JP2003057466A - Optical waveguide and component using the same, and manufacturing method for the optical waveguide - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical waveguide with superior mass-productivity which can be manufactured by presswork and have high precision without cutting nor polishing the circumference of an end surface after the manufacture. SOLUTION: This optical waveguide has a lower clad layer 10 having an optical waveguide groove 15 on its top surface, a core member 14 charged in the optical waveguide groove 15, and an upper clad layer 18 which is stuck on the top surface of the lower clad layer 10 having the core member 14 charged in the optical waveguide groove 15. An end surface 17 of the optical waveguide groove 15 slants to the optical axis of the optical waveguide and a reflecting film 16 is formed on the slanting end surface 17. In the optical waveguide which is thus formed, light does not pass through the end surface, so even if the lower clad layer 10 is formed by the presswork and has a sag at the end part, it never decreases the precision of the optical waveguide. Consequently, the end part of the optical waveguide having been manufactured need not be cut and polished.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical waveguide used in the field of optical communication, a component using the same, and a method for manufacturing the optical waveguide.

[0002]

2. Description of the Related Art A conventional optical waveguide has a structure as shown in FIG. FIG. 14A is a sectional view taken along the optical axis of a conventional optical waveguide, and FIG. 14B is a perspective view of the lower clad layer 92 shown in FIG. 14A. FIG. 14 (a),
In (b), the conventional optical waveguide has a structure in which the core member 90 is wrapped with an upper clad layer 91 and a lower clad layer 92. In the optical waveguide thus configured, light enters the core member 90 from the one end surface 93. The light propagates through the core member 90 and the other end surface 93
Go out from.

A flame deposition method has been conventionally known as a method of manufacturing an optical waveguide having the above-mentioned structure (for example, Japanese Patent Laid-Open No. 5-100123). FIG. 15 is a diagram showing a conventional optical waveguide manufacturing process by the flame deposition method. In FIG. 15, first, an under clad layer 62 containing SiO 2 having a low refractive index as a main component is formed on a substrate 61.
And a core film 63a containing SiO 2 having a high refractive index as a main component are formed by a flame deposition method. Next, the core film 63a is subjected to pattern etching to form the core portion 63. Next, a SiO 2 thin film layer 64 is formed by a low temperature CVD method so as to cover the core portion 63 and the under cladding layer 62.
To form. Then, the thin film layer 64 is heated and annealed to obtain SiO having a refractive index similar to that of the under cladding layer 62.
The upper clad layer 65 mainly composed of
It is formed on the upper part of No. 4 by the flame deposition method.

Also, conventionally, a method of manufacturing an optical waveguide by a press method is known (for example, Japanese Patent Laid-Open No. 07-28714).
No. 1). FIG. 16 is a diagram for explaining a conventional optical waveguide manufacturing method by a press method. In FIG. 16, first, the clad material 73a is pressed with the mold material 71 having the projections 72 on the lower surface to form the under-cladding layer 73 having the grooves 74 on the upper surface. Next, groove 7
4 is filled with core material 75. Then, the over cladding layer 76 is attached to the upper surface of the under cladding layer 73 in which the groove 74 is filled with the core material 75.

[0005]

According to the conventional manufacturing method by the flame deposition method, a highly accurate optical waveguide can be obtained.
However, there are many manufacturing processes, especially thick film (6
2, 63a, 65) took a long time. Moreover, the devices used in various manufacturing processes are very expensive, and the cost of optical waveguide parts is high.

On the other hand, in the conventional manufacturing method by the above press method, the number of steps is small and the under clad layer 73
Since it is formed by pressing, the optical waveguide can be manufactured in a relatively short time. However, in the press-formed under-cladding layer 73, in many cases, as shown in FIG. 17, sagging (having a rounded shape) near the end portion 80.
Is occurring. If the end portion 80 of the underclad layer 73 has a sag, the end face connected to the optical fiber 81 is distorted, so that a highly accurate optical waveguide cannot be obtained. Therefore, in the case of the optical waveguide manufactured as described above, the vicinity of both end faces 80 (the portion where sagging occurs in the lower clad layer)
Had to be cut and the cut surface (new end surface) had to be ground.

Therefore, the object of the present invention is to enable the production by the press method and to cut / cut the vicinity of the end face after the production.
An object of the present invention is to provide an optical waveguide (and a component using the same, and a method of manufacturing such an optical waveguide) that is excellent in mass productivity and that can achieve high accuracy without polishing.

[0008]

A first aspect of the present invention is an optical waveguide for guiding light, comprising a lower clad layer having an optical waveguide groove on its upper surface, a core member filled in the optical waveguide groove, and an optical waveguide. The groove includes an upper clad layer attached to the upper surface of the lower clad layer filled with the core member, and in the optical waveguide groove, the end face is inclined with respect to the optical axis of the optical waveguide,
Moreover, a reflective film is present between the inclined end surface and the core member.

In the first aspect of the invention, for example, the light emitted vertically downward from the end face of the optical fiber passes through the upper cladding layer and enters the core member. The light entering the core member has its traveling direction changed by the reflection film existing between the core member and one inclined end surface, and travels horizontally in the core member. Then, the traveling direction is changed to the vertically upward direction by the reflection film existing between the core member and the other inclined end surface. After that, it exits the core member, passes through the upper cladding layer, and is incident on, for example, the end face of another optical fiber. As described above, in the optical waveguide according to the first invention, light does not pass through the end portion.

The optical waveguide according to the first invention is manufactured by the method according to the twelfth invention described below. In this manufacturing method, since the lower clad layer is formed by pressing, the optical waveguide can be manufactured efficiently, but sagging may occur at the end of the lower clad layer. However, in this optical waveguide, since light does not pass through the end portion, the accuracy of the optical waveguide does not deteriorate even if the end portion is sagged. Therefore, it is not necessary to cut and polish the end of the optical waveguide after manufacturing.

A second invention is an optical waveguide for guiding light, wherein a lower clad layer having an optical waveguide groove on its upper surface, a core member filled in the optical waveguide groove, and the optical waveguide groove being filled with the core member. And an upper clad layer attached to the upper surface of the lower clad layer, the end face of the optical waveguide groove is inclined with respect to the optical axis of the optical waveguide, and the diffraction grating is formed on the inclined end face. It is characterized by

In the second aspect of the invention, for example, light emitted vertically downward from the end face of the optical fiber passes through the upper clad layer and enters the core member. The light entering the core member has its traveling direction changed by the diffraction grating formed on one inclined end face, and travels horizontally in the core member. Then, the traveling direction can be changed vertically upward by the diffraction grating formed on another one inclined end face. After that, it exits the core member, passes through the upper cladding layer, and is incident on, for example, the end face of another optical fiber. As described above, in the optical waveguide according to the second invention, light does not pass through the end portion.

The optical waveguide according to the second invention is manufactured by the method according to the thirteenth invention described below. In this manufacturing method, since the lower clad layer is formed by pressing, the optical waveguide can be manufactured efficiently, but sagging may occur at the end of the lower clad layer. However, in this optical waveguide, since light does not pass through the end portion, the accuracy of the optical waveguide does not deteriorate even if the end portion is sagged. Therefore, it is not necessary to cut and polish the end of the optical waveguide after manufacturing.

According to a third invention, in the first or second invention, a marking for specifying the position of the inclined end surface is
It is provided on the upper surface of the lower clad layer.

In the third aspect of the invention, the marking facilitates the identification of the position of the inclined end face, so that it is possible to connect an optical fiber (not shown) to the optimum position using an image recognition device or the like. This marking is typically formed at the same time as the optical waveguide.

A fourth invention is a component using an optical waveguide, which comprises an optical waveguide for guiding light and an optical fiber connected to the optical waveguide, and the optical waveguide has a lower portion having an optical waveguide groove on its upper surface. The optical waveguide groove comprises a clad layer, a core member filled in the optical waveguide groove, and an upper clad layer attached to the upper surface of the lower clad layer filled with the core member. The optical fiber is inclined with respect to the optical axis of the optical waveguide, and a reflection film is present between the inclined end surface and the core member, and the optical fiber has an end surface inclined with respect to the optical axis, and A reflection film is formed on the end face, and an optical fiber positioning guide for fixing the optical fiber so that the inclined end face of the optical fiber is located at a position facing the inclined end face of the optical waveguide groove is provided on the upper surface of the lower clad layer. It is provided The features.

In the fourth aspect of the invention, the optical fiber positioning guide fixes the optical fiber so that the inclined end face of the optical fiber faces the inclined end face of the optical waveguide groove.
The light propagating in the optical fiber fixed in this way is
The direction of travel is changed by the reflection film on the inclined end surface, and the light is emitted vertically downward from the side surface. The light thus emitted passes through the upper clad layer and enters the core member. The light entering the core member has its traveling direction changed by the reflection film existing between the core member and one inclined end surface, and travels horizontally in the core member. And one different from the core member
The reflecting film existing between the two inclined end faces changes the traveling direction vertically upward. After that, it exits the core member, passes through the upper cladding layer, and is incident on the side surface of another optical fiber. The light that has entered another optical fiber in this way is
The direction of travel is changed by the reflection film on the inclined end surface, and the light propagates in the optical fiber.

As described above, the optical waveguide component according to the fourth invention comprises the optical waveguide and the optical fiber. This optical waveguide is the same as the optical waveguide according to the first invention, except that an optical fiber positioning guide is provided on the upper surface of the lower clad layer. The optical fiber positioning guide fixes the optical fiber so that the inclined end surface of the optical fiber is located at a position facing the inclined end surface of the optical waveguide groove. And this optical waveguide also
Similar to the optical waveguide according to the first invention, it is not necessary to cut and polish the end portion after manufacturing.

A fifth aspect of the present invention is a component using an optical waveguide, comprising an optical waveguide for guiding light and an optical fiber connected to the optical waveguide, the optical waveguide being a lower portion having an optical waveguide groove on its upper surface. The optical waveguide groove comprises a clad layer, a core member filled in the optical waveguide groove, and an upper clad layer attached to the upper surface of the lower clad layer filled with the core member. The optical waveguide has an end face inclined to the optical axis and has a diffraction grating formed on the inclined end face, and the optical fiber has a reflection film formed on the inclined end face. The optical fiber positioning guide for fixing the optical fiber so that the inclined end face of the optical fiber is located at a position facing the inclined end face of the optical waveguide groove is provided on the upper surface of the lower cladding layer. Features .

In the fifth aspect of the invention, the optical fiber positioning guide fixes the optical fiber so that the inclined end face of the optical fiber faces the inclined end face of the optical waveguide groove.
The light propagating in the optical fiber fixed in this way is
The direction of travel is changed by the reflection film on the inclined end surface, and the light is emitted vertically downward from the side surface. The light thus emitted passes through the upper clad layer and enters the core member.
The light entering the core member has its traveling direction changed by the diffraction grating formed on one inclined end face, and travels horizontally in the core member. Then, the traveling direction can be changed vertically upward by the diffraction grating formed on another one inclined end face. After that, exit the core member and pass through the upper clad layer,
It is incident on the side surface of another optical fiber. The light entering the other optical fiber in this way is changed in its traveling direction by the reflection film on the inclined end face and propagates in the optical fiber.

As described above, the optical waveguide component according to the fifth invention comprises the optical waveguide and the optical fiber. This optical waveguide is the same as the optical waveguide according to the second invention, except that an optical fiber positioning guide is provided on the upper surface of the lower clad layer. The optical fiber positioning guide fixes the optical fiber so that the inclined end surface of the optical fiber is located at a position facing the inclined end surface of the optical waveguide groove. And this optical waveguide also
Similar to the optical waveguide according to the second invention, it is not necessary to cut and polish the end portion after manufacturing.

In a sixth aspect based on the fourth or fifth aspect, the optical waveguide is a bifurcated optical waveguide having three inclined end faces, and three optical fibers are connected to the optical waveguide. An optical fiber positioning guide for fixing the three optical fibers is provided on the upper surface of the lower clad layer so that the inclined end faces of the respective optical fibers are located at positions facing the inclined end faces of the optical waveguide grooves. It is characterized by

In the sixth aspect of the invention, the optical fiber positioning guide fixes the three optical fibers so that the inclined end faces of the three optical fibers are located at positions facing the three inclined end faces of the optical waveguide groove. The light propagating in one of the three optical fibers fixed in this way has its traveling direction changed by the reflecting film on the inclined end face, and is emitted vertically downward from the side surface. The light thus emitted passes through the upper clad layer and enters the core member. The light entering the core member has its traveling direction changed by the reflection film or the diffraction grating formed on one of the three inclined end faces, and travels horizontally in the core member. Then, after bifurcating at the bifurcation point, the traveling direction is changed vertically upward by the reflection film or the diffraction grating formed on the remaining two inclined end faces. Then, exit the core member, pass through the upper clad layer, and
It is incident on the side surface of the optical fiber of the book. The light thus entering the two optical fibers has its traveling direction changed by the reflection film on the inclined end surface, and propagates in these optical fibers.

A seventh invention is the fourth or fifth invention further comprising a light emitting element and a light receiving element connected to the optical waveguide, wherein the optical waveguide is a bifurcated optical waveguide having three inclined end faces. One optical fiber, a light emitting element and a light receiving element are connected to the three inclined end faces,
An optical fiber positioning guide for fixing one optical fiber is provided on the upper surface of the lower clad layer so that the one inclined end surface of the one optical fiber faces the one inclined end surface of the optical waveguide groove. The light emitting element and the light receiving element are surface-mounted on the upper surface of the upper clad layer so that the light emitting surface of the light emitting element and the light receiving surface of the light receiving element face the remaining two inclined end faces of the optical waveguide groove. One electrode pattern is printed.

In the seventh aspect of the invention, the optical fiber positioning guide fixes one optical fiber so that the inclined end surface of one optical fiber faces one of the three inclined end surfaces of the optical waveguide groove. To do. The light-emitting element and the light-receiving element are provided on the upper surface of the upper clad layer through two electrode patterns so that the light-emitting surface of the light-emitting element and the light-receiving surface of the light-receiving element are positioned to face the remaining two inclined end faces of the optical waveguide groove. To be implemented. The light propagating through the thus fixed single optical fiber has its traveling direction changed by the reflection film on the inclined end face, and is emitted vertically downward from the side surface. The light thus emitted passes through the upper clad layer and enters the core member. The light entering the core member has its traveling direction changed by the reflection film or the diffraction grating formed on one of the three inclined end faces, and travels horizontally in the core member. Then, the traveling direction is changed vertically upward by the reflection film or the diffraction grating formed on one of the remaining two inclined end faces. Then, the light exits the core member, passes through the upper clad layer, and is incident on the light-receiving element surface-mounted on the upper surface of the upper clad layer. On the other hand, the light emitted from the light emitting element surface-mounted on the upper surface of the upper clad layer passes through the upper clad layer and enters the core member. The light that has entered the core member exits the core member through a route opposite to the light emitted from the optical fiber. Then, the light passes through the upper clad layer and is incident on the side surface of one optical fiber. The light thus entering one optical fiber has its traveling direction changed by the reflection film on the inclined end face and propagates in the optical fiber.

According to an eighth invention, in the seventh invention, the wavelength of the light emitted by the light emitting element and the wavelength of the light received by the light receiving element are the same, and the optical fiber positioning guide is provided on the upper surface of the lower cladding layer. The two electrode patterns provided on one end are characterized by being printed on the end of the upper surface of the upper cladding layer opposite to the optical fiber positioning guide.

In the eighth invention, the two electrode patterns are printed on the end of the upper surface of the upper cladding layer opposite to the optical fiber positioning guide. In this way, by printing the two electrode patterns close to each other on the same surface, it is possible to collectively perform the operation of printing the two electrode patterns.

In a ninth aspect based on the seventh aspect, the wavelength of the light emitted by the light emitting element and the wavelength of the light received by the light receiving element are different from each other, and one of the two wavelengths is reflected and the other of the two wavelengths is reflected. Is further provided with a wavelength filter for transmitting
The optical fiber positioning guide is provided on one end of the upper surface of the lower cladding layer, and the two electrode patterns are on the same side of the upper surface of the upper cladding layer and on the opposite side of the optical fiber positioning guide. It is characterized by being dispersed and printed on.

In the ninth aspect of the invention, the two electrode patterns are dispersedly printed on the upper surface of the lower clad layer at the end on the same side as the optical fiber positioning guide and the end on the opposite side. By mounting the light emitting element and the light receiving element separately from each other in this manner, electrical crosstalk (mutual interference) between both elements is reduced. When the light emitting element is mounted on the same side as the optical fiber, a wavelength filter having a characteristic of reflecting the light emitted from the light emitting element and transmitting the light emitted from the optical fiber is used.
When the light receiving element is mounted on the same side as the optical fiber, a wavelength filter having a characteristic of reflecting the light emitted from the optical fiber and transmitting the light emitted from the light emitting element is used.

A tenth aspect of the present invention is a component using an optical waveguide, which comprises an optical waveguide for guiding light and an optical fiber connected to the optical waveguide, and the optical waveguide has a lower portion having an optical waveguide groove on its upper surface. A clad layer, a core member filled in the optical waveguide groove, and an upper clad layer attached to the upper surface of the lower clad layer in which the optical waveguide groove is filled with the core member,
In the optical waveguide groove, the end face is inclined with respect to the optical axis of the optical waveguide, and a reflection film is present between the inclined end face and the core member, and the optical fiber has an end face perpendicular to the optical axis. And an optical fiber insertion hole for fixing the optical fiber so that the vertical end face of the optical fiber comes to a position facing the inclined end face of the optical waveguide groove is provided on the upper surface of the upper cladding layer. Characterize.

As described above, the optical waveguide component according to the tenth invention comprises the optical waveguide and the optical fiber. This optical waveguide is the optical waveguide according to the first invention, wherein an optical fiber insertion hole is provided in the upper surface of the upper clad layer, and the optical fiber is inserted into the optical fiber insertion hole, The optical fiber is fixed so that the vertical end face is located at a position facing the inclined end face of the optical waveguide groove. Similar to the optical waveguide according to the first aspect of the invention, this optical waveguide does not need to be cut and polished at the end of the optical waveguide after manufacturing.

An eleventh invention is a component using an optical waveguide, which comprises an optical waveguide for guiding light and an optical fiber connected to the optical waveguide, and the optical waveguide has a lower portion having an optical waveguide groove on its upper surface. A clad layer, a core member filled in the optical waveguide groove, and an upper clad layer attached to the upper surface of the lower clad layer in which the optical waveguide groove is filled with the core member,
In the optical waveguide groove, the end face is inclined with respect to the optical axis of the optical waveguide, and a diffraction grating is formed on the inclined end face,
The optical fiber has an end face perpendicular to the optical axis, and an optical fiber insertion hole for fixing the optical fiber so that the vertical end face of the optical fiber comes to a position facing the inclined end face of the optical waveguide groove, It is characterized in that it is provided on the upper surface of the upper clad layer.

As described above, the optical waveguide component according to the eleventh invention includes the optical waveguide and the optical fiber. This optical waveguide is the optical waveguide according to the second invention, wherein an optical fiber insertion hole is provided in the upper surface of the upper clad layer, and the optical fiber is inserted into the optical fiber insertion hole, The optical fiber is fixed so that the vertical end face is located at a position facing the inclined end face of the optical waveguide groove. Similar to the optical waveguide according to the second aspect of the invention, this optical waveguide does not need to be cut and polished at the end portion of the optical waveguide after manufacturing.

A twelfth invention is a method of manufacturing an optical waveguide for guiding light, wherein a lower clad layer having an optical waveguide groove whose end face is inclined with respect to the optical axis of the optical waveguide is pressed. Forming step, forming a reflection film on the inclined end face of the optical waveguide groove on the upper surface of the lower clad layer obtained by press forming, and filling the core member in the optical waveguide groove having the reflection film formed on the inclined end face. And a step of attaching the upper clad layer to the upper surface of the lower clad layer in which the optical waveguide groove is filled with the core member.

A thirteenth invention is a method of manufacturing an optical waveguide for guiding light, wherein an end face is inclined with respect to the optical axis of the optical waveguide, and a diffraction grating is engraved on the inclined end face. A step of forming a lower clad layer having an optical waveguide groove on the upper surface, and a step of filling a core member in the optical waveguide groove on the upper surface of the lower clad layer obtained by press forming,
Bonding the upper clad layer to the upper surface of the lower clad layer in which the optical waveguide groove is filled with the core member.

[0036]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1 is a sectional view taken along the optical axis of an optical waveguide according to a first embodiment of the present invention, and FIG. 2 is a perspective view of a lower cladding layer 10 shown in FIG. is there. 1 and 2
In the present optical waveguide, the lower clad layer 10 having the optical waveguide groove 15 on the upper surface, the core member 14 filled in the optical waveguide groove 15, and the lower clad layer in which the optical waveguide groove 15 is filled with the core member 14 And an upper clad layer 18 attached to the upper surface of 10.

Optical waveguide groove 15 on the upper surface of the lower cladding layer 10.
As shown in FIG. 2, has a bifurcated structure that bifurcates at one point (branch point) having one groove, and has three end faces 1
7a to 7c-all have smooth flat surfaces. Although the optical waveguide groove 15 has a bifurcated structure here, it may have a non-branched structure (two end faces) or a three-branched structure (four end faces or more). In any case, the cross section along the optical axis is as shown in FIG.

Lower clad layer 10 and upper clad layer 18
Are typically made of optical materials (eg glass) having the same refractive index as each other. The core member 14 is made of an optical material (for example, resin) having a higher refractive index than the cladding layers 10 and 18.

The optical waveguide has the following two features. (1) In the optical waveguide groove 15, the end faces 17a to 17c are inclined with respect to the optical axis. The inclination angle of the end faces 17a to 17c is typically 45 degrees with respect to the optical axis. (2) The reflective films 16a to 16c are present between the inclined end surfaces 17a to 17c of the optical waveguide groove 15 and the core member 14. These reflection films 16a to 16c are made of metal on the inclined end faces 17a to 17c.
It is typically a film formed by vapor deposition of Al (aluminum).

The operation of the optical waveguide configured as described above will be described below. In FIG. 1, for example, it is assumed that the end surface of the optical fiber is vertically above the inclined end surface 17a. The light emitted vertically downward from the end face of the optical fiber passes through the upper clad layer 18 and enters the core member 14. The light entering the core member 14 is reflected by the reflection film 16
The traveling direction is changed by a, and the traveling in the core member 14 is performed horizontally. Then, after bifurcating at the branch point, the traveling direction is changed vertically upward by the reflecting films 16b and 16c. After that, the core member 14 is exited and the upper clad layer 18
And is incident on the end faces of another two optical fibers placed vertically above the inclined end faces 17b and 17c.

Next, a method of manufacturing the present optical waveguide will be described.
FIG. 3 is a diagram showing a manufacturing process of the present optical waveguide.
As shown in FIG. 3, in the method of manufacturing the present optical waveguide, a step of forming a lower clad layer 10 having an optical waveguide groove 15 —an end face 17 of which is inclined— on the upper surface thereof by pressing ((a)).
And (b)), a step (c) of forming the reflection film 16 on the inclined end surface 17, a step (d) of filling the optical waveguide groove 15 with the core member 14 after the formation of the reflection film, and an optical waveguide groove. 1
5 includes a step (e) of attaching the upper clad layer 18 to the upper surface of the lower clad layer 10 filled with the core member 14.

In FIG. 3A, the lower cladding layer 10
The upper die 12 and the lower die 11 for pressing the lower clad layer substrate 10a are used for forming. The upper die 12 has a convex portion 13 whose end surface is inclined by 45 degrees. The lower mold 11 is a flat plate metal for supporting the lower clad layer substrate 10a and has a heating function. Lower clad layer substrate 1
0a is, for example, flat glass.

In FIG. 3D, the core member 14 is a low-viscosity ultraviolet curable resin, and has a refractive index higher than that of the lower clad layer substrate 10a by about 0.003. Reflective film 16
Is a metal film, typically an Al film, and is formed by vapor deposition. The upper clad layer substrate 18a is, for example, flat glass and has a refractive index substantially the same as that of the lower clad layer substrate 10a.

The manufacturing process of the present optical waveguide will be described in detail below with reference to FIGS. First, as shown in FIG. 3A, the lower clad layer substrate 10
A is placed on the lower mold 11, and the lower mold 11 is heated until the substrate 10a reaches a temperature at which it can be deformed. Next, as shown in (b), the convex portion 13 of the upper mold 12 is pressed against the upper surface of the lower clad layer substrate 10a which has reached a deformable temperature.
As a result, the shape of the convex portion 13 is transferred, and the optical waveguide groove 15 having the end face 17 inclined by 45 degrees is formed on the upper surface of the lower cladding layer substrate 10a.

Next, as shown in (c), the optical waveguide groove 1
5 is formed on the lower clad layer substrate 10a on which the upper mold 12 is formed.
After that, the reflection film 16 is formed on the inclined end surface 17 of the optical waveguide groove 15 by the Al vapor deposition method. further,
As shown in (d), the core member 14 of an ultraviolet curable resin is filled in the optical waveguide groove 15 by a spin coating method.
Then, as shown in (e), the upper clad layer substrate 18a is attached to the upper surface of the core member 14 filled in the groove 15, and then ultraviolet rays are irradiated to cure the resin to form an optical waveguide. .

As described above, in the optical waveguide according to the present embodiment, the light traveling along the optical axis of the optical waveguide does not enter the inside of the core member 14 from the end face (see FIG. 14) but vertically (below). Light traveling perpendicular to the optical axis of the optical waveguide passes through the upper clad layer 18 from the side surface and enters the core member 14 (see FIG. 1). The light entering the inside of the core member 14 has its traveling direction changed by the reflection film 16a formed on the inclined end surface 17a of the optical waveguide groove 15, and travels horizontally inside the core member 14. The traveling direction is changed vertically upward by the reflection film 16b formed on the other inclined end surface 17b of the optical waveguide groove 15, exits the core member 14, passes through the upper clad layer 18, and is exposed to the outside of the optical waveguide from the side surface. Is ejected. That is, light does not pass through the end of the optical waveguide.

When the optical waveguide is manufactured, the lower clad layer 10 is formed by pressing, so that the optical waveguide can be manufactured efficiently, but sagging may occur at the end of the lower clad layer 10. However, in this optical waveguide, since light does not pass through the ends, even if sagging occurs at the ends, it does not deteriorate the accuracy of the optical waveguide. Therefore, it is not necessary to cut and polish the end of the optical waveguide after manufacturing.

The above press forming step (FIG. 3A)
And (b)), when forming the groove 15 on the upper surface of the lower cladding layer substrate 10a, as shown in FIG.
Marking 19 for identifying the position of the inclined end surface 17 of the
May be formed together. As a result, the optical fiber (not shown) can be adjusted to the optimum position by using the image recognition device or the like, and as a result, the present optical waveguide and the optical fiber can be optimally coupled. Moreover, since the marking 19 is formed at the same time as the optical waveguide, the number of steps does not increase.

(Second Embodiment) An optical waveguide according to a second embodiment of the present invention is the same as the optical waveguide according to the first embodiment (see FIGS. 1 and 2). In FIG. 17, a diffraction grating is formed instead of the reflective film 16. Except for this point, the configuration of the present optical waveguide is the same as that of the first embodiment, and description thereof will be omitted.

Like the reflection film 16, the diffraction grating has a function of changing the path of light. The other components also have the same operation as in the first embodiment. Therefore, the operation of the present optical waveguide is the same as that of the first embodiment, and the description is omitted.

The manufacturing method of this optical waveguide is the same as the manufacturing method described in the first embodiment (see FIG. 3).
In place of the step of forming the optical waveguide groove 15 in which 7 is a smooth plane, a step of forming the groove 15 in which the diffraction grating is carved on the inclined end surface 17 is included, and the inclined end surface 17 of the optical waveguide groove 15 is included. The step of forming the reflective film 16 by vapor deposition is omitted. Except for these points, the manufacturing method of the present optical waveguide is the same as that of the first embodiment.

FIG. 5 is a view showing a part of the manufacturing process of the optical waveguide according to the second embodiment of the present invention (a part different from the first embodiment). In the first embodiment, FIG.
As shown in (a), the lower clad layer 10 was press-formed using the upper mold 12 having the convex portion 13 whose end surface was inclined by 45 degrees, and the end surface of the convex portion 13 was a smooth flat surface. In the lower clad layer 10 formed by pressing using the upper die 12 as described above, the inclined end surface 17 of the optical waveguide groove 15 is formed.
Was a smooth flat surface, and the reflective film 16 was vapor-deposited and formed thereon.

The present embodiment is also the same in that the lower clad layer 10 is press-formed by using the upper mold 12 having the convex portion 13 whose end face is inclined by 45. However, in the present embodiment, as shown in FIG. 5, the diffraction grating type 21 is carved on the inclined end surface of the convex portion 13. In the lower clad layer 10 formed by pressing using the upper die 12 as described above, the diffraction grating 20 is carved on the inclined end face 17 of the optical waveguide groove 15. Since the diffraction grating 20 has a function of changing the path of light, the step of forming the reflective film 16 by vapor deposition is omitted.

The reflection film 16 and the diffraction grating 20 both have the effect of changing the traveling direction of light, but in the case of diffraction, unlike reflection, the traveling direction of light differs depending on the wavelength. That is, as shown in FIG. 5, when the light of wavelength λ1 and the light of wavelength λ2 (λ1 ≠ λ2) enter the diffraction grating 20 at the same angle, the light of wavelength λ1 is emitted from the diffraction grating 20. The light of wavelength λ2 exits at a different angle.
By utilizing this characteristic, it is possible to construct an optical waveguide having excellent wavelength selectivity or an optical waveguide having high wavelength separation.

As described above, according to this embodiment, the first
The same effect as that of the above embodiment can be obtained. Further, as compared with the first embodiment, since the step of forming the reflective film 16 is unnecessary,
The optical waveguide can be manufactured in a smaller number of steps.

(Third Embodiment) FIG. 6 shows a third embodiment of the present invention.
FIG. 7 is a perspective view of the optical waveguide component according to the embodiment, and FIG. 7 is a sectional view taken along the optical axis thereof. In FIG. 6, the present optical waveguide component includes an optical waveguide and three optical fibers 30a to 30c connected to the optical waveguide (when it is not necessary to distinguish each optical fiber, (A to c attached to reference numeral 30 are omitted). The optical fiber 30 has an end face 32 that is inclined by 45 degrees with respect to the optical axis, and a reflective film is formed on the inclined end face 32.

The optical waveguide has the same structure as the optical waveguide according to the first or second embodiment except for the following points. A plurality of protrusions 37 for sandwiching and fixing the side faces of the optical fiber 30 so that the inclined end face 32 of the optical fiber 30 is located at a position directly facing the inclined end face 17 of the optical waveguide groove 15 (these protrusions are referred to as “optical fiber positioning guide”). 37 ”) are provided on both ends of the upper surface of the lower cladding layer 10.

The operation of the optical waveguide component constructed as above will be described below. In FIG. 7, the light propagating in the optical fiber 30a has its traveling direction changed by the reflection film of the inclined end face 32a, and is emitted vertically downward from the side surface. The light emitted vertically downward from the side surface of the optical fiber 30a passes through the upper cladding layer 18 and enters the core member 14. The light entering the core member 14 has its traveling direction changed by the reflection film 16 a and travels horizontally in the core member 14. Then, after bifurcating at the branch point, the traveling direction is changed vertically upward by the reflecting films 16b and 16c. After that, the light exits the core member 14, passes through the upper cladding layer 18, and is incident on the side surfaces of the optical fibers 30b and 30c that are placed vertically above the inclined end surfaces 17b and 17c. The light entering the optical fibers 30b, c from the side surface is changed in traveling direction by the reflection film of the inclined end faces 32b, c and propagates in the optical fibers 30b, c.
In this way, the light propagating in the optical fiber 30a is branched into two through the optical waveguide, and then the optical fibers 30b and c.
Propagate inside.

The method of manufacturing the present optical waveguide component includes a step of manufacturing the optical fiber 30, a step of manufacturing the optical waveguide, and a step of connecting the optical fiber 30 to the manufactured optical waveguide. The process of manufacturing the optical fiber 30 includes the end face 32.
A step of cutting an end portion of the optical fiber 30 so that the light beam is inclined at 45 degrees with respect to the optical axis, and an inclined end face 32 formed by cutting.
And a step of depositing a metal, for example, Al to form a reflective film.

The method of manufacturing the optical waveguide is the same as the method of manufacturing the optical waveguide according to the first or second embodiment, except that the optical waveguide groove 15 is replaced by the step of press forming on the lower clad layer substrate 10a. And the optical fiber positioning guide 37 are simultaneously press-formed on the lower clad layer substrate 10a. Except for this point, the manufacturing method of the present optical waveguide is the same as that of the first or second embodiment.

As described above, the optical waveguide used in this embodiment is the optical waveguide according to the first or second embodiment provided with the optical fiber positioning guide 37. The same effect as that of the optical waveguide according to the embodiment is obtained. In addition, the optical fiber 30 can be connected accurately and easily. By using such an optical waveguide, a component having excellent mass productivity can be realized.

(Fourth Embodiment) FIG. 8 shows a fourth embodiment of the present invention.
FIG. 9 is a perspective view of the optical waveguide component according to the embodiment, and FIG. 9 is a sectional view taken along the optical axis thereof. In FIG. 8, the present optical waveguide component includes an optical waveguide, an optical fiber 30, and a light emitting element 50.
And a light receiving element 51. The optical fiber 30 is
It has an end face 32 inclined by 45 degrees with respect to the optical axis, and a reflective film is formed on the inclined end face 32. Light emitting element 5
0 and the light receiving element 51 are both electrode patterns 52.
It is a surface-mounted element mounted on the surface of the upper clad layer 18 via.

The optical waveguide has the same structure as the optical waveguide according to the first or second embodiment except for the following points.
A plurality of protrusions (optical fiber positioning guides 37) for sandwiching and fixing the side surface of the optical fiber 30 so that the inclined end surface 32 of the optical fiber 30 is located at a position just facing one inclined end surface 17a of the optical waveguide groove 15. It is provided on one end of the upper surface of the lower clad layer 10. On the other end side of the upper surface of the lower clad layer 10, two electrode patterns 52 on which the light emitting element 50 and the light receiving element 51 are surface-mounted are printed. The printing positions of the two electrode patterns 52 are such that the light emitting surface of the light emitting element 50 and the light receiving surface of the light receiving element 51 face exactly the remaining two inclined end surfaces 17b, c of the optical waveguide groove 15.

The operation of the optical waveguide component constructed as above will be described below. In FIG. 9, the light propagating through the optical fiber 30 has its traveling direction changed by the reflection film of the inclined end face 32, and is emitted vertically downward from the side surface. The light emitted vertically downward from the side surface of the optical fiber 30 passes through the upper cladding layer 18 and enters the core member 14. The light entering the core member 14 has its traveling direction changed by the reflection film 16 a and travels horizontally in the core member 14. And this time, the reflective film 16b
The direction of travel can be changed vertically upwards. afterwards,
The light exits the core member 14, passes through the upper clad layer 18, and is incident on the light receiving element 51 mounted vertically above the inclined end surface 17b. In this way, the light from the optical fiber 30 is received by the light receiving element 51. The same light is emitted from the light emitting element 50.
It is also incident on, but there is almost no adverse effect.

On the other hand, the light emitting element 50 emits light vertically downward. This light passes through the upper clad layer 18 and enters the core member 14. The light entering the core member 14 has its traveling direction changed by the reflection film 16c and travels horizontally in the core member 14. Then, this time, the traveling direction is changed vertically upward by the reflection film 16a. After that, the optical fiber 3 exits from the core member 14, passes through the upper clad layer 18, and is placed vertically above the inclined end surface 17a.
It is incident on the side surface of 0. The light entering the optical fiber 30 from the side surface is changed in traveling direction by the reflection film of the inclined end surface 32 and propagates in the optical fiber 30. In this way, the light from the light emitting element 50 is propagated through the optical fiber 3 (note that the light emitting element 50 transmits the optical fiber 30).
The propagation of light to is not shown as it can be easily imagined from FIG. 9).

The method of manufacturing the optical waveguide component of the present invention includes the steps of manufacturing the optical fiber 30, the step of manufacturing the optical waveguide, the step of connecting the optical fiber 30 to the manufactured optical waveguide, and the light reception and emission of the manufactured optical waveguide. And a step of surface-mounting the elements 50 and 51. The process of manufacturing the optical fiber 30 includes a step of cutting the end portion of the optical fiber 30 so that the end surface 32 is inclined at 45 degrees with respect to the optical axis, and a metal, for example, Al is attached to the cut end surface 32. And a step of forming a reflective film by vapor deposition.

The method of manufacturing the optical waveguide is the same as the method of manufacturing the optical waveguide according to the first or second embodiment, except that the step of forming the optical waveguide groove 15 on the lower clad layer substrate 10a by pressing is performed. And a step of simultaneously forming the optical fiber positioning guide 37 on the lower clad layer substrate 10a by pressing, and a step of collectively printing the two electrode patterns 52 on the upper surface of the upper clad layer 18. Except for these points, the method of manufacturing the present optical waveguide is the same as that of the first or second embodiment.

As described above, the optical waveguide used in this embodiment is the same as the optical waveguide according to the first or second embodiment, except that the optical fiber positioning guide 37 and the light emitting / receiving element 5 are used.
Two electrode patterns 52 for surface mounting 0, 51
Are provided, and the same effect as that of the optical waveguide according to the first or second embodiment is obtained. In addition, the optical fiber 30 and the light emitting / receiving elements 50 and 51 can be accurately and easily connected. Further, since the two electrode patterns 52 are close to each other, the two electrode patterns 52 can be printed at once. By using such an optical waveguide component, an optical waveguide component excellent in mass productivity can be realized.

(Fifth Embodiment) FIG. 10 is a perspective view of an optical waveguide component according to a fifth embodiment of the present invention, and FIG.
It is sectional drawing along the optical axis. In FIG. 10, the present optical waveguide component includes an optical waveguide, an optical fiber 30, a light emitting element 50, a light receiving element 51, and a wavelength filter 53. The optical fiber 30 has an end face 32 that is inclined by 45 degrees with respect to the optical axis, and a reflective film is formed on the inclined end face 32. The light emitting element 50 and the light receiving element 51 are
Both are surface mount type devices.

The light emitting element 50 emits light of wavelength λ2.
Light of wavelength λ1 is emitted from the optical fiber 30, and the light receiving element 51 receives it. The wavelength filter 53 has the characteristics of passing light of wavelength λ2 from the light emitting element 50 and reflecting light of wavelength λ1 from the optical fiber 30.

The optical waveguide has the same structure as the optical waveguide according to the first or second embodiment except for the following points. At one end of the upper surface of the lower cladding layer 10, the optical fiber 30
A plurality of protrusions 37 (optical fiber positioning guides 37) for sandwiching and fixing the side surface of the optical fiber 30 are provided so that the inclined end surface 32 of the optical waveguide groove 15 is located at a position just facing the inclined end surface 17b (see FIG. 2). Has been.

An electrode pattern 52 on which the light receiving element 51 is surface-mounted is printed at the end of the upper surface of the upper clad layer 18 on the same side as the optical fiber positioning guide 37. The printing position of the electrode pattern 52 is such that the light receiving surface of the light receiving element 51 exactly faces the inclined end surface 17c of the optical waveguide groove 15. On the other hand, an electrode pattern 52 on which the light emitting element 50 is surface-mounted is printed on the end of the upper surface of the lower clad layer 10 that is different from the optical fiber positioning guide 37. The printing position of this electrode pattern 52 is
The light emitting surface of the light emitting element 50 is the inclined end surface 17 of the optical waveguide groove 15.
It is a position just facing a.

The operation of the optical waveguide component constructed as described above will be described below. In FIG. 11, the light emitting element 50 emits light of wavelength λ2 vertically downward.
This light passes through the upper cladding layer 18 and passes through the core member 14
Get inside. The traveling direction of the light of wavelength λ2 that has entered the core member 14 is changed by the reflective film 16a, and travels horizontally in the core member 14. Then, the wavelength filter 53
After passing through, the traveling direction is changed vertically upward by the reflection film 16b. Then, it exits the core member 14, passes through the upper cladding layer 18, and is incident on the side surface of the optical fiber 30 placed vertically above the inclined end surface 17b. The light of wavelength λ2 that has entered the optical fiber 30 from the side surface is
The traveling direction is changed by the reflection film of the inclined end face 32, and the light propagates through the optical fiber 30. Thus, the light emitting element 5
Light of wavelength λ2 from 0 propagates through the optical fiber 30.

On the other hand, the light having the wavelength λ1 propagating through the optical fiber 30 has its traveling direction changed by the reflection film of the inclined end face 32 and is emitted vertically downward from the side surface. The light emitted vertically downward from the side surface of the optical fiber 30 passes through the upper cladding layer 18 and enters the core member 14. The light of wavelength λ1 that has entered the core member 14 is
The traveling direction is changed by the reflecting film 16b, and the core member 14
Proceed horizontally inside. Then, after being reflected by the wavelength filter 53, the traveling direction is changed vertically upward by the reflection film 16c. After that, the light exits the core member 14, passes through the upper cladding layer 18, and is incident on the light receiving element 51 mounted vertically above the inclined end surface 17c. In this way, the light of wavelength λ1 from the optical fiber 30 is received by the light receiving element 51 (the propagation of light of this wavelength λ1 is shown in FIG.
It's not shown, as you can easily imagine it).

The method of manufacturing the optical waveguide component according to the present invention includes a step of manufacturing the optical fiber 30, a step of manufacturing the optical waveguide, a step of connecting the optical fiber 30 to the manufactured optical waveguide, and a light receiving and emitting light to the manufactured optical waveguide. And a step of surface-mounting the elements 50 and 51. The process of manufacturing the optical fiber 30 includes a step of cutting the end portion of the optical fiber 30 so that the end surface 32 is inclined at 45 degrees with respect to the optical axis, and a metal, for example, Al is attached to the cut end surface 32. And a step of forming a reflective film by vapor deposition.

The method of manufacturing the optical waveguide is the same as the method of manufacturing the optical waveguide according to the first or second embodiment, in which two electrode patterns 52 are sequentially printed on the upper surface of the upper cladding layer 18, and the optical waveguide groove 15 is formed. After attaching the upper clad layer 18 to the upper surface of the lower clad layer 10 filled with the core member 14, the slit 54 is formed so as to pass through the branch point of the groove, and the wavelength filter 5 is formed in the slit 54.
3 is further included. Slit 54
In the step of inserting the wavelength filter 53 into the, the adhesive 55 is filled in the gap between the optical waveguide and the wavelength filter 53. Except for these points, the method of manufacturing the present optical waveguide is the same as that of the first or second embodiment.

As described above, the optical waveguide used in this embodiment is the same as the optical waveguide according to the first or second embodiment, except that the optical fiber positioning guide 37 and the light emitting / receiving element 5 are used.
Two electrode patterns 52 for surface mounting 0, 51
And the wavelength filter 53 are provided, and the same effect as that of the optical waveguide according to the first or second embodiment is obtained. In addition, the optical fiber 30 and the light emitting / receiving elements 50 and 51 can be connected accurately and easily. Further, since the two electrode patterns 52 are separated from each other, the light emitting / receiving element 5
Electrical crosstalk between 0 and 51 is reduced. By using such an optical waveguide, an optical waveguide component excellent in mass productivity can be realized.

In the present embodiment, the lower cladding layer 1
Although the slit 54 was cut off after the upper clad layer 18 was attached to the upper surface of 0, instead, the optical waveguide groove 15, the optical fiber positioning guide 37 and the slit 54 were simultaneously press formed on the lower clad layer substrate 10a. You may.

(Sixth Embodiment) FIG. 12 is a perspective view of an optical waveguide component according to a sixth embodiment of the present invention, and FIG.
It is sectional drawing along the optical axis. In FIG. 12, the present optical waveguide component includes an optical waveguide and six optical fibers 30a to 30f connected to the optical waveguide (when it is not necessary to distinguish each optical fiber, Reference number 3
Omitting a to f attached to 0). The optical fiber 30 has an end face perpendicular to the optical axis.

The optical waveguide has the same structure as the optical waveguide according to the first or second embodiment except for the following points. That is, the thickness of the upper clad layer 18 is larger, and the holes (hereinafter referred to as “optical fiber insertion holes”) 31 into which the optical fibers 30a to 30f are inserted on the upper surface side of the upper clad layer 18
a to f are provided. The optical fiber insertion hole 31a
The positions .about.f are selected so that the end faces of the optical fibers 30a.about.f are located at positions just facing the inclined end faces 17a.about.f of the optical waveguide groove 15.

Further, as shown in FIG. 12, the optical waveguide groove 15 has a five-branch structure in which one groove (branch point) branches into five, and six end surfaces 17a to 17f are formed. Both have smooth planes. Although the optical waveguide groove 15 has a five-branched structure here, it may have a non-branched structure (two end faces) or a multi-branched structure other than the five-branched structure.

The operation of the optical waveguide component constructed as described above will be described below. In FIG. 12, the light propagating in the optical fiber 30a is emitted vertically downward from the end face. The light emitted vertically downward from the end face of the optical fiber 30 passes through the upper cladding layer 18 and enters the core member 14 as shown in FIG. The light entering the core member 14 is reflected by the reflection film 16
The traveling direction is changed by a and travels in the core member 14 along the optical axis. Then, after five branches at the branch point, the traveling direction is changed to a direction (vertically upward) perpendicular to the optical axis by the reflecting films 16b to 16f. After that, the core member 1
4 and passes through the upper clad layer 18, and the inclined end face 17b
The light is incident on the end faces of the optical fibers 30b to 30f placed vertically above. The light entering the optical fibers 30b to 30f from the end face propagates in the optical fibers 30b to 30f. In this way, the light propagating in the optical fiber 30a is branched into five through the optical waveguide, and then the optical fiber 30
Propagate in b to f.

The manufacturing method of the present optical waveguide component comprises a step of manufacturing an optical waveguide and a step of connecting the optical fiber 30 to the manufactured optical waveguide. The optical waveguide manufacturing method is
The method for manufacturing an optical waveguide according to the first or second embodiment further includes a step of excavating and forming an optical fiber insertion hole 31 in the upper clad layer substrate 18a. This optical fiber insertion hole forming step may be performed before or after attaching the upper clad layer 18 to the lower clad layer 10. Except for this point, the manufacturing method of the present optical waveguide is the same as that of the first or second embodiment.

As described above, the optical waveguide used in this embodiment is the optical waveguide according to the first or second embodiment provided with the optical fiber insertion hole 31. The same effect as that of the optical waveguide according to the embodiment is obtained.
Then, by using such an optical waveguide, an optical waveguide component excellent in mass productivity capable of accurately and easily connecting with a large number of optical fibers 30 is realized.

In this embodiment, the vertical end face optical fibers are used for both the input side and the output side, but it goes without saying that the inclined end face optical fibers may be used for only one side if necessary.

[0086]

As described above, in the optical waveguide according to the present invention, since light does not pass through the end portion, even if the lower clad layer 10 is press-formed and sagging occurs at the end portion, it is The accuracy is not reduced. Therefore, it is not necessary to cut and polish the end of the optical waveguide after manufacturing. That is,
It can be manufactured by the press method, and high precision can be obtained without cutting and polishing the vicinity of the end face after manufacturing.
An optical waveguide with excellent mass productivity is realized. In addition, an optical waveguide component excellent in mass productivity using such an optical waveguide is realized.

[Brief description of drawings]

FIG. 1 is a sectional view along an optical axis of an optical waveguide according to a first embodiment of the present invention.

FIG. 2 is a perspective view of a lower cladding layer 10 shown in FIG.

FIG. 3 is a diagram showing a manufacturing process of the optical waveguide according to the first embodiment of the present invention.

FIG. 4 is a diagram showing a case where a marking 19 for specifying the position of an inclined end face 17 of an optical waveguide groove 15 is formed in the optical waveguide of FIG.

FIG. 5 is a diagram showing a part (a part different from that of the first embodiment) of the manufacturing process of the optical waveguide according to the second embodiment of the present invention.

FIG. 6 is a perspective view of an optical waveguide component according to a third embodiment of the present invention.

FIG. 7 is a sectional view along an optical axis of an optical waveguide component according to a third embodiment of the present invention.

FIG. 8 is a perspective view of an optical waveguide component according to a fourth embodiment of the present invention.

FIG. 9 is a sectional view taken along the optical axis of an optical waveguide component according to a fourth embodiment of the present invention.

FIG. 10 is a perspective view of an optical waveguide component according to a fifth embodiment of the present invention.

FIG. 11 is a sectional view taken along the optical axis of an optical waveguide component according to a fifth embodiment of the present invention.

FIG. 12 is a perspective view of an optical waveguide component according to a sixth embodiment of the present invention.

FIG. 13 is a sectional view taken along the optical axis of an optical waveguide component according to a sixth embodiment of the present invention.

FIG. 14 is a cross-sectional view (a) taken along the optical axis of a conventional optical waveguide, and the lower clad layer 9 shown in (a).
2 is a perspective view (b) of FIG.

FIG. 15 is a diagram showing a conventional optical waveguide manufacturing process by the flame deposition method.

FIG. 16 is a diagram for explaining a conventional optical waveguide manufacturing method by a press method.

FIG. 17 is a diagram showing a step of cutting the vicinity of the end portion 80 when sagging occurs in the vicinity of the end portion 80 in the press-formed under cladding layer 73 when the optical waveguide is manufactured by the pressing method.

[Explanation of symbols]

10 Lower clad layer 11 Lower mold 12 Upper mold 13 convex 14 Core member 15 Optical waveguide groove 16 Reflective film 17 Inclined end face 18 Upper clad layer 19 markings 20 diffraction grating 21 Diffraction grating type 30 optical fibers 31 Optical fiber insertion hole 37 Optical fiber positioning guide 50 light emitting element 51 Light receiving element 52 electrode pattern 53 wavelength filter 54 slits 55 Adhesive

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2H037 BA02 BA11 BA31 CA00 CA01                       CA10 CA33 CA38 DA03 DA04                       DA06 DA11                 2H047 KA04 KA12 KA15 KB08 KB09                       LA00 LA03 LA09 LA12 LA19                       MA05 MA07 PA24 PA28 QA04                       QA05 TA41

Claims (13)

[Claims] 1. An optical waveguide for guiding light, comprising a lower cladding layer having an optical waveguide groove on an upper surface, a core member filled in the optical waveguide groove, and the optical waveguide groove being filled with the core member. And an upper clad layer attached to the upper surface of the lower clad layer, wherein in the optical waveguide groove, the end face is inclined with respect to the optical axis of the optical waveguide, and the inclined end face and the core member. An optical waveguide characterized in that a reflective film is present between the two. 2. An optical waveguide for guiding light, comprising a lower clad layer having an optical waveguide groove on an upper surface, a core member filled in the optical waveguide groove, and the optical waveguide groove being filled with the core member. And an upper clad layer attached to the upper surface of the lower clad layer, wherein the end face of the optical waveguide groove is inclined with respect to the optical axis of the optical waveguide, and a diffraction grating is formed on the inclined end face. An optical waveguide, which is characterized in that 3. The optical waveguide according to claim 1, wherein a marking for specifying the position of the inclined end face is provided on the upper surface of the lower clad layer. 4. A component using an optical waveguide, comprising an optical waveguide for guiding light and an optical fiber connected to the optical waveguide, wherein the optical waveguide has a lower clad layer having an optical waveguide groove on its upper surface. A core member filled in the optical waveguide groove, and an upper clad layer attached to the upper surface of the lower clad layer in which the optical waveguide groove is filled with the core member. The end face is inclined with respect to the optical axis of the optical waveguide, and a reflection film is present between the inclined end face and the core member, and the optical fiber has an end face inclined with respect to the optical axis. Then
Further, a reflection film is formed on the inclined end face, and the optical fiber positioning guide for fixing the optical fiber so that the inclined end face of the optical fiber comes to a position facing the inclined end face of the optical waveguide groove is the lower portion. An optical waveguide component, which is provided on the upper surface of a clad layer. 5. A component using an optical waveguide, comprising: an optical waveguide for guiding light; and an optical fiber connected to the optical waveguide, wherein the optical waveguide has a lower clad layer having an optical waveguide groove on its upper surface. A core member filled in the optical waveguide groove, and an upper clad layer attached to the upper surface of the lower clad layer in which the optical waveguide groove is filled with the core member. , The end face is inclined with respect to the optical axis of the optical waveguide, and a diffraction grating is formed on the inclined end face, the optical fiber has an end face inclined with respect to the optical axis,
Further, a reflection film is formed on the inclined end face, and the optical fiber positioning guide for fixing the optical fiber so that the inclined end face of the optical fiber comes to a position facing the inclined end face of the optical waveguide groove is the lower portion. An optical waveguide component, which is provided on the upper surface of a clad layer. 6. The optical waveguide is a bifurcated optical waveguide having three inclined end faces, three optical fibers are connected to the optical waveguide, and an upper surface of the lower clad layer comprises: An optical fiber positioning guide for fixing the three optical fibers is provided so that the inclined end faces of the respective optical fibers are located at positions facing the respective inclined end faces of the optical waveguide groove. The optical waveguide component according to 4 or 5. 7. A light-emitting element and a light-receiving element connected to the optical waveguide are further provided, and the optical waveguide is a bifurcated optical waveguide having the three inclined end surfaces, and three inclined end surfaces each have one A plurality of the optical fibers, the light emitting element and the light receiving element are connected to each other, and an inclined end face of the one optical fiber faces the one inclined end face of the optical waveguide groove on the upper surface of the lower cladding layer. An optical fiber positioning guide for fixing one of the optical fibers is provided so that the light emitting surface of the light emitting element and the light receiving surface of the light receiving element remain on the upper surface of the upper cladding layer in the optical waveguide groove. Two
The optical waveguide component according to claim 4 or 5, wherein two electrode patterns on which the light emitting element and the light receiving element are surface-mounted are printed so as to be positioned to face two inclined end faces. 8. The wavelength of light emitted by the light emitting element and the wavelength of light received by the light receiving element are the same, and the optical fiber positioning guide is provided at one end of the upper surface of the lower cladding layer. The optical waveguide component according to claim 7, wherein the two electrode patterns are printed on an end of the upper surface of the upper cladding layer opposite to the optical fiber positioning guide. 9. A wavelength filter, wherein the wavelength of light emitted by the light emitting element and the wavelength of light received by the light receiving element are different from each other, and the wavelength filter reflects one of the two wavelengths and transmits the other. The optical fiber positioning guide is provided on one end of the upper surface of the lower clad layer, and the two electrode patterns are the end of the upper surface of the upper clad layer on the same side as the optical fiber positioning guide. The optical waveguide component according to claim 7, wherein the end portions on the opposite side are dispersedly printed. 10. A component using an optical waveguide, comprising an optical waveguide for guiding light and an optical fiber connected to the optical waveguide, wherein the optical waveguide has a lower clad layer having an optical waveguide groove on an upper surface thereof. A core member filled in the optical waveguide groove, and an upper clad layer attached to the upper surface of the lower clad layer in which the optical waveguide groove is filled with the core member. The end face is inclined with respect to the optical axis of the optical waveguide, and a reflection film is present between the inclined end face and the core member, and the optical fiber has an end face perpendicular to the optical axis. The optical fiber insertion hole for fixing the optical fiber so that the vertical end surface of the optical fiber faces the inclined end surface of the optical waveguide groove is provided on the upper surface of the upper cladding layer. Characterizing , Optical waveguide components. 11. A component using an optical waveguide, comprising: an optical waveguide for guiding light; and an optical fiber connected to the optical waveguide, wherein the optical waveguide has a lower clad layer having an optical waveguide groove on its upper surface. A core member filled in the optical waveguide groove, and an upper clad layer attached to the upper surface of the lower clad layer in which the optical waveguide groove is filled with the core member. , The end face is inclined with respect to the optical axis of the optical waveguide, and a diffraction grating is formed on the inclined end face, the optical fiber has an end face perpendicular to the optical axis, and the vertical direction of the optical fiber. An optical waveguide component, characterized in that an optical fiber insertion hole for fixing the optical fiber is provided on the upper surface of the upper clad layer so that the end surface is located at a position facing the inclined end surface of the optical waveguide groove. . 12. A method of manufacturing an optical waveguide for guiding light, comprising the step of press forming a lower clad layer having an optical waveguide groove whose upper surface is inclined with respect to the optical axis of the optical waveguide. A step of forming a reflective film on the inclined end surface of the optical waveguide groove on the upper surface of the lower clad layer obtained by press forming, and a step of filling a core member in the optical waveguide groove having a reflective film formed on the inclined end surface And a step of attaching an upper clad layer to the upper surface of the lower clad layer in which the optical waveguide groove is filled with the core member. 13. A method of manufacturing an optical waveguide for guiding light, wherein an end face is inclined with respect to an optical axis of the optical waveguide, and a diffraction grating is engraved on the inclined end face. A step of forming a lower clad layer having an upper surface with a core member, a step of filling a core member in the optical waveguide groove on the upper surface of the lower clad layer obtained by press forming, and the optical waveguide groove being filled with the core member. And a step of adhering an upper clad layer on the upper surface of the lower clad layer formed as described above.