TW201809125A - Resin composition - Google Patents

Resin composition Download PDF

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Publication number
TW201809125A
TW201809125A TW106107405A TW106107405A TW201809125A TW 201809125 A TW201809125 A TW 201809125A TW 106107405 A TW106107405 A TW 106107405A TW 106107405 A TW106107405 A TW 106107405A TW 201809125 A TW201809125 A TW 201809125A
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resin composition
resin
epoxy resin
component
insulating layer
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TW106107405A
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TWI776801B (en
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渡邊真俊
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味之素股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L27/00Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
    • C08L27/02Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L27/12Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C08L27/18Homopolymers or copolymers or tetrafluoroethene
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/38Layered products comprising a layer of synthetic resin comprising epoxy resins
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/54Silicon-containing compounds
    • C08K5/541Silicon-containing compounds containing oxygen
    • C08K5/5415Silicon-containing compounds containing oxygen containing at least one Si—O bond
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D127/00Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers
    • C09D127/02Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment
    • C09D127/12Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C09D127/18Homopolymers or copolymers of tetrafluoroethene
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D163/00Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0296Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298Multilayer circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0373Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2327/00Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
    • C08J2327/02Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
    • C08J2327/12Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C08J2327/18Homopolymers or copolymers of tetrafluoroethylene
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2463/00Characterised by the use of epoxy resins; Derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2471/00Characterised by the use of polyethers obtained by reactions forming an ether link in the main chain; Derivatives of such polymers
    • C08J2471/08Polyethers derived from hydroxy compounds or from their metallic derivatives
    • C08J2471/10Polyethers derived from hydroxy compounds or from their metallic derivatives from phenols
    • C08J2471/12Polyphenylene oxides
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
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    • C08K2201/00Specific properties of additives
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    • C08K2201/005Additives being defined by their particle size in general
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    • C08L2205/00Polymer mixtures characterised by other features
    • C08L2205/02Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
    • C08L2205/025Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
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    • C08L2205/00Polymer mixtures characterised by other features
    • C08L2205/03Polymer mixtures characterised by other features containing three or more polymers in a blend
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  • Compositions Of Macromolecular Compounds (AREA)
  • Laminated Bodies (AREA)
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  • Graft Or Block Polymers (AREA)

Abstract

The present invention provides a resin composition capable of realizing a thin layer insulating layer having a relatively low dielectric constant and a good adhesion to a conductor layer. The resin composition of the present invention comprises (A) an epoxy resin, (B) a curing agent, (C) a fluorine atom-containing alkoxysilane compound, and (D) an organic filler.

Description

樹脂組成物 Resin composition

本發明係有關樹脂組成物。此外,本發明係有關含有該樹脂組成物之薄片狀層合材料、含有藉由該樹脂組成物之硬化物所形成之絕緣層的印刷電路板及指紋認證感測器及半導體裝置。 The present invention relates to a resin composition. Further, the present invention relates to a sheet-like laminated material containing the resin composition, a printed circuit board, a fingerprint authentication sensor, and a semiconductor device containing an insulating layer formed by a hardened material of the resin composition.

近年,由於電子機器之小型化、訊號之高速化及配線之高密度化之需求,而要求絕緣層之薄層化。為了使絕緣層薄層化時,為了控制阻抗而需要低介電率化。 In recent years, due to the demand for miniaturization of electronic equipment, high-speed signals, and high-density wiring, thinner insulation layers have been required. In order to reduce the thickness of the insulating layer, it is necessary to reduce the dielectric constant in order to control the impedance.

為了使絕緣層低介電率化時,使用比介電率低的填料為佳,例如使用聚四氟乙烯等之氟樹脂粉末已為人知(參照專利文獻1)。 In order to reduce the dielectric constant of the insulating layer, it is preferable to use a filler having a lower dielectric constant than fluororesin powder such as polytetrafluoroethylene (see Patent Document 1).

〔先前技術文獻〕 [Previous Technical Literature] 〔專利文獻〕 [Patent Literature]

〔專利文獻1〕日本特開平11-269530號公報 [Patent Document 1] Japanese Patent Application Laid-Open No. 11-269530

〔發明之概要〕 [Summary of Invention]

但是專利文獻1所記載之聚四氟乙烯,因疏水性強,因此分散性有問題。又,使用聚四氟乙烯粒子形成絕緣層的情形,因粒子之分散性不足,熔融黏度變高,使用困難,且絕緣層與導體層之密著性也會產生問題。 However, the polytetrafluoroethylene described in Patent Document 1 has a problem in dispersibility due to its strong hydrophobicity. In addition, when the polytetrafluoroethylene particles are used to form the insulating layer, the dispersibility of the particles is insufficient, the melt viscosity becomes high, the use is difficult, and the adhesion between the insulating layer and the conductor layer may cause problems.

本發明所欲解決之課題係提供一種可帶來比介電率低、與導體層之密著性優異之薄層之絕緣層的樹脂組成物。 The problem to be solved by the present invention is to provide a resin composition that can provide an insulating layer with a thin layer having a low specific permittivity and excellent adhesion to a conductor layer.

本發明人等對於上述課題精心檢討的結果,發現藉由使用(A)環氧樹脂、(B)硬化劑、(C)含氟原子之烷氧基矽烷化合物、及(D)有機填充材,可解決上述課題,遂完成本發明。 As a result of careful examination of the above problems by the present inventors, it was found that by using (A) epoxy resin, (B) hardener, (C) fluorine atom-containing alkoxysilane compound, and (D) organic filler The above problems can be solved, and the present invention has been completed.

亦即,本發明包含以下的內容。 That is, the present invention includes the following.

〔1〕一種樹脂組成物,其係含有(A)環氧樹脂、(B)硬化劑、(C)含氟原子之烷氧基矽烷化合物、及(D)有機填充材。 [1] A resin composition containing (A) an epoxy resin, (B) a hardener, (C) a fluorine atom-containing alkoxysilane compound, and (D) an organic filler.

〔2〕前述〔1〕項之樹脂組成物,其中(D)成分之平均粒徑為0.05μm~5μm。 [2] The resin composition according to the item [1], wherein the average particle diameter of the component (D) is 0.05 μm to 5 μm.

〔3〕前述〔1〕或〔2〕項之樹脂組成物,其中(D)成分係在測量頻率5.8GHz下之比介電率為2.8以下的粒子。 [3] The resin composition according to the item [1] or [2], wherein the component (D) is a particle having a specific permittivity of 2.8 or less at a measurement frequency of 5.8 GHz.

〔4〕前述〔1〕~〔3〕之任一項之樹脂組成物,其中 (D)成分為含有氟樹脂的粒子。 [4] The resin composition according to any one of the above [1] to [3], wherein The component (D) is a particle containing a fluororesin.

〔5〕前述〔1〕~〔4〕之任一項之樹脂組成物,其中(C)成分1分子中之氟原子之數為1~10。 [5] The resin composition according to any one of the above [1] to [4], wherein the number of fluorine atoms in one molecule of the component (C) is 1 to 10.

〔6〕前述〔1〕~〔5〕之任一項之樹脂組成物,其中(C)成分1分子中之烷氧基之數為1~5。 [6] The resin composition according to any one of the above [1] to [5], wherein the number of alkoxy groups in one molecule of the component (C) is 1 to 5.

〔7〕前述〔1〕~〔6〕之任一項之樹脂組成物,其中(C)成分為3,3,3-三氟丙基三甲氧基矽烷。 [7] The resin composition according to any one of the above [1] to [6], wherein the component (C) is 3,3,3-trifluoropropyltrimethoxysilane.

〔8〕前述〔1〕~〔7〕之任一項之樹脂組成物,其係進一步含有(E)無機填充劑。 [8] The resin composition according to any one of the above [1] to [7], further containing (E) an inorganic filler.

〔9〕前述〔8〕項之樹脂組成物,其中(D)成分與(E)成分之合計含量係樹脂組成物中之不揮發成分設為100質量%時,為50質量%以上。 [9] The resin composition according to the item [8], wherein the total content of the (D) component and the (E) component is 50% by mass or more when the nonvolatile component in the resin composition is 100% by mass.

〔10〕前述〔1〕~〔9〕之任一項之樹脂組成物,其係使樹脂組成物硬化所成之硬化物之測量頻率5.8GHz下之比介電率為3.0以下,由25℃至150℃之平均線熱膨脹率為55ppm/℃以下。 [10] The resin composition according to any one of the above [1] to [9], which has a specific dielectric constant at a measurement frequency of 5.8 GHz of a hardened product formed by hardening the resin composition of 3.0 or less, from 25 ° C The average linear thermal expansion coefficient to 150 ° C is 55 ppm / ° C or less.

〔11〕前述〔1〕~〔10〕之任一項之樹脂組成物,其係印刷電路板之絕緣層形成用。 [11] The resin composition according to any one of the above [1] to [10], which is used for forming an insulating layer of a printed circuit board.

〔12〕前述〔1〕~〔11〕之任一項之樹脂組成物,其係印刷電路板之增層(Build-up)絕緣層用。 [12] The resin composition according to any one of the above [1] to [11], which is used for a build-up insulating layer of a printed circuit board.

〔13〕一種薄片狀層合材料,其係包含〔1〕~〔12〕之任一項的樹脂組成物。 [13] A sheet-like laminated material comprising the resin composition according to any one of [1] to [12].

〔14〕一種薄片狀層合材料,其係包含以〔1〕~〔12〕之任一項的樹脂組成物所形成的樹脂組成物層。 [14] A sheet-like laminated material comprising a resin composition layer formed of the resin composition of any one of [1] to [12].

〔15〕前述〔14〕項之薄片狀層合材料,其中樹脂組成物層之厚度為30μm以下。 [15] The sheet-like laminated material according to the item [14], wherein the thickness of the resin composition layer is 30 μm or less.

〔16〕一種印刷電路板,其係包含藉由〔1〕~〔12〕之任一項的樹脂組成物之硬化物所形成的絕緣層。 [16] A printed circuit board comprising an insulating layer formed of a cured product of the resin composition of any one of [1] to [12].

〔17〕一種指紋認證感測器,其係包含藉由〔1〕~〔12〕之任一項的樹脂組成物之硬化物所形成的絕緣層。 [17] A fingerprint authentication sensor including an insulating layer formed of a cured product of the resin composition of any one of [1] to [12].

〔18〕一種半導體裝置,其係包含〔16〕項之印刷電路板或〔17〕項之指紋認證感測器。 [18] A semiconductor device including the printed circuit board of [16] or the fingerprint authentication sensor of [17].

依據本發明時,可提供一種可帶來比介電率低,與導體層之密著性優異之薄層之絕緣層的樹脂組成物。 According to the present invention, it is possible to provide a resin composition which can provide an insulating layer having a low specific dielectric constant and a thin layer having excellent adhesion to a conductor layer.

1‧‧‧指紋認證感測器 1‧‧‧Fingerprint authentication sensor

2‧‧‧印刷電路板 2‧‧‧printed circuit board

3‧‧‧絕緣層 3‧‧‧ Insulation

4‧‧‧絕緣被膜 4‧‧‧ insulation coating

5‧‧‧金屬電極 5‧‧‧ metal electrode

〔圖1〕圖1係以示意地表示本發明之指紋認證感測器的剖面圖。 [Fig. 1] Fig. 1 is a sectional view schematically showing a fingerprint authentication sensor of the present invention.

〔實施發明之形態〕 [Form of Implementing Invention]

以下,詳細地說明本發明之樹脂組成物、含有該樹脂組成物之薄片狀層合材料、印刷電路板、指紋認證感測器及半導體裝置。 Hereinafter, the resin composition of the present invention, a sheet-like laminated material containing the resin composition, a printed circuit board, a fingerprint authentication sensor, and a semiconductor device will be described in detail.

〔樹脂組成物〕 [Resin composition]

本發明之樹脂組成物係含有(A)環氧樹脂、(B)硬化劑、(C)含氟原子之烷氧基矽烷化合物、及(D)有機填充材。 The resin composition of the present invention contains (A) an epoxy resin, (B) a hardener, (C) a fluorine atom-containing alkoxysilane compound, and (D) an organic filler.

以下,詳細地說明本發明之樹脂組成物中所含之各成分。 Hereinafter, each component contained in the resin composition of this invention is demonstrated in detail.

<(A)環氧樹脂> <(A) epoxy resin>

環氧樹脂可列舉例如雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AF型環氧樹脂、二環戊二烯型環氧樹脂、三苯酚型環氧樹脂、萘酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、tert-丁基-兒茶酚型環氧樹脂、萘型環氧樹脂、萘酚型環氧樹脂、蒽型環氧樹脂、環氧丙基胺型環氧樹脂、環氧丙基酯型環氧樹脂、甲酚酚醛清漆型環氧樹脂、聯苯型環氧樹脂、線狀脂肪族環氧樹脂、具有丁二烯結構之環氧樹脂、脂環式環氧樹脂、雜環式環氧樹脂、含有螺環之環氧樹脂、環己烷二甲醇型環氧樹脂、伸萘醚型環氧樹脂、三羥甲基型環氧樹脂、四苯基乙烷型環氧樹脂、雙二甲苯酚型環氧樹脂等。環氧樹脂可單獨使用1種或組合2種以上使用。(A)成分選自雙酚A型環氧樹脂、雙酚F型環氧樹脂、及聯苯型環氧樹脂之1種以上為佳。 Examples of the epoxy resin include bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, bisphenol AF epoxy resin, dicyclopentadiene epoxy resin, and triphenol. Type epoxy resin, naphthol novolac type epoxy resin, phenol novolac type epoxy resin, tert-butyl-catechol type epoxy resin, naphthalene type epoxy resin, naphthol type epoxy resin, anthracene type Epoxy resin, epoxypropylamine epoxy resin, epoxypropylester epoxy resin, cresol novolac epoxy resin, biphenyl epoxy resin, linear aliphatic epoxy resin, Diene epoxy resin, alicyclic epoxy resin, heterocyclic epoxy resin, epoxy resin containing spiro ring, cyclohexanedimethanol type epoxy resin, naphthyl ether type epoxy resin, trihydroxy Methyl-type epoxy resin, tetraphenylethane-type epoxy resin, bisxylenol-type epoxy resin, and the like. The epoxy resin may be used singly or in combination of two or more kinds. The component (A) is preferably one or more selected from the group consisting of a bisphenol A epoxy resin, a bisphenol F epoxy resin, and a biphenyl epoxy resin.

環氧樹脂係包含1分子中具有2個以上之環 氧基的環氧樹脂為佳。環氧樹脂之不揮發成分為100質量%的情形時,至少50質量%以上係1分子中具有2個以上之環氧基的環氧樹脂為佳。其中,包含1分子中具有2個以上之環氧基,溫度20℃下為液狀的環氧樹脂(以下稱為「液狀環氧樹脂」)與1分子中具有3個以上之環氧基,溫度20℃下為固體狀之環氧樹脂(以下稱為「固體狀環氧樹脂」)為佳。藉由併用液狀環氧樹脂與固體狀環氧樹脂作為環氧樹脂,可得到具有優異可撓性的樹脂組成物。又,也可提高樹脂組成物之硬化物的斷裂強度。 Epoxy resin contains two or more rings in one molecule An epoxy resin is preferred. When the non-volatile content of the epoxy resin is 100% by mass, at least 50% by mass or more is preferably an epoxy resin having two or more epoxy groups in one molecule. Among them, an epoxy resin having two or more epoxy groups in one molecule and being liquid at a temperature of 20 ° C (hereinafter referred to as a "liquid epoxy resin") and an epoxy group having three or more epoxy groups in one molecule are included. An epoxy resin that is solid at a temperature of 20 ° C (hereinafter referred to as "solid epoxy resin") is preferred. By using a liquid epoxy resin and a solid epoxy resin together as an epoxy resin, a resin composition having excellent flexibility can be obtained. Moreover, the fracture strength of the hardened | cured material of a resin composition can also be improved.

液狀環氧樹脂較佳為雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AF型環氧樹脂、萘型環氧樹脂、環氧丙基酯型環氧樹脂、環氧丙基胺型環氧樹脂、苯酚酚醛清漆型環氧樹脂、具有酯骨架之脂環式環氧樹脂、環己烷二甲醇型環氧樹脂、環氧丙基胺型環氧樹脂、及具有丁二烯結構之環氧樹脂,更佳為環氧丙基胺型環氧樹脂、雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AF型環氧樹脂及萘型環氧樹脂。液狀環氧樹脂之具體例,可列舉DIC(股)製之「HP4032」、「HP4032D」、「HP4032SS」(萘型環氧樹脂)、三菱化學(股)製之「828US」、「jER828EL」(雙酚A型環氧樹脂)、「jER807」(雙酚F型環氧樹脂)、「jER152」(苯酚酚醛清漆型環氧樹脂)、「630」、「630LSD」(環氧丙基胺型環氧樹脂)、新日鐵住金化學(股)製之「ZX1059」(雙酚A型環氧樹脂與雙酚F型環氧樹脂之混合品)、 Nagasechemtex(股)製之「EX-721」(環氧丙基酯型環氧樹脂)、(股)DAICEL製之「CELLOXID2021P」(具有酯骨架之脂環式環氧樹脂)、「PB-3600」(具有丁二烯結構之環氧樹脂)、新日鐵化學(股)製之「ZX1658」、「ZX1658GS」(液狀1,4-環氧丙基環己烷)、三菱化學(股)製之「630LSD」(環氧丙基胺型環氧樹脂)等。此等可單獨使用1種或組合2種以上使用。 The liquid epoxy resin is preferably a bisphenol A epoxy resin, a bisphenol F epoxy resin, a bisphenol AF epoxy resin, a naphthalene epoxy resin, an epoxy propyl ester epoxy resin, or an epoxy resin. Propylamine epoxy resin, phenol novolac epoxy resin, alicyclic epoxy resin with ester skeleton, cyclohexanedimethanol epoxy resin, epoxypropylamine epoxy resin, and butylamine epoxy resin Diene-structured epoxy resins are more preferably epoxypropylamine epoxy resin, bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol AF epoxy resin, and naphthalene epoxy resin. . Specific examples of the liquid epoxy resin include "HP4032", "HP4032D", "HP4032SS" (naphthalene-type epoxy resin) made by DIC, and "828US" and "jER828EL" made by Mitsubishi Chemical Corporation. (Bisphenol A type epoxy resin), "jER807" (bisphenol F type epoxy resin), "jER152" (phenol novolac type epoxy resin), "630", "630LSD" (epoxypropylamine type) Epoxy resin), "ZX1059" (mixture of bisphenol A type epoxy resin and bisphenol F type epoxy resin) made by Nippon Steel & Sumitomo Chemical Co., Ltd., "EX-721" (glycidyl epoxy resin) manufactured by Nagasechemtex (stock), "CELLOXID2021P" (alicyclic epoxy resin with ester skeleton) manufactured by DAICEL (stock), "PB-3600" (Epoxy resin with butadiene structure), "ZX1658", "ZX1658GS" (liquid 1,4-epoxypropylcyclohexane) made by Nippon Steel Chemical Co., Ltd., and Mitsubishi Chemical Co., Ltd. "630LSD" (epoxypropylamine type epoxy resin), etc. These can be used individually by 1 type or in combination of 2 or more types.

固體狀環氧樹脂較佳為萘型4官能環氧樹脂、甲酚酚醛清漆型環氧樹脂、二環戊二烯型環氧樹脂、三苯酚型環氧樹脂、萘酚型環氧樹脂、聯苯型環氧樹脂、伸萘醚型環氧樹脂、蒽型環氧樹脂、雙酚A型環氧樹脂、四苯基乙烷型環氧樹脂,更佳為萘型4官能環氧樹脂、萘酚型環氧樹脂、及聯苯型環氧樹脂。固體狀環氧樹脂之具體例,可列舉DIC(股)製之「HP4032H」(萘型環氧樹脂)、「HP-4700」、「HP-4710」(萘型4官能環氧樹脂)、「N-690」(甲酚酚醛清漆型環氧樹脂)、「N-695」(甲酚酚醛清漆型環氧樹脂)、「HP-7200」(二環戊二烯型環氧樹脂)、「HP-7200HH」、「HP-7200H」、「EXA-7311」、「EXA-7311-G3」、「EXA-7311-G4」、「EXA-7311-G4S」、「HP6000」(伸萘醚型環氧樹脂)、日本化藥(股)製之「EPPN-502H」(三苯酚型環氧樹脂)、「NC7000L」(萘酚酚醛清漆型環氧樹脂)、「NC3000H」、「NC3000」、「NC3000L」、「NC3100」 (聯苯型環氧樹脂)、新日鐵住金化學(股)製之「ESN475V」(萘型環氧樹脂)、「ESN485」(萘酚酚醛清漆型環氧樹脂)、三菱化學(股)製之「YX4000H」、「YL6121」(聯苯型環氧樹脂)、「YX4000HK」(雙二甲苯酚型環氧樹脂)、「YX8800」(蒽型環氧樹脂)、大阪氣體化學(股)製之「PG-100」、「CG-500」、三菱化學(股)製之「YL7760」(雙酚AF型環氧樹脂)、「YL7800」(茀型環氧樹脂)、三菱化學(股)製之「jER1010」(固體狀雙酚A型環氧樹脂)、「jER1031S」(四苯基乙烷型環氧樹脂)等。此等可單獨使用1種或組合2種以上使用。 The solid epoxy resin is preferably a naphthalene type 4-functional epoxy resin, a cresol novolac type epoxy resin, a dicyclopentadiene type epoxy resin, a triphenol type epoxy resin, a naphthol type epoxy resin, Benzene type epoxy resin, naphthalene type epoxy resin, anthracene type epoxy resin, bisphenol A type epoxy resin, tetraphenylethane type epoxy resin, more preferably naphthalene type 4-functional epoxy resin, naphthalene Phenol-type epoxy resin and biphenyl-type epoxy resin. Specific examples of the solid epoxy resin include "HP4032H" (naphthalene type epoxy resin), "HP-4700", "HP-4710" (naphthalene type 4-functional epoxy resin), " "N-690" (cresol novolac epoxy resin), "N-695" (cresol novolac epoxy resin), "HP-7200" (dicyclopentadiene epoxy resin), "HP -7200HH "," HP-7200H "," EXA-7311 "," EXA-7311-G3 "," EXA-7311-G4 "," EXA-7311-G4S "," HP6000 "(Dnaphthyl ether epoxy Resin), "EPPN-502H" (triphenol type epoxy resin), "NC7000L" (naphthol novolac type epoxy resin), "NC3000H", "NC3000", "NC3000L" made by Nippon Kayaku Co., Ltd. , "NC3100" (Biphenyl type epoxy resin), `` ESN475V '' (naphthalene type epoxy resin), `` ESN485 '' (naphthol novolac type epoxy resin) made by Nippon Steel & Sumitomo Chemical Co., Ltd., and Mitsubishi Chemical (stock) company "YX4000H", "YL6121" (biphenyl epoxy resin), "YX4000HK" (bisxylenol epoxy resin), "YX8800" (anthracene epoxy resin), made by Osaka Gas Chemical Co., Ltd. "PG-100", "CG-500", "YL7760" (bisphenol AF-type epoxy resin), "YL7800" (茀 -type epoxy resin), manufactured by Mitsubishi Chemical Co., Ltd. "JER1010" (solid bisphenol A type epoxy resin), "jER1031S" (tetraphenylethane type epoxy resin), and the like. These can be used individually by 1 type or in combination of 2 or more types.

環氧樹脂為併用液狀環氧樹脂與固體狀環氧樹脂的情形,彼等之量比(液狀環氧樹脂:固體狀環氧樹脂)係以質量比表示,較佳為1:0.1~1:15之範圍。藉由將液狀環氧樹脂與固體狀環氧樹脂之量比設在此範圍,可得到i)在樹脂薄片的形態使用時,可帶來適度的黏著性,ii)在樹脂薄片的形態使用的情形,可得到充分的可撓性,提高操作性,及iii)可得到具有充分的斷裂強度的硬化物等的效果。自上述i)~iii)之效果的觀點,液狀環氧樹脂與固體狀環氧樹脂之量比(液狀環氧樹脂:固體狀環氧樹脂)係以質量比表示,更佳為1:0.3~1:10之範圍,又更佳為1:0.6~1:8之範圍,又更佳為1:1.5~1:5之範圍。環氧樹脂也可僅使用固體狀環氧樹脂。 When the epoxy resin is a combination of a liquid epoxy resin and a solid epoxy resin, their weight ratios (liquid epoxy resin: solid epoxy resin) are expressed by mass ratio, preferably 1: 0.1 ~ 1:15 range. By setting the amount ratio of the liquid epoxy resin to the solid epoxy resin within this range, i) can be used in the form of a resin sheet, which can bring moderate adhesion, ii) can be used in the form of a resin sheet In this case, sufficient flexibility can be obtained to improve workability, and iii) effects such as a hardened material having sufficient breaking strength can be obtained. From the viewpoint of the effects of i) to iii) above, the amount ratio of the liquid epoxy resin to the solid epoxy resin (liquid epoxy resin: solid epoxy resin) is expressed by mass ratio, and more preferably 1: The range is from 0.3 to 1:10, more preferably from 1: 0.6 to 1: 8, and even more preferably from 1: 1.5 to 1: 5. As the epoxy resin, only a solid epoxy resin may be used.

樹脂組成物中之環氧樹脂之含量,從得到顯 示良好的機械強度、絕緣信賴性之絕緣層的觀點,較佳為1質量%以上,更佳為2質量%以上,又更佳為3質量%以上,又更佳為10質量%以上。環氧樹脂之含量之上限,只要可發揮本發明效果的範圍內,無特別限定,較佳為50質量%以下,更佳為40質量%以下,又更佳為30質量%以下或25質量%以下。 The content of epoxy resin in the resin composition can be obtained from From the viewpoint of an insulating layer showing good mechanical strength and insulation reliability, it is preferably 1% by mass or more, more preferably 2% by mass or more, still more preferably 3% by mass or more, and still more preferably 10% by mass or more. The upper limit of the content of the epoxy resin is not particularly limited as long as the effect of the present invention can be exhibited, and is preferably 50% by mass or less, more preferably 40% by mass or less, and still more preferably 30% by mass or 25% by mass. the following.

又,本發明中,在無特別明示時,樹脂組成物中之各成分之含量係樹脂組成物中之不揮發成分設為100質量%時之值。 In the present invention, the content of each component in the resin composition is the value when the non-volatile component in the resin composition is 100% by mass unless specifically stated otherwise.

環氧樹脂之環氧當量,較佳為50~5000,更佳為50~3000,又更佳為80~2000,又更佳為110~1000。藉由在此範圍內,可帶來硬化物之交聯密度充分,表面粗糙度小的絕緣層。又,環氧當量可依據JIS K7236測量,為含有1當量之環氧基之樹脂的質量。 The epoxy equivalent of the epoxy resin is preferably 50 to 5000, more preferably 50 to 3000, still more preferably 80 to 2000, and still more preferably 110 to 1,000. Within this range, an insulating layer with sufficient cross-linking density of the hardened material and a small surface roughness can be brought. The epoxy equivalent can be measured in accordance with JIS K7236 and is the mass of a resin containing 1 equivalent of epoxy groups.

環氧樹脂之重量平均分子量,較佳為100~5000,更佳為150~3000,又更佳為200~1500。在此,環氧樹脂之重量平均分子量係藉由凝膠滲透層析(GPC)法測量之聚苯乙烯換算的重量平均分子量。 The weight average molecular weight of the epoxy resin is preferably 100 to 5000, more preferably 150 to 3000, and still more preferably 200 to 1500. Here, the weight average molecular weight of an epoxy resin is a polystyrene conversion weight average molecular weight measured by the gel permeation chromatography (GPC) method.

<(B)硬化劑> <(B) Hardener>

硬化劑只要是具有使環氧樹脂硬化的功能時,即無特別限定,可列舉例如酚系硬化劑、萘酚系硬化劑、活性酯系硬化劑、苯並噁嗪系硬化劑、氰酸酯系硬化劑、及碳二亞胺系硬化劑等。硬化劑可1種單獨使用或併用2種以 上。(B)成分係選自酚系硬化劑、萘酚系硬化劑、活性酯系硬化劑及氰酸酯系硬化劑之1種以上為佳。 The hardener is not particularly limited as long as it has a function of hardening the epoxy resin, and examples thereof include a phenol-based hardener, a naphthol-based hardener, an active ester-based hardener, a benzoxazine-based hardener, and a cyanate ester. Based hardener, and carbodiimide based hardener. Hardener can be used alone or in combination of 2 or more on. The component (B) is preferably one or more selected from a phenol-based hardener, a naphthol-based hardener, an active ester-based hardener, and a cyanate-based hardener.

酚系硬化劑及萘酚系硬化劑,從耐熱性及耐水性的觀點,較佳為具有酚醛清漆結構之酚系硬化劑、或具有酚醛清漆結構之萘酚系硬化劑。又,從與導體層之密著性的觀點,較佳為含氮酚系硬化劑,更佳為含有三嗪骨架之酚系硬化劑。其中,從高度滿足耐熱性、耐水性、及與導體層之密著性的觀點,較佳為含有三嗪骨架之苯酚酚醛清漆硬化劑。 From the viewpoints of heat resistance and water resistance, the phenol-based hardener and the naphthol-based hardener are preferably a phenol-based hardener having a novolac structure or a naphthol-based hardener having a novolac structure. From the viewpoint of adhesion with the conductor layer, a nitrogen-containing phenol-based hardener is preferred, and a phenol-based hardener containing a triazine skeleton is more preferred. Among these, a phenol novolak hardener containing a triazine skeleton is preferred from the viewpoint of satisfying high heat resistance, water resistance, and adhesion to the conductor layer.

酚系硬化劑及萘酚系硬化劑之具體例,可列舉例如明和化成(股)製之「MEH-7700」、「MEH-7810」、「MEH-7851」、日本化藥(股)製之「NHN」、「CBN」、「GPH」、新日鐵住金(股)製之「SN170」、「SN180」、「SN190」、「SN475」、「SN485」、「SN495」、「SN375」、「SN395」、DIC(股)製之「TD-2090」、「LA-7052」、「LA-7054」、「LA-1356」、「LA-3018-50P」、「EXB-9500」等。 Specific examples of the phenol-based hardener and naphthol-based hardener include, for example, "MEH-7700", "MEH-7810", "MEH-7851", manufactured by Nippon Kasei Kasei Co., Ltd., and manufactured by Nippon Kayakusho Co., Ltd. "NHN", "CBN", "GPH", "SN170", "SN180", "SN190", "SN475", "SN485", "SN495", "SN375", " "SN395", "TD-2090", "LA-7052", "LA-7054", "LA-1356", "LA-3018-50P", "EXB-9500", etc. of the DIC system.

從得到與導體層之密著性優異之絕緣層的觀點,較佳為活性酯系硬化劑。活性酯系硬化劑無特別限定,一般較佳為使用酚酯類、苯硫酚(Thiophenol)酯類、N-羥基胺酯類、雜環羥基化合物之酯類等之1分子中具有2個以上之反應活性高之酯基的化合物。該活性酯系硬化劑係藉由羧酸化合物及/或硫代羧酸化合物與羥基化合物及/或硫醇化合物之縮合反應所得者。特別是從提高 耐熱性的觀點,較佳為由羧酸化合物與羥基化合物所得之活性酯系硬化劑,更佳為由羧酸化合物與苯酚化合物及/或萘酚化合物所得之活性酯系硬化劑。羧酸化合物可列舉例如苯甲酸、乙酸、琥珀酸、馬來酸、依康酸、苯二甲酸、間苯二甲酸、對苯二甲酸、均苯四甲酸等。苯酚化合物或萘酚化合物,可列舉例如氫醌、間苯二酚、雙酚A、雙酚F、雙酚S、酚系、甲基化雙酚A、甲基化雙酚F、甲基化雙酚S、苯酚、o-甲酚、m-甲酚、p-甲酚、兒茶酚、α-萘酚、β-萘酚、1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、間苯三酚、苯三醇、二環戊二烯型二酚化合物、苯酚酚醛清漆等。在此,「二環戊二烯型二酚化合物」係指對於二環戊二烯1分子,有苯酚2分子產生縮合所得之二酚化合物。 From the viewpoint of obtaining an insulating layer having excellent adhesion to the conductor layer, an active ester-based hardener is preferred. The active ester-based hardener is not particularly limited. Generally, it is preferable to use two or more molecules in one molecule, such as phenol esters, thiophenol esters, N-hydroxyamine esters, and heterocyclic hydroxyl compounds. Highly reactive ester-based compounds. The active ester-based hardener is obtained by a condensation reaction of a carboxylic acid compound and / or a thiocarboxylic acid compound and a hydroxy compound and / or a thiol compound. Especially from improving From the viewpoint of heat resistance, an active ester-based hardener obtained from a carboxylic acid compound and a hydroxy compound is preferable, and an active ester-based hardener obtained from a carboxylic acid compound and a phenol compound and / or a naphthol compound is more preferable. Examples of the carboxylic acid compound include benzoic acid, acetic acid, succinic acid, maleic acid, itaconic acid, phthalic acid, isophthalic acid, terephthalic acid, and pyromellitic acid. Examples of the phenol compound or naphthol compound include hydroquinone, resorcinol, bisphenol A, bisphenol F, bisphenol S, phenol-based, methylated bisphenol A, methylated bisphenol F, and methylation. Bisphenol S, phenol, o-cresol, m-cresol, p-cresol, catechol, α-naphthol, β-naphthol, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene , 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, resorcinol, benzenetriol, dicyclopentadiene-type diphenol compound, phenol Novolac, etc. Here, the "dicyclopentadiene-type diphenol compound" refers to a diphenol compound obtained by condensing two molecules of phenol with one molecule of dicyclopentadiene.

具體而言,含有二環戊二烯型二酚結構之活性酯化合物、含有萘結構之活性酯化合物、包含苯酚酚醛清漆之乙醯化物之活性酯化合物、包含苯酚酚醛清漆之苯甲醯化物之活性酯化合物為佳,其中更佳為含有萘結構之活性酯化合物、含有二環戊二烯型二酚結構之活性酯化合物。「二環戊二烯型二酚結構」係表示由伸苯基-二伸環戊基-伸苯基所成之2價的結構單位。 Specifically, an active ester compound containing a dicyclopentadiene-type diphenol structure, an active ester compound containing a naphthalene structure, an active ester compound containing an acetic acid compound of a phenol novolac, and an active ester compound containing a phenolic novolac compound. Active ester compounds are preferred, and among them, active ester compounds containing a naphthalene structure and active ester compounds containing a dicyclopentadiene type diphenol structure are more preferred. The "dicyclopentadiene-type diphenol structure" means a divalent structural unit formed of phenylene-dicyclopentyl-phenylene.

活性酯系硬化劑之市售品,其中含有二環戊二烯型二酚結構之活性酯化合物,可列舉「EXB9451」、「EXB9460」、「EXB9460S」、「HPC-8000-65T」、 「HPC-8000H-65TM」、「EXB-8000L-65TM」(DIC(股)製),含有萘結構之活性酯化合物,可列舉「EXB9416-70BK」(DIC(股)製),包含苯酚酚醛清漆之乙醯化物之活性酯化合物,可列舉「DC808」(三菱化學(股)製),包含苯酚酚醛清漆之苯甲醯化物之活性酯化合物,可列舉「YLH1026」(三菱化學(股)製)、苯酚酚醛清漆之乙醯化物的活性酯系硬化劑,可列舉「DC808」(三菱化學(股)製)、苯酚酚醛清漆之苯甲醯化物的活性酯系硬化劑,可列舉「YLH1026」(三菱化學(股)製)、「YLH1030」(三菱化學(股)製)、「YLH1048」(三菱化學(股)製)等。 Commercially available products of active ester-based hardeners, which contain dicyclopentadiene-type diphenol-containing active ester compounds, include "EXB9451", "EXB9460", "EXB9460S", "HPC-8000-65T", "HPC-8000H-65TM", "EXB-8000L-65TM" (manufactured by DIC (stock)), active ester compounds containing a naphthalene structure, and "EXB9416-70BK" (manufactured by DIC (stock)), including phenol novolac Examples of the active ester compounds of ethyl acetate are "DC808" (manufactured by Mitsubishi Chemical Corporation), and the active ester compounds of benzyl compounds containing phenol novolac are "YLH1026" (manufactured by Mitsubishi Chemical Corporation) Examples of the active ester-based hardener for the acetic acid compound of phenol novolak include "DC808" (manufactured by Mitsubishi Chemical Corporation), and the active ester-based hardener for the benzoic acid compound of phenol novolak includes "YLH1026" (Mitsubishi Chemical Corporation), "YLH1030" (Mitsubishi Chemical Corporation), "YLH1048" (Mitsubishi Chemical Corporation), etc.

苯並噁嗪系硬化劑之具體例,可列舉昭和高分子(股)製之「HFB2006M」、四國化成工業(股)製之「P-d」、「F-a」。 Specific examples of the benzoxazine-based hardener include "HFB2006M" manufactured by Showa Polymer Co., Ltd., "P-d" and "F-a" manufactured by Shikoku Chemical Industry Co., Ltd.

氰酸酯系硬化劑,可列舉例如雙酚A二氰酸酯、多酚氰酸酯、寡(3-亞甲基-1,5-伸苯基氰酸酯)、4,4’-亞甲基雙(2,6-二甲基苯基氰酸酯)、4,4’-亞乙基二苯基二氰酸酯、六氟雙酚A二氰酸酯、2,2-雙(4-氰酸酯)苯基丙烷、1,1-雙(4-氰酸酯苯基甲烷)、雙(4-氰酸酯-3,5-二甲基苯基)甲烷、1,3-雙(4-氰酸酯苯基-1-(甲基亞乙基))苯、雙(4-氰酸酯苯基)硫醚、及雙(4-氰酸酯苯基)醚等之2官能氰酸酯樹脂、由苯酚酚醛清漆及甲酚酚醛清漆等所衍生之多官能氰酸酯樹脂、此等氰酸酯樹脂一部分經三嗪化的預聚物等。氰酸酯酯系硬化 劑之具體例,可列舉Lonza Japan(股)製之「PT30」及「PT60」(均為苯酚酚醛清漆型多官能氰酸酯酯樹脂)、「BA230」、「BA230S75」(雙酚A二氰酸酯一部分或全部經三嗪化之三聚物的預聚物)等。 Examples of the cyanate-based curing agent include bisphenol A dicyanate, polyphenol cyanate, oligo (3-methylene-1,5-phenylene cyanate), and 4,4'-subline. Methylbis (2,6-dimethylphenylcyanate), 4,4'-ethylenediphenyldicyanate, hexafluorobisphenol A dicyanate, 2,2-bis ( 4-cyanate) phenylpropane, 1,1-bis (4-cyanatephenylmethane), bis (4-cyanate-3,5-dimethylphenyl) methane, 1,3- 2 of bis (4-cyanatephenyl-1- (methylethylene)) benzene, bis (4-cyanatephenyl) sulfide, and bis (4-cyanatephenyl) ether Functional cyanate resins, polyfunctional cyanate resins derived from phenol novolacs, cresol novolacs, etc., prepolymers in which some of these cyanate resins are triazinated, and the like. Cyanate ester-based hardening Specific examples of the agent include "PT30" and "PT60" (both phenol novolac-type polyfunctional cyanate ester resins), "BA230", and "BA230S75" (bisphenol A dicyanide) manufactured by Lonza Japan Co., Ltd. Prepolymers of which a part or all of the acid esters are triazinated terpolymers) and the like.

碳二亞胺系硬化劑之具體例,可列舉Nisshinbo Chemical(股)製之「V-03」、「V-07」等。 Specific examples of the carbodiimide-based hardener include "V-03" and "V-07" made by Nishinbo Chemical Co., Ltd.

環氧樹脂與硬化劑之量比係〔環氧樹脂之環氧基之合計數〕:〔硬化劑之反應基之合計數〕之比率表示,較佳為1:0.01~1:2之範圍,更佳為1:0.015~1:1.5,又更佳為1:0.02~1:1。在此,硬化劑之反應基係指活性羥基、活性酯基等,因硬化劑之種類而異。又,環氧樹脂之環氧基之合計數係指對於全部之環氧樹脂將各環氧樹脂之固體成分質量除以環氧當量之值合計之值,硬化劑之反應基的合計數係指對於全部之硬化劑將各硬化劑之固體成分質量除以反應基當量之值合計之值。藉由將環氧樹脂與硬化劑之量比設為此範圍,而更提高樹脂組成物之硬化物的耐熱性。 The ratio of the amount of the epoxy resin to the hardener is [the total number of epoxy groups of the epoxy resin]: [the total number of the reactive groups of the hardener]. The ratio is preferably in the range of 1: 0.01 to 1: 2. It is more preferably 1: 0.015 to 1: 1.5, and even more preferably 1: 0.02 to 1: 1. Here, the reactive group of the hardener refers to an active hydroxyl group, an active ester group, and the like, and it varies depending on the type of the hardener. In addition, the total number of epoxy groups of an epoxy resin refers to a value obtained by dividing the solid content mass of each epoxy resin by the value of the epoxy equivalent for all epoxy resins, and the total number of reactive groups of the hardener refers to For all the hardeners, the value obtained by dividing the mass of the solid content of each hardener by the equivalent of the reactive group equivalent. By setting the ratio of the amount of the epoxy resin to the hardener within this range, the heat resistance of the hardened product of the resin composition is further improved.

一實施形態中,樹脂組成物包含前述(A)環氧樹脂及(B)硬化劑。樹脂組成物係含有作為(A)環氧樹脂之液狀環氧樹脂與固體狀環氧樹脂之混合物(液狀環氧樹脂:固體狀環氧樹脂之質量比,較佳為1:0.1~1:15,更佳為1:0.3~1:10,又更佳為1:0.6~1:8),及含有作為(B)硬化劑之選自由酚系硬化劑、萘酚系硬化劑、活性酯系硬化劑及氰酸酯酯系硬化劑所成群之1種以 上(較佳為選自由酚系硬化劑、萘酚系硬化劑及活性酯系硬化劑所成群之1種以上)為佳。 In one embodiment, the resin composition includes the (A) epoxy resin and (B) hardener. The resin composition contains a mixture of a liquid epoxy resin and a solid epoxy resin (A) as an epoxy resin (a mass ratio of the liquid epoxy resin to the solid epoxy resin, preferably 1: 0.1 to 1) : 15, more preferably 1: 0.3 ~ 1: 10, and even more preferably 1: 0.6 ~ 1: 8), and contains (B) a hardener selected from the group consisting of a phenol-based hardener, a naphthol-based hardener, and an activity Ester hardener and cyanate ester hardener Above (preferably one or more selected from the group consisting of a phenol-based hardener, a naphthol-based hardener, and an active ester-based hardener).

樹脂組成物中之硬化劑之含量無特別限定,較佳為30質量%以下,更佳為25質量%以下,又更佳為20質量%以下,又更佳為10質量%以下。又,下限無特別限制,較佳為0.5質量%以上。 The content of the hardener in the resin composition is not particularly limited, but it is preferably 30% by mass or less, more preferably 25% by mass or less, still more preferably 20% by mass or less, and still more preferably 10% by mass or less. The lower limit is not particularly limited, but is preferably 0.5% by mass or more.

<(C)含氟原子之烷氧基矽烷化合物> <(C) fluorine-containing alkoxysilane compound>

本發明之樹脂組成物含有(C)含氟原子之烷氧基矽烷化合物。藉由含有(C)成分,而提高後述(D)成分之分散性,降低樹脂組成物層之熔融黏度,可提高藉由樹脂組成物之硬化所形成之絕緣層與導體層之密著性。(C)成分具有強化異種材料之界面的作用,故對氧化劑(除膠渣液)之耐性高。因含有(C)成分,而降低絕緣層之粗度,可提高絕緣層與導體層之密著性。 The resin composition of the present invention contains (C) a fluorine atom-containing alkoxysilane compound. By containing the component (C), the dispersibility of the component (D) described later is increased, the melt viscosity of the resin composition layer is reduced, and the adhesion between the insulating layer and the conductor layer formed by the hardening of the resin composition can be improved. (C) The component has the effect of strengthening the interface of dissimilar materials, so it has high resistance to oxidants (degumming solution). By containing the component (C), the thickness of the insulating layer is reduced, and the adhesion between the insulating layer and the conductor layer can be improved.

(C)成分從提高對粗化處理用之氧化劑之耐性的觀點,(C)成分1分子中之氟原子數,較佳為1~10,更佳為1~5,又更佳為1~3。 (C) component From the viewpoint of improving the resistance to the oxidizing agent for roughening treatment, the number of fluorine atoms in 1 molecule of the component (C) is preferably 1 to 10, more preferably 1 to 5, and even more preferably 1 to 3.

(C)成分從提高對粗化處理用之氧化劑之耐性的觀點,具有氟化烷基為佳,氟化烷基在末端具有氟原子為佳。氟化烷基係碳原子數1~20之氟化烷基為佳,更佳為碳原子數1~10之氟化烷基,又更佳為碳原子數1~6之氟化烷基。這種氟化烷基,可列舉例如-CF3、-CH2CF3、-CF2CF3、-CH2CH2CF3、-CH(CF3)2、-CH2CH2CH2CF3、 -CH2CH(CF3)2、-C(CF3)3等,較佳為-CH2CH2CF3The component (C) preferably has a fluorinated alkyl group from the viewpoint of improving the resistance to an oxidizing agent for roughening treatment, and the fluorinated alkyl group preferably has a fluorine atom at a terminal. The fluorinated alkyl is preferably a fluorinated alkyl having 1 to 20 carbon atoms, more preferably a fluorinated alkyl having 1 to 10 carbon atoms, and even more preferably a fluorinated alkyl having 1 to 6 carbon atoms. Examples of such a fluorinated alkyl group include -CF 3 , -CH 2 CF 3 , -CF 2 CF 3 , -CH 2 CH 2 CF 3 , -CH (CF 3 ) 2 , -CH 2 CH 2 CH 2 CF 3 , -CH 2 CH (CF 3 ) 2 , -C (CF 3 ) 3 and the like, preferably -CH 2 CH 2 CF 3 .

又,從提高反應性的觀點,(C)成分1分子中之烷氧基之數,較佳為1~5,更佳為1~3,又更佳為2~3。 From the viewpoint of improving reactivity, the number of alkoxy groups in one molecule of the component (C) is preferably 1 to 5, more preferably 1 to 3, and even more preferably 2 to 3.

(C)成分中之烷氧基,從提高反應性的觀點,較佳為碳原子數1~20之烷氧基,更佳為碳原子數1~10之烷氧基,又更佳為碳原子數1~6之烷氧基。這種烷氧基,可列舉例如甲氧基、乙氧基、丙氧基、異丙氧基、丁氧基、s-丁氧基、異丁氧基、t-丁氧基、戊氧基、己氧基、庚氧基、辛氧基、壬氧基、及癸氧基,較佳為甲氧基。 From the viewpoint of improving reactivity, the alkoxy group in the component (C) is preferably an alkoxy group having 1 to 20 carbon atoms, more preferably an alkoxy group having 1 to 10 carbon atoms, and more preferably carbon. Alkoxy having 1 to 6 atoms. Examples of such an alkoxy group include methoxy, ethoxy, propoxy, isopropoxy, butoxy, s-butoxy, isobutoxy, t-butoxy, and pentoxy , Hexyloxy, heptyloxy, octyloxy, nonyloxy, and decyloxy, preferably methoxy.

烷氧基可具有取代基。取代基無特別限制,可列舉例如鹵素原子、-OH、-O-C1-6烷基、-N(C1-6烷基)2、C1-6烷基、C6-10芳基、-NH2、-CN、-C(O)O-C1-6烷基、-COOH、-C(O)H、-NO2等。 The alkoxy group may have a substituent. The substituent is not particularly limited, and examples thereof include a halogen atom, -OH, -OC 1-6 alkyl, -N (C 1-6 alkyl) 2 , C 1-6 alkyl, C 6-10 aryl,- NH 2 , -CN, -C (O) OC 1-6 alkyl, -COOH, -C (O) H, -NO 2 and the like.

在此,「Cp-q」(p及q為正整數,滿足p<q。)的用語表示此用語隨後所記載之有機基的碳原子數為p~q。例如「C1-6烷基」的描述係表示碳原子數1~6之烷基。 Here, the term "C pq " (p and q are positive integers and satisfy p <q.) Means that the number of carbon atoms of the organic group described later in this term is p to q. For example, the description of "C 1-6 alkyl" means an alkyl group having 1 to 6 carbon atoms.

上述取代基也可再具有取代基(以下有稱為「二次取代基」的情形。)。二次取代基無特別記載時,可使用與上述取代基相同者。 The above-mentioned substituent may further have a substituent (hereinafter may be referred to as a "secondary substituent"). When a secondary substituent is not specifically mentioned, the same thing as the said substituent can be used.

(C)成分之分子量,從提高相溶性的觀點,較佳為50~2000,更佳為75~100,又更佳為100~500。 The molecular weight of the component (C) is preferably 50 to 2,000, more preferably 75 to 100, and still more preferably 100 to 500 from the viewpoint of improving compatibility.

此等之中,(C)成分可列舉3,3,3-三氟丙基三甲氧基矽烷、含有全氟(聚)醚基之烷氧基矽烷化合物等。此等可單獨使用1種或組合2種以上使用。其中,(C)成分較佳為3,3,3-三氟丙基三甲氧基矽烷。(C)成分也可使用市售品,可列舉例如信越化學工業(股)製「KBM-7103」、「optool DSX」。 Among these, the component (C) includes 3,3,3-trifluoropropyltrimethoxysilane, an alkoxysilane compound containing a perfluoro (poly) ether group, and the like. These can be used individually by 1 type or in combination of 2 or more types. Among these, the (C) component is preferably 3,3,3-trifluoropropyltrimethoxysilane. (C) As a component, you may use a commercial item, For example, "KBM-7103" and "optool DSX" by Shin-Etsu Chemical Industry Co., Ltd. are mentioned.

(C)成分也可單獨包含於本發明之樹脂組成物中,(C)成分之一部分或全部可作為(E)無機填充材(後述)之表面處理劑,而包含於樹脂組成物中。 The component (C) may be contained alone in the resin composition of the present invention, and a part or all of the component (C) may be contained in the resin composition as a surface treatment agent for (E) an inorganic filler (described later).

(C)成分之含量,較佳為0.1質量%以上,更佳為0.15質量%以上,又更佳為0.2質量%以上。上限無特別限定,較佳為10質量%以下,更佳為8質量%以下,又更佳為6質量%以下。 The content of the component (C) is preferably 0.1% by mass or more, more preferably 0.15% by mass or more, and still more preferably 0.2% by mass or more. The upper limit is not particularly limited, but is preferably 10% by mass or less, more preferably 8% by mass or less, and even more preferably 6% by mass or less.

<(D)有機填充材> <(D) Organic Filler>

本發明之樹脂組成物含有(D)有機填充材((D)成分)。本發明中,(D)成分係降低使樹脂組成物硬化而成之絕緣層之比介電率(使絕緣層低介電率化)的成分。從絕緣層之低介電率化的觀點,(D)成分係在測量頻率5.8GHz下之比介電率為3.2以下的粒子為佳,該比介電率為3.0以下的粒子更佳,該比介電率為2.8以下的粒子又更佳。(D)成分之該比介電率之下限無特別限定,可為1.1以上。 The resin composition of the present invention contains (D) an organic filler ((D) component). In the present invention, the component (D) is a component that lowers the specific permittivity of the insulating layer obtained by curing the resin composition (reducing the dielectric constant of the insulating layer). From the viewpoint of lowering the dielectric constant of the insulating layer, particles having a specific dielectric constant of 3.2 or less at a measurement frequency of 5.8 GHz are preferred for the (D) component, and more preferable than particles having a dielectric constant of 3.0 or less. Particles with a specific permittivity of 2.8 or less are more preferable. The lower limit of the specific dielectric constant of the (D) component is not particularly limited, and may be 1.1 or more.

(D)成分之粒徑無特別限定,從樹脂組成物 中之分散性優異的觀點,平均粒徑為5μm以下者為佳,4μm以下者更佳,3μm以下者又更佳。(D)成分之平均粒徑之下限無特別限定,較佳為0.05μm以上者,更佳為0.08μm以上者,又更佳為0.10μm以上者。因此,(D)成分的粒子,其平均粒徑為0.05μm~5μm者較佳,0.08μm~4μm者更佳,0.10μm~3μm者又更佳。 (D) The particle diameter of the component is not particularly limited. From the viewpoint of excellent dispersibility, the average particle diameter is preferably 5 μm or less, more preferably 4 μm or less, and even more preferably 3 μm or less. The lower limit of the average particle diameter of the component (D) is not particularly limited, but is preferably 0.05 μm or more, more preferably 0.08 μm or more, and still more preferably 0.10 μm or more. Therefore, the particles of the component (D) have an average particle diameter of 0.05 μm to 5 μm, more preferably 0.08 μm to 4 μm, and even more preferably 0.10 μm to 3 μm.

(D)成分只要是使絕緣層之低介電率化者時,即無特別限定,可列舉例如選自氟樹脂、氟橡膠、聚乙烯、聚丙烯、聚苯乙烯、聚碳酸酯、降莰烯系樹脂、與烯烴類之加成共聚合型樹脂、聚苯醚、雙馬來醯亞胺.三嗪.樹脂、聚醚醯亞胺、聚醯亞胺、聚醚醚酮、及液晶聚合物等之1種或2種以上。此等之中,含有氟樹脂的粒子為佳。 The component (D) is not particularly limited as long as it reduces the dielectric constant of the insulating layer, and examples thereof include a member selected from the group consisting of fluororesin, fluororubber, polyethylene, polypropylene, polystyrene, polycarbonate, and hafnium. Ethylene resin, addition copolymerization resin with olefins, polyphenylene ether, bismaleimide. Triazine. Resin, polyetherimide, polyimide, polyetheretherketone, and a liquid crystal polymer. Among these, fluororesin-containing particles are preferred.

氟樹脂可列舉例如聚四氟乙烯(PTFE)、全氟烷氧基烷烴(PFA)、全氟乙烯丙烯共聚物(FEP)、乙烯.四氟乙烯共聚物(ETFE)、四氟乙烯-全氟二氧雜環戊烯共聚物(TFE/PDD)、聚偏二氟乙烯(PVDF)、聚氯三氟乙烯(PCTFE)、乙烯-氯三氟乙烯共聚物(ECTFE)、聚氟化乙烯基(PVF)等。此等之樹脂可1種單獨使用或組合2種以上使用。從絕緣層之低介電率化的觀點,較佳為PTFE。PTFE粒子之重量平均分子量,較佳為5,000,000以下,更佳為4,000,000以下,又更佳為3,000,000以下。 Examples of the fluororesin include polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), perfluoroethylene propylene copolymer (FEP), ethylene.tetrafluoroethylene copolymer (ETFE), and tetrafluoroethylene-perfluoro Dioxolene copolymer (TFE / PDD), polyvinylidene fluoride (PVDF), polychlorotrifluoroethylene (PCTFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), polyfluorinated vinyl ( PVF) and so on. These resins can be used singly or in combination of two or more kinds. From the viewpoint of reducing the dielectric constant of the insulating layer, PTFE is preferred. The weight average molecular weight of the PTFE particles is preferably 5,000,000 or less, more preferably 4,000,000 or less, and even more preferably 3,000,000 or less.

PTFE之具體例,可列舉DAIKIN INDUSTRIES (股)製「ruburonL-2」、DAIKIN INDUSTRIES(股)製「ruburonL-5」、DAIKIN INDUSTRIES(股)製「ruburonL-5F」、旭硝子(股)製「FluonPTFE L-170JE」、旭硝子(股)製「FluonPTFE L-172JE」、旭硝子(股)製「FluonPTFE L-173JE」、(股)喜多村製「KTL-500F」、(股)喜多村製「KTL-2N」、(股)喜多村製「KTL-1N」、三井.Dupont Fluorochemicals(股)「TLP10F-1」等。 Specific examples of PTFE include DAIKIN INDUSTRIES (RuburonL-2), DAIKIN INDUSTRIES (ruburonL-5), Drukinon-5-5 (DAIKIN INDUSTRIES), FluonPTFE L-170JE, Asahi Glass (share) "FluonPTFE L-172JE", Asahi Glass (FluonPTFE L-173JE), "KTL-500F" (KTL-500F), "KTL-2N" (KTL-2N), "KTL-" 1N ", Mitsui. Dupont Fluorochemicals (stock) "TLP10F-1", etc.

(D)成分也可含有例如經表面處理的粒子。表面處理可列舉以表面處理劑之表面處理等。表面處理劑無特別限定,也可包含非離子性界面活性劑、兩性界面活性劑、陽離子界面活性劑、陰離子界面活性劑等之界面活性劑及無機微粒子等。(D)成分為含有氟樹脂之粒子的情形,從親和性的觀點,較佳為氟系界面活性劑等。氟系界面活性劑之具體例,可列舉AGC清美化學(股)製「SurflonS-243」(全氟烷基環氧乙烷加成物)、DIC(股)製「Megafac F-251」、DIC(股)製「Megafac F-477」、DIC(股)製「Megafac F-553」、DIC(股)製「Megafac R-40」、DIC(股)製「Megafac R-43」、DIC(股)製「Megafac R-94」、Neos(股)製「FTX-218」、Neos(股)製「Ftergent 610FM」、Neos(股)製「Ftergent 730LM」等。 The component (D) may contain, for example, surface-treated particles. Examples of the surface treatment include surface treatment with a surface treatment agent. The surface treatment agent is not particularly limited, and may include a surfactant such as a nonionic surfactant, an amphoteric surfactant, a cationic surfactant, an anionic surfactant, an inorganic fine particle, and the like. When the component (D) is a particle containing a fluororesin, a fluorine-based surfactant or the like is preferred from the viewpoint of affinity. Specific examples of the fluorine-based surfactants include "SurflonS-243" (perfluoroalkyl ethylene oxide adduct) manufactured by AGC Kiyomi Chemicals Corporation, "Megafac F-251" manufactured by DIC Corporation, and DIC (Megafac F-477), DIC (Megafac F-553), DIC (Megafac R-40), DIC (Megafac R-43), DIC (shares) "Megafac R-94", "FTX-218" by Neos, "Ftergent 610FM" by Neos, "Ftergent 730LM" by Neos, etc.

(D)成分之含量,從絕緣層之低介電率化的觀點,較佳為5質量%以上,更佳為10質量%以上,又更 佳為15質量%以上。(D)成分之含量之上限無特別限定,較佳為40質量%以下,更佳為35質量%以下,又更佳為30質量%以下。因此,(D)成分之含量,較佳為5質量%~40質量%,更佳為10質量%~35質量%以上,又更佳為15質量%~30質量%。 The content of the (D) component is preferably 5% by mass or more, more preferably 10% by mass or more, from the viewpoint of reducing the dielectric constant of the insulating layer. It is preferably 15% by mass or more. The upper limit of the content of the component (D) is not particularly limited, but is preferably 40% by mass or less, more preferably 35% by mass or less, and still more preferably 30% by mass or less. Therefore, the content of the (D) component is preferably 5 mass% to 40 mass%, more preferably 10 mass% to 35 mass% or more, and still more preferably 15 mass% to 30 mass%.

<(E)無機填充材> <(E) inorganic filler>

本發明之樹脂組成物可進一步含有(E)無機填充材。 The resin composition of the present invention may further contain (E) an inorganic filler.

(E)成分(無機填充材)之材料無特別限定,可列舉例如二氧化矽、氧化鋁、玻璃、菫青石、矽氧化物、硫酸鋇、碳酸鋇、滑石、黏土、雲母粉、氧化鋅、水滑石、水鋁石、氫氧化鋁、氫氧化鎂、碳酸鈣、碳酸鎂、氧化鎂、氮化硼、氮化鋁、氮化錳、硼酸鋁、碳酸鍶、鈦酸鍶、鈦酸鈣、鈦酸鎂、鈦酸鉍、氧化鈦、氧化鋯、鈦酸鋇、鈦酸鋯酸鋇、鋯酸鋇、鋯酸鈣、磷酸鋯、及磷酸鎢酸鋯等。此等之中,特佳為二氧化矽、氧化鋁。又,二氧化矽較佳為球狀二氧化矽。無機填充材可1種單獨使用,亦可組合2種以上使用。 (E) The material of the component (inorganic filler) is not particularly limited, and examples thereof include silicon dioxide, aluminum oxide, glass, ochrerite, silicon oxide, barium sulfate, barium carbonate, talc, clay, mica powder, zinc oxide, Hydrotalcite, gibbsite, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, boron nitride, aluminum nitride, manganese nitride, aluminum borate, strontium carbonate, strontium titanate, calcium titanate, Magnesium titanate, bismuth titanate, titanium oxide, zirconia, barium titanate, barium zirconate titanate, barium zirconate, calcium zirconate, zirconium phosphate, zirconium phosphate and the like. Among these, particularly preferred are silicon dioxide and aluminum oxide. The silicon dioxide is preferably spherical silicon dioxide. The inorganic fillers may be used alone or in combination of two or more.

無機填充材之平均粒徑無特別限定,從得到表面粗糙度小之絕緣層的觀點或提高微細配線形成性的觀點,較佳為3μm以下,更佳為2μm以下,又更佳為1μm以下。該平均粒徑之下限無特別限定,較佳為0.01μm以上,更佳為0.1μm以上,又更佳為0.3μm以上。具有這種 平均粒徑之無機填充材之市售品,可列舉例如(股)admatechs製「YC100C」、「YA050C」、「YA050C-MJE」、「YA010C」、電化學工業(股)製「UFP-30」、(股)德山製「SilFile NSS-3N」、「SilFile NSS-4N」、「SilFile NSS-5N」、(股)admatechs製「SC2500SQ」、「SO-C4」、「SO-C2」、「SO-C1」等。 The average particle diameter of the inorganic filler is not particularly limited. From the viewpoint of obtaining an insulating layer with a small surface roughness or from the viewpoint of improving the formation of fine wiring, it is preferably 3 μm or less, more preferably 2 μm or less, and even more preferably 1 μm or less. The lower limit of the average particle diameter is not particularly limited, but is preferably 0.01 μm or more, more preferably 0.1 μm or more, and still more preferably 0.3 μm or more. Have this Examples of commercially available inorganic fillers with an average particle diameter include, for example, "YC100C", "YA050C", "YA050C-MJE", "YA010C", manufactured by Admatechs, and "UFP-30" manufactured by Electrochemical Industries, Ltd. , (Stock) Tokuyama made "SilFile NSS-3N", "SilFile NSS-4N", "SilFile NSS-5N", (stock) Admatechs made "SC2500SQ", "SO-C4", "SO-C2", " SO-C1 "and so on.

無機填充材之平均粒徑可藉由依據米氏(Mie)散射理論之雷射繞射.散射法來測量。具體而言,可藉由雷射繞射散射式粒度分布測量裝置,以體積基準製作無機填充材之粒度分布,以其中值粒徑作為平均粒徑來測量。測量樣品較佳為使用將無機填充材藉由超音波分散於水中者。雷射繞射散射式粒度分布測量裝置可使用(股)堀場製作所製「LA-500」等。 The average particle size of the inorganic filler can be determined by laser diffraction based on Mie scattering theory. Scattering method to measure. Specifically, the particle size distribution of the inorganic filler can be made on a volume basis by a laser diffraction scattering particle size distribution measuring device, and the median particle diameter is used as the average particle diameter to measure. The measurement sample is preferably one in which an inorganic filler is dispersed in water by ultrasonic waves. The laser diffraction scattering type particle size distribution measuring device can use "LA-500" manufactured by Horiba Ltd.

無機填充材係經以表面處理劑表面處理為佳。表面處理劑可列舉例如胺基矽烷系偶合劑、環氧基矽烷系偶合劑、巰基矽烷系偶合劑、烷氧基矽烷化合物、有機矽氮烷化合物、鈦酸酯系偶合劑等。此等可單獨使用1種或組合2種以上使用。這種表面處理劑之市售品,可列舉例如信越化學工業(股)製「KBM-403」(3-環氧丙氧基丙基三甲氧基矽烷)、信越化學工業(股)製「KBM-803」(3-巰基丙基三甲氧基矽烷)、信越化學工業(股)製「KBE-903」(3-胺基丙基三乙氧基矽烷)、信越化學工業(股)製「KBM-573」(N-苯基-3-胺基丙基三甲氧基矽烷)、信越化學工業(股)製「SZ-31」(六 甲基二矽氮烷)、信越化學工業(股)製「KBM-103」(苯基三甲氧基矽烷)、信越化學工業(股)製「KBM-4803」(長鏈環氧基型矽烷偶合劑)、(C)成分(氟含有矽烷化合物)等。 The inorganic filler is preferably surface-treated with a surface-treating agent. Examples of the surface treatment agent include an aminosilane-based coupling agent, an epoxysilane-based coupling agent, a mercaptosilane-based coupling agent, an alkoxysilane compound, an organic silazane compound, and a titanate-based coupling agent. These can be used individually by 1 type or in combination of 2 or more types. Commercial products of such surface treatment agents include, for example, "KBM-403" (3-glycidoxypropyltrimethoxysilane) manufactured by Shin-Etsu Chemical Industry Co., Ltd., and "KBM" manufactured by Shin-Etsu Chemical Industry Co., Ltd. -803 "(3-mercaptopropyltrimethoxysilane)," KBE-903 "(3-aminopropyltriethoxysilane) manufactured by Shin-Etsu Chemical Industry Co., Ltd., and" KBM "manufactured by Shin-Etsu Chemical Industry Co., Ltd. -573 "(N-phenyl-3-aminopropyltrimethoxysilane), Shin-Etsu Chemical Industry Co., Ltd." SZ-31 "(Six (Methyl disilazane), Shin-Etsu Chemical Industry Co., Ltd. "KBM-103" (phenyltrimethoxysilane), Shin-Etsu Chemical Industry Co., Ltd. "KBM-4803" (long-chain epoxy-based silane coupling) Mixture), (C) component (fluorine contains silane compound), and the like.

藉由表面處理劑之表面處理的程度係以無機填充材之每單位表面積之碳量來評價。無機填充材之每單位表面積之碳量,從提高無機填充材之分散性的觀點,較佳為0.05mg/m2以上,更佳為0.1mg/m2以上,又更佳為0.2mg/m2以上。此外,從防止樹脂清漆之熔融黏度或薄片形態下之熔融黏度之上昇的觀點,較佳為1mg/m2以下,更佳為0.8mg/m2以下,又更佳為0.5mg/m2以下。無機填充材之每單位表面積之碳量可依據後述之<每單位表面積之碳量之算出>所記載的方法來測量。 The degree of surface treatment by the surface treatment agent is evaluated by the amount of carbon per unit surface area of the inorganic filler. The carbon content per unit surface area of the inorganic filler is preferably 0.05 mg / m 2 or more, more preferably 0.1 mg / m 2 or more, and still more preferably 0.2 mg / m from the viewpoint of improving the dispersibility of the inorganic filler. 2 or more. In addition, from the viewpoint of preventing an increase in the melt viscosity of the resin varnish or the melt viscosity in the form of a sheet, it is preferably 1 mg / m 2 or less, more preferably 0.8 mg / m 2 or less, and still more preferably 0.5 mg / m 2 or less. . The amount of carbon per unit surface area of the inorganic filler can be measured according to the method described in "Calculation of the amount of carbon per unit surface area" described later.

樹脂組成物中之無機填充材之含量,從得到熱膨脹率低之絕緣層的觀點,較佳為5質量%~60質量%,更佳為10質量%~50質量%以上,又更佳為15質量%~40質量%。又,(E)成分為經(C)成分表面處理的情形,上述無機填充材之含量係包含(C)成分的含量。 The content of the inorganic filler in the resin composition is preferably 5 to 60% by mass, more preferably 10 to 50% by mass, and more preferably 15 from the viewpoint of obtaining an insulating layer having a low thermal expansion coefficient. Mass% ~ 40 mass%. When the component (E) is surface-treated with the component (C), the content of the inorganic filler includes the content of the component (C).

樹脂組成物中之(D)成分與(E)成分之合計含量,從得到比介電率與熱膨脹率低之絕緣層的觀點,較佳為40質量%以上,更佳為50質量%以上,又更佳為60質量%以上。 The total content of the (D) component and the (E) component in the resin composition is preferably 40% by mass or more, more preferably 50% by mass or more, from the viewpoint of obtaining an insulating layer having a lower dielectric constant and thermal expansion coefficient. It is more preferably 60% by mass or more.

<(F)熱可塑性樹脂> <(F) thermoplastic resin>

本發明之樹脂組成物進一步也可含有(F)熱可塑性樹脂。 The resin composition of the present invention may further contain (F) a thermoplastic resin.

熱可塑性樹脂可列舉例如苯氧基樹脂、聚乙烯醇縮乙醛樹脂、聚烯烴樹脂、聚丁二烯樹脂、聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、聚醚醯亞胺樹脂、聚碸樹脂、聚醚碸樹脂、聚苯醚樹脂、聚碳酸酯樹脂、聚醚醚酮樹脂、聚酯樹脂,較佳為苯氧基樹脂。熱可塑性樹脂,可1種單獨使用,亦可組合2種以上使用。 Examples of the thermoplastic resin include phenoxy resin, polyvinyl acetal resin, polyolefin resin, polybutadiene resin, polyimide resin, polyimide resin, polyetherimide resin, Polyfluorene resin, polyether resin, polyphenylene ether resin, polycarbonate resin, polyetheretherketone resin, polyester resin, and preferably phenoxy resin. The thermoplastic resin can be used alone or in combination of two or more.

熱可塑性樹脂之聚苯乙烯換算之重量平均分子量,較佳為8,000~70,000之範圍,更佳為10,000~60,000之範圍,又更佳為20,000~60,000之範圍。熱可塑性樹脂之聚苯乙烯換算之重量平均分子量係以凝膠滲透層析(GPC)法測量。具體而言,熱可塑性樹脂之聚苯乙烯換算之重量平均分子量,可使用作為測量裝置之(股)島津製作所LC-9A/RID-6A,使用作為管柱之昭和電工(股)製Shodex K-800P/K-804L/K-804L,使用氯仿等作為移動相,於管柱溫度40℃進行測量,使用標準聚苯乙烯檢量線來算出。 The polystyrene-equivalent weight average molecular weight of the thermoplastic resin is preferably in the range of 8,000 to 70,000, more preferably in the range of 10,000 to 60,000, and even more preferably in the range of 20,000 to 60,000. The polystyrene-equivalent weight average molecular weight of the thermoplastic resin is measured by a gel permeation chromatography (GPC) method. Specifically, the weight average molecular weight in terms of polystyrene of the thermoplastic resin can be measured using Shimadzu LC-9A / RID-6A, which is a measuring device, and Shodex K- manufactured by Showa Denko Corporation, which is a string. 800P / K-804L / K-804L, using chloroform or the like as a mobile phase, measured at a column temperature of 40 ° C, and calculated using a standard polystyrene calibration curve.

苯氧基樹脂可列舉例如具有選自由雙酚A骨架、雙酚F骨架、雙酚S骨架、雙酚苯乙酮骨架、酚醛清漆骨架、聯苯骨架、茀骨架、二環戊二烯骨架、降莰烯骨架、萘骨架、蒽骨架、金剛烷骨架、萜烯骨架、及三甲基環己烷骨架所成群之1種以上之骨架的苯氧基樹脂。苯氧基樹脂之末端,可為酚性羥基、環氧基等之任一的官能 基。苯氧基樹脂可1種單獨使用,亦可組合2種以上使用。苯氧基樹脂之具體例,可列舉三菱化學(股)製之「1256」及「4250」(均為含有雙酚A骨架之苯氧基樹脂)、「YX8100BH30」(含有雙酚S骨架之苯氧基樹脂)、及「YX6954BH30」(含有雙酚苯乙酮骨架之苯氧基樹脂),其他可列舉新日鐵住金化學(股)製之「FX280」及「FX293」、三菱化學(股)製之「YX6954BH30」、「YX7553BH30」、「YL7769BH30」、「YL6794BH30」、「YL7213BH30」、「YL7290BH30」及「YL7482BH30」等。 Examples of the phenoxy resin include those selected from the group consisting of a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, a bisphenol acetophenone skeleton, a novolac skeleton, a biphenyl skeleton, a fluorene skeleton, a dicyclopentadiene skeleton, One or more types of phenoxy resins composed of a norbornene skeleton, a naphthalene skeleton, an anthracene skeleton, an adamantane skeleton, a terpene skeleton, and a trimethylcyclohexane skeleton. The end of the phenoxy resin can be any of the functions of phenolic hydroxyl, epoxy, etc. base. The phenoxy resin may be used alone or in combination of two or more. Specific examples of the phenoxy resin include "1256" and "4250" (both phenoxy resin containing a bisphenol A skeleton) and "YX8100BH30" (benzene containing a bisphenol S skeleton) made by Mitsubishi Chemical Corporation. Oxyresin), and "YX6954BH30" (phenoxy resin containing bisphenol acetophenone skeleton), others include "FX280" and "FX293" made by Nippon Steel & Sumikin Chemical Co., Ltd., and Mitsubishi Chemical Co., Ltd. "YX6954BH30", "YX7553BH30", "YL7769BH30", "YL6794BH30", "YL7213BH30", "YL7290BH30", "YL7482BH30", etc.

聚乙烯醇縮乙醛樹脂可列舉例如聚乙烯醇縮甲醛樹脂、聚乙烯基丁醛樹脂,較佳為聚乙烯基丁醛樹脂。聚乙烯醇縮乙醛樹脂之具體例,可列舉例如電化學工業(股)製之「電化丁醛4000-2」、「電化丁醛5000-A」、「電化丁醛6000-C」、「電化丁醛6000-EP」、積水化學工業(股)製之S-LEC BH系列、BX系列(例如BX-5Z)、KS系列(例如KS-1)、BL系列、BM系列等。 Examples of the polyvinyl acetal resin include a polyvinyl formal resin and a polyvinyl butyral resin, and a polyvinyl butyral resin is preferred. Specific examples of the polyvinyl acetal resin include, for example, "electrochemical butyraldehyde 4000-2", "electrochemical butyraldehyde 5000-A", "electrochemical butyraldehyde 6000-C", " "Electrochemical butyraldehyde 6000-EP", S-LEC BH series, BX series (such as BX-5Z), KS series (such as KS-1), BL series, BM series, etc. manufactured by Sekisui Chemical Industry Co., Ltd.

聚醯亞胺樹脂之具體例,可列舉新日本理化(股)製之「RikacoatSN20」及「RikacoatPN20」。聚醯亞胺樹脂之具體例,可列舉2官能性羥基末端聚丁二烯、二異氰酸酯化合物及四元酸酐反應所得之直鏈聚醯亞胺(LINEAR POLYIMIDE)(日本特開2006-37083號公報記載之聚醯亞胺)、含有聚矽氧烷骨架之聚醯亞胺(日本 特開2002-12667號公報及日本特開2000-319386號公報等所記載之聚醯亞胺)等之改質聚醯亞胺。 Specific examples of the polyimide resin include "Rikacoat SN20" and "Rikacoat PN20" made by Nippon Rika Co., Ltd. Specific examples of the polyimide resin include linear polyimide (LINEAR POLYIMIDE) obtained by the reaction of a bifunctional hydroxyl-terminated polybutadiene, a diisocyanate compound, and a quaternary acid anhydride (Japanese Patent Laid-Open No. 2006-37083 Documented polyimide), polyimide containing a polysiloxane skeleton (Japan The modified polyimide described in Japanese Unexamined Patent Publication No. 2002-12667 and Japanese Unexamined Patent Publication No. 2000-319386 and the like.

聚醯胺醯亞胺樹脂之具體例,可列舉東洋紡績(股)製之「Vylomax HR11NN」及「Vylomax HR16NN」。又,聚醯胺醯亞胺樹脂之具體例,可列舉日立化成工業(股)製之「KS9100」、「KS9300」(含有聚矽氧烷骨架之聚醯胺醯亞胺)等之改質聚醯胺醯亞胺。 Specific examples of the polyamidoimide resin include "Vylomax HR11NN" and "Vylomax HR16NN" manufactured by Toyobo Corporation. Specific examples of the polyimide resin include modified polymers such as "KS9100" and "KS9300" (polysiloxane imide containing a polysiloxane skeleton) manufactured by Hitachi Chemical Industries, Ltd. Amine amine imine.

聚醚碸樹脂之具體例,可列舉住友化學(股)製之「PES5003P」等。 Specific examples of the polyether fluorene resin include "PES5003P" manufactured by Sumitomo Chemical Co., Ltd. and the like.

聚碸樹脂之具體例子,可列舉Solvay Advanced Polymers(股)製之聚碸「P1700」、「P3500」等。 Specific examples of the polymer resin include polymer "P1700" and "P3500" made by Solvay Advanced Polymers.

其中,熱可塑性樹脂較佳為苯氧基樹脂、聚乙烯縮醛樹脂。因此,較適合之一實施形態中,熱可塑性樹脂包含選自由苯氧基樹脂及聚乙烯縮醛樹脂所成群之1種以上。 Among them, the thermoplastic resin is preferably a phenoxy resin or a polyvinyl acetal resin. Therefore, in a more suitable embodiment, the thermoplastic resin includes one or more members selected from the group consisting of a phenoxy resin and a polyvinyl acetal resin.

樹脂組成物含有熱可塑性樹脂的情形,熱可塑性樹脂的含量,較佳為0.5質量%~15質量%、更佳為0.6質量%~12質量%、又更佳為0.7質量%~10質量%。 When the resin composition contains a thermoplastic resin, the content of the thermoplastic resin is preferably 0.5% to 15% by mass, more preferably 0.6% to 12% by mass, and still more preferably 0.7% to 10% by mass.

<(G)硬化促進劑> <(G) Hardening accelerator>

本發明之樹脂組成物也可再含有(G)硬化促進劑。 The resin composition of the present invention may further contain (G) a hardening accelerator.

硬化促進劑可列舉例如磷系硬化促進劑、胺系硬化促進劑、咪唑系硬化促進劑、胍系硬化促進劑、金屬系硬化促進劑、有機過氧化物系硬化促進劑等,較佳為 磷系硬化促進劑、胺系硬化促進劑、咪唑系硬化促進劑、金屬系硬化促進劑,更佳為胺系硬化促進劑、咪唑系硬化促進劑、金屬系硬化促進劑。硬化促進劑可1種單獨使用,亦可組合2種以上使用。 Examples of the hardening accelerator include a phosphorus-based hardening accelerator, an amine-based hardening accelerator, an imidazole-based hardening accelerator, a guanidine-based hardening accelerator, a metal-based hardening accelerator, and an organic peroxide-based hardening accelerator. Phosphorus-based hardening accelerator, amine-based hardening accelerator, imidazole-based hardening accelerator, and metal-based hardening accelerator, more preferably amine-based hardening accelerator, imidazole-based hardening accelerator, and metal-based hardening accelerator. A hardening accelerator may be used individually by 1 type, and may be used in combination of 2 or more type.

磷系硬化促進劑可列舉例如三苯基膦、鏻硼酸氯化合物、四苯基鏻四苯基硼酸鹽、n-丁基鏻四苯基硼酸鹽、四丁基鏻癸酸鹽、(4-甲基苯基)三苯基鏻硫代氰酸鹽、四苯基鏻硫代氰酸鹽、丁基三苯基鏻硫代氰酸鹽等,較佳為三苯基膦、四丁基鏻癸酸鹽。 Examples of the phosphorus-based hardening accelerator include triphenylphosphine, osmium borate chloride compound, tetraphenyl osmium tetraphenyl borate, n-butyl osmium tetraphenyl borate, tetrabutyl osmium decanoate, (4- (Methylphenyl) triphenylphosphonium thiocyanate, tetraphenylphosphonium thiocyanate, butyltriphenylphosphonium thiocyanate, etc., preferably triphenylphosphine, tetrabutylphosphonium Decanoate.

胺系硬化促進劑可列舉例如三乙胺、三丁胺等之三烷胺;4-二甲基胺基吡啶(DMAP)、苄基二甲胺、2,4,6-參(二甲基胺基甲基)酚、1,8-二氮雜雙環(5,4,0)-十一碳烯等,較佳為4-二甲基胺基吡啶、1,8-二氮雜雙環(5,4,0)-十一碳烯。 Examples of the amine-based hardening accelerator include trialkylamines such as triethylamine and tributylamine; 4-dimethylaminopyridine (DMAP), benzyldimethylamine, 2,4,6-ginsane (dimethyl Aminomethyl) phenol, 1,8-diazabicyclo (5,4,0) -undecene, etc., preferably 4-dimethylaminopyridine, 1,8-diazabicyclo ( 5,4,0) -undecene.

咪唑系硬化促進劑,可列舉例如2-甲基咪唑、2-十一烷基咪唑、2-十七烷基咪唑、1,2-二甲基咪唑、2-乙基-4-甲基咪唑、1,2-二甲基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、2-苯基-4-甲基咪唑、1-苄基-2-甲基咪唑、1-苄基-2-苯基咪唑、1-氰基乙基-2-甲基咪唑、1-氰基乙基-2-十一烷基咪唑、1-氰基乙基-2-乙基-4-甲基咪唑、1-氰基乙基-2-苯基咪唑、1-氰基乙基-2-十一烷基咪唑鎓偏苯三甲酸鹽、1-氰基乙基-2-苯基咪唑鎓偏苯三甲酸鹽、2,4-二胺基-6-〔2’-甲基咪唑基-(1’)〕-乙基-s-三嗪、2,4-二胺基-6-〔2’-十一烷基咪唑基-(1’)〕-乙基-s-三 嗪、2,4-二胺基-6-〔2’-乙基-4’-甲基咪唑基-(1’)〕-乙基-s-三嗪、2,4-二胺基-6-〔2’-甲基咪唑基-(1’)〕-乙基-s-三嗪異三聚氰酸加成物、2-苯基咪唑異三聚氰酸加成物、2-苯基-4,5-二羥基甲基咪唑、2-苯基-4-甲基-5-羥基甲基咪唑、2,3-二氫-1H-吡咯并〔1,2-a〕苯并咪唑、1-十二烷基-2-甲基-3-苄基咪唑鎓氯化物、2-甲基咪唑啉、2-苯基咪唑啉等之咪唑化合物及咪唑化合物與環氧樹脂之加合物,較佳為2-乙基-4-甲基咪唑、1-苄基-2-苯基咪唑。 Examples of the imidazole-based hardening accelerator include 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 1,2-dimethylimidazole, and 2-ethyl-4-methylimidazole. , 1,2-dimethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1 -Benzyl-2-phenylimidazole, 1-cyanoethyl-2-methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-ethyl- 4-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-undecylimidazolium trimellitate, 1-cyanoethyl-2-benzene Imidazolium trimellitate, 2,4-diamino-6- [2'-methylimidazolyl- (1 ')]-ethyl-s-triazine, 2,4-diamino- 6- [2'-undecylimidazolyl- (1 ')]-ethyl-s-tri Azine, 2,4-diamino-6- [2'-ethyl-4'-methylimidazolyl- (1 ')]-ethyl-s-triazine, 2,4-diamino-6 -[2'-methylimidazolyl- (1 ')]-ethyl-s-triazine isotricyanic acid adduct, 2-phenylimidazole isotricyanic acid adduct, 2-phenyl -4,5-dihydroxymethylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H-pyrrolo [1,2-a] benzimidazole, 1-dodecyl-2-methyl-3-benzylimidazolium chloride, 2-methylimidazoline, 2-phenylimidazoline and the like, and adducts of imidazole compounds and epoxy resins, Preferred are 2-ethyl-4-methylimidazole and 1-benzyl-2-phenylimidazole.

咪唑系硬化促進劑,亦可使用市售品,可列舉例如三菱化學(股)製之「P200-H50」等。 The imidazole-based hardening accelerator may be a commercially available product, and examples thereof include "P200-H50" manufactured by Mitsubishi Chemical Corporation.

胍系硬化促進劑,可列舉例如雙氰胺、1-甲基胍、1-乙基胍、1-環己基胍、1-苯基胍、1-(o-甲苯基)胍、二甲基胍、二苯基胍、三甲基胍、四甲基胍、五甲基胍、1,5,7-三氮雜雙環〔4.4.0〕癸-5-烯、7-甲基-1,5,7-三氮雜雙環〔4.4.0〕癸-5-烯、1-甲基雙胍、1-乙基雙胍、1-n-丁基雙胍、1-n-十八烷基雙胍、1,1-二甲基雙胍、1,1-二乙基雙胍、1-環己基雙胍、1-烯丙基雙胍、1-苯基雙胍、1-(o-甲苯基)雙胍等,較佳為雙氰胺、1,5,7-三氮雜雙環〔4.4.0〕癸-5-烯。 Examples of guanidine-based hardening accelerators include dicyandiamide, 1-methylguanidine, 1-ethylguanidine, 1-cyclohexylguanidine, 1-phenylguanidine, 1- (o-tolyl) guanidine, and dimethyl. Guanidine, diphenylguanidine, trimethylguanidine, tetramethylguanidine, pentamethylguanidine, 1,5,7-triazabicyclo [4.4.0] dec-5-ene, 7-methyl-1, 5,7-triazabicyclo [4.4.0] dec-5-ene, 1-methyl biguanide, 1-ethyl biguanide, 1-n-butyl biguanide, 1-n-octadecyl biguanide, 1 1,1-dimethyl biguanide, 1,1-diethyl biguanide, 1-cyclohexyl biguanide, 1-allyl biguanide, 1-phenyl biguanide, 1- (o-tolyl) biguanide, etc., preferably Dicyandiamide, 1,5,7-triazabicyclo [4.4.0] dec-5-ene.

金屬系硬化促進劑,可列舉例如鈷、銅、鋅、鐵、鎳、錳、錫等之金屬之有機金屬錯合物或有機金屬鹽。有機金屬錯合物之具體例,可列舉乙醯丙酮鈷(II)、乙醯丙酮鈷(III)等之有機鈷錯合物、乙醯丙酮銅(II)等之有機銅錯合物、乙醯丙酮鋅(II)等之有機 鋅錯合物、乙醯丙酮鐵(III)等之有機鐵錯合物、乙醯丙酮鎳(II)等之有機鎳錯合物、乙醯丙酮錳(II)等之有機錳錯合物等。有機金屬鹽可列舉例如辛酸鋅(Zinc octoate)、辛酸錫、萘烷酸鋅、萘烷酸鈷、硬脂酸錫、硬脂酸鋅等。 Examples of the metal-based hardening accelerator include organometallic complexes or organometallic salts of metals such as cobalt, copper, zinc, iron, nickel, manganese, and tin. Specific examples of the organometallic complex include organic cobalt complexes such as cobalt (II) acetoacetone, cobalt (III) acetoacetone, and copper complexes of copper (II) acetonate, etc.有机 Organic zinc (II) acetone Zinc complexes, organic iron complexes such as acetoacetate iron (III), organic nickel complexes such as acetoacetone nickel (II), organic manganese complexes such as acetoacetate manganese (II), etc. . Examples of the organic metal salt include zinc octoate, tin octoate, zinc decalinate, cobalt decalinate, tin stearate, and zinc stearate.

有機過氧化物系硬化促進劑,可列舉例如二枯基過氧化物、環己酮過氧化物、tert-丁基過氧苯甲酸酯、甲基乙基酮過氧化物、二枯基過氧化物、tert-丁基枯基過氧化物、二-tert-丁基過氧化物、二異丙基苯過氧化氫、異丙苯過氧化氫(cumene hydroperoxide)、tert-丁基過氧化氫等。有機過氧化物系硬化促進劑,可使用市售品,可列舉例如日油公司製之「Percumyl D」等。 Examples of the organic peroxide-based hardening accelerator include dicumyl peroxide, cyclohexanone peroxide, tert-butylperoxybenzoate, methyl ethyl ketone peroxide, and dicumyl peroxide. Oxides, tert-butylcumyl peroxide, di-tert-butyl peroxide, diisopropylbenzene hydrogen peroxide, cumene hydroperoxide, tert-butylhydroperoxide Wait. As the organic peroxide-based hardening accelerator, a commercially available product can be used, and examples thereof include "Percumyl D" manufactured by Nippon Oil Corporation.

樹脂組成物中之硬化促進劑的含量,無特別限定,以環氧樹脂與硬化劑之不揮發成分為100質量%時,較佳為0.01質量%~5質量%。 The content of the hardening accelerator in the resin composition is not particularly limited. When the nonvolatile content of the epoxy resin and the hardener is 100% by mass, it is preferably 0.01% by mass to 5% by mass.

<(H)難燃劑> <(H) flame retardant>

本發明之樹脂組成物,亦可再含有(H)難燃劑。難燃劑可列舉例如有機磷系難燃劑、含有有機系氮之磷化合物、氮化合物、金屬氫氧化物等。難燃劑可1種單獨使用、或可併用2種以上。 The resin composition of the present invention may further contain (H) a flame retardant. Examples of the flame retardant include an organic phosphorus-based flame retardant, an organic nitrogen-containing phosphorus compound, a nitrogen compound, and a metal hydroxide. The flame retardant can be used alone or in combination of two or more.

難燃劑亦可使用市售品,可列舉例如三光(股)製之「HCA-HQ」、大八化學工業(股)製之「PX-200」等。 Commercially available flame retardants can also be used, and examples thereof include "HCA-HQ" manufactured by Sanko Co., Ltd., and "PX-200" manufactured by Daha Chemical Industry Co., Ltd., and the like.

樹脂組成物含有難燃劑時,難燃劑的含量並無特別限定,較佳為0.5質量%~20質量%,更佳為0.5質量%~15質量%,又更佳為0.5質量%~10質量%。 When the resin composition contains a flame retardant, the content of the flame retardant is not particularly limited, but is preferably 0.5% by mass to 20% by mass, more preferably 0.5% by mass to 15% by mass, and still more preferably 0.5% by mass to 10%. quality%.

<(I)其他的填充材> <(I) Other fillers>

樹脂組成物從提高延伸的觀點,亦可含有(D)成分及(E)成分以外之(I)其他的填充材。(I)其他的填充材可使用形成印刷電路板之絕緣層時可使用之任意的填充材,可列舉例如橡膠粒子、聚醯胺微粒子、矽氧粒子等。 The resin composition may contain (I) other fillers other than (D) component and (E) component from the viewpoint of improving elongation. (I) Any other filler can be used as the filler for forming an insulating layer of a printed circuit board, and examples thereof include rubber particles, polyamide fine particles, and silica particles.

橡膠粒子亦可使用市售品,可列舉例如陶氏化學日本(股)製之「EXL2655」、aica工業(股)製之「AC3816N」等。 Commercially available rubber particles can also be used, and examples thereof include "EXL2655" manufactured by Dow Chemical Japan Ltd. and "AC3816N" manufactured by Aica Industrial Co., Ltd.

樹脂組成物含有(I)成分的情形,其含量,較佳為0.1質量%~20質量%,更佳為0.2質量%~10質量%,又更佳為0.3質量%~5質量%,或0.5質量%~3質量%。 When the resin composition contains the (I) component, the content is preferably 0.1% to 20% by mass, more preferably 0.2% to 10% by mass, and even more preferably 0.3% to 5% by mass, or 0.5%. Mass% ~ 3mass%.

<(J)任意之添加劑> <(J) any additive>

樹脂組成物必要時可再含有其他的添加劑,此其他的添加劑,可列舉例如有機銅化合物、有機鋅化合物及有機鈷化合物等之有機金屬化合物、及增黏劑、消泡劑、平坦劑、密著性賦予劑、及著色劑等之樹脂添加劑等。 The resin composition may further contain other additives as necessary. Examples of the other additives include organometallic compounds such as organic copper compounds, organic zinc compounds, and organic cobalt compounds, and thickeners, defoamers, flatteners, and densers. Resin additives such as color imparting agents and coloring agents.

又,樹脂組成物從製造可撓性的印刷電路板的觀點,可再含有分子內具有聚丁二烯結構、胺基甲酸酯 結構、醯亞胺結構、及分子末端具有酚結構的聚醯亞胺樹脂。該聚醯亞胺之詳細,可參酌國際公開第2008/153208號之記載,此內容被納入本說明書中。 Further, the resin composition may further contain a polybutadiene structure and a urethane from the viewpoint of manufacturing a flexible printed circuit board. Structure, fluorene imine structure, and polyfluorene imine resin having a phenol structure at the molecular end. For details of the polyimide, refer to the description of International Publication No. 2008/153208, which is incorporated into the present specification.

本發明之樹脂組成物,也可帶來比介電率低的硬化物。使本發明之樹脂組成物硬化而成之硬化物之在測量頻率5.8GHz下的比介電率,較佳為3.0以下,更佳為2.98以下,又更佳為2.96以下。該比介電率之下限,無特別限定,通常可為2.0以上、2.2以上等。本發明之樹脂組成物,如此可帶來比介電率低的硬化物,故可明顯有助於絕緣層之薄層化。硬化物之比介電率,可依據後述「1.比介電率之測量」所記載的方法進行測量。 The resin composition of the present invention can also bring a cured product having a lower specific dielectric constant. The specific permittivity of the cured product obtained by curing the resin composition of the present invention at a measurement frequency of 5.8 GHz is preferably 3.0 or less, more preferably 2.98 or less, and even more preferably 2.96 or less. The lower limit of the specific permittivity is not particularly limited, but may generally be 2.0 or more, 2.2 or more. In this way, the resin composition of the present invention can bring about a hardened product having a lower specific dielectric constant, and thus can significantly contribute to the thinning of the insulating layer. The specific permittivity of the hardened material can be measured according to the method described in "1. Measurement of specific permittivity" described later.

本發明之樹脂組成物,也可帶來熱膨脹率低的硬化物。使本發明之樹脂組成物硬化而成之硬化物之由25℃至150℃之平均線熱膨脹率,較佳為55ppm/℃以下,更佳為50ppm/℃以下,又更佳為48ppm/℃以下、46ppm/℃以下、或45ppm/℃以下。該平均線熱膨脹率之下限,無特別限定,通常可為10ppm/℃以上、15ppm/℃以上等。硬化物之平均線熱膨脹率,可依據後述「2.平均線熱膨脹率之評價」所記載的方法進行測量。 The resin composition of the present invention can also bring a cured product with a low thermal expansion coefficient. The average linear thermal expansion coefficient of the cured product obtained by curing the resin composition of the present invention from 25 ° C to 150 ° C is preferably 55 ppm / ° C or lower, more preferably 50 ppm / ° C or lower, and even more preferably 48 ppm / ° C or lower. , 46 ppm / ° C or lower, or 45 ppm / ° C or lower. The lower limit of the average linear thermal expansion coefficient is not particularly limited, and may generally be 10 ppm / ° C or higher, 15 ppm / ° C or higher, and the like. The average linear thermal expansion coefficient of the hardened material can be measured according to the method described in "2. Evaluation of the average linear thermal expansion coefficient" described later.

本發明之樹脂組成物,適合作為形成印刷電路板之絕緣層用之樹脂組成物(印刷電路板之絕緣層形成用樹脂組成物)使用。其中,藉由增層方式製造印刷電路板時,適合作為形成絕緣層用之樹脂組成物(印刷電路板之增層絕緣層用樹脂組成物)使用。藉由使用本發明之樹 脂組成物,形成印刷電路板之絕緣層,可實現比介電率低,與導體層之密著性優異之薄層的絕緣層。 The resin composition of the present invention is suitably used as a resin composition for forming an insulating layer of a printed circuit board (resin composition for forming an insulating layer of a printed circuit board). Among them, when a printed circuit board is manufactured by a build-up method, it is suitable as a resin composition for forming an insulating layer (a resin composition for a build-up insulating layer of a printed circuit board). By using the tree of the invention The grease composition forms the insulating layer of the printed circuit board, and can realize a thin insulating layer having a low specific permittivity and excellent adhesion to the conductor layer.

〔薄片狀層合材料〕 [Laminated material]

本發明之樹脂組成物,也可以清漆狀態塗佈使用,但是工業上,一般以含有該樹脂組成物之薄片狀層合材料的形態使用為佳。 The resin composition of the present invention can also be applied by application in a varnish state, but it is generally preferred to use it in the form of a sheet-like laminated material containing the resin composition in industry.

本發明之薄片狀層合材料,包含本發明之樹脂組成物。本發明中,薄片狀層合材料,較佳為以下所示之樹脂薄片、預浸體。 The sheet-like laminated material of the present invention contains the resin composition of the present invention. In the present invention, the sheet-like laminated material is preferably a resin sheet or a prepreg shown below.

一實施形態中,樹脂薄片係包含支撐體及與該支撐體接合之樹脂組成物層而成,樹脂組成物層為藉由本發明之樹脂組成物而形成。 In one embodiment, the resin sheet includes a support and a resin composition layer bonded to the support, and the resin composition layer is formed by the resin composition of the present invention.

樹脂組成物層之厚度,較佳為30μm以下,更佳為25μm以下,又更佳為20μm以下。樹脂組成物層之厚度的下限,無特別限定,通常可為1μm以上、1.5μm以上、2μm以上等。 The thickness of the resin composition layer is preferably 30 μm or less, more preferably 25 μm or less, and still more preferably 20 μm or less. The lower limit of the thickness of the resin composition layer is not particularly limited, and may generally be 1 μm or more, 1.5 μm or more, 2 μm or more, and the like.

支撐體可列舉例如由塑膠材料所成之薄膜、金屬箔、脫模紙,較佳為由塑膠材料所成之薄膜、金屬箔。 Examples of the support include a film made of a plastic material, a metal foil, and a release paper, and preferably a film made of a plastic material and a metal foil.

支撐體使用由塑膠材料所成之薄膜的情形,塑膠材料可列舉例如聚對苯二甲酸乙二酯(以下有時簡稱為「PET」)、聚萘二甲酸乙二酯(以下有時簡稱為「PEN」)等之聚酯、聚碳酸酯(以下有時簡稱為 「PC」)、聚甲基丙烯酸甲酯(PMMA)等之丙烯酸、環狀聚烯烴、三乙醯基纖維素(TAC)、聚醚硫化物(PES)、聚醚酮、聚醯亞胺等。其中,較佳為聚對苯二甲酸乙二酯、聚萘二甲酸乙二酯,特佳為廉價之聚對苯二甲酸乙二酯。 When the support uses a thin film made of a plastic material, examples of the plastic material include polyethylene terephthalate (hereinafter sometimes referred to as "PET"), polyethylene naphthalate (hereinafter sometimes referred to as "PET") "PEN") and other polyester, polycarbonate (hereinafter sometimes referred to as "PEN") "PC"), acrylic acid such as polymethylmethacrylate (PMMA), cyclic polyolefins, triethyl cellulose (TAC), polyether sulfide (PES), polyetherketone, polyimide, etc. . Among them, polyethylene terephthalate and polyethylene naphthalate are preferred, and cheap polyethylene terephthalate is particularly preferred.

支撐體使用金屬箔的情形,金屬箔可列舉例如銅箔、鋁箔等,較佳為銅箔。銅箔可使用由銅之單金屬所成之箔,也可使用由銅與其他之金屬(例如錫、鉻、銀、鎂、鎳、鋯、矽、鈦等)之合金所成之箔。 When a metal foil is used for the support, examples of the metal foil include copper foil and aluminum foil, and copper foil is preferred. The copper foil may be a foil made of a single metal of copper, or a foil made of an alloy of copper and other metals (for example, tin, chromium, silver, magnesium, nickel, zirconium, silicon, titanium, etc.).

支撐體可對於與樹脂組成物層接合之面施予霧面處理、電暈處理。 The support may be subjected to a matte treatment or a corona treatment to the surface bonded to the resin composition layer.

又,支撐體可使用在與樹脂組成物層接合之面具有脫模層之附脫模層的支撐體。附脫模層之支撐體的脫模層所使用的脫模劑,可列舉例如選自由醇酸樹脂、聚烯烴樹脂、胺基甲酸酯樹脂、及矽氧樹脂所成群組之1種以上的脫模劑。附脫模層之支撐體可使用市售品,可列舉例如具有以醇酸樹脂系脫模劑為主成分之脫模層的PET薄膜,即Lintec(股)製之「SK-1」、「AL-5」、「AL-7」、東麗(股)製「LumirrorT6AM」等。 As the support, a support with a release layer having a release layer on a surface bonded to the resin composition layer can be used. The release agent used for the release layer of the support body with a release layer includes, for example, one or more members selected from the group consisting of alkyd resin, polyolefin resin, urethane resin, and silicone resin. Release agent. A commercially available product can be used as the support with a release layer, and examples thereof include PET films having a release layer containing an alkyd resin-based release agent as a main component, that is, "SK-1", "SK-1" made by Lintec "AL-5", "AL-7", Toray Co., Ltd. "LumirrorT6AM", etc.

支撐體的厚度雖並未特別限定,但較佳為5μm~75μm的範圍,更佳為10μm~60μm的範圍。又,使用附脫模層之支撐體的情形,附脫模層之支撐體全體的厚度為上述範圍為佳。 Although the thickness of the support is not particularly limited, it is preferably in the range of 5 μm to 75 μm, and more preferably in the range of 10 μm to 60 μm. When a support with a release layer is used, the thickness of the entire support with a release layer is preferably in the above range.

樹脂薄片例如調製將樹脂組成物溶解於有機 溶劑的樹脂清漆,可藉由將此樹脂清漆使用模塗佈機等塗佈於支撐體上,使其乾燥而形成樹脂組成物層來製造。 The resin sheet is prepared by dissolving a resin composition in an organic material, for example. A solvent resin varnish can be produced by applying this resin varnish to a support using a die coater or the like and drying it to form a resin composition layer.

有機溶劑可列舉例如丙酮、甲基乙基酮(MEK)及環己酮等之酮類、乙酸乙酯、乙酸丁酯、溶纖劑乙酸酯、丙二醇單甲醚乙酸酯及卡必醇乙酸酯等之乙酸酯類、溶纖劑及丁基卡必醇等之卡必醇類、甲苯及二甲苯等之芳香族烴類、二甲基甲醯胺、二甲基乙醯胺(DMAc)及N-甲基吡咯烷酮等之醯胺系溶劑等。有機溶劑可1種單獨使用,亦可組合2種以上使用。 Examples of the organic solvent include ketones such as acetone, methyl ethyl ketone (MEK), cyclohexanone, ethyl acetate, butyl acetate, cellosolve acetate, propylene glycol monomethyl ether acetate, and carbitol. Acetic esters such as acetate, cellosolve and carbitol such as butyl carbitol, aromatic hydrocarbons such as toluene and xylene, dimethylformamide, dimethylacetamide ( DMAc) and amine solvents such as N-methylpyrrolidone and the like. The organic solvents may be used singly or in combination of two or more kinds.

乾燥可藉由加熱、吹送熱風等之習知的方法來實施。乾燥條件雖並未特別限定,但樹脂組成物層中之有機溶劑的含量成為10質量%以下,較佳為成為5質量%以下進行乾燥。因樹脂清漆中之有機溶劑的沸點而異,但例如使用包含30質量%~60質量%之有機溶劑的樹脂清漆時,藉由在50℃~150℃下乾燥3分鐘~10分鐘,可形成樹脂組成物層。 Drying can be performed by a conventional method such as heating and blowing hot air. Although the drying conditions are not particularly limited, the content of the organic solvent in the resin composition layer is 10% by mass or less, and preferably 5% by mass or less for drying. It varies depending on the boiling point of the organic solvent in the resin varnish, but when using a resin varnish containing an organic solvent of 30% to 60% by mass, the resin can be formed by drying at 50 ° C to 150 ° C for 3 minutes to 10 minutes. Composition layer.

在樹脂薄片中,在未與樹脂組成物層之支撐體接合的面(亦即,與支撐體相反側的面)中,可進一步層合依照支撐體的保護薄膜。保護薄膜的厚度無特別限定者,例如為1μm~40μm。藉由層合保護薄膜,可防止對樹脂組成物層之表面之塵埃等之附著或傷痕。樹脂薄片可捲繞成捲筒狀來保存。樹脂薄片具有保護薄膜的情形,可藉由剝離保護薄膜來使用。 In the resin sheet, a protective film according to the support may be further laminated on a surface that is not bonded to the support of the resin composition layer (that is, a surface opposite to the support). The thickness of the protective film is not particularly limited, and is, for example, 1 μm to 40 μm. By laminating the protective film, it is possible to prevent dust or the like from adhering to or scratching the surface of the resin composition layer. The resin sheet can be rolled into a roll and stored. When the resin sheet has a protective film, it can be used by peeling off the protective film.

一實施形態中,預浸體係於薄片狀纖維基材 含浸本發明之樹脂組成物而形成。 In one embodiment, the prepreg is applied to a sheet-like fiber substrate. It is formed by impregnating the resin composition of the present invention.

預浸體所使用之薄片狀纖維基材並未特別限定,可使用作為玻璃布、芳香族聚醯胺不織布、液晶聚合物不織布等之預浸體用基材常用者。從印刷電路板之薄型化的觀點,薄片狀纖維基材的厚度,較佳為900μm以下,更佳為800μm以下,又更佳為700μm以下,又再更佳為600μm以下。尤其是由於本發明可將鍍敷潛入深度壓低,故較佳為30μm以下,更佳為20μm以下,又更佳為10μm以下。薄片狀纖維基材的厚度之下限無特別限定,通常可為1μm以上、1.5μm以上、2μm以上等。 The sheet-like fibrous substrate used for the prepreg is not particularly limited, and those commonly used as a substrate for prepregs such as glass cloth, aromatic polyamide nonwoven fabric, and liquid crystal polymer nonwoven fabric can be used. From the viewpoint of reducing the thickness of the printed circuit board, the thickness of the sheet-like fiber substrate is preferably 900 μm or less, more preferably 800 μm or less, still more preferably 700 μm or less, and still more preferably 600 μm or less. In particular, since the present invention can reduce the plating penetration depth, it is preferably 30 μm or less, more preferably 20 μm or less, and still more preferably 10 μm or less. The lower limit of the thickness of the sheet-like fibrous substrate is not particularly limited, and may generally be 1 μm or more, 1.5 μm or more, 2 μm or more, and the like.

預浸體可藉由熱熔法、溶劑法等之習知方法來製造。 The prepreg can be produced by a known method such as a hot melt method and a solvent method.

預浸體的厚度可與上述樹脂薄片中之樹脂組成物層相同的範圍。 The thickness of the prepreg may be in the same range as the resin composition layer in the resin sheet.

薄片狀層合材料中之樹脂組成物層(預浸體的情形時,薄片狀纖維基材所含浸的樹脂組成物)之最低熔融黏度,從得到良好電路埋入性的觀點,較佳為12000poise(1200Pa.s)以下,更佳為10000poise(1000Pa.s)以下,又更佳為8000poise(800Pa.s)以下、5000poise(500Pa.s)以下、或4000poise(400Pa.s)以下。該最低熔融黏度之下限,從即使樹脂組成物層較薄,厚度安定維持的觀點,較佳為100poise(10Pa.s)以上,更佳為200poise(20Pa.s)以上,又更佳為250poise(25Pa.s)以上。 The minimum melt viscosity of the resin composition layer (in the case of a prepreg, the resin composition impregnated in the sheet-like fibrous substrate) in the sheet-like laminated material is preferably 12000 poise from the viewpoint of obtaining good circuit embedding properties. (1200Pa.s) or less, more preferably 10000poise (1000Pa.s) or less, and more preferably 8000poise (800Pa.s) or less, 5000poise (500Pa.s) or less, or 4000poise (400Pa.s) or less. The lower limit of the minimum melt viscosity is preferably 100 poise (10 Pa.s) or more, more preferably 200 poise (20 Pa.s) or more, and more preferably 250 poise (from the viewpoint of maintaining a stable thickness even if the resin composition layer is thin. 25Pa.s) or more.

樹脂組成物層之最低熔融黏度係指樹脂組成物層之樹脂產生熔融時,樹脂組成物層所呈現之最低的黏度。詳細而言,以一定之昇溫速度加熱樹脂組成物層使樹脂熔融時,初期階段熔融黏度伴隨溫度上昇而下降,然後,當超過某種程度時,與溫度上昇一起熔融黏度上升。最低熔融黏度係指這種極小點的熔融黏度。樹脂組成物層之最低熔融黏度,可使用動態黏彈性法測定,例如可依後述3.樹脂組成物層之最低熔融黏度的測定所記載的方法測定。 The minimum melt viscosity of the resin composition layer refers to the lowest viscosity exhibited by the resin composition layer when the resin of the resin composition layer is melted. Specifically, when the resin composition layer is heated at a constant temperature increase rate to melt the resin, the melt viscosity decreases with an increase in temperature in the initial stage, and then, when it exceeds a certain level, the melt viscosity rises with the temperature increase. The lowest melt viscosity refers to the melt viscosity of this minimum point. The minimum melt viscosity of the resin composition layer can be measured using a dynamic viscoelasticity method, for example, it can be measured according to the method described in 3. Measurement of the minimum melt viscosity of the resin composition layer described later.

〔印刷電路板〕 〔A printed circuit board〕

本發明之印刷電路板包含藉由本發明之樹脂組成物之硬化物而形成的絕緣層。 The printed circuit board of the present invention includes an insulating layer formed of a cured product of the resin composition of the present invention.

本發明之印刷電路板,例如可藉由使用上述樹脂薄片,包含下述(I)及(II)之步驟的方法來製造。 The printed circuit board of the present invention can be produced, for example, by using the above-mentioned resin sheet and a method including the following steps (I) and (II).

(I)在內層基板上,使該樹脂薄片之樹脂組成物層與內層基板接合,以進行層合樹脂薄片的步驟, (II)將樹脂組成物層熱硬化形成絕緣層的步驟。 (I) bonding the resin composition layer of the resin sheet to the inner layer substrate on the inner layer substrate to perform the step of laminating the resin sheet, (II) A step of thermally curing the resin composition layer to form an insulating layer.

步驟(I)所使用的「內層基板」主要係指主玻璃環氧基板、金屬基板、陶瓷基板、聚酯基板、聚醯亞胺基板、BT樹脂基板、熱硬化型聚苯醚基板等之基板、PTFE基板、LCP(液晶聚合物)基板、或該基板之單面或兩面形成有經圖型加工之導體層(電路)的電路基板。又,製造印刷電路板時,此外,應形成絕緣層及/或導體 層之中間製造物的內層電路基板也包含於本發明的「內層基板」。印刷電路板為零件內藏電路板的情形,使用內藏零件的內層基板即可(導體層也稱為配線層)。 The "inner substrate" used in step (I) mainly refers to the main glass epoxy substrate, metal substrate, ceramic substrate, polyester substrate, polyimide substrate, BT resin substrate, and thermosetting polyphenylene ether substrate. A substrate, a PTFE substrate, an LCP (liquid crystal polymer) substrate, or a circuit substrate on which one or both sides of the substrate is formed with a patterned conductive layer (circuit). In addition, when manufacturing a printed circuit board, an insulating layer and / or a conductor should be formed. The inner-layer circuit substrate of the intermediate product of the layers is also included in the "inner-layer substrate" of the present invention. When the printed circuit board is a component-embedded circuit board, an inner-layer substrate (conductor layer is also referred to as a wiring layer) may be used.

內層基板與樹脂薄片之層合,例如可藉由自支撐體側將樹脂薄片加熱壓接於內層基板來進行。將樹脂薄片加熱壓接於內層基板的構件(以下亦稱為「加熱壓接構件」),可列舉例如經加熱之金屬板(SUS鏡板等)或金屬滾筒(SUS滾筒)等。又,並非將加熱壓接構件直接壓製(press)於樹脂薄片上,而是經由耐熱橡膠等之彈性材,使樹脂薄片充分追隨於內層基板之表面凹凸來進行壓製為佳。 The lamination of the inner substrate and the resin sheet can be performed, for example, by heating and pressure-bonding the resin sheet to the inner substrate from the side of the support. A member (hereinafter, also referred to as a “heat-compression-bonding member”) that heat-compresses a resin sheet to an inner layer substrate includes, for example, a heated metal plate (SUS mirror plate, etc.) or a metal roller (SUS roller). In addition, instead of pressing the heat and pressure bonding member directly on the resin sheet, it is preferable to press the resin sheet to sufficiently follow the unevenness of the surface of the inner substrate via an elastic material such as heat-resistant rubber.

內層基板與樹脂薄片之層合,可藉由真空層合法實施。真空層合法中,加熱壓接溫度,較佳為60℃~160℃,更佳為80℃~140℃之範圍,加熱壓接壓力,較佳為0.098MPa~1.77MPa,更佳為0.29MPa~1.47MPa之範圍,加熱壓接時間,較佳為20秒鐘~400秒鐘,更佳為30秒鐘~300秒鐘之範圍。層合較佳為在壓力26.7hPa以下的減壓條件下實施。 The lamination of the inner substrate and the resin sheet can be carried out by a vacuum layer method. In the vacuum layer method, the heating and crimping temperature is preferably 60 ° C to 160 ° C, more preferably in the range of 80 ° C to 140 ° C, and the heating and crimping pressure is preferably 0.098MPa to 1.77MPa, and more preferably 0.29MPa to In the range of 1.47 MPa, the heating and crimping time is preferably in the range of 20 seconds to 400 seconds, and more preferably in the range of 30 seconds to 300 seconds. The lamination is preferably performed under a reduced pressure of a pressure of 26.7 hPa or less.

層合可藉由市售之真空層合機來進行。市售之真空層合機,可列舉例如(股)名機製作所製之真空加壓式層合機、Nichigo-Morton(股)製之真空塗佈機等。 Lamination can be performed by a commercially available vacuum laminator. Commercially available vacuum laminators include, for example, a vacuum pressurized laminator manufactured by Nagaku Seisakusho, and a vacuum coater manufactured by Nichigo-Morton.

層合後,亦可藉由於常壓下(大氣壓下),例如將加熱壓接構件自支撐體側進行壓製,經層合後之樹脂薄片進行平滑化處理。平滑化處理之壓製條件,可為與 上述層合之加熱壓接條件相同的條件。平滑化處理可藉由市售之層合機進行。又,層合與平滑化處理,亦可使用上述市售之真空層合機連續地進行。 After lamination, the resin sheet after lamination can also be smoothed by pressing under pressure (atmospheric pressure), for example, by pressing the heat-pressing member from the support side. The smoothing conditions can be The conditions of the thermocompression bonding of the above-mentioned lamination are the same. The smoothing treatment can be performed by a commercially available laminator. The lamination and smoothing treatment can also be performed continuously using the commercially available vacuum laminator.

支撐體可於步驟(I)與步驟(II)之間去除,亦可於步驟(II)之後去除。 The support can be removed between step (I) and step (II), and can also be removed after step (II).

步驟(II)中,使樹脂組成物層熱硬化而形成絕緣層。 In step (II), the resin composition layer is thermally cured to form an insulating layer.

樹脂組成物層之熱硬化條件無特別限定,可使用形成印刷配線板之絕緣層時通常採用的條件。 The conditions for the thermosetting of the resin composition layer are not particularly limited, and conditions generally used when forming an insulating layer of a printed wiring board can be used.

例如,樹脂組成物層之熱硬化條件,也因樹脂組成物之種類等而異,但是硬化溫度可為120℃~240℃之範圍(較佳為150℃~220℃之範圍、更佳為170℃~200℃之範圍),硬化時間可為5分鐘~120分鐘之範圍(較佳為10分鐘~100分鐘、更佳為15分鐘~90分鐘)。 For example, the thermal curing conditions of the resin composition layer also vary depending on the type of the resin composition, but the curing temperature may be in the range of 120 ° C to 240 ° C (preferably in the range of 150 ° C to 220 ° C, more preferably 170). ℃ ~ 200 ℃), the hardening time can be in the range of 5 minutes to 120 minutes (preferably 10 minutes to 100 minutes, more preferably 15 minutes to 90 minutes).

使樹脂組成物層熱硬化之前,也可將樹脂組成物層以低於硬化溫度的溫度進行預備加熱。例如,使樹脂組成物層熱硬化之前,可以50℃以上、未達120℃(較佳為60℃以上110℃以下、更佳為70℃以上100℃以下)的溫度,將樹脂組成物層預備加熱5分鐘以上(較佳為5分鐘~150分鐘、更佳為15分鐘~120分鐘)。 Before the resin composition layer is thermally hardened, the resin composition layer may be preheated at a temperature lower than the curing temperature. For example, before the resin composition layer is thermally cured, the resin composition layer may be prepared at a temperature of 50 ° C or higher and less than 120 ° C (preferably 60 ° C or higher and 110 ° C or lower, more preferably 70 ° C or higher and 100 ° C or lower). Heating for 5 minutes or more (preferably 5 minutes to 150 minutes, more preferably 15 minutes to 120 minutes).

於製造印刷電路板時,亦可進一步實施(III)於絕緣層開孔的步驟、(IV)將絕緣層粗化處理的步驟、(V)形成導體層的步驟。此等之步驟(III)至(V)可依照印刷電路板製造所用之所屬技術領域中具有 通常知識者公知的各種方法來實施。又,於步驟(II)之後去除支撐體時,該支撐體之去除,可於步驟(II)與步驟(III)之間、步驟(III)與步驟(IV)之間、或步驟(IV)與步驟(V)之間實施。 When manufacturing a printed circuit board, (III) a step of making holes in the insulating layer, (IV) a step of roughening the insulating layer, and (V) a step of forming a conductor layer may be further performed. These steps (III) to (V) can be performed in accordance with the technical field used in the manufacture of printed circuit boards. It is usually carried out by various methods known to a person skilled in the art. In addition, when the support is removed after step (II), the support may be removed between step (II) and step (III), between step (III) and step (IV), or step (IV). And step (V).

步驟(III)為於絕緣層開孔的步驟,藉此可於絕緣層形成導通孔(via hole)、通孔(through hole)等之孔。步驟(III)可依照絕緣層之形成所使用的樹脂組成物之組成等,例如使用鑽頭、雷射、電漿等來實施。孔之尺寸或形狀,可依印刷電路板之設計來適當決定。 Step (III) is a step of making a hole in the insulating layer, so that a via hole, a through hole, etc. can be formed in the insulating layer. Step (III) can be performed according to the composition of the resin composition used for forming the insulating layer, for example, using a drill, a laser, a plasma, or the like. The size or shape of the hole can be appropriately determined according to the design of the printed circuit board.

步驟(IV)為將絕緣層粗化處理的步驟。粗化處理之順序、條件無特別限定,可採用形成印刷電路板之絕緣層時通常所使用的公知順序、條件。例如,可依序實施利用膨潤液之膨潤處理、以氧化劑之粗化處理、以中和液之中和處理,將絕緣層進行粗化處理。膨潤液無特別限定,可列舉鹼溶液、界面活性劑溶液等,較佳為鹼溶液,該鹼溶液更佳為氫氧化鈉溶液、氫氧化鉀溶液。市售之膨潤液,可列舉例如Atoteeh Japan(股)製之「Swelling Dip Securiganth P」、「Swelling Dip Securiganth SBU」等。藉由膨潤液之膨潤處理,並無特別限定,例如可藉由將絕緣層於30℃~90℃之膨潤液中浸漬1分鐘~20分鐘來進行。從將絕緣層之樹脂的膨潤抑制在適度水準的觀點,較佳為使硬化體於40℃~80℃之膨潤液中浸漬5分鐘~15分鐘。氧化劑(粗化液)並無特別限定,可列舉例如於氫氧化鈉之水溶液中溶解有過錳酸鉀或 過錳酸鈉的鹼性過錳酸溶液。藉由鹼性過錳酸溶液等之氧化劑的粗化處理,較佳為將絕緣層於加熱至60℃~80℃之氧化劑溶液中浸漬10分鐘~30分鐘來進行。又,鹼性過錳酸溶液中之過錳酸鹽的濃度較佳為5質量%~10質量%。市售之氧化劑可列舉例如Atotech Japan(股)製之「Concentrate Compact CP」、「Concentrate Compact P」、「Dosing Solution Securiganth P」等之鹼性過錳酸溶液。又,中和液較佳為酸性之水溶液,市售品可列舉例如Atotech Japan(股)製之「Reduction solution Securiganth P」。以中和液之處理,可藉由將以氧化劑進行了粗化處理的處理面於30℃~80℃之中和液中浸漬5分鐘~30分鐘來進行。由作業性等之觀點,較佳為將以氧化劑進行了粗化處理的對象物,於40℃~70℃之中和液中浸漬5分鐘~20分鐘的方法。 Step (IV) is a step of roughening the insulating layer. The order and conditions of the roughening treatment are not particularly limited, and a known order and conditions generally used when forming an insulating layer of a printed circuit board can be adopted. For example, a swelling treatment using a swelling solution, a roughening treatment with an oxidizing agent, and a neutralization treatment with a neutralizing solution may be sequentially performed to roughen the insulating layer. The swelling liquid is not particularly limited, and examples thereof include an alkali solution and a surfactant solution, and an alkali solution is preferred, and the alkali solution is more preferably a sodium hydroxide solution or a potassium hydroxide solution. Commercially available swelling liquids include, for example, "Swelling Dip Securiganth P" and "Swelling Dip Securiganth SBU" manufactured by Atoteeh Japan. The swelling treatment by the swelling liquid is not particularly limited. For example, it can be performed by immersing the insulating layer in a swelling liquid at 30 ° C to 90 ° C for 1 minute to 20 minutes. From the viewpoint of suppressing the swelling of the resin of the insulating layer to a moderate level, it is preferred that the hardened body is immersed in a swelling liquid at 40 ° C to 80 ° C for 5 minutes to 15 minutes. The oxidant (roughened solution) is not particularly limited, and examples thereof include potassium permanganate dissolved in an aqueous solution of sodium hydroxide or Alkaline permanganate solution of sodium permanganate. The roughening treatment of an oxidant such as an alkaline permanganic acid solution is preferably performed by immersing the insulating layer in an oxidant solution heated to 60 ° C to 80 ° C for 10 minutes to 30 minutes. The concentration of the permanganate in the alkaline permanganic acid solution is preferably 5 to 10% by mass. Examples of commercially available oxidants include alkaline permanganic acid solutions such as "Concentrate Compact CP", "Concentrate Compact P", and "Dosing Solution Securiganth P" manufactured by Atotech Japan. The neutralizing solution is preferably an acidic aqueous solution, and examples of commercially available products include "Reduction solution Securiganth P" manufactured by Atotech Japan. The treatment with the neutralizing solution can be performed by immersing the treated surface roughened with an oxidizing agent in a neutralizing solution at 30 ° C to 80 ° C for 5 to 30 minutes. From the viewpoint of workability and the like, a method of immersing an object subjected to roughening treatment with an oxidizing agent in a neutralization solution at 40 ° C to 70 ° C for 5 to 20 minutes is preferred.

步驟(V)為形成導體層的步驟。 Step (V) is a step of forming a conductor layer.

導體層所使用之導體材料並無特別限定。較適合的實施形態中,導體層含有選自由金、鉑、鈀、銀、銅、鋁、鈷、鉻、鋅、鎳、鈦、鎢、鐵、錫及銦所成群之1種以上的金屬。導體層可為單金屬層亦可為合金層,合金層可列舉例如由選自上述群之2種以上之金屬的合金(例如鎳.鉻合金、銅.鎳合金及銅.鈦合金)所形成之層。其中就導體層形成之泛用性、成本、圖型化之容易性等的觀點,較佳為鉻、鎳、鈦、鋁、鋅、金、鈀、銀或銅之單金屬層;或鎳.鉻合金、銅.鎳合金、銅.鈦合金之合 金層,更佳為鉻、鎳、鈦、鋁、鋅、金、鈀、銀或銅之單金屬層或鎳.鉻合金之合金層,又更佳為銅之單金屬層。 The conductive material used for the conductive layer is not particularly limited. In a more suitable embodiment, the conductor layer contains one or more metals selected from the group consisting of gold, platinum, palladium, silver, copper, aluminum, cobalt, chromium, zinc, nickel, titanium, tungsten, iron, tin, and indium. . The conductor layer may be a single metal layer or an alloy layer. Examples of the alloy layer include an alloy (for example, nickel, chromium alloy, copper, nickel alloy, and copper-titanium alloy) selected from the group consisting of two or more metals. Of layers. Among them, from the viewpoints of versatility, cost, and ease of patterning of the conductor layer, a single metal layer of chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver, or copper is preferred; or nickel. Chrome alloy, copper. Nickel alloy, copper. Titanium alloy A gold layer, more preferably a single metal layer of chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver or copper, or nickel. An alloy layer of a chromium alloy, and more preferably a single metal layer of copper.

導體層可為單層構造、亦可為由不同種類之金屬或合金所成之單金屬層或層合有2層以上之合金層的複層構造。導體層為複層構造時,與絕緣層鄰接之層,較佳為鉻、鋅或鈦之單金屬層,或鎳.鉻合金之合金層。 The conductor layer may have a single-layer structure, a single-metal layer made of different kinds of metals or alloys, or a multi-layer structure in which two or more alloy layers are laminated. When the conductor layer is a multi-layer structure, the layer adjacent to the insulating layer is preferably a single metal layer of chromium, zinc or titanium, or nickel. Alloy layer of chromium alloy.

導體層之厚度,雖亦依所期望之印刷電路板之設計而異,但一般為3μm~35μm,較佳為5μm~30μm。 Although the thickness of the conductor layer also varies depending on the desired design of the printed circuit board, it is generally 3 μm to 35 μm, preferably 5 μm to 30 μm.

一實施形態中,導體層可藉由鍍敷而形成。例如,可藉由半加成法、全加成法等之以往公知的技術,對絕緣層之表面鍍敷,形成具有所期望之配線圖型的導體層。以下,顯示以半加成法形成導體層之例。 In one embodiment, the conductive layer can be formed by plating. For example, a conventionally known technique such as a semi-additive method and a full-additive method can be used to plate the surface of the insulating layer to form a conductive layer having a desired wiring pattern. An example of forming a conductive layer by a semi-additive method is shown below.

首先,於絕緣層之表面,藉由無電電鍍(Electroless plating)形成鍍敷防護層(shield layer)。接著,於形成之鍍敷防護層上,形成對應於所期望之配線圖型,使鍍敷防護層之一部分露出的遮罩圖型。露出之鍍敷防護層上,藉由電鍍形成金屬層後,去除遮罩圖型。然後,藉由蝕刻等而去除不要的鍍敷防護層,可形成具有所期望之配線圖型的導體層。 First, a shield layer is formed on the surface of the insulating layer by electroless plating. Next, on the formed plating protection layer, a mask pattern corresponding to a desired wiring pattern and exposing a part of the plating protection layer is formed. On the exposed plating protection layer, after forming a metal layer by electroplating, the mask pattern is removed. Then, an unnecessary plating protection layer is removed by etching or the like to form a conductor layer having a desired wiring pattern.

使用支撐體為金屬箔之樹脂薄片的情形,利用來自樹脂薄片之金屬箔,可藉由減去性製程或模擬半加成法形成導體層。 When using a resin sheet with a metal foil as a support, a conductor layer can be formed by a subtractive process or a semi-additive method using a metal foil derived from a resin sheet.

本發明之樹脂組成物,即使印刷電路板為零件內藏電路板的情形也可使用。零件內藏電路板,可藉由 習知的方法製造。 The resin composition of the present invention can be used even when the printed circuit board is a built-in circuit board. Built-in circuit board for parts Manufactured by conventional methods.

其他之實施形態中,本發明之印刷電路板,可使用上述預浸體來製造。製造方法基本上,與使用樹脂薄片的情形同樣。 In other embodiments, the printed circuit board of the present invention can be manufactured using the above-mentioned prepreg. The manufacturing method is basically the same as when a resin sheet is used.

藉由本發明之樹脂組成物之硬化物所形成的絕緣層,在粗化處理後之表面粗度低。具體而言,粗化處理後之絕緣層表面的算術平均粗糙度(Ra)及均方根(root mean square)粗糙度(Rq)表示良好的結果。該算術平均粗糙度(Ra),較佳為500nm以下,更佳為450nm以下,又更佳為400nm以下。對於下限無特別限定,可為100nm以上。絕緣層表面之均方根粗糙度(Rq),較佳為600nm以下,更佳為550nm以下,又更佳為530nm以下。對於下限無特別限定,可為100nm以上。算術平均粗糙度(Ra)及均方根粗糙度(Rq)之評價,可依照後述之(算術平均粗糙度(Ra)、均方根粗糙度(Rq)之測量)所記載的方法來測量。 The surface roughness of the insulating layer formed by the hardened product of the resin composition of the present invention after the roughening treatment is low. Specifically, the arithmetic average roughness (Ra) and the root mean square roughness (Rq) of the surface of the insulating layer after the roughening treatment indicate good results. The arithmetic average roughness (Ra) is preferably 500 nm or less, more preferably 450 nm or less, and still more preferably 400 nm or less. The lower limit is not particularly limited, and may be 100 nm or more. The root mean square roughness (Rq) of the surface of the insulating layer is preferably 600 nm or less, more preferably 550 nm or less, and even more preferably 530 nm or less. The lower limit is not particularly limited, and may be 100 nm or more. The evaluation of the arithmetic mean roughness (Ra) and the root mean square roughness (Rq) can be measured according to a method described below (measurement of arithmetic mean roughness (Ra) and root mean square roughness (Rq)).

本發明之印刷電路板,包含藉由本發明之樹脂組成物之硬化物所形成的絕緣層。因此,粗化處理後之絕緣層與導體層之密著性(剝離強度(peel strength),表示良好的結果。該剝離強度較佳為0.3kgf/cm以上,更佳為0.4kgf/cm以上,又更佳為0.45kgf/cm以上。上限無特別限定,可為1.2kgf/cm以下、0.9kgf/cm以下等。本發明即使粗化處理後之絕緣層之算術平均粗糙度(Ra)及均方根粗糙度(Rq)低,也可形成呈現如此高剝離強度的導 體層,故明顯有助於印刷電路板之微細配線化者。剝離強度之評價,可依照後述之(剝離強度之測量)所記載的方法來測量。 The printed circuit board of the present invention includes an insulating layer formed of a cured product of the resin composition of the present invention. Therefore, the adhesion (peel strength) of the insulating layer and the conductor layer after the roughening treatment indicates good results. The peel strength is preferably 0.3 kgf / cm or more, more preferably 0.4 kgf / cm or more, It is more preferably 0.45 kgf / cm or more. The upper limit is not particularly limited, and may be 1.2 kgf / cm or less, 0.9 kgf / cm or less, etc. In the present invention, the arithmetic average roughness (Ra) and uniformity of the insulating layer even after roughening treatment Low square root roughness (Rq) can also form a guide with such high peel strength Body layer, so it is obviously helpful for fine wiring of printed circuit boards. Evaluation of peeling strength can be measured according to the method described in (Measurement of peeling strength) mentioned later.

〔指紋認證感測器〕 [Fingerprint authentication sensor]

本發明之指紋認證感測器1,其特徵係包含藉由本發明之樹脂組成物之硬化物而形成的絕緣層3。以下,參照圖1說明指紋認證感測器1。 The fingerprint authentication sensor 1 of the present invention is characterized by including an insulating layer 3 formed of a cured product of the resin composition of the present invention. Hereinafter, the fingerprint authentication sensor 1 will be described with reference to FIG. 1.

指紋認證感測器1如圖1所示,在印刷電路板2之表面,經由藉由本發明之樹脂組成物之硬化物而形成的絕緣層3,配置金屬電極5,以絕緣被膜4覆蓋絕緣層3之金屬電極5側之面的構成者。 As shown in FIG. 1, the fingerprint authentication sensor 1 is provided with a metal electrode 5 on the surface of the printed circuit board 2 through an insulating layer 3 formed by the hardened material of the resin composition of the present invention, and the insulating layer 4 covers the insulating layer. The constituent of the surface on the side of the metal electrode 3 of 3.

本發明之指紋認證感測器1中,絕緣層3可藉由與上述印刷電路板之絕緣層同樣的方法來形成。 In the fingerprint authentication sensor 1 of the present invention, the insulating layer 3 can be formed by the same method as the insulating layer of the printed circuit board described above.

指紋認證感測器1係直接將手指(無圖示)放在絕緣被膜4之上,檢測該指紋的凹凸者。藉由導體的手指、金屬電極5、絕緣被膜4,形成電容器,因指紋之凹部與凸部至金屬電極5之距離不同,故該距離不同而成為形成之電容器之容量值之差。在此,指紋之凸部係因絕緣被膜4之比介電率決定容量值,但是指紋之凹部,更有空氣層進入,故凸部與凹部之容量值,因距離之不同而變更大。 The fingerprint authentication sensor 1 directly places a finger (not shown) on the insulating film 4 and detects the unevenness of the fingerprint. The capacitor is formed by the fingers of the conductor, the metal electrode 5, and the insulating film 4. Since the distance between the concave portion and the convex portion of the fingerprint to the metal electrode 5 is different, the difference in the distance becomes the difference in the capacitance value of the formed capacitor. Here, the convex part of the fingerprint determines the capacity value due to the specific permittivity of the insulating coating 4, but the concave part of the fingerprint has an air layer to enter, so the capacity value of the convex part and the concave part changes greatly due to the difference in distance.

指紋認證感測器1係利用如上述之公知原理者,且包含使本發明之樹脂組成物硬化所得之比介電率 低,可薄層化的絕緣層3,故可小型化。 The fingerprint authentication sensor 1 uses a known principle as described above and includes a specific permittivity obtained by curing the resin composition of the present invention. The insulating layer 3 can be reduced in thickness and can be miniaturized.

〔半導體裝置〕 [Semiconductor device]

本發明之半導體裝置包含本發明之印刷電路板或本發明之指紋認證感測器。 The semiconductor device of the present invention includes the printed circuit board of the present invention or the fingerprint authentication sensor of the present invention.

半導體裝置可列舉供於電氣製品(例如電腦、手機、數位相機及電視等)及交通工具(例如摩托車、汽車、電車、船舶及飛機等)等之各種半導體裝置。 Examples of the semiconductor device include various semiconductor devices used in electrical products (such as computers, mobile phones, digital cameras, and televisions) and vehicles (such as motorcycles, automobiles, trams, ships, and airplanes).

本發明之半導體裝置可藉由於印刷電路板之導通處實裝零件(半導體晶片)來製造。「導通處」係指「傳達在印刷電路板之電氣信號之處」,該場所可為表面,亦可為經埋入之處皆無妨。又,半導體晶片若為以半導體作為材料之電氣電路元件則無特別限定。 The semiconductor device of the present invention can be manufactured by mounting a component (semiconductor wafer) due to a conductive portion of a printed circuit board. "Continuity" means "a place where electrical signals are transmitted on a printed circuit board". The place may be a surface or an embedded place. The semiconductor wafer is not particularly limited as long as it is an electric circuit element using a semiconductor as a material.

製造本發明之半導體裝置時之半導體晶片的實裝方法,只要是半導體晶片能有效地發揮功能時,即無特別限定,具體而言,可列舉引線接合實裝方法、覆晶實裝方法、以無凸塊增層(BBUL)之實裝方法、以各向異性導電薄膜(ACF)之實裝方法、以非導電性薄膜(NCF)之實裝方法等。在此,「以無凸塊增層(BBUL)之實裝方法」係指「將半導體晶片直接埋入於印刷電路板的凹部,使半導體晶片與印刷電路板上之配線連接的實裝方法」。 The method for mounting a semiconductor wafer when manufacturing the semiconductor device of the present invention is not particularly limited as long as the semiconductor wafer can effectively function, and specifically, a wire bonding mounting method, a flip chip mounting method, A mounting method for a bumpless layer (BBUL), a mounting method using an anisotropic conductive film (ACF), and a mounting method using a non-conductive film (NCF). Here, the "mounting method by bumpless layer (BBUL)" refers to the "mounting method of directly embedding a semiconductor wafer in a recessed portion of a printed circuit board and connecting the semiconductor wafer to the wiring on the printed circuit board." .

〔實施例〕 [Example]

以下,藉由實施例具體說明本發明,但本發明並不限定於此等之實施例。又,在以下記載中,「份」及「%」在無另外明示時,分別表示「質量份」及「質量%」。 Hereinafter, the present invention will be specifically described by examples, but the present invention is not limited to these examples. In addition, in the following description, "part" and "%" show "mass part" and "mass%" respectively unless otherwise stated.

〔實施例1〕 [Example 1]

將液狀雙酚A型環氧樹脂(環氧當量187、三菱化學(股)製「jER828US」)20份、雙二甲苯酚型環氧樹脂(環氧當量190、三菱化學(股)製「YX4000HK」)10份、聯苯基芳烷基型環氧樹脂(環氧當量276、日本化藥(股)製「NC3000」)30份、萘酚型環氧樹脂(環氧當量332、新日鐵住金化學(股)製「ESN475V」)10份、及苯氧基樹脂(固體成份30%之MEK/環己酮=1/1溶液、三菱化學(股)製「YX7553BH30」20份,使於邊攪拌下加熱溶解於MEK 60份、環己酮20份中。於其中混合活性酯硬化劑(活性基當量223、不揮發成分65質量%之甲苯溶液、DIC(股)製「HPC8000-65T」)15份、含有三嗪骨架之甲酚酚醛清漆型硬化劑(酚當量151、固體成分50%之2-甲氧基丙醇溶液、DIC(股)製「LA3018-50P」)25份、硬化促進劑(4-二甲基胺基吡啶(DMAP)、固體成份5質量%之MEK溶液)4份、3,3,3-三氟丙基三甲氧基矽烷(信越化學工業(股)製、「KBM-7103」)4份、以N-苯基-3-胺基丙基三甲氧基矽烷(信越化學(股)製「KBM573」)表面處理的球狀二氧化矽(admatechs(股)製「SO-C2」、平均粒徑 0.5μm)100份、PTFE粒子(DAIKIN INDUSTRIES(股)製「ruburonL-2」、平均粒徑3μm、測量頻率5.8GHz下之比介電率2.0~2.2)80份,使用高速旋轉混合機均勻分散,製作樹脂清漆。其次,準備作為支撐體之附醇酸樹脂系脫模層之聚對苯二甲酸乙二酯薄膜(厚度38μm、Lintec(股)製、「AL5」)。將上述調製之樹脂清漆以模塗佈機(die coating)均勻塗佈於該支撐體上,在80~120℃(平均100℃)下使乾燥6分鐘形成樹脂組成物層。樹脂組成物層之厚度為50μm,樹脂組成物中之殘留溶劑量約2質量%。其次,在樹脂組成物層之表面貼合厚度15μm之聚丙烯薄膜,同時捲成捲筒狀。將捲筒狀之樹脂薄片薄切成寬507mm,藉此得到507mm×336mm尺寸之薄片狀的樹脂薄片。 20 parts of liquid bisphenol A type epoxy resin (epoxy equivalent 187, "jER828US" manufactured by Mitsubishi Chemical Corporation), bisxylenol type epoxy resin (epoxy equivalent 190, manufactured by Mitsubishi Chemical Corporation) YX4000HK '') 10 parts, biphenylaralkyl-based epoxy resin (epoxy equivalent 276, Nippon Kayaku Co., Ltd. `` NC3000 '') 30 parts, naphthol-type epoxy resin (epoxy equivalent 332, Nissin 10 parts of "ESN475V" manufactured by Tetsujukin Chemical Co., Ltd., and 20 parts of "YX7553BH30" manufactured by Mitsubishi Chemical Co., Ltd. and phenoxy resin (30% solids MEK / cyclohexanone = 1/1 solution) Heat and dissolve in 60 parts of MEK and 20 parts of cyclohexanone while stirring. Mix active ester hardener (active group equivalent 223, 65% by mass of non-volatile content in toluene solution, "HPC8000-65T" made by DIC Corporation ) 15 parts, cresol novolac type hardener containing a triazine skeleton (151 phenol equivalents, 2-methoxypropanol solution with 50% solids content, "LA3018-50P" manufactured by DIC Corporation), hardening Accelerator (4-dimethylaminopyridine (DMAP), MEK solution with a solid content of 5 mass%) 4 parts, 3,3,3-trifluoropropyltrimethoxysilane (made by Shin-Etsu Chemical Industry Co., Ltd., "KBM-7103") 4 copies, Spherical silicon dioxide N- phenyl-3-aminopropyl trimethoxy Silane (by Shin-Etsu Chemical (shares) manufactured by "KBM573") surface-treated (Admatechs (shares) manufactured by "SO-C2", average particle diameter 0.5 μm) 100 parts, PTFE particles ("ruburon L-2" manufactured by Daikin Industries, Inc., average particle size 3 μm, specific permittivity 2.0-2.2 at measurement frequency 5.8 GHz) 80 parts, uniformly dispersed using a high-speed rotary mixer , Making resin varnish. Next, a polyethylene terephthalate film (thickness: 38 μm, manufactured by Lintec, Inc., “AL5”) with an alkyd resin-based release layer as a support was prepared. The prepared resin varnish was uniformly coated on the support with a die coating machine, and dried at 80 to 120 ° C (average 100 ° C) for 6 minutes to form a resin composition layer. The thickness of the resin composition layer was 50 μm, and the amount of residual solvent in the resin composition was about 2% by mass. Next, a 15 μm-thick polypropylene film was laminated on the surface of the resin composition layer and rolled into a roll shape. The roll-shaped resin sheet was thinly cut into a width of 507 mm, thereby obtaining a sheet-like resin sheet having a size of 507 mm × 336 mm.

〔實施例2〕 [Example 2]

除了替代PTFE粒子(DAIKIN INDUSTRIES(股)製「ruburonL-2」、平均粒徑3μm)80份,而使用預先混合有氟系界面活性劑(全氟烷基環氧乙烷加成物、AGC清美化學(股)製「SurflonS-243」)4份與PTFE粒子(DAIKIN INDUSTRIES(股)製「ruburonL-2」、平均粒徑3μm)80份而得者之84份外,與實施例1同樣製作樹脂清漆,得到樹脂薄片。 In addition to replacing 80 parts of PTFE particles ("ruburonL-2" manufactured by Daikin Industries, with an average particle diameter of 3 μm), a fluorine-based surfactant (perfluoroalkyl ethylene oxide adduct, AGC Kiyomi) was used in advance. Except for 84 parts obtained from 4 parts of "SurflonS-243" manufactured by Chemical Co., Ltd. and 80 parts of PTFE particles ("ruburonL-2" manufactured by Daikin Industries, Inc., with an average particle size of 3 μm), the same process as in Example 1 Resin varnish to obtain resin flakes.

〔實施例3〕 [Example 3]

除了替代聯苯基芳烷基型環氧樹脂(環氧當量276、日本化藥(股)製「NC3000」)30份,而使用伸萘醚型環氧樹脂(環氧當量250、DIC(股)製「HP6000」)27份外,與實施例1同樣製作樹脂清漆,得到樹脂薄片。 In addition to replacing 30 parts of biphenylaralkyl type epoxy resin (epoxy equivalent 276, "NC3000" manufactured by Nippon Kayaku Co., Ltd.), a naphthalene ether type epoxy resin (epoxy equivalent 250, DIC (share) Except for 27 parts of "HP6000"), a resin varnish was produced in the same manner as in Example 1 to obtain a resin sheet.

〔實施例4〕 [Example 4]

除了替代活性酯硬化劑(活性基當量223、不揮發成分65質量%之甲苯溶液、DIC(股)製「HPC8000-65T」)15份、及含有三嗪骨架之甲酚酚醛清漆型硬化劑(酚當量151、固體成分50%之2-甲氧基丙醇溶液、DIC(股)製「LA3018-50P」)25份,而使用萘型硬化劑(酚當量215、新日鐵住金化學(股)製「SN485」)15份及含有三嗪骨架之苯酚酚醛清漆型硬化劑(酚當量125、固體成分60%之MEK溶液、DIC(股)製「LA7054」)12份外,與實施例1同樣製作樹脂清漆,得到樹脂薄片。 In addition to replacing 15 parts of active ester hardener (active group equivalent 223, toluene solution with 65% by mass of non-volatile content, "HPC8000-65T" manufactured by DIC Corporation, and a cresol novolac type hardener containing a triazine skeleton ( Phenol equivalent 151, 50% 2-methoxypropanol solution, 25 parts of "LA3018-50P" manufactured by DIC (stock), and naphthalene hardener (phenol equivalent 215, Nippon Steel & Sumikin Chemical Co., Ltd.) Except for 15 parts of "SN485") and 12 parts of a phenol novolac type hardener containing a triazine skeleton (125 phenol equivalent, 60% solids MEK solution, "LA7054" made by DIC), and Example 1 A resin varnish was produced in the same manner to obtain a resin sheet.

〔實施例5〕 [Example 5]

除了對於實施例1製作的清漆,再添加N-苯基-3-胺基丙基三甲氧基矽烷(信越化學(股)製「KBM573」)2份後,以高速旋轉混合機均勻分散製作樹脂清漆外,與實施例1同樣製作樹脂清漆,得到樹脂薄片。 In addition to the varnish produced in Example 1, 2 parts of N-phenyl-3-aminopropyltrimethoxysilane ("KBM573" manufactured by Shin-Etsu Chemical Co., Ltd.) was added, and the resin was uniformly dispersed in a high-speed rotary mixer to prepare a resin. Except for the varnish, a resin varnish was produced in the same manner as in Example 1 to obtain a resin sheet.

〔比較例1〕 [Comparative Example 1]

除了未使用3,3,3-三氟丙基三甲氧基矽烷(信越化學工業(股)製、「KBM-7103」)4份外,與實施例1同樣製作樹脂清漆,得到樹脂薄片。 A resin varnish was produced in the same manner as in Example 1 except that 4 parts of 3,3,3-trifluoropropyltrimethoxysilane ("KBM-7103" manufactured by Shin-Etsu Chemical Co., Ltd.) was not used, and a resin sheet was obtained.

〔比較例2〕 [Comparative Example 2]

除了替代以N-苯基-3-胺基丙基三甲氧基矽烷(信越化學(股)製「KBM573」)進行了表面處理的球狀二氧化矽(admatechs(股)製「SO-C2」、平均粒徑0.5μm)100份、及PTFE粒子(DAIKIN INDUSTRIES(股)製「ruburonL-2」、平均粒徑3μm)80份,而使用以N-苯基-3-胺基丙基三甲氧基矽烷(信越化學(股)製「KBM573」)進行了表面處理之球狀二氧化矽(admatechs(股)製「SO-C2」、平均粒徑0.5μm)180份外,與比較例1同樣製作樹脂清漆,得到樹脂薄片。 In addition to replacing the surface-treated spherical silica (N-phenyl-3-aminopropyltrimethoxysilane) (KBM573 manufactured by Shin-Etsu Chemical Co., Ltd.) (SO-C2 manufactured by admatechs Corporation) , 100 parts with an average particle diameter of 0.5 μm) and 80 parts with PTFE particles (“ruburonL-2” manufactured by Daikin Industries, Inc., with an average particle diameter of 3 μm), and N-phenyl-3-aminopropyltrimethoxy The same as in Comparative Example 1 except for 180 parts of base silicon silane ("KBM573" manufactured by Shin-Etsu Chemical Co., Ltd.) and surface-treated spherical silicon dioxide ("SO-C2" manufactured by admatechs (stock), average particle diameter: 0.5 μm) A resin varnish was produced to obtain a resin sheet.

〔比較例3〕 [Comparative Example 3]

除了將以N-苯基-3-胺基丙基三甲氧基矽烷(信越化學(股)製「KBM573」)進行了表面處理之球狀二氧化矽(admatechs(股)製「SO-C2」、平均粒徑0.5μm)之調配量變更為80份外,與比較例1同樣製作樹脂清漆,得到樹脂薄片。 In addition to N-phenyl-3-aminopropyltrimethoxysilane ("KBM573" manufactured by Shin-Etsu Chemical Co., Ltd.), a spherical silica ("SO-C2" manufactured by admatechs) (Average particle size: 0.5 μm) except that the blending amount was changed to 80 parts, and a resin varnish was produced in the same manner as in Comparative Example 1 to obtain a resin sheet.

〔比較例4〕 [Comparative Example 4]

除了對於比較例1製作的清漆,再添加氟系界面活性 劑(AGC清美化學(股)製「SurflonS-243」)4份後,以高速旋轉混合機均勻分散製作樹脂清漆外,與比較例1同樣製作樹脂清漆,得到樹脂薄片。 In addition to the varnish produced in Comparative Example 1, a fluorine-based interfacial activity was added. After 4 parts of an agent ("SurflonS-243" manufactured by AGC Kiyomi Chemical Co., Ltd.), a resin varnish was produced in the same manner as in Comparative Example 1 except that the resin varnish was uniformly dispersed using a high-speed rotary mixer to obtain a resin sheet.

〔比較例5〕 [Comparative Example 5]

除了對於比較例1製作的清漆,再添加N-苯基-3-胺基丙基三甲氧基矽烷(信越化學(股)製「KBM573」)2份後,以高速旋轉混合機均勻分散製作樹脂清漆外,與比較例1同樣製作樹脂清漆,得到樹脂薄片。 In addition to the varnish produced in Comparative Example 1, 2 parts of N-phenyl-3-aminopropyltrimethoxysilane ("KBM573" manufactured by Shin-Etsu Chemical Co., Ltd.) was added, and the resin was uniformly dispersed in a high-speed rotary mixer to prepare a resin. Except for the varnish, a resin varnish was produced in the same manner as in Comparative Example 1 to obtain a resin sheet.

<測量方法.評價方法> <Measurement method. Evaluation method>

說明各種測量方法.評價方法。 Explain various measurement methods. Evaluation method.

1.比介電率之測量 1. Measurement of specific permittivity

將實施例及比較例所得之樹脂清漆,以模塗佈機均勻塗佈於經脫模處理後之PET薄膜(Lintec(股)製、「PET501010」)上,使乾燥後之樹脂組成物層之厚度成為50μm,並於80~110℃(平均95℃)乾燥6分鐘。然後,於200℃下進行90分鐘熱處理,由支撐體剝離後得硬化物薄膜。將該硬化物薄膜切取長度為80mm、寬度為2mm作為作為評價樣品。此評價樣品使用安捷倫科技(Agilent Technologies)公司製HP8362B裝置,以共振腔微擾法(Cavity Perturbation Method)於測定頻率5.8GHz、測定溫度23℃測量比介電率。對2個試驗片進 行測量,算出其平均值,如表1所示。 The resin varnishes obtained in the examples and comparative examples were uniformly coated on a PET film ("Lintec (KK)", "PET501010")) subjected to mold release treatment with a die coater, and the resin composition layer after drying was applied. The thickness was 50 μm, and dried at 80 to 110 ° C. (average 95 ° C.) for 6 minutes. Then, it heat-processed at 200 degreeC for 90 minutes, and peeled from the support body, and obtained the hardened | cured material film. This hardened film was cut to have a length of 80 mm and a width of 2 mm as evaluation samples. For this evaluation sample, an HP8362B device manufactured by Agilent Technologies was used, and the specific permittivity was measured by a Cavity Perturbation Method at a measurement frequency of 5.8 GHz and a measurement temperature of 23 ° C. Enter 2 test pieces Take measurements and calculate the average value, as shown in Table 1.

2.平均線熱膨脹係數之評估> 2. Evaluation of average linear thermal expansion coefficient>

將實施例及比較例所得之樹脂清漆,以模塗佈機均勻塗佈於經脫模處理後之PET薄膜(Lintec(股)製、「PET501010」)上,使乾燥後之樹脂組成物層之厚度成為50μm,並於80~110℃(平均95℃)乾燥6分鐘。然後,於200℃下進行90分鐘熱處理,由支撐體剝離後得硬化物薄膜。將該硬化物薄膜切成寬度約5mm、長度約15mm的試驗片,使用(股)理學製熱機械分析裝置(Thermo Plus TMA8310),以拉伸加重法進行熱機械分析。將試驗片裝設於前述裝置後,以荷重1g、昇溫速度5℃/分鐘的測量條件連續測量2次。第2次測量時,算出由25℃至150℃之平均線熱膨脹率,由表1所示。 The resin varnishes obtained in the examples and comparative examples were uniformly coated on a PET film ("Lintec (KK)", "PET501010")) subjected to mold release treatment with a die coater, and the dried resin composition layer The thickness was 50 μm, and dried at 80 to 110 ° C. (average 95 ° C.) for 6 minutes. Then, it heat-processed at 200 degreeC for 90 minutes, and peeled from the support body, and obtained the hardened | cured material film. This hardened film was cut into test pieces having a width of about 5 mm and a length of about 15 mm, and thermomechanical analysis was performed by a tensile weighting method using a Rigaku thermomechanical analysis device (Thermo Plus TMA8310). After the test piece was installed in the aforementioned device, the measurement was performed continuously twice under measurement conditions of a load of 1 g and a temperature increase rate of 5 ° C./minute. In the second measurement, the average linear thermal expansion coefficient from 25 ° C to 150 ° C was calculated and shown in Table 1.

3.樹脂組成物層之最低熔融黏度之測量 3. Measurement of minimum melt viscosity of resin composition layer

測量在實施例及比較例製作之樹脂薄片中之樹脂組成物層之最低熔融黏度。使用動態黏彈性測定裝置((股)UBM製型式Rheosol-G3000),樹脂量1g,使用直徑18mm之平行板,自開始溫度60℃至200℃,以昇溫速度5℃/分鐘,測定溫度間隔2.5℃、振動1Hz/deg之測定條件下,測量最低熔融黏度,如表1所示。 The minimum melt viscosity of the resin composition layer in the resin sheets produced in the examples and comparative examples was measured. A dynamic viscoelasticity measuring device (Rheosol-G3000 made by UBM) was used. The amount of resin was 1 g. A parallel plate with a diameter of 18 mm was used. The starting temperature was 60 ° C to 200 ° C, and the temperature was increased by 5 ° C / min. The temperature interval was 2.5. Measure the lowest melting viscosity under the conditions of ℃ and vibration of 1Hz / deg, as shown in Table 1.

4.樹脂清漆之分散性之評價 4. Evaluation of dispersibility of resin varnish

將實施例及比較例所得之樹脂清漆中之凝聚物,使用顯微鏡(VH-2250、(股)KEYENCE製)以觀察倍率1000倍進行觀察。50μm以上之凝聚物於3視野中為0個,且40μm以上之凝聚物於3視野中未達6個時,以○表示,50μm以上之凝聚物於3視野中為1個以上者,或40μm以上之凝聚物為6個以上者,以×表示,結果如表1所示。 The aggregates in the resin varnishes obtained in the examples and comparative examples were observed using a microscope (VH-2250, manufactured by KEYENCE) at an observation magnification of 1000 times. When there are 0 or more aggregates of 50 μm or more in 3 fields of view, and less than 6 of aggregates of 40 μm or more in 3 fields of view, it is indicated by ○, and one or more aggregates of 50 or more μm in 3 fields of view, or 40 μm The above-mentioned aggregates are 6 or more, and are represented by ×. The results are shown in Table 1.

5.藉由半加成法之鍍敷導體層之密著性(剝離強度)之測量 5. Measurement of the adhesion (peel strength) of the plated conductor layer by the semi-additive method (1)內層電路基板之底層處理 (1) Bottom layer processing of inner circuit board

將形成有內層電路之玻璃布基材環氧樹脂兩面貼銅層合板(銅箔之厚度18μm、基板厚度0.8mm、松下電工(股)製R5715ES)的兩面使用mec(股)製CZ8100,蝕刻1μm,進行銅表面之粗化處理。 Both sides of the glass cloth substrate epoxy resin on which the inner layer circuit was formed were bonded to a copper laminate (18 μm in thickness of copper foil, 0.8 mm in thickness of the substrate, and R5715ES manufactured by Matsushita Electric Works Co., Ltd.) using CZ8100 manufactured by Mec Corporation. 1 μm for roughening the copper surface.

(2)接著薄膜之層合 (2) Laminating the film

將實施例及比較例製作之樹脂薄片使用分批式真空加壓層合機(nikko-materials(股)製2階段增層層合機CVP700),使樹脂組成物層與內層基板接觸,層合於內層基板之兩面。層合係藉由經30秒鐘減壓,使氣壓為13hPa以下後,以100℃、壓力0.74MPa,使30秒鐘壓接來實施。接著,以100℃、壓力0.5MPa,進行60秒鐘熱壓製。 The resin sheets prepared in the examples and comparative examples were subjected to a batch vacuum press laminator (two-stage laminating machine CVP700 manufactured by nikko-materials) to contact the resin composition layer with the inner substrate and Bonded to both sides of the inner substrate. The lamination system was carried out by reducing the pressure for 30 seconds to make the air pressure 13 hPa or less, and then performing pressure bonding at 100 ° C. and a pressure of 0.74 MPa for 30 seconds. Next, it was hot-pressed at 100 ° C. and a pressure of 0.5 MPa for 60 seconds.

(3)樹脂組成物之硬化 (3) Hardening of resin composition

將層合後之樹脂薄片以100℃、30分鐘,再以180℃、30分鐘的硬化條件,硬化樹脂組成物,形成絕緣層。然後,將PET薄膜剝離。 The laminated resin sheet was cured at 100 ° C. for 30 minutes and then at 180 ° C. for 30 minutes to harden the resin composition to form an insulating layer. Then, the PET film was peeled.

(4)粗化處理 (4) Roughening

將形成有絕緣層之內層電路基板於膨潤液:Atotech Japan(股)之含有二乙二醇單丁基醚之Swelling Dip Securiganth P中,在60℃下浸漬5分鐘,接著於作為粗化液:atotechJapan(股)之Concentrate CompactP(KMnO4:60g/L、NaOH:40g/L之水溶液)中,在80℃下浸漬10分鐘,最後,於作為中和液:Atotech Japan(股)之Reduction solution Securiganth P中,40℃下浸漬5分鐘。 The inner circuit board with the insulating layer formed was immersed in a swelling liquid: Swelling Dip Securiganth P containing diethylene glycol monobutyl ether at Atotech Japan (stock), and immersed at 60 ° C for 5 minutes, and then used as a roughening solution : Concentrate CompactP (KMnO 4 : 60g / L, NaOH: 40g / L aqueous solution) of Atotech Japan (stock), immersed at 80 ° C for 10 minutes, and finally, as a neutralization solution: Atotech Japan (Stock) Reduction Solution Securiganth P was immersed at 40 ° C for 5 minutes.

(5)藉由半加成法之鍍敷 (5) Plating by semi-additive method

為了在絕緣層表面形成電路,而將經(4)處理之內層電路基板,於含有PdCl2之無電電鍍液中,以40℃浸漬5分鐘,其次於無電銅鍍液以25℃浸漬20分鐘。在150℃加熱30分鐘,進行退火處理後,形成蝕刻阻劑,藉由蝕刻形成圖型後,進行硫酸銅電鍍,以25μm厚度形成導體層。其次,以180℃進行30分鐘退火處理。將所得之電路基板作為評價基板A,對於此評價基板A,測量鍍敷 導體層之拉剝離強度(剝離強度)。 In order to form a circuit on the surface of the insulating layer, the inner circuit board treated with (4) was immersed in an electroless plating solution containing PdCl 2 at 40 ° C for 5 minutes, followed by an electroless copper plating solution at 25 ° C for 20 minutes. . After heating at 150 ° C. for 30 minutes, an annealing treatment was performed to form an etching resist. After patterning was performed by etching, copper sulfate plating was performed to form a conductor layer with a thickness of 25 μm. Next, annealing was performed at 180 ° C for 30 minutes. The obtained circuit board was used as an evaluation board A. For this evaluation board A, the tensile peel strength (peel strength) of the plated conductor layer was measured.

(6)藉由半加成法之鍍敷導體層之拉剝離強度(剝離強度)之測量 (6) Measurement of tensile peel strength (peel strength) of the plated conductor layer by the semi-additive method

在(5)製作之評價基板A之導體層上,施予寬10mm、長度100mm之部分的割劃,將此一端剝離,以挾具((股)TSE、Autocom型試驗機AC-50CSL)挾住,室溫中,測量以50mm/分鐘的速度,往垂直方向拉剝離35mm時之荷重(kgf/cm),如表1所示。 On the conductor layer of the evaluation substrate A produced in (5), a cut of 10 mm wide and 100 mm in length was applied, and one end was peeled off, and it was clamped with a ((share) TSE, Autocom type testing machine AC-50CSL), At room temperature, a load (kgf / cm) at a speed of 50 mm / minute and 35 mm of peeling in the vertical direction was measured, as shown in Table 1.

6.與金屬箔導體層之密著性(剝離強度)之測量 6. Measurement of adhesion (peel strength) with metal foil conductor layer (1)內層基板之準備 (1) Preparation of the inner substrate

將形成有電路之玻璃布基材環氧樹脂兩面貼銅層合板(銅箔之厚度18μm、基板厚度0.8mm、松下電工(股)製「R1515A」)的兩面以微蝕刻劑(MEC(股)製「CZ8100」)蝕刻1μm,進行銅表面之粗化處理。 On both sides of the glass cloth substrate epoxy resin on which the circuit is formed, a copper laminate (thickness of copper foil of 18 μm, substrate thickness of 0.8 mm, and “R1515A” manufactured by Matsushita Electric Works Co., Ltd.) was microetched (MEC (stock) ("CZ8100") was etched to 1 μm, and the copper surface was roughened.

(2)附有樹脂的銅箔之層合 (2) Lamination of copper foil with resin

將實施例及比較例所得之樹脂清漆,以模塗佈機均勻塗佈於三井金屬工業(股)製MT18Ex箔上,使乾燥後之樹脂組成物層之厚度成為50μm,並於80~110℃(平均95℃)乾燥6分鐘,得到附樹脂之銅箔(形成有樹脂組成物之銅箔)。將此附樹脂之銅箔,使用批次式真空加壓層合機(nikko-materials(股)製2階段增層層合機 CVP700),使樹脂組成物層與內層基板接觸,層合於內層基板之兩面。層合係藉由經30秒鐘減壓,使氣壓為13hPa以下後,以100℃、壓力0.74MPa,使30秒鐘壓接來實施。接著,以100℃、壓力0.5MPa,進行60秒鐘熱壓製。 The resin varnishes obtained in the examples and comparative examples were uniformly coated on a MT18Ex foil made by Mitsui Metals Industry Co., Ltd. with a die coater so that the thickness of the dried resin composition layer was 50 μm, and the temperature was 80 to 110 ° (Average 95 ° C.) was dried for 6 minutes to obtain a resin-coated copper foil (copper foil formed with a resin composition). This copper foil with resin was used in a batch type vacuum pressure laminator (two-stage laminating machine made by nikko-materials) CVP700), the resin composition layer is brought into contact with the inner substrate and laminated on both sides of the inner substrate. The lamination system was carried out by reducing the pressure for 30 seconds to make the air pressure 13 hPa or less, and then performing pressure bonding at 100 ° C. and a pressure of 0.74 MPa for 30 seconds. Next, it was hot-pressed at 100 ° C. and a pressure of 0.5 MPa for 60 seconds.

(3)附有樹脂的銅箔之硬化 (3) Hardening of copper foil with resin

將層合後之附樹脂的銅箔於200℃、90分鐘的硬化條件下,使樹脂組成物硬化,形成附銅箔的硬化體(形成有硬化體的銅箔)。 The resin-coated copper foil after lamination was cured at 200 ° C. for 90 minutes to harden the resin composition to form a cured body (coated copper foil) with the copper foil.

(4)電鍍 (4) Plating

(3)自所得之附銅箔之硬化體中,將載體銅箔剝離後,進行硫酸銅電解鍍銅,使厚度成為25μm,形成導體層。其次,以180℃進行30分鐘退火處理。將所得之電路基板作為評價基板B,對於此評價基板B,測量導體層之拉剝離強度(剝離強度)。 (3) From the obtained hardened body with copper foil, the carrier copper foil was peeled off, and then copper sulfate electrolytic copper plating was performed to a thickness of 25 μm to form a conductor layer. Next, annealing was performed at 180 ° C for 30 minutes. The obtained circuit board was used as an evaluation board B. For this evaluation board B, the tensile peel strength (peel strength) of the conductor layer was measured.

(5)導體層之密著性(剝離強度)之測量 (5) Measurement of the adhesion (peel strength) of the conductor layer

在(4)製作之評價基板B之導體層上,施予寬10mm、長度100mm之割劃,將此一端剝離,以挾具((股)TSE、Autocom型試驗機AC-50CSL)挾住,室溫中,測量以50mm/分鐘的速度,往垂直方向拉剝離35mm時之荷重(kgf/cm),如表1所示。 On the conductor layer of the evaluation substrate B produced in (4), a cut of 10 mm in width and 100 mm in length was applied, and one end was peeled off, and it was held with a tool ((share) TSE, Autocom type testing machine AC-50CSL), room temperature During the test, the load (kgf / cm) at a speed of 50 mm / minute and 35 mm in the vertical direction was peeled off, as shown in Table 1.

表1中表示上述評價結果及測量結果,同時揭示各樹脂清漆之製作用的材料及其調配量(不揮發成分之質量份)及不揮發成分設為100質量%時之(D)成分與(E)成分之合計之比例(質量%)。 Table 1 shows the above evaluation results and measurement results, and also reveals the materials used in the production of each resin varnish and their blending amounts (mass parts of non-volatile components) and (D) components and ( E) The total ratio (% by mass) of the components.

Claims (18)

一種樹脂組成物,其係含有(A)環氧樹脂、(B)硬化劑、(C)含氟原子之烷氧基矽烷化合物、及(D)有機填充材。 A resin composition containing (A) an epoxy resin, (B) a hardener, (C) a fluorine atom-containing alkoxysilane compound, and (D) an organic filler. 請求項1之樹脂組成物,其中(D)成分之平均粒徑為0.05μm~5μm。 The resin composition of claim 1, wherein the average particle diameter of the component (D) is 0.05 μm to 5 μm. 請求項1之樹脂組成物,其中(D)成分係在測量頻率5.8GHz下之比介電率為2.8以下的粒子。 The resin composition according to claim 1, wherein the (D) component is particles having a specific dielectric constant of 2.8 or less at a measurement frequency of 5.8 GHz. 請求項1之樹脂組成物,其中(D)成分為含有氟樹脂的粒子。 The resin composition according to claim 1, wherein the component (D) is particles containing a fluororesin. 請求項1之樹脂組成物,其中(C)成分1分子中之氟原子之數為1~10。 The resin composition of claim 1, wherein the number of fluorine atoms in one molecule of the component (C) is 1 to 10. 請求項1之樹脂組成物,其中(C)成分1分子中之烷氧基之數為1~5。 The resin composition of claim 1, wherein the number of alkoxy groups in one molecule of the component (C) is 1 to 5. 請求項1之樹脂組成物,其中(C)成分為3,3,3-三氟丙基三甲氧基矽烷。 The resin composition according to claim 1, wherein the component (C) is 3,3,3-trifluoropropyltrimethoxysilane. 請求項1之樹脂組成物,其係進一步含有(E)無機填充劑。 The resin composition according to claim 1, further comprising (E) an inorganic filler. 請求項8之樹脂組成物,其中(D)成分與(E)成分之合計含量係樹脂組成物中之不揮發成分設為100質量%時,為50質量%以上。 The resin composition of claim 8, wherein the total content of the (D) component and the (E) component is 50% by mass or more when the nonvolatile component in the resin composition is 100% by mass. 請求項1之樹脂組成物,其係使樹脂組成物硬化所成之硬化物之測量頻率5.8GHz下之比介電率為3.0以下,由25℃至150℃之平均線熱膨脹率為55ppm/℃以下。 The resin composition of claim 1, which has a specific dielectric constant of 3.0 or less at a measurement frequency of 5.8 GHz of a hardened material obtained by curing the resin composition, and an average linear thermal expansion coefficient from 25 ° C to 150 ° C of 55 ppm / ° C. the following. 請求項1之樹脂組成物,其係印刷電路板之絕緣層形成用。 The resin composition of claim 1, which is used for forming an insulating layer of a printed circuit board. 請求項1之樹脂組成物,其係印刷電路板之增層(Build-up)絕緣層用。 The resin composition of claim 1 is for a build-up insulating layer of a printed circuit board. 一種薄片狀層合材料,其係包含請求項1~12之任一項的樹脂組成物。 A sheet-like laminated material comprising the resin composition according to any one of claims 1 to 12. 一種薄片狀層合材料,其係包含以請求項1~12之任一項的樹脂組成物所形成的樹脂組成物層。 A sheet-like laminated material comprising a resin composition layer formed of the resin composition according to any one of claims 1 to 12. 請求項14之薄片狀層合材料,其中樹脂組成物層之 厚度為30μm以下。 The laminar laminate of claim 14, wherein the resin composition layer The thickness is 30 μm or less. 一種印刷電路板,其係包含藉由請求項1~12之任一項的樹脂組成物之硬化物所形成的絕緣層。 A printed circuit board comprising an insulating layer formed of a cured product of the resin composition according to any one of claims 1 to 12. 一種指紋認證感測器,其係包含藉由請求項1~12之任一項的樹脂組成物之硬化物所形成的絕緣層。 A fingerprint authentication sensor includes an insulating layer formed by a hardened product of the resin composition of any one of claims 1 to 12. 一種半導體裝置,其係包含請求項16之印刷電路板或請求項17之指紋認證感測器。 A semiconductor device includes a printed circuit board of claim 16 or a fingerprint authentication sensor of claim 17.
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CN107200974B (en) 2021-06-15
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JP2017165876A (en) 2017-09-21
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TWI776801B (en) 2022-09-11
JP6834155B2 (en) 2021-02-24

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