TW201733728A - 在雷射加工系統中的像平面之定位 - Google Patents

在雷射加工系統中的像平面之定位 Download PDF

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Publication number
TW201733728A
TW201733728A TW106108939A TW106108939A TW201733728A TW 201733728 A TW201733728 A TW 201733728A TW 106108939 A TW106108939 A TW 106108939A TW 106108939 A TW106108939 A TW 106108939A TW 201733728 A TW201733728 A TW 201733728A
Authority
TW
Taiwan
Prior art keywords
workpiece
laser
intensity distribution
spatial intensity
features
Prior art date
Application number
TW106108939A
Other languages
English (en)
Chinese (zh)
Inventor
劉源
胡宏華
吉姆 布魯克伊塞
李光宇
布蘭登 比利爾
克爾特 伊藤
Original Assignee
伊雷克托科學工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 伊雷克托科學工業股份有限公司 filed Critical 伊雷克托科學工業股份有限公司
Publication of TW201733728A publication Critical patent/TW201733728A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/384—Removing material by boring or cutting by boring of specially shaped holes

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
TW106108939A 2016-03-17 2017-03-17 在雷射加工系統中的像平面之定位 TW201733728A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201662309759P 2016-03-17 2016-03-17

Publications (1)

Publication Number Publication Date
TW201733728A true TW201733728A (zh) 2017-10-01

Family

ID=59851425

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106108939A TW201733728A (zh) 2016-03-17 2017-03-17 在雷射加工系統中的像平面之定位

Country Status (6)

Country Link
US (1) US10864599B2 (enExample)
JP (1) JP2019512397A (enExample)
KR (1) KR20180118143A (enExample)
CN (1) CN108700661A (enExample)
TW (1) TW201733728A (enExample)
WO (1) WO2017161284A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI704023B (zh) * 2017-10-24 2020-09-11 日商住友重機械工業股份有限公司 雷射加工機的控制裝置、雷射加工方法及雷射加工機
TWI843784B (zh) * 2019-01-31 2024-06-01 美商伊雷克托科學工業股份有限公司 雷射加工設備、與設備一起使用的控制器及非暫時性電腦可讀取媒體
TWI867380B (zh) * 2022-12-02 2024-12-21 新代科技股份有限公司 雷射加工機台控制系統及其控制方法

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CN112091421B (zh) * 2015-09-09 2022-12-23 伊雷克托科学工业股份有限公司 镭射处理设备、镭射处理工件的方法及相关配置
US11192389B2 (en) * 2016-12-02 2021-12-07 Alltec Angewandte Laserlicht Technologie Gmbh System and method for laser marking substrates
DE102018119313B4 (de) * 2018-08-08 2023-03-30 Rogers Germany Gmbh Verfahren zum Bearbeiten eines Metall-Keramik-Substrats und Anlage zum Durchführen des Verfahrens
JP7386073B2 (ja) * 2019-12-24 2023-11-24 ビアメカニクス株式会社 レーザ加工装置及びレーザ加工方法
WO2021205030A1 (fr) * 2020-04-10 2021-10-14 Rolex Sa Système de tournage laser, procédé de tournage laser utilisant une tel système, et composant obtenu par un tel procédé
CN113751880A (zh) * 2020-06-05 2021-12-07 Nps株式会社 蚀刻装置
US12097558B2 (en) 2021-04-27 2024-09-24 General Electric Company Systems and methods for laser processing system characterization and calibration
WO2023228548A1 (ja) * 2022-05-24 2023-11-30 ソニーグループ株式会社 ビーム整形装置、および加工装置

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AU4660293A (en) 1992-12-23 1994-07-19 Bausch & Lomb Incorporated Method of shaping laser beam
JP3209641B2 (ja) * 1994-06-02 2001-09-17 三菱電機株式会社 光加工装置及び方法
US5751585A (en) 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
US5847960A (en) 1995-03-20 1998-12-08 Electro Scientific Industries, Inc. Multi-tool positioning system
GB9811557D0 (en) * 1998-05-29 1998-07-29 Exitech Ltd The use of beam shaping for improving the performance of machines used to laser drill microvia holes in printed circuit (wiring) and other packages
US6720519B2 (en) * 2001-11-30 2004-04-13 Matsushita Electric Industrial Co., Ltd. System and method of laser drilling
US6815638B2 (en) * 2002-07-25 2004-11-09 Matsushita Electric Industrial Co., Ltd. Method of determining a minimum pulse width for a short pulse laser system
CN1795071A (zh) * 2002-09-13 2006-06-28 塔米卡有限公司 复杂物体的激光修整
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JP2007229786A (ja) * 2006-03-02 2007-09-13 Sumitomo Heavy Ind Ltd レーザ加工装置及び焦点合わせ制御方法
US7605343B2 (en) 2006-05-24 2009-10-20 Electro Scientific Industries, Inc. Micromachining with short-pulsed, solid-state UV laser
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US8198564B2 (en) * 2008-09-09 2012-06-12 Electro Scientific Industries, Inc. Adaptive optic beamshaping in laser processing systems
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KR102283654B1 (ko) * 2014-11-14 2021-07-29 가부시키가이샤 니콘 조형 장치 및 조형 방법
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI704023B (zh) * 2017-10-24 2020-09-11 日商住友重機械工業股份有限公司 雷射加工機的控制裝置、雷射加工方法及雷射加工機
TWI843784B (zh) * 2019-01-31 2024-06-01 美商伊雷克托科學工業股份有限公司 雷射加工設備、與設備一起使用的控制器及非暫時性電腦可讀取媒體
TWI867380B (zh) * 2022-12-02 2024-12-21 新代科技股份有限公司 雷射加工機台控制系統及其控制方法

Also Published As

Publication number Publication date
JP2019512397A (ja) 2019-05-16
KR20180118143A (ko) 2018-10-30
US10864599B2 (en) 2020-12-15
WO2017161284A1 (en) 2017-09-21
US20190001434A1 (en) 2019-01-03
CN108700661A (zh) 2018-10-23

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