TW201807224A - Method for forming a film on a metal surface - Google Patents

Method for forming a film on a metal surface Download PDF

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TW201807224A
TW201807224A TW106110191A TW106110191A TW201807224A TW 201807224 A TW201807224 A TW 201807224A TW 106110191 A TW106110191 A TW 106110191A TW 106110191 A TW106110191 A TW 106110191A TW 201807224 A TW201807224 A TW 201807224A
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resin
film
metal surface
forming
solution
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TW106110191A
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Chinese (zh)
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TWI750159B (en
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三浦修平
千葉裕
粕谷昌弘
鈴木一孝
村松真希
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東亞電化股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B32B15/082Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising vinyl resins; comprising acrylic resins
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12Organic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

The present invention provides a method for forming a film on a metal surface, which is able to form a homogeneous polymer thin film on the metal surface having an excellent durability and high mold release ability, so that it can to maintain the film surface functionality, while withstanding long duration use. The method for forming a film on a metal surface is characterized in that the resin surface is irradiated using a quantum beam; and followed by immersing the said quantum beam-irradiated resin in a solution which is prepared by dissolving a triazine thiol derivative represented by the following chemical formula 1 or chemical formula 2 having a concentration from over 5 g/l and less than 13 g/l, and thereby a modified resin is prepared on which the surface of resin is decorated by the above triazine thiol derivative; the said modified resin is film-formed on the metal surface using a vacuum vapor deposition method to form a modified resin film; and then followed by film-forming another resin layer using the above vacuum vapor deposition method to arrange a laminated resin layer, the resin used here is the same kind of resin as previously used in the decoration using triazine thiol derivative.

Description

金屬表面的覆膜形成方法 Method for forming coating on metal surface

本發明是關於一種金屬表面的覆膜形成方法,特別是關於一種組合使用乾式法的真空蒸氣沉積法,可在金屬表面上形成具有樹脂的表面經改質的改質樹脂及樹脂的兩層結構的薄膜,具有優異的脫模性、耐久性的金屬的表面覆膜形成方法。 The present invention relates to a method for forming a coating on a metal surface, and more particularly, to a vacuum vapor deposition method using a dry method in combination. A method for forming a surface film of a metal having excellent mold release properties and durability.

先前,用於改善成型樹脂製品的模具的脫模性的方法包括:實施薄膜成型、或對模具塗佈脫模劑、或對成型材料添加脫模劑等。 Previously, methods for improving the mold releasability of a mold for molding a resin product include performing film molding, applying a mold release agent to a mold, or adding a mold release agent to a molding material.

然而,若為薄膜成型的情況,則有會發生製品的厚度或形狀受到限制、無法作為製品來使用的薄膜部份多、製造價格增加及製品從薄膜移除的作業性降低等的問題。若為光學製品用模具的情況,則本來需要在成型品的表面上 形成微細形狀,然而卻會發生其轉印性惡化的問題。 However, in the case of film molding, there are problems that the thickness or shape of the product is limited, there are many parts of the film that cannot be used as the product, the manufacturing cost increases, and the workability of removing the product from the film decreases. In the case of a mold for an optical product, it is required to be on the surface of the molded product. Although a fine shape is formed, the problem that the transferability deteriorates occurs.

此外,在對模具塗佈脫模劑的情況,則有對製品的脫模劑會發生附著或環境污染等的問題,並且,在對成型材料添加脫模劑的情況,則有會發生製品的特性降低或模具污染的問題。 In addition, when a mold release agent is applied to a mold, problems such as adhesion of the mold release agent to a product or environmental pollution may occur, and when a mold release agent is added to a molding material, a product may occur. Problems with reduced characteristics or mold contamination.

在另一方面,也執行取代在模具上塗佈脫模劑,而實施對模具進行覆膜形成以改善脫模性。此等覆膜(film)包括:TiC、TiCN、DLC、氟系高分子聚合膜、氟化鎳膜、鍍含PTFE的鎳、自潤滑鍍鉻等。然而,此等覆膜的膜厚為數μm以上,而無法適用於高精度的光學製品的製造。 On the other hand, instead of applying a mold release agent to a mold, film formation of a mold is also performed to improve mold release properties. Such films include: TiC, TiCN, DLC, fluorine polymer film, nickel fluoride film, nickel containing PTFE, self-lubricating chromium plating, and the like. However, the thickness of these coatings is several μm or more, which makes them unsuitable for manufacturing high-precision optical products.

因此,若欲成型LED(發光二極體)或微透鏡陣列膜(MLAF)等光學製品等的高精度製品,則對於金屬表面覆膜的形成方法是要求其為具有數十nm以下厚度的覆膜、脫模性良好、可在模具表面上形成均勻厚度的薄膜、耐久性高且對於膜形成的作業負擔少。 Therefore, if high-precision products such as LEDs (light-emitting diodes) or optical products such as microlens array films (MLAF) are to be molded, the formation method of the metal surface film is required to have a thickness of tens of nm or less. The film has good mold release properties, can form a thin film with a uniform thickness on the mold surface, has high durability, and has a small work load on film formation.

關於此種金屬表面的處理方法,則已知有例如在專利文獻1(日本專利特開平第11-140626號公報)或專利文獻2(日本專利特表第2002-542392號公報)所發表的技術。此等技術是例如在真空技術下,將含有三嗪的有機單體形成在金屬表面上,並在熱或放射線照射下,使其發生聚合反應而轉變成高分子薄膜者。此外,關於先前的技術 ,則有揭述於專利文獻3(日本專利特開平第2004-9340號公報)或專利文獻4(日本專利特開平第2004-14584號公報)者。此等技術是例如藉由真空蒸氣沉積法將三嗪硫醇衍生物附著於金屬表面,然後,進行熱或紫外線等的放射線照射,同時在三嗪硫醇衍生物的蒸氣沉積膜上形成氟樹脂等的覆膜。 Regarding such a metal surface treatment method, for example, a technique disclosed in Patent Document 1 (Japanese Patent Laid-Open No. 11-140626) or Patent Document 2 (Japanese Patent Laid-Open No. 2002-542392) is known. . These technologies are, for example, those in which a triazine-containing organic monomer is formed on a metal surface under a vacuum technology, and is subjected to a polymerization reaction under heat or radiation to be converted into a polymer film. In addition, regarding previous technologies , There are those disclosed in Patent Document 3 (Japanese Patent Laid-Open No. 2004-9340) or Patent Document 4 (Japanese Patent Laid-Open No. 2004-14584). These techniques are, for example, attaching a triazinethiol derivative to a metal surface by a vacuum vapor deposition method, and then irradiating with heat or ultraviolet rays, etc., while forming a fluororesin on the vapor deposition film of the triazinethiol derivative. And so on.

順便一提,若為如先前的金屬表面的處理方法,例如使用於將半導體或發光二極體(LED)等以環氧樹脂或矽系樹脂的熱硬化而加以封裝的模具時,即使能經由三嗪硫醇衍生物的分子間反應而獲得聚合膜,但是其高分子間的交聯未必能達到令人滿意結果,而有缺乏薄膜本身的強度或耐久性的問題,因此對於具有持續長期間功效的覆膜的形成方法仍不足夠。 By the way, if it is a conventional metal surface treatment method, for example, a mold for packaging a semiconductor or a light-emitting diode (LED) with an epoxy resin or a silicon-based resin by heat curing is used, A polymer film is obtained by intermolecular reaction of a triazine thiol derivative, but the crosslinking between its polymers may not achieve satisfactory results, and there is a problem of lack of strength or durability of the film itself. The method of forming a functional film is still insufficient.

此外,在揭示於專利文獻1或2的單獨膜中,其脫模性並未充分地顯現,在另一方面,若為揭示於專利文獻3或4的兩層膜,其脫模性稍微變得良好,然而對於模具的上升部或邊緣部的覆膜的堆積則有困難,且有對於微細形狀部的模具的均勻成膜性不佳的問題。 In addition, the release properties of the individual films disclosed in Patent Documents 1 or 2 are not sufficiently developed. On the other hand, the release properties of the two-layer films disclosed in Patent Documents 3 or 4 are slightly changed. Although it is good, it is difficult to deposit the film on the rising part or the edge part of the mold, and there is a problem that the uniform film-forming property of the mold for the fine-shaped part is not good.

〔先前技術文獻〕 [Previous Technical Literature] (專利文獻) (Patent Literature)

【專利文獻1】日本專利特開平第11-140626號公報 [Patent Document 1] Japanese Patent Laid-Open No. 11-140626

【專利文獻2】日本專利特表第2002-542392號公報 [Patent Document 2] Japanese Patent Publication No. 2002-542392

【專利文獻3】日本專利特開平第2004-9340號公報 [Patent Document 3] Japanese Patent Laid-Open No. 2004-9340

【專利文獻4】日本專利特開平第2004-14584號公報 [Patent Document 4] Japanese Patent Laid-Open No. 2004-14584

本發明是有鑒於如上所述的問題而達成者,其目的為提供一種對於金屬表面的覆膜形成方法,其可在金屬表面上形成耐久性優異的高分子薄膜的均勻覆膜,具有高脫模性,且使其一方面可維持薄膜表面的功能性,同時薄膜能耐長時間使用而可適用於廣泛的用途。 The present invention has been made in view of the problems described above, and an object thereof is to provide a method for forming a film on a metal surface, which can form a uniform film on a metal surface with excellent durability and high release. It is moldable, and on the one hand, it can maintain the functionality of the film surface. At the same time, the film can withstand long-term use and can be used for a wide range of applications.

本發明是具備在下文中的技術性特徵者: The present invention has the following technical features:

(1)本發明的金屬表面的覆膜形成方法,其特徵為:在樹脂表面照射量子束,其次,在將以下式化1或化2所代表的三嗪硫醇衍生物為5g/l以上且13g/l以下的濃度溶解而成的溶液中,浸漬經照射(irradiated)量子束的樹脂,藉此以調製樹脂的表面是經以前述三嗪硫醇衍生物加飾(decorated)的改質樹脂,將該改質樹脂藉由真空蒸氣沉積法加以成膜(film-forming)在金屬表面上而形成改質樹脂膜,其 次,在改質樹脂膜上,更進一步將樹脂藉由真空蒸氣沉積法加以成膜而形成樹脂膜,藉此以設置積層樹脂層。 (1) The method for forming a coating on a metal surface of the present invention is characterized in that a quantum beam is irradiated on a resin surface, and a triazinethiol derivative represented by the following formula 1 or 2 is 5 g / l or more In addition, a solution obtained by dissolving at a concentration of 13 g / l or less is impregnated with a resin irradiated with a quantum beam, so that the surface of the resin is modified by decorating with a triazine thiol derivative. Resin, the modified resin is film-forming on a metal surface by a vacuum vapor deposition method to form a modified resin film, which Next, a resin film is formed on the modified resin film by a vacuum vapor deposition method to form a resin film, thereby providing a laminated resin layer.

(然而,R1是炔烴(-CH=CH-)或烯烴(-C≡C-);R2是-CmH2m+1(m是1至18的整數)、-CmH2m-1(m是1至18的整數)或CH2=CH(CH2)mCOOCH2CH2-(m是1至10的整數);M1或M2是表示H或鹼金屬)。 (However, R 1 is an alkyne (-CH = CH-) or an olefin (-C≡C-); R 2 is -C m H 2m + 1 (m is an integer from 1 to 18), -C m H 2m -1 (m is an integer from 1 to 18) or CH 2 = CH (CH 2 ) m COOCH 2 CH 2- (m is an integer from 1 to 10); M 1 or M 2 represents H or an alkali metal).

(然而,M1、M2、M3是表示H或鹼金屬)。 (However, M 1 , M 2 , and M 3 represent H or an alkali metal).

(2)根據第(1)項所述的金屬表面的覆膜形成方法,其中,該樹脂為含氟有機化合物,該含氟有機化合物是在分子內具有胺基(-NH2)、醯胺基(-CONH2)或不飽和鍵。 (2) The method for forming a film on a metal surface according to the item (1), wherein the resin is a fluorine-containing organic compound, and the fluorine-containing organic compound has an amine group (-NH 2 ) and amidine in the molecule. (-CONH 2 ) or unsaturated bond.

(3)根據第(1)項或第(2)項所述的金屬表面的覆膜形成方法,其中,用於形成在改質樹脂膜上的樹脂膜的樹脂是與在以三嗪硫醇衍生物加飾所使用的樹脂相同的樹脂。 (3) The method for forming a film on a metal surface according to the item (1) or (2), wherein the resin for forming the resin film on the modified resin film is the same as that used in the triazinethiol The same resin used for the decoration of the derivatives.

(4)根據第(1)項至第(3)項中任一項所述的金屬表面的覆膜形成方法,其中,表面經加飾的樹脂與三嗪硫醇衍生物,相對於三嗪硫醇衍生物為5g/l以上且13g/l以下的濃度溶解而成的溶液140ml,使得經照射量子束的樹脂成為50g的比例。 (4) The method for forming a film on a metal surface according to any one of the items (1) to (3), wherein the decorated resin and the triazinethiol derivative are compared with the triazine The thiol derivative is 140 ml of a solution prepared by dissolving at a concentration of 5 g / l or more and 13 g / l or less, so that the quantum-irradiated resin becomes a ratio of 50 g.

(5)根據第(1)項至第(4)項中任一項所述的金屬表面的覆膜形成方法,其中,前述溶液是經以水、或在水中混合選自由環己烷、苯、四氯化碳、二乙基醚所組成的群組中至少一種而成的溶液作為溶劑來將三嗪硫醇衍生物加以溶解而成的溶液,使得該溶液為在10~45℃,將樹脂浸漬於該溶液中8小時以上。 (5) The method for forming a film on a metal surface according to any one of the items (1) to (4), wherein the solution is selected from the group consisting of cyclohexane and benzene by mixing with water or water. A solution of at least one of the group consisting of carbon tetrachloride and diethyl ether as a solvent is a solution obtained by dissolving a triazinethiol derivative, so that the solution is at a temperature of 10 to 45 ° C. The resin was immersed in the solution for more than 8 hours.

(5)根據第(1)項至第(5)項中任一項所述的金屬表面的覆膜形成方法,其中,真空蒸氣沉積(vacuum vapor deposition)是將金屬基板預先加熱後來實施。 (5) The method for forming a film on a metal surface according to any one of the items (1) to (5), wherein vacuum vapor deposition is performed after heating the metal substrate in advance.

若根據本發明的金屬表面的覆膜形成方法,在金屬表面上,以乾式法形成藉由樹脂表面經以三嗪硫醇衍生物加飾的改質樹脂的覆膜後,更進一步,在其上形成使用樹脂的覆膜而形成樹脂積層膜,藉此則可使得在金屬表面上形成的該樹脂膜的交聯膜形成變得容易,可形成均勻的覆膜,而在金屬表面上形成具有高脫模性、耐久性優異的覆膜成為可能。 According to the method for forming a coating film on a metal surface of the present invention, a coating film of a modified resin decorated with a triazinethiol derivative on the surface of the resin is formed on the metal surface by a dry method. By forming a resin laminated film by forming a resin film thereon, the formation of a crosslinked film of the resin film formed on the metal surface can be easily formed, a uniform film can be formed, and the metal film can be formed on the metal surface. A film with high release properties and excellent durability is possible.

此外,在金屬表面的覆膜形成方法中,作為乾式法而使用真空蒸氣沉積法,且在該真空蒸氣沉積中,併用用於加熱供形成覆膜的金屬的加熱處理,藉此可獲得耐久性更高的覆膜。 Further, in the method for forming a film on a metal surface, a vacuum vapor deposition method is used as a dry method, and in this vacuum vapor deposition, a heat treatment for heating a metal for forming a film is used, whereby durability can be obtained. Higher lamination.

因此,即使應用於用於製造奈米級成型品的模具,由於脫模性優異、耐久性也優異,而可使得大量製造具有微細結構的成型品變得容易。 Therefore, even if it is applied to a mold for manufacturing a nano-grade molded product, it is easy to mass-produce a molded product having a fine structure because it has excellent mold release properties and excellent durability.

可有效地應用在乾式成膜領域,因此應用於太陽電池用薄膜、電池電極薄膜、光學薄膜、細胞培養膜等具有微細形狀的成型品的大量生產用途將成為可能。 Since it can be effectively used in the field of dry film formation, it is possible to use it for mass production of molded products with fine shapes such as solar cell films, battery electrode films, optical films, and cell culture films.

1‧‧‧坩鍋(crucible) 1‧‧‧ crucible

2‧‧‧加熱器(heater) 2‧‧‧heater

3‧‧‧蒸著物質(vapor deposition material) 3‧‧‧ vapor deposition material

4‧‧‧副閘板(subshutter) 4‧‧‧ Subshutter

5‧‧‧主閘板(main shutter) 5‧‧‧main shutter

6‧‧‧晶體振盪器式膜厚計(crystal oscillator type thickness meter) 6‧‧‧ crystal oscillator type thickness meter

7‧‧‧保持體(holder) 7‧‧‧ holder

8‧‧‧氣體導入閥(gas inlet valve) 8‧‧‧gas inlet valve

9‧‧‧燈加熱器(lamp heater) 9‧‧‧ lamp heater

10‧‧‧室(chamber) Room 10‧‧‧ (chamber)

11‧‧‧抽真空閥(vacuum drawing valve) 11‧‧‧vacuum drawing valve

M‧‧‧基板(substrate) M‧‧‧ substrate

第1圖是展示真空蒸氣沉積裝置的一實例的示意圖。 FIG. 1 is a schematic diagram showing an example of a vacuum vapor deposition apparatus.

第2圖是展示在實施例及比較例所獲得樹脂成膜的取決於接著次數而定的耐久性試驗結果圖。 Fig. 2 is a graph showing the results of durability tests depending on the number of adhesions of the resin films obtained in the examples and comparative examples.

第3圖是展示在實施例及比較例所獲得樹脂成膜的接著次數與三嗪硫醇化合物溶液濃度(加飾濃度)的關係圖。 FIG. 3 is a graph showing the relationship between the number of resin film formation times obtained in Examples and Comparative Examples and the concentration (decoration concentration) of the triazinethiol compound solution.

第4圖是展示在其他實施例及比較例所獲得樹脂成膜的取決於接著次數而定的耐久性試驗結果圖。 Fig. 4 is a graph showing the results of durability tests depending on the number of adhesions of resin films obtained in other examples and comparative examples.

第5圖是展示在其他實施例及比較例所獲得樹脂成膜的取決於接著次數而定的耐久性試驗結果圖。 Fig. 5 is a graph showing the results of durability tests depending on the number of adhesions of the resin films obtained in other examples and comparative examples.

第6圖是展示在其他實施例及比較例所獲得樹脂成膜的取決於接著次數而定的耐久性試驗結果圖。 Fig. 6 is a graph showing the results of durability tests depending on the number of adhesions of the resin films obtained in other examples and comparative examples.

第7圖是展示在其他實施例及比較例所獲得樹脂成膜的接著次數與三嗪硫醇化合物溶液濃度(加飾濃度)的關係圖。 Fig. 7 is a graph showing the relationship between the number of resin film formation times obtained in other examples and comparative examples and the concentration (decoration concentration) of the triazinethiol compound solution.

第8圖是在實施例及比較例所獲得樹脂成膜的模式圖。 FIG. 8 is a schematic view of resin film formation obtained in Examples and Comparative Examples.

〔本發明的最佳實施方式〕 [Best embodiment of the present invention]

就本發明的金屬表面的覆膜形成方法,根據下列實施方式加以說明,然而並不受限於此等。 The method for forming a film on the metal surface of the present invention will be described with reference to the following embodiments, but it is not limited to these.

本發明的金屬表面的覆膜形成方法是一種在金屬表面上形成覆膜的方法,其特徵為:在樹脂表面照射量子束,其次,在將以上式化1或化2所代表的三嗪硫醇衍生物為5g/l以上且13g/l以下的濃度溶解而成的溶液中,浸漬經照射量子束的樹脂,藉此以調製樹脂的表面是經以前述三嗪硫醇衍生物加飾的改質樹脂,將該改質樹脂藉由真空蒸氣沉積法加以成膜在金屬表面上而形成改質樹脂膜,其次,在改質樹脂膜上,更進一步將樹脂藉由真空蒸氣沉積法加以成膜而形成樹脂膜,藉此以設置積層樹脂層。 The method for forming a coating on a metal surface of the present invention is a method for forming a coating on a metal surface, which is characterized by irradiating a quantum beam on the surface of a resin, and secondly, applying a triazine sulfur represented by the above formula 1 or 2 The alcohol derivative is a solution prepared by dissolving at a concentration of 5 g / l or more and 13 g / l or less, and the resin irradiated with the quantum beam is immersed, so that the surface of the resin is prepared by being decorated with the aforementioned triazinethiol derivative. The modified resin is formed by forming a modified resin film on a metal surface by a vacuum vapor deposition method, and then, on the modified resin film, the resin is further formed by a vacuum vapor deposition method. The resin film is formed to form a laminated resin layer.

(改質樹脂的調製) (Preparation of modified resin)

在本發明的對於金屬表面的覆膜形成方法中,首先,在金屬表面上形成改質樹脂的薄膜作為第一層,改質樹脂是使用如下所述所調製者。 In the method for forming a coating on a metal surface of the present invention, first, a thin film of a modified resin is formed on the metal surface as a first layer, and the modified resin is prepared as described below.

作為表面經改質的樹脂是並無特殊的限制,可使用可獲自市場的任意熱塑性樹脂或熱硬化性樹脂。作為熱塑性樹脂,可例示例如聚乙烯、聚丙烯等的烴系樹脂;聚氯乙烯、聚偏二氯乙烯、四氟化聚四氟乙烯(PTFE)、四氟化乙烯-六氟化聚芘共聚物(FEP)、四氟化乙烯-全氟烷基乙烯基醚共聚物(PFA)、乙烯-四氟乙烯共聚物(ETFE)的任何含氟樹脂等的含鹵素系樹脂;尼龍等的聚醯胺系樹脂;聚縮醛等的聚醚系樹脂;聚碸、聚碳酸酯、聚對苯二甲 酸乙二醇酯等的聚酯系樹脂;聚甲基丙烯酸甲酯等的丙烯酸系樹脂等。 The surface-modified resin is not particularly limited, and any thermoplastic resin or thermosetting resin available on the market can be used. Examples of the thermoplastic resin include hydrocarbon resins such as polyethylene and polypropylene; polyvinyl chloride, polyvinylidene chloride, tetrafluoropolytetrafluoroethylene (PTFE), and tetrafluoroethylene-hexafluoride polyfluorene copolymerization (FEP), any tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), ethylene-tetrafluoroethylene copolymer (ETFE), any halogen-containing resin such as fluorine-containing resin; nylon, etc. Amine resins; Polyether resins such as polyacetal; Polyfluorene, polycarbonate, polyparaxylylene Polyester resins such as ethylene glycol esters; acrylic resins such as polymethyl methacrylate and the like.

此外,作為熱硬化性樹脂,可例示例如聚醯亞胺樹脂、聚醯胺-醯亞胺樹脂、聚醚醯亞胺樹脂、環氧樹脂、三聚氰胺樹脂、聚矽氧樹脂、呋喃樹脂等。 Examples of the thermosetting resin include polyimide resins, polyamido-imide resins, polyetherimide resins, epoxy resins, melamine resins, polysiloxane resins, and furan resins.

特佳為使用含氟有機化合物,作為含氟有機化合物,較佳為在分子內具有胺基(-NH2)、醯胺基(-CONH2)、或具有不飽和基、分子量為1000以上,可例示例如四氟化乙烯-六氟化聚芘共聚物(FEP)、四氟化乙烯-全氟烷基乙烯基醚共聚物(PFA)、乙烯-四氟乙烯共聚物(ETFE)等,可將此等以單體或作為混合物來使用。 It is particularly preferable to use a fluorine-containing organic compound, and as the fluorine-containing organic compound, it is preferable to have an amine group (-NH 2 ), a fluorene amine group (-CONH 2 ) in the molecule, or an unsaturated group, and the molecular weight is 1,000 or more, Examples include ethylene tetrafluoride-hexafluorinated polyfluorene copolymer (FEP), ethylene tetrafluoride-perfluoroalkyl vinyl ether copolymer (PFA), and ethylene-tetrafluoroethylene copolymer (ETFE). These are used as monomers or as a mixture.

此外,若在末端具有前述胺基等,由於可認為與三嗪硫醇衍生物有相互作用,因此適合於使用。藉此,可提高與三嗪硫醇衍生物的鍵結性。 Moreover, if it has the said amine group etc. in a terminal, it is thought that it has an interaction with a triazinethiol derivative, and is suitable for use. Thereby, the bondability with a triazinethiol derivative can be improved.

此外,關於樹脂的形態,可使用樹脂薄膜、樹脂粉末等任意的形態者。 Regarding the form of the resin, any form such as a resin film and a resin powder can be used.

特別是在樹脂為粉末形態的情況,例如樹脂粉末的平均徑D為在D=5μm~1mm的範圍,更佳為平均徑D為在D=50μm~500μm的範圍。 Especially when the resin is in a powder form, for example, the average diameter D of the resin powder is in a range of D = 5 μm to 1 mm, and more preferably, the average diameter D is in a range of D = 50 μm to 500 μm.

平均徑小於上述平均徑為微細的粉末,粉末本身容易發生凝集(aggregation),會導致有難以使得樹脂粉末均勻地溶解於溶劑的情況,此外,若比上述範圍的平均徑為大 時,則樹脂粉末的改質面積的比率變小,在覆膜形成時,有難以獲得與金屬的強固固著強度的情況,因此,較佳為使用具有上述範圍的平均徑的粉末樹脂。 If the average diameter is smaller than the average diameter, it is a fine powder, and the powder itself easily aggregates, which may make it difficult to uniformly dissolve the resin powder in the solvent. In addition, if the average diameter is larger than the average diameter in the above range, In this case, the ratio of the modified area of the resin powder becomes small, and it may be difficult to obtain a strong fixing strength with the metal when the film is formed. Therefore, it is preferable to use a powder resin having an average diameter in the above range.

前述樹脂表面較佳為預先照射量子束,以將樹脂表面加以活性化,藉此可使得經由三嗪硫醇衍生物的樹脂表面加飾更容易進行。 The resin surface is preferably irradiated with a quantum beam in advance to activate the resin surface, thereby making it possible to more easily perform resin surface decoration via a triazinethiol derivative.

量子束在廣義上是表示全部的電磁波及粒子射線,然而在本發明中,特別適合使用對於經照射的樹脂具有電離作用的量子束。 The quantum beam refers to all electromagnetic waves and particle rays in a broad sense. However, in the present invention, it is particularly suitable to use a quantum beam having an ionizing effect on the irradiated resin.

作為量子束,可例示例如X-射線、γ-射線、短波長的紫外線、高速帶電粒子射線、高速中性子射線等的放射線、電子束、離子束等。 Examples of the quantum beam include radiation such as X-rays, γ-rays, short-wavelength ultraviolet rays, high-speed charged particle rays, and high-speed neutron rays, electron beams, ion beams, and the like.

當在樹脂表面照射量子束時,經照射量子束的樹脂表面會釋放出電子而形成離子、或分解而形成自由基等,藉此將樹脂表面加以活性化。 When the resin surface is irradiated with a quantum beam, the surface of the resin irradiated with the quantum beam emits electrons to form ions, or decomposes to form radicals, thereby activating the resin surface.

上述樹脂,較佳為將經量子束照射在樹脂表面而加以活性化的上述樹脂,浸漬於經溶解三嗪硫醇衍生物而成的溶液中,使得三嗪硫醇衍生物鍵結在樹脂表面,藉此將樹脂表面加飾而獲得改質樹脂。 The resin is preferably the resin activated by irradiating the resin surface with a quantum beam, and immersed in a solution prepared by dissolving a triazinethiol derivative, so that the triazinethiol derivative is bonded to the resin surface In this way, the resin surface is decorated to obtain a modified resin.

作為三嗪硫醇衍生物,可使用如下式化3或化4所示的三嗪硫醇衍生物。有效地利用三嗪硫醇衍生物的-SH的 特性,則可在金屬上形成密著性良好的覆膜。 As the triazine thiol derivative, a triazine thiol derivative represented by the following formula 3 or 4 can be used. Effective use of -SH of triazinethiol derivatives Characteristics, it is possible to form a coating with good adhesion on the metal.

R1是含有如炔烴(-CH=CH-)、烯烴(-C≡C-)的不飽和基的取代基。R2是-CH3、-CH2-CH3等的-CmH2m+1、CH2CH=CH2等的-CmH2m-1、CH2=CH(CH2)4COOCH2CH2-等的CH2=CH(CH2)mCOOCH2CH2-(m是1至10的整數)。M1、M2是表示H或Li、Na、K、Ca等的鹼金屬。 R 1 is a substituent containing an unsaturated group such as an alkyne (-CH = CH-) and an olefin (-C≡C-). R 2 is -CH 3, -CH 2 -CH 3, etc. -C m H 2m + 1, CH 2 CH = CH 2 , etc. -C m H 2m-1, CH 2 = CH (CH 2) 4 COOCH 2 CH 2 -CH 2 = CH (CH 2 ) m COOCH 2 CH 2- (m is an integer from 1 to 10). M 1 and M 2 are alkali metals such as H or Li, Na, K, and Ca.

M1、M2、M3是表示H或Li、Na、K、Ca等的鹼金屬。 M 1 , M 2 , and M 3 are alkali metals such as H or Li, Na, K, and Ca.

作為三嗪硫醇衍生物的溶液,可例示經以水、或在水中混合環己烷、苯、四氯化碳、二乙基醚中至少一種作為溶劑來將三嗪硫醇衍生物加以溶解而成的溶液。 Examples of the solution of the triazine thiol derivative include dissolving the triazine thiol derivative with water or by mixing at least one of cyclohexane, benzene, carbon tetrachloride, and diethyl ether as a solvent. And made a solution.

特佳為使得該溶液的溫度為在10~45℃,則可將樹脂的表面以三嗪硫醇衍生物均勻地加飾。 It is particularly preferred that the temperature of the solution is 10 to 45 ° C, so that the surface of the resin can be uniformly decorated with a triazinethiol derivative.

對於如此的溶液,則使用以三嗪硫醇衍生物為5g/l以上且13g/l以下的濃度,較佳為6~13g/l的濃度溶解而成的溶液,將樹脂表面加飾。 For such a solution, a solution prepared by dissolving a triazinethiol derivative at a concentration of 5 g / l or more and 13 g / l or less, preferably 6 to 13 g / l, is used to decorate the resin surface.

藉此,可改善所獲得兩層結構的樹脂成膜的耐久性,使其可發揮優異的脫模性能。 Thereby, the durability of the film formation of the obtained two-layer structure resin can be improved, and it can exhibit excellent mold release performance.

其次,將上述樹脂(較佳為經照射量子束的樹脂)浸漬於前述溶液中,在前述三嗪硫醇衍生物溶液中含有的三嗪硫醇衍生物,只要具有可將浸漬於該溶液中樹脂的表面充分地加飾的濃度和數量,則可設定為任意的數量。可例示例如在經以三嗪硫醇衍生物為5g/l以上且13g/l以下的濃度溶解而成的溶液140ml中,將經照射量子束的樹脂(較佳為具有前述平均徑的樹脂)以50g的比例進行浸漬。此外,較佳為進行8小時以上的浸漬處理。藉由如此的製程,則可將樹脂表面均勻地加飾。 Next, the resin (preferably a resin irradiated with a quantum beam) is immersed in the solution, and the triazine thiol derivative contained in the solution of the triazine thiol derivative is immersed in the solution as long as it is immersed in the solution. The concentration and number of the surface of the resin sufficiently decorated can be set to any number. An example is a resin (preferably a resin having the aforementioned average diameter) irradiated with a quantum beam in 140 ml of a solution prepared by dissolving a triazinethiol derivative at a concentration of 5 g / l or more and 13 g / l or less. Dipping was performed at a ratio of 50 g. Moreover, it is preferable to perform the immersion process for 8 hours or more. With this process, the resin surface can be evenly decorated.

此外,經照射量子束的樹脂表面是已加以活性化,在溶液中,三嗪硫醇衍生物可確實地鍵結於樹脂表面。經照 射量子束的樹脂表面會釋放出電子而形成離子、或分解而形成自由基。所形成的離子或自由基是作用如同反應引發劑。溶劑中的三嗪硫醇衍生物,藉由樹脂表面的反應引發劑而形成硫醇基自由基,硫醇基自由基是在樹脂表面上藉由二硫化物鍵或對烯丙基的加成而發生烯丙基的雙鍵裂解反應。可認為以此方式而造成與硫醇基自由基的偶合或其他分子的對烯丙基的加成反應等,藉此在樹脂表面的化學反應而形成聚合膜。 In addition, the surface of the resin irradiated with the quantum beam is activated, and the triazinethiol derivative can be reliably bonded to the resin surface in the solution. Sutra The surface of the resin that emits the quantum beam emits electrons to form ions or decomposes to form free radicals. The ions or radicals formed act like reaction initiators. The triazine thiol derivative in the solvent forms a thiol radical by a reaction initiator on the resin surface. The thiol radical is formed on the resin surface by a disulfide bond or an addition of an allyl group. The double bond cleavage reaction of allyl occurred. It is considered that in this way, a coupling with a thiol radical or an addition reaction to an allyl group of other molecules, etc. is caused, thereby forming a polymer film by a chemical reaction on the resin surface.

然後,將表面經以三嗪硫醇衍生物加飾的前述樹脂加以乾燥。乾燥方法是並無特殊的限制,可例示例如在真空乾燥機中抽真空至約10Pa,並在約40℃進行乾燥4小時的方法等。在樹脂為粉末的情況,也可將溶液以濾紙過濾來將表面經加飾的樹脂粉末與液體加以分離,將濾紙上的前述樹脂粉末,以相同的方式,在真空乾燥機中抽真空至約10Pa,並在約40℃進行乾燥4小時。藉此,可獲得表面為經加飾的改質樹脂。 Then, the surface was dried with the aforementioned resin decorated with a triazinethiol derivative. The drying method is not particularly limited, and examples thereof include a method of evacuating to about 10 Pa in a vacuum dryer and drying at about 40 ° C. for 4 hours. When the resin is a powder, the solution can also be filtered with filter paper to separate the decorated resin powder from the liquid on the surface, and the aforementioned resin powder on the filter paper can be evacuated in a vacuum dryer to about 10 Pa, and dried at about 40 ° C for 4 hours. Thereby, a modified resin with a decorated surface can be obtained.

(對金屬表面的改質樹脂的成膜:第一層) (Film formation of modified resin on metal surface: first layer)

將藉此方式所獲得的改質樹脂在金屬表面上成膜固著,其固著方法只要為乾式法則並無特殊的限制,例如冷噴覆法、藉由真空蒸氣沉積法進行蒸氣沉積,以在金屬上形成改質樹脂的成膜。 The modified resin obtained in this way is film-fixed on the metal surface, and there is no particular limitation on the fixing method as long as it is a dry method, such as cold spray coating, vapor deposition by vacuum vapor deposition, and Film formation of modified resin on metal.

例如,在改質樹脂的形態為薄膜形態的情況,則接合 金屬表面,然後加熱處理使其固著,此外,在粉末形態的情況,例如也可以冷噴覆法、藉由真空蒸氣沉積法進行蒸氣沉積,然後以加熱處理使其固著。 For example, when the modified resin is in the form of a thin film, bonding The metal surface is then fixed by heat treatment. In the case of powder, for example, a cold spray method, a vacuum vapor deposition method may be used for vapor deposition, and then the metal surface is fixed by heat treatment.

作為金屬,只要是其為導電性金屬則並無特殊的限制,可列舉:鐵及鐵合金(不銹鋼、高(導)磁鎳合金等)、銅及銅合金、鎳、金、銀、鈷、鋁、鋅、錫及錫合金、鈦或鉻等。 The metal is not particularly limited as long as it is a conductive metal, and examples thereof include iron and iron alloys (stainless steel, high (magnetically conductive) nickel alloys, etc.), copper and copper alloys, nickel, gold, silver, cobalt, and aluminum. , Zinc, tin and tin alloys, titanium or chromium.

金屬的前處理是在具有有機物等異物附著的情況,則必須實施將其移除的前處理,但是氧化物等除非會顯著地降低表面的導電性時,否則並無問題,活性化處理等也是相同。 The pretreatment of metal is the case where foreign matter such as organic matter is adhered. It is necessary to perform the pretreatment to remove it. However, unless the oxide and the like significantly reduce the surface conductivity, there is no problem. The activation treatment is also the same. the same.

關於前處理,只要是其為能將金屬表面加以清淨化的處理,則可適用習知的處理,可例示例如浸漬於酸等的處理。 As for the pretreatment, as long as it is a treatment capable of purifying the metal surface, a conventional treatment can be applied, and examples thereof include treatments such as immersion in acid.

在視需要而實施前處理的金屬上,作為將上述改質樹脂膜加以成膜的方法,可例示乾式法,例如冷噴覆法、真空蒸氣沉積法等。 As a method for forming the modified resin film on a metal subjected to a pretreatment as necessary, a dry method such as a cold spray method, a vacuum vapor deposition method, or the like can be exemplified.

作為一例,以真空蒸氣沉積裝置,將改質樹脂附著在金屬表面上。真空度通常為1.0~1.0×10-6Pa,較佳為1.0×10-1~1.0×10-4Pa。用於將改質樹脂加熱的加熱器的溫度,雖然無法明確地加以設定,然而例如可為在200~400℃,較佳為在270~360℃,則可在兼顧到改質樹脂的分子量及 真空度與加熱器溫度下而決定最適的蒸氣沉積條件。使用電離真空計,將真空蒸氣沉積裝置內調整成一定的真空度後,將蒸發源的坩鍋以加熱器加熱,使得改質樹脂氣化或昇華。此時,覆蓋用於形成覆膜的物質的閘板是處於關閉,覆蓋蒸發源的閘板則處於開啟,利用晶體振盪器式膜厚計等來確認改質樹脂在進行氣化或昇華,將蒸發速率調整成吾所欲的數值,在調整成適當時,則將覆蓋用於形成覆膜的物質的閘板開啟,以開始進行蒸氣沉積。藉此方式,則可確保預定的成膜速率,使得均勻的成膜成為可能。 As an example, a vacuum vapor deposition apparatus is used to attach a modified resin to a metal surface. The degree of vacuum is usually 1.0 to 1.0 × 10 -6 Pa, preferably 1.0 × 10 -1 to 1.0 × 10 -4 Pa. Although the temperature of the heater for heating the modified resin cannot be set explicitly, it may be, for example, 200 to 400 ° C, preferably 270 to 360 ° C, and the molecular weight and The degree of vacuum and heater temperature determine the optimal vapor deposition conditions. After using an ionization vacuum gauge to adjust the inside of the vacuum vapor deposition device to a certain degree of vacuum, the crucible of the evaporation source is heated by a heater to vaporize or sublimate the modified resin. At this time, the shutter covering the substance for forming a film is closed, and the shutter covering the evaporation source is opened. Use a crystal oscillator film thickness meter to confirm that the modified resin is being vaporized or sublimated. The evaporation rate is adjusted to the desired value, and when it is adjusted appropriately, the shutter covering the substance for forming a film is opened to start vapor deposition. In this way, a predetermined film formation rate can be ensured, and uniform film formation becomes possible.

在藉由如此的真空蒸氣沉積裝置中的蒸氣沉積,則在真空中將改質樹脂的分子加以加熱蒸發或昇華,以在金屬等固體表面上使其堆積。此為可在很多在金屬表面上將分子堆積以製作薄膜的步驟。在真空中,從蒸發源飛行而堆積的分子是在固體表面的結晶核形成,在固體表面由於擴散等發生碰撞、反應而使得薄膜成長。在固體表面上均勻分散的結晶核形成,將會影響到其後的膜成長狀態,而規則性地一邊進行分子配列,一邊進行膜成長。 In the vapor deposition by such a vacuum vapor deposition device, the molecules of the modified resin are heated and evaporated or sublimated in a vacuum to deposit them on a solid surface such as a metal. This is a step in which many molecules can be deposited on a metal surface to make a thin film. In a vacuum, the molecules accumulated by flying from the evaporation source are formed by crystal nuclei on the solid surface, and the thin film grows due to collisions and reactions on the solid surface due to diffusion and the like. The formation of crystal nuclei that are uniformly dispersed on the solid surface will affect the subsequent film growth state, and the molecular growth is regularly performed while the film is grown.

此外,如此的蒸氣沉積是也可作為在一次或數次的蒸氣沉積中的步驟。為使得對於不同形狀的附著性變得良好,較佳為一邊變更工件位置、一邊變更方向而分成數次來進行蒸氣沉積。若改質樹脂膜的厚度為厚,則耐久性會增加。 In addition, such vapor deposition is also a step that can be used in one or more vapor depositions. In order to improve the adhesion to different shapes, it is preferred to perform vapor deposition by changing the position of the workpiece and changing the direction several times. When the thickness of the modified resin film is thick, the durability is increased.

此外,真空蒸氣沉積,較佳為預先將金屬基板加熱後來實施。 In addition, vacuum vapor deposition is preferably performed after heating the metal substrate in advance.

由於將金屬體加熱,可使得三嗪硫醇衍生物與含氟有機化合物等樹脂的鍵結更為強固。加熱溫度是取決於所選用的三嗪硫醇衍生物及含氟有機化合物等樹脂及覆膜的厚度而定,例如可為在150~400℃、較佳為在230~270℃、特佳為在約250℃。 By heating the metal body, the bond between the triazinethiol derivative and a resin such as a fluorine-containing organic compound can be made stronger. The heating temperature depends on the thickness of the resin and coating such as the triazinethiol derivative and the fluorinated organic compound. For example, the heating temperature can be 150 to 400 ° C, preferably 230 to 270 ° C. Particularly preferred is At about 250 ° C.

(樹脂膜的成膜:第二層) (Film formation of resin film: second layer)

在如上所述所形成的改質樹脂層膜上,以其他途徑,將樹脂膜以乾式法(例如真空蒸氣沉積法)進行形成。 On the modified resin layer film formed as described above, the resin film is formed by a dry method (for example, a vacuum vapor deposition method) by other means.

以此方式,更進一步形成第二層的樹脂膜作成為兩層積層結構的覆膜,藉此可改善耐久性而獲得優異的脫模性。 In this way, the resin film of the second layer is further formed as a coating film having a two-layer laminated structure, whereby durability can be improved and excellent mold release properties can be obtained.

在此,作為樹脂,只要是其為在調製上述改質樹脂時所使用的上述樹脂,則可使用任意的樹脂,即使為與在使用於改質樹脂的樹脂相同種類的樹脂、或其他種類的樹脂,也並無特殊的限制,特別是使用與在使用於改質樹脂的樹脂相同種類的樹脂來形成第二層的樹脂膜,由於可進一步改善耐久性而獲得更優異的脫模性,因此為較佳。特佳為使用含氟有機化合物。 Here, as the resin, any resin may be used as long as it is the resin used in preparing the modified resin, even if it is the same kind of resin as the resin used in the modified resin, or another kind of resin. There is no particular limitation on the resin. In particular, the same kind of resin as the resin used for the modified resin is used to form the second layer of the resin film. Since the durability can be further improved and the release property is more excellent, Is better. Particularly preferred is the use of fluorine-containing organic compounds.

作為將前述樹脂以乾式法成膜在改質樹脂層膜上的真空蒸氣沉積法,可適用例如將改質樹脂以蒸氣沉積在金屬 表面上的上述真空蒸氣沉積的步驟,藉此可容易地將前述樹脂(較佳為含氟有機化合物)的蒸氣沉積膜形成在改質樹脂層膜上。 As a vacuum vapor deposition method for forming the aforementioned resin on a modified resin layer film by a dry method, for example, a modified resin can be vapor deposited on a metal The above-mentioned vacuum vapor deposition step on the surface, whereby the vapor deposition film of the aforementioned resin (preferably a fluorine-containing organic compound) can be easily formed on the modified resin layer film.

此外,若樹脂是在末端具有前述胺基等時,由於可認為與改質樹脂表面的三嗪硫醇衍生物有相互作用,因此適合於使用。例如,FEP等含有第三級氟碳化合物的化合物是脫模功效也高,因此適合於使用。 When the resin has the aforementioned amine group or the like at the terminal, it is considered to be suitable for use because it interacts with the triazinethiol derivative on the surface of the modified resin. For example, compounds containing tertiary fluorocarbons such as FEP are also suitable for use because they have a high release effect.

更佳為在將含氟有機化合物以真空蒸氣沉積進行附著時及/或在真空蒸氣沉積膜形成後,將金屬固體加熱,藉此可使得改質樹脂表面的三嗪硫醇衍生物與含氟有機化合物的鍵結更為強固。加熱溫度是取決於所選用的三嗪硫醇衍生物及含氟有機化合物的材料及覆膜的厚度而定,例如可為在150~400℃、較佳為在230~270℃、特佳為在約250℃。 More preferably, the metal solid is heated when the fluorine-containing organic compound is adhered by vacuum vapor deposition and / or after the vacuum vapor deposition film is formed, thereby allowing the triazinethiol derivative and the fluorine-containing compound on the surface of the modified resin to be modified. Organic compounds are more strongly bonded. The heating temperature depends on the material and film thickness of the triazinethiol derivative, the fluorine-containing organic compound, and the thickness of the film. For example, the heating temperature can be 150 to 400 ° C, preferably 230 to 270 ° C. Particularly preferred is At about 250 ° C.

以此方式,藉由根據本發明在金屬表面上所形成兩層結構的樹脂覆膜的薄膜,則可使得在金屬表面上所形成高分子薄膜的交聯膜形成容易地進行,因此可維持所獲得薄膜表面的功能性,同時可改善特別是關於優異的耐剝離性、長期間功效的持續性。 In this way, by forming a thin film of a resin film having a two-layer structure on a metal surface according to the present invention, the formation of a crosslinked film of a polymer thin film formed on a metal surface can be easily performed, so that the The functionality of the surface of the film is obtained, and at the same time, it is possible to improve the durability in particular with regard to excellent peel resistance and long-term efficacy.

《實施例》 "Example"

以下列的實施例、比較例及試驗例來說明本發明,然而並不受限於此等。 The following examples, comparative examples, and test examples are used to illustrate the present invention, but the present invention is not limited thereto.

(1)前處理 (1) Pre-treatment

首先,將市售的鎳基板(尼拉可公司製純度99%以上)的表面實施下列的前處理加以清淨化。 First, the surface of a commercially available nickel substrate (purity of 99% or more manufactured by Nilac Co.) was subjected to the following pretreatment to be cleaned.

具體而言,將前述鎳基板在濃度10質量%、溫度為約25℃的鹽酸中浸漬60秒鐘,其次,在濃度為0.1g/l、溫度為約25℃的次磷酸溶液中浸漬5分鐘,將鎳基板表面加以清淨化。 Specifically, the nickel substrate was immersed in hydrochloric acid having a concentration of 10% by mass and a temperature of about 25 ° C. for 60 seconds, and then immersed in a hypophosphorous acid solution having a concentration of 0.1 g / l and a temperature of about 25 ° C. for 5 minutes. , Clean the surface of the nickel substrate.

(2)改質樹脂的調製 (2) Preparation of modified resin

將平均粒徑D為D=150μm(粒徑範圍:100~200μm)的四氟化乙烯-六氟化聚芘共聚物(FEP)的粉末投入透明的袋中,並減壓至約10Pa。 A powder of tetrafluoroethylene-hexafluorinated polyfluorene copolymer (FEP) having an average particle diameter D of D = 150 μm (particle diameter range: 100 to 200 μm) was put into a transparent bag, and the pressure was reduced to about 10 Pa.

另外,作為四氟化乙烯-六氟化聚芘共聚物(FEP)的粉末是使用鐵氟龍(註冊商標)FEP-140J(三井-杜邦氟化學公司(股)製)。 As the powder of ethylene tetrafluoride-hexafluorinated polyfluorene copolymer (FEP), Teflon (registered trademark) FEP-140J (manufactured by Mitsui-DuPont Fluorine Chemical Co., Ltd.) was used.

其次,使用電子束照射裝置(USHIO電機(股)公司製:min-EB)中,在前述經減壓的真空中,將以設定一次的吸收線劑量為20kGy、照射距離為50mm所獲得的電子束照射5分鐘。此時的照射線劑量為約100kGy。 Next, using an electron beam irradiation device (min-EB manufactured by USHIO Electric Corporation): in the decompressed vacuum, electrons obtained at a set absorption line dose of 20 kGy and an irradiation distance of 50 mm were used. The beam was irradiated for 5 minutes. The irradiation dose at this time was about 100 kGy.

具體而言,電子束照射裝置是配置以燈絲加熱的電子 束產生部,且具有可在高真空下封裝的結構。以熱陰極產生的電子是藉由與照射窗之間的電位差(例如加速電壓60kV)而被加速,透過窗而將電子束照射於載置在照射室工作台(table)上的樹脂。在樹脂粉末的情況,將樹脂粉末均勻地並排放置,在粉末上設置不銹鋼製網眼,使得粉末不致於由於照射造成帶靜電而散亂。將照射距離調整成預定的高度後,將照射室關閉,進行抽真空。當照射室成為5×10-2Pa以下時,則準備照射,在預定的條件下進行照射。停止照射,一邊將氮氣導入照射室,一邊開放成大氣。 Specifically, the electron beam irradiating device is an electron beam generating unit that is arranged to be heated by a filament, and has a structure that can be packaged under high vacuum. The electrons generated by the hot cathode are accelerated by a potential difference with the irradiation window (for example, an acceleration voltage of 60 kV), and the electron beam is irradiated to the resin placed on the table of the irradiation chamber through the window. In the case of resin powder, the resin powders are evenly placed side by side, and a stainless steel mesh is provided on the powders so that the powders are not scattered due to static electricity caused by irradiation. After the irradiation distance is adjusted to a predetermined height, the irradiation chamber is closed and vacuum is evacuated. When the irradiation chamber is 5 × 10 -2 Pa or less, the irradiation is prepared and irradiation is performed under predetermined conditions. Stop the irradiation and open the atmosphere while introducing nitrogen into the irradiation chamber.

將經電子束照射的四氟化乙烯-六氟化聚芘共聚物(FEP)的粉末樹脂,在經以下式化5所代表的三嗪硫醇化合物(DAN)溶解於水溶液(溫度23℃)而成的溶液中,浸漬一晝夜(12小時),然後,加以乾燥以獲得改質樹脂粉末。 A powdered resin of tetrafluoroethylene-hexafluorinated polyfluorene copolymer (FEP) irradiated with electron beam was dissolved in an aqueous solution (temperature: 23 ° C.) in a triazinethiol compound (DAN) represented by Formula 5 below. The resulting solution was immersed for one day and night (12 hours), and then dried to obtain a modified resin powder.

(3)對金屬表面的兩層結構的樹脂積層膜的形成 (3) Formation of a two-layer resin laminated film on a metal surface

使用如第1圖所示的真空蒸氣沉積裝置,在該裝置的室10內,將表面經以上述(1)加以清淨化的鎳基板M安置在保持體7上。經由如第1圖所示的真空蒸氣沉積裝置的抽真空閥11而使得真空泵開始動作,在電離真空計的真空度達到5×10-4Pa時,將蒸發源加熱器2的溫度調整為275℃,在基板溫度為250℃時,將閘板4開啟,確認放入坩鍋1中的經由上述(2)所獲得改質樹脂粉末3的成膜速率為約0.02nm/sec,藉此在該鎳基板上進行蒸氣沉積而成膜。在達到預定的成膜速率後,更進一步將主閘板5開啟,以晶體振盪器式膜厚計6量測進行改質樹脂粉末的真空蒸氣沉積,以獲得恆定厚度的改質樹脂層膜。 The vacuum vapor deposition apparatus shown in FIG. 1 is used, and the surface of the nickel substrate M which has been cleaned by the above (1) is placed on the holder 7 in the chamber 10 of the apparatus. The vacuum pump 11 was started to operate via the vacuum valve 11 of the vacuum vapor deposition apparatus shown in FIG. 1. When the vacuum degree of the ionization vacuum gauge reached 5 × 10 -4 Pa, the temperature of the evaporation source heater 2 was adjusted to 275. ℃, when the substrate temperature is 250 ° C, the shutter 4 is opened, and it is confirmed that the film forming rate of the modified resin powder 3 obtained through the above (2) in the crucible 1 is about 0.02 nm / sec. The nickel substrate was vapor-deposited to form a film. After reaching the predetermined film-forming rate, the main shutter 5 is further opened, and the vacuum-steam deposition of the modified resin powder is measured with a crystal oscillator-type film thickness meter 6 to obtain a modified resin layer film having a constant thickness.

其次,在經形成上述改質樹脂的薄膜的鎳基板上,更進一步,將四氟化乙烯-六氟化聚芘共聚物(FEP)的粉末樹脂膜,使用第1圖的真空蒸氣沉積裝置,以相同的方式,在改質樹脂層膜上使其蒸氣沉積而積層,以獲得在鎳基板上的兩層結構的樹脂積層膜。 Next, on the nickel substrate on which the thin film of the modified resin was formed, a powder resin film of ethylene tetrafluoride-hexafluorinated polyfluorene copolymer (FEP) was further applied using the vacuum vapor deposition apparatus of FIG. 1, In the same manner, the modified resin layer film was vapor-deposited and laminated to obtain a two-layer structure resin laminated film on a nickel substrate.

(實施例1~2、比較例1~3:由於改質樹脂膜的三嗪硫醇化合物水溶液的濃度變化的影響) (Examples 1 to 2 and Comparative Examples 1 to 3: Influence of concentration change of triazine thiol compound aqueous solution due to modified resin film)

在調製上述(2)的改質樹脂粉末時,將經電子束照射的四氟化乙烯-六氟化聚芘共聚物(FEP)的粉末樹脂50g,浸漬於如上式化5所示的三嗪硫醇化合物(DAN)水溶液(140ml)的濃度(加飾濃度)調整成為1.0g/l(比 較例1)、2.5g/l(比較例2)、5.0g/l(比較例3)、7.5g/l(實施例1)、10.0g/l(實施例2)等各種變化來調製各改質樹脂粉末。 When preparing the modified resin powder of the above (2), 50 g of a powdered resin of tetrafluoroethylene-hexafluorinated polyfluorene copolymer (FEP) irradiated with electron beam was immersed in the triazine represented by the above formula 5 The concentration (decoration concentration) of the thiol compound (DAN) aqueous solution (140ml) was adjusted to 1.0g / l (specific ratio (Comparative Example 1), 2.5 g / l (Comparative Example 2), 5.0 g / l (Comparative Example 3), 7.5 g / l (Example 1), 10.0 g / l (Example 2), etc. Modified resin powder.

使用以此方式的各種改質樹脂粉末,在上述(1)的鎳基板上,以如上述(3)所述,將改質樹脂膜作為第一層(厚度:約16.8nm),在其上將FEP樹脂膜作成為第二層(厚度:約35.3nm),藉此將兩層積層結構的樹脂膜加以成膜。 Using various modified resin powders in this manner, the modified resin film was used as the first layer (thickness: about 16.8 nm) on the nickel substrate (1) as described in (3) above, The FEP resin film was made into a second layer (thickness: about 35.3 nm), whereby a two-layered resin film was formed.

(試驗例1:耐久性試驗) (Test example 1: Durability test)

上述各實施例1~2及比較例1~3所獲得兩層的樹脂成膜的各基板,使用自動簡易成型試驗機(工程系統公司(股)製AIMT0101),以環氧樹脂進行接著試驗,並將其非接著試驗次數調查的試驗結果展示於第2圖及第3圖。 Each of the two-layer resin-formed substrates obtained in each of Examples 1 to 2 and Comparative Examples 1 to 3 described above was subjected to a subsequent test using an epoxy resin using an automatic simple molding tester (AIMT0101 manufactured by Engineering Systems Corporation). The test results of the non-continued test times are shown in Figures 2 and 3.

另外,環氧樹脂是使用市售的未含有脫模劑的熱硬化性型(商品名:日東電工(股)公司製NT600)。 As the epoxy resin, a commercially available thermosetting type containing no mold release agent (trade name: NT600 manufactured by Nitto Denko Corporation) was used.

具體而言,首先,在自動簡易成型試驗機中加熱至160℃的熱板上,放置兩層的樹脂成膜基板歷時5分鐘。在其上塗佈熱硬化型環氧樹脂(日東電工(股)公司製NT-600)(φ 13×2mm的大小),加熱2分鐘,使得環氧樹脂硬化。2分鐘後從熱板卸下基板,並在空氣中冷卻。 Specifically, first, two layers of a resin film-forming substrate were placed on a hot plate heated to 160 ° C. in an automatic simple molding tester for 5 minutes. A thermosetting epoxy resin (NT-600, manufactured by Nitto Denko Corporation, Ltd.) (having a size of φ 13 × 2 mm) was applied thereon and heated for 2 minutes to harden the epoxy resin. After 2 minutes, the substrate was removed from the hot plate and cooled in air.

在冷卻至室溫後,藉由使用上述自動簡易成型試驗機,量測剝離荷重,同時重複進行成型試驗。將剝離荷重為超過0.2N的情況視為接著,進行視被接著次數而定的脫模性的耐久性試驗。 After cooling to room temperature, the peel test load was measured by using the automatic simple molding tester described above, and the molding test was repeated. A case where the peeling load was more than 0.2 N was regarded as the next step, and a durability test on the release property was performed depending on the number of times of the second step.

將其結果展示於第2圖及第3圖。 The results are shown in Figures 2 and 3.

從第2圖及第3圖可知:在以上述(2)調製改質樹脂時,每50g表面經加飾的樹脂,將三嗪硫醇化合物的溶液濃度調整成為7.5g/l以上時,藉此則可改善在金屬表面上成膜的兩層結構的樹脂成膜的耐久性,而獲得優異的脫模性。 From Figures 2 and 3, it can be seen that when the modified resin is prepared by the above (2), the solution concentration of the triazine thiol compound is adjusted to 7.5 g / l or more for every 50 g of the resin on the surface. This can improve the durability of the two-layer structure resin film formed on the metal surface, and obtain excellent mold release properties.

(實施例3~7、比較例4~8) (Examples 3 to 7, Comparative Examples 4 to 8)

在調製上述(2)的改質樹脂粉末時,將經電子束照射的四氟化乙烯-六氟化聚芘共聚物(FEP)的粉末樹脂50g,浸漬於如上式化5所示的三嗪硫醇化合物(DAN)水溶液(140ml)的濃度調整成為1g/l(比較例4)、2.5g/l(比較例5)、5g/l(比較例6)、6g/l(實施例3)、7.5g/l(實施例4)、10g/l(實施例5)、12.5g/l(實施例6)、15g/l(實施例7)、20g/l(比較例7)、30g/l(比較例8)等各種變化來調製各改質樹脂粉末。 When preparing the modified resin powder of the above (2), 50 g of a powdered resin of tetrafluoroethylene-hexafluorinated polyfluorene copolymer (FEP) irradiated with electron beam was immersed in the triazine represented by the above formula 5 The concentration of a thiol compound (DAN) aqueous solution (140 ml) was adjusted to 1 g / l (Comparative Example 4), 2.5 g / l (Comparative Example 5), 5 g / l (Comparative Example 6), 6 g / l (Example 3) , 7.5g / l (Example 4), 10g / l (Example 5), 12.5g / l (Example 6), 15g / l (Example 7), 20g / l (Comparative Example 7), 30g / (Comparative Example 8) and other changes to prepare each modified resin powder.

使用以此方式所獲得各種改質樹脂粉末,在上述(1 )的鎳基板上,以如上述(3)所述將兩層結構的樹脂膜加以成膜(第8圖(1):然而,○是表示FEP樹脂)。 Using various modified resin powders obtained in this way, in the above (1 On a nickel substrate, a two-layered resin film is formed as described in (3) above (Fig. 8 (1): ○ indicates FEP resin).

然而,藉由改質樹脂的第一層的膜厚為約16nm,藉由FEP的第二層的膜厚為約17nm,而整體的積層膜厚為約33nm。 However, the film thickness of the first layer by the modified resin is about 16 nm, the film thickness of the second layer by the FEP is about 17 nm, and the overall laminated film thickness is about 33 nm.

(比較例9:DAN層膜+FEP樹脂層膜) (Comparative Example 9: DAN layer film + FEP resin layer film)

在經以上述(1)加以前處理的鎳基板上,將以上式化5所示的DAN化合物(5.5g/l)及電解質的NaNO3化合物(7g/l)加以溶解而成的電解溶液放入電解池中,在溫度40℃、15分鐘、0.8V的條件下進行電解處理,藉此將以上式化5所示的DAN化合物形成在該鎳基板上。然而,在電解處理時,在電解液槽中,則將欲處理的金屬基板作為陽極,而將對極作為陰極。 An electrolytic solution obtained by dissolving the DAN compound (5.5 g / l) shown in the above formula 5 and the NaNO 3 compound (7 g / l) of the electrolyte on the nickel substrate treated with the above (1) plus the electrolyte solution is put. The electrolytic solution was placed in an electrolytic cell and subjected to electrolytic treatment under the conditions of a temperature of 40 ° C., 15 minutes, and 0.8 V, thereby forming a DAN compound represented by the above formula 5 on the nickel substrate. However, in the electrolytic treatment, in the electrolytic solution tank, the metal substrate to be processed is used as the anode, and the counter electrode is used as the cathode.

在電解處理後,以水洗淨,將未反應物移除並加以乾燥。 After the electrolytic treatment, it was washed with water, and unreacted materials were removed and dried.

其次,在經以上述濕式電解法在鎳基板上形成DAN化合物的第一膜上,更進一步,將四氟化乙烯-六氟化聚芘共聚物(FEP)的粉末樹脂膜,使用第1圖的真空蒸氣沉積裝置,將FEP進行蒸氣沉積而加以積層。藉此,將兩層積層結構的樹脂積層膜加以成膜在鎳基板上(第8圖(2):然而,○是表示FEP樹脂)。 Next, on the first film on which the DAN compound was formed on the nickel substrate by the above-mentioned wet electrolytic method, a powder resin film of ethylene tetrafluoride-hexafluoride polyfluorene copolymer (FEP) was further used. In the vacuum vapor deposition apparatus shown in the figure, FEP is vapor-deposited and laminated. Thereby, a two-layer resin laminated film having a laminated structure was formed on a nickel substrate (FIG. 8 (2): ○ indicates FEP resin).

然而,藉由DAN化合物的第一層的膜厚為約5nm,與藉由FEP的第二層的膜厚合併使用,則整體的積層膜厚為約33nm。 However, when the film thickness of the first layer of the DAN compound is about 5 nm and the film thickness of the second layer of the FEP is used in combination, the overall laminated film thickness is about 33 nm.

(比較例10:FEP樹脂層膜單體) (Comparative Example 10: FEP resin layer film monomer)

在經以(1)加以前處理的鎳基板上,並未設置改質樹脂粉末的第一層,而是將四氟化乙烯-六氟化聚芘共聚物(FEP)的粉末樹脂膜,使用第1圖的真空蒸氣沉積裝置,將FEP進行蒸氣沉積,藉此將FEP單層結構的樹脂膜加以成膜在鎳基板上(第8圖(3):然而,○是表示FEP樹脂)。 On the nickel substrate treated with (1) plus, the first layer of modified resin powder is not provided, but a powder resin film of tetrafluoroethylene-hexafluorinated polyfluorene copolymer (FEP) is used. The vacuum vapor deposition apparatus of FIG. 1 vapor-deposits FEP, thereby forming a resin film having a single-layer structure of FEP on a nickel substrate (FIG. 8 (3): ○ indicates FEP resin).

然而,積層膜厚為約33nm。 However, the laminated film thickness was about 33 nm.

(試驗例2:耐久性試驗) (Test example 2: Durability test)

上述各實施例3~7及比較例4~10所獲得樹脂成膜的各基板,使用自動簡易成型試驗機(工程系統公司(股)製AIMT0101),以環氧樹脂進行接著試驗,並將其被接著試驗次數調查的試驗結果分別展示於第4圖~第7圖。 The resin-formed substrates obtained in each of Examples 3 to 7 and Comparative Examples 4 to 10 described above were subjected to a subsequent test using epoxy resin using an automatic simple molding tester (AIMT0101, manufactured by Engineering Systems Corporation). The test results followed by the number of trials are shown in Figure 4 to Figure 7.

環氧樹脂是使用市售的未含有脫模劑的熱硬化性型(商品名:日東電工(股)公司製NT600)。 The epoxy resin used was a commercially available thermosetting type that did not contain a release agent (trade name: NT600 manufactured by Nitto Denko Corporation).

具體而言,首先,在自動簡易成型試驗機中加熱至160℃的熱板上,放置兩層的樹脂成膜基板歷時5分鐘。 在其上塗佈熱硬化型環氧樹脂(日東電工(股)公司製NT-600)(φ 13×2mm的大小),加熱2分鐘,使得環氧樹脂硬化。2分鐘後從熱板卸下基板,並在空氣中冷卻。 Specifically, first, two layers of a resin film-forming substrate were placed on a hot plate heated to 160 ° C. in an automatic simple molding tester for 5 minutes. A thermosetting epoxy resin (NT-600, manufactured by Nitto Denko Corporation, Ltd.) (having a size of φ 13 × 2 mm) was applied thereon and heated for 2 minutes to harden the epoxy resin. After 2 minutes, the substrate was removed from the hot plate and cooled in air.

在冷卻至室溫後,藉由使用上述自動簡易成型試驗機,量測剝離荷重,同時重複進行成型試驗。將剝離荷重為超過0.2N的情況視為接著,進行視被接著次數而定的脫模性的耐久性試驗。 After cooling to room temperature, the peel test load was measured by using the automatic simple molding tester described above, and the molding test was repeated. A case where the peeling load was more than 0.2 N was regarded as the next step, and a durability test on the release property was performed depending on the number of times of the second step.

將其結果展示第4圖~第7圖。 The results are shown in Figures 4 to 7.

從第4圖~第7圖即可明白:在以上述(2)調製改質樹脂時,將三嗪硫醇化合物溶液濃度(加飾濃度)調整成為7.5g/l以上,則可改善在金屬表面上成膜的兩層結構的樹脂成膜的耐久性(被接著次數超過500次),而獲得優異的脫模性。 As can be understood from Figs. 4 to 7, when the modified resin is prepared by the above (2), if the concentration of the triazine thiol compound solution (decoration concentration) is adjusted to 7.5 g / l or more, the metal can be improved. The two-layer structure of the film formed on the surface of the resin has durability (more than 500 times) and excellent mold release properties.

〔產業上的利用可能性〕 [Industrial possibilities]

根據本發明的金屬表面的覆膜形成方法所形成金屬表面的樹脂覆膜是具有良好的耐久性及優異的脫模性,可應用於太陽電池用薄膜、電池電極薄膜、光學薄膜、細胞培養膜等具有微細形狀的成型品的大量生產。 The resin film on the metal surface formed by the method for forming a film on a metal surface according to the present invention has good durability and excellent mold release properties, and can be applied to solar cell films, battery electrode films, optical films, and cell culture films. Mass production of molded products with fine shapes.

Claims (6)

一種金屬表面的覆膜形成方法,其特徵為:在樹脂表面照射量子束,其次,在將以下式化1或化2所代表的三嗪硫醇衍生物為5g/l以上且13g/l以下的濃度溶解而成的溶液中,浸漬經照射量子束的樹脂,藉此以調製樹脂的表面是經以前述三嗪硫醇衍生物加飾的改質樹脂,將該改質樹脂藉由真空蒸氣沉積法加以成膜在金屬表面上而形成改質樹脂膜,其次,在改質樹脂膜上,更進一步將樹脂藉由真空蒸氣沉積法加以成膜而形成樹脂膜,藉此以設置積層樹脂層: 然而,R1是炔烴(-CH=CH-)或烯烴(-C≡C-);R2是-CmH2m+1(m是1至18的整數)、-CmH2m-1(m是1至18的整數)或CH2=CH(CH2)mCOOCH2CH2-(m是1至10的整數);M1或M2是表示H或鹼金屬; 然而,M1、M2、M3是表示H或鹼金屬。 A method for forming a coating on a metal surface, characterized in that a quantum beam is irradiated on a resin surface, and a triazinethiol derivative represented by the following formula 1 or 2 is 5 g / l or more and 13 g / l or less The solution obtained by dissolving the solution is immersed in a resin irradiated with a quantum beam to thereby modulate the surface of the resin to be a modified resin decorated with the aforementioned triazinethiol derivative. The modified resin is subjected to vacuum vapor. A deposition method is used to form a modified resin film on a metal surface. Secondly, on the modified resin film, the resin is further formed into a resin film by a vacuum vapor deposition method to form a resin film, thereby setting a laminated resin layer. : However, R 1 is an alkyne (-CH = CH-) or an olefin (-C≡C-); R 2 is -C m H 2m + 1 (m is an integer from 1 to 18), -C m H 2m- 1 (m is an integer from 1 to 18) or CH 2 = CH (CH 2 ) m COOCH 2 CH 2- (m is an integer from 1 to 10); M 1 or M 2 is H or an alkali metal; However, M 1 , M 2 , and M 3 represent H or an alkali metal. 根據請求項第1項所述的金屬表面的覆膜形成方法,其中,該樹脂為含氟有機化合物,該含氟有機化合物是在分子內具有胺基(-NH2)、醯胺基(-CONH2)或不飽和鍵。 The method for forming a film on a metal surface according to claim 1, wherein the resin is a fluorine-containing organic compound, and the fluorine-containing organic compound has an amine group (-NH 2 ) and a sulfonium amino group (- CONH 2 ) or unsaturated bond. 根據請求項第1項或第2項所述的金屬表面的覆膜形成方法,其中,用於形成在改質樹脂膜上的樹脂膜的樹脂是與在以三嗪硫醇衍生物加飾所使用的樹脂相同的樹脂。 The method for forming a film on a metal surface according to claim 1 or 2, wherein the resin used to form the resin film on the modified resin film is the same as that used in a decorative office with a triazinethiol derivative. The same resin is used. 根據請求項第1項至第3項中任一項所述的金屬表面的覆膜形成方法,其中,表面經加飾的樹脂與三嗪硫醇衍生物,相對於三嗪硫醇衍生物為5g/l以上且13g/l以下的濃度溶解而成的溶液140ml,使得經照射量子束的樹脂成為50g的比例。 The method for forming a coating on a metal surface according to any one of claims 1 to 3, wherein the decorated resin and the triazinethiol derivative are compared to the triazinethiol derivative. 140 ml of a solution obtained by dissolving a concentration of 5 g / l or more and 13 g / l or less makes the quantum-irradiated resin a ratio of 50 g. 根據請求項第1項至第4項中任一項所述的金屬表面的處理形成方法,其中,前述溶液是經以水、或在水 中混合選自由環己烷、苯、四氯化碳、二乙基醚所組成的群組中至少一種而成的溶液作為溶劑來將三嗪硫醇衍生物加以溶解而成的溶液,使得該溶液為在10~45℃,將樹脂浸漬於該溶液中8小時以上。 The method for forming and treating a metal surface according to any one of claims 1 to 4, wherein the solution is treated with water or water. A solution prepared by dissolving at least one selected from the group consisting of cyclohexane, benzene, carbon tetrachloride, and diethyl ether as a solvent to dissolve a triazinethiol derivative, so that The solution was immersed in the solution at a temperature of 10 to 45 ° C. for more than 8 hours. 根據請求項第1項至第5項中任一項所述的金屬表面的覆膜形成方法,其中,真空蒸氣沉積是是將金屬基板預先加熱後來實施。 The method for forming a film on a metal surface according to any one of claims 1 to 5, wherein the vacuum vapor deposition is performed after heating the metal substrate in advance.
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