TW201821343A - Conveying member, conveying device and scribing system capable of smoothly cleaning an upper surface of a table with a simple structure - Google Patents

Abstract

This invention aims to provide a conveying member capable of smoothly cleaning an upper surface of a table with a simple structure, a conveying device including the conveying member, and a scribing system including the conveying device. The conveying member 300 of this invention holds a substrate 10 and conveys it from a first table 110 to a second table 410. The conveying member 300 is disposed with a first cleaning unit 240 arranged at the rear of the substrate 10 in the conveying direction and in contact with the upper surface of the first table 110 in the process of conveying the substrate 10 from the first table 110 to the second table 410, so that the upper surface of the first table 110 is cleaned. The first cleaning unit 240 includes a brush 241 as a cleaning tool, and the brush 241 is moved while being in contact with the upper surface of the first table 110 to clean the upper surface of the first table 110.

Description

Transport body, transport device and scribing system

The present invention relates to a transport body for adsorbing and transporting a substrate, a transport device including the transport body, and a scribing system including the transport device.

Fragmentation of a brittle material substrate such as a glass substrate is performed by the following steps: a scribing step of forming a scribing line on the substrate surface, and a breaking step of applying a specific force to the substrate surface along the formed scribing line. For the formation of the scribing line, a scribing device having a scribing head is used. The scribing device includes, for example, a stage on which a substrate is placed, and the scribing head moves in the horizontal direction and the vertical direction with respect to the substrate placed on the stage. A wheel holder is attached to the lower end of the scribing head, and the cutter wheel is rotatably held by the wheel holder (for example, Patent Document 1). [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2004-26539

[Problems to be Solved by the Invention] In the scribing device, when the scribing is formed, minute glass chips (chips) are generated from the substrate. If the glass scraps are adhered to the stage or the substrate, and the substrate is adsorbed on the download stage with the glass scraps sandwiched between the stage and the substrate, damage to the surface of the substrate or local color unevenness will occur. In addition, if the substrate is placed on the stage in the presence of glass shavings on the stage, the height of the upper surface of the substrate becomes higher than a pre-conceived height, which becomes the cause of the poor breaking of the substrate. problem. In view of the above-mentioned problems, an object of the present invention is to provide a conveying body capable of smoothly cleaning an upper surface of a stage with a simple structure, a conveying device including the same, and a scribing system including the conveying device. [Technical means for solving the problem] A first aspect of the present invention relates to a carrier that holds a substrate and transfers it from the first stage to the second stage. The conveyance body in this aspect includes a first cleaning unit, which is disposed behind the substrate in the conveying direction of the substrate, and is in the step of conveying the substrate from the first stage to the second stage and the first stage. The upper surface is in contact, and the upper surface of the first stage is cleaned. According to the conveyance body of this aspect, in the step of holding the substrate and transferring it from the first stage to the second stage, the first cleaning unit is in contact with the upper surface of the first stage. Therefore, the first cleaning unit moves while contacting the upper surface of the first stage with the conveyance of the substrate, and cleans the upper surface of the first stage. Thereby, for example, even if glass scraps and the like are scattered on the upper surface of the first stage, the glass scraps and the like can be removed from the first stage by the first cleaning unit. Therefore, according to the conveyance body of this aspect, the upper surface of a 1st stage can be cleaned smoothly by the simple structure which arrange | positions a 1st cleaning unit in a conveyance body. In the conveyance body of this aspect, the first cleaning unit may be configured to include a first cleaning tool and a first cleaning tool that contacts and separates the first cleaning tool from the upper surface of the first stage. 1Drive section. In this manner, the first cleaning tool can be retracted to the top except during a period when the upper surface of the first stage is being cleaned. Therefore, it is possible to prevent the first cleaning tool from hindering the transport of the transport body. The conveyance body in this aspect may be configured with a second cleaning unit, which is disposed in front of the substrate in the conveying direction. In the step of conveying the substrate from the first stage to the second stage, it is the same as the above. The upper surface of the second stage is in contact, and the upper surface of the second stage is cleaned. According to this configuration, in the step of holding the substrate and transferring it from the first stage to the second stage, the second cleaning unit is in contact with the upper surface of the second stage. Therefore, the second cleaning unit moves while contacting the upper surface of the second stage while the substrate is being transported, and cleans the upper surface of the second stage. With this, for example, even if glass dust and the like are scattered on the upper surface of the second stage, the second cleaning unit can still remove glass debris and the like from the second stage. Therefore, the upper surface of the second stage can be cleaned smoothly with a simple configuration. In this case, the second cleaning unit may be configured to include a second cleaning tool and a second drive for contacting and separating the second cleaning tool with respect to the upper surface of the second stage. unit. In this way, the second cleaning tool can be retracted to the top except during a period when the upper surface of the second stage is being cleaned. Therefore, it is possible to prevent the second cleaning tool from hindering the transport of the transport body. A second aspect of the present invention relates to a transfer device that transfers a substrate from a first stage to a second stage. The conveying device of this aspect includes a conveying body of a first aspect, and a conveying unit that moves the conveying body between the first stage and the second stage. The conveying device according to this aspect can obtain the same effect as that of the first aspect described above. The conveying device in this aspect may include a third cleaning unit which is arranged on a conveying path between the first stage and the second stage, and conveys the substrate from the first stage to the second stage. In the step of the stage, the lower surface of the substrate is contacted, and the lower surface of the substrate is cleaned. According to this configuration, in the step of transferring the substrate from the first stage to the second stage, the third cleaning unit is in contact with the lower surface of the substrate. Therefore, the third cleaning unit moves relatively as the substrate is conveyed while contacting the lower surface of the substrate, and cleans the lower surface of the substrate. With this, for example, even if glass scraps and the like adhere to the lower surface of the substrate, the third cleaning unit can still remove the glass scraps and the like from the lower surface of the substrate. Therefore, the lower surface of the substrate can be cleaned smoothly with a simple configuration. In this case, the third cleaning unit may be configured to include a third cleaning tool and a third driving unit that contacts and separates the third cleaning tool from the lower surface of the substrate. In this way, the third cleaning tool can be retracted to the lower side except during the period when the lower surface of the substrate is cleaned. Therefore, it is possible to prevent the third cleaning tool from hindering the transport of the transport body. A third aspect of the present invention relates to a scribing system. The scribing system of this aspect includes the above-mentioned second aspect of the transfer device and a scribing device for forming a scribing line on the substrate placed on the first stage. The conveying device according to this aspect can obtain the same effect as that of the first aspect described above. A fourth aspect of the present invention relates to a carrier that holds a substrate and transfers the substrate from the first stage to the second stage. The conveyance body in this aspect includes a cleaning unit which is disposed behind the substrate in the conveying direction of the substrate, and contacts the upper surface of the second stage in the step of transferring the substrate from the first stage to the second stage. While cleaning the upper surface of the second stage. According to the conveyance body of this aspect, in the step of holding the substrate and transferring it from the first stage to the second stage, the cleaning unit is in contact with the upper surface of the second stage. Therefore, the cleaning unit moves while contacting the upper surface of the second stage while the substrate is being transported, and cleans the upper surface of the second stage. With this, for example, even if glass dust and the like are scattered on the upper surface of the second stage, the glass dust and the like can be removed from the second stage by the cleaning unit. Therefore, the upper surface of the second stage can be cleaned smoothly with a simple configuration. [Effects of the Invention] As described above, according to the present invention, it is possible to provide a conveying body capable of smoothly cleaning the upper surface of a stage with a simple structure, a conveying device having the same, and a scribing system having the same . The effect and significance of the present invention will be made clearer by the description of the embodiment shown below. However, the embodiment shown below is merely an example for implementing the present invention, and the present invention is not limited by the content described in the following embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in each drawing, for convenience of explanation, XYZ axes orthogonal to each other are added. The X-Y plane is the horizontal plane, and the positive direction of the Z axis is the vertical downward direction. FIG. 1 is a perspective view showing the configuration of the scribing system 1 and the breaking system 2. The scribing system 1 includes a scribing device 100 and a transfer device 200. The breaking system 2 includes a rotating device 400 and a breaking device 500. The scribing device 100 forms a scribing line on the upper surface of the substrate 10. The transfer device 200 transfers the substrate 10 on which the scribing is formed from the scribing device 100 to the rotation device 400. The rotating device 400 rotates the conveyed substrate 10 in the vertical direction and transfers it to the breaking device 500. The breaking device 500 cuts off the transferred substrate 10 along the scribe line. The substrate 10 is a fragile substrate such as a liquid crystal panel. The scribing device 100 includes a stage 110, a rotation mechanism 120, a moving mechanism 130, and a scribing head 140. The stage 110 has a substantially square shape in a plan view, and includes a plurality of holes for adsorbing the substrate 10 on the upper surface. A pressure is applied to the holes of the stage 110 by an air pressure source (not shown). The substrate 10 is attracted to the stage 110 by applying a negative pressure to the hole. The stage 110 constitutes a first stage that is the start of the transfer of the substrate 10. The stage 110 is rotatably supported by a rotation mechanism 120 about a rotation axis parallel to the Z axis. The rotation mechanism 120 includes a support mechanism for rotatably supporting the stage 110 and a motor for rotating the stage 110. The rotating mechanism 120 is provided on the support table 121 and is fed in the Y-axis direction by the moving mechanism 130 together with the support table 121. The moving mechanism 130 includes a pair of guides 131 for guiding the support table 121 in parallel in the Y-axis direction, a screw 132 for driving the support table 121 in parallel in the Y-axis direction, and a motor for driving the screw 132 (Not shown). The scribing head 140 is supported by the arch-shaped support mechanism 141 so as to be movable in parallel in the X-axis direction. The scribing head 140 is moved in the X-axis direction by a motor. A wheel holder is mounted on the lower end of the scribing head 140, and the cutter wheel is rotatably held by the wheel holder. The scribing head 140 is internally provided with a lifting mechanism for lifting and lowering the wheel holder in the vertical direction. During the scribing operation, the substrate 10 attracted to the stage 110 is positioned below the scribing head 140 by the moving mechanism 130. Next, the scribing head 140 lowers the wheel holder, and presses the cutter wheel on the upper surface of the substrate 10 with a certain load. In this state, the scribing head 140 is transferred in the X-axis direction. Thereby, a scribe line parallel to the X axis is formed on the upper surface of the substrate 10. On the upper surface of the substrate 10, a plurality of scribe lines parallel to the X axis are formed at specific intervals in the Y axis direction. When further forming a scribe line perpendicular to the scribe lines, the stage 110 is rotated 90 by the rotation mechanism 120. Then, a scribe line is formed on the upper surface of the substrate 10 by the same steps. The transfer device 200 includes a transfer rail 210, a lifting mechanism 220, an adsorption unit 230, and two cleaning units 240 and 250. The conveyance rail 210 includes a plate-shaped member extending in the X-axis direction, and guides the elevating mechanism 220 in a direction parallel to the X-axis. The elevating mechanism 220 includes a support stand 221, a support 222, and a moving body 223. The support base 221 includes a pair of grooves 221 a that engage with both ends in the Y-axis direction of the transport rail 210. The pair of grooves 221 a is engaged with the conveyance rail 210 to guide the support table 221 in the X-axis direction. The support table 221 is driven by the belt conveyor 211 in the X-axis direction. The pillar 222 is provided on the support stand 221. The moving body 223 is movably supported in the up-down direction by a support 222. A driving unit (not shown) for moving the moving body 223 along the support 222 is provided inside the moving body 223. The driving unit includes, for example, a slider that guides the moving body 223 upward and downward, and a linear motor for driving the moving body 223 upward and downward. A suction unit 230 is provided at an end portion on the positive side of the Y-axis of the moving body 223. The adsorption unit 230 has a rectangular plate-like shape in a plan view. The adsorption unit 230 includes a plurality of holes for adsorbing the substrate 10 on the lower surface. Pressure is applied to the holes of the adsorption unit 230 by an air pressure source (not shown). By applying a negative pressure to the holes, the substrate 10 is adsorbed on the adsorption unit 230. A cleaning unit 240 is provided at an end portion on the X-axis positive side and an end portion on the X-axis negative side of the adsorption unit 230, respectively. The cleaning unit 240 on the X-axis positive side constitutes a first cleaning unit for cleaning the upper surface of the stage 110 of the scribing device 100. In addition, the cleaning unit 240 on the negative side of the X axis constitutes a second cleaning unit for cleaning the upper surface of the stage 410 of the rotary device 400. The two cleaning units 240 clean the upper surfaces of the stages 110 and 410 with a brush 241, respectively. The two cleaning units 240 have the same configuration. The configuration of the cleaning unit 240 will be described later with reference to FIGS. 2 (a) to 2 (d). Moreover, the conveyance body 300 is comprised by the adsorption | suction unit 230 and the two cleaning units 240. The cleaning unit 250 is arranged on the conveyance path of the substrate 10 between the stage 110 of the scribing device 100 and the stage 410 of the rotation device 400. The cleaning unit 250 constitutes a third cleaning unit for cleaning the lower surface of the substrate 10. The cleaning unit 250 cleans the lower surface of the substrate 10 with a brush 251. The configuration of the cleaning unit 250 will be described later with reference to FIGS. 2 (e) and 2 (f). The rotating device 400 includes a stage 410, a support shaft 420, and a motor 430. The stage 410 has a rectangular plate-like shape in a plan view. The stage 410 includes a plurality of holes for sucking the substrate 10 on the upper surface. The hole of the stage 410 is pressured by an air pressure source (not shown). The substrate 10 is attracted to the stage 410 by applying a negative pressure to the hole. The stage 410 constitutes a second stage as a transfer destination of the substrate 10. The lower surface of the stage 410 is placed on the receiving stage 411. The end of the stage 410 on the positive side of the X-axis is supported by a support shaft 420 connected to a rotation shaft of the motor 430. By using the motor 430 to rotate the support shaft 420, the stage 410 is rotated about the support shaft 420 as an axis. In a state where the substrate 10 is adsorbed, the support shaft 420 is rotated, and the substrate 10 is placed on the stage 510 of the breaking device 500 in a state of being inverted upside down. In this state, the stage 410 releases the adsorption of the substrate 10, and the stage 510 on the side of the breaking device 500 starts the adsorption of the substrate 10. In this way, the substrate 10 is transferred to the stage 510 of the breaking device 500. The breaking device 500 includes a stage 510, a rotating mechanism 520, a moving mechanism 530, and a breaking lever 540. The stage 510 has a substantially square shape in a plan view, and includes a plurality of holes for adsorbing the substrate 10 on the upper surface. A hole in the stage 510 is pressured by an air pressure source (not shown). The substrate 10 is attracted to the stage 510 by applying a negative pressure to the hole. The stage 510 is rotatably supported by a rotation mechanism 520 about a rotation axis parallel to the Z axis. The rotation mechanism 520 includes a support mechanism for rotatably supporting the stage 510 and a motor for rotating the stage 510. The rotation mechanism 520 is provided on the support table 521 and is fed in the Y-axis direction by the moving mechanism 530 together with the support table 521. The moving mechanism 530 includes a pair of guides 531 for guiding the support table 521 in parallel in the Y-axis direction, a screw 532 for driving the support table 521 in parallel in the Y-axis direction, and a motor for driving the screw 532. (Not shown). The breaking lever 540 is supported by an arch-shaped support mechanism 541 so as to be movable up and down. The breaking lever 540 is moved in the Z-axis direction by a motor 542. The breaking lever 540 is guided in the Z-axis direction by a pair of shafts 543. The stages 110, 410, and 510 are arranged side by side in a straight line in the X-axis direction. During the breaking operation, the substrate 10 adsorbed on the stage 510 is positioned below the breaking rod 540 by the moving mechanism 530. Next, the rupture lever 540 is lowered, and the rupture lever 540 is pressed to the scribe position. Thereby, the substrate 10 is divided along the scribe line. In this manner, the substrate 10 is divided along each scribe line. When a scribe line is formed on the substrate 10 parallel to the Y-axis direction, after the stage 510 is rotated 90, the substrate 10 is divided along each scribe line by the same operation. 2 (a) to 2 (d) are side views schematically showing the configuration and operation of the cleaning unit 240 provided on the conveyance body 300, respectively. Although the cleaning unit 240 on the negative side of the X axis is shown in FIGS. 2 (a) to 2 (d), the cleaning unit 240 on the positive side of the X axis has the same configuration. The cleaning unit 240 includes a brush 241, a support member 242, a cylinder 243, a pair of shafts 244, and a support member 245. The brush 241 has a dense hair structure and is configured to remove dust such as glass shavings. The width in the Y-axis direction of the brush 241 is substantially the same as the width in the Y-axis direction of the suction unit 230. The width in the Y-axis direction of the brush 241 is set larger than the width in the Y-axis direction of the substrate 10 that can be placed on the stage 110 of the scribing device 100. The support member 242 is provided at an end portion of the adsorption unit 230. The support member 242 supports the cylinder 243. The cylinder 243 is a cylinder, and the driving shaft 243a is protruded in the positive direction of the Z-axis by the pressure from the air pressure source. A support member 245 is provided on the drive shaft 243a. The support member 245 is guided in the Z-axis direction by a pair of shafts 244. A pair of shafts 244 are disposed on the upper surface of the support member 245 and are inserted into holes formed in the support member 242. A brush 241 is provided on the lower surface of the support member 245. When positive pressure is applied to the cylinder 243 from the state of FIG. 2 (a) and FIG. 2 (b), the drive shaft 243a protrudes downward. Thereby, as shown in FIG. 2 (c) and FIG. 2 (d), the brush 241 is lowered together with the support member 245. When a negative pressure is applied to the cylinder 243 from the state of FIG. 2 (c) and FIG. 2 (d), the drive shaft 243a is retracted upward. As a result, as shown in FIGS. 2 (a) and 2 (b), the brush 241 and the support member 245 are raised together. 2 (e) and 2 (f) are side views schematically showing the structure and operation of the cleaning unit 250, respectively. The cleaning unit 250 includes a brush 251, a support member 252, a cylinder 253, a pair of shafts 254, and a support member 255. The brush 251 has a dense hair structure and is configured to remove dust such as glass dust. The width in the Y-axis direction of the brush 251 is substantially the same as the width in the Y-axis direction of the suction unit 230. The width in the Y-axis direction of the brush 251 is set larger than the width in the Y-axis direction of the substrate 10 that can be placed on the stage 110 of the scribing device 100. The support member 252 is provided on a support table (not shown) provided on the ground. The support member 252 supports the cylinder 253. The cylinder 253 is a cylinder, and the drive shaft 253a is protruded in the positive direction of the Z-axis by the pressure from the air pressure source. A support member 255 is provided on the drive shaft 253a. The support member 255 is guided in the Z-axis direction by a pair of shafts 254. A pair of shafts 254 are provided on the lower surface of the support member 255 and are inserted into holes formed in the support member 252. A brush 251 is provided on the upper surface of the support member 255. When positive pressure is applied to the cylinder 253 from the state of FIG. 2 (e), the drive shaft 253a protrudes upward. Thereby, as shown in FIG. 2 (f), the brush 251 rises together with the support member 255. When a negative pressure is applied to the cylinder 253 from the state of FIG. 2 (f), the drive shaft 253a is retracted downward. Thereby, as shown in FIG. 2 (e), the brush 251 is lowered together with the support member 255. FIG. 3 (a) is a block diagram showing the configuration of the transfer device 200. As shown in FIG. The transfer device 200 includes a transfer unit 201, a transfer body 300 shown in FIG. 1, a pressure applying unit 202, a substrate cleaning unit 203, a detection unit 204, and a control unit 205. The transfer unit 201 transfers the substrate 10 from the stage 110 of the scribing device 100 to the stage 410 of the rotation device 400. The transfer unit 201 includes a transfer rail 210, a belt conveyor 211, and a lifting mechanism 220 shown in FIG. 1. The transport body 300 includes a stage cleaning section 301 and a suction section 302. The stage cleaning section 301 cleans the stages 110 and 410 of FIG. 1. The stage cleaning unit 301 includes two cleaning units 240 shown in FIG. 1. The adsorption unit 302 includes an adsorption unit 230 shown in FIG. 1. The pressure applying section 202 includes an air pressure source, and applies pressure to the carrier 300 and the substrate cleaning section 203. The substrate cleaning section 203 cleans the lower surface of the substrate 10. The substrate cleaning unit 203 includes a cleaning unit 250 shown in FIG. 1. The detection unit 204 includes various sensors such as a sensor for detecting the position of the conveyance body 300. The control unit 205 includes a calculation processing circuit such as a CPU, and a memory such as a ROM, a RAM, and a hard disk. The control unit 205 controls each unit in accordance with a program stored in the memory. FIG. 3 (b) is a flowchart showing the conveyance control of the conveyance device 200. This control is executed by the control section 205 shown in FIG. 3 (a). Hereinafter, the conveyance control of the control unit 205 will be described with reference to FIGS. 4 (a) to 9 (b) as appropriate. 4 (a) to 9 (b) are side views schematically showing the operation of the conveying device 200, respectively. In addition, hereinafter, the stage 110 of the scribing device 100 is specifically referred to as a first stage 110, and the stage 410 of the rotation device 400 is particularly referred to as a second stage 410. In addition, the cleaning unit 240 disposed on the rear side (negative X-axis side) of the substrate 10 in the two cleaning units 240 of the carrier 300 is specifically referred to as the first cleaning unit 240, and the substrate 10 is transported on the front side. The cleaning unit 240 (positive side of the X axis) is particularly referred to as a second cleaning unit 240. The cleaning unit 250 is particularly referred to as a third cleaning unit 250. Immediately before the transfer operation of the substrate 10 is started, the transfer body 300 is positioned at an intermediate position (initial position) between the first stage 110 and the second stage 410. In this state, the conveyance body 300 is positioned at the raised position by the lifting mechanism 220, and the brushes 241 of the first cleaning unit 240 and the second cleaning unit 240 are positioned at the raised positions, respectively. The brush 251 of the third cleaning unit 250 is positioned at the lowered position. When the conveyance operation is started, the control unit 205 moves the conveyance body 300 above the first stage 110 as shown in FIG. 4 (a) (S101). Next, the control unit 205 lowers the conveyance body 300 and overlaps the lower surface of the adsorption unit 230 with the upper surface of the substrate 10, and further adsorbs the upper surface of the substrate 10 to the adsorption unit 230 (S102). Thereafter, the control unit 205 raises the conveyance body 300 as shown in FIG. 4 (b) (S103). Thereby, the substrate 10 is lifted from the first stage 110. Next, as shown in FIG. 5 (a), the control unit 205 lowers the brush 241 of the first cleaning unit 240 and raises the brush 251 of the third cleaning unit 250 (S104). Thereby, the lower end of the brush 241 of the first cleaning unit 240 is positioned slightly lower than the upper surface of the first stage 110, and the upper end of the brush 251 of the third cleaning unit 250 is adsorbed below the substrate 10 of the adsorption unit 230 The surface is positioned slightly above. After that, the control unit 205 moves the conveyance body 300 in the direction (positive X-axis direction) toward the second stage 410 (S105). As a result, as shown in FIG. 5 (b), the brush 241 of the first cleaning unit 240 moves while abutting against the upper surface of the first stage 110. In this way, the upper surface of the first stage 110 is cleaned. In addition, the brush 251 of the third cleaning unit 250 moves relatively to the substrate 10 while abutting on the lower surface of the substrate 10. In this way, the lower surface of the substrate 10 is cleaned. After that, the control unit 205 lowers the brush 241 of the second cleaning unit 240 as shown in FIG. 6 (a) while transferring the carrier 300 (S106). Accordingly, the lower end of the brush 241 of the second cleaning unit 240 is positioned slightly lower than the upper surface of the second stage 410. Furthermore, when the conveyance body 300 is moved, as shown in FIG. 6 (b), the brush 241 of the second cleaning unit 240 moves while abutting on the upper surface of the second stage 410. In this way, the upper surface of the second stage 410 is cleaned. Next, as shown in FIG. 7 (a), the control unit 205 raises the brush 241 of the first cleaning unit 240 and lowers the brush 251 of the third cleaning unit 250 (S107). As a result, the lower end of the brush 241 of the first cleaning unit 240 is positioned slightly above the upper surface of the first stage 110, and the upper end of the brush 251 of the third cleaning unit 250 is adsorbed below the substrate 10 of the adsorption unit 230. The surface is positioned slightly below. As shown in FIG. 7 (b), when the carrier 300 is moved above the second stage 410, the control unit 205 raises the brush 241 of the second cleaning unit 240 as shown in FIG. 8 (a) (S108 ). Thereby, the lower end of the brush 241 of the second cleaning unit 240 is positioned slightly above the upper surface of the second stage 410. Next, the control unit 205 lowers the conveyance body 300 and overlaps the lower surface of the substrate 10 with the upper surface of the second stage 410, and further causes the adsorption unit 230 to release the adsorption of the substrate 10 (S109). Thereafter, the control unit 205 raises the conveyance body 300 as shown in FIG. 8 (b) (S110). Thereby, the substrate 10 is placed on the upper surface of the second stage 410. In this way, the transport operation for one substrate 10 is completed. As shown in FIG. 8 (b), when the next substrate 10 is placed on the first stage 110, the control unit 205 returns to step S101 in FIG. 3 (b) and executes the conveyance control for the next substrate 10. As a result, as shown in FIG. 9 (a), the carrier 300 is transferred above the first stage 110. In the state of FIG. 8 (b), when the next substrate 10 is not placed on the first stage 110, the control unit 205 moves the carrier 300 to the initial position between the first stage 110 and the second stage 410. . After that, the stage 410 of the rotation device 400 rotates in a clockwise direction around the support shaft 420 as shown in FIG. 9 (b) while the substrate 10 is being adsorbed. Thereby, the substrate 10 is transferred to the stage 510 of the breaking device 500 in a state of being inverted upside down. Thereafter, a cracking operation on the substrate 10 is performed. <Effects of Embodiment> According to this embodiment, the following effects can be obtained. As shown in FIG. 5 (b), in the step where the carrier 300 holds the substrate 10 and transfers it from the first stage 110 to the second stage 410, as shown in FIG. 5 (b), the brush 241 of the first cleaning unit 240 and the first carrier The upper surface of the stage 110 is in contact. Therefore, the brush 241 of the first cleaning unit 240 moves while contacting the upper surface of the first stage 110 while the substrate 10 is being transported, and cleans the upper surface of the first stage 110. With this, for example, even if glass scraps or the like generated by the scribing operation are scattered on the upper surface of the first stage 110, the glass scraps or the like can be removed from the first stage 110 by the brush 241 of the first cleaning unit 240. Therefore, according to the conveyance body 300 of this embodiment, the upper surface of the 1st stage 110 can be cleaned smoothly with the simple structure which arrange | positions the 1st cleaning unit 240 in the conveyance body 300. The first cleaning unit 240 includes a brush 241 (first cleaning tool), and a cylinder 243 (first driving section) that contacts and separates the brush 241 from the upper surface of the first stage 110. As a result, the brush 241 of the first cleaning unit 240 can be retracted upward as shown in FIG. 7 (a) except during the time when the upper surface of the first stage 110 is cleaned. Therefore, it is possible to prevent the brush 241 from hindering the conveyance of the conveyance body 300. The transport body 300 includes a second cleaning unit 240 on the front side of the substrate 10 in the transport direction (positive X-axis direction). As a result, in the step of holding the substrate 10 and transferring it from the first stage 110 to the second stage 410, as shown in FIG. 6 (b), the brush 241 of the second cleaning unit 240 and the second stage The upper surface of the stage 410 is in contact. Therefore, the brush 241 of the second cleaning unit 240 moves while contacting the upper surface of the second stage 410 while the substrate 10 is being transported, and cleans the upper surface of the second stage 410. Thereby, for example, even if glass scraps and the like are scattered on the upper surface of the second stage 410, the second cleaning unit 240 can still remove the glass scraps and the like from the second stage 410. Therefore, the upper surface of the second stage 410 can be cleaned smoothly with a simple configuration. The second cleaning unit 240 includes a brush 241 (a second cleaning tool), and a cylinder 243 (a second driving unit) that contacts and separates the brush 241 from the upper surface of the second stage 410. As a result, the brush 241 of the second cleaning unit 240 can be retracted upward as shown in FIG. 8 (a) except during the time when the upper surface of the second stage 410 is cleaned. Therefore, it is possible to prevent the brush 241 from hindering the conveyance of the conveyance body 300. The transfer device 200 includes a third cleaning unit 250 arranged on a transfer path between the first stage 110 and the second stage 410. Thereby, in the step of transferring the substrate 10 from the first stage 110 to the second stage 410, as shown in FIG. 5 (b), the brush 251 of the third cleaning unit 250 is in contact with the lower surface of the substrate 10. Therefore, the brush 251 of the third cleaning unit 250 moves relative to the substrate 10 while the substrate 10 is in contact with the lower surface of the substrate 10 while being conveyed, and cleans the lower surface of the substrate 10. With this, for example, even if glass scraps and the like adhere to the lower surface of the substrate, the third cleaning unit 250 can still remove the glass scraps and the like from the lower surface of the substrate 10. Therefore, the lower surface of the substrate 10 can be cleaned smoothly with a simple configuration. The third cleaning unit 250 includes a brush 251 (third cleaning tool), and a cylinder 253 (third driving section) that contacts and separates the brush 251 from the lower surface of the substrate 10. As a result, the brush 251 can be retracted downward as shown in FIG. 7 (a) except during the period when the lower surface of the substrate 10 is cleaned. Therefore, it is possible to prevent the brush 251 from hindering the conveyance of the conveyance body 300. <Modifications> The embodiments of the present invention have been described above, but the present invention is not limited to the above-mentioned embodiments, and the embodiments of the present invention can be variously modified in addition to the above. For example, in the above embodiment, the brush 241 and the brush 251 can be raised and lowered by the cylinder 243 and the cylinder 253, respectively, but it is feasible that the brush 241 is fixed at the lowered position of the above embodiment, and the brush 251 is fixed at the raised position of the above embodiment. . With this configuration, the upper surface of the first stage 110 and the second stage 410 and the lower surface of the substrate 10 can be cleaned with the brush 241 and the brush 251, respectively, with the transfer of the carrier 300. Furthermore, in the above-mentioned embodiment, the substrate 10 is transferred from the stage 110 of the scribing device 100 to the stage 410 of the rotary device 400, but the stage at which the transfer is started and the stage at the transfer destination are not necessarily limited to these. . For example, it is possible that the carrier of the transfer destination is the carrier 510 of the breaking device 500. Moreover, although the three cleaning units of the 1st cleaning unit 240, the 2nd cleaning unit 240, and the 3rd cleaning unit 250 are arrange | positioned in the said embodiment, all these 3 cleaning units may not necessarily be necessary. For example, when the upper surface of the second stage 410 is not cleaned, or when the upper surface of the second stage 410 is cleaned by another cleaning mechanism, the second cleaning unit 240 may be omitted from the carrier 300. Alternatively, when the lower surface of the substrate 10 is not cleaned or the lower surface of the substrate 10 is cleaned with another cleaning structure, the third cleaning unit 250 may be omitted. In the above embodiment, as shown in FIGS. 8 (a) to 9 (a), when the transport body 300 is returned to the direction of the first stage 110, the second cleaning unit 240 on the positive side of the X axis is returned. The brush 241 is raised, but it is possible to move the carrier 300 toward the first stage 110 while the brush 241 of the second cleaning unit 240 is lowered, and clean and place the brush 241 of the second cleaning unit 240 On the upper surface of the substrate 10 on the second stage 410. In this case, in the step of cleaning the upper surface of the substrate 10 with the brush 241 of the second cleaning unit 240, it is preferable that the substrate 10 is moved from the second to the second in a manner that does not cause positional deviation due to the contact of the brush 241. The stage 410 is adsorbed. Moreover, in the above-mentioned embodiment, as shown in FIGS. 8 (b) to 9 (a), when returning the carrier 300 to the direction of the first stage 110, the first cleaning unit 240 on the negative side of the X-axis is moved. The brush 241 is maintained in a raised state, but it is feasible to transfer the carrier 300 toward the first stage 110 with the brush 241 of the first cleaning unit 240 lowered, and use the brush of the first cleaning unit 240 again. 241 Cleans the upper surface of the first stage 110. In the above-mentioned embodiment, the brush 241 and the brush 251 are raised and lowered by using the cylinder 243 and the cylinder 253. However, the brush 241 and the brush 251 may be raised and lowered by using another driving source such as a motor or a plunger. In addition, the cleaning tools for cleaning the stages 110 and 410 and the substrate 10 are not limited to the brushes 241 and 251, and may be other cleaning tools such as sponges. In addition, the embodiment of the present invention can be appropriately modified in various ways within the scope of the technical idea shown in the scope of the patent application.

1‧‧‧ Crossing system

2‧‧‧ Split System

10‧‧‧ substrate

100‧‧‧ scribing device

110‧‧‧1st stage / stage

120‧‧‧ rotating mechanism

121‧‧‧Support Desk

130‧‧‧mobile agency

131‧‧‧Guide

132‧‧‧Screw

140‧‧‧ crossed head

141‧‧‧Support institutions

200‧‧‧ transfer device

201‧‧‧Transportation Department

202‧‧‧Pressure imparting department

203‧‧‧Substrate cleaning department

204‧‧‧Testing Department

205‧‧‧Control Department

210‧‧‧ transport track

211‧‧‧belt conveyor

220‧‧‧Lifting mechanism

221‧‧‧Support Desk

221a‧‧‧slot

222‧‧‧ Pillar

223‧‧‧mobile

230‧‧‧ Adsorption unit

240‧‧‧ 1st cleaning unit / cleaning unit / 2nd cleaning unit

241‧‧‧Brush

242‧‧‧Support components

243‧‧‧Cylinder

243a‧‧‧Drive shaft

244‧‧‧axis

245‧‧‧Support components

250‧‧‧ 3rd cleaning unit / cleaning unit

251‧‧‧Brushes

252‧‧‧Support components

253‧‧‧Cylinder

253a‧‧‧Drive shaft

254‧‧‧axis

255‧‧‧ supporting components

300‧‧‧ transport body

301‧‧‧Platform cleaning department

302‧‧‧Adsorption Department

400‧‧‧ rotating device

410‧‧‧Second carrier / carrier

411‧‧‧Receiving Station

420‧‧‧ support shaft

430‧‧‧Motor

500‧‧‧ Splitting device

510‧‧‧ carrier

520‧‧‧rotating mechanism

521‧‧‧Support Desk

530‧‧‧mobile agency

531‧‧‧Guide

532‧‧‧Screw

540‧‧‧ split rod

541‧‧‧ Supporting Organizations

542‧‧‧Motor

543‧‧‧axis

FIG. 1 is a perspective view showing the configuration of the scribing system and the breaking system of the embodiment. 2 (a) to 2 (d) are side views schematically showing the structure and operation of a cleaning unit provided on a transport body according to an embodiment. Fig. 2 (e) and Fig. 2 (f) are side views each schematically showing the configuration and operation of a cleaning unit which is arranged differently from the conveyance body of the embodiment. Fig. 3 (a) is a block diagram showing the configuration of the conveying device of the embodiment. Fig. 3 (b) is a flowchart showing the conveyance control of the conveyance device according to the embodiment. Fig. 4 (a) and Fig. 4 (b) are side views each schematically showing the operation of the conveying device according to the embodiment. Fig. 5 (a) and Fig. 5 (b) are side views each schematically showing the operation of the conveying device according to the embodiment. Fig. 6 (a) and Fig. 6 (b) are side views each schematically showing the operation of the conveying device according to the embodiment. Fig. 7 (a) and Fig. 7 (b) are side views each schematically showing the operation of the conveying device according to the embodiment. Fig. 8 (a) and Fig. 8 (b) are side views each schematically showing the operation of the conveying device according to the embodiment. Fig. 9 (a) and Fig. 9 (b) are side views each schematically showing the operation of the conveying device according to the embodiment.

Claims (9)

A transfer body is characterized in that it is a person who holds a substrate and transfers it from the first stage to the second stage, and includes a first cleaning unit which is disposed behind the substrate in the direction of transportation of the substrate, In the step of transferring the substrate from the first stage to the second stage, the substrate is brought into contact with the upper surface of the first stage, and the upper surface of the first stage is cleaned. For example, the conveyance body according to claim 1, wherein the first cleaning unit includes a first cleaning tool and a first driving unit that contacts and separates the first cleaning tool with respect to the upper surface of the first stage. For example, if the conveyance body of item 1 or 2 includes a second cleaning unit, the second cleaning unit is arranged in front of the substrate in the conveying direction, and the step of transferring the substrate from the first carrier to the second carrier In contact with the upper surface of the second stage, the upper surface of the second stage is cleaned. In the conveyance body of claim 3, the second cleaning unit includes a second cleaning tool, and a second driving unit that contacts and separates the second cleaning tool from the upper surface of the second stage. A transfer device includes: a transfer body according to any one of claims 1 to 4; and a transfer unit that moves the transfer body between the first carrier and the second carrier. For example, the transfer device of claim 5 includes a third cleaning unit which is disposed on a transfer path between the first carrier and the second carrier, and transports the substrate from the first carrier. In the step up to the second stage, the lower surface of the substrate is contacted, and the lower surface of the substrate is cleaned. The transporting device according to claim 6, wherein the third cleaning unit includes: a third cleaning tool; and a third driving unit that contacts and separates the third cleaning tool from the lower surface of the substrate. A scribing system comprising: a transfer device according to any one of claims 5 to 7; and a scribing device for forming a scribing line on the substrate on the first stage. A transfer body is characterized in that it is a person who holds a substrate and transfers it from the first stage to the second stage, and is provided with a cleaning unit which is arranged behind the substrate in the conveying direction, and transfers the substrate from the substrate. In the step of transferring the first carrier to the second carrier, the upper surface of the second carrier is brought into contact with the upper surface of the second carrier, and the upper surface of the second carrier is cleaned.