test and the ring-to-ring test were performed on 30 glass substrates each, and the median of the measured breaking load [N] was used as an evaluation value.

將試驗結果示於表1。根據比較例的結果可知,若對玻璃基板的表面造成損傷,則破壞負荷會大幅下降。相對於此,在作為實施例的帶保護膜的玻璃基板的情況下,損傷後的環對環試驗中亦呈現相對優異的破壞強度(破壞負荷)。據此認為,藉由保護膜而在製造時難以造成損傷,藉此破壞強度的下降得以抑制。 [表1]   保護膜 損傷 破壞負荷[N] 實施例 480 比較例 × 219 The test results are shown in Table 1. According to the results of the comparative example, if the surface of the glass substrate is damaged, the breaking load is greatly reduced. In contrast, in the case of the glass substrate with a protective film as an example, a relatively excellent breaking strength (breaking load) was also exhibited in a ring-to-ring test after damage. Based on this, it is considered that the protective film makes it difficult to cause damage at the time of manufacturing, thereby suppressing the deterioration of the breaking strength. [Table 1] Protective film damage Breaking load [N] Example 480 Comparative example X 219

1:液晶顯示面板 1a:基體 2:液晶層 3:第一積層部 4:第二積層部 5:第一電極層 6:第一配向膜 7:彩色濾光片層 8:第二電極層 9:第二配向膜 10:第一偏光板 11:第二偏光板 12:保護膜 13:集合體 LM1:第一積層體 LM2:第二積層體 GM1:第一母玻璃 GM1a、GM2a:其中一個表面 GM1b:另一個表面 GM2:第二母玻璃 GS1:第一玻璃基板 GS1a、GS2a:內側表面 GS1b:外側表面(其中一個表面) GS2:第二玻璃基板 S:密封部 SP:間隔件 TCF:透明導電膜 S1:準備步驟 S2:製作步驟 S3:取得步驟 S4:保護膜形成步驟 S5:積層部形成步驟 S6:組裝步驟 S7:切割步驟1: LCD panel 1a: matrix 2: liquid crystal layer 3: The first layer 4: The second layer 5: The first electrode layer 6: The first alignment film 7: Color filter layer 8: second electrode layer 9: The second alignment film 10: The first polarizer 11: The second polarizer 12: Protective film 13: aggregate LM1: The first laminate LM2: Second multilayer body GM1: The first mother glass GM1a, GM2a: one of the surfaces GM1b: another surface GM2: The second mother glass GS1: The first glass substrate GS1a, GS2a: inside surface GS1b: Outer surface (one of the surfaces) GS2: Second glass substrate S: Sealing part SP: Spacer TCF: Transparent conductive film S1: Preparation steps S2: production steps S3: Obtaining steps S4: protective film formation step S5: Steps for forming build-up part S6: Assembly steps S7: Cutting step

圖1是本發明的一實施方式的液晶顯示面板的剖面圖。 圖2是表示圖1所示的液晶顯示面板的製造方法的順序的流程圖(flowchart)。 圖3是表示圖2所示的準備步驟的順序的流程圖。 圖4A是圖2所示的準備步驟中所準備的第一母玻璃(mother glass)的立體圖。 圖4B是圖2所示的準備步驟中所準備的第二母玻璃的立體圖。 圖5是形成有保護膜的第一母玻璃的立體圖。 圖6是表示圖2所示的製作步驟的順序的流程圖。 圖7A是圖6所示的組裝步驟中所準備的包括第一母玻璃的第一積層體的立體圖。 圖7B是圖6所示的組裝步驟中所準備的包括第二母玻璃的第二積層體的立體圖。 圖8A是圖7所示的第一積層體的剖面圖。 圖8B是圖7所示的第二積層體的剖面圖。 圖9A是表示圖6所示的組裝步驟的一例的剖面圖。 圖9B是表示圖6所示的組裝步驟的一例的剖面圖。 圖10是組裝步驟中所獲得的液晶顯示面板的集合體的立體圖。 圖11是表示切割步驟的一例的立體圖。FIG. 1 is a cross-sectional view of a liquid crystal display panel according to an embodiment of the present invention. FIG. 2 is a flowchart (flowchart) showing the procedure of the method of manufacturing the liquid crystal display panel shown in FIG. 1. Fig. 3 is a flowchart showing the sequence of the preparation steps shown in Fig. 2. 4A is a perspective view of the first mother glass prepared in the preparation step shown in FIG. 2. 4B is a perspective view of the second mother glass prepared in the preparation step shown in FIG. 2. Fig. 5 is a perspective view of a first mother glass formed with a protective film. Fig. 6 is a flowchart showing the sequence of the production steps shown in Fig. 2. Fig. 7A is a perspective view of a first laminate including a first mother glass prepared in the assembling step shown in Fig. 6. Fig. 7B is a perspective view of a second laminate including a second mother glass prepared in the assembling step shown in Fig. 6. Fig. 8A is a cross-sectional view of the first laminate shown in Fig. 7. Fig. 8B is a cross-sectional view of the second laminate shown in Fig. 7. Fig. 9A is a cross-sectional view showing an example of the assembly procedure shown in Fig. 6. Fig. 9B is a cross-sectional view showing an example of the assembly procedure shown in Fig. 6. Fig. 10 is a perspective view of an assembly of liquid crystal display panels obtained in an assembling step. Fig. 11 is a perspective view showing an example of a cutting step.

1:液晶顯示面板 1: LCD panel

1a:基體 1a: matrix

2:液晶層 2: liquid crystal layer

3:第一積層部 3: The first layer

4:第二積層部 4: The second layer

5:第一電極層 5: The first electrode layer

6:第一配向膜 6: The first alignment film

7:彩色濾光片層 7: Color filter layer

8:第二電極層 8: second electrode layer

9:第二配向膜 9: The second alignment film

10:第一偏光板 10: The first polarizer

11:第二偏光板 11: The second polarizer

12:保護膜 12: Protective film

GS1:第一玻璃基板 GS1: The first glass substrate

GS1a、GS2a:內側表面 GS1a, GS2a: inside surface

GS1b:外側表面(其中一個表面) GS1b: Outer surface (one of the surfaces)

GS2:第二玻璃基板 GS2: Second glass substrate

S:密封部 S: Sealing part

SP:間隔件 SP: Spacer

TCF:透明導電膜 TCF: Transparent conductive film

Claims (4)

一種電子元件的製造方法,包括:準備步驟,準備玻璃基板;以及製作步驟,使用所述玻璃基板製作電子元件;且 在所述準備步驟中,準備形成有保護其中一個表面的保護膜的玻璃基板作為所述玻璃基板, 在所述製作步驟中,支持所述玻璃基板的形成有所述保護膜的一側而製作所述電子元件。A manufacturing method of an electronic component, comprising: a preparation step of preparing a glass substrate; and a manufacturing step of using the glass substrate to manufacture an electronic component; and In the preparation step, a glass substrate formed with a protective film for protecting one surface is prepared as the glass substrate, In the manufacturing step, the electronic component is manufactured by supporting the side of the glass substrate on which the protective film is formed. 如申請專利範圍第1項所述的電子元件的製造方法,其中所述保護膜是呈現較所述玻璃基板低的靜摩擦係數的低摩擦膜。In the method for manufacturing an electronic component as described in claim 1, wherein the protective film is a low-friction film exhibiting a lower static friction coefficient than the glass substrate. 如申請專利範圍第2項所述的電子元件的製造方法,其中所述低摩擦膜的靜摩擦係數為0.42以下。The method for manufacturing an electronic component as described in item 2 of the scope of patent application, wherein the static friction coefficient of the low friction film is 0.42 or less. 一種玻璃基板,是電子元件用的玻璃基板,且 在非保證面形成有保護所述非保證面的保護膜。A glass substrate is a glass substrate for electronic components, and A protective film for protecting the non-guaranteed surface is formed on the non-guaranteed surface.
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