JP6963234B2 - Manufacturing method of photosynthetic device and photosynthetic wave device - Google Patents

Description

The present invention relates to an optical combiner and a method for manufacturing the optical combiner.

Conventionally, there is a technique of combining and outputting a plurality of visible light and electromagnetic waves having peripheral wavelengths, and using it for image display and sensing. In recent years, portable devices have been equipped with small and lightweight laser projectors that output two-dimensional images by combining and outputting laser light emitted from laser light emitting elements of each RGB color and scanning it using a MEMS mirror or the like. Proposals have been made for mounting on such devices. Using these laser projectors, navigation information and advertisements (digital signage) can be used for wearable terminals such as HUDs (head-up displays) and glasses-type display terminals, car windshields, walls and windows of building structures, etc. Techniques for various displays have been developed.

Conventionally, a dichroic mirror (wavelength selective reflector) or a polarizing filter is widely known as a multi-wavelength combiner in such a laser projector. However, there is a problem that it is difficult to miniaturize the conventional configuration. On the other hand, there is a technique of bundling and fixing a plurality of optical fibers or welding them to integrate them to output light from each optical fiber and combine them (for example, Patent Document 1 and Patent Document 2). ).

Japanese Unexamined Patent Publication No. 2014-240958 Japanese Unexamined Patent Publication No. 2004-208903

However, in the conventional technique, it is difficult to match the axes of a plurality of laser beams with a required accuracy and combine them, which causes a problem that efficiency is reduced such as an increase in labor and cost.

An object of the present invention is to provide an optical combiner and a method for manufacturing an optical combiner capable of merging more efficiently and with a required accuracy.

In order to achieve the above object, the invention according to claim 1 is
It is an optical combiner that emits a plurality of light rays incident from the incoming light end from the light emitting end aggregated within a predetermined range.
With the board
A plurality of optical fibers having a diameter of 10 μm or less , which are fixed to the substrate at least in the first range from the light input end and the second range from the light exit end, and guide the light rays incident from the light input end to the light exit end, respectively. Optical fiber and
With
The substrate has a plurality of grooves in which the plurality of optical fibers are individually fitted without contacting each other in at least the first range and the second range.
The plurality of optical fibers are characterized in that each of the plurality of optical fibers is fixed inside the plurality of grooves.

Further, the invention according to claim 2 is the optical combiner according to claim 1.
The plurality of optical fibers are characterized in that each of the plurality of optical fibers is fixed by an adhesive inside the plurality of grooves.

Further, the invention according to claim 3 is the optical combiner according to claim 1 or 2.
The first range and the second range are provided apart from each other.
The plurality of grooves are characterized in that they are arranged in a straight line parallel to each other.

Further, the invention according to claim 4 is the optical combiner according to claim 3.
The bottom surfaces of the plurality of grooves are provided in a surface different from the surface on which the plurality of optical fibers are provided outside the first range and outside the second range.

The invention according to claim 5 is the optical combiner according to any one of claims 1 to 4.
The plurality of grooves are characterized in that they have a rectangular shape in cross section at least within the second range.

The invention according to claim 6 is the optical combiner according to any one of claims 1 to 4.
The plurality of grooves are characterized in that they have a V-shaped cross-sectional view at least within the second range.

The invention according to claim 7 is the optical combiner according to any one of claims 1 to 6.
The plurality of optical fibers are characterized in that they are in a single mode.

Further, the invention according to claim 8 is
A substrate and a plurality of optical fibers having a diameter of 10 μm or less that guide light rays incident from the incoming light end to the outgoing light end are provided, and the plurality of light rays incident from the incoming light end are aggregated within a predetermined range. It is a method of manufacturing an optical combiner that emits light from the light emitting end.
A groove forming step in which a plurality of grooves are formed in at least a first range from the incoming light end and a second range from the light emitting end with respect to the substrate.
A fiber fixing step of fitting and fixing the plurality of optical fibers into the groove without contacting each other.
It is characterized by having.

The invention according to claim 9 is the method for manufacturing an optical combiner according to claim 8.
The fiber fixing step is characterized in that the optical fiber is fixed to the inside of the groove with an adhesive.

The invention according to claim 10 is the method for manufacturing an optical combiner according to claim 9.
The substrate includes a suction hole forming step of providing a suction hole for sucking air from the groove.
The fiber fixing step is characterized in that the optical fiber is fitted into the groove while sucking air from the groove through the suction hole.

The invention according to claim 12 is the method for manufacturing an optical combiner according to any one of claims 8 to 10.
A dicing step for separating each of the plurality of formed optical combiners is included.
In the groove forming step, the plurality of grooves related to the two adjacent photosynthetic devices are formed in succession by staggering the directions of the plurality of grooves.
The fiber fixing step is characterized in that the plurality of continuous optical fibers are fixed to the plurality of grooves continuously formed for the two optical combiners.

According to the present invention, there is an effect that the optical combiner can combine waves more efficiently and with the required accuracy.

It is an overall perspective view which shows the combiner of embodiment of this invention. It is the figure which showed the vicinity of the light emitting end of a combiner in an enlarged manner. It is a figure which shows the procedure of the manufacturing method of a combiner. It is a figure which shows the procedure of the manufacturing method of a combiner. It is an overall perspective view which shows the combiner of 2nd Embodiment. It is a perspective view which shows the vicinity of the light emitting end of the combiner of the 3rd Embodiment in an enlarged manner. It is an overall perspective view which shows the combiner of 4th Embodiment. It is an overall perspective view which shows the combiner of 5th Embodiment. It is a figure of the exit surface which shows the modification of the guide groove in a combiner. It is a figure of the exit surface which shows the modification of the guide groove in a combiner.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[First Embodiment]
FIG. 1 is an overall perspective view showing a combiner 1 according to the first embodiment of the present invention.

The combiner 1 (optical combiner) has a guide substrate 11 (substrate) and a plurality of optical fibers 12.
As the guide substrate 11, a silicon substrate generally used for manufacturing semiconductor products is used here, and the guide substrate 11 is formed in a die shape (rectangular parallelepiped shape).

Here, the optical fiber 12 includes an optical fiber 12R that guides R (red) color light, an optical fiber 12G that guides G (green) color light, and an optical fiber 12B that guides B (blue) color light. Each is placed on the surface of. The incoming light ends 12R1, 12G1, and 12B1 of each optical fiber 12 are provided at intervals corresponding to the incident laser light (plurality of light rays), here, the arrangement interval of the semiconductor laser diode. The light emitting ends 12R2, 12G2, and 12B2 are aggregated in a narrow range (within a predetermined range) according to the wave matching accuracy. As a result, the incident light is combined and emitted. Therefore, the width required in the width direction for 3 to 4 semiconductor laser diodes can be suppressed to about 10 mm or less, corresponding to the size (several millimeters) in the width direction of the semiconductor laser diode.

As the optical fiber 12, a single-mode optical fiber having a diameter of 10 μm or less is preferably used here. Such an optical fiber 12 is formed by making the clad sufficiently thin with respect to the core (usually the core diameter is 10 μm or less in the single mode), and is not coated. However, it is currently difficult to uniformly form the thickness of such a fine optical fiber 12, and at present, an error of about ± 10% occurs. Here, for example, an optical fiber 12 having a diameter of about 8 to 10 μm is actually used with a diameter of 9 μm as a reference.
In FIG. 1, for convenience of explanation, the size of the optical fiber 12 with respect to the guide substrate 11 is shown larger (thicker) than the above-mentioned actual scale.

The optical fiber 12 is a side surface of the guide substrate 11 in a predetermined range (first range) from the incoming light ends 12R1, 12G1 and 12B1 and in a predetermined range (second range) from the light emitting ends 12R2, 12G2 and 12B2, respectively. They are arranged in a straight line perpendicular to each other and parallel to each other, and take a curved shape as needed between the straight sections. In this curved shape, the lower limit of the radius of curvature is set within the range satisfying the condition that the incident light is totally reflected in the core, and the radius of curvature is locally small in order to reduce the tension applied to the optical fiber 12. It is preferable not to have a portion. Examples of such a shape include a Bezier curve.

It is preferable that both ends of the optical fiber 12, that is, the in-light ends 12R1, 12G1, 12B1 and the out-of-light ends 12R2, 12G2, 12B2 are perpendicular and smooth in the extending direction of the straight section, respectively. If the end portion is uneven, this causes loss due to diffused reflection of incident light and emitted light. Further, if the incident surface or the exit surface is inclined with respect to the incident direction and the exit direction, the direction of light changes due to refraction, the number of reflections inside increases, or the light pops out without being totally reflected in the optical fiber. It will be a loss.

FIG. 2 is an enlarged view of the vicinity of the light emitting ends 12R2, 12G2, and 12B2 of the combiner 1.

The three optical fibers 12R, 12G, and 12B are individually fitted into the three rectangular guide grooves 11R, 11G, and 11B (plural grooves) provided on the upper surface of the guide substrate 11, respectively. It is provided in a non-contact arrangement. The gaps between the optical fibers 12R, 12G, and 12B in the guide grooves 11R, 11G, and 11B are embedded and fixed by an adhesive member 111 (adhesive). The guide grooves 11R, 11G, and 11B have a maximum width assumed based on the above-mentioned error related to the diameter of the optical fiber 12, that is, a width of 10 μm here (direction perpendicular to the extending direction of the optical fiber 12). , The emission edges are evenly spaced through a small wall width. The depths of the guide grooves 11R, 11G, and 11B (directions perpendicular to the upper surface of the guide substrate 11) are not particularly limited, but must be at least the maximum radius of the optical fiber 12 (here, 5 μm) or more. It is preferable that the maximum diameter (10 μm) of the optical fiber 12 or slightly larger than this is more preferable.

The adhesive member 111 is not particularly limited, but has a high hardness in order to prevent deformation after adhesive curing, particularly misalignment of the optical fiber 12 due to expansion due to high heat when the combiner 1 is used. For example, an ultraviolet curable epoxy resin or the like is used.

3 and 4 are diagrams showing the procedure of the manufacturing method of the combiner 1.
In the manufacture of the combiner 1, first, guide grooves 11R, 11G, and 11B corresponding to a plurality of combiners are formed on the silicon wafer 110 (FIG. 3 (a); groove forming step). Here, continuous guide grooves 11R, 11G, and 11B are provided for the formation areas of the guide substrates 11 adjacent to each other in the incident / exit directions of the laser light. Similar to a normal semiconductor device manufacturing process, these generate a resist pattern that covers other than the positions of the guide grooves 11R, 11G, and 11B on the upper surface of the silicon wafer 110 by using a photoresist film and a mask, and according to the resist pattern. It is formed by etching. In this case, the guide grooves 11R, 11G, and 11B are not limited to dry etching such as reactive ion etching (deep reactive RIE) so that an appropriately sufficient depth can be obtained. That is, the guide grooves 11R, 11G, and 11B may be formed by wet etching.

Here, with respect to the combiners adjacent to each other on the silicon wafer 110, the directions are reversed (that is, they are arranged alternately) so that the outgoing light ends and the incoming light ends are in contact with each other, and the guide grooves 11R and 11G are arranged. , 11B each have a continuous shape for a plurality of combiners. As a result, when the optical fibers 12 are later fitted into the guide grooves 11R, 11G, and 11B, the three optical fibers are not individually fitted into the plurality of combiners, but are common and continuous. Only the optical fibers 12R, 12G and 12B of the book need to be fitted. Therefore, the efficiency of the fitting operation of the optical fiber 12 is greatly improved.

At this time, or after that, it is preferable that a plurality of reference markers 113 for defining the positions of the guide grooves 11R, 11G, and 11B are provided, for example, at three locations per combiner. When aligning the formed combiner 1 with the laser diode that emits incident light, the relative positional relationship (position and angle) can be easily adjusted by these reference markers 113. The reference sign 113 may have a circular shape or a cross shape as long as the position can be easily specified. Similarly, these shapes may be dug into the combiner by etching, or may be formed by forming a film of aluminum, gold, or the like by sputtering or the like. Alternatively, laser processing may be performed separately.

Next, intake holes 112 (suction holes) penetrating the upper and lower surfaces of the silicon wafer 110 are formed along the guide grooves 11R, 11G, and 11B (FIG. 3 (b); suction hole forming step). The intake hole 112 can be formed using various well-known methods such as etching, laser light, and drilling. The shape of the intake hole 112 is substantially cylindrical here, but is not limited to this. The size of the intake hole 112 does not interfere with the flow of air, and when sucking air through the intake hole 112 in the next step, the size of the intake hole 112 depends on the bending tension of the optical fiber 12 and the suction force of the air. The optical fiber 12 is not largely drawn into the intake hole 112, that is, it is set so as not to generate a portion having a radius of curvature that is locally problematic.

The optical fibers 12R, 12G, and 12B are fitted along the guide grooves 11R, 11G, and 11B, respectively, while sucking air from the upper surface side to the lower surface side of the silicon wafer 110 through the intake hole 112 (FIG. 4A). As a result, the three optical fibers 12 are drawn into the guide grooves 11R, 11G, 11B together with the air, and each optical fiber 12 once fitted is ejected from the guide grooves 11R, 11G, 11B due to its own tension. To prevent.

The adhesive member 111 is injected into the guide grooves 11R, 11G, and 11B to be solidified and fixed (FIG. 4B). When the ultraviolet curable epoxy resin is used as described above, after the adhesive member 111 is injected, the adhesive member 111 is irradiated with ultraviolet rays having a predetermined wavelength. At this time, the adhesive member 111 is not injected into the entire guide grooves 11R, 11G, and 11B at a time, but is injected at a position different from the intake hole 112 described above to partially fix the optical fiber 12 and then suck. After stopping the operation, the adhesive member 111 may be injected into the remaining portions of the guide grooves 11R, 11G, and 11B.
A series of steps shown in FIGS. 4 (a) and 4 (b) constitutes a fiber fixing step in the method for manufacturing an optical combiner of the present embodiment.

After solidifying and fixing the adhesive member 111, each combiner 1 is cut out from the silicon wafer 110 (FIG. 4 (c); dicing step). As a result, a plurality of combiners 1 are formed. At this time, as described above, both sides separated from each other commonly serve as an incoming light end or an outgoing light end.

Further, the cut surface of the cut-out combiner 1 is polished by using the polishing member 400. If the cut surface has irregularities or scratches, the incident light and the emitted light are reflected (diffusely reflected) in an inappropriate direction, leading to a decrease (loss) in the amount of light. Flat) (Fig. 4 (d)). The polishing operation can be performed simultaneously and in parallel with a plurality of cut combiners 1 by aligning the cut surfaces, stacking them, and / or arranging them side by side. At this time, as described above, since the adhesive member 111 has a high hardness, the entrance / exit direction of the fixed optical fiber 12 is perpendicular to the entrance / exit surface due to the force applied during polishing. It is deterred from disappearing. In addition, the viscosity after curing prevents polishing debris from adhering to the polishing member.

As described above, the combiner 1 of the present embodiment emits the light of each color of RGB incident from the incoming light ends 12R1, 12G1 and 12B1 from the light emitting ends 12R2, 12G2 and 12B2 which are aggregated within a predetermined range. The guide substrate 11 is fixed to the guide substrate 11 at least in the first range from the incoming light ends 12R1, 12G1, 12B1 and the light emitting end 12R2, 12G2, 12B2 to the second range, and the light entering end 12R1. , 12G1 and 12B1 are provided with three optical fibers 12 for guiding the light rays incident from the 12G1 and 12B1 to the light emitting ends 12R2, 12G2 and 12B2, respectively. The guide substrate 11 has a plurality of guide grooves 11R, 11G, and 11B into which three optical fibers 12 are individually fitted in at least the first range and the second range, and the three optical fibers 12 have a plurality of guide grooves 11R, 11G, and 11B. It is fixed inside the guide grooves 11R, 11G, and 11B, respectively.
As described above, the combiner 1 of the present embodiment does not output a plurality of lights as completely the same, but outputs them in parallel at minute intervals. The light emitted at intervals of about 10 μm, which is the core diameter of the current optical fiber, is smaller than the threshold value that humans cannot recognize as individual light. It is possible to obtain the same effect as combining a plurality of lights. The combiner 1 is provided with guide grooves 11R, 11G, and 11B into which a plurality of optical fibers 12 are individually fitted at least at the light input end and the light output end, respectively. At present, the processing accuracy of a groove or the like using a semiconductor element manufacturing technique for a substrate, particularly a silicon substrate, is very high as compared with the forming accuracy of the clad outer peripheral surface of the optical fiber 12. Due to such a difference, if a plurality of optical fibers are simply bundled, the influences of variations in the thickness of the optical fibers between the optical fibers and within the optical fibers overlap each other, and the intervals and directions of the emitted lights become uneven, resulting in accuracy. Although it is not well defined and the waves are not combined neatly, a plurality of optical fibers are arranged in parallel at substantially equal intervals by fitting them into individual guide grooves. Therefore, in this combiner 1, it is possible to efficiently and stably emit a single line of light that is accurately combined.

Further, since a configuration for centering is not required and the size can be reduced with an easy and robust configuration, it can be suitably used particularly when it is built in a mobile device and used. In addition, this effectively reduces costs and improves manufacturing efficiency. Further, it can be suitably and stably used not only for image display but also for data transmission related to image processing and optical communication.

Further, in particular, in a combiner using a conventional hollow waveguide or the like, the optical transmission efficiency by the waveguide mainly in the visible light band is poor, and a sufficient output cannot be obtained with the output of the single mode laser diode element. However, such a configuration makes it possible to easily obtain a sufficient amount of light, which makes it possible to put it into practical use in various applications.

Further, by combining an optical fiber 12 which is inexpensive and stable and has high optical transmission efficiency and a semiconductor element manufacturing process for which a technology corresponding to a fine structure has been established, an accurate combiner 1 can be made efficient. It can be mass-produced well.

In addition, by combining such a very small combiner with a laser diode element, MEMS mirror, etc., it is possible to produce a compact and lightweight projector, and by installing it in a mobile device such as a smartphone or mobile phone, It is possible to display images in a wider variety of situations. For example, in addition to a normal front projector and HUD, a curved display, a dashboard display for a vehicle, an electronic mirror for a vehicle, and the like can be used as a rear projector.

Further, the three optical fibers 12 are fixed by the adhesive member 111 inside the guide grooves 11R, 11G, and 11B. In this way, since the optical fiber 12 is adhered in a state of being embedded in the guide grooves 11R, 11G, and 11B, it is easy to adjust the position and orientation at the time of fixing. In addition, the optical fiber 12 can be more reliably fixed at an appropriate position.

Further, the guide grooves 11R, 11G, and 11B have a rectangular shape in cross section at least within the second range on the exit side. With such a shape, it is possible to reduce the influence of a minute error in the size diameter of the optical fiber 12 and a minute distortion in the outer peripheral shape, and easily aggregate and emit a plurality of light rays (laser light) at appropriate intervals and directions. Can be done.

Further, the three optical fibers 12 are in a single mode. By combining a single-mode optical fiber and a MEMS mirror or the like, a very small projector can be configured, and the combiner 1 of the present embodiment relates to the light wave of each pixel for such a projector. The accuracy can be easily and surely improved.

Further, the method of manufacturing the combiner 1 of the present embodiment guides the guide substrate 11 to at least the first range from the incoming light ends 12R1, 12G1, 12B1 and the light emitting ends 12R2, 12G2, 12B2 to the second range. It includes a groove forming step for forming the grooves 11R, 11G and 11B, and a fiber fixing step for fitting and fixing the optical fiber 12 into the guide grooves 11R, 11G and 11B, respectively.
In this way, by providing guide grooves 11R, 11G, and 11B into which the plurality of optical fibers 12 are individually fitted at least at the incoming light end and the outgoing light end, and fixing the optical fibers 12 in each of the guide grooves 11, the plurality of optical fibers are simply obtained. By simply bundling the lights, it is possible to reduce the irregularities in the intervals and directions of the emitted light that are caused by the effects of variations in the thickness of the optical fibers between the optical fibers and within the optical fibers, and the waves are combined with high accuracy. The combiner 1 can be formed so that the light of the above can be emitted efficiently and stably.

Further, in the fiber fixing step, the optical fiber 12 is fixed to the inside of the guide grooves 11R, 11G, 11B by the adhesive member 111.
As a result, the optical fiber 12 is adhered in a state of being embedded in the guide grooves 11R, 11G, and 11B, so that the position and orientation at the time of fixing can be easily and accurately determined.

Further, the guide substrate 11 includes a suction hole forming step in which an intake hole 112 for sucking air from the guide grooves 11R, 11G, 11B is provided, and in the fiber fixing step, the guide grooves 11R, 11G, 11B are provided via the intake hole 112. The optical fiber 12 is fitted into the guide grooves 11R, 11G, and 11B, respectively, while sucking air from the guide groove.
Precise work is required and labor is required to mechanically and reliably insert the fine optical fiber 12, particularly the single-mode optical fiber 12 of about 10 μm, into the guide grooves 11R, 11G, and 11B having the same width. .. Further, tension is generated in the curved optical fiber 12, and it is difficult to securely keep the whole in the guide grooves 11R, 11G, 11B until it is fixed by the adhesive member 111. At this time, by drawing and maintaining the optical fiber 12 in the guide grooves 11R, 11G, 11B by the air flow, it is possible to more easily fix the optical fiber 12 in the guide grooves 11R, 11G, 11B. Become.

Further, a dicing step for cutting each of the plurality of formed combiners 1 is included, and in the groove forming step, the directions of the three guide grooves 11R, 11G, and 11B related to the two adjacent combiners 1 are staggered (opposite directions). By setting the guide grooves 11R, 11G, and 11B to each other so as to be adjacent to each other, the guide grooves 11R, 11G, and 11B are continuously formed for the plurality of combiners 1, respectively, in the fiber fixing step. Three continuous optical fibers 12 are fixed to a plurality of guide grooves 11R, 11G, and 11B continuously formed for the two combiners 1.
In this way, it is possible to insert the optical fibers 12 into the plurality of combiners 1 at once, and reduce the number of times the optical fibers 12 are fitted and bonded. As a result, the above-mentioned labor can be greatly reduced.

[Second Embodiment]
Next, the combiner of the second embodiment will be described.
FIG. 5 is an overall perspective view showing the combiner 1a of the second embodiment.

The combiner 1a is the same except that the shape of the guide substrate 11a on which the three optical fibers 12R, 12G, and 12B are mounted is different from that of the combiner 1 of the first embodiment.

The guide substrate 11a includes the incident surface between the incident surface including the light input ends 12R1, 12G1 and 12B1 of the optical fiber 12 and the exit surface including the light exit ends 12R2, 12G2 and 12B2 of the optical fiber 12. A predetermined partial range 11a1 (first range) and a predetermined partial range 11a2 (second range) including the exit surface and separated from the partial range 11a1 are formed to be thicker than the other portions. .. The guide grooves are the light inlet side guide grooves 11R1, 11G1, 11B1 provided in the partial range 11a1 from the positions of the light inlet ends 12R1, 12G1, 12B1 and the partial range 11a2 from the positions of the light exit ends 12R2, 12G2, 12B2. It is divided into the light emitting side guide grooves 11R2, 11G2, and 11B2 provided in the above, and is not provided in the central portion whose thickness is smaller than these partial ranges 11a1 and 11a2.

The light-in side guide grooves 11R1, 11G1, 11B1 and the light-out side guide grooves 11R2, 11G2, 11B2 can all be straight lines parallel to each other. As a result, the angle of light incident on the optical fiber 12 and the angle of light emitted from the optical fiber 12 are fixed within the required accuracy, and the path of the optical fiber 12 is not strictly defined for the intermediate curved portion.

In this case, when the optical fiber 12 is mounted on the guide substrate 11a, the light inlet side guide grooves 11R1, 11G1, 11B1 and the light exit side guide grooves 11R2, 11G2, only in the above-mentioned partial ranges 11a1 and 11a2 of the guide substrate 11a. Since the optical fibers 12 may be fitted into each of the 11B2s, it is possible to reduce the trouble of fitting (mounting) all the fine optical fibers 12 into the narrow guide groove. In the section where the guide groove is not provided, the optical fiber 12 is freely arranged in a reasonable shape according to the positional relationship of the guide grooves on both sides. The optical fiber 12 in this section may or may not be adhesively fixed to the guide substrate 11a by the adhesive member 111.

Here, the difference in thickness between the parts having different thicknesses in the guide substrate 11a is determined to be larger than the depth of the guide groove (in a plane different from the surface including the bottom surface of the guide groove and the surface of the thin portion). That is, the optical fiber 12 can be arranged in a shape in which the position of the guide substrate 11a changes slightly in the thickness direction between the guide grooves at both ends.

As described above, in the combiner 1a of the second embodiment, the first range (partial range 11a1) and the second range (partial range 11a2) are provided so as to be separated from each other, and the light emitting side. The guide grooves 11R2, 11G2, and 11B2 are provided in a straight line parallel to each other, and the light entry side guide grooves 11R1, 11G1, 11B2 are provided in a straight line parallel to each other.
By forming the fitted portion of the optical fiber 12 in a straight line in this way, it is easy to align the light entering and exiting directions. Further, since this does not apply unnecessary tension to the optical fiber 12, it is easy to stably keep the optical fiber 12 inside when the optical fiber 12 is fitted, and it is possible to reduce the labor and cost of manufacturing.

Further, the bottom surfaces (the innermost part from the opening side) of the light entering side guide grooves 11R1, 11G1, 11B1 and the light emitting side guide grooves 11R2, 11G2, 11B2 are outside the first range (partial range 11a1) and second. Outside the range (partial range 11a2), the three optical fibers 12 are provided in a surface different from the surface on which the three optical fibers 12 are provided.
That is, inside the combiner 1a, a slight step is formed at the boundary between the first range and the second range, so that the optical fiber 12 is more in a range that does not adversely affect the light transmission by the optical fiber 12. It is possible to surely make it easier to enter the back side of the light entering side guide grooves 11R1, 11G1, 11B1 and the light emitting side guide grooves 11R2, 11G2, 11B2.

Further, in the combiner 1a, the incoming light side guide grooves 11R1, 11G1, 11B1 and the light emitting side guide grooves 11R2, only in the first range (partial range 11a1) and the second range (partial range 11a2) at both ends. Since 11G2 and 11B2 are provided, it is possible to reduce the time and effort required to fit the optical fiber 12 in a portion where accuracy is not required so much in a fixed position or direction.

[Fourth and fifth embodiments]
Next, the combiner of the fourth embodiment and the fifth embodiment will be described.
FIG. 7 is an overall perspective view showing the combiner 1c of the fourth embodiment.

In the guide substrate 11c of the combiner 1c, the entrance surface and the exit surface are arranged vertically. Along with this, the width of the exit surface of the guide substrate 11c is increased, and the width of the guide substrate 11c in the direction perpendicular to the exit surface is shortened. The width in the direction perpendicular to the exit surface is determined based on the lower limit of the radius of curvature of the optical fiber 12.

FIG. 8 is an overall perspective view showing the combiner 1d of the fifth embodiment.

In the guide substrate 11d of the combiner 1d, the incident surface and the exit surface are vertically arranged as in the guide substrate 11c of the combiner 1c. In the guide substrate 11d, similarly to the combiner 1a of the second embodiment, the guide groove is provided only in a part including the light incoming end and a part including the light emitting end, and the guide substrate 11d is provided with these. It has an L-shape so that it forms only the part where the guide groove is provided. That is, the optical fiber 12 is placed on the guide substrate 11d between the guide grooves at both ends, is not fixed, and is simply connected.

Even in the combiner 1c of the fourth embodiment and the combiner 1d of the fifth embodiment, the optical fiber 12 is appropriately fitted at least at the input / output ends to obtain a combined wave with high optical transmission efficiency and combined wave accuracy. It becomes possible to do. Therefore, each configuration can be flexibly and compactly arranged by a combiner having an appropriate shape and size according to the shape and size of the laser beam output device and the like.

[Modification example]
9 and 10 are views of the exit surface showing a modified example of the guide groove in the combiner of each embodiment.

In each of the above embodiments, the guide groove 11e has a rectangular shape in a cross-sectional view, but as shown in FIG. 9A, a tapered shape (here, a V-shaped shape in a cross-sectional view, but a flat bottom surface is also included). ). In this case, for example, the guide groove is formed so that the width is 10 μm at the position of 1/2 in the depth direction or the position of 5 μm from the bottom surface. When the guide groove is formed by dry etching as described above, it usually naturally becomes a tapered shape.

Alternatively, the depth of the tapered shape (V-shaped cross-sectional view) may be shallower than half (radius) of the size (diameter) of the optical fiber 12. In this case, even if the partition walls between the guide grooves are not completely provided as in each of the above-described embodiments, the arrangement of the optical fibers 12 can be determined at equal intervals and parallel to each other. Further, in particular, as shown in FIG. 9B, the distance between the three guide grooves 11e1 is provided equal to the maximum value in consideration of the size error of the optical fiber 12 on the exit surface side (second range). This also eliminates the need for an interval corresponding to the guide groove between the emitted lights of the plurality of optical fibers 12, and makes it possible to emit a plurality of lights that are more densely, parallel and evenly spaced.

Alternatively, as shown in FIG. 10, the guide groove 11f may have a round (curved) cross-sectional view. In this case, a plurality of optical fibers 12 are stably arranged at the center of the guide groove in the width direction regardless of the size of the optical fiber 12 fitted inside the guide groove, and the bottom surface of the guide groove and the optical fiber 12 The contact position with is fixed to the central portion.
In addition, the shape of the guide groove can be defined as various shapes into which the optical fiber 12 can be stably fitted.

As described above, the plurality of guide grooves can have a V-shaped cross-sectional view or a round cross-sectional view at least within the second range on the light emitting side. With such a shape, the optical fiber 12 can be more stably arranged in the center inside the guide groove.

The present invention is not limited to the above embodiment, and various modifications can be made.
For example, in the above embodiment, the silicon substrate is used as the guide substrate 11, but other materials such as a glass substrate and a resin substrate such as plastic may be used.

Further, in the above embodiment, the case where the light of a plurality of single-mode optical fibers is combined has been described, but the emitted light of the plurality of multi-mode optical fibers can also be combined using the same configuration. can. In this case, the combiner according to the present invention can also be used as a member related to a light source of a reflective projector image device such as a digital mirror device (DMD) or LCOS.

Further, in the above embodiment, the case where visible light of three colors of RGB is combined and output has been described, but the output light may be light of another wavelength, and the output light may be infrared light ( Those other than visible light such as IR) may be included. In addition, by providing a configuration in which infrared light of multiple wavelengths is combined and output, and the reflected wave is detected to acquire the reflection intensity distribution, various sensing, especially measurement of a three-dimensional structure, can be performed. You may use it.

Further, in the above embodiment, the case where electromagnetic waves of a plurality of wavelengths are combined has been described, but by combining light of the same wavelength, the amount of light can be increased especially when the amount of output light from a semiconductor laser or the like is insufficient by itself. It becomes possible to increase and output.

Further, in the above embodiment, the cross-sectional shape of the guide groove is the same in the entire guide groove, the first range, and the second range, but the shape may be changed in the middle.
In addition, the specific details of the configuration, structure, shape, and manufacturing method shown in the above-described embodiment can be appropriately changed without departing from the spirit of the present invention.

1, 1a to 1d combiner 11, 11a, 11c, 11d, guide substrate 11R, 11G, 11B, 11e, 11e1, 11f Guide groove 11R1, 11B1, 11G1 Ingress side guide groove 11R2, 11B2, 11G2 Idemitsu side guide groove 11a1, 11a2 Partial range 12, 12R, 12G, 12B Optical fiber 12R1, 12G1, 12B1 Idemitsu end 12R2, 12G2, 12B2 Idemitsu end 12S Structure 110 Silicon wafer 111 Adhesive member 112 Intake hole 113 Reference mark 400 Polishing member

Claims (11)

It is an optical combiner that emits a plurality of light rays incident from the incoming light end from the light emitting end aggregated within a predetermined range.
With the board
A plurality of optical fibers having a diameter of 10 μm or less , which are fixed to the substrate at least in the first range from the light input end and the second range from the light exit end, and guide the light rays incident from the light input end to the light exit end, respectively. Optical fiber and
With
The substrate has a plurality of grooves in which the plurality of optical fibers are individually fitted without contacting each other in at least the first range and the second range.
An optical combiner, wherein each of the plurality of optical fibers is fixed inside the plurality of grooves. The optical combiner according to claim 1, wherein the plurality of optical fibers are each fixed by an adhesive inside the plurality of grooves. The first range and the second range are provided apart from each other.
The optical combiner according to claim 1 or 2, wherein the plurality of grooves are arranged in a straight line parallel to each other. 3. The bottom surface of the plurality of grooves is provided in a surface different from the surface on which the plurality of optical fibers are provided outside the first range and outside the second range. Described optical combiner. The optical combiner according to any one of claims 1 to 4, wherein the plurality of grooves have a rectangular shape in a cross-sectional view at least within the second range. The optical combiner according to any one of claims 1 to 4, wherein the plurality of grooves have a V-shaped cross-sectional view at least within the second range. The optical combiner according to any one of claims 1 to 6, wherein the plurality of optical fibers are in a single mode. A substrate and a plurality of optical fibers having a diameter of 10 μm or less that guide light rays incident from the incoming light end to the outgoing light end are provided, and the plurality of light rays incident from the incoming light end are aggregated within a predetermined range. It is a method of manufacturing an optical combiner that emits light from the light emitting end.
A groove forming step in which a plurality of grooves are formed in at least a first range from the incoming light end and a second range from the light emitting end with respect to the substrate.
A fiber fixing step in which the plurality of optical fibers are fitted and fixed in the grooves without contacting each other.
A method for manufacturing an optical combiner, which comprises. The method for manufacturing an optical combiner according to claim 8, wherein in the fiber fixing step, the optical fiber is fixed inside the groove portion with an adhesive. The substrate includes a suction hole forming step of providing a suction hole for sucking air from the groove.
The method for manufacturing an optical combiner according to claim 9, wherein in the fiber fixing step, each of the optical fibers is fitted into the groove while sucking air from the groove through the suction hole. A dicing step for separating each of the plurality of formed optical combiners is included.
In the groove forming step, the plurality of grooves related to the two adjacent photosynthetic devices are formed in succession by staggering the directions of the plurality of grooves.
Any one of claims 8 to 10, wherein in the fiber fixing step, the plurality of optical fibers that are continuous are fixed to the plurality of grooves that are continuously formed for the two optical combiners. The method for manufacturing an optical combiner according to the above.

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