TW201805388A - Anisotropic conductive adhesive and light emitting device - Google Patents

Anisotropic conductive adhesive and light emitting device Download PDF

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Publication number
TW201805388A
TW201805388A TW106109852A TW106109852A TW201805388A TW 201805388 A TW201805388 A TW 201805388A TW 106109852 A TW106109852 A TW 106109852A TW 106109852 A TW106109852 A TW 106109852A TW 201805388 A TW201805388 A TW 201805388A
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particles
light
anisotropic conductive
conductive adhesive
insulating film
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TW106109852A
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Chinese (zh)
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波木秀次
石松朋之
熊倉博之
青木正治
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迪睿合股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • C09J9/02Electrically-conducting adhesives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/04Non-macromolecular additives inorganic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/16Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/58Optical field-shaping elements
    • H01L33/60Reflective elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83192Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body

Abstract

To provide a technique of an anisotropic conductive adhesive which enables flip chip mounting of a light emitting element such as an LED chip having fine-pitch wiring and is capable of imparting high optical characteristics, high heat dissipation and high connection reliability to a light-emitting device such as an LED module. There is provided an anisotropic conductive adhesive 2 which comprises conductive particles 1 in which an insulation film is formed on the surface of metal particles and light-reflective insulation particles 4 in a binder material 3. The metal particles contain a soft metal and the insulation film is formed on the surface of metal particles by a sputtering method while applying vibration in an oxygen-containing atmosphere.

Description

異向性導電接著劑及發光裝置 Anisotropic conductive adhesive and light emitting device

本發明係關於一種異向性導電接著劑,尤其是關於一種用於將LED(發光二極體)等半導體元件覆晶安裝於配線基板之異向性導電接著劑之技術。 The present invention relates to an anisotropic conductive adhesive, and more particularly to a technology for anisotropic conductive adhesive for mounting a semiconductor element such as an LED (light emitting diode) on a wiring substrate.

近年來,使用有LED之發光元件正受到關注。 In recent years, light-emitting elements using LEDs are receiving attention.

關於此種發光元件,為了小型化等而進行有將LED晶片直接安裝於配線基板上之覆晶安裝。 For such a light-emitting element, flip-chip mounting in which an LED chip is directly mounted on a wiring substrate is performed for miniaturization and the like.

以往,作為將LED晶片覆晶安裝於配線基板上之方法,已知有利用打線接合之方法、利用以Au-Sn焊料為代表之金屬共晶接合之方法、利用異向性導電接著劑之方法。 Conventionally, as a method for mounting an LED chip on a wiring substrate on a wiring substrate, a method using wire bonding, a method using metal eutectic bonding typified by Au-Sn solder, and a method using an anisotropic conductive adhesive are known. .

然而,於上述習知技術中,存在各種問題。 However, in the above-mentioned conventional techniques, there are various problems.

首先,於利用打線接合之方法中,於通常之情形時,利用樹脂將LED晶片之周邊密封,但存在由於樹脂與接合線之線膨脹係數之差異而產生因接合線之連接部分之剝離或接合線之斷線引起電性連接不良之情況。 First, in the method using wire bonding, in the normal case, the periphery of the LED chip is sealed with resin. However, due to the difference in linear expansion coefficient between the resin and the bonding wire, peeling or bonding of the connecting portion of the bonding wire occurs The disconnection of the wire may cause poor electrical connection.

又,由於會因使用金作為電極之材料而吸收例如波長為400~500nm之光,因此,發光效率會下降。 In addition, because gold is used as a material for the electrode, light having a wavelength of, for example, 400 to 500 nm is absorbed, and therefore, light emission efficiency is reduced.

進而,於該方法之情形時,由於使用烘箱來使晶片接合劑硬化,因此,硬化時間長,而難以使生產效率提昇。 Furthermore, in the case of this method, since the wafer bonding agent is hardened using an oven, the hardening time is long and it is difficult to improve the production efficiency.

進而,又由於為了將發光部分所產生之熱向基板側散熱而經由例如由藍寶石構成之晶片基座部分進行散熱,故而與該晶片基座部分之厚度相應地散熱距離變長,因此,散熱特性會下降。 Furthermore, in order to dissipate the heat generated by the light-emitting portion to the substrate side, heat is dissipated through a wafer base portion made of, for example, sapphire. Therefore, the heat radiation distance is increased according to the thickness of the wafer base portion, and therefore, the heat dissipation characteristics are improved. Will fall.

另一方面,於利用使用有焊料等之金屬共晶接合之方法中,LED晶片與基板之線膨脹係數不同,因此,存在因由應力集中引起之連接部分之龜裂導致產生電性連接不良之情況。 On the other hand, in the method using metal eutectic bonding using solder or the like, the linear expansion coefficient of the LED chip and the substrate are different, and therefore, there may be cases where electrical connection failure occurs due to cracks in the connection portion due to stress concentration. .

又,於該方法中,為了去除表面金屬之氧化膜而需要塗佈助焊劑,但存在因助焊劑之黏度較小導致LED晶片發生位置偏移而產生電性連接不良之情況。 Moreover, in this method, in order to remove the oxide film of the surface metal, it is necessary to apply a flux, but there may be a case where the LED chip has a positional shift due to a small viscosity of the flux, resulting in poor electrical connection.

進而,於該方法中,需要助焊劑之洗淨製程,因此,生產上耗費時間,並且,存在因助焊劑之洗淨不足導致於基板產生腐蝕之情況。 Furthermore, in this method, a cleaning process of a flux is required, and therefore, production takes time, and there may be cases where corrosion of the substrate occurs due to insufficient cleaning of the flux.

另一方面,於使用異向性導電接著劑之方法中,異向性導電接著劑中之導電性粒子之顏色為茶色,因此,絕緣性接著劑樹脂之顏色亦成為茶色,於異向性導電接著劑內吸收光,而導致發光效率下降。 On the other hand, in the method using the anisotropic conductive adhesive, the color of the conductive particles in the anisotropic conductive adhesive is brown, so the color of the insulating adhesive resin also becomes brown, which is anisotropic conductive. Then, light is absorbed in the agent, resulting in a decrease in luminous efficiency.

又,將環氧樹脂作為基底樹脂之習知異向性導電接著劑係容易因由LED晶片產生之熱或光而劣化之材料,因此,若進行與無鉛之焊料對應之回焊試驗、熱衝擊試驗(TCT)、高溫高濕試驗等可靠性試驗,則存在由於接著強度之下降等,因基於連接基板之熱膨脹率差之內部應力導致 產生導通電阻增大或接合面剝離之問題。該問題尤其是於進行窄間距配線之倒裝晶片安裝之情形時成為妨礙。 In addition, the conventional anisotropic conductive adhesive using epoxy resin as a base resin is a material that is easily deteriorated by heat or light generated by the LED chip. Therefore, if a reflow test and a thermal shock test corresponding to a lead-free solder are performed, (TCT), high temperature, high humidity test and other reliability tests, due to the decrease in bonding strength, etc., due to internal stress caused by the difference in thermal expansion coefficient of the connection substrate Problems arise in that the on-resistance increases or the joint surface peels. This problem becomes an obstacle especially when flip chip mounting of narrow pitch wiring is performed.

進而,於LED晶片之電極與配線基板之電極間會介存熱導率較小之環氧樹脂,因此,亦存在由LED晶片產生之熱向配線基板之散熱特性下降之問題。 Furthermore, an epoxy resin with a small thermal conductivity is interposed between the electrode of the LED chip and the electrode of the wiring substrate. Therefore, there is also a problem that the heat radiation characteristic of the heat generated by the LED chip to the wiring substrate is reduced.

尤其是眾所周知LED晶片之發光層除光以外還會產生大量熱,若發光層之溫度(接面溫度)成為100℃以上,則發光效率下降,而LED晶片之壽命會縮短(例如,參照專利文獻4)。 In particular, it is well known that the light emitting layer of an LED chip generates a lot of heat in addition to light. If the temperature (junction temperature) of the light emitting layer becomes 100 ° C or higher, the light emitting efficiency will decrease and the life of the LED chip will be shortened (for example, refer to Patent Documents) 4).

[先前技術文獻] [Prior technical literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2005-120375號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2005-120375

[專利文獻2]日本特開平5-152464號公報 [Patent Document 2] Japanese Unexamined Patent Publication No. 5-152464

[專利文獻3]日本特開2003-26768號公報 [Patent Document 3] Japanese Patent Laid-Open No. 2003-26768

[專利文獻4]日本特開2009-206422號公報 [Patent Document 4] Japanese Patent Laid-Open No. 2009-206422

本發明係考慮到此種習知技術課題而完成者,其目的在於提供一種能夠進行窄間距配線之LED晶片等發光元件之覆晶安裝,並且能夠賦予LED模組等發光裝置較高之光學特性、較高之散熱性及較高之連接可靠性的異向性導電接著劑之技術。 The present invention was made in consideration of such a conventional technical problem, and an object thereof is to provide flip-chip mounting of light emitting elements such as LED chips with narrow pitch wiring, and to provide high optical characteristics to light emitting devices such as LED modules. Anisotropic conductive adhesive technology with higher heat dissipation and higher connection reliability.

為了達成上述目的而完成之本發明係一種異向性導電接著劑,其係於黏合材中含有於金屬粒子之表面形成有絕緣膜之導電性粒子及光反射性絕緣粒子者,上述金屬粒子包含軟性金屬,上述絕緣膜係於包含氧氣之環境中一面施加振動一面藉由濺鍍法形成於上述金屬粒子之表面者。 The present invention completed in order to achieve the above-mentioned object is an anisotropic conductive adhesive, which is composed of conductive particles and light-reflective insulating particles in which an insulating film is formed on the surface of metal particles in a bonding material, and the metal particles include For a soft metal, the insulating film is formed on the surface of the metal particles by a sputtering method while applying vibration in an environment containing oxygen.

於本發明中,於上述金屬粒子之軟性金屬為焊料合金之情形時亦有效。 In the present invention, it is also effective when the soft metal of the metal particles is a solder alloy.

於本發明中,於上述導電性粒子之絕緣膜之膜厚T(nm)在2nm<T<500nm之範圍內之情形時亦有效。 In the present invention, it is also effective when the film thickness T (nm) of the insulating film of the conductive particles is within a range of 2 nm <T <500 nm.

於本發明中,於上述導電性粒子之絕緣膜為包含氧化矽、氧化鋁、氧化鈦、氧化鈮之任一者至少1種以上的金屬氧化物之情形時亦有效。 In this invention, it is effective also when the insulating film of the said electroconductive particle is a metal oxide containing at least 1 sort (s) of any one of a silicon oxide, an alumina, a titanium oxide, and a niobium oxide.

於本發明中,於上述導電性粒子之金屬粒子之平均粒徑D(μm)為1μm≦D≦20μm之情形時亦有效。 In the present invention, it is also effective when the average particle diameter D (μm) of the metal particles of the conductive particles is 1 μm ≦ D ≦ 20 μm.

於本發明中,於上述光反射性絕緣粒子之粒徑為上述導電性粒子之粒徑之2%以上且未達20%之情形時亦有效。 In the present invention, it is also effective when the particle diameter of the light-reflective insulating particles is 2% or more and less than 20% of the particle diameter of the conductive particles.

另一方面,本發明係一種發光裝置,其具備:具有成對之連接電極之配線基板、及具有與上述配線基板之成對之連接電極分別對應之連接電極的發光元件,上述發光元件藉由上述任一異向性導電接著劑而接著於上述配線基板上,且該發光元件之連接電極經由該異向性導電接著劑之導電性粒子而與該配線基板之相對應之連接電極分別電性連接。 On the other hand, the present invention is a light-emitting device including a wiring substrate having a pair of connection electrodes and a light-emitting element having a connection electrode corresponding to each of the pair of connection electrodes of the wiring substrate. Any one of the anisotropic conductive adhesives is bonded to the wiring substrate, and the connection electrode of the light-emitting element is electrically connected to the corresponding connection electrode of the wiring substrate via the conductive particles of the anisotropic conductive adhesive. connection.

於本發明中,於導電性粒子之例如由焊料合金所構成之軟性之金屬粒子之表面形成有絕緣膜,於藉由加熱加壓進行安裝時,藉由對向 之連接電極而將導電性粒子加壓並壓碎,與此同時,形成於金屬粒子之表面之絕緣膜破裂而露出未氧化之例如焊料成分,藉此,於對向之連接電極與金屬粒子之間分別形成金屬共晶接合。 In the present invention, an insulating film is formed on the surface of the conductive particles such as soft metal particles made of a solder alloy, and when mounting is performed by heating and pressing, the insulating film The electrode is connected to press the conductive particles and crushed. At the same time, the insulating film formed on the surface of the metal particles is broken to expose non-oxidized components such as solder, thereby connecting the opposite electrode to the metal particles. Metal eutectic bonds were formed between them.

另一方面,存在於未施加壓力之導通部位以外之鄰接之連接電極(例如,LED晶片之陽極電極與陰極電極)間之導電性粒子即便於導電性粒子彼此接觸之情形時,亦能夠藉由絕緣膜之存在而保持絕緣性。 On the other hand, the conductive particles existing between adjacent connection electrodes (for example, the anode electrode and the cathode electrode of the LED chip) other than the conductive portion where no pressure is applied can be used even when the conductive particles are in contact with each other. The presence of an insulating film maintains insulation.

其結果,根據本發明,能夠於較高之連接可靠性之下將具有窄間距配線之連接電極之例如發光元件覆晶安裝於配線基板上,並且能夠將於發光元件之發光部產生之熱高效地向配線基板側散熱。 As a result, according to the present invention, it is possible to mount, for example, a light-emitting element flip-chip with a connection electrode having a narrow pitch wiring on a wiring substrate with high connection reliability, and it is possible to efficiently generate heat generated from the light-emitting portion of the light-emitting element. Ground is dissipated to the wiring board side.

尤其是於本發明中,作為導電性粒子之金屬粒子,使用包含例如由焊料合金所構成之軟性金屬者,因此,能夠增大導電性粒子與連接電極之連接部分之面積,藉此,能夠使連接可靠性及散熱特性提昇。 In particular, in the present invention, as the metal particles of the conductive particles, a soft metal made of, for example, a solder alloy is used. Therefore, the area of the connection portion between the conductive particles and the connection electrode can be increased. Improved connection reliability and heat dissipation characteristics.

進而,於本發明中,於異向性導電接著劑之黏合材中含有光反射性絕緣粒子,因此,能夠將於發光元件之發光部產生之光高效地反射,從而使發光效率提昇。尤其是於使用具有一般實施有耐腐蝕性較高之鍍金之連接電極之配線基板之情形時,若為利用金-錫(Au-Sn)之金屬共晶接合進行之連接,則自發光元件釋出之光被鍍金吸收,而光通量下降,與此相對,根據本發明,藉由利用異向性導電接著劑中之光反射性絕緣粒子進行光反射,能夠獲得較高之光通量。 Furthermore, in the present invention, since the light-reflective insulating particles are contained in the adhesive material of the anisotropic conductive adhesive, the light generated from the light-emitting portion of the light-emitting element can be efficiently reflected, thereby improving the light-emitting efficiency. In particular, in the case of using a wiring substrate having a gold-plated connection electrode that is generally implemented with high corrosion resistance, if the connection is made by gold-tin (Au-Sn) metal eutectic bonding, the self-emitting element is released. The emitted light is absorbed by the gold plating, and the luminous flux is reduced. In contrast, according to the present invention, a higher luminous flux can be obtained by performing light reflection using the light-reflective insulating particles in the anisotropic conductive adhesive.

如上所述,根據本發明,能夠提供一種發光元件,其可實現能夠被窄間距配線之發光元件之覆晶安裝採用之發光元件之小型化,並且具有較高之光學特性、較高之散熱性及較高之連接可靠性。 As described above, according to the present invention, it is possible to provide a light-emitting element that can achieve miniaturization of a light-emitting element that can be used for flip-chip mounting of light-emitting elements with narrow pitch wiring, and has high optical characteristics and high heat dissipation. And higher connection reliability.

1‧‧‧導電性粒子 1‧‧‧ conductive particles

2‧‧‧異向性導電接著劑 2‧‧‧Anisotropic conductive adhesive

3‧‧‧黏合材 3‧‧‧ Adhesive

4‧‧‧光反射性絕緣粒子 4‧‧‧ light reflective insulating particles

5‧‧‧發光裝置 5‧‧‧light-emitting device

10‧‧‧金屬粒子 10‧‧‧ metal particles

11‧‧‧表面 11‧‧‧ surface

12‧‧‧絕緣膜 12‧‧‧ insulating film

40‧‧‧發光元件 40‧‧‧Light-emitting element

50‧‧‧配線基板 50‧‧‧wiring board

圖1係模式性地表示本發明所使用之導電性粒子之構成之剖視圖。 FIG. 1 is a cross-sectional view schematically showing the structure of a conductive particle used in the present invention.

圖2係表示該導電性粒子之絕緣膜之形成方法之例之圖。 FIG. 2 is a view showing an example of a method for forming an insulating film of the conductive particles.

圖3係模式性地表示本發明之異向性導電接著劑之構成之剖視圖。 FIG. 3 is a cross-sectional view schematically showing the structure of the anisotropic conductive adhesive of the present invention.

圖4係表示本發明之發光裝置之實施形態之構成之剖視圖。 Fig. 4 is a cross-sectional view showing the structure of an embodiment of a light-emitting device according to the present invention.

圖5(a)~(c)係表示本發明之發光裝置之製造步驟之例之圖。 5 (a) to (c) are diagrams showing examples of manufacturing steps of the light emitting device of the present invention.

以下,參照圖式對本發明之較佳之實施形態進行詳細說明。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

[1.導電性粒子] [1. Conductive particles]

例如,如圖1所示,本發明所使用之導電性粒子1係於金屬粒子10之表面11形成絕緣膜12而成者。 For example, as shown in FIG. 1, the conductive particles 1 used in the present invention are formed by forming an insulating film 12 on the surface 11 of the metal particles 10.

導電性粒子1之平均粒徑可根據下述金屬粒子10之平均粒徑D及絕緣膜12之膜厚T適當決定,關於導電性粒子1之形狀,並無特別限定,可根據用途適當決定。 The average particle diameter of the conductive particles 1 can be appropriately determined according to the average particle diameter D of the metal particles 10 and the film thickness T of the insulating film 12 described below. The shape of the conductive particles 1 is not particularly limited, and can be appropriately determined according to the application.

金屬粒子10包含柔軟之金屬,即所謂之軟性金屬,於金屬粒子10中,亦可包含在製造步驟中非意圖性混入之不可避免之雜質。作為能夠應用於導電性粒子1之軟性金屬,可列舉焊料合金等。 The metal particles 10 include soft metals, so-called soft metals. The metal particles 10 may also include unavoidable impurities that are not intentionally mixed in the manufacturing steps. Examples of the soft metal that can be applied to the conductive particles 1 include a solder alloy and the like.

以往,為了於電子電路等基板搭載電子零件(被連接構件),而大量使用作為鉛(Pb)與錫(Sn)之合金之焊料(含鉛焊料)。然而,鉛 對人體有害,又,作為廢棄物亦有對自然環境造成不良影響之擔憂,因此,目前,正推進不含鉛之無鉛焊料(lead-free solder)之開發及普及。 Conventionally, in order to mount electronic components (connected members) on a substrate such as an electronic circuit, a large amount of solder (lead-containing solder) as an alloy of lead (Pb) and tin (Sn) has been used. However, lead It is harmful to the human body, and there is concern about the adverse impact on the natural environment as a waste. Therefore, the development and popularization of lead-free solder that does not contain lead is currently being promoted.

因此,關於本發明所使用之導電性粒子1,如上所述,就對人體或環境之安全性之觀點而言,可良好地使用無鉛焊料。 Therefore, as described above, in the conductive particles 1 used in the present invention, lead-free solder can be favorably used from the viewpoint of safety to the human body and the environment.

作為能夠應用於導電性粒子1之無鉛焊料,只要能夠以大概150℃~220℃熔融,並確保作為下述異向性導電接著劑之高連接可靠性,則並無特別限定。但是,於將導電性粒子1應用於異向性導電接著劑之情形時,熔融溫度低於150℃之無鉛焊料係添加In(銦)或Bi(鉍)而使熔點降低,但此種金屬之添加有導致作為焊料之機械強度較弱而連接可靠性較差之情況。另一方面,若無鉛焊料之熔融溫度超過220℃,則有導致基板或被連接構件等之熱破壞或劣化等之危險性,故而不佳。因此,關於導電性粒子1,較佳為使用熔融溫度大概為150℃~220℃之無鉛焊料。 The lead-free solder that can be applied to the conductive particles 1 is not particularly limited as long as it can be melted at approximately 150 ° C to 220 ° C and ensure high connection reliability as the anisotropic conductive adhesive described below. However, in the case where the conductive particles 1 are applied to an anisotropic conductive adhesive, a lead-free solder having a melting temperature lower than 150 ° C is added with In (indium) or Bi (bismuth) to reduce the melting point. Addition may cause weak mechanical strength as solder and poor connection reliability. On the other hand, if the melting temperature of the lead-free solder exceeds 220 ° C, there is a risk that the substrate, the connected member, or the like may be thermally damaged or deteriorated, which is not preferable. Therefore, for the conductive particles 1, it is preferable to use lead-free solder having a melting temperature of approximately 150 ° C to 220 ° C.

作為此種無鉛焊料,例如,可列舉包含Sn、Ag(銀)、Cu(銅)之SnAgCu系、包含Sn、Zn(鋅)、Bi之SnZnBi系、包含Sn、Cu之SnCu系、包含Sn、Ag、In、Bi之SnAgInBi系、包含Sn、Zn、Al(鋁)之SnZnAl系、包含Sn、Ag、Bi之SnAgBi系等者。關於無鉛焊料所包含之金屬種類之組成比,並無特別限定,可根據用途適當調整。 Examples of such lead-free solders include SnAgCu based Sn, Ag (silver), Cu (copper), SnZnBi based Sn, Zn (zinc), Bi, SnCu based Sn, Cu, Sn, Cu Sn, Ag, In, Bi, AgAg, Bi, SnZnAl, Sn, Zn, Al (Al), SnAgBi, Sn, Ag, Bi, etc. The composition ratio of the types of metals contained in the lead-free solder is not particularly limited, and can be appropriately adjusted according to the application.

又,就能夠應用於電極間之間隔較窄之微間距配線等而言,金屬粒子10之平均粒徑D(μm)較佳為1μm≦D≦20μm之範圍內。 In addition, in terms of being applicable to fine-pitch wiring having a narrow interval between electrodes, the average particle diameter D (μm) of the metal particles 10 is preferably within a range of 1 μm ≦ D ≦ 20 μm.

若金屬粒子10之平均粒徑D低於1μm,則於應用於異向性導電接著劑之情形時,將基板與被連接構件連接需要大量之導電性粒子1,而有產生作業成本之增加或塗敷性之下降等問題之虞。又,於此種之情形時,基板 與被連接構件之連接端子間之間隙亦必然變小,因此,有存在於導電性粒子1之周圍之下述之黏合材3之量亦變少而導致連接可靠性下降之虞。 If the average particle diameter D of the metal particles 10 is less than 1 μm, in the case of an anisotropic conductive adhesive, a large number of conductive particles 1 are required to connect the substrate to the member to be connected, resulting in an increase in operation cost or There may be problems such as a decrease in applicability. In this case, the substrate The gap between the connection terminals of the member to be connected is also necessarily reduced. Therefore, the amount of the following bonding material 3 existing around the conductive particles 1 is also reduced, which may reduce the connection reliability.

另一方面,若金屬粒子10之平均粒徑D超過20μm,則無法應用於微間距配線等,故而不佳。因此,金屬粒子10之平均粒徑D較佳為1μm≦D≦20μm之範圍內。 On the other hand, if the average particle diameter D of the metal particles 10 exceeds 20 μm, it cannot be applied to fine-pitch wiring and the like, which is not preferable. Therefore, the average particle diameter D of the metal particles 10 is preferably within a range of 1 μm ≦ D ≦ 20 μm.

又,關於金屬粒子10之形狀,並無特別限定,可根據用途適當決定。 The shape of the metal particles 10 is not particularly limited, and can be appropriately determined depending on the application.

絕緣膜12係由金屬氧化物所構成者,於絕緣膜12中,亦可包含在製造步驟中非意圖性混入之不可避免之雜質。 The insulating film 12 is made of a metal oxide, and the insulating film 12 may also contain unavoidable impurities that are not intentionally mixed in the manufacturing steps.

作為能夠應用於本發明所使用之導電性粒子1之金屬氧化物,只要能夠形成於金屬粒子10之表面11且能夠確保導電性粒子1之絕緣性,則並無特別限定,例如,可列舉氧化矽、氧化鋁、氧化鈦、氧化鈮等。於絕緣膜12中,包含上述金屬氧化物之任一者至少1種以上即可。 The metal oxide that can be applied to the conductive particles 1 used in the present invention is not particularly limited as long as the metal oxide can be formed on the surface 11 of the metal particles 10 and the insulating property of the conductive particles 1 can be ensured, and examples thereof include oxidation. Silicon, aluminum oxide, titanium oxide, niobium oxide, etc. The insulating film 12 may include at least one or more of any of the above metal oxides.

又,關於上述金屬氧化物,亦可包含價數不同者或結晶結構不同者。例如,關於氧化矽(SiOx(1≦x≦2)),有氧化矽(SiO)、二氧化矽(SiO2)等。又,關於氧化鋁(AlOx(0.5≦x≦1.5)),有氧化鋁(III)(Al2O3)、氧化鋁(II)(AlO)、氧化鋁(I)(Al2O)等,於氧化鋁(III)中,有α-氧化鋁(鋼玉型)、γ-氧化鋁(尖晶石型)等結晶結構者。又,關於氧化鈦(TiOx(1≦x≦2)),有二氧化鈦(IV)(TiO2)、氧化鈦(II)(TiO)等,於二氧化鈦(IV)中,有銳鈦礦型、金紅石型、板鈦礦型等結晶結構者。進而,關於氧化鈮(NbOx(X為2以外之數),亦有氧化鈮(II)(NbO)、氧化鈮(V)(Nb2O5)。 In addition, the metal oxide may include one having a different valence number or one having a different crystal structure. For example, regarding silicon oxide (SiO x (1 ≦ x ≦ 2)), there are silicon oxide (SiO), silicon dioxide (SiO 2 ), and the like. As for alumina (AlO x (0.5 ≦ x ≦ 1.5)), there are alumina (III) (Al 2 O 3 ), alumina (II) (AlO), and alumina (I) (Al 2 O). In the alumina (III), there are crystal structures such as α-alumina (steel type) and γ-alumina (spinel type). Further, as for titanium oxide (TiO x (1 ≦ x ≦ 2)), there are titanium dioxide (IV) (TiO 2 ), titanium oxide (II) (TiO), and the like. Among titanium dioxide (IV), there are anatase type, Rutile type, brookite type and other crystalline structures. Furthermore, as for niobium oxide (NbO x (X is a number other than 2)), there are also niobium (II) oxide (NbO) and niobium (V) oxide (Nb 2 O 5 ).

就於基板與被連接構件之連接時能夠容易使絕緣膜12自導電性粒子1之表面11剝離而言,絕緣膜12之膜厚T(nm)較佳為2nm<T<500nm之範圍內,進而較佳為5nm≦T≦480nm之範圍內,尤佳為5nm≦T≦200nm之範圍內。若絕緣膜12之膜厚T成為2nm以下,則於基板與被連接構件之連接時,無法防止鄰接之電極間之短路,故而不佳。另一方面,若絕緣膜12之膜厚T成為500nm以上,則基板與被連接構件之連接時之連接電阻值變高,故而不佳。因此,絕緣膜12之膜厚T較佳為2nm<T<500nm之範圍內,進而較佳為5nm≦T≦480nm之範圍內,尤佳為5nm≦T≦200nm之範圍內。 When the insulating film 12 can be easily peeled from the surface 11 of the conductive particles 1 when the substrate is connected to the connected member, the film thickness T (nm) of the insulating film 12 is preferably in a range of 2 nm <T <500 nm. It is more preferably within a range of 5 nm ≦ T ≦ 480 nm, and particularly preferably within a range of 5 nm ≦ T ≦ 200 nm. If the film thickness T of the insulating film 12 is 2 nm or less, it is not preferable to prevent a short circuit between adjacent electrodes when the substrate and the member to be connected are connected. On the other hand, if the film thickness T of the insulating film 12 is 500 nm or more, the connection resistance value at the time of connection between the substrate and the member to be connected becomes high, which is not preferable. Therefore, the film thickness T of the insulating film 12 is preferably in a range of 2 nm <T <500 nm, more preferably in a range of 5 nm ≦ T ≦ 480 nm, and particularly preferably in a range of 5 nm ≦ T ≦ 200 nm.

[2.導電性粒子之製造方法] [2. Manufacturing method of conductive particles]

本發明所使用之導電性粒子1係例如藉由以下之方法而於圖1所示之金屬粒子10之表面11形成絕緣膜12者。 The conductive particles 1 used in the present invention are those in which an insulating film 12 is formed on the surface 11 of the metal particles 10 shown in FIG. 1 by the following method, for example.

於本發明之情形時,只要能夠抑制金屬粒子10之變形並於金屬粒子10之表面11形成絕緣膜12,則關於其形成方法,並無特別限定,例如,能夠應用PVD法(PVD,physical vapor deposition,物理氣相沈積)等。作為PVD法,可列舉濺鍍(sputtering)法、脈衝雷射沈積法(PLD,pulsed laser deposition)、離子鍍覆(ion plating)法、離子束沈積法(IBD,ion beam deposition)等,該等之中,就能夠容易生產導電性粒子1、生產性較高、又成膜性亦良好之方面而言,可良好地利用濺鍍法。 In the case of the present invention, as long as the deformation of the metal particles 10 can be suppressed and the insulating film 12 is formed on the surface 11 of the metal particles 10, the formation method is not particularly limited. For example, the PVD method (PVD, physical vapor) can be applied. deposition, physical vapor deposition). Examples of the PVD method include a sputtering method, a pulsed laser deposition (PLD) method, an ion plating method, an ion beam deposition method (IBD), and the like. Among them, the sputtering method can be favorably used in that the conductive particles 1 can be easily produced and the productivity is high and the film forming property is also good.

以下,作為於金屬粒子10之表面11形成絕緣膜12之方法,舉出應用濺鍍法之情形為例進行說明。此處,例如,可使用如圖2所示之具備振動裝置20之濺鍍裝置30,於金屬粒子10之表面11形成絕緣膜12。 Hereinafter, as a method of forming the insulating film 12 on the surface 11 of the metal particles 10, a case where a sputtering method is applied is described as an example. Here, for example, an insulating film 12 may be formed on the surface 11 of the metal particles 10 using a sputtering device 30 including a vibration device 20 as shown in FIG. 2.

該濺鍍裝置30具有真空槽30a,於該真空槽30a之內部之上方配置有安裝於陰極電極31之濺鍍靶32。於真空槽30a連接有真空排氣裝置30b及未圖示之氣體導入裝置,可藉由該等裝置一面對真空槽30a內進行真空排氣一面導入下述氣體。 The sputtering apparatus 30 includes a vacuum tank 30 a, and a sputtering target 32 mounted on the cathode electrode 31 is disposed above the vacuum tank 30 a. A vacuum evacuation device 30b and a gas introduction device (not shown) are connected to the vacuum tank 30a, and the following gases can be introduced through these devices while evacuating the inside of the vacuum tank 30a.

濺鍍靶32係由如下材料所構成者,該材料係由絕緣膜12之形成所必需之金屬種類所構成者,作為該金屬種類,例如可列舉矽(Si)、鋁(Al)、鈦(Ti)、鈮(Nb)等。 The sputtering target 32 is composed of the following materials, and the material is composed of a metal type necessary for the formation of the insulating film 12. Examples of the metal type include silicon (Si), aluminum (Al), and titanium ( Ti), niobium (Nb), and the like.

於本實施形態中,將氬氣(Ar)或氮氣(N2)等不活性氣體及氧氣(O2)作為絕緣膜12之形成所必需之氣體(濺鍍氣體)分別導入至真空槽30a內。 In this embodiment, inert gas such as argon (Ar) or nitrogen (N 2 ) and oxygen (O 2 ) are introduced into the vacuum tank 30 a as the gas (sputtering gas) necessary for the formation of the insulating film 12. .

於真空槽30a內設置有振動裝置20,於濺鍍靶32之下方配置容器21,於容器21之內部(大致平面狀之底面22上)配置金屬粒子10。又,於真空槽30a內之容器21之下方配置有例如由電磁線圈式或超音波喇叭所構成之振子23。振動裝置20以能夠藉由振子23對容器21施加振動而使金屬粒子10連續振動之方式構成。 A vibrating device 20 is provided in the vacuum tank 30a. A container 21 is arranged below the sputtering target 32, and metal particles 10 are arranged inside the container 21 (on the substantially flat bottom surface 22). A vibrator 23 composed of, for example, an electromagnetic coil type or an ultrasonic horn is disposed below the container 21 in the vacuum tank 30a. The vibration device 20 is configured so that the metal particles 10 can be continuously vibrated by applying vibration to the container 21 by the vibrator 23.

再者,於藉由濺鍍法在粒子表面實施成膜處理之情形時,一般使用金屬或樹脂製之振動輔助材(振動放大手段)。然而,於本實施形態中,如上所述,使用軟性金屬作為金屬粒子10,因此,有產生因金屬粒子10與振動輔助材之碰撞導致變形或劣化等之虞。 When a film-forming treatment is performed on the particle surface by a sputtering method, a metal or resin vibration auxiliary material (vibration amplification means) is generally used. However, in this embodiment, as described above, since a soft metal is used as the metal particles 10, there is a possibility that deformation or deterioration may occur due to the collision between the metal particles 10 and the vibration auxiliary material.

因此,為了防止此種不良狀況之產生,較佳為不使用振動輔助材而於金屬粒子10之表面11形成絕緣膜12。但是,若為採取了防止對金屬粒子10造成不良狀況之措施之振動輔助材,則其利用不受限。 Therefore, in order to prevent such a problem, it is preferable to form the insulating film 12 on the surface 11 of the metal particles 10 without using a vibration auxiliary material. However, if it is a vibration auxiliary material that has taken measures to prevent the metal particles 10 from causing a bad situation, its use is not limited.

其次,對使用上述濺鍍裝置30於金屬粒子10之表面11形成絕緣膜12之方法之詳細內容進行說明。 Next, the details of the method of forming the insulating film 12 on the surface 11 of the metal particles 10 using the sputtering apparatus 30 will be described.

首先,於真空槽30a內配置特定之濺鍍靶32,於圖2所示之振動裝置20之容器21內投入特定量之金屬粒子10,藉由真空排氣裝置30b對真空槽30a內進行真空排氣,使其成為真空環境。於本發明之情形時,較佳為將濺鍍處理前之到達壓力V[Pa]調整為9×10-5Pa<V<2×10-2Pa,尤其是進而較佳為調整為2×10-4Pa≦V≦9×10-3Pa,但並無特別限定。 First, a specific sputtering target 32 is arranged in the vacuum tank 30a, and a specific amount of metal particles 10 are put into the container 21 of the vibration device 20 shown in FIG. 2, and the vacuum chamber 30a is evacuated by the vacuum exhaust device 30b. Exhaust and make it a vacuum environment. In the case of the present invention, it is preferable to adjust the arrival pressure V [Pa] before the sputtering process to 9 × 10 -5 Pa <V <2 × 10 -2 Pa, and it is particularly preferable to adjust it to 2 × 10 -4 Pa ≦ V ≦ 9 × 10 -3 Pa, but it is not particularly limited.

即,若於到達壓力V為9×10-5Pa以下之狀態下進行成膜,則真空槽30a內之雜質(主要為水分)變少,而絕緣膜12之密接性變高,並且膜密度上升,絕緣膜12不會因基板與被連接構件之連接時之按壓力而自金屬粒子10之表面11剝離,因此,有因殘留之絕緣膜12導致連接電阻值變高之虞。 That is, if the film formation is performed under a state where the reaching pressure V is 9 × 10 -5 Pa or less, the impurities (mainly moisture) in the vacuum tank 30 a are reduced, the adhesion of the insulating film 12 is increased, and the film density is increased. The insulation film 12 does not peel off from the surface 11 of the metal particles 10 due to the pressing force when the substrate is connected to the connected member. Therefore, the connection resistance value may increase due to the remaining insulation film 12.

另一方面,若於到達壓力V為2×10-2Pa以上之狀態下進行成膜,則由於真空槽30a內之雜質之影響,絕緣膜12之密接性或膜密度下降,無法保持導電性粒子1之絕緣性,因此,有無法抑制電極間之短路之發生之虞。 On the other hand, if the film is formed under a state where the reaching pressure V is 2 × 10 -2 Pa or more, the influence of impurities in the vacuum chamber 30 a reduces the adhesion of the insulating film 12 or the film density, and the conductivity cannot be maintained. Since the particle 1 has an insulating property, there is a possibility that a short circuit between electrodes cannot be prevented from occurring.

因此,就獲得具有適當之密接性或膜密度之絕緣膜12之觀點而言,較佳為將濺鍍處理前之到達壓力V[Pa]調整為9×10-5Pa<V<2×10-2Pa,尤其是進而較佳為調整為2×10-4Pa≦V≦9×10-3Pa。 Therefore, from the viewpoint of obtaining an insulating film 12 having appropriate adhesion or film density, it is preferable to adjust the reaching pressure V [Pa] before the sputtering process to 9 × 10 -5 Pa <V <2 × 10 -2 Pa, and more preferably adjusted to 2 × 10 -4 Pa ≦ V ≦ 9 × 10 -3 Pa.

繼而,一面藉由振子23以特定之振幅及振動數產生振動而使容器21連續振動,一面將特定之濺鍍氣體導入至真空槽30a內。此時,以真空槽30a內保持為特定之壓力之方式調整濺鍍氣體之流量。 Then, the container 21 is continuously vibrated while the vibrator 23 generates vibration with a specific amplitude and number of vibrations, and a specific sputtering gas is introduced into the vacuum tank 30a. At this time, the flow rate of the sputtering gas is adjusted so that a specific pressure is maintained in the vacuum tank 30a.

此處,如圖2所示,使用振子23對容器21賦予之振動一般為上下方向之振動,但視需要亦可除上下方向之振動分量以外,施加具有橫向之振動分量之振動,亦可僅為橫向之振動。又,亦可將振子23之振幅調整為例如±(0.5~10)[mm]。進而,亦可將振子23之振動數調整為例如15Hz~65Hz,亦可使其於設定頻率之範圍內變化。 Here, as shown in FIG. 2, the vibration applied to the container 21 by using the vibrator 23 is generally the vibration in the vertical direction. However, in addition to the vibration component in the vertical direction, a vibration having a horizontal vibration component may be applied in addition to the vibration component in the vertical direction. For lateral vibration. The amplitude of the vibrator 23 may be adjusted to, for example, ± (0.5 to 10) [mm]. Furthermore, the number of vibrations of the vibrator 23 may be adjusted to, for example, 15 Hz to 65 Hz, or may be changed within a range of a set frequency.

而且,藉由對濺鍍靶32施加特定之電壓,而使濺鍍粒子到達至金屬粒子10,藉此,於金屬粒子10之表面11形成特定之膜厚之絕緣膜12,從而獲得目標導電性粒子1。 In addition, by applying a specific voltage to the sputtering target 32, the sputtering particles reach the metal particles 10, thereby forming an insulating film 12 having a specific film thickness on the surface 11 of the metal particles 10 to obtain the target conductivity. Particles 1.

根據以上所說明之本實施形態之方法,於包含氧氣之環境中一面施加振動,一面藉由濺鍍法於包含軟性金屬之金屬粒子10之表面11形成絕緣膜12,因此,能夠抑制絕緣膜12之形成時之金屬粒子10之變形,並且,能夠於基板與被連接構件連接時確保電極間之絕緣性,維持較高之連接可靠性。 According to the method of the present embodiment described above, while the vibration is applied in an environment containing oxygen, the insulating film 12 is formed on the surface 11 of the metal particles 10 containing soft metal by a sputtering method. Therefore, the insulating film 12 can be suppressed. The metal particles 10 are deformed during the formation, and the insulation between the electrodes can be ensured when the substrate is connected to the connected member, and high connection reliability can be maintained.

[3.異向性導電接著劑] [3. Anisotropic conductive adhesive]

如圖3所示,本發明之異向性導電接著劑2係於黏合材3中以分散之狀態含有上述導電性粒子1及光反射性絕緣粒子4而成者。 As shown in FIG. 3, the anisotropic conductive adhesive 2 of the present invention is obtained by containing the above-mentioned conductive particles 1 and light-reflective insulating particles 4 in a dispersed state in a bonding material 3.

於本發明之情形時,異向性導電接著劑2之形態可為膜狀亦可為糊狀,可根據用途適當決定。 In the case of the present invention, the form of the anisotropic conductive adhesive 2 may be film-like or paste-like, and may be appropriately determined according to the application.

作為本發明所使用之黏合材3,可使用公知之熱硬化性樹脂。作為此種熱硬化性樹脂,例如,可列舉環氧樹脂、酚樹脂、三聚氰胺樹脂、脲樹脂(尿素樹脂)、不飽和聚酯樹脂、醇酸樹脂、聚胺酯樹脂、熱硬化性聚醯亞胺、丙烯酸系樹脂等。於本發明中,能夠將至少1種以上之 上述熱硬化性樹脂用作黏合材3。用作黏合材3之熱硬化性樹脂之種類並無特別限定,亦可根據用途使用上述樹脂以外之樹脂。 As the bonding material 3 used in the present invention, a known thermosetting resin can be used. Examples of such thermosetting resins include epoxy resin, phenol resin, melamine resin, urea resin (urea resin), unsaturated polyester resin, alkyd resin, polyurethane resin, thermosetting polyimide, Acrylic resin, etc. In the present invention, at least one The above thermosetting resin is used as the bonding material 3. The type of the thermosetting resin used as the adhesive 3 is not particularly limited, and resins other than the above resins may be used depending on the application.

較佳為於黏合材3中摻合與黏合材3反應之硬化劑。硬化劑之種類並無特別限定,例如可使用由異氰酸酯、酸酐、胺基樹脂等構成者。 It is preferable that a hardening agent that reacts with the bonding material 3 is blended in the bonding material 3. The type of the hardener is not particularly limited, and for example, an isocyanate, an acid anhydride, an amino resin, or the like can be used.

於黏合材3中,為了促進黏合材3與硬化劑之硬化反應,亦可併用適當之偶合劑、觸媒、硬化促進劑、其他對應於用途之成分等。 In the adhesive material 3, in order to promote the curing reaction between the adhesive material 3 and the hardener, an appropriate coupling agent, a catalyst, a hardening accelerator, and other components corresponding to the application may be used in combination.

於異向性導電接著劑2之形態為糊狀(異向性導電糊)之情形時,為了使其塗敷性提昇,亦可使用溶劑對黏度等進行調整。關於此種異向性導電糊,溶劑之種類並無特別限定,可使用酯系、酮系、醇系、烴系、醚系等,能夠將該等使用1種或混合2種以上而使用。 In the case where the form of the anisotropic conductive adhesive 2 is a paste (anisotropic conductive paste), in order to improve the coating property, the viscosity and the like may be adjusted using a solvent. The type of the anisotropic conductive paste is not particularly limited, and ester-based, ketone-based, alcohol-based, hydrocarbon-based, ether-based and the like can be used, and these can be used singly or in combination of two or more.

於異向性導電糊中,亦可視需要添加整平材、消泡材、分散材等而使用。 In the anisotropic conductive paste, a leveling material, a defoaming material, a dispersing material, etc. may be added as needed.

於本發明之情形時,異向性導電接著劑2中之導電性粒子1之摻合量並無特別限定,就確保良好之導通可靠性及絕緣可靠性之觀點而言,較佳為相對於100體積%黏合材3,含有2體積%以上且40體積%以下之導電性粒子1。 In the case of the present invention, the blending amount of the conductive particles 1 in the anisotropic conductive adhesive 2 is not particularly limited. From the viewpoint of ensuring good conduction reliability and insulation reliability, it is preferably relative to The 100% by volume adhesive material 3 contains the conductive particles 1 in an amount of 2% by volume or more and 40% by volume or less.

本發明所使用之光反射性絕緣粒子4係用以將入射至異向性導電接著劑2之光向外部反射者。 The light-reflective insulating particles 4 used in the present invention are used to reflect the light incident on the anisotropic conductive adhesive 2 to the outside.

再者,具有光反射性之粒子包括:由金屬構成之粒子、利用樹脂被覆由金屬構成之粒子而成之粒子、於自然光之下為灰色至白色之金屬氧化物、金屬氮化物、金屬硫化物等無機粒子、利用無機粒子被覆樹脂芯粒子而成之粒子、無論粒子之材質如何均於其表面具有凹凸之粒子。然而,於 該等粒子之中,由於要求表現出絕緣性,故而本發明可使用之光反射性絕緣粒子4不含由金屬構成之粒子。又,金屬氧化物粒子之中,無法使用如ITO般具有導電性者。又,即便為表現出光反射性及絕緣性之無機粒子,亦無法使用其折射率低於所使用之熱硬化性樹脂組合物之折射率者。 Furthermore, particles having light reflectivity include particles made of metal, particles made of metal coated with resin, particles of metal oxides, metal nitrides, and metal sulfides that are gray to white under natural light. And other inorganic particles, particles formed by coating the resin core particles with inorganic particles, and particles having irregularities on the surface regardless of the material of the particles. However, at Among these particles, since the insulating property is required to be exhibited, the light-reflective insulating particles 4 usable in the present invention do not include particles made of metal. Moreover, among metal oxide particles, those having conductivity such as ITO cannot be used. Moreover, even if it is an inorganic particle which exhibits light reflectivity and insulation, the refractive index which is lower than the refractive index of the thermosetting resin composition used cannot be used.

因此,作為此種光反射性絕緣粒子4之較佳之具體例,可列舉選自由氧化鈦(TiO2)、氮化硼(BN)、氧化鋅(ZnO)、氧化矽(SiO2)、氧化鋁(Al2O3)所組成之群中之至少1種無機粒子。其中,就能夠確保高折射率之方面而言,較佳為使用TiO2Therefore, as a preferable specific example of such a light-reflective insulating particle 4, a material selected from the group consisting of titanium oxide (TiO 2 ), boron nitride (BN), zinc oxide (ZnO), silicon oxide (SiO 2 ), and aluminum oxide can be cited. (Al 2 O 3 ) at least one kind of inorganic particles in the group. Among them, TiO 2 is preferably used in terms of ensuring a high refractive index.

作為光反射性絕緣粒子4之形狀,可為球狀、鱗片狀、不定形狀、針狀等,若考慮到光反射效率,則較佳為球狀、鱗片狀。 The shape of the light-reflective insulating particles 4 may be spherical, scaly, irregular, acicular, or the like. In consideration of light reflection efficiency, the shape is preferably spherical or scaly.

於本發明之情形時,光反射性絕緣粒子4之粒徑並無特別限定,較佳為導電性粒子1之粒徑之2%以上且未達20%。再者,此處所言之粒徑係指利用D50(於粉體之粒徑分佈中,大於某粒徑之個數或質量占全部粉體之個數或質量之50%時之粒徑)者。 In the case of the present invention, the particle size of the light-reflective insulating particles 4 is not particularly limited, but it is preferably 2% or more and less than 20% of the particle size of the conductive particles 1. In addition, the particle size mentioned here refers to the use of D50 (in the particle size distribution of the powder, the number of particles larger than a certain particle size or mass accounts for the total number of particles or 50% of the particle size) .

於相對於導電性粒子1之粒徑之光反射性絕緣粒子4之粒徑為20%以上之情形時,由於在對向之連接電極與導電性粒子1之界面嵌入光反射性絕緣粒子4而成為散熱之妨礙,於小於2%之情形時,無法將發光元件中所產生之光高效地反射。 When the particle size of the light-reflective insulating particles 4 with respect to the particle size of the conductive particles 1 is 20% or more, the light-reflective insulating particles 4 are embedded at the interface between the opposing electrode and the conductive particles 1. If it is less than 2%, the light generated in the light-emitting element cannot be efficiently reflected.

具體而言,光反射性絕緣粒子4之粒徑較佳為0.02μm以上且20μm以下,更佳為0.2μm以上且1μm以下。 Specifically, the particle diameter of the light-reflective insulating particles 4 is preferably 0.02 μm or more and 20 μm or less, and more preferably 0.2 μm or more and 1 μm or less.

由無機粒子所構成之光反射性絕緣粒子4之折射率(JIS K7142)較佳為比作為黏合材3之熱硬化性樹脂組合物之硬化物之折射率 (JIS K7142)大,更佳為大至少0.02左右。其原因在於:若折射率差較小, 則光反射性絕緣粒子4及黏合材3之界面上之光反射效率下降。 The refractive index (JIS K7142) of the light-reflective insulating particles 4 composed of inorganic particles is preferably higher than the refractive index of the cured product of the thermosetting resin composition as the bonding material 3. (JIS K7142) large, more preferably at least about 0.02. The reason is: if the refractive index difference is small, Then, the light reflection efficiency at the interface between the light-reflective insulating particles 4 and the bonding material 3 decreases.

[4.異向性導電接著劑之製造方法] [4. Manufacturing method of anisotropic conductive adhesive]

於製造本發明之異向性導電接著劑2之情形時,只要能夠將導電性粒子1及光反射性絕緣粒子4分散於黏合材3中,則並無特別限定,可應用公知之分散方法。 When the anisotropic conductive adhesive 2 of the present invention is produced, the conductive particles 1 and the light-reflective insulating particles 4 are not particularly limited as long as they can be dispersed in the bonding material 3, and a known dispersion method can be applied.

於製造膜狀之異向性導電接著劑(異向性導電膜)之情形時,係將使導電性粒子1及光反射性絕緣粒子4分散於黏合材3中而成之混合物成型為膜狀而獲得,關於異向性導電糊,係對以與異向性導電膜同樣之方式獲得之混合物使用溶劑調整黏度等而獲得。 When manufacturing a film-shaped anisotropic conductive adhesive (anisotropic conductive film), a mixture obtained by dispersing conductive particles 1 and light-reflective insulating particles 4 in an adhesive 3 is molded into a film. The obtained anisotropic conductive paste is obtained by adjusting the viscosity and the like of the mixture obtained in the same manner as the anisotropic conductive film using a solvent.

[5.發光裝置及其製造方法] [5. Light-emitting device and manufacturing method thereof]

圖4係表示本發明之發光裝置之實施形態之構成之剖視圖。 Fig. 4 is a cross-sectional view showing the structure of an embodiment of a light-emitting device according to the present invention.

如圖4所示,本實施形態之發光裝置5例如以由陶瓷所構成之配線基板50及於該配線基板50上安裝之發光元件40所構成。 As shown in FIG. 4, the light-emitting device 5 of this embodiment is composed of, for example, a wiring board 50 made of ceramic and a light-emitting element 40 mounted on the wiring board 50.

於本實施形態之情形時,於配線基板50上,例如藉由鍍鎳/鍍金將第1及第2連接電極51、52形成為特定之圖案形狀作為成對之連接電極。 In the case of this embodiment, the first and second connection electrodes 51 and 52 are formed on the wiring board 50 into a specific pattern shape as a pair of connection electrodes by, for example, nickel plating / gold plating.

於第1及第2連接電極51、52之例如鄰接之端部,分別設置有例如由柱形凸塊所構成之凸狀之端子部51b、52b。 For example, adjacent end portions of the first and second connection electrodes 51 and 52 are provided with convex-shaped terminal portions 51b and 52b made of, for example, columnar bumps.

另一方面,作為發光元件40,例如使用有發出峰值波長為400nm以上且500nm以下之可見光之LED晶片。 On the other hand, as the light emitting element 40, for example, an LED wafer that emits visible light having a peak wavelength of 400 nm to 500 nm is used.

本發明尤其是可良好地使用峰值波長為450nm附近之藍色用之LED。 In particular, the present invention can favorably use blue LEDs having a peak wavelength around 450 nm.

關於發光元件40,其本體部40a形成為例如長方體形狀,於一面上設置有作為陽極電極及陰極電極之第1及第2連接電極41、42。該等第1及第2連接電極41、42例如由金-錫合金形成。 The light-emitting element 40 has a main body portion 40 a formed in, for example, a rectangular parallelepiped shape, and first and second connection electrodes 41 and 42 serving as an anode electrode and a cathode electrode are provided on one surface. The first and second connection electrodes 41 and 42 are formed of, for example, a gold-tin alloy.

此處,於使配線基板50之第1及第2連接電極51、52之端子部51b、52b與發光元件40之第1及第2連接電極41、42對向而配置之情形時,以各連接部分對向之方式設定各者之大小以及形狀。 Here, when the terminal portions 51b and 52b of the first and second connection electrodes 51 and 52 of the wiring board 50 and the first and second connection electrodes 41 and 42 of the light emitting element 40 are arranged to face each other, each The size and shape of each of the connecting portions are set in the manner in which the connecting portions face each other.

而且,發光元件40藉由含有上述導電性粒子1及光反射性絕緣粒子4之經硬化之上述異向性導電接著劑2而接著於配線基板50上。 The light-emitting element 40 is adhered to the wiring substrate 50 with the anisotropic conductive adhesive 2 hardened and containing the conductive particles 1 and the light-reflective insulating particles 4.

此處,發光元件40之第1及第2連接電極41、42經由上述異向性導電接著劑2之導電性粒子1而與配線基板50之相對應之第1及第2連接電極51、52(端子部51b、52b)分別電性連接。 Here, the first and second connection electrodes 41 and 42 of the light-emitting element 40 correspond to the first and second connection electrodes 51 and 52 of the wiring substrate 50 via the conductive particles 1 of the anisotropic conductive adhesive 2 described above. (Terminal portions 51b, 52b) are electrically connected.

即,發光元件40之第1連接電極41藉由導電性粒子1之接觸而與配線基板50之第1連接電極51之端子部51b電性連接,並且,發光元件40之第2連接電極42藉由導電性粒子1之接觸而與配線基板50之第2連接電極52之端子部52b電性連接。 That is, the first connection electrode 41 of the light-emitting element 40 is electrically connected to the terminal portion 51b of the first connection electrode 51 of the wiring substrate 50 through the contact of the conductive particles 1, and the second connection electrode 42 of the light-emitting element 40 is borrowed. The conductive particles 1 are in electrical contact with the terminal portion 52 b of the second connection electrode 52 of the wiring board 50 by the contact.

另一方面,配線基板50之第1連接電極51及發光元件40之第1連接電極41與配線基板50之第2連接電極52及發光元件40之第2連接電極42藉由異向性導電接著劑2中之絕緣性之黏合材3而相互絕緣。 On the other hand, the first connection electrode 51 of the wiring substrate 50 and the first connection electrode 41 of the light emitting element 40 and the second connection electrode 52 of the wiring substrate 50 and the second connection electrode 42 of the light emitting element 40 are bonded by anisotropic conduction. The insulating bonding material 3 in the agent 2 is insulated from each other.

圖5(a)~(c)係表示本發明之發光裝置之製造步驟之例之圖。 5 (a) to (c) are diagrams showing examples of manufacturing steps of the light emitting device of the present invention.

首先,如圖5(a)所示,準備具有第1及第2連接電極51、52之配線基板50、及具有與配線基板50之第1及第2連接電極51、52分別對應之 第1及第2連接電極41、42之發光元件40。 First, as shown in FIG. 5 (a), a wiring substrate 50 having first and second connection electrodes 51 and 52 and a first and second connection electrodes 51 and 52 corresponding to the wiring substrate 50 are prepared, respectively. The light-emitting element 40 of the first and second connection electrodes 41 and 42.

繼而,於將配線基板50之第1及第2連接電極51、52之端子部51b、52b與發光元件40之第1及第2連接電極41、42配置於對向之方向上之狀態下,以覆蓋配線基板50之第1及第2連接電極51、52之端子部51b、52b之方式配置例如未硬化之糊狀之異向性導電接著劑2a。 Then, in a state where the terminal portions 51 b and 52 b of the first and second connection electrodes 51 and 52 of the wiring substrate 50 and the first and second connection electrodes 41 and 42 of the light-emitting element 40 are arranged in opposite directions, The non-hardened paste-shaped anisotropic conductive adhesive 2 a is disposed so as to cover the terminal portions 51 b and 52 b of the first and second connection electrodes 51 and 52 of the wiring substrate 50.

再者,於例如未硬化之異向性導電接著劑2a為膜狀者之情形時,藉由例如未圖示之貼附裝置將未硬化之異向性導電接著劑2a貼附於配線基板50之設置有第1及第2連接電極51、52之側之面之特定位置。 In addition, when the uncured anisotropic conductive adhesive 2a is a film, for example, the uncured anisotropic conductive adhesive 2a is attached to the wiring board 50 by, for example, an attaching device (not shown). The first and second connection electrodes 51 and 52 are provided at specific positions on the side surfaces.

繼而,如圖5(b)所示,於在未硬化之異向性導電接著劑2a上載置發光元件40並對準之後,藉由未圖示之熱壓頭對發光元件40之發光側之面、即與設置有第1及第2連接電極41、42之側為相反側之面40b以特定之壓力及溫度進行加壓、加熱。 Then, as shown in FIG. 5 (b), after the light-emitting element 40 is placed on the non-hardened anisotropic conductive adhesive 2a and aligned, the light-emitting side of the light-emitting element 40 is heated by a thermal head (not shown). The surface, that is, the surface 40b opposite to the side on which the first and second connection electrodes 41 and 42 are provided is pressurized and heated at a specific pressure and temperature.

藉此,未硬化之異向性導電接著劑2a之黏合材3a硬化,如圖5(c)所示,發光元件40藉由已硬化之異向性導電接著劑2之接著力而接著固定於配線基板50上。 Thereby, the bonding material 3a of the non-hardened anisotropic conductive adhesive 2a is hardened. As shown in FIG. 5 (c), the light-emitting element 40 is subsequently fixed to the hardened anisotropic conductive adhesive 2 by the bonding force of the hardened anisotropic conductive adhesive 2. On the wiring board 50.

又,於該熱壓接步驟中,多個導電性粒子1分別與配線基板50之第1及第2連接電極51、52之端子部51b、52b及發光元件40之第1及第2連接電極41、42接觸並被加壓,其結果,發光元件40之第1連接電極41與配線基板50之第1連接電極51、以及發光元件40之第2連接電極42與配線基板50之第2連接電極52分別電性連接。 In this thermocompression bonding step, the plurality of conductive particles 1 are respectively connected to the terminal portions 51b and 52b of the first and second connection electrodes 51 and 52 of the wiring substrate 50 and the first and second connection electrodes of the light emitting element 40. 41 and 42 are contacted and pressurized. As a result, the first connection electrode 41 of the light emitting element 40 is connected to the first connection electrode 51 of the wiring substrate 50, and the second connection electrode 42 of the light emitting element 40 is connected to the second connection of the wiring substrate 50. The electrodes 52 are electrically connected.

另一方面,配線基板50之第1連接電極51及發光元件40之第1連接電極41與配線基板50之第2連接電極52及發光元件40之第2 連接電極42藉由異向性導電接著劑2中之黏合材3而成為相互絕緣之狀態。 On the other hand, the first connection electrode 51 of the wiring substrate 50 and the first connection electrode 41 of the light emitting element 40 and the second connection electrode 52 of the wiring substrate 50 and the second connection of the light emitting element 40 The connection electrodes 42 are insulated from each other by the bonding material 3 in the anisotropic conductive adhesive 2.

繼而,根據以上之步驟而獲得目標發光裝置5。 Then, the target light emitting device 5 is obtained according to the above steps.

於以上所述之本實施形態中,於導電性粒子1中,於由焊料合金所構成之軟性之金屬粒子10之表面11形成有絕緣膜12,於藉由加熱、加壓進行安裝時,藉由發光元件40之第1及第2連接電極41、42與配線基板50之第1及第2連接電極51、52而將導電性粒子1加壓並壓碎,與此同時,導電性粒子1之形成於金屬粒子10之表面11之絕緣膜12破裂而露出未氧化之例如焊料成分,藉此,於發光元件40之第1及第2連接電極41、42以及配線基板50之第1及第2連接電極51、52與金屬粒子10之間分別形成金屬共晶接合。 In the embodiment described above, in the conductive particles 1, an insulating film 12 is formed on the surface 11 of the soft metal particles 10 made of a solder alloy. When the insulating film 12 is mounted by heating or pressure, The conductive particles 1 are pressed and crushed by the first and second connection electrodes 41 and 42 of the light-emitting element 40 and the first and second connection electrodes 51 and 52 of the wiring substrate 50, and the conductive particles 1 are simultaneously crushed. The insulating film 12 formed on the surface 11 of the metal particles 10 is cracked to expose non-oxidized components such as solder. As a result, the first and second connection electrodes 41 and 42 of the light emitting element 40 and the first and second connection electrodes 50 of the wiring substrate 50 are exposed. 2 The connection electrodes 51 and 52 and the metal particles 10 form a metal eutectic bond, respectively.

另一方面,存在於未施加壓力之導通部位以外之鄰接之連接電極、即發光元件40之第1及第2連接電極41、42以及配線基板50之第1及第2連接電極51、52之間之導電性粒子1即便於導電性粒子1彼此接觸之情形時,亦能夠藉由形成於金屬粒子10之表面11之絕緣膜12之存在而保持絕緣性。 On the other hand, there are adjacent connection electrodes other than the conducting portion where no pressure is applied, that is, the first and second connection electrodes 41 and 42 of the light emitting element 40 and the first and second connection electrodes 51 and 52 of the wiring substrate 50. Even when the conductive particles 1 are in contact with each other, the conductive particles 1 can maintain the insulating property by the presence of the insulating film 12 formed on the surface 11 of the metal particles 10.

其結果,根據本實施形態,能夠於較高之連接可靠性之下將具有窄間距配線之連接電極之發光元件40覆晶安裝於配線基板50上,並且,能夠將發光元件40之發光部所產生之熱高效地向配線基板50側散熱。 As a result, according to this embodiment, the light-emitting element 40 having connection electrodes with narrow-pitch wiring can be flip-chip mounted on the wiring substrate 50 with high connection reliability, and the light-emitting portion of the light-emitting element 40 can be mounted. The generated heat is efficiently radiated to the wiring substrate 50 side.

即,於本實施形態中,使用例如由焊料合金所構成之軟性金屬作為導電性粒子1之金屬粒子10,因此,能夠增大導電性粒子1與發光元件40之第1及第2連接電極41、42以及配線基板50之第1及第2連接電極51、52之連接部分之面積,藉此,能夠使連接可靠性及散熱特性提昇。 That is, in this embodiment, since a soft metal made of, for example, a solder alloy is used as the metal particles 10 of the conductive particles 1, the first and second connection electrodes 41 of the conductive particles 1 and the light-emitting element 40 can be increased. , 42 and the area of the connection portions of the first and second connection electrodes 51 and 52 of the wiring substrate 50, whereby connection reliability and heat dissipation characteristics can be improved.

進而,於本實施形態中,於異向性導電接著劑2之黏合材3中含有光反射性絕緣粒子4,因此,能夠將發光元件40之發光部所產生之光高效地反射而使發光效率提昇。尤其是於使用具有一般實施有耐腐蝕性較高之鍍金之連接電極之配線基板之情形時,若為利用金-錫(Au-Sn)之金屬共晶接合進行之連接,則自發光元件釋出之光被鍍金吸收而光通量下降,與此相對,根據本實施形態,藉由利用異向性導電接著劑2中之光反射性絕緣粒子4進行光之反射,能夠獲得較高之光通量。 Furthermore, in this embodiment, since the light-reflective insulating particles 4 are contained in the bonding material 3 of the anisotropic conductive adhesive 2, the light generated by the light-emitting portion of the light-emitting element 40 can be efficiently reflected and the light-emitting efficiency can be improved. Promotion. In particular, in the case of using a wiring substrate having a gold-plated connection electrode that is generally implemented with high corrosion resistance, if the connection is made by gold-tin (Au-Sn) metal eutectic bonding, the self-emitting element is released On the other hand, according to the present embodiment, light emitted is absorbed by gold plating and the luminous flux is decreased. According to this embodiment, a high luminous flux can be obtained by reflecting light with the light-reflective insulating particles 4 in the anisotropic conductive adhesive 2.

如上所述,根據本實施形態,能夠提供一種發光裝置5,其可實現能夠被窄間距配線之發光元件40之覆晶安裝採用之發光元件40之小型化,並且,具有較高之光學特性、較高之散熱性及較高之連接可靠性。 As described above, according to the present embodiment, it is possible to provide a light-emitting device 5 which can realize miniaturization of the light-emitting element 40 which can be used for flip-chip mounting of the light-emitting element 40 with narrow pitch wiring, and has high optical characteristics, Higher heat dissipation and higher connection reliability.

再者,本發明並不限定於上述實施形態,能夠進行各種變更。 The present invention is not limited to the above-mentioned embodiment, and various changes can be made.

例如,圖4及圖5(a)~(c)所示之發光裝置5係對其形狀或大小進行簡化而模式性地進行表示者,關於配線基板以及發光元件之連接電極之形狀、大小及數量等,能夠進行適當變更。 For example, the light-emitting device 5 shown in FIGS. 4 and 5 (a) to (c) is a person who simplifies and schematically shows the shape or size of the light-emitting device 5. The shape, size, and The number and the like can be appropriately changed.

又,作為配線基板50,除上述由陶瓷所構成之基板以外,例如,可列舉印刷配線基板、LCD用玻璃基板、軟性印刷基板等。 In addition, as the wiring substrate 50, in addition to the substrate made of ceramics described above, for example, a printed wiring substrate, a glass substrate for an LCD, a flexible printed substrate, and the like can be mentioned.

進而,本發明之異向性導電接著劑2並不限定於LED晶片等發光元件,能夠用於各種電氣零件。 Furthermore, the anisotropic conductive adhesive 2 of the present invention is not limited to light-emitting elements such as LED wafers, and can be used for various electrical components.

但是,本發明之異向性導電接著劑2於應用於如上述LED晶片般發光同時發熱之電氣零件之情形時尤其有效。 However, the anisotropic conductive adhesive 2 of the present invention is particularly effective when applied to electrical parts that emit light and generate heat like the LED chip described above.

[實施例] [Example]

以下,列舉實施例及比較例具體地對本發明進行說明,但本 發明並不限定於以下之實施例。 Hereinafter, the present invention will be specifically described with reference to examples and comparative examples. The invention is not limited to the following examples.

<接著劑組合物之製備> <Preparation of Adhesive Composition>

使用環氧樹脂(Daicel化學工業公司製造之CEL2021P)50重量份、作為硬化劑之甲基六氫鄰苯二甲酸酐(新日本理化公司製造之MH-700)50重量份、硬化促進劑(四國化學公司製造之2E4MZ)1重量份來製備接著劑組合物。 50 parts by weight of epoxy resin (CEL2021P manufactured by Daicel Chemical Industry Co., Ltd.), 50 parts by weight of methyl hexahydrophthalic anhydride (MH-700 manufactured by Nippon Rika Chemical Co., Ltd.), and a hardening accelerator (four 1 part by weight of 2E4MZ manufactured by National Chemical Co., Ltd. to prepare an adhesive composition.

<導電性粒子之製成> <Production of conductive particles>

[實施例粒子1] [Example Particle 1]

使用具備振動裝置之濺鍍裝置(圖2之濺鍍裝置30),於焊料合金粒子之表面形成金屬氧化物膜。焊料合金粒子係使用平均粒徑為5μm之Sn-3.0Ag-0.5Cu(wt%)組成之無鉛焊料粒子(千住金屬工業公司製造之M705),濺鍍靶(圖2中之濺鍍靶32)係使用矽(Si)靶。 A metal oxide film is formed on the surface of the solder alloy particles by using a sputtering device (a sputtering device 30 in FIG. 2) having a vibration device. The solder alloy particles are lead-free solder particles (M705 manufactured by Senju Metal Industry Co., Ltd.) composed of Sn-3.0Ag-0.5Cu (wt%) with an average particle diameter of 5 μm, and a sputtering target (Sputtering target 32 in FIG. 2) The system uses a silicon (Si) target.

具體而言,於濺鍍裝置中,將開口徑Φ12cm之不鏽鋼容器(圖2中之容器21)設置於振動台上,於不鏽鋼容器中配置焊料合金粒子50g,密閉後,使旋轉泵及低溫泵動作,進行真空排氣直至真空槽內部之壓力成為2×10-4Pa。 Specifically, in a sputtering apparatus, a stainless steel container (container 21 in FIG. 2) having an opening diameter of Φ 12 cm is set on a vibration table, and 50 g of solder alloy particles are placed in the stainless steel container. After being sealed, a rotary pump and a cryogenic pump Operate and evacuate until the pressure inside the vacuum tank becomes 2 × 10 -4 Pa.

繼而,於振動裝置20中,一面產生振幅為±2mm、振動數為30Hz之振動而對不鏽鋼容器施加連續振動,一面以真空槽內之壓力保持為2Pa之方式以特定之流量導入作為氣體之氬氣(Ar)90%及氧氣(O2)10%並進行排氣速度之調整。 Next, in the vibration device 20, argon as a gas was introduced at a specific flow rate while a continuous flow was applied to the stainless steel container while generating a vibration with an amplitude of ± 2 mm and a vibration number of 30 Hz, while maintaining the pressure in the vacuum tank at 2 Pa. The gas (Ar) is 90% and the oxygen (O 2 ) is 10%, and the exhaust speed is adjusted.

進而,對矽靶施加300W之直流功率,藉由濺鍍而於焊料合金粒子之表面形成厚度50nm之由矽氧化物(SiOx)所構成之絕緣膜,獲 得實施例粒子1。 Furthermore, a direct current power of 300 W was applied to the silicon target, and an insulating film made of silicon oxide (SiO x ) with a thickness of 50 nm was formed on the surface of the solder alloy particles by sputtering to obtain Example Particle 1.

[實施例粒子2] [Example Particle 2]

將成膜前之真空槽內部之壓力設定為3×10-4Pa,於焊料合金粒子之表面形成厚度5nm之由矽氧化物(SiOx)所構成之絕緣膜,除此以外,於與實施例粒子1相同之條件下製成實施例粒子2。 The pressure inside the vacuum tank before film formation was set to 3 × 10 -4 Pa, and an insulating film made of silicon oxide (SiO x ) with a thickness of 5 nm was formed on the surface of the solder alloy particles. Example particle 1 was prepared under the same conditions as Example particle 2.

[實施例粒子3] [Example Particle 3]

將成膜前之真空槽內部之壓力設定為5×10-4Pa,於焊料合金粒子之表面形成厚度200nm之由矽氧化物(SiOx)所構成之絕緣膜,除此以外,於與實施例粒子1相同之條件下製成實施例粒子3。 The pressure inside the vacuum chamber before film formation was set to 5 × 10 -4 Pa, and an insulating film made of silicon oxide (SiO x ) with a thickness of 200 nm was formed on the surface of the solder alloy particles. Example particle 1 was prepared under the same conditions as Example particle 3.

[實施例粒子4] [Example Particle 4]

將成膜前之真空槽內部之壓力設為4×10-4Pa,並且將氧分壓設定為5%,使用由鋁(Al)所構成者作為濺鍍靶而於焊料合金粒子之表面形成與實施例粒子1相同之厚度50nm之由氧化鋁(AlOx)所構成之絕緣膜,除此以外,於與實施例粒子1相同之條件下製成實施例粒子4。 The pressure inside the vacuum tank before film formation was set to 4 × 10 -4 Pa, and the oxygen partial pressure was set to 5%. A sputtering target made of aluminum (Al) was used to form the surface of the solder alloy particles. Except that the insulating film made of alumina (AlO x ) having a thickness of 50 nm was the same as that of the example particle 1, the example particle 4 was prepared under the same conditions as the example particle 1.

[實施例粒子5] [Example Particle 5]

將成膜前之真空槽內部之壓力設為4×10-4Pa,並且將氧分壓設定為40%,使用由鈦(Ti)所構成者作為濺鍍靶而於焊料合金粒子之表面形成與實施例粒子1相同之厚度50nm之由氧化鈦(TiOx)所構成之絕緣膜,除此以外,於與實施例粒子1相同之條件下製成實施例粒子5。 The pressure inside the vacuum tank before film formation was set to 4 × 10 -4 Pa, the oxygen partial pressure was set to 40%, and a titanium alloy (Ti) was used as a sputtering target to form the surface of the solder alloy particles. the insulating film of 50nm of titanium oxide (TiO x) composed of the same thickness of the particles in Example 1 embodiment, except that, in under the same conditions of Example 1 particles prepared in Example 5 particles embodiment.

[實施例粒子6] [Example Particle 6]

將成膜前之真空槽內部之壓力設為4×10-4Pa,並且將氧分壓設定為20%,使用由鈮(Nb)所構成者作為濺鍍靶而於焊料合金粒子之表面形成與 實施例粒子1相同之厚度50nm之由氧化鈮(NbOx)所構成之絕緣膜,除此以外,於與實施例粒子1相同之條件下製成實施例粒子6。 The pressure inside the vacuum chamber before film formation was set to 4 × 10 -4 Pa, and the oxygen partial pressure was set to 20%. A niobium (Nb) composed of niobium (Nb) was used as a sputtering target to form the surface of the solder alloy particles. Except that the insulating film made of niobium oxide (NbO x ) having the same thickness as that of the example particle 1 was 50 nm, the example particle 6 was prepared under the same conditions as the example particle 1.

[比較例粒子1] [Comparative Example Particle 1]

將使用與實施例粒子1相同之焊料合金粒子且於該焊料合金粒子之表面未形成絕緣膜之導電性粒子作為比較例粒子1。 As the comparative example particle 1, the conductive particle which uses the same solder alloy particle as Example particle 1 and did not form the insulating film on the surface of this solder alloy particle is used.

[比較例粒子2] [Comparative Example Particle 2]

將成膜前之真空槽內部之壓力設定為4×10-4Pa,於焊料合金粒子之表面形成厚度2nm之由矽氧化物(SiOx)所構成之絕緣膜,除此以外,於與實施例粒子1相同之條件下製成比較例粒子2。 The pressure inside the vacuum chamber before film formation was set to 4 × 10 -4 Pa, and an insulating film made of silicon oxide (SiO x ) with a thickness of 2 nm was formed on the surface of the solder alloy particles. Comparative Example Particle 2 was prepared under the same conditions as Example Particle 1.

[比較例粒子3] [Comparative Example Particle 3]

將成膜前之真空槽內部之壓力設定為4×10-4Pa,於焊料合金粒子之表面形成厚度500nm之由矽氧化物(SiOx)所構成之絕緣膜,除此以外,於與實施例粒子1相同之條件下製成比較例粒子3。 The pressure inside the vacuum chamber before film formation was set to 4 × 10 -4 Pa, and an insulating film made of silicon oxide (SiO x ) with a thickness of 500 nm was formed on the surface of the solder alloy particles. Comparative Example Particle 3 was prepared under the same conditions as Example Particle 1.

[比較例粒子4] [Comparative Example Particle 4]

將於與實施例粒子1相同之條件下在焊料合金粒子之表面形成厚度50nm之由矽氧化物(SiOx)所構成之絕緣膜的導電性粒子作為比較例粒子4。 Conductive particles having a thickness of 50 nm and an insulating film made of silicon oxide (SiO x ) on the surfaces of the solder alloy particles under the same conditions as those of the example particles 1 were used as comparative example particles 4.

<異向性導電接著劑之製成> <Production of anisotropic conductive adhesive>

於上述接著劑組合物中分別混入5重量%之上述實施例粒子1~6及比較例粒子1~4、及10重量%之作為光反射性絕緣粒子之粒徑0.25μm之由氧化鈦(TiO2)所構成之白色粒子(除比較例4以外),而獲得實施例1~6以及比較例1~4之異向性導電接著劑。 5% by weight of the above-mentioned particles of Examples 1 to 6 and Comparative Examples of particles 1 to 4 and 10% by weight of the above-mentioned adhesive composition were respectively made of titanium oxide (TiO 2 ) Anisotropic conductive adhesives of Examples 1 to 6 and Comparative Examples 1 to 4 were obtained from the white particles (except for Comparative Example 4).

<評價> <Evaluation>

(1)反射率測定 (1) Measurement of reflectance

以乾燥後之厚度成為100μm之方式將實施例1~6及比較例1~4之異向性導電接著劑塗佈於平滑之白色板上,以溫度200℃加熱1分鐘使其硬化,而製成反射率測定用之樣品。 The anisotropic conductive adhesives of Examples 1 to 6 and Comparative Examples 1 to 4 were coated on a smooth white plate so that the thickness after drying became 100 μm, and were cured by heating at 200 ° C for 1 minute to prepare Samples for reflectance measurement.

使用分光測色計(柯尼卡美能達公司製造之CM-3600A),對各樣品於藍色波長之波長450nm之反射率進行測定。將其結果示於表1。 A spectrophotometer (CM-3600A manufactured by Konica Minolta) was used to measure the reflectance of each sample at a wavelength of 450 nm at a blue wavelength. The results are shown in Table 1.

(2)LED模組之製成 (2) Manufacturing of LED modules

將實施例1~6及比較例1~4之異向性導電接著劑塗佈於LED安裝用之由陶瓷所構成之2種配線基板上。 The anisotropic conductive adhesives of Examples 1 to 6 and Comparative Examples 1 to 4 were applied to two types of wiring boards made of ceramics for LED mounting.

此處,以第1配線基板之電極間間隔為70μm實施鍍鎳/鍍金=5.0μm/0.3μm。 Here, nickel plating / gold plating = 5.0 μm / 0.3 μm was performed with an interval between electrodes of the first wiring substrate being 70 μm.

另一方面,以第2配線基板之電極間間隔為30μm實施鍍鎳/鍍金=5.0μm/0.3μm。 On the other hand, nickel plating / gold plating = 5.0 μm / 0.3 μm was performed at an interval between electrodes of the second wiring substrate of 30 μm.

於上述配線基板上,對準並搭載藍色LED晶片(晶片尺寸:1mm×1mm,順向電壓Vf=3.1V(順向電流If=350mA)),以溫度150℃-5分鐘~260℃-10秒鐘且每個晶片1kg之壓力進行加熱壓接,而製成實施例1~6及比較例1~4之LED模組。 On the above wiring board, align and mount a blue LED chip (wafer size: 1mm × 1mm, forward voltage Vf = 3.1V (forward current If = 350mA)), at a temperature of 150 ℃ -5 minutes ~ 260 ℃- The LED modules of Examples 1 to 6 and Comparative Examples 1 to 4 were fabricated by heating and crimping with a pressure of 1 kg per wafer for 10 seconds.

再者,實施例及比較例所使用之LED晶片之連接電極係藉由金/錫鍍覆而形成為厚度3μm。 The connection electrodes of the LED chips used in the examples and comparative examples were formed to have a thickness of 3 μm by gold / tin plating.

(3)LED模組之全光通量測定 (3) Total luminous flux measurement of LED module

使用積分球型之全光通量測定系統(大塚電子公司製造之LE-2100),於If=350mA之定電流控制之條件下,對實施例1~6及比較例1~4之LED 模組(使用有第1配線基板者)之全光通量進行測定。將其結果示於表1。 Using an integrating sphere-type total luminous flux measurement system (LE-2100 manufactured by Otsuka Electronics Co., Ltd.), under conditions of constant current control of If = 350mA, the LEDs of Examples 1 to 6 and Comparative Examples 1 to 4 were used. The total luminous flux of the module (when the first wiring board is used) is measured. The results are shown in Table 1.

(4)熱阻值測定 (4) Determination of thermal resistance

關於上述實施例1~6及比較例1~4之LED模組(使用有第1配線基板者),使用靜態方式之暫態熱阻測定裝置(Mentor Graphics公司製造之T3STAR),對LED模組之電性連接部分之熱阻值進行測定。 Regarding the LED modules of the above-mentioned Examples 1 to 6 and Comparative Examples 1 to 4 (when the first wiring substrate is used), a static thermal resistance measuring device (T3STAR manufactured by Mentor Graphics) was used for the LED modules. The thermal resistance of the electrical connection is measured.

於該情形時,測定條件係設為If=350mA、Im=1mA,讀取點亮0.1秒鐘之時之熱阻值。將其結果示於表1。 In this case, the measurement conditions are set to If = 350mA and Im = 1mA, and the thermal resistance value at the time of lighting for 0.1 second is read. The results are shown in Table 1.

(5)導通可靠性及絕緣可靠性 (5) Continuity and insulation reliability

將上述實施例1~6及比較例1~4之LED模組配置於溫度85℃、相對濕度85%RH之環境之烘箱內,於If=350mA之定電流控制之條件下點亮,進行1000小時試驗後,自烘箱取出。 The LED modules of Examples 1 to 6 and Comparative Examples 1 to 4 were placed in an oven in an environment with a temperature of 85 ° C and a relative humidity of 85% RH, and lit under the condition of constant current control of If = 350mA for 1000 hours. After the hour test, it was removed from the oven.

(導通可靠性之評價) (Evaluation of conduction reliability)

於上述環境試驗之前後,對實施例1~6及比較例1~4之LED模組之中使用有第1配線基板(電極間間隔:70μm)之樣品測定If=350mA之Vf值,進行導通可靠性之評價。 Before and after the environmental test described above, the LED modules of Examples 1 to 6 and Comparative Examples 1 to 4 were used to measure the Vf value of If = 350mA on samples using the first wiring substrate (inter-electrode space: 70 μm), and conducted. Evaluation of reliability.

於該情形時,將Vf之平均值設為3.1V,將與該平均值相比Vf值高出0.05V以內之情形評價為「○」,將與該平均值相比Vf值高出高於0.05V且0.1V以內之情形評價「△」,將與該平均值相比Vf值高出高於0.1V之情形評價為「×」。將其結果示於表1。 In this case, the average value of Vf is set to 3.1V, and the case where the Vf value is within 0.05V higher than the average value is evaluated as "○", and the Vf value is higher than the average value by more than A "△" was evaluated for a case of 0.05 V and less than 0.1 V, and a case where the Vf value was higher than the average value by more than 0.1 V was evaluated as "×". The results are shown in Table 1.

(絕緣可靠性之評價) (Evaluation of insulation reliability)

於上述環境試驗之前後,對實施例1~6及比較例1~4之LED模組之中使用有第2配線基板(電極間間隔:30μm)之樣品測定施加5V之反向 電壓之時之漏電流值Ir,並進行絕緣可靠性之評價。 Before and after the above environmental test, a sample of the LED module of Examples 1 to 6 and Comparative Examples 1 to 4 using a second wiring substrate (inter-electrode interval: 30 μm) was measured to apply a reverse direction of 5 V. The leakage current value Ir at the time of the voltage is evaluated for insulation reliability.

於該情形時,將漏電流值Ir為1μA以上之情形評價為NG(無法使用)。將其結果示於表1。 In this case, a case where the leakage current value Ir is 1 μA or more is evaluated as NG (unusable). The results are shown in Table 1.

Figure TW201805388AD00001
Figure TW201805388AD00001

(6)評價結果 (6) Evaluation results

<實施例1> <Example 1>

由表1可知,確認於使用含有在焊料合金粒子之表面形成有厚度50nm之由矽氧化物(SiOx)所構成之絕緣膜之實施例粒子1及粒徑0.25μm之由 氧化鈦(TiO2)所構成之光反射性絕緣粒子的實施例1之異向性導電接著劑(於450nm之反射率=62%)之LED模組中,全光通量為7.0(lm),與使用不含光反射性絕緣粒子之習知之異向性導電接著劑(例如,比較例4:反射率=8%)之LED模組(全光通量=3.3(lm))相比,光學特性提昇。 As can be seen from Table 1, it was confirmed that Example 1 containing Example 50 containing an insulating film made of silicon oxide (SiO x ) with a thickness of 50 nm was formed on the surface of the solder alloy particles, and titanium oxide (TiO 2 In the LED module of the anisotropic conductive adhesive of Example 1 (reflectivity at 450nm = 62%) composed of light-reflective insulating particles, the total luminous flux is 7.0 (lm), and the use does not include light reflection Compared with the conventional anisotropic conductive adhesive (for example, Comparative Example 4: Reflectance = 8%) of an insulating insulating particle, the LED module (total luminous flux = 3.3 (lm)) has improved optical characteristics.

又,確認該LED模組之電性連接部分之熱阻值為13.2(℃/W),具有高散熱特性。 In addition, it was confirmed that the thermal resistance value of the electrical connection portion of the LED module was 13.2 (° C / W), which had high heat dissipation characteristics.

進而,該LED模組之初期導通可靠性及初期絕緣可靠性良好,又,於85℃、85%RH環境下進行點亮試驗(If=350mA)後,亦獲得穩定之導通可靠性及絕緣可靠性。 Furthermore, the initial conduction reliability and initial insulation reliability of the LED module are good. After conducting the lighting test (If = 350mA) under the environment of 85 ° C and 85% RH, stable conduction reliability and insulation reliability are also obtained. Sex.

<實施例2> <Example 2>

由表1可知,確認於使用含有在焊料合金粒子之表面形成有厚度5nm之由矽氧化物(SiOx)所構成之絕緣膜之實施例粒子2及粒徑0.25μm之由氧化鈦(TiO2)所構成之光反射性絕緣粒子的實施例2之異向性導電接著劑(於450nm之反射率=65%)之LED模組中,全光通量為7.3(lm),與使用上述比較例4之異向性導電接著劑之LED模組相比,光學特性提昇。 As can be seen from Table 1, it was confirmed that Example 2 containing an insulating film composed of silicon oxide (SiO x ) having a thickness of 5 nm was formed on the surface of the solder alloy particles, and titanium oxide (TiO 2 In the LED module of the anisotropic conductive adhesive of Example 2 (reflectivity at 450nm = 65%) composed of the light-reflective insulating particles, the total luminous flux was 7.3 (lm), which was the same as that in Comparative Example 4 described above. Compared with LED modules with anisotropic conductive adhesives, the optical characteristics are improved.

又,確認該LED模組之電性連接部分之熱阻值為12.5(℃/W),具有高散熱特性。 In addition, it was confirmed that the thermal resistance value of the electrical connection portion of the LED module was 12.5 (° C / W), which had high heat dissipation characteristics.

進而,該LED模組之初期導通可靠性及初期絕緣可靠性良好,又,於85℃、85%RH環境下進行點亮試驗(If=350mA)後,亦獲得穩定之導通可靠性及絕緣可靠性。 Furthermore, the initial conduction reliability and initial insulation reliability of the LED module are good. After conducting the lighting test (If = 350mA) under the environment of 85 ° C and 85% RH, stable conduction reliability and insulation reliability are also obtained. Sex.

<實施例3> <Example 3>

由表1可知,確認於使用含有在焊料合金粒子之表面形成有厚度200nm 之由矽氧化物(SiOx)所構成之絕緣膜之實施例粒子3及粒徑0.25μm之由氧化鈦(TiO2)所構成之光反射性絕緣粒子的實施例3之異向性導電接著劑(於450nm之反射率=57%)之LED模組中,全光通量為6.5(lm),與使用上述比較例4之異向性導電接著劑之LED模組相比,光學特性提昇。 As can be seen from Table 1, it was confirmed that Example 3 containing an insulating film composed of silicon oxide (SiO x ) having a thickness of 200 nm was formed on the surface of the solder alloy particles, and titanium oxide (TiO 2 In the LED module of the anisotropic conductive adhesive of Example 3 (reflectivity at 450 nm = 57%) composed of the light-reflective insulating particles, the total luminous flux is 6.5 (lm), which is the same as that used in Comparative Example 4 above. Compared with LED modules with anisotropic conductive adhesives, the optical characteristics are improved.

又,確認該LED模組之電性連接部分之熱阻值為13.6(℃/W),具有高散熱特性。 In addition, it was confirmed that the thermal resistance value of the electrical connection portion of the LED module was 13.6 (° C / W), which had high heat dissipation characteristics.

進而,該LED模組之初期導通可靠性及初期絕緣可靠性良好,又,於85℃、85%RH環境下進行點亮試驗(If=350mA)後,亦獲得穩定之導通可靠性及絕緣可靠性。 Furthermore, the initial conduction reliability and initial insulation reliability of the LED module are good. After conducting the lighting test (If = 350mA) under the environment of 85 ° C and 85% RH, stable conduction reliability and insulation reliability are also obtained. Sex.

<實施例4> <Example 4>

由表1可知,確認於使用含有在焊料合金粒子之表面形成厚度50nm之由氧化鋁(AlOx)所構成之絕緣膜之實施例粒子4及粒徑0.25μm之由氧化鈦(TiO2)所構成之光反射性絕緣粒子的實施例4之異向性導電接著劑(於450nm之反射率=60%)之LED模組中,全光通量為6.9(lm),與使用上述比較例4之異向性導電接著劑之LED模組相比,光學特性提昇。 As can be seen from Table 1, it was confirmed that the particles of Example 4 containing an insulating film made of alumina (AlO x ) with a thickness of 50 nm on the surface of the solder alloy particles were confirmed to be made of titanium oxide (TiO 2 ) with a particle diameter of 0.25 μm. In the LED module of the anisotropic conductive adhesive of Example 4 (reflectivity at 450 nm = 60%) of the light-reflecting insulating particles formed, the total luminous flux was 6.9 (lm), which is different from that in the above-mentioned Comparative Example 4. Compared with LED modules with directional conductive adhesive, the optical characteristics are improved.

又,確認該LED模組之電性連接部分之熱阻值為13.3(C/W),具有高散熱特性。 In addition, it was confirmed that the thermal resistance value of the electrical connection portion of the LED module was 13.3 (C / W), which had high heat dissipation characteristics.

進而,該LED模組之初期導通可靠性及初期絕緣可靠性良好,又,於85℃、85%RH環境下進行點亮試驗(If=350mA)後,亦獲得穩定之導通可靠性及絕緣可靠性。 Furthermore, the initial conduction reliability and initial insulation reliability of the LED module are good. After conducting the lighting test (If = 350mA) under the environment of 85 ° C and 85% RH, stable conduction reliability and insulation reliability are also obtained. Sex.

<實施例5> <Example 5>

由表1可知,確認於使用含有在焊料合金粒子之表面形成有厚度50nm 之由氧化鈦(TiOx)所構成之絕緣膜之實施例粒子5及粒徑0.25μm之由氧化鈦(TiO2)所構成之光反射性絕緣粒子的實施例5之異向性導電接著劑(於450nm之反射率=64%)之LED模組中,全光通量為7.2(lm),與使用上述比較例4之異向性導電接著劑之LED模組相比,光學特性提昇。 As can be seen from Table 1, it was confirmed that Example 5 containing an insulating film composed of titanium oxide (TiO x ) having a thickness of 50 nm was formed on the surface of the solder alloy particles, and titanium oxide (TiO 2 ) having a particle diameter of 0.25 μm was used. In the LED module of the anisotropic conductive adhesive of Example 5 (reflectivity at 450 nm = 64%) of the formed light-reflective insulating particles, the total luminous flux was 7.2 (lm), which was the same as that in Comparative Example 4 above. Compared with LED modules with anisotropic conductive adhesives, the optical characteristics are improved.

又,確認該LED模組之電性連接部分之熱阻值為13.1(℃/W),具有高散熱特性。 In addition, it was confirmed that the thermal resistance value of the electrical connection portion of the LED module was 13.1 (° C / W), which had high heat dissipation characteristics.

進而,該LED模組之初期導通可靠性及初期絕緣可靠性良好,又,於85℃、85%RH環境下進行點亮試驗(If=350mA)後,亦獲得穩定之導通可靠性及絕緣可靠性。 Furthermore, the initial conduction reliability and initial insulation reliability of the LED module are good. After conducting the lighting test (If = 350mA) under the environment of 85 ° C and 85% RH, stable conduction reliability and insulation reliability are also obtained. Sex.

<實施例6> <Example 6>

由表1可知,確認於使用含有在焊料合金粒子之表面形成有厚度50nm之由氧化鈮(NbOx)所構成之絕緣膜之實施例粒子6及粒徑0.25μm之由氧化鈦(TiO2)所構成之光反射性絕緣粒子的實施例6之異向性導電接著劑(於450nm之反射率=61%之LED模組中,全光通量為6.9(lm),與使上述比較例4之異向性導電接著劑用之LED模組相比,光學特性提昇。 As can be seen from Table 1, it was confirmed that Example 6 containing Example 50 containing an insulating film made of niobium oxide (NbO x ) with a thickness of 50 nm and a titanium oxide (TiO 2 ) having a particle diameter of 0.25 μm were formed on the surface of the solder alloy particles. The anisotropic conductive adhesive of Example 6 composed of the light-reflective insulating particles (in an LED module with a reflectance of 450 nm = 61%, the total luminous flux is 6.9 (lm), which is different from the above-mentioned Comparative Example 4 Compared with LED modules used for directional conductive adhesives, the optical characteristics are improved.

又,確認該LED模組之電性連接部分之熱阻值為13.0(℃/W),具有高散熱特性。 In addition, it was confirmed that the thermal resistance value of the electrical connection portion of the LED module was 13.0 (° C / W), which had high heat dissipation characteristics.

進而,該LED模組之初期導通可靠性及初期絕緣可靠性良好,又,於85℃、85%RH環境下進行點亮試驗(If=350mA)後,亦獲得穩定之導通可靠性及絕緣可靠性。 Furthermore, the initial conduction reliability and initial insulation reliability of the LED module are good. After conducting the lighting test (If = 350mA) under the environment of 85 ° C and 85% RH, stable conduction reliability and insulation reliability are also obtained. Sex.

<比較例1> <Comparative example 1>

由表1可知,於使用含有在焊料合金粒子之表面未形成絕緣膜之比較 例粒子1及粒徑0.25μm之由氧化鈦(TiO2)所構成之光反射性絕緣粒子的比較例1之異向性導電接著劑(於450nm之反射率=67%)之LED模組中,光學特性良好且具有高散熱特性,但關於使用有電極間間隔較小之(30μm)第2配線基板之樣品,其漏電流值成為1μA以上,而成為NG(無法使用)。 From Table 1, it can be seen that the difference between Comparative Example 1 using Comparative Example 1 containing Comparative Example Particle 1 in which an insulating film is not formed on the surface of the solder alloy particle and light-reflecting insulating particles made of titanium oxide (TiO 2 ) having a particle diameter of 0.25 μm is used. In an LED module with anisotropic conductive adhesive (reflectivity at 450nm = 67%), the optical characteristics are good and the heat dissipation characteristics are good, but for the sample using the second wiring substrate (30 μm) with a small gap between the electrodes, The leakage current value is 1 μA or more, and becomes NG (unusable).

<比較例2> <Comparative example 2>

由表1可知,於使用含有在焊料合金粒子之表面形成有厚度2nm之非常薄之由矽氧化物(SiOx)所構成之絕緣膜之比較例粒子2及粒徑0.25μm之由氧化鈦(TiO2)所構成之光反射性絕緣粒子的比較例2之異向性導電接著劑(於450nm之反射率=66%)之LED模組中,光學特性良好且具有高散熱特性,但關於使用有電極間間隔較小之(30μm)第2配線基板之樣品,其漏電流值成為1μA以上,而成為NG(無法使用)。 As can be seen from Table 1, Comparative Example Particles 2 containing a very thin insulating film made of silicon oxide (SiO x ) having a thickness of 2 nm on the surface of the solder alloy particles were used, and titanium oxide ( TiO 2 ) The LED module of the anisotropic conductive adhesive of Comparative Example 2 (reflectivity at 450 nm = 66%) composed of light-reflective insulating particles made of TiO 2 ) has good optical characteristics and high heat dissipation characteristics. A sample having a second wiring substrate (30 μm) with a small gap between the electrodes had a leakage current value of 1 μA or more and became NG (unusable).

<比較例3> <Comparative example 3>

由表1可知,於使用含有在焊料合金粒子之表面形成有厚度500nm之非常厚之由矽氧化物(SiOx)所構成之絕緣膜之比較例粒子3及粒徑0.25μm之由氧化鈦(TiO2)所構成之光反射性絕緣粒子的比較例3之異向性導電接著劑(於450nm之反射率=55%)之LED模組中,光學特性良好,但LED模組之電性連接部分之熱阻值成為20.0(℃/W),結果,與實施例1~6相比,散熱特性差。 As can be seen from Table 1, Comparative Example Particle 3 containing an insulating film made of silicon oxide (SiO x ) with a very thick thickness of 500 nm was formed on the surface of the solder alloy particle, and titanium oxide (particle size 0.25 μm) was used. TiO 2 ) The LED module of the anisotropic conductive adhesive of Comparative Example 3 (reflectivity at 450 nm = 55%) composed of the light-reflective insulating particles made of TiO 2 ) has good optical characteristics, but the electrical connection of the LED module Part of the thermal resistance value was 20.0 (° C / W). As a result, compared with Examples 1 to 6, the heat dissipation characteristics were poor.

又,關於使用有電極間之間隔為70μm之第1配線基板以及電極間之間隔為30μm之第2配線基板的LED模組之初期導通可靠性,成為較Vf之平均值高0.05V之值,進而,關於在85℃、85%RH之環境下 進行之點亮試驗之1000小時後之導通性,較Vf之平均值高0.1V。 In addition, the initial conduction reliability of an LED module using a first wiring substrate with a distance between electrodes of 70 μm and a second wiring substrate with a distance between electrodes of 30 μm is 0.05V higher than the average value of Vf. Furthermore, regarding the environment at 85 ° C and 85% RH The continuity after 1000 hours of the lighting test performed was 0.1V higher than the average value of Vf.

認為其原因在於:形成於焊料粒子之表面之厚度500nm之非常厚之絕緣膜阻礙了導通。 The reason is considered to be that a very thick insulating film with a thickness of 500 nm formed on the surface of the solder particles prevents conduction.

如上所述,根據本發明,能夠證實:藉由使異向性導電接著劑含有於粒子表面形成有絕緣膜之焊料粒子及光反射性絕緣粒子,可獲得能夠進行窄間距配線之LED晶片之覆晶安裝並且能夠賦予LED模組較高之光學特性、較高之散熱性及較高之連接可靠性的異向性導電接著劑。 As described above, according to the present invention, it can be confirmed that by including anisotropic conductive adhesive on the surface of the particles, solder particles and light-reflective insulating particles having an insulating film formed thereon, it is possible to obtain an LED chip coating capable of performing narrow-pitch wiring. It is an anisotropic conductive adhesive that can be mounted on a crystal and can give LED modules higher optical characteristics, higher heat dissipation, and higher connection reliability.

1‧‧‧導電性粒子 1‧‧‧ conductive particles

10‧‧‧金屬粒子 10‧‧‧ metal particles

11‧‧‧表面 11‧‧‧ surface

12‧‧‧絕緣膜 12‧‧‧ insulating film

D‧‧‧金屬粒子之平均粒徑 D‧‧‧ average particle size of metal particles

T‧‧‧絕緣膜之膜厚 T‧‧‧ film thickness

Claims (7)

一種異向性導電接著劑,其係於黏合材中含有於金屬粒子之表面形成有絕緣膜之導電性粒子及光反射性絕緣粒子者,上述金屬粒子包含軟性金屬,且上述絕緣膜係於包含氧氣之環境中一面施加振動一面藉由濺鍍法形成於上述金屬粒子之表面者。 An anisotropic conductive adhesive, which is composed of conductive particles and light-reflective insulating particles in which an insulating film is formed on the surface of metal particles in a bonding material, the metal particles include a soft metal, and the insulating film includes In the environment of oxygen, a surface is formed on the surface of the metal particles by sputtering while a vibration is applied. 如申請專利範圍第1項之異向性導電接著劑,其中,上述金屬粒子之軟性金屬為焊料合金。 For example, the anisotropic conductive adhesive according to item 1 of the application, wherein the soft metal of the metal particles is a solder alloy. 如申請專利範圍第1或2項之異向性導電接著劑,其中,上述導電性粒子之絕緣膜之膜厚T(nm)在2nm<T<500nm之範圍內。 For example, the anisotropic conductive adhesive of item 1 or 2 of the patent application range, wherein the film thickness T (nm) of the insulating film of the conductive particles is in the range of 2nm <T <500nm. 如申請專利範圍第1或2項之異向性導電接著劑,其中,上述導電性粒子之絕緣膜為包含氧化矽、氧化鋁、氧化鈦、氧化鈮之任一者至少1種以上的金屬氧化物。 For example, the anisotropic conductive adhesive according to item 1 or 2 of the scope of patent application, wherein the insulating film of the conductive particles is a metal oxide containing at least one of silicon oxide, aluminum oxide, titanium oxide, and niobium oxide. Thing. 如申請專利範圍第1或2項之異向性導電接著劑,其中,上述導電性粒子之金屬粒子之平均粒徑D(μm)為1μm≦D≦20μm。 For example, the anisotropic conductive adhesive according to item 1 or 2 of the patent application range, wherein the average particle diameter D (μm) of the metal particles of the conductive particles is 1 μm ≦ D ≦ 20 μm. 如申請專利範圍第1或2項之異向性導電接著劑,其中,上述光反射性絕緣粒子之粒徑為上述導電性粒子之粒徑之2%以上且未達20%。 For example, the anisotropic conductive adhesive according to item 1 or 2 of the patent application range, wherein the particle size of the light-reflective insulating particles is 2% or more and less than 20% of the particle size of the conductive particles. 一種發光裝置,其具備:具有成對之連接電極之配線基板、及具有與上述配線基板之成對之連接電極分別對應之連接電極的發光元件,上述發光元件藉由異向性導電接著劑而接著於上述配線基板上,且該發光元件之連接電極經由該異向性導電接著劑之導電性粒子而與該配線基板之相對應之連接電極分別電性連接,且 上述異向性導電接著劑於黏合材中含有於金屬粒子之表面形成有絕緣膜之導電性粒子及光反射性絕緣粒子,上述金屬粒子包含軟性金屬,且上述絕緣膜係於包含氧氣之環境中一面施加振動一面藉由濺鍍法形成於上述金屬粒子之表面者。 A light emitting device includes a wiring substrate having a pair of connection electrodes and a light emitting element having a connection electrode corresponding to each of the pair of connection electrodes of the wiring substrate. The light emitting element is provided with an anisotropic conductive adhesive. Then on the wiring substrate, and the connection electrodes of the light-emitting element are electrically connected to the corresponding connection electrodes of the wiring substrate via the conductive particles of the anisotropic conductive adhesive, and The anisotropic conductive adhesive in the bonding material contains conductive particles and light-reflective insulating particles having an insulating film formed on the surface of the metal particles. The metal particles include soft metals, and the insulating film is in an environment containing oxygen. Those which are formed on the surface of the metal particles by sputtering while applying vibration.
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