TW201914720A - Cable supporting mechanism - Google Patents

Abstract

A cable supporting mechanism, one end of a cable being fixed to a bottom frame, the cable supporting mechanism comprising a fixing module, a follower module and a support connection module. the fixing module is fixed to the bottom frame; the follower module is fixed to the cable and can follow the movement of the cable; and the support connection module is connected to the fixing module and the follower module respectively so as to support the weight of the follower module and the cable. When a workbench moves, multiple layers of cables follow and are supported in a vertical direction with no friction entirely, and the vertical space is not occupied, leaving more space for the cable itself; at the same time, the unnecessary mechanism in the original design is removed, and the structure is simplified, improving the maintainability and reliability of the cable supporting mechanism.

Description

Cable support mechanism and workbench including it

The present invention relates to the field of lithography apparatus, and in particular to a cable support mechanism.

In the lithography machine device, as the requirements for the characteristic line width of the lithography machine continue to increase, the table needs to realize high-speed, high-precision movement.

There are a large number of electrical cables and water in the workbench of the lithography machine, and gas pipelines are used to support the realization of the functions of a large number of motors, sensors, cooling plates and pneumatics in the workbench. Therefore, it is necessary to provide stable support for a large number of cables with specific movement trajectories in a limited space, so that they can always move steadily and quickly with the table during high-speed and high-frequency movements. During the movement of the workbench, these cables and pipelines will follow the workbench for synchronous reciprocating motion. During this process, the U-shaped cable will appear in a large-area suspended state at its limit position, so it needs corresponding support. Structure to provide support so that the cable does not interfere with the friction of the bottom frame, and the conventional cable bracket structure is that the bracket is arranged on both sides of the cable, the brackets are disconnected, there is no direct connection, and the cable bracket structure The structure of the rotating shaft is too thin and too small, and the rigidity of the entire cable support structure is not enough, resulting in the problem that the cable will still rub against the bottom after installation.

The purpose of the present invention is to provide a cable support mechanism to solve the problem that the cable support structure in the conventional technology is too soft and the rigidity is insufficient, resulting in the cable still rubbing against the bottom frame after installation.

In order to achieve the above object, the present invention provides a cable support mechanism, one end of the cable is fixed on the bottom frame, the cable support mechanism includes a fixed module, a follower module and a support adapter module; The fixed module is fixed on the bottom frame; the follower module is fixed on the cable and can follow the cable; the support adapter module is connected to the fixed module and the The follower module supports the weight of the follower module and the cable.

Optionally, the fixed module is a fixed wire clamp, the follower module is a follower wire clamp, and the support adapter module includes a first link, a second link, and a link connector; Two ends of the first link are respectively connected to the fixed wire clip and one end of the second link, and the link connecting piece is connected to the follower wire clip and the other end of the second link.

Optionally, the follower clamp is fixed at the center of gravity of the cable.

Optionally, the follower wire clamp has an adjusting screw hole for receiving an adjusting bolt, and the adjusting bolt is used for adjusting the vertical position of the follower wire clamp relative to the bottom frame.

Optionally, the connecting rod connecting member has a boss, and the boss is used to adjust the vertical position of the following wire clamp in cooperation with the adjusting bolt.

Optionally, the connecting rod connector has a fixing screw hole, and the fixing screw hole is used to receive a fixing bolt. When the adjusting bolt adjusts the vertical position of the follower clamp, the fixing bolt The connecting rod connecting piece is fixed on the following wire clamp.

Optionally, the connecting rod connector has a first adjustable dimension along the cable extension direction from the fixed module to the follower module and a second adjustable dimension perpendicular to the cable extension direction.

Optionally, the fixing wire clamp includes a first fixing frame and a second fixing frame; the first fixing frame connects the first link and the second fixing frame, and the second fixing frame is fixed at the bottom Frame.

Optionally, the first fixing frame has a rectangular boss, the first fixing frame and the first connecting rod are connected by a fixed-end adapter block, and the fixed-end adapter block is provided with a rectangular groove interface , The rectangular groove interface cooperates with the rectangular boss of the first fixing frame.

Optionally, the second fixing frame is provided with a first fixing frame connection interface and a second fixing frame ground connection interface, the second fixing frame is connected to the first fixing frame through the first fixing frame connection interface, At the same time, the second fixing frame is fixed on the bottom frame through the second fixing frame ground connection interface.

Optionally, the position of the first link facing the first fixing frame has an indented structure, and / or the position of the first fixing frame facing the first link has an indented structure.

The invention also provides a workbench, including the cable support mechanism as described above.

In the cable support mechanism and workbench provided by the present invention, the cable support mechanism includes a fixed module, a follower module and a support adapter module; the fixed module is fixed on the bottom frame; The follower module is fixed on the movable part of the cable; the support adapter module connects the fixed module and the follower module to support the follower module and the cable, respectively. The follower module is fixed at the center of gravity of the entire suspended cable. During the entire movement of the cable, the follower module is first in a stationary state, and then moves in a circular and vertical direction, and finally moves horizontally Linear motion in the direction. In the original cable support mechanism, the bracket is arranged on both sides of the cable, the middle is disconnected, there is no direct connection, and the structure of the rotating shaft is too thin and too small, and the bearings at both ends of the bracket in the present invention are directly connected to a thicker rotating shaft The vertical stiffness of the structure is significantly improved to support the cable and prevent the cable from rubbing against the bottom frame. The multi-layer cable is supported in the vertical direction without friction and support, does not occupy the vertical space, and reserves more space for the cable itself. At the same time, unnecessary mechanisms in the original design are removed, the structure is simplified, and the maintainability and reliability of the cable support mechanism are improved.

The specific embodiments of the present invention will be described in more detail below with reference to schematic diagrams. The advantages and features of the present invention will be clearer from the following description and patent application scope. It should be noted that the drawings are in a very simplified form and all use inaccurate proportions, which are only used to conveniently and clearly assist the purpose of explaining the embodiments of the present invention.

Example 1

As shown in FIG. 1, the present invention provides a cable support mechanism 15, which is used to support the gravity of the U-shaped cable 13 during the movement of the cable with the workbench 12 so that the cable does not contact the bottom frame 11 Disturb friction. The U-shaped cable 13 includes multiple layers of cables and tubes. One end of the U-shaped cable 13 is fixed to the bottom frame 11 by a cable fixing clip 16, and the other end is connected to the workbench 12 by a moving cable clip 14. The workbench 12 performs high-speed, high-precision movement on the magnetic steel matrix of the moving device. The U-shaped cable 13 follows the workbench 12 to move together.

Referring to FIGS. 1 to 3, the cable support mechanism 15 includes a fixed module, a follower module, and a support adapter module; the fixed module is fixed on the bottom frame 11; the follower The module is fixed on the movable part of the U-shaped cable 35; the support adapter module connects the fixed module and the follower module respectively to support the follower module and the U-shaped wire线 35.

As shown in FIG. 3, the fixed module is a fixed wire clamp 31, the follower module is a follower wire clamp 36, and the follower wire clamp 36 clamps the U-shaped cable 35 and is relatively Jia is fixed at the center of gravity of the entire suspended U-shaped cable 35 to better support the U-shaped cable 35. As shown in the trajectory 34 of the follower clip in FIG. 3, during the entire movement of the U-shaped cable 35 following the table 12, the follower clip 36 is first in a stationary state, that is, the follower clip 36 is held at the left end position of the motion track 34; then, the follower clamp 36 performs a circular and vertical motion along the motion track 34, and finally performs a linear motion along the horizontal direction, which corresponds to the rightmost side of the motion track 34 Straight part. The support adapter module includes a first link 32, a second link 33, and a link connector 37; two ends of the first link 32 are respectively connected to the fixed wire clamp 31 and the second link At one end of the rod 33, the link connector 37 connects the follower clip 36 and the other end of the second link 33.

As shown in FIG. 2, the XY plane represents a horizontal plane, Y is the first direction of motion in the horizontal plane, and X is the second direction of motion in the horizontal plane. The first and second directions of motion are usually defined according to the direction of motion of the table 12, And the first and second movement directions are usually perpendicular to each other. In order to facilitate the movement of the U-shaped cable 35 following the table, the extending directions of the two extending arms of the U-shaped cable 35 are generally set to be parallel to the Y direction. The position of the following wire clamp 36 in the XY plane can be determined according to the establishment of the following parameter equation:

R * θ + (Y-Rsin (θ)) = L / 2 (1)

Rcos (θ) + X = R (2)

Where: R is the radius of gyration of the U-shaped cable 35, and θ is the angle value of ∠ABC; Point A can be regarded as the position of the center of gravity of the entire suspended U-shaped cable 35, or the position of the following clamp 36, ( Y, X) are the coordinates of point A, point B is the center of the semicircular part of U-shaped cable 35, and point C is the straight line that passes point B and is perpendicular to the Y axis and the U-shaped cable 35 is fixed with a fixed clamp 31 The intersection where an extension arm intersects. L is the total length of the cable hanging section, which corresponds to the length between the cable fixing clip 16 and the moving clip 14 in Figure 1, point D is the connection point of the first link 32 and the second link 33, E The point is the fixed point of the clip (that is, the position corresponding to the fixed clip 31), A, D, and E are hinge connections. Adjust the position of the E point to choose the fixed clip 31 to be fixed on the inside or outside of the U-shaped cable 35 or the cable Above, the inside refers to the side near the space between the two extension arms of the U-shaped cable 35, O is the fixed end position of the U-shaped cable 35 (that is, corresponds to the cable fixing clip 16 in FIG. 1 position).

Equation (1) indicates that the sum of the lengths of the arcs AC and CO is half of L, ensuring that point A is located on the center of gravity of the cable, thereby establishing the relationship between Y and θ; equation (2) indicates the projection length of line AB on line BC plus The absolute value of the X coordinate of point A is equal to the radius of gyration R, establishing the relationship between X and θ; the values of R, L and other parameters can be adjusted at any time according to the actual working situation.

Referring to FIG. 3, with the continuous change of the parameter θ from 0 to π, the trajectory 34 where point A is in the case of a circular and linear mixed motion can be accurately simulated. The simulation of the trajectory 34 of the follow-up wire clip in this embodiment can be obtained by combining the function of drawing a trajectory according to a parameter equation in Solidworks sketch drawing.

As shown in FIG. 3, the length of the first link 32 can be set according to actual needs, and the length of the first link 32 plus the height of the fixed clamp 31 and the width of the U-shaped cable 35 in the X direction The half of the sum should be less than the turning diameter of the U-shaped cable 35; the length of the second link 33 can also be set according to actual needs, as long as the length meets the working condition of the cable support mechanism 15 at the limit position, ie During the entire movement of the U-shaped cable 35, the second link 33 can follow the U-shaped cable 35 together, and does not interfere with the movement of the U-shaped cable 35. Further, the cross-sections of the first link 32 and the second link 33 can be appropriately increased to increase the overall rigidity of the cable support mechanism 15.

Referring to FIG. 4, which is a schematic diagram of a specific structure of the present invention, the U-shaped cable 42 passes through the follower clamp 41, where the follower clamp 41 adopts a ring structure, and is sheathed on the outer side of the cable 42. The position of the movable wire clamp 41 on the U-shaped cable 42 is arranged according to the actual movement trajectory of the U-shaped cable 42, and is preferably fixed on the center of gravity of the suspended section of the cable, and is located inside the U-shaped cable 42. The second link 43 and the follower clamp 41 are connected by a link connector 52, one end of the first link 44 is connected to the second link 43, and the other end is connected to the fixed clamp 48 is connected by a fixed-end adapter 45.

Further, referring to FIG. 5, which is a detailed schematic diagram of the follower clamp of the cable support mechanism, the follower clamp 41 has a screw hole for receiving a support height adjusting bolt 51, the support height adjusting bolt 51 is used to adjust the position of the follower clamp 41 in the vertical direction. This design is simple and effective to ensure the reliability of the main function of the entire structure, that is, to ensure that the U-shaped cable 42 does not rub against the bottom frame 11, even if the bracket structure undergoes a certain vertical displacement, it can still be supported by the support height adjustment bolt 51 Raise the vertical height of the follower clamp 41 to ensure the realization of the main functions.

Furthermore, the connecting rod connector 52 has a boss for supporting the height adjusting bolt 51 to adjust the height of the follower clamp 41; at the same time, it also has a waist counterbore for receiving the connecting rod connector for fixing The bolt 53, when the supporting height adjusting bolt 51 adjusts the height of the follower clamp 41, the connecting rod connector 52 is fixed to the follower clamp 41 by the connecting rod connecting member fixing bolt 53.

Furthermore, as shown in FIG. 6, it is a detailed schematic diagram of the connecting rod connector 52. The connecting rod connector 52 is an adjustment ring for the overall structure of the cable support mechanism 15. The adjustment ring has two Adjustable sizes are the first size 521 of the adjustment ring and the second size 522 of the adjustment ring, which can be adjusted by adjusting the first size 521 of the adjustment ring and / or the second size 522 of the adjustment ring. The sizes of the first size 521 and the second size 522 of the adjusting ring can be adjusted according to actual conditions to meet the working conditions.

7 is a detailed schematic diagram of the fixed wire clamp, the fixed wire clamp 48 includes a first fixing frame 46 and a second fixing frame 47, the first fixing frame 46 is used to connect the first connecting rod 44 and The second fixing frame 47, the first fixing frame 46 has a rectangular boss, the first fixing frame 46 and the rectangular boss can be integrally formed or connected by bolts, the first fixing frame 46 and all The first connecting rod 44 is connected by a fixed-end adapter block 45. Preferably, the first fixed frame 46 and the fixed-end adapter block 45 can be connected by a bolt 461. The fixed-end adapter block 45 is provided with a rectangular groove interface, which cooperates with the rectangular boss of the first fixing frame 46 to ensure the vertical accuracy of the cable support mechanism 15. The fixed-end connecting block 45 is a rotating shaft of the wire clip, and is an important rotating part connecting the first connecting rod 44 and the first fixing frame 46. Since this design does not occupy vertical space, a thicker wall thickness can be used in this design , Bearings with larger dimensions and stronger load capacity, such as deep groove ball bearings, etc., to increase the strength and stability of the rotating connection; the second fixing frame 47 is provided with a first fixing frame connection interface 471 and a second A fixing frame ground connection interface 472, the second fixing frame 47 is connected to the first fixing frame 46 through a first fixing frame connection interface 471, and at the same time, it is fixed to the bottom frame 11 through a second fixing frame ground connection interface 472 Above, further, the size and shape of the first fixing frame connection interface 471 should match the size and shape of the first fixing frame 46, preferably, the inner wall of the first fixing frame connection interface 471 The size should be larger than the outer wall size of the first fixing frame 46; preferably, the second fixing frame ground connection interface 472 may be a screw hole, and the second fixing frame 47 is fixed on the bottom frame 11 by bolts.

Example 2

Referring to FIG. 8, this embodiment optimizes and modifies some details of the cable support mechanism 15 in Embodiment 1. FIG. 9 is a plan view of the cable support mechanism 15 after the refinement. The shape of the first connecting rod 61 has been adjusted, because at the extreme position, the first connecting rod 61 may interfere with the fixed wire clip 64, so the first connecting rod is maintained on the premise of maintaining aesthetics and structural strength The end of 61 near the fixing clip 64 is made into a shape with a concave space toward the fixing clip 64, so that when the first link 61 moves toward the fixing clip 64 to the limit position, the fixing clip 64 can be accommodated in the concave space without coming into contact with the first link 61. In addition, in order to reduce the weight of the support structure away from the support point, the width of the second link 62 in the horizontal direction is reduced under the premise of ensuring the strength, and the aesthetics of the overall structure is also improved. In actual work, when the follower clamp moves to the circle, the triangular position 63 shown may interfere with the cable, and here the structure has little effect on the overall strength of the mechanism, so it can be cut off properly to reduce the load and avoid interference. .

As shown in FIG. 10, another connection method of the first connecting rod 61 and the fixed wire clip 64 is provided, that is, a concave structure is also formed on the inner side of the fixed wire clip 64, so that it can be maximized at the extreme position To a minimum, interference between the fixed wire clip 64 and the first link 61 is avoided.

Example 3

If the entire motion module has a large space requirement, it is desirable to minimize the space occupied by the cable support mechanism. As shown in FIG. 11, the trajectory of the follower clip 34 can be simulated on the bottom frame according to the parameters of point A in Example 1. A groove 74 is provided on the surface of the surface 75, and a suitable ball 73 is provided at the lower part of the follower clip 71 at the middle position of the U-shaped cable 72, so that the follower clip 71 on the U-shaped cable 72 moves from the lower part The rolling ball 73 sliding in the groove 74 provides vertical support, and at this time, there is no need to fix the module and the support adapter module.

An embodiment of the present invention further provides a workbench, including the cable support mechanism described in the foregoing embodiment. For a detailed description of the cable support mechanism, see the foregoing embodiment for details, and details are not described here.

In summary, in the cable support mechanism provided by the present invention, the cable support mechanism includes a fixed module, a follower module and a support adapter module; the fixed module is fixed on the bottom frame The follower module is fixed on the movable part of the cable; the support adapter module connects the fixed module and the follower module to support the follower module and the Described cable. The follower module is fixed at the center of gravity of the entire suspended cable. During the entire movement of the cable, the follower module is first in a stationary state, and then moves in a circular and vertical direction, and finally moves horizontally Linear motion in the direction. In the original cable support mechanism, the brackets are arranged on both sides of the cable, the middle is disconnected, and cannot be directly connected, and the structure of the rotating shaft is too thin and too small. In the present invention, the bearings at both ends of the bracket are directly connected to a thicker rotating shaft, The vertical stiffness of the structure is significantly improved to support the cable and prevent the cable from rubbing against the base frame. The multi-layer cable is supported in the vertical direction without friction and support, does not occupy the vertical space, and reserves more space for the cable itself. At the same time, unnecessary mechanisms in the original design are removed, the structure is simplified, and the maintainability and reliability of the cable support mechanism are improved. At the same time, it can ensure that the cable supported by the bracket has the lowest adverse impact on the whole during the high-speed movement of the worktable, which directly eliminates the interference signal source of the motion control process of some worktables, making the movement control of the sports table more simple and reliable. .

The above are only preferred embodiments of the present invention, and do not limit the present invention in any way. Any person with ordinary knowledge in the technical field of the subject who does not deviate from the technical means of the present invention makes any form of equal replacement or modification of the technical means and technical contents disclosed by the present invention, which belongs to the technology without departing from the present invention The content of the means is still within the scope of patent application of the present invention.

11, 75‧‧‧ bottom frame

12‧‧‧Workbench

13, 35, 42, 72 ‧‧‧ U-shaped cable

14‧‧‧Mobile clamp

15‧‧‧Cable support mechanism

16‧‧‧Cable fixing clip

31, 48, 64‧‧‧Fixed clamp

32, 44, 61‧‧‧ First link

33, 43, 62 ‧‧‧ second link

34‧‧‧Following movement track

36, 41, 71‧‧‧ Follow clip

37、52‧‧‧Link connecting piece

45‧‧‧fixed end adapter

46‧‧‧ First fixing frame

461‧‧‧bolt

47‧‧‧Second fixing frame

471‧‧‧ First fixed frame connection interface

472‧‧‧Second fixing frame ground connection interface

51‧‧‧Support height adjustment bolt

521‧‧‧ Adjusting ring first size

522‧‧‧Adjustment ring second size

53‧‧‧Connecting rod fixing bolt

63‧‧‧ Triangular position

73‧‧‧ball

74‧‧‧groove

Figure 1 is a schematic diagram of the sports workbench and U-shaped cable;

Figure 2 is a schematic diagram of the motion parameter equation of the motion table and U-shaped cable;

Figure 3 is a schematic diagram of the simulation of the trajectory of the follower clip;

FIG. 4 is a schematic structural diagram of a cable support mechanism according to Embodiment 1 of the present invention;

FIG. 5 is a schematic diagram of the structure of the end of a follow-up wire clamp according to Embodiment 1 of the present invention;

FIG. 6 is a schematic structural diagram of a connecting rod connector according to Embodiment 1 of the present invention;

FIG. 7 is a schematic diagram of the structure of the fixed wire clamp according to Embodiment 1 of the present invention;

FIG. 8 is a schematic structural diagram of a cable support mechanism according to Embodiment 2 of the present invention;

9 is a plan view of a cable support mechanism according to Embodiment 2 of the present invention;

FIG. 10 is a schematic diagram of a connection structure of a fixed wire clamp and a first connecting rod in Embodiment 2 of the present invention;

FIG. 11 is a side view of the cable cut at the follower clamp in Embodiment 3 of the present invention.

Claims (12)

A cable support mechanism, one end of a cable is fixed on a bottom frame, wherein: the cable support mechanism includes a fixed module, a follower module, and a support adapter module; the fixed module is fixed on the bottom frame; The follower module is fixed on the cable and can follow the cable; the support adapter module connects the fixed module and the follower module to support the weight of the follower module and the cable, respectively . The cable support mechanism as described in item 1 of the patent application scope, wherein: the fixed module is a fixed wire clamp, the follower module is a follower wire clamp, and the support adapter module includes a first link, a Two connecting rods and connecting rod connectors; both ends of the first connecting rod are respectively connected to the fixed wire clamp and one end of the second connecting rod, the connecting rod connecting member connects the follower wire clamp and the second connecting rod another side. The cable support mechanism as described in item 2 of the patent application scope, wherein: the following clamp is fixed at the center of gravity of the cable. The cable support mechanism as described in item 2 of the patent application scope, wherein: the follower clamp has an adjustment screw hole for receiving an adjustment bolt, and the adjustment bolt is used for adjusting the follower clamp relative to The vertical position of the bottom frame. The cable support mechanism according to item 4 of the patent application scope, wherein: the connecting rod connector has a boss, and the boss is used to adjust the vertical position of the follower clamp with the adjustment bolt. The cable support mechanism as described in item 5 of the patent application scope, wherein: the connecting rod connector has a fixing screw hole, the fixing screw hole is used to receive a fixing bolt, the fixing bolt adjusts the follower line at the adjusting bolt When the clamp is in the vertical position, fix the connecting rod connector on the follower clamp. The cable support mechanism according to item 6 of the patent application scope, wherein: the connecting rod connector has a first adjustable dimension along the extending direction of the cable from the fixed module to the follower module and is perpendicular to the line The second adjustable dimension of the cable extension direction. The cable support mechanism according to item 1 of the patent application scope, wherein: the fixed wire clamp includes a first fixing frame and a second fixing frame; the first fixing frame connects the first link and the second fixing frame, the first Two fixing frames are fixed on the bottom frame. The cable support mechanism according to item 8 of the patent application scope, wherein: the first fixing frame has a rectangular boss, the first fixing frame and the first link are connected by a fixed end adapter block, and the fixed end The adapter block is provided with a rectangular groove interface, and the rectangular groove interface cooperates with the rectangular boss of the first fixing frame. The cable support mechanism according to item 8 of the patent application scope, wherein: the second fixing frame is provided with a first fixing frame connection interface and a second fixing frame ground connection interface, and the second fixing frame is provided by the first The fixing frame connection interface is connected to the first fixing frame, and at the same time, the second fixing frame is fixed on the bottom frame through the second fixing frame ground connection interface. The cable support mechanism according to item 8 of the patent application scope, wherein: the position where the first link faces the first fixing frame has a concave structure, and / or the first fixing frame faces the first link The location has a concave structure. A workbench, comprising: the cable support mechanism as described in any one of claims 1 to 11.