TW201821806A - Testing head of an apparatus for testing electronic devices and corresponding probe card - Google Patents

Abstract

The invention describes a testing head (21) of an apparatus for testing electronic devices comprising a plurality of contact probes (22) inserted into guide holes realized in at least one upper support (23) and one lower support (24), a bending zone (26) of the contact probes (22) being defined between said upper and lower supports (23, 24), each contact probe (22) having at least one first terminal portion (21A) projecting from the lower support (24) with a first length (LA) and ending with a contact tip (22A) adapted to abut onto a respective contact pad (27A) of a device under test (27) and a second terminal portion (21B) projecting from the upper support (23) with a second length (LB) and ending with a contact head (22B) adapted to abut onto a contact pad (28A) of a space transformer (28). Suitably, at least one of said upper and/or lower supports (23, 24) comprises at least one couple of upper and/or lower guides (23A, 23B; 24A, 24B) being plate-shaped and parallel to each other, separated by a free zone (40) of a predetermined length (Ls), at least one spacer element (30) being interposed between the couple of upper and/or lower guides (23A, 23B; 24A, 24B), the spacer element (30) being removable to adjust said first length (LA) of the first terminal portion (21A) of the contact probes (22) by changing the length (Ls) of the free zone (40) between the couple of upper and/or lower guides (23A, 23B; 24A, 24B), so approaching the guides of the at least one pair of upper and/or lower guides (23A, 23B; 24A, 24B).

Description

Test head of electronic device test equipment and corresponding probe card

The present invention relates to a test head for an electronic device test apparatus.

In particular, but not limited to, the present invention relates to a vertical probe for testing an electronic device, which is particularly integrated on a wafer; the following description refers to this field of application, and its purpose is simply to simplify Its introduction.

As is well known, a test head is basically a device for electrically connecting a plurality of contact pads of a microstructure, in particular an electronic device integrated on a wafer, to a corresponding channel of a test device; wherein the test device is used for performing a function check, in particular It is an electrical function check or a general test.

Testing on integrated devices is particularly helpful in detecting and distinguishing defective devices during the manufacturing phase. Typically, the probe card is used to test the electrical properties of the wafer prior to cutting and assembling the wafer integration device in the wafer containment package.

Therein, the test head includes a plurality of movable contact elements or contact probes that are received by at least one pair of plates or guides that are substantially plate-like and parallel to one another. The guides are provided with docking holes and at a distance between them to leave a free area or air area for the movement of the contact probe and its possible deformation. In particular, the pair of guides includes an upper guide and a lower guide; the adjectives "upper" and "lower" as used in the art refer to test heads that are in operation and correspond to the drawings. The test head is located between the test device (above) and the wafer (below) including the device under test.

The guide members are provided with guide holes for sliding the contact probes therein, and the contact probes are usually formed of special alloy wires having excellent electrical and mechanical properties.

The test head further has an envelope or outer casing arranged between the upper and lower guides, the test head being generally made of ceramic and configured to receive the probe.

The test head is applied to the device under test, that is, the pressure of the wafer including the same ensures a good connection between the contact probe and the contact pads of the device under test, and in the contact hole of the upper and lower guides when the contact is pressed The moving contact probe is bent in a free area between the two guides and slides in the guide hole.

Such test heads are commonly referred to as vertical probe heads.

The vertical probe head generally has a free area in which the contact probe is bent, so that it is marked as a curved area; the bending of the contact probe can be further adapted by the proper configuration of the probe itself and/or the proper position of the guide To assist.

In some cases, the contact probe is coupled to the test head in a fixed manner, such as by bonding, to the upper guide: this is a blocked probe head.

Nonetheless, it is more common for the test head to use a probe that is connected to the space conversion board rather than in a fixed manner, which is typically labeled "space converter" and is placed in a probe card that includes the test head: this The situation is an unblocked probe head.

Figure 1 schematically shows a probe card comprising an unblocked vertical probe head, wherein for simplicity of illustration only one of the plurality of probes typically included in such a test head is shown A contact probe.

In particular, the probe card 10 comprises a test head 1 arranged between the space transformer 8 and the device under test 7, and further comprising at least one upper guide 3 and a lower guide 4 which are substantially planar and parallel between them The plate-like support member is formed and has a corresponding upper guide hole 3A and lower guide hole 4A in which the corresponding contact probe 2 slides.

The test head 1 also includes a housing 5 as a reinforcing member and accommodating the contact probe 2, and arranged between the upper and lower guides 3 and 4. In particular, the outer casing 5 extends corresponding to the air or curved region 6 between the guides.

Each of the contact probes 2 has a body 2C that is substantially rod-shaped and at least one end or contact tip 2A. The nouns and tips that appear here and beyond are not necessarily sharp ends. In particular, the contact tip 2A abuts against the contact pad 7A of the device under test 7 as a mechanical and electrical contact between the device and its test device 10 forming a terminal device (not shown).

In the example depicted in FIG. 1, contact probe 2 has another contact end, which is generally designated as test head 2B, and faces a plurality of contact pads 8A of space transformer 8. Just like the contact with the device under test, good electrical contact between the probe and the space transformer is ensured by the pressure applied to the terminal portion, especially the tip of the contact probe or the terminal portion of the needle. .

The upper guide 3 and the lower guide 4 are suitably spaced apart from the air or curved region 6, which allows deformation of the contact probe 2, the upper guide hole 3A and the lower guide hole 4A being sized to allow respective exploration The needle slides inside it. Another region called a floating zone can be defined between the upper guide 3 and the space transformer 8; this floating region 9 is provided to allow the contact head 2B to be in contact with the probe 2 in the test head 1 The device under test 7 moves, in particular when the contact tip 2A is pressed into contact with the contact pad 7A, to continue to ensure contact of the contact head 2B with the contact pad 8A of the space transformer 8.

In the case where the test head is implemented in a technique called "with shifted plates", the contact probe 2 (also labeled as buckling beams) is made straight and its cross section along The entire length is fixed and preferably rectangular. It is known that such a test head can be realized by superposing guides to have their respective guide holes corresponding; inserting the contact probes into the guide holes, separating the guides to form a curved region, and then offset or shifting The guide, as shown in Figure 1, stimulates the deformation of the probe body at a substantially central position. In this case, they are called displacement plate test heads.

It is worth remembering that the normal operation of the test head and the probe card including it basically depends on two factors: the vertical movement or overtravel of the contact probe, and the horizontal movement or wiping of the respective contact ends. (scrub), especially the contact tip 2A, which wipes the surface of the contact pad 7A of the device under test 7 "clean" to enhance the contact of the test head 1 over its entire operational life.

At the same time, it is also important to ensure the size of the floating area 9 of the contact probe 2B of the contact head 2, which ensures that these contact heads normally contact the contact pads 8A of the space transformer 8.

These characteristics are evaluated and calibrated during the manufacturing phase of the test head, and a good electrical connection between the probe and the device under test is always guaranteed.

When the wipes of these tips are unable to provide electrical contact with the pads, the contact tips of the contact probes, especially the contact tips that are in contact with the pads of the device under test, will undergo material accumulation during their use, usually Dirt, which reduces their performance and may impair normal contact of the device under test with the probe.

Therefore, it is known to perform a cleaning action by a polishing cloth, in particular, a cleaning action of contacting a tip.

Obviously, this type of cleaning action involves the consumption of a portion of the terminal portion of the probe, especially the contact tip, and therefore, precisely, the number of such cleaning actions is limited by the length of the tip, and the tip is cleaned each time. It will become shorter sooner. In particular, the terminal portion, that is, any subsequent friction of the contact tip, should be limited to the probe tapered portion that protrudes from the lower guide, which substantially achieves the contact tip.

The number of cleaning actions of the test head actually determines its operational life and the operational life of the probe card including the test head.

From the name of the applicant of the present application, and the International Patent Application (PCT) No. WO 2014/167410, filed on Oct. 16, 2014, it is known that the spacer element is utilized to be removably disposed on the receiving member and to guide up and down. Between one of the pieces, in order to adjust the length of the terminal portion of the contact probe, in particular the length of the terminal portion corresponding to the contact tip.

Although advantageous in all respects, such test heads also have disadvantages because changing the length of the terminal portion by removal of the spacer or one of its layers inevitably also changes the air or bending area of the contact probe, thus Changing the contact dynamics and causing problems with the force applied by the probe to the contact pads and the wipes that can be placed thereon, in addition to changing the deformation experienced by the probes in the free area, and in the respective guide holes The probe inside has the risk of permanent deformation or retention.

The technical problem on the basis of the present invention is to provide a test head of an electronic device integrated on a wafer, which has structural and functional characteristics, so that the test head has a sufficient number of contact probes without loss of efficacy. a cleaning action that overcomes the limitations and disadvantages of the test head that are still plagued by prior art techniques, particularly by ensuring the force imparted by the probe, and throughout the operational life of the test head and the probe card including the same, Even in the case of subsequent cleaning actions, the necessary wiping mechanism for proper contact between the probe and the contact pad.

The solution of the present invention is to achieve a test head comprising at least one pair of upper guides and/or a pair of lower guides, and at least one spacer element or spacer disposed within the test head for easy removal and peeling Although the removal thereof is local, it does not change the extension of the curved regions of the probe and the forces they impart, in particular, by utilizing the free areas separating the pair of guides.

Based on this solution, the technical problem of the present invention is solved by the test head of the test device of the electronic device, which includes a plurality of contact probes, and the contact probes are inserted into the guide holes formed in the at least one upper support member and the lower support member. At least one of the supports includes a pair of parallel guides separated by a free area, and at least one spacer element disposed between the guides of the upper and/or lower support, corresponding to the free area.

In particular, the test head of the present invention includes a plurality of contact probes that are inserted into the at least one upper support member and the lower support member to achieve a guide hole, and the curved portion of the contact probe is between the upper and lower support members. Defining that the contact probes each have at least one terminal portion projecting from the lower support, the terminal portion having a first length having a contact tip at the end, the contact tip being configured to abut the respective contact pad of the device under test, and supporting from above A protruding second terminal portion having a second length having a contact tip at the end thereof, the contact tip being configured to abut the contact pad of the space transformer. Conveniently, one of the upper and/or lower supports may comprise at least one pair of upper and/or lower guides that are plate-shaped and parallel to each other and separated by a free area having a predetermined length, at least A spacer element is disposed between the at least one pair of upper and/or lower guides, the spacer element being removable to change proximity to a free area of the guide in the at least one pair of upper and/or lower guides The length adjusts the first length of the first terminal portion of the contact probe.

More particularly, the present invention includes the following additional and optional features that may be employed individually or in combination as desired.

According to one aspect of the invention, the spacer element can have a height that is less than or equal to the length of the free area. Further, the spacer element can have at least a portion that protrudes relative to the test head, particularly with respect to the upper and/or lower support.

According to another aspect of the invention, the spacer element can comprise a plurality of overlapping and separately removable layers. In addition to this, the layers can be joined, in particular by a layer of viscous material.

Furthermore, the spacer element can be associated with the upper and/or lower support, in particular by a layer of viscous material.

According to a further aspect of the invention, the layers may have respective portions protruding from the test head, in particular from the upper and/or lower support.

More particularly, the protruding portions of the layers may have different lengths layer by layer. Further, the layers may have numbers on portions protruding from the respective surfaces, the numbers may be formed on the projections by writing or engraving or embossing or other techniques, or have one or more unique indicia by notches or The relief is formed and has any shape and can be formed by any suitable technique, the number of unique indicia corresponding to the desired number.

According to still another aspect of the present invention, a test head may include an upper support including first and second upper guides, and a lower support including first and second lower guides in a plate shape and parallel And separated by respective free areas, and at least one pair of spacer elements, each spacer element being disposed between the plurality of upper and lower guides corresponding to respective free areas.

According to another aspect of the invention, the spacer element can have an elongated shape, in particular a rectangular shape.

More particularly, the spacer element can have a shape selected from between the paddle formed by the extension and the head and the flap.

Alternatively, the spacer element can comprise at least a pair of half frames extending substantially along opposite and parallel sides of at least one pair of upper and/or lower guides of the upper and/or lower support.

More particularly, the half frame forming the spacer element may have a size that protrudes relative to at least one pair of upper and/or lower guides of the pair of upper and/or lower supports, or may include at least one extension configured to At least one pair of upper and/or lower guides projecting relative to the pair of upper and/or lower supports.

According to another aspect of the invention, the spacer element is made of a transparent or translucent plastic, ceramic material, metallic material or organic material or tantalum, preferably Kapton®.

Further, according to another aspect of the present invention, the test head may include a plurality of spacers disposed on the upper and/or lower support in a manner that the position, number, and shape do not interfere with the normal operation of the contact probe and the test head. Between the pair of upper and/or lower guides.

The invention also relates to a probe card for an electronic device testing device, comprising at least one test head and at least one space converter, the test head being provided with a plurality of contact probes, the contact probe being configured to abut a plurality of space transformers Contact pads are implemented in the manner described above.

According to another aspect of the present invention, the probe card may further include a retaining device configured to connect at least the pair of upper and/or lower guides of the upper support, and the spacer member equipped with a suitable hold The holder of the device.

More particularly, such a receptacle of the retaining device is a bore having a size suitable for receiving the retaining device and/or an open receptacle.

This type of retaining device can further connect the space transformer to the upper support.

Furthermore, the position of the receptacle may correspond to the peripheral portion of the upper and/or lower support and/or may be located intermediate the upper and/or lower support, the intermediate position being adjacent and concentric with the peripheral portion.

Finally, the present invention relates to a method for restoring a test head, the test head comprising a plurality of contact probes, the contact probes being inserted into the at least one upper support member and the guide holes realized in the lower support member, each contact probe having a lower At least one first terminal portion protruding from the support member, the first terminal portion having a first length having a contact tip at its end, the contact tip being configured to abut a contact pad of the device to be tested, and a second protrusion protruding from the upper guide a terminal portion, the second terminal portion having a second length having a contact end at the end, the contact head being configured to abut the contact pad of the space transformer, at least one of the upper and/or lower support members being plate-shaped and parallel to each other At least one pair of upper and/or lower guides, the upper and/or lower guides are separated by a free area having a predetermined length, the spacer elements may comprise a plurality of layers that are overlapped and separately removable, the method comprising the steps of: - separating at least one pair of upper and/or lower guides; - removing one of the spacer elements or the layers constituting them; - approaching the pair of upper and/or lower guides; and Reconnecting the upper and/or lower guides to adjust the first terminal portion of the contact probe by changing the length of the free area, and then the movement of the contact probe toward the device under test, and the recovery of the normal operation of the test head One length.

In particular, the step of removing may include sliding the spacer element or one of the layers constituting it.

Features and advantages of the test head according to the present invention will be described from the following examples of embodiments, which are given in an indicative and non-limiting manner and with reference to the accompanying drawings.

Referring to these illustrations, and in particular to Figure 2, reference example 20 shows the probe card implemented in accordance with the present invention in a global and schematic manner.

It should also be noted that the illustrations are schematic representations and are not drawn to scale, but rather are drawn to emphasize important features of the invention.

In addition, it should be noted that the arrangements shown with reference to the specific embodiments may obviously be used in combination with other embodiments. In addition, the same reference numerals are used in the drawings to refer to the structural and functional components.

The probe card 20 includes a test head 21, which in turn further includes a plurality of contact probes 22 that are received in suitable guide holes corresponding to the upper support member 23 and the lower support member 24 in a plate shape and parallel to each other. The test head 21 also includes a receiving element or housing 25 extending between the upper support 23 and the lower support 24, which corresponds to a free area or curved area 26, wherein the contact probe 22 is when the probe is pressed against the device under test 27 Can be further deformed.

It is shown that the test head 21 is indeed of the "with displacement plate" type, and the upper and lower support members 23 and 24 are conveniently offset, and the contact probes 22 are accommodated in the guide holes of the guide members, thereby being It is pre-deformed and further bent and deformed when contact occurs between the test head 21 and the device under test 27.

In particular, the test head 21 depicted in Figure 2 is of the non-blocking vertical probe type, each contact probe 22 having a respective terminal portion 21A and 21B configured to form mechanical and electrical properties with the respective contact pads. Contact; in particular, the end of the first terminal portion 21A has a contact tip 22A configured to abut the respective contact pad 27A of the device under test 27, and the end of the second terminal portion 21B has a contact head 22B, the contact head 22B It is configured to abut the contact pad 28A of the space conversion layer or space transformer 28. As such, the contact probe 22 forms a mechanical and electrical contact between the device under test 27 and the test equipment (not shown), with the probe card 20 being its terminal component. The term "terminal portion" as used herein and herein, refers to a portion of the contact probe 22 that protrudes relative to the guide and housing 25, particularly to the device under test 27 or space transformer 28. Their respective prominent directions. Again, as mentioned earlier, the term "tip" is not necessarily a sharp terminal part.

The first terminal portion 21A of the contact probe 22 corresponding to the contact tip 22A extends between the lower support member 24 and the device under test 27 toward the first region 29A; in particular, with respect to the ideal plane defined by the device 27 to be tested, and corresponding to The length of the first region 29A when the test head 21 is pressed against the device under test 27, the first terminal portion 21A protrudes from the lower support member 24 with an appropriate first length LA. When the test head 21 and the probe card 20 containing the same, the first region 29A allows the movement of the contact tip 22A of the contact probe 22 on the contact pad 27A of the device under test 27, so that it is marked as a wiping region 29A.

Similarly, the contact probe 22 corresponds to the second terminal portion 21B of the contact head 22B extending between the upper support 23 of the test head 21 and the space transformer 28 toward the second region 29B; in particular, similar to the device under test 27, In the ideal plane defined by the space transformer 28, and corresponding to the length of the second region 29B when the test head 21 is pressed against the space transformer 28, the second terminal portion 21B is from the upper support member 23 at an appropriate second length LB. protruding. When the test head 21 and the probe card 20 including the same, the second region 29B allows the movement of the contact head 22B of the probe 22 to be contacted, so it is indicated as the floating region 29B.

It should be noted that when the test head 21 is used, the length LA of the first terminal portion 21A will decrease as the abrasive cloth passes through its tip as explained in the prior art. Basically, the first terminal portion 21A opposite the contact tip 22A will be depleted in each cleaning action.

When the test head has a "buckling beam" type of vertical probe as shown in Figure 2, the contact probes 22 will also exhibit friction problems within the respective guide holes, which may cause the probes to be in them. The sliding becomes difficult and even prevents the probe from slipping.

Conveniently, in accordance with the present invention, the use of a plurality of, preferably two, mutually parallel guides for forming at least one of the upper and/or lower supports will also reduce these friction problems.

In the case depicted in Figure 2, the test head 21 thus comprises at least one upper support 23 comprising a first upper guide 23A and a second upper guide 23B which are plate-shaped and parallel and are of a height Ls At least one free area 40 is spaced apart, and a lower support member 24, including a single lower guide, which is generally designated 24, and has respective guide holes for sliding the contact probes 22 therein. The curved region 26 is defined between the second upper guide 23B and the lower guide 24, wherein the contact probe 22 can be further deformed when the test head 21 is pressed against the device under test 27.

As described earlier, when the probe card 20 performs a test action, that is, when the test head 21 presses against the device under test 27 and the space transformer 28, the contact probe 22 is bent corresponding to the curved region 26, and the curved region 26 is The second upper guide 23B and the lower guide 24 extend between and have an extra length L corresponding to the height of the outer casing 25.

Advantageously, in accordance with an embodiment of the invention as shown in Figure 2, the test head 21 further includes at least one spacer element or spacer 30 disposed between pairs of corresponding guides of the upper and/or lower support members . In particular, in the case depicted in FIG. 2, the spacers 30 are arranged between the first and second upper guides 23A and 23B of the upper support member 23 corresponding to the free area 40, and have substantially corresponding free areas 40. The height H of the length Ls, in particular, the height H is less than or equal to this second length Ls (H ≤ Ls). More particularly, as shown in FIG. 2, the test head 21 includes at least one pair of spacers 30 that are arranged on opposite sides of the test head 21.

More generally, the test head 21 includes a plurality of spacers 30 arranged between the first and second upper guides 23A and 23B of the upper support member 23.

These spacers 30 may be made of a transparent or translucent plastic, ceramic material, metallic material or organic material or tantalum, preferably Kapton®.

Furthermore, the spacer 30 can be made in a manner having a portion 300 that protrudes relative to the test head 21 to simplify the clip of the spacer itself when the test head 21 has been removed from the probe card 20 and thus separated from the space transformer 28. Hold and remove, as explained below.

Conveniently, the spacers 30 comprise one or more layers that are overlapped or aligned with one another and that can be removed or peeled off individually; the layers that make up the spacers 30 can simply be placed layer by layer or may be joined together by suitable means For example, viscous materials such as glue, especially viscous materials that utilize a lower sealing force, allow the layers to be easily separated from each other. The test head 21 of Figure 2 includes spacers 30 constructed of three layers, designated as 30a, 30b, and 30c, destined for non-limiting embodiments, and the spacers 30 can include any number of layers, which may be only one layer. Preferably, layers 30a-30c are of equal thickness and the total thickness of all layers 30a-30c determines the height H of spacer 30.

Obviously, layers having mutually different thicknesses can be considered, the total thickness of all layers still determining the height H of the spacers 30. Optionally, a film of viscous material, especially a film of viscous material of lower sealing force, is disposed between the layers.

Advantageously, according to the present invention, the above-described test head 21 equipped with the spacer 30 changes the length of the free area 40 between the pair of guides, such as the first and second upper guides 23A and 23B shown in the drawing. Ls can be adjusted to allow the length LA of the terminal portion 21A of the contact probe 22 to be adjusted, thereby overcoming the problem of wear of the contact tip 22A during the operational life of the test head 21, at least one upper and/or lower support formed by a pair of guides The use also improves the sliding of the contact probe 22.

It is especially possible to remove one or more layers of the spacer 30 to achieve an ideal adjustment of the length LA of the first terminal portion 21A of the contact probe 22 by varying the length Ls of the free area 40 between the pairs of guides. Even if it is only adjusted in a fine way. Conveniently, the test head 21 can be removed from the probe card 20, one or more layers constituting the spacer 30 can be slid, and then the test head 21 can be reassembled onto the space transformer 28, thereby reassembling the probe card 20: spacer Removal of one or more layers of the member 30 reduces the height H of the spacer 30 to the guides in the upper and/or lower supports 23 and 24, thus when the space transformer 28 is repositioned to the test head 21. That is, when the first length LA of the first terminal portion 21A of the probe is restored, the contact probe 22 is pushed toward the device 27 to be tested, and the length shortened due to the wear of the contact probe 22 corresponds to the respective contact tip 22A.

It should be noted that it is customary to implement the contact head 22B of the contact probe 22 in order to have at least a portion having a larger diameter than the upper guide hole formed in the first upper guide 23A in order to prevent the probe from being prevented even if it does not abut The probe device 27 is still protruding in the case of the device 27 to be tested, as shown in Fig. 3A, the diameter means a maximum transverse dimension of a section orthogonal to the longitudinal development axis of the contact probe.

As described above, the test head 21 includes the upper support member 23 formed by the pair of guide members 23A and 23B, and the spacer member 30 disposed between the first upper guide member 23A and the second upper guide member 23B corresponding to the free area 40. It comprises in particular three layers 30a, 30b and 30c and has a height H which is less than or equal to the length Ls of the free zone 40.

Conveniently, the layers 30a-30c of the spacer 30 may have protruding portions 300 that protrude from the test head 21. In the alternative embodiment shown in FIG. 3A, the protruding portions 300 of the same spacer 30 have different lengths layer by layer to allow the layers of the same number of different used spacers 30 to be easily removed. Conveniently, the protruding portions 300 have the same length for corresponding layers of different spacers 30, for example, the protruding portions of the layers closer to the upper guiding member 23A than all of the spacers 30 have equal lengths, which are still greater than gradually approaching The length of the next layer of the second upper guide 23B. In particular, this protruding portion 300 has a gradually decreasing length from the layer closer to the first upper guide 23A to the layer closer to the second upper guide 23B.

It is also possible to consider numbering these layers 30a-30c, for example from the layer closest to the first upper guide 23A, which number is provided on the protruding portion 300 of the spacer 30, for example, corresponding to its spatially oriented converter 28. Surface Fc. Thus, by viewing the test head 21 from the side of the space transformer 28, when the test head 21 is removed from the probe card 20, the spacer 30 closest to the first upper guide 23A and the space transformer 28 can be immediately viewed. The numbering of all of the protruding portions 300 of the layer confirms that all of the spacers 30 include the desired number of layers. This number may be in the form of a written or engraved number, or may be made by embossing or other techniques on these protruding portions 300. Alternatively, the numbering may comprise a plurality of unique indicia, such as notches or embosses, and having any shape and may be formed by any suitable technique, the number of unique indicia corresponding to the desired number; in this case, for example, identified A layer that is a first layer, such as layer 30a of Figure 3B, includes only one notch or relief, such as an engraved or embossed spot; likewise, the second layer 30b can have two engraved or embossed spots, and a third layer 30c There can be three engraved or embossed spots.

As shown in Fig. 3C, the spacer 30 may of course be provided with a protruding portion having an increasing length from a layer closest to the first upper guide 23A to a layer closest to the second upper guide 23B.

The numbers may also be provided on the layers 30a to 30c of the spacer 30 corresponding to the surface Fc' opposite to the surface Fc, in particular, facing the second upper guide 23B.

The above considerations are also applicable to the case where the lower support member 23 is formed of a pair of guide members, and the case where both support members are formed by a pair of guide members including a pair of upper guide members 23A and 23B and a pair of lower guides Pieces 24A and 24B.

For example, in accordance with an alternative embodiment illustrated in FIG. 4A, the test head 21 includes an upper support 23 that includes only one upper guide, generally designated 23, and a lower support 24 that includes a first lower guide 24A and The second lower guide 24B, which is plate-shaped and parallel, is separated by a free area 40 having a height Ls.

The test head 21 further includes at least one spacer 30 that is disposed between the first lower guide 24A and the second lower guide 24B corresponding to the free area 40 and has a height H corresponding to the length Ls of the free area 40. More particularly, the test head 21 includes at least one pair of spacers 30 that are arranged on opposite sides of the test head 21.

More generally, the test head 21 includes a plurality of spacers 30 disposed between the first lower guide 24A and the second lower guide 24B of the lower support member 24.

Additionally, in this case, the spacer 30 can be implemented to have a portion 300 that protrudes relative to the test head 21 to facilitate its gripping and removal, and can include one or more overlays that can be moved individually In addition to or peeling off, the example in the figure has three layers 30a to 30c.

In an alternative embodiment shown in FIG. 4B, the layers 30a-30c of the spacer 30 can be realized with a portion 300 protruding from the test head 21, the portion 300 of the same spacer 30 having different lengths of layers, especially from the first The lower guide 24A is gradually reduced to facilitate the same number of layer removal of the used spacers 30, and allows the numbering of the settings, particularly on the surface Fc corresponding to the first lower guide 24A or face. On the opposite surface Fc' of the second lower guide 24B. The numbering may be in the form of a number such as writing or engraving or embossing, which may be made on these protruding portions 300, or the numbering may include a plurality of unique indicia, such as notches or embosses, having any shape and may be formed by any suitable technique, And the number corresponds to the required number.

Also, in this case, as shown in FIG. 4C, a dual configuration having a layer having a longer and longer length portion from the first lower guide 24A can be considered.

It should be emphasized that in this alternative embodiment, since the lower support member 24 is realized by a plurality of pairs of guides, the sliding of the probe corresponding to the terminal portion including the contact tip is further enhanced, and the probe is reduced when these portions become shorter. The entanglement.

According to another alternative embodiment shown in Figure 5A, the test head 21 includes an upper support 23 including a first upper guide 23A and a second upper guide 23B, and a lower support 24 including a first lower guide The piece 24A and the second lower guide 24B are plate-shaped and parallel, and are still separated by free areas 40u and 40d.

The test head 21 further includes at least one pair of spacers 30u and 30d, each arranged between the corresponding pair of guides. In particular, the upper spacers 30u are arranged between the first upper guide 23A and the second upper guide 23B of the upper support member 23 corresponding to the upper free region 40u, and have a height H which substantially corresponds to, in particular, less than or Equal to the length Lsu of the upper free area 40u; likewise, the lower spacer 30d is arranged between the first lower guide 24A and the second lower guide 24B located in the lower free area 40d, and has a height H1 which substantially corresponds to In particular, it is less than or equal to the length Lsd of the lower free area 40d.

Additionally, in this case, the spacers 30 can be implemented with protruding portions that protrude relative to the test head 21 to facilitate their clamping and removal, and include one or more overlays. It can be removed or peeled off in a single manner, in particular with three layers 30a-30c.

In an alternative embodiment shown in Figures 5B and 5C, the layers of the spacers can be realized with protruding portions that protrude from the test head 21, as such, the spacers 30 have different lengths layer by layer. In the alternative embodiment shown, the projections have a gradually decreasing length, the length increasing from the first upper guide 23A or the first lower guide 24A toward the second upper guide 23B or the second lower guide 24B, respectively. .

As for the embodiments described above, it is also possible to provide a numbering in consideration of the protruding portions of the corresponding spacers in order to facilitate the removal of the same number of layers of the used spacers 30, in particular in the corresponding facing first upper guides. The surface Fc of the 23A or lower guide 24A is either facing the opposite surface Fc' of the second upper guide 23B or the lower guide 24B. The numbering may be in the form of a number such as writing or engraving or embossing, which may be made on these protruding portions 300, or the numbering may include a plurality of unique indicia, such as notches or embosses, having any shape and being implemented by any suitable technique, And the number corresponds to the required number.

As shown in Fig. 5D, it is of course possible to use a different configuration interval between the first and second upper guides 23A and 23B with respect to the spacers between the first and second lower guides 24A and 24B. Whereas, by way of example and not limitation, the layers 30a-30c of the spacers 30u of the first and second upper guides 23A and 23B have projections of different lengths, particularly from the first upper guide 23A to the first The two upper guides 23B are gradually reduced, and the layers of the spacers 30d between the first and second lower guides 24A and 24B have projections of equal length. Asymmetric or dual configurations are equally possible.

It should be noted that the presence of the upper and lower spacers allows for maximum adjustment freedom of the length LA of the terminal portion 21A including the contact tip 22A, which is applied to both sides of the test head 21 in a symmetrical or asymmetrical manner, even It is possible to change the inclination between the guides of the support.

It should also be noted that the present invention is achieved by varying the length of the free area between the pairs of guides without changing the length of the curved region of the probe and its motion dynamics, particularly in terms of applied force and wiping. All of the embodiments illustrated by the test head allow for the adjustment of the length of the terminal portion of the contact probe including the contact tip due to experiencing wear.

Moreover, with respect to the probe card 20 including the test head 21, it is convenient to ensure that the floating area 29B of the contact head 22B for contacting the probe 22 is held stationary to ensure continued and proper contact with the space transformer 28, Contact is through contact head 22B which abuts contact pad 28A of space transformer 28. In fact, although it allows the length LA of the terminal portion 21A including the contact tip 22A of the contact probe 22 to be adjusted, the probe card 20 according to the present invention has the floating region 29B having a fixed length, and it is still not adjusted under this adjustment. change.

The probe card 20 also includes a corresponding retaining device 32 that is configured to connect different components of the probe card, in particular the pair of guides of the upper and/or lower support and the spacer 30, for which purpose the holding device 32 is provided Have a suitable holder. This type of retaining device 32 can also be used to connect the space transformer 28 to the outer casing 25.

As shown in Figure 6, the probe card 20 is shown from the side of the space transformer 28, with the same transparency, the retaining device 32 is generally in a substantially annular form along the upper guide 23 (on the first side) The peripheral portion 40P of the piece 23A, if any, is arranged. In the example of the figures, the probe card 20 includes a spacer that is substantially in the shape of a paddle corresponding to the apex of the generally rectangular upper support member 23. A retaining device 32' is also provided which is located in the central portion 40C of the upper support member 23, which is adjacent and concentric with the peripheral portion 40P. The retaining means 32 and 32' can be realized, for example, by means of screws, in particular flat head screws, which are received in corresponding threaded holes.

It is of course also possible to provide different configurations of the spacers 30, which may be arranged in different numbers, symmetrical or asymmetrical and different positions as shown in FIG.

Additional glue film may also be used to attach the spacer 30 to the upper support 23 or the lower support 24, particularly the guides attached thereto, thereby preventing the spacers from being passed through by the retaining devices 32 and 32'.

In a particularly simplified embodiment, the spacers 30 are simply placed on a guide of the pair of guides of the upper and/or lower supports 23 and 24 during the normal operation of the test head 21 by letting the guide The pieces are close to the other to ensure their holding position. In the case where the spacer 30 is formed of a plurality of layers 30a to 30c, it is also possible to simply overlap each other on the guide members of the upper and/or lower support members 23 and 24 because the guide members are placed close to each other. The position of the pressure, overlapping layers 30a to 30c is maintained.

As shown in FIG. 7A, the spacer 30 may conveniently have the shape of a paddle.

In particular, in this case, the spacer 30 includes an extension 33 and a head 34, such as a circular shape, which may have a hole 35 having a size that allows it to be passed through by the retaining means 32 and 32'. The spacer 30 is particularly advantageous in that it allows for a simple grip of the extension 33 when removed. This extension 33 protrudes relative to the test head 21, in particular the upward support 23 and/or the lower support 24. Moreover, the major dimension of the head 34 relative to the extension 33 ensures a good redistribution of the pressure load with the locking of the corresponding holding means 32 and 32'.

As shown in Fig. 7B, the spacer 30 may also be realized as a flap 36 which is generally rectangular and is conveniently provided with a hole 35 for the passage of the retaining means 32 and 32'.

The paddle and fin-like embodiments define a spacer 30 having an elongated shape that is generally rectangular and has a much larger size than the others. This spacer 30 has a smaller surface area than one of the supports 23 and 24 and the guides including it, perhaps, in particular, smaller than the entire plate or layer of the test head 21.

The spacers 30 realized by the paddles or fins are very simple in construction because of the lateral dimensions they contain and the proper clamping relative to the extended longitudinal dimension of the test head 21, and they allow The distribution within the ideal position of the test head 21 and the space transformer 28 is considered.

Alternatively, as shown in Figure 7C, the spacer 30 can be realized by a plurality of half-frames 30l or 30r substantially along the opposite and parallel sides of the test head 21, particularly the upper support 23 and/or the lower support 24. Extending, and may be provided with a hole 35 through which the retaining means 32 located at the desired location of the probe card 20 passes. The size of the half-frame that implements this spacer 30 can be set to protrude relative to the test head 21, particularly the upper support 23 and/or the lower support 24, to make it easier to grip them, and to allow for numbered settings.

More particularly, as shown in FIG. 7C, the half frames 30l and 30r implementing the spacers 30 include respective lateral portions 31l and 31r that protrude relative to the test head 21, particularly the upper support member 23 and/or the lower support member 24. .

The spacers 30 implemented in the form of half frames 30l and 30r introduce degrees of freedom and allow one side of the probe card 20 to be processed separately relative to the other side, for example on the layer to be eliminated, so that the corresponding flatness does not match. In this case, the inclination of the guide relative to the other guide is achieved when needed. In addition, the use of a half frame allows the spacer 30 to be adapted to test heads 21 of different sizes simply by accessing or replacing the half frames 30l and 30r.

Finally, it is also possible to implement the spacers 30 in the form of a plurality of pairs of half frames 30l and 30r extending substantially along the opposite and parallel sides of the test head 21, in particular the upper support member 23 and/or the lower support member 24, and having Let it extend the size within its central portion 40C. As shown in Fig. 7D, the half frame may be provided with a hole 35 through which the retaining means 32 in the desired position of the peripheral portion 40P of the upper support member 23 passes, and a central portion 40C of the upper support member 23 An additional hole 35' through which the additional retaining device 32' in the intended position passes.

As described above, the half frame of the spacer 30 can be sized to protrude relative to the test head 21, particularly the upper support 23 and/or the lower support 24, to make the clamping easier and to allow numbering. setting. In particular, as shown in FIG. 7D, the half frames 30l and 30r may include respective lateral portions 31l and 31r that protrude relative to the test head 21, particularly the upper support member 23 and/or the lower support member 24.

It should be noted that the use of the elongated half frames 30l and 30r in the central portion 40C of the upper support member 23, due to the coupling of the additional holes 35' and the additional retaining means 32', increases the holding point of the half-frame itself. (retaining points).

Further, the half frames 30l and 30r may include suitable recesses 37 to limit the material of such half frames to the surrounding areas of the holes 35 and the additional holes 35'. Thereby, the weight of the spacer 30 thus made by the half frame is alleviated while still maintaining an enhanced sealing force.

The half-frames constituting the spacer 30 may also be realized in a size that is flush with the test head 21, in particular the upper support 23 and/or the lower support 24, and further provide at least one extension thereof, which is configured to Projecting from the test head 21 and the corresponding flap-like support members facilitates the clamping of the spacers 30 and allows for numbered settings. Depending on the overall size of the half frame and the application of the probe card 20, any number of clamping tabs can be considered that are positioned without interfering with the normal operation of the probe card 20 containing the spacers 30.

By accommodating the holding devices 32 and 32' of the type shown in Figs. 7A to 7D by using the spacers 30 provided with the holes 35 and 35', the length LA of the first terminal portion 21A of the contact probe 22 can be adjusted, and if If any, the retaining device 32 and the additional retaining device 32' are unlocked, in particular by removing the opposing screws, followed by the step of removing the spacers 30 or at least one of their layers 30a-30c, and partially The test head 21 is removed.

The removal of the spacers 30 or at least one of their layers 30a-30c allows for the access of at least one pair of guides forming the upper and/or lower supports to be performed, and the subsequent contact probes 22 facing the device under test The movement of 27 is to compensate for the corresponding shortening of the first terminal portion 21A including the contact tip 22A, and to restore the normal operation of the test head 21 simply and quickly. In particular, it should be emphasized that the removal of the spacers 30 or at least one of their layers 30a-30c does not affect the length LB of the floating region 29B of the contact head 22B, which remains fixed and ensures contact detection. Normal accommodation of the contact head 22B of the needle 22. More importantly, the extension of the first terminal portion 21A including the contact tip 22A occurs without changing the curved region 26 of the contact probe 22, so that the impact force and the wiping on the device 27 to be tested are not changed.

Basically, the test head 21 according to the present invention allows a method of adjusting the length of the first terminal portion 21A including the contact tip 22A of the contact probe 22 to restore the normal operation of the test head 21.

Advantageously, according to the invention, the method comprises, if any, the step of unlocking the holding devices 32 and 32', for example by loosening or removing the respective screws, then removing the spacers 30 or they The step of at least one of the layers 30a to 30c.

At this time, the method includes approaching the pair of guides forming the upper support 23 and/or the lower support 24 with the length Ls of the opposite free area 40, and the subsequent displacement of the contact probe 22 toward the device 27 to be tested; In particular, as a result, the contact probe 22 can protrude from the lower guide 24, thereby restoring the length LA of the first terminal portion 21A including the contact tip 22A. This step of approaching the pair of upper support guides 23 and/or lower support guides 24 is performed, in particular, to return the length of the first terminal portion 21A including the contact tip 22A to a value corresponding to the normal operation of the test head 21.

It should be noted that once the length of the first terminal portion 21A including the contact tip 22A is adjusted by removing the spacers 30 or one of the layers 30a to 30c constituting them, if any, the holding device should be restored 32 and the additional retaining device 32', for example, screw the corresponding screws back to access the components of the test head 21 and the probe card 20.

It is of course also possible to further remove the layer of spacers 30 and to access the pairs of guides in the later stages of operation of the test head 21 and the probe card 20 comprising the same, especially when the contact tip 22A comprising the contact probe 22 is included. The first terminal portion 21A has been further shortened due to the cleaning action, and its length is smaller than the length of the normal operation of the corresponding test head 21 and the probe card 20 including the same.

Furthermore, in the case where the spacer 30 is provided with a plurality of layers, it is also possible to perform more such such removal, by which the length of the first terminal portion 21A including the contact tip 22A of the contact probe 22 is performed. Subsequent adjustments.

The operational life of the test head 21 and the probe card 20 including the same is thus prolonged in a timely manner with respect to known methods, including shortening of the first terminal portion 21A of the contact tip 22A of the contact probe 22 according to known methods. The use of the head 21 and the probe card 20 including it ends, unless a complicated test head replacement is implemented.

Finally, the removal of one layer of spacers 30 and the proximity of a pair of guides therebetween may also be performed in an asymmetric manner so that the corresponding contact tip 22A is offset due to the tolerance of the process of fabricating the probe itself. In the case, the length of the first terminal portion 21A of the contact probe 22 is adjusted with different amplitudes. Asymmetrical removal of the layers may also be considered in order to adjust the distance between the upper and/or lower guides in the event that the guide itself has problems with planarization or tilting, thus ensuring that the guides are along the entire The equal distance of the area.

In an advantageous alternative embodiment of the invention, as shown in Figures 8A-8D, the spacer 30 can be realized as an open receptacle 38 comprising a retaining device 32. This open receptacle 38 in particular allows the spacer 30 or one of its layers 30a to 30c to be slid down without completely removing the retaining means 32, in particular a corresponding screw, simply loosening the retaining means 32 is sufficient, And it specifically allows the removal of the spacers 30 themselves or one of them, which allows them to simply slip off and does not require disassembly, or even partial removal of the test head 21.

In this case, the method according to the invention comprises a step of removing by sliding the spacers 30 or one of their layers 30a to 30c.

The locking of the retaining means 32 and the additional retaining means 32', if any, ensures an ideal coupling of the pair of guides, which enables access between the upper and/or lower support and the guide itself, thus restoring the contact tip 22A The size of the first terminal portion 21A and the normal operation of the test head 21 and the probe card 20 itself including the same.

More particularly, the spacer 30 can be realized in a shape similar to the foregoing, and thus has the same advantages. For example, as shown in Figures 8A and 8B, respectively, the spacer element can have an elongated and substantially rectangular shape, such as a paddle formed by the extension 33 and the head 34, or a tab 36 that is substantially It is rectangular and in this case is provided with an open receptacle 38. The open housing portion 38 has a size suitable for receiving the holding device 32 or the additional holding device 32'.

It should be noted that the open receptacle 38 defines at least one of the material portions 39 and 39' at the spacer 30, which may be partially covered by the retaining means 32 and 32', like a fork, the retaining means 32 and 32' including, for example, flat head screws, In order to ensure that the retaining means 32 and 32' properly hold the spacer 30.

Alternatively, the coupling of the spacer 30 and the test head 21, in particular the coupling of one of the guides constituting the upper support 23 and/or the lower support 24, can only be provided by means of an adhesive or retaining means 32 and 32' does not pass through the spacer 30 but only passes through other components of the test head 21, such as pairs of supports and guides 23 and 34, housing 25 and space transformer 28, and the like.

It will be immediately appreciated that the spacer can be moved by simply loosening the retaining means 32 and 32' and toward the longitudinal direction thereof and away from the test head 21, particularly away from the upper support 23 and/or the lower support 24. One of the layers eliminates one of the spacers 30 or the layers 30a to 30c constituting them, and as shown by an arrow F in FIGS. 8A and 8B, the holding devices 32 and 32' correspond to openings through the open receiving portion 38.

In particular, the elongated shape of the paddle or flap allows the spacer 30 or one of the layers 30a-30c constituting them to be easily slipped without the need to apply a large amount of force.

Alternatively, as shown in Figures 8C and 8D, respectively, the spacer 30 can be made from a plurality of pairs of half frames 30l and 30r that are suitably equipped with an open receiving portion 38 corresponding to the retaining means 32 located, for example, at the peripheral portion 40P of the upper support member 23. And the open containment portion 38', if any, corresponding to other retaining means 32' located, for example, in the central portion 40C of the upper support member 23. Similarly, the positions of the open receptacles 38 and 38' can correspond to the retaining means 32 and 32' of the perimeter or central portion of the lower support member 24.

Conveniently, the dimensions of the half frames 30r and 30i of the spacer 30 can be set such that they protrude relative to the test head 21, particularly the upper or lower supports 23 and 24, to facilitate clamping and allow for numbering. The arrangement is especially on the layer constituting it as described above. In this case, as shown in FIGS. 8C and 8D, the half frames 30l and 30r may include respective lateral portions 31l and 31r which protrude with respect to the test head 21, particularly the upper or lower supports 23 and 24.

It will be immediately appreciated that in this case it is also possible to remove the retaining means 32 and 32' and to remove the half frames 30l and 30r or one of their layers from the test head 21, as shown in Figures 8C and 8D. As indicated by arrows F1 and F2, in this case the retaining devices 32 and 32' are also allowed to pass through the openings of the open receptacles 38 and 38'.

Since the spacers 30 realized by the half frame are structurally stronger than the paddles or fins, due to their greater extension with respect to the area of the upper or lower supports 23 and 24, in this case, for example, A higher force than the spacer 30 made of paddles or fins can be applied.

As with the above, the half frame forming the spacer 30 may also be realized in a size that is flush with the test head 21, particularly the upper support 23 or the lower support 24, and then provided with at least one extension thereof, which is configured The protrusions are in the form of flaps from the test head 21, in particular the upper support 23 or the lower support 24, to make the clamping of the spacers 30 easier and to allow for numbered settings.

By accommodating the holding devices 32 and 32' of the type shown in Figs. 8A to 8D by means of the spacers 30 provided with the open receiving portions 38 and 38', the length LA of the first terminal portion 21A of the contact probe 22 can be simply loosened. The opening retaining device 32 and the additional retaining device 32', if any, are adjusted, in particular by partially loosening the opposing screws, followed by sliding the spacers 30 or at least one of their layers 30a-30c (if any) and maintain the structural integrity of the test head 21.

Where the outer casing of the spacer 30 is realized by a half frame, it is structurally more stable and can withstand greater forces than the paddle or fin, if any, the slip of the spacer 30 can be expected, possibly even In the case where the loose holding devices 32 and 32' are not previously marked.

As previously mentioned, the removal of the spacers 30 or at least one of their layers 30a-30c allows for the proximity of the guides forming the upper and/or lower supports of the test head 21, as well as the subsequent contact probes 22 The movement toward the device under test 27 is made to compensate for the shortening of the corresponding first terminal portion 21A including the contact tip 22A of the contact probe 22, and to restore the normal operation of the test head 21 and the probe card 20 including the same, simply and quickly.

Thus, the retaining device 32 and the additional retaining device 32' (if any) require locking, particularly by reversing the corresponding screw to access the components of the test head 21 and probe card 20. In any event, it should be emphasized that the use of the open containment portion 38 allows the symmetrical portion of the test head 21 to be removed to remove the spacers 30 or their layers to be avoided.

It is of course also possible to carry out the removal of one layer of the spacer 30 further in the later stages of operation of the probe card 20, and to perform multiple such removals in the case where the spacer 30 comprises a plurality of layers, and then to perform continuous The length LA of the first terminal portion 21A of the contact probe 22 is adjusted, and the removal of one layer of the spacer 30 is finally performed in an asymmetric manner as described above.

It should be noted that all of the embodiments illustrated by the test head of the present invention allow length adjustment of the terminal portion of the contact probe including the contact tip, so that it experiences wear without changing the length of the curved region of the probe and its motion dynamics. In particular, the force of the gasket and the brushing aspect. Moreover, this adjustment does not change the length of the floating area, thus ensuring the constant contact of the probes and their proper accommodation, as well as ensuring their contact with the space transformer.

In summary, the test head with the spacer according to the invention has a longer operational life, since a large number of cleaning actions of the respective tip can be expected, and then the length of the terminal portion of the contact probe protruding relative to the lower support is adjusted so that it Equal to or greater than the length corresponding to the normal operation of the test head. As a result, the operational life of the probe card including this test head is also increased.

The presence of the spacers allows the probe card to return to normal operation simply and quickly after a shortened period of operation of the terminal portion of the contact probe, which does not affect their dynamics and the forces they exert, as the probes The length of the curved area remains the same.

Conveniently, the spacer is implemented to extend over a limited area, although it is significantly limited in the embodiment of the column, paddle or fin assembly relative to the area of the guide of the test head; And the position can be set arbitrarily. Again, it should be noted that spacers having smaller dimensions, particularly spacers that do not extend throughout the guide, have less flatness issues and are therefore easier to handle.

Furthermore, it is possible to perform further adjustments in the length of the terminal portion of the contact probe during different stages of the operational life of the test head including the contact probe, particularly when these terminal portions including the contact tip become shorter and shorter due to use. In the case of the length corresponding to the normal operation of the test head, it also allows the length of the terminal portion of the different contact probe to be non-stop in the case of a corresponding contact tip offset caused by the tolerance of the process of manufacturing the probe itself. The way the change.

It will be apparent to those skilled in the art that many modifications and variations can be made to the above-described test heads to meet the needs and specific needs, all of which fall within the scope of the invention as defined by the scope of the following claims.

1‧‧‧Test head

2‧‧‧Contact probe

2A‧‧‧Contact tip

2B‧‧‧ test head

2C‧‧‧ Ontology

3‧‧‧Upper guide

3A‧‧‧Upper guide hole

4‧‧‧Lower guides

4A‧‧‧Lower guide hole

5‧‧‧Shell

6‧‧‧Bending area

7‧‧‧Device under test

7A‧‧‧Contact pads

8‧‧‧ Space Converter

8A‧‧‧Contact pads

9‧‧‧ Floating area

10‧‧‧ probe card

20‧‧‧ Probe Card

21‧‧‧Test head

21A‧‧‧First Terminal Section

21B‧‧‧second terminal part

22‧‧‧Contact probe

22A‧‧‧Contact tip

22B‧‧‧Contact head

23‧‧‧Upper support

23A‧‧‧First upper guide

23B‧‧‧Second upper guide

24‧‧‧lower support

24A‧‧‧First lower guide

24B‧‧‧Second lower guide

25‧‧‧Shell

26‧‧‧Bending area

27‧‧‧Device under test

27A‧‧‧Contact pads

28‧‧‧ Space Converter

28A‧‧‧Contact pads

29A‧‧‧First Area

29B‧‧‧Second area

30‧‧‧ spacers

30a~30c‧‧ layer

30d‧‧‧ lower spacer

30l, 30r‧‧‧ half frame

30u‧‧‧ upper spacer

31l, 31r‧‧‧ lateral part

32, 32'‧‧‧ Keeping device

33‧‧‧Extension

34‧‧‧ head

35, 35’‧‧ hole

36‧‧‧ wing

37‧‧‧ Groove

38, 38’ ‧ ‧ Open Refuge Department

39, 39’‧‧‧Materials

40‧‧‧Free Zone

40C‧‧‧Central Part

40d‧‧‧ free area

40P‧‧‧ peripheral parts

40u‧‧‧Upper free zone

300‧‧‧ highlight

F, F1, F2‧‧‧ arrows

H, H1‧‧‧ height

L‧‧‧ extra length

LB‧‧‧second length

LS‧‧‧ length

Lsd‧‧‧ length

Lsu‧‧‧ length

Fc‧‧‧ surface

Fc’‧‧‧ opposite surface

In these figures: - Figure 1 schematically shows an electronic device implemented according to the prior art, in particular a probe card of an electronic device integrated on a wafer; - Figure 2 schematically shows a probe comprising a test head A cross-sectional view of a card, which is implemented in accordance with an embodiment of the present invention; - Figures 3A-3C, 4A-4C and 5A-5D schematically show an alternative embodiment including a test head implemented in accordance with the present invention A cross-sectional view of each of the needle cards; - Figure 6 shows schematically a top view of a probe card implemented in accordance with the present invention; - Figures 7A-7D schematically show another alternative implementation of the details of the test head implemented in accordance with the present invention The respective top views of the examples; and - Figures 8A-8D schematically show respective top views of another alternative embodiment of the details of the test heads implemented in accordance with the present invention.

Claims (13)

A test head (21) for an electronic device test apparatus, comprising a plurality of contact probes (22), the contact probes (22) being inserted into at least one upper support member (23) and a lower support member (24) The guide holes are realized, the curved regions (26) of the contact probes (22) are defined between the upper and lower supports (23, 24), and each of the contact probes (22) has a lower support member ( 24) at least one first terminal portion (21A) protruding, the first terminal portion having a first length (LA) having a contact tip (22A) at the end, the contact tip being configured to abut against the device under test (27) a respective contact pad (27A), and a second terminal portion (21B) projecting from the upper support member (23), the second terminal portion having a second length (LB) having a contact end (22B) at the end The contact head is configured to abut a contact pad (28A) of a space transformer (28), characterized in that at least one of the upper and/or lower supports (23, 24) comprises a plate and At least one pair of upper and/or lower guides parallel to each other (23A, 23B; 24A, 24B The upper and/or lower guides are separated by a free area (40) having a predetermined length (Ls), at least one spacer element (30) being disposed on the at least one pair of upper and/or lower guides (23A, 23B; Between 24A, 24B), the spacer element (30) is removable to change the proximity of the guide in the at least one pair of upper and/or lower guides (23A, 23B; 24A, 24B) The length (Ls) of the free area (40) adjusts the first length (LA) of the first terminal portion (21A) of the contact probe (22). The test head (21) of claim 1, wherein the spacer element (30) has a height less than or equal to a length (Ls) of the free area (40). The test head (21) of claim 1, wherein the spacer element (30) has at least one protruding portion protruding from the test head (21), in particular from the upper and lower support members (23, 24) (300). The test head (21) of claim 1, wherein the spacer element (30) comprises a plurality of layers (30a, 30b, 30c) that overlap and are separately removable. The test head (21) of claim 4, wherein the layers (30a, 30b, 30c) have protrusions from the test head (21), particularly from the upper and lower supports (23, 24) The respective protruding parts (300). The test head (21) of claim 5, wherein the protruding portions (300) of the layers (30a, 30b, 30c) have different lengths from each other. The test head (21) of claim 5, wherein the surfaces (Fc, Fc') of each of the protruding portions (300) of the layers (30a, 30b, 30c) are numbered. The test head (21) of claim 1, wherein the test head includes an upper support member (23) including first and second upper guide members (23A, 23B), and a lower support member (24), It comprises first and second lower guides (24A, 24B) which are plate-shaped and parallel to each other and separated by respective free areas (40u, 40d), and at least one pair of spacer elements (30u, 30d), each The spacer elements are disposed between the pair of upper and lower guides (23A, 23B; 24A, 24B) in respective free areas. The test head (21) of claim 1, wherein the spacer element (30) is made of a transparent or translucent plastic, ceramic material, metallic material or organic material or tantalum, preferably Kapton®. . A probe head (20) for an electronic device testing device, comprising at least one test head (21) and at least one space transformer (28), the test head (21) being equipped with a plurality of probe contacts (22), probes The contacts are configured to abut a plurality of contact pads (28A) of the space transformer (28), characterized in that the test head (21) is made according to any of the above claims. The probe head (20) of claim 10, further comprising a retaining device (32, 32') configured to connect at least the pair of upper and/or lower supports (23, 24) and / or lower guide (23A, 23B; 24A, 24B), and the spacer element (30) equipped with a holder (35, 35'; 38, 38') suitable for the holding device (32, 32') . The probe head (20) of claim 11, wherein the holder (35, 35'; 38, 38') of the holding device (32, 32') is adapted to receive the holding device (32, 32) ') Dimensions of holes (35, 35') and / or open housings (38, 38'). A method of restoring a test head (21), the test head comprising a plurality of contact probes (22), the contact probes (22) being inserted into at least one upper support member (23) and a lower support member (24) The guide holes are realized, each of the contact probes (22) having at least one first terminal portion (21A) protruding from the lower guide (24), the first terminal portion having a first length (LA) having an end having a contact tip (22A) configured to abut a respective contact pad (27A) of the device under test (27), and a second terminal portion (21B) protruding from the upper guide (23), the first The second terminal portion has a second length (LB) having a contact end (22B) at the end, the contact head being configured to abut a contact pad (28A) of a space transformer (28), the upper and/or lower At least one of the support members (23, 24) includes at least one pair of upper and/or lower guide members (23A, 23B; 24A, 24B) in a plate shape and parallel to each other, the upper and/or lower guide members being predetermined a free area (40) of length (Ls) separated by at least one spacer element (30) Disposed between the at least one pair of upper and/or lower guides (23A, 23B; 24A, 24B), the spacer element (30) is removable and includes a plurality of layers that overlap and are separately removable ( 30a-30c), the method is characterized by the steps comprising: - separating at least one pair of upper and / or lower guides (23A, 23B; 24A, 24B) from each other; - removing the spacer element (30) or constituting it One of the layers (30a to 30c); - close to the pair of upper and/or lower guides (23A, 23B; 24A, 24B); and - reconnect the upper and/or lower guides (23A, 23B) ; 24A, 24B), in order to change the length (Ls) of the free area (40), then move the contact probe (22) to the device under test (27), and restore the test head (21) Normal operation to adjust the first length (LA) of the first terminal portion (21A) of the contact probe (22).