TWI729318B - Resin molded product manufacturing apparatus, resin molding system, and resin molded product manufacturing method - Google Patents

Abstract

There is provided a resin molded product manufacturing apparatus that can have a simplified configuration, resin molding system, and resin molded product manufacturing method, that allow pressure to be applied in a wider range. The resin molded product manufacturing apparatus allows a second platen to be moved in the vertical direction by an ascending and descending mechanism and allows an intermediate plate to be moved in the vertical direction via a ganging mechanism along with an operation of an arm attached to the second platen.

Description

Resin molded product manufacturing device, resin molding system, and resin molded product manufacturing method

The present invention relates to a manufacturing apparatus, a resin molding system, and a manufacturing method of a resin molded product.

For example, Japanese Patent Laid-Open No. 2014-233882 (Patent Document 1) describes a resin casting device that includes a ball screw mechanism connected to a movable platen and connected to a fixed platen. The mold metal mold is closed until the first clamping force; and the toggle link mechanism is connected to the movable platen, and the mold is closed until the second clamping force is stronger than the first clamping force To maintain the final resin pressure.

However, in the resin casting device described in Patent Document 1, two mechanisms, a ball screw mechanism and a crank-link mechanism, must be assembled, and therefore the structure of the device is complicated.

In addition, in the crank-link mechanism of the resin molding apparatus described in Patent Document 1, if the plurality of connected link members are close to a straight line from the bent state at the connecting portion, the force applied to the resin molded object is abrupt. Since the ground is increased, the usable pressure range is reduced, and the thickness of the lead frame and the like contained in the resin molded object is restricted.

According to the embodiment disclosed herein, it is possible to provide an apparatus for manufacturing a resin molded product, which includes: a first pressing plate; a pair of pressed frames extending vertically below the first pressing plate and in a horizontal direction The upper space is fixed to the first pressure plate; the second pressure plate faces the first pressure plate with a space in the vertical direction; the intermediate plate between the first pressure plate and the second pressure plate; the lifting mechanism to make the second pressure plate It is configured to be movable in the vertical direction; and the arm has one end connected to the second pressure plate and extends in one direction; the first bearing member, the second bearing member, and the third bearing are sequentially mounted from one end to the other end of the arm Member, at one end of the arm, the first block is mounted via the first bearing member, the first bearing member is arranged to be movable in the first opening of the first block, the first block is connected with the second pressure plate, and the second The vertical movement of the pressure plate allows one end of the arm to move in such a way that the center of the third bearing member at the other end of the arm is used as a fulcrum to draw an arc between the top dead center and the bottom dead center. Between the other end, the second block is mounted via the second bearing member, and the second bearing member is arranged to be movable in the second opening of the second block, so that the intermediate plate is interlocked with the second block. A linkage mechanism is connected to the second block, and the intermediate plate can be moved in the vertical direction via the linkage mechanism in accordance with the movement of the arm.

According to the embodiments disclosed herein, a resin molding system including the manufacturing apparatus of the resin molded product can be provided.

According to the embodiments disclosed herein, it is possible to provide a method of manufacturing a resin molded product using the resin molded product manufacturing apparatus.

The above and other objects, features, aspects, and advantages of the present invention will become clear from the following detailed description of the present invention understood in connection with the accompanying drawings.

Hereinafter, the embodiment will be described. In addition, in the drawings used for the description of the embodiments, the same reference sign indicates the same part or a corresponding part.

FIG. 1 shows a schematic elevation view of the main part of the manufacturing apparatus of the resin molded article of embodiment. As shown in FIG. 1, the manufacturing apparatus 1 of the resin molded product of the embodiment includes a first pressure plate 11, a second pressure plate 12, and a third pressure plate 13. One ends of the pair of pressing frames 17 extend vertically below the first pressing plate 11 and are fixed to the first pressing plate 11 at intervals in the horizontal direction. The other ends of the pair of pressing frames 17 are respectively fixed to both ends of the third pressing plate 13. In addition, the first pressing plate 11, the third pressing plate 13 and the press frame 17 may be formed integrally as castings, for example.

In the area between the first pressing plate 11 and the third pressing plate 13 in the extending direction (vertical direction) of the pressing frame 17, it is spaced apart from the first pressing plate 11 and the third pressing plate 13, and is separated from the first pressing plate 11 and the third pressing plate 13 respectively. The second pressing plate 12 is arranged such that the pressing plate 11 and the third pressing plate 13 face each other.

In the area between the first pressing plate 11 and the second pressing plate 12 in the extending direction of the pressing frame 17, it is spaced apart from the first pressing plate 11 and the second pressing plate 12, and is separated from the first pressing plate 11 and the second pressing plate 12, respectively. The intermediate plates 91 are arranged so that the pressing plates 12 face each other.

In the area between the second pressing plate 12 and the third pressing plate 13 in the extending direction of the pressing frame 17, a pair of balls having one end fixed to the second pressing plate 12 and the other end fixed to the third pressing plate 13 are arranged Screw 100. In this embodiment, the ball screw 100 functions as an elevating mechanism that allows the second pressure plate 12 to move in the vertical direction. The ball screws 100 are respectively arranged at intervals in the horizontal direction.

For example, the inner surface of one end of a plate-shaped lifter plate 103 is fixed to the intermediate plate 91 so as to extend vertically below the intermediate plate 91. In addition, a linear motion guide 102 as an elongated member extending vertically below the lifting plate 103 is fixed to the outer surface of the lifting plate 103. On the other hand, the plurality of linear motion blocks 101 are attached to each of the pair of press frames 17 at intervals in the vertical direction. A plurality of linear motion blocks 101 are respectively fixed on the side wall of the pressing frame 17.

Here, the linear motion guide 102 is attached to each of the plurality of linear motion blocks 101 so as to be movable in the vertical direction. Therefore, as the lifting plate 103 fixed to the intermediate plate 91 moves vertically upward or downward, the intermediate plate 91 can move vertically upward or downward. The linear motion guide 150 and the linear motion block 101 constitute a linear motion guide 150. In addition, the linear motion guide 102 may be installed on the press frame 17 and the linear motion block 101 may be installed on the lifting plate 103.

FIG. 2 shows a schematic side perspective view of the main part of the resin molded product manufacturing apparatus 1 of the embodiment shown in FIG. 1. In addition, FIG. 3 shows a schematic perspective perspective view of the main part of the resin molded product manufacturing apparatus 1 of the embodiment shown in FIG. 1. Furthermore, FIG. 4 shows a schematic perspective perspective view which enlarged the main part of the manufacturing apparatus 1 of the resin molded article of embodiment shown in FIG.

As shown in FIG. 2, the manufacturing apparatus 1 of the resin molded product of the embodiment includes an inner plate 116 and an outer plate 118. The outer plates 118 extending in the vertical direction are respectively arranged on both sides of the inner plate 116. A first recess 118a that is a relatively large partial horizontal depression is provided on the upper and lower portions of each outer plate 118, and the central part of the outer plate 118 between the two first recesses 118a in the vertical direction is provided The second recessed portion 118b is a relatively small partial depression in the horizontal direction. An elastic member 113 such as a spring that can expand and contract in the vertical direction is arranged in the first recess 118a. The convex portion 116 a is fitted into the second concave portion 118 b via the spacer 117.

As shown in FIGS. 3 and 4, the manufacturing apparatus 1 of a resin molded product of the embodiment includes a lower linear motion guide 120. As shown in FIGS. 3 and 4, the lower linear motion guide 120 includes a lower linear motion guide 123, and a plurality of lower linear motions mounted so that the lower linear motion guide 123 can move in the vertical direction. Movement block 124. The plurality of lower linear motion blocks 124 are respectively fixed to the inner side plate 116 extending in the vertical direction. The lower linear motion guide 123 is fixed on the lifting plate 103.

As shown in FIGS. 2 to 4, the manufacturing apparatus 1 of the resin molded product of the embodiment further includes an arm 104 on the vertical lower side of the inner plate 116 and the outer plate 118. The arm 104 has a shape extending in one direction, and from one end to the other end of the arm 104, the first bearing member 105, the second bearing member 106, and the third bearing member 121 are sequentially mounted at intervals with each other.

In the present embodiment, two first bearing members 105 are arranged at a distance from each other in the normal line direction of the paper surface of FIG. 2. The arm 104 is sandwiched between the two first bearing members 105, and the two first bearing members 105 are attached to the first shaft 109 so as to be rotatable with respect to the arm 104 with the first shaft 109 as a center. The first shaft 109 is attached to the arm 104 so as to extend in a direction crossing the extending direction of the arm 104.

In addition, the two first bearing members 105 are respectively arranged in the respective first openings 107 of the two side walls of the first block 114 that are arranged at a distance from each other. The two first bearing members 105 are each mounted in the first opening 107 so as to be movable in the horizontal direction with respect to the first block 114. As a result, the first block 114 is attached to one end of the arm 104 via the first bearing member 105.

As the first bearing member 105, for example, a roller follower which is a roller bearing using needle rollers can be used. In this case, the inner ring of the first bearing member 105 can be fixed to the first shaft 109, which is the point of force of the arm 104, and arranged so as to contact the inner surface of the first opening 107 of the first block 114 The outer surface of the outer ring of the first bearing member 105. In addition, in this case, it is preferable to set the size of the first opening 107 such that when the second pressing plate 12 is moved vertically upward, the lower surface of the inner surface of the first opening 107 of the first block 114 contacts The outer surface of the outer ring of the first bearing member 105 and the upper surface of the inner surface of the first opening 107 of the first block 114 does not contact the outer surface of the outer ring of the first bearing member 105. In addition, when a roller follower is used as the first bearing member 105, the frequency of lubricating oil supply can be reduced compared to a rack and pinion mechanism.

In the present embodiment, the second bearing members 106 are also arranged in two at a distance from each other in the normal line direction of the paper surface of FIG. 2. The arm 104 is sandwiched between the two second bearing members 106, and the two second bearing members 106 are attached to the second shaft 110 so as to be rotatable with respect to the arm 104 with the second shaft 110 as a center. The second shaft 110 is attached to the arm 104 so as to extend in a direction crossing the extending direction of the arm 104.

In addition, the two second bearing members 106 are respectively arranged in the respective second openings 108 of the two side walls of the second block 115 that are arranged at a distance from each other. The two second bearing members 106 are respectively mounted in the second opening 108 so as to be movable in the horizontal direction with respect to the second block 115. As a result, the second block 115 is attached to the central portion of the arm 104 via the second bearing member 106.

As the second bearing member 106, for example, a roller follower which is a roller bearing using needle rollers can be used. In this case, the inner ring of the second bearing member 106 can be fixed to the second shaft 110 that is the point of action of the arm 104, and it can be arranged so as to contact the inner surface of the second opening 108 of the second block 115 The outer surface of the outer ring of the second bearing member 106. In this case, it is preferable to set the size of the second opening 108 in such a way that when the second pressing plate 12 is moved vertically upward, the upper surface of the inner surface of the second opening 108 of the second block 115 contacts The outer surface of the outer ring of the second bearing member 106 and the lower surface of the inner surface of the second opening 108 of the second block 115 do not contact the outer surface of the outer ring of the second bearing member 106. In addition, when a roller follower is used as the second bearing member 106, the frequency of supplying lubricating oil can be reduced compared to a rack and pinion mechanism.

In the present embodiment, the third bearing members 121 are also arranged in two spaced apart from each other in the normal line direction of the paper surface of FIG. 2. The arm 104 is sandwiched between the two third bearing members 121, and the two third bearing members 121 are attached to the third shaft 111 so as to be rotatable with respect to the arm 104 with the third shaft 111 as a center. The third shaft 111 is attached to the arm 104 so as to extend in a direction crossing the extending direction of the arm 104.

Unlike the first bearing member 105 and the second bearing member 106, the third bearing member 121 cannot move in the horizontal direction with respect to the third block 119. The third block 119 is fixed to the resin molded product manufacturing apparatus 1 of the embodiment, and cannot move relative to the press frame 17, for example.

As the third bearing member 121, for example, a deep groove ball bearing can be used. In this case, the inner ring of the third bearing member 121 can be fixed to the third shaft 111 of the arm 104, and the outer ring of the third bearing member 121 can be fixed to the third block 119.

In addition, in FIG. 2, for the convenience of description, the illustration of the lower linear motion guide 123 and the lower linear motion block 124 on the inner side plate 116 is omitted.

In the resin molded product manufacturing apparatus 1 of the embodiment, as shown in FIG. 3, the first block 114 is fixed to the second pressure plate 12 by a connecting member 122 such as a plate. Therefore, with the movement of the second pressure plate 12 by the ball screw 100 in the vertical direction, the first block 114 also moves in the vertical direction. With the movement of the first block 114 in the vertical direction, the end of the arm 104 to which the first bearing member 105 is mounted can use the part where the first shaft 109 is mounted as a point of force, and the arm 104 to which the third shaft 111 is mounted The other end is used as a fulcrum, and it moves in an arc between the top dead center and the bottom dead center.

Fig. 5 shows a schematic enlarged cross-sectional view along V-V in Fig. 4. As shown in FIG. 5, the inner surface of the lifting plate 103 is positioned so as to face each other in parallel with the outer surface of the inner plate 116 and the outer surface of the outer plate 118, respectively. As described above, the lower linear movement block 124 and the second block 115 are fixed to the inner side plate 116. The lower linear motion guide 123 and the outer plate 118 are fixed on the lifting plate 103. In addition, the lower linear motion guide 123 is attached to the lower linear motion block 124 so as to be movable in the vertical direction.

The lifting plate 103, the lower linear motion guide 123, and the lower linear motion block 124 function as an interlocking mechanism 160 that connects the intermediate plate 91 and the second block 115 by interlocking the intermediate plate 91 and the second block 115 . In addition, the lower linear motion guide 123 may be mounted on the inner side plate 116, and the lower linear motion block 124 may be mounted on the lifting plate 103.

Therefore, as shown in the plan view of FIG. 6, the force point of the arm 104 with the other end (third shaft 111) of the arm 104 as the fulcrum is formed by the movement of the second pressure plate 12 using the ball screw 100 in the vertical direction. The arc-shaped movement of one end (the first shaft 109) also moves the portion of the second shaft 110 that becomes the point of action of the arm 104 in an arc-shaped manner. At this time, the first bearing member 105 moves in the horizontal direction in the first opening 107 of the first block 114, and the second bearing member 106 moves in the horizontal direction in the second opening 108 of the second block 115. In addition, the first block 114 and the second block 115 move in the vertical direction. In addition, the third block 119 and the third bearing member 121 do not move.

For example, as shown in FIG. 6, when the linear distance between the first axis 109 and the third axis 111 is set to L, the linear distance between the second axis 110 and the third axis 111 is set to half of L/2 At this time, the vertical movement distance of the first block 114 becomes H, and the vertical movement distance of the second block 115 becomes half of H/2.

In addition, in FIG. 6, for the convenience of description, the lower linear motion guide 123 and the lower linear motion block 124 on the inner side plate 116 are also omitted from illustration.

Hereinafter, with reference to FIGS. 7 to 25, a method of manufacturing a resin molded product of an embodiment as an example of a method of manufacturing a resin molded product using the manufacturing apparatus 1 of a resin molded product of the embodiment will be described. First, as shown in the schematic perspective view of FIG. 7 and the schematic side perspective view of FIG. 8, the first mold holder 14 is provided on the lower surface side of the first pressure plate 11 and the lower surface side of the intermediate plate 91, and 2 The upper surface side of the pressure plate 12 and the upper surface side of the intermediate plate 91 are provided with a second mold holder 15. At this time, the force point (the first shaft 109) which is one end of the arm 104 is located at the bottom dead point which is the lowest point in the vertical direction. When the point of force (the first axis 109) that is one end of the arm 104 is located at the bottom dead center, the point of force of the arm 104 (the first axis 109) is located more vertically below the point of action (the second axis 110), and the arm The point of action of 104 (the second axis 110) is located closer to the vertical lower than the fulcrum (the third axis 111).

In addition, as shown in FIGS. 7 and 8, arms 104 are provided on both sides of the resin molded product manufacturing apparatus 1 of the embodiment, respectively. When the point of force (the first shaft 109) that is one end of the arm 104 is located at the bottom dead center, in a plan view of the side surface of the manufacturing device 1, the extension of the first arm 104 included on the side surface of the manufacturing device 1 The direction and the extending direction of the second arm 104 included on the side surface on the other side of the manufacturing apparatus 1 become a cross relationship.

FIG. 9 shows a schematic perspective view of the first mold holder 14 and the second mold holder 15 shown in FIGS. 7 and 8. The first mold holder 14 includes a first heat insulating member 22 on the side of the first pressure plate 11, and includes a structure configured to heat a first mold (not shown) in the first heating plate 23 on the side of the second pressure plate 12 The first mold holder heater 25. In addition, the first mold holder 14 includes a first plate 21 on the side closer to the first pressing plate 11 than the first heat insulating member 22 and a first side wall 24 extending vertically downward from the edge of the first heating plate 23. In the present embodiment, the first heating plate 23 incorporates four first mold holder heaters 25 that extend in the horizontal direction with an interval therebetween.

The second mold holder 15 includes a second heat insulating member 32 on the second platen 12 side, and includes a second heating plate 33 on the first platen 11 side that is configured to heat a second mold (not shown) The second mold holder heater 35. In addition, the second mold holder 15 includes a second plate 31 on the side closer to the second pressing plate 12 than the second heat insulating member 32 and a second side wall 34 extending vertically upward from the edge of the second heat insulating member 32. In the present embodiment, the second heating plate 33 incorporates four second mold holder heaters 35 that extend in the horizontal direction at a distance from each other.

Then, as shown in the schematic cross-sectional view of FIG. 10, the first mold 41 is fixed to the first heating plate 23 of the first mold holder 14, and the second mold 42 is fixed to the second heating plate of the second mold holder 15. On board 33. A cavity 43 is provided on the first mold 41 side of the second mold 42. Thus, the first mold 41 is mounted on the lower surface of the first pressure plate 11 and the lower surface of the intermediate plate 91, and the second mold 42 is mounted on the upper surface of the second pressure plate 12 and the upper surface of the intermediate plate 91.

Then, as shown in the schematic cross-sectional view of FIG. 11, the release film 52 is provided so as to cover the cavity 43 of the second mold 42. Then, the space in the cavity 43 covered by the mold release film 52 is evacuated, thereby, as shown in the schematic cross-sectional view of FIG. 12, the mold release film 52 is in close contact with the surface of the second mold 42 constituting the mold cavity 43 on.

Next, from the support member supply device 201 of the supply module 1001 of the resin molding system 1000 of the embodiment shown in the schematic plan view of FIG. 13, the support member 51 that becomes the molded object of resin molding is supplied to the upper side of the conveying mechanism 301 .

The supporting member 51 may include, for example, a lead frame, a substrate, and an interposer that can support a semiconductor chip, a wafer-like electronic component, or a film (including a conductive film, an insulating film, and a semiconductor film), etc. , Semiconductor substrates (silicon wafers, etc.), metal substrates, glass substrates, ceramic substrates, resin substrates, and wiring substrates. In addition, the shape of the supporting member 51 is not particularly limited, and the surface shape of the supporting member 51 may be, for example, a circular shape or a quadrangular shape. In addition, the supporting member 51 may or may not include wiring. In addition, the supporting member 51 may also include a plate shape used in a fan-out wafer level package (Fan Out Wafer Level Package, FO-WLP) or a fan-out panel level package (Fan Out Panel Level Package, FO-PLP). The carrier of the component.

Then, the conveying mechanism 301 supplied with the supporting member 51 moves along the longitudinal movement rail 401 provided in the supply module 1001 and reaches the resin material supply device 202.

Then, the resin material supply device 202 supplies the resin material 61 to the lower side of the conveying mechanism 301 so that the conveying mechanism 301 holds the solid resin material 61 on the lower side of the conveying mechanism 301. Therefore, at this stage, the conveying mechanism 301 holds the support member 51 on the upper side, and holds the resin material 61 on the lower side.

Then, the conveying mechanism 301 moves laterally along the lateral movement guide 402 while holding the support member 51 on the upper side and the resin material 61 on the lower side, and reaches the resin sealing module 1002 of the resin molding system 1000 of the embodiment. The conveying mechanism 301 that has reached the resin sealing module 1002 moves longitudinally along the longitudinal movement guide 403, and arrives in the resin molded product manufacturing apparatus 1 of the embodiment. In addition, four resin-sealed modules 1002 are described in FIG. 13, but it is not limited to this, and the number of resin-sealed modules 1002 can be increased or decreased.

Then, as shown in the schematic cross-sectional view of FIG. 14, the supporting member 51 is set on the first mold 41 from the conveying mechanism 301, and the resin material 61 is supplied from the conveying mechanism 301 to the mold release that is in close contact with the second mold 42膜52上。 Film 52 on. In addition, in this embodiment, a support member 51 including a semiconductor substrate 51a and a semiconductor wafer 51b on the semiconductor substrate 51a is used.

Then, the first mold 41 is heated by the first mold holder heater 25 of the first heating plate 23, and the second mold 42 is heated by the second mold holder heater 35 of the second heating plate 33. At this time, the first platen 11 is heated by the first platen heater 18. In addition, the resin material 61 is melted by the heating of the second mold 42 by the second mold holder heater 35, and a fluid resin 71 is produced as shown in the schematic cross-sectional view of FIG. 15.

Then, as shown in the schematic perspective view of FIG. 16, the schematic side perspective view of FIG. 17, and the enlarged schematic perspective view of the main part of FIG. 18, the ball screw 100 is driven to cause the second pressure plate 12 to face the lead Move vertically upwards.

In the structure shown in FIGS. 16 to 18, the point of force (the first shaft 109) that is one end of the arm 104 is located at an intermediate point between the top dead center and the bottom dead center. When the point of force (the first axis 109) that is one end of the arm 104 is located at the midpoint, the point of force (the first axis 109), the point of action (the second axis 110) and the fulcrum (the third axis 111) of the arm 104 Extending in the horizontal direction, the position of the force point (first axis 109), the point of action (second axis 110), and the fulcrum (third axis 111) of the arm 104 in the vertical direction becomes the same. Therefore, when the point of force (the first shaft 109) that is one end of the arm 104 is located at the intermediate point, in a plan view of the side surface of the manufacturing device 1, the first arm 104 included on the side surface of the manufacturing device 1 The extending direction becomes parallel to the extending direction of the second arm 104 included on the side surface on the other side of the manufacturing apparatus 1. In addition, when the point of force (the first shaft 109) that is one end of the first arm 104 moves between the top dead center and the bottom dead center, the direction of movement of the first bearing member 105 in the first opening 107 is reversed . For example, when the first bearing member 105 moves from the state shown in FIG. 8 (bottom dead center) to the state shown in FIG. 17 in the first opening 107, it moves to the right side of the paper in these figures, and when moving from When the state shown in FIG. 17 moves toward the state (top dead center) shown in FIG. 20 described later, it moves toward the left side of the paper surface of these figures. At this time, the second bearing member 106 also moves in the same direction in the second opening 108 and reverses in the same manner. By adopting such a structure, the horizontal length of the first opening 107 of the first block 114 and the horizontal length of the second opening 108 of the second block 115 can be reduced. Therefore, the resin molding of the embodiment can be suppressed. The product manufacturing device 1 is enlarged.

Then, as shown in the schematic perspective view of FIG. 19, the schematic side perspective view of FIG. 20, and the enlarged schematic perspective view of the main part of FIG. 21, the ball screw 100 is further driven to make the second pressure plate 12 further Move to the top of the plumb. Thereby, as shown in the schematic cross-sectional view of FIG. 22, the first mold 41 and the second mold 42 are clamped. At this time, as shown in FIG. 22, the fluid resin 71 contacts the surface of the support member 51.

In addition, at this time, the force point (the first shaft 109) which is one end of the arm 104 is located at the top dead center which is the uppermost point in the vertical direction. When the point of force (first axis 109) that is one end of the arm 104 is located at the top dead center, the point of force of the arm 104 (first axis 109) is located vertically above the point of action (second axis 110), and the arm The point of action of 104 (the second axis 110) is located vertically above the fulcrum (the third axis 111).

In addition, when the point of force (the first shaft 109) that is one end of the arm 104 is located at the top dead center, in a plan view of the side surface of the manufacturing apparatus 1, the first arm 104 included on the side surface of the manufacturing apparatus 1 The extending direction of the manufacturing apparatus 1 and the extending direction of the second arm 104 included on the other side of the manufacturing apparatus 1 become a cross relationship.

In addition, as described above, when the force point (the first shaft 109) that is one end of the arm 104 passes through the middle point from the bottom dead center and moves to the top dead center, the second pressure plate 12 is driven toward the lead by the ball screw 100. Moving vertically upward, the intermediate plate 91 moves vertically upward along with the movement of the lifting plate 103 vertically upward.

At this time, as shown in FIG. 6, the vertical movement distance of the first block 114 becomes larger than the vertical movement distance of the second block 115. Therefore, the second pressure plate 12 connected to the first block 114 faces the vertical direction. The moving distance in the vertical direction also becomes larger than the moving distance of the intermediate plate 91 connected to the second block 115 in the vertical direction. That is, the movement distance of the lift plate 103 when the force point (the first shaft 109) of one end of the arm 104 moves between the top dead center and the bottom dead center is different from the movement distance of the second pressure plate 12. As a result, the vertical upward movement distance of the second mold 42 installed in the second mold holder 15 attached to the second platen 12 becomes longer than that of the first mold holder 14 attached to the intermediate plate 91. Since the movement distance of the first mold 41 vertically upward is large, the first mold 41 and the second mold 42 can be clamped.

In addition, since the first pressing plate 11 is fixed and does not move in the vertical direction, the movement distance of the second mold 42 installed in the second mold holder 15 mounted on the intermediate plate 91 in the vertical upward direction becomes longer than that of the second mold 42 installed in the second mold holder 15 Since the first mold 41 installed in the first mold holder 14 on the first platen 11 has a large vertical upward movement distance, the first mold 41 and the second mold 42 can also be clamped.

The first opening 107 of the first block 114 and the second opening 108 of the second block 115 each extend in the horizontal direction. When the force point (the first shaft 109) that is one end of the arm 104 moves between the top dead center and the bottom dead center, the first bearing member 105 moves in the horizontal direction in the first opening 107, and the second bearing member 106 moves in the horizontal direction in the second opening 108. At this time, the horizontal movement distance of the first bearing member 105 in the first opening 107 when the force point (first shaft 109) of one end of the arm 104 moves between the top dead center and the bottom dead center is shown in the figure. L1 shown in the schematic side view of 23, the horizontal movement distance of the second bearing member 106 in the second opening 108 becomes L2 shown in the schematic side view of FIG. 24, and the relationship of L1>L2 is established .

In addition, as described above, the elastic member 113 is arranged in the first concave portion 118a of the outer plate 118, the convex portion 116a of the inner plate 116 and the second concave portion 118b of the outer plate 118 are fitted via the spacer 117, and the inner plate 116 and the outer The plates 118 are joined. By adopting such a structure, the second block 115 and the intermediate plate 91 can be linked via the elastic member 113. Therefore, in this case, the support member 51 is provided on the first mold 41 and the second mold 42 respectively, even if the thickness of the support member 51 provided on the first mold 41 is the same as the support member 51 provided on the second mold 42 There is a deviation between the thicknesses of, and the deviation can also be adjusted by the expansion and contraction of the elastic member 113 in the vertical direction.

After that, the fluid resin 71 is cured, and the second pressing plate 12 is moved vertically downward. As a result, as shown in the schematic cross-sectional view of FIG. 25, a resin molded product 82 in which the surface of the support member 51 is sealed with the hardened resin 81 is manufactured.

The resin molded product 82 manufactured as described above is carried out from the resin molded product manufacturing apparatus 1 by the conveying mechanism 301 shown in FIG. 13. Then, the transport mechanism 301 holding the resin molded product 82 moves toward the lateral movement guide 402 along the longitudinal movement guide 403 provided in the resin sealing module 1002. Then, the transport mechanism 301 moves laterally along the lateral movement guide 402 to the storage module 1003 of the resin molding system 1000 of the embodiment. The transport mechanism 301 that has reached the storage module 1003 moves toward the resin molded product storage device 203 along the longitudinal movement guide 404 provided in the storage module 1003. After that, the resin molded product 82 is stored in the resin molded product storage device 203 from the conveying mechanism 301.

In addition, for example, as shown in the schematic plan views of FIGS. 26 and 27, the resin molded product manufacturing apparatus 1 of the embodiment may include: a first ball screw 100a and a second ball screw 100b so that the second platen 12 can be placed on the lead It is configured to move in the vertical direction; the first servo motor 141a is configured to drive the first ball screw 100a; and the second servo motor 141b is configured to drive the second ball screw 100b. Here, in order to drive the first ball screw 100a and the second ball screw 100b, a conveyor belt is set up between the first ball screw 100a and the first servo motor 141a, and between the second ball screw 100b and the second servo motor 141b When the conveyor belt is installed between, from the viewpoint of suppressing the enlargement of the resin molded product manufacturing apparatus 1 of the embodiment, for example, as shown in FIG. 26, the direction 1100 in which the first ball screw 100a and the second ball screw 100b are arranged is preferable. It crosses the direction 1200 in which the arm 104 extends, and the first servo motor 141 a and the second servo motor 141 b are located on the same side with respect to the second pressure plate 12.

In addition, as a modified example of the resin molding system of the embodiment shown in FIG. 13, an embodiment in which the storage module 1003 is not used and the resin molded product storage device 203 is installed in the supply module 1001 can be exemplified. In this case, one transport mechanism can feed the support member 51 from the supply module 1001 to the resin sealing module 1002, and store the resin molded product 82 manufactured by the resin molded product manufacturing apparatus 1 in the supply module 1001 again. The resin molded product storage device 203.

In addition, as a modification of the resin molding system of the embodiment shown in FIG. 13, an embodiment in which the resin material supply device 202 is installed in the storage module 1003 can also be exemplified. In this case, a conveying mechanism not shown can supply the previously cut release film 52 and the resin material 61 from the storage module 1003 to the resin molded product manufacturing apparatus 1 provided in the resin sealing module 1002. And after the resin molded product 82 is manufactured by the resin molded product manufacturing apparatus 1, this conveying mechanism can recover the release film 52.

According to the resin molded product manufacturing apparatus 1 of the embodiment described above, it is not necessary to use a crank linkage mechanism. Therefore, compared with the resin molding apparatus described in Patent Document 1, the structure of the apparatus can be simplified and the usable can be expanded. Pressure range.

The embodiments have been described as above, but the appropriate combination of the structures of the respective embodiments is also predetermined from the beginning.

The embodiments of the present invention have been described, but the embodiments disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown by the scope of the patent application, and intends to include the meaning equivalent to the scope of the patent application and all changes within the scope.

Industrial Applicability According to the embodiments disclosed herein, it is possible to provide a resin molded product manufacturing apparatus, a resin molding system, and a resin molded product manufacturing method.

1‧‧‧Manufacturing equipment for resin molded products 11‧‧‧The first pressure plate 12‧‧‧The second pressure plate 13‧‧‧The third pressure plate 14‧‧‧The first mold holder 15‧‧‧The second mold holder 17‧‧ ‧Type pressure frame 18‧‧‧The first pressure plate heater 19‧‧‧The second pressure plate heater 21‧‧‧The first plate 22‧‧‧The first heat insulation member 23‧‧‧The first heating plate 24‧‧‧ The first side wall 25‧‧‧The first mold holder heater 31‧‧‧The second plate 32‧‧‧The second heat insulation member 33‧‧‧The second heating plate 34‧‧‧The second side wall 35‧‧‧The second Mold holder heater 41‧‧‧First mold 42‧‧‧Second mold 43‧‧‧Mold cavity 51‧‧‧Supporting member 51a‧‧‧Semiconductor substrate 51b‧‧‧Semiconductor wafer 52‧‧‧Release film 61 ‧‧‧Resin material 71‧‧‧Flowable resin 81‧‧‧Hardened resin 82‧‧‧Resin molded product 91‧‧‧Intermediate plate 100‧‧‧Ball screw 100a‧‧‧The first ball screw 100b‧‧‧ 2 Ball screw 101‧‧‧linear motion block 102‧‧‧linear motion guide 103‧‧‧lifting plate 104‧‧‧arm 105‧‧‧first bearing member 106‧‧‧second bearing member 107‧‧‧first Opening 108‧‧‧Second opening 109‧‧‧First shaft 110‧‧‧Second shaft 111‧‧‧ Third shaft 113‧‧‧Elastic member 114‧‧‧First block 115‧‧‧Second Block 116‧‧‧Inside plate 116a‧‧‧Protrusion 117‧‧‧Separator 118‧‧Outside plate 118a‧‧‧The first recess 118b‧‧‧The second recess 119‧‧‧The third block 120‧‧‧ Lower linear motion guide 121‧‧‧3rd bearing member 122‧‧‧Connecting member 123‧‧‧Lower linear motion guide 124‧‧‧Lower linear motion block 130‧‧‧Servo motor 141a‧‧‧No. 1 Servo motor 141b‧‧‧Second servo motor 150‧‧‧Linear motion guide 160‧‧‧Linkage mechanism 201‧‧‧Supporting member supply device 202‧‧‧Resin material supply device 203‧‧‧Resin molded product storage device 301 ‧‧‧Conveying mechanism 401‧‧‧Longitudinal movement guide 402‧‧‧Horizontal movement guide 403‧‧‧Vertical movement guide 404‧‧‧Vertical movement guide 1000‧‧‧Resin molding system 1001‧‧‧Supply module 1002‧‧‧ Resin sealed module 1003‧‧‧Receiving module 1100, 1200‧‧‧Direction H, H/2, L1, L2‧‧‧Movement distance L, L/2‧‧‧Linear distance

FIG. 1 is a schematic elevation view of the main part of the manufacturing apparatus of the resin molded article of embodiment. Fig. 2 is a schematic side perspective view of the main part of the manufacturing apparatus of the resin molded article of the embodiment shown in Fig. 1. 3 is a schematic perspective perspective view of the main part of the manufacturing apparatus of the resin molded article of the embodiment shown in FIG. 1. 4 is an enlarged schematic perspective perspective view of the main part of the manufacturing apparatus of the resin molded article of the embodiment shown in FIG. 3. Fig. 5 is a schematic enlarged cross-sectional view taken along V-V in Fig. 4. 6 is a schematic side perspective view of the main part of the manufacturing apparatus of the resin molded article of the embodiment shown in FIGS. 2 to 4. Fig. 7 is a schematic perspective perspective view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article of the embodiment. Fig. 8 is a schematic side perspective view illustrating a part of the manufacturing steps of the method of manufacturing a resin molded article of the embodiment. Fig. 9 is a schematic perspective view of the first mold holder and the second mold holder shown in Figs. 7 and 8. 10 is a schematic cross-sectional view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article according to the embodiment. 11 is a schematic cross-sectional view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article of the embodiment. Fig. 12 is a schematic cross-sectional view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article of the embodiment. Fig. 13 is a schematic plan view of the resin molding system of the embodiment. FIG. 14 is a schematic cross-sectional view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article of the embodiment. 15 is a schematic cross-sectional view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article of the embodiment. FIG. 16 is a schematic perspective perspective view illustrating a part of the manufacturing steps of the method of manufacturing a resin molded article of the embodiment. FIG. 17 is a schematic side perspective view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article of the embodiment. FIG. 18 is an enlarged schematic perspective perspective view of the main part of the manufacturing apparatus of the resin molded product of the embodiment shown in FIG. 17. 19 is a schematic perspective perspective view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article of the embodiment. Fig. 20 is a schematic side perspective view illustrating a part of the manufacturing steps of the method of manufacturing a resin molded article of the embodiment. FIG. 21 is a schematic perspective perspective view enlarging the main part of the manufacturing apparatus of the resin molded article of the embodiment shown in FIG. 20. 22 is a schematic cross-sectional view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article of the embodiment. 23 is a schematic side view illustrating the movement distance of the first bearing member in the first opening when the point of force as one end of the arm moves between the top dead center and the bottom dead center. 24 is a schematic side view illustrating the movement distance of the second bearing member in the second opening when the force point as one end of the arm moves between the top dead center and the bottom dead center. FIG. 25 is a schematic cross-sectional view illustrating a part of the manufacturing process of the method of manufacturing a resin molded article of the embodiment. FIG. 26 is a schematic plan view illustrating an example of the positional relationship between the ball screw and the servo motor of the manufacturing apparatus of the resin molded product of the embodiment. FIG. 27 is a schematic plane illustrating an example of the positional relationship between the ball screw and the servo motor of the manufacturing apparatus of the resin molded product of the embodiment.

1‧‧‧Manufacturing equipment for resin molded products

11‧‧‧The first pressure plate

12‧‧‧Second pressing plate

13‧‧‧The third pressure plate

17‧‧‧Type compression frame

91‧‧‧Intermediate plate

100‧‧‧Ball screw

101‧‧‧Linear motion block

102‧‧‧Linear Motion Guide

103‧‧‧Lift board

150‧‧‧Linear motion guide

Claims (10)

A manufacturing apparatus for a resin molded product, characterized by comprising: a first press plate; a pair of press frames, which extend vertically below the first press plate and are fixed to the first press plate at intervals in the horizontal direction. 1 pressing plate; second pressing plate, spaced apart in the vertical direction and facing the first pressing plate; intermediate plate between the first pressing plate and the second pressing plate; lifting mechanism to make the second pressing plate It is configured to be movable in the vertical direction; and an arm having one end connected to the second pressure plate and extending in one direction; a first bearing member and a second bearing are sequentially mounted from the one end to the other end of the arm Member and a third bearing member, a first block is attached to the one end of the arm via the first bearing member, and the first block is connected to the second pressure plate and is fixed to the second On the pressure plate, with the movement of the second pressure plate in the vertical direction, the one end of the arm can be at the top dead center with the center of the third bearing member at the other end of the arm as the fulcrum point It moves in a circular arc between the bottom dead center and the bottom dead center, wherein the third bearing member is mounted on the third block, and the third block is fixed, between the one end and the other end of the arm , A second piece is installed via the second bearing member, so that the intermediate plate and the second piece are interlocked between the intermediate plate and the A linkage mechanism is connected between the second block, and the intermediate plate can be moved in the vertical direction via the linkage mechanism and the second block along with the movement of the arm, and the arm is mounted In the pressing frame, the first block has a first opening, the second block has a second opening, the first opening and the second opening extend in a horizontal direction, and When the one end of the arm moves between the top dead center and the bottom dead center, the first bearing member moves in the horizontal direction in the first opening, and the second bearing The member moves in the horizontal direction in the second opening. The apparatus for manufacturing a resin molded product according to claim 1, wherein the linkage mechanism includes: a lifting plate fixed to the intermediate plate so as to extend vertically below the intermediate plate; and a straight line The motion guide is installed between the lifting plate and the pressing frame, and includes a linear motion guide extending in the vertical direction and a linear motion block that can move in the vertical direction relative to the linear motion guide The second block is connected to the lifting plate, and with the movement of the arm, the intermediate plate can be moved in the vertical direction via the lifting plate. The manufacturing device for resin molded products as described in the second item of the scope of patent application, wherein When the one end of the arm moves between the top dead center and the bottom dead center, the moving distance of the lifting plate is different from the moving distance of the second pressing plate. The apparatus for manufacturing a resin molded product as described in the first clause of the patent application, wherein the connecting member is configured to connect the first block and the second pressing plate. The apparatus for manufacturing a resin molded product according to the first of the scope of patent application, wherein the lifting mechanism includes a first ball screw and a second ball screw so that the second pressure plate can move in the vertical direction The first servo motor is configured to drive the first ball screw; and the second servo motor is configured to drive the second ball screw; the first ball screw and the second ball screw The arrangement direction crosses the direction in which the arm extends, and the first servo motor and the second servo motor are located on the same side with respect to the second pressing plate. The apparatus for manufacturing a resin molded product according to the first item of the patent application, wherein the arm extends in a horizontal direction at an intermediate point between the top dead center and the bottom dead center. The manufacturing apparatus of resin molded products as described in the 6th item of the scope of patent application, wherein When the one end of the arm moves between the top dead center and the bottom dead center, the horizontal movement distance of the first bearing member in the first opening is longer than that of the second bearing The moving distance of the member in the horizontal direction in the second opening is long. The apparatus for manufacturing a resin molded product according to any one of the claims 1 to 7, wherein when the one end of the arm moves between the top dead center and the bottom dead center At this time, the direction of movement of the first bearing member in the first opening is reversed. A resin molding system is characterized by including: a resin molding product manufacturing apparatus as described in any one of items 1 to 8 of the scope of patent application. A method for manufacturing a resin molded product, which is a method for manufacturing a resin molded product using the resin molded product manufacturing apparatus described in any one of the scope of the patent application item 1 to item 8, is characterized in that it includes: The step of mounting a first mold on the intermediate plate; a step of mounting a second mold on the second platen; and a step of clamping the first mold and the second mold.

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