TW201913236A - Flexible circuit board and manufacturing method thereof - Google Patents
Flexible circuit board and manufacturing method thereof Download PDFInfo
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- TW201913236A TW201913236A TW106129374A TW106129374A TW201913236A TW 201913236 A TW201913236 A TW 201913236A TW 106129374 A TW106129374 A TW 106129374A TW 106129374 A TW106129374 A TW 106129374A TW 201913236 A TW201913236 A TW 201913236A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/054—Continuous temporary metal layer over resist, e.g. for selective electroplating
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
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- Microelectronics & Electronic Packaging (AREA)
- Structure Of Printed Boards (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
本發明是有關於一種電路板及其製作方法,且特別是有關於一種軟性電路板及其製作方法。The invention relates to a circuit board and a manufacturing method thereof, and in particular to a flexible circuit board and a manufacturing method thereof.
捲帶式晶片載體封裝板(TCP)、覆晶薄膜軟板(COF)以及軟性印刷電路板(FPC)為液晶顯示器(LCD)與有機發光顯示器(OLED)等平面顯示裝置之驅動器積體電路(IC)封裝時最常採用之軟性線路板。利用這些軟性線路板接合顯示面板與印刷電路板(PCB)時,通常係運用熱壓縮的方式,因而需提高反應溫度,以利封裝膜板之電性接腳與顯示面板上之電性接腳、或印刷電路板上之電性接腳能順利接合。Tape and Reel Chip Carrier Package (TCP), Flip-Chip Flexible Board (COF), and Flexible Printed Circuit Board (FPC) are driver integrated circuits for flat display devices such as liquid crystal displays (LCD) and organic light-emitting displays (OLED). IC) is the most commonly used flexible circuit board. When these flexible circuit boards are used to join the display panel and the printed circuit board (PCB), thermal compression is usually used. Therefore, the reaction temperature needs to be increased to facilitate the electrical pins of the packaging film board and the electrical pins on the display panel. , Or the electrical pins on the printed circuit board can be smoothly joined.
然而,隨著顯示器持續朝大尺寸的趨勢發展下,軟性線路板之尺寸也隨之增加,但是,用以製作軟性線路板上的線路的曝光機台有其尺寸上的限制,因而使軟性線路板的尺寸有其製程上的極限。因此,習知上是利用連接器將多個軟性線路板彼此接合的方式來形成大尺寸的軟性線路板。然而,使用連接器來連接多個軟性線路板上的線路會影響線路的傳輸速度,也會造成訊號的損耗。However, as the display continues to trend toward large size, the size of flexible circuit boards has also increased. However, the exposure machine used to make circuits on flexible circuit boards has its size limitations, so that flexible circuits The size of the board has its process limits. Therefore, it is conventional to form a large-sized flexible circuit board by using a connector to join a plurality of flexible circuit boards to each other. However, using a connector to connect multiple lines on a flexible circuit board will affect the transmission speed of the line and cause signal loss.
本發明提供一種軟性電路板及其製作方法,其可利用多階段的圖案化製程來形成彼此連接的多段線路於大尺寸的軟性線路板上。The invention provides a flexible circuit board and a manufacturing method thereof, which can use a multi-stage patterning process to form a plurality of segments connected to each other on a large-sized flexible circuit board.
本發明的一種軟性電路板的製作方法包括下列步驟。提供一軟性基材捲,其是由一軟性基材繞捲而成;設置一光阻層於軟性基材上;進行一第一曝光製程於第一光阻層的一第一區段上,以於第一區段上形成一第一曝光區;進行一第二曝光製程於光阻層的一第二區段上,以於第二區段上形成一第二曝光區,其中第一曝光區與第二曝光區部分重疊;進行一顯影製程於光阻層上,以移除第一曝光區以及第二曝光區而形成一圖案化光阻層;利用圖案化光阻層進行一線路製程以形成一圖案化線路層,其中圖案化線路層包括多個第一線路部、多個第二線路部以及多個接墊部分別連接於第一線路部以及第二線路部之間;以及移除圖案化光阻層。A method for manufacturing a flexible circuit board of the present invention includes the following steps. Provide a flexible substrate roll, which is formed by winding a flexible substrate; setting a photoresist layer on the flexible substrate; performing a first exposure process on a first section of the first photoresist layer, A first exposure region is formed on the first segment; a second exposure process is performed on a second segment of the photoresist layer to form a second exposure region on the second segment, wherein the first exposure The area is partially overlapped with the second exposure area; a developing process is performed on the photoresist layer to remove the first exposure area and the second exposure area to form a patterned photoresist layer; a pattern process is performed using the patterned photoresist layer To form a patterned circuit layer, wherein the patterned circuit layer includes a plurality of first circuit portions, a plurality of second circuit portions, and a plurality of pad portions connected between the first circuit portion and the second circuit portion, respectively; and In addition to the patterned photoresist layer.
在本發明的一實施例中,上述的軟性基材的一長度實質上大於500毫米(mm)。In an embodiment of the invention, a length of the flexible substrate is substantially greater than 500 millimeters (mm).
在本發明的一實施例中,上述的第一曝光區包括對應第一線路部的多個第一線路曝光圖案以及對應接墊部的多個接墊曝光圖案,其分別連接第一線路曝光圖案,第二圖案化光阻層包括對應第二線路部的多個第二線路曝光圖案。In an embodiment of the present invention, the first exposure area includes a plurality of first line exposure patterns corresponding to the first line portion and a plurality of pad exposure patterns corresponding to the pad portion, which are respectively connected to the first line exposure pattern. The second patterned photoresist layer includes a plurality of second circuit exposure patterns corresponding to the second circuit portion.
在本發明的一實施例中,上述的各第二線路曝光圖案與各接墊曝光圖案部分重疊。In an embodiment of the present invention, each of the second line exposure patterns and the pad exposure patterns partially overlap.
在本發明的一實施例中,上述的接墊部沿軟性基材的一長度方向彼此交錯配置。In one embodiment of the present invention, the pad portions are arranged alternately with each other along a length direction of the flexible base material.
在本發明的一實施例中,上述的各接墊部相較於各第一線路部呈直線時的配置往軟性基材的一側偏移一距離,各第一線路部以及各第二線路部往側彎曲並延伸,以連接各接墊部。In an embodiment of the present invention, each of the pad portions described above is offset by a distance from one side of the soft substrate compared to the arrangement when the first line portions are linear, and each of the first line portions and each second line The part is bent and extended to the side to connect each pad part.
在本發明的一實施例中,上述的各接墊部的一寬度實質上介於各第二線路部的一線寬加10微米(μm)至1000微米(μm)之間。In an embodiment of the present invention, a width of each of the pad portions is substantially between a line width of each second circuit portion plus 10 micrometers (μm) to 1000 micrometers (μm).
在本發明的一實施例中,上述的軟性電路板的製作方法更包括:形成一第一覆蓋膜於軟性基材上;以及形成一第二覆蓋膜於軟性基材上,其中第二覆蓋膜與第一覆蓋膜彼此連接,且第二覆蓋膜與第一覆蓋膜之間的一接合面位於接墊部上。In an embodiment of the present invention, the method for manufacturing a flexible circuit board further includes: forming a first cover film on the flexible substrate; and forming a second cover film on the flexible substrate, wherein the second cover film The first cover film is connected to each other, and a joint surface between the second cover film and the first cover film is located on the pad portion.
本發明的一種軟性電路板包括一軟性基材捲、一第一圖案化線路層以及一第二圖案化線路層。軟性基材捲是由一軟性基材繞捲而成且軟性基材的一長度實質上大於500毫米。圖案化線路層包括多個第一線路部、多個第二線路部以及多個接墊部分別連接於第一線路部以及第二線路部之間,其中各第一線路部分別與相應的第二線路部實質上共線並經由相應的接墊部彼此連接。。A flexible circuit board of the present invention includes a flexible substrate roll, a first patterned circuit layer and a second patterned circuit layer. The flexible substrate roll is a flexible substrate wound and a length of the flexible substrate is substantially greater than 500 mm. The patterned circuit layer includes a plurality of first circuit portions, a plurality of second circuit portions, and a plurality of pad portions connected between the first circuit portion and the second circuit portion, respectively. The two circuit portions are substantially collinear and connected to each other via corresponding pad portions. .
基於上述,本發明的實施例可在長度較長的軟性基板上分區段進行多次圖案化製程,以分別形成彼此銜接的多段曝光圖案,並據此形成圖案化線路層,因而可在不使用連接器的情況下克服製程上的限制而製作出長度較長的軟性線路板。因此,在無須使用連接器的情況下,本發明實施例的線性線路板及其製作方法可有效提升線路的傳輸速度,訊號的損耗也可因此減少。Based on the above, the embodiments of the present invention can perform multiple patterning processes in sections on a long flexible substrate to form multiple exposure patterns that are connected to each other and form a patterned circuit layer accordingly. In the case of a connector, a longer length flexible circuit board is manufactured by overcoming process limitations. Therefore, without using a connector, the linear circuit board and the manufacturing method thereof according to the embodiments of the present invention can effectively improve the transmission speed of the circuit, and the signal loss can be reduced accordingly.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.
有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之各實施例的詳細說明中,將可清楚的呈現。以下實施例中所提到的方向用語,例如:「上」、「下」、「前」、「後」、「左」、「右」等,僅是參考附加圖式的方向。因此,使用的方向用語是用來說明,而並非用來限制本發明。並且,在下列各實施例中,相同或相似的元件將採用相同或相似的標號。The foregoing and other technical contents, features, and effects of the present invention will be clearly presented in the following detailed description of each embodiment with reference to the drawings. The directional terms mentioned in the following embodiments, such as: "up", "down", "front", "rear", "left", "right", etc., are only directions referring to the attached drawings. Therefore, the directional terms used are used for illustration, but not for limiting the present invention. And, in the following embodiments, the same or similar elements will be given the same or similar reference numerals.
圖1至圖4是依照本發明的一實施例的一種軟性線路板的製作方法的流程上視示意圖。本實施例的軟性線路板的製作方法可包括下列步驟。首先,提供一軟性基材捲110,其中,軟性基材捲110是由一體成形的一軟性基材110繞捲而成。須說明的是,本實施例的圖1至圖3僅繪示軟性基材捲110展開後的部分區段的上視圖。在本實施例中,軟性基材110的長度約大於500毫米(mm),此長度是指軟性基材110的展開總長度。如此,在本實施例中,長度較長的軟性基材捲110可應用於捲對捲製程,以利於批量生產,並可應用於大尺寸的電子裝置,例如:大尺寸顯示裝置等,當然,本發明的實施例並不以此為限。FIG. 1 to FIG. 4 are schematic top views of processes of a method for manufacturing a flexible circuit board according to an embodiment of the present invention. The method for manufacturing a flexible circuit board in this embodiment may include the following steps. First, a flexible substrate roll 110 is provided. The flexible substrate roll 110 is formed by winding a flexible substrate 110 integrally formed. It should be noted that FIG. 1 to FIG. 3 of the present embodiment show only a top view of a partial section after the flexible substrate roll 110 is unfolded. In this embodiment, the length of the flexible substrate 110 is greater than 500 millimeters (mm), and this length refers to the total unfolded length of the flexible substrate 110. As such, in this embodiment, the long flexible substrate roll 110 can be applied to a roll-to-roll process to facilitate mass production, and can be applied to large-sized electronic devices, such as large-sized display devices. Of course, The embodiments of the present invention are not limited thereto.
接著,設置如圖1所示的一光阻層140a於軟性基材110上。接著,進行一第一曝光製程於光阻層140a的一第一區段R1上,以於第一區段R1上形成一第一曝光區142。第一曝光區142可如圖1所示之包括多個第一線路曝光圖案142a以及多個接墊曝光圖案142b,其分別連接第一線路曝光圖案142a。Next, a photoresist layer 140 a as shown in FIG. 1 is disposed on the flexible substrate 110. Next, a first exposure process is performed on a first segment R1 of the photoresist layer 140a to form a first exposure region 142 on the first segment R1. The first exposure area 142 may include a plurality of first line exposure patterns 142a and a plurality of pad exposure patterns 142b, as shown in FIG. 1, which are respectively connected to the first line exposure patterns 142a.
在本實施例中,光阻層140a可為正光阻,也就是說,其被紫外光照射到的部份會產生化學反應而使化學鍵結變鬆散而容易被後續的顯影製程中的顯影液溶解,換句話說,光阻層140a中有被曝光的部分(例如第一曝光區142)可被顯影液溶解而移除。當然,在其他實施例中,光阻層140a也可為負光阻,其被紫外光照射到的部份會產生化學反應而使化學鍵結變堅固而不容易被後續的顯影製程中的顯影液溶解,換句話說,光阻層140a中沒有被曝光的部分可被顯影液溶解而移除。在光阻層140a為負光阻的實施例中,紫外光可照射在圖1中第一曝光區142所圈圍出的區域以外的區域,以使第一曝光區142所圈圍出的區域之後可被顯影液溶解而移除。In this embodiment, the photoresist layer 140a may be a positive photoresist, that is, a portion of the photoresist layer 140a irradiated with ultraviolet light may cause a chemical reaction to loosen chemical bonds and be easily dissolved by a developing solution in a subsequent development process. In other words, the exposed portion of the photoresist layer 140a (for example, the first exposure region 142) can be dissolved and removed by the developing solution. Of course, in other embodiments, the photoresist layer 140a may also be a negative photoresist, and a portion of the photoresist layer 140a irradiated with ultraviolet light may cause a chemical reaction to make the chemical bond strong and not easily be used by the developing solution in the subsequent development process. Dissolving, in other words, the portion of the photoresist layer 140a that is not exposed can be dissolved and removed by the developer. In the embodiment in which the photoresist layer 140a is a negative photoresist, ultraviolet light may be irradiated to an area other than the area surrounded by the first exposure area 142 in FIG. 1, so that the area surrounded by the first exposure area 142 It can then be dissolved and removed by the developer.
接著,請參照圖2,進行一第二曝光製程於光阻層140a的一第二區段R2上,以於第二區段R2上形成一第二曝光區144,其中第一曝光區142與第二曝光區144部分重疊。在本實施例中,第二曝光區144可包括多個第二線路曝光圖案144a。在本實施例中,第二曝光區144中的第二線路曝光圖案144a可與第一曝光區142中相應的接墊曝光圖案142b部分重疊。在其他實施例中,第二曝光區144還可包括接墊曝光圖案(相似於接墊曝光圖案142b),以用於之後據此形成如圖4A所示的接墊部128。在本實施例中,光阻層140a上的第一曝光區142與第二曝光區144可彼此交替(alternately)配置,且相鄰的第一曝光區142與第二曝光區144彼此部分重疊。如此配置,可使不同道曝光製程所形成的第一曝光區142及第二曝光區144之間形成良好的連接,而不會因公差而產生銜接不良的情形,進而可避免據此形成的圖案化線路層120產生間隙而導致斷線的情況。Next, referring to FIG. 2, a second exposure process is performed on a second segment R2 of the photoresist layer 140 a to form a second exposure region 144 on the second segment R2. The first exposure region 142 and The second exposure area 144 partially overlaps. In this embodiment, the second exposure area 144 may include a plurality of second line exposure patterns 144a. In this embodiment, the second line exposure pattern 144a in the second exposure region 144 may partially overlap the corresponding pad exposure pattern 142b in the first exposure region 142. In other embodiments, the second exposure region 144 may further include a pad exposure pattern (similar to the pad exposure pattern 142 b) for later forming a pad portion 128 as shown in FIG. 4A accordingly. In this embodiment, the first exposure areas 142 and the second exposure areas 144 on the photoresist layer 140 a may be alternately arranged with each other, and the adjacent first exposure areas 142 and the second exposure areas 144 partially overlap each other. In this way, a good connection can be formed between the first exposure area 142 and the second exposure area 144 formed by different exposure processes, and the connection failure will not occur due to tolerances, and the patterns formed accordingly can be avoided. A gap may be generated in the circuit layer 120 to cause disconnection.
接著,請參照圖3,進行一顯影製程於光阻層140a上,以移除第一曝光區142以及第二曝光區144而形成如圖3所示之圖案化光阻層141。在本實施例中,顯影製程可包括利用顯影液溶解前述曝光製程中所形成的第一曝光區142以及第二曝光區144。在本實施例中,圖案化光阻層141可包括多個開口146。Next, referring to FIG. 3, a developing process is performed on the photoresist layer 140 a to remove the first exposure region 142 and the second exposure region 144 to form a patterned photoresist layer 141 as shown in FIG. 3. In this embodiment, the developing process may include dissolving the first exposure region 142 and the second exposure region 144 formed in the foregoing exposure process by using a developing solution. In this embodiment, the patterned photoresist layer 141 may include a plurality of openings 146.
接著,請同時參照圖3及圖4,利用圖案化光阻層141進行一線路製程,以形成如圖4所示之圖案化線路層120,其包括多個第一線路部122、多個接墊部124以及多個第二線路部126,且接墊部124分別連接第一線路部122以及第二線路部126之間,其中,第一線路部122對應第一線路曝光圖案142a,接墊部124對應接墊曝光圖案142b,而第二線路部126則對應第二線路曝光圖案144a。在本實施例中,各第一線路部122分別與相應的第二線路部126實質上共線並經由相應的接墊部124彼此連接。在本實施例中,因此,第一線路部122、接墊部124以及第二線路部126為一體成形。在本實施例中,圖案化線路層120一體成形地延伸至軟性基材110的邊緣。Next, referring to FIG. 3 and FIG. 4 at the same time, a pattern process is performed by using the patterned photoresist layer 141 to form a patterned circuit layer 120 as shown in FIG. 4, which includes a plurality of first circuit portions 122 and a plurality of connection portions. The pad portion 124 and the plurality of second circuit portions 126 are connected to the first circuit portion 122 and the second circuit portion 126, respectively. The first circuit portion 122 corresponds to the first line exposure pattern 142a, and the pad The portion 124 corresponds to the pad exposure pattern 142b, and the second line portion 126 corresponds to the second line exposure pattern 144a. In this embodiment, each of the first circuit portions 122 and the corresponding second circuit portion 126 are substantially collinear and are connected to each other via the corresponding pad portion 124. In this embodiment, therefore, the first circuit portion 122, the pad portion 124, and the second circuit portion 126 are integrally formed. In this embodiment, the patterned circuit layer 120 is integrally extended to the edge of the flexible substrate 110.
舉例而言,在本實施例中,圖案化線路層120可由半加成法所形成,也就是說,上述的線路製程可包括半加成法。詳細而言,圖案化光阻層141可包括多個開口146,以利用此圖案化光阻層141為罩幕進行電鍍而形成如圖4所示之圖案化線路層120。因此,圖案化光阻層141的開口146的形狀可對應(吻合)於欲形成的圖案化線路層120的形狀。For example, in this embodiment, the patterned circuit layer 120 may be formed by a semi-additive method, that is, the above-mentioned circuit process may include a semi-additive method. In detail, the patterned photoresist layer 141 may include a plurality of openings 146. The patterned photoresist layer 141 is used as a mask to perform electroplating to form a patterned circuit layer 120 as shown in FIG. 4. Therefore, the shape of the opening 146 of the patterned photoresist layer 141 may correspond to (match) the shape of the patterned circuit layer 120 to be formed.
進一步而言。在本實施例中,在設置光阻層140a於軟性基材110上之前,可先於軟性基材110的上表面利用例如濺鍍製程形成一種子層,接著,再設置第一光阻層140a於軟性基材110上,並利用第一曝光製程、第二曝光製程以及顯影製程而形成圖案化光阻層141的開口146,以暴露下方的種子層,接著,便可利用被開口146所暴露的部分種子層做為導電路徑而進行電鍍,以於開口146內形成圖案化線路層120。當然,本實施例僅用以舉例說明,在其他實施例中,圖案化線路層120亦可由加成法或減成法所形成,也就是說,上述的線路製程更可包括加成法或減成法。須說明的是,若圖案化線路層120是由減成法所形成時,圖案化光阻層141則是用以覆蓋欲形成圖案化線路層120的區域,也就是說,圖案化光阻層141的形狀對應(吻合)於圖案化線路層120的形狀。本發明的實施例並不限制圖案化線路層120的製作方法,只要圖案化線路層120是利用圖案化光阻層141來進行線路製程而形成即可。Further more. In this embodiment, before the photoresist layer 140a is disposed on the flexible substrate 110, a sublayer may be formed on the upper surface of the flexible substrate 110 by, for example, a sputtering process, and then a first photoresist layer 140a is disposed. The opening 146 of the patterned photoresist layer 141 is formed on the flexible substrate 110 by using the first exposure process, the second exposure process, and the development process to expose the seed layer below, and then, the exposure by the opening 146 can be utilized. Part of the seed layer is plated as a conductive path to form a patterned circuit layer 120 in the opening 146. Of course, this embodiment is only for illustration. In other embodiments, the patterned circuit layer 120 may also be formed by an addition method or a subtraction method, that is, the above-mentioned circuit process may further include an addition method or a subtraction method. Cheng Fa. It should be noted that if the patterned circuit layer 120 is formed by a subtractive method, the patterned photoresist layer 141 is used to cover a region where the patterned circuit layer 120 is to be formed, that is, the patterned photoresist layer The shape of 141 corresponds to the shape of the patterned circuit layer 120. The embodiment of the present invention does not limit the manufacturing method of the patterned circuit layer 120, as long as the patterned circuit layer 120 is formed by using the patterned photoresist layer 141 to perform a circuit process.
圖4A是依照本發明的另一實施例的一種軟性線路板的局部上視示意圖。在此必須說明的是,本實施例之軟性線路板100與圖4之軟性線路板相似,因此,本實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,本實施例不再重複贅述。以下將針對本實施例之軟性線路板100與圖4之軟性線路板的差異做說明。FIG. 4A is a schematic partial top view of a flexible circuit board according to another embodiment of the present invention. It must be noted here that the flexible circuit board 100 of this embodiment is similar to the flexible circuit board of FIG. 4. Therefore, in this embodiment, the component numbers and parts of the foregoing embodiments are used, and the same reference numerals are used to indicate the same or similar And the description of the same technical content is omitted. For the description of the omitted parts, reference may be made to the foregoing embodiment, which is not repeatedly described in this embodiment. The differences between the flexible circuit board 100 of this embodiment and the flexible circuit board of FIG. 4 will be described below.
請參照圖4A,在本實施例中,位在第二區段R2的圖案化線路層120更可包括多個接墊部128,以便於與下一區段(例如第三區段R3)的線路部129銜接。第三區段R3的線路部129可例如以相似於第一區段R1的線路部122的製程方式形成,以與第二區段R2的接墊部128銜接。也就是說,本實施例可在第一區段R1、第二區段R2以及第三區段R3上分別對光阻層140a進行三段式曝光製程,以形成彼此部分重疊三段曝光區,之後再進行顯影製程以及線路製程而可形成如圖4A所示之三段線路部122、126、129彼此銜接的圖案化線路層120。當然,第三區段R3的曝光區的曝光圖案可不同於第一區段R1的第一曝光區142。也就是說,在如圖4所示的實施例中,圖案化線路層120可由一個第一區段R1以及一個第二區段R2的線路部及接墊部彼此銜接而組成,然而,本實施例並不限制曝光區的數量以及曝光製程的次數。因此,本發明的實施例可在長度較長(至少約大於500毫米)的軟性基板110上分區段(例如:第一區段R1、第二區段R2、第三區段R3…依此類推)進行多次曝光製程,以分別形成彼此銜接且部分重疊的多段曝光區。因而可在不使用連接器連接多段軟性基板的情況下克服曝光機台的尺寸上的限制,而製作出長度較長(至少約大於500毫米)的軟性線路板100。在一實施例中,上述製程所製作出的如圖4或圖4A所示的軟性線路板100可視為一個區片(panel),多個區片可再彼此連接(例如可透過連接器來彼此連接),以形成線路長度更長的軟性線路板。須說明的是,本實施例的接墊部124、128是用以連接第一線路部122、第二線路部126以及第三線路部129的擬接墊(dummy pads),其並非用於元件安裝(mounting)之用,也就是說,接墊部124、128並未與其他電子元件連接,其下方也未與其他通孔連接。Referring to FIG. 4A, in this embodiment, the patterned circuit layer 120 located in the second section R2 may further include a plurality of pad portions 128, so as to facilitate communication with the next section (for example, the third section R3). The line section 129 is connected. The wiring section 129 of the third section R3 may be formed in a similar manner to the manufacturing process of the wiring section 122 of the first section R1 to be connected to the pad section 128 of the second section R2. That is, in this embodiment, a three-stage exposure process can be performed on the photoresist layer 140a on the first section R1, the second section R2, and the third section R3, so as to form three sections of exposure areas partially overlapping each other. Thereafter, a development process and a circuit process are performed to form a patterned circuit layer 120 in which the three-segment circuit portions 122, 126, and 129 are connected to each other as shown in FIG. 4A. Of course, the exposure pattern of the exposure area of the third section R3 may be different from the first exposure area 142 of the first section R1. That is to say, in the embodiment shown in FIG. 4, the patterned circuit layer 120 may be composed of a circuit portion and a pad portion of a first section R1 and a second section R2 connected to each other. However, in this embodiment, The example does not limit the number of exposure areas and the number of exposure processes. Therefore, the embodiment of the present invention can be divided into sections (for example, the first section R1, the second section R2, the third section R3, etc.) on the flexible substrate 110 having a long length (at least about 500 mm). ) Perform multiple exposure processes to form multiple exposure areas that are connected to each other and partially overlap each other. Therefore, the size limitation of the exposure machine can be overcome without using a connector to connect a plurality of flexible substrates, and a flexible circuit board 100 having a longer length (at least about 500 mm) can be manufactured. In an embodiment, the flexible circuit board 100 shown in FIG. 4 or FIG. 4A manufactured by the above process can be regarded as a panel, and a plurality of panels can be connected to each other (for example, they can be connected to each other through a connector). Connection) to form longer flexible circuit boards. It should be noted that the pad portions 124 and 128 in this embodiment are dummy pads used to connect the first circuit portion 122, the second circuit portion 126, and the third circuit portion 129, and are not used for components. For mounting, that is, the pad portions 124 and 128 are not connected to other electronic components, and are not connected to other through holes below.
圖5是依照本發明的一實施例的一種軟性線路板的局部上視示意圖。請參照圖5,在本實施例中,在形成圖案化線路層120之後,可選擇性地形成一第一覆蓋膜(coverlay)162於軟性基材110上,其中,第一覆蓋膜162覆蓋第一線路部122以及至少部分接墊部124。接著,可形成一第二覆蓋膜164於軟性基材110上,其中,第二覆蓋膜164覆蓋第二線路部126以及未被第一覆蓋膜162所覆蓋的另一部分的接墊部124。在本實施例中,第二覆蓋膜164與第一覆蓋膜162彼此連接,且第二覆蓋膜164與第一覆蓋膜162之間的一接合面163位於接墊部124上,也就是說,第一覆蓋膜162與第二覆蓋膜164在接墊部124上彼此接合,並共同覆蓋接墊部124。在本實施例中,第一覆蓋膜162與第二覆蓋膜164的材料可包括聚醯亞胺(Polyimide, PI)。FIG. 5 is a schematic partial top view of a flexible circuit board according to an embodiment of the present invention. Please refer to FIG. 5. In this embodiment, after forming the patterned circuit layer 120, a first coverlay 162 may be selectively formed on the flexible substrate 110, wherein the first coverlay 162 covers the first A circuit portion 122 and at least a portion of the pad portion 124. Next, a second cover film 164 may be formed on the flexible substrate 110, wherein the second cover film 164 covers the second circuit portion 126 and the pad portion 124 of another portion not covered by the first cover film 162. In this embodiment, the second cover film 164 and the first cover film 162 are connected to each other, and a joint surface 163 between the second cover film 164 and the first cover film 162 is located on the pad portion 124, that is, The first cover film 162 and the second cover film 164 are bonded to each other on the pad portion 124 and cover the pad portion 124 together. In this embodiment, the materials of the first cover film 162 and the second cover film 164 may include polyimide (PI).
請參照圖4及圖5,在本實施例中,就結構而言,依上述製作方法所形成的軟性電路板100可包括軟性基材捲110以及圖案化線路層120。軟性基材捲110是由一體成形的一軟性基材110繞捲而成。圖案化線路層120包括多個第一線路部122、多個第二線路部126以及多個接墊部124分別連接於第一線路部122以及第二線路部126之間,其中,各第一線路部122分別與相應的第二線路部126實質上共線並經由相應的接墊部124彼此連接。Please refer to FIG. 4 and FIG. 5. In this embodiment, in terms of structure, the flexible circuit board 100 formed according to the above manufacturing method may include a flexible substrate roll 110 and a patterned circuit layer 120. The flexible substrate roll 110 is formed by winding a flexible substrate 110 integrally formed. The patterned circuit layer 120 includes a plurality of first circuit portions 122, a plurality of second circuit portions 126, and a plurality of pad portions 124 connected between the first circuit portion 122 and the second circuit portion 126, respectively. The circuit portions 122 are substantially co-linear with the corresponding second circuit portions 126 and connected to each other via the corresponding pad portions 124.
在本實施例中,透過第二曝光區144與第一曝光區142略微重疊的配置,可有效防止因長度方向D1上的公差偏移而使據此形成的第二線路部126與接墊部124在長度方向D1上產生間隙進而導致斷線的情況。並且,接墊曝光圖案的寬度被設計為大於各第二線路曝光圖案144a的寬度,因而可有效防止因寬度方向(垂直於長度方向D1)上的公差偏移而使據此形成的第二線路部126與接墊部124在寬度方向上產生間隙而導致斷線的情況。因此,此形成的各接墊部124的寬度W1會大於各第二線路部126的線寬W2。舉例而言,各接墊部124的一寬度W1約介於各第二線路部126的一線寬W2加10μm至1000μm之間。也就是說,各接墊部124的寬度W1約為各第二線路部126的一線寬W2再加上10μm至1000μm。因此,本實施例的配置可進一步提升第一曝光區142與第二曝光區144彼此銜接時的容忍度(tolerance),進而可提升本實施例的軟性線路板100的良率。In this embodiment, the arrangement of the second exposure area 144 and the first exposure area 142 slightly overlapping with each other can effectively prevent the second circuit portion 126 and the pad portion formed according to the tolerance deviation in the length direction D1. 124. A gap is generated in the length direction D1, and a disconnection is caused. In addition, the width of the pad exposure pattern is designed to be greater than the width of each of the second line exposure patterns 144a, so it is possible to effectively prevent the second line formed therefrom due to a tolerance deviation in the width direction (perpendicular to the length direction D1). The portion 126 and the pad portion 124 may have a gap in the width direction and may be disconnected. Therefore, the width W1 of each of the pad portions 124 formed in this way is larger than the line width W2 of each of the second circuit portions 126. For example, a width W1 of each pad portion 124 is approximately between a line width W2 of each second circuit portion 126 plus 10 μm to 1000 μm. That is, the width W1 of each pad portion 124 is approximately one line width W2 of each second circuit portion 126 plus 10 μm to 1000 μm. Therefore, the configuration of this embodiment can further improve the tolerance when the first exposure area 142 and the second exposure area 144 are connected to each other, and can further improve the yield of the flexible circuit board 100 in this embodiment.
除此之外,本實施例的軟性線路板100更可如圖5所示之包括第一覆蓋膜162以及第二覆蓋膜164。第一覆蓋膜162設置於軟性基材110上並覆蓋第一線路部122以及至少部分接墊部124。第二覆蓋膜164設置於軟性基材110上並覆蓋第二線路部126以及未被第一覆蓋膜162所覆蓋的另一部分的接墊部124。在本實施例中,第二覆蓋膜164與第一覆蓋膜162於軟性基板110上的設置位置可分別相同也可不同於第一區段R1以及第二區段R2。In addition, the flexible circuit board 100 of this embodiment may further include a first cover film 162 and a second cover film 164 as shown in FIG. 5. The first cover film 162 is disposed on the flexible substrate 110 and covers the first circuit portion 122 and at least a portion of the pad portion 124. The second cover film 164 is disposed on the flexible substrate 110 and covers the second circuit portion 126 and the pad portion 124 of another portion that is not covered by the first cover film 162. In this embodiment, the positions of the second cover film 164 and the first cover film 162 on the flexible substrate 110 may be the same or different from each other in the first section R1 and the second section R2.
圖6是依照本發明的一實施例的一種軟性線路板的局部上視示意圖。圖7是依照本發明的一實施例的一種軟性線路板的局部上視示意圖。在此必須說明的是,圖6及圖7的實施例之軟性線路板100與圖4之軟性線路板100相似,因此,本實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,本實施例不再重複贅述。請參照圖1以及圖3,以下將針對圖6及圖7的軟性線路板100與圖4之軟性線路板100的差異做說明。FIG. 6 is a schematic partial top view of a flexible circuit board according to an embodiment of the present invention. FIG. 7 is a schematic partial top view of a flexible circuit board according to an embodiment of the present invention. It must be noted here that the flexible circuit board 100 of the embodiments of FIGS. 6 and 7 is similar to the flexible circuit board 100 of FIG. 4. Therefore, the component numbers and parts of the foregoing embodiments are used in this embodiment, and the same components are used. Numbers are used to indicate the same or similar elements, and descriptions of the same technical content are omitted. For the description of the omitted parts, reference may be made to the foregoing embodiment, which is not repeatedly described in this embodiment. Please refer to FIG. 1 and FIG. 3. Differences between the flexible circuit board 100 of FIGS. 6 and 7 and the flexible circuit board 100 of FIG. 4 will be described below.
如前所述,為了確保分別在兩區段接續形成的第一曝光區142與第二曝光區144不會因公差而導致後續形成的圖案化線路層120產生斷線,接墊部124的寬度通常會大於線寬。如此配置,在所需的線距較小(fine pitch)的情況下,接墊部124可沿軟性基材110的長度方向D1彼此交錯配置,以進一步縮減各線路部122、126之間的間距。請參照圖7,在其他實施例中,各接墊部124可相較於各第一線路部122呈直線時的配置往軟性基材110的一側(例如:上方側)偏移一距離T1,各第一線路部122以及各第二線路部126往所述側彎曲並延伸,以連接各接墊部124。當然,本發明的實施例僅用以舉例說明,本發明並不限制第一線路部122、接墊部124以及第二線路部126之間的佈局及配置方式。As mentioned above, in order to ensure that the first exposure area 142 and the second exposure area 144 formed in two successive sections are not disconnected due to tolerances, the width of the pad portion 124 is not caused due to tolerances. It is usually larger than the line width. In this configuration, when the required fine pitch is small, the pad portions 124 can be staggered with each other along the length direction D1 of the flexible substrate 110 to further reduce the distance between the circuit portions 122 and 126. . Referring to FIG. 7, in other embodiments, each pad portion 124 may be offset by a distance T1 from one side (for example, the upper side) of the flexible substrate 110 compared to the configuration when the first circuit portions 122 are linear. Each first circuit portion 122 and each second circuit portion 126 are bent and extended toward the side to connect each pad portion 124. Of course, the embodiments of the present invention are only used for illustration, and the present invention does not limit the layout and configuration of the first circuit portion 122, the pad portion 124, and the second circuit portion 126.
綜上所述,本發明的實施例可在長度較長的軟性基板上分區段進行多次曝光製程,以分別形成彼此間隔配置且彼此銜接的多個曝光區,因而可在不使用連接器連接多段軟性基材的情況下克服曝光機台在尺寸上的限制,而可製作出長度較長且一體成型的軟性線路板。此外,在無須使用連接器連接多段軟性基材的情況下,本發明實施例的線性線路板及其製作方法可有效提升線路的傳輸速度,更可減少訊號的損耗。In summary, the embodiments of the present invention can perform multiple exposure processes in sections on a long flexible substrate to form multiple exposure areas that are spaced from each other and connected to each other, so they can be connected without using a connector. In the case of a multi-stage flexible substrate, the size limitation of the exposure machine can be overcome, and a flexible circuit board with a long length and integrated molding can be manufactured. In addition, the linear circuit board and the manufacturing method thereof according to the embodiments of the present invention can effectively improve the transmission speed of a circuit without reducing the loss of a signal without using a connector to connect multiple sections of flexible substrates.
此外,所述的多段曝光製程可部分重疊,因此,分段形成的多個曝光區可彼此部分重疊,進而可避免因製程公差而導致多段曝光區之間發生斷線的情形。因此,本發明實施例的線性線路板及其製作方法可有效提升其製程良率。In addition, the multi-segment exposure process can be partially overlapped. Therefore, the multiple exposure areas formed in sections can be partially overlapped with each other, thereby avoiding the occurrence of disconnection between the multiple-segment exposure areas due to process tolerances. Therefore, the linear circuit board and the manufacturing method thereof according to the embodiments of the present invention can effectively improve the process yield.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.
100‧‧‧軟性線路板100‧‧‧ flexible circuit board
110‧‧‧軟性基材捲、軟性基材110‧‧‧Flexible substrate roll, flexible substrate
120‧‧‧圖案化線路層120‧‧‧ patterned circuit layer
122‧‧‧第一線路部122‧‧‧First Line Department
124‧‧‧接墊部124‧‧‧ pad department
126‧‧‧第二線路部126‧‧‧Second Line Department
128‧‧‧接墊部128‧‧‧ pad department
129‧‧‧第三線路部129‧‧‧Third Line Department
140a‧‧‧光阻層140a‧‧‧Photoresistive layer
141‧‧‧圖案化光阻層141‧‧‧patterned photoresist layer
142‧‧‧第一曝光區142‧‧‧First exposure area
142a‧‧‧第一線路曝光圖案142a‧‧‧First line exposure pattern
142b‧‧‧接墊曝光圖案142b‧‧‧ Pad exposure pattern
144‧‧‧第二曝光區144‧‧‧Second exposure area
144a‧‧‧第二線路曝光圖案144a‧‧‧Second line exposure pattern
146‧‧‧開口146‧‧‧ opening
162‧‧‧第一覆蓋膜162‧‧‧The first cover film
164‧‧‧第二覆蓋膜164‧‧‧Second cover film
163‧‧‧接合面163‧‧‧Joint surface
D1‧‧‧長度方向D1‧‧‧length direction
R1‧‧‧第一區段R1‧‧‧Section 1
R2‧‧‧第二區段R2‧‧‧Second Section
R3‧‧‧第三區段R3‧‧‧ third section
T1‧‧‧距離T1‧‧‧distance
W1‧‧‧寬度W1‧‧‧Width
W2‧‧‧線寬W2‧‧‧line width
圖1至圖4是依照本發明的一實施例的一種軟性線路板的製作方法的流程上視示意圖。 圖4A是依照本發明的另一實施例的一種軟性線路板的局部上視示意圖。 圖5是依照本發明的一實施例的一種軟性線路板的局部上視示意圖。 圖6是依照本發明的一實施例的一種軟性線路板的局部上視示意圖。 圖7是依照本發明的一實施例的一種軟性線路板的局部上視示意圖。FIG. 1 to FIG. 4 are schematic top views of processes of a method for manufacturing a flexible circuit board according to an embodiment of the present invention. FIG. 4A is a schematic partial top view of a flexible circuit board according to another embodiment of the present invention. FIG. 5 is a schematic partial top view of a flexible circuit board according to an embodiment of the present invention. FIG. 6 is a schematic partial top view of a flexible circuit board according to an embodiment of the present invention. FIG. 7 is a schematic partial top view of a flexible circuit board according to an embodiment of the present invention.
Claims (13)
Priority Applications (3)
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TW106129374A TWI658334B (en) | 2017-08-29 | 2017-08-29 | Flexible printed circuit board and manufacturng method thereof |
CN201711222153.0A CN109429436B (en) | 2017-08-29 | 2017-11-29 | Flexible circuit board and manufacturing method thereof |
JP2017244817A JP6500079B2 (en) | 2017-08-29 | 2017-12-21 | Flexible circuit board and manufacturing method thereof |
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TW106129374A TWI658334B (en) | 2017-08-29 | 2017-08-29 | Flexible printed circuit board and manufacturng method thereof |
Publications (2)
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TW201913236A true TW201913236A (en) | 2019-04-01 |
TWI658334B TWI658334B (en) | 2019-05-01 |
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TW106129374A TWI658334B (en) | 2017-08-29 | 2017-08-29 | Flexible printed circuit board and manufacturng method thereof |
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JP (1) | JP6500079B2 (en) |
CN (1) | CN109429436B (en) |
TW (1) | TWI658334B (en) |
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JP7441031B2 (en) | 2019-11-11 | 2024-02-29 | 日東電工株式会社 | Method of manufacturing printed circuit board and printed circuit board assembly sheet |
CN117156694B (en) * | 2023-10-31 | 2024-02-23 | 北京万龙精益科技有限公司 | Integrated circuit small-spacing pin device packaging compatible method and flexible circuit tape |
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JPS6318352A (en) * | 1986-07-11 | 1988-01-26 | Agency Of Ind Science & Technol | Mask for split exposure |
JPS6355550A (en) * | 1986-08-26 | 1988-03-10 | Mamiya Koki Kk | Divisionally projecting and exposing method for printed board |
JP4403133B2 (en) * | 2005-11-18 | 2010-01-20 | 日本メクトロン株式会社 | Long film transport apparatus and transport method. |
CN101282617B (en) * | 2007-04-04 | 2010-05-26 | 王定锋 | Flexible printed circuit board of complete winding non-intermittence circuit as well as manufacturing technique |
JP6489143B2 (en) * | 2017-03-23 | 2019-03-27 | 住友電気工業株式会社 | Flexible printed circuit board and flexible printed circuit board fixing method |
TWM556992U (en) * | 2017-08-29 | 2018-03-11 | 同泰電子科技股份有限公司 | Flexible printed circuit board |
-
2017
- 2017-08-29 TW TW106129374A patent/TWI658334B/en active
- 2017-11-29 CN CN201711222153.0A patent/CN109429436B/en active Active
- 2017-12-21 JP JP2017244817A patent/JP6500079B2/en active Active
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CN109429436B (en) | 2020-08-11 |
CN109429436A (en) | 2019-03-05 |
JP6500079B2 (en) | 2019-04-10 |
TWI658334B (en) | 2019-05-01 |
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