TW201925074A - Release film peeling method and release film peeling device prevents the cover film from warping - Google Patents

Release film peeling method and release film peeling device prevents the cover film from warping Download PDF

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TW201925074A
TW201925074A TW107143151A TW107143151A TW201925074A TW 201925074 A TW201925074 A TW 201925074A TW 107143151 A TW107143151 A TW 107143151A TW 107143151 A TW107143151 A TW 107143151A TW 201925074 A TW201925074 A TW 201925074A
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film
peeling
release film
laminated film
release
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TW107143151A
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Chinese (zh)
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TWI676587B (en
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河東和彦
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日商倍科有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006Delaminating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/12Interconnection of layers using interposed adhesives or interposed materials with bonding properties

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  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The purpose of the present invention is to provide a release film peeling method and a release film peeling device, which can peel and remove a release film from a single-layered laminated thin film without causing the warpage or damage of the cover film. The release film peeling method and the release film peeling device (10) includes: adsorbing the side of release film (4) of the laminated thin-film (1) to a laminated thin-film adsorption table (14), moving the laminated thin-film (1) toward the x (-) direction and using a pre-peeling roller (13) to make the end part of the cover film (2) floated from the release film (4) to form a pre-peeled edge reserving part L at the same time, adsorbing the side of the cover film (2) of the laminated thin-film (1) to an adsorption head (16), and rotating the peeling roller (30) by moving the laminated thin-film adsorption table (14) and the peeling roller (30) in the x (+) direction to wind and peel the release film (4) from the laminated thin-film (1) at the same time, and removing and transferring the release film (4) by a conveyor belt (33).

Description

離型膜剝離方法以及離型膜剝離裝置Release film peeling method and release film peeling device

本發明涉及離型膜剝離方法以及離型膜剝離裝置。The present invention relates to a release film peeling method and a release film peeling device.

以往,被普遍認知的電路基板是將具有熱固性黏合劑層的導體圖案保護用覆蓋層薄膜(cover lay film)黏貼在形成銅箔等導體圖案後的基板的導體圖案形成面上後使用。在覆蓋層薄膜中,作為保護薄膜的離型膜被疊層在熱固性黏合劑層表面上(將這稱為疊層薄膜),並且將離型膜從疊層薄膜剝離後,覆蓋層薄膜被加熱壓接在電路基板上。在剝離疊層在黏合劑層的離型膜時,剝離被要求為不能使覆蓋層薄膜有翹曲、損傷。Conventionally, a circuit board that has been generally recognized is used by adhering a cover film having a thermosetting adhesive layer to a conductor pattern forming surface of a substrate on which a conductor pattern such as a copper foil is formed. In the cover film, a release film as a protective film is laminated on the surface of the thermosetting adhesive layer (this is referred to as a laminated film), and after the release film is peeled off from the laminated film, the cover film is heated. Crimped on the circuit substrate. When the release film laminated on the adhesive layer is peeled off, peeling is required to prevent warpage and damage of the cover film.

作為將離型膜從單片的疊層薄膜剝離的方法,有一種將空氣吹送到疊層薄膜的角部,從而掀起角部上層側的離型膜,並且將該掀起後的離型膜藉由保持裝置來進行保持,在吹送空氣的同時將保持裝置沿角部的對角線移動來剝離離型膜的方法(例如,參照專利文獻1)。As a method of peeling off the release film from the single-layer laminated film, there is a method of blowing air to the corner portion of the laminated film to lift the release film on the upper layer side of the corner portion, and borrowing the lifted release film The method of holding the holding device and moving the holding device along the diagonal of the corner portion while blowing air to peel off the release film (for example, refer to Patent Document 1).

此外,在將保護薄膜從疊層有基板材料(電路基板)與保護材料(離型膜)的疊層板材料處剝離的剝離方法中,有一種藉由半切割(half cut)將保護材料切割,並且與半切割的斷片一起將基板材料藉由保持裝置抓住後將保護材料剝下的保護材料剝離方法(例如,參照專利文獻2)。Further, in the peeling method of peeling the protective film from the laminated board material on which the substrate material (circuit substrate) and the protective material (release film) are laminated, there is a method of cutting the protective material by half cut And a protective material peeling method in which the protective material is peeled off after the substrate material is grasped by the holding device together with the half-cut piece (for example, refer to Patent Document 2).

先前技術文獻Prior technical literature

專利文獻1:特開2008-37572號公報Patent Document 1: JP-A-2008-37572

專利文獻2:特開2015-83504號公報Patent Document 2: JP-A-2015-83504

但是,專利文獻1中記載的剝離方法,是將空氣吹送到疊層薄膜的同時將離型膜從疊層薄膜處掀起後剝離的方法,在剝離開始時離型膜的掀起時間裡會出現偏差、在剝離過程中離型膜整體會浮起並且由於靜電等黏貼在其他地方等,在剝離操作與去除操作中有時會出現阻礙。However, the peeling method described in Patent Document 1 is a method in which air is blown onto a laminated film and the release film is peeled off from the laminated film, and the film is peeled off at the start of peeling. In the peeling process, the entire release film may float and adhere to other places due to static electricity or the like, and may be hindered in the peeling operation and the removal operation.

此外,專利文獻2中記載的剝離方法由於是將保護材料半切割,所以會有損傷基板材料、保護材料沒有被完全切割的問題。並且在半切割時,可以想到會產生切割殘餘物並黏附在基板材料上,必須將半切割後的斷片從基板材料剝離去除的問題。Further, in the peeling method described in Patent Document 2, since the protective material is half-cut, there is a problem that the substrate material and the protective material are not completely cut. Also, at the time of half-cutting, it is conceivable that a cutting residue is generated and adhered to the substrate material, and the half-cut piece must be peeled off from the substrate material.

因此,本發明為了解決上述這種問題,目的是提供一種離型膜剝離方法以及離型膜剝離裝置,其能夠在使覆蓋層薄膜不產生翹曲、損傷的情況下,將離型膜從單片的疊層薄膜處剝離且去除。Accordingly, the present invention has been made to solve the above problems, and an object thereof is to provide a release film peeling method and a release film peeling apparatus which can remove a release film from a single sheet without causing warpage or damage of the cover film. The laminated film of the sheet was peeled off and removed.

本發明的離型膜剝離方法,是一種從由具有熱固性黏合劑層的覆蓋層薄膜與疊層在所述黏合劑層的離型膜所構成的單片的疊層薄膜處將所述離型膜剝離且去除的離型膜剝離方法,其特徵在於,包括:將所述疊層薄膜的所述離型膜側真空吸附於疊層薄膜吸附台的操作;將所述疊層薄膜向一方的方向移動的同時使用預剝離輥將所述疊層薄膜從所述覆蓋層薄膜側按壓的同時使所述預剝離輥轉動,並且使所述覆蓋層薄膜的端部從所述離型膜處浮起從而形成預剝離留邊部的操作;解除疊層薄膜對於所述疊層薄膜吸附台的吸附,並且將疊層薄膜的覆蓋層薄膜的整個面真空吸附於吸附頭的操作;以及在吸附頭是將所述疊層薄膜吸附後的狀態下,將具有黏貼性的剝離輥接觸於所述離型膜後,藉由將所述疊層薄膜吸附台以及所述剝離輥向另一方向移動來轉動所述剝離輥,從而將所述離型膜從所述疊層薄膜處捲繞的同時進行剝離且去除的操作。The release film peeling method of the present invention is a release film from a single-layer laminated film composed of a cover film having a thermosetting adhesive layer and a release film laminated on the adhesive layer. A release film peeling method for peeling and removing a film, comprising: vacuum-adsorbing the release film side of the laminated film to a laminated film adsorption stage; and the laminated film is oriented to one side While the direction is moving, the pre-peeling roller is rotated while pressing the laminate film from the side of the cover film film, and the end portion of the cover film is floated from the release film. An operation of forming a pre-stripping edge portion; releasing the adsorption of the laminated film to the laminated film adsorption stage, and vacuum-adsorbing the entire surface of the cover film of the laminated film to the adsorption head; and After the laminated film is adsorbed, the peeling roller having adhesiveness is brought into contact with the release film, and the laminated film suction stage and the peeling roll are moved in the other direction. Rotating the peeling , Whereby the peeling and removal operations while the film is wound off from the laminate film at.

根據本發明的離型膜剝離方法,藉由將預剝離輥從疊層薄膜的覆蓋層薄膜側按壓的同時使其轉動來形成預剝離留邊部,並且藉由吸附頭將覆蓋層薄膜的整個面吸附後,使離型膜剝離輥部轉動從而將離型膜從疊層薄膜處剝離。經由這樣,在單片的疊層薄膜中,就能夠在使覆蓋層薄膜不產生翹曲、損傷的情況下,將離型膜剝離且去除。According to the release film peeling method of the present invention, the pre-peeling roll is formed by pressing the pre-peeling roll while being pressed from the cover film side of the laminated film, and the entire cover film is covered by the adsorption head. After the surface is adsorbed, the release film peeling roll portion is rotated to peel the release film from the laminated film. As a result, in the single-layer laminated film, the release film can be peeled off and removed without causing warpage or damage of the cover film.

在本發明的離型膜剝離方法中,理想的情況是:在形成所述預剝離留邊部的操作中,按壓所述覆蓋層薄膜的同時使所述預剝離輥轉動來使所述覆蓋層薄膜的端部從所述離型膜處浮起,並且使空氣接觸於所述黏合劑層。In the release film peeling method of the present invention, it is desirable that in the operation of forming the pre-peeled edge portion, the cover film is pressed while the pre-peel roll is rotated to cause the cover layer The ends of the film float from the release film and contact air with the adhesive layer.

熱固性黏合劑層能夠利用一旦其表面接觸於空氣如果不進行加熱就無法再次黏貼離型膜這一特性來形成預剝離留邊部,並且一旦從該預剝離留邊部開始剝離,就能夠容易地從疊層薄膜處將離型膜剝離。The thermosetting adhesive layer can form a pre-stripping edge portion by utilizing the property that the surface is in contact with the air, and if it is not heated, it is impossible to re-adhere the release film, and once peeled off from the pre-peeled edge portion, it can be easily The release film was peeled off from the laminated film.

在本發明的離型膜剝離方法中,理想的情況是:在所述吸附頭是將所述疊層薄膜真空吸附的操作中,藉由所述吸附頭將含有所述預剝離留邊部的所述疊層薄膜的整個面吸附。In the release film peeling method of the present invention, it is preferable that in the operation in which the adsorption head is vacuum-adsorbing the laminated film, the pre-stripping edge portion is contained by the adsorption head. The entire surface of the laminated film is adsorbed.

吸附頭由於將含有預剝離留邊部的覆蓋層薄膜的整個面吸附,所以在剝離離型膜時就能夠防止覆蓋層薄膜產生翹曲。並且,由於剝離輥沒有直接接觸於覆蓋層薄膜,所以進而就能夠防止損傷覆蓋層薄膜。Since the adsorption head adsorbs the entire surface of the cover film including the pre-stripped edge portion, warpage of the cover film can be prevented when the release film is peeled off. Further, since the peeling roller is not in direct contact with the cover film, it is possible to prevent damage to the cover film.

在本發明的離型膜剝離方法中,理想的情況是:在將所述離型膜剝離且去除的操作中,在使用所述剝離輥剝離所述離型膜的同時將剝離後的所述離型膜藉由傳送帶來傳送,並且藉由分離板從所述剝離輥以及所述傳送帶處將所述離型膜分離後去除。In the release film peeling method of the present invention, it is desirable that in the operation of peeling and removing the release film, the peeling film is peeled off while the peeling film is peeled off using the peeling roller The release film is conveyed by a transfer belt, and is removed by separating the release film from the peeling roll and the transfer belt by a separation plate.

當僅使用剝離輥來剝離離型膜時,離型膜會被捲入剝離輥從而會導致難以從剝離輥處將離型膜去除。因此,如果將剝離後的離型膜藉由傳送帶來傳送的同時再藉由分離板從剝離輥以及傳送帶處分離的話,就能夠在離型膜不會纏繞在剝離輥的情況下,將離型膜從覆蓋層薄膜處剝離且去除。When the release film is peeled off using only the peeling roller, the release film may be caught in the peeling roller to cause difficulty in removing the release film from the peeling roller. Therefore, if the release film after peeling is conveyed by the conveyor belt and separated from the peeling roller and the conveyor by the separating plate, the release film can be released without being wound around the peeling roller. The film was peeled off from the cover film and removed.

本發明的離型膜剝離裝置,是一種從由具有熱固性黏合劑層的覆蓋層薄膜與疊層在所述黏合劑層的離型膜所構成的單片的疊層薄膜處將所述離型膜剝離且去除的離型膜剝離裝置,其特徵在於,包括:疊層薄膜吸附台,將所述疊層薄膜的所述離型膜側真空吸附的同時能夠向一個方向往返移動;預剝離輥,從所述覆蓋層薄膜側按壓所述疊層薄膜,並且藉由向所述疊層薄膜吸附台的一方的方向移動來進行轉動的同時在所述疊層薄膜的行進方向側的端部上形成預剝離留邊部;吸附頭,將所述疊層薄膜的所述覆蓋層薄膜側真空吸附;以及離型膜剝離輥部,能夠與所述疊層薄膜吸附台成為一體後移動,並且在所述吸附頭是將所述疊層薄膜吸附後的狀態下,在所述預剝離留邊部中剝離輥與所述離型膜抵接,並且藉由向所述疊層薄膜吸附台的另一方向移動在所述剝離輥轉動的同時從所述疊層薄膜處將所述離型膜剝離。The release film peeling device of the present invention is a release film which is obtained from a laminated film composed of a cover film having a thermosetting adhesive layer and a release film laminated on the adhesive layer. A release film peeling apparatus for peeling and removing a film, comprising: a laminated film adsorption stage capable of reciprocating in one direction while vacuum-adsorbing the release film side of the laminated film; The laminated film is pressed from the side of the cover film, and is rotated on one side of the laminated film adsorption stage to be rotated on the end side of the laminated film on the traveling direction side. Forming a pre-stripping edge portion; adsorbing a head, vacuum-adsorbing the cover film side of the laminated film; and releasing the film peeling roll portion, being movable integrally with the laminated film adsorption stage, and moving The adsorption head is in a state in which the laminated film is adsorbed, and a peeling roller abuts on the release film in the pre-peeled edge portion, and is further attached to the laminated film adsorption stage One direction of movement in the stripping The roller is rotated while said laminated film from the release film at the peeling.

根據本發明的離型膜剝離裝置,藉由從疊層薄膜的覆蓋層薄膜側按壓預剝離輥的同時使其轉動,並且使覆蓋層薄膜的端部從離型膜處浮起從而形成預剝離留邊部,在藉由吸附頭將覆蓋層薄膜的整個面吸附後,剝離輥會轉動並且從疊層薄膜處將離型膜剝離。經由這樣,在單片的疊層薄膜中,就能夠使覆蓋層薄膜在沒有產生翹曲、損傷的情況下,將離型膜從疊層薄膜處剝離。According to the release film peeling apparatus of the present invention, the pre-peeling roll is pressed from the side of the cover film of the laminated film while being rotated, and the end portion of the cover film is floated from the release film to form a pre-peeling. In the edge portion, after the entire surface of the cover film is adsorbed by the adsorption head, the peeling roller is rotated and the release film is peeled off from the laminated film. As a result, in the single-layer laminated film, the cover film can be peeled off from the laminated film without warping or damage.

在本發明的離型膜剝離裝置中,理想的情況是:所述預剝離輥是比垂直於所述疊層薄膜的移動方向的寬度尺寸更長,並且表面具有黏貼性,將所述疊層薄膜按壓的同時藉由所述疊層薄膜吸附台的移動來進行轉動的結構。In the release film peeling apparatus of the present invention, it is desirable that the pre-peeling roll is longer than a width dimension perpendicular to a moving direction of the laminated film, and the surface has adhesiveness, and the laminate is laminated The structure in which the film is pressed while being rotated by the movement of the laminated film adsorption stage.

由此構成的預剝離輥,利用黏貼性藉由沒有偏移地按壓疊層薄膜的同時向疊層薄膜吸附台相對地移動來進行轉動,從而就能夠使覆蓋層薄膜從被疊層薄膜吸附台真空吸附後的離型膜處浮起並形成預剝離留邊部。The pre-peeling roll thus formed can be rotated by relatively moving the laminated film while being pressed against the laminated film adsorption stage without being offset, so that the cover film can be moved from the laminated film adsorption stage. The release film after vacuum adsorption floats and forms a pre-stripping edge portion.

在本發明的離型膜剝離裝置中,理想的情況是:所述離型膜剝離輥部包括:所述剝離輥,比所述疊層薄膜的寬度尺寸更長,並且表面具有黏貼性;從動輥,配置在所述剝離輥的下方側,並且在比所述剝離輥更遠離所述疊層薄膜吸附台的位置;以及傳送帶,連結所述剝離輥與所述從動輥並且傳送剝離後的所述離型膜,其中,所述剝離輥以及所述從動輥上形成有多個溝,在多個所述溝上各自安裝有所述傳送帶,並且所述傳送帶是以收納於所述剝離輥的外周表面的內側的方式被安裝。In the release film peeling apparatus of the present invention, it is preferable that the release film peeling roll portion includes: the peeling roll, which is longer than a width dimension of the laminated film, and has a surface adhesiveness; a moving roller disposed on a lower side of the peeling roller and at a position farther from the laminated film adsorption stage than the peeling roller; and a conveyor belt that joins the peeling roller and the driven roller and conveys the peeling The release film, wherein the peeling roller and the driven roller are formed with a plurality of grooves, the conveyor belts are respectively mounted on the plurality of grooves, and the conveyor belt is stored in the peeling The inside of the outer peripheral surface of the roller is mounted.

經由這樣來構成的離型膜剝離輥部,藉由具有黏貼性的剝離輥對離型膜的整個寬度以連續並且幾乎均勻捲繞的方式進行剝離,被剝離後的離型膜藉由傳送帶被傳送至下方。因此,被剝離後的離型膜就能夠在不會纏繞於剝離輥的情況下藉由傳送帶從剝離輥處分離後傳送。The release film peeling roll portion configured as described above is peeled off continuously and almost uniformly by the entire width of the release film by the release roller having adhesiveness, and the release film after peeling is carried by the conveyor belt Transfer to the bottom. Therefore, the release film after peeling can be conveyed from the peeling roll by the conveyor belt without being wound around the peeling roll.

在本發明的離型膜剝離裝置中,理想的情況是:所述離型膜剝離輥部,具有:分離板,被配置為在所述剝離輥與所述從動輥之間與所述傳送帶交叉,並且所述從動輥側從該交叉部向所述傳送帶的外側突出。In the release film peeling apparatus of the present invention, it is preferable that the release film peeling roll portion has a separation plate configured to be between the peeling roller and the driven roller and the conveyor belt Crossing, and the driven roller side protrudes from the intersection toward the outside of the conveyor belt.

被藉由剝離輥剝離時的離型膜,藉由傳送帶被傳送至下方側(遠離剝離輥的方向),並且藉由分離板就能夠從傳送帶處被分離後去除。The release film which is peeled off by the peeling roller is conveyed to the lower side (direction away from the peeling roller) by the conveyor belt, and can be removed from the conveyor belt by the separation plate.

在本發明的離型膜剝離裝置中,理想的情況是: 所述吸附頭,具有:在吸附被剝離所述離型膜後的所述覆蓋層薄膜的狀態下,移動至黏貼所述覆蓋層薄膜的電路基板的配置位置,並且將所述覆蓋層薄膜加熱壓接在所述電路基板的規定位置的功能。In the release film peeling apparatus of the present invention, it is preferable that the adsorption head has a state in which the coating layer is moved to adhere to the cover layer in a state in which the cover film is peeled off after the release film is peeled off. a position at which the circuit board of the film is disposed, and a function of heating and crimping the cover film on a predetermined position of the circuit board.

經由這樣來構成,就能夠將離型膜剝離裝置實現從疊層薄膜處將離型膜剝離且去除的剝離功能,並且兼具將覆蓋層薄膜加熱壓接在電路基板的黏貼功能。According to this configuration, the release film peeling device can realize the peeling function of peeling off and removing the release film from the laminated film, and also has the function of attaching the cover layer film to the circuit board by heating and pressure bonding.

以下,將參照第1圖至第7圖來對本發明的實施方式中的離型膜剝離方法以及離型膜剝離裝置10進行說明。Hereinafter, the release film peeling method and the release film peeling apparatus 10 in the embodiment of the present invention will be described with reference to Figs. 1 to 7 .

疊層薄膜1的結構Structure of laminated film 1

第1圖是展示疊層薄膜1的結構的截面圖。疊層薄膜1是平面形狀為四邊形的單片(有時被稱為單片或條狀),並且由具有熱固性黏合劑層3的覆蓋層薄膜2、與疊層在黏合劑層3的離型膜4構成。覆蓋層薄膜2是形成導電圖案後的可撓性(flexible)佈線基板等的表面保護用的,聚醯亞胺樹脂、PET(聚對苯二甲酸乙二醇酯)樹脂等的薄膜。離型膜4由PET樹脂等構成,並且是用於保護黏合劑層3的表面的薄膜。黏合劑層3與離型膜4是將層之間的空氣排除後緊密相接的疊層狀態,並且由於黏合劑層3具有熱固性,所以黏合劑層3在常溫下一旦與空氣接觸就會成為分離狀態,從而就能夠成為將離型膜4從黏合劑層3,也就是從覆蓋層薄膜2處剝離的結構。Fig. 1 is a cross-sectional view showing the structure of the laminated film 1. The laminated film 1 is a single piece (sometimes referred to as a single piece or a strip) having a quadrangular shape in plan view, and is covered by the cover film 2 having the thermosetting adhesive layer 3 and the release layer laminated on the adhesive layer 3. The film 4 is constructed. The cover film 2 is a film for protecting the surface of a flexible wiring substrate or the like after forming a conductive pattern, such as a polyimide resin or a PET (polyethylene terephthalate) resin. The release film 4 is composed of a PET resin or the like and is a film for protecting the surface of the adhesive layer 3. The adhesive layer 3 and the release film 4 are in a laminated state in which the air between the layers is closely adhered, and since the adhesive layer 3 is thermosetting, the adhesive layer 3 becomes a contact with air at a normal temperature. In a separated state, it is possible to form a structure in which the release film 4 is peeled off from the adhesive layer 3, that is, from the cover film 2.

離型膜剝離裝置10的結構Structure of release film peeling device 10

第2圖是展示實施方式中的離型膜剝離裝置10的結構的斜視圖。其中,在之後說明的圖中,將第2圖的圖示左右方向使用X來表示,將右方向設為X(+),左方向設為X(-),將圖示的縱深方向使用Y來表示,將深側設為Y(-),近側設為Y(+),將垂直於X-Y平面的方向使用Z來表示,將上側作為Z(+)或上方,下側作為Z(-)或下方來說明。離型膜剝離裝置10具有:疊層薄膜吸附台單元11,將疊層薄膜1在離型膜4(參照第1圖)側真空吸附;吸附頭單元12,將疊層薄膜1在覆蓋層薄膜2(參照第1圖)側真空吸附;以及預剝離輥13,將疊層薄膜1從覆蓋層薄膜側向疊層薄膜吸附台14按壓。第2圖所示的疊層薄膜吸附台單元11、吸附頭單元12以及疊層薄膜1,是展示運作時的一種狀態的配置圖。預剝離輥13的材質是例如聚烯烴型橡膠等具有黏貼性的材質,並且也可以在外周表面形成黏貼層。Fig. 2 is a perspective view showing the structure of the release film peeling device 10 in the embodiment. In the drawings to be described later, the left and right directions in the second diagram are indicated by X, the right direction is X (+), the left direction is X (-), and the depth direction of the figure is Y. It is shown that the deep side is set to Y (-), the near side is set to Y (+), and the direction perpendicular to the XY plane is represented by Z, and the upper side is referred to as Z (+) or above, and the lower side is referred to as Z (-). ) or below to explain. The release film peeling apparatus 10 has a laminated film adsorption stage unit 11 for vacuum-adsorbing the laminated film 1 on the side of the release film 4 (see FIG. 1); the adsorption head unit 12, and the laminated film 1 on the cover film. 2 (refer to Fig. 1) side vacuum adsorption; and the pre-peeling roll 13 presses the laminated film 1 from the cover film side to the laminated film adsorption stage 14. The laminated film adsorption stage unit 11, the adsorption head unit 12, and the laminated film 1 shown in Fig. 2 are layout views showing a state in operation. The material of the pre-peeling roll 13 is a material having adhesiveness such as a polyolefin type rubber, and an adhesive layer may be formed on the outer peripheral surface.

疊層薄膜吸附台單元11具有:疊層薄膜吸附台14;以及離型膜剝離輥部15,安裝在疊層薄膜吸附台14的X(-)方向端部。疊層薄膜吸附台單元11能夠向X方向往返移動,並且在將預剝離輥13的下方藉由於X(-)方向時,進行離型膜4的預剝離,在將吸附頭單元12的下方向X(+)方向移動時,藉由離型膜剝離輥部15運作為將離型膜4從覆蓋層薄膜2處剝離且去除。疊層薄膜吸附台單元11的詳細結構將參照第3圖、第4圖,離型膜4的剝離方法將參照第5圖、第6圖、第7圖在之後進行敘述。The laminated film adsorption stage unit 11 has a laminated film adsorption stage 14 and a release film peeling roll unit 15 attached to the X (-) direction end of the laminated film adsorption stage 14. The laminated film adsorption stage unit 11 can reciprocate in the X direction, and pre-peeling of the release film 4 by the X (-) direction below the pre-peeling roll 13 is performed in the downward direction of the adsorption head unit 12 When moving in the X (+) direction, the release film peeling roller portion 15 operates to peel and remove the release film 4 from the cover film 2 . The detailed structure of the laminated film adsorption stage unit 11 will be described with reference to Figs. 3 and 4, and the peeling method of the release film 4 will be described later with reference to Figs. 5, 6 and 7.

吸附頭單元12具有:吸附頭16,設置在疊層薄膜吸附台單元11的上方(Z(+)側),並且面向於疊層薄膜吸附台14;Z軸驅動部17,使吸附頭16向Z方向往返移動;以及Y軸驅動部18,使吸附頭16向Y方向往返移動。Z軸驅動部17以及Y軸驅動部18藉由伺服電機(Servo motor)與滾珠絲杠機構(省略圖示)來高精度驅動。吸附頭單元12具有將吸附頭16向水平方向旋轉的θ軸驅動部19,θ軸驅動部19修正吸附後的覆蓋層薄膜2的姿勢(相對於X軸或Y軸的角度)。在吸附頭16上,設置有多個用於真空吸附疊層薄膜1的吸附孔(無圖示)。The adsorption head unit 12 has an adsorption head 16 which is disposed above the laminated film adsorption stage unit 11 (Z (+) side) and faces the laminated film adsorption stage 14; the Z-axis driving portion 17 causes the adsorption head 16 to The Z-direction reciprocates; and the Y-axis driving unit 18 reciprocates the adsorption head 16 in the Y direction. The Z-axis drive unit 17 and the Y-axis drive unit 18 are driven with high precision by a servo motor (Servo motor) and a ball screw mechanism (not shown). The adsorption head unit 12 has a θ-axis drive unit 19 that rotates the adsorption head 16 in the horizontal direction, and the θ-axis drive unit 19 corrects the posture (angle with respect to the X-axis or the Y-axis) of the cover film 2 after adsorption. On the adsorption head 16, a plurality of adsorption holes (not shown) for vacuum-adsorbing the laminated film 1 are provided.

在離型膜剝離裝置10的X(+)方向上,配置有:基板吸附台20,將作為覆蓋層薄膜2的黏貼對象的無圖示的電路基板(例如,可撓性佈線基板)進行真空吸附;以及供料單元21,將電路基板供料於基板吸附台20,並且將疊層薄膜1供料於疊層薄膜吸附台14。其中,供料單元21能夠向Y軸方向以及Z軸方向各自往返移動。基板吸附台20沿導軌22向X(-)方向移動至吸附頭16的下方,並且將覆蓋層薄膜2加熱壓接在電路基板的導體圖案形成面上。黏貼覆蓋層薄膜2後的電路基板沿導軌22向X(+)方向移動,被藉由壓接輥23來壓接,並且返回至基板供料位置後被除料。In the X (+) direction of the release film peeling apparatus 10, the substrate adsorption stage 20 is disposed, and a circuit board (for example, a flexible wiring board) which is a target of adhesion of the cover film 2 is vacuumed. The adsorption unit and the feeding unit 21 feed the circuit substrate to the substrate adsorption stage 20, and feed the laminated film 1 to the laminated film adsorption stage 14. Among them, the feeding unit 21 can reciprocate in the Y-axis direction and the Z-axis direction. The substrate adsorption stage 20 is moved to the lower side of the adsorption head 16 in the X (-) direction along the guide rail 22, and the cover film 2 is heated and pressure-bonded to the conductor pattern forming surface of the circuit board. The circuit substrate adhered to the cover film 2 is moved in the X (+) direction along the guide rail 22, is crimped by the pressure roller 23, and returned to the substrate supply position to be removed.

疊層薄膜吸附台單元11的結構Structure of laminated film adsorption stage unit 11

第3圖是展示疊層薄膜吸附台單元11的結構的圖,第3圖的(a)是展示疊層薄膜吸附台單元11的整體結構的斜視圖,第3圖的(b)是將第3圖的(a)中所示的被虛線B包圍的吸附孔形成區域24的一部分放大後來展示的圖。疊層薄膜吸附台單元11包括:疊層薄膜吸附台14,具有排列有多個吸附孔25的吸附孔形成區域24;台基部26,放置疊層薄膜吸附台14並將其保持;以及離型膜剝離輥部15,設置在疊層薄膜吸附台14的X(-)方向端部。Fig. 3 is a view showing the structure of the laminated film adsorption stage unit 11, and Fig. 3(a) is a perspective view showing the overall structure of the laminated film adsorption stage unit 11, and Fig. 3(b) is the first A part of the adsorption hole forming region 24 surrounded by the broken line B shown in (a) of Fig. 3 is enlarged and shown later. The laminated film adsorption stage unit 11 includes a laminated film adsorption stage 14 having an adsorption hole formation region 24 in which a plurality of adsorption holes 25 are arranged, a base portion 26 on which the laminated film adsorption stage 14 is placed and held, and a release type The film peeling roll unit 15 is provided at the end portion of the laminated film adsorption stage 14 in the X (-) direction.

離型膜剝離輥部15由比疊層薄膜1的寬度(Y方向的尺寸)更長、並且表面具有黏貼性的剝離輥30,與配置在下方側遠離剝離輥30的位置的從動輥31構成。從動輥31具有與剝離輥30相同的長度。剝離輥30以及從動輥31的兩端部被支撐板32可旋轉地支撐。支撐板32被固定於台基部26的Y方向兩端。作為剝離輥30的材質,也可以是例如聚烯烴型橡膠等材質,並且在外周表面形成黏貼層。剝離輥30與從動輥31被藉由截面為圓形的傳送帶33來連結。傳送帶33被安裝在各自形成於剝離輥30以及從動輥31的溝34、35上。剝離輥30與從動輥31之間,設置有分離板36。剝離輥30、從動輥31以及傳送帶33的連結關係將參照圖4來進行詳細說明。The release film peeling roll unit 15 is composed of a peeling roller 30 that is longer than the width (the dimension in the Y direction) of the laminated film 1 and has adhesiveness on the surface, and a driven roller 31 that is disposed at a position on the lower side away from the peeling roller 30. . The driven roller 31 has the same length as the peeling roller 30. Both ends of the peeling roller 30 and the driven roller 31 are rotatably supported by the support plate 32. The support plate 32 is fixed to both ends of the base portion 26 in the Y direction. The material of the peeling roller 30 may be a material such as a polyolefin rubber, and an adhesive layer may be formed on the outer peripheral surface. The peeling roller 30 and the driven roller 31 are coupled by a conveyor belt 33 having a circular cross section. The conveyor belt 33 is attached to the grooves 34, 35 which are formed on the peeling roller 30 and the driven roller 31, respectively. A separation plate 36 is provided between the peeling roller 30 and the driven roller 31. The connection relationship between the peeling roller 30, the driven roller 31, and the conveyor belt 33 will be described in detail with reference to FIG.

第4圖是從Y(+)方向觀看疊層薄膜吸附台單元11與離型膜剝離輥部15的圖。第4圖的(a)是展示第3圖所示的在切割線A-A切割後的切割面的截面圖,第4圖的(b)是將離型膜剝離輥部15(在第4圖的(a)中被虛線C包圍的部分)放大後進行展示的圖。在疊層薄膜吸附台14中,設置有多個如第3圖的(b)所示般的吸附孔25,並且吸附孔25連通於負壓室27。負壓室27藉由接頭28連接於無圖示的真空泵,並且藉由驅動真空泵,從吸附孔25處吸收空氣從而將疊層薄膜1在離型膜4側進行真空吸附。如第4圖的(a)所示,剝離輥30的外周上面被配置在位於比疊層薄膜吸附台14更高(Z(+)方向)的位置上,從動輥31被配置在位於比剝離輥30更在下方側、並且遠離X(-)方向的位置上。將剝離輥30與從動輥31的軸心連結的直線(在圖中,用雙點劃線表示),相對於疊層薄膜吸附台14的表面呈角度θ傾斜。Fig. 4 is a view of the laminated film adsorption stage unit 11 and the release film peeling roll unit 15 viewed from the Y (+) direction. (a) of FIG. 4 is a cross-sectional view showing a cut surface after cutting along the cutting line AA shown in FIG. 3, and (b) of FIG. 4 is a peeling roll portion 15 of the release film (in FIG. 4) A part of (a) surrounded by a broken line C) is enlarged and displayed. In the laminated film adsorption stage 14, a plurality of adsorption holes 25 as shown in FIG. 3(b) are provided, and the adsorption holes 25 communicate with the negative pressure chamber 27. The negative pressure chamber 27 is connected to a vacuum pump (not shown) by a joint 28, and vacuum is sucked from the adsorption hole 25 by driving the vacuum pump to vacuum-adsorb the laminated film 1 on the side of the release film 4. As shown in (a) of Fig. 4, the outer peripheral surface of the peeling roller 30 is disposed at a position higher than the laminated film adsorption stage 14 (Z (+) direction), and the driven roller 31 is disposed at a ratio The peeling roller 30 is further on the lower side and away from the X (-) direction. A straight line connecting the peeling roller 30 and the axial center of the driven roller 31 (indicated by a chain double-dashed line in the drawing) is inclined at an angle θ with respect to the surface of the laminated film adsorption stage 14.

如第4圖的(b)所示,剝離輥30以及從動輥31上各自形成有溝34、35。這些溝34、35上安裝有傳送帶33。溝34、35在Y方向上形成有多個(參照第3圖的(a))。在第3圖的(a)所示的例中,雖然具備10條傳送帶33,但是剝離後的離型膜4只要是被配置為能夠不下垂於傳送帶33之間,也可以不限定於10條。形成於剝離輥30的溝34,具有傳送帶33不會從剝離輥30的外周面突出的深度。在形成於從動輥31的溝35中,雖然是傳送帶33從動輥31的外周面輕微突出的深度,但是也可以是設為不突出的深度。隨著疊層薄膜吸附台14相對於真空吸附有疊層薄膜1的吸附頭16向X(+)方向移動,剝離輥30藉由與疊層薄膜1的摩擦來進行轉動。傳送帶33藉由剝離輥30的轉動(旋轉)在從動輥31間旋轉運作,從而將剝離後的離型膜4向下方側傳送。As shown in FIG. 4(b), grooves 34 and 35 are formed in each of the peeling roller 30 and the driven roller 31. A conveyor belt 33 is mounted on these grooves 34, 35. A plurality of grooves 34 and 35 are formed in the Y direction (see (a) of Fig. 3). In the example shown in FIG. 3( a ), the belt 10 is provided, but the release film 4 after peeling is not limited to 10 pieces as long as it is disposed so as not to hang between the conveyor belts 33 . . The groove 34 formed in the peeling roller 30 has a depth at which the conveyor belt 33 does not protrude from the outer peripheral surface of the peeling roller 30. The groove 35 formed in the driven roller 31 is a depth slightly protruding from the outer circumferential surface of the driven roller 31 of the conveyor belt 33, but may be a depth that does not protrude. As the laminated film adsorption stage 14 moves in the X (+) direction with respect to the adsorption head 16 to which the laminated film 1 is vacuum-adsorbed, the peeling roll 30 is rotated by friction with the laminated film 1. The conveyor belt 33 rotates between the driven rollers 31 by the rotation (rotation) of the peeling roller 30, and conveys the release film 4 after peeling to the lower side.

雖然關於離型膜4的詳細剝離方法會在之後進行敘述,但是被剝離輥30剝離後的離型膜4,是藉由傳送帶33被傳送向下方的。在離型膜剝離輥部15中,設置有用於將剝離後的離型膜4分離後去除的分離板36。如第3圖、第4圖所示,分離板36由向Y方向延伸的板狀的分離部37、與設置在分離部37的兩端部的固定部38構成。Although the detailed peeling method of the release film 4 will be described later, the release film 4 peeled off by the peeling roller 30 is conveyed downward by the conveyor belt 33. In the release film peeling roll portion 15, a separation plate 36 for separating and removing the release film 4 after peeling is provided. As shown in FIGS. 3 and 4, the separating plate 36 is composed of a plate-shaped separating portion 37 extending in the Y direction and a fixing portion 38 provided at both end portions of the separating portion 37.

分離板36藉由固定部38被固定於支撐板32(也參照第3圖的(a))。如第4圖的(b)所示,分離部37在外側遠離疊層薄膜吸附台14的方向的上方側端部與外側的傳送帶33(記載為傳送帶33A)交叉,下方側傾斜為比傳送帶33A更向外側(遠離疊層薄膜吸附台14的方向)突出。剝離輥30在第4圖的(b)中向實線箭頭所示的方向轉動,並且將傳送帶33向相同方向傳送。在這時,傳送帶33如第3圖的(a)、第4圖的(b)所示般從設置在分離部37的溝39的上方側進入,並且在下方側的分離部37的裡面側脫離後到達從動輥31。經由這樣,被剝離輥30剝離後的離型膜4,藉由傳送帶33向下方側傳送,並且藉由分離板36從剝離輥30以及傳送帶33處分離後去除。接下來,將參照第5圖、第6圖、第7圖對離型膜的剝離方法進行詳細說明。The separating plate 36 is fixed to the support plate 32 by the fixing portion 38 (see also (a) of Fig. 3). As shown in FIG. 4( b ), the separation portion 37 intersects the outer belt 33 (described as the conveyor belt 33A) at the upper end portion in the direction away from the laminated film adsorption stage 14 , and the lower side is inclined to the specific belt 33A. It protrudes further to the outside (in a direction away from the laminated film adsorption stage 14). The peeling roller 30 is rotated in the direction indicated by the solid arrow in (b) of Fig. 4, and the conveyer belt 33 is conveyed in the same direction. At this time, the conveyor belt 33 enters from the upper side of the groove 39 provided in the separating portion 37 as shown in (a) of FIG. 3 and (b) of FIG. 4, and is separated from the inner side of the lower separating portion 37. The driven roller 31 is then reached. As a result, the release film 4 peeled off by the peeling roller 30 is conveyed to the lower side by the conveyance belt 33, and is separated by the separation plate 36 from the peeling roller 30 and the conveyance belt 33, and is removed. Next, the peeling method of the release film will be described in detail with reference to FIGS. 5, 6, and 7.

離型膜剝離方法Release film peeling method

第5圖是展示實施方式中的離型膜剝離方法的操作流程圖,第6圖是將實施方式中的離型膜剝離方法的主要操作簡化後來展示的操作說明圖,第7圖是展示離型膜4的剝離・去除操作的放大圖。根據第5圖的操作流程圖,參照第6圖、第7圖來進行說明。首先,如第6圖的(a)所示,將疊層薄膜1供料於疊層薄膜吸附台14,並且將離型膜4側真空吸附(步驟S1)。藉由供料單元21(參照第2圖)來進行疊層薄膜1向疊層薄膜吸附台14的供料。在該階段中,預剝離輥13以及吸附頭16待機於遠離疊層薄膜1以及離型膜剝離輥部15的上方規定位置。Fig. 5 is a flow chart showing the operation of the release film peeling method in the embodiment, and Fig. 6 is an operation explanatory view showing the main operation of the release film peeling method in the embodiment, which is shown later, and Fig. 7 is a view showing An enlarged view of the peeling and removing operation of the film 4. The operation flow chart of Fig. 5 will be described with reference to Figs. 6 and 7. First, as shown in (a) of Fig. 6, the laminated film 1 is supplied to the laminated film adsorption stage 14, and the release film 4 side is vacuum-adsorbed (step S1). The supply of the laminated film 1 to the laminated film adsorption stage 14 is performed by the supply unit 21 (refer to Fig. 2). At this stage, the pre-peeling roller 13 and the adsorption head 16 stand by at a predetermined position above the laminated film 1 and the release film peeling roll portion 15.

在將疊層薄膜1真空吸附在疊層薄膜吸附台14後,如第6圖的(b)所示,使疊層薄膜吸附台14向X(-)方向移動(步驟S2),並且在疊層薄膜1的X(-)側端部到達預剝離輥13的下方之前,使預剝離輥13下降至能夠抵接於疊層薄膜1的位置(步驟S3)。並且,如第6圖的(c)所示,一旦使疊層薄膜吸附台14向X(-)方向移動,疊層薄膜1在藉由預剝離輥13時被按壓,從而僅將包含黏合劑層3的覆蓋層薄膜2的前端部從覆蓋層薄膜2處浮起。將浮起的覆蓋層薄膜2的前端部設為預剝離。After the laminated film 1 is vacuum-adsorbed on the laminated film adsorption stage 14, as shown in FIG. 6(b), the laminated film adsorption stage 14 is moved in the X (-) direction (step S2), and stacked. Before the X (-) side end portion of the layer film 1 reaches the lower side of the pre-peeling roll 13, the pre-peeling roll 13 is lowered to a position where it can abut against the laminated film 1 (step S3). Further, as shown in (c) of Fig. 6, when the laminated film adsorption stage 14 is moved in the X (-) direction, the laminated film 1 is pressed by the pre-peeling roll 13, so that only the adhesive is contained. The front end portion of the cover film 2 of the layer 3 floats from the cover film 2. The front end portion of the floating cover film 2 is preliminarily peeled off.

將預剝離的外觀放大後如第6圖的(d)所示。覆蓋層薄膜2與黏合劑層3具有不易剝離的黏著力,並且由於離型膜4與黏合劑層雖然緊密接觸但不黏著,所以一旦被藉由預剝離輥13來按壓,由於離型膜4被真空吸附於疊層薄膜吸附台14因此覆蓋層薄膜2側從離型膜4處瞬間浮起,從而黏合劑層3會與空氣接觸。由於黏合劑層3是熱固性,所以只要與空氣接觸一次即使再次按壓離型膜4也不會黏著從而就能夠容易地進行剝離。將這時的浮起範圍設為預剝離留邊部L,將藉由預剝離輥13使離型膜4浮起的操作設為預剝離留邊部形成操作(步驟S4)。預剝離輥13的按壓力,可以是在疊層薄膜1移動的時間裡與其基本均勻接觸的程度,而無需積極地使覆蓋層薄膜2翹曲向上。在預剝離留邊部L的X(+)側上,離型膜4沒有浮起。預剝離輥13在與疊層薄膜1抵接的狀態下藉由疊層薄膜1向X(-)方向的移動在與覆蓋層薄膜2的摩擦力下來進行轉動。The appearance of the pre-stripping is enlarged as shown in (d) of Fig. 6. The cover film 2 and the adhesive layer 3 have an adhesive force which is not easily peeled off, and since the release film 4 and the adhesive layer are in close contact but do not adhere, once pressed by the pre-peeling roller 13, due to the release film 4 The vacuum is adsorbed on the laminated film adsorption stage 14 so that the cover film 2 side is instantaneously floated from the release film 4, so that the adhesive layer 3 comes into contact with the air. Since the adhesive layer 3 is thermosetting, it is possible to easily peel off even if it is in contact with air once and the release film 4 is pressed again without adhering. The floating range at this time is referred to as a pre-peeling edge portion L, and the operation of floating the release film 4 by the pre-peeling roller 13 is referred to as a pre-peeling edge portion forming operation (step S4). The pressing force of the pre-peeling roller 13 may be such a degree that it is substantially uniformly contacted with the laminated film 1 during the movement, without actively causing the cover film 2 to warp upward. On the X (+) side of the pre-stripping edge portion L, the release film 4 is not floated. The pre-peeling roller 13 is rotated by the frictional force with the cover film 2 by the movement of the laminated film 1 in the X (-) direction in a state in which it is in contact with the laminated film 1.

在疊層薄膜1藉由預剝離輥13的下方後,如第6圖的(e)所示,使預剝離輥13上升至待機位置(遠離疊層薄膜1的位置)(步驟S5)後,將疊層薄膜吸附台14停止(步驟S6),使吸附頭16下降至抵接於疊層薄膜1後(步驟S7),將疊層薄膜1的覆蓋層薄膜2側真空吸附(步驟S8)。在將疊層薄膜1真空吸附後,解除疊層薄膜1對於疊層薄膜吸附台14的吸附(步驟S9)。接下來,如第6圖的(f)所示,使吸附疊層薄膜1後的吸附頭16上升至能夠抵接於剝離輥30的上面的高度位置(能夠剝離離型膜4的位置)(步驟S10)。After the laminated film 1 is positioned below the pre-peeling roll 13, as shown in FIG. 6(e), the pre-peeling roll 13 is raised to the standby position (the position away from the laminated film 1) (step S5). The laminated film adsorption stage 14 is stopped (step S6), and the adsorption head 16 is lowered to abut against the laminated film 1 (step S7), and the cover film 2 side of the laminated film 1 is vacuum-adsorbed (step S8). After the laminated film 1 is vacuum-adsorbed, the adsorption of the laminated film 1 on the laminated film adsorption stage 14 is released (step S9). Next, as shown in (f) of FIG. 6, the adsorption head 16 after the adsorption of the laminated film 1 is raised to a height position (a position at which the release film 4 can be peeled off) capable of abutting on the upper surface of the separation roller 30 ( Step S10).

之後,如第6圖的(g)所示,使疊層薄膜吸附台14向X(+)方向移動(步驟S11),在剝離輥30與離型膜4接觸時藉由疊層薄膜吸附台14(覆蓋層薄膜2)的移動來開始剝離輥30的轉動,並且利用剝離輥30的黏貼性來開始離型膜4的剝離(步驟S12)。並且,藉由使疊層薄膜吸附台14(覆蓋層薄膜2)向X(+)方向移動,將離型膜4從覆蓋層薄膜2處分離後去除(步驟S13)。關於離型膜4的去除,將參照第7圖來詳細說明。Thereafter, as shown in (g) of Fig. 6, the laminated film adsorption stage 14 is moved in the X (+) direction (step S11), and the laminated film adsorption stage is used when the peeling roll 30 comes into contact with the release film 4 The movement of the cover film (the cover film 2) starts the rotation of the peeling roller 30, and the peeling of the release film 4 is started by the adhesiveness of the peeling roller 30 (step S12). Then, by moving the laminated film adsorption stage 14 (covering film 2) in the X (+) direction, the release film 4 is separated from the cover film 2 and then removed (step S13). The removal of the release film 4 will be described in detail with reference to FIG.

如第7圖所示,剝離輥30藉由向疊層薄膜吸附台14的X(+)方向的移動來進行轉動,並且利用表面的黏貼性將離型膜4以捲繞的方式剝離。這時,僅在剝離輥30的結構下,雖然剝離輥30將離型膜4捲入,但是藉由傳送帶33,可以在剝離輥30不將離型膜4捲入的情況下將剝離後的離型膜4向下方側傳送(將移動方向使用虛線表示)。在離型膜4的傳送過程中由於設置有分離板36,所以藉由分離部37就能夠將離型膜4從剝離輥30以及傳送帶33處分離後去除。剝離輥30由於是藉由與離型膜4的摩擦來轉動所以就難以產生靜電。在離型膜4的剝離・去除操作(步驟S13)結束後,疊層薄膜吸附台14返回於供料下一個疊層薄膜1的初始位置。As shown in Fig. 7, the peeling roller 30 is rotated by the movement in the X (+) direction of the laminated film adsorption stage 14, and the release film 4 is peeled off by the adhesiveness of the surface. At this time, the peeling roller 30 entrains the release film 4 only under the structure of the peeling roller 30, but by the conveyor belt 33, the peeling roller 30 can be peeled off without the release film 4 being wound up. The film 4 is conveyed to the lower side (the direction of movement is indicated by a broken line). Since the separation plate 36 is provided during the conveyance of the release film 4, the release film 37 can be separated from the separation roller 30 and the conveyor belt 33 by the separation portion 37 and then removed. Since the peeling roller 30 is rotated by friction with the release film 4, it is difficult to generate static electricity. After the peeling and removing operation of the release film 4 (step S13) is completed, the laminated film adsorption stage 14 returns to the initial position of the next laminated film 1 to be fed.

對於離型膜4的剝離・去除操作(步驟S13)結束後的吸附頭16的運作將參照第2圖進行說明。吸附頭單元12在吸附頭16吸附被剝離離型膜4後的覆蓋層薄膜2的狀態下,向Y(-)方向移動至作為覆蓋層薄膜2的黏貼對象的電路基板(無圖示)的黏貼位置,並且將覆蓋層薄膜2加熱壓接在電路基板上。電路基板在被基板吸附台20真空吸附的狀態下,沿導軌22向吸附頭16的下方移動並且停止於黏貼位置。因此,離型膜剝離裝置10是具有從疊層薄膜1處將離型膜4分離後去除、與將覆蓋層薄膜2黏貼於基板上的功能的裝置。黏貼覆蓋層薄膜2後的電路基板,在返回除料位置時被藉由壓接輥23來進一步壓接。The operation of the adsorption head 16 after the completion of the peeling and removing operation of the release film 4 (step S13) will be described with reference to Fig. 2 . The adsorption head unit 12 moves to the circuit board (not shown) which is the target of adhesion of the cover film 2 in the Y (-) direction in a state in which the coating film 16 after the peeling of the release film 4 is adsorbed by the adsorption head 16 . The position is pasted, and the cover film 2 is heated and crimped onto the circuit substrate. The circuit board moves to the lower side of the adsorption head 16 along the guide rail 22 in a state of being vacuum-adsorbed by the substrate adsorption stage 20, and stops at the pasting position. Therefore, the release film peeling device 10 is a device having a function of separating the release film 4 from the laminated film 1 and removing it, and bonding the cover film 2 to the substrate. The circuit substrate after the cover film 2 is adhered is further crimped by the pressure roller 23 when returning to the removal position.

以上說明過的離型膜剝離方法,是在由具有熱固性黏合劑層3的覆蓋層薄膜2與疊層在黏合劑層3的離型膜4構成的單片的疊層薄膜1處將離型膜4剝離且去除的剝離方法,並且具有:將疊層薄膜1的離型膜4側真空吸附於疊層薄膜吸附台14的操作;將疊層薄膜1向一方的方向(X(-)方向)移動的同時使用預剝離輥13將疊層薄膜1從覆蓋層薄膜2側按壓的同時使預剝離輥13轉動,並且使覆蓋層薄膜2的端部從離型膜4處浮起從而形成預剝離留邊部L的操作;解除疊層薄膜1對於疊層薄膜吸附台14的吸附,並且將疊層薄膜1的覆蓋層薄膜2的整個面真空吸附於吸附頭16的操作;以及在吸附頭16是將疊層薄膜1吸附後的狀態下,將具有黏貼性的剝離輥30接觸於離型膜4後,藉由將疊層薄膜吸附台14以及剝離輥30向另一方向(X(+)方向)移動來轉動剝離輥30,從而將離型膜4從疊層薄膜1處捲繞的同時進行剝離且去除的操作。The release film peeling method described above is to be released at a single laminated film 1 composed of a cover film 2 having a thermosetting adhesive layer 3 and a release film 4 laminated on the adhesive layer 3. The peeling method of peeling and removing the film 4 has an operation of vacuum-adsorbing the release film 4 side of the laminated film 1 to the laminated film adsorption stage 14; and the laminated film 1 is oriented in one direction (X (-) direction) While moving, the pre-peeling roll 13 is rotated while the laminated film 1 is pressed from the side of the cover film 2, and the end portion of the cover film 2 is floated from the release film 4 to form a pre-form. The operation of peeling off the edge portion L; releasing the adsorption of the laminated film 1 to the laminated film adsorption stage 14, and vacuum-adsorbing the entire surface of the cover film 2 of the laminated film 1 to the adsorption head 16; 16 is a state in which the laminated film 1 is adsorbed, and after the release roller 30 having adhesiveness is brought into contact with the release film 4, the laminated film adsorption stage 14 and the peeling roll 30 are oriented in the other direction (X (+ ))) moving to rotate the peeling roller 30, thereby removing the release film 4 from the laminated film 1 Peeling and removal of the winding operation simultaneously.

根據這種離型膜剝離方法,藉由將預剝離輥13從疊層薄膜1的覆蓋層薄膜2處按壓的同時使其轉動來形成預剝離留邊部L,並且藉由吸附頭16將覆蓋層薄膜2的整個面吸附後,使剝離輥30轉動從而將離型膜2從疊層薄膜1處剝離。經由這樣,在單片的疊層薄膜1中,就能夠在使覆蓋層薄膜2不產生翹曲、損傷的情況下,將離型膜4從疊層薄膜1處剝離且去除。According to this release film peeling method, the pre-peeling edge portion L is formed by pressing the pre-peeling roll 13 while being pressed from the cover film 2 of the laminated film 1, and is covered by the adsorption head 16. After the entire surface of the layer film 2 is adsorbed, the peeling roller 30 is rotated to peel the release film 2 from the laminated film 1. As a result, in the single-layer laminated film 1, the release film 4 can be peeled off from the laminated film 1 and removed without causing warpage or damage.

在形成預剝離留邊部L的操作(步驟S4)中,按壓覆蓋層薄膜2的同時使預剝離輥13轉動來使覆蓋層薄膜2的端部從離型膜4處浮起,並且使空氣接觸於黏合劑層3。In the operation of forming the pre-peeled edge portion L (step S4), the cover film 2 is pressed while the pre-peeling roller 13 is rotated to float the end portion of the cover film 2 from the release film 4, and the air is made Contact with the adhesive layer 3.

熱固性黏合劑層3能夠利用一旦其表面接觸於空氣如果不進行加熱就無法再次黏貼離型膜這一特性來形成預剝離留邊部L,並且一旦從該預剝離留邊部L開始剝離,就能夠容易地從疊層薄膜1處將離型膜4剝離。The thermosetting adhesive layer 3 can form a pre-stripping edge portion L by utilizing the property that the surface of the thermosetting adhesive layer cannot be adhered again if it is not heated, and once peeled off from the pre-stripping edge portion L, The release film 4 can be easily peeled off from the laminated film 1.

在吸附頭16是將疊層薄膜1真空吸附的操作中,藉由吸附頭16將含有預剝離留邊部L的疊層薄膜1的整個面吸附。經由這樣,在剝離離型膜4時就能夠防止覆蓋層薄膜2產生翹曲。並且,由於剝離輥30沒有接觸於覆蓋層薄膜2,所以進而就能夠防止損傷覆蓋層薄膜2。In the operation in which the adsorption head 16 vacuum-adsorbs the laminated film 1, the entire surface of the laminated film 1 containing the pre-peeled edge portion L is adsorbed by the adsorption head 16. As a result, warpage of the cover film 2 can be prevented when the release film 4 is peeled off. Further, since the peeling roller 30 does not come into contact with the cover film 2, it is possible to prevent the cover film 2 from being damaged.

在將離型膜4剝離且去除的操作中,使用剝離輥30將離型膜4剝離的同時將剝離後的離型膜4藉由傳送帶33來傳送,並且藉由分離板36從剝離輥30以及傳送帶33處將離型膜4剝離且去除。In the operation of peeling and removing the release film 4, the release film 4 after peeling is peeled off by the peeling roller 30, and the release film 4 after peeling is conveyed by the conveyance belt 33, and is removed from the peeling roller 30 by the separation plate 36. And the release film 4 is peeled off and removed at the conveyor belt 33.

當僅使用剝離輥30來剝離離型膜4時,離型膜4會被捲入剝離輥30從而會導致難以去除。因此,如果將被藉由剝離輥30剝離後的離型膜4使用傳送帶33來傳送的同時再藉由分離板36從剝離輥30以及傳送帶33處分離的話,就能夠在離型膜4不會纏繞在剝離輥30的情況下,將離型膜4從覆蓋層薄膜2處剝離且去除。When the release film 4 is peeled off using only the peeling roller 30, the release film 4 is caught in the peeling roller 30 to cause difficulty in removal. Therefore, if the release film 4 which has been peeled off by the peeling roller 30 is transported using the conveyor belt 33 and is separated from the peeling roller 30 and the conveyor belt 33 by the separating plate 36, it can be prevented in the release film 4 In the case of being wound around the peeling roller 30, the release film 4 is peeled off from the cover film 2 and removed.

離型膜剝離裝置10,包括:疊層薄膜吸附台14,將疊層薄膜1的離型膜4側真空吸附的同時能夠向一個方向(X方向)往返移動;預剝離輥13,從覆蓋層薄膜4側按壓疊層薄膜1,並且藉由向疊層薄膜吸附台14的一方的方向(X(-)方向)移動來進行轉動的同時在疊層薄膜1的行進方向側的端部上形成預剝離留邊部L;吸附頭16,將疊層薄膜1的覆蓋層薄膜2側真空吸附;以及離型膜剝離輥部15,能夠與疊層薄膜吸附台14成為一體後移動,並且在吸附頭16是將疊層薄膜1吸附後的狀態下,在預剝離留邊部L中剝離輥30與離型膜4抵接,並且藉由向疊層薄膜吸附台14的另一方向(X(+)方向)移動在剝離輥30轉動的同時從疊層薄膜1處將離型膜4剝離。The release film peeling apparatus 10 includes a laminated film adsorption stage 14 that can reciprocate in one direction (X direction) while vacuum-adsorbing the release film 4 side of the laminated film 1, and a pre-peeling roll 13 from the cover layer The film 4 is pressed against the laminated film 1 and is formed on the end portion of the laminated film 1 on the traveling direction side while being rotated in one direction (X (-) direction) of the laminated film adsorption stage 14 while being rotated. The pre-peeling edge portion L is formed; the adsorption head 16 vacuum-adsorbs the cover film 2 side of the laminated film 1, and the release film peeling roll portion 15 is integrated with the laminated film adsorption stage 14 and moved, and is adsorbed. In the state where the laminated film 1 is adsorbed, the peeling roller 30 and the release film 4 are in contact with each other in the pre-peeled edge portion L, and the other direction (X( +) Direction) Movement The release film 4 is peeled off from the laminated film 1 while the peeling roller 30 is rotated.

根據以上說明過的離型膜剝離裝置10,藉由從疊層薄膜1的覆蓋層薄膜2側按壓預剝離輥13的同時使其轉動,並且使覆蓋層薄膜2的端部從離型膜4處浮起從而形成預剝離留邊部L,在藉由吸附頭16將覆蓋層薄膜2的整個面吸附後,剝離輥16會轉動並且從疊層薄膜處將離型膜4以捲繞的方式剝離。經由這樣,在單片的疊層薄膜1中,就不會使覆蓋層薄膜2 產生翹曲。或,由於離型膜剝離輥部沒有接觸於覆蓋層薄膜2,所以就能夠在沒有損傷的情況下,從疊層薄膜1處將離型膜4剝離。According to the release film peeling apparatus 10 described above, the pre-peeling roll 13 is rotated from the side of the cover film 2 of the laminated film 1 while the end portion of the cover film 2 is removed from the release film 4 The floating portion is formed to form the pre-stripping edge portion L. After the entire surface of the cover film 2 is adsorbed by the adsorption head 16, the peeling roller 16 is rotated and the release film 4 is wound from the laminated film. Stripped. As a result, in the single-layer laminated film 1, the cover film 2 is not warped. Alternatively, since the release film peeling roll portion is not in contact with the cover film 2, the release film 4 can be peeled off from the laminated film 1 without damage.

預剝離輥13是比垂直於疊層薄膜1的移動方向的寬度尺寸(Y方向尺寸)更長,並且表面具有黏貼性,將疊層薄膜1按壓的同時藉由疊層薄膜吸附台14的移動來進行轉動的結構。由此構成的預剝離輥13,利用黏貼性藉由沒有偏移地按壓疊層薄膜1的同時做相對地移動來進行轉動,從而就能夠使覆蓋層薄膜2從被疊層薄膜吸附台14真空吸附後的離型膜4處浮起並形成預剝離留邊部L。The pre-peeling roller 13 is longer than the width dimension (Y-direction dimension) perpendicular to the moving direction of the laminated film 1, and has adhesiveness on the surface, and the laminate film 1 is pressed while being moved by the laminated film adsorption stage 14. The structure to rotate. The pre-separation roller 13 thus constituted is rotated by relatively moving while pressing the laminated film 1 without offset, so that the cover film 2 can be vacuumed from the laminated film adsorption stage 14. The release film 4 after the adsorption floats and forms a pre-stripping edge portion L.

離型膜剝離輥部15是由:剝離輥30,比疊層薄膜1的寬度尺寸更長,並且表面具有黏貼性;從動輥31,配置在剝離輥30的下方側,並且在比剝離輥30更遠離疊層薄膜吸附台14的位置;以及傳送帶33,連結剝離輥30與從動輥31並且傳送剝離後的離型膜4的結構所構成,其中,剝離輥30以及從動輥31上形成有多個溝34、35,在多個溝上各自安裝有傳送帶33,並且傳送帶33是以收納於剝離輥30的外周表面的內側的方式被安裝。The release film peeling roll portion 15 is composed of a peeling roll 30 which is longer than the width dimension of the laminated film 1 and has adhesiveness on the surface; the driven roller 31 is disposed on the lower side of the peeling roll 30, and is in the ratio of the peeling roll 30 is further away from the position of the laminated film adsorption stage 14; and the conveyor belt 33 is configured by joining the peeling roller 30 and the driven roller 31 and conveying the peeled release film 4, wherein the peeling roller 30 and the driven roller 31 are disposed. A plurality of grooves 34 and 35 are formed, and a conveyor belt 33 is attached to each of the plurality of grooves, and the conveyor belt 33 is attached to the inside of the outer circumferential surface of the separation roller 30.

經由這樣來構成的離型膜剝離輥部15,藉由具有黏貼性的剝離輥30對離型膜4的整個寬度以連續並且幾乎均勻捲繞的方式進行剝離,被剝離後的離型膜藉由傳送33帶被傳送至下方。因此,被剝離後的離型膜4就能夠在不會纏繞於剝離輥30的情況下藉由傳送帶33從剝離輥30處分離後傳送。The release film peeling roll portion 15 configured as described above is peeled off continuously and almost uniformly by the entire width of the release film 4 by the peeling roller 30 having adhesiveness, and the release film is peeled off after being peeled off. The belt is conveyed to the lower by the belt 33. Therefore, the release film 4 after being peeled off can be separated from the peeling roller 30 by the conveyance belt 33 without being wound around the peeling roller 30, and then conveyed.

此外,離型膜剝離輥部15,具有:分離板36,被配置為在剝離輥30與從動輥31之間與傳送帶33交叉,並且從動輥31側從該交叉部向傳送帶33的外側突出。被藉由剝離輥30剝離時的離型膜4,藉由傳送帶33被傳送至下方側(遠離剝離輥30的方向),並且藉由分離板36就能夠從傳送帶33處被分離後去除。Further, the release film peeling roller portion 15 has a separation plate 36 that is disposed to intersect the conveyance belt 33 between the separation roller 30 and the driven roller 31, and the driven roller 31 side is outward from the intersection portion toward the outside of the conveyor belt 33. protruding. The release film 4 when peeled off by the peeling roller 30 is conveyed to the lower side (the direction away from the peeling roller 30) by the conveyance belt 33, and can be removed from the conveyance belt 33 by the separation plate 36 and removed.

吸附頭16的理想的情況是:在吸附被剝離離型膜4後的覆蓋層薄膜2的狀態下,移動至黏貼覆蓋層薄膜2的電路基板(無圖示)的配置位置,並且將覆蓋層薄膜2加熱壓接在電路基板的規定位置的功能。經由這樣來構成,就能夠將離型膜剝離裝置10實現從疊層薄膜1處將離型膜剝離且去除的剝離功能,並且兼具將覆蓋層薄膜2加熱壓接在電路基板的黏貼功能。The adsorption head 16 is preferably placed in a state where the cover film 2 after the release film 4 is peeled off is moved to the position of the circuit substrate (not shown) to which the cover film 2 is adhered, and the cover layer is applied. The film 2 is heated and pressed to a predetermined position on the circuit board. According to this configuration, the release film peeling device 10 can realize the peeling function of peeling off and removing the release film from the laminated film 1, and also has the function of attaching the cover film 2 to the circuit board by heating and pressure bonding.

其中,本發明不被限定於所述的實施方式,在能夠達成本發明目的的範圍中的變形、改良等也被包含在本發明內。However, the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within a scope that can achieve the object of the present invention are also included in the present invention.

在所述的實施方式中,雖然說明了從1片單片的疊層薄膜1處將離型膜4剝離且去除的例子,但是不將剝離對象的疊層薄膜的數量限定為1片,而是能夠將其數量進一步增加。例如,可以在疊層薄膜吸附台14中,將疊層薄膜在Y方向、或X方向、或Y方向以及X方向上排列多片,並且也可以從其各自處將離型膜進行剝離。在這種情況下,先在基板吸附台20上排列與疊層薄膜的排列相符的電路基板,並且可以黏貼剝離離型膜後的疊層薄膜。In the above-described embodiment, an example in which the release film 4 is peeled off and removed from the single laminated film 1 is described, but the number of the laminated film to be peeled off is not limited to one. It is able to further increase its number. For example, in the laminated film adsorption stage 14, a plurality of sheets may be arranged in the Y direction, or in the X direction, or in the Y direction, and in the X direction, and the release film may be peeled off from each of them. In this case, the circuit board corresponding to the arrangement of the laminated film is arranged on the substrate adsorption stage 20, and the laminated film after peeling off the release film can be adhered.

此外,在所述的實施方式中,雖然疊層薄膜1是從形成為單片後將離型膜4剝離的,但是也可以例如,將捲繞在輥上的長尺寸疊層薄膜在供料於疊層薄膜吸附台14之前,對其切割後供料於單片的疊層薄膜。Further, in the above-described embodiment, although the laminated film 1 is peeled off from the release film 4 after being formed into a single piece, for example, the long laminated film wound on the roll may be supplied in the feed. Before laminating the film adsorption stage 14, it is cut and fed to a single laminated film.

並且,在所述的實施方式中,雖然離型膜剝離輥部15與疊層薄膜吸附台能夠成為一體地向X方向移動,但是在吸附頭16將疊層薄膜1吸附後,也可以將離型膜剝離輥部15設為相對於疊層薄膜吸附台是獨立並且能夠移動的結構。在這種情況下,當吸附頭16將疊層薄膜1吸附後,將疊層薄膜吸附台向初始位置移動,之後,如果移動離型膜剝離輥部15,就能夠使用與所述的實施方式相同的方法將離型膜4剝離且去除。Further, in the above-described embodiment, the release film peeling roll unit 15 and the laminated film adsorption stage can be integrally moved in the X direction. However, after the adsorption head 16 adsorbs the laminated film 1, it may be separated. The film peeling roll portion 15 is configured to be independent and movable with respect to the laminated film adsorption stage. In this case, after the adsorption head 16 adsorbs the laminated film 1, the laminated film adsorption stage is moved to the initial position, and thereafter, if the release film peeling roll portion 15 is moved, the embodiment can be used. The release film 4 was peeled off and removed by the same method.

1‧‧‧疊層薄膜1‧‧‧Laminated film

2‧‧‧覆蓋層薄膜2‧‧‧ Cover film

3‧‧‧黏合劑層3‧‧‧Binder layer

4‧‧‧離型膜4‧‧‧ release film

10‧‧‧離型膜剝離裝置10‧‧‧ Release film peeling device

11‧‧‧疊層薄膜吸附台單元11‧‧‧Laminated film adsorption station unit

12‧‧‧吸附頭單元12‧‧‧Adsorption head unit

13‧‧‧預剝離輥13‧‧‧Pre-disbonding roller

14‧‧‧疊層薄膜吸附台14‧‧‧Laminated film adsorption station

15‧‧‧離型膜剝離輥部15‧‧‧ Release film peeling roller

16‧‧‧吸附頭16‧‧‧Adsorption head

17‧‧‧Z軸驅動部17‧‧‧Z-axis drive unit

18‧‧‧Y軸驅動部18‧‧‧Y-axis drive unit

19‧‧‧θ軸驅動部19‧‧‧θ axis drive unit

20‧‧‧基板吸附台20‧‧‧Substrate adsorption station

21‧‧‧供料單元21‧‧‧Feeding unit

22‧‧‧導軌22‧‧‧ rails

23‧‧‧壓接輥23‧‧‧Crimp rolls

24‧‧‧吸附孔形成區域24‧‧‧Adsorption hole formation area

25‧‧‧吸附孔25‧‧‧Adsorption holes

26‧‧‧台基部26‧‧‧ Base of the base

27‧‧‧負壓室27‧‧‧ Negative pressure chamber

28‧‧‧接頭28‧‧‧Connectors

30‧‧‧剝離輥30‧‧‧ peeling roller

31‧‧‧從動輥31‧‧‧ driven roller

32‧‧‧支撐板32‧‧‧Support board

33、33A‧‧‧傳送帶33, 33A‧‧‧ conveyor belt

34、35、39‧‧‧溝34, 35, 39‧‧ ‧ ditch

36‧‧‧分離板36‧‧‧Separation board

37‧‧‧分離部37‧‧‧Separation Department

38‧‧‧固定部38‧‧‧ fixed department

L‧‧‧預剝離留邊部L‧‧‧Pre-stripping edge

S1~S13‧‧‧步驟S1~S13‧‧‧Steps

第1圖是展示疊層薄膜1的結構的截面圖。Fig. 1 is a cross-sectional view showing the structure of the laminated film 1.

第2圖是展示實施方式中的離型膜剝離裝置10的結構的斜視圖。Fig. 2 is a perspective view showing the structure of the release film peeling device 10 in the embodiment.

第3圖是展示疊層薄膜吸附台單元11的結構的圖。Fig. 3 is a view showing the structure of the laminated film adsorption stage unit 11.

第4圖是從Y(+)方向觀看疊層薄膜吸附台單元11與離型膜剝離輥部15的圖。Fig. 4 is a view of the laminated film adsorption stage unit 11 and the release film peeling roll unit 15 viewed from the Y (+) direction.

第5圖是展示實施方式中的離型膜剝離方法的操作流程圖。Fig. 5 is a flow chart showing the operation of the release film peeling method in the embodiment.

第6圖是將實施方式中的離型膜剝離方法的主要操作簡化後來展示的操作說明圖。Fig. 6 is an operation explanatory view showing a simplified operation of the main operation of the release film peeling method in the embodiment.

第7圖是將離型膜4的剝離去除操作放大後來展示的圖。Fig. 7 is a view showing the peeling removal operation of the release film 4 enlarged and shown later.

Claims (9)

一種離型膜剝離方法,從由具有熱固性黏合劑層的覆蓋層薄膜與疊層在該黏合劑層的離型膜所構成的單片的疊層薄膜處將該離型膜剝離且去除,其包括: 將該疊層薄膜的該離型膜側真空吸附於疊層薄膜吸附台的操作; 將該疊層薄膜向一方的方向移動的同時使用預剝離輥將該疊層薄膜從該覆蓋層薄膜側按壓的同時使該預剝離輥轉動,並且使該覆蓋層薄膜的端部從該離型膜處浮起從而形成預剝離留邊部的操作; 解除疊層薄膜對於該疊層薄膜吸附台的吸附,並且將疊層薄膜的覆蓋層薄膜的整個面真空吸附於吸附頭的操作;以及 在吸附頭是將該疊層薄膜吸附後的狀態下,將具有黏貼性的剝離輥接觸於該離型膜後,藉由將該疊層薄膜吸附台以及該剝離輥向另一方向移動來轉動該剝離輥,從而將該離型膜從該疊層薄膜處捲繞的同時進行剝離且去除的操作。A release film peeling method for peeling and removing a release film from a single-layer laminated film composed of a cover film having a thermosetting adhesive layer and a release film laminated on the adhesive layer, The method includes: vacuum-adsorbing the release film side of the laminated film to a laminated film adsorption stage; and moving the laminated film from the cover film by using a pre-peeling roll while moving the laminated film in one direction The pre-peeling roller is rotated while the side is pressed, and the end portion of the cover film is floated from the release film to form a pre-peeled edge portion; the laminated film is released from the laminated film adsorption stage Adsorbing, and vacuum-adsorbing the entire surface of the cover film of the laminated film to the adsorption head; and contacting the release roller having adhesiveness to the release state in a state where the adsorption head adsorbs the laminated film After the film, the peeling roll is rotated by moving the laminated film adsorption stage and the peeling roll in the other direction, thereby performing the operation of peeling and removing the release film while being wound from the laminated film. 如申請專利範圍第1項所述的離型膜剝離方法,其中,在形成該預剝離留邊部的操作中,按壓該覆蓋層薄膜的同時使該預剝離輥轉動來使該覆蓋層薄膜的端部從該離型膜處浮起,並且使空氣接觸該黏合劑層。The release film peeling method according to claim 1, wherein in the operation of forming the pre-peeled edge portion, the cover film is pressed while the pre-peel roll is rotated to make the cover film The end floats from the release film and exposes the air to the adhesive layer. 如申請專利範圍第1項或第2項所述的離型膜剝離方法,其中,在該吸附頭是將該疊層薄膜真空吸附的操作中,藉由該吸附頭將含有該預剝離留邊部的該疊層薄膜的整個面吸附。The release film peeling method according to the first or the second aspect of the invention, wherein, in the operation in which the adsorption head is vacuum-adsorbing the laminated film, the pre-stripping edge is contained by the adsorption head The entire surface of the laminated film is adsorbed. 如申請專利範圍第1項至第3項中任一項所述的離型膜剝離方法,其中,在將該離型膜剝離且去除的操作中,在使用該剝離輥剝離該離型膜的同時將剝離後的該離型膜藉由傳送帶來傳送,並且藉由分離板從該剝離輥以及該傳送帶處將該離型膜分離後去除。The release film peeling method according to any one of the items 1 to 3, wherein, in the operation of peeling and removing the release film, the release film is peeled off using the peeling roller. At the same time, the release film after peeling is conveyed by a conveyance belt, and the release film is separated from the peeling roll and the transfer belt by a separation plate. 一種離型膜剝離裝置,從由具有熱固性黏合劑層的覆蓋層薄膜與疊層在該黏合劑層的離型膜所構成的單片的疊層薄膜處將該離型膜剝離且去除,其包括: 疊層薄膜吸附台,將該疊層薄膜的該離型膜側真空吸附的同時能夠向一個方向往返移動; 預剝離輥,從該覆蓋層薄膜側按壓該疊層薄膜,並且藉由向該疊層薄膜吸附台的一方的方向移動來進行轉動的同時在該疊層薄膜的行進方向側的端部上形成預剝離留邊部; 吸附頭,將該疊層薄膜的該覆蓋層薄膜側真空吸附;以及 離型膜剝離輥部,能夠與該疊層薄膜吸附台成為一體後移動,並且在該吸附頭是將該疊層薄膜吸附後的狀態下,在該預剝離留邊部中剝離輥與該離型膜抵接,並且藉由向該疊層薄膜吸附台的另一方向移動在該剝離輥轉動的同時從該疊層薄膜處將該離型膜剝離。A release film peeling device which peels and removes a release film from a single-layer laminated film composed of a cover film having a thermosetting adhesive layer and a release film laminated on the adhesive layer, The method includes: a laminated film adsorption stage capable of reciprocating in one direction while vacuum-adsorbing the release film side of the laminated film; and a pre-peeling roll, pressing the laminated film from the side of the cover film, and The laminated film adsorption stage moves in one direction to rotate, and a pre-peeled edge portion is formed on the end portion of the laminated film on the traveling direction side; and an adsorption head that coats the cover film side of the laminated film The vacuum adsorption and the release film peeling roll portion are movable integrally with the laminated film adsorption stage, and are peeled off in the pre-peeled edge portion in a state where the adsorption head is adsorbed by the laminated film. The roller abuts against the release film, and the release film is peeled off from the laminated film while the peeling roller is rotated by moving in the other direction of the laminated film adsorption stage. 如申請專利範圍第5項所述的離型膜剝離裝置,其中,該預剝離輥是比垂直於該疊層薄膜的移動方向的寬度尺寸更長,並且表面具有黏貼性,將該疊層薄膜按壓的同時藉由該疊層薄膜吸附台的移動來進行轉動的結構。The release film peeling device according to claim 5, wherein the pre-peeling roll is longer than a width dimension perpendicular to a moving direction of the laminated film, and the surface has adhesiveness, and the laminated film is used. The structure is rotated by the movement of the laminated film adsorption stage while being pressed. 如申請專利範圍第5項或第6項所述的離型膜剝離裝置,其中,該離型膜剝離輥部包括:該剝離輥,比該疊層薄膜的寬度尺寸更長,並且表面具有黏貼性;從動輥,配置在該剝離輥的下方側,並且在比該剝離輥更遠離該疊層薄膜吸附台的位置;以及傳送帶,連結該剝離輥與該從動輥並且傳送剝離後的該離型膜, 該剝離輥以及該從動輥上形成有複數個溝,在該複數個溝上各自安裝有該傳送帶, 該傳送帶是以收納於該剝離輥的外周表面的內側的方式被安裝。The release film peeling device according to claim 5, wherein the release film peeling roll portion comprises: the peeling roll, which has a longer width dimension than the laminated film, and has a surface adhered a driven roller disposed on a lower side of the peeling roller and at a position farther from the laminated film adsorption stage than the peeling roller; and a conveyor belt that joins the peeling roller and the driven roller and conveys the peeled off In the release film, the separation roller and the driven roller are formed with a plurality of grooves, and the conveyor belt is attached to each of the plurality of grooves, and the conveyor belt is attached to the inside of the outer circumferential surface of the separation roller. 如申請專利範圍第1項至第7項中任一項所述的離型膜剝離裝置,其中,該離型膜剝離輥部,具有:分離板,被配置為在該剝離輥與該從動輥之間與該傳送帶交叉,並且該從動輥側從該交叉部向該傳送帶的外側突出。The release film peeling device according to any one of the preceding claims, wherein the release film peeling roll portion has a separation plate disposed at the peeling roller and the driven plate The rollers intersect the conveyor belt, and the driven roller side protrudes from the intersection toward the outside of the conveyor belt. 如申請專利範圍第5項所述的離型膜剝離裝置,其中,該吸附頭,具有:在吸附被剝離該離型膜後的該覆蓋層薄膜的狀態下,移動至黏貼該覆蓋層薄膜的電路基板的配置位置,並且將該覆蓋層薄膜加熱壓接在該電路基板的規定位置的功能。The release film peeling device according to claim 5, wherein the adsorption head has a state in which the cover film is adhered to the cover film in a state in which the cover film is peeled off after the release film is peeled off. The position of the circuit board is disposed, and the cover film is heated and pressed to a predetermined position of the circuit board.
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