TW201826565A - Optoelectronic device and method for manufacturing the same - Google Patents

Optoelectronic device and method for manufacturing the same Download PDF

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TW201826565A
TW201826565A TW107113260A TW107113260A TW201826565A TW 201826565 A TW201826565 A TW 201826565A TW 107113260 A TW107113260 A TW 107113260A TW 107113260 A TW107113260 A TW 107113260A TW 201826565 A TW201826565 A TW 201826565A
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electrode
electrical
semiconductor layer
layer
electrical electrode
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TW107113260A
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TWI662720B (en
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陳昭興
王佳琨
廖健智
曾咨耀
柯淙凱
沈建賦
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晶元光電股份有限公司
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Abstract

An optoelectronic device including a first semiconductor layer having at least four boundaries, a first side and a second side opposite to the first side, wherein any two adjacent boundaries forms a corner, a second semiconductor layer formed on the first side of the first semiconductor layer, a second conductivity type electrode formed on the second semiconductor layer, and at least two first conductivity type electrodes formed on the first side of the first semiconductor layer, wherein the two first conductivity type electrodes are separated and forms a design pattern.

Description

光電元件及其製造方法Photoelectric element and method of manufacturing same

本發明係關於一種光電元件,尤其是關於一種光電元件之電極設計。This invention relates to a photovoltaic element, and more particularly to an electrode design for a photovoltaic element.

發光二極體(light-emitting diode, LED)的發光原理是利用電子在n型半導體與p型半導體間移動的能量差,以光的形式將能量釋放,這樣的發光原理係有別於白熾燈發熱的發光原理,因此發光二極體被稱為冷光源。此外,發光二極體具有高耐久性、壽命長、輕巧、耗電量低等優點,因此現今的照明市場對於發光二極體寄予厚望,將其視為新一代的照明工具,已逐漸取代傳統光源,並且應用於各種領域,如交通號誌、背光模組、路燈照明、醫療設備等。The principle of light-emitting diode (LED) is to use energy difference between the n-type semiconductor and the p-type semiconductor to release energy in the form of light. This principle of illumination is different from incandescent lamps. The principle of heat generation, so the light-emitting diode is called a cold light source. In addition, the light-emitting diode has the advantages of high durability, long life, light weight, low power consumption, etc., so the current lighting market has high hopes for the light-emitting diode, and it is gradually replaced as a new generation of lighting tools. Light source, and is used in various fields, such as traffic signs, backlight modules, street lighting, medical equipment, etc.

第1圖係習知之發光元件結構示意圖,如第1圖所示,習知之發光元件100,包含有一透明基板10、一位於透明基板10上之半導體疊層12,以及至少一電極14位於上述半導體疊層12上,其中上述之半導體疊層12由上而下至少包含一第一導電型半導體層120、一活性層122,以及一第二導電型半導體層124。1 is a schematic view showing the structure of a conventional light-emitting element. As shown in FIG. 1, a conventional light-emitting element 100 includes a transparent substrate 10, a semiconductor laminate 12 on a transparent substrate 10, and at least one electrode 14 located in the semiconductor. On the stack 12, the semiconductor stack 12 includes at least a first conductive semiconductor layer 120, an active layer 122, and a second conductive semiconductor layer 124 from top to bottom.

此外,上述之發光元件100更可以進一步地與其他元件組合連接以形成一發光裝置(light-emitting apparatus)。第2圖為習知之發光裝置結構示意圖,如第2圖所示,一發光裝置200包含一具有至少一電路202之次載體(sub-mount)20;至少一焊料(solder)22位於上述次載體20上,藉由此焊料22將上述發光元件100黏結固定於次載體20上並使發光元件100之基板10與次載體20上之電路202形成電連接;以及,一電性連接結構24,以電性連接發光元件100之電極14與次載體20上之電路202;其中,上述之次載體20可以是導線架(lead frame)或大尺寸鑲嵌基底(mounting substrate),以方便發光裝置200之電路規劃並提高其散熱效果。In addition, the above-described light-emitting element 100 can be further combined with other elements to form a light-emitting apparatus. 2 is a schematic view showing the structure of a conventional light-emitting device. As shown in FIG. 2, a light-emitting device 200 includes a sub-mount 20 having at least one circuit 202; at least one solder 22 is located in the above-mentioned sub-carrier 20, the light-emitting element 100 is bonded and fixed to the secondary carrier 20 by the solder 22, and the substrate 10 of the light-emitting element 100 is electrically connected to the circuit 202 on the secondary carrier 20; and an electrical connection structure 24 is Electrically connecting the electrode 14 of the light-emitting element 100 with the circuit 202 on the secondary carrier 20; wherein the secondary carrier 20 can be a lead frame or a large mounting substrate to facilitate the circuit of the light-emitting device 200. Plan and improve its cooling performance.

一種光電元件,包含:一第一半導體層,具有至少四個邊界、一第一表面、一與第一表面相對之第二表面,其中任意兩相鄰些邊界可構成一角落;一第二半導體層形成於第一半導體層之第一表面之上;一第二電性電極形成於第二半導體層之上;以及至少兩個第一電性電極形成於第一半導體層之第一表面之上,其中所述至少兩個第一電性電極彼此分離並形成一設計型態。A photovoltaic element comprising: a first semiconductor layer having at least four boundaries, a first surface, and a second surface opposite to the first surface, wherein any two adjacent boundaries may form a corner; a second semiconductor a layer is formed on the first surface of the first semiconductor layer; a second electrical electrode is formed on the second semiconductor layer; and at least two first electrical electrodes are formed on the first surface of the first semiconductor layer Wherein the at least two first electrical electrodes are separated from one another and form a design.

本發明揭示一種發光元件及其製造方法,為了使本發明之敘述更加詳盡與完備,請參照下列描述並配合第3A圖至第7圖之圖示。The present invention discloses a light-emitting element and a method of manufacturing the same. In order to make the description of the present invention more detailed and complete, please refer to the following description and cooperate with the drawings of FIGS. 3A to 7.

第3A圖與第3B圖所示為本發明第一實施例之光電元件300的上視圖與側視圖。第3B圖係顯示第3A圖中A-B-C方向之側視結構圖。光電元件300具有一個基板30。基板30並不限定為單一材料,亦可以是由複數不同材料組合而成的複合式基板。例如:基板30可以包含兩個相互接合的第一基板(圖未示)與第二基板(圖未示)。3A and 3B are a top view and a side view showing the photovoltaic element 300 of the first embodiment of the present invention. Fig. 3B is a side view showing the structure of the A-B-C direction in Fig. 3A. The photovoltaic element 300 has a substrate 30. The substrate 30 is not limited to a single material, and may be a composite substrate in which a plurality of different materials are combined. For example, the substrate 30 may include two first substrates (not shown) and a second substrate (not shown) that are bonded to each other.

在基板30上以傳統的磊晶成長製程,形成一磊晶疊層31,包含第一半導體層311具有一第一表面3111及一與第一表面相對之第二表面3112,一活性層312形成於第一半導體層311之第一表面3111之上,以及一第二半導體層313形成於活性層312之上。接著,藉由黃光微影製程技術選擇性移除部分磊晶疊層以在光電元件300之邊界裸露出部分第一半導體層311,並形成一溝渠S於光電元件300之中。在一實施例中,此溝渠S裸露出部分第一半導體層311且被第二半導體層313所圍繞。在一實施例中,溝渠S於上視圖中為一長條形。Forming an epitaxial layer 31 on the substrate 30 by a conventional epitaxial growth process, the first semiconductor layer 311 includes a first surface 3111 and a second surface 3112 opposite to the first surface, and an active layer 312 is formed. A first semiconductor layer 311 is formed over the first surface 3111, and a second semiconductor layer 313 is formed over the active layer 312. Then, a portion of the epitaxial layer is selectively removed by a yellow light lithography process to expose a portion of the first semiconductor layer 311 at the boundary of the photovoltaic element 300, and a trench S is formed in the photovoltaic element 300. In an embodiment, the trench S exposes a portion of the first semiconductor layer 311 and is surrounded by the second semiconductor layer 313. In an embodiment, the trench S is an elongated strip in the upper view.

接著,在光電元件300磊晶疊層31的表面及上述溝渠S側壁上以化學氣相沉積方式(CVD)或物理氣相沉積方式(PVD)等技術沉積形成第一絕緣層341。Next, a first insulating layer 341 is deposited on the surface of the epitaxial layer 31 of the photovoltaic element 300 and the sidewall of the trench S by chemical vapor deposition (CVD) or physical vapor deposition (PVD).

接著,形成至少一第一第一電性電極321於上述光電元件300之邊界旁所裸露出之第一半導體層311之上。在一實施例中,第一第一電性電極321未被第二半導體層313圍繞,以及一第二第一電性電極322形成於上述溝渠S之中。在此實施例中,分離的第一第一電性電極321及第二第一電性電極322形成一種第一電性電極的電極設計型態。Next, at least one first first electrical electrode 321 is formed on the first semiconductor layer 311 exposed beside the boundary of the photovoltaic element 300. In one embodiment, the first first electrical electrode 321 is not surrounded by the second semiconductor layer 313, and a second first electrical electrode 322 is formed in the trench S. In this embodiment, the separated first first electrical electrode 321 and second first electrical electrode 322 form an electrode design of the first electrical electrode.

在本發明之實施例中,電極設計型態可包括電極數量、電極形狀及電極位置的選擇,以增進光電元件靠近邊界區域之電流散佈。例如,第一電性電極之電極設計型態可以包含一或多個第一第一電性電極321以及一或多個第二第一電性電極322,且第二第一電性電極322自上視觀之係被第二半導體層313圍繞,且係為一延伸狀。In an embodiment of the invention, the electrode design pattern may include the selection of the number of electrodes, the shape of the electrodes, and the position of the electrodes to enhance current spreading of the photovoltaic elements near the boundary regions. For example, the electrode design of the first electrical electrode may include one or more first first electrical electrodes 321 and one or more second first electrical electrodes 322, and the second first electrical electrode 322 The upper view is surrounded by the second semiconductor layer 313 and is extended.

在一實施例中,光電元件300之第一半導體層311具有至少四個邊界,相鄰兩邊界可構成一角落,且無跨越邊界之導電結構。在本實施例中,第一第一電性電極321形成於光電元件300之同一邊界上的兩個角落,彼此分離且未跨越光電元件300之邊界。In one embodiment, the first semiconductor layer 311 of the photovoltaic element 300 has at least four boundaries, and adjacent two boundaries may form a corner without a conductive structure crossing the boundary. In the present embodiment, the first first electrical electrodes 321 are formed at two corners on the same boundary of the photovoltaic element 300, separated from each other and not across the boundary of the photovoltaic element 300.

在一實施例中,第一第一電性電極321於第一半導體層上311之投影可具有一圖形,此圖形可為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。第二第一電性電極322可為線形、弧形、線形與弧形混合形、或可具有至少一分支。在一實施例中,第二第一電性電極322可具有一頭端與尾端,且上述頭端具有一寬度大於尾端之一寬度。In an embodiment, the projection of the first first electrical electrode 321 on the first semiconductor layer 311 may have a pattern, which may be a polygon, a circle, an ellipse, a half circle, or a circle. Curved surface. The second first electrical electrode 322 may be linear, curved, linear and curved, or may have at least one branch. In an embodiment, the second first electrical electrode 322 can have a head end and a tail end, and the head end has a width greater than a width of the tail end.

接著,形成一第二電性電極33於第二半導體層313之上。在一實施例中,第二電性電極33於第一半導體層311之投影面積與第二半導體層313之上表面積的比值係介於90~100%。Next, a second electrical electrode 33 is formed on the second semiconductor layer 313. In one embodiment, the ratio of the projected area of the second electrical electrode 33 to the surface area of the second semiconductor layer 311 is between 90 and 100%.

之後,可形成一第二絕緣層342於上述第一第一電性電極321、第二第一電性電極322、第二電性電極33及部分第一絕緣層341之上。其中第二絕緣層342可具有第一開口3421以作為第二電性電極33與後續形成之第四電極36電性連接之用,第二絕緣層342也可具有一第二開口3422以作為第一第一電性電極321與後續形成之第三電極35電性連接之用。在一實施例中,第一絕緣層341或第二絕緣層342可完全覆蓋上述裸露出之第一半導體層311。Then, a second insulating layer 342 is formed on the first first electrical electrode 321, the second first electrical electrode 322, the second electrical electrode 33, and a portion of the first insulating layer 341. The second insulating layer 342 may have a first opening 3421 for electrically connecting the second electrical electrode 33 to the subsequently formed fourth electrode 36. The second insulating layer 342 may also have a second opening 3422 as the first A first electrical electrode 321 is electrically connected to the subsequently formed third electrode 35. In an embodiment, the first insulating layer 341 or the second insulating layer 342 may completely cover the exposed first semiconductor layer 311.

在一實施例中,上述第一絕緣層341或第二絕緣層342可為一透明絕緣層。上述第一絕緣層341或第二絕緣層342的材質可以是氧化物、氮化物、或聚合物(polymer),氧化物可包含氧化鋁(Al2O3)、氧化矽(SiO2)、二氧化鈦(TiO2)、五氧化二鉭(Tantalum Pentoxide, Ta2O5)或氧化鋁(AlOx);氮化物可包含氮化鋁(AlN)、氮化矽(SiNx);聚合物可包含聚醯亞胺(polyimide)或苯并環丁烷(benzocyclobutane, BCB) 等材料或為上述之複合組合。在一實施例中,第一絕緣層341或第二絕緣層342可為一布拉格反射鏡(Distributed Bragg Reflector) 結構。In an embodiment, the first insulating layer 341 or the second insulating layer 342 may be a transparent insulating layer. The material of the first insulating layer 341 or the second insulating layer 342 may be an oxide, a nitride, or a polymer, and the oxide may include aluminum oxide (Al 2 O 3 ), cerium oxide (SiO 2 ), titanium oxide (TiO 2 ), Tantalum Pentoxide (Ta2O5) or alumina (AlOx); the nitride may comprise aluminum nitride (AlN), tantalum nitride (SiNx); the polymer may comprise polyimide or benzo ring A material such as benzocyclobutane (BCB) or a combination of the above. In an embodiment, the first insulating layer 341 or the second insulating layer 342 may be a Bragg Reflector structure.

最後,形成一第三電極35於上述第二絕緣層342、第一第一電性電極321、第二第一電性電極322之上並與第一第一電性電極321、第二第一電性電極322電性連接;及形成一第四電極36於上述第二絕緣層342、第二電性電極33之上並與第二電性電極33電性連接。在一實施例中,自上視觀之,第三電極35與第四電極36於第一半導體層311上之投影面積的比值介於80~100%。Finally, a third electrode 35 is formed on the second insulating layer 342, the first first electrical electrode 321, and the second first electrical electrode 322, and the first first electrical electrode 321 and the second first The electrical electrodes 322 are electrically connected to each other; and a fourth electrode 36 is formed on the second insulating layer 342 and the second electrical electrode 33 and electrically connected to the second electrical electrode 33. In one embodiment, the ratio of the projected area of the third electrode 35 and the fourth electrode 36 on the first semiconductor layer 311 is from 80 to 100% from above.

在一實施例中,第三電極35可以只覆蓋部分第一第一電性電極321;在另一實施例中,第三電極35可以完全不覆蓋第一第一電性電極321。In an embodiment, the third electrode 35 may cover only a portion of the first first electrical electrode 321; in another embodiment, the third electrode 35 may not cover the first first electrical electrode 321 at all.

在一實施例中,第三電極35之上緣至基板30上緣有一高度H1,第四電極36之上緣至基板30上緣有一高度H2,且H1大致相等於H2。在一實施例中, H1與H2之差異小於5~10%。藉由調整H1與H2之差異,可減少光電元件300後續與載板或電路元件形成覆晶式結構之斷線機率,進而增加產品良率。在一實施例中,第三電極35之邊界與第四電極36之邊界具有一最小距離D1,且D1大於50μm,在一實施例中D1可為50-200μm、100-200μm。In one embodiment, the upper edge of the third electrode 35 has a height H1 to the upper edge of the substrate 30, the upper edge of the fourth electrode 36 has a height H2 to the upper edge of the substrate 30, and H1 is substantially equal to H2. In one embodiment, the difference between H1 and H2 is less than 5-10%. By adjusting the difference between H1 and H2, the probability of disconnection of the flip-chip structure of the photovoltaic element 300 with the carrier or circuit component can be reduced, thereby increasing the yield of the product. In one embodiment, the boundary of the third electrode 35 has a minimum distance D1 from the boundary of the fourth electrode 36, and D1 is greater than 50 μm. In one embodiment, D1 may be 50-200 μm, 100-200 μm.

在一實施例中,第一第一電性電極321、第二第一電性電極322、第二電性電極33、第三電極35及第四電極36可為一多層結構,及/或包含一反射層(圖未示),且可對活性層312發出之光線具有80%以上之反射率。在一實施例中,第一第一電性電極321、第二第一電性電極322及第三電極35也可於同一製程中形成。在一實施例中,光電元件300發出之光線可經第一第一電性電極321、第二第一電性電極322、第二電性電極33、第三電極35或第四電極36反射而從基板30方向離開光電元件300。In an embodiment, the first first electrical electrode 321 , the second first electrical electrode 322 , the second electrical electrode 33 , the third electrode 35 , and the fourth electrode 36 may have a multi-layer structure, and/or A reflective layer (not shown) is included, and the light emitted from the active layer 312 has a reflectance of 80% or more. In an embodiment, the first first electrical electrode 321, the second first electrical electrode 322, and the third electrode 35 may also be formed in the same process. In an embodiment, the light emitted by the photovoltaic element 300 can be reflected by the first first electrical electrode 321, the second first electrical electrode 322, the second electrical electrode 33, the third electrode 35, or the fourth electrode 36. The photovoltaic element 300 is separated from the direction of the substrate 30.

為了達到一定的導電度,第一第一電性電極321、第二第一電性電極322、第二電性電極33、第三電極35及第四電極36之材質較佳例如可以是金屬,例如金(Au)、銀(Ag)、銅(Cu)、鉻(Cr)、鋁(Al)、鉑(Pt)、鎳(Ni)、鈦(Ti)、錫(Sn)等,其合金或其疊層組合。The material of the first first electrical electrode 321 , the second first electrical electrode 322 , the second electrical electrode 33 , the third electrode 35 , and the fourth electrode 36 is preferably metal, for example, in order to achieve a certain degree of electrical conductivity. For example, gold (Au), silver (Ag), copper (Cu), chromium (Cr), aluminum (Al), platinum (Pt), nickel (Ni), titanium (Ti), tin (Sn), etc., alloys or Its laminated combination.

在一實施例中,可提供一載板或一電路元件(圖未示),藉由打線或焊錫等方式於載板或電路元件上形成一第一載板電極(圖未示)、及一第二載板電極(圖未示)。此第一載板電極、及第二載板電極可與光電元件300之第三電極35、第四電極36形成一覆晶式結構。In one embodiment, a carrier or a circuit component (not shown) may be provided, and a first carrier electrode (not shown) and a first carrier electrode (not shown) are formed on the carrier or circuit component by wire bonding or soldering. The second carrier electrode (not shown). The first carrier electrode and the second carrier electrode can form a flip-chip structure with the third electrode 35 and the fourth electrode 36 of the photovoltaic element 300.

在一實施例中,可形成一第一調整層(圖未示)於第一第一電性電極321、及/或第二第一電性電極322與第三電極35之間,且電性連接於第一第一電性電極321、及/或第二第一電性電極322與第三電極35。在一實施例中,可形成一第二調整層(圖未示)於第二電性電極33與第四電極36之間,且電性連接於第二電性電極33與第四電極36。在本實施例中,第一調整層及第二調整層可分別具有一高度,且因為第一調整層及第二調整層之形成位置,使得第一調整層及第二調整層之高度會影響上述H1與H2之高度。因此藉由分別設計第一調整層及/或第二調整層之形成高度,可以減少上述H1與H2之高度差異,而可減少光電元件300後續與載板或電路元件形成覆晶式結構之斷線機率,進而增加產品良率。在一實施例中,第一調整層於第一半導體層311上之投影面積大於第三電極35於第一半導體層311上之投影面積,或第二調整層於第一半導體層311上之投影面積大於第四電極36於第一半導體層311上之投影面積。在一實施例中,第一調整層或第二調整層之材質較佳例如可以是金屬,例如金(Au)、銀(Ag)、銅(Cu)、鉻(Cr)、鋁(Al)、鉑(Pt)、鎳(Ni)、鈦(Ti)、錫(Sn)等,其合金或其疊層組合。在一實施例中,第一調整層或第二調整層可為一多層結構,及/或包含一反射層(圖未示),且可對活性層312發出之光線具有80%以上之反射率。In an embodiment, a first adjustment layer (not shown) may be formed between the first first electrical electrode 321 and/or the second first electrical electrode 322 and the third electrode 35, and the electrical The first first electrical electrode 321 and/or the second first electrical electrode 322 and the third electrode 35 are connected. In an embodiment, a second adjustment layer (not shown) is formed between the second electrical electrode 33 and the fourth electrode 36, and is electrically connected to the second electrical electrode 33 and the fourth electrode 36. In this embodiment, the first adjustment layer and the second adjustment layer respectively have a height, and because the positions of the first adjustment layer and the second adjustment layer are formed, the heights of the first adjustment layer and the second adjustment layer are affected. The height of H1 and H2 above. Therefore, by separately designing the formation heights of the first adjustment layer and/or the second adjustment layer, the height difference between H1 and H2 can be reduced, and the subsequent formation of the flip-chip structure of the photovoltaic element 300 with the carrier or circuit component can be reduced. Line probability, which in turn increases product yield. In one embodiment, the projected area of the first adjustment layer on the first semiconductor layer 311 is larger than the projected area of the third electrode 35 on the first semiconductor layer 311, or the projection of the second adjustment layer on the first semiconductor layer 311. The area is larger than the projected area of the fourth electrode 36 on the first semiconductor layer 311. In an embodiment, the material of the first adjustment layer or the second adjustment layer is preferably, for example, a metal such as gold (Au), silver (Ag), copper (Cu), chromium (Cr), aluminum (Al), Platinum (Pt), nickel (Ni), titanium (Ti), tin (Sn), etc., alloys thereof or a combination thereof. In an embodiment, the first adjustment layer or the second adjustment layer may be a multi-layer structure, and/or include a reflective layer (not shown), and may have a reflection of more than 80% of the light emitted from the active layer 312. rate.

第3C圖係顯示本發明第二實施例之光電元件400上視圖。本實施例其製作方法、使用材料及標號等與上述第一實施例相同,在此不再贅述。在本發明之實施例中,電極設計型態可包括電極數量、電極形狀及電極位置的選擇,以增進光電元件400靠近邊界區域之電流散佈。Fig. 3C is a top view showing the photovoltaic element 400 of the second embodiment of the present invention. The manufacturing method, the materials used, the reference numerals, and the like in the embodiment are the same as those in the first embodiment described above, and are not described herein again. In an embodiment of the invention, the electrode design profile may include selection of the number of electrodes, electrode shape, and electrode position to enhance current spreading of the photovoltaic element 400 near the boundary region.

在一實施例中,光電元件400之第一半導體層311具有至少四個邊界,相鄰兩邊界可構成一角落,且無跨越邊界之導電結構。在本實施例中,第一第一電性電極321形成於第一半導體層311的任一角落之上,且第二絕緣層342可具有一第二開口3422以作為第一第一電性電極321與後續形成之第三電極35電性連接之用。第二第一電性電極322形成於第一半導體層311之上,且被第二半導體層313圍繞,且第二絕緣層342也可具有一第三開口3423以作為第二第一電性電極322與後續形成之第三電極35電性連接之用。In one embodiment, the first semiconductor layer 311 of the photovoltaic element 400 has at least four boundaries, and adjacent two boundaries may form a corner without a conductive structure crossing the boundary. In this embodiment, the first first electrical electrode 321 is formed on any corner of the first semiconductor layer 311, and the second insulating layer 342 can have a second opening 3422 as the first first electrical electrode. The 321 is electrically connected to the subsequently formed third electrode 35. The second first electrical electrode 322 is formed on the first semiconductor layer 311 and surrounded by the second semiconductor layer 313, and the second insulating layer 342 may also have a third opening 3423 as the second first electrical electrode. 322 is electrically connected to the subsequently formed third electrode 35.

在本實施例中,第一第一電性電極321於第一半導體層上311之投影可具有一圖形,其中此圖形可為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。第二第一電性電極322係為延伸狀,且形狀可為線形、弧形、線形與弧形混合形、或可具有至少一分支。在一實施例中,第二第一電性電極322可具有一頭端及一尾端,且上述頭端可具有一寬度大於尾端之一寬度。In this embodiment, the projection of the first first electrical electrode 321 on the first semiconductor layer 311 may have a pattern, wherein the graphic may be a polygon, a circle, an ellipse, a half circle, or a Arc surface. The second first electrical electrode 322 is extended and may have a shape of a line, an arc, a line and an arc, or may have at least one branch. In an embodiment, the second first electrical electrode 322 can have a head end and a tail end, and the head end can have a width greater than a width of the tail end.

在本實施例中,第三第一電性電極323係形成於光電元件400之邊界旁所裸露出之第一半導體層311之上。在一實施例中,第三第一電性電極323未被第二半導體層313圍繞,且第二絕緣層342具有一第四開口3424以作為第三第一電性電極323與後續形成之第三電極35電性連接之用。第四第一電性電極324係形成於光電元件400之邊界旁所裸露出之第一半導體層311之上。在一實施例中,第四第一電性電極324未被第二半導體層313圍繞,且第二絕緣層342具有一第五開口3425以作為第四第一電性電極324與後續形成之第三電極35電性連接之用。In the present embodiment, the third first electrical electrode 323 is formed over the first semiconductor layer 311 exposed by the boundary of the photovoltaic element 400. In an embodiment, the third first electrical electrode 323 is not surrounded by the second semiconductor layer 313, and the second insulating layer 342 has a fourth opening 3424 as the third first electrical electrode 323 and the subsequent formation. The three electrodes 35 are electrically connected. The fourth first electrical electrode 324 is formed over the first semiconductor layer 311 exposed by the boundary of the photovoltaic element 400. In an embodiment, the fourth first electrical electrode 324 is not surrounded by the second semiconductor layer 313, and the second insulating layer 342 has a fifth opening 3425 as the fourth first electrical electrode 324 and the subsequent formation. The three electrodes 35 are electrically connected.

在本實施例中,第三第一電性電極323於第一半導體層上311之投影可具有一圖形,其中此圖形可為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。第四第一電性電極324之形狀可為線形、弧形、線形與弧形混合形、或可具有至少一分支。在一實施例中,第四第一電性電極324可具有一頭端及一尾端,且上述頭端可具有一寬度大於尾端之一寬度。在一實施例中,第三第一電性電極323與第四第一電性電極324之形狀不同。In this embodiment, the projection of the third first electrical electrode 323 on the first semiconductor layer 311 may have a pattern, wherein the graphic may be a polygon, a circle, an ellipse, a half circle, or a Arc surface. The shape of the fourth first electrical electrode 324 may be linear, curved, linear and curved, or may have at least one branch. In an embodiment, the fourth first electrical electrode 324 can have a head end and a tail end, and the head end can have a width greater than a width of the tail end. In an embodiment, the third first electrical electrode 323 and the fourth first electrical electrode 324 are different in shape.

在一實施例中,依據產品設計之要求,第一第一電性電極321與第三第一電性電極323可形成在光電元件400之同一邊界旁,且彼此分離。在一實施例中,第一第一電性電極321及第四第一電性電極324、或第三第一電性電極323及第四第一電性電極324不形成在光電元件400之同一邊界旁。In an embodiment, the first first electrical electrode 321 and the third first electrical electrode 323 may be formed beside the same boundary of the photovoltaic element 400 and separated from each other according to the requirements of the product design. In one embodiment, the first first electrical electrode 321 and the fourth first electrical electrode 324, or the third first electrical electrode 323 and the fourth first electrical electrode 324 are not formed in the same photocell 400. Next to the border.

在一實施例中,第四第一電性電極324的頭端可被第三電極35所覆蓋,且第四第一電性電極324的尾端不被第四電極36所覆蓋。在本實施例中,第三電極35於第一半導體層311上之投影面積大於第四電極36於第一半導體層311上之投影面積,且第三電極35及第四電極36於第一半導體層311上之投影面積之比值介於110~120%。在一實施例中,上述第二第一電性電極322及第四第一電性電極324之尾端延伸方向為大致相互平行。In an embodiment, the head end of the fourth first electrical electrode 324 may be covered by the third electrode 35, and the tail end of the fourth first electrical electrode 324 is not covered by the fourth electrode 36. In this embodiment, the projected area of the third electrode 35 on the first semiconductor layer 311 is larger than the projected area of the fourth electrode 36 on the first semiconductor layer 311, and the third electrode 35 and the fourth electrode 36 are on the first semiconductor. The ratio of the projected area on layer 311 is between 110 and 120%. In one embodiment, the ends of the second first electrical electrode 322 and the fourth first electrical electrode 324 extend substantially parallel to each other.

第4A圖係顯示本發明第三實施例之光電元件500上視圖。本實施例其製作方法、使用材料及標號等與上述第一實施例相同,在此不再贅述。在本發明之實施例中,電極設計型態可包括電極數量、電極形狀及電極位置的選擇,以增進光電元件500靠近邊界區域之電流散佈。Fig. 4A is a top view showing the photovoltaic element 500 of the third embodiment of the present invention. The manufacturing method, the materials used, the reference numerals, and the like in the embodiment are the same as those in the first embodiment described above, and are not described herein again. In an embodiment of the invention, the electrode design pattern may include selection of the number of electrodes, electrode shape, and electrode position to enhance current spreading of the photovoltaic element 500 near the boundary region.

在本實施例中,光電元件500之四個邊界形成一長方形,相鄰兩邊界可構成一角落,且無跨越邊界之導電結構,上述邊界具有一第一長邊B1、一第二長邊B3、一第一短邊B2及一第二短邊B4。在一實施例中,上述第一長邊B1或第二長邊B3之長度大於第一短邊B2或第二短邊B4。在本實施例中,第三電極35及第四電極36於第一半導體層311上之投影係沿著第一長邊B1或第二長邊B3排列。In this embodiment, the four boundaries of the photovoltaic element 500 form a rectangle, and adjacent two boundaries may form a corner without a conductive structure crossing the boundary. The boundary has a first long side B1 and a second long side B3. a first short side B2 and a second short side B4. In an embodiment, the length of the first long side B1 or the second long side B3 is greater than the first short side B2 or the second short side B4. In this embodiment, the projections of the third electrode 35 and the fourth electrode 36 on the first semiconductor layer 311 are arranged along the first long side B1 or the second long side B3.

在本實施例中,兩個彼此分離之第一第一電性電極321係形成於第一短邊B2之兩個角落之上,且第二絕緣層342也可具有一第二開口3422以作為第一第一電性電極321與後續形成之第三電極35電性連接之用。兩個第四第一電性電極324分別位於第一長邊B1及一第二長邊B3之邊界旁所裸露出之第一半導體層311之上。在本實施例中,第三第一電性電極323係形成於第一短邊B2之上,且第二絕緣層342也可具有一第四開口3424以作為第三第一電性電極323與後續形成之第三電極35電性連接之用。第四第一電性電極324未被第二半導體層313圍繞,且第二絕緣層342也可具有一第三開口3423以作為第四第一電性電極324與後續形成之第三電極35電性連接之用。In this embodiment, two first first electrical electrodes 321 separated from each other are formed on two corners of the first short side B2, and the second insulating layer 342 may also have a second opening 3422 as The first first electrical electrode 321 is electrically connected to the subsequently formed third electrode 35. The two fourth first electrical electrodes 324 are respectively located on the first semiconductor layer 311 exposed by the boundary between the first long side B1 and the second long side B3. In this embodiment, the third first electrical electrode 323 is formed on the first short side B2, and the second insulating layer 342 may also have a fourth opening 3424 as the third first electrical electrode 323 and The subsequently formed third electrode 35 is electrically connected. The fourth first electrical electrode 324 is not surrounded by the second semiconductor layer 313, and the second insulating layer 342 may also have a third opening 3423 to be electrically connected as the fourth first electrical electrode 324 and the subsequently formed third electrode 35. For sexual connections.

在一實施例中,第三第一電性電極323與上述兩第一第一電性電極321之距離大致相等。此外,第一第一電性電極321、第四第一電性電極324、及第三電極35可於同一製程中形成。In one embodiment, the distance between the third first electrical electrode 323 and the two first first electrical electrodes 321 is substantially equal. In addition, the first first electrical electrode 321, the fourth first electrical electrode 324, and the third electrode 35 may be formed in the same process.

在本實施例中,第一第一電性電極321於第一半導體層上311之投影可具有一圖形,其中圖形為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。第三第一電性電極323於第一半導體層上311之投影可具有一圖形,其中圖形為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。第四第一電性電極324為延伸狀,可為線形、弧形、線形與弧形混合形、或可具有至少一分支。在一實施例中,第四第一電性電極324具有一頭端及一尾端,且上述頭端可具有一寬度大於尾端之一寬度。在一實施例中,第三第一電性電極323與第四第一電性電極324之形狀不同。In this embodiment, the projection of the first first electrical electrode 321 on the first semiconductor layer 311 may have a pattern in which the graphic is a polygon, a circle, an ellipse, a half circle, or an arc. surface. The projection of the third first electrical electrode 323 on the first semiconductor layer 311 may have a pattern in which the pattern is a polygon, a circle, an ellipse, a half circle or a circular arc surface. The fourth first electrical electrode 324 is elongated, and may be linear, curved, linear and curved, or may have at least one branch. In one embodiment, the fourth first electrical electrode 324 has a head end and a tail end, and the head end may have a width greater than a width of the tail end. In an embodiment, the third first electrical electrode 323 and the fourth first electrical electrode 324 are different in shape.

在一實施例中,上述第四第一電性電極324之頭端指向第一短邊B2且尾端指向第二短邊B4。在一實施例中,此第四第一電性電極324的頭端可被第三電極35所覆蓋,且第四第一電性電極324的尾端不被第四電極36所覆蓋。在一實施例中,上述兩第四第一電性電極324之尾端延伸方向大致相互平行。在本實施例中,第三電極35於第一半導體層311上之投影面積大於第四電極36於第一半導體層311上之投影面積;且第三電極35及第四電極36於第一半導體層311上之投影面積之比值介於110~120%。In an embodiment, the head end of the fourth first electrical electrode 324 is directed to the first short side B2 and the tail end is directed to the second short side B4. In an embodiment, the front end of the fourth first electrical electrode 324 can be covered by the third electrode 35, and the tail end of the fourth first electrical electrode 324 is not covered by the fourth electrode 36. In one embodiment, the ends of the two fourth first electrical electrodes 324 extend substantially parallel to each other. In this embodiment, the projected area of the third electrode 35 on the first semiconductor layer 311 is larger than the projected area of the fourth electrode 36 on the first semiconductor layer 311; and the third electrode 35 and the fourth electrode 36 are on the first semiconductor. The ratio of the projected area on layer 311 is between 110 and 120%.

第4B圖係顯示本發明第四實施例之光電元件600之上視圖。本實施例其製作方法、使用材料及標號等與上述第一實施例相同,在此不再贅述。在本發明之實施例中,電極設計型態可包括電極數量、電極形狀及電極位置的選擇,以增進光電元件600靠近邊界區域之電流散佈。Fig. 4B is a top view showing the photovoltaic element 600 of the fourth embodiment of the present invention. The manufacturing method, the materials used, the reference numerals, and the like in the embodiment are the same as those in the first embodiment described above, and are not described herein again. In an embodiment of the invention, the electrode design pattern may include the selection of the number of electrodes, the shape of the electrodes, and the position of the electrodes to enhance current spreading of the photovoltaic element 600 near the boundary region.

在本實施例中,光電元件600之四個邊界形成一長方形,相鄰兩邊界可構成一角落,且無跨越邊界之導電結構。光電元件600具有一第一長邊B1、一第二長邊B3、一第一短邊B2及一第二短邊B4。在一實施例中,上述第一長邊B1或第二長邊B3之長度大於第一短邊B2或第二短邊B4。在本實施例中,第三電極35及第四電極36於第一半導體層311上之投影係沿著第一長邊B1或第二長邊B3排列。In the present embodiment, the four boundaries of the photovoltaic element 600 form a rectangle, and adjacent two boundaries may form a corner without a conductive structure crossing the boundary. The photoelectric element 600 has a first long side B1, a second long side B3, a first short side B2 and a second short side B4. In an embodiment, the length of the first long side B1 or the second long side B3 is greater than the first short side B2 or the second short side B4. In this embodiment, the projections of the third electrode 35 and the fourth electrode 36 on the first semiconductor layer 311 are arranged along the first long side B1 or the second long side B3.

在本實施例中,包含至少一個第一第一電性電極321。在一實施例中,可形成四個第一第一電性電極321於第一半導體層311的四個角落之上,且第二絕緣層342也可具有一第二開口3422以作為第一第一電性電極321與後續形成之第三電極35電性連接之用。兩個第二第一電性電極322形成於第一半導體層311之上,且被第二半導體層313圍繞,且第二絕緣層342也可具有一第三開口3423以作為第二第一電性電極322與後續形成之第三電極35電性連接之用。In this embodiment, at least one first first electrical electrode 321 is included. In one embodiment, four first first electrical electrodes 321 may be formed on four corners of the first semiconductor layer 311, and the second insulating layer 342 may also have a second opening 3422 as the first An electrical electrode 321 is electrically connected to the subsequently formed third electrode 35. Two second first electrodes 321 are formed on the first semiconductor layer 311 and surrounded by the second semiconductor layer 313, and the second insulating layer 342 may also have a third opening 3423 as the second first The electrode 322 is electrically connected to the subsequently formed third electrode 35.

在本實施例中,第一第一電性電極321於第一半導體層上311之投影可具有一圖形,其中圖形為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。第二第一電性電極322於第一半導體層上311之投影可具有一圖形,其中圖形為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。在一實施例中,上述兩個第二第一電性電極322於第一半導體層311上之投影形狀可為相同或不同。In this embodiment, the projection of the first first electrical electrode 321 on the first semiconductor layer 311 may have a pattern in which the graphic is a polygon, a circle, an ellipse, a half circle, or an arc. surface. The projection of the second first electrical electrode 322 on the first semiconductor layer 311 may have a pattern in which the pattern is a polygon, a circle, an ellipse, a half circle, or a circular arc surface. In an embodiment, the projected shapes of the two second first electrodes 322 on the first semiconductor layer 311 may be the same or different.

在本實施例中,第三電極35係包含兩個延伸部351,且上述兩延伸部351可大致形成一凹口R,且第四電極36位於凹口R內。此外,第一第一電性電極321、第二第一電性電極322及第三電極35可於同一製程中形成。In the present embodiment, the third electrode 35 includes two extending portions 351, and the two extending portions 351 can substantially form a notch R, and the fourth electrode 36 is located in the notch R. In addition, the first first electrical electrode 321, the second first electrical electrode 322, and the third electrode 35 may be formed in the same process.

第4C圖係顯示本發明第五實施例之光電元件700之上視圖。本實施例其製作方法、使用材料及標號等與上述第一實施例相同,在此不再贅述。在本發明之實施例中,電極設計型態可包括電極數量、電極形狀及電極位置的選擇,以增進光電元件700靠近邊界區域之電流散佈。Fig. 4C is a top view showing the photovoltaic element 700 of the fifth embodiment of the present invention. The manufacturing method, the materials used, the reference numerals, and the like in the embodiment are the same as those in the first embodiment described above, and are not described herein again. In an embodiment of the invention, the electrode design pattern may include the selection of the number of electrodes, the shape of the electrodes, and the position of the electrodes to enhance current spreading of the photovoltaic element 700 near the boundary region.

在一實施例中,光電元件700之第一半導體層311具有至少四個邊界,相鄰兩邊界可構成一角落,且無跨越邊界之導電結構。在本實施例中,包含四個第一第一電性電極321,係分別形成於第一半導體層311的四個角落之上,且第二絕緣層342也可具有一第二開口3422以作為第一第一電性電極321與後續形成之第三電極35電性連接之用。複數個第二第一電性電極322形成於第一半導體層311之上,係被第二半導體層313圍繞,且第二絕緣層342也可具有一第四開口3424以作為第二第一電性電極322與後續形成之第三電極35電性連接之用。複數個第三第一電性電極323,係形成於光電元件700之邊界旁所裸露出之第一半導體層311之上。換言之,第三第一電性電極323未被第二半導體層313圍繞,且第一半導體層311的任一邊界旁可包含一個或多個第三第一電性電極323。第二絕緣層342可具有一第三開口3423以作為第二第一電性電極322與後續形成之第三電極35電性連接之用。In one embodiment, the first semiconductor layer 311 of the photovoltaic element 700 has at least four boundaries, and adjacent two boundaries may form a corner without a conductive structure crossing the boundary. In this embodiment, four first first electrical electrodes 321 are formed on four corners of the first semiconductor layer 311, and the second insulating layer 342 may also have a second opening 3422 as The first first electrical electrode 321 is electrically connected to the subsequently formed third electrode 35. A plurality of second first electrical electrodes 322 are formed on the first semiconductor layer 311 and surrounded by the second semiconductor layer 313, and the second insulating layer 342 may also have a fourth opening 3424 as the second first electrical The electrode 322 is electrically connected to the subsequently formed third electrode 35. A plurality of third first electrical electrodes 323 are formed over the first semiconductor layer 311 exposed by the boundary of the photovoltaic element 700. In other words, the third first electrical electrode 323 is not surrounded by the second semiconductor layer 313, and one or more third first electrical electrodes 323 may be included beside any of the boundaries of the first semiconductor layer 311. The second insulating layer 342 can have a third opening 3423 to be electrically connected to the subsequently formed third electrode 35 as the second first electrical electrode 322.

在本實施例中,第一第一電性電極321於第一半導體層上311之投影可具有一圖形,其中圖形為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。第二第一電性電極322於第一半導體層上311之投影可具有一圖形,其中圖形為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。在一實施例中,第二第一電性電極322之形狀可為延伸狀,且其延伸方向可平行於延伸部351之延伸方向。第二第一電性電極322可為線形、弧形、線形與弧形混合形、或可具有至少一分支。在一實施例中,上述複數個第二第一電性電極322於第一半導體層311上之投影面積可為相同或不同。第三第一電性電極323於第一半導體層上311之投影可具有一圖形,其中圖形為一多邊形、一圓形、一橢圓形、一半圓形或具有一圓弧面。In this embodiment, the projection of the first first electrical electrode 321 on the first semiconductor layer 311 may have a pattern in which the graphic is a polygon, a circle, an ellipse, a half circle, or an arc. surface. The projection of the second first electrical electrode 322 on the first semiconductor layer 311 may have a pattern in which the pattern is a polygon, a circle, an ellipse, a half circle, or a circular arc surface. In an embodiment, the shape of the second first electrical electrode 322 may be extended, and the extending direction thereof may be parallel to the extending direction of the extending portion 351. The second first electrical electrode 322 may be linear, curved, linear and curved, or may have at least one branch. In one embodiment, the projected areas of the plurality of second first electrical electrodes 322 on the first semiconductor layer 311 may be the same or different. The projection of the third first electrical electrode 323 on the first semiconductor layer 311 may have a pattern in which the pattern is a polygon, a circle, an ellipse, a half circle or a circular arc surface.

在本實施例中,第三電極35係包含三個延伸部351,且上述三個延伸部351可大致形成兩凹口R,且兩個第四電極36可形成於上述兩個凹口R內。在本實施例中,至少一第二第一電性電極322可形成於上述延伸部351之中。In this embodiment, the third electrode 35 includes three extending portions 351, and the three extending portions 351 can form two notches R, and the two fourth electrodes 36 can be formed in the two notches R. . In this embodiment, at least one second first electrical electrode 322 may be formed in the extension portion 351.

在一實施例中,上述第一第一電性電極321、第二第一電性電極322、第三第一電性電極323於第一半導體層311上之投影形狀也可為相同或不同。此外,第一第一電性電極321、第二第一電性電極322、第三第一電性電極323及第三電極35也可於同一製程中形成。In one embodiment, the projection shapes of the first first electrical electrode 321, the second first electrical electrode 322, and the third first electrical electrode 323 on the first semiconductor layer 311 may be the same or different. In addition, the first first electrical electrode 321, the second first electrical electrode 322, the third first electrical electrode 323, and the third electrode 35 may be formed in the same process.

第4D圖係顯示本發明第六實施例之光電元件700’之上視圖。本實施例係為第五實施例之可能變化例,其製作方法、使用材料、電極設計及標號等與上述第五實施例相同,在此不再贅述。Fig. 4D is a top view showing the photovoltaic element 700' of the sixth embodiment of the present invention. The embodiment is a possible variation of the fifth embodiment, and the manufacturing method, the material used, the electrode design, the reference numerals, and the like are the same as those in the fifth embodiment, and are not described herein again.

在本實施例中,光電元件700’之第二絕緣層342具有複數個第一開口3421’以作為第二電性電極33與後續形成之第四電極36電性連接之用。在本實施例中,第二絕緣層342具有複數個第一開口3421可以減少第三電極35及第四電極36高度的差異,減少後續與載板或電路元件形成覆晶式結構之斷線機率,進而增加產品良率。In the present embodiment, the second insulating layer 342 of the photovoltaic element 700' has a plurality of first openings 3421' for electrically connecting the second electrical electrodes 33 to the subsequently formed fourth electrodes 36. In the embodiment, the second insulating layer 342 has a plurality of first openings 3421, which can reduce the difference in height between the third electrode 35 and the fourth electrode 36, and reduce the probability of disconnection of the flip-chip structure with the carrier or the circuit component. , thereby increasing product yield.

第5A圖至第5C圖係繪示出一發光模組示意圖,第5A圖係顯示一發光模組外部透視圖,一發光模組800可包含一載體502,一光電元件(未顯示),複數個透鏡504、506、508及510,及兩電源供應終端512及514。此發光模組800可連接於之後描述之發光單元540。5A to 5C are schematic views showing a light emitting module, and FIG. 5A is a perspective view showing an external light emitting module. The light emitting module 800 can include a carrier 502, a photoelectric component (not shown), and a plurality of Lenses 504, 506, 508 and 510, and two power supply terminals 512 and 514. The lighting module 800 can be connected to the lighting unit 540 described later.

第5B-5C圖係顯示一發光模組800之剖面圖,其中第8C圖係第8B圖之E區的放大圖。載體502可包含一上載體503及下載體501,其中下載體501之一表面可與上載體503接觸。透鏡504及508形成在上載體503之上。上載體503可形成至少一通孔515,而依本發明實施例形成之光電元件300或其他實施例之光電元件(圖未示)可形成在上述通孔515中並與下載體501接觸,且被膠材521圍繞。膠材521之上具有一透鏡508,其中膠材521之材料可為矽膠樹脂、環氧樹脂或其他材料。在一實施例中,通孔515之兩側壁之上可形成一反射層519以增加出光效率;下載體501之下表面可形成一金屬層517以增進散熱效率。5B-5C is a cross-sectional view showing a light-emitting module 800, wherein FIG. 8C is an enlarged view of the E region of FIG. 8B. The carrier 502 can include an upper carrier 503 and a download body 501, wherein a surface of the download body 501 can be in contact with the upper carrier 503. Lenses 504 and 508 are formed over upper carrier 503. The upper carrier 503 can form at least one through hole 515, and the photovoltaic element 300 formed according to the embodiment of the present invention or a photoelectric element (not shown) of other embodiments can be formed in the through hole 515 and contact with the download body 501, and The glue 521 is surrounded. There is a lens 508 on the rubber material 521, wherein the material of the rubber material 521 can be silicone resin, epoxy resin or other materials. In one embodiment, a reflective layer 519 may be formed on both sidewalls of the via 515 to increase light extraction efficiency; a metal layer 517 may be formed on the lower surface of the download body 501 to improve heat dissipation efficiency.

第6A-6B圖係繪示出一光源產生裝置示意圖900,一光源產生裝置900可包含一發光模組800、一發光單元540、一電源供應系統(未顯示)以供應發光模組800一電流、以及一控制元件(未顯示),用以控制電源供應系統(未顯示)。光源產生裝置900可以是一照明裝置,例如路燈、車燈或室內照明光源,也可以是交通號誌或一平面顯示器中背光模組的一背光光源。6A-6B is a schematic diagram 900 of a light source generating device. A light source generating device 900 can include a light emitting module 800, a light emitting unit 540, and a power supply system (not shown) for supplying a current to the light emitting module 800. And a control component (not shown) for controlling the power supply system (not shown). The light source generating device 900 can be a lighting device, such as a street light, a lamp or an indoor lighting source, or a backlight source of a backlight module in a traffic sign or a flat display.

第7圖係繪示一燈泡示意圖。燈泡1000包括一個外殼921,一透鏡922,一照明模組924,一支架925,一散熱器926,一串接部927及一電串接器928。其中照明模組924係包括一載體923,並在載體923上包含至少一個上述實施例中的光電元件300或其他實施例之光電元件(圖未示)。Figure 7 is a schematic view of a light bulb. The bulb 1000 includes a housing 921, a lens 922, a lighting module 924, a bracket 925, a heat sink 926, a series of junctions 927 and an electrical connector 928. The illumination module 924 includes a carrier 923 and includes at least one of the photovoltaic elements 300 of the above embodiment or other embodiments of the photovoltaic elements (not shown) on the carrier 923.

具體而言,基板30係為一成長及/或承載基礎。候選材料可包含導電基板或不導電基板、透光基板或不透光基板。其中導電基板材料其一可為鍺(Ge)、砷化鎵(GaAs)、銦化磷(InP)、碳化矽(SiC)、矽(Si)、鋁酸鋰(LiAlO2)、氧化鋅(ZnO)、氮化鎵(GaN)、氮化鋁(AlN)、金屬。透光基板材料其一可為藍寶石(Sapphire)、鋁酸鋰(LiAlO2)、氧化鋅(ZnO)、氮化鎵(GaN)、玻璃、鑽石、CVD鑽石、與類鑽碳(Diamond-Like Carbon;DLC)、尖晶石(spinel, MgAl2O4)、氧化鋁(Al2O3)、氧化矽(SiOX) 及鎵酸鋰(LiGaO2)。Specifically, the substrate 30 is a growth and/or load bearing foundation. The candidate material may comprise a conductive substrate or a non-conductive substrate, a light transmissive substrate or an opaque substrate. One of the conductive substrate materials may be germanium (Ge), gallium arsenide (GaAs), indium phosphate (InP), tantalum carbide (SiC), germanium (Si), lithium aluminate (LiAlO2), zinc oxide (ZnO). , gallium nitride (GaN), aluminum nitride (AlN), metal. One of the transparent substrate materials may be sapphire, lithium aluminate (LiAlO2), zinc oxide (ZnO), gallium nitride (GaN), glass, diamond, CVD diamond, and diamond-like carbon (Diamond-Like Carbon; DLC), spinel (MgAl2O4), alumina (Al2O3), yttrium oxide (SiOX) and lithium gallate (LiGaO2).

磊晶疊層31包含第一半導體層311,一活性層312,以及一第二半導體層313。第一半導體層311及第二半導體層313例如為包覆層(cladding layer)或限制層(confinement layer),可為一單層或多層結構。上述第一半導體層311與第二半導體層313係電性、極性或摻雜物相異,其電性選擇可以為p型、n型、及i型中至少任意二者之組合,可分別提供電子、電洞,使電子、電洞於活性層312中結合以發光。第一半導體層311、活性層312,以及第二半導體層313之材料可包含Ⅲ-Ⅴ族半導體材料,例如AlxInyGa(1-x-y)N或AlxInyGa(1-x-y)P,其中0≦x, y≦1;(x+y)≦1。依據活性層312之材料,磊晶疊層可發出波長介於610 nm及650 nm之間的紅光,波長介於530 nm及570 nm之間的綠光,波長介於450 nm及490 nm之間的藍光,或是波長小於400nm之紫外光。The epitaxial layer stack 31 includes a first semiconductor layer 311, an active layer 312, and a second semiconductor layer 313. The first semiconductor layer 311 and the second semiconductor layer 313 are, for example, a cladding layer or a confinement layer, and may be a single layer or a multilayer structure. The first semiconductor layer 311 and the second semiconductor layer 313 are different in electrical conductivity, polarity or dopant, and the electrical selection may be a combination of at least two of p-type, n-type, and i-type, and may be separately provided. Electrons and holes are used to combine electrons and holes in the active layer 312 to emit light. The material of the first semiconductor layer 311, the active layer 312, and the second semiconductor layer 313 may comprise a III-V semiconductor material such as AlxInyGa(1-xy)N or AlxInyGa(1-xy)P, where 0≦x, y ≦1; (x+y)≦1. According to the material of the active layer 312, the epitaxial stack can emit red light with a wavelength between 610 nm and 650 nm, green light with a wavelength between 530 nm and 570 nm, and wavelengths between 450 nm and 490 nm. Blue light, or ultraviolet light with a wavelength of less than 400 nm.

在本發明的另一實施例中,光電元件300、400、500、600、700、700’可為一磊晶元件或一發光二極體,其發光頻譜可以藉由改變磊晶疊層單層或多層之物理或化學要素進行調整。此單層或多層之磊晶疊層材料可選自鋁(Al)、鎵(Ga)、銦(In)、磷(P)、氮(N)、鋅(Zn)以及氧(O)所構成群組。活性層312之結構係如:單異質結構(single heterostructure;SH)、雙異質結構(double heterostructure;DH)、雙側雙異質結構(double-side double heterostructure;DDH)、或多層量子井(multi-quantum well;MQW)結構。再者,調整活性層312量子井之對數亦可以改變發光波長。In another embodiment of the present invention, the photovoltaic element 300, 400, 500, 600, 700, 700' may be an epitaxial element or a light emitting diode, and the light emission spectrum thereof may be changed by changing the epitaxial stacked monolayer. Or multiple layers of physical or chemical elements to adjust. The single or multiple layer epitaxial laminate may be selected from the group consisting of aluminum (Al), gallium (Ga), indium (In), phosphorus (P), nitrogen (N), zinc (Zn), and oxygen (O). Group. The structure of the active layer 312 is, for example, a single heterostructure (SH), a double heterostructure (DH), a double-side double heterostructure (DDH), or a multi-layer quantum well (multi- Quantum well; MQW) structure. Furthermore, adjusting the logarithm of the active layer 312 quantum well can also change the wavelength of the emission.

於本發明之一實施例中,第一半導體層311與基板30間尚可選擇性地包含一緩衝層(buffer layer,未顯示)。此緩衝層係介於二種材料系統之間,使基板30之材料系統”過渡”至第一半導體層311之材料系統。對發光二極體之結構而言,一方面,緩衝層係用以降低二種材料間晶格不匹配之材料層。另一方面,緩衝層亦可以是用以結合二種材料或二個分離結構之單層、多層或結構,其可選用之材料係如:有機材料、無機材料、金屬、及半導體等;其可選用之結構係如:反射層、導熱層、導電層、歐姆接觸(ohmic contact)層、抗形變層、應力釋放(stress release)層、應力調整(stress adjustment)層、接合(bonding)層、波長轉換層、及機械固定構造等。在一實施例中,此緩衝層之材料可選自氮化鋁或氮化鎵,且此緩衝層可由濺鍍或原子層沉積(Atomic Layer Deposition, ALD) 之方式形成。In an embodiment of the invention, a buffer layer (not shown) may be selectively included between the first semiconductor layer 311 and the substrate 30. This buffer layer is interposed between the two material systems to "transition" the material system of substrate 30 to the material system of first semiconductor layer 311. For the structure of the light-emitting diode, on the one hand, the buffer layer is used to reduce the material layer of the lattice mismatch between the two materials. On the other hand, the buffer layer may also be a single layer, a plurality of layers or a structure for combining two materials or two bifurcation structures, such as organic materials, inorganic materials, metals, and semiconductors; The selected structure is: reflective layer, thermally conductive layer, conductive layer, ohmic contact layer, anti-deformation layer, stress release layer, stress adjustment layer, bonding layer, wavelength Conversion layer, mechanical fixing structure, etc. In an embodiment, the material of the buffer layer may be selected from aluminum nitride or gallium nitride, and the buffer layer may be formed by sputtering or atomic layer deposition (ALD).

第二半導體層313與第二電性電極33之間更可選擇性地形成一接觸層(未顯示)。具體而言,接觸層可以為光學層、電學層、或其二者之組合。光學層係可以改變來自於或進入活性層的電磁輻射或光線。在此所稱之「改變」係指改變電磁輻射或光之至少一種光學特性,前述特性係包含但不限於頻率、波長、強度、通量、效率、色溫、演色性(rendering index)、光場(light field)、及可視角(angle of view)。電學層係可以使得接觸層之任一組相對側間之電壓、電阻、電流、電容中至少其一之數值、密度、分布發生變化或有發生變化之趨勢。接觸層之構成材料係包含氧化物、導電氧化物、透明氧化物、具有50%或以上穿透率之氧化物、金屬、相對透光金屬、具有50%或以上穿透率之金屬、有機質、無機質、螢光物、磷光物、陶瓷、半導體、摻雜之半導體、及無摻雜之半導體中至少其一。於某些應用中,接觸層之材料係為氧化銦錫、氧化鎘錫、氧化銻錫、氧化銦鋅、氧化鋅鋁、與氧化鋅錫中至少其一。若為相對透光金屬,其厚度較佳地約為0.005μm~0.6μm。A contact layer (not shown) is more selectively formed between the second semiconductor layer 313 and the second electrical electrode 33. In particular, the contact layer can be an optical layer, an electrical layer, or a combination of both. The optical layer can alter the electromagnetic radiation or light from or into the active layer. As used herein, "change" refers to altering at least one optical property of electromagnetic radiation or light, including but not limited to frequency, wavelength, intensity, flux, efficiency, color temperature, rendering index, light field. (light field), and angle of view. The electrical layer may cause at least one of the voltage, resistance, current, and capacitance of the opposite side of the contact layer to change or change in value, density, or distribution. The constituent material of the contact layer comprises an oxide, a conductive oxide, a transparent oxide, an oxide having a transmittance of 50% or more, a metal, a relatively light-transmissive metal, a metal having a transmittance of 50% or more, an organic substance, At least one of an inorganic substance, a phosphor, a phosphor, a ceramic, a semiconductor, a doped semiconductor, and an undoped semiconductor. In some applications, the material of the contact layer is at least one of indium tin oxide, cadmium tin oxide, antimony tin oxide, indium zinc oxide, zinc aluminum oxide, and zinc tin oxide. In the case of a relatively light-transmitting metal, the thickness thereof is preferably about 0.005 μm to 0.6 μm.

以上各圖式與說明雖僅分別對應特定實施例,然而,各個實施例中所說明或揭露之元件、實施方式、設計準則、及技術原理除在彼此顯相衝突、矛盾、或難以共同實施之外,吾人當可依其所需任意參照、交換、搭配、協調、或合併。雖然本發明已說明如上,然其並非用以限制本發明之範圍、實施順序、或使用之材料與製程方法。對於本發明所作之各種修飾與變更,皆不脫本發明之精神與範圍。The above figures and descriptions are only corresponding to specific embodiments, however, the elements, embodiments, design criteria, and technical principles described or disclosed in the various embodiments are inconsistent, contradictory, or difficult to implement together. In addition, we may use any reference, exchange, collocation, coordination, or merger as required. Although the invention has been described above, it is not intended to limit the scope of the invention, the order of implementation, or the materials and process methods used. Various modifications and variations of the present invention are possible without departing from the spirit and scope of the invention.

100、200、300、400、500、600、700、700’‧‧‧發光元件100, 200, 300, 400, 500, 600, 700, 700'‧‧‧Lighting elements

10‧‧‧透明基板10‧‧‧Transparent substrate

12‧‧‧半導體疊層12‧‧‧Semiconductor laminate

14、E1、E2‧‧‧電極14, E1, E2‧‧‧ electrodes

30‧‧‧基板30‧‧‧Substrate

31‧‧‧磊晶疊層31‧‧‧ epitaxial stack

311‧‧‧第一半導體層311‧‧‧First semiconductor layer

312‧‧‧活性層312‧‧‧Active layer

313‧‧‧第二半導體層313‧‧‧Second semiconductor layer

S‧‧‧溝渠S‧‧‧ Ditch

341‧‧‧第一絕緣層341‧‧‧First insulation

342‧‧‧第二絕緣層342‧‧‧Second insulation

3421‧‧‧第一開口3421‧‧‧ first opening

3422‧‧‧第二開口3422‧‧‧ second opening

3423‧‧‧第三開口3423‧‧‧ third opening

3424‧‧‧第四開口3424‧‧‧fourth opening

3425‧‧‧第五開口3425‧‧‧ fifth opening

321‧‧‧第一第一電性電極321‧‧‧First first electrical electrode

322‧‧‧第二第一電性電極322‧‧‧Second first electrical electrode

323‧‧‧第三第一電性電極323‧‧‧The third first electrical electrode

324‧‧‧第四第一電性電極324‧‧‧fourth first electrical electrode

33‧‧‧第二電性電極33‧‧‧Second electrical electrode

35‧‧‧第三電極35‧‧‧ third electrode

B1‧‧‧第一長邊B1‧‧‧First long side

B3‧‧‧第二長邊B3‧‧‧Second long side

B2‧‧‧第一短邊B2‧‧‧First short side

B4‧‧‧第二短邊B4‧‧‧Second short side

351‧‧‧長形延伸部351‧‧‧Long extension

R‧‧‧凹口R‧‧‧ notch

36‧‧‧第四電極36‧‧‧fourth electrode

800‧‧‧發光模組800‧‧‧Lighting module

501‧‧‧下載體501‧‧‧Download

502‧‧‧載體502‧‧‧ Carrier

503‧‧‧上載體503‧‧‧carrier

504、506、508、510‧‧‧透鏡504, 506, 508, 510‧‧ lens

512、514‧‧‧電源供應終端512, 514‧‧‧ power supply terminal

515‧‧‧通孔515‧‧‧through hole

519‧‧‧反射層519‧‧‧reflective layer

521‧‧‧膠材521‧‧‧ glue

540‧‧‧外殼540‧‧‧ Shell

900‧‧‧光源產生裝置900‧‧‧Light source generating device

1000‧‧‧燈泡1000‧‧‧Light bulb

721‧‧‧外殼721‧‧‧Shell

722‧‧‧透鏡722‧‧‧ lens

724‧‧‧照明模組724‧‧‧Lighting module

725‧‧‧支架725‧‧‧ bracket

726‧‧‧散熱器726‧‧‧ radiator

727‧‧‧串接部727‧‧‧ tandem

728‧‧‧電串接器728‧‧‧Electrical connector

ABC‧‧‧方向ABC‧‧ Direction

D1‧‧‧距離D1‧‧‧ distance

H1、H2‧‧‧高度H1, H2‧‧‧ height

第1圖為一結構圖,顯示一習知陣列光電元件側視結構圖;Figure 1 is a block diagram showing a side view of a conventional array of photovoltaic elements;

第2圖為一示意圖,顯示一習知發光裝置結構示意圖;Figure 2 is a schematic view showing the structure of a conventional light-emitting device;

第3A圖為一結構圖,顯示依據本發明一實施例的光電元件單元上視結構圖;3A is a structural diagram showing a top view of a photovoltaic element unit according to an embodiment of the present invention;

第3B圖為一結構圖,顯示依據本發明一實施例的光電元件單元側視結構圖;3B is a structural view showing a side view of a photovoltaic element unit according to an embodiment of the present invention;

第3C圖為一結構圖,顯示依據本發明另一實施例的光電元件單元上視結構圖;3C is a structural diagram showing a top view of a photovoltaic element unit according to another embodiment of the present invention;

第4A-4D圖為一結構圖,顯示依據本發明另一實施例的光電元件單元上視結構圖;4A-4D is a structural diagram showing a top view of a photovoltaic element unit according to another embodiment of the present invention;

第5A-5C圖係繪示出一發光模組示意圖;5A-5C are schematic views showing a light emitting module;

第6A-6B圖係繪示出一光源產生裝置示意圖;及6A-6B are diagrams showing a light source generating device; and

第7圖係繪示一燈泡示意圖。Figure 7 is a schematic view of a light bulb.

Claims (10)

一種光電元件,包含: 一磊晶疊層,包含一第一半導體層,一活性層形成於該第一半導體層上,以及一第二半導體層形成於該活性層上; 一溝渠裸露出該第一半導體層之一部分且被該第二半導體層所圍繞; 一或複數個邊界裸露出該第一半導體層之另一部分; 一或複數個第一個第一電性電極形成於該一或複數個邊界所裸露出之該第一半導體層之該另一部分上; 一第二個第一電性電極形成於該溝渠所裸露出之該第一半導體層之該部分上; 一第二電性電極形成於該第二半導體層上;以及 一第三電極形成於該第一個第一電性電極,該第二個第一電性電極,以及該第二電性電極上。A photovoltaic element comprising: an epitaxial stack comprising a first semiconductor layer, an active layer formed on the first semiconductor layer, and a second semiconductor layer formed on the active layer; a trench exposed to the first One portion of a semiconductor layer is surrounded by the second semiconductor layer; one or more boundaries expose another portion of the first semiconductor layer; one or a plurality of first first electrical electrodes are formed in the one or more a second portion of the first semiconductor layer exposed on the other portion of the first semiconductor layer; a second first electrode is formed on the portion of the first semiconductor layer exposed by the trench; a second electrical electrode is formed On the second semiconductor layer; and a third electrode is formed on the first first electrical electrode, the second first electrical electrode, and the second electrical electrode. 如申請專利範圍第1項所述的光電元件,其中自上視觀之,該第一個第一電性電極及該第二個第一電性電極於該第一半導體層之投影包含一圖形,該圖形包含一多邊形、一圓形、一橢圓形或一半圓形。The photovoltaic device according to claim 1, wherein the projection of the first first electrical electrode and the second first electrical electrode on the first semiconductor layer comprises a pattern from above The graphic contains a polygon, a circle, an ellipse or a half circle. 如申請專利範圍第1項所述的光電元件,其中自上視觀之,該第一個第一電性電極及該第二個第一電性電極於該第一半導體層之投影包含相同的形狀。The photovoltaic device according to claim 1, wherein the first first electrical electrode and the second first electrical electrode have the same projection on the first semiconductor layer from above. shape. 如申請專利範圍第1項所述的光電元件,其中該複數個第一個第一電性電極係彼此分離。The photovoltaic element according to claim 1, wherein the plurality of first first electrical electrodes are separated from each other. 如申請專利範圍第1項所述的光電元件,更包含一第一調整層位於該第一個第一電性電極、及/或該第二個第一電性電極與該第三電極之間,其中該第一調整層於該第一半導體層上之一投影面積大於該第三電極於該第一半導體層上之一投影面積。The photovoltaic device of claim 1, further comprising a first adjustment layer between the first first electrical electrode and/or the second first electrical electrode and the third electrode The projection area of the first adjustment layer on the first semiconductor layer is larger than the projected area of the third electrode on the first semiconductor layer. 如申請專利範圍第1項所述的光電元件,更包含一第四電極形成於該第二電性電極上;以及一第二調整層位於該第二電性電極與該第四電極之間,其中該第二調整層於該第一半導體層上之一投影面積大於該第四電極於該第一半導體層上之一投影面積。The photovoltaic device of claim 1, further comprising a fourth electrode formed on the second electrical electrode; and a second adjustment layer between the second electrical electrode and the fourth electrode, The projected area of the second adjusting layer on the first semiconductor layer is larger than the projected area of the fourth electrode on the first semiconductor layer. 如申請專利範圍第6項所述的光電元件,其中該第三電極與該第四電極之間具有一最小距離大於50μm。The photovoltaic element according to claim 6, wherein the third electrode and the fourth electrode have a minimum distance greater than 50 μm. 如申請專利範圍第1項所述的光電元件,其中該複數個第一個第一電性電極分別形成在該複數個邊界上。The photovoltaic element according to claim 1, wherein the plurality of first first electrical electrodes are respectively formed on the plurality of boundaries. 如申請專利範圍第1項所述的光電元件,更包含一第四電極形成於該第二電性電極上,其中該第三電極包含一凹口,該第四電極位於該第三電極之該凹口中,且該第三電極於該第一半導體層上之一投影面積大於該第四電極於該第一半導體層上之一投影面積。The photovoltaic device of claim 1, further comprising a fourth electrode formed on the second electrical electrode, wherein the third electrode comprises a recess, and the fourth electrode is located at the third electrode In the recess, a projected area of the third electrode on the first semiconductor layer is larger than a projected area of the fourth electrode on the first semiconductor layer. 如申請專利範圍第1項所述的光電元件,更包含一第四電極形成於該第二電性電極上;以及一布拉格反射鏡位於該第四電極及該第二電性電極之間。The photovoltaic device according to claim 1, further comprising a fourth electrode formed on the second electrical electrode; and a Bragg mirror between the fourth electrode and the second electrical electrode.
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