TW201734525A - Optical waveguide element and light source module - Google Patents

Abstract

An optical waveguide element (13) that guides at least three light beams having different wavelengths is provided with: a substrate (15); a plurality of cores (11B, 11R, 11G) that guide the light beams, respectively; and a cladding (17) surrounding around the cores (11B, 11R, 11G). The optical waveguide element has an input end surface (13a) to which the light beams are inputted, and an output end surface (13b) from which the light beams are outputted, and the cores (11B, 11R, 11G) are formed by being separated from each other. Each of the center-to-center distances of the cores (11B, 11R, 11G) on the output end surface (13b) is smaller than each of the center-to-center distances of the cores (11B, 11R, 11G) on the input end surface (13a).

Description

Optical waveguide component and light source module

The present invention relates to an optical waveguide component and a light source module, and more particularly to an optical waveguide component for waveguide light of a plurality of wavelengths and a light source module using the same.

Since the light source module of an image display device such as a projector or a head-mounted display, a light source having a light source that emits blue, green, and red wavelengths and multiplexed light of a plurality of wavelengths has been proposed. Module. Further, various techniques have been proposed as techniques for multiplexing a plurality of types of optical multiplexing, such as those using planar waveguides (Patent Documents 1 and 2), those using directional couplers (Patent Document 3), and those using multi-wavelength fibers. (Patent Document 4), a person who uses a dichroic mirror (Patent Document 5), and the like. In a light source module used for an image display device, in order to display a single image by combining a plurality of wavelengths of light, it is required that the optical axes in the light emission directions of the respective wavelengths substantially coincide. Moreover, especially in the case of a head-mounted display or a small projector, the miniaturization of the light source module is also required. [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. 2000-189956 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2000-329956 (Patent Document 3) Japanese Patent Laid-Open No. 2013-195603 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2013-228651 [Patent Document 5] Japanese Patent Laid-Open No. 2015-73139

[Problems to be Solved by the Invention] For example, in the light source module described in Patent Document 1, a method of bonding a core corresponding to each wavelength to the inside of the optical waveguide element using a branch type optical waveguide is adopted. Thereby, the light is multiplexed, and the optical axes of the respective wavelengths are made uniform by setting one output end. Further, the optical loss at each wavelength is calculated, and the structure is set in consideration of the shape of the optical waveguide portion and the loss of each wavelength. According to this configuration, even if there is a large difference in the amount of light of the light sources of the respective wavelengths, the amount of light corresponding to the light of each wavelength can be determined by intentionally reducing the light of the desired wavelength in the optical waveguide element. However, in the prior art of Patent Document 1, there is a problem that the processing of the portions in which the cores are uniform is extremely difficult. Moreover, in the case of single-mode use, in the bonding portion where the cores are uniform, since the diameter of the core is widened, a high-order mode occurs, and even if the size of the core is reduced after the bonding portion, the light of each wavelength is also A certain amount of optical loss is produced. Further, there is a possibility that the high-order mode is directly outputted, and in the method of using the light source module for a projector or the like, there is a possibility that a light spot is generated on the light-irradiated surface and the image is deteriorated. In the prior art of Patent Document 2, there is disclosed a laser printer using an optical waveguide in which the intervals of the plurality of cores are set such that the interval between the exit ends is smaller than the interval at the incident end of the light. However, the optical waveguide of Patent Document 2 is used in a laser printer, and the interval between the cores of the exit end of the optical waveguide is about 100 μm, and the plurality of kinds of light are also set to have substantially the same wavelength. Even if the interval of the plurality of kinds of light is such a degree, considering the imaging state on the surface of the photoreceptor, it is very close to the use of the laser printer. However, for example, when the light source module for combining the RGB colors of the image display device for a small projector or the like is used, the emitted light is inconsistent due to aberrations of the lens as the optical system, and the image quality is deteriorated. The problem. In the prior art of Patent Document 3, the multiplexer itself requires a very high machining accuracy. Further, in consideration of loss due to absorption of light, etc., there is a problem that further miniaturization is difficult. In the prior art of Patent Document 4, in order to make the optical axes of the respective wavelengths as close as possible, it is necessary to make the cladding of the optical fiber thin, but there is a decrease in the durability of the optical fiber and it is difficult to operate as a light source module. problem. In the prior art of Patent Document 5, in order to combine the light of the respective wavelengths by the dichroic mirror, the optical axes of the respective wavelengths must be made uniform, but the optical axis adjustment is difficult and the size of the dichroic mirror is limited. It is difficult to miniaturize. Accordingly, the present invention has been made in view of the above problems, and an object thereof is to provide a light that can be made to be close to substantially the same optical axis direction and can be miniaturized while maintaining a single mode. Waveguide component and light source module. [Means for Solving the Problems] In order to solve the above problems, an optical waveguide device according to the present invention is characterized in that a plurality of kinds of light having different wavelengths are guided by a waveguide, and a substrate is provided, and the plurality of kinds of light are respectively waveguided. a plurality of cores and a cladding surrounding the core, having an incident end surface on which the plurality of types of light are incident and an exit end surface on which the plurality of types of light are emitted, wherein the plurality of cores are spaced apart from each other, The center distance of the plurality of cores on the exit end face is smaller than the center distance of the plurality of cores on the incident end face. In such an optical waveguide device, a plurality of cores are formed apart, so that a single mode can be maintained, and a plurality of kinds of light can be along substantially the same optical axis by reducing the center distance of the cores from each other at the exit end face. Directional exit and miniaturization. Furthermore, in one embodiment of the present invention, the plurality of cores may be arranged on one side of the incident end face, and the core of the center may have the longest wavelength among the plurality of lights. Light travels through the waveguide. Further, in an embodiment of the present invention, at least two of the plurality of cores may have different core widths. Further, in an embodiment of the present invention, the plurality of cores may have a width larger than a waveguide for the light having the longest wavelength. Moreover, in order to solve the above problem, the light source module of the present invention includes the optical waveguide element, and includes a plurality of laser diodes that emit the plurality of types of light, and are provided in the plurality of laser diodes a plurality of first lenses between the incident end faces and a second lens provided on the exit end face side of the optical waveguide component. In such a light source module, a plurality of kinds of light can be emitted in substantially the same optical axis direction while maintaining a single mode, and even if the lens is disposed close to the optical waveguide element, the optical axis shift due to aberration can be reduced. The impact, therefore, can be miniaturized. [Effects of the Invention] The present invention can provide an optical waveguide element and a light source module which can be made to have a plurality of wavelengths of light sufficiently close to each other and which are emitted in substantially the same optical axis direction while maintaining a single mode.

(First Embodiment) A first embodiment of an optical waveguide element and a light source module according to the present invention will be described in detail with reference to the drawings. Fig. 1 is a schematic view showing a projector as an image display device using the light source module of the embodiment. The projector 100 shown in FIG. 1 includes a light source module 1, a drive unit 2, and a MEMS (Micro Electro Mechanical Systems) mirror 3. As shown in FIG. 1 , the light L1 emitted from the light source module 1 is reflected by the MEMS mirror 3 and projected as the light L2, and is scanned on a screen (not shown) along with the operation of the MEMS mirror 3, whereby Produce an image. During the scanning, the driving unit 2 drives the MEMS mirror 3 and synchronously drives the light sources of the red light, the green light, and the blue light in the light source module 1, and appropriately sets the light beams of the respective colors on the positions of the pixels on the screen. The light intensity ratio, by which the color of each pixel is determined. In order to measure the distance from the screen to be projected from the projector 100, a distance measuring device using infrared light may also be provided. FIG. 2 is a schematic view showing the internal structure of the light source module 1. As shown in FIG. 2, the light source module 1 includes a light source 11B that emits blue light, a light source 11R that emits red light, and a light source 11G that emits green light, and includes lenses 12B, 12R, and 12G, an optical waveguide element 13, and a lens 14. The light emitted from the light sources 11B, 11R, and 11G enters the incident end surface 13a of the optical waveguide element 13 through the lenses 12B, 12R, and 12G which are optical systems, respectively. Here, as the blue light, the red light, and the green light, for example, wavelengths of about 450 nm, 638 nm, and 520 nm may be used, but other wavelengths may be used. As described below, the light of the respective colors is substantially coincident with the optical axis by the optical waveguide element 13, and is emitted from the output end face 13b, and the emitted light is emitted from the light source module 1 as the collected light L1 by the lens 14. The light sources 11B, 11R, and 11G are adjusted in output by the drive unit 2. Further, in order to adjust the output of the light, a photodiode may be provided inside or outside the light source module 1, and a Peltier element or the like may be provided for temperature adjustment. The light sources 11B, 11R, and 11G are not particularly limited. However, since it is necessary to cause light to enter the optical waveguide element, it is preferable to use a laser diode. Further, when the output difference between the light sources 11B, 11R, and 11G is large, a plurality of laser diodes having the same emission wavelength may be used as the light source. The lenses 12B, 12R, and 12G may be such that the light emitted from the light sources 11B, 11R, and 11G is efficiently incident on the incident end surface 13a, and may be a collimator lens or an aspherical lens in which the aberration is reduced. The lens 14 is preferably a collimating lens as long as the light L1 is collimated and irradiated to the MEMS mirror 3 as small as possible. Further, when the light emitted from the adjacent core of the exit end face 13b has a certain radiation angle, when the light L1 is collimated, as described below, the optical axis passing through the lens 14 has the formed angle. The center of the light point of θ. Fig. 3 is a perspective view schematically showing the structure of the optical waveguide element 13 of the present embodiment. Fig. 4 is a view showing the core of the optical waveguide element 13 of the embodiment, Fig. 4(a) is a plan view, Fig. 4(b) is a cross-sectional view on the light incident side, and Fig. 4(c) is a cross section on the light exit side. Figure. As shown in FIGS. 3 and 4, the optical waveguide element 13 includes a substrate 15, cores 16B, 16R, and 16G and a cladding layer 17. The substrate 15 is a substantially flat member formed of a material such as quartz glass or tantalum. The material of the substrate 15 is not particularly limited. When the same material as that used for the cladding layer 17 is used for the substrate 15, the cladding layer 17 formed under the cores 16B, 16R, and 16G may not be formed into a film. . Further, in the case where a material such as Si having light absorption at a wavelength used is selected as the material of the substrate 15, in order to avoid light absorption, it is preferable to appropriately increase the thickness of the lower cladding layer 17. The cores 16B, 16R, and 16G are formed of a material having a higher refractive index than the cladding layer 17, and the cladding layer 17 is formed of a material having a lower refractive index than the cores 16B, 16R, and 16G. The cores 16B, 16R, and 16G are formed to extend between the incident end surface 13a and the exit end surface 13b, and are designed to have a width Cw or a radius of curvature in such a manner that the light is waveguided in a single mode according to the wavelength of the light to be waveguided. Further, the cores 16B, 16R, and 16G are formed such that the core 16R in which the longest wavelength of red light is guided is disposed at the center, and the cores 16B, 16R, and 16G are not separated from each other and are separated by a specific distance, and the exit end faces are formed. The center distance Db of each of the members on 13b is smaller than the center distance Da of each of the incident end faces 13a. In order to increase the coupling efficiency of light incident on the optical waveguide element 13 from the outside, the incident end surface 13a may be polished or an anti-reflection film may be formed. Further, in order to increase the extraction efficiency of light emitted from the optical waveguide element 13 to the outside, the emission end surface 13b may be polished or an anti-reflection film. Further, in the specific range in the vicinity of the incident end surface 13a of the optical waveguide element 13, the cross-sectional dimensions of the cores 16B, 16R, and 16G may be tapered toward the end surface. Thereby, the optical coupling efficiency of the light sources 11B, 11R, 11G and the cores 16B, 16R, 16G can be improved. Next, a method of fabricating the optical waveguide element 13 will be described. In the material of the optical waveguide element 13, an inorganic-based glass material or a polymer-based material such as SiO ₂ or B ₂ O ₃ or P ₂ O ₅ or the like is used, and Si or the like is used in the communication band. The optical waveguide component 13 uses the above materials for the cores 16B, 16R, 16G and the cladding layer 17, and the composition and/or composition of each material is made such that the refractive indices of the cores 16B, 16R, and 16G are higher than that of the cladding layer 17. It is formed by selecting a material instead of changing, adding a dopant, or the like. The film formation method can be formed, for example, by a chemical vapor deposition method, a sputtering method, a flame layering method, or the like. A method of fabricating a previously known glass waveguide will be described below. First, quartz glass, tantalum or the like is used as the substrate 15, and a glass film which becomes the lower cladding layer 17 is formed on the substrate 15 so as to have a layer thickness of about 10 μm. Next, a core glass film of the cores 16B, 16R, and 16G is formed into a film having a layer thickness of about 2 μm. Thereafter, the useless portion of the core glass film is removed by photolithography and dry etching to form a plurality of optical waveguides in the same plane perpendicular to the lamination direction. Next, a glass film having a thickness of about 10 μm which is the upper cladding layer 17 is formed, and heat treatment is performed to make the glass of the cladding layer 17 and the cores 16B, 16R, and 16G transparent. Thereafter, the substrate 15 and the cores 16B, 16R, 16G, and the cladding layer 17 formed thereon are cut into specific sizes to obtain the optical waveguide element 13. In the present embodiment, the width of each of the cores 16B, 16R, and 16G is 2 μm, and in the vicinity of the emission end surface 13b, the cores 16B, 16R, and 16G form a linear region having a length of about 0.1 mm perpendicular to the emission end surface 13b. . Further, in the straight region formed in the vicinity of the exit end face 13b, the width of the clad layer 17 formed between the adjacent cores is set to 2 μm. The interval between the cores 16B, 16R, and 16G on the incident end surface 13a is set to a specific interval Da in accordance with the light sources 11B, 11R, and 11G to be used. In the optical waveguide element 13, the distance between the cores 16B, 16R, and 16G is gradually reduced from the incident end surface 13a to the emission end surface 13b, whereby the optical axes of the respective light beams emitted from the emission end surface 13b are brought close to each other. Therefore, the cores 16B, 16R, 16G are bent between the incident end face 13a and the exit end face 13b as needed. In order to efficiently illuminate light by the optical waveguide element 13, there is a minimum bending radius which is a bending limit depending on the refractive index difference of the materials for the cores 16B, 16R, 16G and the cladding layer 17 or the wavelength of the light used. When the cores 16B, 16R, and 16G are bent beyond the minimum bending radius, light leaks to the outer cladding layer 17, and light cannot be efficiently extracted from the emission end surface 13b. In FIG. 5, the relationship between the bending radius of the core of the red light, the green light, and the blue light and the light transmittance when the refractive index difference between the cores 16B, 16R, and 16G and the cladding layer 17 is about 0.5% is shown. As shown in Fig. 5, the minimum bending radius of blue light is about 2.0 mm, the minimum bending radius of green light is about 2.5 mm, and the minimum bending radius of red light is about 5.0 mm. Therefore, in order to further reduce the optical waveguide element 13, as shown in the embodiment of the present invention, the red light having the longest wavelength is guided by the core 16R disposed at the center, and the blue light and the green light are incident. The cores 16B and 16G on both sides can reduce the bending radii of the cores 16B and 16G, and as a result, the optical waveguide element 13 can be further reduced. In the case of considering the use of the optical waveguide element 13 in a single mode, in general, in the single mode optical waveguide, the refractive index and the refractive index difference of the core layer and the cladding layer and the size of the core layer are affected. In the case where the cores 16B, 16R, and 16G are crossed, the core width Cw is expanded in this portion, and a high-order mode occurs in the intersection portion. That is, it is convenient to reduce the core width Cw after the regions where the cores 16B, 16R, and 16G intersect, and to make the single-mode optical waveguide, and the high-order mode that appears is also absent and becomes a loss of light. Therefore, the cores 16B, 16R, and 16G extending from the incident end surface 13a to the exit end surface 13b are formed at a specific distance without intersecting each other, and the loss of light can be suppressed while maintaining the single mode of light of each color. Fig. 6 is a schematic view showing the relationship between the optical axes when the lens 14 is provided in the vicinity of the emission end face 13b. If the center distance of the core is x (= Db), the distance between the exit end face 13b and the lens is set to u, and the angle of the optical axis which is the center of the spot of the light emerging from the adjacent core is defined. For θ, x = u × tan θ is satisfied. In the case where the lens 14 is incorporated into the light source module 1, in order to miniaturize the device, it is necessary to bring the lens 14 close to the exit end face 13b, but if the angle of the optical axis of each light emitted from each core is to be reduced, From the above equation, it is necessary to reduce the interval x between adjacent cores. In the projector 100, the MEMS mirror 3 is disposed at a position approximately 20 to 30 mm from the light source module 1, and the light L1 emitted from the light source module 1 is incident on the MEMS mirror 3. Therefore, the lens 14 needs to be disposed closer to the exit end face 13b of the optical waveguide element 13 than the MEMS mirror 3. For example, when the lens 14 is disposed at a position of about 10 mm from the light source module 1, the center distance of the adjacent cores is set to be about 5 μm or less, and the lens 14 can be emitted from the adjacent core. The angle of the optical axis of the center of the light spot is controlled to be about 0.03°. Therefore, by making the interval Db between the cores 16B, 16R, and 16G as close as possible to the exit end face 13b, the center of the light spot of each of the emitted lights can be brought closer to each other, and the optical axis thereof can be substantially the same optical axis. Irradiation is performed by the single-mode light L1 which is close to the center of the spot of the light of each color, and deterioration of the projected image can be suppressed. Further, in general, when the core spacing of the optical waveguide is reduced, optical coupling occurs between the cores, and the light of the waveguide in a certain core moves to the adjacent core. In the present embodiment, in order to reduce the interval between the cores 16B, 16R, and 16G at the exit end face 13b and to excessively reduce the interval between the respective cores in the vicinity of the exit end face 13b, a part of the light also moves. To the adjacent core, light of the same wavelength will emerge from a plurality of places to form a plurality of spots. When the light source module 1 is used in the projector 100, when a plurality of light spots are irradiated, it is difficult to form one pixel, and the image is deteriorated. Therefore, in the optical waveguide element 13 of the present embodiment, it is necessary to make the interval Db between the emission end faces 13b of the respective cores 16B, 16R, and 16G as close as possible, but it is also necessary to separate the specific optical coupling between adjacent cores. distance. Fig. 7 is a graph showing the relationship between the width of the cladding layer existing between the cores and the optical coupling distance. The width Cw of each of the cores 16B, 16R, and 16G was set to 2.0 μm. The so-called optical coupling distance refers to the length of the light completely moved to the adjacent core and then completely returned to the original core. As shown in Fig. 7, by increasing the width of the cladding layer 17 existing between the cores, the optical coupling distance can be made longer, and light movement between the cores is less likely to occur. Fig. 8 is a graph showing the relationship between the length of the linear region of the core, that is, the coupling distance and the optical coupling ratio. The horizontal axis of the graph represents the coupling distance, and the vertical axis represents the optical coupling ratio with respect to the relative value of the light intensity. The width Cw of each core was set to 2.0 μm, and the width of the cladding layer 17 existing therebetween was set to 2.0 μm. As shown in FIG. 8, if the light of the waveguide in a certain core moves by a certain distance, the light completely moves to the adjacent core, but the amount of light movement can be reduced by shortening the distance. For example, in the case of a red optical waveguide, the light moves about 0.7 mm to move completely to the adjacent core. For example, if the light movement is to be reduced to about 20%, the coupling distance of the adjacent cores may be set to 0.2 mm or less. In order to reduce the movement of light, it is preferable to shorten the linear regions close to each core as much as possible. . As described above, the linear region in the vicinity of the exit end face 13b is preferably short. However, in order to cause the light emitted from the optical waveguide element 13 to be emitted perpendicularly to the exit end face 13b, it is necessary to provide a certain linear region. Further, a curved portion is present in front of the straight line region near the exit end face 13b, and light movement between the cores also occurs in the bent portion. Fig. 9 is a graph showing the relationship between the width of the cladding layer between the cores and the optical coupling ratio of the curved portion of the core. The radius of curvature of the cores 16B and 16G is set to about 5 mm, which indicates the width of the cladding at the end position of the curved portion where the straight region is not provided in the vicinity of the exit end face 13b. As shown in FIG. 9, it can be seen that as the width of the cladding layer existing between the cores is increased, the coupling ratio of light is lowered. For example, if the coupling ratio of the red light is controlled to about 5%, the width of the cladding of the curved portion may be set to 2 μm or more. In order to reduce the light movement between the cores, it is also possible to shorten the linear regions of the cores and to provide a plurality of curved portions having changed curvature radii. Further, an air groove may be formed in the cladding 17 between the cores. Further, the width of each core may be set so as not to match. Further, a material having a refractive index different from that of the light reflector, the light absorber, the core, and the cladding may be separately provided between the cores. Further, as a method of matching the optical axes of the light emitted from the respective cores, an optical element such as a DIFF (Diffractive Optical Element) or a microlens array may be used to emit the cores of the self-light-waveguide elements. The light axis of the light is closer. In the optical waveguide element 13 of the present embodiment and the light source module 1 using the same, the cores for guiding the light of the respective colors are not crossed, and the distance between the cores can be suppressed from being separated by a specific distance. The single mode is maintained to reduce the optical loss, and the light of a plurality of wavelengths is sufficiently close to be emitted in substantially the same optical axis direction, thereby suppressing deterioration of image display. Further, by appropriately arranging the light sources corresponding to the respective wavelengths, it is possible to further reduce the optical waveguide element while suppressing the movement of light between adjacent cores. (Second embodiment) Next, a second embodiment of the present invention will be described using a drawing. Fig. 10 is a schematic view showing the configuration of the optical waveguide element 13 and the light source of the embodiment. As shown in FIG. 10, the optical waveguide element 13 shown in the present embodiment includes two light sources 11G that emit green light, two corresponding cores 16G, and four cores. In the case where a laser diode is used as the light source 11G, it is difficult to obtain an output like the light sources 11B and 11G with one laser diode. Therefore, by providing a plurality of green light sources 11G, the total output of the green light can be increased. When the light sources 11B, 11R, and 11G of the respective wavelengths are arranged, if the core 16R for guiding the red light having the largest wavelength is arranged in the center, the minimum bending radius of the cores 16B and 16G is smaller than the core 16R. The miniaturization of the optical waveguide element 13 can be achieved. The number of cores of the optical waveguide element 13 is not particularly limited, and may be four or more. When the core 16R is located at the center, the arrangement of the cores 16B and 16G may be any form. In the optical waveguide element 13 of the present embodiment and the light source module 1 using the same, the cores for guiding the light of the respective colors are not crossed, and the distance between the cores can be suppressed from being separated by a specific distance. The single mode can be maintained to reduce the optical loss, and the light of a plurality of wavelengths can be sufficiently close to be emitted in substantially the same optical axis direction, thereby suppressing deterioration of image display. Further, by appropriately arranging the light sources corresponding to the respective wavelengths, it is possible to further reduce the optical waveguide element while suppressing the movement of light between adjacent cores. (Third Embodiment) Next, a third embodiment of the present invention will be described using a drawing. Fig. 11 is a schematic plan view showing the optical waveguide element 13 of the third embodiment. In the present embodiment, the width of the core of the waveguide for light having a long wavelength is increased. The mode of the light to be waveguide is related to the core width Cw. If the core width Cw is small, it is easy to become a single mode. However, if the wavelength of the light to be waveguide is long, even if the size of the core is large, it is easy to become a single mode. . Therefore, in the present embodiment, the core width of the core 16B is 1.8 μm, the core width of the core 16R is 2.0 μm, and the core width of the core 16G is 1.9 μm. Fig. 12 is a graph showing the relationship between the width of the cladding end face 13b of the present embodiment and the optical coupling ratio of the cladding layer existing between the cores. As shown in Fig. 12, it is understood that as the cladding width between the cores is increased, the coupling ratio of light is lowered. However, the optical coupling ratio is lowered with respect to the cladding width as compared with the conditions of the first embodiment. For example, when the optical coupling ratio is controlled to about 5% for red light, the cladding width may be set to about 1.5 μm or more. Thus, the longer the wavelength of the light to be waveguided, the more the width of each of the cores 16B, 16R, 16G is increased, thereby suppressing the movement of light caused by the optical coupling occurring in the adjacent cores, and extracting only from the respective cores. A single wavelength can suppress image degradation. In the optical waveguide element 13 of the present embodiment and the light source module 1 using the same, the cores for guiding the light of the respective colors are not crossed, and the distance between the cores can be suppressed from being separated by a specific distance. The single mode can be maintained to reduce the optical loss, and the light of a plurality of wavelengths can be sufficiently close to be emitted in substantially the same optical axis direction, thereby suppressing deterioration of image display. Further, by appropriately arranging the light sources corresponding to the respective wavelengths, it is possible to further reduce the optical waveguide element while suppressing the movement of light between adjacent cores. (Fourth embodiment) Next, a fourth embodiment of the present invention will be described using a drawing. Fig. 13 is a schematic plan view showing the optical waveguide element 13 of the fourth embodiment. In the optical waveguide element 13 of the first embodiment, the cores 16B and 16G corresponding to the blue light and the green light are bent twice, but in the present embodiment, they are bent once on the side close to the emission end surface 13b. Further, the cores 16B and 16G are provided obliquely without being perpendicular to the incident end surface 13a. Thereby, the curved portions of the cores 16B, 16G can be reduced, and the optical waveguide element 13 can be further miniaturized. In the optical waveguide element 13 of the present embodiment and the light source module 1 using the same, the cores for guiding the light of the respective colors are not intersected and separated by a specific distance which can suppress the movement of light between the cores. The single mode is maintained to reduce the optical loss, and the light of a plurality of wavelengths is sufficiently close to be emitted in substantially the same optical axis direction, thereby suppressing deterioration of image display. Further, by appropriately arranging the light sources corresponding to the respective wavelengths, it is possible to further reduce the optical waveguide element while suppressing the movement of light between adjacent cores. (Fifth Embodiment) Next, a fifth embodiment of the present invention will be described using a drawing. Fig. 14 is a cross-sectional view showing the light outgoing side of the optical waveguide element 13 of the fifth embodiment. In the first embodiment, the cores 16B, 16R, and 16G are arranged one line on the same plane. However, in the present embodiment, the heights of the cores 16B, 16R, and 16G are set. By arranging such a core layer, the distance between the cores at the exit end faces 13b can be reduced, so that the centers of the spots of the emitted light can be made closer to each other and become substantially the same optical axis. In the optical waveguide element 13 of the present embodiment and the light source module 1 using the same, the cores for guiding the light of the respective colors are not intersected and separated by a specific distance which can suppress the movement of light between the cores. The single mode is maintained to reduce the optical loss, and the light of a plurality of wavelengths is sufficiently close to be emitted in substantially the same optical axis direction, thereby suppressing deterioration of image display. Further, by appropriately arranging the light sources corresponding to the respective wavelengths, it is possible to further reduce the optical waveguide element while suppressing the movement of light between adjacent cores. The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims. The embodiments obtained by appropriately combining the technical means disclosed in the different embodiments are also included in the technical scope of the present invention. Inside. Further, by appropriately combining the technical means disclosed in the respective embodiments, new technical features can be formed. In addition, the present application is based on the priority of Japanese Patent Application No. 2015-231439 filed on November 27, 2015 in Japan. In this regard, all of its contents are incorporated into the application. [Industrial Applicability] According to the present invention, in particular, in the technical field of an optical waveguide element that conducts light of a plurality of wavelengths of light and a light source module using the same, it is possible to make a plural number while maintaining a single mode The light of the wavelengths is sufficiently close to exit in substantially the same optical axis direction, and miniaturization can be achieved.

1‧‧‧Light source module
2‧‧‧ Drive Department
3‧‧‧MEMS mirror
11B‧‧‧Light source
11G‧‧‧Light source
11R‧‧‧Light source
12B‧‧ lens
12G‧‧ lens
12R‧‧ lens
13‧‧‧ Optical waveguide components
13a‧‧‧Injected end face
13b‧‧‧ exit end face
14‧‧‧ lens
15‧‧‧Substrate
16B‧‧‧core
16G‧‧‧core
16R‧‧‧core
17‧‧‧Cladding
100‧‧‧ projector
Cw‧‧‧core width
Da‧‧‧ center distance
Db‧‧‧ centre distance
L1‧‧‧Light
L2‧‧‧Light
u‧‧‧Set distance
X‧‧‧ center angle from θ‧‧‧

Fig. 1 is a schematic view showing a projector using the light source module of the first embodiment. Fig. 2 is a schematic view showing the internal structure of a light source module. Fig. 3 is a perspective view schematically showing the structure of the optical waveguide element of the first embodiment. Fig. 4 is a view showing the core of the optical waveguide element of the first embodiment, Fig. 4(a) is a plan view, Fig. 4(b) is a cross-sectional view on the light incident side, and Fig. 4(c) is a cross section on the light exit side. Figure. Fig. 5 is a graph showing the relationship between the bending radius of the core of the red light, the green light, and the blue light of the first embodiment and the light transmittance. Fig. 6 is a schematic view showing the relationship between optical axes when a lens is provided in the vicinity of the exit end face of the first embodiment. Fig. 7 is a graph showing the relationship between the width of the cladding layer between the cores of the first embodiment and the optical coupling distance. Fig. 8 is a graph showing the relationship between the length of the linear region of the core of the first embodiment, that is, the coupling distance and the optical coupling ratio. Fig. 9 is a graph showing the relationship between the width of the cladding layer existing between the cores and the optical coupling ratio in the bent portion of the core of the first embodiment. Fig. 10 is a schematic view showing the configuration of an optical waveguide element and a light source according to the second embodiment. Fig. 11 is a schematic plan view showing an optical waveguide element of a third embodiment. Fig. 12 is a graph showing the relationship between the width of the cladding layer existing between the cores and the optical coupling ratio on the exit end face of the third embodiment. Fig. 13 is a schematic plan view showing an optical waveguide element of a fourth embodiment. Fig. 14 is a cross-sectional view showing the light-emitting side of the optical waveguide element of the fifth embodiment.

13‧‧‧ Optical waveguide components

13a‧‧‧Injected end face

13b‧‧‧ exit end face

15‧‧‧Substrate

16B‧‧‧core

16G‧‧‧core

16R‧‧‧core

17‧‧‧Cladding

Claims (5)

An optical waveguide device characterized in that a plurality of types of light having different wavelengths are waveguided, and a substrate, a plurality of cores each waveguide the plurality of kinds of light, and a periphery surrounding the core The cladding layer has an incident end surface on which the plurality of kinds of light are incident and an exit end surface on which the plurality of kinds of light are emitted, wherein the plurality of cores are spaced apart from each other, and the plurality of cores on the exit end face are centered with each other The distance is less than a center distance between the plurality of cores on the incident end surface. The optical waveguide component according to claim 1, wherein the plurality of cores are disposed on one side of the incident end face, and the core of the center guides light having the longest wavelength among the plurality of lights. The optical waveguide component of claim 1 or 2, wherein at least two of the plurality of cores have different core widths. The optical waveguide component according to claim 1 or 2, wherein the width of the waveguide having the longest wavelength among the plurality of cores is large. A light source module comprising: the optical waveguide component of claim 1 or 2, and comprising: a plurality of laser diodes, each of which emits the plurality of types of light; a plurality of first lenses, etc. The plurality of laser diodes are disposed between the plurality of cores of the incident end surface; and the second lens is disposed on the emission end surface side of the optical waveguide element.