TW201916997A - Resin molded product manufacturing apparatus, resin molding system, and resin molded product manufacturing method - Google Patents

Resin molded product manufacturing apparatus, resin molding system, and resin molded product manufacturing method Download PDF

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Publication number
TW201916997A
TW201916997A TW107137595A TW107137595A TW201916997A TW 201916997 A TW201916997 A TW 201916997A TW 107137595 A TW107137595 A TW 107137595A TW 107137595 A TW107137595 A TW 107137595A TW 201916997 A TW201916997 A TW 201916997A
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resin molded
molded article
pressure plate
mold
manufacturing
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TW107137595A
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Chinese (zh)
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TWI736804B (en
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市橋秀男
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日商Towa股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/64Mould opening, closing or clamping devices
    • B29C45/66Mould opening, closing or clamping devices mechanical
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/02Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • B29C45/2602Mould construction elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)

Abstract

There is provided a resin molded product manufacturing apparatus, resin molding system, and resin molded product manufacturing method that can reduce variation in thickness of a resin molded product. The resin molded product manufacturing apparatus includes: a first platen; a first mold chase holder provided on the first platen and configured to hold a first mold chase; a second platen spaced from the first platen and facing the first platen; and a second mold chase holder provided on the second platen and configured to hold a second mold chase. A notch is provided on a side of the first platen closer to the second platen. A thickness of the first platen at an outer end portion of the notch is smaller than a thickness of the first platen at an inner end portion of the notch.

Description

樹脂成形品的製造裝置、樹脂成形系統以及樹脂成形品的製造方法Manufacturing apparatus of resin molded article, resin molding system, and method of producing resin molded article

本發明關於一種樹脂成形品的製造裝置、樹脂成形系統以及樹脂成形品的製造方法。The present invention relates to a device for producing a resin molded article, a resin molding system, and a method for producing a resin molded article.

例如,在日本專利特開2017-132108號公報(專利文獻1)中揭示了因使安裝上模具的上壓板的金屬模具安裝部以外的基座部薄壁化,而非藉由增加上壓板的厚度或追加加強構件等來提高上壓板的剛性,而能夠提升合模時的合模面的平坦度的樹脂成形品的製造裝置。For example, JP-A-H07-132108 (Patent Document 1) discloses that the base portion other than the mold mounting portion of the upper platen on which the upper mold is attached is thinned, instead of increasing the upper platen. A device for manufacturing a resin molded article in which the rigidity of the upper platen is increased by the thickness or the reinforcing member, and the flatness of the mold clamping surface at the time of mold clamping can be improved.

然而,在專利文獻1所記載的樹脂成形品的製造裝置中,因將上壓板進行了薄壁化,所以無法提高上壓板的剛性。However, in the apparatus for manufacturing a resin molded article described in Patent Document 1, since the upper platen is made thinner, the rigidity of the upper platen cannot be increased.

在專利文獻1中雖無記載及提示,但存在使用如下樹脂成形品的製造裝置來製造樹脂成形品的情況,所述樹脂成形品的製造裝置將對上模具進行保持的模具支架安裝於上壓板,並且將對下模具進行保持的模具支架安裝於下壓板。在所述樹脂成形品的製造裝置中,上壓板及下壓板因上模具與下模具合模時的加壓而變形,各壓板上所安裝的模具支架追隨所述變形而變形。In the case of the production of a resin molded article using a manufacturing apparatus of a resin molded article, the mold holder for holding the upper mold is attached to the upper press plate. And attaching the mold holder holding the lower mold to the lower pressing plate. In the apparatus for manufacturing a resin molded article, the upper platen and the lower platen are deformed by pressurization when the upper die and the lower die are clamped, and the die holder attached to each of the press plates is deformed in accordance with the deformation.

在利用安裝在變形了的模具支架上的模具進行樹脂成形的情況下,有時樹脂成形品的厚度的偏差變大而成為劣質品。尤其是在將模具支架安裝於專利文獻1所記載的樹脂成形品的製造裝置中來製造樹脂成形品的情況下,因上壓板不具有高的剛性,所以認為對上模具進行保持的模具支架的變形量變大而樹脂成形品的厚度的偏差會進一步變大。When resin molding is performed by a mold attached to a deformed mold holder, variations in the thickness of the resin molded article may become large and may become inferior products. In particular, when the mold holder is attached to the apparatus for manufacturing a resin molded article described in Patent Document 1, when the resin molded article is produced, since the upper press plate does not have high rigidity, it is considered that the mold holder for holding the upper mold is The amount of deformation is increased, and the variation in the thickness of the resin molded article is further increased.

根據本文中揭示的實施方式,可提供一種樹脂成形品的製造裝置,其包括:第1壓板;第1模具支架,設於第1壓板,以對第1模具進行保持的方式構成;第2壓板,以與第1壓板相向的方式與第1壓板空開間隔而配置;以及第2模具支架,設於第2壓板,以對第2模具進行保持的方式構成,在第1壓板的第2壓板側設置有切口,切口的外側端部處的第1壓板的厚度比切口的內側端部處的第1壓板的厚度薄。According to the embodiment disclosed herein, there is provided an apparatus for producing a resin molded article, comprising: a first pressure plate; the first mold holder is provided on the first pressure plate, and is configured to hold the first mold; and the second pressure plate And the first platen is disposed to be spaced apart from the first platen, and the second die holder is disposed on the second platen to hold the second die, and the second platen of the first platen is formed. A slit is provided on the side, and the thickness of the first platen at the outer end portion of the slit is thinner than the thickness of the first platen at the inner end portion of the slit.

根據本文中揭示的實施方式,可提供一種包括所述樹脂成形品的製造裝置的樹脂成形系統。According to the embodiment disclosed herein, a resin forming system including a manufacturing apparatus of the resin molded article can be provided.

根據本文中揭示的實施方式,可提供一種樹脂成形品的製造方法,其使用所述樹脂成形品的製造裝置,並且包括:對第1模具設置支撐構件的步驟;對第2模具的模腔供給樹脂材料的步驟;以及進行第1模具與第2模具的合模的步驟。According to the embodiment disclosed herein, there can be provided a method of producing a resin molded article using the apparatus for manufacturing a resin molded article, and comprising: a step of providing a support member to the first mold; and a cavity supply for the second mold a step of resin material; and a step of clamping the first mold and the second mold.

本發明的所述及其他目的、特徵、局面及優點將根據與隨附的圖式相關聯來理解的關於本發明的以下的詳細說明而變得明確。The above and other objects, features, aspects and advantages of the present invention will become apparent from the accompanying claims

以下,對實施方式進行說明。另外,在用於實施方式的說明的圖式中,同一個參照符號表示同一部分或相當部分。Hereinafter, an embodiment will be described. In addition, in the drawings for the description of the embodiments, the same reference numerals indicate the same or equivalent parts.

圖1表示實施方式的樹脂成形品的製造裝置的示意性的正視圖。實施方式的樹脂成形品的製造裝置1包括第1壓板11、第2壓板12、及第3壓板13。第3壓板13的兩端分別固定有從第3壓板13起朝鉛垂上方延伸的型壓框架(pressed frame)17的其中一端,第1壓板11的兩端分別固定有型壓框架17的另一端。另外,第1壓板11與第3壓板13及型壓框架17例如也可以是作為鑄件而一體形成者。Fig. 1 is a schematic front view showing an apparatus for manufacturing a resin molded article according to an embodiment. The apparatus 1 for manufacturing a resin molded article according to the embodiment includes a first pressure plate 11 , a second pressure plate 12 , and a third pressure plate 13 . One end of a press frame 17 extending vertically upward from the third pressure plate 13 is fixed to both ends of the third pressure plate 13, and the other ends of the first pressure plate 11 are respectively fixed with a press frame 17 One end. Further, the first pressure plate 11 , the third pressure plate 13 , and the press frame 17 may be integrally formed as a casting, for example.

在第1壓板11與第3壓板13之間,以第2壓板12能夠朝鉛垂上方及鉛垂下方移動的方式安裝有型壓框架17。在第3壓板13的型壓框架17之間的區域設置有以使第2壓板12能夠朝鉛垂上方及鉛垂下方移動的方式構成的驅動機構16。另外,在本實施方式中,第1壓板11受到了固定,所以第2壓板12能夠相對於第1壓板11進行相對移動。Between the first pressure plate 11 and the third pressure plate 13, the pressure frame 17 is attached so that the second pressure plate 12 can move vertically upward and downward. In the region between the press frames 17 of the third pressure plate 13, a drive mechanism 16 configured to move the second pressure plate 12 vertically upward and vertically downward is provided. Further, in the present embodiment, since the first pressure plate 11 is fixed, the second pressure plate 12 can relatively move relative to the first pressure plate 11.

在第1壓板11的鉛垂下方側安裝有以對第1模具(未圖示)進行保持的方式構成的第1模具支架14。在第2壓板12的鉛垂上方側安裝有以對第2模具(未圖示)進行保持的方式構成的第2模具支架15。A first mold holder 14 configured to hold a first mold (not shown) is attached to the vertically lower side of the first pressure plate 11 . A second mold holder 15 configured to hold a second mold (not shown) is attached to the vertically upper side of the second pressure plate 12 .

圖2表示圖1中所示的樹脂成形品的製造裝置的示意性的放大正視圖。圖2所示的樹脂成形品的製造裝置的第1壓板11的特徵在於,在第1壓板11的下表面設置有切口123,並且在第1壓板11的上表面設置有傾斜面121及階差122。Fig. 2 is a schematic enlarged front view showing the apparatus for manufacturing the resin molded article shown in Fig. 1. The first pressure plate 11 of the apparatus for manufacturing a resin molded article shown in FIG. 2 is characterized in that a slit 123 is provided on the lower surface of the first pressure plate 11, and an inclined surface 121 and a step are provided on the upper surface of the first pressure plate 11. 122.

在圖2所示的樹脂成形品的製造裝置中,切口123的外側端部124處的第1壓板11的鉛垂方向的厚度a變得比切口123的內側端部125處的第1壓板11的鉛垂方向的厚度b薄。在本實施方式中,切口123的外側端部124處的第1壓板11的厚度a是指從第1壓板11的下表面的切口123的外側端部124起至第1壓板11的上表面為止的厚度a。而且,在本實施方式中,切口123的內側端部125處的第1壓板11的厚度b是指從第1壓板11的下表面的切口123的內側端部125起至第1壓板11的上表面為止的厚度b。In the apparatus for manufacturing a resin molded article shown in FIG. 2, the thickness a of the first platen 11 in the vertical direction at the outer end portion 124 of the slit 123 becomes larger than the first platen 11 at the inner end portion 125 of the slit 123. The thickness b in the vertical direction is thin. In the present embodiment, the thickness a of the first pressure plate 11 at the outer end portion 124 of the slit 123 is from the outer end portion 124 of the slit 123 on the lower surface of the first pressure plate 11 to the upper surface of the first pressure plate 11. The thickness a. Further, in the present embodiment, the thickness b of the first pressure plate 11 at the inner end portion 125 of the slit 123 is from the inner end portion 125 of the slit 123 on the lower surface of the first pressure plate 11 to the first pressure plate 11 The thickness b from the surface.

在圖2所示的樹脂成形品的製造裝置中,切口123例如能夠以圍繞第1模具支架14的方式構成。而且,在圖2所示的樹脂成形品的製造裝置中,傾斜面121例如能夠以從階差122起朝外側並朝斜下方延伸的方式構成。In the apparatus for manufacturing a resin molded article shown in FIG. 2, the slit 123 can be configured to surround the first mold holder 14, for example. Moreover, in the apparatus for manufacturing a resin molded article shown in FIG. 2, the inclined surface 121 can be configured to extend outward from the step 122, for example, obliquely downward.

在第1壓板11未設置切口123的樹脂成形品的製造裝置中,例如若驅動機構16為直動機構,則如圖3的示意性剖面圖所示,在合模時,第1壓板11及第2壓板12以中央部局部地從第1模具支架14及第2模具支架15承接壓力,由此,有時會變形為朝上凸起的形狀。而且,若驅動機構16為肘桿(toggle link)機構,則如圖4的示意性剖面圖所示,在合模時,第1壓板11以中央部從第1模具支架14承接應力,並且第2壓板以外側承接應力,由此有時第1壓板11會變形為朝上凸起的形狀,而第2壓板12會變形為朝下凸起的形狀。In the apparatus for manufacturing a resin molded article in which the slits 123 are not provided in the first platen 11, for example, when the drive mechanism 16 is a linear motion mechanism, as shown in the schematic cross-sectional view of FIG. 3, the first pressure plate 11 and the first pressure plate 11 are clamped. The second pressure plate 12 partially receives the pressure from the first mold holder 14 and the second mold holder 15 at the center portion, and may be deformed into a shape that is convex upward. Further, when the drive mechanism 16 is a toggle link mechanism, as shown in the schematic cross-sectional view of FIG. 4, the first pressure plate 11 receives the stress from the first die holder 14 at the center portion during the mold clamping, and the first 2 The pressure plate receives the stress on the outer side, and thus the first pressure plate 11 may be deformed into a shape that is convex upward, and the second pressure plate 12 may be deformed into a shape that is convex downward.

但是,在本實施方式中,對第1壓板11設置切口123,並且使切口123的外側端部124處的第1壓板11的厚度a比切口123的內側端部125處的第1壓板11的厚度b薄。在此情況下,即使在合模時第1壓板11從第1模具支架14承接到了應力,也可利用第1壓板11的相對薄的厚度a的部分來緩和所述應力,並且可藉由第1模具支架14的安裝部20的上方的第1壓板11的相對厚的厚度b的部分來保持第1壓板11的剛性。因此,可使合模時第1壓板11所承接的應力集中至比第1模具支架14的安裝部20更靠外側的位置(例如圖5的圓所圍繞的部位),所以,可抑制合膜時第1壓板11的第1模具支架14的安裝部20的變形。因此,如後所述,能夠製造厚度的偏差更少的樹脂成形品。另外,切口123的內側端部125相當於第1壓板11的第1模具支架14的安裝部20的端部。However, in the present embodiment, the first pressure plate 11 is provided with the slit 123, and the thickness a of the first pressure plate 11 at the outer end portion 124 of the slit 123 is made larger than the thickness of the first pressure plate 11 at the inner end portion 125 of the slit 123. The thickness b is thin. In this case, even if the first pressure plate 11 receives stress from the first mold holder 14 at the time of mold clamping, the stress can be alleviated by the relatively thin thickness a of the first pressure plate 11, and the stress can be relieved by the first The portion of the first platen 11 above the mounting portion 20 of the die holder 14 having a relatively thick thickness b holds the rigidity of the first platen 11. Therefore, the stress received by the first pressure plate 11 at the time of mold clamping can be concentrated to a position outside the mounting portion 20 of the first mold holder 14 (for example, a portion surrounded by a circle in FIG. 5), so that the film can be suppressed. The mounting portion 20 of the first die holder 14 of the first pressure plate 11 is deformed. Therefore, as will be described later, it is possible to manufacture a resin molded article having less variation in thickness. Further, the inner end portion 125 of the slit 123 corresponds to the end portion of the attachment portion 20 of the first die holder 14 of the first pressure plate 11 .

並且,藉由對第1壓板11設置傾斜面121,可利用傾斜面121承接在合模時第1壓板11所承接的應力,所以可使在合模時第1壓板11所承接的應力分散至其他部分,從而可進一步抑制第1壓板11的第1模具支架14的安裝部20的變形。Further, by providing the inclined surface 121 to the first pressure plate 11, the inclined surface 121 can receive the stress received by the first pressure plate 11 at the time of mold clamping, so that the stress received by the first pressure plate 11 during the mold clamping can be dispersed to In other portions, deformation of the mounting portion 20 of the first die holder 14 of the first pressure plate 11 can be further suppressed.

而且,如圖6以及專利文獻1的圖1及圖2等所示,可在第1壓板11的上表面僅設置階差122而非傾斜面121。在此情況下,若切口123的外側端部124處的第1壓板11的厚度a比切口123的內側端部125處的第1壓板11的厚度b薄,則也可獲得與所述內容相同的效果。因此,在第1壓板11的上表面,既可以僅設置傾斜面121,也可以僅設置階差122,還可以設置傾斜面121及階差122這兩者。Further, as shown in FIG. 6 and FIG. 1 and FIG. 2 of Patent Document 1, only the step 122 may be provided on the upper surface of the first pressure plate 11 instead of the inclined surface 121. In this case, if the thickness a of the first pressure plate 11 at the outer end portion 124 of the slit 123 is thinner than the thickness b of the first pressure plate 11 at the inner end portion 125 of the slit 123, the same content as that described above can be obtained. Effect. Therefore, on the upper surface of the first pressure plate 11, only the inclined surface 121 may be provided, or only the step 122 may be provided, or both the inclined surface 121 and the step 122 may be provided.

如圖7的示意性剖面圖所示,第1模具支架14在第1壓板11側包括第1隔熱構件22,並且在第2壓板12側的第1加熱板23中包括以對第1模具41進行加熱的方式構成的第1模具支架加熱器25。而且,第1模具支架14在比第1隔熱構件22更靠近第1壓板11側包括第1板21,並且包括從第1加熱板23的邊緣朝鉛垂下方延伸的第1側壁24。在本實施方式中,第1加熱板23內置有彼此空開間隔在水平方向上延伸的四根第1模具支架加熱器25。As shown in the schematic cross-sectional view of Fig. 7, the first mold holder 14 includes the first heat insulating member 22 on the first pressure plate 11 side, and includes the first mold in the first heating plate 23 on the second pressure plate 12 side. 41 is a first mold holder heater 25 configured to be heated. Further, the first die holder 14 includes the first plate 21 on the side closer to the first pressure plate 11 than the first heat insulating member 22, and includes a first side wall 24 that extends vertically downward from the edge of the first heating plate 23. In the present embodiment, the first heating plate 23 has four first mold holder heaters 25 that extend in the horizontal direction at intervals.

第2模具支架15在第2壓板12側包括第2隔熱構件32,並且在第1壓板11側的第2加熱板33中包括以對第2模具42進行加熱的方式構成的第2模具支架加熱器35。而且,第2模具支架15在比第2隔熱構件32更靠近第2壓板12側包括第2板31,並且包括從第2加熱板33的邊緣朝鉛垂上方延伸的第2側壁34。在本實施方式中,第2加熱板33內置有彼此空開間隔在水平方向上延伸的四根第2模具支架加熱器35。The second mold holder 15 includes a second heat insulating member 32 on the second pressure plate 12 side, and includes a second mold holder that is configured to heat the second mold 42 on the second heating plate 33 on the first pressure plate 11 side. Heater 35. Further, the second mold holder 15 includes the second plate 31 on the side closer to the second pressure plate 12 than the second heat insulating member 32, and includes a second side wall 34 that extends vertically upward from the edge of the second heating plate 33. In the present embodiment, the second heating plate 33 has four second mold holder heaters 35 that extend in the horizontal direction at intervals.

以下,參照圖7~圖15對使用實施方式的樹脂成形品的製造裝置1來製造樹脂成形品的方法的一例即實施方式的樹脂成形品的製造方法進行說明。首先,如圖7的示意性的剖面圖所示,將第1模具41固定在第1模具支架14的第1加熱板23上,並且將第2模具42固定在第2模具支架15的第2加熱板33上。在第2模具42的第1模具41側設置有模腔43。In the following, a method of manufacturing a resin molded article which is an example of a method of producing a resin molded article using the apparatus 1 for manufacturing a resin molded article of the embodiment will be described with reference to FIG. 7 to FIG. First, as shown in the schematic cross-sectional view of FIG. 7, the first mold 41 is fixed to the first heating plate 23 of the first mold holder 14, and the second mold 42 is fixed to the second mold holder 15. On the heating plate 33. A cavity 43 is provided on the first mold 41 side of the second mold 42.

繼而,如圖8的示意性剖面圖所示,以覆蓋第2模具42的模腔43的方式設置脫模膜52。繼而,將由脫模膜52覆蓋的模腔43內的空間抽成真空,由此如圖9的示意性剖面圖所示,使脫模膜52密接在構成模腔43的第2模具42的表面上。Then, as shown in the schematic cross-sectional view of FIG. 8, the release film 52 is provided so as to cover the cavity 43 of the second mold 42. Then, the space in the cavity 43 covered by the release film 52 is evacuated, whereby the release film 52 is adhered to the surface of the second mold 42 constituting the cavity 43 as shown in the schematic sectional view of Fig. 9 . on.

繼而,從圖10的示意性平面圖中所示的實施方式的樹脂成形系統1000的供給模塊1001的支撐構件供給裝置201,將成為樹脂成形的成形對象物的支撐構件51供給至搬送機構301的上側。Then, the support member supply device 201 of the supply module 1001 of the resin molding system 1000 of the embodiment shown in the schematic plan view of FIG. 10 supplies the support member 51 which is a molded object of resin molding to the upper side of the conveyance mechanism 301. .

支撐構件51例如可包含:可支撐半導體芯片、芯片狀電子零件、或膜(包含導電性膜、絕緣性膜、半導體膜等)等的例如引線框架、基底、內插器(interposer)、半導體基板(矽晶片等)、金屬基板、玻璃基板、陶瓷基板、樹脂基板、及配線基板等。而且,支撐構件51的形狀並無特別限定,支撐構件51的表面形狀例如可以是圓形,也可以是四邊形。而且,支撐構件51可以包含配線,也可以不包含配線。而且,支撐構件51包含扇出型晶片級封裝(Fan Out Wafer Level Package,FO-WLP)或扇出型面板級封裝(Fan Out Panel Level Package,FO-PLP)中所使用的支撐構件的載體。The support member 51 may include, for example, a lead frame, a substrate, an interposer, or a semiconductor substrate that can support a semiconductor chip, a chip-shaped electronic component, or a film (including a conductive film, an insulating film, a semiconductor film, or the like). (矽 wafer, etc.), a metal substrate, a glass substrate, a ceramic substrate, a resin substrate, a wiring substrate, and the like. Further, the shape of the support member 51 is not particularly limited, and the surface shape of the support member 51 may be, for example, a circular shape or a quadrangular shape. Further, the support member 51 may or may not include wiring. Further, the support member 51 includes a carrier of a support member used in a fan-out wafer level package (FO-WLP) or a fan-out panel level package (FO-PLP).

繼而,供給有支撐構件51的搬送機構301沿著設置在供給模塊1001中的縱向移動導軌401進行移動,而到達樹脂材料供給裝置202中。Then, the transport mechanism 301 to which the support member 51 is supplied is moved along the longitudinal movement guide 401 provided in the supply module 1001 to reach the resin material supply device 202.

繼而,樹脂材料供給裝置202將樹脂材料61供給至搬送機構301的下側,以使搬送機構301在搬送機構301的下側保持固體的樹脂材料61。因此,在此階段,搬送機構301在上側保持支撐構件51,並且在下側保持樹脂材料61。Then, the resin material supply device 202 supplies the resin material 61 to the lower side of the transport mechanism 301 so that the transport mechanism 301 holds the solid resin material 61 on the lower side of the transport mechanism 301. Therefore, at this stage, the conveying mechanism 301 holds the support member 51 on the upper side and holds the resin material 61 on the lower side.

繼而,搬送機構301以在上側保持支撐構件51,並且在下側保持樹脂材料61的狀態,沿著橫向移動導軌402進行橫向移動,而到達實施方式的樹脂成形系統1000的樹脂密封模塊1002中。已到達樹脂密封模塊1002中的搬送機構301沿著縱向移動導軌403進行縱向移動,而到達實施方式的樹脂成形品的製造裝置1中。另外,在圖10中記載有四個樹脂密封模塊1002,但並不限定於此,樹脂密封模塊1002的數量可增減。Then, the conveyance mechanism 301 is moved to the resin sealing module 1002 of the resin molding system 1000 of the embodiment in a state where the support member 51 is held on the upper side and the resin material 61 is held on the lower side, and is moved laterally along the lateral movement guide 402. The conveying mechanism 301 that has reached the resin sealing module 1002 is longitudinally moved along the longitudinal moving rail 403, and reaches the manufacturing apparatus 1 of the resin molded article of the embodiment. Further, although four resin sealing modules 1002 are described in FIG. 10, the present invention is not limited thereto, and the number of the resin sealing modules 1002 may be increased or decreased.

繼而,如圖11的示意性剖面圖所示,從搬送機構301將支撐構件51設置在第1模具41上,並且從搬送機構301將樹脂材料61供給至密接在第2模具42上的脫模膜52上。另外,在本實施方式中,使用包括半導體基板51a與半導體基板51a上的半導體芯片51b的支撐構件51。Then, as shown in the schematic cross-sectional view of FIG. 11, the support member 51 is placed on the first mold 41 from the transport mechanism 301, and the resin material 61 is supplied from the transport mechanism 301 to the release mold that is in close contact with the second mold 42. On the membrane 52. Further, in the present embodiment, the support member 51 including the semiconductor substrate 51a and the semiconductor chip 51b on the semiconductor substrate 51a is used.

繼而,藉由第1加熱板23的第1模具支架加熱器25來對第1模具41進行加熱,並且藉由第2加熱板33的第2模具支架加熱器35來對第2模具42進行加熱。另外,樹脂材料61因第2模具支架加熱器35對於第2模具42的加熱而熔融,如圖12的示意性剖面圖所示般製作流動性樹脂71。Then, the first mold 41 is heated by the first mold holder heater 25 of the first heating plate 23, and the second mold 42 is heated by the second mold holder heater 35 of the second heating plate 33. . In addition, the resin material 61 is melted by heating of the second mold 42 by the second mold holder heater 35, and the fluid resin 71 is produced as shown in the schematic cross-sectional view of FIG.

繼而,如圖13的示意性正視圖所示,使第2壓板12朝鉛垂上方移動,由此進行第1模具41與第2模具42的合模。此時,如圖14的示意性剖面圖所示,流動性樹脂71接觸支撐構件51的表面。Then, as shown in the schematic front view of FIG. 13, the second pressing plate 12 is moved vertically upward to perform mold clamping of the first die 41 and the second die 42. At this time, as shown in the schematic cross-sectional view of FIG. 14, the fluid resin 71 contacts the surface of the support member 51.

繼而,使流動性樹脂71硬化後使第2壓板12朝鉛垂下方移動。由此,如圖15的示意性剖面圖所示,製造支撐構件51的表面由硬化樹脂81密封的樹脂成形品82。Then, the fluid resin 71 is cured, and then the second pressure plate 12 is moved vertically downward. Thereby, as shown in the schematic cross-sectional view of FIG. 15, the resin molded article 82 whose surface of the support member 51 is sealed by the hardening resin 81 is manufactured.

如所述般製造的樹脂成形品82藉由圖10中所示的搬送機構301而從樹脂成形品的製造裝置1中搬出。然後,保持有樹脂成形品82的搬送機構301沿著設置在樹脂密封模塊1002中的縱向移動導軌403朝橫向移動導軌402移動。然後,搬送機構301沿著橫向移動導軌402橫向移動至實施方式的樹脂成形系統1000的收納模塊1003為止。已到達收納模塊1003中的搬送機構301沿著設置在收納模塊1003中的縱向移動導軌404朝樹脂成形品收納裝置203移動。其後,樹脂成形品82被從搬送機構301收納至樹脂成形品收納裝置203中。The resin molded product 82 manufactured as described above is carried out from the resin molded article manufacturing apparatus 1 by the transport mechanism 301 shown in FIG. Then, the conveyance mechanism 301 holding the resin molded article 82 moves toward the lateral movement guide rail 402 along the longitudinal movement guide rail 403 provided in the resin sealing module 1002. Then, the conveyance mechanism 301 is moved laterally along the lateral movement guide 402 to the storage module 1003 of the resin molding system 1000 of the embodiment. The conveyance mechanism 301 that has reached the storage module 1003 moves toward the resin molded article storage device 203 along the longitudinal movement guide 404 provided in the storage module 1003. Thereafter, the resin molded article 82 is stored in the resin molded article storage device 203 from the transport mechanism 301.

圖16表示實施方式的樹脂成形品的製造裝置的變形例的示意性的正視圖。圖16所示的樹脂成形品的製造裝置1的特徵在於包括:第1壓板11與第2壓板12之間的中間板91;第3模具支架93,設於中間板91的第1壓板11側,以對第3模具(未圖示)進行保持的方式構成;以及第4模具支架94,設於中間板91的第2壓板12側,以對第4模具(未圖示)進行保持的方式構成。Fig. 16 is a schematic front view showing a modification of the apparatus for manufacturing a resin molded article of the embodiment. The apparatus 1 for manufacturing a resin molded article shown in FIG. 16 includes an intermediate plate 91 between the first pressure plate 11 and the second pressure plate 12, and a third mold holder 93 provided on the first pressure plate 11 side of the intermediate plate 91. The third mold (not shown) is held; and the fourth mold holder 94 is provided on the second pressure plate 12 side of the intermediate plate 91 to hold the fourth mold (not shown). Composition.

圖17表示圖16所示的樹脂成形品的製造裝置1的示意性的放大剖面圖。第3模具支架93在中間板91側包括第3隔熱構件102,並且在第1壓板11側的第3加熱板103中包括以對具有模腔97的第3模具96進行加熱的方式構成的第3模具支架加熱器105。而且,第3模具支架93在比第3隔熱構件102更靠近中間板91側包括第3板101,並且包括從第3加熱板103的邊緣朝鉛垂上方延伸的第3側壁104。在本實施方式中,第3加熱板103包括彼此空開間隔在水平方向上延伸的四根第3模具支架加熱器105。Fig. 17 is a schematic enlarged cross-sectional view showing the apparatus 1 for manufacturing a resin molded article shown in Fig. 16. The third mold holder 93 includes the third heat insulating member 102 on the side of the intermediate plate 91, and the third heating plate 103 on the side of the first pressure plate 11 includes a third mold 96 having a cavity 97. The third mold holder heater 105. Further, the third mold holder 93 includes the third plate 101 on the side closer to the intermediate plate 91 than the third heat insulating member 102, and includes a third side wall 104 that extends vertically upward from the edge of the third heating plate 103. In the present embodiment, the third heating plate 103 includes four third mold holder heaters 105 that are spaced apart from each other in the horizontal direction.

第4模具支架94在中間板91側包括第4隔熱構件112,並且在第2壓板12側的第4加熱板113中包括以對第4模具98進行加熱的方式構成的第4模具支架加熱器115。而且,第4模具支架94在比第4隔熱構件112更靠近中間板91側包括第4板111,並且包括從第4加熱板113的邊緣朝鉛垂下方延伸的第4側壁114。在本實施方式中,第4加熱板113包括彼此空開間隔在水平方向上延伸的四根第4模具支架加熱器115。 [實施例]The fourth mold holder 94 includes the fourth heat insulating member 112 on the side of the intermediate plate 91, and includes the fourth mold holder heated to heat the fourth mold 98 on the fourth heating plate 113 on the second pressure plate 12 side. 115. Further, the fourth mold holder 94 includes the fourth plate 111 on the side closer to the intermediate plate 91 than the fourth heat insulating member 112, and includes a fourth side wall 114 that extends vertically downward from the edge of the fourth heating plate 113. In the present embodiment, the fourth heating plate 113 includes four fourth mold holder heaters 115 that are spaced apart from each other in the horizontal direction. [Examples]

<比較例> 圖18表示比較例的樹脂成形品的製造裝置的另一變形例的示意性的立體圖。圖18所示的比較例的樹脂成形品的製造裝置與圖2所示的實施方式的樹脂成形品的製造裝置1的不同點在於,第1壓板11的上表面成為平坦,切口123的外側端部124處的第1壓板11的厚度a與切口123的內側端部125處的第1壓板11的厚度變得相等。<Comparative Example> Fig. 18 is a schematic perspective view showing another modification of the apparatus for manufacturing a resin molded article of a comparative example. The apparatus for manufacturing a resin molded article of the comparative example shown in FIG. 18 is different from the apparatus 1 for manufacturing a resin molded article of the embodiment shown in FIG. 2 in that the upper surface of the first pressure plate 11 is flat, and the outer end of the slit 123 is provided. The thickness a of the first pressure plate 11 at the portion 124 is equal to the thickness of the first pressure plate 11 at the inner end portion 125 of the slit 123.

<實施例1> 圖19表示實施例1的樹脂成形品的製造裝置的示意性的立體圖。圖19所示的實施例1的樹脂成形品的製造裝置與圖2所示的實施方式的樹脂成形品的製造裝置1的不同點在於,在第1壓板11的上表面設置有階差122而未設置傾斜面121。<First Embodiment> Fig. 19 is a schematic perspective view showing an apparatus for manufacturing a resin molded article of the first embodiment. The apparatus for manufacturing a resin molded article of the first embodiment shown in FIG. 19 is different from the apparatus for manufacturing a resin molded article of the embodiment shown in FIG. 2 in that a step 122 is provided on the upper surface of the first pressure plate 11 . The inclined surface 121 is not provided.

<實施例2> 圖20表示實施例2的樹脂成形品的製造裝置的示意性的立體圖。圖20所示的實施例2的樹脂成形品的製造裝置與圖2所示的實施方式的樹脂成形品的製造裝置1的不同點在於,在第1壓板11的上表面設置有凹進部127而未設置階差122。<Example 2> Fig. 20 is a schematic perspective view showing a manufacturing apparatus of a resin molded article of Example 2. The apparatus for manufacturing a resin molded article of the second embodiment shown in FIG. 20 is different from the apparatus for manufacturing a resin molded article of the embodiment shown in FIG. 2 in that a recessed portion 127 is provided on the upper surface of the first pressure plate 11. The step 122 is not set.

<實施例3> 圖21表示實施例3的樹脂成形品的製造裝置的示意性的立體圖。圖21所示的實施例3的樹脂成形品的製造裝置與圖20所示的實施例2的樹脂成形品的製造裝置1的不同點在於,在第1壓板11的上表面設置有階差122來代替傾斜面121。<Example 3> Fig. 21 is a schematic perspective view showing a manufacturing apparatus of a resin molded article of Example 3. The apparatus for manufacturing a resin molded article of the third embodiment shown in FIG. 21 is different from the apparatus for manufacturing a resin molded article of the second embodiment shown in FIG. 20 in that a step 122 is provided on the upper surface of the first pressure plate 11. Instead of the inclined surface 121.

<實施例4> 圖22表示實施例4的樹脂成形品的製造裝置的示意性的立體圖。圖22所示的實施例4的樹脂成形品的製造裝置與圖2所示的實施方式的樹脂成形品的製造裝置1的不同點在於,加厚了第1壓板11的厚度。<Example 4> Fig. 22 is a schematic perspective view showing a manufacturing apparatus of a resin molded article of Example 4. The apparatus for manufacturing a resin molded article of the fourth embodiment shown in FIG. 22 is different from the apparatus for manufacturing a resin molded article of the embodiment shown in FIG. 2 in that the thickness of the first pressure plate 11 is increased.

<實施例5> 圖23表示實施例5的樹脂成形品的製造裝置的示意性的立體圖。圖23所示的實施例5的樹脂成形品的製造裝置與圖20所示的實施例2的樹脂成形品的製造裝置1的不同點在於,在第1壓板11的上表面未設置凹進部127。<Example 5> Fig. 23 is a schematic perspective view showing a manufacturing apparatus of a resin molded article of Example 5. The apparatus for manufacturing a resin molded article of the fifth embodiment shown in FIG. 23 is different from the apparatus for manufacturing a resin molded article of the second embodiment shown in FIG. 20 in that a recessed portion is not provided on the upper surface of the first pressure plate 11. 127.

<實施例6> 圖24表示實施例6的樹脂成形品的製造裝置的示意性的立體圖。圖24所示的實施例6的樹脂成形品的製造裝置與圖22所示的實施例4的樹脂成形品的製造裝置1的不同點在於,在第1壓板11的上表面設置有凹進部127。<Embodiment 6> Fig. 24 is a schematic perspective view showing a manufacturing apparatus of a resin molded article of Example 6. The apparatus for manufacturing a resin molded article of the sixth embodiment shown in FIG. 24 is different from the apparatus for manufacturing a resin molded article of the fourth embodiment shown in FIG. 22 in that a recessed portion is provided on the upper surface of the first pressure plate 11. 127.

<實施例7> 圖25表示實施例7的樹脂成形品的製造裝置的示意性的立體圖。圖25所示的實施例7的樹脂成形品的製造裝置與圖22所示的實施例4的樹脂成形品的製造裝置1的不同點在於,在第1壓板11的上表面設置有兩個圓柱狀的突起126。<Embodiment 7> Fig. 25 is a schematic perspective view showing a manufacturing apparatus of a resin molded article of Example 7. The apparatus for manufacturing a resin molded article of the seventh embodiment shown in FIG. 25 is different from the apparatus for manufacturing a resin molded article of the fourth embodiment shown in FIG. 22 in that two cylinders are provided on the upper surface of the first pressure plate 11. Shaped protrusions 126.

<評價> 在以下的表1中表示藉由模擬求出的對圖18~圖25所示的比較例及實施例1、實施例4及實施例7的樹脂成形品的製造裝置的第1壓板11從下方加壓了18噸的力時的、第1模具支架14的安裝部20處第1壓板11的最厚的部分的厚度(最大值)與最薄的部分的厚度(最小值)的差值(厚度偏差)的結果。<Evaluation> In the following Table 1, the first platen of the manufacturing apparatus of the resin molded article of the comparative example shown in FIGS. 18 to 25 and the first, fourth, and seventh examples obtained by the simulation is shown. When the force of 18 tons is pressed from below, the thickness (maximum value) of the thickest portion of the first pressure plate 11 and the thickness (minimum value) of the thinnest portion of the mounting portion 20 of the first mold holder 14 are The result of the difference (thickness deviation).

另外,表1中的“最大值”的欄中示出了所述加壓時的第1模具支架14的安裝部20處的第1壓板11的最厚的部分的厚度(最大值)[mm]。而且,表1中的“最小值”的欄中示出了所述加壓時的第1模具支架14的安裝部20處的第1壓板11的最薄的部分的厚度(最小值)[mm]。而且,表1中的“差值”的欄中示出了所述最大值與最小值的差值(厚度偏差)[mm]。進而,在表1的“a與b的關係”的欄中,示出了所述加壓前的切口123的外側端部124處的第1壓板11的厚度a與切口123的內側端部125處的第1壓板11的厚度b的大小關係。In addition, the column of "maximum value" in Table 1 shows the thickness (maximum value) of the thickest portion of the first pressure plate 11 at the mounting portion 20 of the first die holder 14 at the time of pressurization [mm] ]. Further, the column of "minimum value" in Table 1 shows the thickness (minimum value) of the thinnest portion of the first pressure plate 11 at the mounting portion 20 of the first mold holder 14 at the time of pressurization [mm] ]. Moreover, the difference (thickness deviation) [mm] between the maximum value and the minimum value is shown in the column of "difference value" in Table 1. Further, in the column of "the relationship between a and b" in Table 1, the thickness a of the first pressure plate 11 and the inner end portion 125 of the slit 123 at the outer end portion 124 of the slit 123 before pressurization are shown. The magnitude relationship of the thickness b of the first pressure plate 11 at the place.

[表1] [Table 1]

如表1所示,確認到:在所述加壓前的切口123的外側端部124處的第1壓板11的厚度a比切口123的內側端部125處的第1壓板11的厚度b薄的實施例1、實施例4及實施例7的樹脂成形品的製造裝置中,與比較例的樹脂成形品的製造裝置相比,可縮小所述加壓時第1模具支架14的安裝部20處第1壓板11的最厚的部分的厚度(最大值)與最薄的部分的厚度(最小值)的差值(厚度偏差)。As shown in Table 1, it was confirmed that the thickness a of the first pressure plate 11 at the outer end portion 124 of the slit 123 before the pressurization was thinner than the thickness b of the first pressure plate 11 at the inner end portion 125 of the slit 123. In the apparatus for manufacturing a resin molded article of the first embodiment, the fourth embodiment, and the seventh embodiment, the mounting portion 20 of the first mold holder 14 at the time of pressurization can be reduced as compared with the apparatus for manufacturing a resin molded article of the comparative example. The difference (thickness deviation) between the thickness (maximum value) of the thickest portion of the first platen 11 and the thickness (minimum value) of the thinnest portion.

因此,認為:實施例1、實施例4及實施例7的樹脂成形品的製造裝置與比較例的樹脂成形品的製造裝置相比,可抑制合模時第1模具支架14的安裝部20處的第1壓板11的變形,從而可製造降低了厚度的偏差的樹脂成形品。Therefore, it is considered that the apparatus for manufacturing a resin molded article of the first embodiment, the fourth embodiment, and the seventh embodiment can suppress the mounting portion 20 of the first die holder 14 at the time of mold clamping as compared with the device for manufacturing a resin molded article of the comparative example. The deformation of the first pressure plate 11 can produce a resin molded article in which the variation in thickness is reduced.

而且,根據實施例4的樹脂成形品的製造裝置與實施例1及實施例7的樹脂成形品的製造裝置的比較可明確,確認到:若第1模具支架14的安裝部20處的第1壓板11的厚度厚,則可抑制所述加壓時的第1壓板11的變形。因此,認為:實施例4的樹脂成形品的製造裝置與實施例1及實施例7的樹脂成形品的製造裝置相比,可製造進一步降低了厚度的偏差的樹脂成形品。Moreover, the comparison between the apparatus for manufacturing a resin molded article of the fourth embodiment and the apparatus for manufacturing a resin molded article of the first and seventh embodiments is clear, and the first portion of the mounting portion 20 of the first die holder 14 is confirmed. When the thickness of the pressure plate 11 is thick, deformation of the first pressure plate 11 during the pressurization can be suppressed. Therefore, it is considered that the resin molded article of the fourth embodiment and the resin molded article of the seventh embodiment can produce a resin molded article which is further reduced in thickness.

而且,圖26表示將增加了第2模具支架15的安裝部處的第2壓板12的厚度後的第2壓板12安裝於實施例4的樹脂成形品的製造裝置而進行了與所述內容相同的加壓時的模擬結果。In addition, FIG. 26 shows that the second pressure plate 12 in which the thickness of the second pressure plate 12 at the attachment portion of the second mold holder 15 is increased is attached to the manufacturing apparatus of the resin molded article of the fourth embodiment, and the same content as described above is performed. The simulation results at the time of pressurization.

如圖26所示,確認到:藉由使實施例4的樹脂成形品的製造裝置將第2模具支架15的安裝部處的第2壓板12的厚度從232.5 mm增加至382.7 mm,第2模具支架15的安裝部處的第2壓板12的厚度偏差從0.012 mm成為0.008 mm,從而可抑制所述加壓時的第2壓板12的變形。因此,認為:在此情況下也可製造進一步降低了厚度的偏差的樹脂成形品。As shown in FIG. 26, it was confirmed that the thickness of the second pressure plate 12 at the mounting portion of the second mold holder 15 was increased from 232.5 mm to 382.7 mm by the apparatus for manufacturing a resin molded article of Example 4, and the second mold was used. The thickness deviation of the second pressure plate 12 at the mounting portion of the bracket 15 is 0.008 mm from 0.012 mm, and deformation of the second pressure plate 12 during the pressurization can be suppressed. Therefore, it is considered that a resin molded article which further reduces the variation in thickness can be produced in this case.

而且,作為圖10中所示的實施方式的樹脂成形系統的變形例,可例示不使用收納模塊1003,而將樹脂成形品收納裝置203設置在供給模塊1001內的實施方式。在此情況下,一個搬送機構可將支撐構件51從供給模塊1001供給至樹脂密封模塊1002中,並且將利用樹脂成形品的製造裝置1進行製造後的樹脂成形品82再次收納在供給模塊1001內的樹脂成形品收納裝置203中。In addition, as a modification of the resin molding system of the embodiment shown in FIG. 10, an embodiment in which the resin molded article storage device 203 is provided in the supply module 1001 without using the storage module 1003 can be exemplified. In this case, the one transporting means can supply the support member 51 from the supply module 1001 to the resin sealing module 1002, and the resin molded article 82 manufactured by the manufacturing apparatus 1 of the resin molded product can be accommodated again in the supply module 1001. In the resin molded article storage device 203.

而且,作為圖10中所示的實施方式的樹脂成形系統的變形例,也可以例示將樹脂材料供給裝置202設置在收納模塊1003內的實施方式。在此情況下,未圖示的搬送機構可將脫模膜52與樹脂材料61從收納模塊1003一併供給至設置在樹脂密封模塊1002中的樹脂成形品的製造裝置1中,並且在利用樹脂成形品的製造裝置1製造樹脂成形品82後,此搬送機構可回收脫模膜52。Moreover, as a modification of the resin molding system of the embodiment shown in FIG. 10, an embodiment in which the resin material supply device 202 is provided in the storage module 1003 can be exemplified. In this case, the transfer mechanism (not shown) can supply the release film 52 and the resin material 61 together from the storage module 1003 to the manufacturing apparatus 1 of the resin molded product provided in the resin sealing module 1002, and the resin is used. After the resin molded product 82 is manufactured by the manufacturing apparatus 1 of a molded article, this conveyance mechanism can collect the release film 52.

如以上般對實施方式及實施例進行了說明,但將所述各實施方式及各實施例的結構適宜組合也從最初進行了預定。Although the embodiment and the examples have been described above, the configurations of the respective embodiments and the respective embodiments are appropriately combined and predetermined from the beginning.

對本發明的實施方式進行了說明,但本次所揭示的實施方式應認為在所有方面均為例示而非進行限制者。本發明的範圍由權利要求書表示,且意圖包含與權利要求書均等的含義及範圍內的所有變更。 [產業上的可利用性]The embodiments of the present invention have been described, but the embodiments disclosed herein are intended to be illustrative and not restrictive. The scope of the present invention is defined by the claims, and is intended to include all modifications within the meaning and scope of the claims. [Industrial availability]

根據本文中揭示的實施方式,可提供一種樹脂成形品的製造裝置、樹脂成形系統以及樹脂成形品的製造方法。According to the embodiment disclosed herein, a manufacturing apparatus of a resin molded article, a resin molding system, and a method of producing a resin molded article can be provided.

1‧‧‧樹脂成形品的製造裝置1‧‧‧Manufacturer of resin molded articles

11‧‧‧第1壓板11‧‧‧1st platen

12‧‧‧第2壓板12‧‧‧2nd platen

13‧‧‧第3壓板13‧‧‧3rd platen

14‧‧‧第1模具支架14‧‧‧1st mold holder

15‧‧‧第2模具支架15‧‧‧2nd mold holder

16‧‧‧驅動機構16‧‧‧Drive mechanism

17‧‧‧型壓框架17‧‧‧ Type pressure frame

20‧‧‧安裝部20‧‧‧Installation Department

21‧‧‧第1板21‧‧‧1st board

22‧‧‧第1隔熱構件22‧‧‧1st insulation member

23‧‧‧第1加熱板23‧‧‧1st heating plate

24‧‧‧第1側壁24‧‧‧1st side wall

25‧‧‧第1模具支架加熱器25‧‧‧1st mold holder heater

31‧‧‧第2板31‧‧‧2nd board

32‧‧‧第2隔熱構件32‧‧‧2nd insulation member

33‧‧‧第2加熱板33‧‧‧2nd heating plate

34‧‧‧第2側壁34‧‧‧ second side wall

35‧‧‧第2模具支架加熱器35‧‧‧2nd mold holder heater

41‧‧‧第1模具41‧‧‧1st mould

42‧‧‧第2模具42‧‧‧2nd mould

43‧‧‧模腔43‧‧‧ cavity

51‧‧‧支撐構件51‧‧‧Support members

51a‧‧‧半導體基板51a‧‧‧Semiconductor substrate

51b‧‧‧半導體芯片51b‧‧‧Semiconductor chip

52‧‧‧脫模膜52‧‧‧ release film

61‧‧‧樹脂材料61‧‧‧Resin materials

71‧‧‧流動性樹脂71‧‧‧Liquid resin

81‧‧‧硬化樹脂81‧‧‧ hardened resin

82‧‧‧樹脂成形品82‧‧‧Resin molded products

91‧‧‧中間板91‧‧‧Intermediate board

93‧‧‧第3模具支架93‧‧‧3rd mold holder

94‧‧‧第4模具支架94‧‧‧4th mold bracket

96‧‧‧第3模具96‧‧‧3rd mould

97‧‧‧模腔97‧‧‧ cavity

98‧‧‧第4模具98‧‧‧4th mould

101‧‧‧第3板101‧‧‧3rd board

102‧‧‧第3隔熱構件102‧‧‧3rd insulation member

103‧‧‧第3加熱板103‧‧‧3rd heating plate

104‧‧‧第3側壁104‧‧‧3rd side wall

105‧‧‧第3模具支架加熱器105‧‧‧3rd mold holder heater

111‧‧‧第4板111‧‧‧4th board

112‧‧‧第4隔熱構件112‧‧‧4th thermal insulation component

113‧‧‧第4加熱板113‧‧‧4th heating plate

114‧‧‧第4側壁114‧‧‧4th side wall

115‧‧‧第4模具支架加熱器115‧‧‧4th mold holder heater

121‧‧‧傾斜面121‧‧‧Sloping surface

122‧‧‧階差122‧‧ ‧ step

123‧‧‧切口123‧‧‧ incision

124‧‧‧外側端部124‧‧‧Outer end

125‧‧‧內側端部125‧‧‧Inside end

126‧‧‧突起126‧‧ ‧ prominence

127‧‧‧凹進部127‧‧‧ recessed

201‧‧‧支撐構件供給裝置201‧‧‧Support member supply device

202‧‧‧樹脂材料供給裝置202‧‧‧Resin material supply device

203‧‧‧樹脂成形品收納裝置203‧‧‧Resin molded product storage device

301‧‧‧搬送機構301‧‧‧Transportation agency

401‧‧‧縱向移動導軌401‧‧‧Longitudinal moving rail

402‧‧‧橫向移動導軌402‧‧‧Horizontal moving rail

403‧‧‧縱向移動導軌403‧‧‧Longitudinal moving rail

1000‧‧‧樹脂成形系統1000‧‧‧Resin Forming System

1001‧‧‧供給模塊1001‧‧‧Supply module

1002‧‧‧樹脂密封模塊1002‧‧‧Resin Sealing Module

1003‧‧‧收納模塊1003‧‧‧Storage module

a、b‧‧‧厚度a, b‧‧‧ thickness

圖1是實施方式的樹脂成形品的製造裝置的示意性的正視圖。 圖2是圖1中所示的樹脂成形品的製造裝置的示意性的放大正視圖。 圖3是對樹脂成形品的製造裝置的第1壓板及第2壓板的變形進行圖解的圖。 圖4是對樹脂成形品的製造裝置的第1壓板及第2壓板的變形進行圖解的圖。 圖5是表示實施方式的第1壓板的合模時的應力的集中部位的圖。 圖6是第1壓板的變形例的示意性的正視圖。 圖7是對實施方式的樹脂成形品的製造方法的步驟的一部分進行圖解的示意性的剖面圖。 圖8是對實施方式的樹脂成形品的製造方法的步驟的一部分進行圖解的示意性的剖面圖。 圖9是對實施方式的樹脂成形品的製造方法的步驟的一部分進行圖解的示意性的剖面圖。 圖10是實施方式的樹脂成形系統的示意性的平面圖。 圖11是對實施方式的樹脂成形品的製造方法的步驟的一部分進行圖解的示意性的剖面圖。 圖12是對實施方式的樹脂成形品的製造方法的步驟的一部分進行圖解的示意性的剖面圖。 圖13是對實施方式的樹脂成形品的製造方法的步驟的一部分進行圖解的示意性的正視圖。 圖14是對實施方式的樹脂成形品的製造方法的步驟的一部分進行圖解的示意性的剖面圖。 圖15是對實施方式的樹脂成形品的製造方法的步驟的一部分進行圖解的示意性的剖面圖。 圖16是實施方式的樹脂成形品的製造裝置的變形例的示意性的正視圖。 圖17是圖16所示的樹脂成形品的製造裝置的示意性的放大剖面圖。 圖18是比較例的樹脂成形品的製造裝置的示意性的立體圖。 圖19是實施例1的樹脂成形品的製造裝置的示意性的立體圖。 圖20是實施例2的樹脂成形品的製造裝置的示意性的立體圖。 圖21是實施例3的樹脂成形品的製造裝置的示意性的立體圖。 圖22是實施例4的樹脂成形品的製造裝置的示意性的立體圖。 圖23是實施例5的樹脂成形品的製造裝置的示意性的立體圖。 圖24是實施例6的樹脂成形品的製造裝置的示意性的立體圖。 圖25是實施例7的樹脂成形品的製造裝置的示意性的立體圖。 圖26是表示將增加了第2模具支架的安裝部的第2壓板的厚度後的第2壓板安裝於實施例4的樹脂成形品的製造裝置而進行了加壓時的模擬結果。Fig. 1 is a schematic front view of an apparatus for manufacturing a resin molded article according to an embodiment. Fig. 2 is a schematic enlarged front view of the apparatus for manufacturing the resin molded article shown in Fig. 1. FIG. 3 is a view illustrating deformation of the first pressure plate and the second pressure plate of the apparatus for manufacturing a resin molded article. FIG. 4 is a view illustrating deformation of the first pressure plate and the second pressure plate of the apparatus for manufacturing a resin molded article. FIG. 5 is a view showing a concentrated portion of stress at the time of mold clamping of the first pressure plate according to the embodiment. Fig. 6 is a schematic front view showing a modification of the first pressure plate. FIG. 7 is a schematic cross-sectional view showing a part of the procedure of the method of manufacturing the resin molded article of the embodiment. FIG. 8 is a schematic cross-sectional view illustrating a part of the procedure of the method of manufacturing the resin molded article of the embodiment. FIG. 9 is a schematic cross-sectional view illustrating a part of the procedure of the method of manufacturing the resin molded article of the embodiment. Fig. 10 is a schematic plan view of a resin molding system of the embodiment. FIG. 11 is a schematic cross-sectional view showing a part of the procedure of the method of manufacturing the resin molded article of the embodiment. FIG. 12 is a schematic cross-sectional view illustrating a part of the procedure of the method of manufacturing the resin molded article of the embodiment. FIG. 13 is a schematic front view showing a part of the steps of the method of manufacturing the resin molded article of the embodiment. FIG. FIG. 14 is a schematic cross-sectional view showing a part of the procedure of the method of manufacturing the resin molded article of the embodiment. Fig. 15 is a schematic cross-sectional view showing a part of the steps of a method of manufacturing a resin molded article of the embodiment. Fig. 16 is a schematic front view showing a modification of the apparatus for manufacturing a resin molded article of the embodiment. Fig. 17 is a schematic enlarged cross-sectional view showing the apparatus for manufacturing a resin molded article shown in Fig. 16; 18 is a schematic perspective view of a manufacturing apparatus of a resin molded article of a comparative example. 19 is a schematic perspective view of an apparatus for manufacturing a resin molded article of Example 1. Fig. 20 is a schematic perspective view of the apparatus for manufacturing a resin molded article of the second embodiment. Fig. 21 is a schematic perspective view of the apparatus for manufacturing a resin molded article of the third embodiment. Fig. 22 is a schematic perspective view of the apparatus for manufacturing a resin molded article of the fourth embodiment. Fig. 23 is a schematic perspective view of the apparatus for manufacturing a resin molded article of the fifth embodiment. Fig. 24 is a schematic perspective view of the apparatus for manufacturing a resin molded article of the sixth embodiment. Fig. 25 is a schematic perspective view of the apparatus for manufacturing a resin molded article of the seventh embodiment. FIG. 26 is a simulation result when the second pressure plate to which the thickness of the second pressure plate of the attachment portion of the second mold holder is increased is attached to the manufacturing apparatus of the resin molded article of the fourth embodiment.

Claims (6)

一種樹脂成形品的製造裝置,包括: 第1壓板; 第1模具支架,設於所述第1壓板,以對第1模具進行保持的方式構成; 第2壓板,以與所述第1壓板相向的方式與所述第1壓板空開間隔而配置;以及 第2模具支架,設於所述第2壓板,以對第2模具進行保持的方式構成, 在所述第1壓板的所述第2壓板側設置有切口, 所述切口的外側端部處的所述第1壓板的厚度比所述切口的內側端部處的所述第1壓板的厚度薄。A manufacturing apparatus for a resin molded article, comprising: a first pressure plate; a first mold holder provided on the first pressure plate to hold the first mold; and a second pressure plate facing the first pressure plate The second mold holder is disposed on the second pressure plate and is configured to hold the second mold, and the second mold holder is configured to be spaced apart from each other. The platen side is provided with a slit, and the thickness of the first platen at the outer end portion of the slit is thinner than the thickness of the first platen at the inner end portion of the slit. 如申請專利範圍第1項所述的樹脂成形品的製造裝置,其中在所述第1壓板的與所述第2壓板相反的一側設置有傾斜。The apparatus for manufacturing a resin molded article according to claim 1, wherein the first platen is provided with an inclination on a side opposite to the second platen. 如申請專利範圍第1項所述的樹脂成形品的製造裝置,其中在所述第1壓板的與所述第2壓板相反的一側設置有階差或凹進部中的至少一者。The apparatus for manufacturing a resin molded article according to claim 1, wherein at least one of a step or a recessed portion is provided on a side of the first pressure plate opposite to the second pressure plate. 如申請專利範圍第1項所述的樹脂成形品的製造裝置,還包括: 所述第1壓板與所述第2壓板之間的中間板; 第3模具支架,設於所述中間板的所述第1壓板側,以對第3模具進行保持的方式構成;以及 第4模具支架,設於所述中間板的所述第2壓板側,以對第4模具進行保持的方式構成。The apparatus for producing a resin molded article according to claim 1, further comprising: an intermediate plate between the first pressure plate and the second pressure plate; and a third mold holder provided on the intermediate plate The first platen side is configured to hold the third mold, and the fourth mold holder is provided on the second platen side of the intermediate plate, and is configured to hold the fourth mold. 一種樹脂成形系統,包括如申請專利範圍第1項至第4項中任一項所述的樹脂成形品的製造裝置。A resin molding system comprising the apparatus for producing a resin molded article according to any one of claims 1 to 4. 一種樹脂成形品的製造方法,其使用如申請專利範圍第1項至第4項中任一項所述的樹脂成形品的製造裝置,所述樹脂成形品的製造方法包括: 對所述第1模具設置支撐構件的步驟; 對所述第2模具的模腔供給樹脂材料的步驟;以及 進行所述第1模具與所述第2模具的合模的步驟。A manufacturing method of a resin molded article according to any one of claims 1 to 4, wherein the method for producing a resin molded article includes: a step of providing a support member to the mold; a step of supplying a resin material to the cavity of the second mold; and a step of clamping the first mold and the second mold.
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