TW202002319A - Solar cell and manufacturing method thereof capable of avoiding structural wearing and increasing yield - Google Patents

Solar cell and manufacturing method thereof capable of avoiding structural wearing and increasing yield Download PDF

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TW202002319A
TW202002319A TW107120646A TW107120646A TW202002319A TW 202002319 A TW202002319 A TW 202002319A TW 107120646 A TW107120646 A TW 107120646A TW 107120646 A TW107120646 A TW 107120646A TW 202002319 A TW202002319 A TW 202002319A
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light
electrode
receiving surface
layer
thickness
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TWI724307B (en
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布迪 賈約諾
吳子揚
郭盛輝
簡唯倫
楊明瑞
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中美矽晶製品股份有限公司
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

Provided is a method of making solar cells, which includes the following steps: (A) providing a semi-finished solar cell product including a substrate and an anti-reflection layer, wherein the substrate has an illuminated face and a non-illuminated face on the opposite sides, a plurality of perforations formed to penetrate through the illuminated face and the non-illuminated face and disposed at intervals, and the anti-reflection layer is arranged on the illuminated face; and (B) fabricating a conductive unit in the semi-finished solar cell product, wherein the conductive unit includes a plurality of first electrodes respectively disposed in the perforations, a plurality of second electrodes respectively disposed on the non-illuminated face, and a conductive layer disposed on the non-illuminated face. The first electrode protrudes out of the non-illuminated face, and a portion of each second electrode overlaps the conductive layer. The distance from an end surface of the first electrode protruding out of the non-illuminated face to the non-illuminated face is substantially equal to the thickness of a portion where the second electrode overlaps the conductive layer.

Description

太陽能電池及其製造方法Solar cell and its manufacturing method

本發明是有關於一種太陽能電池及其製造方法,特別是指一種能避免結構磨損以提升良率之太陽能電池,以及製造該太陽能電池的方法。The invention relates to a solar cell and a manufacturing method thereof, in particular to a solar cell capable of avoiding structural wear and improving yield, and a method of manufacturing the solar cell.

近年來,在環保意識的抬頭下,太陽能電池被視為可再生能源的重要發展科技。在太陽能電池的製程中,隨著各個太陽能電池製作完成並準備運送至後端加工的過程中,由於太陽能電池常會以上、下堆疊的方式運送,因此,層疊的太陽能電池之間容易因震動而相互摩擦,導致部分的結構磨損,以致於良率不盡理想。In recent years, with the rising awareness of environmental protection, solar cells are regarded as an important development technology for renewable energy. In the manufacturing process of solar cells, as each solar cell is completed and ready to be shipped to the back-end process, because the solar cells are often transported in a stacking manner, the stacked solar cells are prone to each other due to vibration. Friction causes part of the structure to wear out, so that the yield is not ideal.

因此,本發明之目的,即在提供一種能避免結構磨損提升良率之太陽能電池。Therefore, the object of the present invention is to provide a solar cell that can avoid structural wear and improve yield.

因此,本發明之目的,即在提供一種用於製作前述太陽能電池的製造方法,以降低運送過程中結構磨損的情況。Therefore, the object of the present invention is to provide a manufacturing method for manufacturing the aforementioned solar cell, so as to reduce the structural wear during transportation.

於是,本發明一種太陽能電池的製造方法,包含以下步驟:(A)提供一太陽能電池半成品,該太陽能電池半成品包括一基板及一抗反射層,該基板具有位於相反側的一受光面及一非受光面,並形成多個貫穿該受光面及該非受光面且間隔排列的穿孔,該抗反射層設置於該受光面;及(B)在該太陽能電池半成品製作一導電單元,該導電單元包括多個分別設於該等穿孔的第一電極、多個設於該基板的該非受光面的第二電極,及一設於該基板的該非受光面的導電層,該等第一電極凸出於該非受光面之外,且每一第二電極的一部分與該導電層重疊,該等第一電極凸出該非受光面的端面至該非受光面的距離實質等於該第二電極與該導電層重疊處的厚度。Therefore, a method for manufacturing a solar cell of the present invention includes the following steps: (A) providing a semi-finished solar cell product including a substrate and an anti-reflection layer, the substrate having a light-receiving surface and a non-reflective layer on opposite sides A light-receiving surface, and a plurality of spaced-apart through-holes are formed through the light-receiving surface and the non-light-receiving surface, and the anti-reflection layer is provided on the light-receiving surface; A first electrode disposed on the perforations, a plurality of second electrodes disposed on the non-light-receiving surface of the substrate, and a conductive layer disposed on the non-light-receiving surface of the substrate, the first electrodes protruding from the non-perforated surface Outside the light-receiving surface, and a portion of each second electrode overlaps with the conductive layer, the distance from the end surface of the first electrodes protruding from the non-light-receiving surface to the non-light-receiving surface is substantially equal to the overlapping area of the second electrode and the conductive layer thickness.

在一些實施態樣中,該步驟(B)包括一步驟(B1),在該步驟(B1)中是以同一網版印刷程序製作該等第一電極及該等第二電極,讓該第二電極的厚度小於該第一電極凸出該非受光面的端面至該非受光面的距離。In some implementations, the step (B) includes a step (B1), in which the first electrode and the second electrode are made by the same screen printing process, so that the second The thickness of the electrode is smaller than the distance from the end surface of the first electrode protruding from the non-light-receiving surface to the non-light-receiving surface.

在一些實施態樣中,該步驟(B)還包括一在該步驟(B1)之後的步驟(B2),在該步驟(B2)中是以另一網版印刷程序將該導電層網印於該非受光面及該等第二電極上,讓該導電層覆蓋該非受光面並重疊於每一第二電極的一部分。In some embodiments, the step (B) further includes a step (B2) after the step (B1). In the step (B2), the conductive layer is screen printed on the screen by another screen printing process. On the non-light-receiving surface and the second electrodes, the conductive layer covers the non-light-receiving surface and overlaps a part of each second electrode.

在一些實施態樣中,在步驟(A)中還提供一第一網版結構,該第一網版結構包括一第一網布層、一設置於該第一網布層之底面的第一阻擋層,及多個間隔設置於該第一阻擋層之底面的第二阻擋層,該第一阻擋層界定出多個分別對應於該等穿孔的第一開口及多個對應於該非受光面的第二開口,該第二阻擋層界定出多個分別對應該等第一開口的第三開口,且該第一網布層具有一第一厚度,該第一網布層的底面至該第一阻擋層的底面具有一第二厚度,以及該第二阻擋層具有一第三厚度,在步驟(B1)中,該第二阻擋層壓抵於該非受光面且鄰近該穿孔處,而該第一阻擋層遠離該第二阻擋層之一端壓抵於該非受光面且遠離該穿孔處,使該等第一電極經由該第一網版結構的該等第一開口及該等第三開口塗布於該等穿孔,以及該等第二電極是同時經由該第一網版結構的該等第二開口分別對應塗佈於該非受光面,且每一第一電極的端面至該非受光面的距離等於該第一厚度、該第二厚度及該第三厚度的總和,每一第二電極的厚度等於該第二厚度及該第三厚度的總和。In some embodiments, a first screen structure is further provided in step (A). The first screen structure includes a first mesh layer and a first disposed on the bottom surface of the first mesh layer A barrier layer, and a plurality of second barrier layers spaced on the bottom surface of the first barrier layer, the first barrier layer defines a plurality of first openings corresponding to the perforations and a plurality of corresponding to the non-light-receiving surface, respectively A second opening, the second barrier layer defines a plurality of third openings respectively corresponding to the first openings, and the first mesh layer has a first thickness, and the bottom surface of the first mesh layer reaches the first The bottom layer of the barrier layer has a second thickness, and the second barrier layer has a third thickness. In step (B1), the second barrier layer is pressed against the non-light-receiving surface and adjacent to the perforation, and the first An end of the barrier layer away from the second barrier layer is pressed against the non-light-receiving surface and away from the perforation, so that the first electrodes are coated on the first opening and the third opening of the first screen structure on the Through holes, and the second electrodes are simultaneously coated on the non-light-receiving surface through the second openings of the first screen structure, and the distance from the end surface of each first electrode to the non-light-receiving surface is equal to the first A thickness, the sum of the second thickness and the third thickness, and the thickness of each second electrode is equal to the sum of the second thickness and the third thickness.

在一些實施態樣中,在步驟(A)中還提供一第二網版結構,該第二網版結構包括一第二網布層、一固定於該第二網布層的第三阻擋層,該第三阻擋層界定出一第四開口,在步驟(B2)中,該第三阻擋層壓抵遮蔽該等第一電極,及該等第二電極的一部分,該導電層是經由該第二網版結構的該第四開口對應塗佈於該非受光面未受該第三阻擋層遮蔽之部分,且該導電層與每一第二電極部分重疊,而該導電層與該第二電極之重疊處的厚度等於該第一厚度、該第二厚度及該第三厚度的總和。In some embodiments, a second screen structure is further provided in step (A), the second screen structure includes a second mesh layer, and a third barrier layer fixed to the second mesh layer The third barrier layer defines a fourth opening. In step (B2), the third barrier layer shields the first electrodes and part of the second electrodes. The conductive layer passes through the first The fourth opening of the two screen structure corresponds to the portion of the non-light-receiving surface that is not shielded by the third barrier layer, and the conductive layer partially overlaps with each second electrode, and the conductive layer and the second electrode The thickness at the overlap is equal to the sum of the first thickness, the second thickness, and the third thickness.

在一些實施態樣中,在步驟(B2)中,每一第一電極的端面至對應的第二電極與該導電層重疊處的端面差小於15微米。In some embodiments, in step (B2), the difference between the end surface of each first electrode and the end surface where the corresponding second electrode overlaps the conductive layer is less than 15 microns.

在一些實施態樣中,每一第一電極的高度高於對應的該第二電極的高度,且該第一電極的端面至對應的該第二電極的端面差大於5微米。In some embodiments, the height of each first electrode is higher than the height of the corresponding second electrode, and the difference between the end surface of the first electrode and the end surface of the corresponding second electrode is greater than 5 microns.

於是,本發明經由上述方法製成的太陽能電池,包含:一基板、一抗反射層、一導電單元及一絕緣層。該基板包括一第一半導體層,及一形成於該第一半導體層且多數載子異於於該第一半導體層的第二半導體層,該第一半導體層具有一非受光面,且該第二半導體層具有一相反於該非受光面的受光面,該基板形成多個貫穿該受光面及該非受光面且間隔排列的穿孔。該抗反射層製備於該受光面。該導電單元包括多個分別設於該等穿孔的第一電極、多個設於該基板的該非受光面的第二電極,及一設於該基板的該非受光面的導電層,該等第一電極凸出於該非受光面之外,且每一第二電極的一部分與該導電層重疊,該等第一電極凸出該非受光面的端面至該非受光面的距離實質等於該第二電極與該導電層重疊處的厚度。該絕緣層設置於該等穿孔中並界於該基板及該等第一電極之間,使該第一電極與該第一半導體層電性絕緣。Therefore, the solar cell manufactured by the method according to the present invention includes: a substrate, an anti-reflection layer, a conductive unit and an insulating layer. The substrate includes a first semiconductor layer and a second semiconductor layer formed on the first semiconductor layer and having a majority carrier different from the first semiconductor layer. The first semiconductor layer has a non-light-receiving surface, and the first The two semiconductor layers have a light-receiving surface opposite to the non-light-receiving surface, and the substrate forms a plurality of spaced-apart through-holes that penetrate the light-receiving surface and the non-light-receiving surface. The anti-reflection layer is prepared on the light-receiving surface. The conductive unit includes a plurality of first electrodes disposed on the through holes, a plurality of second electrodes disposed on the non-light-receiving surface of the substrate, and a conductive layer disposed on the non-light-receiving surface of the substrate, the first The electrode protrudes out of the non-light-receiving surface, and a portion of each second electrode overlaps with the conductive layer, and the distance from the end surface of the first electrode protruding from the non-light-receiving surface to the non-light-receiving surface is substantially equal to the second electrode and the The thickness where the conductive layers overlap. The insulating layer is disposed in the through holes and bounds between the substrate and the first electrodes to electrically insulate the first electrode from the first semiconductor layer.

本發明之功效在於:太陽能電池先於該基板上第一次網版印刷該等第一電極及該等第二電極,並透過控制該等第二電極的厚度小於該等第一電極的厚度,隨後再由第二次網版印刷製作該導電層,讓第二次網版印刷的該導電層能與該第二電極的重疊處的厚度等於該第一電極的端面至該非受光面的距離,使得該等第一電極與該導電層大致齊平,因此,該等太陽能電池在以上、下堆疊的方式運送過程中,層疊的太陽能電池之間便能避免因該等第一電極與該導電層中有部分結構較為凸出所造成的摩擦損傷問題,進而提升生產良率。The effect of the invention is that the solar cell first screen-prints the first electrodes and the second electrodes on the substrate, and by controlling the thickness of the second electrodes to be smaller than the thickness of the first electrodes, Then, the conductive layer is made by the second screen printing, so that the thickness of the overlap between the conductive layer of the second screen printing and the second electrode is equal to the distance from the end surface of the first electrode to the non-light-receiving surface, The first electrodes are substantially flush with the conductive layer. Therefore, during the transportation of the solar cells in a stacking mode, the stacked solar cells can avoid the first electrode and the conductive layer. Some of the structures are more protruding and cause friction damage, which improves production yield.

參閱圖1至圖3,本發明太陽能電池1之一實施例,包含一基板11、一抗反射層12、一導電單元13、多個絕緣層14及一傳導層15。在本實施例中,該太陽能電池1舉例為金屬穿透式背電極太陽電池(Metal-wrap-through Solar Cell,MWT Solar Cell),且將多個太陽能電池1組合後形成一太陽能電池模組,便能用於進行光電轉換提供電力,其中圖1是該太陽能電池1的仰視示意圖,圖2是該太陽能電池1的俯視示意圖以及圖3是該太陽能電池1的側視示意圖。1 to 3, an embodiment of the solar cell 1 of the present invention includes a substrate 11, an anti-reflection layer 12, a conductive unit 13, a plurality of insulating layers 14 and a conductive layer 15. In this embodiment, the solar cell 1 is an example of a metal-wrap-through solar cell (MWT Solar Cell), and a plurality of solar cells 1 are combined to form a solar cell module. It can be used for photoelectric conversion to provide power. FIG. 1 is a schematic bottom view of the solar cell 1, FIG. 2 is a schematic top view of the solar cell 1, and FIG. 3 is a schematic side view of the solar cell 1.

參閱圖3,該基板11包括一第一半導體層111,及一由該第一半導體層111藉由例如擴散等方式摻雜異質成分而形成多數載子異於該第一半導體層111的第二半導體層112,該第一半導體層111具有一非受光面113,且該第二半導體層112具有一相反於該非受光面113的受光面114,該基板11形成多個貫穿該非受光面113及該受光面114且間隔排列的穿孔115。在本實施例中,該第一半導體層111舉例為一矽基P型半導體層,該第二半導體層112舉例為一矽基N型半導體層,進而形成P-N接面,且該第一半導體層111的底面為該非受光面113,該第二半導體層112的頂面為該受光面114,使用時由該受光面114朝向光源接收入射光。此外,該受光面114較佳形成粗糙表面或圖案化表面,藉以增進抗反射特性。Referring to FIG. 3, the substrate 11 includes a first semiconductor layer 111, and a second carrier is formed by the first semiconductor layer 111 by doping a heterogeneous component by, for example, diffusion and the majority carrier is different from the first semiconductor layer 111 In the semiconductor layer 112, the first semiconductor layer 111 has a non-light-receiving surface 113, and the second semiconductor layer 112 has a light-receiving surface 114 opposite to the non-light-receiving surface 113, the substrate 11 forms a plurality of through the non-light-receiving surface 113 and the The light-receiving surface 114 and the through holes 115 arranged at intervals. In this embodiment, the first semiconductor layer 111 is exemplified by a silicon-based P-type semiconductor layer, and the second semiconductor layer 112 is exemplified by a silicon-based N-type semiconductor layer, thereby forming a PN junction, and the first semiconductor layer The bottom surface of 111 is the non-light-receiving surface 113, and the top surface of the second semiconductor layer 112 is the light-receiving surface 114. In use, the light-receiving surface 114 receives incident light toward the light source. In addition, the light-receiving surface 114 preferably forms a rough surface or a patterned surface to improve anti-reflection characteristics.

參閱圖3,該抗反射層12製備於該受光面114,可藉由適當材質之選用製作為單層或多層結構,透過折射率的配置讓該抗反射層12改變入射光的入射角,使進入至該基板11的入射光量提升,進而提升光電轉換的效率,該抗反射層12的材料例如氮化矽,但不以此材質為限。Referring to FIG. 3, the anti-reflection layer 12 is prepared on the light-receiving surface 114, and can be made into a single-layer or multi-layer structure through the selection of appropriate materials. The configuration of the refractive index allows the anti-reflection layer 12 to change the incident angle of incident light so that The amount of incident light entering the substrate 11 is increased to further improve the photoelectric conversion efficiency. The material of the anti-reflection layer 12 is, for example, silicon nitride, but it is not limited to this material.

參閱圖3,該導電單元13包括多個分別設於該等穿孔115的第一電極131、多個設於該基板11的該非受光面113的第二電極132,及一設於該基板11的該非受光面113的導電層133,該等第一電極131凸出於該非受光面113之外,且每一第二電極132的一部分與該導電層133重疊,該等第一電極131凸出該非受光面113的端面(圖中標示A處)至該非受光面113的距離實質等於該第二電極132與該導電層133重疊處(圖中標示B處)的厚度,使得該等第一電極131的端面A處與該導電層133的凸出處B大致齊平,如此在堆疊多片太陽能電池1時,可避免該等第一電極131或該導電層133因結構凸出而導致的結構摩擦損傷。在本實施例中,該等第一電極131為負電極,具體而言,每一第一電極131連接該第二半導體層112及該傳導層15(見圖3中該等第一電極131的頂側位置),使該第二半導體層112所聚集的電子載子由該等第一電極131導出,另外,該等第二電極132為正電極,也就是說,每一第二電極132連接於該第一半導體層111,使該第一半導體層111所聚集的電洞載子由該等第二電極132導出,也就是說,相鄰兩太陽能電池1能透過該等第一電極131和該等第二電極132電性連接,或提供電器設備電力。Referring to FIG. 3, the conductive unit 13 includes a plurality of first electrodes 131 respectively disposed on the through holes 115, a plurality of second electrodes 132 disposed on the non-light-receiving surface 113 of the substrate 11, and a second electrode 132 disposed on the substrate 11 In the conductive layer 133 of the non-light-receiving surface 113, the first electrodes 131 protrude out of the non-light-receiving surface 113, and a portion of each second electrode 132 overlaps the conductive layer 133, and the first electrodes 131 protrude from the non-light-receiving surface 113 The distance from the end surface of the light receiving surface 113 (marked A in the figure) to the non-light receiving surface 113 is substantially equal to the thickness of the overlapping position of the second electrode 132 and the conductive layer 133 (marked B in the figure), so that the first electrodes 131 The end surface A of the conductive layer 133 is substantially flush with the protrusion B of the conductive layer 133, so that when stacking multiple solar cells 1, the structural friction damage caused by the protruding structure of the first electrode 131 or the conductive layer 133 can be avoided . In this embodiment, the first electrodes 131 are negative electrodes. Specifically, each first electrode 131 is connected to the second semiconductor layer 112 and the conductive layer 15 (see FIG. 3 for the first electrodes 131 Top side position), so that the electron carriers accumulated in the second semiconductor layer 112 are led out from the first electrodes 131, and the second electrodes 132 are positive electrodes, that is, each second electrode 132 is connected In the first semiconductor layer 111, the hole carriers gathered in the first semiconductor layer 111 are led out from the second electrodes 132, that is, two adjacent solar cells 1 can pass through the first electrodes 131 and The second electrodes 132 are electrically connected or provide electrical equipment power.

參閱圖3,該絕緣層14設置於該等穿孔115中並界於該基板11及該等第一電極131之間,使該第一電極131與該第一半導體層111電性絕緣。另外,該傳導層15是由具導電功能的金屬製成且該傳導層15呈透明狀可供入射光穿透。該傳導層15佈設於該抗反射層12並連接於該等第一電極131,用於收集該第二半導體層112的電子載子並將電子載子傳導至該等第一電極131。但該傳導層15不以透明狀為限,該傳導層15也可以呈非透明狀且圖案化分佈於該抗反射層12。Referring to FIG. 3, the insulating layer 14 is disposed in the through holes 115 and bounded between the substrate 11 and the first electrodes 131 to electrically insulate the first electrode 131 from the first semiconductor layer 111. In addition, the conductive layer 15 is made of metal with a conductive function and the conductive layer 15 is transparent for incident light to penetrate. The conductive layer 15 is disposed on the anti-reflection layer 12 and connected to the first electrodes 131 for collecting the electron carriers of the second semiconductor layer 112 and conducting the electron carriers to the first electrodes 131. However, the conductive layer 15 is not limited to being transparent, and the conductive layer 15 may also be non-transparent and distributed in a pattern on the anti-reflection layer 12.

參閱圖4,本發明太陽能電池1的製作方法之較佳實施例依序包括提供一太陽能電池半成品、一第一網版結構2及一第二網版結構3的步驟S01、在該太陽能電池半成品製作該導電單元13的步驟S02,及烘乾燒結該導電單元13的步驟S03。Referring to FIG. 4, a preferred embodiment of the manufacturing method of the solar cell 1 of the present invention sequentially includes the step S01 of providing a solar cell semi-finished product, a first screen structure 2 and a second screen structure 3 in the solar cell semi-finished product Step S02 of manufacturing the conductive unit 13 and step S03 of baking and sintering the conductive unit 13.

參閱圖5及相關圖式,以下先說明步驟S01提供該太陽能電池半成品的製作流程。Referring to FIG. 5 and related drawings, the following first describes the manufacturing process of the solar cell semi-finished product provided by step S01.

參閱圖6,在步驟S011中,是將一原本為平整表面的基板11經表面粗化處理或圖案化處理後,形成具有粗糙表面的該基板11,使該基板11的表面呈凹凸不平狀,藉此改變入射光的反射角,讓入射光能再一次朝基板11入射,藉此提升入射光量。該基板11例如是一P型矽晶圓,因此該步驟S011即是對該P型矽晶圓施以粗化處理。Referring to FIG. 6, in step S011, a substrate 11 which is originally a flat surface is subjected to surface roughening or patterning to form the substrate 11 having a rough surface, so that the surface of the substrate 11 is uneven. In this way, the reflection angle of the incident light is changed, so that the incident light can enter the substrate 11 again, thereby increasing the amount of incident light. The substrate 11 is, for example, a P-type silicon wafer, so the step S011 is to roughen the P-type silicon wafer.

參閱圖7,在步驟S012中,是對該基板11的整體表面施以擴散摻雜含磷之成分,使得該基板11由P型矽晶圓轉換形成區分為P型的該第一半導體層111及N型的該第二半導體層112的結構,並由該第一半導體層111與該第二半導體層112形成P-N接面,藉此當入射光入射至該P-N接面時,激發位於該P-N接面的電子電洞對,使電子載子與電洞載子相互分離形成光電流。另外,要說明的是,由於本步驟是藉由擴散方式製作該第二半導體層112,因此在該第二半導體層112的外表面也將形成該產物層116,也就是含磷氧化層。Referring to FIG. 7, in step S012, the entire surface of the substrate 11 is diffused and doped with a phosphorus-containing component, so that the substrate 11 is converted from a P-type silicon wafer to form the first semiconductor layer 111 that is divided into P-type And the N-type structure of the second semiconductor layer 112, and the first semiconductor layer 111 and the second semiconductor layer 112 form a PN junction, whereby when incident light is incident on the PN junction, the PN junction is excited The pair of electron holes at the junction makes the electron carriers and the hole carriers separate from each other to form a photocurrent. In addition, it should be noted that since this step is to fabricate the second semiconductor layer 112 by diffusion, the product layer 116, that is, the phosphorus-containing oxide layer, will also be formed on the outer surface of the second semiconductor layer 112.

參閱圖8,在步驟S013中,是透過雷射的方式在該基板11上形成該等穿孔115,以供後續製作該等第一電極131(參閱圖3),此種製作該等第一電極131(參閱圖3)的方式可將該第二半導體層112的光電流傳導至太陽能電池1(參閱圖3)的背面使用,避免過多非必要結構占用該受光面114的照光面積。Referring to FIG. 8, in step S013, the through holes 115 are formed on the substrate 11 by means of laser for subsequent fabrication of the first electrodes 131 (see FIG. 3). The method of 131 (see FIG. 3) can conduct the photocurrent of the second semiconductor layer 112 to the back of the solar cell 1 (see FIG. 3) to avoid excessive unnecessary structures occupying the illuminated area of the light receiving surface 114.

參閱圖8、圖9,在步驟S014中,透過蝕刻移除該產物層116,特別是該受光面114的部分,以提升入射光至該P-N接面的機率。此外,還移除該第二半導體層112的多數部分,僅保留對應該受光面114的部分。Referring to FIG. 8 and FIG. 9, in step S014, the product layer 116 is removed by etching, especially the portion of the light-receiving surface 114 to increase the probability of incident light reaching the P-N junction. In addition, most of the second semiconductor layer 112 is also removed, and only the portion corresponding to the light-receiving surface 114 remains.

參閱圖10及圖11,在步驟S015中,會鈍化該基板11(參閱圖3)的表面,使該等穿孔115(參閱圖3)的孔壁形成絕緣層14,並且在鈍化步驟之後,在該受光面114上製備該抗反射層12,透過不同折射率的介質使入射光更容易穿透進入該第一半導體層111及該第二半導體層112並且降低反射特性,據此,便完成該太陽能電池半成品。Referring to FIGS. 10 and 11, in step S015, the surface of the substrate 11 (see FIG. 3) is passivated, so that the hole walls of the perforations 115 (see FIG. 3) form an insulating layer 14, and after the passivation step, The anti-reflective layer 12 is prepared on the light-receiving surface 114, and through different refractive index media, incident light can more easily penetrate into the first semiconductor layer 111 and the second semiconductor layer 112 and reduce the reflection characteristics, according to which, the completion of the Semi-finished solar cells.

參閱圖4、5及相關圖式,以下說明步驟S02、S03製作該導電單元13的具體流程,該步驟S02可進一步區分為製作該等第一電極131及該等第二電極132的步驟S021,以及後續製作該導電層133的步驟S022。Referring to FIGS. 4 and 5 and related drawings, the following describes the specific process of manufacturing the conductive unit 13 in steps S02 and S03. This step S02 can be further divided into the step S021 of manufacturing the first electrodes 131 and the second electrodes 132, And the subsequent step S022 of manufacturing the conductive layer 133.

參閱圖12至圖14,在該步驟S021中是以該第一網版結構2進行網版印刷程序製作該等第一電極131及該等第二電極132,該第一網版結構2包括一第一網布層21、一設置於該第一網布層21之底面的第一阻擋層22,及多個間隔設置於該第一阻擋層22之底面的第二阻擋層23,在本實施例中,該第一阻擋層22及該第二阻擋層23為一體成型的結構。該第一網布層21具有一非接觸面211、一相反於該非接觸面211的接觸面212,及多個貫穿該非接觸面211及該接觸面212的網孔213,上述第一網布層21之底面指的是第一網布層21的接觸面212。該第一阻擋層22界定出多個分別對應於該等穿孔115的第一開口221及多個對應於該非受光面113的第二開口222,該第二阻擋層23界定出多個分別對應該等第一開口221的第三開口231,用於製作該等第一電極131及該等第二電極132的導電漿料(圖中未繪製)滲過該第一網布層21後僅能經由該等第一開口221、該等第二開口222及該等第三開口231流至該基板11(參閱圖3),也就是說該等第一開口221、該等第二開口222及該等第三開口231是用於該等第一電極131及該等第二電極132的圖案界定。此外,藉由該等第二阻擋層23的設置,可讓用於阻隔導電漿料的該第一阻擋層22及該第二阻擋層23形成具有不同厚度的結構,使得該等第一電極131及該等第二電極132相較於該非受光面113具有一預定高度落差。Referring to FIGS. 12 to 14, in the step S021, the first screen structure 2 is used to perform a screen printing process to produce the first electrodes 131 and the second electrodes 132. The first screen structure 2 includes a The first mesh layer 21, a first barrier layer 22 disposed on the bottom surface of the first mesh layer 21, and a plurality of second barrier layers 23 disposed on the bottom surface of the first barrier layer 22 in this embodiment In an example, the first barrier layer 22 and the second barrier layer 23 are integrally formed. The first mesh layer 21 has a non-contact surface 211, a contact surface 212 opposite to the non-contact surface 211, and a plurality of mesh holes 213 penetrating the non-contact surface 211 and the contact surface 212, the first mesh layer The bottom surface of 21 refers to the contact surface 212 of the first mesh layer 21. The first barrier layer 22 defines a plurality of first openings 221 corresponding to the through holes 115 and a plurality of second openings 222 corresponding to the non-light-receiving surface 113 respectively, and the second barrier layer 23 defines a plurality of corresponding The third opening 231 such as the first opening 221 is used for making the conductive paste (not shown in the figure) of the first electrode 131 and the second electrode 132 can only pass through the first mesh layer 21 The first openings 221, the second openings 222, and the third openings 231 flow to the substrate 11 (see FIG. 3), that is, the first openings 221, the second openings 222, and the The third opening 231 is used to define the patterns of the first electrodes 131 and the second electrodes 132. In addition, by the arrangement of the second barrier layers 23, the first barrier layer 22 and the second barrier layer 23 used to block the conductive paste can be formed into structures with different thicknesses, so that the first electrodes 131 Compared with the non-light-receiving surface 113, the second electrodes 132 have a predetermined height drop.

在步驟S021中,將該第一網版結構2與該太陽能電池半成品完成對準後,可將導電漿料(例如銀漿)塗覆於該第一網布層21上,隨後將網版印刷程序使用的刮刀結構(圖中未繪製)加壓於對應該第二阻擋層23處的該第一網布層21,使該第二阻擋層23壓抵於該非受光面113且鄰近該穿孔115處(如圖13),而作為製作該等第一電極131的導電漿料經由該第一網版結構2的該等網孔213、該等第一開口221及該等第三開口231塗佈於該等穿孔115內,並且填充至與該第一網布層21的非接觸面211齊平,而每一第一電極131的另一端則完全覆蓋固定於該第二半導體層112朝向穿孔115之一側面並大致與該受光面114齊平。隨著刮刀結構移動至對應該等第二開口222處時,會使得該第一阻擋層22未設置該第二阻擋層23之一端壓抵於該非受光面113且遠離該穿孔115處(如圖14),此時導電漿料經由該第一網版結構2的該等第二開口222分別對應塗佈於該非受光面113,且填充至與該第一網布層21的非接觸面211齊平,而製作出作為該等第二電極132的結構。據此,根據在該第一阻擋層22下欲製作該等第一電極131處設置該等第二阻擋層23,可讓該第一網版結構2在同一網印過程中便形成了厚度不一的第一電極131及第二電極132,其排列方式如圖1所示,特別要說明的是,在較佳的實施態樣中,該第一電極131的端面至對應的該第二電極132的端面差大於5微米。In step S021, after the first screen structure 2 and the solar cell semi-finished product are completely aligned, a conductive paste (for example, silver paste) may be coated on the first mesh layer 21, and then the screen is printed The scraper structure (not shown in the figure) used in the procedure presses the first mesh layer 21 corresponding to the second barrier layer 23, so that the second barrier layer 23 is pressed against the non-light-receiving surface 113 and adjacent to the perforation 115 (See FIG. 13), and the conductive paste used to make the first electrodes 131 is coated through the mesh holes 213, the first openings 221, and the third openings 231 of the first screen structure 2. Inside the through holes 115, and filled to be flush with the non-contact surface 211 of the first mesh layer 21, and the other end of each first electrode 131 is completely covered and fixed to the second semiconductor layer 112 toward the through hole 115 One side is substantially flush with the light-receiving surface 114. As the scraper structure moves to correspond to the second openings 222, the end of the first barrier layer 22 without the second barrier layer 23 is pressed against the non-light-receiving surface 113 and away from the through hole 115 (as shown in FIG. 14) At this time, the conductive paste is respectively coated on the non-light-receiving surface 113 through the second openings 222 of the first screen structure 2 and filled to be flush with the non-contact surface 211 of the first mesh layer 21 The second electrode 132 is made into a flat structure. Accordingly, according to the provision of the second barrier layers 23 under the first barrier layer 22 where the first electrodes 131 are to be fabricated, the first screen structure 2 can form a thickness difference during the same screen printing process The arrangement of the first electrode 131 and the second electrode 132 of FIG. 1 is as shown in FIG. 1. In particular, in a preferred embodiment, the end surface of the first electrode 131 reaches the corresponding second electrode The end face difference of 132 is greater than 5 microns.

參閱圖15及圖16,接著進行步驟S022,在該步驟S022中是以該第二網版結構3進行網版印刷程序將該導電層133網印於該非受光面113及該等第二電極132上,讓該導電層133覆蓋該非受光面114並重疊於每一第二電極132的一部分。進一步而言,該第二網版結構3包括一第二網布層31及一固定於該第二網布層31的底面的第三阻擋層32。該第二網布層31的結構與該第一網布層21相似,故不再贅述,另外,該第三阻擋層32界定出一對應該非受光面113的第四開口321。該第二網版結構3與該第一網版結構2的不同處在於該第二網版結構3僅有一層厚度均一的第三阻擋層32,因此不能如同該第一網版結構2般製作出具有不同厚度之結構。在步驟S022中,當刮刀結構加壓於該第二網布層31之對應該等第二電極132周遭時,該第三阻擋層32壓抵並遮蔽該等第一電極131,及該等第二電極132的一部分,此時用於製作該導電層133的導電漿料(例如鋁漿)經由該第二網版結構3的該第四開口321對應塗佈於該非受光面113未受該第三阻擋層32遮蔽之部分,且該導電層133與每一第二電極132部分重疊,而且未與該等第一電極131接觸,也就是未與該等第一電極131電性連接。透過該導電層133形成一電場能有效防止分離的電洞載子再次與電子載子復合。Referring to FIGS. 15 and 16, step S022 is next performed. In this step S022, the second screen structure 3 is used to perform a screen printing process to screen-print the conductive layer 133 on the non-light-receiving surface 113 and the second electrodes 132 On top, the conductive layer 133 covers the non-light-receiving surface 114 and overlaps a portion of each second electrode 132. Further, the second screen structure 3 includes a second mesh layer 31 and a third barrier layer 32 fixed to the bottom surface of the second mesh layer 31. The structure of the second mesh layer 31 is similar to that of the first mesh layer 21, so it will not be described in detail. In addition, the third barrier layer 32 defines a pair of fourth openings 321 that should be non-light-receiving surfaces 113. The difference between the second screen structure 3 and the first screen structure 2 is that the second screen structure 3 has only a third barrier layer 32 with a uniform thickness, so it cannot be fabricated like the first screen structure 2 Structures with different thicknesses. In step S022, when the doctor blade structure presses around the corresponding second electrodes 132 of the second mesh layer 31, the third barrier layer 32 presses against and shields the first electrodes 131, and the first A part of the two electrodes 132, at this time, the conductive paste (for example, aluminum paste) used to make the conductive layer 133 is coated on the non-light-receiving surface 113 through the fourth opening 321 of the second screen structure 3 without being affected by the first The portion shielded by the three barrier layers 32, and the conductive layer 133 partially overlaps each second electrode 132, and is not in contact with the first electrodes 131, that is, is not electrically connected to the first electrodes 131. Forming an electric field through the conductive layer 133 can effectively prevent the separated hole carriers from recombining with the electron carriers again.

參閱圖3與圖12,特別要說明的是,該第一網布層21具有一第一厚度L1,該第一網布層21的接觸面212至該第一阻擋層22的底面具有一第二厚度L2,以及該第二阻擋層23具有一第三厚度L3,且每一第一電極131的端面至該非受光面113的距離實質等於該第一厚度L1、該第二厚度L2及該第三厚度L3的總和。相較於第二電極132,每一第二電極132的厚度實質等於該第二厚度L2及該第三厚度L3的總和。因此,該導電層133與該第二電極132之重疊處的厚度實質等於該第一厚度L1、該第二厚度L2及該第三厚度L3的總和。也就是說,在步驟S021中,該第一電極131的端面至該非受光面113的距離大於該第二電極132的厚度,藉此在步驟S022中,該導電層133與該第二電極132之重疊處的厚度實質等於該第一電極131的端面至該非受光面113的距離。Referring to FIGS. 3 and 12, it is particularly important to note that the first mesh layer 21 has a first thickness L1, and the contact surface 212 of the first mesh layer 21 to the bottom surface of the first barrier layer 22 has a first Two thicknesses L2 and the second barrier layer 23 have a third thickness L3, and the distance from the end surface of each first electrode 131 to the non-light-receiving surface 113 is substantially equal to the first thickness L1, the second thickness L2 and the first thickness The sum of three thicknesses L3. Compared to the second electrode 132, the thickness of each second electrode 132 is substantially equal to the sum of the second thickness L2 and the third thickness L3. Therefore, the thickness of the overlap between the conductive layer 133 and the second electrode 132 is substantially equal to the sum of the first thickness L1, the second thickness L2, and the third thickness L3. That is, in step S021, the distance from the end surface of the first electrode 131 to the non-light-receiving surface 113 is greater than the thickness of the second electrode 132, whereby in step S022, the conductive layer 133 and the second electrode 132 The thickness at the overlap is substantially equal to the distance from the end surface of the first electrode 131 to the non-light-receiving surface 113.

在本實施例中,實質等於指的是每一第一電極131的端面至對應的第二電極132與該導電層133重疊處的端面等高,但該第一電極131的端面也可低於前述重疊處的端面,抑或是該第一電極131的端面高於前述重疊處的端面,此處要說明的是,即使兩端面有高低差,在較佳的實施態樣中,每一第一電極131的端面至對應的第二電極132與該導電層133重疊處的端面差小於15微米,實質上兩端面近乎等高,如此能降低搬運過程所造成結構磨損的情況。In this embodiment, substantially equal means that the end surface of each first electrode 131 is the same height as the end surface of the corresponding second electrode 132 overlapping the conductive layer 133, but the end surface of the first electrode 131 may also be lower than The end face at the aforementioned overlap, or the end face of the first electrode 131 is higher than the end face at the aforementioned overlap, it should be explained here that even if there is a difference in height between the end faces, in a preferred embodiment, each first The difference between the end surface of the electrode 131 and the end surface where the corresponding second electrode 132 overlaps with the conductive layer 133 is less than 15 microns, and the two end surfaces are nearly equal in height, which can reduce the structural wear caused by the transportation process.

參閱圖4、5,最後,進行步驟S03,在該步驟S03中,高溫燒結該導電單元13,使該導電單元13固化定型,便完成該太陽能電池1之製作。Referring to FIGS. 4 and 5, finally, step S03 is performed. In this step S03, the conductive unit 13 is sintered at a high temperature to solidify and shape the conductive unit 13, and the production of the solar cell 1 is completed.

此外,上述該第一網版結構2與該第二網版結構3亦可應用於印刷全背電極接觸晶矽太陽電池(Interdigitated back contact solar cells,IBC)的正、負電極,讓兩電極的高度大致相等,藉此在層疊搬運的過程中能避免電極產生摩擦而損毀的情況。In addition, the above-mentioned first screen structure 2 and the second screen structure 3 can also be used to print the positive and negative electrodes of an interdigitated back contact solar cell (IBC). The heights are approximately equal, thereby avoiding damage to the electrodes due to friction during the stacking process.

綜上所述,本發明太陽能電池1先於該基板11上網版印刷厚度不同的該等第一電極131及該等第二電極132,並透過控制該等第一電極131及該等第二電極132的厚度,讓第二次網版印刷的該導電層133能與該第二電極132的重疊處的厚度等於該第一電極131的端面至該非受光面113的距離,因此,該等太陽能電池1在以上、下堆疊的方式運送過程中,層疊的太陽能電池1之間便能避免因震動而相互摩擦的情況,進而提升生產良率。故確實能達成本發明之目的。In summary, the solar cell 1 of the present invention prints the first electrodes 131 and the second electrodes 132 with different thicknesses on the substrate 11 by screen printing, and controls the first electrodes 131 and the second electrodes by controlling The thickness of 132 allows the thickness of the overlap between the conductive layer 133 and the second electrode 132 of the second screen printing to be equal to the distance from the end surface of the first electrode 131 to the non-light-receiving surface 113. Therefore, the solar cells 1 During the transportation process in the upper and lower stacking mode, the stacked solar cells 1 can avoid the situation of mutual friction due to vibration, thereby improving the production yield. Therefore, the purpose of cost invention can indeed be achieved.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。However, the above are only examples of the present invention, and should not be used to limit the scope of the present invention. Any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification are still classified as This invention covers the patent.

1‧‧‧太陽能電池11‧‧‧基板111‧‧‧第一半導體層112‧‧‧第二半導體層113‧‧‧非受光面114‧‧‧受光面115‧‧‧穿孔116‧‧‧產物層12‧‧‧抗反射層13‧‧‧導電單元131‧‧‧第一電極132‧‧‧第二電極133‧‧‧導電層14‧‧‧絕緣層15‧‧‧傳導層2‧‧‧第一網版結構21‧‧‧第一網布層211‧‧‧非接觸面212‧‧‧接觸面213‧‧‧網孔22‧‧‧第一阻擋層221‧‧‧第一開口222‧‧‧第二開口23‧‧‧第二阻擋層231‧‧‧第三開口3‧‧‧第二網版結構31‧‧‧第二網布層32‧‧‧第三阻擋層321‧‧‧第四開口L1‧‧‧第一厚度L2‧‧‧第二厚度L3‧‧‧第三厚度A‧‧‧第一電極端面B‧‧‧導電層與第二電極重疊處S01~S03‧‧‧步驟流程S011~S015‧‧‧步驟流程S021~S023‧‧‧步驟流程 1‧‧‧Solar cell 11‧‧‧Substrate 111‧‧‧First semiconductor layer 112‧‧‧Second semiconductor layer 113‧‧‧ Non-light-receiving surface 114‧‧‧Receiving surface 115‧‧‧Perforation 116‧‧‧Products Layer 12‧‧‧Anti-reflective layer 13‧‧‧Conducting unit 131‧‧‧ First electrode 132‧‧‧Second electrode 133‧‧‧Conducting layer 14‧‧‧Insulating layer 15‧‧‧Conducting layer 2‧‧‧ First screen structure 21‧‧‧ First mesh layer 211‧‧‧ Non-contact surface 212‧‧‧ Contact surface 213‧‧‧ Mesh 22‧‧‧ First barrier layer 221‧‧‧ First opening 222‧ ‧‧Second opening 23‧‧‧Second barrier layer 231‧‧‧ Third opening 3‧‧‧Second screen structure 31‧‧‧Second mesh layer 32‧‧‧ Third barrier layer 321‧‧‧‧ Fourth opening L1‧‧‧ First thickness L2‧‧‧Second thickness L3‧‧‧ Third thickness A‧‧‧End face of the first electrode B‧‧‧The overlap between the conductive layer and the second electrode S01~S03‧‧‧ Step flow S011~S015‧‧‧Step flow S021~S023‧‧‧Step flow

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中: 圖1是本發明太陽能電池的一實施例的一仰視示意圖; 圖2是該實施例的一俯視示意圖; 圖3是該實施例之一側視示意圖,說明該太陽能電池的細部結構; 圖4是該實施例之一步驟流程圖; 圖5是該實施例之一步驟流程圖; 圖6至圖11是該實施例之流程示意圖,說明提供一太陽能電池半成品的步驟;及 圖12至圖16是該實施例之流程示意圖,說明在該太陽能電池半成品製作一導電單元的步驟。Other features and effects of the present invention will be clearly presented in the embodiment with reference to the drawings, in which: FIG. 1 is a schematic bottom view of an embodiment of the solar cell of the present invention; FIG. 2 is a schematic top view of the embodiment FIG. 3 is a schematic side view of one of the embodiments, illustrating the detailed structure of the solar cell; FIG. 4 is a flowchart of one step of this embodiment; FIG. 5 is a flowchart of one step of this embodiment; FIGS. 6 to 11 Is a schematic flow chart of this embodiment, illustrating the steps of providing a semi-finished solar cell; and FIGS. 12 to 16 are schematic flow charts of this embodiment, illustrating the steps of fabricating a conductive unit on the semi-finished solar cell.

1‧‧‧太陽能電池 1‧‧‧solar battery

11‧‧‧基板 11‧‧‧ substrate

111‧‧‧第一半導體層 111‧‧‧First semiconductor layer

112‧‧‧第二半導體層 112‧‧‧Second semiconductor layer

113‧‧‧非受光面 113‧‧‧non-light-receiving surface

114‧‧‧受光面 114‧‧‧Receiving surface

115‧‧‧穿孔 115‧‧‧Perforation

12‧‧‧抗反射層 12‧‧‧Anti-reflection layer

13‧‧‧導電單元 13‧‧‧Conducting unit

131‧‧‧第一電極 131‧‧‧First electrode

132‧‧‧第二電極 132‧‧‧Second electrode

133‧‧‧導電層 133‧‧‧ conductive layer

14‧‧‧絕緣層 14‧‧‧Insulation

15‧‧‧傳導層 15‧‧‧conductive layer

A‧‧‧第一電極端面 A‧‧‧End face of the first electrode

B‧‧‧導電層與第二電極重疊處 B‧‧‧The overlap between the conductive layer and the second electrode

Claims (10)

一種太陽能電池的製造方法,包含以下步驟: (A)提供一太陽能電池半成品,該太陽能電池半成品包括一基板及一抗反射層,該基板具有位於相反側的一受光面及一非受光面,並形成多個貫穿該受光面及該非受光面且間隔排列的穿孔,該抗反射層設置於該受光面;及 (B)在該太陽能電池半成品製作一導電單元,該導電單元包括多個分別設於該等穿孔的第一電極、多個設於該基板的該非受光面的第二電極,及一設於該基板的該非受光面的導電層,該等第一電極凸出於該非受光面之外,且每一第二電極的一部分與該導電層重疊,該等第一電極凸出該非受光面的端面至該非受光面的距離實質等於該第二電極與該導電層重疊處的厚度。A method for manufacturing a solar cell includes the following steps: (A) providing a semi-finished solar cell product including a substrate and an anti-reflection layer, the substrate having a light-receiving surface and a non-light-receiving surface on opposite sides, and Forming a plurality of spaced-apart through-holes through the light-receiving surface and the non-light-receiving surface, the anti-reflection layer is disposed on the light-receiving surface; and (B) a conductive unit is fabricated on the semi-finished solar cell, the conductive unit includes a plurality of The perforated first electrodes, a plurality of second electrodes provided on the non-light-receiving surface of the substrate, and a conductive layer provided on the non-light-receiving surface of the substrate, the first electrodes protruding out of the non-light-receiving surface And a portion of each second electrode overlaps with the conductive layer, and the distance from the end surface of the first electrode protruding from the non-light-receiving surface to the non-light-receiving surface is substantially equal to the thickness of the overlapping portion of the second electrode and the conductive layer. 如請求項1所述的太陽能電池的製造方法,其中,該步驟(B)包括一步驟(B1),在該步驟(B1)中是以同一網版印刷程序製作該等第一電極及該等第二電極,讓該第二電極的厚度小於該第一電極凸出該非受光面的端面至該非受光面的距離。The method for manufacturing a solar cell according to claim 1, wherein the step (B) includes a step (B1), in which the first electrodes and the For the second electrode, the thickness of the second electrode is smaller than the distance from the end surface of the first electrode protruding from the non-light-receiving surface to the non-light-receiving surface. 如請求項2所述的太陽能電池的製造方法,其中,該步驟(B)還包括一在該步驟(B1)之後的步驟(B2),在該步驟(B2)中是以另一網版印刷程序將該導電層網印於該非受光面及該等第二電極上,讓該導電層覆蓋該非受光面並重疊於每一第二電極的一部分。The method for manufacturing a solar cell according to claim 2, wherein the step (B) further includes a step (B2) after the step (B1), in which another screen printing is performed in the step (B2) The program screen prints the conductive layer on the non-light-receiving surface and the second electrodes, so that the conductive layer covers the non-light-receiving surface and overlaps a portion of each second electrode. 如請求項3所述的太陽能電池的製造方法,其中,在步驟(A)中還提供一第一網版結構,該第一網版結構包括一第一網布層、一設置於該第一網布層之底面的第一阻擋層,及多個間隔設置於該第一阻擋層之底面的第二阻擋層,該第一阻擋層界定出多個分別對應於該等穿孔的第一開口及多個對應於該非受光面的第二開口,該第二阻擋層界定出多個分別對應該等第一開口的第三開口,且該第一網布層具有一第一厚度,該第一網布層的底面至該第一阻擋層的底面具有一第二厚度,以及該第二阻擋層具有一第三厚度,在步驟(B1)中,該第二阻擋層壓抵於該非受光面且鄰近該穿孔處,而該第一阻擋層遠離該第二阻擋層之一端壓抵於該非受光面且遠離該穿孔處,使該等第一電極經由該第一網版結構的該等第一開口及該等第三開口塗布於該等穿孔,以及該等第二電極是同時經由該第一網版結構的該等第二開口分別對應塗佈於該非受光面,且每一第一電極的端面至該非受光面的距離等於該第一厚度、該第二厚度及該第三厚度的總和,每一第二電極的厚度等於該第二厚度及該第三厚度的總和。The method for manufacturing a solar cell according to claim 3, wherein in step (A), a first screen structure is further provided, and the first screen structure includes a first mesh layer and a first screen structure A first barrier layer on the bottom surface of the mesh layer, and a plurality of second barrier layers spaced on the bottom surface of the first barrier layer, the first barrier layer defines a plurality of first openings corresponding to the perforations and A plurality of second openings corresponding to the non-light-receiving surface, the second barrier layer defines a plurality of third openings respectively corresponding to the first openings, and the first mesh layer has a first thickness, the first mesh The bottom surface of the cloth layer to the bottom surface of the first barrier layer has a second thickness, and the second barrier layer has a third thickness. In step (B1), the second barrier layer is pressed against the non-light-receiving surface and is adjacent to The through hole, and one end of the first barrier layer away from the second barrier layer is pressed against the non-light-receiving surface and away from the through hole, so that the first electrodes pass through the first openings of the first screen structure and The third openings are coated on the perforations, and the second electrodes are simultaneously coated on the non-light-receiving surface through the second openings of the first screen structure, respectively, and the end surface of each first electrode reaches The distance of the non-light-receiving surface is equal to the sum of the first thickness, the second thickness, and the third thickness, and the thickness of each second electrode is equal to the sum of the second thickness and the third thickness. 如請求項4所述的太陽能電池的製造方法,其中,在步驟(A)中還提供一第二網版結構,該第二網版結構包括一第二網布層、一固定於該第二網布層的第三阻擋層,該第三阻擋層界定出一第四開口,在步驟(B2)中,該第三阻擋層壓抵遮蔽該等第一電極,及該等第二電極的一部分,該導電層是經由該第二網版結構的該第四開口對應塗佈於該非受光面未受該第三阻擋層遮蔽之部分,且該導電層與每一第二電極部分重疊,而該導電層與該第二電極之重疊處的厚度等於該第一厚度、該第二厚度及該第三厚度的總和。The method for manufacturing a solar cell according to claim 4, wherein in step (A), a second screen structure is further provided, and the second screen structure includes a second mesh layer and a second screen structure fixed to the second A third barrier layer of the mesh layer, the third barrier layer defines a fourth opening, and in step (B2), the third barrier layer is laminated to shield the first electrodes and part of the second electrodes The conductive layer is applied to the portion of the non-light-receiving surface that is not shielded by the third barrier layer through the fourth opening of the second screen structure, and the conductive layer partially overlaps with each second electrode, and the The thickness of the overlap between the conductive layer and the second electrode is equal to the sum of the first thickness, the second thickness, and the third thickness. 如請求項5所述的太陽能電池的製造方法,其中,每一第一電極的高度高於對應的該第二電極的高度,且該第一電極的端面至對應的該第二電極的端面差大於5微米。The method for manufacturing a solar cell according to claim 5, wherein the height of each first electrode is higher than the height of the corresponding second electrode, and the end surface of the first electrode is different from the end surface of the corresponding second electrode Greater than 5 microns. 如請求項5所述的太陽能電池的製造方法,其中,在步驟(B2)中,每一第一電極的端面至對應的第二電極與該導電層重疊處的端面差小於15微米。The method for manufacturing a solar cell according to claim 5, wherein in step (B2), the difference between the end surface of each first electrode and the end surface where the corresponding second electrode overlaps the conductive layer is less than 15 microns. 一種太陽能電池,包含: 一基板,包括一第一半導體層,及一形成於該第一半導體層且多數載子異於該第一半導體層的第二半導體層,該第一半導體層具有一非受光面,且該第二半導體層具有一相反於該非受光面的受光面,該基板形成多個貫穿該受光面及該非受光面且間隔排列的穿孔; 一抗反射層,製備於該受光面; 一導電單元,包括多個分別設於該等穿孔的第一電極、多個設於該基板的該非受光面的第二電極,及一設於該基板的該非受光面的導電層,該等第一電極凸出於該非受光面之外,且每一第二電極的一部分與該導電層重疊,該等第一電極凸出該非受光面的端面至該非受光面的距離實質等於該第二電極與該導電層重疊處的厚度;及 一絕緣層,設置於該等穿孔中並界於該基板及該等第一電極之間,使該第一電極與該第一半導體層電性絕緣。A solar cell includes: a substrate including a first semiconductor layer and a second semiconductor layer formed on the first semiconductor layer and having a plurality of carriers different from the first semiconductor layer, the first semiconductor layer having a non- A light-receiving surface, and the second semiconductor layer has a light-receiving surface opposite to the non-light-receiving surface, the substrate forms a plurality of spaced-apart through-holes that penetrate the light-receiving surface and the non-light-receiving surface; an anti-reflection layer is prepared on the light-receiving surface; A conductive unit, including a plurality of first electrodes respectively provided on the perforations, a plurality of second electrodes provided on the non-light-receiving surface of the substrate, and a conductive layer provided on the non-light-receiving surface of the substrate, the first An electrode protrudes out of the non-light-receiving surface, and a portion of each second electrode overlaps with the conductive layer. The distance from the end surface of the first electrodes protruding from the non-light-receiving surface to the non-light-receiving surface is substantially equal to the second electrode and The thickness of the overlapping portion of the conductive layer; and an insulating layer disposed in the through holes and bounded between the substrate and the first electrodes to electrically insulate the first electrode from the first semiconductor layer. 如請求項8所述的太陽能電池,其中,每一第一電極的高度高於對應的該第二電極的高度,且該第一電極的端面至對應的該第二電極的端面差大於5微米。The solar cell of claim 8, wherein the height of each first electrode is higher than the height of the corresponding second electrode, and the difference between the end surface of the first electrode and the end surface of the corresponding second electrode is greater than 5 microns . 如請求項8所述的太陽能電池,其中,每一第一電極的端面至對應的第二電極與該導電層重疊處的端面差小於15微米。The solar cell according to claim 8, wherein the difference between the end surface of each first electrode and the end surface where the corresponding second electrode overlaps the conductive layer is less than 15 microns.
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