TW201910023A - Metal powder manufacturing apparatus and method for producing metal powder - Google Patents

Metal powder manufacturing apparatus and method for producing metal powder Download PDF

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TW201910023A
TW201910023A TW107127357A TW107127357A TW201910023A TW 201910023 A TW201910023 A TW 201910023A TW 107127357 A TW107127357 A TW 107127357A TW 107127357 A TW107127357 A TW 107127357A TW 201910023 A TW201910023 A TW 201910023A
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cooling liquid
peripheral surface
flow
metal powder
molten metal
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TW107127357A
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TWI658883B (en
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堀野賢治
吉留和宏
原田明洋
松元裕之
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日商Tdk股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/0824Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid with a specific atomising fluid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/0844Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid in controlled atmosphere
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/086Cooling after atomisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/086Cooling after atomisation
    • B22F2009/0864Cooling after atomisation by oil, other non-aqueous fluid or fluid-bed cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/086Cooling after atomisation
    • B22F2009/0872Cooling after atomisation by water
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy

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  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Powder Metallurgy (AREA)
  • Soft Magnetic Materials (AREA)

Abstract

The present invention provides a manufacturing device of metal powder capable of manufacturing high-quality metal powder and a method of manufacturing metal powder using the same. The metal powder manufacturing device (10) includes: a molten metal supply portion (20) that ejects molten metal, a cylinder body (32) that is disposed below the molten metal supply portion (20), and a coolant layer forming portion (38) for forming a coolant flow along the inner circumferential surface of the cylinder body. The coolant cools the molten metal ejected from the molten metal supply portion (20). The coolant layer forming portion (38) has a front end bent portion (38a) for stabilizing the coolant flowing toward the inner side of the radial direction from the inner circumferential surface (33) and ejecting the coolant toward the flowing direction along the inner circumferential surface (33) of the cylinder body (32).

Description

金屬粉末製造裝置和金屬粉末的製造方法Metal powder manufacturing device and metal powder manufacturing method

本發明係關於一種金屬粉末製造裝置和金屬粉末的製造方法。The invention relates to a metal powder manufacturing device and a metal powder manufacturing method.

例如如專利文獻1所示,已知有使用所謂的氣體霧化法製造金屬粉末的金屬粉末製造裝置和使用了該裝置的製造方法。現有的裝置具有:噴出熔融金屬的熔融金屬供給容器、設置於該熔融金屬供給容器的下方的筒體、以及沿著筒體的內周面形成冷卻液的液流的冷卻液層形成部,該冷卻液層形成部冷卻從熔融金屬供給部噴出的熔融金屬。For example, as shown in Patent Document 1, a metal powder manufacturing apparatus for manufacturing metal powder using a so-called gas atomization method and a manufacturing method using the apparatus are known. The conventional device has a molten metal supply container that ejects molten metal, a cylindrical body provided below the molten metal supply container, and a cooling liquid layer forming portion that forms a flow of cooling liquid along the inner peripheral surface of the cylindrical body. The cooling liquid layer forming unit cools the molten metal ejected from the molten metal supply unit.

冷卻液層形成部向冷卻用筒體的內周面的切線方向噴射冷卻液,一邊使冷卻液沿著冷卻容器的內表面旋轉一邊流下,由此,形成冷卻液層。期待通過使用冷卻液層,能夠將液滴驟冷並製造高功能性的金屬粉末。The cooling liquid layer forming portion sprays the cooling liquid in a tangential direction of the inner peripheral surface of the cooling cylinder, and flows down while rotating the cooling liquid along the inner surface of the cooling container, thereby forming a cooling liquid layer. It is expected that by using the cooling liquid layer, the liquid droplets can be rapidly cooled to produce highly functional metal powder.

但是,現有的裝置中,即使向冷卻用筒體的內周面的切線方向噴射冷卻液,冷卻液也在筒體的內周面進行反射,產生從內周面朝向半徑方向的內側的流動而成為亂流。因此,現有的裝置中,存在難以沿著筒體的內周面形成均勻的厚度的冷卻液層,並難以製造均質的(粒徑,結晶狀態,形狀等為均勻的)金屬粉末的技術問題。特別是增大冷卻液的流量,或增大擠出冷卻液的泵的壓力而增大冷卻液的速度時,該傾向變強。However, in the conventional device, even if the cooling liquid is sprayed in the tangential direction of the inner circumferential surface of the cooling cylinder, the cooling liquid is reflected on the inner circumferential surface of the cylinder, and a flow from the inner circumferential surface toward the inner side in the radial direction occurs. Become turbulent. Therefore, in the conventional device, there is a technical problem that it is difficult to form a uniform thickness of the cooling liquid layer along the inner peripheral surface of the cylinder, and it is difficult to produce homogeneous (uniform particle size, crystal state, shape, etc.) metal powder. In particular, when the flow rate of the cooling liquid is increased, or the pressure of the pump that extrudes the cooling liquid is increased to increase the speed of the cooling liquid, this tendency becomes stronger.

[現有技術文獻][Prior Art Literature]

[專利文獻][Patent Literature]

專利文獻1:日本特開平11-80812號公報Patent Document 1: Japanese Patent Laid-Open No. 11-80812

[發明所要解決的技術問題][Technical problems to be solved by the invention]

本發明是鑒於這種實際狀況而研發的,其目的在於,提供一種能夠製造高品質的金屬粉末的金屬粉末製造裝置和使用該金屬粉末製造裝置的金屬粉末的製造方法。The present invention was developed in view of this actual situation, and its object is to provide a metal powder manufacturing apparatus capable of manufacturing high-quality metal powder and a metal powder manufacturing method using the metal powder manufacturing apparatus.

[用於解決技術問題的方案][Proposal for solving technical problems]

為了達成上述目的,本發明提供一種金屬粉末製造裝置,其特徵在於,包括:熔融金屬供給部,其噴出熔融金屬;筒體,其被設置於上述熔融金屬供給部的下方;以及冷卻液層形成部,其沿著上述筒體的內周面形成冷卻液的液流,該冷卻液的液流冷卻從上述熔融金屬供給部噴出的上述熔融金屬,上述冷卻液層形成部在上述筒體的上部具有用於上述筒體的內側形成穩定流的前端折彎部。In order to achieve the above object, the present invention provides a metal powder manufacturing apparatus, characterized by comprising: a molten metal supply part that ejects molten metal; a cylinder body that is provided below the molten metal supply part; and a coolant layer formation A cooling fluid flow is formed along the inner peripheral surface of the cylindrical body, the cooling liquid flow cools the molten metal ejected from the molten metal supply portion, and the cooling liquid layer forming portion is above the cylindrical body It has a front-end bent portion for forming a stable flow inside the cylinder.

本發明提供一種金屬粉末製造方法,其特徵在於,包括:沿著設置於熔融金屬供給部的下方的筒體的內周面形成冷卻液的液流的步驟;以及將熔融金屬從上述熔融金屬供給部向上述冷卻液的液流進行噴出的步驟,從在上述筒體的上部在上述筒體的內側所具備的穩定流形成部通過前端折彎部沿著上述筒體的上述內周面噴出上述冷卻液。The present invention provides a method for manufacturing a metal powder, comprising: a step of forming a flow of a cooling liquid along an inner peripheral surface of a cylinder provided below a molten metal supply portion; and supplying molten metal from the molten metal The step of ejecting the liquid into the cooling liquid flow is to eject the above-mentioned inner peripheral surface of the cylindrical body from the steady flow forming portion provided on the inner side of the cylindrical body at the upper part of the cylindrical body along the inner peripheral surface of the cylindrical body Coolant.

本發明的金屬粉末製造裝置及金屬粉末的製造方法中,在從熔融金屬供給部噴出的熔融金屬與冷卻液接觸的位置的上游側具備前端折彎部。在前端折彎部,從內周面朝向半徑方向的內側的冷卻液進行穩定流化,按照沿著筒體的內周面流動的方向噴出冷卻液。因此,即使在增大冷卻液的流量,或增大冷卻液的速度的情況下,也可容易沿著筒體的內周面形成均勻的厚度的冷卻液層,並生產高品質的金屬粉末。In the metal powder manufacturing apparatus and the metal powder manufacturing method of the present invention, a tip bending portion is provided on the upstream side of the position where the molten metal ejected from the molten metal supply portion contacts the cooling liquid. At the tip bending portion, the cooling liquid from the inner circumferential surface toward the radially inner side is stably fluidized, and the cooling liquid is ejected in a direction flowing along the inner circumferential surface of the cylindrical body. Therefore, even if the flow rate of the cooling liquid is increased or the speed of the cooling liquid is increased, it is possible to easily form a uniform thickness of the cooling liquid layer along the inner peripheral surface of the cylinder and produce high-quality metal powder.

較佳的是,上述前端折彎部的內徑比上述筒體的內周面的內徑小,且上述前端折彎部與上述內周面之間的間隙構成用於使上述冷卻液沿著上述內周面流動的冷卻液噴出部。通過這樣構成,即使在增大冷卻液的流量,或增大冷卻液的速度的情況下,也容易沿著筒體的內周面形成均勻的厚度的冷卻液層。Preferably, the inner diameter of the tip bending portion is smaller than the inner diameter of the inner peripheral surface of the cylinder, and the gap between the tip bending portion and the inner peripheral surface is configured for the cooling liquid to The cooling liquid ejecting portion flowing on the inner peripheral surface. With this configuration, even when the flow rate of the cooling liquid or the speed of the cooling liquid is increased, it is easy to form a cooling liquid layer of a uniform thickness along the inner circumferential surface of the cylinder.

上述前端折彎部的內徑也可以以朝向上述前端折彎部的軸方向的下端錐形狀變大的方式構成。The inner diameter of the tip bending portion may be configured so that the shape of the lower end taper toward the axial direction of the tip bending portion becomes larger.

上述前端折彎部也可以向上述前端折彎部的軸方向的下端錐形狀地傾斜。通過使前端折彎部向軸方向的下端錐形狀地傾斜,作用將冷卻液向內周面擠壓的方向的力,容易沿著筒體的內周面形成均勻的厚度的冷卻液層。The tip bending portion may be tapered toward the lower end of the tip bending portion in the axial direction. By inclining the tip bending portion toward the lower end in the axial direction, the force in the direction of pressing the cooling liquid toward the inner peripheral surface acts to easily form a uniform thickness of the cooling liquid layer along the inner peripheral surface of the cylinder.

較佳的是,上述前端折彎部在下端具備的內框安裝於上述筒體的上方。通過這樣構成,容易在從熔融金屬供給部噴出的熔融金屬與冷卻液接觸的位置的上游側配置前端折彎部。Preferably, the inner frame provided at the lower end of the front-end bending portion is attached above the cylindrical body. With this configuration, it is easy to arrange the tip bending portion on the upstream side of the position where the molten metal ejected from the molten metal supply portion comes into contact with the cooling liquid.

較佳的是,上述冷卻液層形成部具有使上述冷卻液向上述內框撞擊為螺旋狀的螺旋液流形成部。螺旋液流形成部通過將例如向筒體的內周面的切線方向噴射冷卻液的噴嘴安裝於筒體而形成。通過在從螺旋流動形成部向筒體的內周面的切線方向噴出冷卻液的位置的內側安裝內框,容易沿著筒體的內周面形成均勻的厚度的冷卻液層。Preferably, the cooling liquid layer forming portion has a spiral liquid flow forming portion that makes the cooling liquid impinge on the inner frame in a spiral shape. The spiral liquid flow forming portion is formed by attaching, for example, a nozzle that sprays a cooling liquid in a tangential direction of the inner circumferential surface of the cylinder to the cylinder. By mounting the inner frame inside the position where the cooling liquid is discharged from the spiral flow forming portion in the tangential direction of the inner circumferential surface of the cylinder, it is easy to form a coolant layer of a uniform thickness along the inner circumferential surface of the cylinder.

較佳的是,在上述前端折彎部的前端具備在與上述內框之間形成預定間隙的翻折端部。通過具備翻折端部,從前端折彎部與內周面之間的冷卻液噴出部流出的冷卻液的液流進一步穩定化,容易沿著筒體的內周面形成均勻的厚度的冷卻液層。It is preferable that the tip end of the tip bending portion is provided with a folded end portion that forms a predetermined gap with the inner frame. With the folded end portion, the flow of the cooling liquid flowing from the cooling liquid ejecting portion between the front-end bent portion and the inner peripheral surface is further stabilized, and it is easy to form a uniform thickness of the cooling liquid along the inner peripheral surface of the cylinder Floor.

更具體而言,本發明提供一種金屬粉末製造裝置,其特徵在於,包括:熔融金屬供給部,其噴出熔融金屬;筒體,其設置於上述熔融金屬供給部的下方;以及冷卻液層形成部,其沿著上述筒體的內周面形成冷卻液的液流,該冷卻液的液流冷卻從上述熔融金屬供給部噴出的上述熔融金屬,上述冷卻液層形成部具有在上述筒體的軸心方向的上部所具備的內框,上述內框具有比上述筒體的內周面的內徑小的內徑,在沿著上述內框的軸心的下端部具備從上述內框向徑向外側突出的前端折彎部,上述前端折彎部的內徑比上述筒體的內周面的內徑小,上述前端折彎部與上述內周面之間的間隙構成用於使上述冷卻液沿著上述內周面流動的冷卻液噴出部,利用上述內框和上述前端折彎部,穩定流形成用空間部在上述筒體的上部形成於上述冷卻液噴出部的內徑側,在上述穩定流形成用空間部,朝向半徑方向的內側的冷卻液與上述內框撞擊,在上述前端折彎部,朝向沿著軸心的下側的液流被限制,上述冷卻液在上述穩定流形成用空間部,使亂流暫時性地穩定化,並從上述冷卻液噴出部沿著上述筒體的內周面噴出。More specifically, the present invention provides a metal powder manufacturing apparatus, characterized by comprising: a molten metal supply unit that ejects molten metal; a cylinder body that is provided below the molten metal supply unit; and a coolant layer forming unit , Which forms a flow of cooling liquid along the inner peripheral surface of the cylindrical body, the cooling liquid flow cools the molten metal ejected from the molten metal supply portion, and the cooling liquid layer forming portion has an axis on the cylindrical body An inner frame provided in the upper part in the center direction, the inner frame having an inner diameter smaller than the inner diameter of the inner peripheral surface of the cylindrical body, and a lower end portion along the axis of the inner frame is provided with a radial direction from the inner frame An outwardly protruding front end bent portion, the inner diameter of the front end bent portion is smaller than the inner diameter of the inner peripheral surface of the cylindrical body, and the gap between the front end bent portion and the inner peripheral surface is configured to make the coolant The coolant discharge portion flowing along the inner peripheral surface is formed on the inner diameter side of the coolant discharge portion at the upper portion of the cylindrical body by the inner frame and the front-end bending portion at the upper portion of the cylindrical body. The space portion for forming a stable flow, the coolant flowing inward in the radial direction collides with the inner frame, and the flow toward the lower side along the axis is restricted at the bent portion at the front end, and the coolant is formed in the stable flow The space portion temporarily stabilizes the turbulent flow, and is ejected from the coolant ejection portion along the inner circumferential surface of the cylinder.

較佳的是,上述前端折彎部相對於上述內框以預定角度向上述前端折彎部的軸方向的下端傾斜為錐形狀,以作用將上述冷卻液向上述筒體的內周面擠壓的方向的力。Preferably, the front end bending portion is inclined toward the lower end of the front end bending portion in the axial direction at a predetermined angle with respect to the inner frame to taper the cooling liquid against the inner peripheral surface of the cylindrical body The direction of force.

較佳的是,在上述筒體的軸方向的上部,在周方向的多個部位連接有噴嘴,使上述冷卻液向上述內框撞擊為螺旋狀。Preferably, nozzles are connected at a plurality of locations in the circumferential direction at the upper part in the axial direction of the cylindrical body, so that the cooling liquid strikes the inner frame in a spiral shape.

較佳的是,在上述前端折彎部的前端具備用於在與上述內框之間形成預定間隙的翻折端部。Preferably, a tip end for forming a predetermined gap with the inner frame is provided at the tip end of the tip bending portion.

更具體的本發明提供一種金屬粉末的製造方法,其特徵在於,包括:沿著設置於熔融金屬供給部的下方的筒體的內周面形成冷卻液的液流的步驟;和將熔融金屬從上述熔融金屬供給部向上述冷卻液的液流進行噴出的步驟,該金屬粉末的製造方法使用上述任一項所記載的金屬粉末製造裝置,從在上述筒體的上部在上述筒體的內側所具備的上述穩定流形成用空間部,通過作為上述冷卻液噴出部的上述前端折彎部與上述內周面之間的間隙,沿著上述筒體的上述內周面噴出上述冷卻液。More specifically, the present invention provides a method of manufacturing a metal powder, which includes the steps of forming a flow of a cooling liquid along the inner peripheral surface of a cylinder provided below a molten metal supply portion; and removing molten metal from The step of ejecting the molten metal supply part into the flow of the cooling liquid, the method for producing metal powder using the metal powder production device described in any one of the above, from the upper part of the cylindrical body to the inner side of the cylindrical body The space portion for forming a stable flow is provided to eject the cooling liquid along the inner peripheral surface of the cylindrical body through a gap between the front-end bent portion serving as the cooling liquid ejecting portion and the inner peripheral surface.

以下,基於附圖所示的實施方式說明本發明。Hereinafter, the present invention will be described based on the embodiments shown in the drawings.

第一實施方式First embodiment

如圖1所示,本發明一個實施方式的金屬粉末製造裝置10是用於將熔融金屬21通過霧化法(氣體霧化法)進行粉末化,得到由多個金屬粒子構成的金屬粉末的裝置。該裝置10具有熔融金屬供給部20、配置於金屬供給部20的垂直方向的下方的冷卻部30。附圖中,垂直方向是沿著Z軸的方向。As shown in FIG. 1, a metal powder manufacturing apparatus 10 according to an embodiment of the present invention is an apparatus for powdering molten metal 21 by an atomization method (gas atomization method) to obtain metal powder composed of a plurality of metal particles. . This device 10 includes a molten metal supply unit 20 and a cooling unit 30 disposed below the metal supply unit 20 in the vertical direction. In the drawings, the vertical direction is the direction along the Z axis.

熔融金屬供給部20具有收容熔融金屬21的耐熱性容器22。在耐熱性容器22的外周配置有加熱用線圈24,將收容於容器22的內部的熔融金屬21加熱並維持成熔融狀態。在容器22的底部形成有噴出口23,熔融金屬21從該噴出口23朝向構成冷卻部30的筒體32的內周面33作為滴下熔融金屬21a被噴出。The molten metal supply unit 20 has a heat-resistant container 22 that accommodates the molten metal 21. A heating coil 24 is arranged on the outer periphery of the heat-resistant container 22 to heat and maintain the molten metal 21 contained in the container 22 in a molten state. A discharge port 23 is formed at the bottom of the container 22, and the molten metal 21 is discharged from the discharge port 23 toward the inner peripheral surface 33 of the cylindrical body 32 constituting the cooling unit 30 as the dripped molten metal 21 a.

在容器22的外底壁的外周部,以包圍噴出口23的方式配置有氣體噴射噴嘴26。在氣體噴射噴嘴26具備有氣體噴射口27。從氣體噴射口27朝向從噴出口23噴出的滴下熔融金屬21a噴射高壓氣體。高壓氣體從由噴出口23噴出的熔融金屬的周圍整周朝向斜下方向噴射,滴下熔融金屬21a成為多個液滴,並沿著氣體的流動朝向筒體32的內周面行進。A gas injection nozzle 26 is arranged on the outer peripheral portion of the outer bottom wall of the container 22 so as to surround the discharge port 23. The gas injection nozzle 26 is provided with a gas injection port 27. High-pressure gas is injected from the gas injection port 27 toward the dropped molten metal 21a ejected from the injection port 23. The high-pressure gas is injected obliquely downward from the entire circumference of the molten metal ejected from the ejection port 23, the molten metal 21 a is dropped into a plurality of droplets, and travels toward the inner circumferential surface of the cylinder 32 along the flow of the gas.

熔融金屬21也可以含有任意元素,例如能夠使用含有Ti、Fe、Si、B、Cr、P、Cu、Nb(鈮)、Zr的至少任意種的金屬。這些元素的活性高,含有這些元素的熔融金屬21通過短時間的與空氣的接觸,容易氧化而形成氧化膜,而難以進行微細化。如上所述,金屬粉末製造裝置10通過使用惰性氣體作為從氣體噴射噴嘴26的氣體噴射口27噴射的氣體,從而即使是容易氧化的熔融金屬21,也能夠容易進行粉末化。The molten metal 21 may contain any element. For example, at least any kind of metal containing Ti, Fe, Si, B, Cr, P, Cu, Nb (niobium), and Zr can be used. These elements have high activity, and the molten metal 21 containing these elements is easily oxidized to form an oxide film by short-term contact with air, and it is difficult to miniaturize. As described above, the metal powder manufacturing apparatus 10 uses inert gas as the gas injected from the gas injection port 27 of the gas injection nozzle 26, so that even the molten metal 21 that is easily oxidized can be easily powdered.

作為從氣體噴射口27噴射的氣體,較佳為氮氣、氬氣、氦氣等的惰性氣體或氨分解氣體等的還原性氣體,但如果是熔融金屬21難以氧化的金屬,則也可以是空氣。The gas injected from the gas injection port 27 is preferably an inert gas such as nitrogen, argon, or helium, or a reducing gas such as an ammonia decomposition gas. However, if the molten metal 21 is difficult to oxidize, it may be air. .

本實施方式中,筒體32的軸心O相對於垂直線Z以預定角度θ1傾斜。作為預定角度θ1,沒有特別限定,但較佳為5~45度。通過設為這種角度範圍,容易使來自噴出口23的滴下熔融金屬21a朝向形成於筒體32的內周面33的冷卻液層50噴出。In this embodiment, the axis O of the cylinder 32 is inclined at a predetermined angle θ1 with respect to the vertical line Z. The predetermined angle θ1 is not particularly limited, but is preferably 5 to 45 degrees. By setting it as such an angle range, the dripped molten metal 21a from the ejection port 23 can be easily ejected toward the coolant layer 50 formed on the inner peripheral surface 33 of the cylindrical body 32.

向冷卻液層50噴出的滴下熔融金屬51與冷卻液層50撞擊,進一步被分斷並微細化,並且進行冷卻固化,而成為固體狀的金屬粉末。沿著筒體32的軸心O在下方設置有排出部34,可將冷卻液層50所包含的金屬粉末與冷卻液一起向外部排出。與冷卻液一起排出的金屬粉末在外部的儲存槽等中與冷卻液分離而被取出。此外,作為冷卻液,沒有特別限定,可使用冷卻水。The dripping molten metal 51 sprayed onto the cooling liquid layer 50 collides with the cooling liquid layer 50, is further divided and refined, and is cooled and solidified to become a solid metal powder. A discharge portion 34 is provided below the axis O of the cylinder 32, and the metal powder contained in the coolant layer 50 can be discharged to the outside together with the coolant. The metal powder discharged together with the cooling liquid is separated from the cooling liquid in an external storage tank or the like and taken out. In addition, the cooling liquid is not particularly limited, and cooling water can be used.

本實施方式中,在筒體32的軸心O方向的上部具備內框38。內框38利用與其一體成形的安裝凸緣39而安裝於筒體32的上部。內框38的安裝方法沒有特別限定,也可以與筒體32一體成形。內框38具有比筒體32的內周面33的內徑小的內徑,與筒體32的內周面配置成同心狀。本實施方式中,內框38的內周面和筒體32的內周面配置成大致平行。In the present embodiment, the inner frame 38 is provided at the upper portion of the cylindrical body 32 in the direction of the axis O. The inner frame 38 is attached to the upper portion of the cylindrical body 32 using an attachment flange 39 integrally formed therewith. The mounting method of the inner frame 38 is not particularly limited, and may be integrally formed with the cylinder 32. The inner frame 38 has an inner diameter smaller than the inner diameter of the inner peripheral surface 33 of the cylindrical body 32 and is arranged concentrically with the inner peripheral surface of the cylindrical body 32. In this embodiment, the inner peripheral surface of the inner frame 38 and the inner peripheral surface of the cylindrical body 32 are arranged substantially parallel.

在與內框38對應的筒體32的上部位置形成有作為冷卻液層形成部的噴嘴37。在噴嘴37形成有向筒體32的內側開口的噴嘴孔37a。噴嘴孔37a以與內框38按照預定間隙面對面的方式形成。A nozzle 37 as a coolant layer forming portion is formed at an upper position of the cylindrical body 32 corresponding to the inner frame 38. The nozzle 37 is formed with a nozzle hole 37 a that opens to the inside of the cylinder 32. The nozzle hole 37a is formed to face the inner frame 38 with a predetermined gap.

在沿著內框38的軸心O的下端部具備有前端折彎部(冷卻液層形成部)38a。本實施方式中,前端折彎部38a具有從內框38的下端起與軸心O大致垂直地向徑向的外側擴展的板形狀,前端折彎部38a的外周端與內周面33之間的間隙構成周方向上間斷(也可以連續)的冷卻液噴出部52。冷卻液噴出部52的徑向寬度t1沒有特別限定,可根據與冷卻液層50的厚度的關係決定,較佳為1~50mm。另外,寬度t1也可以比冷卻液層50的厚度薄。The lower end portion along the axis O of the inner frame 38 is provided with a tip bending portion (coolant layer forming portion) 38a. In the present embodiment, the front end bent portion 38a has a plate shape that extends from the lower end of the inner frame 38 to the radial direction outward substantially perpendicular to the axis O, and between the outer peripheral end of the front end bent portion 38a and the inner peripheral surface 33 The gap constitutes a coolant discharge portion 52 that is intermittent (may be continuous) in the circumferential direction. The radial width t1 of the coolant discharge portion 52 is not particularly limited, and can be determined according to the relationship with the thickness of the coolant layer 50, and is preferably 1 to 50 mm. In addition, the width t1 may be thinner than the thickness of the coolant layer 50.

另外,通過前端折彎部38a從與內周面33同心狀的內框38向徑向的外側突出,從而在噴嘴孔37a的內側形成與噴嘴孔37a相對的穩定流形成部(穩定流形成用空間)40。穩定流形成部40的內容積根據沿著內框38的軸心O的長度L1和前端折彎部38a的徑向寬度t2決定。前端折彎部38a的徑向寬度t2越大,穩定流形成部40的內容積越大,作為穩定流形成部的功能越大,但有減窄滴下熔融金屬21a進入筒體32的內部的開口面積的傾向。較佳以前端折彎部38a的徑向寬度t2相對於冷卻液噴出部52的徑向寬度t1的t2/t1成為1/10~9/10的方式來決定。In addition, the front end bent portion 38a protrudes radially outward from the inner frame 38 concentric with the inner peripheral surface 33, thereby forming a stable flow forming portion (for stable flow forming) facing the nozzle hole 37a inside the nozzle hole 37a Space) 40. The internal volume of the steady flow forming portion 40 is determined based on the length L1 along the axis O of the inner frame 38 and the radial width t2 of the tip bent portion 38a. The greater the radial width t2 of the tip bending portion 38a, the larger the internal volume of the steady flow forming portion 40, and the greater the function as the steady flow forming portion, but there is an opening that narrows the drop of the molten metal 21a into the inside of the barrel 32 Area tendency. Preferably, the radial width t2 of the front-end bent portion 38a relative to the radial width t1 of the coolant discharge portion 52 is determined to be 1/10 to 9/10.

穩定流形成部40中,從噴嘴孔37a朝向半徑方向的內側的冷卻液與內框38撞擊,進一步在凸緣39朝向沿著軸心O的上側的液流被限制,在前端折彎部38a朝向沿著軸心O的下側的液流被限制。因此,從噴嘴孔37a流出並朝向徑向的內側的冷卻液在穩定流形成部40中使亂流暫時性地穩定化,從冷卻液噴出部52沿著內周面以高速度噴出,能夠在內周面33的內側沿著軸心O形成冷卻液層50。此外,穩定流形成部40在筒體32的上部配置於冷卻液噴出部52的內側(內徑側)。即,利用內框38和前端折彎部38a,穩定流形成用空間部40在筒體32的上部形成於冷卻液噴出部52的內徑側。In the steady flow forming portion 40, the coolant flowing from the nozzle hole 37a toward the radially inner side collides with the inner frame 38, and the flow of the flange 39 toward the upper side along the axis O is restricted, and the tip bending portion 38a The flow toward the lower side along the axis O is restricted. Therefore, the cooling liquid flowing out from the nozzle hole 37a toward the radially inner side temporarily stabilizes the turbulent flow in the steady flow forming portion 40, and is discharged from the cooling liquid ejecting portion 52 at a high speed along the inner peripheral surface, so that The inner side of the inner peripheral surface 33 forms a coolant layer 50 along the axis O. In addition, the steady flow forming portion 40 is disposed inside the coolant ejection portion 52 (inner diameter side) at the upper portion of the cylinder 32. That is, with the inner frame 38 and the front-end bent portion 38 a, the stable flow forming space portion 40 is formed on the inner diameter side of the cooling liquid ejecting portion 52 at the upper portion of the cylindrical body 32.

內框38的軸方向長度L1只要為覆蓋噴嘴孔37a的程度的長度即可,以在筒體32的內周面33上露出充分的軸方向長度L0的冷卻液層50的液面。露出於內側的冷卻液層50的軸方向長度L0與內框38的軸方向長度L1相比,較佳為5~500倍的長度。另外,筒體32的內周面33的內徑沒有特別限定,較佳為50~500mm。The axial length L1 of the inner frame 38 only needs to be a length that covers the nozzle hole 37 a so that the liquid surface of the cooling liquid layer 50 with a sufficient axial length L0 is exposed on the inner peripheral surface 33 of the cylinder 32. The axial length L0 of the coolant layer 50 exposed on the inner side is preferably 5 to 500 times longer than the axial length L1 of the inner frame 38. In addition, the inner diameter of the inner peripheral surface 33 of the cylindrical body 32 is not particularly limited, but is preferably 50 to 500 mm.

本實施方式中,在筒體32的Z軸方向的上部,在周方向的多個部位連接作為螺旋流動形成部的噴嘴37。通過將噴嘴37連接於筒體32的切線方向,從而冷卻液從噴嘴37以繞軸心O進行旋轉的方式進入筒體32的內部。來自筒體32的冷卻液的液流通過噴嘴孔37a,成為具有從內周面33朝向徑向的內側的液流分量的螺旋液流,與內框38的內周面撞擊,在穩定流形成部40提高壓力(靜壓),通過冷卻液噴出部52,沿著筒體32的內周面33進行噴出。In this embodiment, a nozzle 37 as a spiral flow forming portion is connected to a plurality of locations in the circumferential direction at the upper part of the cylindrical body 32 in the Z-axis direction. By connecting the nozzle 37 to the tangential direction of the barrel 32, the cooling liquid enters the barrel 32 from the nozzle 37 so as to rotate around the axis O. The flow of the cooling liquid from the cylinder 32 passes through the nozzle hole 37a and becomes a spiral flow having a liquid flow component from the inner peripheral surface 33 toward the radial inner side, collides with the inner peripheral surface of the inner frame 38, and forms a steady flow The portion 40 raises the pressure (static pressure), and discharges along the inner peripheral surface 33 of the cylinder 32 through the coolant discharge portion 52.

通過從噴嘴37的噴嘴口37a向筒體32的內部供給的冷卻液的旋轉液流和作用於冷卻液的重力,沿著筒體32的內周面33流動的冷卻液成為螺旋狀的液流,形成冷卻液層50。向這樣形成的冷卻液層50的內周側液面入射圖1所示的滴下熔融金屬21a,滴下熔融金屬21a在螺旋液流的冷卻液層50的內部與冷卻液一起流動而被冷卻。The rotating liquid flow of the cooling liquid supplied from the nozzle opening 37a of the nozzle 37 into the cylindrical body 32 and the gravity acting on the cooling liquid cause the cooling liquid flowing along the inner peripheral surface 33 of the cylindrical body 32 to become a spiral liquid flow , Forming coolant layer 50. The drip molten metal 21a shown in FIG. 1 is incident on the inner peripheral liquid surface of the cooling liquid layer 50 formed in this way, and the dripping molten metal 21a flows together with the cooling liquid inside the cooling liquid layer 50 of the spiral flow to be cooled.

本實施方式的金屬粉末製造裝置10和使用其的金屬粉末的製造方法中,在從金屬供給部20的噴出口23噴出的滴下熔融金屬21a與冷卻液層50接觸的位置的上游側具備附有前端折彎部38a的內框38。因此,通過噴嘴孔37a,將從內周面33朝向半徑方向的內側的冷卻液的從內周面朝向半徑方向的內側的冷卻液的液流,利用穩定流形成部40穩定冷卻液,然後,能夠從冷卻液噴出部52向沿著筒體32的內周面33流動的方向偏向。The metal powder manufacturing apparatus 10 of the present embodiment and the metal powder manufacturing method using the same are provided on the upstream side of the position where the dropped molten metal 21a ejected from the ejection port 23 of the metal supply part 20 contacts the coolant layer 50 The inner frame 38 of the tip bending portion 38a. Therefore, through the nozzle hole 37a, the flow of the coolant from the inner circumferential surface 33 toward the radially inner side from the inner circumferential surface toward the radial inner side is stabilized by the stable flow forming portion 40, and then, It is possible to deviate from the coolant discharge portion 52 in the direction of flowing along the inner peripheral surface 33 of the cylindrical body 32.

即,穩定流形成部40中,朝向半徑方向的內側的冷卻液與內框38撞擊,在前端折彎部38a,朝向沿著軸心O的下側的流動被限制,冷卻液在穩定流形成部40使亂流暫時性地穩定化,並從冷卻液噴出部52沿著筒體32的內周面噴出。因此,即使在增大冷卻液的流量,或增大冷卻液的速度的情況下,也可容易地沿著筒體32的內周面形成均勻的厚度的冷卻液層50,並生產高品質的金屬粉末。That is, in the steady flow forming portion 40, the cooling liquid toward the radially inner side collides with the inner frame 38, and the flow toward the lower side along the axis O is restricted at the tip bending portion 38a, and the cooling liquid is formed in the steady flow The portion 40 temporarily stabilizes the turbulent flow, and is ejected from the coolant ejection portion 52 along the inner circumferential surface of the cylinder 32. Therefore, even when the flow rate of the coolant is increased or the speed of the coolant is increased, the coolant layer 50 with a uniform thickness can be easily formed along the inner circumferential surface of the cylinder 32, and high-quality mineral powder.

另外,內框38的前端折彎部38a的內徑比筒體32的內周面33的內徑小,前端折彎部38a與內周面33之間的間隙構成用於使冷卻液沿著內周面33流動的冷卻液噴出部52。通過這樣構成,即使在增大冷卻液的流量,或增大冷卻液的速度的情況下,也容易沿著筒體32的內周面形成均勻的厚度的冷卻液層50。In addition, the inner diameter of the front end bent portion 38a of the inner frame 38 is smaller than the inner diameter of the inner peripheral surface 33 of the cylindrical body 32, and the gap between the front end bent portion 38a and the inner peripheral surface 33 is configured to allow the cooling liquid to The coolant discharge portion 52 flowing on the inner peripheral surface 33. With this configuration, even when the flow rate of the cooling liquid or the speed of the cooling liquid is increased, it is easy to form the cooling liquid layer 50 with a uniform thickness along the inner circumferential surface of the cylindrical body 32.

另外,本實施方式中,內框38安裝於筒體32的軸心O的上方。通過這樣構成,容易在從金屬供給部20噴出的熔融金屬與冷卻液接觸的位置的上游側配置內框38。In addition, in the present embodiment, the inner frame 38 is attached above the axis O of the cylindrical body 32. With such a configuration, it is easy to arrange the inner frame 38 on the upstream side of the position where the molten metal ejected from the metal supply unit 20 comes into contact with the cooling liquid.

另外,本實施方式中,通過將噴嘴37連接於筒體32的切線方向,從而冷卻液從噴嘴37以繞軸心O進行旋轉的方式進入筒體32的內部。通過在從噴嘴37朝向筒體32的內周面33的切線方向噴出冷卻液的位置的內側安裝內框38,容易沿著筒體32的內周面33形成由均勻的厚度的螺旋液流構成的冷卻液層50。In addition, in this embodiment, by connecting the nozzle 37 to the tangential direction of the barrel 32, the cooling liquid enters the barrel 32 from the nozzle 37 so as to rotate around the axis O. By installing the inner frame 38 inside the position where the cooling liquid is ejected from the nozzle 37 toward the tangential direction of the inner peripheral surface 33 of the cylindrical body 32, it is easy to form a spiral liquid flow of uniform thickness along the inner peripheral surface 33 of the cylindrical body 32的 冷 液 层 50。 The coolant layer 50.

此外,上述的實施方式中,以如下方式構成,從噴嘴孔37a向框體38的內周面以螺旋液流進行撞擊,液流的方向被改變,通過冷卻液噴出部52,沿著筒體32的內周面33螺旋狀流動。但是,本實施方式中,不限定於這種流動。In addition, in the above-described embodiment, it is configured such that the spiral liquid flow impinges from the nozzle hole 37a to the inner peripheral surface of the frame body 38, and the direction of the liquid flow is changed. The inner peripheral surface 33 of the 32 flows spirally. However, in this embodiment, it is not limited to such a flow.

例如也可以通過將噴嘴37大致垂直地連接於筒體32的外周面,使從形成於筒體32的內周面33的噴嘴孔37a朝向框體38的內周面的液流成為非螺旋液流(也可以在一部分中混入螺旋液流)。在該情況下,非螺旋液流與框體38的內周面撞擊,液流的方向被改變,通過冷卻液噴出部52噴出,而形成沿著筒體32的內周面33的非螺旋液流的冷卻層50。For example, the liquid flow from the nozzle hole 37a formed in the inner peripheral surface 33 of the cylindrical body 32 toward the inner peripheral surface of the frame body 38 may be turned into a non-spiral liquid by connecting the nozzle 37 substantially vertically to the outer peripheral surface of the cylindrical body 32 Flow (a spiral liquid flow can also be mixed in a part). In this case, the non-spiral liquid flow collides with the inner circumferential surface of the frame 38, the direction of the liquid flow is changed, and is ejected through the cooling liquid ejection portion 52 to form a non-spiral liquid along the inner circumferential surface 33 of the cylindrical body 32流 的 冷 层 50。 The cooling layer 50.

第二實施方式Second embodiment

如圖2所示,本發明一個實施方式所涉及的金屬粉末製造裝置10a除了以下所示的以外,與第一實施方式一樣,對共同的部件標註共同的部件名稱和符號,共同的部分的說明省略一部分。As shown in FIG. 2, the metal powder manufacturing apparatus 10 a according to an embodiment of the present invention is the same as the first embodiment except for the following, and common parts are marked with common part names and symbols, and common parts are described. Omit a part.

本實施方式中,在冷卻部30a的前端折彎部38a的內徑側前端具備用於在與內框38之間形成預定的徑向間隙t3的翻折穩定流形成部42的翻折端部38b。本實施方式中,翻折端部38b形成為與內框38大致同心,但也可以以能形成翻折穩定流形成部42為條件,與內框38傾斜地形成為錐形狀。In the present embodiment, a folded end portion of the folded stable flow forming portion 42 for forming a predetermined radial gap t3 between the inner frame 38 and the inner diameter side front end of the front end bent portion 38a of the cooling portion 30a is provided 38b. In this embodiment, the folded end portion 38b is formed to be substantially concentric with the inner frame 38, but it may be formed obliquely to the inner frame 38 in a tapered shape on the condition that the folded stable flow forming portion 42 is formed.

沿著翻折端部38b的軸心O的長度L2沒有特別限定,但較佳比沿著內框38的軸心O的長度L1短,翻折端部38b處於不堵塞從噴嘴孔37a朝向內框38的冷卻液的流動那樣的關係。翻折穩定流形成部42的徑向間隙t3與前端折彎部38a的徑向寬度t2相比,小了翻折端部38b的板厚量。The length L2 along the axis O of the folded end 38b is not particularly limited, but it is preferably shorter than the length L1 along the axis O of the inner frame 38. The folded end 38b is not blocked from the nozzle hole 37a toward the inside The relationship of the flow of the coolant in the frame 38. The radial gap t3 of the folded steady flow forming portion 42 is smaller than the radial width t2 of the tip bent portion 38a by the thickness of the folded end portion 38b.

本實施方式中,通過具備翻折端部38b,在穩定流形成部40的沿著軸心O的下方形成翻折穩定流形成部42,從冷卻液噴出部52流出的冷卻液的流動進一步穩定化,容易沿著筒體32的內周面33形成均勻的厚度的冷卻液層50。In the present embodiment, by providing the folded end portion 38b, the folded stable flow forming portion 42 is formed below the stable flow forming portion 40 along the axis O, and the flow of the cooling fluid flowing from the cooling liquid ejecting portion 52 is further stabilized It is easy to form a coolant layer 50 with a uniform thickness along the inner peripheral surface 33 of the cylindrical body 32.

第三實施方式Third embodiment

如圖3所示,本發明的第三實施方式的金屬粉末製造裝置110和金屬粉末的製造方法除了以下所示的以外,其它與第一實施方式或第二實施方式一樣,對共同的部件標註共同的部件名稱和符號,共同的部分的說明省略一部分。As shown in FIG. 3, the metal powder manufacturing apparatus 110 and the metal powder manufacturing method of the third embodiment of the present invention are the same as those of the first embodiment or the second embodiment except for the following, and common components are marked. Common part names and symbols, and description of common parts are omitted.

本實施方式中,金屬粉末製造裝置110在冷卻部130a中具有作為冷卻液層形成部的流路盒子136。流路盒子136安裝於筒體32的軸心O方向的上部。在流路盒子136的內部形成有流路。在該流路盒子136的軸心O方向的上部(或下部)連接有多個噴嘴137。也可以以在流路盒子136的內部形成螺旋狀的冷卻液的液流的方式,這些噴嘴137在流路盒子136的上部(或下部)相對於軸心O傾斜地連接於外周側。In the present embodiment, the metal powder manufacturing apparatus 110 has the flow path box 136 as the coolant layer forming portion in the cooling portion 130a. The flow path box 136 is attached to the upper portion of the cylindrical body 32 in the direction of the axis O. A flow path is formed inside the flow path box 136. A plurality of nozzles 137 are connected to the upper portion (or lower portion) of the channel box 136 in the direction of the axis O. These nozzles 137 may be connected to the outer peripheral side obliquely with respect to the axis O at the upper portion (or lower portion) of the flow channel box 136 in such a manner that a spiral flow of coolant is formed inside the flow channel box 136.

或者,這些噴嘴137也可以在流路盒子136的上部(或下部)相對於軸心O平行地連接於外周側。或者,噴嘴137也可以以在流路盒子136的內部形成螺旋狀的冷卻液的液流的方式連接於流路盒子136的外周面。Alternatively, these nozzles 137 may be connected to the outer peripheral side parallel to the axis O at the upper portion (or lower portion) of the flow path case 136. Alternatively, the nozzle 137 may be connected to the outer circumferential surface of the flow channel box 136 so as to form a spiral flow of coolant inside the flow channel box 136.

在流路盒子136的內周側,內框138(與圖1所示的內框38對應)與流路盒子136一體地形成。內框138具有比筒體32的內周面33小的內徑,在內框138的下端部一體地成型有前端折彎部138a。前端折彎部138a與內周面33之間的間隙成為冷卻液噴出部52。本實施方式中,通過在流路盒子136的下方內周側形成周方向孔,能夠形成冷卻液噴出部52。冷卻液噴出部52的外徑與內周面33的內徑一致,冷卻液噴出部52的內徑與前端折彎部138a的內徑一致。On the inner peripheral side of the flow path box 136, an inner frame 138 (corresponding to the inner frame 38 shown in FIG. 1) is formed integrally with the flow path box 136. The inner frame 138 has an inner diameter smaller than the inner circumferential surface 33 of the cylindrical body 32, and the lower end portion of the inner frame 138 is integrally formed with a front end bent portion 138a. The gap between the front-end bent portion 138a and the inner peripheral surface 33 becomes the coolant discharge portion 52. In this embodiment, by forming a circumferential hole in the lower inner circumferential side of the flow channel case 136, the coolant ejection portion 52 can be formed. The outer diameter of the coolant ejection portion 52 coincides with the inner diameter of the inner peripheral surface 33, and the inner diameter of the coolant ejection portion 52 coincides with the inner diameter of the tip bent portion 138a.

本實施方式中,通過從噴嘴137進入流路盒子136的內部的冷卻液的液流,從冷卻液噴出部52流出的冷卻液的液流成為沿著內周面33的螺旋狀的液流,並形成冷卻液層50。或從冷卻液噴出部52流出的冷卻液的液流成為與沿著內周面33的軸心O平行的液流,並形成冷卻液層50。In the present embodiment, the flow of the cooling liquid flowing from the cooling liquid ejection portion 52 into a spiral flow along the inner peripheral surface 33 by the flow of the cooling liquid entering the flow path case 136 from the nozzle 137.与 Formation of coolant layer 50. Or, the flow of the cooling liquid flowing out from the cooling liquid ejection portion 52 becomes a liquid flow parallel to the axis O along the inner peripheral surface 33, and the cooling liquid layer 50 is formed.

本實施方式的金屬粉末製造裝置110和使用其的金屬粉末的製造方法中,在從金屬供給部20的噴出口23噴出的滴下熔融金屬21a與冷卻液層50接觸的位置的上游側具備附有前端折彎部138a的內框138。因此,能夠使在流路盒子136的內部朝向半徑方向的內側的冷卻液,利用穩定流形成部40穩定冷卻液,然後,從前端折彎部138a與內周面33之間的冷卻液噴出部52沿著筒體32的內周面33進行噴出。The metal powder manufacturing apparatus 110 of the present embodiment and the metal powder manufacturing method using the same are provided with an attachment on the upstream side of the position where the dropped molten metal 21a ejected from the ejection port 23 of the metal supply part 20 contacts the coolant layer 50 The inner frame 138 of the tip bending portion 138a. Therefore, it is possible to stabilize the cooling liquid in the radial direction inside of the flow channel case 136 by the steady flow forming portion 40, and then, from the cooling liquid ejecting portion between the front-end bent portion 138a and the inner peripheral surface 33 52 is ejected along the inner peripheral surface 33 of the cylinder 32.

因此,即使在增大冷卻液的流量,或增大冷卻液的速度的情況下,也可容易地沿著筒體32的內周面形成均勻的厚度的冷卻液層50,並生產高品質的金屬粉末。此外,本實施方式中,也與第二實施方式一樣,也可以在前端折彎部138a的徑向外側端具備翻折端部(圖2所示的翻折端部38b)。Therefore, even when the flow rate of the coolant is increased or the speed of the coolant is increased, the coolant layer 50 with a uniform thickness can be easily formed along the inner circumferential surface of the cylinder 32, and high-quality mineral powder. In addition, in this embodiment, as in the second embodiment, a folded end portion (folded end portion 38b shown in FIG. 2) may be provided at the radially outer end of the front-end bent portion 138a.

第四實施方式Fourth embodiment

如圖4所示,本發明的一個實施方式的金屬粉末製造裝置210除了以下所示的以外,其它與第一實施方式~第三實施方式一樣,對共同的部件標註共同的部件名稱和符號,共同的部分的說明省略一部分。As shown in FIG. 4, the metal powder manufacturing apparatus 210 according to an embodiment of the present invention is the same as the first to third embodiments except for the following, and the common parts are marked with common part names and symbols. A description of common parts is omitted.

圖1~圖3所示的實施方式中,前端折彎部38a或138a相對於內框38或138大致垂直,但未必是垂直,也可以以傾斜角度θ2傾斜。此外,本實施方式中,在流路盒子236的軸心O方向的上部(或下部)連接有多個噴嘴237。In the embodiment shown in FIGS. 1 to 3, the tip bent portion 38a or 138a is substantially perpendicular to the inner frame 38 or 138, but it is not necessarily perpendicular, and may be inclined at an inclination angle θ2. In addition, in this embodiment, a plurality of nozzles 237 are connected to the upper portion (or lower portion) in the direction of the axis O of the flow channel case 236.

本實施方式中,在冷卻部230,相對於前端折彎部238a的內框238或軸心O的傾斜角度(錐形角度)θ2沒有特別限定,較佳為5~45度。通過使前端折彎部238a向軸方向的下端傾斜為錐形狀,作用冷卻液向筒體32的內周面33進行擠壓的方向的力,容易沿著筒體32的內周面33形成均勻的厚度的冷卻液層50。本實施方式中,與第二實施方式一樣,也可以在前端折彎部238a的徑向外側端具備翻折端部(圖2所示的翻折端部38b)。In the present embodiment, the inclination angle (taper angle) θ2 of the cooling portion 230 with respect to the inner frame 238 of the tip bending portion 238a or the axis O is not particularly limited, but is preferably 5 to 45 degrees. By inclining the front end bent portion 238a toward the lower end in the axial direction into a tapered shape, a force acting in the direction in which the cooling liquid squeezes against the inner peripheral surface 33 of the cylindrical body 32 acts to form a uniform shape along the inner peripheral surface 33 of the cylindrical body The thickness of the coolant layer 50. In this embodiment, as in the second embodiment, a folded end portion (folded end portion 38b shown in FIG. 2) may be provided at the radially outer end of the front-end bent portion 238a.

此外,本發明不限定於上述的實施方式,能夠在本發明的範圍內進行各種改變。In addition, the present invention is not limited to the above-described embodiment, and various changes can be made within the scope of the present invention.

[實施例][Example]

以下,進一步基於詳細的實施例說明本發明,但本發明不限定於這些實施例。Hereinafter, the present invention will be further described based on detailed examples, but the present invention is not limited to these examples.

實施例Examples

使用圖1所示的金屬粉末製造裝置10,製造由Fe-Si-B(實驗編號6)、Fe-Si-Nb-B-Cu(實驗編號7)、Fe-Si-B-P-Cu(實驗編號8)、Fe-Nb-B(實驗編號9)、Fe-Zr-B(實驗編號10)構成的金屬粉末。Using the metal powder manufacturing apparatus 10 shown in FIG. 1, Fe-Si-B (Experiment No. 6), Fe-Si-Nb-B-Cu (Experiment No. 7), and Fe-Si-BP-Cu (Experiment No. 8) Metal powder composed of Fe-Nb-B (Experiment No. 9) and Fe-Zr-B (Experiment No. 10).

各實驗中,溶解溫度1500℃、噴射氣體壓力5MPa、使用氣體種類氬氣並設為恆定,螺旋水流條件的泵壓為7.5kPa。實施例中,能夠製造平均粒徑約25μm的金屬粉末。平均粒徑使用乾式細微性分佈測定裝置(HELLOS)求得。另外,通過粉末X射線繞射法評價實驗編號6~10中製作的金屬粉末的結晶分析。金屬粉末的磁特性通過利用Hc儀錶測定保磁力(Oe)來進行評價。將結果表示於表1中。另外,觀察到冷卻液層50的厚度為30mm,軸心O方向上偏差較小。In each experiment, the dissolution temperature was 1500 ° C, the injection gas pressure was 5 MPa, the gas type argon gas was used, and it was set to be constant, and the pump pressure in the spiral water flow condition was 7.5 kPa. In the examples, metal powder having an average particle diameter of about 25 μm can be produced. The average particle diameter is determined using a dry fineness distribution measuring device (HELLOS). In addition, the crystal analysis of the metal powders produced in Experiment Nos. 6 to 10 was evaluated by the powder X-ray diffraction method. The magnetic properties of the metal powder were evaluated by measuring the coercive force (Oe) with an Hc meter. The results are shown in Table 1. In addition, the thickness of the coolant layer 50 was observed to be 30 mm, and the deviation in the direction of the axis O was small.

比較例Comparative example

除了不具備框體38及前端折彎部以外,使用與實施例相同的金屬粉末製造裝置,以與實施例相同的方式製造金屬粉末(實驗編號1~5),並進行同樣的評價。將結果示於表1中。觀察到冷卻液層50的厚度為30mm,軸心O方向上偏差較大。The metal powder (experiment numbers 1 to 5) was manufactured in the same manner as in the example using the same metal powder manufacturing apparatus as in the example except that the frame body 38 and the tip bending portion were not provided, and the same evaluation was performed. The results are shown in Table 1. It is observed that the thickness of the coolant layer 50 is 30 mm, and the deviation in the direction of the axis O is large.

將表1的實施例和比較例相比時,實施例中,磁特性提高且非晶質性提高。認為這是由於,冷卻液在穩定流形成部40被一次性地截止並穩定化,由此,得到更優質的螺旋水流,並得到均勻的冷卻效果。另外,還存在通過粉末X射線繞射進行金屬粉末的結晶分析,結果具有結晶引起的峰值的比較例。對於金屬粉末的磁特性,能夠確認到比較例的保磁力全部比實施例大,實施例優異,因此,可知能夠得到更均勻的冷卻效果。When the examples of Table 1 are compared with the comparative examples, the magnetic properties are improved and the amorphousness is improved in the examples. It is considered that this is because the cooling liquid is once cut off and stabilized in the steady flow forming portion 40, thereby obtaining a higher-quality spiral water flow and obtaining a uniform cooling effect. In addition, there are comparative examples in which crystallization analysis of metal powder by powder X-ray diffraction has a peak due to crystallization. Regarding the magnetic properties of the metal powder, it can be confirmed that the coercive force of the comparative example is all larger than that of the example, and the example is excellent. Therefore, it can be seen that a more uniform cooling effect can be obtained.

當將上述比較例和實施例進行比較時,通過具備穩定流形成部40,即使在泵壓較高的狀態下,也可得到穩定的水流,因此,可得到均勻的冷卻效果,即使相對於以往不能製作的組成也能夠確認非晶質性,還能夠進一步改善磁特性。When comparing the above comparative example with the example, the provision of the stable flow forming part 40 can obtain a stable water flow even in a state where the pump pressure is high, and therefore, a uniform cooling effect can be obtained even compared to the conventional Amorphous properties can also be confirmed for compositions that cannot be produced, and magnetic properties can be further improved.

表1 Table 1

10、10a、110、210‧‧‧金屬粉末製造裝置10, 10a, 110, 210‧‧‧‧Metal powder manufacturing equipment

20‧‧‧熔融金屬供給部20‧‧‧Molten Metal Supply Department

21‧‧‧熔融金屬21‧‧‧Molten metal

21a‧‧‧滴下熔融金屬21a‧‧‧Dripping molten metal

22‧‧‧容器22‧‧‧Container

23‧‧‧噴出口23‧‧‧Spray outlet

24‧‧‧加熱用線圈24‧‧‧Heating coil

26‧‧‧氣體噴射噴嘴26‧‧‧Gas injection nozzle

27‧‧‧氣體噴射口27‧‧‧Gas injection port

30、30a、130、230‧‧‧冷卻部30, 30a, 130, 230

32‧‧‧筒體32‧‧‧Cylinder

33‧‧‧內周面33‧‧‧Inner peripheral surface

34‧‧‧排出部34‧‧‧Exhaust

35‧‧‧調整板35‧‧‧Adjustment plate

37‧‧‧噴嘴37‧‧‧ nozzle

37a‧‧‧噴嘴孔37a‧‧‧Nozzle hole

136、236‧‧‧流路盒子136, 236‧‧‧flow box

137、237‧‧‧噴嘴137, 237‧‧‧ nozzle

38、138、238‧‧‧內框38, 138, 238‧‧‧ inner frame

38a、138a、238a‧‧‧前端折彎部38a, 138a, 238a

38b‧‧‧翻折端部38b‧‧‧Folded end

39‧‧‧安裝凸緣39‧‧‧Mounting flange

40‧‧‧穩定流形成部(穩定流形成用空間)40‧‧‧Stable flow formation section (space for stable flow formation)

42‧‧‧翻折穩定流形成部42‧‧‧Folding stable flow forming section

50‧‧‧冷卻液層50‧‧‧coolant layer

52‧‧‧冷卻液噴出部52‧‧‧coolant ejection section

L0、L1‧‧‧軸方向長度L0, L1‧‧‧Axis length

O‧‧‧軸心O‧‧‧Axis

t1、t2、t3‧‧‧寬度t1, t2, t3 ‧‧‧ width

Z‧‧‧垂直線(Z軸)Z‧‧‧Vertical line (Z axis)

θ1、θ2‧‧‧角度θ1, θ2‧‧‧Angle

圖1是本發明的一個實施方式的金屬粉末製造裝置的概略截面圖。 圖2是本發明的另一實施方式的金屬粉末製造裝置的概略截面圖。 圖3是本發明的又一實施方式的金屬粉末製造裝置的概略截面圖。 圖4是本發明的又一實施方式的金屬粉末製造裝置的概略截面圖。FIG. 1 is a schematic cross-sectional view of a metal powder manufacturing apparatus according to an embodiment of the present invention. 2 is a schematic cross-sectional view of a metal powder manufacturing apparatus according to another embodiment of the present invention. 3 is a schematic cross-sectional view of a metal powder manufacturing apparatus according to still another embodiment of the present invention. 4 is a schematic cross-sectional view of a metal powder manufacturing apparatus according to still another embodiment of the present invention.

Claims (5)

一種金屬粉末製造裝置,其特徵在於,包括: 熔融金屬供給部,其噴出熔融金屬; 筒體,其設置於所述熔融金屬供給部的下方;以及 冷卻液層形成部,其沿著所述筒體的內周面形成冷卻液的液流,所述冷卻液的液流冷卻從所述熔融金屬供給部噴出的所述熔融金屬, 所述冷卻液層形成部具有在所述筒體的軸心方向的上部所具備的內框,所述內框具有比所述筒體的內周面的內徑小的內徑,在沿著所述內框的軸心的下端部具備從所述內框向徑向外側突出的前端折彎部,所述前端折彎部的內徑比所述筒體的內周面的內徑小,所述前端折彎部與所述內周面之間的間隙構成用於使所述冷卻液沿著所述內周面流動的冷卻液噴出部,利用所述內框和所述前端折彎部,穩定流形成用空間部在所述筒體的上部形成於所述冷卻液噴出部的內徑側,在所述穩定流形成用空間部,朝向半徑方向的內側的冷卻液與所述內框撞擊,在所述前端折彎部,朝向沿著軸心的下側的液流被限制,所述冷卻液在所述穩定流形成用空間部,使亂流暫時性地穩定化,並從所述冷卻液噴出部沿著所述筒體的內周面噴出。A metal powder manufacturing apparatus, characterized by comprising: a molten metal supply unit that ejects molten metal; a cylinder body that is provided below the molten metal supply unit; and a coolant layer forming unit that extends along the cylinder An inner peripheral surface of the body forms a flow of cooling liquid that cools the molten metal ejected from the molten metal supply portion, and the cooling liquid layer forming portion has an axial center on the cylindrical body An inner frame provided in the upper part in the direction, the inner frame having an inner diameter smaller than the inner diameter of the inner peripheral surface of the cylindrical body, and a lower end portion along the axis of the inner frame A tip bending portion protruding radially outward, the inner diameter of the tip bending portion is smaller than the inner diameter of the inner peripheral surface of the cylinder, and the gap between the tip bending portion and the inner peripheral surface A cooling liquid ejection portion for flowing the cooling liquid along the inner peripheral surface is formed, and a space portion for forming a stable flow is formed on the upper portion of the cylindrical body by the inner frame and the tip bending portion On the inner diameter side of the coolant discharge portion, in the space for forming a steady flow, the coolant inward in the radial direction collides with the inner frame, and the bent portion at the front end faces the axis along the axis The liquid flow on the lower side is restricted, and the cooling liquid is temporarily stabilized in the space for forming a stable flow, and is discharged from the cooling liquid discharge part along the inner circumferential surface of the cylinder . 根據申請專利範圍第1項所述的金屬粉末製造裝置,其中,所述前端折彎部相對於所述內框以預定角度向所述前端折彎部的軸方向的下端傾斜為錐形狀,以作用將所述冷卻液向所述筒體的內周面擠壓的方向的力。The metal powder manufacturing apparatus according to item 1 of the patent application range, wherein the tip bending portion is inclined toward the lower end of the tip bending portion in the axial direction at a predetermined angle with respect to the inner frame in a tapered shape, to A force acts in a direction to squeeze the cooling liquid toward the inner peripheral surface of the cylinder. 根據申請專利範圍第1或2項所述的金屬粉末製造裝置,其中,在所述筒體的軸方向的上部,在周方向的多個部位連接有噴嘴,使所述冷卻液成為向所述內框撞擊為螺旋狀。The apparatus for manufacturing metal powder according to item 1 or 2 of the patent application range, wherein a nozzle is connected to a plurality of parts in the circumferential direction at the upper part of the axial direction of the cylinder, so that the cooling liquid is directed toward the The impact of the inner frame is spiral. 根據申請專利範圍第1~3項中任一項所述的金屬粉末製造裝置,其中,在所述前端折彎部的前端具備用於在與所述內框之間形成預定間隙的翻折端部。The metal powder manufacturing apparatus according to any one of claims 1 to 3, wherein a tip end for forming a predetermined gap with the inner frame is provided at a tip end of the tip bending portion unit. 一種金屬粉末的製造方法,其特徵在於,包括: 沿著設置於熔融金屬供給部的下方的筒體的內周面形成冷卻液的液流的步驟;以及 使熔融金屬從所述熔融金屬供給部向所述冷卻液的液流進行噴出的步驟, 該金屬粉末的製造方法使用申請專利範圍第1~4項中任一項所述的金屬粉末製造裝置,從在所述筒體的上部在所述筒體的內側所具備的所述穩定流形成用空間部,通過作為所述冷卻液噴出部的所述前端折彎部與所述內周面之間的間隙,沿著所述筒體的所述內周面噴出所述冷卻液。A method of manufacturing metal powder, comprising: a step of forming a flow of a cooling liquid along an inner peripheral surface of a cylinder provided below a molten metal supply portion; and causing molten metal to flow from the molten metal supply portion The step of spraying the liquid flow of the cooling liquid, the metal powder manufacturing method uses the metal powder manufacturing apparatus described in any one of claims 1 to 4, from the upper part of the cylinder to the The space for forming a stable flow provided inside the cylindrical body passes along the gap of the cylindrical body through the gap between the front-end bent part as the coolant discharge part and the inner peripheral surface The inner peripheral surface sprays the cooling liquid.
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Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
GB1452510A (en) * 1973-01-05 1976-10-13 Xerox Corp Spheroidization method and apparatus
JPS5582702A (en) * 1978-12-19 1980-06-21 Toyota Motor Corp Production of metal powder
JPS6144111A (en) * 1984-08-07 1986-03-03 Kawasaki Steel Corp Apparatus for producing metallic powder
JPH07107167B2 (en) * 1990-05-10 1995-11-15 株式会社クボタ Method and apparatus for producing rapidly solidified metal powder
JP2672056B2 (en) * 1991-06-05 1997-11-05 株式会社クボタ Method and apparatus for producing metal powder
JP2719074B2 (en) * 1991-06-05 1998-02-25 株式会社クボタ Method and apparatus for producing metal powder
JP3932574B2 (en) * 1996-08-30 2007-06-20 セイコーエプソン株式会社 Metal powder production equipment
JP4181234B2 (en) 1997-09-04 2008-11-12 セイコーエプソン株式会社 Method and apparatus for producing amorphous metal powder
EP1063038B1 (en) * 1998-12-24 2007-08-01 Fukuda Metal Foil & Powder Co., Ltd. Method and apparatus for manufacturing metal powder
JP4488651B2 (en) * 2001-05-23 2010-06-23 高周波熱錬株式会社 Method and apparatus for producing ceramic or metal spherical powder by thermal plasma
JP4207954B2 (en) * 2005-12-20 2009-01-14 セイコーエプソン株式会社 Metal powder production equipment
JP4778355B2 (en) * 2006-04-25 2011-09-21 セイコーエプソン株式会社 Metal powder production equipment
JP5396802B2 (en) * 2008-10-03 2014-01-22 セイコーエプソン株式会社 Metal powder production equipment
JP2010090421A (en) * 2008-10-06 2010-04-22 Seiko Epson Corp Metal powder production apparatus
JP6048216B2 (en) * 2013-02-28 2016-12-21 セイコーエプソン株式会社 Magnesium-based alloy powder and magnesium-based alloy compact
TWI547328B (en) * 2013-12-06 2016-09-01 Metal Ind Res & Dev Ct Metal powder manufacturing method and device
WO2015151420A1 (en) * 2014-03-31 2015-10-08 Jfeスチール株式会社 Processes for producing atomized metal powder
CN104084596B (en) * 2014-07-15 2017-05-03 中国科学院宁波材料技术与工程研究所 Method and device for manufacturing amorphous powder

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