TW201810449A - Arrangement comprising a carrier and a housing body, and method for producing an arrangement comprising a component - Google Patents

Arrangement comprising a carrier and a housing body, and method for producing an arrangement comprising a component Download PDF

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Publication number
TW201810449A
TW201810449A TW106120101A TW106120101A TW201810449A TW 201810449 A TW201810449 A TW 201810449A TW 106120101 A TW106120101 A TW 106120101A TW 106120101 A TW106120101 A TW 106120101A TW 201810449 A TW201810449 A TW 201810449A
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Taiwan
Prior art keywords
cavity
carrier
housing
area
region
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TW106120101A
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Chinese (zh)
Inventor
艾卡特 雪爾克斯
佛羅里安 葛拉邁爾
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羅伯特博斯奇股份有限公司
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Publication of TW201810449A publication Critical patent/TW201810449A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0654Protection against aggressive medium in general against moisture or humidity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/141Monolithic housings, e.g. molded or one-piece housings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/147Details about the mounting of the sensor to support or covering means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/148Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Abstract

An arrangement (1) comprising a carrier (3) and a housing body (4) is disclosed. The housing body (4) is arranged on the carrier (3) and bounds a cavity (9) for receiving at least one component (16). In the cavity (9), passivation (19) made of a first material is provided in a first region (21) and made of a second material is provided in a second region (22) different from the first region (21). The first material has a higher modulus of elasticity and/or a higher hardness as compared with the second material, wherein the first region (21) covers a sub-area (20) of the carrier (3), and the second region (22) covers a sub-area (14) of the housing body (4). The component (16) is arranged in the second region (22).

Description

包含載體及殼體的裝置,以及製造包含構件的裝置的方法 Device including carrier and housing, and method of manufacturing device including component

本發明大體係關於用於構件之外殼。特定言之,本發明係關於用於電子及/或微機械構件之外殼,外殼具有載體及殼體,該殼體具有例如設置成容納感測器元件之空腔。 The large system of the present invention relates to a housing for components. In particular, the present invention relates to a housing for electronic and/or micromechanical components, the housing having a carrier and a housing having, for example, a cavity arranged to receive a sensor element.

取決於吾人所需之目的,用於電子構件之外殼受到各種需求,此由佈置於外殼中之構件的類型所造成。已知用於感測器之外殼。 Depending on the purpose required by us, the housing used for electronic components is subject to various demands, which is caused by the type of components arranged in the housing. Known housings for sensors.

在DE 10 2011 084 582 B3中,描述具有模製封裝的微機械感測器裝置及對應製造方法。感測器裝置包含基板、應用於基板之電路晶片及模製封裝,其中封裝電路晶片。模製封裝在電路晶片上方具有空腔(感測器晶片設置於其中),且在空腔內具有通道孔(通過該通道孔引導感測器晶片之電氣連接)。 In DE 10 2011 084 582 B3, a micromechanical sensor device with a molded package and a corresponding manufacturing method are described. The sensor device includes a substrate, a circuit chip applied to the substrate, and a molded package, in which the circuit chip is packaged. The molded package has a cavity above the circuit wafer (in which the sensor chip is disposed), and a channel hole in the cavity (through which the electrical connection of the sensor chip is guided).

亦需提供外殼,該外殼同時對於不同類型之構件(例如,諸如感測器及用於感測器的電子構件)而言係令人滿意的。應足夠地保護構件免於環境影響;另外,須另外確保與相應構件安全接觸之可能性。另外,必要時,適當接近構件成為可能。因此,就感測器元件而言,為了可執行 量測,通常需要進入感測器元件之媒介入口。亦須注意感測器元件相對以發生在外殼與載體之間的熱機械及機械應力可比較敏感之實情。 It is also necessary to provide a housing which is satisfactory for different types of components (for example, such as sensors and electronic components for sensors) at the same time. The components should be sufficiently protected from environmental influences; in addition, the possibility of safe contact with the corresponding components must be additionally ensured. In addition, when necessary, proper access to the member becomes possible. Therefore, as far as the sensor element is concerned, in order to perform Measurement usually requires entering the medium entrance of the sensor element. It should also be noted that the sensor element is relatively sensitive to the thermomechanical and mechanical stresses occurring between the housing and the carrier.

因此存在對於用於構件的外殼之需求,其中每一構件經充分鈍化及保護免於環境影響,且同時無負面影響(諸如,熱機械或機械應力)施加於構件上。 There is therefore a need for a housing for components, where each component is sufficiently passivated and protected from environmental influences, and at the same time no negative effects (such as thermo-mechanical or mechanical stress) are applied to the components.

提供如獨立專利技術方案1中所主張之包含載體及殼體的裝置及根據從屬專利技術方案9之用於製造包含構件之裝置的方法。 A device including a carrier and a housing as claimed in the independent patent technical solution 1 and a method for manufacturing a device including a component according to the dependent patent technical solution 9 are provided.

其他優化係在附屬技術方案中指定。 Other optimizations are specified in the attached technical solution.

根據本發明之一第一態樣,產生包含載體及殼體的裝置,其中殼體佈置於載體上且限定用於容納至少一個構件之空腔。在空腔中,由第一材料製備的鈍化區設置於第一區域中,且由第二材料製備之鈍化區設置於第二區中,其中第二區域不同於第一區域。第一材料與第二材料進相比具有較高彈性模數及/或較高硬度。此外,第一區域覆蓋載體之一子區,且第二區域覆蓋殼體之一子區。構件佈置於第二區域中。 According to a first aspect of the invention, a device comprising a carrier and a housing is produced, wherein the housing is arranged on the carrier and defines a cavity for accommodating at least one component. In the cavity, a passivation area made of a first material is provided in the first area, and a passivation area made of a second material is provided in the second area, where the second area is different from the first area. The first material has a higher modulus of elasticity and/or a higher hardness than the second material. Furthermore, the first area covers a sub-region of the carrier and the second area covers a sub-region of the housing. The components are arranged in the second area.

藉由此裝置,可顯著改良構件之鈍化區,產生兩部分鈍化區,此在鈍化區的第一區域及第二區域中可分別滿足關於鈍化區之不同需求。舉例而言,可使用兩部分灌封化合物,藉由該兩部分灌封化合物,互斥需求可藉助於兩種材料選擇性地實施。此外,空腔封裝之穩固性與先前技術相比可顯著提高。 With this device, the passivation area of the component can be significantly improved, resulting in a two-part passivation area, which can meet different requirements regarding the passivation area in the first and second areas of the passivation area, respectively. For example, a two-part potting compound can be used, and with the two-part potting compound, the mutual exclusion requirement can be selectively implemented by means of two materials. In addition, the stability of the cavity package can be significantly improved compared to the prior art.

根據一較佳具體實例,空腔形成通向載體之通道開口,該載體至少部分由第一材料填充。 According to a preferred embodiment, the cavity forms a channel opening to the carrier, which is at least partially filled with the first material.

為此目的,有利地,有可能選擇用於第一區域之材料,該材料與其他材料相比或與第二材料相比更適合於保護載體的子區,且因此具有足夠高之彈性模數及/或恰當高之硬度。此外,以此方式可達成載體之尤其穩固鈍化。 For this purpose, advantageously, it is possible to choose a material for the first region that is more suitable for protecting the sub-regions of the carrier compared to other materials or compared to the second material and therefore has a sufficiently high modulus of elasticity And/or a suitably high hardness. In addition, a particularly stable passivation of the carrier can be achieved in this way.

此外,殼體可形成限定空腔之突起,其中構件佈置於突起上,且第二材料覆蓋突起。 Furthermore, the housing may form a protrusion defining a cavity, wherein the member is arranged on the protrusion, and the second material covers the protrusion.

可有利地選擇第二材料以使得殼體之子區或位於其上之構件受保護且同時經受儘可能小的熱力學及機械應力。特定言之,應力敏感構件(其與載體之塑膠相比具有不同膨脹係數及/或不同可撓性)不安放在載體上,此意謂避免諸如出現在例如焊接期間之熱負荷及在構件上的機械及熱機械應力。此外,第二區域中之構件例如在諸如滲透水分之環境負荷方面可受到足夠好的保護。 The second material can be advantageously selected so that the sub-regions of the housing or the components located thereon are protected and at the same time subject to as little thermodynamic and mechanical stress as possible. In particular, stress-sensitive components (which have a different expansion coefficient and/or different flexibility compared to the plastic of the carrier) are not placed on the carrier, which means to avoid thermal loads such as those that occur during welding and on the component, for example Mechanical and thermomechanical stress. In addition, the components in the second area can be sufficiently protected, for example, with respect to environmental loads such as moisture penetration.

根據本發明之一個具體實例,第二區域中之構件形成為感測器元件,特定言之形成為壓力感測器。 According to a specific example of the invention, the member in the second area is formed as a sensor element, in particular as a pressure sensor.

因此,有利地,有可能實施感測器裝置,其中確保感測器特性曲線之維持,此係因為尤其在裝配期間可阻止感測器特性曲線上之不利影響。特定言之,此處可使用預模製外殼之優點,其中感測器安放在正常極硬性塑膠基底上,而感測器之其他側面僅由合適的保護鈍化區包圍。 Therefore, advantageously, it is possible to implement the sensor device, in which the maintenance of the sensor characteristic curve is ensured, since adverse effects on the sensor characteristic curve can be prevented especially during assembly. In particular, the advantages of a pre-molded housing can be used here, where the sensor is placed on a normal, extremely rigid plastic substrate, while the other sides of the sensor are only surrounded by a suitable protective passivation area.

此外,在感測器元件與殼體之外部側面之間,流體連接可形成於第二材料中及/或形成於殼體中。 Furthermore, between the sensor element and the outer side of the housing, a fluid connection may be formed in the second material and/or in the housing.

因此,必要時,感測器元件之部件可留出,有利地提供具有例如用於將氣壓饋入至感測器之簡單實施的饋入開口之感測器裝置。特定 言之,此處饋入開口與純模外殼中相比可更簡單地經壓印,其中構件或感測器由殼體包圍。 Therefore, if necessary, the components of the sensor element can be set aside, advantageously providing a sensor device with a simple implemented feed opening for feeding air pressure to the sensor, for example. specific In other words, the feed opening here can be imprinted more simply than in a pure mold housing, in which the component or sensor is surrounded by the housing.

另一構件較佳地嵌入於殼體中。 The other component is preferably embedded in the housing.

因此,較佳地選擇以使得其不需要媒介入口之此構件可受到尤其較佳之保護而免於環境影響,此係由於其直接地由殼體包圍。 Therefore, this component is preferably selected so that it does not require a media inlet can be particularly well protected from environmental influences, since it is directly surrounded by the housing.

根據一有利具體實例,第一區域與第二區域相比具有較低厚度,其中第一材料具有例如環氧樹脂或塗漆。 According to an advantageous embodiment, the first area has a lower thickness than the second area, where the first material has, for example, epoxy resin or lacquer.

因此,有利地,兩部分鈍化區的第一組分可利用硬且薄的灌封化合物保護載體。緻密且硬的灌封化合物與較軟材料相比使損害媒介遠離敏感結構持續顯著更長時間。特定言之,關於諸如空氣、水分及排放氣體、鹵化物、鹼或酸之媒介的較低磁導率可在第一區域中達成。此外,較薄塗覆確保無熱機械應力導致開裂及脫離,此在較大體積的情況下將另外待預期。 Therefore, advantageously, the first component of the two-part passivation zone can protect the carrier with a hard and thin potting compound. Dense and hard potting compounds keep the damage medium away from sensitive structures for significantly longer than softer materials. In particular, lower permeability with respect to media such as air, moisture and exhaust gases, halides, alkalis or acids can be achieved in the first zone. In addition, the thinner coating ensures that there is no thermo-mechanical stress leading to cracking and detachment, which will be additionally expected in the case of larger volumes.

第二材料可具有凝膠,特定言之,聚矽氧凝膠。 The second material may have a gel, in particular, a polysiloxane gel.

與諸如環氧樹脂之塑膠相比,例如,此材料具有優勢,其可用作構件之上的完整灌封化合物。該材料用於第二區域之實情意謂,此外,在第二區域中,應力誘發之特性曲線改變可避免,如可避免由於熱機械應力產生之開裂及分層。 Compared to plastics such as epoxy resins, for example, this material has the advantage that it can be used as a complete potting compound on components. The fact that the material is used in the second region means that in addition, in the second region, stress-induced characteristic curve changes can be avoided, such as cracking and delamination due to thermomechanical stress can be avoided.

因此,總體而言,兩部分鈍化區的第二組分可利用由具有較低彈性模數之軟材料製備之不可壓縮灌封化合物來保護感測器元件以及空腔之體積兩者。不可壓縮性在許多應用中為確保不受影響之信號傳輸之前提,且柔軟度有助於避免由感測器元件上之熱機械應力產生之任何影響。 Therefore, in general, the second component of the two-part passivation zone can protect both the sensor element and the volume of the cavity with an incompressible potting compound made of a soft material with a lower modulus of elasticity. Incompressibility is mentioned in many applications to ensure unimpeded signal transmission, and softness helps to avoid any effects caused by thermomechanical stress on the sensor element.

殼體可例如藉由塑膠包覆成型(overmoulding)來製造。 The housing can be manufactured, for example, by plastic overmoulding.

因此,殼體可以高效方式製造,其中藉助於塑膠,亦可同時確保關於環境影響之構件之良好保護。有利地,有可能實施在作為具有預模製空腔及兩部分鈍化區之載體的電路板或引線框上製造具有包覆成型構件的模具預模製外殼。 Therefore, the housing can be manufactured in an efficient manner, with the help of plastic, which also ensures good protection of the components with regard to environmental impact. Advantageously, it is possible to implement a mold pre-molded housing with over-molded components on a circuit board or lead frame as a carrier with a pre-molded cavity and a two-part passivation zone.

根據一個具體實例,可對構件進行佈建以藉助於電線連接連接至載體上的電連接,其中該連接佈置於第一區域中且由第一材料覆蓋,其中電線結合穿過第一區域且通過第二區域。 According to a specific example, the component can be routed to connect to the electrical connection on the carrier by means of a wire connection, wherein the connection is arranged in the first area and covered by the first material, wherein the wire bonding passes through the first area and passes The second area.

特定言之,在與第一區域中之前述較薄硬的灌封化合物之組合中,此具體實例在敏感電路板作為載體的情況下可尤其有利使用,其中用於與佈置於第二區域中之構件接觸的結合區域可設置於電路板上。由於結合支腳區域中之較薄局部應用,可使較硬區域遠離感測器元件,該感測器元件之功能可由熱機械應力中斷。兩部分鈍化區可有利地對電路板及電路板上之結合連接提供緻密保護而免於諸如排放氣體及鹵化物之媒介,而不施加較硬材料之任何負面影響。 In particular, in combination with the aforementioned thinner and harder potting compound in the first region, this specific example can be particularly advantageously used in the case of sensitive circuit boards as carriers, where The bonding area where the component contacts can be provided on the circuit board. Due to the thinner local application in the foot area, the harder area can be kept away from the sensor element whose function can be interrupted by thermo-mechanical stress. The two-part passivation zone can advantageously provide dense protection for the circuit board and the joint connections on the circuit board from media such as exhaust gases and halides without exerting any negative effects on harder materials.

根據本發明之一第二態樣,設計一種用於製造具有構件之裝置的方法,其中該方法包含以下步驟:提供載體,使用模具材料包覆成型載體,以使得形成空腔,其中空腔到達載體之上側面;在空腔中置放構件;將第一材料引入至空腔中,其中第一材料塗覆於空腔中之載體的表面;及將第二材料塗覆於空腔中,其中構件由第二材料覆蓋,且其中第二材料與第一材料相比具有較低彈性模數及/或較高硬度。 According to a second aspect of the present invention, a method for manufacturing a device having a component is designed, wherein the method includes the steps of providing a carrier, overmolding the carrier with a mold material so that a cavity is formed, wherein the cavity reaches The upper side of the carrier; placing the member in the cavity; introducing the first material into the cavity, wherein the first material is coated on the surface of the carrier in the cavity; and coating the second material into the cavity, Wherein the component is covered by the second material, and wherein the second material has a lower modulus of elasticity and/or higher hardness than the first material.

根據一較佳具體實例,第二材料亦塗覆於第一材料。 According to a preferred embodiment, the second material is also coated on the first material.

另外,與第二材料相比,第一材料以較薄層塗覆係較佳的。 In addition, the first material is preferably coated with a thinner layer than the second material.

此外,第一材料可覆蓋空腔中之載體的整個表面,且第二材料可覆蓋整個構件。 In addition, the first material may cover the entire surface of the carrier in the cavity, and the second material may cover the entire component.

總體而言,藉助於本發明之態樣,有利地,有可能使用模製外殼(其中構件在例如電路板之載體上建立且隨後使用塑膠包覆成型)以及預模製外殼(其中首先包覆成型載體)兩者之優點,其中區域留出例如用於產生電接觸,且隨後構件添加且與此產生接觸,其中經改良鈍化區由本發明之態樣提供。換言之,可提供前述外殼類型兩者的組合,此意謂適配構件可經包覆成型且切口可留出以便隨後添加其他構件,且同時全部構件之鈍化可以特別考慮構件之功能的方式確保。 In general, with the aspect of the invention, advantageously, it is possible to use a molded housing (where the component is built on a carrier such as a circuit board and then overmolded with plastic) and a pre-molded housing (where first Shaped carrier) The advantages of both, in which the area is left, for example, for making electrical contact, and then components are added and in contact with it, wherein the improved passivation area is provided by the aspect of the invention. In other words, a combination of both of the aforementioned housing types can be provided, which means that the adapting member can be overmolded and the cutout can be left for subsequent addition of other members, and at the same time passivation of all members can be ensured in a way that takes special consideration of the function of the member.

對應力具有較低敏感度且不需任何氣體進入之構件可嵌入模製,而應力敏感感測器元件在經成形預模製空腔中建立。因此,達成保護嵌入模製構件免於環境影響,且同時確保感測器元件具有至外部之連接,此係由於該元件佈置於預模製空腔中。 Components that are less sensitive to stress and do not require any gas to enter can be insert-molded, and the stress-sensitive sensor element is established in the shaped pre-molded cavity. Therefore, it is achieved to protect the embedded molded member from environmental influences, and at the same time to ensure that the sensor element has a connection to the outside, because the element is arranged in the pre-molded cavity.

特定言之,模具預模製外殼可有利地實施於電路板基底上以便保護不需任何媒介進入模體中之構件,且同時以便製造預模製區域,在該區域中感測器元件由兩部分鈍化區保護而免於媒介影響。 In particular, the mold pre-molded housing can be advantageously implemented on the circuit board substrate in order to protect components that do not require any medium to enter the mold body, and at the same time to manufacture a pre-molded area in which the sensor element consists of two Part of the passivation area is protected from media influence.

本發明之態樣可因此與引線框以及與作為載體之基板兩者一起實施。 The aspect of the present invention can therefore be implemented with both the lead frame and the substrate as a carrier.

本發明之較佳具體實例將藉由使用隨附圖式在下文更詳細地解釋,其中: 圖1展示根據本發明之一第一具體實例之包含載體及殼體的裝置之示意性橫截面視圖, 圖2展示根據本發明之一第二具體實例之包含載體及殼體的裝置之示意性平面視圖, 圖3展示根據本發明之一第三具體實例之包含載體及殼體的裝置之示意性橫截面視圖,及 圖4展示根據本發明之一個具體實例之用於製造包含構件的裝置之方法之流程圖。 The preferred embodiments of the present invention will be explained in more detail below using the accompanying drawings, in which: 1 shows a schematic cross-sectional view of a device including a carrier and a housing according to a first specific example of the present invention, 2 shows a schematic plan view of a device including a carrier and a housing according to a second specific example of the present invention, 3 shows a schematic cross-sectional view of a device including a carrier and a housing according to a third specific example of the present invention, and 4 shows a flowchart of a method for manufacturing a device including components according to a specific example of the present invention.

在圖式中,相同標示指代相同或功能上相同之元件。 In the drawings, the same reference refers to the same or functionally identical elements.

圖1展示根據本發明之一第一具體實例之經組態為包含載體3及殼體4的感測器裝置2之裝置1之示意性橫截面視圖。載體3充當殼體4之基板,且殼體具有上側面6及下側面5,其中下側面5覆蓋大部分載體3。載體3原則上可經組態為引線框或電路板,其中根據本文所展示之具體實例,載體3為電路板,該電路板裝配有大量電子構件7,該電路板之一個構件7借助於實例繪示於圖式中。構件7由殼體4囊封且藉助於導電連接8電連接至電路板(亦即載體3)。導電連接8具有(例如)電線結合。根據本文所展示之具體實例,殼體4由塑膠製成且形成構件7之晶片外殼。殼體4可(例如)藉由射出成形製成。由於構件7由殼體4囊封,該殼體因此充當模外殼,如圖式中所繪示,殼體4中之構件7受保護免於環境影響。 FIG. 1 shows a schematic cross-sectional view of a device 1 configured as a sensor device 2 including a carrier 3 and a housing 4 according to a first specific example of the present invention. The carrier 3 serves as a substrate of the housing 4, and the housing has an upper side 6 and a lower side 5, where the lower side 5 covers most of the carrier 3. The carrier 3 can in principle be configured as a lead frame or a circuit board, wherein according to the specific example shown in this article, the carrier 3 is a circuit board, the circuit board is equipped with a large number of electronic components 7, one component 7 of the circuit board by way of example Shown in the diagram. The component 7 is encapsulated by the housing 4 and electrically connected to the circuit board (ie the carrier 3) by means of a conductive connection 8. The conductive connection 8 has, for example, wire bonding. According to the specific example shown here, the housing 4 is made of plastic and forms the wafer housing of the component 7. The housing 4 can be made, for example, by injection molding. Since the component 7 is encapsulated by the housing 4, the housing thus acts as a mold shell. As shown in the drawing, the component 7 in the housing 4 is protected from the environment.

殼體4亦形成空腔9,該空腔由側壁10(亦即,殼體4之內 壁)限定。在平面視圖中,如圖2中展示之限定側壁10在空腔9之外圓周上可連續地連接至彼此。在圖1中所展示之橫截面視圖中,空腔9部分具有階梯狀橫截面,此係因為殼體4成形以使得空腔9進一步由突出至空腔9中之突出部11限定。橫截面視圖中亦可見係下側面13、上側面14及突出部11之側壁15。 The housing 4 also forms a cavity 9 which is defined by the side wall 10 (ie, inside the housing 4 Wall) limit. In a plan view, the defined side walls 10 as shown in FIG. 2 can be continuously connected to each other on the outer circumference of the cavity 9. In the cross-sectional view shown in FIG. 1, the cavity 9 partly has a stepped cross-section, because the housing 4 is shaped so that the cavity 9 is further defined by the protrusion 11 protruding into the cavity 9. In the cross-sectional view, the side wall 15 of the lower side 13, the upper side 14 and the protrusion 11 can also be seen.

殼體4之突出部11覆蓋載體3之子區,其中突出部11之下側面13表示殼體之下側面5的一部分。突出部11之側壁15平行於殼體4之側壁或內壁10延伸,然而,殼體不限於此形狀。空腔9亦在殼體4之上側面6上具有開口。此外,空腔9形成通向載體3之通道開口12,以使得處於通道開口12下之區域中的載體4不由殼體4覆蓋。 The protrusion 11 of the housing 4 covers a sub-region of the carrier 3, wherein the underside 13 of the protrusion 11 represents a part of the underside 5 of the housing. The side wall 15 of the protrusion 11 extends parallel to the side wall or inner wall 10 of the housing 4, however, the housing is not limited to this shape. The cavity 9 also has an opening on the upper side 6 of the housing 4. Furthermore, the cavity 9 forms a channel opening 12 leading to the carrier 3 so that the carrier 4 in the area below the channel opening 12 is not covered by the housing 4.

空腔9用以容納構件16,該構件不直接地置放在電路板3上。構件16佈置於突出部11之上側面14上,且藉助於電線連接17連接至電路板3。在電路板3上亦設置相關結合支腳18作為電線結合17之連接。結合支腳18為電路板3的建構之結構(未具體繪示於圖式中)之元件。空腔9中之構件16在本文為感測器元件,該感測器元件可具有微機械感測器元件。特定言之,構件16可為壓力感測器。感測器元件之相關電子件至少部分置放於電路板3上。電子件具有例如構件7,且可亦具有為簡單起見未具體繪示於圖式中之其他元件。此等亦可設置於在通道開口12之區域中的電路板3上。 The cavity 9 serves to accommodate the component 16 which is not directly placed on the circuit board 3. The member 16 is arranged on the upper side 14 of the protrusion 11 and is connected to the circuit board 3 by means of a wire connection 17. The circuit board 3 is also provided with related bonding legs 18 as the connection of the wire bonding 17. The combining leg 18 is an element of the structure of the circuit board 3 (not shown in the drawings). The component 16 in the cavity 9 is herein a sensor element, which may have a micromechanical sensor element. In particular, the member 16 may be a pressure sensor. The related electronic components of the sensor element are at least partially placed on the circuit board 3. The electronic part has, for example, the component 7 and may also have other elements not specifically shown in the drawings for simplicity. These can also be arranged on the circuit board 3 in the area of the channel opening 12.

鈍化區19設置於空腔9中,該鈍化區用於鈍化構件(亦即,感測器元件16)以及用於鈍化處於空腔9之通道開口12之區域中之電路板3的部分。為此目的,鈍化區19具有第一材料之第一區域21及第二材料之 第二區域22。鈍化區19之第一區域21覆蓋未由殼體4的下側面5覆蓋之電路板3之子區。鈍化區19之第二區域22覆蓋殼體4之子區域14,更精確地,尤其突出部11之上側面14。此外,第二區域22亦覆蓋側表面10的一部分。以此方式,佈置於突出部11上之感測器元件16佈置於第二鈍化區域19中或嵌入於第二材料中。在所展示之具體實例中,鈍化區19之第二區域22亦在第一區域21上方延伸,以使得第一區域21及第二區域22具有共用界面20,根據此具體實例,該介面平行於電路板3延伸。因此,鈍化區19可尤其簡單地製造,且穩固性可增加。第一區域21之厚度d1小於第二區域22之厚度d2。特定言之,選擇第二區域22的厚度d2以使得第二區域22包圍感測器元件16,而第一區域21覆蓋載體3。 A passivation area 19 is provided in the cavity 9 for passivating the component (ie, the sensor element 16) and for passivating the portion of the circuit board 3 in the area of the passage opening 12 of the cavity 9. For this purpose, the passivation region 19 has a first region 21 of a first material and a second region 22 of a second material. The first area 21 of the passivation area 19 covers the sub-area of the circuit board 3 that is not covered by the lower side 5 of the housing 4. The second area 22 of the passivation area 19 covers the sub-area 14 of the housing 4, more precisely, especially the upper side 14 of the protrusion 11. In addition, the second region 22 also covers a part of the side surface 10. In this way, the sensor element 16 arranged on the protrusion 11 is arranged in the second passivation area 19 or embedded in the second material. In the specific example shown, the second region 22 of the passivation region 19 also extends above the first region 21, so that the first region 21 and the second region 22 have a common interface 20. According to this specific example, the interface is parallel to The circuit board 3 extends. Therefore, the passivation region 19 can be manufactured particularly simply, and the stability can be increased. The thickness d 1 of the first region 21 is smaller than the thickness d 2 of the second region 22. In particular, the thickness d 2 of the second region 22 is selected so that the second region 22 surrounds the sensor element 16 and the first region 21 covers the carrier 3.

鈍化區19之兩個區域21、22可採用所有可以想像的合適形狀,該形狀取決於待保護之構件之類型、數目及佈置。此處,與此連接相關之術語「區域」不限於二維尺寸之描述,如自前述具體實例已經變得清晰。此外,「不同」意謂區域至多具有共用界面但無相同體積範圍。 The two regions 21, 22 of the passivation zone 19 can adopt all conceivable suitable shapes depending on the type, number and arrangement of the components to be protected. Here, the term "region" related to this connection is not limited to the description of the two-dimensional size, as has been made clear from the foregoing specific examples. In addition, "different" means that the regions have at most a common interface but no same volume range.

第一材料具有例如環氧樹脂或塗漆,且第二材料具有凝膠,特定言之,例如聚矽氧凝膠。 The first material has, for example, epoxy resin or lacquer, and the second material has a gel, specifically, for example, polysiloxane gel.

空腔9經組態為所謂的預模製空腔,其中殼體4充當預模製封裝或預模製外殼,該殼體保護由殼體4之下側面5覆蓋之載體3之區域。另外,由於構件7模製至殼體4中,具有兩部分鈍化的模具預模製外殼因此由裝置1且特別地由殼體4實施。 The cavity 9 is configured as a so-called pre-molded cavity, in which the housing 4 acts as a pre-molded package or pre-molded housing, which protects the area of the carrier 3 covered by the lower side 5 of the housing 4. In addition, since the component 7 is molded into the housing 4, the two-part passivated mold pre-molded housing is therefore implemented by the device 1 and in particular by the housing 4.

圖2展示根據本發明之一第二具體實例之包含載體3及殼體4的裝置24之示意性平面視圖。裝置24實質上對應於圖1中之裝置1。因 為不同於根據圖1之第一具體實例,根據第二具體實例的載體3形成為引線框(亦即,形成為連接框)。引線框3佈置於殼體4下;圖2中所展示之平面視圖對應於在殼體4後相對於進入頁面之平面的方向之位置。如圖2中所展示,引線框3具有大量連接25,該等連接在圖式中清晰地示意性說明。連接25可用於在此具體實例之一個變體中安裝裝置24,但原則上不限於特定形狀。 2 shows a schematic plan view of a device 24 including a carrier 3 and a housing 4 according to a second specific example of the present invention. The device 24 substantially corresponds to the device 1 in FIG. 1. because To be different from the first specific example according to FIG. 1, the carrier 3 according to the second specific example is formed as a lead frame (that is, as a connection frame). The lead frame 3 is arranged under the housing 4; the plan view shown in FIG. 2 corresponds to the position behind the housing 4 with respect to the direction of the plane into the page. As shown in FIG. 2, the lead frame 3 has a large number of connections 25, which are clearly illustrated schematically in the drawings. The connection 25 can be used to mount the device 24 in a variant of this specific example, but in principle is not limited to a specific shape.

此外,裝置24具有模製至殼體4中之大量構件7、26,兩個構件7、26出於明晰之目的借助於實例繪示於圖式中。一方面構件7、26之間的電路板上之電子連接且另一方面感測其元件16未明確展示。如圖2中進一步所展示,空腔之側壁10形成閉合矩形。然而,空腔9及通道開口12之形狀及佈置不限於特定形狀,且可取決於應用而進行調適。因此根據此具體實例,通道開口12之寬度b12小於空腔9之寬度b9。然而,根據其他具體實例,通道開口12之寬度亦可對應於空腔9之寬度。 Furthermore, the device 24 has a large number of components 7, 26 moulded into the housing 4, the two components 7, 26 are shown in the drawings by way of example for the purpose of clarity. On the one hand the electrical connection between the components 7, 26 on the circuit board and on the other hand the sensing element 16 are not explicitly shown. As further shown in FIG. 2, the sidewall 10 of the cavity forms a closed rectangle. However, the shapes and arrangements of the cavity 9 and the channel opening 12 are not limited to specific shapes, and may be adjusted depending on the application. Therefore, according to this specific example, the width b 12 of the channel opening 12 is smaller than the width b 9 of the cavity 9 . However, according to other specific examples, the width of the channel opening 12 may also correspond to the width of the cavity 9.

圖3展示根據本發明之一第三具體實例之包含載體3及殼體4的裝置1之示意性橫截面視圖。根據圖3之裝置1實質上對應於圖1中之裝置。由於不同於圖1,在圖3中,另外說明流體連接23,該連接經組態為通向第二區域22之通道開口。換言之,第二材料在感測器元件16上方之第二區域22的子區中切去。因此,舉例而言,待由感測器元件16感測之壓力波或壓力變化可較佳地傳送。根據其他具體實例,忽略單獨流體連接23,其中第二材料自身充當用於傳送之載體或經選擇以使得待偵測之媒體不以不利方式屏蔽。 3 shows a schematic cross-sectional view of a device 1 including a carrier 3 and a housing 4 according to a third specific example of the present invention. The device 1 according to FIG. 3 substantially corresponds to the device in FIG. 1. Since it is different from FIG. 1, in FIG. 3, the fluid connection 23 is additionally illustrated, and the connection is configured as a passage opening to the second region 22. In other words, the second material is cut in the sub-region of the second region 22 above the sensor element 16. Therefore, for example, the pressure wave or pressure change to be sensed by the sensor element 16 can be transmitted better. According to other specific examples, the separate fluid connection 23 is ignored, where the second material itself acts as a carrier for transmission or is selected so that the media to be detected is not shielded in an unfavorable manner.

圖4展示根據本發明之一個具體實例之製造包含構件的裝 置之方法。原則上,方法具有以下所說明步驟。在步驟S100中,提供載體。載體可為引線框或電路板。載體可具有呈導體或置放其上之連接及構件形式之合適的構造。在步驟S101中,載體使用模具材料包覆成型,空腔亦成形。空腔用以容納其他構件。特定言之,構件可容納於空腔中,該構件佈置於殼體上而非載體上之空腔中。空腔到達載體之表面。在步驟S102中,構件隨後置放於空腔中。在步驟S103中,第一材料引入至空腔中,第一材料塗覆於載體之表面。在步驟S104中,第二材料引入至空腔中,置放於空腔中之構件由第二材料覆蓋。選擇材料以使得第二材料與第一材料相比具有較低彈性模數及/或較高硬度。 FIG. 4 shows a device for manufacturing a component according to a specific example of the invention Set the method. In principle, the method has the steps described below. In step S100, a carrier is provided. The carrier may be a lead frame or a circuit board. The carrier may have a suitable configuration in the form of conductors or connections and components placed thereon. In step S101, the carrier is overmolded using a mold material, and the cavity is also formed. The cavity is used to accommodate other components. In particular, the component can be accommodated in the cavity, the component being arranged on the housing instead of the cavity on the carrier. The cavity reaches the surface of the carrier. In step S102, the component is then placed in the cavity. In step S103, the first material is introduced into the cavity, and the first material is coated on the surface of the carrier. In step S104, the second material is introduced into the cavity, and the member placed in the cavity is covered with the second material. The material is selected so that the second material has a lower modulus of elasticity and/or a higher hardness than the first material.

不言而喻,步驟之次序可視需要變化且不必須嚴格地符合圖4中所說明之次序。原則上,其為材料挑選及其鈍化特性及對所覆蓋或經嵌入元件及區域上之可能影響的問題。舉例而言,可設想,首先藉助於掩模製造第二區域且隨後塗覆第一材料。在此具體實例中,經組態為開口之流體連接亦可設置於第一區域中。此外,舉例而言,亦可設想,儘管此在以上描述中並不明確地陳述,但首先形成殼體且隨後空腔在殼體中成形。 It goes without saying that the order of the steps can be changed as needed and does not have to strictly follow the order illustrated in FIG. 4. In principle, it is a matter of material selection and its passivation characteristics and possible effects on the covered or embedded components and areas. For example, it is conceivable that the second area is first manufactured by means of a mask and then the first material is applied. In this specific example, the fluid connection configured as an opening may also be provided in the first area. In addition, for example, it is also conceivable that although this is not explicitly stated in the above description, the housing is formed first and then the cavity is formed in the housing.

Claims (13)

一種包含一載體(3)及一殼體(4)之裝置(1),該殼體佈置於該載體(3)上且限定用於容納至少一個構件(16)之一空腔(9),其中在該空腔(9)中,由一第一材料製備的鈍化區(19)設置於一第一區域(21)中,且由一第二材料製備之鈍化區設置於不同於該第一區域(21)之一第二區域(22)中,其中該第一材料與該第二材料相比具有一較高彈性模數及/或一較高硬度,其中該第一區域(21)覆蓋該載體(3)的一子區,且該第二區域(22)覆蓋該殼體(4)之一子區(14),其中該構件(16)佈置於該第二區域(22)中。 A device (1) comprising a carrier (3) and a housing (4), the housing being arranged on the carrier (3) and defining a cavity (9) for accommodating at least one component (16), wherein In the cavity (9), a passivation area (19) made of a first material is provided in a first area (21), and a passivation area made of a second material is provided in a different area than the first area (21) in a second region (22), wherein the first material has a higher elastic modulus and/or a higher hardness than the second material, wherein the first region (21) covers the A sub-region of the carrier (3), and the second region (22) covers a sub-region (14) of the housing (4), wherein the member (16) is arranged in the second region (22). 如申請專利範圍第1項之裝置(1),其中該空腔(9)形成通向至少部分由該第一材料填充之該載體(3)之一通道開口(12),且其中該殼體(4)另外形成限定該空腔(9)的一突起(11),其中該構件(16)佈置於該突起(11)上且該第二材料覆蓋該突起(11)。 A device (1) as claimed in item 1 of the patent application, wherein the cavity (9) forms a passage opening (12) to the carrier (3) at least partially filled with the first material, and wherein the housing (4) A protrusion (11) defining the cavity (9) is additionally formed, wherein the member (16) is arranged on the protrusion (11) and the second material covers the protrusion (11). 如申請專利範圍第1項或第2項之裝置(1),其中另一構件(7)嵌入於該殼體(4)中。 For example, in the device (1) of item 1 or item 2 of the patent application scope, another member (7) is embedded in the housing (4). 如前述申請專利範圍中任一項之裝置(1),其中該第一區域(21)與該第二區域(22)相比具有一較低厚度(d1)。 The device (1) according to any one of the aforementioned patent applications, wherein the first region (21) has a lower thickness (d 1 ) than the second region (22). 如前述申請專利範圍中任一項之裝置(1),其中該殼體(4)藉由塑膠包覆成型而製備。 The device (1) according to any one of the aforementioned patent applications, wherein the housing (4) is prepared by plastic overmolding. 如前述申請專利範圍中任一項之裝置(1),其中該第二區域(22)中之該構件(16)形成為一感測器元件,特別是形成為一壓力感測器。 The device (1) according to any one of the aforementioned patent applications, wherein the member (16) in the second area (22) is formed as a sensor element, in particular as a pressure sensor. 如申請專利範圍第6項之裝置(1),其中,在該感測器元件與一外部 側面之間,一流體連接(23)形成於該第二材料中及/或形成於該殼體(4)中。 The device (1) according to item 6 of the patent application scope, in which the sensor element and an external Between the sides, a fluid connection (23) is formed in the second material and/or in the housing (4). 如申請專利範圍第3項至第7項中任一項之裝置(1),其中該構件(16)藉助於一電線連接(17)連接至該載體(3)上之一電連接,其中該連接(18)佈置於該第一區域(21)中且由該第一材料覆蓋,其中電線結合通過該第一區域(21)且通過該第二區域(22)。 The device (1) according to any one of the items 3 to 7 of the patent application range, wherein the member (16) is connected to one of the electrical connections on the carrier (3) by means of a wire connection (17), wherein the The connection (18) is arranged in the first area (21) and covered by the first material, wherein the wire bonding passes through the first area (21) and through the second area (22). 一種用於製造具有一構件(16)之一裝置(1)的方法,其包含以下步驟:提供一載體(3),使用一模具材料以包覆成型該載體(3),以使得形成一空腔(9),其中該空腔(9)到達該載體(3)之一上側面(6),在該空腔(9)中置放一構件(16),將一第一材料引入至該空腔(9)中,其中該第一材料塗覆於該空腔(9)中之該載體(3)的表面,及將一第二材料塗覆於該空腔(9)中,其中該構件(16)由該第二材料覆蓋,其中該第二材料與該第一材料相比具有一較低彈性模數及/或一較高硬度。 A method for manufacturing a device (1) having a component (16), comprising the steps of providing a carrier (3) and overmolding the carrier (3) using a mold material so that a cavity is formed (9), wherein the cavity (9) reaches an upper side (6) of the carrier (3), a member (16) is placed in the cavity (9), a first material is introduced into the cavity In the cavity (9), wherein the first material is coated on the surface of the carrier (3) in the cavity (9), and a second material is coated in the cavity (9), wherein the member (16) Covered by the second material, wherein the second material has a lower modulus of elasticity and/or a higher hardness than the first material. 如申請專利範圍第9項之方法,其中該第二材料亦塗覆於該第一材料。 For example, in the method of claim 9, the second material is also coated on the first material. 如申請專利範圍第9項及第10項中任一項之方法,其中該第一材料與該第二材料相比以一較薄層塗覆。 The method of any one of claims 9 and 10, wherein the first material is coated in a thinner layer than the second material. 如申請專利範圍第9項至第11項中任一項之方法,其中該第一材料覆蓋該空腔(9)中之該載體(3)的整個表面,且其中該第二材料覆蓋 整個該構件(16)。 A method according to any one of claims 9 to 11, wherein the first material covers the entire surface of the carrier (3) in the cavity (9), and wherein the second material covers The whole component (16). 如申請專利範圍第9項至第12項中任一項之方法,其中使用之該第一材料為一環氧樹脂或一塗漆,且其中一凝膠特別是一聚矽氧凝膠使用於該第二材料。 The method as in any one of the patent application items 9 to 12, wherein the first material used is an epoxy resin or a lacquer, and one of the gels, especially a silicone gel, is used in The second material.
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