TW201836038A - Substrate processing device - Google Patents

Abstract

A substrate processing device 1 comprises a housing 11, a lid 13, a pressing member 6, a fastener 7, and a manual adjustment part 8. The housing 11 has an opening in the upper surface thereof. The lid 13 opens and closes the opening of the housing 11 by attaching to and detaching from the housing 11. The pressing member 6 has a first end part 21 and a second end part 22. The pressing member 6 presses the lid 13 against the housing 11. The fastener 7 contacts the first end part 21 of the pressing member 6, and prohibits the first end part 21 from moving upward. The manual adjustment part 8 adjusts the height position of the second end part 22 of the pressing member 6 by a user operation.

Description

Substrate processing device

The present invention relates to a substrate processing apparatus for processing a substrate. The substrate is a semiconductor wafer, a photomask substrate, a liquid crystal display substrate, a plasma display substrate, an organic electroluminescence (EL) substrate, and a field emission display. (Field Emission Display, FED) substrate, substrate for optical display, substrate for disk, substrate for optical disk, substrate for optical disk, substrate for solar cell, and the like.

Patent Document 1 discloses a substrate processing apparatus that heat-treats a substrate. The substrate processing apparatus includes a plate, a lid, and a lid lifting mechanism. The substrate is placed on a board. The board heats the substrate on the board. The space above the board is the processing space for processing the substrate. The cover opens and closes an opening above the processing space (hereinafter referred to as an "upper opening"). The lid lifting mechanism moves the lid to the upper position and the lower position. When the lid is in the upper position, the upper opening is open. That is, the processing space is open. When the lid is in the lower position, the upper opening is closed. That is, the processing space is sealed. The control unit controls the lid lifting mechanism.

The order in which the substrate is carried into the processing space is as follows. The lid lifting mechanism moves the lid to the upper position according to the control of the control unit. Thereby, the upper opening is open. The substrate is lowered from above the upper opening in a substantially horizontal posture. Thereby, the substrate enters the processing space through the upper opening. The substrate is placed on a board. Thereafter, the lid elevating mechanism moves the lid to the lower position in accordance with the control of the control unit. Thereby, the upper opening is closed.

The order in which the substrate is carried out of the processing space is as follows. The lid lifting mechanism moves the lid to the upper position according to the control of the control unit. Thereby, the upper opening is open. The substrate is separated from the panel and moved upward in a substantially horizontal posture. Thereby, the substrate is sent out from the processing space through the upper opening.

In this manner, the upper opening corresponds to a transfer port for the substrate to enter the processing space and be sent out from the processing space. [Prior Art Document] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2014-22570

[Problems to be solved by the invention]

In the substrate processing apparatus of the prior art, the area of the transfer port is relatively large. Therefore, it is sometimes difficult to ensure the airtightness of the processing space.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a substrate processing apparatus capable of improving airtightness of a processing container. [Means for solving the problem]

The inventors of the present invention attempted to change the arrangement of the transfer port of the processing container. Specifically, the inventors of the present invention have examined a processing container having a transfer port on the side surface and no opening on the upper surface. In this case, the substrate passes through the transfer port by moving in a substantially horizontal direction in a substantially horizontal posture. Therefore, even if the area of the transfer port is small, the substrate can pass through the transfer port. Therefore, the airtightness of the processing container can be improved by reducing the area of the transfer port.

However, the inventors have found that the processing container has a new problem. That is, in the case of the processing container, since the transfer port is small, maintenance of the processing container is difficult.

Therefore, the inventors of the present invention have examined a processing container having a transfer port on the side surface and an opening on the upper surface (hereinafter, referred to as "upper opening" as appropriate). Specifically, the processing container includes a housing, a shutter, and a lid. The shielding plate opens and closes the conveying port. The lid portion opens and closes the upper opening.

Further, the inventors of the present invention have considered that the cover portion is fastened to the frame by a plurality of bolts. The cover portion is firmly adhered to the frame by the bolt. Therefore, the airtightness of the processing container can be appropriately maintained. Furthermore, the attachment and detachment of the bolt and the attachment and detachment of the cover to the frame are performed by the user's manual work.

However, the inventors have found that the processing container has a new problem. That is, since the number of the bolts that fasten the lid portion to the frame body is plural, the work of attaching and detaching the bolt becomes complicated. Further, when the working space around the processing container is narrow, the work of attaching and detaching the bolt becomes difficult. Further, when the processing container is heated to a high temperature, there is a possibility that the bolt is burned or adhered. If the bolt is burned or adhered, the bolt cannot be easily removed. As a result of these results, the lid portion cannot be easily attached and detached to the frame. Therefore, maintenance cannot be easily performed.

Based on these findings, the inventors of the present invention further explored a substrate processing apparatus capable of improving the airtightness of the processing container and facilitating maintenance of the processing container.

The present invention has been derived from such trials, insights, and discussions, and has the following constitution. That is, the present invention is a substrate processing apparatus including: a frame having an opening on an upper surface thereof; a lid portion opening and closing the opening by being attached to the frame; and a pressing member having The first end portion and the second end portion press the lid portion on the frame body; the stopper contacts the first end portion of the pressing member, and prohibits the first end portion from being upward And a manual adjustment unit that adjusts a height position of the second end portion of the pressing member by a user operation.

The substrate processing apparatus includes a pressing member, a stopper, and a manual adjustment unit. Therefore, the height position of the second end portion of the pressing member can be lowered in a state where the first end portion of the pressing member is prohibited from moving upward. Thereby, the pressing member can press the lid portion appropriately for the frame body. Thereby, the airtightness of the processing container can be improved.

Further, in a state where the first end portion of the pressing member is prohibited from moving upward, the height position of the second end portion of the pressing member can be increased. Thereby, the pressing of the lid member by the pressing member can be released. Thereby, the lid portion can be easily separated from the frame body. That is, the opening can be easily opened. Thereby, the maintenance of the processing container can be easily performed.

In the substrate processing apparatus, preferably, the first end portion of the pressing member is located on one side of the lid portion in a plan view, and the second end portion of the pressing member is located in a plan view. The other side opposite to the side of the cover. The cover portion is disposed between the first end portion and the second end portion in plan view. Therefore, by adjusting the height position of the second end portion of the pressing member by the manual adjustment portion, the force by which the pressing member presses the lid portion can be appropriately changed.

In the substrate processing apparatus, preferably, the frame body has a substantially rectangular shape in a plan view, and the cover portion is disposed substantially at a center of the frame body in a plan view, and the first member of the pressing member The end portion and the stopper are disposed at a first corner portion of the frame in a plan view, and the second end portion of the pressing member and the manual adjustment portion are disposed in the first portion in a plan view The second corner of the frame facing the corner. Thereby, the first end portion of the pressing member and the stopper can be efficiently arranged by the space of the first corner portion. Further, the second end portion of the pressing member and the manual adjustment portion can be efficiently arranged by the space of the second corner portion. Thereby, the installation area of the substrate processing apparatus can be reduced.

In the substrate processing apparatus, preferably, the substrate processing apparatus includes an outer wall plate that is detachably disposed on a side of the housing, and the manual adjustment unit is disposed closer to the stopper than the substrate The position of the outer wall. The user can easily operate the manual adjustment portion in a state where the lower outer wall panel has been removed. Thereby, maintenance of the processing container can be performed more easily.

In the substrate processing apparatus, preferably, the manual adjustment unit is attached to the housing, and the second end of the pressing member is moved up and down with respect to the housing. Since the manual adjustment unit is attached to the casing, the manual adjustment unit can be appropriately provided. Further, since the manual adjustment portion vertically moves the second end portion of the pressing member with respect to the casing, the manual adjustment portion can appropriately adjust the height position of the second end portion of the pressing member.

In the above substrate processing apparatus, preferably, the manual adjustment unit includes a screw, and the second end portion of the pressing member moves up and down in response to rotation of the screw. The height position of the second end portion of the pressing member can be easily adjusted only by the user turning the screw.

In the substrate processing apparatus, preferably, the screw is a screw bolt. The user can turn the wheel bolt without using a tool. Thereby, the user can more easily adjust the height position of the second end portion of the pressing member.

In the substrate processing apparatus, it is preferable that the pressing member has a ring shape in a plan view and has an outer frame that overlaps the lid portion in a plan view. Since the pressing member includes the outer frame, the pressing member can press the cover portion in an effective manner on the frame.

In the substrate processing apparatus, preferably, the outline of the outer frame has a substantially polygonal shape. The outline of the outer frame has a substantially polygonal shape, so that the deflection or deformation of the outer frame can be effectively prevented. Thereby, the pressing member can press the lid portion relatively uniformly.

In the substrate processing apparatus, preferably, the pressing member has a reinforcing member that is disposed inside the outer frame in a plan view and that both ends of the reinforcing member are joined to the outer frame. The pressing member has the reinforcing member, so that the deflection or deformation of the outer frame can be prevented more effectively. Thereby, the pressing member can press the cover portion more uniformly.

In the substrate processing apparatus, preferably, the pressing member has three or more seat portions, and the seat portion is directly or indirectly connected to the outer frame and is in contact with the cover portion. Since the pressing member has a seat portion, the pressing member can more appropriately press the lid portion.

In the substrate processing apparatus, preferably, the pressing member has an elastic member, and the elastic member is provided between the outer frame and the seat. Since the pressing member has the elastic member, each of the seat portions can press the cover portion more suitably.

In the substrate processing apparatus, preferably, the pressing member is separable from the stopper and the manual adjustment portion. In a state in which the pressing member has been separated from the stopper and the manual adjustment portion, the lid portion can be easily attached and detached to the frame. Further, in a state where the pressing member has been separated from the stopper and the manual adjustment portion, maintenance of the processing container can be performed more easily.

In the substrate processing apparatus, preferably, the stopper is fixed to the frame. The stopper is fixed to the frame, so that the stopper can be appropriately provided.

In the substrate processing apparatus, preferably, the stopper includes a shaft member extending in a substantially horizontal direction, and the pressing member is rotatable around the shaft member. Since the pressing member is rotatable about the substantially horizontal shaft member, the manual adjustment portion can appropriately adjust the height position of the second end portion of the pressing member.

In the substrate processing apparatus, it is preferable that the pressing member is in contact with the lid portion in a state where the pressing member is in a substantially horizontal posture. Thereby, the pressing member can press the lid portion in a state where the pressing member is in a substantially horizontal posture. Therefore, the pressing member can press the cover portion more uniformly.

In the substrate processing apparatus, it is preferable that a horizontal direction from the shaft member toward the second end portion is a first direction when viewed from a direction of an axis of the shaft member, and the stopper It is prohibited that the pressing member moves in the first direction with respect to the shaft member in a state where the pressing member is in a substantially horizontal posture, and the stopper allows the pressing member to be inclined upward toward the first direction. The pressing member moves in the first direction with respect to the shaft member. The pressing member can press the lid portion in a state where the pressing member is in a substantially horizontal posture. In a state where the pressing member can press the lid portion, the pressing member is prohibited from moving in the first direction. Thereby, the pressing member can press the lid portion more appropriately. In a state where the pressing member is inclined upward in the first direction, the pressing member does not press the lid portion. The pressing member is allowed to move in the first direction in a state where the pressing member does not press the lid portion. Thereby, the pressing member can be easily separated from the stopper.

In the substrate processing apparatus, preferably, a portion of the shaft member located higher than an imaginary horizontal plane passing through the axial center of the shaft member is referred to as an upper portion of the shaft member, A portion of the shaft member other than the upper portion serves as a lower portion of the shaft member, and the shaft member is closer to the second end portion than a virtual vertical plane passing through the axial center of the shaft member. a portion of the shaft member is a surface portion of the shaft member, and a portion of the shaft member other than the surface portion is a back portion of the shaft member, and the first member is in a substantially horizontal posture. The end portion is in contact with the common portion of the back surface portion and the lower portion of the shaft member, and is in contact with the common portion of the surface portion and the lower portion of the shaft member, wherein the pressing member faces the The first end portion is in contact with only the surface portion of the shaft member in a state of being inclined in one direction and upward. In a state where the pressing member is in a substantially horizontal posture, the first end portion is in contact with the common portion of the back surface portion and the lower portion of the shaft member. Therefore, in a state where the pressing member presses the lid portion, the stopper can appropriately prohibit the pressing member from moving in the first direction. In a state where the pressing member is in a substantially horizontal posture, the first end portion is in contact with the common portion of the surface portion and the lower portion of the shaft member. Therefore, in a state where the pressing member presses the lid portion, the stopper can appropriately prohibit the pressing member from moving in a direction opposite to the first direction. In a state where the pressing member is inclined upward in the first direction, the first end portion is in contact only with the surface portion of the shaft member. Therefore, in a state where the pressing member does not press the lid portion, the stopper can appropriately allow the pressing member to move in the first direction. [Effects of the Invention]

According to the substrate processing apparatus of the present invention, the airtightness of the processing container can be improved.

A substrate processing apparatus according to an embodiment will be described with reference to the drawings.

1. Schematic configuration of a substrate processing apparatus Fig. 1 is a plan view showing a schematic configuration of a part of a substrate processing apparatus. 2 is a side view showing a schematic configuration of a part of a substrate processing apparatus.

In FIG. 1 and FIG. 2, the front-back direction X, the width direction Y, and the up-down direction Z are shown. The front-rear direction X, the width direction Y, and the vertical direction Z are orthogonal to each other. The front-rear direction X and the width direction Y are horizontal. One side of the front-rear direction X is referred to as "front", and the other side of the front-rear direction X is referred to as "rear". One side in the width direction Y is referred to as "right side", and the other side in the width direction Y is referred to as "left side". In the case where the front, the rear, the right, and the left are not distinguished, it is called "horizontal direction" or simply "side". One side of the vertical direction Z is referred to as "upper side", and the other side of the vertical direction Z is referred to as "lower side".

The substrate processing apparatus 1 of the present embodiment processes a substrate (for example, a semiconductor wafer) W. The processing performed by the substrate processing apparatus 1 is heat treatment. The heat treatment includes a process of heating the substrate W and a process of cooling the substrate W.

The substrate processing apparatus 1 includes a plurality of processing units 2a, processing units 2b, and processing units 2c. The processing unit 2b is disposed to the right of the processing unit 2a. The processing unit 2c is disposed below the processing unit 2a. When the processing unit 2a, the processing unit 2b, and the processing unit 2c are not distinguished, it is referred to as "processing unit 2".

The processing unit 2 includes a transport mechanism 3 and a processing container 4. The processing container 4 is adjacent to the transport mechanism 3. The processing container 4 is disposed behind the conveying mechanism 3. The transport mechanism 3 holds one substrate W in a substantially horizontal posture. The transport mechanism 3 transports the held substrate W in a substantially horizontal direction. Specifically, the transport mechanism 3 transports the held substrate W in the substantially front-rear direction X. The transport mechanism 3 carries the substrate W into the processing container 4. The transport mechanism 3 carries the substrate W out of the processing container 4. The processing container 4 houses a substrate W. The processing container 4 heat-treats the substrate W therein.

The processing container 4 includes a housing 11 , a shutter 12 , and a lid portion 13 . The casing 11 has a substantially rectangular shape in plan view. The shielding plate 12 is attached to the front portion of the casing 11. The lid portion 13 is attached to the upper portion of the casing 11. The lid portion 13 is disposed substantially at the center of the casing 11 in plan view.

The processing unit 2 is provided with an exhaust duct 72. The exhaust duct 72 is attached to the rear of the casing 11.

The processing unit 2 is provided with a pressing member 6. The pressing member 6 presses the lid portion 13 on the frame body 11. The pressing member 6 is disposed above the lid portion 13 . At least a portion of the pressing member 6 is in contact with the upper surface of the lid portion 13. The pressing member 6 applies, for example, a downward force to the lid portion 13.

The processing unit 2 includes a stopper 7 and a manual adjustment unit 8. The pressing member 6 has a first end portion 21 and a second end portion 22 . The stopper 7 is in contact with the first end portion 21. The stopper 7 prohibits the first end portion 21 from moving upward. The manual adjustment unit 8 is in contact with the second end portion 22. The manual adjustment unit 8 adjusts the height position of the second end portion 22. The manual adjustment unit 8 is operated by the user. Specifically, the user manually operates the manual adjustment unit 8. The manual adjustment unit 8 adjusts the height position of the second end portion 22 in accordance with the user's operation.

The substrate processing apparatus 1 includes a plurality of outer wall panels 9a, an outer wall panel 9b, and an outer wall panel 9c. The outer wall panel 9a, the outer wall panel 9b, and the outer wall panel 9c are disposed behind the processing unit 2a, the processing unit 2b, and the processing unit 2c, respectively. When the outer wall panel 9a, the outer wall panel 9b, and the outer wall panel 9c are not distinguished, it is called "outer wall panel 9".

The outer wall panel 9 is disposed on the side of the casing 11. Specifically, the outer wall panel 9 is disposed at the rear of the casing 11 .

The manual adjustment portion 8 is disposed closer to the outer wall panel 9 than the stopper 7 . The manual adjustment portion 8 is disposed closer to the outer wall panel 9 than the lid portion 13.

The outer wall panel 9 is detachable. Fig. 2 shows a state in which the outer wall panel 9a is detached. When the outer wall panel 9 is detached, the space behind the processing container 4 is opened. Therefore, the user can perform maintenance on the processing container 4 from the position behind the processing container 4. For example, the user can easily operate the manual adjustment section 8 of the processing unit 2a.

The substrate processing apparatus 1 includes a plurality of partition walls 10a, a partition wall 10b, and a partition wall 10c. The partition wall 10a is disposed on the side of the processing unit 2. The partition wall 10b is disposed in front of the processing unit 2. The partition wall 10c is disposed above and below the processing unit 2. When the partition wall 10a, the partition wall 10b, and the partition wall 10c are not partitioned, it is called "partition wall 10".

The outer wall panel 9 and the partition wall 10 define a plurality of installation spaces for arranging the processing unit 2. The processing unit 2 is disposed in each of the setting spaces.

As is clear from FIGS. 1 and 2, the transport mechanism 3 is disposed in front of the processing container 4. Therefore, the space in front of the processing container 4 is narrow. Thereby, it is difficult for the user to enter the space in front of the processing container 4. Below the processing container 4, a device (not shown) associated with the processing container 4 is disposed. The device (not shown) is, for example, a pin drive mechanism or a pipe to be described later. Further, the partition wall 10 is disposed on the right, left, above, and below the processing container 4. Further, other processing containers 4 are disposed on the right, left, above, and below the processing container 4. Therefore, the space on the right, left, above, and below the processing container 4 is also narrow. Thereby, it is difficult for the user to enter the space on the right, left, above, and below the processing container 4. Therefore, it is difficult for the user to perform maintenance on the processing container 4 from the positions of the front, the right, the left, the upper, and the lower side of the processing container 4.

2. Related Structure of Processing Container 4 and Processing Container 4 Hereinafter, the related configuration of the processing container 4 and the processing container 4 will be described in detail.

2-1. Processing Container 4 and Heating Unit 31 FIG. 3 is a view showing a schematic configuration of a part of the substrate processing apparatus. 4 is an exploded perspective view of a portion of the processing container. Fig. 4 is a perspective view as seen from above.

The frame 11 has a flat substantially box shape. The housing 11 has a transfer port A (see FIG. 4). The transfer port A is formed on the front surface of the casing 11. The transfer port A is an opening through which the substrate W passes. Specifically, the conveyance port A is an opening for the conveyance mechanism 3 to carry the substrate W into the processing container 4 and carry out the substrate W from the processing container 4 . The transfer port A has a laterally long shape.

The shielding plate 12 opens and closes the transfer port A. The shielding plate 12 can be attached and detached to the front portion of the casing 11. The shielding plate 12 can be in close contact with the casing 11 via the sealing member 19 . The sealing member 19 is disposed between the frame 11 and the shielding plate 12 . The sealing member 19 is disposed around the transfer port A. The sealing member 19 is made of, for example, a synthetic resin. The sealing member 19 is, for example, an O-ring. When the shielding plate 12 is in close contact with the casing 11, the conveying port A is sealed. When the shielding plate 12 is detached from the casing 11, the conveying port A is opened.

The casing 11 has an opening B (refer to FIG. 4). The opening B is formed on the upper surface of the casing 11. The opening B has, for example, a substantially circular shape. The opening B is relatively large. For example, the area of the opening B is larger than the area of the transfer port A. The diameter of the opening B is larger than the diameter of the substrate W. The opening B is an example of the opening of the present invention.

The lid portion 13 opens and closes the opening B. The lid portion 13 can be attached to and detached from the upper portion of the casing 11. The opening B is opened and closed by the cover portion 13 being detached from the casing 11.

The cover portion 13 has a substantially horizontal plate shape. The lid portion 13 has a substantially circular shape in plan view. The upper surface 13a of the lid portion 13 is substantially flat. The upper surface 13a of the lid portion 13 is substantially horizontal.

The lid portion 13 can be in close contact with the casing 11 via the sealing member 19 . The sealing member 19 is disposed between the frame 11 and the lid portion 13 . The sealing member 19 is disposed around the opening B. The lid portion 13 is in close contact with the frame body 11 around the opening B. Specifically, the peripheral edge portion of the lid portion 13 is in close contact with the frame body 11. When the lid portion 13 is in close contact with the frame 11, the opening B is sealed. When the lid portion 13 is detached from the frame 11, the opening B is opened.

Furthermore, the processing unit 2 does not have a member for joining the frame 11 and the lid portion 13. The frame 11 and the lid portion 13 are not joined by a fastening member such as a bolt. The lid portion 13 is placed only on the frame 11. When the lid member 13 is pressed against the frame 11 by the pressing member 6, the lid portion 13 is in close contact with the frame body 11.

The processing container 4 includes a housing portion 14 and a bottom plate 15. The accommodating portion 14 is connected to the lower surface of the casing 11. The accommodating portion 14 has, for example, a substantially cylindrical shape. The inside of the accommodating portion 14 is opened to the inside of the casing 11. That is, the inside of the accommodating portion 14 communicates with the inside of the casing 11. The accommodating portion 14 extends downward from the lower surface of the casing 11. The lower end of the accommodating portion 14 is open. The bottom plate 15 is attached to the lower end of the housing portion 14. The bottom plate 15 is in close contact with the lower end of the accommodating portion 14 via the sealing member 19 . The sealing member 19 is disposed between the housing portion 14 and the bottom plate 15 . When the bottom plate 15 is in close contact with the accommodating portion 14, the lower end of the accommodating portion 14 is sealed.

The heat treatment apparatus 1 is provided with a heating unit 31. The heating unit 31 heats the substrate W. The heating unit 31 can heat the substrate W at a relatively high temperature. The heating unit 31 can heat the substrate W by, for example, 300 degrees or more. Further, the heating unit 31 adjusts the temperature at which the substrate W is heated.

The heating unit 31 is disposed in the processing container 4 . The heating unit 31 is placed on the bottom plate 15. The heating unit 31 is disposed inside the housing portion 14 . The heating unit 31 has a substantially disk shape. The outer diameter of the heating portion 31 is slightly smaller than the inner diameter of the housing portion 14. Thereby, the gap between the accommodating portion 14 and the heating portion 31 is sufficiently small.

The heating portion 31 has a substantially flat upper surface 31a. The upper surface 31a of the heating unit 31 is located at substantially the same height as the bottom surface 11b of the inside of the casing 11 (see Fig. 1).

The heating unit 31 includes, for example, a temperature adjustment unit and a plate (none of which is shown). The temperature adjustment unit generates heat. Further, the temperature adjustment unit adjusts the temperature at which the substrate W is heated. The temperature adjustment unit is, for example, a heater. The temperature adjustment unit is mounted on the board. The temperature adjustment unit is disposed, for example, on the upper portion of the plate or inside the plate. The substrate is placed on the substrate W. The board transfers the heat generated by the temperature adjustment portion to the substrate W on the board. The plate is made of, for example, metal.

The frame 11 has a side discharge port D. The side discharge port D is formed on the rear surface of the casing 11. The side discharge port D is an opening for discharging the gas in the processing container 4. The side discharge port D has a laterally long shape.

The exhaust duct 72 is in communication with the side discharge port D. The exhaust duct 72 is detachably attachable to the rear portion of the casing 11. The exhaust duct 72 can be in close contact with the casing 11 via the sealing member 19 . The sealing member 19 is disposed between the frame 11 and the exhaust duct 72. The sealing member 19 is disposed around the side discharge port D. The exhaust duct 72 is in close contact with the casing 11 around the side discharge port D. The casing 11 is connected to the exhaust duct 72 via the side discharge port D by the exhaust duct 72 being in close contact with the casing 11. The side discharge port D is opened by the exhaust duct 72 being detached from the casing 11.

2-2. The shutter driving mechanism 35 is referred to FIG. The heat treatment apparatus 1 is provided with a shutter driving mechanism 35. The shutter driving mechanism 35 disassembles and attaches the shutter 12 to the casing 11 by moving the shutter 12 . The shutter driving mechanism 35 is disposed outside the processing container 4. The shutter driving mechanism 35 includes, for example, an air cylinder.

2-3. Substrate Moving Mechanism 37 and Sealing Mechanism 41 The heat treatment apparatus 1 includes a substrate moving mechanism 37. The substrate moving mechanism 37 moves the substrate W across the heating position PH and the cooling position PC.

Fig. 3 shows the substrate W at the heating position PH in solid lines. Figure 3 shows the substrate W in the cooling position PC in broken lines. The heating position PH is a position at which the substrate W of the heating portion 31 is contacted or approached. Specifically, the heating position PH is the position of the substrate W placed on the heating portion 31. When the substrate W is at the heating position PH, the lower surface of the substrate W is in contact with or close to the upper surface 31a of the heating portion 31. The cooling position PC is a position away from the substrate W of the heating portion 31 as compared with the heating position PH. Specifically, the cooling position PC is a position above the heating position PH. When the substrate W is in the cooling position PC, the substrate W is not in contact with the heating portion 31. Further, both the heating position PH and the cooling position PC are positions of the substrate W in the processing container 4. When the substrate W is at any of the heating position PH and the cooling position PC, the substrate W is in a substantially horizontal posture.

The substrate moving mechanism 37 is provided with a plurality of (for example, three) support pins 38. The plurality of support pins 38 are in contact with the lower surface of the one substrate W. Thereby, the plurality of support pins 38 support the one substrate W. The support pin 38 is disposed across the inside and the outside of the processing container 4. That is, the support pin 38 has a front end portion located inside the processing container 4. The support pin 38 has a base end portion located outside (down) the processing container 4. The support pin 38 penetrates the bottom plate 15 via the opening 15a formed in the bottom plate 15. In the processing container 4, the support pin 38 is disposed in the support pin hole 32. The support pin hole 32 is a through hole formed inside the heating portion 31. The support pin hole 32 is open to the upper side of the heating portion 31.

The substrate moving mechanism 37 is provided with a support pin driving mechanism 39. The support pin drive mechanism 39 moves the support pin 38 up and down. The support pin drive mechanism 39 is disposed outside the processing container 4. The support pin drive mechanism 39 is coupled to the base end of the support pin 38. The substrate W is moved between the heating position PH and the cooling position PC by the vertical movement of the support pin 38. The support pin drive mechanism 39 includes, for example, a cylinder.

The heat treatment apparatus 1 is provided with a sealing mechanism 41. The sealing mechanism 41 allows the support pin 38 to move up and down and seal the opening 15a of the bottom plate 15. The sealing mechanism 41 is disposed outside (below) the processing container 4.

The sealing mechanism 41 is provided with one collecting portion 42. The collecting portion 42 has a space E inside thereof. The collecting portion 42 is in close contact with the bottom plate 15 via the sealing member 19 . The sealing member 19 is disposed between the bottom plate 15 and the collecting portion 42. The sealing member 19 is disposed around the opening 15a. The collecting portion 42 is in close contact with the bottom plate 15 around the opening 15a. Thereby, the processing container 4 is connected in communication with the collecting portion 42. The inside of the processing container 4 communicates with the space E of the collecting portion 42 via the opening 15a.

The sealing mechanism 41 is provided with a plurality of (for example, three) shaft seal portions 43. The shaft seal portion 43 has a tubular portion 44 and a sealing member 45. The tubular portion 44 has a cylindrical shape. The tubular portion 44 is in close contact with the collecting portion 42. The sealing member 45 is disposed inside the tubular portion 44. The sealing member 45 has a circular ring shape. The sealing member 45 has an opening at the center thereof. The sealing member 45 is in close contact with the inner circumferential surface of the tubular portion 44. The sealing member 45 is made of metal.

The collecting portion 42 and the tubular portion 44 accommodate a part of the support pin 38. In other words, the support pin 38 is disposed to penetrate the inside of the collecting portion 42 and the inside of the tubular portion 44. The support pin 38 is disposed to penetrate the opening of the sealing member 45. The sealing member 45 is in close contact with the outer peripheral surface of the support pin 38 so as to be slidable with the support pin 38. Even if the support pin 38 slides relative to the sealing member 45, the adhesion of the support pin 38 to the sealing member 45 is maintained.

The sealing member 45 divides the inside of the tubular portion 44 into two spaces F1 and F2. The space F1 is a space above the sealing member 45. The space F2 is a space below the sealing member 45. The space F1 and the space F2 are not in communication with each other.

The opening 15a and the space E communicate with the space F1. The opening 15a and the space E and the space F1 are separated from the space F2. The space F2 is opened to the outside of the processing container 4 and the sealing mechanism 41. Thereby, the opening 15a, the space E, and the space F1 are blocked from the outside air.

As described above, the processing container 4 is in close contact with the collecting portion 42 around the opening 15a, the collecting portion 42 is in close contact with the tubular portion 44, and the collecting portion 42 and the tubular portion 44 are housed in a part of the supporting pin 38. The seal member 45 is in close contact with the inner peripheral surface of the tubular portion 44, and is in close contact with the outer peripheral surface of the support pin 38 so as to be slidable with the support pin 38. Thereby, the opening 15a is sealed.

Here, when the assembly portion 42 and the tubular portion 44 are not distinguished, they are collectively referred to as "housing 46".

2-4. Upper Supply Unit 51 The processing unit 2 includes an upper supply unit 51. The upper supply unit 51 supplies a non-oxidizing gas into the processing container 4 . The upper supply portion 51 blows a non-oxidizing gas from a position higher than the cooling position PC. The non-oxidizing gas is, for example, an inert gas. The inert gas is, for example, nitrogen or argon.

The upper supply unit 51 includes a pipe 52, a supply port 53, an opening and closing valve 54, and a flow rate adjusting unit 55. One end of the pipe 52 is connected to the non-oxidizing gas supply source 69. The non-oxidizing gas supply source 69 supplies a non-oxidizing gas. The other end of the pipe 52 is connected to the supply port 53. The supply port 53 is attached to the lid portion 13. The supply cassette 53 is disposed at the center of the lid portion 13 in plan view. The supply port 53 communicates with the inside of the processing container 4. The opening and closing valve 54 and the flow rate adjusting unit 55 are provided on the pipe 52, respectively. The opening and closing valve 54 opens and closes the flow path in the pipe 52. The flow rate adjustment unit 55 adjusts the flow rate of the non-oxidizing gas flowing through the pipe 52. The flow rate adjustment unit 55 includes, for example, at least one of a needle valve or a mass flow meter.

The upper supply unit 51 includes a rectifying plate 56. The flow regulating plate 56 is disposed in the processing container 4. The rectifying plate 56 is disposed at the opening B. The flow regulating plate 56 is disposed below the lid portion 13 . The rectifying plate 56 is disposed above the cooling position PC. The rectifying plate 56 is supported by the lid portion 13. The rectifying plate 56 has a substantially horizontal plate shape. The rectifying plate 56 has a plurality of small holes 56a. The small hole 56a penetrates the rectifying plate 56 in the vertical direction.

Here, the space defined by the lid portion 13 and the rectifying plate 56 is referred to as "introduction chamber Sp1". The space defined by the housing 11, the shutter 12, the rectifying plate 56, and the heating unit 31 is referred to as "processing chamber Sp2". The introduction chamber Sp1 is located above the rectifying plate 56. The processing chamber Sp2 is located below the rectifying plate 56. The introduction chamber Sp1 and the processing chamber Sp2 communicate with each other via the small holes 56a. Further, the introduction chamber Sp1 and the processing chamber Sp2 are spaces in the processing container 4. The introduction chamber Sp1 and the processing chamber Sp2 correspond to a part of the inside of the processing container 4.

By opening the on-off valve 54, the non-oxidizing gas flows from the non-oxidizing gas supply source 69 into the introduction chamber Sp1 via the pipe 52 and the supply port 53. Further, the non-oxidizing gas flows from the introduction chamber Sp1 to the processing chamber Sp2 via the small holes 56a of the flow regulating plate 56. The small hole 56a blows a non-oxidizing gas downward. The flow rate adjustment unit 55 adjusts the supply amount of the non-oxidizing gas supplied to the processing container 4 via the supply port 53. By closing the opening and closing valve 54, the upper supply unit 51 stops the supply of the non-oxidizing gas. The supply port 53 is sealed by closing the opening and closing valve 54.

2-5. Lower Supply Unit 61 The processing unit 2 includes a lower supply unit 61. The lower supply unit 61 supplies a non-oxidizing gas into the processing container 4 . The lower supply portion 61 blows a non-oxidizing gas from a position lower than the cooling position PC.

The lower supply unit 61 includes a pipe 62, a weir 63, an opening and closing valve 64, and a flow rate adjusting unit 65. One end of the pipe 62 is connected to a non-oxidizing gas supply source 69. The other end of the pipe 62 is connected to the crucible 63. The crucible 63 is mounted to the bottom plate 15. The crucible 63 is in communication with the inside of the processing container 4. The opening and closing valve 64 and the flow rate adjusting unit 65 are provided on the pipe 62, respectively. The opening and closing valve 64 opens and closes the flow path in the pipe 62. The flow rate adjustment unit 65 adjusts the flow rate of the non-oxidizing gas flowing through the pipe 62. The flow rate adjustment unit 65 includes, for example, at least one of a needle valve and a mass flow meter.

The crucible 63 is connected in series to the gas circulation hole 34. The gas circulation hole 34 is a through hole formed inside the heating portion 31. The gas circulation hole 34 reaches the upper surface 31a of the heating portion 31. The gas circulation hole 34 is opened to the upper side of the heating unit 31.

By opening the opening and closing valve 64, the non-oxidizing gas flows into the processing container 4 from the non-oxidizing gas supply source 69 via the piping 62 and the crucible 63. Further, the non-oxidizing gas flows to the processing chamber Sp2 via the gas circulation hole 34. The gas circulation hole 34 blows the non-oxidizing gas upward. The flow rate adjustment unit 65 adjusts the supply amount of the non-oxidizing gas supplied to the processing container 4 via the crucible 63. By closing the opening and closing valve 64, the lower supply portion 61 stops the supply of the non-oxidizing gas. By closing the opening and closing valve 64, the crucible 63 is sealed.

2-6. Side discharge unit 71 The treatment unit 2 includes a side discharge unit 71. The side discharge portion 71 discharges the gas in the processing container 4 to the outside of the processing container 4. The side discharge portion 71 discharges the gas via the position of the side of the cooling position PC.

The side discharge unit 71 includes the exhaust duct 72. The exhaust duct 72 is hermetically connected to the side discharge port D. The side discharge unit 71 further includes an exhaust pipe 73, an opening and closing valve 74, and an exhaust mechanism 75. The exhaust pipe 73 has a first end that is connected and connected to the exhaust duct 72. The opening and closing valve 74 is provided on the exhaust pipe 73. The exhaust pipe 73 has a second end that is connected to the exhaust mechanism 75. The exhaust mechanism 75 draws in gas and discharges it. The exhaust mechanism 75 is capable of adjusting the amount of gas discharged. More specifically, the exhaust mechanism 75 can adjust the discharge amount of the gas by adjusting the flow rate of the gas or the suction pressure of the gas. The exhaust mechanism 75 is, for example, a vacuum pump, an exhaust blower, or an ejector.

When the opening and closing valve 74 is opened and the exhaust mechanism 75 is driven, the gas in the processing container 4 is discharged to the outside of the processing container 4 via the side discharge port D. Thereby, the gas in the processing chamber Sp2 is smoothly discharged. Further, the exhaust mechanism 75 adjusts the discharge amount of the gas discharged from the processing container 4 via the side discharge port D. When the driving of the exhaust mechanism 75 is stopped, the side discharge portion 71 stops the discharge of the gas. The side discharge port D is sealed by closing the opening and closing valve 74.

2-7. Lower discharge portion 81 The processing unit 2 includes a lower discharge portion 81. The lower discharge portion 81 discharges the gas in the sealed casing 46. The lower discharge portion 81 further discharges the gas in the processing container 4. The lower discharge portion 81 discharges the gas from the processing container 4 via a position lower than the cooling position PC.

The lower discharge portion 81 further includes a pipe 82, an exhaust port 83, an opening and closing valve 84, and an exhaust mechanism 85. One end of the pipe 82 is connected to the exhaust port 83. The exhaust port 83 is connected in series to the collecting portion 42. The exhaust port 83 communicates with the space E of the collecting portion 42. The opening and closing valve 84 is provided on the pipe 82. The opening and closing valve 84 opens and closes the flow path in the pipe 82. The exhaust mechanism 85 is connected in communication with the other end of the pipe 82. The exhaust mechanism 85 draws gas and discharges it. The exhaust mechanism 85 is capable of adjusting the amount of gas discharged. More specifically, the exhaust mechanism 85 can adjust the discharge amount of the gas by adjusting the flow rate of the gas or the suction pressure of the gas. The exhaust mechanism 85 is, for example, a vacuum pump, an exhaust blower, or an ejector.

When the opening and closing valve 84 is opened and the exhaust mechanism 85 is driven, the gas in the sealed casing 46 and the gas in the processing container 4 are discharged. Specifically, the gas in the space F1 flows to the space E. The gas in the processing container 4 flows to the space E via the support pin hole 32 and the opening 15a. The gas in the space E flows to the pipe 82 via the exhaust port 83. Thereby, the gas in the sealed casing 46 and the gas in the processing container 4 are discharged to the sealed casing 46 and the outside of the processing vessel 4. The exhaust mechanism 85 adjusts the discharge amount of the gas discharged from the processing container 4 via the exhaust port 83.

When it is assumed that dust is generated in the space F1 by the sliding of the support pin 38 and the sealing member 45, the dust flows into the exhaust port 83 through the space E from the space F1. That is, the dust in the space F1 is also discharged through the exhaust port 83. Therefore, it is possible to reliably prevent dust from entering the processing container 4. Further, in the opening 15a, the gas flows from the processing container 4 (the support pin hole 32) to the sealed casing 46 (space E). The flow of such gas properly prevents dust from flowing into the processing vessel 4 from the sealed casing 46. Thereby, dust can be prevented from entering the processing container 4 more reliably.

When the external air flows into the space F1 via the adhesion portion between the support pin 38 and the sealing member 45, the external air flows into the exhaust port 83 through the space E from the space F1. That is, the outside air in the space F1 is also discharged through the exhaust port 83. Therefore, it is possible to reliably prevent the outside air from entering the processing container 4. Further, in the opening 15a, the gas flows from the processing container 4 (the support pin hole 32) to the sealed casing 46 (space E). The flow of such gas properly prevents external air from flowing into the processing vessel 4 from the sealed casing 46. Thereby, it is possible to more reliably prevent the outside air from entering the processing container 4.

As described above, by discharging the gas in the sealed casing 46 and the gas in the processing container 4 through the exhaust port 83, it is possible to appropriately prevent foreign matter such as dust or external air from entering the processing container 4.

When the driving of the exhaust mechanism 85 is stopped, the lower discharge portion 81 stops the discharge of the gas. When the opening and closing valve 84 is closed, the exhaust port 83 is sealed.

2-8. Sensor 91, Sensor 93 The processing unit 2 is provided with a pressure sensor 91 and an oxygen concentration sensor 93. The pressure sensor 91 detects the pressure of the gas in the processing container 4. The oxygen concentration sensor 93 detects the oxygen concentration in the processing container 4. The oxygen concentration sensor 93 is, for example, a galvanic cell type oxygen sensor or a zirconia type oxygen sensor.

2-9. Control Unit 95 The processing unit 2 includes a control unit 95. Control unit 95, heating unit 31, shutter driving mechanism 35, support pin driving mechanism 39, opening and closing valve 54, opening and closing valve 64, opening and closing valve 74, opening and closing valve 84, flow rate adjusting unit 55, flow rate adjusting unit 65, and exhausting mechanism 75 The exhaust mechanism 85, the pressure sensor 91, and the oxygen concentration sensor 93 are connected in a communicable manner. The control unit 95 receives the detection result of the pressure sensor 91 and the detection result of the oxygen concentration sensor 93. The control unit 95 controls the heating unit 31, the shutter driving mechanism 35, the support pin driving mechanism 39, the opening and closing valve 54, the opening and closing valve 64, the opening and closing valve 74, the opening and closing valve 84, the flow rate adjusting unit 55, the flow rate adjusting unit 65, and the exhausting mechanism 75. The exhaust mechanism 85 is controlled. The control unit 95 is realized by a central processing unit (CPU) that executes various processes, a random access memory (RAM) as a work area for arithmetic processing, and a storage medium such as a fixed disc. . Various information such as a recipe (processing program) for processing the substrate W or a reference value of the oxygen concentration is stored in the storage medium.

3. Pressing member 6, stopper 7 and manual adjustment portion 8 Fig. 5 is a perspective view of the processing unit 2. FIG. 6 is a plan view of the processing unit 2. Fig. 7(A) is a plan view of the pressing member, and Fig. 7(B) is a side view of the pressing member. Figure 8 is a cross-sectional view taken along line VIII-VIII of Figure 6.

Refer to Figure 6. The first end portion 21 and the stopper 7 are disposed at positions deviated from the lid portion 13 in plan view. That is, the first end portion 21 and the stopper 7 do not overlap the lid portion 13 in plan view. The first end portion 21 and the stopper 7 are disposed in front of the lid portion 13 in plan view. More strictly, the first end portion 21 and the stopper 7 are disposed forward and rightward with respect to the center of the lid portion 13 in plan view. The center of the lid portion 13 is, for example, a portion that overlaps the supply cassette 53 in plan view.

The second end portion 22 and the manual adjustment portion 8 are disposed at positions deviated from the lid portion 13 in plan view. In other words, the second end portion 22 and the manual adjustment portion 8 do not overlap the lid portion 13 in plan view. The second end portion 22 and the manual adjustment portion 8 are disposed rearward of the lid portion 13 in plan view. More strictly, the second end portion 22 and the manual adjustment portion 8 are disposed rearward and to the left with respect to the center of the lid portion 13 in plan view.

The imaginary line L connecting the first end portion 21 and the second end portion 22 passes through the center of the lid portion 13 in plan view. The pressing member 6 presses the lid portion 13 between the first end portion 21 and the second end portion 22 against the frame body 11.

The first end portion 21 and the stopper 7 overlap the frame body 11 in plan view. That is, the first end portion 21 and the stopper 7 are disposed above the casing 11. The casing 11 has a first corner portion 11a. The first corner portion 11a is located at the front portion and the right portion of the casing 11. The first end portion 21 and the stopper 7 are disposed on the first corner portion 11a of the casing 11 in plan view.

The second end portion 22 and the manual adjustment portion 8 overlap the frame body 11 in plan view. In other words, the second end portion 22 and the manual adjustment portion 8 are disposed above the casing 11 . The casing 11 has a second corner portion 11c. The second corner portion 11c faces the first corner portion 11a in plan view. The center of the lid portion 13 is located between the first corner portion 11a and the second corner portion 11c in plan view. The second corner portion 11c is not adjacent to the first corner portion 11a. The second corner portion 11c is located at the rear portion and the left portion of the casing 11. The second end portion 22 and the manual adjustment portion 8 are disposed in the second corner portion 11c of the casing 11 in plan view.

Refer to Figures 5-8. The pressing member 6 is provided with an outer frame 23 and two reinforcing members 24 . The outer frame 23 is disposed between the first end portion 21 and the second end portion 22 in plan view. The outer frame 23 is coupled to the first end portion 21. The outer frame 23 is coupled to the second end portion 22. The first end portion 21 is coupled to the first side portion 23b of the outer frame 23. The second end portion 22 is coupled to the second side portion 23c of the outer frame 23.

The outer frame 23 has a ring shape in plan view. The outline of the outer frame 23 has a substantially polygonal shape (for example, a hexagonal shape). The outer frame 23 has an opening. The opening of the outer frame 23 is formed inside the outer frame 23 in plan view. The outer frame 23 is disposed above the lid portion 13. The outer frame 23 overlaps with the lid portion 13 in plan view.

The outer frame 23 includes a plurality of (for example, six) straight portions 23a extending linearly. The straight portions 23a are joined to each other. Each of the straight portions 23a is annularly joined.

The lower surface 23d of the outer frame 23 is substantially flat. The lower surface 23d of the outer frame 23 is substantially horizontal. The lower surface 23d of the outer frame 23 is higher than the upper surface 13a of the cover portion 13.

The reinforcing member 24 is disposed inside the outer frame 23 in plan view. In particular, the reinforcing member 24 extends linearly. The reinforcing member 24 extends in a direction substantially orthogonal to the imaginary line L in plan view. Both ends of the reinforcing member 24 are respectively engaged with the outer frame 23. The reinforcing member 24 has a first end joined to the outer frame 23 and a second end joined to the outer frame 23.

The pressing member 6 has three or more (for example, four) seats 25. The seat portion 25 is coupled to the outer frame 23. The seat portion 25 extends downward from the outer frame 23. The lower surface of the seat portion 25 is substantially flat. The lower surface of the seat portion 25 is substantially horizontal. The lower surface of the seat portion 25 has a substantially circular shape. The seat portion 25 is in contact with the lid portion 13. Specifically, the lower surface of the seat portion 25 is in contact with the upper surface 13a of the lid portion 13.

Refer to Figure 6. The seat portion 25 overlaps with the lid portion 13 in plan view. The seat portion 25 is sufficiently smaller than the cover portion 13 in plan view. The seat portion 25 overlaps with the adhesion portion between the frame body 11 and the lid portion 13 in plan view. The seat portion 25 overlaps with the sealing member 19 disposed around the opening B in plan view. The seat portion 25 overlaps with the peripheral edge portion of the lid portion 13 in plan view.

Refer to Figures 5-8. The stopper 7 is fixed to the frame 11. The stopper 7 is provided with two stays 26 and a shaft member 27. The stay 26 is fixed to the upper surface of the casing 11. The stay 26 protrudes upward from the upper surface of the casing 11. The shaft member 27 is supported by the stay 26. The shaft member 27 has a first end connected to one of the stays 26 and a second end connected to the other stay 26 .

The shaft member 27 extends in a substantially horizontal direction. That is, the axis C of the shaft member 27 is substantially parallel to the horizontal direction. The shaft member 27 has a substantially cylindrical shape. The lower end of the shaft member 27 is substantially the same height as the lower surface 23d of the outer frame 23. The lower end of the shaft member 27 is higher than the upper surface 13a of the cover portion 13.

The shaft member 27 is in contact with the first end portion 21. Specifically, the shaft member 27 is in contact with the upper surface of the first end portion 21. Thereby, the shaft member 27 prohibits the first end portion 21 from moving upward.

7(A) and 7(B). The first end portion 21 has a contact surface 21a that is in contact with the outer peripheral surface of the shaft member 27. The contact surface 21a is formed on the upper surface of the first end portion 21.

The contact surface 21a can further slide with the outer peripheral surface of the shaft member 27. The contact surface 21a is curved. Thereby, the first end portion 21 can be rotated around the shaft member 27. That is, the pressing member 6 is rotatable around the shaft member 27.

Fig. 8 shows the pressing member 6 in a substantially horizontal posture. In a state where the pressing member 6 is in a substantially horizontal posture, the lower surface 23d of the outer frame 23 is substantially horizontal. The pressing member 6 (specifically, the seat portion 25) is in contact with the lid portion 13 in a state where the pressing member 6 is in a substantially horizontal posture. The pressing member 6 can press the lid portion 13 in a state where the pressing member 6 is in a substantially horizontal posture.

Fig. 9 shows the pressing member 6 in an inclined posture. In FIG. 9, the height position of the second end portion 22 is higher than that of the first end portion 21.

Here, the horizontal direction from the shaft member 27 toward the second end portion 22 as viewed from the direction of the axis C of the shaft member 27 is referred to as "first direction d1". The direction opposite to the first direction d1 is referred to as "the second direction d2". As described above, in FIG. 9 , the pressing member 6 is inclined upward in the first direction d1 . In other words, the pressing member 6 is inclined upward in the first direction d1. In a state where the pressing member 6 is inclined upward in the first direction d1, the lower surface 23d of the outer frame 23 is also inclined upward in the first direction d1. In a state where the pressing member 6 is inclined upward in the first direction d1, the pressing member 6 does not come into contact with the lid portion 13.

The contact surface 21a is open upward. The contact surface 21a is recessed downward. The contact surface 21a does not contact the entire circumference of the shaft member 27. The length of the shaft member 27 in contact with the contact surface 21a in the circumferential direction is smaller than one-half of the entire circumference of the shaft member 27. Thereby, the first end portion 21 can be separated from the shaft member 27. That is, the pressing member 6 can be separated from the shaft member 27.

10 and 11 are cross-sectional detailed views of the first end portion 21 and the shaft member 27. FIG. 10 shows the first end portion 21 and the shaft member 27 in a state in which the pressing member 6 is in a substantially horizontal posture. FIG. 11 shows the first end portion 21 and the shaft member 27 in a state where the pressing member 6 is inclined upward in the first direction d1.

Here, a portion that is located above the shaft member 27 that passes above the virtual horizontal plane H of the axial center C of the shaft member 27 is referred to as "upper portion 27T". A portion of the shaft member 27 other than the upper portion 27T is referred to as a "lower portion 27B". The portion of the shaft member 27 located on the second end portion 22 side (that is, the first direction d1) that passes through the virtual vertical plane V of the axial center C of the shaft member 27 is referred to as "surface portion 27F". A portion of the shaft member 27 other than the surface portion 27F is referred to as a "back surface portion 27R". The common portion between the surface portion 27F and the lower portion 27B is referred to as "surface lower portion 27FB". The common portion of the back surface portion 27R and the lower portion 27B is referred to as "back surface lower portion 27RB".

Refer to Figure 10. In a state where the pressing member 6 is in a substantially horizontal posture, the contact surface 21a is in contact with the lower surface lower portion 27RB of the shaft member 27. In a state where the pressing member 6 is in a substantially horizontal posture, the contact surface 21a is slightly in contact with the lower surface lower portion 27RB of the shaft member 27. In a state where the pressing member 6 is in a substantially horizontal posture, the contact surface 21a is in contact with a part of the back surface lower portion 27RB of the shaft member 27 (specifically, a lower portion of the back surface lower portion 27RB). Therefore, the shaft member 27 (the stopper 7) is prohibited from moving in the first direction d1 in a state where the pressing member 6 is in a substantially horizontal posture in the first end portion 21 (the pressing member 6).

In a state where the pressing member 6 is in a substantially horizontal posture, the contact surface 21a is in contact with the lower surface portion 27FB of the shaft member 27. Therefore, the shaft member 27 (the stopper 7) is prohibited from moving in the second direction d2 in a state where the pressing member 6 is in a substantially horizontal posture in the first end portion 21 (the pressing member 6).

Refer to Figure 11. In a state where the pressing member 6 is inclined upward in the first direction d1, the contact surface 21a is in contact only with the surface portion 27F of the shaft member 27. In other words, in a state where the pressing member 6 is inclined upward in the first direction d1, the contact surface 21a does not come into contact with the back surface portion 27R of the shaft member 27. Therefore, the shaft member 27 (the stopper 7) allows the first end portion 21 (the pressing member 6) to move in the first direction d1 in a state where the pressing member 6 is inclined upward in the first direction d1. In other words, the first end portion 21 (the pressing member 6) can be detached from the shaft member 27 (the stopper 7) in a state where the pressing member 6 is inclined upward in the first direction d1.

The inclination angle of the pressing member 6 in which the pressing member 6 can be attached and detached to the stopper 7 is preferably 15 degrees or more. The inclination angle of the pressing member 6 in which the pressing member 6 can be attached and detached to the stopper is preferably 10 degrees or more. The inclination angle of the pressing member 6 in which the pressing member 6 can be attached and detached to the stopper is more preferably 5 degrees or more. Here, the inclination angle of the pressing member 6 is, for example, an angle formed by the lower surface 23d of the outer frame 23 and the horizontal plane H.

Further, in the present embodiment, the length of the shaft member 27 in contact with the contact surface 21a in the circumferential direction is one quarter or more of the entire circumference of the shaft member 27.

Refer to Figures 5-8. The manual adjustment unit 8 is attached to the housing 11 . The manual adjustment unit 8 moves the second end portion 22 up and down with respect to the casing 11 .

The manual adjustment unit 8 includes a joint portion 28 and a screw 29 . The joint portion 28 is fixed to the frame body 11. The joint portion 28 protrudes upward from the upper surface of the casing 11. The joint portion 28 has a screw hole. A screw hole is formed inside the joint portion 28. The screw holes extend in a substantially up and down direction Z. The screw holes are open to the top.

The screw 29 is, for example, a bolt. The screw 29 is, for example, a screw bolt. The screw 29 is coupled to the joint portion 28 (screw hole). The shaft portion 29a of the screw 29 is substantially parallel to the vertical direction Z. The head portion 29b of the screw 29 is disposed at the upper end of the shaft portion 29a of the screw 29.

The second end portion 22 of the pressing member 6 has a mounting seat 22a and a slit 22b. The mount 22a has a flat plate shape. The slit 22b is formed in the mount 22a. The shaft portion 29a of the screw 29 is disposed in the slit 22b. The second end portion 22 (mounting seat 22 a ) is disposed between the head portion 29 b of the screw 29 and the joint portion 28 . The second end portion 22 moves up and down in response to the rotation of the screw 29. Further, the second end portion 22 (mounting seat 22a) can be separated from the joint portion 28 and the screw 29. That is, the pressing member 6 can be separated from the manual adjustment portion 8.

4. Operation of attaching and detaching the lid portion 13 Figs. 12(A) to 12(D) are schematic views showing the procedure of detaching the lid portion 13 from the frame body 11. The operation of detaching the lid portion 13 from the casing 11 will be described. Furthermore, the job is performed by the user's manual work. That is, the job is not executed by the control of the control unit 95.

Refer to Figure 12 (A). The user is located behind the processing unit 2 and the outer wall panel 9. The user removes the lower outer wall panel 9.

Refer to Figure 12 (B). The user turns the screw 29 to detach the second end portion 22 from the manual adjustment portion 8. The screw 29 is a screw bolt so that the user can turn the screw by hand. Thereby, the pressing of the lid member 13 by the pressing member 6 is released. The user separates the pressing member 6 from the manual adjustment portion 8. The user rotates the pressing member 6 about the shaft member 27. For example, the user lifts the second end portion 22. Thereby, the pressing member 6 is inclined upward in the first direction d1.

Refer to Figure 12 (C). When the pressing member 6 is inclined upward in the first direction d1, the pressing member 6 pulls the pressing member 6 in the first direction d1. Thereby, the pressing member 6 (first end portion 21) is separated from the stopper 7. The user moves the pressing member 6 to a position deviated from the space above the casing 11. For example, the user moves the pressing member 6 to the rear of the processing unit 2.

Refer to Figure 12 (D). The user lifts the lid portion 13. Thereby, the lid portion 13 is separated from the frame body 11. At this time, the rectifying plate 56 is also detached from the casing 11 integrally with the lid portion 13. That is, the opening B is open. The user moves the lid portion 13 to a position where the space above the frame body 11 is deviated. For example, the user moves the lid portion 13 to the rear of the processing unit 2.

The operation of attaching the lid portion 13 to the casing 11 will be described. Furthermore, the work is also performed by the user's manual work.

The user is located behind the processing unit 2. The user places the lid portion 13 on the upper portion of the casing 11. The user brings (engages) the first end portion 21 of the pressing member 6 into the stopper 7. Specifically, the user moves the pressing member 6 in the second direction d2 in a state where the pressing member 6 is inclined upward in the first direction d1. Further, the user inserts the first end portion 21 into the lower side of the shaft member 27. Thereby, the first end portion 21 (contact surface 21a) is in contact (engagement) with the shaft member 27. The user rotates the pressing member 6 about the shaft member 27. For example, the user puts down the second end portion 22. The user places the pressing member 6 in a substantially horizontal posture. Thereby, the pressing member 6 (seat portion 25) comes into contact with the lid portion 13. The user sets the second end portion 22 of the pressing member 6 to the manual adjustment portion 8. Specifically, the user places the second end portion 22 of the pressing member 6 between the coupling portion 28 and the screw 29 . The user turns the screw 29 to adjust the height position of the second end portion 22. Specifically, the user turns the screw 29 to move the second end portion 22 downward. Thereby, the height position of the second end portion 22 is lowered in a state where the height position of the first end portion 21 is kept constant. Therefore, the pressing member 6 presses the lid portion 13 against the frame body 11 with an appropriate force. As a result, the lid portion 13 is in close contact with the casing 11. After that, the user installs the outer wall panel 9.

5. Processing Example of Processing Substrate Next, a processing example of processing the substrate W by the processing unit 2 will be described. In the present processing example, the substrate processing apparatus 1 heat-treats the substrate W coated with the self-organizing material. The substrate processing apparatus 1 separates the self-organizing material by heating the substrate W. The phase separated self-organizing material has a highly regular structure. Further, the substrate processing apparatus 1 protects the structure of the phase-separated self-organizing material from deterioration or decay by cooling the substrate W.

FIG. 13 is a flowchart showing the procedure of an operation example of the substrate processing apparatus 1. The operation example of the substrate processing apparatus 1 includes a loading step (step S1), a sealing step (step S2), a replacement step (step S3), a heating step (step S4), a cooling step (step S5), an opening step (step S6), and The unloading process (step S7).

Hereinafter, each step will be described. In the following operation example, each member operates in accordance with the control of the control unit 95. In the following operation example, the pressing member 6 presses the lid portion 13 on the frame body 11, and the lid portion 13 is in close contact with the frame body 11.

<Step S1> Loading Step The shutter driving mechanism 35 disengages the shutter 12 from the casing 11. Thereby, the transfer port A is opened. The transport mechanism 3 carries the substrate W into the processing container 4. Specifically, the transport mechanism 3 moves rearward while holding the substrate W in a horizontal posture, and enters the inside of the processing container 4 via the transport port A. Thereby, the substrate W moves rearward in a horizontal posture and enters the processing container 4 via the transfer port A. The substrate W has been coated with a self-organizing material. The support pin drive mechanism 39 raises the support pin 38 to the upper position. The support pin 38 receives the substrate W from the transfer mechanism 3. After the support pin 38 receives the substrate W, the transport mechanism 3 is withdrawn to the outside of the processing container 4. The support pin 38 supports the substrate W at the cooling position PC.

In the carry-in process, the lower discharge portion 81 discharges the gas from the sealed casing 46 and the processing container 4. The lower discharge portion 81 continuously discharges the gas from the sealed casing 46 and the processing container 4 until the unloading step (step S7) described later is completed.

<Step S2> Sealing Step The shutter driving mechanism 35 attaches the shutter 12 to the casing 11. The shielding plate 12 is in close contact with the casing 11 via the sealing member 19. Thereby, the transfer port A is sealed. That is, the processing container 4 is substantially sealed. In the sealing step, the support pin 38 is at the upper position, and the substrate W is stationary at the cooling position PC.

<Step S3> Replacement Step In the replacement step, the gas in the processing container 4 is replaced with a non-oxidizing gas. Specifically, the upper supply unit 51 supplies the non-oxidizing gas into the processing container 4, and the side discharge unit 71 discharges the gas in the processing container 4. In the replacement step, the support pin 38 is at the upper position, and the substrate W is stationary at the cooling position PC.

Here, the supply amount of the non-oxidizing gas to the processing container 4 and the amount of gas discharged from the processing container 4 may be changed with time. Further, the pressure of the gas in the processing container 4 may be changed with time. For example, the inside of the processing container 4 is evacuated in the initial stage of the replacement process. Specifically, in the initial stage of the replacement process, the non-oxidizing gas is not supplied, and the gas is discharged at a large discharge amount. Thereby, the degree of vacuum of the processing container 4 is increased. For example, in the middle stage of the replacement process, the non-oxidizing gas is supplied at a large supply amount and the gas is discharged at a large discharge amount. Thereby, the pressure of the gas of the processing container 4 is made higher than the negative pressure of the initial stage. For example, in the final stage of the replacement process, the non-oxidizing gas is supplied at a large supply amount and the gas is discharged at a small discharge amount. Thereby, the pressure of the gas in the processing container 4 is made into a positive pressure.

By the replacement step, the oxygen concentration in the processing container 4 is lowered to the reference value or lower. That is, the inside of the processing container 4 is in a non-oxidizing gas atmosphere.

<Step S4> Heating Step The heating step heats the substrate W in a non-oxidizing gas atmosphere. The self-assembled material on the substrate W is phase-separated by heating the substrate W.

When the heating process is started, the support pin drive mechanism 39 lowers the support pin 38 to the lower position. Thereby, the substrate W is moved from the cooling position PC to the heating position PH. In the heating step, the lower supply unit 61 supplies the non-oxidizing gas into the processing container 4 only during the movement of the substrate W from the cooling position PC to the heating position PH. The lower supply unit 61 blows a non-oxidizing gas through the gas flow holes 34 of the heating unit 31. Thereby, oxygen is reliably prevented from remaining in the gap between the substrate W and the heating portion 31.

After the substrate W reaches the heating position PH, the substrate W is stationary at the heating position PH until the heating step is completed. The heating unit 31 heats the substrate W at the heating position PH. The temperature at which the substrate W is heated is, for example, 300 degrees or more. The temperature at which the substrate W is heated is, for example, higher than the glass transition point of the self-organizing material. The glass transition point is also known as the glass transition temperature. The temperature at which the substrate W is heated is, for example, a value in the range of 340 degrees to 360 degrees.

In the heating step, the upper supply unit 51 supplies the non-oxidizing gas into the processing container 4, and the side discharge unit 71 discharges the gas from the processing container 4. Thereby, the inside of the processing container 4 is maintained in a non-oxidizing gas atmosphere. In the heating step, the pressure of the gas in the processing container 4 is a negative pressure.

<Step S5> Cooling Step The cooling step cools the substrate W in a non-oxidizing gas atmosphere. Thereby, the structure of the phase separated self-organizing material is protected from decay or deterioration.

When the cooling process is started, the support pin drive mechanism 39 moves the support pin 38 to the upper position. Thereby, the substrate W rises from the heating position PH to the cooling position PC. After the substrate W reaches the cooling position PC, the substrate W is stationary at the cooling position PC until the cooling process is completed.

In the cooling step, the upper supply unit 51 and the lower supply unit 61 supply the non-oxidizing gas into the processing container 4, and the side discharge unit 71 discharges the gas in the processing container 4. Thereby, the inside of the processing container 4 is maintained in a non-oxidizing gas atmosphere. In the cooling step, the pressure of the gas in the processing container 4 is a negative pressure.

For example, the supply amount of the non-oxidizing gas in the cooling step is larger than the supply amount of the non-oxidizing gas in the heating step. Thereby, the substrate W can be cooled in a short time. For example, the discharge amount of the gas in the processing container 4 in the cooling process is larger than the discharge amount of the gas in the processing container 4 in the heating process. Thereby, the substrate W can be cooled in a short time.

<Step S6> Opening Process The shutter driving mechanism 35 disengages the shutter 12 from the casing 11. Thereby, the transfer port A is opened. That is, the processing container 4 is open.

<Step S7> Carrying out process The conveying mechanism 3 carries out the substrate W from the processing container 4. Specifically, the transport mechanism 3 enters the inside of the processing container 4 via the transport port A. The support pin drive mechanism 39 lowers the support pin 38. The conveying mechanism 3 receives the substrate W from the support pin 38. The transport mechanism 3 holds the substrate W in a horizontal posture. The conveyance mechanism 3 moves forward while holding the substrate W in a horizontal posture, and exits to the outside of the processing container 4 via the transfer port A. Thereby, the substrate W is moved forward in a horizontal posture, and is sent out from the processing container 4 via the transfer port A.

6. Effect of the Embodiment As described above, the substrate processing apparatus according to the embodiment exhibits the following effects.

The substrate processing apparatus 1 includes a pressing member 6 , a stopper 7 , and a manual adjustment unit 8 . Therefore, the height position of the second end portion 22 of the pressing member 6 can be lowered in a state where the first end portion 21 of the pressing member 6 is prohibited from moving upward. Thereby, the pressing member 6 can press the lid portion 13 appropriately for the frame body 11. Thereby, the airtightness of the processing container 4 can be improved.

Further, in a state where the first end portion 21 of the pressing member 6 is prohibited from moving upward, the height position of the second end portion 22 of the pressing member 6 can be increased. Thereby, the pressing of the lid member 13 by the pressing member 6 can be released. Thereby, the lid portion 13 can be easily separated from the casing 11. That is, the opening B can be easily opened. Thereby, the maintenance of the processing container 4 can be easily performed.

The first end portion 21 of the pressing member 6 is located in front of the lid portion 13 in plan view, and the second end portion 22 of the pressing member 6 is located rearward of the lid portion 13 in plan view. Therefore, the lid portion 13 is disposed between the first end portion 21 and the second end portion 22 in plan view. Thereby, the height position of the second end portion 22 of the pressing member 6 is adjusted by the manual adjustment portion 8, and the force by which the pressing member 6 presses the lid portion 13 can be appropriately adjusted.

The first end portion 21 of the pressing member 6 and the stopper 7 are disposed in the first corner portion 11a of the casing 11 in a plan view, and the second end portion 22 of the pressing member 6 and the manual adjustment portion 8 are disposed in the casing in a plan view. The second corner portion 11c of 11. Therefore, the first end portion 21 of the pressing member 6 and the stopper 7 can be efficiently arranged by the space of the first corner portion 11a. Further, the second end portion 22 of the pressing member 6 and the manual adjustment portion 8 can be efficiently arranged by the space of the second corner portion 11c. Thereby, the installation area of the processing unit 2 (substrate processing apparatus 1) can be reduced.

The manual adjustment portion 8 is disposed at a position closer to the outer wall panel 9 than the stopper 7. Therefore, the user can easily operate the manual adjustment portion 8 in a state where the lower outer wall panel 9 has been removed. Thereby, the maintenance of the processing container 4 can be performed more easily.

Even if the space in front of the processing container 4, the right side, the left side, the upper side, and the lower side is narrow, the user can easily operate the manual adjustment unit 8. As described above, in the case where the space around the processing container 4 is narrow, the usefulness of the substrate processing apparatus 1 is particularly high.

The manual adjustment unit 8 is attached to the housing 11 . Thereby, the manual adjustment unit 8 can be appropriately provided.

The manual adjustment unit 8 moves the second end portion 22 of the pressing member 6 up and down with respect to the casing 11 . Thereby, the manual adjustment unit 8 can appropriately adjust the height position of the second end portion 22 of the pressing member 6.

The manual adjustment portion 8 includes a screw 29. The second end portion 22 of the pressing member 6 moves up and down in response to the rotation of the screw 29. Therefore, the height position of the second end portion 22 of the pressing member 6 can be easily adjusted only by the user turning the screw 29. That is, the lid portion 13 can be brought into close contact with the casing 11 only by the user turning the screw 29. Further, the pressing of the screw 29 by the user can release the pressing of the lid member 13 by the pressing member 6.

The screw 29 is a screw bolt. Therefore, the user can turn the screw 29 without using a tool. Thereby, the user can more easily adjust the height position of the second end portion 22 of the pressing member 6.

The pressing member 6 has an outer frame 23. Therefore, the pressing member 6 can effectively press the lid portion 13 against the frame body 11.

The outline of the outer frame 23 has a substantially polygonal shape. Therefore, it is possible to effectively prevent the deflection or deformation of the outer frame 23. Thereby, the pressing member 6 can press the lid portion 13 uniformly.

The pressing member 6 has a reinforcing member 24. Therefore, the deflection or deformation of the outer frame 23 can be prevented more effectively. Thereby, the pressing member 6 can press the lid portion 13 more uniformly.

The pressing member 6 has a seat portion 25. Thereby, the pressing member 6 can press the lid portion 13 more suitably. The number of the seats 25 is three or more. Thereby, the pressing member 6 can press the lid portion 13 more uniformly.

The pressing member 6 can be separated from the stopper 7 and the manual adjustment portion 8. Therefore, the pressing member 6 can be moved to a position deviated from the space above the lid body 13. Thereby, the lid portion 13 can be easily attached and detached to the casing 11. Further, the maintenance of the processing container 4 can be performed more easily via the opening B.

The stopper 7 is fixed to the frame 11. Thereby, the stopper 7 can be provided appropriately.

The stopper 7 includes a shaft member 27 that extends in a substantially horizontal direction. The pressing member 6 is rotatable around the shaft member 27. Therefore, the manual adjustment unit 8 can appropriately adjust the height position of the second end portion 22 of the pressing member 6 .

The pressing member 6 is in contact with the lid portion 13 in a state where the pressing member 6 is in a substantially horizontal posture. Therefore, in a state where the pressing member 6 is in a substantially horizontal posture, the pressing member 6 can appropriately press the lid portion 13. Thereby, the pressing member 6 can press the lid portion 13 more uniformly.

The stopper 7 is prohibited from moving in the first direction d1 in a state where the pressing member 6 is in a substantially horizontal posture. Thereby, the pressing member 6 can press the lid portion 13 more appropriately.

In a state where the pressing member 6 is in a substantially horizontal posture, the first end portion 21 is in contact with the back surface portion 27R (specifically, the back surface lower portion 27RB) of the shaft member 27. Therefore, the stopper 7 can appropriately prevent the pressing member 6 from moving in the first direction d1 in a state where the pressing member 6 presses the lid portion 13.

The stopper 7 is prohibited from moving in the second direction d2 in a state where the pressing member 6 is in a substantially horizontal posture. Thereby, the pressing member 6 can press the lid portion 13 more appropriately.

The first end portion 21 is in contact with the surface portion 27F (specifically, the surface lower portion 27FB) of the shaft member 27 in a state where the pressing member 6 is in a substantially horizontal posture. Therefore, the stopper 7 can appropriately prevent the pressing member 6 from moving in the second direction d2 in a state where the pressing member 6 presses the lid portion 13.

The stopper 7 allows the pressing member 6 to move in the first direction d1 with respect to the shaft member 27 in a state where the pressing member 6 is inclined upward in the first direction d1. Thereby, the pressing member 6 can be easily separated from the stopper 7 in a state where the pressing member 6 is not pressed by the lid portion 13.

In a state where the pressing member 6 is inclined upward in the first direction d1, the first end portion 21 is in contact only with the surface portion 27F of the shaft member 27. In other words, the first end portion 21 does not come into contact with the back surface portion 27R of the shaft member 27 in a state where the pressing member 6 is inclined upward in the first direction d1. Therefore, in a state where the pressing member 6 does not press the lid portion 13, the stopper 7 can appropriately allow the pressing member 6 to move in the first direction d1.

The pressing member 6 is moved in the first direction d1 in a state where the pressing member 6 is inclined upward in the first direction d1, and only the pressing member 6 is separated from the stopper. The pressing member 6 is moved in the second direction d2 in a state where the pressing member 6 is inclined upward in the first direction d1, and only the pressing member 6 is engaged with the stopper 7 by this. In this way, the user can detachably attach the pressing member 6 to the stopper 7 without operating the stopper 7. In other words, the user can detachably attach the pressing member 6 to the stopper 7 only by moving the pressing member 6. Thereby, the user can more easily attach and detach the pressing member 6 to the stopper 7.

The inclination angle of the pressing member 6 in which the pressing member 6 can be attached and detached to the stopper 7 is, for example, 15 degrees or more, 10 degrees or more, or 5 degrees or more. As described above, the minimum value of the inclination angle of the pressing member 6 that the pressing member 6 can be attached to and detached from the stopper 7 is relatively small. Thereby, even if the space above the processing container 4 is narrow, the pressing member 6 can be easily attached and detached to the stopper 7.

The opening B is relatively large. Therefore, maintenance of the processing container 4 can be performed more easily via the opening B.

The present invention is not limited to the above embodiment, and can be modified as described below.

(1) In the above embodiment, the shape of the outer frame 23 is exemplified, but the invention is not limited thereto. The shape of the outer frame 23 can also be changed as appropriate. The number and shape of the reinforcing members 24 may be appropriately changed in accordance with the shape of the outer frame 23. The number of the seat portions 25 can be appropriately changed in accordance with the shape of the outer frame 23.

Fig. 14 is a perspective view of the substrate processing apparatus 1 according to the modified embodiment. In addition, the same configurations as those of the embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

The pressing member 6 is provided with an outer frame 101 and a reinforcing member 102. The outer frame 23 has a ring shape in plan view. The outline of the outer frame 101 has a substantially quadrangular shape. The outline of the outer frame 101 has a substantially diamond shape. Specifically, the outer frame 101 includes a plurality of (for example, four) linear portions 101a extending linearly. Each of the straight portions 101a is joined to each other. Each linear portion 101a is annularly joined.

The reinforcing member 102 is disposed inside the outer frame 101 in plan view. In particular, the reinforcing member 102 extends linearly. The reinforcing member 102 extends in a direction substantially orthogonal to the imaginary line L. Both ends of the reinforcing member 102 are respectively engaged with the outer frame 101. The reinforcing member 102 has a first end joined to the outer frame 101 and a second end joined to the outer frame 23.

Further, in the present modified embodiment, the pressing member 6 has three seat portions 25.

According to the present modified embodiment, the pressing member 6 can also appropriately press the lid portion 13 on the casing 11.

(2) In the above embodiment, the outline of the outer frame 23 has a substantially polygonal shape, but is not limited thereto. It is also possible to appropriately change the shape different from the substantially polygonal shape with respect to the outline of the outer frame.

Fig. 15 is a perspective view of the substrate processing apparatus 1 according to the modified embodiment. In addition, the same configurations as those of the embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

The pressing member 6 has an outer frame 105. The outer frame 105 has a circular ring shape in plan view. The outline of the outer frame 105 has a substantially circular shape in plan view. The outline of the outer frame 105 is curved in a plan view.

Further, in the present modified embodiment, the pressing member 6 does not have a reinforcing member. In the present modified embodiment, the pressing member 6 has three seat portions 25.

According to the present modified embodiment, the pressing member 6 can also appropriately press the lid portion 13 on the casing 11.

(3) In the above embodiment, the outer frame 23 has a ring shape in plan view, but is not limited thereto. That is, the outer frame 23 may not have a ring shape in plan view. For example, the outer frame 23 may also have no opening when viewed from above. For example, the outer frame 23 may also have a plate shape. For example, the outer frame 23 may also have a disk shape.

(4) In the above embodiment, the outer frame 23 and the seat portion 25 are directly connected, but the invention is not limited thereto. For example, the outer frame 23 and the seat portion 25 can also be indirectly connected.

(5) In the above embodiment, the outer frame 23 and the seat portion 25 may be connected via an elastic member.

Fig. 16 is a cross-sectional view showing a substrate processing apparatus 1 according to a modified embodiment. In addition, the same configurations as those of the embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

The pressing member 6 has an elastic member 107. The elastic member 107 is, for example, a spring. The elastic member 107 is provided between the outer frame 23 and the seat portion 25. The elastic member 107 connects the outer frame 23 and the seat portion 25. The elastic member 107 has a first end supported by the outer frame 23. The elastic member 107 has a second end that supports the seat portion 25. Corresponding to the elastic deformation of the elastic member 107, the relative position of the outer frame 23 and the seat portion 25 is changed. For example, the seat portion 25 moves up and down with respect to the outer frame 23 in response to elastic deformation of the elastic member 107.

The seat portion 25 is moved upward with respect to the outer frame 23, and the elastic member 107 is compressively deformed (elastically deformed). The compression-deformed elastic member 107 pushes the seat portion 25 downward.

According to the present modified embodiment, the elastic member 107 can finely adjust the height position of the seat portion 25. Thereby, the seat portion 25 can be more reliably brought into contact with the lid portion 13. Further, the seat portion 25 can press the lid portion 13 more reliably.

(6) In the above embodiment, the second end portion 22 has the slit 22b, but the invention is not limited thereto. For example, the second end portion 22 may have a through hole. A through hole is formed in the mount 22a. The shaft portion 29a of the screw 29 is disposed in the through hole.

(7) In the above embodiment, the manual adjustment unit 8 includes the joint portion 28 and the screw 29, but the invention is not limited thereto. The configuration of the manual adjustment unit 8 can also be changed as appropriate. The configuration of the second end portion 22 may be appropriately changed in accordance with the change of the manual adjustment unit 8.

Fig. 17 is a cross-sectional view showing a substrate processing apparatus 1 according to a modified embodiment. In addition, the same configurations as those of the embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

The second end portion 22 has a first inclined surface 22c. The first inclined surface 22 c is formed on the upper surface of the second end portion 22 . The first inclined surface 22c is inclined downward toward the first direction d1.

The manual adjustment unit 8 has a joint portion 113, a screw 114, and a movable table 115.

The joint portion 113 is fixed to the frame body 11. The joint portion 113 protrudes upward from the upper surface of the casing 11. The joint portion 113 has a screw hole. The screw holes are formed to penetrate the joint portion 113. The screw holes extend in a substantially horizontal direction. Specifically, the screw hole extends in the first direction d1/the second direction d2. The screw holes are open to both sides of the joint portion 113.

The screw 114 is coupled to the joint portion 113 (screw hole). The shaft portion 114a of the screw 114 penetrates the joint portion 113. In other words, the shaft portion 114a has a first end located on one side (first direction d1) of the joint portion 113 and a second end located on the other side (second direction d2) of the joint portion 113. The head portion 114b of the screw 114 is coupled to the first end of the shaft portion 114a.

The movable table 115 is coupled to the second end of the shaft portion 114a. The movable table 115 is closer to the first end portion 2 than the head portion 114b of the screw 114. When the screw 114 rotates, the movable table 115 moves in the first direction d1 and the second direction d2.

The movable table 115 has a second inclined surface 115a. The second inclined surface 115a is formed on the lower surface of the movable table 115. The second inclined surface 115a is inclined downward toward the first direction d1.

The movable table 115 (second inclined surface 115a) can be in contact with the second end portion 22 (first inclined surface 22c). Further, the movable table 115 (second inclined surface 115a) is slidable relative to the second end portion 22 (first inclined surface 22c).

When the movable table 115 moves in the second direction d2, the movable table 115 contacts the second end portion 22. Further, when the movable table 115 moves in the second direction d2, the movable table 115 slides with respect to the second end portion 22 and the second end portion 22 moves downward. That is, the height position of the second end portion 22 is lowered.

When the movable table 115 moves in the first direction d1, the movable table 115 allows the second end portion 22 to move upward. For example, when the movable table 115 moves in the first direction d1, the second end portion 22 moves upward and the second end portion 22 slides relative to the movable table 115. That is, the height position of the second end portion 22 becomes high. Further, when the movable table 115 moves in the second direction d2, the movable table 115 is separated from the second end portion 22.

Further, Fig. 15 shows the joint portion 113 and the screw 114. The shaft portion 114a extends rearward (specifically, rearward and leftward) from the joint portion 113. The rear end of the shaft portion 114a is connected to the head portion 114b. The head portion 114b is disposed further rearward than the joint portion 113. Thereby, the user can more easily rotate the head 114b (screw 114) from the position behind the processing unit 2. That is, the user can easily operate the manual adjustment unit 8.

According to the present modified embodiment, the manual adjustment unit 8 can appropriately adjust the height position of the second end portion 22.

(8) In the above embodiment, the manual adjustment unit 8 that the user can operate without using a tool is exemplified, but the present invention is not limited thereto. It can also be changed to a manual adjustment unit that the user operates using the tool.

(9) In the above embodiment, the screw bolt 29 is exemplified as the screw 29, but the invention is not limited thereto. For example, the screw 29 can also be a finger screw. For example, the screw 29 can also be a butterfly bolt. For example, the screw 29 can also be rotated by a user using a tool.

(10) In the above embodiment, the arrangement of the first end portion 21 and the stopper 7 has been described in detail, but the invention is not limited thereto. The arrangement of the first end portion 21 and the stopper 7 can be appropriately changed. For example, the first end portion 21 and the stopper 7 may overlap the lid portion 13 in plan view.

(11) In the above embodiment, the arrangement of the second end portion 22 and the manual adjustment portion 8 has been described in detail, but the invention is not limited thereto. The arrangement of the second end portion 22 and the manual adjustment portion 8 can be appropriately changed. For example, the second end portion 22 and the manual adjustment portion 8 may overlap the lid portion 13 in plan view.

(12) In the above embodiment, the stopper 7 is fixed to the casing 11, but the invention is not limited thereto. The stopper 7 can be fixed to a member other than the casing 11 as long as the stopper 7 can be fixedly provided.

(13) In the above embodiment, the manual adjustment unit 8 is attached to the casing, but the invention is not limited thereto. The manual adjustment unit 8 may be attached to a member other than the housing 11 .

(14) In the above embodiment, the heat treatment performed by the substrate processing apparatus 1 includes a process of heating the substrate W and a process of cooling the substrate W, but the invention is not limited thereto. For example, the heat treatment by the substrate processing apparatus 1 may include only one of the process of heating the substrate W and the process of cooling the substrate W.

(15) In the above embodiment, the processing performed by the substrate processing apparatus 1 is heat treatment, but is not limited thereto. For example, the substrate processing apparatus 1 may perform processing other than heat treatment. In the above embodiment, the processing liquid is not used in the processing performed by the substrate processing apparatus 1, but the processing liquid is not limited thereto. For example, a treatment liquid (for example, a solvent or a hydrophobizing agent or the like) may be used in the treatment performed by the substrate processing apparatus 1.

(16) In the above embodiment, the substrate processing apparatus 1 heat-treats the substrate W coated with the self-organizing material, but the invention is not limited thereto. The substrate processing apparatus 1 can also process the substrate W on which the resist film or the anti-reflection film is formed. For example, the substrate processing apparatus 1 can also process the substrate W on which the underlayer film is formed. The underlayer film is, for example, a spin-on-carbon (SOC) film or a spin on glass (SOG) film.

(17) For each of the above-described embodiments and the respective modified embodiments described in the above (1) to (16), for example, the configuration may be replaced by or combined with the configuration of another modified embodiment. change.

1‧‧‧ Heat treatment unit

2, 2a, 2b, 2c‧ ‧ processing unit

3‧‧‧Transportation agency

4‧‧‧Processing container

6‧‧‧ Pressing members

7‧‧‧stops

8‧‧‧Manual adjustment department

9, 9a, 9b, 9c‧‧‧ outer wall panels

10, 10a, 10b, 10c‧‧‧ next door

11‧‧‧ frame

11a‧‧‧1st corner

11b‧‧‧ bottom

11c‧‧‧2nd corner

12‧‧‧ visor

13‧‧‧ 盖部

13a, 31a‧‧‧ upper surface

14‧‧‧ Housing Department

15‧‧‧floor

15a, B‧‧‧ openings

19, 45‧‧‧ Sealing components

21‧‧‧1st end

21a‧‧‧Contact surface

22‧‧‧2nd end

22a‧‧‧ Mounting

22b‧‧‧ incision

22c‧‧‧1st inclined surface

23, 101, 105‧‧‧ frame

23a, 101a‧‧‧ Straight line

23b‧‧‧1st side

23c‧‧‧2nd side

23d‧‧‧lower surface

24, 102‧‧‧ reinforcement components

25‧‧‧

26‧‧‧ poles

27‧‧‧Axis components

27B‧‧‧ lower

27F‧‧‧Surface

27R‧‧‧Back part

27T‧‧‧ upper

27FB‧‧‧lower surface

27RB‧‧‧The lower part of the back

28, 113‧‧‧ Joint Department

29, 114‧‧‧ screws

29a, 114a‧‧‧Axis

29b, 114b‧‧‧ head

31‧‧‧ heating department

32‧‧‧Support pin hole

34‧‧‧ gas circulation holes

35‧‧‧Baffle drive mechanism

37‧‧‧Substrate moving mechanism

38‧‧‧Support pins

39‧‧‧Support pin drive mechanism

41‧‧‧ Sealing mechanism

42‧‧‧ Collection Department

43‧‧‧ shaft seal

44‧‧‧ Tube

46‧‧‧ Sealed housing

51‧‧‧Upper Supply Department

52, 62, 82‧‧‧ piping

53‧‧‧Supply

54, 64, 74, 84‧‧‧ Open and close valves

55, 65‧‧‧ Flow Adjustment Department

56‧‧‧Rectifier board

56a‧‧‧Small hole

61‧‧‧ Lower Supply Department

63‧‧‧埠

69‧‧‧ Non-oxidizing gas supply source

71‧‧‧Side discharge

72‧‧‧Exhaust duct

73‧‧‧Exhaust pipe

75, 85‧‧‧ exhaust mechanism

81‧‧‧ Lower discharge section

83‧‧‧Exhaust gas

91‧‧‧Sensor (pressure sensor)

93‧‧‧Sensor (oxygen concentration sensor)

95‧‧‧Control Department

107‧‧‧Flexible components

115‧‧‧ movable table

115a‧‧‧2nd inclined surface

A‧‧‧Transportation port

C‧‧‧Axis

D‧‧‧Side discharge

D1‧‧‧1st direction

D2‧‧‧2nd direction

E, F1, F2‧‧‧ space

H‧‧‧ water level

L‧‧‧ imaginary line

PH‧‧‧heating position

PC‧‧‧ Cooling position

Sp1‧‧‧Importing room

Sp2‧‧‧Processing Room

S1～S7‧‧‧ Process

V‧‧‧ vertical plane

W‧‧‧Substrate

X‧‧‧ direction

Y‧‧‧Width direction

Z‧‧‧Up and down direction

FIG. 1 is a plan view showing a schematic configuration of a part of a substrate processing apparatus. 2 is a side view showing a schematic configuration of a part of a substrate processing apparatus. 3 is a view showing a schematic configuration of a part of a substrate processing apparatus. 4 is an exploded perspective view of a portion of the processing container. Figure 5 is a perspective view of the processing unit. Figure 6 is a plan view of the processing unit. Fig. 7(A) is a plan view of the pressing member, and Fig. 7(B) is a side view of the pressing member. Figure 8 is a cross-sectional view taken along line VIII-VIII of Figure 6. Fig. 9 is a cross-sectional view showing a pressing member in an inclined posture. Fig. 10 is a cross-sectional detailed view of the first end portion and the shaft member. Fig. 11 is a cross-sectional detailed view of the first end portion and the shaft member. 12(A) to 12(D) are schematic views showing the procedure of detaching the lid portion from the frame body. FIG. 13 is a flowchart showing the procedure of an operation example of the substrate processing apparatus. Fig. 14 is a perspective view of a substrate processing apparatus according to a modified embodiment. Fig. 15 is a perspective view of a substrate processing apparatus according to a modified embodiment. Figure 16 is a cross-sectional view showing a substrate processing apparatus according to a modified embodiment. Figure 17 is a cross-sectional view showing a substrate processing apparatus according to a modified embodiment.

Claims (18)

A substrate processing apparatus comprising: a frame having an opening on an upper surface thereof; a lid portion opening and closing the opening by being attached to the frame; and the pressing member having a first end portion and a second end portion that presses the lid portion on the frame body; a stopper that comes into contact with the first end portion of the pressing member, prohibits the first end portion from moving upward; and manual adjustment The height position of the second end portion of the pressing member is adjusted by a user's operation. The substrate processing apparatus according to the first aspect of the invention, wherein the first end portion of the pressing member is located on a side of the lid portion in a plan view, and the second end portion of the pressing member It is located on the other side opposite to the side of the cover portion in plan view. The substrate processing apparatus according to the first or second aspect of the invention, wherein the frame body has a substantially rectangular shape in a plan view, and the cover portion is disposed substantially at a center of the frame body in a plan view. The first end portion of the pressing member and the stopper are disposed in a first corner portion of the frame in a plan view, and the second end portion of the pressing member and the manual adjustment portion are viewed from above The second corner portion of the casing that faces the first corner portion is disposed. The substrate processing apparatus according to any one of the preceding claims, wherein the substrate processing apparatus includes an outer wall panel that is disposed on a side of the housing and is detachable, and the manual adjustment The portion is disposed at a position closer to the outer wall than the stopper. The substrate processing apparatus according to any one of the preceding claims, wherein the manual adjustment unit is attached to the housing, and the second end of the pressing member is opposed to Move up and down in the frame. The substrate processing apparatus according to any one of claims 1 to 5, wherein the manual adjustment portion includes a screw, the second end of the pressing member corresponding to rotation of the screw The department moves up and down. The substrate processing apparatus according to claim 6, wherein the screw is a screw bolt. The substrate processing apparatus according to any one of the first aspect of the present invention, wherein the pressing member has a ring shape in a plan view and has an outer frame that overlaps the lid portion in a plan view. The substrate processing apparatus according to claim 8, wherein the outline of the outer frame has a substantially polygonal shape. The substrate processing apparatus according to claim 8 or 9, wherein the pressing member has a reinforcing member disposed inside the outer frame and two of the reinforcing members in a plan view The end is engaged with the outer frame. The substrate processing apparatus according to any one of claims 8 to 10, wherein the pressing member has three or more seat portions, and the seat portion is directly or indirectly connected to the outer frame and Direct contact with the cover. The substrate processing apparatus according to claim 11, wherein the pressing member has an elastic member provided between the outer frame and the seat. The substrate processing apparatus according to any one of the preceding claims, wherein the pressing member is separable from the stopper and the manual adjustment unit. The substrate processing apparatus according to any one of claims 1 to 13, wherein the stopper is fixed to the frame. The substrate processing apparatus according to any one of claims 1 to 14, wherein the stopper includes a shaft member extending in a substantially horizontal direction, and the pressing member is rotatable around the shaft member . The substrate processing apparatus according to claim 15, wherein the pressing member is in contact with the lid portion in a state where the pressing member is in a substantially horizontal posture. The substrate processing apparatus according to claim 15, wherein the horizontal direction from the shaft member toward the second end portion is observed from a direction of an axis of the shaft member. In one direction, the stopper is prohibited from moving in the first direction with respect to the shaft member in a state where the pressing member is in a substantially horizontal posture, and the stopper is allowed to face the pressing member The pressing member moves in the first direction with respect to the shaft member in a state where the first direction is inclined upward. The substrate processing apparatus according to claim 17, wherein a portion of the shaft member located higher than an imaginary horizontal plane passing through the axial center of the shaft member is referred to as an upper portion of the shaft member a portion of the shaft member other than the upper portion as a lower portion of the shaft member, which is closer to the second end portion than a virtual vertical plane passing through the axial center of the shaft member a portion of the shaft member is a surface portion of the shaft member, and a portion of the shaft member other than the surface portion is a back portion of the shaft member, and the pressing member is in a substantially horizontal posture. The first end portion is in contact with the common portion of the back surface portion and the lower portion of the shaft member, and is in contact with the common portion of the surface portion and the lower portion of the shaft member, and the pressing member The first end portion is in contact with only the surface portion of the shaft member in a state of being inclined upward in the first direction.