TW201836163A - Solar cell and method for manufacturing solar cell - Google Patents

Solar cell and method for manufacturing solar cell Download PDF

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TW201836163A
TW201836163A TW107105009A TW107105009A TW201836163A TW 201836163 A TW201836163 A TW 201836163A TW 107105009 A TW107105009 A TW 107105009A TW 107105009 A TW107105009 A TW 107105009A TW 201836163 A TW201836163 A TW 201836163A
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finger electrode
solar cell
electrode
aforementioned
insulating film
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TW107105009A
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TWI678813B (en
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上迫浩一
新井傑也
菅原美愛子
小林賢一
小宮秀利
松井正五
錦織潤
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日商亞特比目有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/02002Arrangements for conducting electric current to or from the device in operations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/05Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The present invention relates to a solar cell and a method for manufacturing solar cell, with an objective of directly soldering a ribbon to a finger electrode on a surface of a silicon substrate 1 to reduce a resistance component and to reduce leakage of electrons, and soldering directly the ribbon to a nitride film to firmly fix it. A solar cell is such configured that a lead wire is soldered with a solder in a direction orthogonal to a finger electrode for extracting electrons from a region formed on an insulating film with a constant width b, over a portion having the finger electrode and a portion of an insulating film having no finger electrode, and electrons from the finger electrode are taken out to the outside by the lead wire and the lead wire is fixed to the substrate.

Description

太陽能電池及太陽能電池的製造方法    Solar cell and manufacturing method of solar cell   

本發明有關一種太陽能電池及太陽能電池的製造方法,係在基板上形成照射光等時會產生高電子濃度的區域,並在該區域上形成光等會穿透的絕緣膜,且在絕緣膜上形成用以形成從該區域取出電子之取出口的指狀電極,進一步將複數個指狀電極電性連接以將電子取出至外部,將以往的匯流排電極設為玻璃或不需以往的匯流排電極,直接以焊料連接在指狀電極並從背面的基板直接以焊料連接。 The invention relates to a solar cell and a method for manufacturing a solar cell. A region is formed on a substrate that generates a high electron concentration when irradiated with light and the like, and an insulating film that penetrates with light and the like is formed on the region, and the insulating film is formed on the insulating film. Forming a finger electrode for forming an outlet for taking out electrons from the area, further electrically connecting a plurality of finger electrodes to take out the electrons, and setting a conventional bus electrode as glass or not requiring a conventional bus The electrodes are directly connected to the finger electrodes by solder and directly connected to the solder from the back substrate.

以往,在太陽能電池的設計中,使太陽能電池內產生的電子高效率地流向所連接的外部電路是很重要的。為了達成上述目的,使從電池連接至外部之部分的電阻成分減少、避免所產生的電子消失、使表面及背面的外部端子牢固地固定特別重要。 Conventionally, in the design of a solar cell, it is important to efficiently flow electrons generated in the solar cell to an external circuit connected thereto. In order to achieve the above-mentioned object, it is particularly important to reduce the resistance component of the part connected from the battery to the outside, to prevent the generation of electrons from disappearing, and to securely fix external terminals on the front and back.

例如第12圖所示的先前技術,在矽基板21的表面(上表面)生成氮化膜22,在該氮化膜22上進行指狀電極(銀)23的膏(含鉛玻璃)之網版印刷並予以鍛燒,以形 成如圖示在氮化膜22開孔並將電子由高電子濃度區域取出至外部的指狀電極23。接著,在與指狀電極23垂直的方向進行匯流排電極(銀)24之網版印刷並予以鍛燒而生成。於該匯流排電極(銀)24上以焊料26對帶狀導線(導線)25進行焊接,以使該帶狀導線25牢固地固定在矽基板21。 For example, in the prior art shown in FIG. 12, a nitride film 22 is formed on the surface (upper surface) of the silicon substrate 21, and a net of paste (lead-containing glass) of finger electrodes (silver) 23 is formed on the nitride film 22 The plate is printed and fired to form finger electrodes 23 that have holes in the nitride film 22 as shown in the figure and take out electrons from the high electron concentration region to the outside. Next, screen printing of the bus bar electrode (silver) 24 in a direction perpendicular to the finger electrode 23 is performed, followed by firing. The strip conductor (wire) 25 is soldered on the bus bar electrode (silver) 24 with solder 26 so that the strip conductor 25 is firmly fixed to the silicon substrate 21.

又,在矽基板21的背面(下表面)形成鋁電極27,將帶狀導線焊接並固定在鋁電極。 Further, an aluminum electrode 27 is formed on the back surface (lower surface) of the silicon substrate 21, and a strip-shaped wire is soldered and fixed to the aluminum electrode.

又,在整個表面形成鋁電極27之情形下帶狀導線29的焊接強度較弱時,預先在該鋁電極27的一部分開孔(在表面之與匯流排電極24對應之部分開孔),在此處進行銀膏之網版印刷並予以鍛燒以形成銀的部分271,以焊料28將帶狀導線29固定於銀的部分而獲得需要的固定強度。 When the welding strength of the strip wire 29 is weak when the aluminum electrode 27 is formed on the entire surface, a part of the aluminum electrode 27 is opened in advance (a hole is formed on the surface corresponding to the bus bar electrode 24). Here, screen printing of silver paste and firing are performed to form a silver portion 271, and the strip-shaped wire 29 is fixed to the silver portion with solder 28 to obtain a desired fixing strength.

但是,由於必須在上述之習知的矽基板21的表面形成匯流排電極(銀)24以匯集來自多數個指狀電極23的電子,或藉由該匯流排電極(銀)24使帶狀導線25牢固地焊接在矽基板21,而必須以銀或含大量的銀之膏製成該匯流排電極(銀)24,而且若該膏含有鉛玻璃,則會有以該匯流排電極24匯集的電子因鍛燒而朝向矽基板21洩漏的問題發生。 However, it is necessary to form a bus electrode (silver) 24 on the surface of the conventional silicon substrate 21 described above to collect electrons from a plurality of finger electrodes 23, or to use a bus bar electrode (silver) 24 to make a strip conductor. 25 is firmly soldered to the silicon substrate 21, and the bus electrode (silver) 24 must be made of silver or a paste containing a large amount of silver, and if the paste contains lead glass, there will be a collection of the bus electrode 24 The problem that electrons leak toward the silicon substrate 21 due to firing occurs.

又,在矽基板21的背面使鋁電極27形成於整個表面並在該表面上焊接帶狀導線之情形下會有帶狀 導線無法以充分的強度固定在矽基板21的問題。 Further, when the aluminum electrode 27 is formed on the entire surface of the silicon substrate 21 and a ribbon wire is soldered to the surface, there is a problem that the ribbon wire cannot be fixed to the silicon substrate 21 with sufficient strength.

又,也有為了避免上述問題,如前述第12圖所示,必須先在鋁電極27的一部分開孔,且於該處塗覆銀膏並予以鍛燒,在其上焊接帶狀導線以獲得充分的固定強度之問題。 In addition, in order to avoid the above problems, as shown in FIG. 12 described above, it is necessary to first make a hole in a part of the aluminum electrode 27, apply silver paste there and burn it, and solder a ribbon wire thereon to obtain sufficient The problem of fixed strength.

本發明人等係著眼於使矽基板1之表面的指狀電極的上部露出於絕緣膜上,而發現在該露出之指狀電極的上部直接焊接做為外部端子的帶狀導線以減少電阻成分且減少電子洩漏,並能夠使帶狀導線直接或經由玻璃牢固地焊接在氮化膜的構成及方法。 The present inventors focused on exposing the upper part of the finger electrodes on the surface of the silicon substrate 1 to the insulating film, and found that the upper part of the exposed finger electrodes was directly soldered as a ribbon wire as an external terminal to reduce the resistance component. In addition, the structure and method of reducing the electron leakage, and enabling the strip-shaped wire to be firmly welded to the nitride film directly or via glass.

又,本發明人等係發現在矽基板之背面的鋁電極或鋁電極的一部分開孔,且在該鋁電極或該鋁電極之孔的部分直接焊接以獲得充分之固定強度的構成及方法。 In addition, the present inventors have found a structure and a method in which an aluminum electrode or a part of an aluminum electrode is opened in a back surface of a silicon substrate, and the aluminum electrode or a part of the aluminum electrode is directly welded to obtain a sufficient fixed strength.

因此,本發明係在基板上形成照射光等時會產生高電子濃度的區域,並在該區域上形成光等會穿透的絕緣膜,在絕緣膜上形成做為從該區域取出電子之取出口的指狀電極,經由指狀電極將電子取出至外部的太陽能電池,其中,在與從絕緣膜上所形成的區域取出電子的指狀電極垂直的方向以一定的寬度b遍及具有指狀電極的部分和未具有指狀電極之絕緣膜的部分使用焊料焊接取出線,藉由取出線將來自指狀電極的電子取出至外部,並使取出線固定在基板。 Therefore, the present invention is to form a region on the substrate that generates a high electron concentration when irradiated with light, etc., and to form an insulating film that can penetrate through light, etc., on the substrate, and to form an insulating film as a way to take out electrons from this region. The finger electrode at the exit is used to take out electrons to the external solar cell through the finger electrode, and the finger electrode having the finger electrode has a width of a certain width b in a direction perpendicular to the finger electrode taking out electrons from a region formed on the insulating film. The part and the part without the insulating film of the finger electrode are soldered to take out the wire, and the electrons from the finger electrode are taken out to the outside by the take-out wire, and the take-out wire is fixed to the substrate.

此時,在朝與指狀電極垂直的方向以一定的寬度b以焊料焊接取出線的情況時,係以使指狀電極之要焊接之部分的寬度c變寬,或預先形成為一定的寬度c的方式進行。 At this time, when the wire is taken out by soldering with a certain width b in a direction perpendicular to the finger electrode, the width c of the finger electrode portion to be welded is widened or formed in advance to a certain width. c way.

又,在朝與指狀電極垂直的方向以一定的寬度b使用焊料焊接取出線的情況時,係將指狀電極之擴大部分的寬度c與相鄰之擴大部分的寬度c的間隔a設為比烙鐵前端的長度小,以避免烙鐵前端直接接觸於絕緣膜而使絕緣膜劣化。 In the case where the wire is taken out with a certain width b in a direction perpendicular to the finger electrode, the interval a between the width c of the enlarged portion of the finger electrode and the width c of the adjacent enlarged portion is set as It is shorter than the length of the tip of the soldering iron to prevent the tip of the soldering iron from directly contacting the insulating film and deteriorating the insulating film.

又,焊接係以超音波焊接的方式進行。 The welding is performed by ultrasonic welding.

使用超音波焊接之超音波輸出強度係設為可焊接取出線之程度以上,且為比絕緣膜會被破壞而導致性能劣化之程度還小之輸出。 The ultrasonic output intensity using ultrasonic welding is set to an extent that the wire can be taken out and welded, and the output is smaller than the degree to which the insulating film is damaged and the performance is deteriorated.

又,在取出線要藉由焊接而被焊接的部分預先進行無超音波預備焊接或依照需要進行超音波預備焊接。 In addition, in the portion where the take-out line is to be welded by welding, preliminary ultrasonic welding is performed in advance or, as required, preliminary ultrasonic welding is performed.

又,在取出線要被焊接的部分進行預備焊接的情況時,係以無超音波方式焊接取出線。 When preliminary welding is performed on the portion to be welded of the take-out wire, the take-out wire is welded by an ultrasonic method.

又,要藉由焊接來進行焊接的取出線,係預先進行預備焊接。 In addition, a take-out line to be welded by welding is preliminarily welded.

又,焊料係包含錫或在錫含有鋅、銅、銀之一種以上。 In addition, the solder contains tin, or tin contains one or more of zinc, copper, and silver.

因此,本發明係在基板上形成照射光等時會產生高電子濃度的區域,並在該區域上形成光等會穿透 的絕緣膜,在絕緣膜上形成做為從該區域取出電子之取出口的指狀電極,經由指狀電極將電子取出至外部,並使電子從基板的背面流入而形成電路的太陽能電池,該太陽能電池係構成為:在基板的背面使鋁電極形成於整個表面或在鋁電極的一部分形成孔,在所形成之鋁電極的整個表面的一部分或形成孔的部分,以焊料焊接取出線,使電子從基板的背面流入並且使取出線固定於基板。 Therefore, the present invention is to form a region on the substrate that generates a high electron concentration when irradiated with light, etc., and to form an insulating film that can penetrate through light, etc., on the substrate, and to form an insulating film as a way to take out electrons from this region. The finger electrode at the exit is a solar cell that extracts electrons to the outside through the finger electrode and flows electrons from the back surface of the substrate to form a circuit. The solar cell is configured by forming an aluminum electrode on the entire back surface of the substrate or A hole is formed in a part of the aluminum electrode, and a part of the entire surface of the formed aluminum electrode or a part of the hole is formed by soldering a lead wire out to allow electrons to flow in from the back surface of the substrate and fix the lead wire to the substrate.

此時,鋁電極的整個表面的一部分或形成孔的部分,係設為對應於表面的取出線的部分。 At this time, a part of the entire surface of the aluminum electrode or a part where a hole is formed is a part corresponding to a take-out line of the surface.

又,焊接係以超音波焊接的方式進行。 The welding is performed by ultrasonic welding.

又,在取出線要藉由焊接而被焊接的部分,預先進行無超音波預備焊接,或依照需要進行超音波預備焊接。 In addition, in the portion where the take-out line is to be welded by welding, preliminary ultrasonic welding is performed in advance, or preliminary ultrasonic welding is performed as necessary.

又,在取出線要被焊接的部分進行預備焊接的情況時,係以無超音波方式焊接取出線。 When preliminary welding is performed on the portion to be welded of the take-out wire, the take-out wire is welded by an ultrasonic method.

又,要藉由焊接來進行焊接的取出線,係預先進行預備焊接。 In addition, a take-out line to be welded by welding is preliminarily welded.

又,取出線的焊接係在使被焊接的部分的溫度成為焊料熔化的溫度以下且室溫以上而進行預備加熱的狀態下,進行焊接。 In addition, the welding of the take-out wire is performed in a state in which the temperature of the portion to be welded is lower than the temperature at which the solder is melted and the temperature is higher than the room temperature, and the preliminary heating is performed.

又,焊料係包含錫或在錫含有鋅、銅、銀之一種以上。 In addition, the solder contains tin, or tin contains one or more of zinc, copper, and silver.

本發明係如上述,著眼於使矽基板之表面 的指狀電極的上部露出於絕緣膜上,藉由在該露出之指狀電極的上部直接焊接做為外部端子的帶狀導線以減少電阻成分且減少電子洩漏,並能夠使帶狀導線直接或經由玻璃牢固地焊接在氮化膜的構成,成為高效率且取出線而可牢固地固定的太陽能電池。 As described above, the present invention focuses on exposing the upper part of the finger electrodes on the surface of the silicon substrate to the insulating film, and directly soldering the upper part of the exposed finger electrodes as a strip wire as an external terminal to reduce the resistance component. In addition, it can reduce the leakage of electrons, and can make the strip-shaped lead wire be firmly welded to the nitride film directly or through the glass, and it becomes a solar cell with high efficiency, which can be taken out and can be firmly fixed.

又,不需要以往的銀匯流排電極,而可減少銀的使用量。 Moreover, the conventional silver bus bar electrode is not required, and the amount of silver used can be reduced.

又,不需要以往的銀匯流排電極的形成步驟,而可減少步驟的數量。 Moreover, the steps for forming a conventional silver bus bar electrode are not required, and the number of steps can be reduced.

又,將取出線(帶狀導線)直接焊接在指狀電極並且降低電阻值,而可提高電子的取出效率。 In addition, the extraction wire (ribbon wire) is directly soldered to the finger electrode and the resistance value is reduced, thereby improving the extraction efficiency of the electrons.

本發明係如上述,在矽基板1之背面的鋁電極或鋁電極的一部分開孔,在鋁電極或鋁電極之孔的部分直接焊接,藉此使取出線的部分的電阻值降低,且能夠以充分之固定強度固定。 According to the present invention, as described above, a hole is formed in the aluminum electrode or a part of the aluminum electrode on the back surface of the silicon substrate 1, and the aluminum electrode or the portion of the hole of the aluminum electrode is directly welded, thereby reducing the resistance value of the portion where the wire is taken out, and enabling the Fix with sufficient fixing strength.

又,與以往在背面的鋁電極開孔以形成銀並在該處焊接取出線的情況相比較,可減少銀的使用量及銀的塗覆、鍛燒步驟,而使取出線牢固地固定。 In addition, compared with the conventional case where a hole is formed on the back of an aluminum electrode to form silver, and a wire is soldered out there, the amount of silver used and the steps of coating and firing of silver can be reduced, and the wire can be firmly fixed.

又,將取出線(帶狀導線)直接焊接在鋁電極或鋁電極之孔下方的矽基板並降低電阻值,而可提高電子的流入效率,成為高效率的太陽能電池。 In addition, the take-out wire (ribbon wire) is directly soldered to the silicon substrate under the aluminum electrode or the hole of the aluminum electrode to reduce the resistance value, so that the inflow efficiency of the electrons can be improved, and a high-efficiency solar cell can be obtained.

1‧‧‧基板(矽基板) 1‧‧‧ substrate (silicon substrate)

2‧‧‧氮化膜(絕緣膜) 2‧‧‧nitride film (insulating film)

3‧‧‧指狀電極 3‧‧‧ finger electrode

4‧‧‧匯流排電極 4‧‧‧Bus electrode

5、9‧‧‧帶狀導線(導線、取出線) 5, 9‧‧‧ Ribbon wire (wire, take-out wire)

6、8、26、28‧‧‧焊料 6, 8, 26, 28‧‧‧ solder

7‧‧‧鋁電極 7‧‧‧ aluminum electrode

21‧‧‧矽基板 21‧‧‧ silicon substrate

22‧‧‧氮化膜 22‧‧‧nitride film

23‧‧‧指狀電極 23‧‧‧ finger electrode

24‧‧‧匯流排電極 24‧‧‧Bus electrode

25‧‧‧帶狀導線(導線) 25‧‧‧ Ribbon wire (wire)

27‧‧‧鋁電極 27‧‧‧Aluminum electrode

29‧‧‧帶狀導線 29‧‧‧ Ribbon Wire

41‧‧‧匯流排區域 41‧‧‧Bus area

271‧‧‧銀的部分 271‧‧‧Silver part

a‧‧‧間隔 a‧‧‧ interval

b、c‧‧‧寬度 b, c‧‧‧width

第1圖係本發明之主要部分構成圖。 FIG. 1 is a configuration diagram of a main part of the present invention.

第2圖係本發明之製造方法說明流程圖(之1)。 Fig. 2 is a flowchart (part 1) illustrating the manufacturing method of the present invention.

第3圖係本發明之製造方法說明流程圖(之2)。 Fig. 3 is a flowchart (part 2) illustrating the manufacturing method of the present invention.

第4圖係本發明之說明圖(表面-1)。 Fig. 4 is an explanatory diagram (Surface-1) of the present invention.

第5圖係本發明之說明圖(表面-2)。 Fig. 5 is an explanatory diagram (surface-2) of the present invention.

第6圖係本發明之說明圖(背面-1)。 Fig. 6 is an explanatory diagram (back surface-1) of the present invention.

第7圖係本發明之說明圖(之1)。 Fig. 7 is an explanatory diagram (No. 1) of the present invention.

第8圖係本發明之說明圖(之2)。 Fig. 8 is an explanatory diagram (No. 2) of the present invention.

第9圖係本發明之說明圖(之3)。 Fig. 9 is an explanatory diagram (No. 3) of the present invention.

第10圖係本發明之說明圖(之4)。 Fig. 10 is an explanatory diagram (No. 4) of the present invention.

第11圖係本發明之說明圖(之5)。 Fig. 11 is an explanatory diagram (No. 5) of the present invention.

第12圖係先前技術之說明圖。 Fig. 12 is an explanatory diagram of the prior art.

[實施例1]     [Example 1]    

第1圖係顯示本發明之主要部分構成例。 Fig. 1 shows an example of the configuration of the main part of the present invention.

第1圖(a)係顯示所謂ABS技術-0之主要部分構成的一例,第1圖(a-1)係顯示其表面、背面之主要部分構成的詳細例。 FIG. 1 (a) shows an example of the main part configuration of the so-called ABS technology-0, and FIG. 1 (a-1) shows a detailed example of the main part configuration of the front and back surfaces.

第1圖(b)係顯示所謂ABS技術-1之主要部分構成的一例,第1圖(b-1)係顯示其表面、背面之主要部分構成的詳細例。 FIG. 1 (b) shows an example of the main part configuration of the so-called ABS technology-1, and FIG. 1 (b-1) shows a detailed example of the main part configuration of the front and back surfaces.

第1圖(c)係顯示所謂ABS技術-2之主要部分構成的一例,第1圖(c-1)係顯示其表面、背面之主要部分構成的詳細例。 FIG. 1 (c) shows an example of the main part configuration of the so-called ABS technology-2, and FIG. 1 (c-1) shows a detailed example of the main part configuration of the front and back surfaces.

在第1圖中,矽基板1為要形成太陽能電池之矽的基板(單晶、多晶)。 In FIG. 1, the silicon substrate 1 is a substrate (single crystal, polycrystalline) in which silicon of a solar cell is to be formed.

氮化膜(絕緣膜)2係在矽基板1上例如形成高濃度電子區域(由上方照射太陽光等時,會產生高濃度電子區域的區域)(習知)且透明(太陽光等會穿透的透明)的膜,且為在高濃度電子區域上牢固地形成的薄的透明絕緣膜(習知)。 The nitride film (insulating film) 2 is formed on the silicon substrate 1, for example, a high-concentration electron region (a region where a high-concentration electron region is generated when sunlight or the like is irradiated from above) (known) and transparent (sunlight, etc. It is a thin transparent insulating film (conventional) that is firmly formed on a high-concentration electron region.

指狀電極3係在氮化膜2上進行包含銀及鉛玻璃的膏之網版印刷,將溶劑加熱乾燥並予以鍛燒,藉由鉛玻璃的燒製現象在下層的氮化膜2形成與高濃度電子區域電性連接的路徑者,從該指狀電極3將高濃度電子區域所產生的電子朝氮化膜(絕緣膜)2的上方取出(習知)。 The finger electrode 3 is screen-printed with a paste containing silver and lead glass on the nitride film 2. The solvent is dried by heating and calcined. The firing phenomenon of lead glass is used to form the nitride film 2 on the lower layer. Those who are electrically connected to the high-concentration electron region take out the electrons generated in the high-concentration electron region from the finger electrode 3 above the nitride film (insulating film) 2 (known).

匯流排電極4係如第1圖(a)所示,僅在與指狀電極3垂直的方向且未具有指狀電極3的部分塗覆一定寬度的玻璃,將溶劑加熱乾燥並予以鍛燒而牢固地固定在氮化膜2者。在此,該匯流排電極4不需要為導電性,只要能夠牢固地固定在氮化膜2且焊接取出線即可(如後所述)。例如在本實驗係使用非導電性的ABS膏(釩、鋇、(錫或鋅或兩者(或該等的氧化物))的玻璃膏)。 As shown in FIG. 1 (a), the bus bar electrode 4 is coated with a certain width of glass only in a direction perpendicular to the finger electrode 3 and does not have the finger electrode 3. The solvent is dried by heating and fired. The two are firmly fixed to the nitride film 2. Here, the bus bar electrode 4 does not need to be conductive, as long as it can be firmly fixed to the nitride film 2 and the wire can be soldered out (as described later). For example, in this experiment, a non-conductive ABS paste (vanadium, barium, (tin or zinc or both (or oxides of these)) glass paste) is used.

帶狀導線(ribbon;導線)5係直接焊接在指狀電極3的取出線,以直接焊接在指狀電極3的該帶狀導線5將高濃度電子區域所產生的電子取出至外部者。 A ribbon wire (ribbon) 5 is a lead wire soldered directly to the finger electrode 3, and the ribbon wire 5 soldered directly to the finger electrode 3 takes out the electrons generated in the high-concentration electron region to the outside.

焊料6係將帶狀導線5焊接在指狀電極3及匯流排電極4(第1圖(a))、氮化膜2(第1圖(b)、第1圖(c))的焊料。 The solder 6 is a solder which solders the strip-shaped wire 5 to the finger electrode 3 and the bus bar electrode 4 (FIG. 1 (a)) and the nitride film 2 (FIG. 1 (b), FIG. 1 (c)).

鋁電極7係形成於矽基板1之背面的鋁電 極。 The aluminum electrode 7 is an aluminum electrode formed on the back surface of the silicon substrate 1.

焊料8係在第1圖(a)及第1圖(b)中,於形成在矽基板1的整個背面的鋁電極7上,在與以焊料6焊接表面的帶狀導線5之部分對應的背面部分焊接帶狀導線9者。在本發明所使用的焊料8係錫或在錫添加幾%至幾十%的鋅,亦可添加零點幾%至十幾%的銅或銀等。亦可依照需要添加更多比例或其他金屬等(以下亦同)。 The solder 8 is shown in Figs. 1 (a) and 1 (b). The aluminum electrode 7 formed on the entire back surface of the silicon substrate 1 corresponds to a portion of the strip conductor 5 whose surface is soldered with the solder 6. The back part is soldered with 9 strip wires. In the solder used in the present invention, 8-series tin or zinc is added to a few% to several tens%, and copper or silver may be added to a few tenths to a dozen%. More proportions or other metals can also be added as needed (the same applies hereinafter).

又,焊料8係在第1圖(c)中,在於矽基板1背面的一部分形成孔之鋁電極7上的該孔部分及該孔以外的鋁部分,在與以焊料6焊接表面的帶狀導線5之部分對應的背面部分焊接帶狀導線9者。 The solder 8 is shown in FIG. 1 (c). The hole portion of the aluminum electrode 7 and a portion of the aluminum portion other than the hole on the aluminum electrode 7 in which a hole is formed on a part of the back surface of the silicon substrate 1 are in a band shape on the surface with the solder 6 A strip-shaped wire 9 is soldered to a back portion corresponding to a portion of the wire 5.

帶狀導線(導線)9係以焊料8將形成於矽基板1背面的鋁電極7、該鋁電極7之開孔部分焊接在其下方的矽基板1而使電子流入者。 The strip conductor (wire) 9 is an aluminum electrode 7 formed on the back surface of the silicon substrate 1 with a solder 8 and a silicon substrate 1 with an opening portion of the aluminum electrode 7 soldered thereunder to allow electrons to flow in.

依據第1圖(a-1)、(b-1)、(c-1)詳細說明以下各構成。 The following configurations will be described in detail with reference to Figs. 1 (a-1), (b-1), and (c-1).

關於第1圖(a-1)的ABS技術-0: Regarding the ABS technology-0 in Figure 1 (a-1):

‧表面:在表面(第1圖(a)之矽基板1上側的表面)係在圖示的匯流排電極4塗覆ABS膏,將溶劑加熱乾燥並予以鍛燒,使該ABS(以釩酸鹽為主成分的玻璃,且能夠焊接的玻璃)取代以往的匯流排電極(銀)。在此狀態下,矽基板1的高濃度電子區域所產生的電子係經由指狀電極3藉由以焊料6焊接的帶狀導線5直接取出至外部。因此,以往之光電子濃度區域-指狀電極3-銀匯流排電極-帶狀導線5 的路徑中,省略銀匯流排電極的部分而可使電子直接由指狀電極3流到帶狀導線5並取出至外部,以降低電阻並減少損耗,進一步可消除以往之從匯流排電極之電子的洩漏。 ‧Surface: The surface (surface on the upper side of the silicon substrate 1 in Fig. 1 (a)) is coated with ABS paste on the bus electrode 4 shown in the figure, the solvent is dried by heating and calcined, and the ABS (using vanadate (Salt-based glass that can be soldered) replaces conventional busbar electrodes (silver). In this state, the electrons generated in the high-concentration electron region of the silicon substrate 1 are directly taken out to the outside through the finger electrode 3 through the strip-shaped wire 5 soldered with the solder 6. Therefore, in the path of the conventional photoelectron concentration region-finger electrode 3-silver bus electrode-ribbon wire 5, the portion of the silver bus electrode is omitted, so that electrons can flow directly from the finger electrode 3 to the band wire 5 and Take it to the outside to reduce resistance and loss, and further eliminate the leakage of electrons from the bus electrode in the past.

‧背面:在背面(第1圖(a)之矽基板1下側的面)係如圖示在形成於矽基板1之整個表面的鋁電極7上,在與表面的匯流排電極(ABS膏)4對應的部分直接焊接帶狀導線9。 ‧Back surface: The rear surface (the lower surface of the silicon substrate 1 in Fig. 1 (a)) is shown on the aluminum electrode 7 formed on the entire surface of the silicon substrate 1 as shown in the figure. ) 4 is directly soldered to the strip-shaped wire 9.

藉由以上的構成,能夠在表面將矽基板1的高濃度電子區域所產生的電子經由指狀電極3-帶狀導線5直接取出至外部,而且帶狀導線5能夠在與匯流排電極(可為非導電性,例如ABS膏)4對應的部分以焊料6直接牢固地焊接在矽基板1並予以固定。在背面係省略在以往的鋁電極7上鍛燒銀膏並焊接帶狀導線的時間,藉由本發明可在鋁電極7上直接焊接帶狀導線並牢固地固定。 With the above configuration, the electrons generated in the high-concentration electron region of the silicon substrate 1 can be directly taken out to the outside through the finger electrode 3-the strip conductor 5, and the strip conductor 5 can be connected with the bus electrode (may be It is non-conductive, for example, the corresponding part of ABS paste 4 is directly and firmly soldered to the silicon substrate 1 with solder 6 and fixed. The time for burning the silver paste on the conventional aluminum electrode 7 and soldering the strip conductor on the back surface is omitted, and the strip conductor can be directly soldered on the aluminum electrode 7 and firmly fixed by the present invention.

關於第1圖(b-1)的ABS技術-1: Regarding ABS Technology-1 in Figure 1 (b-1):

‧表面:在表面(第1圖(b)之矽基板1上側的表面)係將圖示的帶狀導線5以焊料6直接以一定寬度b焊接在指狀電極3和氮化膜2的部分(參照第4圖等)。在此狀態下,矽基板1的高濃度電子區域所產生的電子係可經由指狀電極3藉由以焊料6焊接的帶狀導線5直接取出至外部,並經由氮化膜2將帶狀導線5牢固地固定在矽基板1。因此,不需要以往的匯流排電極,即能夠以光電子濃度區域-指狀電極3-帶狀導線5的路徑將電子直接取出至外部,並經由 氮化膜2將帶狀導線5牢固地固定在矽基板1。 ‧Surface: On the surface (surface on the upper side of the silicon substrate 1 in Fig. 1 (b)), the strip-shaped wire 5 shown in the figure is directly soldered to the finger electrode 3 and the nitride film 2 with a certain width b with solder 6 (See Figure 4 etc.). In this state, the electron system generated in the high-concentration electron region of the silicon substrate 1 can be directly taken out to the outside through the finger electrode 3 through the ribbon wire 5 soldered with the solder 6, and the ribbon wire is passed through the nitride film 2. 5 is firmly fixed to the silicon substrate 1. Therefore, the conventional bus electrode is not needed, that is, the electrons can be directly taken out to the outside through the path of the photoelectron concentration region-finger electrode 3 -the strip-shaped wire 5 and the strip-shaped wire 5 can be firmly fixed on the nitride film 2 Silicon substrate 1.

‧背面:與第1圖(a-1)相同。 ‧Back: Same as the first figure (a-1).

藉由以上的構成,能夠在表面將矽基板1的高濃度電子區域所產生的電子經由指狀電極3-帶狀導線5直接取出至外部,並經由氮化膜2將帶狀導線5牢固地固定在矽基板1。在背面與第1圖(a)同樣地,省略在以往的鋁電極7上鍛燒銀膏並焊接帶狀導線的時間,藉由本發明可在鋁電極7上直接焊接帶狀導線並牢固地固定。 With the above configuration, the electrons generated in the high-concentration electron region of the silicon substrate 1 can be directly taken out to the outside through the finger electrodes 3-the strip conductor 5, and the strip conductor 5 can be firmly secured through the nitride film 2. Fixed on silicon substrate 1. On the back side, as in FIG. 1 (a), the time for burning silver paste on the conventional aluminum electrode 7 and soldering the strip conductor is omitted, and the strip conductor can be directly soldered on the aluminum electrode 7 and firmly fixed by the present invention. .

關於第1圖(c-1)的ABS技術-2: Regarding ABS Technology-2 in Figure 1 (c-1):

‧表面:與第1圖(b-1)相同。 ‧Surface: Same as Figure 1 (b-1).

‧背面:在背面(第1圖(c)之矽基板1下側的面)係在圖示之形成於矽基板1的鋁電極7設置孔,在與焊接表面的帶狀導線5之部分對應的該孔的部分及該孔的部分以外的部分焊接帶狀導線9。藉此,能夠使帶狀導線9在孔的部分以焊料8直接焊接於矽基板1且牢固地固定在矽基板1,並降低電阻成分。 ‧Back surface: The back surface (the lower surface of the silicon substrate 1 in Fig. 1 (c)) is provided with holes on the aluminum electrode 7 formed on the silicon substrate 1 as shown in the figure, and corresponds to the portion of the strip conductor 5 on the soldering surface. The strip-shaped wire 9 is soldered to a part of the hole and a part other than the part of the hole. Thereby, the strip-shaped wire 9 can be directly soldered to the silicon substrate 1 with the solder 8 at the portion of the hole, and can be firmly fixed to the silicon substrate 1 to reduce the resistance component.

藉由以上的構成,能夠在表面將矽基板1的高濃度電子區域所產生的電子經由指狀電極3-帶狀導線5直接取出至外部,並經由氮化膜2將帶狀導線5牢固地固定在矽基板1。藉由本發明可在背面經由鋁電極7的孔以焊料8直接將帶狀導線9焊接於矽基板1並牢固地固定。 With the above configuration, the electrons generated in the high-concentration electron region of the silicon substrate 1 can be directly taken out to the outside through the finger electrodes 3-the strip conductor 5, and the strip conductor 5 can be firmly secured through the nitride film 2. Fixed on silicon substrate 1. According to the present invention, the strip-shaped wire 9 can be directly soldered to the silicon substrate 1 with the solder 8 through the hole of the aluminum electrode 7 on the back surface and firmly fixed.

接著,按照第2圖及第3圖之順序詳細說明第1圖之構成的製造方法。 Next, the manufacturing method of the structure of FIG. 1 will be described in detail in the order of FIG. 2 and FIG. 3.

第2圖及第3圖係顯示本發明之製造方法說明流程圖。 2 and 3 are flowcharts illustrating the manufacturing method of the present invention.

在第2圖中,S1係準備基板。此步驟係例如右側所記載,準備P型之單晶或多晶的矽基板1做為欲形成前述第1圖之太陽能電池的矽基板1。 In FIG. 2, S1 is a substrate. This step is described, for example, on the right side, and a P-type single-crystal or poly-crystal silicon substrate 1 is prepared as the silicon substrate 1 of the solar cell in FIG.

S2係形成氮化膜。此步驟係在前述第1圖之矽基板1的表面形成氮化膜(絕緣膜)2。氮化膜2的厚度係例如可為60-90nm左右。 The S2 system forms a nitride film. This step is to form a nitride film (insulating film) 2 on the surface of the silicon substrate 1 in the aforementioned first figure. The thickness of the nitride film 2 may be, for example, about 60 to 90 nm.

S3係在背面塗覆鋁膏。此步驟係如右側所記載,在第1圖之矽基板1的背面進行鋁膏之網版印刷及塗覆。該塗覆係在第1圖(a-1)、第1圖(b-1)的整個背面進行塗覆。第1圖(c-1)係在與表面的指狀電極3的圖案垂直的方向,在背面具有空間或不具有空間的部分塗覆鋁膏,在背面的矽基板1上以帶狀圖案或不連續帶狀之鋁膏進行塗覆(未塗覆的部分係成為鋁電極7的無孔部分)。 S3 is coated with aluminum paste on the back. In this step, as described on the right, screen printing and coating of aluminum paste are performed on the back surface of the silicon substrate 1 in FIG. 1. This coating is applied on the entire back surface of Fig. 1 (a-1) and Fig. 1 (b-1). Fig. 1 (c-1) shows a direction perpendicular to the pattern of the finger electrodes 3 on the front surface, and aluminum paste is applied to a portion with or without space on the back surface. A discontinuous strip of aluminum paste is applied (the uncoated portion becomes a non-porous portion of the aluminum electrode 7).

S4係進行去除溶劑。此步驟係將在S3所塗覆的鋁膏進行加熱乾燥(例如在80℃至120℃進行30至60分鐘的加熱乾燥),去除溶劑。 S4 system removes the solvent. In this step, the aluminum paste coated in S3 is dried by heating (for example, heating and drying at 80 ° C. to 120 ° C. for 30 to 60 minutes) to remove the solvent.

S5係在表面印刷指狀電極。此步驟係在第1圖的氮化膜2上使用例如右側所記載之含有銀和鉛玻璃料的膏進行網版印刷。 S5 is a finger electrode printed on the surface. In this step, screen printing is performed on the nitride film 2 in FIG. 1 using, for example, a paste containing silver and lead glass frit described on the right side.

S6係進行去除溶劑。此步驟係將在S5中所塗覆的膏進行加熱乾燥(例如在80℃至120℃進行30至60分鐘的加熱乾燥),並去除溶劑。 The S6 system removes the solvent. In this step, the paste applied in S5 is heat-dried (for example, heat-dried at 80 ° C. to 120 ° C. for 30 to 60 minutes), and the solvent is removed.

第3圖中,在第1圖(a)的情況係進行S7、S8。S7、S8亦可與S5、S6的指狀電極的印刷、去除溶劑同時進行。 In Fig. 3, S7 and S8 are performed in the case of Fig. 1 (a). S7 and S8 can be performed simultaneously with printing and solvent removal of the finger electrodes of S5 and S6.

S7係印刷匯流排電極。此步驟係將第1圖的匯流排電極4以ABS膏進行網版印刷。 S7 series printed bus electrode. In this step, the bus electrode 4 in FIG. 1 is screen-printed with ABS paste.

S8係進行去除溶劑。該等S7、S8係使用ABS膏(釩、鋇(錫或鋅或兩者(或該等的氧化物))如第1圖(a)將匯流排電極進行網版印刷、去除溶劑。 S8 is used for solvent removal. The S7 and S8 series use ABS paste (vanadium, barium (tin or zinc or both (or oxides of these))) as shown in Figure 1 (a) to screen-print the bus electrodes and remove the solvent.

S9係進行鍛燒。此步驟係將已在S3和S4、S5和S6、還有S7和S8中進行印刷、去除溶劑之背面的鋁電極7、指狀電極3進行鍛燒,依照需要進一步將匯流排電極4一併進行鍛燒。又,亦可個別地進行鍛燒。鍛燒係如右側所記載,例如在750至820℃、1秒至60秒的範圍內進行紅外線照射較為理想。 S9 series is calcined. In this step, the aluminum electrodes 7 and finger electrodes 3 on the back of the solvent that have been printed in S3 and S4, S5 and S6, and S7 and S8 are removed, and the bus electrodes 4 are further combined as required. Carry out calcination. Alternatively, the calcination may be performed individually. The calcining system is as described on the right side, and for example, it is preferable to perform infrared irradiation in a range of 750 to 820 ° C and 1 second to 60 seconds.

S10係在表面進行超音波焊接。此步驟係如在第1圖所述,將表面的取出線(帶狀導線5)直接地焊接在指狀電極3。又,如上所述,在被焊接的部分預先進行預備焊接(超音波預備焊接或無超音波預備焊接)的情況時,無超音波的焊接亦可。另外,超音波焊接(無超音波的焊接亦同)係在將被焊接的部分(可能的話進行焊接的部分亦同)的溫度預先加熱至焊料會熔解的溫度以下(熔解的溫度以下且室溫以上)的狀態下進行焊接,藉此能夠確實地焊接本發明的焊料(其他部分的超音波焊接(無超音波焊接)亦同)。 S10 is ultrasonically welded on the surface. In this step, as shown in FIG. 1, the lead-out wire (ribbon wire 5) on the surface is directly soldered to the finger electrode 3. Further, as described above, when preliminary welding (pre-sonic welding or non-ultrasonic preparation welding) is performed in advance on the portion to be welded, non-ultrasonic welding may be performed. In addition, ultrasonic welding (the same applies to welding without ultrasonic waves) is to pre-heat the temperature of the part to be welded (the same is true for the part where welding is possible) to a temperature below which the solder will melt (below the melting temperature and room temperature). By performing the welding in the above state, the solder of the present invention can be reliably welded (the same applies to the ultrasonic welding (no ultrasonic welding) of other parts).

S11係在背面進行超音波焊接。此步驟係如在第1圖所述,將取出線(帶狀導線9)直接焊接在鋁電極7,或直接焊接在鋁電極7之孔內部的矽基板1。又,如上所述,在被焊接的部分預先進行預備焊接(超音波預備焊接或無超音波預備焊接)的情況時,無超音波的焊接亦可。 S11 is ultrasonically welded on the back. In this step, as shown in FIG. 1, the take-out wire (the strip-shaped wire 9) is directly soldered to the aluminum electrode 7, or directly to the silicon substrate 1 inside the hole of the aluminum electrode 7. Further, as described above, when preliminary welding (pre-sonic welding or non-ultrasonic preparation welding) is performed in advance on the portion to be welded, non-ultrasonic welding may be performed.

如上所述,在第1圖之矽基板1的表面形成氮化膜(絕緣膜)2之後,在背面塗覆形成鋁電極7的鋁膏並去除溶劑,在表面塗覆形成指狀電極3的銀、鉛玻璃填料並去除溶劑,依照需要塗覆形成匯流排電極4的ABS膏並去除溶劑,並依照需要將該等鋁電極7、指狀電極3、匯流排電極4一併鍛燒,可依照需要形成背面的鋁電極7、表面的指狀電極3、ABS的匯流排電極4。此外,在表面的指狀電極3和露出的氮化膜2兩者直接以焊料6焊接帶狀導線5(第1圖(b)、第1圖(c)),或在指狀電極3和匯流排電極4兩者直接以焊料6焊接帶狀導線5(第1圖(a)),進一步以焊料8直接焊接背面的鋁電極7和帶狀導線5(第1圖(a)、第1圖(b)),或經由鋁電極7的孔將帶狀導線9以焊料8直接焊接在矽基板1,並且在鋁電極7之無孔部分以焊料8直接焊接帶狀導線9(第1圖(c)),藉此能夠使帶狀導線9牢固地固定在矽基板1而且減少由帶狀導線9到矽基板1的電阻。 As described above, after the nitride film (insulating film) 2 is formed on the surface of the silicon substrate 1 in FIG. 1, the aluminum paste forming the aluminum electrode 7 is coated on the back surface, the solvent is removed, and the surface of the finger electrode 3 is coated. Fill the silver and lead glass fillers and remove the solvent, apply ABS paste to form the bus electrode 4 and remove the solvent as required, and burn the aluminum electrode 7, finger electrode 3, and bus electrode 4 together as required. As needed, aluminum electrodes 7 on the back, finger electrodes 3 on the front, and bus electrodes 4 on ABS are formed. In addition, both the finger electrodes 3 on the surface and the exposed nitride film 2 are directly soldered to the strip conductor 5 with solder 6 (Fig. 1 (b), Fig. 1 (c)), or between the finger electrodes 3 and Both of the busbar electrodes 4 are directly soldered to the strip-shaped wire 5 with solder 6 (FIG. 1 (a)), and the aluminum electrode 7 and the strip-shaped wire 5 at the back are directly soldered with solder 8 (FIG. 1 (a), 1 (B)), or the strip wire 9 is directly soldered to the silicon substrate 1 with solder 8 through the hole of the aluminum electrode 7, and the strip wire 9 is directly soldered with solder 8 at the non-porous portion of the aluminum electrode 7 (FIG. 1) (c)) This makes it possible to firmly fix the lead wire 9 to the silicon substrate 1 and reduce the resistance from the lead wire 9 to the silicon substrate 1.

第4圖係顯示本發明之說明圖(表面-1)。 Fig. 4 is an explanatory diagram (Surface-1) of the present invention.

第4圖(a)係顯示指狀電極3的圖案例,第4圖(b)係顯示第4圖(a)的放大圖。 Fig. 4 (a) shows an example of a pattern of the finger electrode 3. Fig. 4 (b) shows an enlarged view of Fig. 4 (a).

第4圖中,指狀電極3的圖案例係顯示在要朝與第1圖的指狀電極3垂直的方向以焊料6焊接寬度b的帶狀導線5的區域(與圖示之匯流排區域41相同的區域)之寬度擴大為寬度c之例。藉由將指狀電極3的寬度擴大為該寬度c,即能夠使帶狀導線5與指狀電極3之間的焊接面積(接觸面積)增加以降低接觸電阻。另一方面,若使寬度c過於擴大,電子從擴大部分的洩漏(再結合)會增加而有漏電流增加的傾向,因此必須以實驗決定最適值。 In FIG. 4, an example of the pattern of the finger electrode 3 is shown in a region (a bus bar region shown in the figure) in which a strip wire 5 having a width b is soldered with solder 6 in a direction perpendicular to the finger electrode 3 in FIG. 1. 41 is the same as the width c. By increasing the width of the finger electrode 3 to the width c, the welding area (contact area) between the strip-shaped wire 5 and the finger electrode 3 can be increased to reduce the contact resistance. On the other hand, if the width c is excessively enlarged, the leakage (recombination) of electrons from the enlarged portion increases and the leakage current tends to increase. Therefore, the optimum value must be determined experimentally.

又,如第4圖(b)所示,在將匯流排區域41的寬度b(帶狀導線5的寬度)擴大的狀態下進行焊接的情況時,匯流排區域41與相鄰區域的間隔a必須比超音波烙鐵前端的長度小,以避免烙鐵前端直接接觸於下方的氮化膜2而破壞該氮化膜2。例如烙鐵前端的長度為2mm時,間隔a約1mm左右進行實驗的結果,並不會對氮化膜2產生不良影響。 In addition, as shown in FIG. 4 (b), when welding is performed while the width b (the width of the strip conductor 5) of the bus bar area 41 is enlarged, the distance a between the bus bar area 41 and the adjacent area a It must be shorter than the length of the front end of the ultrasonic soldering iron to prevent the front end of the soldering iron from directly contacting the nitride film 2 below and damaging the nitride film 2. For example, when the length of the tip of the soldering iron is 2 mm, the result of the experiment at an interval a of about 1 mm does not adversely affect the nitride film 2.

又,直接進行焊接時,基底的氮化膜2的焊接材料之錫、鋅會緊密地密接,且可獲得通常的焊接材料(錫、鉛)所無法得到的5N以上的密接力。 Further, when soldering is performed directly, tin and zinc of the soldering material of the base nitride film 2 are tightly adhered to each other, and a bonding force of 5N or more that cannot be obtained with ordinary soldering materials (tin and lead) can be obtained.

第5圖係顯示本發明之說明圖(表面-2)。此圖係顯示上述第1圖(b)、(c)的表面之放大詳細圖。 Fig. 5 is an explanatory view (surface-2) of the present invention. This figure is an enlarged detailed view showing the surface of the above-mentioned first figures (b) and (c).

第5圖中,在矽基板1的表面形成氮化膜(絕緣膜)2,於其上在指狀電極3的圖案塗覆銀和鉛玻璃的膏並予以鍛燒,以形成圖示的指狀電極3(在氮化膜2開孔形成內部為銀的指狀電極3)。 In FIG. 5, a nitride film (insulating film) 2 is formed on the surface of a silicon substrate 1, and a pattern of finger electrodes 3 is coated with a paste of silver and lead glass and fired to form the fingers shown in the figure. Shaped electrode 3 (finger electrode 3 having silver inside formed in the opening of the nitride film 2).

本發明中,以焊料6直接將帶狀導線5焊接在氮化膜2上突出的指狀電極3的同時,以焊料6將帶狀導線5焊接在氮化膜2的部分。此時,如上述第4圖所示,先使指狀電極3的寬度變寬(使相當於帶狀導線5之寬度的部分變寬),藉此能夠增加指狀電極3與焊料6之間的接觸面積,以降低接觸電阻,並且使間隔小於烙鐵前端的長度,使烙鐵前端不會直接接觸於基底的氮化膜2而使該氮化膜2不會受到破壞等不良影響(參照第4圖的說明)。 In the present invention, while the strip-shaped wire 5 is directly soldered to the protruding finger electrode 3 on the nitride film 2 with solder 6, the strip-shaped wire 5 is soldered to the portion of the nitride film 2 with solder 6. At this time, as shown in FIG. 4 above, the width of the finger electrode 3 is widened (the portion corresponding to the width of the strip conductor 5 is widened), so that the distance between the finger electrode 3 and the solder 6 can be increased. To reduce the contact resistance, and to make the interval smaller than the length of the tip of the soldering iron, so that the tip of the soldering iron does not directly contact the nitride film 2 on the substrate and the nitride film 2 is not affected by damage (see Section 4). Illustration of the figure).

藉此,可經由指狀電極3將來自高濃度電子區域的電子直接取出至帶狀導線5以及使指狀電極3與帶狀導線5的接觸電阻降低以提高效率,並且能夠使帶狀導線5以焊料6直接焊接在氮化膜2且牢固地固定。 Thereby, the electrons from the high-concentration electron region can be directly taken out to the strip conductor 5 through the finger electrode 3, and the contact resistance between the finger electrode 3 and the strip conductor 5 can be reduced to improve efficiency, and the strip conductor 5 can be improved. The solder 6 is directly soldered to the nitride film 2 and is firmly fixed.

第6圖係顯示本發明之說明圖(背面-1)。 Fig. 6 is an explanatory diagram (back surface-1) of the present invention.

第6圖(a)係顯示以往之背面的構成例。以往係在矽基板的背面形成在一部分形成有孔的鋁電極,在該孔的部分塗覆銀膏並予以鍛燒而形成銀電極,在該銀電極以焊料(鉛焊料)焊接帶狀導線,以超過規定的力量將帶狀導線固定在矽基板。 Fig. 6 (a) shows a configuration example of a conventional back surface. Conventionally, an aluminum electrode having a hole formed in a part of a back surface of a silicon substrate was formed, and a silver paste was applied to the portion of the hole and fired to form a silver electrode. A ribbon wire was soldered to the silver electrode with solder (lead solder). Fix the ribbon wire to the silicon substrate with more than specified force.

第6圖(b)係顯示本發明之直接焊接的一例。 Fig. 6 (b) shows an example of the direct welding of the present invention.

第6圖(b-1)係顯示在矽基板1的整個背面形成鋁電極7,以焊料8將帶狀導線9焊接在鋁電極7之例(與第1圖(a)、第1圖(b)相同)。在本發明中,可使用焊料(錫、鋅)8以超音波烙鐵將帶狀導線9直接超音波焊接在鋁電極7。又,在鋁電極7進行預備焊接時,可進行無超 音波焊接。 Fig. 6 (b-1) shows an example in which an aluminum electrode 7 is formed on the entire back surface of the silicon substrate 1, and a ribbon wire 9 is soldered to the aluminum electrode 7 with solder 8 (as shown in Fig. 1 (a) and Fig. 1 ( b) same). In the present invention, the solder wire (tin, zinc) 8 may be used to directly ultrasonically bond the strip-shaped wire 9 to the aluminum electrode 7 with an ultrasonic soldering iron. When preliminary welding of the aluminum electrode 7 is performed, ultrasonic welding can be performed.

第6圖(b-2)係顯示在矽基板1的背面形成在一部分開孔的鋁電極7,在該孔的部分及其以外的兩者的部分以焊料8焊接帶狀導線9之例(與第1圖(c)相同)。在本發明中,可使用焊料(錫、鋅)8以超音波烙鐵將帶狀導線9直接超音波焊接在鋁電極7之孔的部分的矽基板1及孔以外的鋁電極7。又,在進行預備焊接時,可進行無超音波焊接。 Fig. 6 (b-2) shows an example of an aluminum electrode 7 formed with a hole in a part of the back surface of the silicon substrate 1, and the strip lead 9 is soldered to the portion of the hole and the other two portions with solder 8 ( (Same as Fig. 1 (c)). In the present invention, a solder (tin, zinc) 8 may be used to directly ultrasonically bond the strip-shaped wire 9 to the silicon substrate 1 of the hole portion of the aluminum electrode 7 and the aluminum electrode 7 other than the hole using an ultrasonic soldering iron. In addition, during preliminary welding, ultrasonic-free welding can be performed.

第7圖係顯示本發明之說明圖(之1)。此圖係顯示超音波焊接條件之一例。 Fig. 7 is an explanatory diagram (No. 1) showing the present invention. This figure shows an example of ultrasonic welding conditions.

在第7圖中,在上述之第1圖等將帶狀導線5、9以焊料6、8進行施加超音波的超音波焊接時,若超音波的輸出過強,會導致第1圖的氮化膜2受到破壞等不良影響,若超音波的輸出過弱,則會發生無法焊接帶狀導線5、9的情況。為了進行超音波焊接具有最佳的超音波輸出,尤其取決於指狀電極3進行超音波焊接之部分(區域)的尺寸。在本實驗中,3W以上的超音波輸出會使元件惡化(氮化膜2受到破壞等產生不良影響),0.5W以下會導致焊接不良。在該實驗中,3W以下0.5W以上的範圍為可進行超音波焊接之較理想的範圍。 In Fig. 7, in the above-mentioned Fig. 1 and the like, when the strip wires 5 and 9 are soldered with the solder 6 and 8 to perform ultrasonic welding, if the output of the ultrasonic wave is too strong, the nitrogen of Fig. 1 will be caused. The chemical film 2 is adversely affected by damage and the like, and if the ultrasonic output is too weak, it may happen that the ribbon-shaped wires 5 and 9 cannot be soldered. In order to perform the ultrasonic welding, the optimal ultrasonic output depends on the size of the portion (area) where the finger electrodes 3 are ultrasonically welded. In this experiment, an ultrasonic output of 3W or more deteriorates the device (the nitride film 2 is damaged due to damage, etc.), and 0.5W or less causes soldering failure. In this experiment, a range of 3W or less and 0.5W or more is a more ideal range for performing ultrasonic welding.

第8圖係顯示本發明之說明圖(之2)。此圖係顯示上述第1圖(b)之ABS技術-1、第1圖(c)之ABS技術-2、第12圖之先前技術的比較例。 Fig. 8 is an explanatory diagram (No. 2) showing the present invention. This figure shows a comparative example of the ABS technology-1 in FIG. 1 (b), the ABS technology-2 in FIG. 1 (c), and the prior art in FIG. 12.

‧ABS技術-1(第1圖(b)):在背面的話係在 鋁電極7直接焊接帶狀導線9。在表面的話係在指狀電極3直接焊接帶狀導線5以及在氮化膜2直接焊接帶狀導線5。因此:1.背面的密接力雖然比ABS技術-2稍差,但充分符合規格;2.可減少以往的銀;3.電性特性良好。 ‧ABS technology-1 (Fig. 1 (b)): on the back side, the strip-shaped wire 9 is directly welded to the aluminum electrode 7. On the surface, the lead wire 5 is directly welded to the finger electrode 3 and the lead wire 5 is directly welded to the nitride film 2. Therefore: 1. Although the adhesion on the back is slightly worse than ABS technology-2, it fully meets the specifications; 2. It can reduce the conventional silver; 3. It has good electrical characteristics.

‧ABS技術-2(第1圖(c)):在背面的話係在鋁電極7的孔下方的矽基板1直接焊接帶狀導線9以及在孔以外的部分的鋁電極7直接焊接。在表面的話係與ABS技術-1相同。因此:1.背面的帶狀導線的密接力強;2.可減少以往的銀;3.電性特性良好。 ‧ABS technology-2 (Figure 1 (c)): On the back side, the silicon substrate 1 which is under the hole of the aluminum electrode 7 is directly soldered with a strip wire 9 and the aluminum electrode 7 outside the hole is directly soldered. The words on the surface are the same as ABS Technology-1. Therefore: 1. Strong adhesion of the strip-shaped wire on the back; 2. Reduction of conventional silver; 3. Good electrical characteristics.

先前技術(第12圖):在背面的話係在鋁電極7上鍛燒銀並在鋁電極7鉛焊接帶狀導線9,或者在鋁電極7的孔部分鍛燒銀,與矽基板1連接並在該銀鉛焊接帶狀導線9。在表面的話係經由指狀電極3、銀匯流排電極鉛焊接帶狀導線。因此:1.需要表面的銀匯流排電極;2.在背面需要銀電極。 Prior technology (Figure 12): on the back side, the aluminum electrode 7 is used for forging silver and lead soldering the ribbon wire 9 for lead, or the aluminum electrode 7 is used for forging silver and is connected to the silicon substrate 1 and The lead wire 9 is soldered to the silver lead. On the surface, the lead wire is lead-bonded via the finger electrode 3 and the silver bus electrode. Therefore: 1. A silver bus electrode on the surface is needed; 2. A silver electrode is required on the back.

第9圖係顯示本發明之說明圖(之3)。 Fig. 9 is an explanatory diagram (No. 3) showing the present invention.

在第9圖中,ABS技術-0、ABS技術-1、ABS技術-2係分別對應於第1圖的ABS技術-0、ABS技術-1、ABS技術-2。 In FIG. 9, ABS technology-0, ABS technology-1, and ABS technology-2 correspond to ABS technology-0, ABS technology-1, and ABS technology-2 in FIG. 1, respectively.

結晶係多晶、單晶之矽基板1的種類。 Types of crystalline polycrystalline and single crystal silicon substrate 1.

電性特性中的V(v)係後述第10圖的開放電壓。 V (v) in electrical characteristics is an open voltage of FIG. 10 described later.

電性特性中的I(mA/cm2)係後述第10圖的短路電流。 I (mA / cm2) in the electrical characteristics is a short-circuit current of FIG. 10 described later.

電性特性中的FF係後述第10圖的最佳動作點(可獲得最大電力的點)。 The FF in the electrical characteristics is the optimum operating point (the point where the maximum power can be obtained) of FIG. 10 described later.

電性特性中的EFF係下述的(式1)所表示的轉換效率。 EFF in electrical characteristics is a conversion efficiency represented by the following (Equation 1).

EFF=Jsc×Voc×FF......(式1) EFF = Jsc × Voc × FF. . . . . . (Formula 1)

Ref係用來進行相對比較的標準值(習知例的標準值),在此係設定100(電性特性)、1(密接力、銀)、0(製造步驟數)。 Ref is a standard value for comparison (standard value of a conventional example). Here, 100 (electrical characteristics), 1 (adhesive force, silver), and 0 (number of manufacturing steps) are set here.

由以上第9圖所圖示的實驗結果得知: From the experimental results illustrated in Figure 9 above:

‧電性特性中的V(v)(開放電壓)在本發明中皆在100.7至101.7,為稍大的電壓值。 ‧V (v) (open voltage) in the electrical characteristics is 100.7 to 101.7 in the present invention, which is a slightly larger voltage value.

‧短路電流I係在100.0至101.5的範圍,與Ref相比具有充分的性能。 ‧Short-circuit current I is in the range of 100.0 to 101.5, which has sufficient performance compared to Ref.

‧最佳動作點FF、ABS技術與Ref相比皆顯示優越性。 ‧Best operating point FF, ABS technology shows superiority compared to Ref.

‧在ABS技術中,轉換效率EFF與Ref相比較顯示優越性。 ‧ In ABS technology, the conversion efficiency EFF shows superiority compared to Ref.

‧帶狀導線對於矽基板1的密接力係在表面成為2,為標準值的兩倍,顯示非常牢固地固定,背面亦大致相同,在ABS技術-2中直接焊接在矽基板1的情況為兩倍,顯示牢固地固定。 ‧The adhesion force of the ribbon wire to the silicon substrate 1 is 2 on the surface, which is twice the standard value. It shows that it is very firmly fixed, and the back is also approximately the same. The case of direct soldering to the silicon substrate 1 in ABS technology-2 is Twice, the display is firmly fixed.

‧表面的銀的使用量在本發明中係在0.1至0.5的範圍內,可減少一半以下。關於背面,本發明可將 銀的使用量減少100%。 • The amount of silver on the surface is in the range of 0.1 to 0.5 in the present invention, which can be reduced by less than half. Regarding the back side, the present invention can reduce the amount of silver used by 100%.

‧製造步驟數係在ABS技術-1、ABS技術-2(第1圖(b)、第1圖(c))可分別減少兩個步驟(不需要在表面形成銀的匯流排電極(步驟數-1),以及不需要在背面形成銀電極(步驟數-1)共計減少兩個步驟)。 ‧The number of manufacturing steps is based on ABS technology-1 and ABS technology-2 (Figure 1 (b), Figure 1 (c)), which can be reduced by two steps (no need to form a silver bus electrode on the surface (number of steps) -1), and it is not necessary to form a silver electrode on the back surface (the number of steps -1) is reduced by two steps in total).

第10圖係顯示本發明之說明圖(之4)。此圖係為使第9圖的太陽能電池的電性特性易於了解而進行說明。橫軸係表示從太陽能電池取出的電壓,縱軸係表示當時的電流。 Fig. 10 is an explanatory diagram (No. 4) showing the present invention. This figure is explained to make it easy to understand the electrical characteristics of the solar cell of FIG. 9. The horizontal axis represents the voltage taken from the solar cell, and the vertical axis represents the current at that time.

在第10圖中,將開放電壓稱為Voc(第9圖的V)。 In FIG. 10, the open voltage is referred to as Voc (V in FIG. 9).

將短路電流稱為Jsc(第9圖的I),最佳動作點FF係從太陽能電池取出之電壓、電流的特性曲線中乘積最大之圖示位置的值。 The short-circuit current is referred to as Jsc (I in FIG. 9), and the optimum operating point FF is the value at the position on the graph where the product of the voltage and current characteristic curves taken from the solar cell is the largest.

轉換效率係以式Jsc×Voc×FF所求得的值。 The conversion efficiency is a value obtained by the formula Jsc × Voc × FF.

第11圖係顯示本發明之說明圖(之5)。 Fig. 11 is an explanatory diagram (No. 5) showing the present invention.

第11圖(a)係顯示在第1圖(a)的ABS技術-0的匯流排電極使用ABS玻璃之太陽能電池的表面、背面的照片之一例。 Fig. 11 (a) is an example of a photograph of a front surface and a back surface of a solar cell using ABS glass for the bus electrode of ABS technology-0 in Fig. 1 (a).

第11圖(a-1)係顯示在表面的橫向形成指狀電極3,於其上形成使用ABS玻璃之匯流排電極的太陽能電池的照片之例。ABS玻璃係僅形成在無指狀電極3的部分,並顯示在該指狀電極3和以ABS玻璃所形成之匯流排電極的部分(為非導電性,可使用本發明的焊料對帶狀導 線進行超音波焊接)焊接帶狀導線之狀態的照片。 Fig. 11 (a-1) shows an example of a photograph of a solar cell in which finger electrodes 3 are formed on the surface in the lateral direction and a bus electrode using ABS glass is formed thereon. ABS glass is formed only on the part without finger electrode 3, and it is displayed on the finger electrode 3 and the part of the bus electrode formed of ABS glass (it is non-conductive, and the ribbon wire can be used with the solder of the present invention) Ultrasonic welding) Photograph of the state where the ribbon wire was welded.

第11圖(a-2)係顯示在第11圖(a-1)的整個背面形成鋁電極之狀態的照片的一例。 Fig. 11 (a-2) is an example of a photograph showing a state where an aluminum electrode is formed on the entire back surface of Fig. 11 (a-1).

第11圖(b)係顯示第1圖(c)的ABS技術-2的太陽能電池的表面、背面的照片之一例。 FIG. 11 (b) is an example of a photograph showing a front surface and a back surface of the solar cell of the ABS technology-2 of FIG. 1 (c).

第11圖(b-1)係顯示在表面的橫向將焊接帶狀導線之部分的寬度擴大以做為指狀電極3並形成該指狀電極3(參照第4圖)之狀態的照片之一例。在此明顯看出焊接縱向帶狀導線之部分的指狀電極3的寬度變寬。 Fig. 11 (b-1) is an example of a photograph showing a state in which the width of a portion of a soldered strip wire is enlarged in the lateral direction of the surface as the finger electrode 3 and the finger electrode 3 (see Fig. 4) is formed. . It is apparent here that the width of the finger electrode 3 of the portion where the longitudinal strip-shaped wire is welded is widened.

第11圖(b-2)係顯示在背面的縱向,在將帶狀導線直接焊接至基底的矽基板1之縱向形成開孔的鋁電極7之一例。 FIG. 11 (b-2) shows an example of an aluminum electrode 7 in which a hole is formed in the longitudinal direction of the silicon substrate 1 in which a strip-shaped wire is directly soldered to the base in the longitudinal direction of the back surface.

第11圖(b-3)係顯示從第11圖(b-1)及第11圖(b-2)之上方焊接帶狀導線之後的照片之一例。 Fig. 11 (b-3) shows an example of a photograph after the ribbon wire is soldered from above Fig. 11 (b-1) and Fig. 11 (b-2).

第11圖(b-3)的左側係顯示在第11圖(b-1)表面的指狀電極的寬度變寬的部分縱向焊接帶狀導線之後的照片之一例。 The left side of FIG. 11 (b-3) shows an example of a photograph after a strip-shaped wire is longitudinally welded at a part where the width of the finger electrode on the surface of FIG. 11 (b-1) is widened.

第11圖(b-3)的右側係顯示在第11圖(b-2)背面的鋁電極的縱向,在未具有鋁的孔(長孔)縱向焊接帶狀導線之後的照片之一例。 The right side of FIG. 11 (b-3) is an example of a photograph showing the longitudinal direction of the aluminum electrode on the back of FIG. 11 (b-2) after the strip-shaped wire is longitudinally welded to the hole (long hole) without aluminum.

Claims (11)

一種太陽能電池,係在基板上形成照射光等時會產生高電子濃度的區域,並在該區域上形成光等會穿透的絕緣膜,在該絕緣膜上形成做為從前述區域取出電子之取出口的指狀電極,經由該指狀電極將前述電子取出至外部,其中,朝與從前述絕緣膜上所形成的前述區域取出電子的指狀電極垂直的方向以一定的寬度b遍及具有前述指狀電極的部分及未具有前述指狀電極之前述絕緣膜的部分使用焊料焊接取出線,且藉由取出線將來自前述指狀電極的電子取出至外部並使該取出線固定在前述基板。     A solar cell is formed on a substrate by forming a region having a high electron concentration when irradiated with light and the like, and forming an insulating film that penetrates with light and the like on the region. An insulating film is formed on the insulating film to take out electrons from the aforementioned region. A finger electrode with an outlet is used to take out the electrons to the outside through the finger electrode, and the finger electrode having a predetermined width b is provided across the electrode electrode with a certain width b in a direction perpendicular to the finger electrode that extracts electrons from the region formed on the insulating film. A portion of the finger electrode and a portion of the insulating film that does not include the finger electrode are soldered to take out a wire, and the electrons from the finger electrode are taken out to the outside by the take-out wire, and the take-out wire is fixed to the substrate.     如申請專利範圍第1項所述之太陽能電池,其中,在朝與前述指狀電極垂直的方向以一定的寬度b使用焊料焊接取出線的情況時,係使前述指狀電極之要焊接之部分的寬度c變寬,或是預先形成為前述一定的寬度c。     The solar cell according to item 1 of the scope of patent application, wherein when the wire is taken out with a certain width b in a direction perpendicular to the finger electrode, the portion of the finger electrode to be soldered is made. The width c is widened, or is formed in advance to the aforementioned predetermined width c.     如申請專利範圍第1項至第2項中任一項所述之太陽能電池,其中,在朝與前述指狀電極垂直的方向以一定的寬度b使用焊料焊接取出線的情況時,係將指狀電極之擴大部分的寬度c與相鄰之擴大部分的寬度c的間隔a設為比烙鐵前端的長度小,以避免烙鐵前端直接接觸於前述絕緣膜而使前述絕緣膜劣化。     The solar cell according to any one of claims 1 to 2 of the scope of patent application, wherein when the wire is taken out by soldering with a certain width b in a direction perpendicular to the aforementioned finger electrode, it refers to The interval a between the width c of the enlarged portion of the shaped electrode and the width c of the adjacent enlarged portion is set to be shorter than the length of the tip of the soldering iron to prevent the tip of the soldering iron from directly contacting the insulating film and deteriorating the insulating film.     如申請專利範圍第1項至第3項中任一項所述之太陽能電池,其中,前述焊接係超音波焊接。     The solar cell according to any one of claims 1 to 3, wherein the welding is ultrasonic welding.     如申請專利範圍第4項所述之太陽能電池,其中,在前述超音波焊接使用之超音波輸出強度係設為可焊接前述取出線之程度以上,且為比前述絕緣膜會被破壞而導致性能劣化之程度還小之輸出。     The solar cell according to item 4 of the scope of the patent application, wherein the ultrasonic output intensity used in the aforementioned ultrasonic welding is set to a level at which the aforementioned take-out line can be welded, and the performance is worse than that of the aforementioned insulating film which is damaged The degree of deterioration is small.     如申請專利範圍第1項至第5項中任一項所述之太陽能電池,其中,在前述取出線要藉由前述焊接而被焊接的部分預先進行無超音波預備焊接,或依照需要進行超音波預備焊接。     The solar cell according to any one of claims 1 to 5 in the scope of application for a patent, wherein, in the part of the aforementioned take-out line to be welded by the aforementioned welding, ultrasonic-free preliminary welding is performed in advance, or ultrasonography is performed as required. Sonic ready for welding.     如申請專利範圍第6項所述之太陽能電池,其中,在前述取出線要被焊接的部分進行前述預備焊接的情況時,係以無超音波之方式焊接前述取出線。     The solar cell according to item 6 of the scope of application for a patent, wherein, in a case where the preliminary welding is performed on a part to be welded of the take-out line, the take-out line is welded in an ultrasonic-free manner.     如申請專利範圍第1項至第7項中任一項所述之太陽能電池,其中,要藉由前述焊接進行焊接的前述取出線係預先進行預備焊接。     The solar cell according to any one of claims 1 to 7 in the scope of the patent application, wherein the take-out wire to be welded by the aforementioned welding is preliminarily welded.     如申請專利範圍第1項至第8項中任一項所述之太陽能電池,其中,前述取出線的焊接係在使要被焊接的部分的溫度成為焊料會熔化的溫度以下且室溫以上之預備加熱的狀態下,進行焊接。     The solar cell according to any one of claims 1 to 8 in the scope of patent application, wherein the welding of the take-out line is performed so that the temperature of the portion to be welded is lower than the temperature at which the solder will melt and higher than room temperature. Welding is performed in a preheated state.     如申請專利範圍第1項至第9項中任一項所述之太陽能電池,其中,前述焊料係包含錫或在錫含有鋅、銅、銀之一種以上。     The solar cell according to any one of claims 1 to 9 in the scope of patent application, wherein the solder contains tin or tin contains one or more of zinc, copper, and silver.     一種太陽能電池的製造方法,該太陽能電池係在基板上形成照射光等時會產生高電子濃度的區域,並在該區域上形成光等會穿透的絕緣膜,在該絕緣膜上形成做為從 前述區域取出電子之取出口的指狀電極,經由該指狀電極將前述電子取出至外部,該太陽能電池之製造方法係在與從前述絕緣膜上所形成的前述區域取出電子的指狀電極垂直的方向以一定的寬度b遍及具有前述指狀電極的部分及未具有前述指狀電極之前述絕緣膜的部分使用焊料焊接取出線,藉由取出線將來自前述指狀電極的電子取出至外部並使該取出線固定在前述基板。     A method for manufacturing a solar cell. The solar cell is formed on a substrate with a region having a high electron concentration when irradiated with light and the like, and an insulating film that penetrates with light and the like is formed on the region, and is formed on the insulating film as A finger electrode for taking out an electron from the aforementioned region, and taking the aforementioned electrons to the outside via the finger electrode. The manufacturing method of the solar cell is a finger electrode for extracting electrons from the aforementioned region formed on the insulating film. The vertical direction covers a portion having the aforementioned finger electrode and a portion having the aforementioned insulating film without the aforementioned finger electrode with a certain width b. The wire is taken out by soldering, and the electrons from the aforementioned finger electrode are taken out to the outside by the extraction line. The extraction line is fixed to the substrate.    
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