TW202007972A - Horizontal double-sided probe device including a machine, at least one upper detection unit and at least one lower detection unit - Google Patents

Horizontal double-sided probe device including a machine, at least one upper detection unit and at least one lower detection unit Download PDF

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TW202007972A
TW202007972A TW107124894A TW107124894A TW202007972A TW 202007972 A TW202007972 A TW 202007972A TW 107124894 A TW107124894 A TW 107124894A TW 107124894 A TW107124894 A TW 107124894A TW 202007972 A TW202007972 A TW 202007972A
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probe
camera
seat
seat rail
base
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TW107124894A
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TWI653455B (en
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邱邦誠
黃榮書
郭俊廷
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佳思科技有限公司
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Abstract

The present invention is a horizontal double-sided probe device, which includes a machine, at least one upper detection unit and at least one lower detection unit, wherein the machine includes a base, two lower slide rails and two upper slide rails, and the lower slide rail and the upper slide rail are located on the top surface of the base; each lower detection unit includes a lower seat rail and at least one lower probe member, the lower seat rail is slidably located on the lower slide rail, and the lower probe member is slidably disposed on the lower seat rail; and each upper detection unit includes an upper seat rail and at least one upper probe member, the upper seat rail is slidably located on the upper slide rail, and the upper probe member is slidably disposed on the upper seat rail. The horizontal double-sided probe device of the present invention simultaneously detects the top surface and the bottom surface of a carrier board by using the upper detection unit and the lower detection unit, and performs signal correction by using a high-frequency signal correction method and a horizontal top surface-through-bottom surface correction device to reduce errors and to improve detection accuracy.

Description

水平式雙面探針設備Horizontal double-sided probe equipment

本創作係一種水平式雙面探針設備,尤指一種可雙面探針檢測增加檢測效率且能提升檢測準確性的水平式雙面探針設備。This creation is a horizontal double-sided probe device, especially a horizontal double-sided probe device that can increase the detection efficiency and improve the detection accuracy by double-sided probe detection.

對於印刷電路板(Printed circuit board ,簡稱PCB)或是載有多數個積體電路(integrated circuit,簡稱IC)元件的載板的檢測,通常會以一單面探針檢測設備進行檢測,該單面探針檢測設備包含有一載板及複數探針,該複數探針間隔排列地設於該載板上,該複數探針的一端具有一針頭,使用者先將該複數探針進行高頻訊號校正後,讓該單面探針檢測設備的該複數針頭接觸該待測的載板以電連接,即達到檢測該多數個積體電路元件的載板的目的。For printed circuit board (Printed circuit board, PCB for short) or carrier board carrying many integrated circuit (integrated circuit, IC for short) components, a single-sided probe testing equipment is usually used for testing. The surface probe detection device includes a carrier board and a plurality of probes, the plurality of probes are arranged on the carrier board at intervals, the one end of the plurality of probes has a needle, and the user first performs high-frequency signal on the plurality of probes After the calibration, the plurality of needles of the single-sided probe testing device are brought into contact with the carrier board to be tested for electrical connection, that is, the purpose of testing the carrier boards of the plurality of integrated circuit components is achieved.

然而,該單面探針檢測設備的檢測係透過該複數探針接觸該載板的一面,只能用於將該多數積體電路元件設於一面的載板的檢測,對於半導體產業的發展越趨快速,操作頻寬以及工作速度越來越快,為達成此需求,需將積體電路傳輸路徑盡可能縮短,因此將多數積體電路元件放置於一封裝載板並進行相對應電路佈局,使該封裝載板的頂面安裝多數個具有積體電路元件之焊接盤,以及該封裝載板的底面以重新電路佈局之訊號輸出端,使訊號傳遞路徑可由位於該封裝載板的頂面的焊接盤,傳輸至該封裝載板的底面的訊號輸出端,然而該單面探針檢測設備並無法執行雙面檢測,因此該封裝載板的頂面及底面沒有辦法做雙面的檢測。However, the detection of the single-sided probe detection device contacts the side of the carrier board through the plurality of probes, and can only be used for the detection of the carrier board on which a plurality of integrated circuit elements are provided on one side. Faster, the operating bandwidth and working speed are getting faster and faster. In order to meet this demand, the transmission path of the integrated circuit needs to be shortened as much as possible. Therefore, most integrated circuit components are placed on a loading board and the corresponding circuit layout is performed. The top surface of the package carrier board is equipped with a plurality of solder pads with integrated circuit components, and the bottom surface of the package carrier board is used to reposition the signal output terminal of the circuit layout, so that the signal transmission path can be located on the top surface of the package carrier board The soldering pad is transmitted to the signal output end of the bottom surface of the package carrier. However, the single-sided probe inspection device cannot perform double-sided inspection. Therefore, there is no way to perform double-sided inspection on the top and bottom surfaces of the package carrier.

為解決上述問題,發展了一種可檢測該封裝載板的兩面的垂直式雙面檢測設備,該垂直式雙面檢測設備包含一載台、二旋轉器、二探針座及二探針,該二旋轉器位於該載台的兩側,該二探針座分別設於該二旋轉器上,該二探針分別設於該二探針座,該二旋轉器可控制該二探針座旋轉,使該二探針座可旋轉轉換成鉛直的狀態或水平的狀態,使用者先將該複數探針在水平的狀態下進行高頻訊號校正後,使用者將該二探針座透過該二旋轉器旋轉成鉛直的狀態,並將該具有多數個焊接盤的封裝載板安裝於該載台上,使該封裝載板呈現鉛直的狀態,該二探針座控制該二探針於該封裝載板的兩面上進行檢測,達到同時檢測該封裝載板的兩面的目的。In order to solve the above problems, a vertical double-sided inspection device capable of detecting both sides of the package carrier is developed. The vertical double-sided inspection device includes a carrier, two rotators, two probe holders and two probes. Two rotators are located on both sides of the stage, the two probe holders are respectively arranged on the two rotators, the two probes are respectively arranged on the two probe holders, and the two rotators can control the rotation of the two probe holders , So that the two probe bases can be rotatably converted into a vertical state or a horizontal state. After the user first performs high-frequency signal correction on the plural probes in a horizontal state, the user passes the two probe bases through the two The rotator rotates into a vertical state, and installs the package carrier board with a plurality of soldering pads on the stage, so that the package carrier board assumes a vertical state, and the two probe holders control the two probes in the package The two sides of the carrier board are inspected to achieve the purpose of simultaneously inspecting both sides of the package carrier board.

然而,該垂直式雙面檢測設備進行高頻信號校正時,使用者需將該二探針座在水平的狀態下進行高頻的信號校正,該二探針座的信號校正完畢後,再將該二探針座旋轉成鉛直的狀態,並且讓該封裝載板鉛直狀態地安裝於該載台上,才能進行該垂直式雙面檢測設備的檢測,在該二探針座旋轉的過程中會使得原先的信號校正值失去精準度,進而影響到檢測的精準率,造成精準率不高的問題。However, when the vertical double-sided detection device performs high-frequency signal correction, the user needs to perform high-frequency signal correction on the two probe bases in a horizontal state. After the signal correction of the two probe bases is completed, the The two probe bases are rotated into a vertical state, and the package carrier board is mounted on the stage in a vertical state, so that the detection of the vertical double-sided detection equipment can be performed. During the rotation of the two probe bases, As a result, the original signal correction value loses its accuracy, which in turn affects the accuracy of detection, resulting in a problem of low accuracy.

本創作之主要目的在於提供一種水平式雙面探針設備,藉以改善現有單面探針檢測設備的無法執行雙面檢測的問題,以及改善垂直式雙面檢測設備檢測精準率不高的問題。The main purpose of this creation is to provide a horizontal double-sided probe device, so as to improve the problem that the existing single-sided probe detection device cannot perform double-sided detection, and to improve the problem that the vertical double-sided detection device has low detection accuracy.

為達成前揭目的,本創作水平式雙面探針設備包含: 一機台,該機台包含一基座、四支柱、二下滑軌、二橫桿、二架軌及二上滑軌,該四支柱設於該基座的頂面,該二下滑軌沿一X軸向地設於該基座的頂面,該二下滑軌互相平行,該二下滑軌的兩端分別連接一支柱,該二橫桿分別沿一Y軸向地跨設於二支柱,該二架軌沿該X軸向地設於該二橫桿上,該二上滑軌的兩端沿該X軸向地連接該四支柱上,該二上滑軌互相平行; 至少一下測單元,所述下測單元可滑動地跨設於該二下滑軌上,每一下測單元包含二調降器、一下座軌及至少一下探針件,該二調降器分別可滑動地設於該二下滑軌上,該下座軌的兩端分別沿該Y軸向地設於該二調降器上且受該二調降器控制昇降,所述下探針件可滑動地設於該下座軌上,所述下探針件包含一下探針座及一下探針頭,該下探針座可滑動地設於該下座軌上,該下探針頭設於該下探針座上;以及 至少一上測單元,所述上測單元可滑動地跨設於該二上滑軌上,每一上測單元包含二調昇器、一上座軌及至少一上探針件,該二調昇器分別可滑動地設於該二上滑軌上,該上座軌的兩端分別沿該Y軸向地設於該二調昇器上且受該二調昇器控制昇降,所述上探針件可滑動地設於該上座軌上,所述上探針件包含一上探針座及一上探針頭,該上探針座可滑動地設於該上座軌上,該上探針頭設於該上探針座上。In order to achieve the purpose of pre-disclosure, the original horizontal double-sided probe equipment includes: a machine, which includes a base, four pillars, two lower rails, two crossbars, two rails and two upper rails, the Four pillars are arranged on the top surface of the base, and the two lower rails are arranged on the top surface of the base along an X axis. The two lower rails are parallel to each other. The two cross bars are respectively spanned on the two pillars along the Y axis, the two rails are provided on the two cross bars along the X axis, and the two ends of the two upper slide rails are connected to the X axis along the X axis On the four pillars, the two upper slide rails are parallel to each other; at least the lower test unit, the lower test unit is slidably straddled on the two lower slide rails, each lower test unit includes two lowering devices, a lower seat rail and at least one lower A probe piece, the two down-regulators are respectively slidably arranged on the two down rails, and the two ends of the lower seat rail are respectively arranged on the two down-regulators along the Y axis and are received by the two down-regulators Controlling lifting, the lower probe member is slidably arranged on the lower seat rail, the lower probe member comprises a lower probe seat and a lower probe head, the lower probe seat is slidably arranged on the lower seat On the rail, the lower probe head is arranged on the lower probe base; and at least one upper test unit, the upper test unit is slidably straddled on the two upper slide rails, each upper test unit includes two adjustments Lifter, an upper seat rail and at least one upper probe piece, the two lifters are respectively slidably arranged on the two upper slide rails, and the two ends of the upper seat rail are respectively arranged on the two adjusters along the Y axis The upper probe is slidably arranged on the upper seat rail. The upper probe piece includes an upper probe base and an upper probe head. The upper The probe seat is slidably arranged on the upper seat rail, and the upper probe head is arranged on the upper probe seat.

本創作水平式雙面探針設備藉由所述下測單元及所述上測單元,使用者將一載板滑入該二架軌上,使該載板呈現水平狀態地進行檢測,該載板的頂面及底面可同時受到該下探針件及該上探針件的檢測,達到雙面檢測的功效,並且使用者藉由高頻信號校正手法,以及水平式頂面與底面直通校正器進行所述下測單元及所述上測單元的信號校正,讓所述下測單元及所述上測單元經水平信號校正,該載板滑入該二架軌上執行水平檢測,減少所述下探針座及所述上探針座旋轉而產生的誤差,維持信號校正的準確,且該下探針件及該上探針件可沿著X軸向或Y軸向作調整位移,有效能提高檢測的精準度及實用性。In the original horizontal double-sided probe device, the lower test unit and the upper test unit allow a user to slide a carrier board onto the two rack rails to make the carrier board detect horizontally. The top surface and bottom surface of the board can be detected by the lower probe member and the upper probe member at the same time, to achieve the effect of double-sided detection, and the user corrects the method by high-frequency signals, and the horizontal top and bottom surface through correction The signal correction of the lower test unit and the upper test unit is performed, and the lower test unit and the upper test unit are corrected by the horizontal signal. The carrier board slides into the two rails to perform horizontal detection, reducing The errors caused by the rotation of the lower probe base and the upper probe base maintain accurate signal correction, and the lower probe part and the upper probe part can be adjusted and displaced along the X axis or the Y axis, It can effectively improve the accuracy and practicality of detection.

如圖1至圖3所示,係揭示本創作水平式雙面探針設備之一較佳實施例,由圖式可知,本創作水平式雙面探針設備包含一機台10、至少一下測單元20及至少一上測單元30。As shown in FIGS. 1 to 3, it discloses a preferred embodiment of the creative horizontal double-sided probe device. As can be seen from the drawings, the creative horizontal double-sided probe device includes a machine 10, at least the following test Unit 20 and at least one upper test unit 30.

如圖2、圖5及圖7所示,該機台10包含一基座11、四支柱12、二下滑軌13、二橫桿14、二架軌15及二上滑軌16,該四支柱12設於該基座11的頂面,該二下滑軌13沿一X軸向地設於該基座11的頂面,該二下滑軌13互相平行,該二下滑軌13的兩端分別連接一支柱12,該二橫桿14分別沿一Y軸向地跨設於二支柱12,該二架軌15沿該X軸向地設於該二橫桿14上,該二上滑軌16的兩端沿該X軸向地連接該四支柱12上,該二上滑軌16互相平行。As shown in FIGS. 2, 5 and 7, the machine 10 includes a base 11, four pillars 12, two lower rails 13, two cross bars 14, two rails 15 and two upper rails 16, the four pillars 12 is provided on the top surface of the base 11, the two lower rails 13 are provided on the top surface of the base 11 along an X axis, the two lower rails 13 are parallel to each other, and the two ends of the two lower rails 13 are respectively connected A strut 12, the two cross bars 14 span the two struts 12 along the Y axis, the two rails 15 are placed on the two cross bars 14 along the X axis, and the two upper slide rails 16 Both ends are connected to the four pillars 12 along the X axis, and the two upper slide rails 16 are parallel to each other.

如圖3、圖5及圖8所示,所述下測單元20可滑動地跨設於該二下滑軌13上,每一下測單元20包含二調降器21、一下座軌22及至少一下探針件23,該二調降器21分別可滑動地設於該二下滑軌13上,該下座軌22的兩端分別沿該Y軸向地設於該二調降器21上且受該二調降器21控制昇降,所述下探針件23可滑動地設於該下座軌22上,所述下探針件23包含一下探針座24及一下探針頭25,該下探針座24可滑動地設於該下座軌22上,該下探針頭25設於該下探針座24上,其中,所述下測單元20包含一下攝像件26,該下攝像件26可滑動地設於該下座軌22上,該下攝像件26包含一下攝像座27及一下攝像器28,該下攝像座27可滑動地設於該下座軌22上,該下攝像器28設於該下攝像座27上,每一下探針座24具有一下微調輪29,該下微調輪29可以調整該下探針頭25昇降,該二調降器21為氣動昇降器,於本實施例中,所述下測單元20的數量係為兩個,其中一下測單元20包含一個下攝像件26。As shown in FIG. 3, FIG. 5 and FIG. 8, the lower testing unit 20 is slidably straddled on the two lower sliding rails 13, and each lower testing unit 20 includes two down regulators 21, a lower seat rail 22 and at least one lower The probe member 23, the two down-regulators 21 are respectively slidably disposed on the two down rails 13, and the two ends of the lower seat rail 22 are respectively disposed on the two down-regulators 21 along the Y axis and are received The two lowering controllers 21 control the ascent and descent, the lower probe member 23 is slidably disposed on the lower seat rail 22, the lower probe member 23 includes a lower probe seat 24 and a lower probe head 25, the lower The probe base 24 is slidably disposed on the lower base rail 22, and the lower probe head 25 is disposed on the lower probe base 24, wherein the lower testing unit 20 includes a lower camera 26, which 26 is slidably disposed on the lower seat rail 22, the lower camera 26 includes a lower camera seat 27 and a lower camera 28, the lower camera seat 27 is slidably disposed on the lower seat rail 22, the lower camera 28 is set on the lower camera base 27, each lower probe base 24 has a lower fine-tuning wheel 29, the lower fine-tuning wheel 29 can adjust the lower probe head 25 to move up and down, and the second down regulator 21 is a pneumatic lifter. In the embodiment, the number of the lower test unit 20 is two, and the lower test unit 20 includes a lower camera 26.

如圖2、圖4及圖6所述上測單元30可滑動地跨設於該二上滑軌16上,每一上測單元30包含二調昇器31、一上座軌32及至少一上探針件33,該二調昇器31分別可滑動地設於該二上滑軌16上,該上座軌32的兩端分別沿該Y軸向地設於該二調昇器31上且受該二調昇器31控制昇降,所述上探針件33可滑動地設於該上座軌32上,所述上探針件33包含一上探針座34及一上探針頭35,該上探針座34可滑動地設於該上座軌32上,該上探針頭35設於該上探針座34上,其中,所述上測單元30包含一上攝像件36,該上攝像件36可滑動地設於該上座軌32上,該上攝像件36包含一上攝像座37及一上攝像器38,該上攝像座37可滑動地設於該上座軌32上,該上攝像器38設於該上攝像座37上,每一上探針座34具有一上微調輪39,該上微調輪39可以調整該上探針頭35昇降,該二調昇器31為氣動昇降器,於本實施例中,所述上測單元30的數量係為兩個,每一上測單元30的上探針件33的數量分別為兩個,每一上測單元30的上攝像件36的數量分別一個。As shown in FIG. 2, FIG. 4 and FIG. 6, the upper test unit 30 is slidably straddled on the two upper slide rails 16, and each upper test unit 30 includes two lifters 31, an upper seat rail 32 and at least one upper The probe member 33, the two regulators 31 are respectively slidably disposed on the two upper slide rails 16, and both ends of the upper seat rail 32 are respectively disposed on the two regulators 31 along the Y axis and are received The two lifters 31 are controlled to move up and down. The upper probe member 33 is slidably disposed on the upper seat rail 32. The upper probe member 33 includes an upper probe seat 34 and an upper probe head 35. The upper probe base 34 is slidably disposed on the upper seat rail 32, and the upper probe head 35 is disposed on the upper probe base 34, wherein the upper measurement unit 30 includes an upper camera 36, which The member 36 is slidably disposed on the upper seat rail 32. The upper camera member 36 includes an upper camera seat 37 and an upper camera 38. The upper camera seat 37 is slidably disposed on the upper seat rail 32. The upper camera The device 38 is disposed on the upper camera base 37. Each upper probe base 34 has an upper fine-tuning wheel 39. The upper fine-tuning wheel 39 can adjust the upper probe head 35 to move up and down. The second lifter 31 is a pneumatic lifter In this embodiment, the number of the upper testing unit 30 is two, the number of the upper probes 33 of each upper testing unit 30 is two, and the upper camera 36 of each upper testing unit 30 The number is one each.

如圖9、圖10及圖12所示,係揭示本創作水平式雙面探針設備之一較佳實施例之操作態樣,使用者將所述下測單元20的二調降器21及所述上測單元30的二調昇器31調整,使所述下測單元20的下座軌22向下降,所述上測單元30的上座軌32向上昇,使該二架軌15的上下兩面騰出可供裝設的空間,供PCB放置,使用者在一載板40的頂面及底面設置多數個積體電路(integrated circuit,簡稱IC)元件41,接著藉由高頻信號校正手法,使用者以一水平式頂面與底面直通校正器(圖未示)進行所述下測單元20及所述上測單元30的信號校正,讓所述所述下測單元20及所述上測單元30可於水平的狀態進行信號校正,所述下測單元20及所述上測單元30的信號校正完畢後,將該載板40滑入該二架軌15上,並且調整該二調降器21及該二調昇器31,讓該下座軌22及該上座軌32靠近該載板40,及該下座軌22的下探針件23及該上座軌32上的上探針件33可以靠近該載板40,使用者可開始量測作業。As shown in FIG. 9, FIG. 10 and FIG. 12, the operation mode of a preferred embodiment of the horizontal double-sided probe device of the present invention is disclosed. The second lifter 31 of the upper test unit 30 adjusts to lower the lower seat rail 22 of the lower test unit 20, and the upper seat rail 32 of the upper test unit 30 rises, so that the two rack rails 15 There is space for installation on both sides for PCB placement. The user installs a number of integrated circuit (IC) components 41 on the top and bottom surfaces of a carrier board 40, and then uses high-frequency signal correction techniques , The user corrects the signals of the lower test unit 20 and the upper test unit 30 with a horizontal top and bottom pass-through corrector (not shown), so that the lower test unit 20 and the upper test unit 30 The measurement unit 30 can perform signal correction in a horizontal state. After the signals of the lower measurement unit 20 and the upper measurement unit 30 are corrected, the carrier board 40 is slid onto the two rack rails 15 and the two adjustments are adjusted. The lowerer 21 and the two lifters 31 bring the lower seat rail 22 and the upper seat rail 32 close to the carrier board 40, and the lower probe member 23 of the lower seat rail 22 and the upper probe on the upper seat rail 32 The piece 33 can be close to the carrier board 40, and the user can start the measurement operation.

如圖9、圖11及圖12所示,係揭示本創作水平式雙面探針設備之一較佳實施例之操作態樣,使用者將該下座軌22的下探針件23及該上座軌32上的上探針件33可以靠近該載板40後,開始量測作業,可依照使用者的需求調整該下測單元20的下座軌22在該下滑軌13上沿X軸向滑移,並且調整該下探針件23的下探針座24在該下座軌22上沿Y軸向滑移,滑移到該載板40要檢測的底面的位置,則可由該下探針頭25檢測該載板40的底面的積體電路元件41,同理可知,可依照使用者的需求調整該上座軌32沿X軸向滑移,該上探針件33的上探針座34在該上座軌32上沿Y軸向滑移,滑移到該載板40檢測的頂面的位置,則可由該上探針頭35檢測該載板40的頂面的積體電路元件41,該載板40的頂面及底面可同時檢測,提升檢測作業的效率,並且所述下探針座24及所述上探針座34水平地信號校正後,可維持信號校正的精準,提高檢測的精準度。As shown in FIG. 9, FIG. 11 and FIG. 12, the operation mode of one preferred embodiment of the present horizontal double-sided probe device is disclosed. The user uses the lower probe member 23 of the lower seat rail 22 and the The upper probe piece 33 on the upper seat rail 32 can approach the carrier board 40 to start the measurement operation, and the lower seat rail 22 of the lower test unit 20 can be adjusted along the X axis on the slide rail 13 according to the user's needs Slip, and adjust the lower probe base 24 of the lower probe member 23 to slide along the Y axis on the lower seat rail 22, and slide to the position of the bottom surface of the carrier board 40 to be detected, then the downward probe The needle 25 detects the integrated circuit element 41 on the bottom surface of the carrier board 40. Similarly, it can be seen that the upper seat rail 32 can be adjusted to slide along the X axis according to the user's needs, and the upper probe seat of the upper probe member 33 34 slides along the Y axis on the upper seat rail 32 to the position of the top surface detected by the carrier board 40, then the upper probe head 35 can detect the integrated circuit element 41 of the top surface of the carrier board 40 , The top surface and the bottom surface of the carrier board 40 can be simultaneously detected to improve the efficiency of the detection operation, and after the horizontal signal correction of the lower probe base 24 and the upper probe base 34, the accuracy of the signal correction can be maintained and improved Detection accuracy.

上述中,當使用者檢測該載板40完畢後,可透過該二調降器21及該二調昇器31調整,使該下座軌22向下降及該上座軌32向上昇,因該二調降器21及該二調昇器31皆為氣動昇降器,可加快該下座軌22及該上座軌32移動的速度,可使該載板40從該二架軌15上快速地抽換,提升更換該載板40的便利性,並且所述下測單元20及所述上測單元30的數量可依照使用者的需求增加或減少,可滿足使用者所需檢測的載板40的檢測需求,提升本創作水平式雙面探針設備的實用性。In the above, when the user detects that the carrier board 40 is completed, the user can adjust through the second down-regulator 21 and the second up-regulator 31, so that the lower seat rail 22 descends and the upper seat rail 32 rises. Both the down-regulator 21 and the two up-regulators 31 are pneumatic lifters, which can speed up the movement speed of the lower seat rail 22 and the upper seat rail 32, and can quickly replace the carrier board 40 from the two rack rails 15 To improve the convenience of replacing the carrier board 40, and the number of the lower test unit 20 and the upper test unit 30 can be increased or decreased according to the user's needs, which can meet the user's inspection of the carrier board 40 Demand, to enhance the practicality of the original horizontal double-sided probe equipment.

另外,所述下測單元20包含一下攝像件26,該下攝像件26可透過該下攝像座27在該下座軌22上滑移,並透過該下攝像器28檢視該下探針件23是否準確探測該載板40的底面,同理可知,所述上測單元30可透過該上攝像件36的上攝像器38檢視該上探針件33檢測該載板40的頂面,該下攝像件26及該上攝像件36係可檢視檢測的精準度,並且,為使得檢測的準度更準確,使用者可使用該下微調輪29調整該下探針頭25昇降,以及使用上微調輪39調整該上探針頭35昇降,以達到更細微準確的檢測結果。In addition, the lower test unit 20 includes a lower camera 26 that can slide on the lower seat rail 22 through the lower camera seat 27 and view the lower probe member 23 through the lower camera 28 Whether the bottom surface of the carrier board 40 is accurately detected, for the same reason, the upper test unit 30 can view the upper probe member 33 through the upper camera 38 of the upper camera member 36 to detect the top surface of the carrier board 40, the lower The camera 26 and the upper camera 36 can check the accuracy of the detection, and in order to make the detection accuracy more accurate, the user can use the lower fine adjustment wheel 29 to adjust the lower probe head 25 to raise and lower, and use the upper fine adjustment The wheel 39 adjusts the up and down of the upper probe head 35 to achieve a more subtle and accurate detection result.

綜上所述,本創作水平式雙面探針設備藉由所述下測單元20及所述上測單元30,該載板40的頂面及底面可同時受到該下探針件23及該上探針件33的檢測,達到雙面檢測的功效,並且所述下測單元20及所述上測單元30的信號校正係為水平狀態,該載板40滑入該二架軌15上執行水平檢測,減少所述下探針座24及所述上探針座34旋轉所造成的誤差,維持信號校正的準確則能提高檢測的精準度,另外,藉由該二調降器21的調降及該二調昇器31的調昇,讓該下座軌22及該上座軌32快速遠離該二架軌15,可使該載板40從該二架軌15上快速地抽換,提升更換該載板40的便利性。To sum up, in the original horizontal double-sided probe device, through the lower test unit 20 and the upper test unit 30, the top surface and the bottom surface of the carrier board 40 can be simultaneously received by the lower probe member 23 and the The detection of the upper probe member 33 achieves the effect of double-sided detection, and the signal correction of the lower test unit 20 and the upper test unit 30 is in a horizontal state, and the carrier board 40 is slid into the two rack rails 15 to perform Horizontal detection reduces the errors caused by the rotation of the lower probe base 24 and the upper probe base 34. Maintaining the accuracy of the signal correction can improve the accuracy of detection. In addition, by adjusting the two down-converters 21 Lowering the raising of the second lifter 31, the lower seat rail 22 and the upper seat rail 32 are quickly away from the two rack rails 15, so that the carrier board 40 can be quickly replaced from the two rack rails 15 and lifted Convenience of replacing the carrier board 40.

10‧‧‧機台11‧‧‧基座12‧‧‧支柱13‧‧‧下滑軌14‧‧‧橫桿15‧‧‧架軌16‧‧‧上滑軌20‧‧‧下測單元21‧‧‧調降器22‧‧‧下座軌23‧‧‧下探針件24‧‧‧下探針座25‧‧‧下探針頭26‧‧‧下攝像件27‧‧‧下攝像座28‧‧‧下攝像器29‧‧‧下微調輪30‧‧‧上測單元31‧‧‧調昇器32‧‧‧上座軌33‧‧‧上探針件34‧‧‧上探針座35‧‧‧上探針頭36‧‧‧上攝像件37‧‧‧上攝像座38‧‧‧上攝像器39‧‧‧上微調輪40‧‧‧載板41‧‧‧積體電路元件10 ‧ ‧ ‧ machine 11 ‧ ‧ ‧ base 12 ‧ ‧ ‧ pillar 13 ‧ ‧ ‧ slide rail 14 ‧ ‧ ‧ cross bar 15 ‧ ‧ ‧ rail 16 ‧ ‧ ‧ upper slide rail 20 ‧ ‧ ‧ lower test unit 21 ‧‧‧Lower adjuster 22‧‧‧Lower rail 23‧‧‧Lower probe piece 24‧‧‧Lower probe holder 25‧‧‧Lower probe head 26‧‧‧Lower camera 27‧‧‧Lower camera Base 28 ‧ ‧ ‧ lower camera 29 ‧ ‧ ‧ lower fine adjustment wheel 30 ‧ ‧ ‧ upper test unit 31 ‧ ‧ ‧ lifter 32 ‧ ‧ ‧ upper seat rail 33 ‧ ‧ ‧ upper probe 34 ‧ ‧ ‧ upper probe Base 35‧‧‧ Upper probe head 36‧‧‧ Upper camera 37‧‧‧ Upper camera base 38‧‧‧ Upper camera 39‧‧‧ Upper trim wheel 40‧‧‧ Carrier board 41‧‧‧ Integrated circuit element

圖1:本創作水平式雙面探針設備之一較佳實施例之立體示意圖。 圖2:本創作水平式雙面探針設備之一較佳實施例之上探針架分解之立體示意圖。 圖3:本創作水平式雙面探針設備之一較佳實施例之下探針架之立體示意圖。 圖4:本創作水平式雙面探針設備之一較佳實施例之俯視示意圖。 圖5:本創作水平式雙面探針設備之一較佳實施例之側視示意圖。 圖6:本創作水平式雙面探針設備之一較佳實施例之前視示意圖。 圖7:本創作水平式雙面探針設備之一較佳實施例之承載架之俯視示意圖。 圖8:本創作水平式雙面探針設備之一較佳實施例之下探針架之俯視示意圖。 圖9:本創作水平式雙面探針設備之一較佳實施例之安裝態樣之立體示意圖。 圖10:本創作水平式雙面探針設備之一較佳實施例之安裝態樣之承載架之俯視示意圖。 圖11:本創作水平式雙面探針設備之一較佳實施例之安裝態樣之俯視示意圖。 圖12:本創作水平式雙面探針設備之一較佳實施例之安裝態樣之側視剖面示意圖。Figure 1: A three-dimensional schematic diagram of a preferred embodiment of the original horizontal double-sided probe device. Figure 2: A perspective schematic view of the probe holder exploded on one of the preferred embodiments of the original horizontal double-sided probe device. Figure 3: A perspective schematic view of a probe holder under one preferred embodiment of the original horizontal double-sided probe device. Figure 4: A schematic top view of a preferred embodiment of the original horizontal double-sided probe device. Figure 5: A schematic side view of a preferred embodiment of the horizontal double-sided probe device of the present invention. Fig. 6: A schematic front view of a preferred embodiment of the original horizontal double-sided probe device. Fig. 7: A schematic top view of a carrier of a preferred embodiment of the horizontal double-sided probe device of the present invention. Figure 8: A schematic top view of a probe holder under one of the preferred embodiments of the original horizontal double-sided probe device. Fig. 9: A three-dimensional schematic view of the installation of one of the preferred embodiments of the horizontal double-sided probe device. Fig. 10: a schematic top view of a mounting frame of a preferred embodiment of a horizontal double-sided probe device of the present invention. Fig. 11: A schematic top view of the installation of one preferred embodiment of the horizontal double-sided probe device of the present invention. Fig. 12: A schematic cross-sectional side view of the installation of a preferred embodiment of the horizontal double-sided probe device of the present invention.

10‧‧‧機台 10‧‧‧machine

11‧‧‧基座 11‧‧‧Dock

12‧‧‧支柱 12‧‧‧ Pillar

13‧‧‧下滑軌 13‧‧‧sliding track

14‧‧‧橫桿 14‧‧‧crossbar

15‧‧‧架軌 15‧‧‧Rack

16‧‧‧上滑軌 16‧‧‧upper rail

21‧‧‧調降器 21‧‧‧Lower

22‧‧‧下座軌 22‧‧‧Lower seat rail

23‧‧‧下探針件 23‧‧‧ Lower probe

30‧‧‧上測單元 30‧‧‧Test unit

31‧‧‧調昇器 31‧‧‧Lift regulator

32‧‧‧上座軌 32‧‧‧Top rail

33‧‧‧上探針件 33‧‧‧Upper probe

34‧‧‧上探針座 34‧‧‧Upper probe holder

36‧‧‧上攝像件 36‧‧‧Upper video

37‧‧‧上攝像座 37‧‧‧up camera

38‧‧‧上攝像器 38‧‧‧Up camera

39‧‧‧上微調輪 39‧‧‧up fine adjustment wheel

Claims (5)

一種水平式雙面探針設備,其包含: 一機台,該機台包含一基座、四支柱、二下滑軌、二橫桿、二架軌及二上滑軌,該四支柱設於該基座的頂面,該二下滑軌沿一X軸向地設於該基座的頂面,該二下滑軌互相平行,該二下滑軌的兩端分別連接一支柱,該二橫桿分別沿一Y軸向地跨設於二支柱,該二架軌沿該X軸向地設於該二橫桿上,該二上滑軌的兩端沿該X軸向地連接該四支柱上,該二上滑軌互相平行; 至少一下測單元,所述下測單元可滑動地跨設於該二下滑軌上,每一下測單元包含二調降器、一下座軌及至少一下探針件,該二調降器分別可滑動地設於該二下滑軌上,該下座軌的兩端分別沿該Y軸向地設於該二調降器上且受該二調降器控制昇降,所述下探針件可滑動地設於該下座軌上,所述下探針件包含一下探針座及一下探針頭,該下探針座可滑動地設於該下座軌上,該下探針頭設於該下探針座上;以及 至少一上測單元,所述上測單元可滑動地跨設於該二上滑軌上,每一上測單元包含二調昇器、一上座軌及至少一上探針件,該二調昇器分別可滑動地設於該二上滑軌上,該上座軌的兩端分別沿該Y軸向地設於該二調昇器上且受該二調昇器控制昇降,所述上探針件可滑動地設於該上座軌上,所述上探針件包含一上探針座及一上探針頭,該上探針座可滑動地設於該上座軌上,該上探針頭設於該上探針座上。A horizontal double-sided probe device includes: a machine including a base, four pillars, two lower rails, two cross bars, two rails and two upper rails, and the four pillars are arranged on the On the top surface of the base, the two slide rails are arranged on the top surface of the base along an X axis. The two slide rails are parallel to each other. Two ends of the two slide rails are respectively connected to a pillar, and the two cross bars are respectively along A Y axially spans the two pillars, the two rails are axially disposed on the two crossbars along the X axis, and two ends of the two upper rails are axially connected to the four pillars along the X axis, the The two upper slide rails are parallel to each other; at least the lower test unit, the lower test unit is slidably straddled on the two lower slide rails, each lower test unit includes two lowerers, a lower seat rail and at least one probe member, the The two down regulators are respectively slidably arranged on the two down rails, and the two ends of the lower seat rail are respectively arranged on the two down regulators along the Y axis and are controlled by the two down regulators to move up and down. The lower probe member is slidably arranged on the lower seat rail. The lower probe member comprises a lower probe seat and a lower probe head. The lower probe seat is slidably arranged on the lower seat rail. The probe head is arranged on the lower probe base; and at least one upper measuring unit, the upper measuring unit is slidably straddled on the two upper slide rails, each upper measuring unit includes two lifters and an upper base Rail and at least one upper probe, the two regulators are respectively slidably arranged on the two upper slide rails, and the two ends of the upper seat rail are respectively arranged on the two regulators along the Y axis and are received The two lifters control lifting, and the upper probe piece is slidably arranged on the upper seat rail, the upper probe piece includes an upper probe seat and an upper probe head, and the upper probe seat is slidable The upper probe head is arranged on the upper probe base. 如請求項1所述之水平式雙面探針設備,其中,所述下測單元包含一下攝像件,該下攝像件可滑動地設於該下座軌上,該下攝像件包含一下攝像座及一下攝像器,該下攝像座可滑動地設於該下座軌上,該下攝像器設於該下攝像座上,所述上測單元包含一上攝像件,該上攝像件可滑動地設於該上座軌上,該上攝像件包含一上攝像座及一上攝像器,該上攝像座可滑動地設於該上座軌上,該上攝像器設於該上攝像座上。The horizontal double-sided probe device according to claim 1, wherein the lower testing unit includes a lower camera, the lower camera is slidably disposed on the lower seat rail, and the lower camera includes a lower camera seat And a camera, the lower camera seat is slidably provided on the lower seat rail, the lower camera is provided on the lower camera seat, the upper test unit includes an upper camera, the upper camera is slidably The upper camera is provided on the upper seat rail. The upper camera includes an upper camera seat and an upper camera. The upper camera seat is slidably provided on the upper seat rail. The upper camera is provided on the upper camera seat. 如請求項1所述之水平式雙面探針設備,其中,每一下探針座具有一下微調輪,該下微調輪可以調整該下探針頭昇降,每一上探針座具有一上微調輪,該上微調輪可以調整該上探針頭昇降。The horizontal double-sided probe device according to claim 1, wherein each lower probe base has a lower fine adjustment wheel, the lower fine adjustment wheel can adjust the lifting of the lower probe head, and each upper probe base has an upper fine adjustment Wheel, the upper fine adjustment wheel can adjust the up and down of the upper probe head. 如請求項2所述之水平式雙面探針設備,其中,每一下探針座具有一下微調輪,該下微調輪可以調整該下探針頭昇降,每一上探針座具有一上微調輪,該上微調輪可以調整該上探針頭昇降。The horizontal double-sided probe device according to claim 2, wherein each lower probe base has a lower fine adjustment wheel, the lower fine adjustment wheel can adjust the lower probe head to move up and down, and each upper probe base has an upper fine adjustment Wheel, the upper fine adjustment wheel can adjust the up and down of the upper probe head. 如請求項1至4中任一項所述之水平式雙面探針設備,其中,該二調降器及該二調昇器皆為氣動昇降器。The horizontal double-sided probe device according to any one of claims 1 to 4, wherein both the second down-converter and the second up-regulator are pneumatic lifters.
TW107124894A 2018-07-19 2018-07-19 Horizontal double-sided probe device TWI653455B (en)

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