TW202034317A - Current-voltage converting circuit, reference voltage generating circuit and non-volatile semiconductor storage device - Google Patents
Current-voltage converting circuit, reference voltage generating circuit and non-volatile semiconductor storage device Download PDFInfo
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Abstract
Description
本發明是有關於一種電流電壓轉換電路,使用所述電流電壓轉換電路的基準電壓產生電路,以及使用所述基準電壓產生電路的非揮發性半導體存儲裝置。The present invention relates to a current-voltage conversion circuit, a reference voltage generating circuit using the current-voltage conversion circuit, and a non-volatile semiconductor storage device using the reference voltage generating circuit.
圖1是表示先前技術的用於反及(NAND)型快閃記憶體的電壓產生電路的結構例的方塊圖。反及型快閃記憶體等非揮發性半導體存儲裝置為了進行讀出、編程及消去操作而需要許多種類的電壓。通常,如圖1所示,該些電壓由電荷泵電路(charge pump circuit)21與調節器電路(regulator circuit)22等電壓產生電路生成,並經由字線解碼器電路(word line decoder circuit)11而供給至記憶體陣列10中。
[現有技術文獻]
[專利文獻]FIG. 1 is a block diagram showing a configuration example of a voltage generating circuit used in a NAND flash memory in the prior art. Non-volatile semiconductor storage devices such as reverse flash memory require many types of voltages for reading, programming, and erasing operations. Generally, as shown in FIG. 1, these voltages are generated by voltage generating circuits such as a
[專利文獻1]日本專利特開2013-196622號公報[Patent Document 1] Japanese Patent Laid-Open No. 2013-196622
[發明所欲解決之課題][The problem to be solved by the invention]
但是,於來自電荷泵電路21的輸出電壓中存在電壓漣波(voltage ripple),其對記憶單元的壓力帶來影響,具有字線的位置依存性(圖1)。為了減少漣波,而自調節器電路22中供給幾種電壓,但其存在消耗多餘的佈局區域這一問題點。However, there is a voltage ripple in the output voltage from the
本發明的目的在於解決以上的問題點,提供一種可於比先前技術小的佈局區域內供給穩定的基準電壓的電流電壓轉換電路,使用所述電流電壓轉換電路的基準電壓產生電路,以及使用所述基準電壓產生電路的非揮發性半導體存儲裝置。 [解決課題之手段]The purpose of the present invention is to solve the above problems and provide a current-voltage conversion circuit that can supply a stable reference voltage in a smaller layout area than the prior art, a reference voltage generating circuit using the current-voltage conversion circuit, and the use of all The non-volatile semiconductor storage device of the reference voltage generating circuit. [Means to solve the problem]
本發明的電流電壓轉換電路的特徵在於包括: 第一電流鏡電路,包含一對第一金屬氧化物半導體(Metal Oxide Semiconductor,MOS)電晶體與第二MOS電晶體及輸出電阻;以及空乏型N通道MOS電晶體,插入於被輸入的第一電壓與所述第一MOS電晶體及所述第二MOS電晶體之間,且具有被反饋來自所述輸出電阻的輸出電壓的閘極;且當已將基準電流輸入所述第一MOS電晶體中時,藉由流入所述第二MOS電晶體及輸出電阻中的與所述基準電流對應的電流來產生輸出電壓。 [發明的效果]The current-to-voltage conversion circuit of the present invention is characterized by including: The first current mirror circuit includes a pair of first Metal Oxide Semiconductor (MOS) transistors, a second MOS transistor, and an output resistor; and a depletion N-channel MOS transistor, which is inserted into the first input Voltage between the first MOS transistor and the second MOS transistor, and has a gate that is fed back the output voltage from the output resistor; and when a reference current has been input to the first MOS transistor In the middle, the output voltage is generated by the current corresponding to the reference current flowing in the second MOS transistor and the output resistor. [Effects of the invention]
因此,根據本發明,可提供一種可於比先前技術小的佈局區域內供給穩定的基準電壓的電流電壓轉換電路,使用所述電流電壓轉換電路的基準電壓產生電路,以及使用所述基準電壓產生電路的非揮發性半導體存儲裝置。Therefore, according to the present invention, it is possible to provide a current-voltage conversion circuit capable of supplying a stable reference voltage in a smaller layout area than the prior art, a reference voltage generating circuit using the current-voltage conversion circuit, and a reference voltage generating circuit using the reference voltage Circuit of non-volatile semiconductor storage device.
以下,參照圖式對本發明的實施方式進行說明。再者,對同一或相同的構成元件賦予同一符號。Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the same reference numerals are given to the same or the same constituent elements.
(比較例)
圖2A是表示比較例的電流電壓轉換電路的結構例的電路圖。再者,例如於專利文獻1中揭示有使用電流鏡電路的電流電壓轉換電路。(Comparative example)
2A is a circuit diagram showing a configuration example of a current-voltage conversion circuit of a comparative example. Furthermore, for example,
於圖2A中,表示包括一對P通道MOS電晶體M1、P通道MOS電晶體M2來構成,將電流轉換成電壓的簡單的電流鏡電路。此處,MOS電晶體M1的閘極及源極分別與MOS電晶體M2的閘極及源極連接,MOS電晶體M1、MOS電晶體M2的各閘極與MOS電晶體M1的汲極連接。在MOS電晶體M2的汲極與接地之間,連接調整輸出電壓VOUT的可變電阻R1。再者,於安裝時,可變電阻R1使用能夠以數位方式設定的例如半固定電阻。In FIG. 2A, a simple current mirror circuit including a pair of P-channel MOS transistors M1 and P-channel MOS transistors M2 to convert current into voltage is shown. Here, the gate and source of MOS transistor M1 are respectively connected to the gate and source of MOS transistor M2, and the gates of MOS transistor M1 and MOS transistor M2 are connected to the drain of MOS transistor M1. Between the drain of the MOS transistor M2 and the ground, a variable resistor R1 for adjusting the output voltage VOUT is connected. Furthermore, during installation, the variable resistor R1 uses, for example, a semi-fixed resistor that can be set digitally.
於如以上般構成的電流電壓轉換電路中,MOS電晶體M1、MOS電晶體M2的各源極中被施加電源電壓V1。由於藉由MOS電晶體M1、MOS電晶體M2來構成電流鏡電路,因此若朝MOS電晶體M1中流出基準電流Iref1,則與該基準電流Iref1對應的電流Iref2流入MOS電晶體M2及可變電阻R1中。此時,於作為輸出電阻的可變電阻R1中生成輸出電壓VOUT並將其輸出。In the current-voltage conversion circuit configured as described above, the power supply voltage V1 is applied to each source of the MOS transistor M1 and the MOS transistor M2. Since the MOS transistor M1 and MOS transistor M2 constitute the current mirror circuit, if the reference current Iref1 flows into the MOS transistor M1, the current Iref2 corresponding to the reference current Iref1 flows into the MOS transistor M2 and the variable resistor R1. At this time, the output voltage VOUT is generated and output in the variable resistance R1 as the output resistance.
此處,輸出電壓VOUT必須考慮MOS電晶體M2的汲極-源極間的崩潰電壓(breakdown voltage)BVds2。輸出電壓VOUT有可能被設定成例如0 V,因此必須使電源電壓V1比崩潰電壓BVds2小。Here, the output voltage VOUT must consider the breakdown voltage BVds2 between the drain and the source of the MOS transistor M2. The output voltage VOUT may be set to, for example, 0 V, so the power supply voltage V1 must be made smaller than the breakdown voltage BVds2.
(實施方式1) 圖2B是表示實施方式1的電流電壓轉換電路的結構例的電路圖。與圖2A的電流電壓轉換電路相比,圖2B的電流電壓轉換電路於以下方面不同。 (1)在電源電壓V1與一對MOS電晶體M1、MOS電晶體M2的各源極之間插入有空乏型N通道MOS電晶體DM1。(Embodiment 1) 2B is a circuit diagram showing a configuration example of the current-voltage conversion circuit of the first embodiment. Compared with the current-voltage conversion circuit of FIG. 2A, the current-voltage conversion circuit of FIG. 2B is different in the following aspects. (1) A depletion type N-channel MOS transistor DM1 is inserted between the power supply voltage V1 and each source of a pair of MOS transistors M1 and MOS transistors M2.
於圖2B中,MOS電晶體DM1的汲極與電源電壓V1連接,MOS電晶體DM1的源極與MOS電晶體M1、MOS電晶體M2的各源極連接。MOS電晶體DM1的閘極(控制端子)與可變電阻R1的一端及輸出電壓VOUT的端子連接。再者,將MOS電晶體M1、MOS電晶體M2的各源極的電壓設為V2。In FIG. 2B, the drain of the MOS transistor DM1 is connected to the power supply voltage V1, and the source of the MOS transistor DM1 is connected to the sources of the MOS transistor M1 and the MOS transistor M2. The gate (control terminal) of the MOS transistor DM1 is connected to one end of the variable resistor R1 and the terminal of the output voltage VOUT. Furthermore, the voltage of each source of MOS transistor M1 and MOS transistor M2 is set to V2.
於如以上般構成的電流電壓轉換電路中,藉由一對MOS電晶體M1、MOS電晶體M2來構成電流鏡電路。此處,在電壓V2的節點N2與電壓V1的節點N1之間,插入有空乏型N通道MOS電晶體DM1,MOS電晶體DM1的閘極與輸出電壓VOUT的端子連接,輸出電壓VOUT被反饋至該閘極中。藉此,對應於輸出電壓VOUT而流入MOS電晶體DM1中的電流得到控制,從而控制節點N2的電壓V2。In the current-to-voltage conversion circuit constructed as described above, a pair of MOS transistors M1 and MOS transistors M2 constitute a current mirror circuit. Here, between the node N2 of the voltage V2 and the node N1 of the voltage V1, a depletion N-channel MOS transistor DM1 is inserted. The gate of the MOS transistor DM1 is connected to the terminal of the output voltage VOUT, and the output voltage VOUT is fed back to The gate. Thereby, the current flowing into the MOS transistor DM1 corresponding to the output voltage VOUT is controlled, thereby controlling the voltage V2 of the node N2.
圖2C是表示圖2A及圖2B的電流電壓轉換電路的動作比較的圖表。Fig. 2C is a graph showing a comparison of the operations of the current-voltage conversion circuits of Figs. 2A and 2B.
空乏型N通道MOS電晶體DM1具有負的臨限值電壓Vth,因此如圖2C所示,節點N2的電壓V2以保持MOS電晶體DM1的輸出電壓VOUT+Vth的方式得到控制。其意味著將所述崩潰電壓BVds2始終保持於MOS電晶體DM1的臨限值電壓Vth附近。因此,只要MOS電晶體DM1的臨限值電壓Vth未滿崩潰電壓BVds2,則以比圖2A的電流電壓轉換電路高的電壓供給輸出電壓VOUT。The depleted N-channel MOS transistor DM1 has a negative threshold voltage Vth. Therefore, as shown in FIG. 2C, the voltage V2 of the node N2 is controlled by maintaining the output voltage VOUT+Vth of the MOS transistor DM1. This means that the breakdown voltage BVds2 is always maintained near the threshold voltage Vth of the MOS transistor DM1. Therefore, as long as the threshold voltage Vth of the MOS transistor DM1 is less than the breakdown voltage BVds2, the output voltage VOUT is supplied with a higher voltage than the current-voltage conversion circuit of FIG. 2A.
比所述MOS電晶體DM1的崩潰電壓Vds2高的下一個崩潰電壓是接合崩潰電壓BVj。若以接近接合崩潰電壓BVj的方式設定電壓V1,則輸出電壓VOUT的最大值大概變成V1-Vth。The next breakdown voltage higher than the breakdown voltage Vds2 of the MOS transistor DM1 is the junction breakdown voltage BVj. If the voltage V1 is set close to the junction breakdown voltage BVj, the maximum value of the output voltage VOUT approximately becomes V1-Vth.
如以上所說明般,如根據圖2C而明確般,可知因存在MOS電晶體DM1的臨限值電壓Vth,而導致圖2B的電流電壓轉換電路的電壓範圍VR2比圖2A的電流電壓轉換電路的電壓範圍VR1大幅度地擴大。另外,圖2B的電流電壓轉換電路可構成產生作為與基準電流Iref1對應的基準電壓的輸出電壓VOUT的基準電壓產生電路。As explained above, as is clear from FIG. 2C, it can be seen that the presence of the threshold voltage Vth of the MOS transistor DM1 causes the voltage range VR2 of the current-voltage conversion circuit of FIG. 2B to be greater than that of the current-voltage conversion circuit of FIG. 2A. The voltage range VR1 is greatly expanded. In addition, the current-voltage conversion circuit of FIG. 2B may constitute a reference voltage generating circuit that generates an output voltage VOUT as a reference voltage corresponding to the reference current Iref1.
(實施方式2) 圖3是表示實施方式2的用於反及型快閃記憶體的電壓產生電路的結構例的方塊圖。(Embodiment 2) FIG. 3 is a block diagram showing a configuration example of a voltage generating circuit for a NAND flash memory according to the second embodiment.
於圖3中,基準電壓產生電路24由使用例如實施方式1的包含電流鏡電路的電流電壓轉換電路的基準電壓產生電路構成,根據來自電荷泵電路23的電壓而產生規定的基準電壓VREF並將其施加至MOS電晶體Q1的閘極中。另一方面,利用由MOS電晶體Q1所進行的箝位動作,將來自電荷泵電路21的電壓箝位成與所述基準電壓VREF對應的規定電壓以下。該箝位方式可稱為箝位MOS方式。可使用圖3的箝位MOS方式的MOS電晶體Q1,供給將供給至字線解碼器電路11及記憶體陣列10的字線中的字線電壓與先前技術相比減輕了漣波而成的規定值電壓。In FIG. 3, the reference
圖4是表示包含使用圖2B的電流電壓轉換電路的基準電壓產生電路的電壓產生電路的結構例的電路圖。於圖4中,包括電荷泵電路21、電荷泵電路23,多個基準電壓產生電路24-1~基準電壓產生電路24-4,以及箝位MOS方式的MOS電晶體M41~MOS電晶體M44來構成。4 is a circuit diagram showing a configuration example of a voltage generating circuit including a reference voltage generating circuit using the current-to-voltage conversion circuit of FIG. 2B. In FIG. 4, it includes a
於圖4中,各基準電壓產生電路24-1~基準電壓產生電路24-4的特徵在於:於使用圖2B的電流電壓轉換電路的基準電壓產生電路中,在MOS電晶體M2與可變電阻R1之間,插入有用於與箝位MOS方式的MOS電晶體M41~MOS電晶體M44構成電流鏡電路的MOS電晶體M3。此處,MOS電晶體M3的閘極與其汲極連接。In FIG. 4, each of the reference voltage generating circuit 24-1 to the reference voltage generating circuit 24-4 is characterized in that in the reference voltage generating circuit using the current-voltage conversion circuit of FIG. 2B, the MOS transistor M2 and the variable resistor Between R1, a MOS transistor M3 is inserted to form a current mirror circuit with MOS transistor M41 to MOS transistor M44 of the clamp MOS method. Here, the gate of MOS transistor M3 is connected to its drain.
以下對關於基準電壓產生電路24-1與MOS電晶體M41的電路的電路動作進行說明。基準電壓產生電路24-1根據來自電荷泵電路23的電壓V1,將作為與基準電流Iref1對應的輸出電壓VOUT的基準電壓VREF施加至MOS電晶體M41的閘極中。MOS電晶體M3與MOS電晶體M41構成電流鏡電路,且自電荷泵電路21朝MOS電晶體M41的汲極中施加電荷泵電壓VCPOUT。於該些電路中,與流入MOS電晶體M3中的電流Iref2對應的電流流入MOS電晶體M41中,作為MOS電晶體M3的源極電壓的目標電壓VTARGET
可使箝位MOS方式的MOS電晶體M41的源極中出現已被箝位的基準電壓。The circuit operation of the circuit of the reference voltage generating circuit 24-1 and the MOS transistor M41 will be described below. Based on the voltage V1 from the
另外,基準電壓產生電路24-2與MOS電晶體M42的電路、基準電壓產生電路24-3與MOS電晶體M43的電路,及基準電壓產生電路24-4與MOS電晶體M44的電路亦與所述電路同樣地進行動作。In addition, the circuit of the reference voltage generating circuit 24-2 and the MOS transistor M42, the circuit of the reference voltage generating circuit 24-3 and the MOS transistor M43, and the circuit of the reference voltage generating circuit 24-4 and the MOS transistor M44 are also similar to those mentioned above. The circuit operates similarly.
根據如以上般構成的圖4的電壓產生電路,由於所述電流鏡電路的鏡像效應(mirror effect),因此目標電壓VTARGET
被正確地傳達至記憶體陣列10中,來自電荷泵電路21、電荷泵電路23的漣波急劇地減少。According to the voltage generating circuit of FIG. 4 configured as described above, due to the mirror effect of the current mirror circuit, the target voltage V TARGET is correctly transmitted to the
(實施方式2) 圖5是表示實施方式2的用於反及型快閃記憶體的電壓產生電路的具體的結構例的方塊圖。(Embodiment 2) FIG. 5 is a block diagram showing a specific configuration example of a voltage generating circuit for a reverse flash memory according to the second embodiment.
於圖5中,電壓產生電路為了產生用於反及型快閃記憶體的以下的各種電壓並將其經由字線解碼器電路11而供給至記憶體陣列10中,包括多個電荷泵電路21-1~電荷泵電路21-4,及多個調節器電路22-1、調節器電路22-2來構成。
(1)編程電壓VPGM
;
(2)用於非選擇字線的電壓VPASS1
/電壓VPASS2
/電壓VPASS3
;
(3)讀出或驗證電壓VRD
;
(4)選擇閘極電壓VSG
;
(5)其他電壓。In FIG. 5, the voltage generating circuit includes a plurality of
此處,調節器電路22-1、調節器電路22-2例如可使用所述基準電壓產生電路來構成,尤其,更正確且必須減輕漣波的電壓VPASS1 及電壓VRD 藉由調節器電路22-1、調節器電路22-2來產生。Here, the regulator circuit 22-1 and the regulator circuit 22-2 can be constructed using the reference voltage generating circuit, for example, and in particular, the more accurate voltage V PASS1 and the voltage V RD that must reduce the ripple are provided by the regulator circuit 22-1. The regulator circuit 22-2 is generated.
圖6A是用於說明於實施方式2中在字線的低電壓側施加各動作電壓的條件的電路圖。另外,圖6B是用於說明於實施方式2中在字線的高電壓側施加各動作電壓的條件的電路圖。6A is a circuit diagram for explaining conditions for applying operating voltages to the low voltage side of a word line in the second embodiment. In addition, FIG. 6B is a circuit diagram for explaining the conditions for applying each operating voltage to the high voltage side of the word line in the second embodiment.
圖6A是說明於字線的低電壓側施加各動作電壓的條件的圖,於電壓VPASS3 的電路中最承受負荷。相對於此,若選擇字線朝高電壓側移動,則如圖6B所示,於電壓VPASS3 的電路中承受的負荷顯著地減少,於電壓VPASS2 的電路中承受最重的負荷。尤其,於未選擇的電壓的電路中,各電荷泵電路的電路規模變大,必須覆蓋大範圍的負荷。FIG. 6A is a diagram illustrating the conditions for applying various operating voltages to the low voltage side of the word line, and the circuit with the voltage V PASS3 bears the most load. In contrast, if the selected word line moves toward the high voltage side, as shown in FIG. 6B, the load on the circuit of voltage V PASS3 is significantly reduced, and the heaviest load is received on the circuit of voltage V PASS2 . In particular, in circuits of unselected voltages, the circuit scale of each charge pump circuit becomes larger, and it is necessary to cover a wide range of loads.
(實施方式3) 圖7是表示實施方式3的用於反及型快閃記憶體的電壓產生電路的具體結構例的方塊圖。(Embodiment 3) FIG. 7 is a block diagram showing a specific configuration example of a voltage generating circuit for a NAND flash memory of the third embodiment.
於圖7中,基準電壓產生電路24使用圖4的電路來構成,根據來自電荷泵電路23的電壓V1而產生規定的基準電壓VREF,並將其分別施加至箝位MOS方式的MOS電晶體M51~MOS電晶體M55的各閘極中。另一方面,使用箝位MOS方式的MOS電晶體M51~MOS電晶體M55,針對來自電荷泵電路21的電荷泵電壓VCPOUT分別產生規定的必要的電壓並經由字線解碼器電路11而供給至記憶體陣列10中。In FIG. 7, the reference
圖7的電壓產生電路包括電荷泵電路21,若使用電荷泵電路,則總負荷相同,不論已選擇的字線的位置,均可產生各種電壓,而可節約佈局面積。The voltage generating circuit of FIG. 7 includes a
圖8是表示利用圖7的電壓產生電路的電壓產生例的圖表。如根據圖8而明確般,來自電荷泵電路的電荷泵電壓VCPOUT仍然存在若干漣波,但穿過箝位MOS方式的MOS電晶體M51~MOS電晶體M55後,漣波充分地減少。Fig. 8 is a graph showing an example of voltage generation by the voltage generation circuit of Fig. 7. As is clear from FIG. 8, there are still some ripples in the charge pump voltage VCPOUT from the charge pump circuit, but after passing through the clamp MOS method MOS transistor M51 to MOS transistor M55, the ripple is sufficiently reduced.
(實施方式4) 圖9是表示實施方式4的用於反及型快閃記憶體的電壓產生電路的結構例的方塊圖。圖7的電壓產生電路雖然可減少雜訊,但使輸出電壓變得正確的精度仍然不高。為了解決該問題點,而提出圖9的電壓產生電路。(Embodiment 4) FIG. 9 is a block diagram showing a configuration example of a voltage generating circuit for a NAND flash memory according to the fourth embodiment. Although the voltage generating circuit of Fig. 7 can reduce noise, the accuracy of correcting the output voltage is still not high. In order to solve this problem, the voltage generating circuit of FIG. 9 is proposed.
於圖9中,藉由MOS電晶體M3與MOS電晶體M4來構成電流鏡電路50,且構成有用於對記憶體陣列10的各節點施加適當的各電壓的源極隨耦電路(source follower circuit)60。為了強制地使各電壓分別變成適當的電壓,而將藉由施加了規定的偏置閘極電壓VBIAS的MOS電晶體M5來流出尾電流ITC
的源極隨耦電路60的MOS電晶體M5與MOS電晶體M4串聯連接。再者,CLOAD
表示電壓供給線的寄生電容。In FIG. 9, a
根據如以上般構成的圖9的電壓產生電路,MOS電晶體M3與MOS電晶體M4的電流密度相互變成相同。由於電流密度相同,因此MOS電晶體M4的臨限值電壓Vth與MOS電晶體M3的臨限值電壓Vth相同,因此目標電壓VTARGET
作為各電壓VRD
、電壓VPASS1
~電壓VPASS3
,及電壓VPGM
而被正確地轉送至記憶體陣列10中。According to the voltage generating circuit of FIG. 9 configured as described above, the current densities of the MOS transistor M3 and the MOS transistor M4 become the same. Since the same current density, the same threshold voltage Vth of the threshold voltage of the MOS transistor of the MOS transistors M3 and M4 Vth, target voltage V TARGET so as each voltage V RD, the voltage V PASS1 ~ voltage V PASS3, and the voltage The V PGM is transferred to the
(變形例) 於以上的實施方式中,對用於反及型快閃記憶體的電壓產生電路進行了說明,但本發明並不限於此,亦可應用於其他各種非揮發性半導體存儲裝置。(Modification) In the above embodiments, the voltage generating circuit used in the NAND flash memory has been described, but the present invention is not limited to this, and can also be applied to other various non-volatile semiconductor storage devices.
10:記憶體陣列
11:字線解碼器電路
21、23、21-1~21-4:電荷泵電路
22、22-1、22-2:調節器電路
24、24-1~24-4:基準電壓產生電路
50:電流鏡電路
60:源極隨耦電路
BVds2、Vds2:崩潰電壓
BVj:接合崩潰電壓
CLOAD:寄生電容
D:汲極
DM1、M1~M55、Q1:MOS電晶體
G:閘極
Iref1:基準電流
Iref2:電流
ITC:尾電流
N1、N2:節點
R1:可變電阻
S:源極
V1:電源電壓
V2、VPASS1、VPASS2、VPASS3:電壓
VBIAS:偏置閘極電壓
VCPOUT:電荷泵電壓
VOUT:輸出電壓
VPGM:編程電壓
VRD:讀出或驗證電壓;
VR1、VR2:電壓範圍
VREF:基準電壓
Vth:臨限值電壓
VTARGET:目標電壓10: Memory array 11: Word
圖1是表示先前技術的用於反及型快閃記憶體的電壓產生電路的結構例的方塊圖。 圖2A是表示比較例的電流電壓轉換電路的結構例的電路圖。 圖2B是表示實施方式1的電流電壓轉換電路的結構例的電路圖。 圖2C是表示圖2A及圖2B的電流電壓轉換電路的動作比較的圖表。 圖3是表示實施方式2的用於反及型快閃記憶體的電壓產生電路的結構例的方塊圖。 圖4是表示包含使用圖2B的電流電壓轉換電路的基準電壓產生電路的電壓產生電路的結構例的電路圖。 圖5是表示實施方式2的用於反及型快閃記憶體的電壓產生電路的具體的結構例的方塊圖。 圖6A是用於說明於實施方式2中在字線的低電壓側施加各動作電壓的條件的電路圖。 圖6B是用於說明於實施方式2中在字線的高電壓側施加各動作電壓的條件的電路圖。 圖7是表示實施方式3的用於反及型快閃記憶體的電壓產生電路的結構例的方塊圖。 圖8是表示利用圖7的電壓產生電路的電壓產生例的圖表。 圖9是表示實施方式4的用於反及型快閃記憶體的電壓產生電路的結構例的方塊圖。FIG. 1 is a block diagram showing an example of the structure of a voltage generating circuit for a NAND flash memory in the prior art. 2A is a circuit diagram showing a configuration example of a current-voltage conversion circuit of a comparative example. 2B is a circuit diagram showing a configuration example of the current-voltage conversion circuit of the first embodiment. Fig. 2C is a graph showing a comparison of the operations of the current-voltage conversion circuits of Figs. 2A and 2B. FIG. 3 is a block diagram showing a configuration example of a voltage generating circuit for a NAND flash memory according to the second embodiment. 4 is a circuit diagram showing a configuration example of a voltage generating circuit including a reference voltage generating circuit using the current-to-voltage conversion circuit of FIG. 2B. FIG. 5 is a block diagram showing a specific configuration example of a voltage generating circuit for a reverse flash memory according to the second embodiment. 6A is a circuit diagram for explaining conditions for applying operating voltages to the low voltage side of a word line in the second embodiment. 6B is a circuit diagram for explaining the conditions for applying each operating voltage to the high voltage side of the word line in the second embodiment. FIG. 7 is a block diagram showing a configuration example of a voltage generating circuit for a NAND flash memory according to the third embodiment. Fig. 8 is a graph showing an example of voltage generation by the voltage generation circuit of Fig. 7. FIG. 9 is a block diagram showing a configuration example of a voltage generating circuit for a NAND flash memory according to the fourth embodiment.
D:汲極 D: Dip pole
DM1:MOS電晶體 DM1: MOS transistor
G:閘極 G: Gate
Iref1:基準電流 Iref1: Reference current
Iref2:電流 Iref2: current
M1、M2:MOS電晶體 M1, M2: MOS transistor
N1、N2:節點 N1, N2: Node
R1:可變電阻 R1: Variable resistor
S:源極 S: source
V1:電源電壓 V1: Power supply voltage
V2:電壓 V2: Voltage
Vds2:崩潰電壓 Vds2: breakdown voltage
VOUT:輸出電壓 VOUT: output voltage
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