TW201902973A - Photosensitive resin composition, dry film, and printed wiring board - Google Patents
Photosensitive resin composition, dry film, and printed wiring board Download PDFInfo
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- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G03F7/004—Photosensitive materials
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
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- H05K3/28—Applying non-metallic protective coatings
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/282—Applying non-metallic protective coatings for inhibiting the corrosion of the circuit, e.g. for preserving the solderability
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Abstract
Description
本發明有關一種感光性樹脂組成物、乾膜、及印刷線路板。The present invention relates to a photosensitive resin composition, a dry film, and a printed wiring board.
以往,為了製造印刷線路板而使用各種電絕緣性的樹脂組成物,來製造阻焊劑層、鍍抗蝕層(plating resist layer)、抗蝕劑層、層間絕緣層等電絕緣性的層。Conventionally, in order to manufacture printed wiring boards, various electrically insulating resin compositions are used to produce electrically insulating layers such as a solder resist layer, a plating resist layer, a resist layer, and an interlayer insulating layer.
近年來,由於隨著通訊機器、個人電腦等電子機器的高性能化、小型化、薄型化的要求,而必須在由這樣的樹脂組成物所形成的電絕緣性的層形成微細的貫穿孔和開口圖案等,故使用例如感光性樹脂組成物來作為用以形成電絕緣性的層的樹脂組成物。In recent years, in accordance with the requirements for high performance, miniaturization, and thinness of electronic devices such as communication devices and personal computers, it is necessary to form fine through holes and fine through holes in an electrically insulating layer formed of such a resin composition. The opening pattern etc. use a photosensitive resin composition as a resin composition for forming an electrically insulating layer.
例如:專利文獻1揭示一種絕緣膜用感光性樹脂組成物,其含有:(A)含羧基樹脂,其是使二醇化合物與多元羧酸類進行反應而得,且重量平均分子量為2000~40000,酸值為50~200 mgKOH/g;(B)不飽和化合物,其一分子中包含至少1個以上的能夠進行光聚合的乙烯性不飽和鍵;(C)環氧化合物;及,(D)光聚合起始劑。並且,記載了在此絕緣膜用感光性樹脂組成物中添加橡膠成分,即能夠改良與鍍金屬之間的密合性。For example, Patent Document 1 discloses a photosensitive resin composition for an insulating film, which contains: (A) a carboxyl group-containing resin obtained by reacting a diol compound with a polycarboxylic acid, and having a weight average molecular weight of 2,000 to 40,000, The acid value is 50-200 mgKOH / g; (B) an unsaturated compound containing at least one ethylenically unsaturated bond capable of photopolymerization in one molecule; (C) an epoxy compound; and (D) Photopolymerization initiator. Furthermore, it is described that the addition of a rubber component to the photosensitive resin composition for an insulating film can improve the adhesion with a metal plating.
然而,專利文獻1中所記載的絕緣膜用感光性樹脂組成物,雖然能夠一定程度地改良與鍍金屬之間的密合性,但無法減少對絕緣膜用感光性樹脂組成物的硬化物進行除膠渣(desmear)處理後的硬化物的表面粗糙度,而無法獲得良好的高頻特性。此外,因添加橡膠成分,因此,藉由含有鹼金屬鹽及鹼金屬氫氧化物之中的至少一種的水溶液來進行顯影處理時,有解析性會降低而無法形成微細的貫穿孔和開口圖案等之虞。不容易獲得一種感光性樹脂組成物,其能夠形成具有高鍍銅密合性且除膠渣後的粗糙性低的硬化物並且解析性優異。 [先前技術文獻] (專利文獻)However, although the photosensitive resin composition for an insulating film described in Patent Document 1 can improve the adhesion to metal plating to some extent, it is not possible to reduce the amount of curing of the photosensitive resin composition for an insulating film. The surface roughness of the hardened product after desmear treatment does not provide good high-frequency characteristics. In addition, since a rubber component is added, when developing processing is performed with an aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, the resolution is lowered, and fine through holes and opening patterns cannot be formed. Fear. It is not easy to obtain a photosensitive resin composition which can form a hardened product having high copper plating adhesion and low roughness after removing slag, and has excellent resolvability. [Prior Art Literature] (Patent Literature)
專利文獻1:日本專利第4508929號公報Patent Document 1: Japanese Patent No. 4508929
本發明的目的在於提供:一種感光性樹脂組成物,其能夠形成具有高鍍銅密合性且除膠渣後的粗糙性低的硬化物,並且解析性優異;一種乾膜,其含有此感光性樹脂組成物;一種印刷線路板,其具備層間絕緣層,該層間絕緣層包含此感光性樹脂組成物的硬化物;及,一種印刷線路板,其具備阻焊劑層,該阻焊劑層包含此感光性樹脂組成物的硬化物。An object of the present invention is to provide a photosensitive resin composition capable of forming a hardened product having high copper plating adhesion and low roughness after removing slag, and having excellent resolvability; and a dry film containing the photosensitive material. A printed wiring board including an interlayer insulating layer including a cured product of the photosensitive resin composition; and a printed wiring board including a solder resist layer including the solder resist layer A cured product of a photosensitive resin composition.
本發明的一實施形態的感光性樹脂組成物,其具有光硬化性,該感光性樹脂組成物含有:具有芳香環之含羧基樹脂(A);有機填料(B),其平均初級粒徑為1 μm以下且具有羧基;耦合劑(C),其具有從由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中選出的至少一種原子、及兩個以上的官能基,且前述官能基包含從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的至少一種基;及,氧化矽填料(D),其平均初級粒徑在1~150 nm的範圍內。A photosensitive resin composition according to an embodiment of the present invention has photocurability. The photosensitive resin composition includes: a carboxyl group-containing resin (A) having an aromatic ring; and an organic filler (B). The average primary particle diameter is 1 μm or less and having a carboxyl group; the coupling agent (C) has at least one atom selected from the group consisting of a silicon atom, an aluminum atom, a titanium atom, and a zirconium atom, and two or more functional groups, and the aforementioned The functional group includes at least one group selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group; and a silicon oxide filler (D) having an average primary particle diameter in a range of 1 to 150 nm .
本發明的一實施形態的乾膜,其含有前述感光性樹脂組成物。A dry film according to an embodiment of the present invention includes the photosensitive resin composition.
本發明的一實施形態的印刷線路板,其具備層間絕緣層,該層間絕緣層包含前述感光性樹脂組成物的硬化物。A printed wiring board according to an embodiment of the present invention includes an interlayer insulating layer including a cured product of the photosensitive resin composition.
本發明的一實施形態的印刷線路板,其具備阻焊劑層,該阻焊劑層包含前述感光性樹脂組成物的硬化物。A printed wiring board according to an embodiment of the present invention includes a solder resist layer including a cured product of the photosensitive resin composition.
本發明是有關一種感光性樹脂組成物、乾膜、及印刷線路板,更詳細而言,本發明是有關:一種感光性樹脂組成物,其適合在印刷線路板上形成阻焊劑層、鍍抗蝕層、抗蝕劑層、層間絕緣層等電絕緣性的層;一種乾膜,其含有此感光性樹脂組成物;一種印刷線路板,其具備層間絕緣層,該層間絕緣層包含此感光性樹脂組成物的硬化物;及,一種印刷線路板,其具備阻焊劑層,該阻焊劑層包含此感光性樹脂組成物的硬化物。The present invention relates to a photosensitive resin composition, a dry film, and a printed wiring board. More specifically, the present invention relates to a photosensitive resin composition, which is suitable for forming a solder resist layer and plating resistance on a printed wiring board. An electrically insulating layer such as an etching layer, a resist layer, and an interlayer insulating layer; a dry film containing the photosensitive resin composition; and a printed wiring board having an interlayer insulating layer including the photosensitive layer A hardened product of a resin composition; and a printed wiring board including a solder resist layer containing the hardened product of the photosensitive resin composition.
說明本發明的實施方式。再者,下述說明中,所謂「(甲基)丙烯酸」,是意指「丙烯酸」及「甲基丙烯酸」之中的至少一種。例如:「(甲基)丙烯酸酯」,是意指「丙烯酸酯」及「甲基丙烯酸酯」之中的至少一種。An embodiment of the present invention will be described. In the following description, "(meth) acrylic acid" means at least one of "acrylic acid" and "methacrylic acid". For example: "(meth) acrylate" means at least one of "acrylate" and "methacrylate".
本實施形態的感光性樹脂組成物具有光硬化性。本實施形態的感光性樹脂組成物含有:具有芳香環之含羧基樹脂(A);有機填料(B),其平均初級粒徑為1 μm以下且具有羧基;耦合劑(C),其具有從由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中選出的至少一種原子、及兩個以上的官能基;及,氧化矽填料(D),其平均初級粒徑在1~150 nm的範圍內。官能基包含從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的至少一種官能基。The photosensitive resin composition of this embodiment is photocurable. The photosensitive resin composition of this embodiment contains: a carboxyl group-containing resin (A) having an aromatic ring; an organic filler (B) having an average primary particle diameter of 1 μm or less and having a carboxyl group; and a coupling agent (C) having At least one atom selected from the group consisting of silicon atom, aluminum atom, titanium atom, and zirconium atom, and two or more functional groups; and silicon oxide filler (D), which has an average primary particle diameter of 1 to 150 In the range of nm. The functional group includes at least one functional group selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group.
感光性樹脂組成物含有有機填料(B),因而感光性樹脂組成物的硬化物具有高鍍銅密合性。此外,感光性樹脂組成物因含有具有芳香環之含羧基樹脂(A)、有機填料(B)、耦合劑(C)及氧化矽填料(D),因而感光性樹脂組成物儘管含有有機填料(B),仍具有高透明性。因此,解析性會提高。通常,若在感光性樹脂組成物中調配填料,則感光性樹脂組成物會發生混濁,因而透明性降低。若感光性樹脂組成物的透明性低,則在對感光性樹脂組成物進行曝光時光容易散射,而無法獲得良好的解析性。然而,本實施形態的感光性樹脂組成物由於含有具有芳香環之含羧基樹脂(A)、有機填料(B)、耦合劑(C)及氧化矽填料(D),故能夠具有高透明性。因此,能夠提高感光性樹脂組成物的解析性,而能夠在由感光性樹脂組成物的硬化物所構成的層形成微細的貫穿孔和開口圖案等。此外,能夠減少對感光性樹脂組成物的硬化物進行除膠渣處理後的硬化物的表面粗糙度。換言之,感光性樹脂組成物能夠形成一種除膠渣後的粗糙性低的硬化物。減少硬化物的除膠渣後的粗糙性,藉此具備由此硬化物所構成的層之印刷線路板能夠具有優異的高頻特性。並且,感光性樹脂組成物含有氧化矽填料(D),因而能夠提高感光性樹脂組成物的硬化物的玻璃轉移點,並且降低熱膨脹係數。因此,由感光性樹脂組成物的硬化物所構成的層即使被施加由熱所產生的應力,仍不容易翹曲,並且冷熱循環龜裂耐性亦優異,故能夠用於經進行薄型化的印刷線路板。此外,感光性樹脂組成物含有氧化矽填料(D),即能夠降低感光性樹脂組成物的硬化物的介電耗損正切。因此,印刷線路板具備由感光性樹脂組成物的硬化物所構成的層,能夠提高高頻傳輸性能。此外,被認為:本實施形態中,由於感光性樹脂組成物含有含羧基樹脂(A)、有機填料(B)、耦合劑(C)及氧化矽填料(D),故氧化矽填料(D)會經由耦合劑(C)來與含羧基樹脂(A)的羧基及有機填料(B)的羧基進行交互作用或鍵結,而進行複合化或混成化。因此,感光性樹脂組成物的硬化物的玻璃轉移點會更加提高,而熱膨脹係數及介電耗損正切會更加降低。Since the photosensitive resin composition contains an organic filler (B), the hardened | cured material of the photosensitive resin composition has high copper-plating adhesiveness. In addition, since the photosensitive resin composition contains a carboxyl group-containing resin (A) having an aromatic ring, an organic filler (B), a coupling agent (C), and a silica filler (D), the photosensitive resin composition contains an organic filler ( B), still has high transparency. Therefore, the resolution is improved. Usually, when a filler is mix | blended with a photosensitive resin composition, the photosensitive resin composition will become cloudy, and transparency will fall. When the transparency of the photosensitive resin composition is low, light is easily scattered when the photosensitive resin composition is exposed, and good resolution cannot be obtained. However, since the photosensitive resin composition of this embodiment contains a carboxyl group-containing resin (A) having an aromatic ring, an organic filler (B), a coupling agent (C), and a silica filler (D), it can have high transparency. Therefore, it is possible to improve the resolution of the photosensitive resin composition, and it is possible to form fine through holes, opening patterns, and the like in a layer composed of a cured product of the photosensitive resin composition. In addition, it is possible to reduce the surface roughness of the cured product obtained by subjecting the cured product of the photosensitive resin composition to a desmearing treatment. In other words, the photosensitive resin composition can form a cured product with low roughness after removing the dross. The reduced roughness of the cured product after deslagging is reduced, whereby a printed wiring board having a layer composed of the cured product can have excellent high-frequency characteristics. In addition, since the photosensitive resin composition contains a silicon oxide filler (D), the glass transition point of the cured product of the photosensitive resin composition can be increased, and the thermal expansion coefficient can be reduced. Therefore, even if a layer made of a cured product of a photosensitive resin composition is subjected to stress caused by heat, it is not easily warped and has excellent resistance to thermal and thermal cycle cracking. Therefore, it can be used for thin printing. circuit board. In addition, the photosensitive resin composition contains a silicon oxide filler (D), that is, the dielectric loss tangent of the cured product of the photosensitive resin composition can be reduced. Therefore, the printed wiring board includes a layer composed of a cured product of a photosensitive resin composition, and can improve high-frequency transmission performance. In addition, it is considered that in this embodiment, since the photosensitive resin composition contains a carboxyl group-containing resin (A), an organic filler (B), a coupling agent (C), and a silica filler (D), the silica filler (D) The coupling agent (C) interacts or bonds with the carboxyl group of the carboxyl group-containing resin (A) and the carboxyl group of the organic filler (B) to form a compound or a mixture. Therefore, the glass transition point of the cured product of the photosensitive resin composition is further increased, and the thermal expansion coefficient and the dielectric loss tangent are further reduced.
感光性樹脂組成物具有光硬化性。利用感光性樹脂組成物具有光硬化性,對感光性樹脂組成物照射光便能夠使感光性樹脂組成物硬化。感光性樹脂組成物的光硬化性,能夠以例如下述方式賦予:含羧基樹脂(A)具有光聚合性不飽和基。此外,感光性樹脂組成物的光硬化性,亦能夠以例如下述方式賦予:如後所述感光性樹脂組成物含有不飽和化合物(E)。The photosensitive resin composition is photocurable. Since the photosensitive resin composition has photocurability, the photosensitive resin composition can be cured by irradiating the photosensitive resin composition with light. The photocurability of the photosensitive resin composition can be imparted, for example, as follows: the carboxyl group-containing resin (A) has a photopolymerizable unsaturated group. In addition, the photocurability of the photosensitive resin composition can be imparted, for example, as follows: the photosensitive resin composition contains an unsaturated compound (E) as described later.
含羧基樹脂(A)具有芳香環。由於含羧基樹脂(A)具有芳香環,故感光性樹脂組成物能夠具有良好的透明性。含羧基樹脂(A)無特別限定,只要為具有芳香環與羧基之樹脂即可。The carboxyl group-containing resin (A) has an aromatic ring. Since the carboxyl group-containing resin (A) has an aromatic ring, the photosensitive resin composition can have good transparency. The carboxyl group-containing resin (A) is not particularly limited as long as it is a resin having an aromatic ring and a carboxyl group.
含羧基樹脂(A)較佳是具有羥基。含羧基樹脂(A)具有羥基,藉此與耦合劑(C)之間的反應性會特別提高,而能夠更加提高感光性樹脂組成物的透明性。The carboxyl group-containing resin (A) preferably has a hydroxyl group. The carboxyl group-containing resin (A) has a hydroxyl group, whereby the reactivity with the coupling agent (C) is particularly improved, and the transparency of the photosensitive resin composition can be further improved.
含羧基樹脂(A)較佳是包含一種樹脂,其是藉由多元醇樹脂與從由多元羧酸及其酸酐所組成之群組中選出的至少一種化合物進行反應來獲得。此時,多元醇樹脂較佳是具有芳香環,並且,亦較佳是從由多元羧酸及其酸酐所組成之群組中選出的至少一種化合物具有芳香環。含羧基樹脂(A)更佳是包含藉由多元醇樹脂與酸二酐進行反應來獲得的共聚物。此時,多元醇樹脂較佳是具有芳香環,並且,亦更佳是酸二酐具有芳香環。當含羧基樹脂(A)包含藉由多元醇樹脂與酸二酐進行反應來獲得的共聚物時,能夠對感光性樹脂組成物賦予高鹼顯影性,並且對感光性樹脂組成物的硬化物賦予高耐熱性及絕緣性。The carboxyl group-containing resin (A) preferably contains a resin obtained by reacting a polyol resin with at least one compound selected from the group consisting of a polycarboxylic acid and an acid anhydride thereof. At this time, the polyol resin preferably has an aromatic ring, and it is also preferable that at least one compound selected from the group consisting of a polycarboxylic acid and an anhydride thereof has an aromatic ring. The carboxyl group-containing resin (A) more preferably contains a copolymer obtained by reacting a polyol resin and an acid dianhydride. In this case, the polyol resin preferably has an aromatic ring, and more preferably the acid dianhydride has an aromatic ring. When the carboxyl group-containing resin (A) contains a copolymer obtained by reacting a polyol resin and an acid dianhydride, it is possible to impart high alkali developability to a photosensitive resin composition and to impart a cured product of the photosensitive resin composition. High heat resistance and insulation.
含羧基樹脂(A)較佳是包含具有乙烯性不飽和基之含羧基樹脂。含羧基樹脂(A)包含具有乙烯性不飽和基之含羧基樹脂,藉此含羧基樹脂(A)會具有光反應性。因此,能夠對含有含羧基樹脂(A)的感光性樹脂組成物賦予光硬化性。The carboxyl group-containing resin (A) preferably contains a carboxyl group-containing resin having an ethylenically unsaturated group. The carboxyl-containing resin (A) contains a carboxyl-containing resin having an ethylenically unsaturated group, whereby the carboxyl-containing resin (A) is photoreactive. Therefore, it is possible to impart photocurability to a photosensitive resin composition containing a carboxyl group-containing resin (A).
具有乙烯性不飽和基之含羧基樹脂,含有例如:中間體、與由多元羧酸及其酐所組成之群組中選出的至少一種化合物(g3)的反應物也就是樹脂(稱為第一樹脂(g)),該中間體為一分子中具有兩個以上的環氧基之環氧化合物(g1)與乙烯性不飽和化合物(g2)的反應物。第一樹脂(g)具有芳香環,該芳香環是源自環氧化合物(g1)、乙烯性不飽和化合物(g2)及化合物(g3)之中的至少一種。第一樹脂(g)是以例如下述方式獲得:使環氧化合物(g1)中的環氧基與乙烯性不飽和化合物(g2)中的羧基進行反應來獲得具有羥基之中間體後,使化合物(g3)加成在該中間體。環氧化合物(g1)能夠含有:甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂等適當的環氧樹脂。環氧化合物(g1)較佳是含有具有芳香環之環氧化合物。環氧化合物(g1)可含有乙烯性不飽和化合物(h)的聚合物。乙烯性不飽和化合物(h)例如:含有(甲基)丙烯酸縮水甘油酯等具有環氧基之化合物(h1)、或進一步含有鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯等不具有環氧基之化合物(h2)。乙烯性不飽和化合物(g2)較佳是含有丙烯酸及甲基丙烯酸之中的至少一種。化合物(g3)含有例如:從由多元羧酸及此等多元羧酸的酐所組成之群組中選出的一種以上的化合物,該多元羧酸為鄰苯二甲酸、四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸等。化合物(g3)較佳是含有酸二酐。此外,較佳是:酸二酐含有具有芳香環之酸二酐。此時,感光性樹脂組成物的透明性會更加提高,而解析性會伴隨著更加提高。The carboxyl group-containing resin having an ethylenically unsaturated group contains, for example, an intermediate and a reactant with at least one compound (g3) selected from the group consisting of a polycarboxylic acid and its anhydride, which is also a resin (referred to as the first Resin (g)), the intermediate is a reaction product of an epoxy compound (g1) having two or more epoxy groups in one molecule and an ethylenically unsaturated compound (g2). The first resin (g) has an aromatic ring derived from at least one of an epoxy compound (g1), an ethylenically unsaturated compound (g2), and a compound (g3). The first resin (g) is obtained, for example, by reacting an epoxy group in an epoxy compound (g1) with a carboxyl group in an ethylenically unsaturated compound (g2) to obtain an intermediate having a hydroxyl group, Compound (g3) is added to this intermediate. The epoxy compound (g1) can contain appropriate epoxy resins, such as a cresol novolak-type epoxy resin and a phenol novolak-type epoxy resin. The epoxy compound (g1) preferably contains an epoxy compound having an aromatic ring. The epoxy compound (g1) may contain a polymer of an ethylenically unsaturated compound (h). The ethylenically unsaturated compound (h) includes, for example, a compound (h1) having an epoxy group such as glycidyl (meth) acrylate, or 2- (meth) acryloxyethyl phthalate, etc. Compound (h2) having no epoxy group. The ethylenically unsaturated compound (g2) preferably contains at least one of acrylic acid and methacrylic acid. The compound (g3) contains, for example, one or more compounds selected from the group consisting of polycarboxylic acids and anhydrides of polycarboxylic acids, and the polycarboxylic acids are phthalic acid, tetrahydrophthalic acid, Methyltetrahydrophthalic acid and the like. The compound (g3) preferably contains an acid dianhydride. In addition, it is preferable that the acid dianhydride contains an acid dianhydride having an aromatic ring. At this time, the transparency of the photosensitive resin composition is further improved, and the resolution is accompanied by further improvement.
具有乙烯性不飽和基之含羧基樹脂,可含有一樹脂(稱為第二樹脂(i)),其為乙烯性不飽和單體的聚合物與具有環氧基之乙烯性不飽和化合物的反應物,該乙烯性不飽和單體含有具有羧基之乙烯性不飽和化合物。乙烯性不飽和單體可進一步含有不具有羧基之乙烯性不飽和化合物。第二樹脂(i)是以下述方式獲得:使具有環氧基之乙烯性不飽和化合物與聚合物中的羧基的一部分進行反應。第二樹脂(i)具有芳香環,該芳香環是源自乙烯性不飽和單體的聚合物及具有環氧基之乙烯性不飽和化合物之中的至少一種。具有羧基之乙烯性不飽和化合物,含有例如:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯等化合物、鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯2-羥基乙酯等化合物。不具有羧基之乙烯性不飽和化合物,含有例如:直鏈或分枝的脂肪族或脂環族(其中,環中可一部分具有不飽和鍵)的(甲基)丙烯酸酯等化合物。具有環氧基之乙烯性不飽和化合物,較佳是含有(甲基)丙烯酸縮水甘油酯。The carboxyl group-containing resin having an ethylenically unsaturated group may contain a resin (referred to as a second resin (i)), which is a reaction of a polymer of an ethylenically unsaturated monomer and an ethylenically unsaturated compound having an epoxy group. This ethylenically unsaturated monomer contains an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. The second resin (i) is obtained by reacting an ethylenically unsaturated compound having an epoxy group with a part of a carboxyl group in a polymer. The second resin (i) has an aromatic ring which is at least one of a polymer derived from an ethylenically unsaturated monomer and an ethylenically unsaturated compound having an epoxy group. An ethylenically unsaturated compound having a carboxyl group, containing, for example, acrylic acid, methacrylic acid, ω-carboxyl-polycaprolactone (n ≒ 2) monoacrylate, and 2- (meth) acrylic acid ethoxylate Compounds such as esters, and compounds such as 2- (meth) acryloxyethyl 2-hydroxyethyl phthalate. The ethylenically unsaturated compound having no carboxyl group includes, for example, a linear or branched aliphatic or cycloaliphatic compound (wherein the ring may have an unsaturated bond in a part thereof), and other compounds. The ethylenically unsaturated compound having an epoxy group preferably contains glycidyl (meth) acrylate.
含羧基樹脂(A)較佳是具有苯環。換言之,含羧基樹脂(A)具有的芳香環以苯環為佳。含羧基樹脂(A)具有苯環,藉此感光性樹脂組成物的透明性會更加提高,因而感光性樹脂組成物會具有優異的解析性。含羧基樹脂(A)更佳是包含一種含羧基樹脂,其具有從由聯苯骨架、萘骨架、茀骨架及蒽骨架所組成之群組中選出的至少一種多環芳香環。此時,含有含羧基樹脂(A)之感光性樹脂組成物的透明性會更加提高,因而感光性樹脂組成物會具有更優異的解析性。含羧基樹脂(A)進一步更佳是包含一種含羧基樹脂,其具有聯苯骨架及雙酚茀骨架之中的至少一種,特佳是包含一種含羧基樹脂,其具有雙酚茀骨架。此時,能夠更加降低含有含羧基樹脂(A)之感光性樹脂組成物的硬化物的介電耗損正切。The carboxyl group-containing resin (A) preferably has a benzene ring. In other words, the aromatic ring which the carboxyl group-containing resin (A) has is preferably a benzene ring. The carboxyl group-containing resin (A) has a benzene ring, whereby the transparency of the photosensitive resin composition is further improved, and therefore the photosensitive resin composition has excellent resolution. The carboxyl group-containing resin (A) more preferably contains a carboxyl group-containing resin having at least one polycyclic aromatic ring selected from the group consisting of a biphenyl skeleton, a naphthalene skeleton, a fluorene skeleton, and an anthracene skeleton. At this time, since the transparency of the photosensitive resin composition containing a carboxyl group-containing resin (A) is further improved, the photosensitive resin composition has more excellent resolution. The carboxyl group-containing resin (A) further preferably contains a carboxyl group-containing resin having at least one of a biphenyl skeleton and a bisphenol fluorene skeleton, and particularly preferably includes a carboxyl group-containing resin having a bisphenol fluorene skeleton. In this case, it is possible to further reduce the dielectric loss tangent of the cured product of the photosensitive resin composition containing the carboxyl group-containing resin (A).
含羧基樹脂(A)較佳是包含一種含羧基樹脂(以下稱為含羧基樹脂(A1)),其為中間體與酸酐(a3)的反應物,該中間體為具有由下述式(1)表示的雙酚茀骨架之環氧化合物(a1)與包含含不飽和基羧酸(a2-1)之羧酸(a2)的反應物,且式(1)中,R1 ~R8 分別獨立地為氫、碳數1~5的烷基或鹵素。當感光性樹脂組成物含有含羧基樹脂(A1)時,感光性樹脂組成物的透明性會更加提高。The carboxyl-containing resin (A) preferably contains a carboxyl-containing resin (hereinafter referred to as a carboxyl-containing resin (A1)), which is a reaction product of an intermediate and an acid anhydride (a3), and the intermediate is A reaction product of an epoxy compound (a1) of a bisphenol fluorene skeleton represented by) and a carboxylic acid (a2) containing an unsaturated carboxylic acid (a2-1), and in the formula (1), R 1 to R 8 are respectively It is independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or halogen. When the photosensitive resin composition contains a carboxyl group-containing resin (A1), the transparency of the photosensitive resin composition is further improved.
含羧基樹脂(A1)具有芳香環,該芳香環是源自具有雙酚茀骨架之環氧化合物(a1)。含羧基樹脂(A1)具有乙烯性不飽和基,其是源自包含含不飽和基羧酸(a2-1)之羧酸(a2)。含羧基樹脂(A1)是以下述方式合成:使具有由下述式(1)表示的雙酚茀骨架之環氧化合物(a1)與包含含不飽和基羧酸(a2-1)之羧酸(a2)進行反應藉此獲得中間體後,使該中間體與酸酐(a3)進行反應。 The carboxyl group-containing resin (A1) has an aromatic ring derived from an epoxy compound (a1) having a bisphenol fluorene skeleton. The carboxyl group-containing resin (A1) has an ethylenically unsaturated group and is derived from a carboxylic acid (a2) containing an unsaturated group-containing carboxylic acid (a2-1). The carboxyl group-containing resin (A1) is synthesized by combining an epoxy compound (a1) having a bisphenol fluorene skeleton represented by the following formula (1) and a carboxylic acid containing an unsaturated group-containing carboxylic acid (a2-1) (a2) After reacting to obtain an intermediate, the intermediate is reacted with an acid anhydride (a3).
式(1)中,R1 ~R8 分別獨立地為氫、碳數1~5的烷基或鹵素。換言之,式(1)中,R1 ~R8 分別可為氫,亦可為碳數1~5的烷基或鹵素。其原因為:即使芳香環中的氫經低分子量的烷基或鹵素所取代,亦不會對含羧基樹脂(A1)的物性造成影響,反而,亦有時因經取代而提高含有含羧基樹脂(A)之感光性樹脂組成物的硬化物的耐熱性或阻燃性。In the formula (1), R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen. In other words, in Formula (1), R 1 to R 8 may each be hydrogen, or may be an alkyl group or a halogen group having 1 to 5 carbon atoms. The reason is that even if the hydrogen in the aromatic ring is replaced with a low-molecular-weight alkyl group or halogen, the physical properties of the carboxyl-containing resin (A1) will not be affected. On the contrary, the carboxyl-containing resin may be improved by substitution. (A) The heat resistance or flame retardance of the hardened | cured material of the photosensitive resin composition.
含羧基樹脂(A1)具有源自環氧化合物(a1)的由式(1)表示的雙酚茀骨架,而能夠對感光性樹脂組成物的硬化物賦予高耐熱性及絕緣性。此外,含羧基樹脂(A1)具有源自酸酐(a3)的羧基,即能夠對感光性樹脂組成物賦予優異的顯影性。The carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton represented by the formula (1) derived from the epoxy compound (a1), and can impart high heat resistance and insulation to the cured product of the photosensitive resin composition. The carboxyl group-containing resin (A1) has a carboxyl group derived from the acid anhydride (a3), that is, it can impart excellent developability to the photosensitive resin composition.
更具體說明含羧基樹脂(A1)。為了合成含羧基樹脂(A1),首先以下述方式合成中間體:使具有由下述式(1)表示的雙酚茀骨架之環氧化合物(a1)中的環氧基的至少一部分與包含含不飽和基羧酸(a2-1)之羧酸(a2)進行反應。將中間體的合成規定為第一反應。中間體具有二級羥基,其是藉由環氧基與包含含不飽和基羧酸(a2-1)之羧酸(a2)進行開環加成反應來產生。然後,使中間體中的二級羥基與酸酐(a3)進行反應。藉此,即能夠合成含羧基樹脂(A1)。將中間體與酸酐(a3)的反應規定為第二反應。酸酐(a3)能夠包含酸一酐及酸二酐。所謂酸一酐,是指具有一個一分子內的兩個羧基脫水縮合而成的酸酐基之化合物。所謂酸二酐,是指具有兩個一分子內的四個羧基脫水縮合而成的酸酐基之化合物。The carboxyl group-containing resin (A1) will be described more specifically. In order to synthesize a carboxyl group-containing resin (A1), an intermediate is first synthesized in such a manner that at least a part of the epoxy group in the epoxy compound (a1) having a bisphenol fluorene skeleton represented by the following formula (1) and The carboxylic acid (a2) of the unsaturated carboxylic acid (a2-1) is reacted. The synthesis of the intermediate was defined as the first reaction. The intermediate has a secondary hydroxyl group, which is generated by a ring-opening addition reaction of an epoxy group with a carboxylic acid (a2) containing an unsaturated group-containing carboxylic acid (a2-1). Then, the secondary hydroxyl group in the intermediate is reacted with the acid anhydride (a3). Thereby, a carboxyl group-containing resin (A1) can be synthesized. The reaction between the intermediate and the acid anhydride (a3) is defined as a second reaction. The acid anhydride (a3) can include an acid monoanhydride and an acid dianhydride. The acid anhydride refers to a compound having an acid anhydride group formed by dehydration condensation of two carboxyl groups in one molecule. The so-called acid dianhydride refers to a compound having an acid anhydride group formed by dehydration condensation of two carboxyl groups in two molecules.
含羧基樹脂(A1)可包含中間體中的未反應成分。此外,當酸酐(a3)包含酸一酐及酸二酐時,含羧基樹脂(A1)除了含有中間體中的成分與酸一酐中的成分與酸二酐中的成分的反應物以外,亦可含有中間體中的成分與酸一酐中的成分的反應物、及中間體中的成分與酸二酐中的成分的反應物之中的任一種或兩種。換言之,含羧基樹脂(A1)可為包含像此等這樣的結構不同的複數種化合物的混合物。The carboxyl group-containing resin (A1) may contain unreacted components in the intermediate. In addition, when the acid anhydride (a3) contains an acid monoanhydride and an acid dianhydride, the carboxyl group-containing resin (A1) contains, in addition to a reactant of a component in the intermediate and a component in the acid monoanhydride and a component in the acid dianhydride. Either or both of a reactant of a component in an intermediate and a component in an acid monoanhydride, and a reactant of a component in an intermediate and a component in an acid dianhydride may be contained. In other words, the carboxyl group-containing resin (A1) may be a mixture containing a plurality of compounds having different structures like these.
含羧基樹脂(A1)具有源自含不飽和基羧酸(a2-1)的乙烯性不飽和基,而具有光反應性。因此,含羧基樹脂(A1)能夠對感光性樹脂組成物賦予感光性,具體而言為紫外線硬化性。此外,含羧基樹脂(A1)具有源自酸酐(a3)的羧基,藉此能夠對感光性樹脂組成物賦予藉由鹼性水溶液來進行的顯影性,該鹼性水溶液含有鹼金屬鹽及鹼金屬氫氧化物之中的至少一種。The carboxyl group-containing resin (A1) has an ethylenically unsaturated group derived from an unsaturated group-containing carboxylic acid (a2-1), and is photoreactive. Therefore, the carboxyl group-containing resin (A1) can impart photosensitivity to the photosensitive resin composition, specifically, ultraviolet curability. In addition, the carboxyl group-containing resin (A1) has a carboxyl group derived from the acid anhydride (a3), whereby the photosensitive resin composition can be provided with developability by an alkaline aqueous solution containing an alkali metal salt and an alkali metal. At least one of hydroxides.
含羧基樹脂(A1)的重量平均分子量較佳是在700~10000的範圍內。若重量平均分子量為700以上,則能夠提高感光性樹脂組成物的硬化物的絕緣性,並且能夠降低介電耗損正切。此外,若重量平均分子量為10000以下,則感光性樹脂組成物的藉由鹼性水溶液來進行的顯影性會特別提高。重量平均分子量進一步更佳是在900~8000的範圍內,特佳是在1000~5000的範圍內。The weight average molecular weight of the carboxyl group-containing resin (A1) is preferably in the range of 700 to 10,000. When the weight average molecular weight is 700 or more, the insulation of the cured product of the photosensitive resin composition can be improved, and the dielectric loss tangent can be reduced. In addition, when the weight average molecular weight is 10,000 or less, the developability of the photosensitive resin composition with an alkaline aqueous solution is particularly improved. The weight average molecular weight is more preferably in the range of 900 to 8000, and particularly preferably in the range of 1,000 to 5,000.
較佳是:含羧基樹脂(A1)的多分散度(polydispersity)在1.0~4.8的範圍內。此時,能夠一面確保由感光性樹脂組成物所形成的硬化物的良好的絕緣性,一面對感光性樹脂組成物賦予優異的顯影性。含羧基樹脂(A1)的多分散度以1.1~4.0較佳,以1.2~2.8更佳。The polydispersity of the carboxyl group-containing resin (A1) is preferably in the range of 1.0 to 4.8. In this case, it is possible to impart excellent developability to the photosensitive resin composition while ensuring good insulation of the cured product formed from the photosensitive resin composition. The polydispersity of the carboxyl group-containing resin (A1) is preferably 1.1 to 4.0, and more preferably 1.2 to 2.8.
像上述這樣的含羧基樹脂(A1)的數目平均分子量及分子量分布,能夠以含羧基樹脂(A1)為混合物的方式達成,該混合物適度含有:中間體中的未反應成分、中間體中的成分與酸一酐中的成分與酸二酐中的成分的反應物、中間體中的成分與酸一酐中的成分的反應物、中間體中的成分與酸二酐中的成分的反應物這樣的多種成分。更具體而言,能夠以例如控制下述這樣的參數的方式達成:環氧化合物(a1)的平均分子量、酸一酐相對於環氧化合物(a1)的量、酸二酐相對於環氧化合物(a1)的量。The number average molecular weight and molecular weight distribution of the carboxyl-containing resin (A1) as described above can be achieved by using the carboxyl-containing resin (A1) as a mixture, and the mixture suitably contains: unreacted components in the intermediate and components in the intermediate Reactants with components in acid monoanhydride and components in acid dianhydride, reactants with components in intermediate and component in acid monoanhydride, reactants with components in intermediate and component in acid dianhydride Ingredients. More specifically, it can be achieved, for example, by controlling parameters such as the average molecular weight of the epoxy compound (a1), the amount of the acid monoanhydride relative to the epoxy compound (a1), and the acid dianhydride relative to the epoxy compound (a1).
再者,多分散度為含羧基樹脂(A1)的重量平均分子量(Mw)相對於數目平均分子量(Mn)的比的值(Mw/Mn)。The polydispersity is the value (Mw / Mn) of the ratio of the weight average molecular weight (Mw) of the carboxyl group-containing resin (A1) to the number average molecular weight (Mn).
含羧基樹脂(A1)的固體成分酸值較佳是在60~140 mgKOH/g的範圍內。此時,感光性樹脂組成物的顯影性會特別提高。若酸值在80~135 mgKOH/g的範圍內則較佳,若酸值在90~130 mgKOH/g的範圍內則更佳。The acid value of the solid content of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH / g. In this case, the developability of the photosensitive resin composition is particularly improved. It is more preferable if the acid value is in the range of 80 to 135 mgKOH / g, and it is more preferable if the acid value is in the range of 90 to 130 mgKOH / g.
含羧基樹脂(A1)的分子量,能夠藉由酸二酐的交聯來調整。此時,能夠獲得經調整酸值及分子量的含羧基樹脂(A1)。控制酸酐(a3)中所含的酸二酐的量,即能夠容易調整含羧基樹脂(A1)的分子量及酸值。再者,含羧基樹脂(A1)的分子量是從藉由凝膠滲透層析法在下述條件下進行測定的結果算出。 GPC裝置:昭和電工公司製SHODEX SYSTEM 11; 管柱:SHODEX KF-800P、KF-005、KF-003、KF-001的四支串聯; 流動相:四氫呋喃(THF); 流量:1 mL/分鐘; 管柱溫度:45℃; 偵測器:折射率(RI); 換算:聚苯乙烯。The molecular weight of the carboxyl group-containing resin (A1) can be adjusted by crosslinking an acid dianhydride. In this case, a carboxyl group-containing resin (A1) having an adjusted acid value and molecular weight can be obtained. By controlling the amount of the acid dianhydride contained in the acid anhydride (a3), it is possible to easily adjust the molecular weight and acid value of the carboxyl group-containing resin (A1). The molecular weight of the carboxyl group-containing resin (A1) was calculated from the results of measurement by gel permeation chromatography under the following conditions. GPC device: SHODEX SYSTEM 11 made by Showa Denko Corporation; column: four branches of SHODEX KF-800P, KF-005, KF-003, KF-001 in series; mobile phase: tetrahydrofuran (THF); flow rate: 1 mL / min; Column temperature: 45 ° C; Detector: Refractive Index (RI); Conversion: Polystyrene.
詳細說明含羧基樹脂(A1)的原料、以及含羧基樹脂(A1)的合成時的反應條件。The raw materials of the carboxyl group-containing resin (A1) and the reaction conditions during the synthesis of the carboxyl group-containing resin (A1) will be described in detail.
環氧化合物(a1),具有例如由下述式(2)表示的結構。式(2)中,n為例如在0~20的範圍內的整數。為了適當控制含羧基樹脂(A1)的分子量,n的平均特佳是在0~1的範圍內。若n的平均在0~1的範圍內,則即使酸酐(a3)含有酸二酐,仍容易控制分子量過剩增加。 The epoxy compound (a1) has a structure represented by the following formula (2), for example. In Formula (2), n is an integer in the range of 0-20, for example. In order to appropriately control the molecular weight of the carboxyl group-containing resin (A1), the average of n is particularly preferably in the range of 0 to 1. When the average of n is in the range of 0 to 1, it is easy to control an excessive increase in molecular weight even if the acid anhydride (a3) contains an acid dianhydride.
羧酸(a2)包含含不飽和基羧酸(a2-1)。羧酸(a2)可僅包含含不飽和基羧酸(a2-1)。或者,羧酸(a2)可包含:含不飽和基羧酸(a2-1)、及含不飽和基羧酸(a2-1)以外的羧酸。The carboxylic acid (a2) includes an unsaturated group-containing carboxylic acid (a2-1). The carboxylic acid (a2) may include only the unsaturated group-containing carboxylic acid (a2-1). Alternatively, the carboxylic acid (a2) may include an unsaturated group-containing carboxylic acid (a2-1) and a carboxylic acid other than the unsaturated group-containing carboxylic acid (a2-1).
含不飽和基羧酸(a2-1),能夠含有例如:僅具有1個乙烯性不飽和基之化合物。更具體而言,含不飽和基羧酸(a2-1),能夠含有例如從由下述所組成之群組中選出的一種以上的化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、巴豆酸、肉桂酸、2-丙烯醯氧基乙基琥珀酸、2-甲基丙烯醯氧基乙基琥珀酸、2-丙烯醯氧基乙基鄰苯二甲酸、2-甲基丙烯醯氧基乙基鄰苯二甲酸、2-丙烯醯氧基丙基鄰苯二甲酸、2-甲基丙烯醯氧基丙基鄰苯二甲酸、2-丙烯醯氧基乙基馬來酸、2-甲基丙烯醯氧基乙基馬來酸、丙烯酸β-羧基乙酯、2-丙烯醯氧基乙基四氫鄰苯二甲酸、2-甲基丙烯醯氧基乙基四氫鄰苯二甲酸、2-丙烯醯氧基乙基六氫鄰苯二甲酸、2-甲基丙烯醯氧基乙基六氫鄰苯二甲酸。較佳是:含不飽和基羧酸(a2-1)含有丙烯酸。The unsaturated group-containing carboxylic acid (a2-1) can contain, for example, a compound having only one ethylenically unsaturated group. More specifically, the unsaturated group-containing carboxylic acid (a2-1) can contain, for example, one or more compounds selected from the group consisting of acrylic acid, methacrylic acid, and ω-carboxyl-polycaprolactone. Esters (n ≒ 2) monoacrylates, crotonic acid, cinnamic acid, 2-propenyloxyethylsuccinic acid, 2-methacryloxyethyl succinic acid, 2-propenyloxyethyl o-benzene Dicarboxylic acid, 2-methacryloxyethyl phthalic acid, 2-acryloxypropyl phthalate, 2-methacryloxypropyl phthalic acid, 2-acrylic acid Oxyethylmaleic acid, 2-methacrylic acid, oxyethylmaleic acid, β-carboxyethyl acrylate, 2-propenemethyloxyethyltetrahydrophthalic acid, 2-methacrylic acid Oxyethyl tetrahydrophthalic acid, 2-propenyloxyethylhexahydrophthalic acid, 2-methacryloxyethylhexahydrophthalic acid. Preferably, the unsaturated group-containing carboxylic acid (a2-1) contains acrylic acid.
羧酸(a2)可包含多元酸(a2-2)。多元酸(a2-2)為在一分子內的2個以上的氫原子能夠與金屬原子取代的酸。多元酸(a2-2)較佳是具有2個以上的羧基。此時,環氧化合物(a1)會與含不飽和基羧酸(a2-1)及多元酸(a2-2)雙方進行反應。多元酸(a2-2)對環氧化合物(a1)的存在於分子中的2個環氧基進行交聯,即能夠獲得分子量增加。藉此,能夠提高感光性樹脂組成物的硬化物的絕緣性,並且降低介電耗損正切。The carboxylic acid (a2) may include a polyacid (a2-2). The polybasic acid (a2-2) is an acid capable of replacing two or more hydrogen atoms in one molecule with metal atoms. The polybasic acid (a2-2) preferably has two or more carboxyl groups. At this time, the epoxy compound (a1) reacts with both the unsaturated group-containing carboxylic acid (a2-1) and the polybasic acid (a2-2). The polybasic acid (a2-2) cross-links two epoxy groups in the molecule of the epoxy compound (a1), that is, an increase in molecular weight can be obtained. Thereby, the insulation of the hardened | cured material of the photosensitive resin composition can be improved, and the dielectric loss tangent can be reduced.
多元酸(a2-2)較佳是包含二羧酸。能夠含有例如:從由4-環己烯-1,2-二甲酸、草酸、丙二酸、琥珀酸、戊二酸、己二酸、庚二酸、辛二酸、壬二酸、癸二酸、馬來酸、富馬酸、鄰苯二甲酸、間苯二甲酸、對苯二甲酸所組成之群組中選出的一種以上的化合物。較佳是:多元酸(a2-2)含有4-環己烯-1,2-二甲酸。The polybasic acid (a2-2) preferably contains a dicarboxylic acid. Can contain, for example: from 4-cyclohexene-1,2-dicarboxylic acid, oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid One or more compounds selected from the group consisting of acids, maleic acid, fumaric acid, phthalic acid, isophthalic acid, and terephthalic acid. Preferably, the polybasic acid (a2-2) contains 4-cyclohexene-1,2-dicarboxylic acid.
在使環氧化合物(a1)與羧酸(a2)進行反應時,能夠採用習知方法。例如:在環氧化合物(a1)的溶劑溶液中加入羧酸(a2),進一步因應需要來加入熱聚合抑制劑及觸媒並攪拌混合,而獲得反應性溶液。藉由慣用方法來在更佳為60~150℃、特佳為80~120℃的溫度使此反應性溶液進行反應,即能夠獲得中間體。溶劑能夠含有例如從由下述所組成之群組中選出的至少一種成分:甲基乙基酮、環己酮等酮類;甲苯、二甲苯等芳香族烴類;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯、丁基賽璐蘇乙酸酯、卡必醇乙酸酯、丁基卡必醇乙酸酯、二乙二醇單乙基醚乙酸酯、丙二醇單甲基醚乙酸酯等乙酸酯類;及,二烷二醇醚類。熱聚合抑制劑含有例如:氫醌及氫醌單甲基醚之中的至少一種。觸媒能夠含有例如從由下述所組成之群組中選出的至少一種成分:苯甲基二甲基胺、三乙胺等三級胺類;氯化三甲基苯甲基銨、氯化甲基三乙基銨等四級銨鹽類;三苯膦;及,三苯銻。When reacting an epoxy compound (a1) with a carboxylic acid (a2), a conventional method can be used. For example, a carboxylic acid (a2) is added to a solvent solution of the epoxy compound (a1), and a thermal polymerization inhibitor and a catalyst are further added and mixed as needed to obtain a reactive solution. By reacting this reactive solution at a temperature of more preferably 60 to 150 ° C, particularly preferably 80 to 120 ° C by a conventional method, an intermediate can be obtained. The solvent can contain, for example, at least one component selected from the group consisting of ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene; ethyl acetate and butyl acetate Cellulose acetate, butylcellulose acetate, carbitol acetate, butylcarbitol acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether Acetates such as acetate; and dioxane ethers. The thermal polymerization inhibitor contains, for example, at least one of hydroquinone and hydroquinone monomethyl ether. The catalyst can contain, for example, at least one component selected from the group consisting of tertiary amines such as benzyldimethylamine and triethylamine; trimethylbenzyl ammonium chloride, and chloride Quaternary ammonium salts such as methyltriethylammonium; triphenylphosphine; and triphenylantimony.
較佳是:觸媒含有特別是三苯膦。換言之,較佳是:在三苯膦存在下使環氧化合物(a1)與羧酸(a2)進行反應。此時,能夠特別促進環氧化合物(a1)中的環氧基與羧酸(a2)進行開環加成反應,而能夠達成95%以上、或97%以上、或幾乎100的反應率(轉化率)。此外,能夠抑制在包含感光性樹脂組成物的硬化物之層中發生離子遷移,而提高包含硬化物之層的絕緣性。Preferably, the catalyst contains triphenylphosphine in particular. In other words, it is preferred that the epoxy compound (a1) and the carboxylic acid (a2) are reacted in the presence of triphenylphosphine. In this case, the ring-opening addition reaction between the epoxy group in the epoxy compound (a1) and the carboxylic acid (a2) can be particularly promoted, and a reaction rate (conversion of 95% or more, or 97% or more, or almost 100) can be achieved. rate). In addition, ion migration can be suppressed in the layer containing the cured product of the photosensitive resin composition, and the insulation of the layer containing the cured product can be improved.
使環氧化合物(a1)與羧酸(a2)進行反應時,相對於環氧化合物(a1)的環氧基1 mol,羧酸(a2)的量較佳是在0.5~1.2 mol的範圍內。此時,能夠獲得感光性樹脂組成物的優異的感光性及安定性。從相同的觀點來看,相對於環氧化合物(a1)的環氧基1 mol,含不飽和基羧酸(a2-1)的量較佳是在0.5~1.2 mol的範圍內。或者,當羧酸(a2)包含含不飽和基羧酸(a2-1)以外的羧酸時,相對於環氧化合物(a1)的環氧基1 mol,含不飽和基羧酸(a2-1)的量可在0.5~0.95 mol的範圍內。此外,當羧酸(a2)包含多元酸(a2-2)時,相對於環氧化合物(a1)的環氧基1 mol,多元酸(a2-2)的量較佳是在0.025~0.25 mol的範圍內。此時,能夠獲得感光性樹脂組成物的優異的感光性及安定性。When the epoxy compound (a1) and the carboxylic acid (a2) are reacted, the amount of the carboxylic acid (a2) is preferably in the range of 0.5 to 1.2 mol relative to 1 mol of the epoxy group of the epoxy compound (a1). . In this case, excellent photosensitivity and stability of the photosensitive resin composition can be obtained. From the same viewpoint, the amount of the unsaturated group-containing carboxylic acid (a2-1) is preferably in the range of 0.5 to 1.2 mol relative to 1 mol of the epoxy group of the epoxy compound (a1). Alternatively, when the carboxylic acid (a2) contains a carboxylic acid other than the unsaturated group-containing carboxylic acid (a2-1), the unsaturated group-containing carboxylic acid (a2- The amount of 1) may be in the range of 0.5 to 0.95 mol. In addition, when the carboxylic acid (a2) contains a polyacid (a2-2), the amount of the polyacid (a2-2) is preferably 0.025 to 0.25 mol relative to 1 mol of the epoxy group of the epoxy compound (a1). In the range. In this case, excellent photosensitivity and stability of the photosensitive resin composition can be obtained.
亦較佳是:在空氣起泡下使環氧化合物(a1)與羧酸(a2)進行反應。此時,能夠抑制不飽和基的加成聚合反應,而抑制中間體的分子量增加及中間體的溶液凝膠化。此外,能夠抑制最終產物亦即含羧基樹脂(A1)過度著色。It is also preferable that the epoxy compound (a1) and the carboxylic acid (a2) are reacted under air bubbling. In this case, the addition polymerization reaction of the unsaturated group can be suppressed, and the increase in the molecular weight of the intermediate and the gelation of the solution of the intermediate can be suppressed. In addition, the carboxyl group-containing resin (A1), which is the final product, can be prevented from being excessively colored.
以上述方式獲得的中間體,具備以下述方式產生的羥基:環氧化合物(a1)中的環氧基與羧酸(a2)中的羧基進行反應。The intermediate obtained in the above-mentioned manner has a hydroxyl group produced in such a manner that an epoxy group in the epoxy compound (a1) and a carboxyl group in the carboxylic acid (a2) react.
酸酐(a3)較佳是包含酸一酐。酸一酐為具有一個酸酐基之化合物。The acid anhydride (a3) preferably contains an acid monoanhydride. An acid monoanhydride is a compound having one acid anhydride group.
酸一酐能夠含有二羧酸的酐。酸一酐能夠含有例如從由下述所組成之群組中選出的一種以上的化合物:1,2,3,6-四氫鄰苯二甲酸酐、鄰苯二甲酸酐、琥珀酸酐、甲基琥珀酸酐、馬來酸酐、檸康酸酐、戊二酸酐、伊康酸酐、甲基四氫鄰苯二甲酸酐、甲基納迪克酸酐、六氫鄰苯二甲酸酐、環己烷-1,2,4-三甲酸-1,2-酐、及甲基六氫鄰苯二甲酸酐。特佳是:酸一酐含有1,2,3,6-四氫鄰苯二甲酸酐。此時,能夠一面確保感光性樹脂組成物的良好的顯影性,一面提高感光性樹脂組成物的硬化物的絕緣性。相對於酸一酐整體,1,2,3,6-四氫鄰苯二甲酸酐較佳是在20~100 mol%的範圍內,更佳是在40~100 mol%的範圍內,但不限於此。The acid monoanhydride can contain an anhydride of a dicarboxylic acid. The acid monoanhydride can contain, for example, one or more compounds selected from the group consisting of 1,2,3,6-tetrahydrophthalic anhydride, phthalic anhydride, succinic anhydride, methyl Succinic anhydride, maleic anhydride, citraconic anhydride, glutaric anhydride, itaconic anhydride, methyltetrahydrophthalic anhydride, methylnadic anhydride, hexahydrophthalic anhydride, cyclohexane-1,2 , 4-tricarboxylic acid-1,2-anhydride, and methylhexahydrophthalic anhydride. Particularly preferred is that the acid monoanhydride contains 1,2,3,6-tetrahydrophthalic anhydride. In this case, it is possible to improve the insulation of the cured product of the photosensitive resin composition while ensuring good developability of the photosensitive resin composition. Relative to the entire acid monoanhydride, 1,2,3,6-tetrahydrophthalic anhydride is preferably in the range of 20 to 100 mol%, more preferably in the range of 40 to 100 mol%, but not Limited to this.
酸酐(a3)較佳是包含酸二酐。酸二酐為具有兩個酸酐基之化合物。酸二酐能夠含有四羧酸的酐。酸二酐能夠含有例如從由下述所組成之群組中選出的至少一種化合物:1,2,4,5-苯四甲酸二酐、二苯甲酮四甲酸二酐、甲基環己烯四甲酸二酐、四甲酸二酐、萘-1,4,5,8-四甲酸二酐、乙烯四甲酸二酐、9,9’-雙(3,4-二羧基苯基)茀二酐、甘油雙(偏苯三甲酸酯酐)單乙酸酯、乙二醇雙(偏苯三甲酸酯酐)、3,3’,4,4’-二苯基碸四甲酸二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二酮基-3-呋喃基)萘并[1,2-c]呋喃-1,3-二酮、1,2,3,4-丁烷四甲酸二酐、及3,3’,4,4’-聯苯四甲酸二酐。酸二酐較佳是含有具有芳香環之酸二酐。特佳是:酸二酐含有3,3’,4,4’-聯苯四甲酸二酐。此時,能夠一面確保感光性樹脂組成物的良好的顯影性,一面提高感光性樹脂組成物的硬化物的絕緣性。此外,感光性樹脂組成物的透明性會提高,而解析性會伴隨著提高。相對於酸二酐整體,3,3’,4,4’-聯苯四甲酸二酐較佳是在20~100 mol%的範圍內,更佳是在40~100 mol%的範圍內,但不限於此。The acid anhydride (a3) preferably contains an acid dianhydride. An acid dianhydride is a compound having two acid anhydride groups. The acid dianhydride can contain an anhydride of a tetracarboxylic acid. The acid dianhydride can contain, for example, at least one compound selected from the group consisting of 1,2,4,5-benzenetetracarboxylic dianhydride, benzophenonetetracarboxylic dianhydride, methylcyclohexene Tetracarboxylic dianhydride, tetracarboxylic dianhydride, naphthalene-1,4,5,8-tetracarboxylic dianhydride, ethylene tetracarboxylic dianhydride, 9,9'-bis (3,4-dicarboxyphenyl) fluorene dianhydride , Glycerol bis (trimellitic anhydride) monoacetate, ethylene glycol bis (trimellitic anhydride), 3,3 ', 4,4'-diphenylphosphonium tetracarboxylic dianhydride, 1, 3,3a, 4,5,9b-hexahydro-5- (tetrahydro-2,5-diketo-3-furanyl) naphtho [1,2-c] furan-1,3-dione, 1,2,3,4-butanetetracarboxylic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride. The acid dianhydride preferably contains an acid dianhydride having an aromatic ring. Particularly preferred is that the acid dianhydride contains 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride. In this case, it is possible to improve the insulation of the cured product of the photosensitive resin composition while ensuring good developability of the photosensitive resin composition. In addition, the transparency of the photosensitive resin composition is improved, and the resolution is improved. Relative to the entire acid dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride is preferably in the range of 20 to 100 mol%, more preferably in the range of 40 to 100 mol%, but Not limited to this.
在使中間體與酸酐(a3)進行反應時,能夠採用習知方法。例如:在中間體的溶劑溶液中加入酸酐(a3),進一步因應需要來加入熱聚合抑制劑及觸媒並攪拌混合,而獲得反應性溶液。藉由慣用方法來在更佳為60~150℃、特佳為80~120℃的溫度使此反應性溶液進行反應,即能夠獲得含羧基樹脂(A1)。溶劑、觸媒及聚合抑制劑能夠使用適當物,且亦能夠直接使用在合成中間體時使用的溶劑、觸媒及聚合抑制劑。When the intermediate is reacted with the acid anhydride (a3), a conventional method can be used. For example, an acid anhydride (a3) is added to a solvent solution of the intermediate, and a thermal polymerization inhibitor and a catalyst are further added and mixed as needed to obtain a reactive solution. By reacting this reactive solution at a temperature of more preferably 60 to 150 ° C, particularly preferably 80 to 120 ° C by a conventional method, a carboxyl group-containing resin (A1) can be obtained. Suitable solvents, catalysts, and polymerization inhibitors can be used, and solvents, catalysts, and polymerization inhibitors used in the synthesis of intermediates can also be used directly.
較佳是:觸媒含有特別是三苯膦。換言之,較佳是:在三苯膦存在下使中間體與酸酐(a3)進行反應。此時,能夠特別促進中間體中的二級羥基與酸酐(a3)進行反應,而能夠達成90%以上、95%以上、97%以上、或幾乎100的反應率(轉化率)。此外,能夠抑制在包含感光性樹脂組成物的硬化物之層中發生離子遷移,而更加提高包含硬化物之層的絕緣性。Preferably, the catalyst contains triphenylphosphine in particular. In other words, it is preferred that the intermediate is reacted with the acid anhydride (a3) in the presence of triphenylphosphine. In this case, the reaction between the secondary hydroxyl group in the intermediate and the acid anhydride (a3) can be particularly promoted, and a reaction rate (conversion rate) of 90% or more, 95% or more, 97% or more, or almost 100 can be achieved. In addition, it is possible to suppress ion migration in the layer containing the cured product of the photosensitive resin composition, and to further improve the insulation of the layer containing the cured product.
亦較佳是:在空氣起泡下使中間體與酸酐(a3)進行反應。此時,會抑制產生的含羧基樹脂(A1)的分子量過度增加,而感光性樹脂組成物的藉由鹼性水溶液來進行的顯影性會特別提高。It is also preferable that the intermediate is reacted with the acid anhydride (a3) under air bubbling. In this case, excessive increase in the molecular weight of the carboxyl group-containing resin (A1) is suppressed, and the developability of the photosensitive resin composition with an alkaline aqueous solution is particularly improved.
含羧基樹脂(A1)可包含:具有芳香環且不具有光聚合性之含羧基樹脂。具有芳香環且不具有光聚合性之含羧基樹脂,含有例如乙烯性不飽和單體的聚合物,該乙烯性不飽和單體包含具有羧基之乙烯性不飽和化合物。具有羧基之乙烯性不飽和化合物,能夠含有例如:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯2-羥基乙酯等化合物。具有羧基之乙烯性不飽和化合物,亦能夠含有:季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯等與二元酸酐的反應物。乙烯性不飽和單體可進一步含有例如:直鏈或分枝的脂肪族或脂環族(其中,環中可一部分具有不飽和鍵)的(甲基)丙烯酸酯等不具有羧基之乙烯性不飽和化合物。The carboxyl group-containing resin (A1) may include a carboxyl group-containing resin having an aromatic ring and not having photopolymerization. A carboxyl group-containing resin having an aromatic ring and having no photopolymerizability, for example, a polymer containing an ethylenically unsaturated monomer including an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated compound having a carboxyl group may contain, for example, acrylic acid, methacrylic acid, ω-carboxyl-polycaprolactone (n ≒ 2) monoacrylate, 2- (meth) acrylic acid phthalate Ethyl ester, 2- (meth) acryloxyethyl 2-hydroxyethyl phthalate and other compounds. The ethylenically unsaturated compound having a carboxyl group may also contain a reactant of pentaerythritol triacrylate, pentaerythritol trimethacrylate, and the like with a dibasic acid anhydride. The ethylenically unsaturated monomer may further contain, for example, a linear or branched aliphatic or cycloaliphatic (wherein a ring may have an unsaturated bond in part) (meth) acrylate, etc., which does not have a carboxyl group. Saturated compounds.
含羧基樹脂(A)可僅包含含羧基樹脂(A1),亦可包含含羧基樹脂(A1)、及含羧基樹脂(A1)以外的含羧基樹脂,亦可僅包含含羧基樹脂(A1)以外的含羧基樹脂。從獲得感光性樹脂組成物的高透明性的觀點、及降低感光性樹脂組成物的硬化物的介電耗損正切的觀點來看,含羧基樹脂(A)較佳是包含含羧基樹脂(A1)30質量%以上,更佳是包含含羧基樹脂(A1)60質量%以上,進一步更佳是包含含羧基樹脂(A1)100質量%。The carboxyl-containing resin (A) may include only the carboxyl-containing resin (A1), or may include a carboxyl-containing resin (A1) and a carboxyl-containing resin other than the carboxyl-containing resin (A1), or may include only the carboxyl-containing resin (A1). Carboxyl resin. From the viewpoint of obtaining high transparency of the photosensitive resin composition and reducing the dielectric loss tangent of the cured product of the photosensitive resin composition, the carboxyl-containing resin (A) preferably contains the carboxyl-containing resin (A1). 30 mass% or more, more preferably 60 mass% or more of the carboxyl group-containing resin (A1), and still more preferably 100 mass% of the carboxyl group-containing resin (A1).
相對於感光性樹脂組成物的固體成分量,含羧基樹脂(A)的含量較佳是在5~85質量%的範圍內,更佳是在10~75質量%的範圍內,進一步更佳是在26~60質量%的範圍內,特佳是在30~45質量%的範圍內。此外,當感光性樹脂組成物含有含羧基樹脂(A1)時,相對於感光性樹脂組成物的固體成分量,含羧基樹脂(A1)的含量較佳是在5~85質量%的範圍內,更佳是在10~75質量%的範圍內,進一步更佳是在26~60質量%的範圍內,特佳是在30~45質量%的範圍內。再者,所謂固體成分量,是指除了從感光性樹脂組成物將溶劑等揮發性成分去除後餘留的所有成分的合計量。The content of the carboxyl group-containing resin (A) is preferably in a range of 5 to 85% by mass, more preferably in a range of 10 to 75% by mass, and more preferably still more in terms of the solid content of the photosensitive resin composition. Within the range of 26 to 60% by mass, particularly preferred is within the range of 30 to 45% by mass. In addition, when the photosensitive resin composition contains a carboxyl group-containing resin (A1), the content of the carboxyl group-containing resin (A1) is preferably within a range of 5 to 85% by mass based on the solid content of the photosensitive resin composition. It is more preferably in the range of 10 to 75% by mass, even more preferably in the range of 26 to 60% by mass, and particularly preferably in the range of 30 to 45% by mass. The term “solid content” refers to the total amount of all components remaining after removing volatile components such as solvents from the photosensitive resin composition.
含羧基樹脂(A)的固體成分酸值,較佳是在40~160 mgKOH/g的範圍內。此時,感光性樹脂組成物的安定性會特別提高。若酸值在60~140 mgKOH/g的範圍內則更佳。若酸值在80~135 mgKOH/g的範圍內則進一步更佳,若酸值在90~130 mgKOH/g的範圍內則特佳。The acid value of the solid content of the carboxyl group-containing resin (A) is preferably in the range of 40 to 160 mgKOH / g. In this case, the stability of the photosensitive resin composition is particularly improved. It is more preferable if the acid value is in the range of 60 to 140 mgKOH / g. It is even more preferable if the acid value is in the range of 80 to 135 mgKOH / g, and it is particularly preferable if the acid value is in the range of 90 to 130 mgKOH / g.
有機填料(B)具有羧基。有機填料(B)的羧基,能夠以例如下述方式獲得:使具有聚合性不飽和雙鍵之羧酸單體進行聚合或交聯,該羧酸單體為丙烯酸、甲基丙烯酸、巴豆酸、馬來酸、富馬酸、伊康酸等。有機填料(B)能夠對感光性樹脂組成物的硬化物賦予高鍍銅密合性。並且,有機填料(B)能夠提高感光性樹脂組成物的觸變性,而提高安定性(特別是保存安定性)。此外,有機填料(B)由於具有羧基,故能夠提高感光性樹脂組成物的硬化物的顯影性,並且當感光性樹脂組成物包含結晶性環氧化合物時,能夠提高結晶性環氧化合物的相溶性而防止結晶化。有機填料(B)的羧基含量無特別限制,有機填料(B)的酸值較佳是:以由酸-鹼滴定所獲得的酸值計為1~60 mgKOH/g。若酸值小於1 mgKOH/g,則有感光性樹脂組成物的安定性及硬化物的顯影性會降低之虞。若酸值大於60 mgKOH/g,則有硬化物的耐濕可靠性會降低之虞。有機填料(B)的酸值更佳為3~40 mgKOH/g。The organic filler (B) has a carboxyl group. The carboxyl group of the organic filler (B) can be obtained, for example, by polymerizing or crosslinking a carboxylic acid monomer having a polymerizable unsaturated double bond, and the carboxylic acid monomer is acrylic acid, methacrylic acid, crotonic acid, Maleic acid, fumaric acid, itaconic acid, etc. The organic filler (B) can impart high copper-plating adhesion to the cured product of the photosensitive resin composition. In addition, the organic filler (B) can improve the thixotropy of the photosensitive resin composition and improve stability (especially storage stability). Moreover, since the organic filler (B) has a carboxyl group, the developability of the cured product of the photosensitive resin composition can be improved, and when the photosensitive resin composition contains a crystalline epoxy compound, the phase of the crystalline epoxy compound can be improved. Soluble to prevent crystallization. The carboxyl group content of the organic filler (B) is not particularly limited, and the acid value of the organic filler (B) is preferably 1 to 60 mgKOH / g based on the acid value obtained by acid-base titration. When the acid value is less than 1 mgKOH / g, the stability of the photosensitive resin composition and the developability of the cured product may be reduced. If the acid value is more than 60 mgKOH / g, the humidity resistance reliability of the cured product may be reduced. The acid value of the organic filler (B) is more preferably 3 to 40 mgKOH / g.
有機填料(B)亦較佳是具有羥基。有機填料(B)具有羥基,即能夠提高感光性樹脂組成物中的有機填料(B)的分散性。The organic filler (B) also preferably has a hydroxyl group. The organic filler (B) has a hydroxyl group, that is, the dispersibility of the organic filler (B) in the photosensitive resin composition can be improved.
有機填料(B)的平均初級粒徑為1 μm以下。有機填料(B)的平均初級粒徑為1 μm以下,即能夠效率良好地提高感光性樹脂組成物的觸變性。因此,感光性樹脂組成物的安定性會更加提高。有機填料(B)的平均初級粒徑的下限無特別限定,以例如0.001 μm以上為佳。有機填料(B)的平均初級粒徑是使用雷射繞射式粒度分布測定裝置來以D50 的形式測定。有機填料(B)的平均初級粒徑以0.1 μm以下為佳。此時,感光性樹脂組成物的安定性會更加提高,並且由於能夠抑制曝光時的散射,故解析性會更加提高。The average primary particle diameter of the organic filler (B) is 1 μm or less. When the average primary particle diameter of the organic filler (B) is 1 μm or less, the thixotropy of the photosensitive resin composition can be efficiently improved. Therefore, the stability of the photosensitive resin composition is further improved. The lower limit of the average primary particle diameter of the organic filler (B) is not particularly limited, but is preferably 0.001 μm or more. The average primary particle diameter of the organic filler (B) was measured as D 50 using a laser diffraction particle size distribution measuring device. The average primary particle diameter of the organic filler (B) is preferably 0.1 μm or less. In this case, the stability of the photosensitive resin composition is further improved, and the scattering during exposure can be suppressed, so that the resolution is further improved.
有機填料(B),較佳是在粒徑10 μm以下的狀態下被包含在前述感光性樹脂組成物中。有機填料(B)有時會在感光性樹脂組成物中凝集而含有次級粒子。此時,感光性樹脂組成物中,有機填料(B)的粒徑,是意指包含次級粒子在內的粒子的粒徑。感光性樹脂組成物中,有機填料(B)的粒徑能夠使用雷射繞射散射式粒度分布測定裝置或光學顯微鏡來進行測定。若有機填料(B)是在粒徑10 μm以下的狀態下被包含在前述感光性樹脂組成物中,則感光性樹脂組成物的安定性會更加提高,並且由於能夠抑制曝光時的散射,故解析性會更加提高。有機填料(B),更佳是在粒徑5 μm以下的狀態下被包含在前述感光性樹脂組成物中,進一步更佳是在粒徑1 μm以下的狀態下被包含在前述感光性樹脂組成物中,特佳是在粒徑0.5 μm以下的狀態下被包含在前述感光性樹脂組成物中。此時,感光性樹脂組成物的安定性會更加提高,並且由於能夠抑制曝光時的散射,故解析性會更加提高。感光性樹脂組成物中,有機填料(B)的粒徑的下限並無特別限定,可為例如0.01 μm以上。The organic filler (B) is preferably contained in the photosensitive resin composition in a state where the particle diameter is 10 μm or less. The organic filler (B) may aggregate in the photosensitive resin composition and may contain secondary particles. In this case, the particle diameter of the organic filler (B) in the photosensitive resin composition means the particle diameter of particles including secondary particles. In the photosensitive resin composition, the particle diameter of the organic filler (B) can be measured using a laser diffraction scattering particle size distribution measuring device or an optical microscope. When the organic filler (B) is contained in the photosensitive resin composition in a state where the particle diameter is 10 μm or less, the stability of the photosensitive resin composition is further improved, and scattering during exposure can be suppressed, so that The resolution will be improved. The organic filler (B) is more preferably contained in the photosensitive resin composition in a state where the particle diameter is 5 μm or less, and even more preferably is contained in the photosensitive resin composition in a state where the particle diameter is 1 μm or less. Among them, it is particularly preferable that the particles are contained in the photosensitive resin composition in a state where the particle diameter is 0.5 μm or less. In this case, the stability of the photosensitive resin composition is further improved, and the scattering during exposure can be suppressed, so that the resolution is further improved. The lower limit of the particle size of the organic filler (B) in the photosensitive resin composition is not particularly limited, and may be, for example, 0.01 μm or more.
有機填料(B)較佳是包含橡膠成分。橡膠成分能夠對感光性樹脂組成物的硬化物賦予柔軟性。本實施形態的感光性樹脂組成物即使包含橡膠成分,仍能夠具有高解析性。橡膠成分能藉由樹脂來構成。橡膠成分較佳是包含:從由交聯丙烯酸系橡膠、交聯NBR、交聯MBS及交聯SBR所組成之群組中選出的至少一種聚合物。此時,感光性樹脂組成物能夠具有高透明性,而能夠提高解析性。此外,能夠藉由橡膠成分來有效地對感光性樹脂組成物的硬化物賦予柔軟性。NBR一般而言為丁二烯與丙烯腈的共聚物,而分類為腈類橡膠。MBS一般而言為由甲基丙烯酸甲酯、丁二烯、苯乙烯3種成分所構成的共聚物,而分類為丁二烯系橡膠。SBR一般而言為苯乙烯與丁二烯的共聚物,而分類為苯乙烯橡膠。作為有機填料(B)的具體例,可舉例如:JSR股份有限公司製的型號XER-91-MEK。此有機填料為平均初級粒徑0.07 μm的具有羧基之交聯橡膠(NBR),且是以交聯橡膠的含有比例15重量%的甲基乙基酮分散液來提供,其酸值為10.0 mgKOH/g。如上所述,有機填料(B)能夠以分散液來調配。橡膠成分能夠以分散液來調配。此外,作為有機填料(B)的具體例,除了上述以外還可舉例如:JSR股份有限公司製的型號XER-32、XER-92等。此外,作為具有羧基及羥基之交聯橡膠(SBR)的分散液,可舉例如:JSR股份有限公司製的型號XSK-500等。The organic filler (B) preferably contains a rubber component. The rubber component can impart flexibility to the cured product of the photosensitive resin composition. Even if the photosensitive resin composition of this embodiment contains a rubber component, it can have high resolution. The rubber component can be composed of a resin. The rubber component preferably includes at least one polymer selected from the group consisting of a crosslinked acrylic rubber, a crosslinked NBR, a crosslinked MBS, and a crosslinked SBR. In this case, the photosensitive resin composition can have high transparency and can improve resolution. In addition, the rubber component can effectively impart flexibility to the cured product of the photosensitive resin composition. NBR is generally a copolymer of butadiene and acrylonitrile, and is classified as a nitrile rubber. MBS is generally a copolymer composed of three components, methyl methacrylate, butadiene, and styrene, and is classified as a butadiene rubber. SBR is generally a copolymer of styrene and butadiene, and is classified as a styrene rubber. Specific examples of the organic filler (B) include, for example, model XER-91-MEK manufactured by JSR Corporation. This organic filler is a crosslinked rubber (NBR) with a carboxyl group having an average primary particle diameter of 0.07 μm, and is provided as a 15% by weight methyl ethyl ketone dispersion containing a crosslinked rubber. The acid value is 10.0 mgKOH / g. As described above, the organic filler (B) can be prepared as a dispersion liquid. The rubber component can be prepared as a dispersion. In addition, as specific examples of the organic filler (B), in addition to the above, for example, models XER-32 and XER-92 manufactured by JSR Corporation can be mentioned. In addition, examples of the dispersion liquid of a crosslinked rubber (SBR) having a carboxyl group and a hydroxyl group include a model XSK-500 manufactured by JSR Corporation.
有機填料(B)可含有橡膠成分以外的粒子成分。此時,有機填料(B)能夠含有從由具有羧基之丙烯酸系樹脂微粒子、及具有羧基之纖維素微粒子所組成之群組中選出的至少1種粒子成分。具有羧基之丙烯酸系樹脂微粒子,能夠含有:從由非交聯苯乙烯-丙烯酸系樹脂微粒子及交聯苯乙烯-丙烯酸系樹脂微粒子所組成之群組中選出的至少1種粒子成分。作為非交聯苯乙烯-丙烯酸系樹脂微粒子的具體例,可舉例如:Nipponpaint Industrial Coatings股份有限公司製的型號FS-201(平均初級粒徑0.5 μm)。作為交聯苯乙烯-丙烯酸系樹脂微粒子的具體例,可舉例如:Nipponpaint Industrial Coatings股份有限公司製的型號MG-351(平均初級粒徑1.0 μm)及型號BGK-001(平均初級粒徑1.0 μm)。此外,有機填料(B)可含有從上述橡膠成分、丙烯酸系樹脂微粒子及纖維素微粒子之中選出的粒子成分以外的粒子成分。此時,有機填料(B)能夠含有具有羧基之粒子成分。換言之,此具有羧基之粒子成分可與從橡膠成分、丙烯酸系樹脂微粒子及纖維素微粒子之中選出的粒子成分不同。The organic filler (B) may contain particle components other than a rubber component. At this time, the organic filler (B) may contain at least one particle component selected from the group consisting of acrylic resin fine particles having a carboxyl group and cellulose fine particles having a carboxyl group. The acrylic resin fine particles having a carboxyl group can contain at least one particle component selected from the group consisting of non-crosslinked styrene-acrylic resin fine particles and crosslinked styrene-acrylic resin fine particles. Specific examples of the non-crosslinked styrene-acrylic resin fine particles include, for example, model FS-201 (average primary particle diameter: 0.5 μm) manufactured by Nipponpaint Industrial Coatings Co., Ltd. Specific examples of the crosslinked styrene-acrylic resin fine particles include, for example, model MG-351 (average primary particle diameter 1.0 μm) and model BGK-001 (average primary particle diameter 1.0 μm) manufactured by Nipponpaint Industrial Coatings Co., Ltd. ). Moreover, the organic filler (B) may contain a particle component other than a particle component selected from the rubber component, the acrylic resin fine particles, and the cellulose fine particles. In this case, the organic filler (B) can contain a particle component having a carboxyl group. In other words, the particle component having a carboxyl group may be different from a particle component selected from rubber components, acrylic resin fine particles, and cellulose fine particles.
感光性樹脂組成物可進一步含有有機填料(B)以外的有機填料。有機填料(B)以外的有機填料,可不具有羧基,且平均初級粒徑可大於1 μm。當感光性樹脂組成物含有有機填料(B)及有機填料(B)以外的有機填料時,相對於有機填料(B)與有機填料(B)以外的有機填料的含量的合計,有機填料(B)的含量以30質量%以上為佳,以50質量%以上較佳。The photosensitive resin composition may further contain an organic filler other than the organic filler (B). Organic fillers other than the organic filler (B) may not have a carboxyl group, and the average primary particle diameter may be larger than 1 μm. When the photosensitive resin composition contains an organic filler (B) and an organic filler other than the organic filler (B), the organic filler (B) is based on the total content of the organic filler (B) and the organic fillers other than the organic filler (B). The content of) is preferably 30% by mass or more, and more preferably 50% by mass or more.
相對於含羧基樹脂(A)的含量100質量份,有機填料(B)的含量較佳是在1~50質量份的範圍內。相對於含羧基樹脂(A)的含量100質量份,有機填料(B)的含量為1質量份以上,即能夠獲得感光性樹脂組成物的硬化物的良好的鍍銅密合性。此外,有機填料(B)的含量為50質量份以下,即能夠獲得感光性樹脂組成物的優異的解析性。此外,有機填料(B)的含量在上述範圍內,藉此感光性樹脂組成物的觸變性會提高,因而安定性會提高。相對於含羧基樹脂(A)的含量100質量份,有機填料(B)的含量更佳是在5~30質量份的範圍內,進一步更佳是在10~20質量份的範圍內。The content of the organic filler (B) is preferably in the range of 1 to 50 parts by mass based on 100 parts by mass of the content of the carboxyl group-containing resin (A). The content of the organic filler (B) is 1 part by mass or more with respect to 100 parts by mass of the content of the carboxyl group-containing resin (A), that is, good copper-plating adhesion of the cured product of the photosensitive resin composition can be obtained. In addition, when the content of the organic filler (B) is 50 parts by mass or less, excellent resolution of the photosensitive resin composition can be obtained. In addition, when the content of the organic filler (B) is within the above range, the thixotropy of the photosensitive resin composition is improved, and thus the stability is improved. The content of the organic filler (B) is more preferably within a range of 5 to 30 parts by mass, and still more preferably within a range of 10 to 20 parts by mass with respect to 100 parts by mass of the content of the carboxyl group-containing resin (A).
耦合劑(C)具有從由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中選出的至少一種原子。耦合劑(C)進一步具有兩個以上的官能基,且官能基包含從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的至少一種基。耦合劑(C)可具有兩個以上的烷氧基,亦可具有兩個以上的醯氧基,亦可具有兩個以上的醇鹽基。此外,耦合劑(C)可具有兩個以上的從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的不同的官能基。耦合劑(C)由於能夠提高感光性樹脂組成物中的有機填料(B)及氧化矽填料(D)的分散性,故能夠提高感光性樹脂組成物的透明性及觸變性,藉此,感光性樹脂組成物具有優異的解析性及安定性(特別是保存安定性)。包含從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的至少一種基的兩個以上的官能基,較佳是:與從由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中選出的至少一種原子直接鍵結在一起。The coupling agent (C) has at least one atom selected from the group consisting of a silicon atom, an aluminum atom, a titanium atom, and a zirconium atom. The coupling agent (C) further has two or more functional groups, and the functional group includes at least one type selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group. The coupling agent (C) may have two or more alkoxy groups, may have two or more alkoxy groups, or may have two or more alkoxide groups. In addition, the coupling agent (C) may have two or more different functional groups selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group. The coupling agent (C) can improve the dispersibility of the organic filler (B) and the silica filler (D) in the photosensitive resin composition, and therefore can improve the transparency and thixotropy of the photosensitive resin composition. The resin composition has excellent resolvability and stability (especially storage stability). Two or more functional groups containing at least one group selected from the group consisting of alkoxy, fluorenyloxy and alkoxide groups, preferably: and two or more functional groups selected from silicon atoms, aluminum atoms, titanium atoms and zirconium At least one atom selected from the group of atoms is directly bonded together.
當耦合劑(C)具有矽原子時,耦合劑(C)的例子包含:四乙氧基矽烷、四甲氧基矽烷、乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、乙烯基甲基二乙氧基矽烷、乙烯基甲基二甲氧基矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-縮水甘油氧基丙基甲基二甲氧基矽烷、3-縮水甘油氧基丙基三甲氧基矽烷、3-縮水甘油氧基丙基甲基二乙氧基矽烷、3-縮水甘油氧基丙基三乙氧基矽烷、3-縮水甘油氧基丙基甲基二甲氧基矽烷、對苯乙烯基三甲氧基矽烷、N-2-(胺基乙基)-3-胺基丙基甲基二甲氧基矽烷、N-2-(胺基乙基)-3-胺基丙基三甲氧基矽烷、3-胺基丙基甲基二甲氧基矽烷、3-胺基丙基甲基二乙氧基矽烷、3-胺基丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、3-(2-胺基乙基胺基)丙基三乙氧基矽烷、N,N-二甲基-3-(三甲氧基矽烷基)丙基胺、3-三乙氧基矽烷基-N-(1,3-二甲基亞丁基)丙基胺、N-苯基-3-胺基丙基三甲氧基矽烷、3-巰基丙基甲基二甲氧基矽烷、3-巰基丙基三甲氧基矽烷、3-巰基丙基三乙氧基矽烷、3-甲基丙烯醯氧基丙基甲基二甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基甲基二乙氧基矽烷、3-甲基丙烯醯氧基丙基三乙氧基矽烷、烯丙基三乙氧基矽烷、烯丙基三甲氧基矽烷、烯丙基氯二甲基矽烷、3-氯丙基三甲氧基矽烷、3-氯丙基三乙氧基矽烷、3-氯丙基二甲氧基甲基矽烷、氯甲基三乙氧基矽烷、氯甲基三甲氧基矽烷、3-氯丙基甲基二乙氧基矽烷、3-異氰酸基丙基三乙氧基矽烷、3-丙烯醯氧基丙基三甲氧基矽烷、雙(三乙氧基矽烷丙基)四硫醚、環己基三甲氧基矽烷、甲基三乙氧基矽烷、甲基三甲氧基矽烷、乙基三乙氧基矽烷、乙基三甲氧基矽烷、己基三甲氧基矽烷、己基三乙氧基矽烷、十六烷基三甲氧基矽烷、十八烷基三乙氧基矽烷、十八烷基三甲氧基矽烷、正辛基三乙氧基矽烷、正辛基三甲氧基矽烷、十二烷基三乙氧基矽烷、十二烷基三甲氧基矽烷、丙基三甲氧基矽烷、丙基三乙氧基矽烷、苯甲基三乙氧基矽烷、甲基苯基二甲氧基矽烷、甲基苯基二乙氧基矽烷、苯基三乙氧基矽烷、苯基三甲氧基矽烷、對甲苯基三甲氧基矽烷、4-乙烯基苯基三甲氧基矽烷、1-萘基三甲氧基矽烷、3,3,3-三氟丙基三甲氧基矽烷、11-五氟苯氧基十一烷基三甲氧基矽烷、五氟苯基三甲氧基矽烷、11-疊氮基十一烷基三甲氧基矽烷、2-氰乙基三乙氧基矽烷、及乙烯基三乙醯氧基矽烷。When the coupling agent (C) has a silicon atom, examples of the coupling agent (C) include: tetraethoxysilane, tetramethoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, vinylformate Didiethoxysilane, vinylmethyldimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-glycidyloxypropylmethyldimethoxy Silane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 3-glycidoxypropyltriethoxysilane, 3-glycidyloxy Propylmethyldimethoxysilane, p-styryltrimethoxysilane, N-2- (aminoethyl) -3-aminopropylmethyldimethoxysilane, N-2- ( Aminoethyl) -3-aminopropyltrimethoxysilane, 3-aminopropylmethyldimethoxysilane, 3-aminopropylmethyldiethoxysilane, 3-aminopropyl Trimethoxysilane, 3-aminopropyltriethoxysilane, 3- (2-aminoethylamino) propyltriethoxysilane, N, N-dimethyl-3- (trimethyl Oxysilyl) propylamine, 3-triethoxysilyl-N- (1,3-dimethylbutylene) propyl Methylamine, N-phenyl-3-aminopropyltrimethoxysilane, 3-mercaptopropylmethyldimethoxysilane, 3-mercaptopropyltrimethoxysilane, 3-mercaptopropyltriethoxy Silane, 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropylmethyldiethyl Oxysilane, 3-methacryloxypropyltriethoxysilane, allyltriethoxysilane, allyltrimethoxysilane, allylchlorodimethylsilane, 3-chloropropane Trimethoxysilane, 3-chloropropyltriethoxysilane, 3-chloropropyldimethoxymethylsilane, chloromethyltriethoxysilane, chloromethyltrimethoxysilane, 3-chloro Propylmethyldiethoxysilane, 3-isocyanatopropyltriethoxysilane, 3-propenyloxypropyltrimethoxysilane, bis (triethoxysilanepropyl) tetrasulfide , Cyclohexyltrimethoxysilane, methyltriethoxysilane, methyltrimethoxysilane, ethyltriethoxysilane, ethyltrimethoxysilane, hexyltrimethoxysilane, hexyltriethoxysilane Cetyltri Oxysilane, octadecyltriethoxysilane, octadecyltrimethoxysilane, n-octyltriethoxysilane, n-octyltrimethoxysilane, dodecyltriethoxysilane, Dodecyltrimethoxysilane, propyltrimethoxysilane, propyltriethoxysilane, benzyltriethoxysilane, methylphenyldimethoxysilane, methylphenyldiethoxy Silane, phenyltriethoxysilane, phenyltrimethoxysilane, p-tolyltrimethoxysilane, 4-vinylphenyltrimethoxysilane, 1-naphthyltrimethoxysilane, 3,3, 3-trifluoropropyltrimethoxysilane, 11-pentafluorophenoxyundecyltrimethoxysilane, pentafluorophenyltrimethoxysilane, 11-azidoundecyltrimethoxysilane, 2-cyanoethyltriethoxysilane and vinyltriethoxysilane.
當耦合劑(C)具有鋁原子時,耦合劑(C)的例子包含:二異丙酸乙醯基烷氧基鋁、乙醯乙酸單乙酯二異丙氧基鋁、及參(乙醯乙酸乙酯)鋁。When the coupling agent (C) has an aluminum atom, examples of the coupling agent (C) include: acetamido aluminum diisopropoxide, aluminum monoethyl acetate diisopropoxide, and ginseng (acetamidine Ethyl acetate) aluminum.
當耦合劑(C)具有鈦原子時,耦合劑(C)的例子包含:異丙氧基三硬脂醯基鈦、異丙氧基參(焦磷酸二辛酯)鈦、四辛氧基雙(磷酸二(十三烷酯))鈦、四(2,2-二烯丙氧基甲基-1-丁氧基)磷酸雙(二(十三烷酯))鈦、雙(焦磷酸二辛酯)氧基乙酸鈦、及雙(焦磷酸二辛酯)伸乙二氧基鈦。When the coupling agent (C) has a titanium atom, examples of the coupling agent (C) include: isopropyloxytristearyl titanium, isopropoxy titanium (dioctyl pyrophosphate) titanium, and tetraoctyloxybis (Bis (tridecyl phosphate)) titanium, tetra (2,2-diallyloxymethyl-1-butoxy) bis (bis (tridecyl) phosphate) titanium, bis (dipyrophosphate) Octyl) titanium oxyacetate, and bis (dioctyl pyrophosphate) titanium ethoxylate.
當耦合劑(C)具有鋯原子時,耦合劑(C)的例子包含:四正丙醇鋯、及四正丁醇鋯。When the coupling agent (C) has a zirconium atom, examples of the coupling agent (C) include zirconium tetra-n-propoxide and zirconium tetra-n-butoxide.
耦合劑(C)能夠含有從由上述成分所組成之群組中選出的至少一種成分。The coupling agent (C) can contain at least one component selected from the group consisting of the above-mentioned components.
耦合劑(C)較佳是具有矽原子。換言之,耦合劑(C)以矽烷耦合劑為佳。耦合劑(C)具有矽原子,即能夠特別提高與氧化矽填料(D)之間的反應性,且能夠更效率良好地提高感光性樹脂組成物中的氧化矽填料(D)的分散性。因此,能夠更加提高感光性樹脂組成物的透明性及安定性。此外,耦合劑(C)具有矽原子,即能夠更加提高感光性樹脂組成物的硬化物的玻璃轉移點,並且能夠更加降低熱膨脹係數。The coupling agent (C) preferably has a silicon atom. In other words, the coupling agent (C) is preferably a silane coupling agent. The coupling agent (C) has silicon atoms, that is, the reactivity with the silicon oxide filler (D) can be particularly improved, and the dispersibility of the silicon oxide filler (D) in the photosensitive resin composition can be improved more efficiently. Therefore, the transparency and stability of the photosensitive resin composition can be further improved. In addition, the coupling agent (C) has silicon atoms, that is, the glass transition point of the cured product of the photosensitive resin composition can be further increased, and the thermal expansion coefficient can be further reduced.
耦合劑(C),較佳是:具有從由甲氧基、乙氧基及乙醯氧基所組成之群組中選出的至少一種基。甲氧基及乙氧基是分類為烷氧基。此外,乙醯氧基是分類為醯氧基。耦合劑(C)可僅具有甲氧基,亦可僅具有乙氧基,亦可僅具有乙醯氧基。此外,耦合劑(C)可具有兩個以上的從由甲氧基、乙氧基及乙醯氧基所組成之群組中選出的不同的官能基。耦合劑(C)具有從由甲氧基、乙氧基及乙醯氧基所組成之群組中選出的至少一種基,即能夠提高具有芳香環之含羧基樹脂(A)、有機填料(B)及氧化矽填料(D)與耦合劑(C)之間的反應性,而更不容易發生感光性樹脂組成物中的有機填料(B)及氧化矽填料(D)凝集。因此,能夠更加提高感光性樹脂組成物的透明性及安定性。The coupling agent (C) preferably has at least one group selected from the group consisting of a methoxy group, an ethoxy group, and an ethoxy group. Methoxy and ethoxy are classified as alkoxy. In addition, ethoxy is classified as ethoxy. The coupling agent (C) may have only a methoxy group, only an ethoxy group, or only an ethoxy group. In addition, the coupling agent (C) may have two or more different functional groups selected from the group consisting of a methoxy group, an ethoxy group, and an ethoxy group. The coupling agent (C) has at least one group selected from the group consisting of a methoxy group, an ethoxy group, and an ethoxy group, that is, a carboxyl group-containing resin (A) having an aromatic ring and an organic filler (B ) And the reactivity between the silica filler (D) and the coupling agent (C), and the organic filler (B) and the silica filler (D) in the photosensitive resin composition are less likely to agglutinate. Therefore, the transparency and stability of the photosensitive resin composition can be further improved.
耦合劑(C),較佳是:具有兩個至四個從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的官能基。耦合劑(C)可具有兩個至四個烷氧基,亦可具有兩個至四個醯氧基,亦可具有兩個至四個醇鹽基。例如:耦合劑(C)可具有兩個至四個甲氧基,亦可具有兩個至四個乙氧基,亦可具有兩個至四個乙醯氧基。此外,耦合劑(C)可具有兩個至四個從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的不同的官能基。耦合劑(C)具有兩個至四個從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的官能基,即能夠抑制由有機填料(B)與耦合劑(C)的反應、或耦合劑(C)與氧化矽填料(D)的反應所造成的過剩的交聯反應,而能夠提高感光性樹脂組成物中的有機填料(B)及氧化矽填料(D)的分散性,並同時抑制凝膠化。The coupling agent (C) preferably has two to four functional groups selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group. The coupling agent (C) may have two to four alkoxy groups, may have two to four alkoxy groups, or may have two to four alkoxide groups. For example, the coupling agent (C) may have two to four methoxy groups, two to four ethoxy groups, or two to four ethoxy groups. In addition, the coupling agent (C) may have two to four different functional groups selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group. The coupling agent (C) has two to four functional groups selected from the group consisting of alkoxy, fluorenyloxy and alkoxide groups, that is, it can inhibit the organic filler (B) and the coupling agent (C) Reaction, or excess crosslinking reaction caused by the reaction of the coupling agent (C) and the silica filler (D), which can improve the organic filler (B) and the silica filler (D) in the photosensitive resin composition. Dispersibility while inhibiting gelation.
耦合劑(C),較佳是:具有從由胺基、環氧基、乙烯基、甲基丙烯醯基、巰基、異氰酸基及硫醚基所組成之群組中選出的至少一種基。此時,能夠與含羧基樹脂(A)中所含的羧基及有機填料(B)中所含的羧基進行反應,而能夠更效率良好地提高感光性樹脂組成物中的有機填料(B)的分散性。因此,能夠更加提高感光性樹脂組成物的透明性及安定性。The coupling agent (C) preferably has at least one group selected from the group consisting of an amine group, an epoxy group, a vinyl group, a methacryl group, a mercapto group, an isocyanate group, and a thioether group. . In this case, it is possible to react with the carboxyl group contained in the carboxyl group-containing resin (A) and the carboxyl group contained in the organic filler (B), and it is possible to more efficiently improve the organic filler (B) in the photosensitive resin composition. Dispersibility. Therefore, the transparency and stability of the photosensitive resin composition can be further improved.
耦合劑(C)可具有烷基胺基而具有胺基。此外,耦合劑(C)可具有縮水甘油氧基而具有環氧基。當耦合劑(C)含有乙烯基時,乙烯基是例如與矽原子直接鍵結。耦合劑(C)具有胺基、環氧基或乙烯基,即能夠提高與含羧基樹脂(A)中所含的羧基及有機填料(B)中所含的羧基之間的反應性,而能夠更效率良好地提高感光性樹脂組成物中的有機填料(B)的分散性。較佳是:耦合劑(C)具有環氧基或乙烯基。此時,感光性樹脂組成物的絕緣性會提高,而安定性會更加提高。The coupling agent (C) may have an alkylamine group and an amine group. The coupling agent (C) may have a glycidyloxy group and an epoxy group. When the coupling agent (C) contains a vinyl group, the vinyl group is, for example, directly bonded to a silicon atom. The coupling agent (C) has an amine group, an epoxy group, or a vinyl group, that is, it can improve the reactivity with the carboxyl group contained in the carboxyl group-containing resin (A) and the carboxyl group contained in the organic filler (B), and can The dispersibility of the organic filler (B) in the photosensitive resin composition is improved more efficiently. Preferably, the coupling agent (C) has an epoxy group or a vinyl group. In this case, the insulation of the photosensitive resin composition is improved, and the stability is further improved.
感光性樹脂組成物可進一步含有耦合劑(C)以外的耦合劑。耦合劑(C)以外的耦合劑,可不具有從由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中選出的至少一種原子。耦合劑(C)以外的耦合劑,可不具有兩個以上的官能基,且該官能基包含從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的至少一種基。其中,從效率良好地獲得有機填料(B)及氧化矽填料(D)的分散性的觀點、以及提高感光性樹脂組成物的透明性及安定性的觀點來看,感光性樹脂組成物可不含耦合劑(C)以外的耦合劑。當感光性樹脂組成物含有耦合劑(C)及耦合劑(C)以外的耦合劑時,相對於耦合劑(C)與耦合劑(C)以外的耦合劑的含量的合計,耦合劑(C)的含量以30質量%以上為佳,以50質量%以上較佳。此時,能夠獲得感光性樹脂組成物的有機填料(B)及氧化矽填料(D)的良好的分散性。The photosensitive resin composition may further contain a coupling agent other than the coupling agent (C). The coupling agent other than the coupling agent (C) may not have at least one atom selected from the group consisting of a silicon atom, an aluminum atom, a titanium atom, and a zirconium atom. The coupling agent other than the coupling agent (C) may not have two or more functional groups, and the functional group includes at least one type selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group. Among these, the photosensitive resin composition may not contain the organic resin (B) and the silicon oxide filler (D) from the viewpoint of efficiently obtaining the dispersibility and improving the transparency and stability of the photosensitive resin composition. Coupling agents other than couplant (C). When the photosensitive resin composition contains a coupling agent (C) and a coupling agent other than the coupling agent (C), the coupling agent (C) is added to the total content of the coupling agent (C) and the coupling agent other than the coupling agent (C). The content of) is preferably 30% by mass or more, and more preferably 50% by mass or more. In this case, good dispersibility of the organic filler (B) and the silica filler (D) of the photosensitive resin composition can be obtained.
相對於有機填料(B)的含量與氧化矽填料(D)的含量的合計100質量份,耦合劑(C)的含量較佳是在0.01~10質量份的範圍內。耦合劑(C)的含量在此範圍內,即能夠防止感光性樹脂組成物中的有機填料(B)及氧化矽填料(D)凝集,而提高分散性。相對於有機填料(B)的含量與氧化矽填料(D)的含量的合計100質量份,耦合劑(C)的含量更佳是在0.05~5質量份的範圍內。The content of the coupling agent (C) is preferably in the range of 0.01 to 10 parts by mass with respect to 100 parts by mass of the total content of the organic filler (B) and the content of the silica filler (D). When the content of the coupling agent (C) is within this range, the organic filler (B) and the silica filler (D) in the photosensitive resin composition can be prevented from agglomerating and the dispersibility can be improved. The content of the coupling agent (C) is more preferably within a range of 0.05 to 5 parts by mass with respect to 100 parts by mass of the total content of the organic filler (B) and the content of the silica filler (D).
氧化矽填料(D)的平均初級粒徑在1~150 nm的範圍內。氧化矽填料(D)的平均初級粒徑在此範圍內,即能夠效率良好地提高含有有機填料(B)之感光性樹脂組成物的透明性。因此,能夠更加提高感光性樹脂組成物的解析性。氧化矽填料(D)的平均初級粒徑是使用動態光散射法來進行測定。氧化矽填料(D)更佳是平均初級粒徑在1~60 nm的範圍內,進一步更佳是平均初級粒徑在1~30 nm的範圍內。此時,能夠更加提高感光性樹脂組成物的透明性及解析性。The average primary particle diameter of the silica filler (D) is in the range of 1 to 150 nm. When the average primary particle diameter of the silica filler (D) is within this range, the transparency of the photosensitive resin composition containing the organic filler (B) can be effectively improved. Therefore, the resolution of the photosensitive resin composition can be further improved. The average primary particle diameter of the silica filler (D) was measured using a dynamic light scattering method. The silicon oxide filler (D) is more preferably an average primary particle diameter in a range of 1 to 60 nm, and even more preferably an average primary particle diameter in a range of 1 to 30 nm. In this case, the transparency and resolution of the photosensitive resin composition can be further improved.
氧化矽填料(D),較佳是:包含源自氧化矽溶膠的氧化矽粒子。此時,能夠更加提高含有有機填料(B)之感光性樹脂組成物的透明性,而能夠更加提高感光性樹脂組成物的解析性。氧化矽溶膠的例子包含:球狀氧化矽溶膠、及鏈狀氧化矽溶膠。作為氧化矽填料(D)的具體例,可舉例如:日產化學工業股份有限公司製的有機氧化矽溶膠:型號MA-ST-M、MA-ST-L、IPA-ST、IPA-ST-ZL、IPA-ST-UP、EG-ST、NPC-ST-30、PGM-ST、DMAC-ST、MEK-ST-40、MIBK-ST、MIBK-ST-L、CHO-ST-M、EAC-ST、TOL-ST、MEK-AC-4130Y、MEK-AC-5140Z、PGM-AC-2140Y、PGM-AC-4130Y、MIBK-AC-2140Z、MIKB-SD-L、MEK-EC-6150P、MEK-EC-7150P、EP-F2130Y、EP-F6140P、EP-F7150P、PMA-ST、MEK-EC-2130Y、MEK-AC-2140Z、MEK-ST-L、MEK-ST-ZL、MEK-ST-UP;Hanse-Chemie公司製的NANOCRYL:型號XP0396、XP0596、XP0733、XP0746、XP0765、XP0768、XP0953、XP0954、XP1045;Hanse-Chemie公司製的NANOPOX:型號XP0516、XP0525、XP0314等。The silica filler (D) preferably contains silica particles derived from a silica sol. In this case, the transparency of the photosensitive resin composition containing the organic filler (B) can be further improved, and the resolution of the photosensitive resin composition can be further improved. Examples of the silica sol include spherical silica sol and chain silica sol. Specific examples of the silica filler (D) include, for example, organic silica sols manufactured by Nissan Chemical Industries, Ltd .: Models MA-ST-M, MA-ST-L, IPA-ST, and IPA-ST-ZL , IPA-ST-UP, EG-ST, NPC-ST-30, PGM-ST, DMAC-ST, MEK-ST-40, MIBK-ST, MIBK-ST-L, CHO-ST-M, EAC-ST , TOL-ST, MEK-AC-4130Y, MEK-AC-5140Z, PGM-AC-2140Y, PGM-AC-4130Y, MIBK-AC-2140Z, MIKB-SD-L, MEK-EC-6150P, MEK-EC -7150P, EP-F2130Y, EP-F6140P, EP-F7150P, PMA-ST, MEK-EC-2130Y, MEK-AC-2140Z, MEK-ST-L, MEK-ST-ZL, MEK-ST-UP; Hanse -NANOCRYL manufactured by Chemie: Models XP0396, XP0596, XP0733, XP0746, XP0765, XP0768, XP0953, XP0954, XP1045; NANOPRY manufactured by Hanse-Chemie: Models XP0516, XP0525, XP0314, etc.
感光性樹脂組成物可進一步含有氧化矽填料(D)以外的無機填料。氧化矽填料(D)以外的無機填料可包含平均初級粒徑不在1~150 nm的範圍內的氧化矽填料,亦可包含氧化矽填料以外的無機填料。氧化矽填料(D)以外的無機填料的例子,包含:硫酸鋇、結晶性氧化矽、奈米氧化矽、奈米碳管、滑石、皂土、氫氧化鋁、氫氧化鎂、及氧化鈦。例如:當感光性樹脂組成物含有氧化鈦、氧化鋅等白色材料時,能夠使感光性樹脂組成物及其硬化物白色化。其中,從獲得感光性樹脂組成物的良好的透明性及解析性的觀點來看,感光性樹脂組成物可不含氧化矽填料(D)以外的無機填料。當感光性樹脂組成物含有氧化矽填料(D)及氧化矽填料(D)以外的無機填料時,相對於氧化矽填料(D)與氧化矽填料(D)以外的無機填料的合計,氧化矽填料(D)的含量以30質量%以上為佳,以50質量%以上較佳。此時,能夠獲得感光性樹脂組成物的良好的透明性及解析性。The photosensitive resin composition may further contain an inorganic filler other than the silica filler (D). The inorganic filler other than the silicon oxide filler (D) may include a silicon oxide filler having an average primary particle diameter not in the range of 1 to 150 nm, and may also include an inorganic filler other than the silicon oxide filler. Examples of the inorganic filler other than the silica filler (D) include barium sulfate, crystalline silica, nano silica, carbon nanotubes, talc, bentonite, aluminum hydroxide, magnesium hydroxide, and titanium oxide. For example, when the photosensitive resin composition contains a white material such as titanium oxide and zinc oxide, the photosensitive resin composition and the cured product thereof can be whitened. Among these, from the viewpoint of obtaining good transparency and resolution of the photosensitive resin composition, the photosensitive resin composition may not contain inorganic fillers other than the silicon oxide filler (D). When the photosensitive resin composition contains an inorganic filler other than the silica filler (D) and the silica filler (D), the silica is larger than the total of the silica filler (D) and the inorganic filler other than the silica filler (D). The content of the filler (D) is preferably 30% by mass or more, and more preferably 50% by mass or more. In this case, good transparency and resolution of the photosensitive resin composition can be obtained.
相對於含羧基樹脂(A)的含量100質量份,氧化矽填料(D)的含量較佳是在5~200質量份的範圍內。氧化矽填料(D)的含量為5質量份以上,即能夠更加提高感光性樹脂組成物的透明性。此外,氧化矽填料(D)的含量為200質量份以下,即能夠具有更優異的解析性。此外,氧化矽填料(D)的含量在此範圍內,即能夠更加提高感光性樹脂組成物的硬化物的玻璃轉移點,並且能夠更加降低熱膨脹係數及介電耗損正切。並且,能夠減少對感光性樹脂組成物的硬化物進行除膠渣處理後的硬化物的表面粗糙度。相對於含羧基樹脂(A)的含量100質量份,氧化矽填料(D)的含量更佳是在20~150質量份的範圍內,特佳是在40~100質量份的範圍內。The content of the silica filler (D) is preferably in the range of 5 to 200 parts by mass based on 100 parts by mass of the content of the carboxyl group-containing resin (A). The content of the silica filler (D) is 5 parts by mass or more, that is, the transparency of the photosensitive resin composition can be further improved. In addition, when the content of the silicon oxide filler (D) is 200 parts by mass or less, it is possible to have more excellent resolvability. In addition, when the content of the silicon oxide filler (D) is within this range, the glass transition point of the cured product of the photosensitive resin composition can be further increased, and the coefficient of thermal expansion and the dielectric loss tangent can be further reduced. In addition, it is possible to reduce the surface roughness of the cured product obtained by subjecting the cured product of the photosensitive resin composition to a desmearing treatment. The content of the silica filler (D) is more preferably in the range of 20 to 150 parts by mass, and particularly preferably in the range of 40 to 100 parts by mass, with respect to 100 parts by mass of the content of the carboxyl group-containing resin (A).
感光性樹脂組成物,較佳是:進一步含有不飽和化合物(E),其一分子中具有至少一個乙烯性不飽和鍵。不飽和化合物(E)能夠對感光性樹脂組成物賦予光硬化性。不飽和化合物(E)包含例如從由下述所組成之群組中選出的至少一種化合物:(甲基)丙烯酸2-羥基乙酯等單官能(甲基)丙烯酸酯;以及,二乙二醇二(甲基)丙烯酸酯、三羥甲基丙烷二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、ε-己內酯改質季戊四醇六丙烯酸酯、三環癸烷二甲醇二(甲基)丙烯酸酯等多官能(甲基)丙烯酸酯。The photosensitive resin composition preferably further contains an unsaturated compound (E), which has at least one ethylenically unsaturated bond in one molecule. The unsaturated compound (E) can impart photocurability to the photosensitive resin composition. The unsaturated compound (E) includes, for example, at least one compound selected from the group consisting of: monofunctional (meth) acrylates such as 2-hydroxyethyl (meth) acrylate; and diethylene glycol Di (meth) acrylate, trimethylolpropane di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate Polyfunctional esters, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, ε-caprolactone modified pentaerythritol hexaacrylate, tricyclodecane dimethanol di (meth) acrylate, etc. (Meth) acrylate.
不飽和化合物(E),較佳是包含從由下述所組成之群組中選出的至少一種化合物:三羥甲基丙烷三(甲基)丙烯酸酯及三環癸烷二甲醇二(甲基)丙烯酸酯。此時,不飽和化合物(E)由於在感光性樹脂組成物中具有高溶解性,故感光性樹脂組成物能夠具有優異的透明性及安定性。不飽和化合物(E)更佳是包含三環癸烷二甲醇二(甲基)丙烯酸酯。此時,能夠更加降低感光性樹脂組成物的硬化物的介電耗損正切。The unsaturated compound (E) preferably contains at least one compound selected from the group consisting of trimethylolpropane tri (meth) acrylate and tricyclodecanedimethanol bis (methyl) )Acrylate. At this time, since the unsaturated compound (E) has high solubility in the photosensitive resin composition, the photosensitive resin composition can have excellent transparency and stability. The unsaturated compound (E) is more preferably tricyclodecanedimethanol di (meth) acrylate. In this case, the dielectric loss tangent of the cured product of the photosensitive resin composition can be further reduced.
不飽和化合物(E),亦較佳是包含三官能化合物,亦即一分子中具有三個不飽和鍵之化合物。此時,能夠更加提高感光性樹脂組成物的解析性,並且特別提高感光性樹脂樹脂組成物的藉由鹼性水溶液來進行的顯影性。三官能化合物,包含例如從由下述所組成之群組中選出的至少一種化合物:三羥甲基丙烷三(甲基)丙烯酸酯、環氧乙烷(EO)改質三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、乙氧基化異氰脲酸三(甲基)丙烯酸酯及ε-己內酯改質參(2-丙烯醯氧基乙基)異氰脲酸酯及乙氧基化甘油三(甲基)丙烯酸酯。The unsaturated compound (E) is also preferably a trifunctional compound, that is, a compound having three unsaturated bonds in one molecule. In this case, the resolution of the photosensitive resin composition can be further improved, and the developability of the photosensitive resin resin composition with an alkaline aqueous solution can be particularly improved. Trifunctional compounds, including, for example, at least one compound selected from the group consisting of: trimethylolpropane tri (meth) acrylate, ethylene oxide (EO) modified trimethylolpropane tri (Meth) acrylate, pentaerythritol tri (meth) acrylate, ethoxylated isocyanurate tri (meth) acrylate, and ε-caprolactone modification parameters (2-propenyloxyethyl) Isocyanurate and ethoxylated glycerol tri (meth) acrylate.
不飽和化合物(E),亦較佳是含有含磷化合物(含磷不飽和化合物)。此時,能夠提高感光性樹脂組成物的硬化物的阻燃性。含磷不飽和化合物,能夠含有例如從由下述所組成之群組中選出的一種以上的化合物:磷酸2-甲基丙烯醯氧基乙酯(具體例為共榮社化學股份有限公司製的型號LIGHT ESTER P-1M、及LIGHT ESTER P-2M)、磷酸2-丙烯醯氧基乙酯(具體例為共榮社化學股份有限公司製的型號LIGHT ACRYLATE P-1A)、磷酸二苯酯2-甲基丙烯醯氧基乙酯(具體例為大八工業股份有限公司製的型號MR-260)、以及昭和高分子股份有限公司製的HFA系列(具體例為:二季戊四醇六丙烯酸酯與羥基檸檬酸(HCA)的加成反應物亦即型號HFA-6003及HFA-6007;己內酯改質二季戊四醇六丙烯酸酯與HCA的加成反應物亦即型號HFA-3003及HFA-6127等)。The unsaturated compound (E) also preferably contains a phosphorus-containing compound (phosphorus-containing unsaturated compound). In this case, the flame retardance of the hardened | cured material of the photosensitive resin composition can be improved. The phosphorus-containing unsaturated compound can contain, for example, one or more compounds selected from the group consisting of 2-methacryloxyethyl phosphate (a specific example is manufactured by Kyoeisha Chemical Co., Ltd. Models LIGHT ESTER P-1M and LIGHT ESTER P-2M), 2-propenyloxyethyl phosphate (specific examples are model LIGHT ACRYLATE P-1A manufactured by Kyoeisha Chemical Co., Ltd.), and diphenyl phosphate 2 -Methacryloxyethoxyethyl ester (specific example is model MR-260 manufactured by Daiba Industrial Co., Ltd.) and HFA series (specific example: dipentaerythritol hexaacrylate and hydroxy Addition reactants of citric acid (HCA) are model HFA-6003 and HFA-6007; addition reactions of caprolactone modified dipentaerythritol hexaacrylate and HCA are model HFA-3003 and HFA-6127, etc.) .
不飽和化合物(E)可包含預聚物。預聚物能夠含有例如從由下述所組成之群組中選出的至少一種化合物:使具有乙烯性不飽和鍵之單體進行聚合後加成乙烯性不飽和基而得的預聚物、以及寡聚(甲基)丙烯酸酯預聚物類。寡聚(甲基)丙烯酸酯預聚物類,能夠含有例如從由下述所組成之群組中選出的至少一種成分:環氧(甲基)丙烯酸酯、聚酯(甲基)丙烯酸酯、胺酯(urethane)(甲基)丙烯酸酯、醇酸(alkyd)樹脂(甲基)丙烯酸酯、矽氧樹脂(甲基)丙烯酸酯、及螺烷烴(spirane)樹脂(甲基)丙烯酸酯。The unsaturated compound (E) may contain a prepolymer. The prepolymer can contain, for example, at least one compound selected from the group consisting of a prepolymer obtained by polymerizing a monomer having an ethylenically unsaturated bond and adding an ethylenically unsaturated group, and Oligomeric (meth) acrylate prepolymers. The oligo (meth) acrylate prepolymers can contain, for example, at least one component selected from the group consisting of epoxy (meth) acrylate, polyester (meth) acrylate, Urethane (meth) acrylate, alkyd resin (meth) acrylate, silicone resin (meth) acrylate, and spirane resin (meth) acrylate.
當感光性樹脂組成物含有不飽和化合物(E)時,相對於含羧基樹脂(A)的含量,不飽和化合物(E)的含量較佳是在1~50質量%的範圍內,更佳是在10~45質量%的範圍內,進一步更佳是在21~40質量%的範圍內。When the photosensitive resin composition contains an unsaturated compound (E), the content of the unsaturated compound (E) is preferably in the range of 1 to 50% by mass, and more preferably, relative to the content of the carboxyl group-containing resin (A). In the range of 10 to 45 mass%, it is more preferably in the range of 21 to 40 mass%.
感光性樹脂組成物,較佳是:進一步含有光聚合起始劑(F)。光聚合起始劑(F),包含例如醯基氧化膦系光聚合起始劑。換言之,感光性樹脂組成物含有例如醯基氧化膦系光聚合起始劑。此時,當對感光性樹脂組成物進行曝光時能夠對感光性樹脂組成物賦予高感光性。此外,能夠抑制在包含感光性樹脂組成物的硬化物之層中發生離子遷移,而更加提高包含硬化物之層的絕緣性。The photosensitive resin composition preferably further contains a photopolymerization initiator (F). The photopolymerization initiator (F) includes, for example, a fluorenylphosphine oxide-based photopolymerization initiator. In other words, the photosensitive resin composition contains, for example, a fluorenylphosphine oxide-based photopolymerization initiator. In this case, when the photosensitive resin composition is exposed, high sensitivity can be imparted to the photosensitive resin composition. In addition, it is possible to suppress ion migration in the layer containing the cured product of the photosensitive resin composition, and to further improve the insulation of the layer containing the cured product.
醯基氧化膦系光聚合起始劑,包含例如從由下述所組成之群組中選出的一種以上的成分:2,4,6-三甲基苯甲醯基二苯基氧化膦、乙基-2,4,6-三甲基苯甲醯基苯基次膦酸酯等單醯基氧化膦系光聚合起始劑;以及,雙(2,6-二氯苯甲醯基)苯基氧化膦、雙(2,6-二氯苯甲醯基)-2,5-二甲基苯基氧化膦、雙(2,6-二氯苯甲醯基)-4-丙基苯基氧化膦、雙(2,6-二氯苯甲醯基)-1-萘基氧化膦、雙(2,6-二甲氧基苯甲醯基)苯基氧化膦、雙(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基氧化膦、雙(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基氧化膦、雙(2,4,6-三甲基苯甲醯基)苯基氧化膦、雙(2,5,6-三甲基苯甲醯基)-2,4,4-三甲基戊基氧化膦等雙醯基氧化膦系光聚合起始劑。特佳是:醯基氧化膦系光聚合起始劑包含2,4,6-三甲基苯甲醯基二苯基氧化膦,且醯基氧化膦系光聚合起始劑可僅包含2,4,6-三甲基苯甲醯基二苯基氧化膦。The fluorenylphosphine oxide-based photopolymerization initiator includes, for example, one or more components selected from the group consisting of: 2,4,6-trimethylbenzylfluorenyldiphenylphosphine oxide, ethyl Mono-fluorenylphosphine oxide-based photopolymerization initiators such as methyl-2,4,6-trimethylbenzylidenephenylphosphinate; and bis (2,6-dichlorobenzylidene) benzene Phosphine oxide, bis (2,6-dichlorobenzyl) -2,5-dimethylphenylphosphine oxide, bis (2,6-dichlorobenzyl) -4-propylphenyl Phosphine oxide, bis (2,6-dichlorobenzylidene) -1-naphthylphosphine oxide, bis (2,6-dimethoxybenzylidene) phenylphosphine oxide, bis (2,6- Dimethoxybenzyl) -2,4,4-trimethylpentylphosphine oxide, bis (2,6-dimethoxybenzyl) -2,5-dimethylphenyl oxidation Phosphine, bis (2,4,6-trimethylbenzyl) phenylphosphine oxide, bis (2,5,6-trimethylbenzyl) -2,4,4-trimethylpentane Difluorenylphosphine oxide-based photopolymerization initiators such as phosphonium oxide. It is particularly preferred that the fluorenylphosphine oxide-based photopolymerization initiator includes 2,4,6-trimethylbenzylidenediphenylphosphine oxide, and the fluorenylphosphine oxide-based photopolymerization initiator may include only 2, 4,6-trimethylbenzylidene diphenylphosphine oxide.
光聚合起始劑(F)較佳是:除了醯基氧化膦系光聚合起始劑以外,還包含羥基酮系光聚合起始劑。換言之,較佳是:感光性樹脂組成物含有羥基酮系光聚合起始劑。與不含羥基酮系光聚合起始劑的情形相比,能夠對感光性樹脂組成物賦予更高的感光性。藉此,當藉由曝光來使感光性樹脂組成物硬化時,能夠使由感光性樹脂組成物所形成的塗膜的從表面至深部皆充分硬化。羥基酮系光聚合起始劑的例子包含:1-羥基環己基苯基酮、苯乙醛酸甲酯、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基丙醯基)苯甲基]苯基}-2-甲基丙-1-酮、及2-羥基-2-甲基-1-苯基丙-1-酮。The photopolymerization initiator (F) preferably contains a hydroxyketone-based photopolymerization initiator in addition to the fluorenylphosphine oxide-based photopolymerization initiator. In other words, the photosensitive resin composition preferably contains a hydroxyketone-based photopolymerization initiator. Compared with a case where a hydroxyketone-based photopolymerization initiator is not contained, it is possible to impart higher sensitivity to the photosensitive resin composition. Accordingly, when the photosensitive resin composition is cured by exposure, the coating film formed from the photosensitive resin composition can be sufficiently cured from the surface to the deep portion. Examples of the hydroxyketone-based photopolymerization initiator include: 1-hydroxycyclohexylphenyl ketone, methyl phenylglyoxylate, 1- [4- (2-hydroxyethoxy) phenyl] -2-hydroxy-2 -Methyl-1-propan-1-one, 2-hydroxy-1- {4- [4- (2-hydroxy-2-methylpropanyl) benzyl] phenyl} -2-methylpropane 1-one and 2-hydroxy-2-methyl-1-phenylpropan-1-one.
當感光性樹脂組成物含有醯基氧化膦系光聚合起始劑及羥基酮系光聚合起始劑時,醯基氧化膦系光聚合起始劑與羥基酮系光聚合起始劑的質量比,較佳是在1:0.01~1:10的範圍內。此時,能夠平衡性良好地提高由感光性樹脂組成物所形成的塗膜的表面附近的硬化性及深部的硬化性。When the photosensitive resin composition contains a fluorenyl phosphine oxide-based photopolymerization initiator and a hydroxyketone photopolymerization initiator, the mass ratio of the fluorenylphosphine oxide-based photopolymerization initiator to the hydroxyketone photopolymerization initiator , Preferably in the range of 1: 0.01 to 1:10. In this case, the hardenability in the vicinity of the surface of the coating film formed of the photosensitive resin composition and the hardenability in the deep portion can be improved in a well-balanced manner.
亦較佳是:光聚合起始劑(F)含有雙(二乙胺基)二苯甲酮。換言之,亦較佳是:感光性樹脂組成物含有醯基氧化膦系光聚合起始劑及雙(二乙胺基)二苯甲酮、或是含有羥基酮系光聚合起始劑及雙(二乙胺基)二苯甲酮。此時,對由感光性樹脂組成物所形成的塗膜的一部分進行曝光後進行顯影時,會抑制未曝光的部分硬化,而會特別提高解析性。因此,能夠在感光性樹脂組成物的硬化物形成非常微細的圖案。特別是,當從感光性樹脂組成物製作多層印刷線路板的層間絕緣層並且以光微影法來於此層間絕緣層中設置用於貫穿孔的直徑小的孔時(參照第1圖),能夠精密且容易地形成直徑小的孔。It is also preferable that the photopolymerization initiator (F) contains bis (diethylamino) benzophenone. In other words, it is also preferable that the photosensitive resin composition contains a fluorenyl phosphine oxide-based photopolymerization initiator and bis (diethylamino) benzophenone, or a hydroxyketone-based photopolymerization initiator and bis ( Diethylamino) benzophenone. At this time, when a part of the coating film formed from the photosensitive resin composition is exposed and developed, the unexposed portion is suppressed from being hardened, and the resolution is particularly improved. Therefore, a very fine pattern can be formed on the cured product of the photosensitive resin composition. In particular, when an interlayer insulating layer of a multilayer printed wiring board is produced from a photosensitive resin composition, and a small diameter hole is formed in the interlayer insulating layer by a photolithography method (see FIG. 1), A small-diameter hole can be formed precisely and easily.
當感光性樹脂組成物含有雙(二乙胺基)二苯甲酮及醯基氧化膦系光聚合起始劑時,相對於醯基氧化膦系光聚合起始劑,雙(二乙胺基)二苯甲酮的含量較佳是在0.5~20質量%的範圍內。若雙(二乙胺基)二苯甲酮的含量為0.5質量%以上,則能夠特別提高解析性。此外,若雙(二乙胺基)二苯甲酮的含量為20質量%以下,則雙(二乙胺基)二苯甲酮不容易阻礙感光性樹脂組成物的硬化物的電絕緣性。When the photosensitive resin composition contains a bis (diethylamino) benzophenone and a fluorenylphosphine oxide-based photopolymerization initiator, the bis (diethylamine) The content of benzophenone is preferably in the range of 0.5 to 20% by mass. When the content of bis (diethylamino) benzophenone is 0.5% by mass or more, the resolution can be particularly improved. In addition, when the content of bis (diethylamino) benzophenone is 20% by mass or less, bis (diethylamino) benzophenone does not easily hinder the electrical insulation of the cured product of the photosensitive resin composition.
相對於含羧基樹脂(A)的含量,光聚合起始劑(F)的含量較佳是在1~30質量%的範圍內,更佳是在1~25質量%的範圍內。The content of the photopolymerization initiator (F) with respect to the content of the carboxyl group-containing resin (A) is preferably in the range of 1 to 30% by mass, and more preferably in the range of 1 to 25% by mass.
感光性樹脂組成物較佳是進一步含有環氧化合物(G)。環氧化合物(G)能夠對感光性樹脂組成物賦予熱硬化性。環氧化合物(G)較佳是包含結晶性環氧樹脂。結晶性環氧樹脂為具有熔點的環氧樹脂。結晶性環氧樹脂能夠對感光性樹脂組成物賦予熱硬化性。並且,結晶性環氧樹脂會提高硬化物的耐熱性及顯影性。The photosensitive resin composition preferably further contains an epoxy compound (G). The epoxy compound (G) can impart thermosetting properties to the photosensitive resin composition. The epoxy compound (G) preferably contains a crystalline epoxy resin. The crystalline epoxy resin is an epoxy resin having a melting point. The crystalline epoxy resin can impart thermosetting properties to the photosensitive resin composition. In addition, the crystalline epoxy resin improves the heat resistance and developability of the cured product.
結晶性環氧樹脂,較佳是包含例如從由下述所組成之群組中選出的一種以上的成分:1,3,5-參(2,3-環氧基丙基)-1,3,5-三嗪-2,4,6(1H,3H,5H)-三酮、氫醌型結晶性環氧樹脂(具體例為新日鐵住金化學股份有限公司製的商品名YDC-1312)、聯苯型結晶性環氧樹脂(具體例為三菱化學股份有限公司製的商品名YX-4000)、二苯基醚型結晶性環氧樹脂(具體例為新日鐵住金化學股份有限公司製的型號YSLV-80DE)、雙酚型結晶性環氧樹脂(具體例為新日鐵住金化學股份有限公司製的商品名YSLV-80XY)、肆酚乙烷型結晶性環氧樹脂(具體例為日本化藥股份有限公司製的型號GTR-1800)、雙酚茀型結晶性環氧樹脂(具體例為具有由式(2)表示的結構之環氧樹脂)。The crystalline epoxy resin preferably contains, for example, one or more components selected from the group consisting of: 1,3,5-ginseng (2,3-epoxypropyl) -1,3 , 5-triazine-2,4,6 (1H, 3H, 5H) -trione, hydroquinone type crystalline epoxy resin (specific example is the product name YDC-1312 manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.) , Biphenyl type crystalline epoxy resin (specific example is the product name YX-4000 manufactured by Mitsubishi Chemical Corporation), diphenyl ether type crystalline epoxy resin (specific example is manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd. Model YSLV-80DE), bisphenol-type crystalline epoxy resin (specific example is the trade name YSLV-80XY manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), and phenol ethane-type crystalline epoxy resin (specific example is Model GTR-1800 manufactured by Nippon Kayaku Co., Ltd.), bisphenol fluorene type crystalline epoxy resin (a specific example is an epoxy resin having a structure represented by formula (2)).
結晶性環氧樹脂,可一分子中具有兩個環氧基。此時,能夠使硬化物在反覆溫度變化中不容易發生龜裂。The crystalline epoxy resin may have two epoxy groups in one molecule. In this case, it is possible to make the cured product less prone to cracking during repeated temperature changes.
結晶性環氧樹脂,較佳是具有150~300 g/eq的環氧當量。此環氧當量為含有1 g當量的環氧基的結晶性環氧樹脂的g重量。The crystalline epoxy resin preferably has an epoxy equivalent of 150 to 300 g / eq. This epoxy equivalent is the g weight of the crystalline epoxy resin containing 1 g equivalent of an epoxy group.
作為結晶性環氧樹脂的熔點,可舉例如70~180℃。特別是,較佳是:結晶性環氧樹脂含有熔點110℃以下的結晶性環氧樹脂。此時,感光性樹脂組成物的藉由鹼性水溶液來進行的顯影性會特別提高。熔點為110℃以下的結晶性環氧樹脂,包含例如從由下述所組成之群組中選出的至少一種成分:聯苯型環氧樹脂(具體例為三菱化學股份有限公司製的型號YX4000)、聯苯醚型環氧樹脂(具體例為新日鐵住金化學股份有限公司製的型號YSLV-80DE)、及雙酚型環氧樹脂(具體例為新日鐵住金化學股份有限公司製的型號YSLV-80XY)、雙酚茀型結晶性環氧樹脂(具體例為具有由式(2)表示的結構之環氧樹脂)。Examples of the melting point of the crystalline epoxy resin include 70 to 180 ° C. In particular, it is preferable that the crystalline epoxy resin contains a crystalline epoxy resin having a melting point of 110 ° C or lower. In this case, the developability of the photosensitive resin composition with an alkaline aqueous solution is particularly improved. A crystalline epoxy resin having a melting point of 110 ° C. or lower includes, for example, at least one component selected from the group consisting of a biphenyl epoxy resin (a specific example is a model YX4000 manufactured by Mitsubishi Chemical Corporation) , Biphenyl ether type epoxy resin (specific example is model NSLV-80DE made by Nippon Steel & Sumitomo Chemical Co., Ltd.), and bisphenol type epoxy resin (specific example is model made by Nippon Steel & Sumitomo Chemical Co., Ltd.) YSLV-80XY), bisphenol fluorene type crystalline epoxy resin (a specific example is an epoxy resin having a structure represented by formula (2)).
環氧化合物(G)可含有結晶性環氧樹脂以外的環氧化合物。結晶性環氧樹脂以外的環氧化合物中包含非晶性環氧樹脂。非晶性環氧樹脂為不具有熔點的環氧樹脂。非晶性環氧樹脂能夠對感光性樹脂組成物賦予熱硬化性。非晶性環氧樹脂較佳是一分子中具有至少兩個環氧基。The epoxy compound (G) may contain epoxy compounds other than a crystalline epoxy resin. The epoxy compound other than the crystalline epoxy resin includes an amorphous epoxy resin. The amorphous epoxy resin is an epoxy resin having no melting point. The amorphous epoxy resin can impart thermosetting properties to the photosensitive resin composition. The amorphous epoxy resin preferably has at least two epoxy groups in one molecule.
非晶性環氧樹脂,較佳是包含例如從由下述所組成之群組中選出的一種以上的成分:苯酚酚醛清漆型環氧樹脂(具體例為DIC股份有限公司製的型號EPICLON N-775)、甲酚酚醛清漆型環氧樹脂(具體例為DIC股份有限公司製的型號EPICLON N-695)、雙酚A酚醛清漆型環氧樹脂(具體例為DIC股份有限公司製的型號EPICLON N-865)、雙酚A型環氧樹脂(具體例為三菱化學股份有限公司製的型號jER1001)、雙酚F型環氧樹脂(具體例為三菱化學股份有限公司製的型號jER4004P)、雙酚S型環氧樹脂(具體例為DIC股份有限公司製的型號EPICLON EXA-1514)、雙酚AD型環氧樹脂、聯苯酚醛清漆型環氧樹脂(具體例為日本化藥股份有限公司製的型號NC-3000)、氫化雙酚A型環氧樹脂(具體例為新日鐵住金化學股份有限公司製的型號ST-4000D)、萘型環氧樹脂(具體例為DIC股份有限公司製的型號EPICLON HP-4032、EPICLON HP-4700、EPICLON HP-4770)、三級丁基兒茶酚型環氧樹脂(具體例為DIC股份有限公司製的型號EPICLON HP-820)、雙環戊二烯型環氧樹脂(具體例為DIC公司製的型號EPICLON HP-7200)、金剛烷型環氧樹脂(具體例為出光興產股份有限公司製的型號ADAMANTATE X-E-201)、特殊二官能型環氧樹脂(具體例為三菱化學股份有限公司製的型號YL7175-500及YL7175-1000;DIC股份有限公司製的型號EPICLON TSR-960、EPICLON TER-601、EPICLON TSR-250-80BX、EPICLON 1650-75MPX、EPICLON EXA-4850、EPICLON EXA-4816、EPICLON EXA-4822、及EPICLON EXA-9726;新日鐵住金化學股份有限公司製的型號YSLV-120TE)、橡膠狀核殼聚合物改質雙酚A型環氧樹脂(具體例為KANEKA股份有限公司製的型號MX-156)、以及橡膠狀核殼聚合物改質雙酚F型環氧樹脂(具體例為KANEKA股份有限公司製的型號MX-136)。The amorphous epoxy resin preferably contains, for example, one or more components selected from the group consisting of a phenol novolac epoxy resin (a specific example is a model EPICLON N- manufactured by DIC Corporation). 775), cresol novolac epoxy resin (specific example is model EPICLON N-695 manufactured by DIC Corporation), bisphenol A novolac epoxy resin (specific example is model EPICLON N manufactured by DIC Corporation) -865), bisphenol A epoxy resin (specific example is model jER1001 manufactured by Mitsubishi Chemical Corporation), bisphenol F epoxy resin (specific example is model jER4004P manufactured by Mitsubishi Chemical Corporation), bisphenol S-type epoxy resin (specific example is model EPICLON EXA-1514 manufactured by DIC Corporation), bisphenol AD-type epoxy resin, biphenol novolac-type epoxy resin (specific examples are manufactured by Nippon Kayaku Co., Ltd. Model NC-3000), hydrogenated bisphenol A type epoxy resin (specific example is model number ST-4000D manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), naphthalene type epoxy resin (specific example is model number made by DIC Corporation) EPICLON HP-4032, EPICLON HP-4700, EPICLO N HP-4770), tertiary butyl catechol type epoxy resin (specific example is model EPICLON HP-820 manufactured by DIC Corporation), dicyclopentadiene type epoxy resin (specific example manufactured by DIC Corporation Model EPICLON HP-7200), adamantane type epoxy resin (specific example is model ADAMANTATE XE-201 manufactured by Idemitsu Kosan Co., Ltd.), special difunctional epoxy resin (specific example is manufactured by Mitsubishi Chemical Co., Ltd. Models YL7175-500 and YL7175-1000; Models EPICLON TSR-960, EPICLON TER-601, EPICLON TSR-250-80BX, EPICLON 1650-75MPX, EPICLON EXA-4850, EPICLON EXA-4816, EPICLON EXA manufactured by DIC Corporation -4822 and EPICLON EXA-9726; model NSLV-120TE manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., rubber-like core-shell polymer modified bisphenol A epoxy resin (specific examples are manufactured by KANEKA Co., Ltd. Model MX-156) and rubber-like core-shell polymer modified bisphenol F-type epoxy resin (specific example is model MX-136 manufactured by KANEKA Corporation).
環氧化合物(G)可含有含磷環氧樹脂。此時,感光性樹脂組成物的硬化物的阻燃性會提高。作為含磷環氧樹脂,可舉例如:磷酸改質雙酚F型環氧樹脂(具體例為DIC股份有限公司製的型號EPICLON EXA-9726、及EPICLON EXA-9710)、新日鐵住金化學股份有限公司製的型號Epotohto FX-305等。The epoxy compound (G) may contain a phosphorus-containing epoxy resin. In this case, the flame retardance of the hardened | cured material of the photosensitive resin composition improves. Examples of the phosphorus-containing epoxy resin include phosphoric acid modified bisphenol F-type epoxy resin (specific examples are models EPICLON EXA-9726 and EPICLON EXA-9710 manufactured by DIC Corporation), and Nippon Steel & Sumitomo Chemical Co., Ltd. Co., Ltd. model Epotohto FX-305 and so on.
環氧化合物(G)較佳是僅包含結晶性環氧樹脂、或包含結晶性環氧樹脂及非晶性環氧樹脂。環氧化合物(G)較佳是包含結晶性環氧樹脂10質量%以上,更佳是包含結晶性環氧樹脂30質量%以上,進一步更佳是包含結晶性環氧樹脂50質量%以上。此時,能夠提高感光性樹脂組成物的藉由鹼性水溶液來進行的顯影性,且能夠特別提高感光性樹脂組成物的硬化物的耐熱性及絕緣性。The epoxy compound (G) preferably contains only a crystalline epoxy resin, or contains a crystalline epoxy resin and an amorphous epoxy resin. The epoxy compound (G) preferably contains 10% by mass or more of the crystalline epoxy resin, more preferably 30% by mass or more of the crystalline epoxy resin, and even more preferably 50% by mass or more of the crystalline epoxy resin. In this case, the developability of the photosensitive resin composition with an alkaline aqueous solution can be improved, and the heat resistance and insulation properties of the cured product of the photosensitive resin composition can be particularly improved.
環氧化合物(G)的含量,相對於含羧基樹脂(A)中所含的羧基1當量,較佳是環氧化合物(G)中所含的環氧基的當量的合計在0.7~2.5的範圍內,更佳是在0.7~2.3的範圍內,進一步更佳是在0.7~2.0的範圍內。另外,環氧化合物(G)包含結晶性環氧樹脂時,相對於含羧基樹脂(A)中所含的羧基1當量,較佳是結晶性環氧樹脂所含的環氧基的當量的合計在0.7~2.5的範圍內,更佳是在0.7~2.3的範圍內,進一步更佳是在0.7~2.0的範圍內。The content of the epoxy compound (G) is preferably 0.7 to 2.5 based on 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). The range is more preferably in the range of 0.7 to 2.3, and even more preferably in the range of 0.7 to 2.0. When the epoxy compound (G) contains a crystalline epoxy resin, it is preferably a total of the equivalent of the epoxy group contained in the crystalline epoxy resin with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). The range is 0.7 to 2.5, more preferably 0.7 to 2.3, and still more preferably 0.7 to 2.0.
感光性樹脂組成物可含有三聚氰胺。此時,感光性樹脂組成物的硬化物與銅等金屬之間的密合性會提高。因此,感光性樹脂組成物會特別適合作為印刷線路板用的絕緣材料。此外,感光性樹脂組成物的硬化物的耐鍍覆性亦即進行無電解鍍鎳/鍍金處理時的白化耐性會提高。The photosensitive resin composition may contain melamine. At this time, the adhesiveness between the cured product of the photosensitive resin composition and a metal such as copper is improved. Therefore, the photosensitive resin composition is particularly suitable as an insulating material for a printed wiring board. In addition, the hardened product of the photosensitive resin composition has improved plating resistance, that is, whitening resistance when subjected to electroless nickel plating / gold plating treatment.
當感光性樹脂組成物含有三聚氰胺時,相對於含羧基樹脂(A)的含量,三聚氰胺較佳是在0.1~10質量%的範圍內,更佳是在0.5~5質量%的範圍內。When the photosensitive resin composition contains melamine, the melamine is preferably in a range of 0.1 to 10% by mass, and more preferably in a range of 0.5 to 5% by mass, relative to the content of the carboxyl group-containing resin (A).
感光性樹脂組成物可含有有機溶劑。有機溶劑是為了感光性樹脂組成物的液狀化或清漆化、黏度調整、塗佈性的調整、造膜性的調整等目的而使用。The photosensitive resin composition may contain an organic solvent. The organic solvent is used for purposes such as liquefaction or varnishing of the photosensitive resin composition, adjustment of viscosity, adjustment of coating property, adjustment of film forming property, and the like.
有機溶劑,包含例如從由下述所組成之群組中選出的一種以上的化合物:乙醇、丙醇、異丙醇、己醇、乙二醇等直鏈、分枝、2級或多元的醇類;甲基乙基酮、環己酮等酮類;甲苯、二甲苯等芳香族烴類;SWASOL系列(丸善石油化學公司製)、Solvesso(ExxonMobil Chemical公司製)等石油系芳香族系混合溶劑;賽璐蘇、丁基賽璐蘇等賽璐蘇類;卡必醇、丁基卡必醇等卡必醇類;丙二醇甲基醚等丙二醇烷基醚;二丙二醇甲基醚等聚丙二醇烷基醚;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯、卡必醇乙酸酯等乙酸酯類;以及,二烷基二醇醚類。Organic solvents include, for example, one or more compounds selected from the group consisting of linear, branched, secondary, or polyhydric alcohols such as ethanol, propanol, isopropanol, hexanol, and ethylene glycol. Ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene; petroleum-based aromatic mixed solvents such as SWASOL series (manufactured by Maruzan Petrochemical), Solvesso (manufactured by ExxonMobil Chemical) ; Cellulose such as Cellulose and Butyl Cellulose; Carbitols such as Carbitol and Butylcarbitol; Propylene glycol alkyl ethers such as propylene glycol methyl ether; Polypropylene glycol alkyls such as dipropylene glycol methyl ether Ethers; acetates such as ethyl acetate, butyl acetate, cellulose acetate, and carbitol acetate; and dialkyl glycol ethers.
當感光性樹脂組成物含有有機溶劑時,有機溶劑的量,較佳是以下述方式調整:在將由感光性樹脂組成物所形成的塗膜乾燥時使有機溶劑迅速揮發,亦即使有機溶劑不會殘留在乾燥膜中。特別是,相對於感光性樹脂組成物整體,有機溶劑較佳是在0~99.5質量%的範圍內,更佳是在15~60質量%的範圍內。再者,有機溶劑的較佳的比例由於會因塗佈方法等而異,故較佳是因應塗佈方法來適當調節比例。When the photosensitive resin composition contains an organic solvent, the amount of the organic solvent is preferably adjusted in such a manner that the organic solvent is rapidly volatilized when the coating film formed from the photosensitive resin composition is dried, even if the organic solvent is not affected. Residual in dry film. In particular, the organic solvent is preferably in a range of 0 to 99.5% by mass, and more preferably in a range of 15 to 60% by mass, with respect to the entire photosensitive resin composition. Moreover, since the preferable ratio of an organic solvent differs according to a coating method etc., it is preferable to adjust a ratio suitably according to a coating method.
只要不脫離本發明的主旨,感光性樹脂組成物即可進一步含有上述成分以外的成分。The photosensitive resin composition may further contain components other than the above components without departing from the gist of the present invention.
感光性樹脂組成物,可進一步含有習知的光聚合促進劑、敏化劑等。例如,感光性樹脂組成物能夠含有從由下述所組成之群組中選出的至少一種成分:安息香及其烷基醚類;苯乙酮、苯偶醯二甲基縮酮等苯乙酮類;2-甲基蒽醌等蒽醌類;2,4-二甲基噻噸酮、2-異丙基噻噸酮、4-異丙基噻噸酮、2,4-二異丙基噻噸酮等噻噸酮(thioxanthone)類;二苯甲酮、4-苯甲醯基-4’-甲基二苯基硫醚等二苯甲酮類;2,4-二異丙基呫噸酮等呫噸酮(xanthone)類;以及,2-羥基-2-甲基-1-苯基丙-酮等α-羥基酮類;2-甲基-1-[4-(甲硫基)苯基]-2-(N-嗎啉基)-1-丙酮等含氮原子的化合物。感光性樹脂組成物可含有:光聚合起始劑(F);以及,對二甲基苯甲酸乙酯、對二甲胺基苯甲酸異戊酯、乙基-2-二甲胺基苯甲酸酯等三級胺系等的習知的光聚合促進劑和敏化劑等。感光性樹脂組成物,可因應需要來含有:可見光曝光用的光聚合起始劑及近紅外線曝光用的光聚合起始劑之中的至少一種。感光性樹脂組成物,可含有:光聚合起始劑(F);以及,雷射曝光法用敏化劑亦即7-二乙胺基-4-甲基香豆素等香豆素衍生物、羰花青(carbocyanine)色素系、呫噸色素系等。The photosensitive resin composition may further contain a conventional photopolymerization accelerator, a sensitizer, and the like. For example, the photosensitive resin composition can contain at least one component selected from the group consisting of benzoin and its alkyl ethers; acetophenones such as acetophenone and acetophenone dimethyl ketal. ; Anthraquinones such as 2-methylanthraquinone; 2,4-dimethylthioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diisopropylthioxanthone Thioxanthone such as tonone; benzophenones such as benzophenone, 4-benzylidene-4'-methyldiphenyl sulfide; 2,4-diisopropylxanthene Xanthones such as ketones; and α-hydroxyketones such as 2-hydroxy-2-methyl-1-phenylpropan-one; 2-methyl-1- [4- (methylthio) A nitrogen atom-containing compound such as phenyl] -2- (N-morpholinyl) -1-acetone. The photosensitive resin composition may contain: a photopolymerization initiator (F); and ethyl p-dimethylbenzoate, isoamyl p-dimethylaminobenzoate, and ethyl-2-dimethylaminobenzoate. Conventional photopolymerization accelerators and sensitizers such as tertiary amines such as acid esters. The photosensitive resin composition may contain at least one of a photopolymerization initiator for visible light exposure and a photopolymerization initiator for near-infrared light exposure as needed. The photosensitive resin composition may contain: a photopolymerization initiator (F); and a sensitizer for laser exposure, that is, coumarin derivatives such as 7-diethylamino-4-methylcoumarin , Carbocyanine pigments, xanthene pigments, etc.
感光性樹脂組成物可含有從由下述所組成之群組中選出的一種以上的樹脂:經以己內醯胺、肟(oxime)、丙二酸酯等來封端的甲苯二異氰酸酯系、嗎啉二異氰酸酯系、異佛酮二異氰酸酯系、及六亞甲基二異氰酸酯系等經封端的異氰酸酯;三聚氰胺樹脂、正丁基化三聚氰胺樹脂、異丁基化三聚氰胺樹脂、丁基化尿素樹脂、丁基化三聚氰胺尿素共縮合樹脂、苯胍胺系共縮合樹脂等胺樹脂;前述以外的各種熱硬化性樹脂;紫外線硬化性環氧(甲基)丙基酸酯;使(甲基)丙烯酸加成在雙酚A型、苯酚酚醛清漆型、甲酚酚醛清漆型、脂環型等的環氧樹脂而得的樹脂;以及,鄰苯二甲酸二烯丙酯樹脂、苯氧樹脂、胺酯樹脂、氟樹脂等高分子化合物。The photosensitive resin composition may contain one or more resins selected from the group consisting of: toluene diisocyanate-based capped with caprolactam, oxime, malonate, etc. Blocked isocyanates such as phthaloline diisocyanate, isophorone diisocyanate, and hexamethylene diisocyanate; melamine resin, n-butylated melamine resin, isobutylated melamine resin, butylated urea resin, butylated Amine resins such as melamine urea co-condensation resins and benzoguanamine co-condensation resins; various thermosetting resins other than the foregoing; UV-curable epoxy (meth) propyl esters; addition of (meth) acrylic acid Resins obtained from epoxy resins such as bisphenol A type, phenol novolac type, cresol novolac type, and alicyclic type; and diallyl phthalate resin, phenoxy resin, amine ester resin, Polymer compounds such as fluororesin.
當感光性樹脂組成物含有環氧化合物(G)時,感光性樹脂組成物可含有硬化劑,該硬化劑是用以使環氧化合物(G)硬化。硬化劑包含例如從由下述所組成之群組中選出的一種以上的成分:咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑等咪唑衍生物;雙氰胺、苯甲基二甲基胺、4-(二甲胺基)-N,N-二甲基苯甲基胺、4-甲氧基-N,N-二甲基苯甲基胺、4-甲基-N,N-二甲基苯甲基胺等胺化合物;己二醯肼、癸二醯肼等醯肼化合物;三苯膦等磷化合物;酸酐;酚;硫醇;路易斯酸胺錯合物;及,鎓鹽。此等成分的市售物的例子可舉例如:四國化成股份有限公司製的2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(皆為咪唑系化合物的商品名);San-Apro股份有限公司製的U-CAT3503N、U-CAT3502T(皆為二甲胺的封端二異氰酸酯化合物的商品名);DBU、DBN、U-CATSA102、U-CAT5002(皆為二環式脒(amidine)化合物及其鹽)。When the photosensitive resin composition contains an epoxy compound (G), the photosensitive resin composition may contain a hardener for hardening the epoxy compound (G). The hardener contains, for example, one or more components selected from the group consisting of imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenyl Imidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole and other imidazole derivatives; dicyandiamide, benzene Methyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, 4-methyl -N, N-dimethylbenzylamine and other amine compounds; hydrazine compounds such as hexamethylene hydrazine and sebacide; phosphorus compounds such as triphenylphosphine; acid anhydrides; phenols; thiols; Lewis acid amine complexes ; And, onium salts. Examples of commercially available products of these ingredients include, for example: 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (all are trade names of imidazole compounds) manufactured by Shikoku Chemical Co., Ltd .; San-Apro Limited U-CAT3503N, U-CAT3502T (both are trade names of dimethylamine-blocked diisocyanate compounds); DBU, DBN, U-CATSA102, U-CAT5002 (all are amidine compounds and amidine compounds) Its salt).
感光性樹脂組成物可含有三聚氰胺以外的密合性賦予劑。密合性賦予劑可舉例如:甲胍胺、苯胍胺、以及2,4-二胺基-6-甲基丙烯醯氧基乙基-s-三嗪、2-乙烯基-4,6-二胺基-s-三嗪、2-乙烯基-4,6-二胺基-s-三嗪・異氰脲酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-s-三嗪・異氰脲酸加成物等s-三嗪衍生物。The photosensitive resin composition may contain an adhesion-imparting agent other than melamine. Examples of the adhesion-imparting agent include meguanamine, benzoguanamine, and 2,4-diamino-6-methacryloxyethyl-s-triazine, 2-vinyl-4,6 -Diamino-s-triazine, 2-vinyl-4,6-diamino-s-triazine / isocyanuric acid adduct, 2,4-diamino-6-methacrylium S-triazine derivatives such as oxyethyl-s-triazine and isocyanuric acid adducts.
感光性樹脂組成物可含有從由下述所組成之群組中選出的一種以上的成分:硬化促進劑;著色劑;矽氧、丙烯酸酯等共聚物;塗平(leveling)劑;密合性賦予劑;觸變劑;聚合抑制劑;防光暈劑;阻燃劑;消泡劑;抗氧化劑;界面活性劑;以及,高分子分散劑。The photosensitive resin composition may contain one or more components selected from the group consisting of: a hardening accelerator; a colorant; a copolymer such as silicon oxide and acrylate; a leveling agent; and adhesion Additives; thixotropic agents; polymerization inhibitors; anti-halation agents; flame retardants; defoamers; antioxidants; surfactants; and polymer dispersants.
感光性樹脂組成物中,胺化合物的含量較佳是盡可能較少。此時,不容易損害由感光性樹脂組成物的硬化物所構成的層的電絕緣性。特別是相對於含羧基樹脂(A)的含量,胺化合物以8質量%以下為佳,以5質量%以下較佳。The content of the amine compound in the photosensitive resin composition is preferably as small as possible. In this case, it is not easy to impair the electrical insulation of the layer composed of the cured product of the photosensitive resin composition. In particular, the content of the amine compound is preferably 8% by mass or less with respect to the content of the carboxyl group-containing resin (A), and more preferably 5% by mass or less.
能夠藉由下述方式來調製感光性樹脂組成物:調配像上述這樣的感光性樹脂組成物的原料,並藉由例如使用三輥研磨機、球磨機、砂磨機等的習知揉合方法來揉合。當在感光性樹脂組成物的原料中含有液狀的成分、黏度低的成分等時,可以下述方式調製感光性樹脂組成物:首先將原料中的除了液狀的成分、黏度低的成分以外的部分揉合後,在所獲得的混合物中加入液狀的成分、黏度低的成分並混合。此外,可不藉由揉合,而藉由原料的攪拌混合或攪拌溶解等來調製感光性樹脂組成物。The photosensitive resin composition can be prepared by blending the raw materials of the photosensitive resin composition as described above and by a conventional kneading method using, for example, a three-roll mill, a ball mill, a sand mill, or the like. Knead. When the raw material of the photosensitive resin composition contains a liquid component, a component with a low viscosity, etc., the photosensitive resin composition can be prepared in the following manner: First, the liquid material and the component with a low viscosity are excluded from the raw material. After kneading a portion, a liquid component and a low viscosity component are added to the obtained mixture and mixed. In addition, the photosensitive resin composition can be prepared without kneading, by stirring, mixing, dissolving, or the like of the raw materials.
考慮到保存安定性等時,可將感光性樹脂組成物的成分的一部分混合而調製第一劑後,將成分的餘份混合而調製第二劑。換言之,感光性樹脂組成物可具備第一劑及第二劑。此時,可例如:將感光性樹脂組成物的成分之中的一部分預先混合並使其分散而調製第一劑後,將感光性樹脂組成物的成分的餘份混合並使其分散而調製第二劑。此時,能夠適時將需要量的第一劑與第二劑混合而調製混合液,並使此混合液硬化而獲得硬化物。In consideration of storage stability and the like, a part of the components of the photosensitive resin composition may be mixed to prepare a first agent, and then the remainder of the components may be mixed to prepare a second agent. In other words, the photosensitive resin composition may include a first agent and a second agent. In this case, for example, a part of the components of the photosensitive resin composition may be mixed in advance and dispersed to prepare a first agent, and the remainder of the components of the photosensitive resin composition may be mixed and dispersed to prepare a first agent. Two doses. At this time, a required amount of the first agent and the second agent can be mixed at an appropriate time to prepare a mixed liquid, and the mixed liquid can be hardened to obtain a cured product.
本實施形態的感光性樹脂組成物適合作為印刷線路板用的電絕緣性材料。特別是,感光性樹脂組成物適合形成阻焊劑層、鍍抗蝕層、抗蝕劑層、層間絕緣層等電絕緣性的層。The photosensitive resin composition of this embodiment is suitable as an electrically insulating material for printed wiring boards. In particular, the photosensitive resin composition is suitable for forming electrically insulating layers such as a solder resist layer, a resist plating layer, a resist layer, and an interlayer insulating layer.
以下,參照第1A圖~第1E圖來說明製造印刷線路板的方法的一例,該印刷線路板具備由本實施形態的感光性樹脂組成物所形成的層間絕緣層。本方法中是以光微影法來於層間絕緣層形成貫穿孔。Hereinafter, an example of a method for manufacturing a printed wiring board including an interlayer insulating layer formed of the photosensitive resin composition of the present embodiment will be described with reference to FIGS. 1A to 1E. In this method, a photolithography method is used to form a through hole in the interlayer insulating layer.
首先,像第1A圖表示的這樣準備芯材(core material)1。芯材1具備例如:至少一個絕緣層2、及至少一個導體線路3。以下,將設置於芯材1的一面上的導體線路3稱為第一導體線路3。像第1B圖表示的這樣,在芯材1的設置有第一導體線路3的面上,由感光性樹脂組成物來形成被膜4。作為被膜4的形成方法,可舉例如:塗佈法與乾膜法。First, a core material 1 is prepared as shown in FIG. 1A. The core material 1 includes, for example, at least one insulating layer 2 and at least one conductor line 3. Hereinafter, the conductor line 3 provided on one surface of the core material 1 is referred to as a first conductor line 3. As shown in FIG. 1B, the film 4 is formed of a photosensitive resin composition on the surface of the core material 1 on which the first conductor line 3 is provided. Examples of the method for forming the film 4 include a coating method and a dry film method.
塗佈法,例如是將感光性樹脂組成物塗佈於芯材1上而形成濕潤塗膜。感光性樹脂組成物的塗佈方法為習知方法,例如從由下述所組成之群組中選出:浸漬法、噴霧法、旋轉塗佈法、輥塗佈法、簾幕塗佈法、及網版印刷法。然後,為了使感光性樹脂組成物中的有機溶劑揮發,能夠在例如60~120℃的範圍內的溫度使濕潤塗膜乾燥,而獲得被膜4。The coating method is, for example, applying a photosensitive resin composition to the core material 1 to form a wet coating film. The coating method of the photosensitive resin composition is a conventional method, for example, it is selected from the group consisting of a dipping method, a spray method, a spin coating method, a roll coating method, a curtain coating method, and Screen printing. Then, in order to volatilize the organic solvent in the photosensitive resin composition, the wet coating film can be dried at a temperature in a range of, for example, 60 to 120 ° C. to obtain the coating film 4.
乾膜法,是首先將感光性樹脂組成物塗佈於聚酯製等適當的支撐體上後乾燥,而於支撐體上形成包含感光性樹脂組成物的乾膜。藉此,獲得一種附有支撐體之乾膜,其具備:乾膜;及,支撐體,其是用以支撐乾膜。將此附有支撐體之乾膜中的乾膜重疊在芯材1後,對乾膜與芯材1施加壓力,然後從乾膜將支撐體剝離,而將乾膜從支撐體上轉印至芯材1上。藉此,於芯材1上設置由乾膜所構成的被膜4。In the dry film method, a photosensitive resin composition is first coated on an appropriate support such as polyester and then dried, and a dry film containing the photosensitive resin composition is formed on the support. Thereby, a dry film with a support is provided, which includes: a dry film; and a support, which is used to support the dry film. After the dry film in the dry film with the support is superposed on the core material 1, pressure is applied to the dry film and the core material 1, and then the support is peeled from the dry film, and the dry film is transferred from the support to On the core material 1. As a result, a coating film 4 made of a dry film is provided on the core material 1.
對被膜4進行曝光,而像第1C圖表示的這樣部分地進行光硬化。為了進行曝光,而例如將負型遮罩緊貼在被膜4後,隔著負型遮罩來對被膜4照射紫外線。負型遮罩具備:使紫外線穿透的曝光部、及遮蔽紫外線的非曝光部,非曝光部是設置於與貫穿孔10的位置相符的位置。負型遮罩為例如:遮罩薄膜、乾板等光具(phototool)。紫外線的光源是例如從由下述所組成之群組中選出:化學燈、低壓水銀燈、中壓水銀燈、高壓水銀燈、超高壓水銀燈、氙氣燈、金屬鹵化物燈、發光二極體(LED)、g射線(436 nm)、h射線(405 nm)、i射線(365 nm)、以及g射線、h射線及i射線之中的兩種以上的組合。The film 4 is exposed, and partially light-cured as shown in FIG. 1C. To perform exposure, for example, a negative mask is closely adhered to the film 4, and then the film 4 is irradiated with ultraviolet rays through the negative mask. The negative mask includes an exposure portion that transmits ultraviolet rays, and a non-exposure portion that blocks ultraviolet rays. The non-exposure portion is provided at a position corresponding to the position of the through hole 10. The negative mask is, for example, a phototool such as a mask film or a dry plate. The ultraviolet light source is selected from the group consisting of, for example, a chemical lamp, a low-pressure mercury lamp, a medium-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a xenon lamp, a metal halide lamp, a light-emitting diode (LED), A combination of two or more of g-rays (436 nm), h-rays (405 nm), i-rays (365 nm), and g-rays, h-rays, and i-rays.
再者,作為曝光方法,可採用使用負型遮罩的方法以外的方法。例如:以直接描繪法來對被膜進行曝光,該直接描繪法是將從光源發出的紫外線僅照射在被膜4上的要曝光的部分。應用於直接描繪法的光源是例如從由下述所組成之群組中選出:化學燈、低壓水銀燈、中壓水銀燈、高壓水銀燈、超高壓水銀燈、氙氣燈、金屬鹵化物燈、發光二極體(LED)、g射線(436 nm)、h射線(405 nm)、i射線(365 nm)、以及g射線、h射線及i射線之中的兩種以上的組合。In addition, as the exposure method, a method other than a method using a negative mask can be used. For example, the film is exposed by a direct drawing method in which only the portion to be exposed is irradiated with ultraviolet rays emitted from a light source on the film 4. The light source used in the direct drawing method is, for example, selected from the group consisting of a chemical lamp, a low-pressure mercury lamp, a medium-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a xenon lamp, a metal halide lamp, and a light-emitting diode. (LED), g-ray (436 nm), h-ray (405 nm), i-ray (365 nm), and a combination of two or more of g-ray, h-ray, and i-ray.
此外,乾膜法中,可將附有支撐體之乾膜中的乾膜重疊在芯材1後,在不將支撐體剝離的情形下透過支撐體來對由乾膜所構成的被膜4照射紫外線,而對被膜4進行曝光,然後在進行顯影處理前將支撐體從被膜4剝離。In addition, in the dry film method, after the dry film in the dry film with a support is superimposed on the core material 1, the film 4 composed of the dry film can be irradiated through the support without peeling the support. The film 4 is exposed to ultraviolet rays, and then the support is peeled from the film 4 before the development process is performed.
然後,對被膜4實施顯影處理,而將第1C圖表示的被膜4的未曝光的部分5去除,藉此,像第1D圖表示的這樣於要形成貫穿孔10的位置設置孔6。顯影處理能夠因應感光性樹脂組成物的組成來使用適當的顯影液。顯影液為例如:含有鹼金屬鹽及鹼金屬氫氧化物之中的至少一種的鹼性水溶液、或有機胺。鹼性水溶液更具體而言含有例如從由下述所組成之群組中選出的至少一種成分:碳酸鈉、碳酸鉀、碳酸銨、碳酸氫鈉、碳酸氫鉀、碳酸氫銨、氫氧化鈉、氫氧化鉀、氫氧化銨、氫氧化四甲銨、及氫氧化鋰。鹼性水溶液中的溶劑可僅為水、或為水與低級醇等親水性有機溶劑的混合物。有機胺含有例如從由下述所組成之群組中選出的至少一種成分:單乙醇胺、二乙醇胺、三乙醇胺、單異丙醇胺、二異丙醇胺、及三異丙醇胺。Then, the film 4 is subjected to a development process, and the unexposed portion 5 of the film 4 shown in FIG. 1C is removed, whereby a hole 6 is provided at a position where the through hole 10 is to be formed as shown in FIG. The developing process can use an appropriate developing solution in accordance with the composition of the photosensitive resin composition. The developing solution is, for example, an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, or an organic amine. The alkaline aqueous solution more specifically contains, for example, at least one component selected from the group consisting of sodium carbonate, potassium carbonate, ammonium carbonate, sodium bicarbonate, potassium bicarbonate, ammonium bicarbonate, sodium hydroxide, Potassium hydroxide, ammonium hydroxide, tetramethylammonium hydroxide, and lithium hydroxide. The solvent in the alkaline aqueous solution may be only water or a mixture of water and a hydrophilic organic solvent such as a lower alcohol. The organic amine contains, for example, at least one component selected from the group consisting of monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, and triisopropanolamine.
顯影液較佳為含有鹼金屬鹽及鹼金屬氫氧化物之中的至少一種的鹼性水溶液,特佳為碳酸鈉水溶液。此時,能夠達成提高操作環境及減輕廢棄物處理的負擔。The developing solution is preferably an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, and particularly preferably an aqueous sodium carbonate solution. In this case, it is possible to improve the operating environment and reduce the burden on waste disposal.
然後,將被膜4加熱而進行熱硬化。加熱的條件是例如:加熱溫度在120~200℃的範圍內,加熱時間在30~150分鐘的範圍內。若以上述方式進行而對被膜4進行熱硬化,則能夠提高層間絕緣層7的強度、硬度、耐化學藥品性等性能。Then, the coating film 4 is heated and thermally cured. The heating conditions are, for example, a heating temperature in a range of 120 to 200 ° C and a heating time in a range of 30 to 150 minutes. When the film 4 is heat-cured in the manner described above, the strength, hardness, and chemical resistance of the interlayer insulating layer 7 can be improved.
可依需要來在加熱前及加熱後之中的任一方或雙方對被膜4進一步照射紫外線。此時,能夠使被膜4的光硬化更進一步進行。If necessary, the film 4 may be further irradiated with ultraviolet rays before or after heating. In this case, the photocuring of the coating film 4 can be further advanced.
層間絕緣膜7的厚度無特別限定,可在10~50 μm的範圍內。The thickness of the interlayer insulating film 7 is not particularly limited, and may be within a range of 10 to 50 μm.
如上所述,於芯材1上設置由感光性樹脂組成物的硬化物所構成的層間絕緣層7。能夠以添加法(additive process)等習知方法,來於此層間絕緣層7上設置第二導體線路8及孔鍍層9。藉此,像第1E圖表示的這樣獲得印刷線路板11,其具備:第一導體線路3;第二導體線路8;層間絕緣層7,其介於第一導體線路3與第二導體線路8之間;以及,貫穿孔10,其是用以將第一導體線路3與第二導體線路8電性連接。再者,第1E圖中,孔鍍層9具有將孔6的內面覆蓋的筒狀的形狀,但亦可將孔鍍層9填充在孔6的內側整體中。As described above, an interlayer insulating layer 7 made of a cured product of a photosensitive resin composition is provided on the core material 1. A second conductive line 8 and a hole plating layer 9 can be provided on the interlayer insulating layer 7 by a conventional method such as an additive process. Thereby, as shown in FIG. 1E, a printed wiring board 11 is obtained, which includes: a first conductor line 3; a second conductor line 8; and an interlayer insulating layer 7 interposed between the first conductor line 3 and the second conductor line 8. Between; and, a through-hole 10 for electrically connecting the first conductor line 3 and the second conductor line 8. In FIG. 1E, the hole plating layer 9 has a cylindrical shape covering the inner surface of the hole 6, but the hole plating layer 9 may be filled in the entire inner side of the hole 6.
說明製造印刷線路板的方法的一例,該印刷線路板具備由本實施形態的感光性樹脂組成物所形成的阻焊劑層。An example of a method for manufacturing a printed wiring board including a solder resist layer formed of the photosensitive resin composition of this embodiment will be described.
首先,準備芯材。芯材具備例如:至少一個絕緣層、及至少一個導體線路。於芯材的設置有第一導體線路的面上從感光性樹脂組成物形成被膜。作為被膜的形成方法,可舉例如:塗佈法、及乾膜法。塗佈法及乾膜法能夠採用與形成上述層間絕緣層的情形相同的方法。對被膜進行曝光,而部分地進行光硬化。曝光方法亦能夠採用與形成上述層間絕緣層的情形相同的方法。然後,對被膜實施顯影處理,而將被膜的未曝光的部分去除,藉此,被膜的經曝光的部分殘留在芯材上。然後,將芯材上的被膜加熱而進行熱硬化。顯影方法及加熱方法亦能夠採用與形成上述層間絕緣層的情形相同的方法。可依需要來在加熱前及加熱後之中的任一方或雙方對被膜進一步照射紫外線。此時,能夠使被膜的光硬化更進一步進行。First, prepare a core material. The core material includes, for example, at least one insulating layer and at least one conductor line. A film is formed on the surface of the core material on which the first conductor line is provided from the photosensitive resin composition. Examples of the method for forming the film include a coating method and a dry film method. As the coating method and the dry film method, the same method as in the case of forming the above-mentioned interlayer insulating layer can be adopted. The film is exposed and partially light-cured. The exposure method can be the same as that in the case of forming the interlayer insulating layer. Then, the film is subjected to a development treatment, and the unexposed portion of the film is removed, whereby the exposed portion of the film remains on the core material. Then, the film on the core material is heated to perform thermosetting. The development method and the heating method can be the same as those in the case where the interlayer insulating layer is formed. As required, the film may be further irradiated with ultraviolet rays before or after heating. In this case, the photocuring of the film can be further advanced.
阻焊劑層的厚度無特別限定,可在10~50 nm的範圍內。The thickness of the solder resist layer is not particularly limited, and may be in a range of 10 to 50 nm.
如上所述,於芯材上設置由感光性樹脂組成物的硬化物所構成的阻焊劑層。藉此,獲得一種印刷線路板,其具備:芯材,其具備絕緣層及其上的導體線路;以及,阻焊劑層,其將芯材中的設置有導體線路的面的一部分覆蓋。 [實施例]As described above, a solder resist layer made of a cured product of a photosensitive resin composition is provided on the core material. Thereby, there is obtained a printed wiring board including a core material including an insulating layer and a conductor line thereon, and a solder resist layer covering a part of a surface of the core material on which the conductor line is provided. [Example]
(1)具有芳香環之含羧基樹脂的合成: [合成例A-1] 合成例A-1的具有芳香環之含羧基樹脂是以下述方式調製。在安裝有回流冷卻器、溫度計、空氣噴吹管及攪拌機之四頸燒瓶內,加入由式(2)表示且式(2)中的R1 ~R7 皆為氫之雙酚茀型環氧樹脂(環氧當量250 g/eq)250質量份、丙二醇單甲基醚乙酸酯60質量份、二乙二醇單乙基醚乙酸酯140質量份、甲基氫醌0.2質量份、丙烯酸72質量份、及三苯膦1.5質量份,而調製混合物。將此混合物在燒瓶內一面在空氣起泡下攪拌,一面在115℃的溫度加熱12小時。藉此,調製中間體的溶液。(1) Synthesis of carboxyl group-containing resin having aromatic ring: [Synthesis Example A-1] The carboxyl group-containing resin having an aromatic ring in Synthesis Example A-1 was prepared in the following manner. In a four-necked flask equipped with a reflux cooler, a thermometer, an air blowing tube, and a stirrer, a bisphenol fluorene epoxy resin represented by formula (2) and R 1 to R 7 in formula (2) are all hydrogen is added. (Epoxy equivalent 250 g / eq) 250 parts by mass, propylene glycol monomethyl ether acetate 60 parts by mass, diethylene glycol monoethyl ether acetate 140 parts by mass, methyl hydroquinone 0.2 parts by mass, acrylic acid 72 Part by mass and 1.5 parts by mass of triphenylphosphine to prepare a mixture. This mixture was stirred in a flask under air bubbling while heating at a temperature of 115 ° C. for 12 hours. Thereby, a solution of the intermediate was prepared.
然後,在燒瓶內的中間體的溶液中,投入3,3’,4,4’-聯苯四甲酸二酐58.8質量份、四氫鄰苯二甲酸酐60.8質量份、及丙二醇單甲基醚乙酸酯38.7質量份,並一面在空氣起泡下攪拌,一面在115℃加熱6小時,並進一步在80℃加熱1小時。藉此,獲得含羧基樹脂A-1的65質量%溶液。含羧基樹脂A-1的重量平均分子量為3096,酸值為105 mgKOH/g。Then, into the solution of the intermediate in the flask, 58.8 parts by mass of 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 60.8 parts by mass of tetrahydrophthalic anhydride, and propylene glycol monomethyl ether were charged. 38.7 parts by mass of acetate was heated at 115 ° C. for 6 hours while stirring under air bubbling, and further heated at 80 ° C. for 1 hour. Thereby, a 65% by mass solution of the carboxyl group-containing resin A-1 was obtained. The weight average molecular weight of the carboxyl group-containing resin A-1 was 3,096, and the acid value was 105 mgKOH / g.
[合成例A-2] 合成例A-2的具有芳香環之含羧基樹脂是以下述方式調製。在安裝有回流冷卻器、溫度計、空氣噴吹管及攪拌機之四頸燒瓶內,加入聯苯酚醛清漆型環氧樹脂(日本化藥股份有限公司製,型號NC-3000-H,環氧當量288 g/eq)288質量份、二乙二醇單乙基醚乙酸酯155質量份、甲基氫醌0.2質量份、丙烯酸72質量份、及三苯膦3質量份,而調製混合物。將此混合物在燒瓶內一面在空氣起泡下攪拌,一面在115℃的溫度加熱12小時。藉此,調製中間體的溶液。[Synthesis Example A-2] The carboxyl group-containing resin having an aromatic ring in Synthesis Example A-2 was prepared in the following manner. In a four-necked flask equipped with a reflux cooler, a thermometer, an air blowing tube, and a stirrer, add biphenol novolac epoxy resin (manufactured by Nippon Kayaku Co., Ltd., model NC-3000-H, epoxy equivalent 288 g / eq) 288 parts by mass, 155 parts by mass of diethylene glycol monoethyl ether acetate, 0.2 parts by mass of methylhydroquinone, 72 parts by mass of acrylic acid, and 3 parts by mass of triphenylphosphine to prepare a mixture. This mixture was stirred in a flask under air bubbling while heating at a temperature of 115 ° C. for 12 hours. Thereby, a solution of the intermediate was prepared.
然後,在燒瓶內的中間體的溶液中,投入四氫鄰苯二甲酸酐91.2質量份、及二乙二醇單乙基醚乙酸酯90質量份,並一面在空氣起泡下攪拌,一面在90℃加熱4小時。藉此,獲得含羧基樹脂A-2的65質量%溶液。含羧基樹脂A-2的重量平均分子量為8120,酸值為76 mgKOH/g。Then, into the solution of the intermediate in the flask, 91.2 parts by mass of tetrahydrophthalic anhydride and 90 parts by mass of diethylene glycol monoethyl ether acetate were added, while stirring under the bubbling of air, Heated at 90 ° C for 4 hours. Thereby, a 65% by mass solution of the carboxyl group-containing resin A-2 was obtained. The weight average molecular weight of the carboxyl-containing resin A-2 was 8,120, and the acid value was 76 mgKOH / g.
(2)不具有芳香環之含羧基樹脂的合成: [合成例B-1] 合成例B-1的不具有芳香環之含羧基樹脂是以下述方式調製。在安裝有回流冷卻器、溫度計、空氣噴吹管及攪拌機之四頸燒瓶內,加入甲基丙烯酸77質量份、甲基丙烯酸甲酯123質量份、二丙二醇單甲基醚370質量份、及偶氮雙異丁腈5質量份,而調製混合物。將此混合物在燒瓶內在氮氣氣流中在80℃的溫度加熱5小時,而進行聚合反應。藉此,獲得濃度35%的共聚物溶液。(2) Synthesis of carboxyl group-containing resin without aromatic ring: [Synthesis Example B-1] The carboxyl group-containing resin without aromatic ring of Synthesis Example B-1 was prepared in the following manner. In a four-necked flask equipped with a reflux cooler, a thermometer, an air blowing tube, and a stirrer, 77 parts by mass of methacrylic acid, 123 parts by mass of methyl methacrylate, 370 parts by mass of dipropylene glycol monomethyl ether, and azo were added. 5 parts by mass of bisisobutyronitrile was used to prepare a mixture. This mixture was heated in a flask under a stream of nitrogen at a temperature of 80 ° C. for 5 hours to perform a polymerization reaction. Thereby, a copolymer solution having a concentration of 35% was obtained.
然後,在燒瓶內的共聚物溶液中,投入氫醌0.1質量份、丙烯酸3,4-環氧環己基甲酯50質量份、二丙二醇單甲基醚47質量份、及二甲基苯甲基胺0.8質量份,並在110℃加熱6小時,而進行加成反應。藉此,獲得含羧基樹脂B-1的38質量%溶液。含羧基樹脂B-1的重量平均分子量為61324,酸值為132 mgKOH/g。Then, into the copolymer solution in the flask, 0.1 parts by mass of hydroquinone, 50 parts by mass of 3,4-epoxycyclohexyl methyl acrylate, 47 parts by mass of dipropylene glycol monomethyl ether, and dimethylbenzyl were charged. 0.8 part by mass of amine was heated at 110 ° C. for 6 hours to perform an addition reaction. Thereby, a 38% by mass solution of the carboxyl group-containing resin B-1 was obtained. The weight average molecular weight of the carboxyl-containing resin B-1 was 61,324, and the acid value was 132 mgKOH / g.
(3)具有芳香環之不含羧基樹脂的合成: [合成例B-2] 合成例B-2的具有芳香環之含羧基樹脂是以下述方式調製。在安裝有回流冷卻器、溫度計、空氣噴吹管及攪拌機之四頸燒瓶內,加入由式(2)表示且式(2)中的R1 ~R7 皆為氫之雙酚茀型環氧樹脂(環氧當量250 g/eq)250質量份、丙二醇單甲基醚乙酸酯173質量份、甲基氫醌0.2質量份、丙烯酸72質量份、及三苯膦1.5質量份,而調製混合物。將此混合物在燒瓶內一面在空氣起泡下攪拌,一面在115℃的溫度加熱12小時。藉此,獲得不含羧基樹脂B-2的65質量%溶液。(3) Synthesis of carboxyl group-free resin having aromatic ring: [Synthesis Example B-2] The carboxyl group-containing resin having an aromatic ring of Synthesis Example B-2 was prepared in the following manner. In a four-necked flask equipped with a reflux cooler, a thermometer, an air blowing tube, and a stirrer, a bisphenol fluorene epoxy resin represented by formula (2) and R 1 to R 7 in formula (2) are all hydrogen is added. (Epoxy equivalent 250 g / eq) 250 parts by mass, 173 parts by mass of propylene glycol monomethyl ether acetate, 0.2 parts by mass of methylhydroquinone, 72 parts by mass of acrylic acid, and 1.5 parts by mass of triphenylphosphine were prepared. This mixture was stirred in a flask under air bubbling while heating at a temperature of 115 ° C. for 12 hours. Thus, a 65% by mass solution of the carboxyl resin B-2 was not obtained.
(4)感光性樹脂組成物的調製: 實施例1~18及比較例1~5的感光性樹脂組成物是以下述方式調製。在燒瓶內調配後述表中表示的成分,並在35℃的溫度攪拌混合2小時,而獲得感光性樹脂組成物(參照表1~表3)。感光性樹脂組成物是在以300篩的過濾器來過濾後,進一步以孔徑10 μm的過濾器來過濾。(4) Preparation of photosensitive resin composition: (1) The photosensitive resin compositions of Examples 1 to 18 and Comparative Examples 1 to 5 were prepared as follows. The components shown in the following table were prepared in a flask, and stirred and mixed at a temperature of 35 ° C. for 2 hours to obtain a photosensitive resin composition (see Tables 1 to 3). The photosensitive resin composition was filtered with a 300-sieve filter, and then filtered with a filter having a pore size of 10 μm.
再者,表中的調配量是表示標記成分的固體成分的質量份。此外,雖未記載於表中,但在感光性樹脂組成物中調配有甲基乙基酮來作為稀釋劑。In addition, the compounding quantity in a table | surface is a mass part which shows the solid content of a marking component. Although not shown in the table, methyl ethyl ketone was blended as a diluent in the photosensitive resin composition.
表中表示的成分的詳細內容是如下所述。 ・有機填料A的分散液:平均初級粒徑0.07 μm的具有羧基之交聯橡膠(NBR),JSR股份有限公司製,型號XER-91-MEK,交聯橡膠的含有比例15重量%的甲基乙基酮分散液,酸值10.0 mgKOH/g。 ・有機填料B的分散液:平均初級粒徑0.07 μm的具有羧基及羥基之交聯橡膠(SBR),JSR股份有限公司製,型號XSK-500,交聯橡膠的含有比例15重量%的甲基乙基酮分散液。 ・耦合劑A:四乙氧基矽烷。 ・耦合劑B:甲基三甲氧基矽烷。 ・耦合劑C:3-縮水甘油氧基丙基三甲氧基矽烷。 ・耦合劑D:N-(2-胺基乙基)-3-胺基丙基甲基二甲氧基矽烷。 ・耦合劑E:乙烯基三甲氧基矽烷。 ・氧化矽填料A:日產化學工業股份有限公司製,型號PMA-ST,丙二醇單甲基醚乙酸酯分散氧化矽溶膠,固體成分濃度30質量%,平均初級粒徑10~15 nm。 ・氧化矽填料B:日產化學工業股份有限公司製,型號MEK-EC-2130Y,甲基乙基酮分散氧化矽溶膠,經提高與環氧樹脂之間的相溶性的等級,固體成分濃度30質量%,平均初級粒徑10~15 nm。 ・氧化矽填料C:日產化學工業股份有限公司製,型號MEK-AC-2140Z,甲基乙基酮分散氧化矽溶膠,經提高與丙烯酸系樹脂之間的相溶性的等級,固體成分濃度40質量%,平均初級粒徑10~15 nm。 ・氧化矽填料D:日產化學工業股份有限公司製,型號MEK-ST-L,甲基乙基酮分散氧化矽溶膠,固體成分濃度30質量%,平均初級粒徑40~50 nm。 ・氧化矽填料E:日產化學工業股份有限公司製,型號MEK-ST-ZL,甲基乙基酮分散氧化矽溶膠,固體成分濃度30質量%,平均初級粒徑70~100 nm。 ・氧化矽填料F:日產化學工業股份有限公司製,型號MEK-ST-UP,甲基乙基酮分散鏈狀氧化矽溶膠,固體成分濃度20質量%,平均初級粒徑40~100 nm。 ・氧化矽填料G:龍森股份有限公司製,型號IMSIL A8,結晶性氧化矽,平均初級粒徑2 μm。 ・不飽和化合物A:三環癸烷二甲醇二丙烯酸酯。 ・不飽和化合物B:三羥甲基丙烷三丙烯酸酯。 ・不飽和化合物C:二季戊四醇五丙烯酸酯及二季戊四醇六丙烯酸酯的混合物,日本化藥股份有限公司製,型號KAYARAD DPHA。 ・光聚合起始劑A:2,4,6-三甲基苯甲醯基二苯基氧化膦,BASF公司製,型號Irgacure TPO。 ・光聚合起始劑B:1-羥基環己基苯基酮,BASF公司製,型號Irgacure 184。 ・光聚合起始劑C:4,4’-雙(二乙胺基)二苯甲酮。 ・環氧化合物:雙酚型結晶性環氧樹脂,新日鐵住金化學股份有限公司製,型號YSLV-80XY,熔點75~85℃,環氧當量192 g/eq。 ・抗氧化劑:受阻酚系抗氧化劑,BASF公司製,型號IRGANOX 1010。 ・表面調整劑:DIC股份有限公司製,型號MEGAFACE F-477。The details of the components shown in the table are as follows.・ Dispersion liquid of organic filler A: Crosslinked rubber (NBR) with a carboxyl group having an average primary particle diameter of 0.07 μm, manufactured by JSR Corporation, model XER-91-MEK, containing 15% by weight of methyl groups in the crosslinked rubber Ethyl ketone dispersion, acid value 10.0 mgKOH / g.・ Dispersion of organic filler B: Crosslinked rubber (SBR) with carboxyl and hydroxyl groups with an average primary particle diameter of 0.07 μm, manufactured by JSR Co., Ltd., model XSK-500, containing 15% by weight of methyl groups in crosslinked rubber Ethyl ketone dispersion.・ Coupling agent A: Tetraethoxysilane.・ Coupling agent B: methyltrimethoxysilane.・ Coupling agent C: 3-glycidyloxypropyltrimethoxysilane. -Coupling agent D: N- (2-aminoethyl) -3-aminopropylmethyldimethoxysilane.・ Coupling agent E: vinyltrimethoxysilane.・ Silicon oxide filler A: made by Nissan Chemical Industry Co., Ltd., model PMA-ST, propylene glycol monomethyl ether acetate dispersed silica sol, solid content concentration of 30% by mass, and average primary particle diameter of 10 to 15 nm.・ Silicon oxide filler B: made by Nissan Chemical Industry Co., Ltd., model MEK-EC-2130Y, methyl ethyl ketone dispersed silica sol, grade with improved compatibility with epoxy resin, solid content concentration 30 mass %, Average primary particle diameter is 10-15 nm.・ Silicon oxide filler C: Made by Nissan Chemical Industry Co., Ltd., model MEK-AC-2140Z, methyl ethyl ketone dispersed silica sol, grade with improved compatibility with acrylic resin, solid content concentration of 40 mass %, Average primary particle diameter is 10-15 nm.・ Silicon oxide filler D: manufactured by Nissan Chemical Industries, Ltd., model MEK-ST-L, methyl ethyl ketone dispersed silica sol, solid content concentration of 30% by mass, and average primary particle diameter of 40 to 50 nm.・ Silicon oxide filler E: manufactured by Nissan Chemical Industry Co., Ltd., model MEK-ST-ZL, methyl ethyl ketone dispersed silica sol, solid content concentration of 30% by mass, and average primary particle diameter of 70 to 100 nm.・ Silicon oxide filler F: made by Nissan Chemical Industry Co., Ltd., model MEK-ST-UP, methyl ethyl ketone dispersed chain-shaped silica sol, with a solid content concentration of 20% by mass, and an average primary particle diameter of 40 to 100 nm.・ Silicon oxide filler G: manufactured by Longsen Co., Ltd., model IMSIL A8, crystalline silicon oxide, with an average primary particle diameter of 2 μm.・ Unsaturated compound A: tricyclodecane dimethanol diacrylate.・ Unsaturated compound B: trimethylolpropane triacrylate.・ Unsaturated compound C: A mixture of dipentaerythritol pentaacrylate and dipentaerythritol hexaacrylate, manufactured by Nippon Kayaku Co., Ltd., model KAYARAD DPHA.・ Photopolymerization initiator A: 2,4,6-trimethylbenzylidene diphenylphosphine oxide, manufactured by BASF Corporation, model Irgacure TPO.・ Photopolymerization initiator B: 1-hydroxycyclohexylphenyl ketone, manufactured by BASF Corporation, model Irgacure 184. -Photopolymerization initiator C: 4,4'-bis (diethylamino) benzophenone.・ Epoxy compound: Bisphenol-type crystalline epoxy resin, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., model YSLV-80XY, melting point 75-85 ° C, epoxy equivalent 192 g / eq.・ Antioxidant: Hindered phenolic antioxidant, manufactured by BASF, model IRGANOX 1010.・ Surface modifier: MEGAFACE F-477, manufactured by DIC Corporation.
(5)試驗片的製作 使用各實施例及比較例的感光性樹脂組成物,以下述方式製作試驗片。(5) Preparation of test piece Using the photosensitive resin composition of each Example and Comparative Example, a test piece was produced in the following manner.
藉由使用塗敷器(applicator)來將感光性樹脂組成物塗佈於聚對苯二甲酸乙二酯製的薄膜上後,在95℃加熱25分鐘而使其乾燥,而於薄膜上形成厚度30 μm的乾膜。The photosensitive resin composition was applied to a film made of polyethylene terephthalate by using an applicator, and then dried at 95 ° C for 25 minutes to form a thickness on the film. 30 μm dry film.
準備具備厚度17.5 μm的銅箔之玻璃環氧覆銅積層板(FR-4型)。以消去處理(subtractive process)來於此玻璃環氧覆銅積層板形成線寬/間距寬50 μm/50 μm的梳型電極來作為導體線路,藉此,獲得芯材。藉由以蝕刻劑(MEC股份有限公司製的有機酸系微蝕刻劑,型號CZ-8101)來將此芯材的導體線路的厚度1 μm左右的表層部分溶解去除,而對導體線路進行粗糙化。使用真空積層機來將乾膜加熱積層於此芯材的一面整面。加熱積層的條件為0.5 MPa、80℃、1分鐘。藉此,於芯材上形成由乾膜所構成的膜厚30 μm的被膜。從聚對苯二甲酸乙二酯製的薄膜上,在將負型遮罩與此被膜直接緊貼的狀態下,隔著負型遮罩來在250 mJ/cm2 的條件下對被膜照射紫外線,該負型遮罩具有包含直徑30 μm、40 μm及50 μm的圓形形狀的圖案的非曝光部。再者,在曝光後且顯影前,從乾膜(被膜)將聚對苯二甲酸乙二酯製的薄膜剝離。對曝光後的被膜實施顯影處理。在進行顯影處理時,以0.2 MPa的噴射壓來對被膜噴射30℃的1%Na2 CO3 水溶液90秒。然後,以0.2 MPa的噴射壓來對被膜噴射純水90秒來洗淨。藉此,將被膜中的未曝光的部分去除,而形成孔。然後,在180℃將被膜加熱60分鐘後,在1000 mJ/cm2 的條件下對被膜照射紫外線。藉此,於芯材上形成由感光性樹脂組成物的硬化物(亦稱為乾膜的硬化物)所構成的層。藉此,獲得試驗片。A glass epoxy copper clad laminate (FR-4 type) with a copper foil thickness of 17.5 μm was prepared. A core electrode was obtained by using a subtractive process to form a comb electrode having a line width / space width of 50 μm / 50 μm on the glass epoxy copper clad laminate as a conductor line. The surface of the conductor line of this core material having a thickness of about 1 μm is dissolved and removed with an etchant (organic acid-based micro etchant manufactured by MEC Co., Ltd., model CZ-8101) to roughen the conductor line. . A vacuum laminator is used to heat and laminate the dry film on the entire surface of the core material. The conditions for heating the laminate were 0.5 MPa, 80 ° C, and 1 minute. Thereby, a film having a thickness of 30 μm made of a dry film was formed on the core material. From a film made of polyethylene terephthalate, the film was irradiated with ultraviolet rays under a condition of 250 mJ / cm 2 through a negative mask in a state where the negative mask was directly attached to the film. The negative mask has a non-exposed portion including a circular pattern having a diameter of 30 μm, 40 μm, and 50 μm. The polyethylene terephthalate film was peeled from the dry film (film) after exposure and before development. The exposed film is subjected to a development treatment. During the development process, the coating was sprayed with a 1% Na 2 CO 3 aqueous solution at 30 ° C. for 90 seconds at a spray pressure of 0.2 MPa. Then, the film was sprayed with pure water at a spray pressure of 0.2 MPa for 90 seconds to wash it. Thereby, the unexposed part in the film is removed, and a hole is formed. Then, the film was heated at 180 ° C. for 60 minutes, and then the film was irradiated with ultraviolet rays under the conditions of 1000 mJ / cm 2 . Thereby, a layer composed of a cured product of a photosensitive resin composition (also referred to as a cured product of a dry film) is formed on the core material. Thereby, a test piece was obtained.
(6)評估試驗 (6-1)粒度分布 對各實施例及比較例,使用MicrotracBEL股份有限公司製的MT3300EX11,來測量經以300篩的過濾器來過濾後的感光性樹脂組成物的粒度分布。實施例1~18、比較例3及5中,感光性樹脂組成物的由雷射繞射散射式粒度分布測定裝置所獲得的以D50 來測定的粒徑為1 μm以下,最大粒徑為10 μm以下。比較例1、2、4及6中,感光性樹脂組成物的由雷射繞射散射式粒度分布測定裝置所獲得的以D50 來測定的粒徑大於1 μm,最大粒徑大於10 μm。(6) Evaluation test (6-1) Particle size distribution For each of the examples and comparative examples, the particle size distribution of the photosensitive resin composition filtered through a 300 sieve filter was measured using MT3300EX11 manufactured by MicrotracBEL Co., Ltd. . In Examples 1 to 18 and Comparative Examples 3 and 5, the particle diameter measured by D 50 of the photosensitive resin composition obtained by a laser diffraction scattering particle size distribution measurement device was 1 μm or less, and the maximum particle diameter was 10 μm or less. In Comparative Examples 1, 2, 4 and 6, the particle size measured by D 50 of the photosensitive resin composition obtained by a laser diffraction scattering particle size distribution measurement device was larger than 1 μm, and the maximum particle diameter was larger than 10 μm.
(6-2)透明性 對各實施例及比較例,以肉眼來觀察感光性樹脂組成物,並以下述方式評估其結果。 A:沒有觀察到混濁,而透明性高。 B:雖觀察到些許混濁,但有透明性。 C:雖觀察到混濁,但有些許透明性。 D:觀察到混濁,而無透明性。(6-2) Transparency For each of the examples and comparative examples, the photosensitive resin composition was observed with the naked eye, and the results were evaluated in the following manner. A: No turbidity was observed, and transparency was high. B: Although a little turbidity was observed, it was transparent. C: Although turbidity was observed, it was slightly transparent. D: Cloudiness was observed without transparency.
(6-3)安定性 對各實施例及比較例,在25℃將感光性樹脂組成物保存後,觀察感光性樹脂組成物,並以下述方式評估其結果。 A:在25℃保存4週後,未發生成分分離。 B:雖在25℃保存3週後,未發生成分分離,但在25℃保存4週後,發生成分分離。 C:雖在25℃保存2週後,未發生成分分離,但在25℃保存3週後,發生成分分離。 D:在25℃保存2週後,發生成分分離。(6-3) Stability For each Example and Comparative Example, after the photosensitive resin composition was stored at 25 ° C, the photosensitive resin composition was observed, and the results were evaluated in the following manner. A: After storage at 25 ° C for 4 weeks, no component separation occurred. B: Although component separation did not occur after storage at 25 ° C for 3 weeks, component separation occurred after storage at 25 ° C for 4 weeks. C: Although component separation did not occur after storage at 25 ° C for 2 weeks, component separation occurred after storage at 25 ° C for 3 weeks. D: After storage at 25 ° C for 2 weeks, component separation occurred.
(6-4)顯影性 對各實施例及比較例,在製作試驗片的過程中觀察顯影處理後的被膜的非曝光部,並以下述方式評估其結果。 A:已將被膜完全去除。 B:被膜的一部分殘留在芯材上。 C:無法進行顯影。(6-4) Developability For each of the examples and comparative examples, the non-exposed portion of the film after the development treatment was observed during the production of the test piece, and the results were evaluated in the following manner. A: The film has been completely removed. B: A part of the film remains on the core material. C: Development cannot be performed.
顯影性的評估為C的比較例5未進行下述(6-5)~(6-11)的評估。此外,顯影性的評估為B的實施例17及比較例6能夠在下述(6-6)的除膠渣後的粗糙性的評估試驗中將殘留在芯材上的非曝光部的被膜完全去除。Comparative Example 5 whose evaluation of the developability was C was not evaluated in the following (6-5) to (6-11). In addition, in Example 17 and Comparative Example 6 in which the developability was evaluated as B, the film remaining on the non-exposed portion on the core material could be completely removed in the evaluation test of the roughness after removing the slag (6-6) below. .
對實施例1~18及比較例1~4、6,觀察形成於試驗片中的由硬化物所構成的層的開口部,並以下述方式評估其結果。 A:形成有直徑30 μm的開口部。 B:雖形成有直徑35 μm的開口部,但未形成直徑30 μm的開口部。 C:雖形成有直徑40 μm的開口部,但未形成直徑35 μm的開口部。 D:雖形成有直徑50 μm的開口部,但未形成直徑40 μm的開口部。 E:未形成直徑50 μm的開口部。With respect to Examples 1 to 18 and Comparative Examples 1 to 4 and 6, the openings of the layer made of a cured material formed in the test piece were observed, and the results were evaluated in the following manner. A: An opening having a diameter of 30 μm is formed. B: Although an opening having a diameter of 35 μm was formed, an opening having a diameter of 30 μm was not formed. C: Although an opening portion having a diameter of 40 μm was formed, an opening portion having a diameter of 35 μm was not formed. D: Although an opening portion having a diameter of 50 μm was formed, an opening portion having a diameter of 40 μm was not formed. E: No opening with a diameter of 50 μm was formed.
(6-6)除膠渣後的粗糙性 對實施例1~18及比較例1~4、6,依據習知除膠渣處理方法,以下述方式對試驗片中的由硬化物所構成的層進行除膠渣處理。使用市售膨脹液(ATOTECH Japan股份有限公司製,Swelling Dip Securiganth P)來作為除膠渣用膨脹液,在70℃對由硬化物所構成的層的表面進行膨脹處理15分鐘,而使由硬化物所構成的層的表面膨脹。對膨脹後的由硬化物所構成的層的表面進行熱水洗。然後,使用含有過錳酸鉀的市售氧化劑(ATOTECH Japan股份有限公司製,Concentrate Compact CP)來作為除膠渣液,在70℃對由硬化物所構成的層的表面進行粗糙化處理10分鐘,而對由硬化物所構成的層的表面進行粗糙化。對粗糙化後的由硬化物所構成的層的表面進行熱水洗。然後,使用中和液(ATOTECH Japan股份有限公司製,Reduction Solution Securiganth P),來在40℃將在由硬化物所構成的層的表面的除膠渣液的殘渣去除5分鐘。然後,對由硬化物所構成的層的表面進行水洗。使用雷射顯微鏡來測定經除膠渣處理而粗糙化的由硬化物所構成的層的表面的表面粗糙度Ra,並以下述方式評估除膠渣後的粗糙性。 A:Ra未達0.2 μm。 B:Ra為0.2 μm以上且未達0.25 μm。 C:Ra為0.25 μm以上且未達0.3 μm。 D:Ra為0.3 μm以上。(6-6) Roughness after slag removal For Examples 1 to 18 and Comparative Examples 1 to 4, 6, according to the conventional slag removal treatment method, the test piece made of hardened material was formed in the following manner. The layer is subjected to a desmearing treatment. A commercially available expansion fluid (Swelling Dip Securiganth P, manufactured by ATOTECH Japan Co., Ltd.) was used as the expansion fluid for deslagging, and the surface of the layer composed of the cured product was subjected to an expansion treatment at 70 ° C. for 15 minutes to harden the The surface of the layer formed by the object swells. The surface of the expanded layer made of the cured product was washed with hot water. Then, a commercially available oxidant (Concentrate Compact CP, manufactured by ATOTECH Japan Co., Ltd.) containing potassium permanganate was used as a desmearing slag solution, and the surface of the layer composed of the cured product was roughened at 70 ° C for 10 minutes. While roughening the surface of the layer made of hardened material. The surface of the roughened layer made of the hardened material was washed with hot water. Then, using a neutralizing solution (Reduction Solution Securiganth P, manufactured by ATOTECH Japan Co., Ltd.), the residue of the degumming solution on the surface of the layer made of the cured product was removed at 40 ° C. for 5 minutes. Then, the surface of the layer composed of the cured product was washed with water. A laser microscope was used to measure the surface roughness Ra of the surface of the layer composed of the hardened material that was roughened by the desmearing treatment, and the roughness after the desmearing was evaluated in the following manner. A: Ra is less than 0.2 μm. B: Ra is 0.2 μm or more and less than 0.25 μm. C: Ra is 0.25 μm or more and less than 0.3 μm. D: Ra is 0.3 μm or more.
(6-7)鍍銅密合性 對實施例1~18及比較例1~4、6,使用市售化學藥劑來對上述(6-6)的評估試驗中的除膠渣處理後的試驗片的由硬化物所構成的層進行無電解鍍銅處理,而形成初期線路。在150℃將形成有初期線路的試驗片加熱1小時。然後,使用市售化學藥劑來在2 A/dm2 的電流密度下進行電解鍍銅處理,使厚度33 μm的銅直接析出在初期線路。在180℃將經使銅析出的試驗片加熱30分鐘,而形成鍍銅層。以下述方式評估鍍銅層與試驗片上的由硬化物所構成的層之間的密合性。再者,對在進行無電解鍍銅後及進行電解鍍銅後雙方的加熱時在試驗片無法確認有氣泡的試驗片,依據JIS-C6481來測定鍍銅層與由硬化物所構成的層之間的剝離強度。 A:鍍銅層的剝離強度為0.4 kN/m以上。 B:鍍銅層的剝離強度為0.3 kN/m以上且未達0.4 kN/m。 C:鍍銅層的剝離強度未達0.3 kN/m。 D:在進行無電解鍍銅後的加熱時、或進行電解鍍銅後的加熱時產生氣泡。(6-7) Copper plating adhesion For the examples 1 to 18 and comparative examples 1 to 4, 6, the commercially available chemical agent was used to perform the test after the slag removal treatment in the evaluation test of (6-6) above. The layer of the sheet made of hardened material is subjected to electroless copper plating to form an initial circuit. The test piece in which the initial line was formed was heated at 150 ° C. for 1 hour. Then, a commercially available chemical agent was used to perform electrolytic copper plating treatment at a current density of 2 A / dm 2 , so that copper having a thickness of 33 μm was directly deposited in the initial wiring. The copper-plated layer was formed by heating the test piece which precipitated copper at 180 degreeC for 30 minutes. The adhesion between the copper-plated layer and the layer made of a cured material on the test piece was evaluated in the following manner. In addition, for the test piece whose air bubbles could not be confirmed in the test piece when both the electroless copper plating and the electrolytic copper plating were heated, the copper plating layer and the layer composed of the hardened material were measured in accordance with JIS-C6481. Peel strength. A: The peel strength of the copper-plated layer is 0.4 kN / m or more. B: The peel strength of the copper-plated layer is 0.3 kN / m or more and less than 0.4 kN / m. C: The peel strength of the copper-plated layer did not reach 0.3 kN / m. D: Bubbles are generated during heating after electroless copper plating or heating after electrolytic copper plating.
(6-8)絕緣性 一面對實施例1~18及比較例1~4、6的試驗片的導體線路(梳型電極)施加DC30V的偏電壓,一面將試驗片在130℃、85%R.H.的試驗環境中暴露100小時。經常測定此試驗環境中的由硬化物所構成的層的梳型電極間的電阻值,並以下述方式評估其結果。 A:從試驗開始直到經過100小時為止的期間,電阻值經常維持106 Ω以上。 B:從試驗開始直到經過85小時為止,電阻值經常維持106 Ω以上,但在從試驗開始經過100小時之前電阻值未達106 Ω。 C:從試驗開始直到經過70小時為止,電阻值經常維持106 Ω以上,但在從試驗開始經過85小時之前電阻值未達106 Ω。 D:在從試驗開始經過70小時之前電阻值未達106 Ω。(6-8) Insulating property A bias voltage of 30 V DC was applied to the conductor lines (comb electrodes) of the test pieces of Examples 1 to 18 and Comparative Examples 1 to 4, 6 while the test pieces were at 130 ° C and 85%. Exposure to RH test environment for 100 hours. The resistance value between the comb-type electrodes of a layer made of a hardened material in this test environment is often measured, and the results are evaluated in the following manner. A: During the period from the start of the test until 100 hours have passed, the resistance value is often maintained at 10 6 Ω or more. B: From the start of the test until 85 hours have passed, the resistance value often remains at 10 6 Ω or more, but the resistance value does not reach 10 6 Ω before 100 hours have passed from the start of the test. C: From the start of the test until 70 hours have passed, the resistance value often remains at 10 6 Ω or more, but the resistance value does not reach 10 6 Ω before 85 hours from the start of the test. D: The resistance value did not reach 10 6 Ω before 70 hours passed from the start of the test.
(6-9)熱膨脹係數 熱膨脹係數的評估試驗是使用實施例1~18及比較例1~4、6的感光性樹脂組成物,以下述方式製作試驗片。(6-9) Thermal expansion coefficient The thermal expansion coefficient evaluation test uses the photosensitive resin compositions of Examples 1 to 18 and Comparative Examples 1 to 4, and 6 to produce test pieces in the following manner.
藉由使用塗敷器來將感光性樹脂組成物塗佈於聚對苯二甲酸乙二酯製的薄膜上後,在95℃加熱25分鐘而使其乾燥,而於薄膜上形成厚度30 μm的乾膜。使用真空積層機來將此乾膜加熱積層於Teflon(註冊商標)製的薄膜的一面整面。加熱積層的條件為0.5 MPa、80℃、1分鐘。藉此,於Teflon(註冊商標)製的薄膜上形成由乾膜所構成的膜厚30 μm的被膜。從聚對苯二甲酸乙二酯製的薄膜上,在將遮罩與此被膜直接緊貼的狀態下,隔著遮罩來在250 mJ/cm2 的條件下對被膜照射紫外線,該遮罩具有3 mm×15 mm的長方形形狀的曝光部。再者,在曝光後且顯影前,從乾膜(被膜)將聚對苯二甲酸乙二酯製的薄膜剝離。對曝光後的被膜實施顯影處理。在進行顯影處理時,以0.2 MPa的噴射壓來對被膜噴射30℃的1%Na2 CO3 水溶液90秒。然後,以0.2 MPa的噴射壓來對被膜噴射純水90秒來洗淨。然後,在180℃將被膜加熱60分鐘後,在1000 mJ/cm2 的條件下對被膜照射紫外線。藉此,於Teflon(註冊商標)製的薄膜上形成感光性樹脂組成物的硬化物。從Teflon(註冊商標)製的薄膜將此硬化物剝離,而獲得試驗片。The photosensitive resin composition was coated on a polyethylene terephthalate film using an applicator, and then dried at 95 ° C for 25 minutes to form a 30 μm-thick film on the film. Dry film. This dry film was heated and laminated on the entire surface of a film made of Teflon (registered trademark) using a vacuum laminator. The conditions for heating the laminate were 0.5 MPa, 80 ° C, and 1 minute. Thereby, a film having a thickness of 30 μm made of a dry film was formed on a thin film made of Teflon (registered trademark). The polyethylene terephthalate film was irradiated with ultraviolet rays under a condition of 250 mJ / cm 2 through a mask in a state where the mask was directly in close contact with the film. It has a rectangular-shaped exposure part of 3 mm x 15 mm. The polyethylene terephthalate film was peeled from the dry film (film) after exposure and before development. The exposed film is subjected to a development treatment. During the development process, the coating was sprayed with a 1% Na 2 CO 3 aqueous solution at 30 ° C. for 90 seconds at a spray pressure of 0.2 MPa. Then, the film was sprayed with pure water at a spray pressure of 0.2 MPa for 90 seconds to wash it. Then, the film was heated at 180 ° C. for 60 minutes, and then the film was irradiated with ultraviolet rays under the conditions of 1000 mJ / cm 2 . Thereby, a cured product of a photosensitive resin composition is formed on a thin film made of Teflon (registered trademark). This hardened | cured material was peeled from the film made from Teflon (registered trademark), and the test piece was obtained.
使用熱機械分析(TMA)試驗裝置(Rigaku股份有限公司製,Thermoplus EVOII TMA8310),來在溫度範圍25~250℃、升溫冷卻速度10℃/分鐘、載重5 g的條件下測定第2次循環的30~150℃時的試驗片的熱膨脹係數(CTE)。以下述方式評估其結果。 A:CTE未達60 ppm/℃。 B:CTE為60 ppm/℃以上且未達65 ppm/℃。 C:CTE為65 ppm/℃以上且未達70 ppm/℃。 D:CTE為70 ppm/℃以上。A thermomechanical analysis (TMA) test device (Thermoplus EVOII TMA8310, manufactured by Rigaku Co., Ltd.) was used to measure the second cycle under the conditions of a temperature range of 25 to 250 ° C, a heating and cooling rate of 10 ° C / min, and a load of 5 g. Coefficient of thermal expansion (CTE) of the test piece at 30 to 150 ° C. The results were evaluated in the following manner. A: The CTE does not reach 60 ppm / ° C. B: The CTE is 60 ppm / ° C or more and less than 65 ppm / ° C. C: CTE is 65 ppm / ° C or more and less than 70 ppm / ° C. D: CTE is 70 ppm / ° C or more.
(6-10)玻璃轉移點 玻璃轉移點的評估試驗是使用實施例1~18及比較例1~4、6的感光性樹脂組成物,以與上述(6-9)相同的方法來製作試驗片,而獲得試驗片。(6-10) Glass transition point The evaluation test for glass transition point was made using the photosensitive resin composition of Examples 1 to 18 and Comparative Examples 1 to 4, 6 in the same manner as in (6-9) above. And obtain test pieces.
使用TMA試驗裝置(Rigaku股份有限公司製,Thermoplus EVOII TMA8310),來在溫度範圍25~250℃、升溫冷卻速度10℃/分鐘、載重5 g的條件下進行測定,從第2次循環的測定結果求出試驗片的玻璃轉移點(Tg)。以下述方式評估其結果。 A:Tg為160℃以上。 B:Tg為145℃以上且未達160℃。 C:Tg為130℃以上且未達145℃。 D:Tg未達130℃。A TMA test device (Thermoplus EVOII TMA8310, manufactured by Rigaku Co., Ltd.) was used to perform the measurement under the conditions of a temperature range of 25 to 250 ° C, a heating and cooling rate of 10 ° C / min, and a load of 5 g. From the measurement results of the second cycle The glass transition point (Tg) of the test piece was determined. The results were evaluated in the following manner. A: Tg is 160 ° C or higher. B: Tg is 145 ° C or higher and less than 160 ° C. C: Tg is 130 ° C or higher and less than 145 ° C. D: Tg is less than 130 ° C.
(6-11)介電耗損正切 介電耗損正切的評估試驗是使用實施例1~18及比較例1~4、6的感光性樹脂組成物,以下述方式製作試驗片。(6-11) Dielectric loss tangent The dielectric loss tangent evaluation test uses the photosensitive resin compositions of Examples 1 to 18 and Comparative Examples 1 to 4 and 6 to produce test pieces in the following manner.
藉由使用塗敷器來將感光性樹脂組成物塗佈於聚對苯二甲酸乙二酯製的薄膜上後,在95℃加熱25分鐘而使其乾燥,而於薄膜上形成厚度50 μm的乾膜。使用真空積層機來將此乾膜加熱積層於Teflon(註冊商標)製的薄膜的一面整面。加熱積層的條件為0.5 MPa、80℃、1分鐘。藉此,於Teflon(註冊商標)製的薄膜上形成由乾膜所構成的膜厚50 μm的被膜。從聚對苯二甲酸乙二酯製的薄膜上,在將遮罩與此被膜直接緊貼的狀態下,隔著遮罩來在250 mJ/cm2 的條件下對被膜照射紫外線,該遮罩具有3 mm×85 mm的長方形形狀的曝光部。再者,在曝光後且顯影前從乾膜(被膜)將聚對苯二甲酸乙二酯製的薄膜剝離。對曝光後的被膜實施顯影處理。在進行顯影處理時,以0.2 MPa的噴射壓來對被膜噴射30℃的1%Na2 CO3 水溶液90秒。然後,以0.2 MPa的噴射壓來對被膜噴射純水90秒來洗淨。然後,在180℃將被膜加熱60分鐘後,在1000 mJ/cm2 的條件下對被膜照射紫外線。藉此,於Teflon(註冊商標)製的薄膜上形成感光性樹脂組成物的硬化物。從Teflon(註冊商標)製的薄膜將此硬化物剝離,而獲得試驗片。The photosensitive resin composition was coated on a polyethylene terephthalate film using an applicator, and then dried by heating at 95 ° C for 25 minutes to form a 50 μm-thick film on the film. Dry film. This dry film was heated and laminated on the entire surface of a film made of Teflon (registered trademark) using a vacuum laminator. The conditions for heating the laminate were 0.5 MPa, 80 ° C, and 1 minute. Thereby, a film having a thickness of 50 μm made of a dry film was formed on a thin film made of Teflon (registered trademark). The polyethylene terephthalate film was irradiated with ultraviolet rays under a condition of 250 mJ / cm 2 through a mask in a state where the mask was directly in close contact with the film. It has a rectangular-shaped exposure section of 3 mm x 85 mm. The polyethylene terephthalate film was peeled from the dry film (film) after exposure and before development. The exposed film is subjected to a development treatment. During the development process, the coating was sprayed with a 1% Na 2 CO 3 aqueous solution at 30 ° C. for 90 seconds at a spray pressure of 0.2 MPa. Then, the film was sprayed with pure water at a spray pressure of 0.2 MPa for 90 seconds to wash it. Then, the film was heated at 180 ° C. for 60 minutes, and then the film was irradiated with ultraviolet rays under the conditions of 1000 mJ / cm 2 . Thereby, a cured product of a photosensitive resin composition is formed on a thin film made of Teflon (registered trademark). This hardened | cured material was peeled from the film made from Teflon (registered trademark), and the test piece was obtained.
使用介電常數測定裝置(AET股份有限公司製,ADMS01O),藉由空洞共振器法以頻率1 GHz來測定試驗片的介電耗損正切。以下述方式評估其結果。 A:tanδ未達0.020。 B:tanδ為0.020以上且未達0.025。 C:tanδ為0.025以上且未達0.030。 D:tanδ為0.030以上。The dielectric loss tangent of the test piece was measured using a dielectric constant measuring device (manufactured by AET Co., Ltd., ADMS01O) by a cavity resonator method at a frequency of 1 GHz. The results were evaluated in the following manner. A: tan δ is less than 0.020. B: tan δ is 0.020 or more and less than 0.025. C: tan δ is 0.025 or more and less than 0.030. D: tan δ is 0.030 or more.
[表1]
[表2]
[表3]
由上述實施形態明顯可知,本發明的第1態樣的感光性樹脂組成物具有光硬化性,該感光性樹脂組成物含有:具有芳香環之含羧基樹脂(A);有機填料(B),其平均初級粒徑為1 μm以下且具有羧基;耦合劑(C),其具有從由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中選出的至少一種原子、及兩個以上的官能基,且前述官能基包含從由烷氧基、醯氧基及醇鹽基所組成之群組中選出的至少一種基;及,氧化矽填料(D),其平均初級粒徑在1~150 nm的範圍內。As is apparent from the above embodiment, the photosensitive resin composition according to the first aspect of the present invention has photocurability, and the photosensitive resin composition contains: a carboxyl group-containing resin (A) having an aromatic ring; Its average primary particle diameter is 1 μm or less and it has a carboxyl group; the coupling agent (C) has at least one atom selected from the group consisting of silicon atoms, aluminum atoms, titanium atoms, and zirconium atoms, and two or more Functional group, and the aforementioned functional group includes at least one group selected from the group consisting of alkoxy, fluorenyloxy, and alkoxide groups; and a silicon oxide filler (D) having an average primary particle diameter of 1 In the range of ~ 150 nm.
根據第1態樣,能夠獲得一種感光性樹脂組成物,其能夠形成具有高鍍銅密合性且除膠渣後的粗糙性低的硬化物,並且解析性優異。According to the first aspect, it is possible to obtain a photosensitive resin composition which can form a hardened product having high copper plating adhesion and low roughness after removing slag, and has excellent resolvability.
本發明的第2態樣的感光性樹脂組成物,是在第1態樣中,前述耦合劑(C)具有矽原子。In a second aspect of the photosensitive resin composition of the present invention, in the first aspect, the coupling agent (C) has a silicon atom.
根據第2態樣,能夠效率良好地提高感光性樹脂組成物中的有機填料(B)的分散性,而能夠提高感光性樹脂組成物的透明性及安定性。能夠提高感光性樹脂組成物的硬化物的玻璃轉移點,並且降低熱膨脹係數。According to the second aspect, the dispersibility of the organic filler (B) in the photosensitive resin composition can be efficiently improved, and the transparency and stability of the photosensitive resin composition can be improved. The glass transition point of the hardened | cured material of the photosensitive resin composition can be raised, and a thermal expansion coefficient can be reduced.
本發明的第3態樣的感光性樹脂組成物,是在第1或第2態樣中,前述氧化矽填料(D)包含源自氧化矽溶膠的氧化矽粒子。In a third aspect of the present invention, in the photosensitive resin composition, in the first or second aspect, the silica filler (D) contains silica particles derived from silica sol.
根據第3態樣,能夠提高感光性樹脂組成物的透明性,而能夠提高感光性樹脂組成物的解析性。According to the third aspect, the transparency of the photosensitive resin composition can be improved, and the resolution of the photosensitive resin composition can be improved.
本發明的第4態樣的感光性樹脂組成物,是在第1~第3之中的任一種態樣中,前述氧化矽填料(D)的平均初級粒徑在1~60 nm的範圍內。In a fourth aspect of the present invention, the photosensitive resin composition is any one of the first to third aspects, wherein the average primary particle diameter of the silica filler (D) is in the range of 1 to 60 nm. .
根據第4態樣,能夠提高感光性樹脂組成物的透明性及解析性。According to the fourth aspect, the transparency and resolution of the photosensitive resin composition can be improved.
本發明的第5態樣的感光性樹脂組成物,是在第1~第4之中的任一種態樣中,相對於前述含羧基樹脂(A)的含量100質量份,前述有機填料(B)的含量在1~50質量份的範圍內。In a fifth aspect of the present invention, the photosensitive resin composition is any one of the first to fourth aspects, wherein the organic filler (B The content of) is in a range of 1 to 50 parts by mass.
根據第5態樣,能夠獲得感光性樹脂組成物的硬化物的良好的鍍銅密合性。此外,能夠獲得感光性樹脂組成物的優異的解析性。並且,感光性樹脂組成物的觸變性會提高而安定性會提高。According to the 5th aspect, the hardened | cured material of the photosensitive resin composition can obtain favorable copper-plating adhesiveness. In addition, excellent resolution of the photosensitive resin composition can be obtained. In addition, the thixotropy and stability of the photosensitive resin composition are improved.
本發明的第6態樣的感光性樹脂組成物,是在第1~第5之中的任一種態樣中,相對於前述含羧基樹脂(A)的含量100質量份,前述氧化矽填料(D)的含量在5~200質量份的範圍內。In the sixth aspect of the present invention, the photosensitive resin composition is any one of the first to fifth aspects, and the silica filler (100 parts by mass with respect to the content of the carboxyl group-containing resin (A)) The content of D) is in the range of 5 to 200 parts by mass.
根據第6態樣,能夠更加提高感光性樹脂組成物的透明性,而感光性樹脂組成物能夠具有優異的解析性。此外,能夠提高感光性樹脂組成物的硬化物的玻璃轉移點,並且降低熱膨脹係數及介電耗損正切。並且,能夠更加減少對感光性樹脂組成物的硬化物進行除膠渣處理後的硬化物的表面粗糙度。According to the sixth aspect, the transparency of the photosensitive resin composition can be further improved, and the photosensitive resin composition can have excellent resolution. Moreover, the glass transition point of the hardened | cured material of the photosensitive resin composition can be raised, and a thermal expansion coefficient and a dielectric loss tangent can be reduced. In addition, it is possible to further reduce the surface roughness of the cured product obtained by subjecting the cured product of the photosensitive resin composition to a desmearing treatment.
本發明的第7態樣的感光性樹脂組成物,是在第1~第6之中的任一種態樣中,前述含羧基樹脂(A)包含具有乙烯性不飽和基之含羧基樹脂。In a seventh aspect of the present invention, the photosensitive resin composition is any one of the first to sixth aspects, wherein the carboxyl group-containing resin (A) includes a carboxyl group-containing resin having an ethylenically unsaturated group.
根據第7態樣,能夠對感光性樹脂組成物賦予光硬化性。According to the seventh aspect, it is possible to impart photocurability to the photosensitive resin composition.
本發明的第8態樣的感光性樹脂組成物,是在第1~第7之中的任一種態樣中,相對於前述有機填料(B)的含量與前述氧化矽填料(D)的含量的合計100質量份,前述耦合劑(C)的含量在0.01~10質量份的範圍內。In the eighth aspect of the present invention, the photosensitive resin composition is any one of the first to seventh aspects with respect to the content of the organic filler (B) and the content of the silicon oxide filler (D). 100 mass parts in total, and the content of the coupling agent (C) is in a range of 0.01 to 10 mass parts.
根據第8態樣,能夠防止感光性樹脂組成物中的有機填料(B)及氧化矽填料(D)凝集,而提高分散性。According to the eighth aspect, the organic filler (B) and the silica filler (D) in the photosensitive resin composition can be prevented from agglomerating, and the dispersibility can be improved.
本發明的第9態樣的感光性樹脂組成物,是在第1~第8之中的任一種態樣中,前述有機填料(B)是在粒徑10 μm以下的狀態下被包含在前述感光性樹脂組成物中。In the ninth aspect of the present invention, the photosensitive resin composition is any one of the first to eighth aspects, and the organic filler (B) is contained in the state in a state where the particle diameter is 10 μm or less. In the photosensitive resin composition.
根據第9態樣,感光性樹脂組成物的安定性會提高,並且由於能夠抑制曝光時的散射,故解析性會提高。According to the ninth aspect, the stability of the photosensitive resin composition is improved, and the scattering during exposure can be suppressed, so that the resolution is improved.
本發明的第10態樣的感光性樹脂組成物,是在第1~第9之中的任一種態樣中,前述有機填料(B)包含橡膠成分。In a tenth aspect of the present invention, the photosensitive resin composition is any one of the first to ninth aspects, wherein the organic filler (B) contains a rubber component.
根據第10態樣,能夠對感光性樹脂組成物的硬化物賦予柔軟性。According to the tenth aspect, flexibility can be imparted to the cured product of the photosensitive resin composition.
本發明的第11態樣的感光性樹脂組成物,是在第10態樣中,前述橡膠成分包含從由交聯丙烯酸系橡膠、交聯NBR、交聯MBS及交聯SBR所組成之群組中選出的至少一種聚合物。In a tenth aspect of the photosensitive resin composition of the present invention, in the tenth aspect, the rubber component includes a group consisting of crosslinked acrylic rubber, crosslinked NBR, crosslinked MBS, and crosslinked SBR. Selected at least one polymer.
根據第11態樣,感光性樹脂組成物能夠具有高透明性,而能夠提高感光性樹脂組成物的解析性。According to the eleventh aspect, the photosensitive resin composition can have high transparency and can improve the resolution of the photosensitive resin composition.
本發明的第12態樣的感光性樹脂組成物,是在第1~第11之中的任一種態樣中,前述含羧基樹脂(A)包含具有苯環之含羧基樹脂。In a twelfth aspect of the present invention, the photosensitive resin composition is any one of the first to eleventh aspects, wherein the carboxyl group-containing resin (A) includes a carboxyl group-containing resin having a benzene ring.
根據第12態樣,能夠提高感光性樹脂組成物的透明性,而感光性樹脂組成物會具有優異的解析性。According to the twelfth aspect, the transparency of the photosensitive resin composition can be improved, and the photosensitive resin composition can have excellent resolution.
本發明的第13態樣的感光性樹脂組成物,是在第1~第12之中的任一種態樣中,前述含羧基樹脂(A)包含藉由多元醇樹脂與酸二酐進行反應來獲得的共聚物。In the thirteenth aspect of the present invention, the photosensitive resin composition is any one of the first to twelfth aspects, wherein the carboxyl group-containing resin (A) includes a reaction of a polyol resin and an acid dianhydride. The copolymer obtained.
根據第13態樣,能夠對感光性樹脂組成物賦予高鹼顯影性,並且對感光性樹脂組成物的硬化物賦予高耐熱性及絕緣性。According to the thirteenth aspect, high alkali developability can be imparted to the photosensitive resin composition, and high heat resistance and insulation can be imparted to the cured product of the photosensitive resin composition.
本發明的第14態樣的感光性樹脂組成物,是在第13態樣中,前述酸二酐含有具有芳香環之酸二酐。In a fourteenth aspect of the present invention, the photosensitive resin composition is the thirteenth aspect, wherein the acid dianhydride contains an acid dianhydride having an aromatic ring.
根據第14態樣,能夠對感光性樹脂組成物賦予高鹼顯影性,並且對感光性樹脂組成物的硬化物賦予高耐熱性及絕緣性。According to the fourteenth aspect, high alkali developability can be imparted to the photosensitive resin composition, and high heat resistance and insulation can be imparted to the cured product of the photosensitive resin composition.
本發明的第15態樣的感光性樹脂組成物,是在第1~第14之中的任一種態樣中,前述含羧基樹脂(A)包含具有聯苯骨架及雙酚茀骨架之中的至少一種骨架之含羧基樹脂。In a fifteenth aspect of the present invention, the photosensitive resin composition is any one of the first to fourteenth aspects, wherein the carboxyl group-containing resin (A) includes a biphenyl skeleton and a bisphenol fluorene skeleton. At least one skeleton of a carboxyl-containing resin.
根據第15態樣,能夠更加降低感光性樹脂組成物的硬化物的介電耗損正切。According to the fifteenth aspect, the dielectric loss tangent of the cured product of the photosensitive resin composition can be further reduced.
本發明的第16態樣的感光性樹脂組成物,是在第1~第15之中的任一種態樣中,進一步含有:不飽和化合物(E),其一分子中具有至少一個乙烯性不飽和鍵;及,光聚合起始劑(F)。The photosensitive resin composition of a sixteenth aspect of the present invention is, in any one of the first to fifteenth aspects, further comprising: an unsaturated compound (E), which has at least one ethylenic compound in one molecule. A saturated bond; and, a photopolymerization initiator (F).
根據第16態樣,能夠對感光性樹脂組成物賦予高感光性。此外,能夠抑制在包含感光性樹脂組成物的硬化物之層中發生離子遷移,而提高包含硬化物之層的絕緣性。According to the sixteenth aspect, it is possible to impart high sensitivity to the photosensitive resin composition. In addition, ion migration can be suppressed in the layer containing the cured product of the photosensitive resin composition, and the insulation of the layer containing the cured product can be improved.
本發明的第17態樣的感光性樹脂組成物,是在第16態樣中,前述不飽和化合物(E)包含從由三羥甲基丙烷三(甲基)丙烯酸酯及三環癸烷二甲醇二(甲基)丙烯酸酯所組成之群組中選出的至少一種化合物。In a seventeenth aspect of the present invention, the photosensitive resin composition is the sixteenth aspect, wherein the unsaturated compound (E) includes trimethylolpropane tri (meth) acrylate and tricyclodecanedi At least one compound selected from the group consisting of methanol di (meth) acrylate.
根據第17態樣,感光性樹脂組成物能夠具有優異的透明性及安定性。According to the seventeenth aspect, the photosensitive resin composition can have excellent transparency and stability.
本發明的第18態樣的感光性樹脂組成物,是在第1~第17之中的任一種態樣中,進一步含有環氧化合物(G)。In the eighteenth aspect of the present invention, the photosensitive resin composition further includes an epoxy compound (G) in any one of the first to seventeenth aspects.
根據第18態樣,能夠對感光性樹脂組成物賦予熱硬化性。According to the eighteenth aspect, thermosetting properties can be imparted to the photosensitive resin composition.
本發明的第19態樣的乾膜,其含有第1~第18之中的任一種態樣的感光性樹脂組成物。A dry film according to a nineteenth aspect of the present invention includes the photosensitive resin composition according to any one of the first to eighteenth aspects.
根據第19態樣,能夠獲得一種乾膜,其能夠形成具有高鍍銅密合性且除膠渣後的粗糙性低的硬化物,並且解析性優異。According to the 19th aspect, it is possible to obtain a dry film which can form a hardened product having high copper plating adhesion and low roughness after removing slag, and has excellent resolvability.
本發明的第20態樣的印刷線路板,其具備層間絕緣層,該層間絕緣層包含第1~第18之中的任一種態樣的感光性樹脂組成物的硬化物。A printed wiring board according to a twentieth aspect of the present invention includes an interlayer insulating layer including a cured product of the photosensitive resin composition according to any one of the first to eighteenth aspects.
根據第20態樣,能夠獲得一種印刷線路板,其具備層間絕緣層,該層間絕緣層具有高鍍銅密合性且除膠渣後的粗糙性低。According to the twentieth aspect, it is possible to obtain a printed wiring board including an interlayer insulating layer having high copper plating adhesion and low roughness after removing slag.
本發明的第21態樣的印刷線路板,其具備阻焊劑層,該阻焊劑層包含第1~第13之中的任一種態樣的感光性樹脂組成物的硬化物。A printed wiring board according to a twenty-first aspect of the present invention includes a solder resist layer including a cured product of the photosensitive resin composition according to any one of the first to thirteenth aspects.
根據第21態樣,能夠獲得一種印刷線路板,其具備阻焊劑層,該阻焊劑層具有高鍍銅密合性且除膠渣後的粗糙性低。According to the twenty-first aspect, it is possible to obtain a printed wiring board including a solder resist layer having high copper plating adhesion and low roughness after removing slag.
1‧‧‧芯材1‧‧‧ core material
2‧‧‧絕緣層2‧‧‧ Insulation
3‧‧‧第一導體線路3‧‧‧ the first conductor line
4‧‧‧被膜4‧‧‧ capsule
5‧‧‧未曝光的部分5‧‧‧ unexposed part
6‧‧‧孔6‧‧‧hole
7‧‧‧層間絕緣膜7‧‧‧ interlayer insulation film
8‧‧‧第二導體線路8‧‧‧Second Conductor Line
9‧‧‧孔鍍層9‧‧‧ hole plating
10‧‧‧貫穿孔10‧‧‧through hole
11‧‧‧印刷線路板11‧‧‧printed circuit board
第1A圖是顯示製造多層印刷線路板的步驟中的一步驟的剖面圖。第1B圖是顯示製造多層印刷線路板的步驟中的一步驟的剖面圖。第1C圖是顯示製造多層印刷線路板的步驟中的一步驟的剖面圖。第1D圖是顯示製造多層印刷線路板的步驟中的一步驟的剖面圖。第1E圖是顯示製造多層印刷線路板的步驟中的一步驟的剖面圖。FIG. 1A is a cross-sectional view showing one of the steps of manufacturing a multilayer printed wiring board. FIG. 1B is a cross-sectional view showing one of the steps of manufacturing a multilayer printed wiring board. FIG. 1C is a cross-sectional view showing one of the steps of manufacturing a multilayer printed wiring board. FIG. 1D is a cross-sectional view showing one of the steps of manufacturing a multilayer printed wiring board. FIG. 1E is a cross-sectional view showing one of the steps of manufacturing a multilayer printed wiring board.
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CN112526823A (en) * | 2019-09-19 | 2021-03-19 | 株式会社田村制作所 | Photosensitive resin composition |
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JP2002064276A (en) * | 2000-08-22 | 2002-02-28 | Nippon Steel Chem Co Ltd | Photosetting or thermosetting resin component, and multilayer printed wiring board |
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