TW201935017A - Probe detection device and detection module thereof - Google Patents

Abstract

A probe detection device includes a detection module and a probe holder. The detection module includes a carrying platform, a pressing member arranged at intervals on the carrying platform, a pressure sensor mounted on a side of the pressing member facing the carrying platform, a first electrode mounted on the pressing member and located on a side of the pressure sensor facing the carrying platform, and a second electrode mounted on the carrying platform and spaced apart from the first electrode. The probe holder is disposed between the first electrode and the second electrode. The probe detection device can perform a detection operation and can allow the probe to pass through the probe holder so that the opposite ends of the probe can respectively pierce through the probe holder. The pressing member can move toward the carrying platform so that the first electrode and the second electrode can respectively press against the opposite ends of the probe. In addition, the present disclosure also provides a detection module of a probe detection device.

Description

Probe detection device and detection module

The invention relates to a detection device, in particular to a probe detection device and a detection module thereof.

Various probes used in existing probe devices (probe cards), such as micro-electromechanical (MEMS) rectangular probes, pogo probes, and round wire needles, etc. are used due to their functionality Different specifications require specifications such as current resistance characteristics or mechanical force recovery characteristics. However, the existing probe detection device cannot effectively detect the probe after the probe is manufactured.

Therefore, the present inventor believes that the above-mentioned defects can be improved, and with special research and cooperation with the application of scientific principles, he finally proposes an invention with a reasonable design and effective improvement of the above-mentioned defects.

An embodiment of the present invention is to provide a probe detection device and a detection module thereof, which can effectively improve defects that may occur in the existing probe detection device.

An embodiment of the present invention discloses a probe detection device, including: a detection module including: a bearing platform having a bearing surface; a pressing element arranged at intervals above the bearing surface; a pressure sensor, Mounted on a side of the pressing member facing the bearing surface; a first electrode mounted on the pressing member and located on a side of the pressure sensor facing the bearing surface, and connected to The pressure sensors are electrically insulated from each other; and a second electrode is mounted on the bearing surface and is separated from the first The electrodes are arranged at intervals; and a probe fixing base is provided between the first electrode and the second electrode and is detachably mounted on the bearing surface of the bearing platform; wherein the probe The needle detection device can perform a detection operation and is used to provide a probe penetrating the probe fixing base, so that a first end portion and a second end portion of the probe at opposite ends are respectively penetrated. The probe fixing base; wherein when the probe detection device performs the detection operation, the pressing element can move toward the bearing surface, so that the first electrode is pressed against the probe The first end portion of the needle, and the second electrode being pressed against the second end portion of the probe; wherein the first electrode and the second electrode can be used to provide the probe A needle is a current, and the pressure sensor can be used to sense a pressure value caused by the depression element to the probe.

The embodiment of the invention further discloses a detection module of a probe detection device, which is used for accommodating a probe fixing base and a probe positioned on the probe fixing base, comprising: a bearing platform with a bearing surface; The pressing element is disposed above the bearing surface at intervals; a pressure sensor is installed on the side of the pressing element facing the bearing surface; a first electrode is installed on the pressing element And is located on a side of the pressure sensor facing the bearing surface, and is electrically insulated from the pressure sensor; and a second electrode is installed on the bearing surface and is separated from the first electrode. One electrode is arranged at intervals; wherein the pressing element can be moved in the direction of the bearing surface, so that the first electrode is pressed against one end of the probe, and the second electrode is pressed against At the other end of the probe; wherein the first electrode and the second electrode can be used to provide a current to the probe, and the pressure sensor can be used to sense the depression element A pressure value applied to the probe.

In summary, the probe detection device and its detection module according to the embodiments of the present invention can provide a probe current through the first electrode and the second electrode, and sense a pair of depression elements through the pressure sensor. The pressure value caused by the probe can detect the performance of the probe, and can improve the detection efficiency of the probe.

In order to further understand the features and technical contents of the present invention, please refer to the following The detailed description and drawings of the present invention are used to explain the present invention, but not to limit the scope of the present invention.

100‧‧‧ Probe detection device

1‧‧‧Detection Module

11‧‧‧bearing platform

111‧‧‧bearing surface

112‧‧‧Groove

12‧‧‧Press-down element

13‧‧‧Pressure sensor

14‧‧‧first electrode

15‧‧‧ Insulation

16‧‧‧Second electrode

17‧‧‧Image Acquisition Unit

2‧‧‧ Probe Holder

21‧‧‧The first guide plate

211‧‧‧First through hole

22‧‧‧Second Guide

221‧‧‧Second through hole

23‧‧‧ support

24‧‧‧ accommodation space

P‧‧‧Probe

P1‧‧‧first end

P2‧‧‧Second end

P3‧‧‧ middle section

FIG. 1 is a schematic side view of a probe detection device according to an embodiment of the present invention.

FIG. 2 is a partially enlarged schematic diagram of the probe detection device of FIG. 1.

FIG. 3 is a schematic diagram of the first electrode and the second electrode respectively pressing the first end portion and the second end portion of the probe according to the embodiment of the present invention.

FIG. 4 is a simulation analysis diagram of the limit current value detection operation performed by the probe detection device according to the embodiment of the present invention.

FIG. 5 is a simulation analysis diagram of a probe detection device performing an extreme pressure value detection operation according to an embodiment of the present invention.

Please refer to FIG. 1 to FIG. 5, which are embodiments of the present invention. It should be noted that this embodiment corresponds to the related quantities and appearances mentioned in the drawings, and is only used to specifically describe the embodiments of the present invention, In order to understand the content of the present invention, it is not intended to limit the protection scope of the present invention.

[Probe detection device]

As shown in FIG. 1 and FIG. 2, an embodiment of the present invention discloses a probe detection device 100 including a detection module 1 and a probe fixing base 2 detachably mounted on the detection module 1. Wherein, the probe detection device 100 can perform a detection operation and is used to provide a probe P passing through the probe fixing base 2 so that a first end portion P1 and a first end portion of the probe P at opposite ends and A second end portion P2 penetrates the probe fixing base 2 (as shown in FIG. 2), and enables the detection module 1 to measure a limit current value (current resistance characteristic specification) or a limit of the probe P. Pressure value (mechanical force recovery characteristic specification). Hereinafter, each element of the probe detection device 100 of this embodiment will be specifically described. The structure, and then the connection relationship between the various elements of the probe detection device 100 will be described in due course.

The detection module 1 includes a supporting platform 11, a pressing element 12, a pressure sensor 13, a first electrode 14, an insulating layer 15, a second electrode 16, and a current supply unit (not shown in the figure). ), And a pressing element control unit (not shown).

Please continue to refer to FIG. 2, the supporting platform 11 has a supporting surface 111, and the supporting surface 111 is concavely formed with a groove 112. The supporting surface 111 can be used to carry the probe fixing base 2, and the groove 112 can be used to receive the second end portion P2 of the probe P. The pressing elements 12 are disposed above the bearing surface 111 at intervals, that is, the pressing elements 12 are located above the bearing surface 111 and spaced apart from the bearing surface 111. In this embodiment, the pressing-down element 12 may be, for example, a mechanical pressing-down screw, but the present invention is not limited thereto.

Furthermore, the pressure sensor 13 (such as a force reading element) is installed on the side of the pressing member 12 facing the bearing surface 111 (as shown in FIG. 2, it is installed on the lower side of the pressing member 12). The first electrode 14 is mounted on the pressing element 12 and is located on a side of the pressure sensor 13 facing the bearing surface 111 (as shown on the lower side of the pressure sensor 13 in FIG. 2), and is connected to the pressure sensor. The measuring devices 13 are electrically insulated from each other. Preferably, the pressure sensor 13 and the first electrode 14 are electrically insulated from each other by providing an insulating layer 15, but the present invention is not limited thereto. The second electrode 16 is mounted on the bearing surface 111 and is disposed at a distance from the first electrode 14. In more detail, the second electrode 16 is installed in the groove 112 of the supporting platform 11, and the groove 112 can be used to provide a second end portion P2 of the probe P to penetrate and press the second electrode. 16. Therefore, the groove 112 can be used to limit the length of the second end portion P2 of the probe P protruding from the probe fixing base 2 to improve the accuracy of the detection operation.

In addition, the current supply unit (not shown) is electrically connected to the first electrode 14 and the second electrode 16 and can be used to provide a current to the probe via the first electrode 14 and the second electrode 16. Pin P (as shown in Figure 3, when the first electrode 14 and the second electrode 16 minutes The first end portion P1 and the second end portion P2) of the probe P are pressed separately, so that the probe detection device 100 can measure the limit current value (current resistance characteristic) of the probe P. The pressing element control unit (not shown) can control the displacement of the pressing element 12 moving in the direction of the bearing surface 111 so that the probe detection device 100 can measure the limit pressure value of the probe P ( Mechanical force recovery characteristic), wherein the resolution of the displacement amount is between 0.01 micrometer and 0.1 micrometer.

It is worth mentioning that when the probe device is in the actual needle test, the probe of the probe device needs to be pressed by mechanical force to contact and pierce the surface oxide of the point to be measured (such as the wafer to be tested). Point surface oxide); therefore, the probe detection device 100 needs to be equipped with a precisely controllable down-pressing element 12 (the resolution of the displacement amount is between 0.01 micrometer and 0.1 micrometer) so that the probe The detection device 100 can simulate an actual detection environment of the probe device, and enables the probe detection device 100 to obtain an accurate detection result. Furthermore, since the pressing force of the pressing element 12 needs to be measured simultaneously with the reaction force of the probe P to obtain the mechanical force recovery characteristics of the probe P, the contact ends of the pressing element 12 and the probe P need to be configured.有 压力 ensor13。 There is a pressure sensor 13.

Please continue to refer to FIG. 2, the probe fixing base 2 is disposed between the first electrode 14 and the second electrode 16 of the detection module 1, and the probe fixing base 2 is detachably installed on the detection module 1. The bearing surface 111 of the bearing platform 11.

More specifically, the probe fixing base 2 includes a first guide plate 21, a second guide plate 22 spaced from the first guide plate 21, and the first guide plate 21 and A supporting body 23 is transparent between the second guide plates 22. The first guide plate 21 is formed with a first through hole 211, the second guide plate 22 is formed with a second through hole 221 corresponding to the first through hole 211, and the first guide plate 21, the first The two guide plates 22 and the supporting body 23 together form an accommodating space 24. Wherein, the probe fixing base 2 can be used to provide the probe P to sequentially pass through the first through hole 211 of the first guide plate 21 and the second through hole 221 of the second guide plate 22, so that The first end portion P1 of the probe P penetrates the first guide plate 21 so that the second end portion P2 of the probe P penetrates a second The guide plate 22 is such that the middle section P3 of the probe P is located between the first guide plate 21 and the second guide plate 22 and is accommodated in the accommodation space 24. In an embodiment of the present invention, the first guide plate 21 is preferably movable relative to the second guide plate 22 to adjust the distance between the first guide plate 21 and the second guide plate 22, but this The invention is not limited to this.

Furthermore, the detection module 1 of the probe detection device 100 further includes an image display unit (not shown) and an image capture unit 17. Wherein, the position of the image capturing unit 17 corresponds to the supporting body 23 (as shown on the right side of the supporting body 23); the image capturing unit 17 can capture the probe through the transparent supporting body 23 Deformation image of P; and the image display unit can be used to display the deformation image of the probe P to facilitate inspection personnel to observe. The image display unit may be, for example, a liquid crystal display (LCD), and the image capture unit 17 may be, for example, a Charge-coupled Device (CCD) or a complementary metal oxide semiconductor (CCD). Complementary Metal-Oxide-Semiconductor (CMOS), but the present invention is not limited to this.

Thereby, the probe fixing base 2 of the probe detection device 100 of the embodiment of the present invention can be moved relative to the second guide plate 22 through the first guide plate 21, so that the inspector can detect the position of the probe P according to the Specifications (such as length specifications), and the distance between the first guide plate 21 and the second guide plate 22 is adjusted, so that the probe detection device 100 can be adapted to detect probes P of various specifications.

Furthermore, the probe fixing base 2 of the probe detection device 100 according to the embodiment of the present invention can make the detection through the support 23 being transparent and the position of the image capturing unit 17 corresponding to the support 23. The personnel can observe the deformation image of the probe P through the image display unit, the image capturing unit 17 and the support body 23, thereby improving the convenience of the detection operation.

In addition, since the probe fixing base 2 of the probe detection device 100 according to the embodiment of the present invention is detachably installed on the bearing surface 111 of the bearing platform 11, the inspector can determine the shape or number of the probes P to be detected. The probe fixing base 2 with a different design is replaced, so that the probe detection device 100 can be adapted to detect probes with various shapes. P (such as micro-electromechanical rectangular probes, thimble probes, or round wire needles), or can be suitable for detecting various different numbers of probes P (such as: from the detection of a single probe P to multiple probes P Detection).

It is worth mentioning that when the probe detection device 100 needs to detect a plurality of probes P at the same time (high-volume detection), the first guide plate 21 and the second guide plate 22 of the probe holder 2 can be respectively A plurality of first through holes 211 and a plurality of second through holes 221 (not shown) are formed, so that each of the probes P can be sequentially passed through the corresponding first through holes of the first guide plate 21. A through hole 211 and a corresponding second through hole 221 of the second guide plate 22.

As shown in FIG. 2 and FIG. 3, when the probe detection device 100 performs a detection operation, the pressing element 12 can be moved toward the bearing surface 111 of the bearing platform 11 by the control of the pressing element control unit (as shown in FIG. 2). 2), so that the first electrode 14 is pressed against the first end portion P1 of the probe P, and the second electrode 16 is pressed against the second end portion P2 of the probe P (see FIG. 3). The first electrode 14 and the second electrode 16 can provide a probe P current through a current supply unit, and the pressure sensor 13 can be used to sense a pressure caused by the depression element 12 on the probe P. Value (that is, the reaction force of the probe P to the pressing member 12).

Thereby, the probe detection device 100 according to the embodiment of the present invention can provide a probe P current through the first electrode 14 and the second electrode 16, and sense the pair of probes of the depression element 12 through the pressure sensor 13. The pressure value caused by the needle P, so that the probe detection device 100 can simulate the environment of the probe device when the semiconductor wafer is actually tested (simultaneously applying a current signal and a down force to the probe P), and can detect the The performance of the probe P can improve the detection efficiency of the probe P.

In more detail, the detection operation of the embodiment of the present invention can be further divided into a limit current detection operation (the current resistance characteristic specification of the detection probe P) and a limit pressure detection operation (the mechanical force recovery of the detection probe P). Feature Specifications).

As shown in FIG. 4, when the probe detection device 100 performs a limit current value detection operation and the pressure value sensed by the pressure sensor 13 is raised to a predetermined value (8 kgf / cm ² to 12 kgf / cm ² ), the The probe detection device 100 can stop the movement of the pressing element 12 and gradually increase the current value of the current until the probe P is broken (as shown in FIG. 4, the pressure value tends to decrease due to the breakage of the probe P). The current value of the current when the probe P is broken is defined as the limit current value of the probe P, whereby the probe detection device 100 can accurately measure the current-resistant characteristic specification of the probe P to be tested.

As shown in FIG. 5, when the probe detection device 100 performs a limit pressure value detection operation and the current value of the current provided by the first electrode 14 and the second electrode 16 to the probe P is a predetermined value, the probe detection device 100 can make the pressing element 12 continue to move in the direction of the bearing surface 111 (so that the pressure value gradually increases) until the probe is broken (as shown in Figure 5, the current value will tend to decrease due to the break of the probe P), and The pressure value sensed by the pressure sensor 13 when the probe is broken is defined as the limit pressure value of the probe P, whereby the probe detection device 100 can accurately measure the mechanism of the probe P to be tested. Force recovery characteristic specifications.

[Detection module of probe detection device]

As shown in FIG. 2, an embodiment of the present invention further discloses a detection module 1 of a probe detection device 100 for accommodating a probe fixing base 2 and a probe P positioned on the probe fixing base 2. The detection module 1 of the probe detection device 100 includes a carrier 11, a pressing element 12, a pressure sensor 13, a first electrode, and a second electrode 16. The supporting platform 11 has a supporting surface 111. The down-pressing elements 12 are disposed above the supporting surface 111 at intervals. The pressure sensor 13 is mounted on a side of the pressing member 12 facing the bearing surface 111. The first electrode 14 is mounted on the pressing element 12 and is located on a side of the pressure sensor 13 facing the bearing surface 111, and is electrically insulated from the pressure sensor 13. The second electrode 16 is mounted on the bearing surface 111 and is disposed at a distance from the first electrode 14.

Wherein, the pressing element 12 can be moved in the direction of the bearing surface 111, so that the first electrode 14 is pressed against one end of the probe P, and the second electrode 16 is pressed against the probe P. another side. The first electrode 14 and the second electrode 16 can The probe P is used to provide a current, and the pressure sensor 13 can be used to sense a pressure value caused by the pressing element 12 on the probe P (that is, the pressure caused by the probe P on the pressing element 12). Reaction force).

[Technical effect of the embodiment of the present invention]

In summary, the probe detection device 100 according to the embodiment of the present invention can provide a probe current through the first electrode 14 and the second electrode 16 and sense the pair of depression elements 12 through the pressure sensor 13. The pressure value caused by the probe P can detect the performance of the probe P, and can improve the detection efficiency of the probe P.

In addition, the probe detection device 100 can selectively perform a limit current value detection operation or a limit pressure value detection operation on the probe P to accurately measure the current-resistant characteristic specification or Mechanical force recovery characteristic specifications.

The above are only the preferred and feasible embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. Any equal changes and modifications made in accordance with the scope of patent application of the present invention shall fall within the protection scope of the claims of the present invention .

Claims (10)

A probe detection device includes: a detection module including: a bearing platform having a bearing surface; a pressing element arranged at intervals above the bearing surface; and a pressure sensor mounted on the lower portion A side of the pressure element facing the bearing surface; a first electrode installed on the lower pressure element and located on a side of the pressure sensor facing the bearing surface and connected to the pressure sensor Are electrically insulated from each other; and a second electrode is installed on the bearing surface and is disposed at a distance from the first electrode; and a probe fixing seat is provided on the first electrode and the second electrode And is detachably installed on the bearing surface of the bearing platform; wherein the probe detecting device can perform a detecting operation and is used to provide a probe passing through the probe fixing base, So that a first end portion and a second end portion of the probe at opposite ends respectively penetrate the probe fixing base; wherein, when the probe detection device performs the detection operation, the The pressing element can move in the direction of the bearing surface to The first electrode is pressed against the first end portion of the probe, and the second electrode is pressed against the second end portion of the probe; wherein the first electrode and all The second electrode can be used to provide a current to the probe, and the pressure sensor can be used to sense a pressure value caused by the pressing element to the probe. The probe detection device according to claim 1, wherein when the probe detection device performs the detection operation and the pressure value sensed by the pressure sensor is raised to a predetermined value, the probe The needle detection device can stop the movement of the pressing element and gradually increase the current value of the current until the probe is broken, and the current value of the current when the probe is broken is defined as the probe. One pole of the needle Limit current value. The probe detection device according to claim 1, wherein when the probe detection device performs the detection operation and the first electrode and the second electrode provide the current of the current to the probe When the value is a predetermined value, the probe detecting device can make the pressing member continue to move toward the bearing surface until the probe is broken, and the pressure sensor when the probe is broken The sensed pressure value is defined as a limit pressure value of the probe. The probe detection device according to claim 1, wherein the probe fixing base comprises a first guide plate and a second guide plate spaced from the first guide plate, and the probe fixing base It can be used to provide the probe to pass through the first guide plate and the second guide plate in order, so that the first end portion of the probe penetrates the first guide plate. And the second end portion of the probe is allowed to pass out of the second guide plate; wherein the first guide plate is movable relative to the second guide plate. The probe detection device according to claim 4, wherein the probe fixing base further includes a transparent body disposed between the first guide plate and the second guide plate and having a transparent shape; wherein, The detection module further includes an image capturing unit corresponding to the support, and the image capturing unit can capture the deformation image of the probe through the support. The probe detection device according to claim 1, wherein the bearing surface of the bearing platform is concavely formed with a groove, the second electrode is installed in the groove, and the groove is used for The second end portion of the probe is provided to penetrate and press the second electrode. The probe detection device according to claim 1, wherein the detection module further includes a current supply unit and a pressing element control unit; wherein the current supply unit is electrically connected to the first electrode and the The second electrode can be used to provide the current to the probe; wherein the depression element control unit can control a displacement amount of the depression element moving toward the bearing surface, and the The resolution of the displacement is between 0.01 microns and 0.1 microns. A detection module of a probe detection device is used for accommodating a probe fixing base and a probe positioned on the probe fixing base, comprising: a bearing platform with a bearing surface; a pressing element, spaced apart The pressure sensor is disposed above the bearing surface; a pressure sensor is installed on a side of the pressing member facing the bearing surface; a first electrode is installed on the pressing member and located on the pressure sensor; A side of the sensor facing the bearing surface and electrically insulated from the pressure sensor; and a second electrode mounted on the bearing surface and disposed at a distance from the first electrode; Wherein, the pressing element can be moved in the direction of the bearing surface, so that the first electrode is pressed against one end of the probe, and the second electrode is pressed against the probe. The other end; wherein the first electrode and the second electrode can be used to provide a current to the probe, and the pressure sensor can be used to sense the pressure of the probe on the probe. A pressure value caused. The detection module of the probe detection device according to claim 8, wherein the bearing surface of the bearing platform is concavely formed with a groove, the second electrode is installed in the groove, and the The groove is used for providing the second end portion of the probe to pass through and press against the second electrode. The detection module of the probe detection device according to claim 8, further comprising a current supply unit and a pressing element control unit; wherein the current supply unit is electrically connected to the first electrode and the first electrode. Two electrodes and can be used to provide the current to the probe; wherein the pressing element control unit can control a displacement amount of the pressing element moving toward the bearing surface, and the displacement amount is The resolution is between 0.01 microns and 0.1 microns.