TW201742183A - Separable substrate lift pin having a fixing pin to penetrate through the protrusion part of the upper and lower lift pins to replace the portion easily damaged partially for reducing the replacement cost - Google Patents

Abstract

The present invention relates to a substrate lift pin to support the substrate led into a chamber and put a substrate on the upper part of substrate support. The separable substrate lift pin comprises: an upper lift pin to support the lower surface of substrate and combine with the substrate support in a vertically moving manner, also, when the substrate support rises, the upper lift pin is in latching connection with the supporting slot and limited in descending; a lower lift pin combined with the lower part of the upper lift pin, and inserted into the through-hole for moving vertically; and a fixing pin to penetrate in the horizontal direction through the protrusion part formed on the lower and upper parts of the upper and lower lift pins respectively or the portion combining the said protrusion part and the corresponding insertion part, so as to fix the upper and lower lift pins. Accordingly, the portion easily damaged can be replaced partially, thereby being capable of further reducing the replacement cost and increasing the durability.

Description

Separate substrate lift pin

The present invention relates to a substrate lift pin that supports a substrate introduced into a chamber and places the substrate on an upper portion of the substrate holder, and a substrate processing apparatus including the lift pin.

Recently, in order to reduce the substrate processing process and the production cost, the size of the substrate W is becoming larger and larger, and therefore, the number of the lift pins 5 that can prevent the substrate W from sagging to the maximum extent is also increased.

Generally, as shown in FIG. 1 to FIG. 3, in the substrate processing step, the conventional lift pins 5 are inserted into the through holes 3 provided in the substrate holder 1 as the substrate holder 1 moves up and down, so that the lift pins 5 can be vertically aligned. The substrate W is moved and detached from the upper portion of the substrate holder 1.

The prior art Korean Patent Publication No. 10-2010-0102143 describes a lifting and lowering that includes: a pin shaft that manipulates a substrate on a support surface of the substrate supporting portion, and uniformly transmits heat from the substrate supporting portion to the substrate; The pin head, as the end of the pin, has a section that is larger than the pin.

Japanese Laid-Open Patent Publication No. 10-2013-0110921 discloses a substrate processing apparatus which is a substrate plate, a substrate, and a lift pin unit having a lift pin main body and a plurality of weight rings, wherein the lift pins are disposed on the substrate plate The through hole moves the substrate up and down according to the lifting movement of the substrate plate, and the plurality of weight rings rotate in opposite directions in a state of being embedded in the lower end of the lift pin main body and the lift pin main body, and are coupled to the lift pin main body and the lift pin main body Tightly bite.

Japanese Laid-Open Patent Publication No. 10-2010-0067722 describes a substrate lifting device that can lift and lower a pin plate member, and an edge pin that is fixedly disposed at an edge region of the pin plate member and penetrates an edge region of the lower electrode; a center pin, Engaging the upper portion of the central portion of the pin plate member in a state of maintaining a fixed offset distance, passing through the center portion of the lower electrode according to the rise of the pin plate member; and supporting the tool so that the center pin is inserted into the pin while maintaining a fixed offset distance The upper part of the central area of the panel.

As described above, the existing lift pins are integrally formed. The upper portion of the lift pin that directly supports the substrate is easily damaged, and the integrated lift pin replaces the entire lift pin even if it is damaged, so there is a disadvantage that the replacement cost is high.

Since the lift pin 5 is inserted into the through hole 3 of the substrate holder 1 and supports the substrate W from the upper portion, the upper portion of the lift pin 5 is subjected to a bending load, and the lower portion is subjected to a shaft load. A general material has strong resistance to a shaft load, but is less resistant to a bending load. Therefore, in order to withstand a bending load, a high-strength and high-priced material is used as a whole for the lift pin.

Further, in the lift pin 5 of the conventional substrate processing apparatus, when the substrate W is introduced into the upper portion of the lift pin 5 inside the chamber 4, a collision occurs between the substrate W and the lift pin 5. Because of this collision, the lower surface of the substrate W or the upper portion of the lift pin 5 is damaged, resulting in a defective substrate W.

Further, in order to prevent the occurrence of flaws on the lower surface of the substrate W, the lift pins 5 of the conventional substrate processing apparatus place the substrate 2 on the upper portion of the substrate holder 1, and the position of the lift pins 5 is lower than the upper surface of the substrate holder 1, so that the lift pins 5 are not exposed. Substrate W. Therefore, a space is created between the lift pins 5 and the substrate, so that the heat of the substrate holder 1 cannot be efficiently transmitted to the substrate W at the upper portion of the lift pins 5. Therefore, a temperature difference occurs in the substrate W, which affects the film thickness and uniformity. Further, the number of the lift pins 5 is increased, and the phenomenon that the substrate W on the upper portion of the lift pins 5 causes membranous abnormalities and streaks becomes severe. In particular, the development of LCD and OLED technologies has led to a significant increase in resolution, so very small spots can also cause quality problems in substrate processing products.

(Technical problem to be solved)

In order to solve the problems of the background art, it is an object of the present invention to provide a part of an element capable of replacing a lift pin, thereby replacing a substrate lift pin having a lower cost.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate lift pin which is inexpensive to manufacture while receiving a bending load and a shaft load received by a lift pin.

It is an object of the present invention to provide a substrate lift pin that minimizes damage between the substrate and the lift pins during placement of the substrate in the lift pins.

(means to solve the problem)

The substrate lifting pin of the present invention for solving the above problem is a lifting pin that supports a substrate by being relatively moved upward and downward as a vertical through hole, wherein the through hole is larger than a bottom surface of a support groove formed on an upper surface of the substrate holder More narrow, comprising: an upper lifting pin supporting the lower surface of the substrate, and being movably coupled to the substrate holder, and being buckled in the support groove to be lowered when the substrate holder is raised a lower lift pin coupled to the lower portion of the upper lift pin and inserted into the through hole for moving up and down; and a fixing pin extending through the lower portion and the upper portion of the upper and lower lift pins respectively in the horizontal direction The portion or the portion where the protruding portion is combined with the corresponding insertion portion fixes the upper and lower lift pins.

The protruding portion forms a thread on the outer peripheral surface, and the insertion portion forms a thread on the inner peripheral surface to correspond to the thread of the protruding portion.

The upper lift pin is made of a metal material, and the lower lift pin is made of a ceramic material.

The upper lift pin surface is anodized.

The upper lift pin is made of a non-metallic material, and the lower lift pin is made of a metal material.

The upper lift pin includes a main body portion that is inserted into the through hole, and is restrained to be lowered by the support groove when the substrate holder is raised; the pin portion is coupled to the main body portion so as to be movable up and down, and supported The lower surface of the substrate; and the elastic portion apply an elastic force in a state where the substrate is placed on the upper surface of the substrate holder, so that the upper surface of the pin portion is in close contact with the lower surface of the substrate.

The substrate lift pin further includes a joint portion that restricts the relative up and down movement of the pin portion to the body portion and combines the two.

The main body portion has: a protruding table that is caught by the support groove on the upper outer peripheral surface; a guide groove having an inner space in a vertical direction on the upper surface; and a coupling hole that communicates with the guide groove in a horizontal direction, The pin portion has a support portion that supports the substrate, a sliding portion that is inserted into the guide groove, and a restriction hole that is formed to extend in a vertical direction in a manner that is longer than a length of the coupling hole to be in a horizontal direction Through the sliding portion, the elastic portion is located between the lower end of the sliding portion and the bottom surface of the guiding groove, and applies an upward elastic force to the pin portion; the coupling portion is inserted into the coupling hole and the portion Restricted holes.

The ratio of the length of the limiting hole in the vertical direction to the length of the vertical direction of the bonding hole is 1.5 to 3 times.

The elastic portion is a compression coil spring or a disc spring.

The restriction hole has a long hole shape or a rectangular shape.

Before the substrate is placed on the upper portion of the lift pin, a distance between an upper surface of the pin portion and a lower surface of the protruding table is greater than a depth of the support groove, after the substrate is placed on the upper portion of the lift pin The distance between the upper surface of the pin-out portion and the lower surface of the projecting table is smaller than the depth of the support groove.

A substrate processing apparatus according to the present invention for solving the above-mentioned other problems includes a chamber having an internal space for processing a substrate, a substrate holder moving up and down inside the chamber to place the substrate, and a support groove formed on the upper surface. And forming a vertical through hole that is narrower than a bottom surface of the support groove; and the above-described lift pin.

The substrate holder has a heater that heats the substrate.

(Effect of the invention)

According to the separate substrate lift pin of the present invention, since the separate lift pin is produced, the portion that is easily damaged can be partially replaced, and the replacement cost can be reduced.

Further, in the present invention, a material having a bending load resistance is used for the upper portion of the lift pin, and a material for the shaft load is used for the lower portion, and the manufacturing cost of the lift pin can be reduced, and the durability can be improved.

Further, in the present invention, the substrate is elastically supported during the process of placing the substrate on the upper portion of the lift pin, and further, when the substrate collides with the lift pin, the lower surface of the substrate or the upper surface of the lift pin is prevented from being damaged, and durability can be improved.

Further, according to the present invention, the upper surface of the lift pin is brought into close contact with the lower surface of the substrate by the elastic support, so that the heat of the substrate holder is transmitted to the substrate on the upper portion of the lift pin through the lift pin, so that the uniform temperature of the substrate can be maintained, and the heat can be remarkably improved. The substrate on the upper part of the lift pin is membranous and can prevent the occurrence of speckles, thereby significantly reducing defective products.

The split type substrate lifting and lowering pin of the present invention is inserted into the vertical through opening 3 so as to move up and down with the up and down movement of the substrate holder 1, and the substrate W is placed and disassembled on the upper portion of the substrate holder 1, wherein the through hole 3 is compared The bottom surface of the support groove 2 formed on the upper surface of the substrate holder 1 is narrower.

Hereinafter, a detailed description will be given focusing on an embodiment of the present invention with reference to the drawings. The split type substrate lift pins of the present invention can be classified into the first to third embodiments, and the constituent elements of the respective embodiments are substantially the same, but a part of the structures are different. Further, in the various embodiments of the present invention, the same functions and functions will be used, and the same drawing symbols will be used on the drawings.

As shown in FIGS. 4 to 7, the split type substrate lift pin according to the first embodiment of the present invention is roughly constituted by an upper lift pin 100, a lower lift pin 200, and a fixed pin 300.

The upper lift pin 100 supports the lower surface of the substrate, and is coupled to the substrate holder 1 so as to be movable up and down. When the substrate holder 1 is raised, it is caught by the support groove 2 and is restricted from falling. The upper lift pin 100 is composed of a head portion 110, an upper lift pin main body portion 120, and a first projecting portion 130.

The upper portion of the head portion 110 has a flat surface to support the lower surface of the substrate, and a wider level cross-sectional area is formed than the head portion 110 of the upper lift pin main body portion 120. Therefore, when the substrate holder 1 is raised, the head portion 110 is supported by the groove 2 Stuck and limit the drop.

The upper lift pin main body portion 120 is a member having a stick shape integrally formed with the lower portion of the head portion 110 or coupled to the lower portion of the head portion 110, and is formed to be narrower than the horizontal cross-sectional area of the head portion 110, and is inserted into the through hole 3 to be raised and lowered.

The first protruding portion 130 is formed to protrude at a lower portion of the upper lift pin main body portion 120, and is further coupled with the lower lift pin 200. Preferably, a thread is formed on the outer circumferential surface of the first protruding portion 130, and a first joint opening 131 penetrating the first protruding portion 130 in the horizontal direction is formed, and the fixing pin 300 is inserted into the first joint opening 131.

The lower lift pin 200 is coupled to the lower portion of the upper lift pin 100 and inserted into the through hole 3 to move up and down with respect to the substrate holder 1. Such a lower support pin 200 is composed of a lower lift pin main body portion 210 and a second insertion portion 220.

The lower lift pin main body portion 210 is a whip-shaped member that is in contact with and coupled to the lower surface of the upper lift pin main body portion 120, and has a cross section that is the same as the level cross section of the upper lift pin main body portion 120, and is inserted into the through hole 3 to be raised. decline.

The second insertion portion 220 is a groove formed in the upper surface of the lower lift pin main body portion 210, is inserted into the first projecting portion 130 of the upper lift pin 100, and further couples the upper and lower lift pins 100, 200. Preferably, a thread is formed on the inner circumferential surface of the second insertion portion 220 to correspond to the thread of the first protrusion 130, and a second fixing port 221 that communicates with the second insertion portion 220 in the horizontal direction is formed to insert the fixing pin 300. At this time, in a state in which the first protruding portion 130 and the second insertion portion 220 are screwed and fixed, the first joint port 131 and the second fixed port 221 form the same central axis.

The fixing pin 300 is sequentially inserted into the second fixing opening 221 on the lower lifting pin 200 side, the first coupling opening 131 and the second fixing opening 221 on the other side of the lower lifting pin 200, and is formed in the lower direction of the upper lifting pin 100 in the horizontal direction. The first protruding portion 130 is joined to the second insertion portion 220 formed on the upper portion of the lower lifting pin 200, thereby fixing the upper and lower lifting pins 100, 200.

The fixing pin 300 is inserted into the first joint opening 131 and the second fixing port 221, thereby preventing the upper and lower lift pins 100, 200 from being separated, and preventing the rotation of the first protrusion 130 and the second insert portion 220, thereby preventing the thread from being prevented. The combination is released.

Since the split type substrate lift pins of the present invention are provided with the upper and lower lift pins separately, and it is possible to replace only the lift pins of the damaged portion without replacing the entire lift pins, the replacement cost can be reduced.

6 and 7 are views showing a state in which the substrate has been placed before the substrate is placed on the upper portion of the lift pin according to the first embodiment. The upper portion of the upper lift pin 100 is a portion that supports the substrate, but the portion where the head portion 110 of the upper lift pin 100 is caught by the support groove 2 and is restrained from falling is easily worn or broken. Further, in the process of supporting the substrate, the upper lift pin 100 is subjected to a bending load, and the lower lift pin 200 is subjected to a shaft load.

Therefore, the upper lift pin 100 is made of a metal material such as aluminum or titanium, and the resistance to the bending load is increased to prevent deformation, and abrasion or breakage at the time of collision can be prevented.

Compared with the bending load, the lower lift pin 200 is subjected to a shaft load having a high breaking strength and is less likely to be worn or broken. Therefore, compared with the upper lift pin 100, ceramics having a low strength and a low material cost can be used.

Further, since the upper lift pin 100 is lowered and exposed to the upper portion of the substrate holder 1, it is easily deteriorated by the chemical of the substrate to be processed. Therefore, the surface of the upper lift pin 100 is anodized to form an oxide film, which is further protected. The surface of the upper lift pin 100.

Further, the upper lift pin 100 may be made of a non-metallic material, and the lower lift pin 200 may be made of a metal material.

Therefore, the durability of the lift pins can be improved, and the replacement cost and the manufacturing cost can be reduced.

Compared to the first embodiment, the second embodiment of the present invention differs in the position at which the projection and the insertion portion are formed. The same components as those of the first embodiment will be omitted from the description below, and the components different from the first embodiment will be mainly described with reference to FIGS. 8 and 9 .

The upper lift pin 100 is composed of a head portion 110, an upper lift pin main body portion 120, and a first insertion portion 140. Compared to the first embodiment, the head portion 110 is formed in the same manner as the upper lift pin main body portion 120, and the first insertion portion 140 is formed as a member instead of the first protruding portion.

The first insertion portion 140 is a groove formed on the lower surface of the upper lift pin main body portion 120, and is inserted into the lower lift pin 200 to be coupled to the lower lift pin 200. Preferably, the first insertion portion 140 is formed with a thread on the inner circumferential surface, and a first fixing opening 141 that communicates with the first insertion portion 140 in the horizontal direction is formed to insert the fixing pin 300.

The lower lift pin 200 is composed of a lower lift pin main body portion 210 and a second projecting portion 230. The same lower lift pin main body portion 210 is formed as compared with the first embodiment, and the second projecting portion 230 is formed as a member instead of the second insertion portion.

The second protruding portion 230 is formed to protrude from the upper surface of the lower lift pin main body portion 210, and is inserted into the first insertion portion 140 of the upper lift pin 100 to be coupled with the upper lift pin 100. Preferably, a thread corresponding to the thread of the first insertion portion 140 is formed on the outer circumferential surface of the second protrusion 230, and a second joint opening 231 that penetrates the second protrusion 230 in the horizontal direction is formed to insert the fixing pin 300. At this time, in a state where the first insertion portion 140 and the second protruding portion 230 are screwed and fixed, the first fixing opening 141 and the second coupling opening 231 form the same central axis.

The third embodiment of the present invention differs in the configuration of the upper lift pins as compared with the first embodiment. The same components as those of the first embodiment will be omitted from the description below, and the components different from the first embodiment will be mainly described with reference to FIGS. 10 to 13 .

Unlike the conventional lift pin, the split type substrate lift pin of the third embodiment can elastically support the substrate W after the substrate W is placed on the upper portion of the substrate holder 1 in a state where the upper substrate supports the substrate, so that the upper portion of the lift pin The face is in close contact with the lower face of the substrate W.

In the following, detailed description will be made focusing on embodiments of the present invention with reference to the accompanying drawings.

As shown in FIG. 10, the split type substrate lift pin according to the third embodiment of the present invention is substantially composed of an upper lift pin 100, a lower lift pin 200, and a fixed pin 300, wherein the upper lift pin 100 is composed of a main body portion 10 and a pin portion 20, The elastic portion 30 and the joint portion 40 are configured.

The upper lift pin 100 includes a main body portion 10, a pin portion 20, and an elastic portion 30. The main body portion 10 is inserted into the through hole 3, and when the substrate holder 1 is raised, it is caught by the support groove 2 to restrict the lowering. The pin portion 20 is coupled to the main body portion 10 in a vertically movable manner to support the lower surface of the substrate W. The elastic portion 30 applies an elastic force in a state where the substrate W is placed on the upper surface of the substrate holder 1, so that the upper surface of the pin portion 20 is in close contact with the lower surface of the substrate W.

The main body portion 10 may have a guide groove 11 having an inner space perpendicular to the upper surface, a coupling hole 12 communicating with the guide groove 11 in the horizontal direction, and a projecting table 13 projecting from the outer peripheral surface of the upper portion.

The guide groove 11 moves the pin portion 20 up and down with respect to the main body portion 10. The cross section of the coupling hole 12 can be formed into a circular shape, a long hole shape, a quadrangular shape or the like, and the protruding table 13 is restrained by the support groove 2 when the substrate holder 1 ascends, thereby restricting The main body portion 10 is lowered.

The pin portion 20 is provided with a support portion 21 having a flat surface to support the substrate W, a sliding portion 22 inserted into the guide groove 11, and a restriction hole 23 extending in a vertical direction with a length longer than the coupling hole 12, And the sliding portion 22 is penetrated in the horizontal direction.

The pin portion 20 of the main body portion 10 can be moved up and down, and the ratio of the length of the vertical direction of the hole 23 to the length of the vertical direction of the coupling hole 12 is 1.5 times to 3 times. If the ratio of the length in the vertical direction is too small, the pin portion 20 can hardly move to the main body portion 10. On the other hand, if it is too large, the range of up and down movement of the pin portion 20 with respect to the main body portion 10 is unnecessarily enlarged. Also, the cross section of the restriction hole 23 may be formed into a long hole shape or a rectangular shape.

The elastic portion 30 is located between the lower end of the sliding portion 22 and the bottom surface of the guide groove 11 to apply an upward elastic force to the pin portion 20 such that the upper surface of the pin portion 20 is in close contact with the substrate W. At this time, the elastic portion 30 may be a compression coil spring or a disc spring, and any shape may be used as long as the pin portion 20 and the substrate W can be brought into close contact with each other like a bellows or the like.

The joint portion 40 is sequentially inserted into the joint hole 12 on the side of the main body portion 10, the restricting hole 23 of the pin portion 20, and the joint hole 12 on the other side of the main body portion 10, thereby restricting the up and down movement of the pin portion 20 to the main body portion 10, so that the pin The portion 20 is joined without being separated from the main body portion 10. In particular, when the joint portion 40 is located at the uppermost end of the restricting hole 23, the lower surface of the support portion 21 of the pin portion 20 does not contact the upper surface of the main body portion 10 and the substrate holder 1. Thereby, generation of fine particles due to contact between the lower surface of the support portion 21 and the upper surface of the main body portion 10 or the substrate holder 1 can be prevented, and the durability of the substrate lift pins of the present invention can be improved.

Next, a process before the substrate is introduced into the upper portion of the chamber 4 and placed on the upper portion of the substrate holder 1 according to the substrate processing apparatus using the substrate lifting and lowering pin of the present invention will be described with reference to Figs. 11 to 13 .

First, as shown in FIG. 11, as the substrate W is not placed on the upper portion of the substrate lift pin of the present invention, the pin portion 20 is raised in accordance with the elastic portion 30, and the joint portion 40 is located at the lowermost end of the restricting hole 23. At this time, the distance D between the upper surface of the pin portion 20 and the lower surface of the protruding table 13 is larger than the depth h of the support groove.

Next, as shown in FIG. 12, as the robot arm introduces the substrate W into the inside of the chamber 4 and is placed in the upper portion of the pin portion 20, the pin portion 20 is lowered by the gravity of the substrate W, and the joint portion 40 is located at the most limit hole 23. Upper end. At this time, the distance d between the upper surface of the pin portion 20 and the lower surface of the protruding table 13 is smaller than the depth h of the support groove.

Finally, as shown in FIG. 13 , in a state where the substrate holder 1 is raised and the substrate W is placed on the upper portion of the substrate holder 1 , the main body portion 10 is lowered until the protruding stage 13 of the substrate holder 1 is caught by the support groove 2 of the substrate holder 1 . The pin portion 20 is lowered until the upper surface of the substrate holder 1 is aligned with the upper surface of the pin portion 20, and thereafter, even if the lift pin is lowered again, the elastic portion 30 applies an upward elastic force to the pin portion 20, so the pin portion 20 The upper surface of the substrate is in close contact with the lower surface of the substrate W. At this time, the distance between the upper surface of the pin portion 20 and the lower surface of the projecting table 13 is equal to the depth h of the support groove.

As described above, the substrate processing process is performed in a state where the substrate W is placed on the upper portion of the substrate holder 1 and the pin portion 20, and the substrate holder 1 can be constituted by a heater that transfers heat to the substrate W.

Therefore, as shown in FIG. 3, in the conventional substrate processing apparatus, the problem that the heat of the substrate holder 1 cannot be transmitted to the substrate W due to the space existing between the lift pins 5 and the substrate W is solved, and the substrate holder 1 can be lifted by the lift pins 5 The substrate W transfers heat, which in turn enables the substrate W to maintain a uniform temperature.

The first protruding portion 130 of the upper lift pin 100 is formed on the lower surface of the main body portion 10, and the lower lift pin 200 and the fixing pin 300 are the same as the first embodiment.

At this time, in order to improve the thermal conductivity of heat to the substrate, the upper lift pin 100 is made of a metal material having a high thermal conductivity, and the lower lift pin 200 may be made of a non-metal material such as ceramic, and it is possible to prevent particles from being generated by scratches or the like.

A substrate processing apparatus according to another aspect of the present invention comprises a chamber 4, a substrate holder 1, and the above-described lift pins.

The chamber 4 has an internal space in which the substrate W is processed.

The substrate holder 1 is moved up and down inside the chamber 4 to place the substrate W, and a support groove 2 is formed on the upper surface of the substrate holder 1, and a vertical through hole 3 narrower than the bottom surface of the support groove 2 is formed. At this time, the substrate holder 1 can be constituted by a heater that heats the substrate W.

The lift pin 5 uses the split type substrate lift pin of the above embodiment.

The substrate processing apparatus using the separation type substrate lifting and lowering pin of the present invention can be used not only for semiconductor manufacturing equipment, glass (GLASS) display manufacturing equipment such as LCD or OLED, but also for wafer manufacturing equipment, and can be applied to various substrate processing apparatuses.

The specific embodiments of the present invention have been described above with reference to the drawings, but the scope of the present invention is obvious to those skilled in the art.

1‧‧‧Substrate support pin
2‧‧‧Support slot
3‧‧‧through
4‧‧‧ chamber
5‧‧‧lifting pin
10‧‧‧ Main body
11‧‧‧ Guide slot
12‧‧‧Combination hole
13‧‧‧Outstanding platform
20‧‧‧ Department of Sales
21‧‧‧ head
22‧‧‧Sliding section
23‧‧‧Restricted holes
30‧‧‧Flexible Department
40‧‧‧Combination Department
100‧‧‧Upper lift pin
110‧‧‧ head
120‧‧‧Upper lift pin body
130‧‧‧First protrusion
140‧‧‧First Insertion Department
200‧‧‧ lower lift pin
210‧‧‧ Lower lift pin body
220‧‧‧Second Insertion Department
230‧‧‧Second protrusion
300‧‧‧fixed pin
W‧‧‧Substrate

Fig. 1 is a cross-sectional view showing a state before a substrate is placed on an upper portion of a lift pin of a conventional substrate processing apparatus. 2 is a cross-sectional view showing a state in which a substrate has been placed on an upper portion of a lift pin of a conventional substrate processing apparatus. 3 is a cross-sectional view showing a substrate holder of a conventional substrate processing apparatus in a raised state. Figure 4 is a cross-sectional view of a lift pin in accordance with a first embodiment of the present invention. Figure 5 is an assembled view of a lift pin in accordance with a first embodiment of the present invention. Fig. 6 is a cross-sectional view showing a state before the substrate is placed on the upper portion of the lift pin according to the first embodiment of the present invention. Fig. 7 is a cross-sectional view showing a state in which a substrate is placed on the upper portion of the lift pin according to the first embodiment of the present invention. Figure 8 is a cross-sectional view of a lift pin in accordance with a second embodiment of the present invention. Figure 9 is an assembled view of a lift pin in accordance with a second embodiment of the present invention. Figure 10 is an assembled view of a lift pin in accordance with a third embodiment of the present invention. Figure 11 is a cross-sectional view showing a state before a substrate is placed on an upper portion of a lift pin according to a third embodiment of the present invention. Figure 12 is a cross-sectional view showing a state in which a substrate has been placed on the upper portion of the lift pin according to the third embodiment of the present invention. Figure 13 is a cross-sectional view showing a state in which a substrate holder according to a third embodiment of the present invention is raised.

1‧‧‧Substrate support pin

2‧‧‧Support slot

3‧‧‧through

20‧‧‧ Department of Sales

30‧‧‧Flexible Department

100‧‧‧Upper lift pin

Claims (13)

A substrate lifting pin, which is a lifting pin that is inserted into a vertical through hole and relatively moved upward to support a substrate, wherein the through hole is narrower than a bottom surface of a support groove formed on an upper surface of the substrate holder, and includes: An upper lift pin supporting a lower surface of the substrate and coupled to the substrate holder movably up and down, and being buckled in the support groove when the substrate support is raised to be restricted from falling; the lower lift pin is coupled a lower portion of the upper lift pin and inserted into the through hole to move up and down; and a fixing pin that penetrates a protruding portion or the protruding portion respectively formed at a lower portion and an upper portion of the upper and lower lift pins in a horizontal direction The upper and lower lift pins are fixed to the portion that is coupled to the corresponding insertion portion. The substrate lifting pin according to claim 1, wherein the protruding portion forms a thread on the outer circumferential surface, and the insertion portion forms a thread on the inner circumferential surface to correspond to the thread of the protruding portion. The substrate lifting pin according to claim 1, wherein the upper lifting pin is made of a metal material, and the lower lifting pin is made of a ceramic material. The substrate lift pin of claim 3, wherein the upper lift pin surface is anodized. The substrate lifting pin according to claim 1, wherein the upper lifting pin is made of a non-metal material, and the lower lifting pin is made of a metal material. The substrate lifting pin according to claim 1, wherein the upper lifting pin comprises: a main body portion inserted into the through hole, and being restrained by the supporting groove when the substrate holder is raised; the pin portion is movable up and down The main body portion supports the lower surface of the substrate; and the elastic portion applies an elastic force in a state where the substrate is placed on the upper surface of the substrate holder, and the upper surface of the pin portion is in close contact with the lower surface of the substrate. The substrate lifting pin according to claim 6, further comprising: a joint portion that restricts the relative movement of the pin portion to the relative portion of the body portion and combines the two. The substrate lifting pin according to claim 7, further comprising: the main body portion having: a protruding table that is caught by the supporting groove on the upper outer peripheral surface; the guide groove having an inner space in a vertical direction on the upper surface; and a coupling hole And communicating with the guide groove in a horizontal direction, the pin portion having: a support portion supporting the substrate; a sliding portion inserted in the guide groove; and a limiting hole in a manner longer than a length of the coupling hole And extending in a vertical direction to penetrate the sliding portion in a horizontal direction, the elastic portion being located between a lower end of the sliding portion and a bottom surface of the guiding groove, and applying an upward elastic force to the pin portion; the joint portion is inserted And the limiting hole and the limiting hole. The substrate lifting pin according to claim 6, wherein the elastic portion is a compression coil spring or a disc spring. The substrate lifting pin of claim 8, wherein the limiting hole has a long hole shape or a rectangular shape. The substrate lifting pin according to claim 8, wherein a distance between an upper surface of the pin portion and a lower surface of the protruding portion is greater than a depth of the supporting groove before the substrate is placed on the upper portion of the lifting pin, at the lifting pin After the substrate is placed on the upper portion, the distance between the upper surface of the pin portion and the lower surface of the protruding table is smaller than the depth of the support groove. A substrate processing apparatus further comprising: a chamber having an inner space for processing a substrate; a substrate holder moving up and down inside the chamber to place the substrate, forming a support groove on the upper surface, and forming a support groove a vertically narrower through hole having a narrower bottom surface; an upper lift pin supporting the lower surface of the substrate, and being movably coupled to the substrate holder and being snapped into the support groove when the substrate holder is raised The lower lift pin is coupled to the lower portion of the upper lift pin and inserted into the through hole to move up and down; and the fixed pin is formed in the lower direction of the upper and lower lift pins respectively in the horizontal direction and The upper protrusion or the portion where the protrusion is combined with the corresponding insertion portion fixes the upper and lower lift pins. The substrate processing apparatus of claim 12, wherein the substrate holder has a heater for heating the substrate.