TW201732298A - Probe card inspection device - Google Patents

Probe card inspection device Download PDF

Info

Publication number
TW201732298A
TW201732298A TW105107930A TW105107930A TW201732298A TW 201732298 A TW201732298 A TW 201732298A TW 105107930 A TW105107930 A TW 105107930A TW 105107930 A TW105107930 A TW 105107930A TW 201732298 A TW201732298 A TW 201732298A
Authority
TW
Taiwan
Prior art keywords
probe
connecting portion
detecting device
probe card
elastic
Prior art date
Application number
TW105107930A
Other languages
Chinese (zh)
Other versions
TWI564570B (en
Inventor
廖致傑
孫育民
程志豐
Original Assignee
創意電子股份有限公司
台灣積體電路製造股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 創意電子股份有限公司, 台灣積體電路製造股份有限公司 filed Critical 創意電子股份有限公司
Priority to TW105107930A priority Critical patent/TWI564570B/en
Application granted granted Critical
Publication of TWI564570B publication Critical patent/TWI564570B/en
Publication of TW201732298A publication Critical patent/TW201732298A/en

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A probe card inspection device includes a testing circuit board, a flexible probe pin, an interconnected holder, a first solder portion and a second solder portion. The flexible probe pin is used for testing a DUT. The testing circuit board is provided with a soldering pad. The interconnected holder is electrically connected to the testing circuit board and the flexible probe pin. One end of the interconnected holder is coupled to the flexible probe pin with the first solder portion, and the other end of the interconnected holder is coupled to the soldering pad of the testing circuit board with the second solder portion. The first solder portion has a first desoldering melting point, and the second solder portion has a second desoldering melting point higher than the first desoldering melting point.

Description

探針卡檢測裝置 Probe card detecting device

本發明有關於一種探針卡檢測裝置,尤指一種有助重複植針之探針卡檢測裝置。 The invention relates to a probe card detecting device, in particular to a probe card detecting device capable of assisting repeated needle implantation.

傳統探針卡包含測試電路板與探針組。探針組耦合測試電路板,探針組之探針觸接待測物(Device Under Test,DUT)以便測試電路板與待測物進行測試的存取。 Traditional probe cards contain test boards and probe sets. The probe set couples the test circuit board, and the probe of the probe set touches the Device Under Test (DUT) to test the access of the test board to the test object.

為了從測試電路板上更換探針卡之探針組,以便對這些探針重新植針時,使用者必須解耦(Desoldering)探針與測試電路板,才能讓探針組順利脫離測試電路板。然而,因為解耦探針與測試電路板所帶來之高溫常常不小心導致測試電路板的焊墊或內部電路或者探針組之探針造成損壞,進而無法將這些探針於測試電路板上重新植針。 In order to replace the probe set of the probe card from the test board in order to re-needle the probes, the user must decouple the probe and the test board in order to allow the probe set to smoothly detach from the test board. . However, because the high temperature caused by the decoupling probe and the test board often inadvertently causes damage to the test pad's pads or internal circuits or probes of the probe set, the probes cannot be placed on the test board. Replant the needle.

為此,若能提供一種解決方案的設計,可解決上述需求,讓業者於競爭中脫穎而出,即成為亟待解決之一重要課題。 To this end, if we can provide a solution design that can solve the above requirements and let the industry stand out from the competition, it becomes an important issue to be solved urgently.

有鑑於此,本發明之一目的在於提供一種探針卡檢測裝置,用以解決以上先前技術所提到的困難。 In view of the above, it is an object of the present invention to provide a probe card detecting device for solving the difficulties mentioned in the prior art.

依據本發明之一實施方式,此種探針卡檢測裝置包含一測試電路板、至少一彈性探針、至少一連接針架、至少一第一焊料部與至少一第二焊料部。測試電路板包含至少一導接墊。彈性探針之一端用以測試一待測物。連接針架電性連接彈性探針與測試電路板,特別是,連接針架之一端藉由第一焊料部耦合彈性探針之另端,連接針架之另端藉由第二焊料部耦合測試電路板之導接墊。第一焊料部具有第一熔點。第二焊料部不同第一焊料部,且具有大於第一熔點之第二熔點。 According to an embodiment of the invention, the probe card detecting device comprises a test circuit board, at least one elastic probe, at least one connecting needle holder, at least one first solder portion and at least one second solder portion. The test circuit board includes at least one via pad. One end of the elastic probe is used to test a test object. The connecting pin holder is electrically connected to the elastic probe and the test circuit board. In particular, one end of the connecting pin holder is coupled to the other end of the elastic probe by the first solder portion, and the other end of the connecting pin holder is coupled by the second solder portion. The pad of the board. The first solder portion has a first melting point. The second solder portion is different from the first solder portion and has a second melting point greater than the first melting point.

如此,由於測試電路板與彈性探針並非直接耦合在一起,是透過連接針架彼此間接連接,故,降低了彈性探針傷害測試電路板的導接墊或內部電路的機會。此外,為了將這些探針於測試電路板上重新植針,藉由解耦(Desoldering)工具的溫差控制,即解耦溫度控制在低於第二熔點的溫度,本實施方式便能夠只讓彈性探針順利脫離測試電路板,不致讓連接針架脫離測試電路板,進而降低測試電路板因過高的高溫造成內部損壞。 Thus, since the test circuit board and the elastic probe are not directly coupled together, they are indirectly connected to each other through the connection needle holder, thereby reducing the chance that the elastic probe damages the conduction pad or the internal circuit of the test circuit board. In addition, in order to re-implant these probes on the test circuit board, the temperature difference control of the desoldering tool, that is, the decoupling temperature is controlled at a temperature lower than the second melting point, the present embodiment can only make the elasticity The probe is smoothly separated from the test board, so that the connection pin holder is not separated from the test circuit board, thereby reducing the internal damage caused by the excessive high temperature of the test circuit board.

在本發明一或複數個實施方式中,探針卡檢測裝置更包含一探針組。探針組包含一探針基板與上述彈性探針。探針基板可分離地連接測試電路板,彈性探針固定於探針基板上。 In one or more embodiments of the present invention, the probe card detecting device further includes a probe set. The probe set includes a probe substrate and the above elastic probe. The probe substrate is detachably connected to the test circuit board, and the elastic probe is fixed on the probe substrate.

在本發明一或複數個實施方式中,彈性探針之那 一端伸出探針基板相對測試電路板之一面,用以直接觸接待測物。 In one or more embodiments of the invention, the elastic probe One end protrudes from the probe substrate opposite to one side of the test circuit board for directly contacting the receiving object.

在本發明一或複數個實施方式中,探針組更包含至少一頂針。頂針插設於探針基板相對測試電路板之一面,且電性連接彈性探針之那一端,用以直接觸接待測物。 In one or more embodiments of the invention, the probe set further comprises at least one thimble. The thimble is inserted on one side of the probe substrate opposite to the test circuit board, and electrically connected to the end of the elastic probe for directly contacting the receiving object.

在本發明一或複數個實施方式中,導接墊具有一插孔。連接針架包含一架體、一第一連接部與一第二連接部。第一連接部位於架體之一端,用以固持彈性探針之另端,第二連接部位於架體之另端,用以插入插孔內。 In one or more embodiments of the invention, the pad has a receptacle. The connecting needle holder comprises a frame body, a first connecting portion and a second connecting portion. The first connecting portion is located at one end of the frame body for holding the other end of the elastic probe, and the second connecting portion is located at the other end of the frame body for inserting into the jack.

在本發明一或複數個實施方式中,連接針架更包含一限位部。限位部位於架體上且介於第一連接部與第二連接部之間,用以將連接針架定位於導接墊上。 In one or more embodiments of the present invention, the connecting needle holder further includes a limiting portion. The limiting portion is located on the frame body and between the first connecting portion and the second connecting portion for positioning the connecting needle frame on the guiding pad.

在本發明一或複數個實施方式中,連接針架之那一端具有一U字形連接部、一環狀連接部、一筒形連接部或一迴紋針形連接部。 In one or more embodiments of the present invention, the end to which the needle holder is attached has a U-shaped connecting portion, an annular connecting portion, a cylindrical connecting portion or a embossed needle-shaped connecting portion.

在本發明一或複數個實施方式中,連接針架具有多個凸肋,凸肋分別橫向伸出且抵靠導接墊,用以將連接針架懸掛於插孔上。 In one or more embodiments of the present invention, the connecting needle holder has a plurality of ribs that extend laterally and abut against the guiding pads for suspending the connecting needle holder from the socket.

在本發明一或複數個實施方式中,連接針架之另端具有一倒勾部或一彈性緊配部,用以固定於該導接墊之一插孔內。 In one or more embodiments of the present invention, the other end of the connecting needle holder has a barb portion or an elastic fitting portion for fixing in one of the sockets of the guiding pad.

在本發明一或複數個實施方式中,第一焊料部之第一熔點為攝氏130度~攝氏200度。 In one or more embodiments of the present invention, the first melting point of the first solder portion is 130 degrees Celsius to 200 degrees Celsius.

依據本發明之另一實施方式,此種探針卡檢測裝 置包含一測試電路板與多個連接針架。測試電路板包含多個導接墊。這些導接墊彼此間隔配置,每一導接墊中具有一插孔。每一連接針架之一端藉由一焊料部耦合至其中一導接墊,且插入導接墊之插孔內,其另端用以耦合至一彈性探針上。焊料部之熔點為攝氏220度~攝氏280度。 According to another embodiment of the present invention, the probe card detection device The device includes a test circuit board and a plurality of connection pin holders. The test board contains a plurality of lead pads. The conductive pads are spaced apart from each other, and each of the conductive pads has a receptacle therein. One end of each connecting pin holder is coupled to one of the guiding pads by a solder portion and inserted into the socket of the guiding pad, and the other end is coupled to an elastic probe. The melting point of the solder portion is 220 degrees Celsius to 280 degrees Celsius.

在本發明一或複數個實施方式中,連接針架包含一架體、一第一連接部與一第二連接部。第一連接部位於架體之一端,用以固持彈性探針,第二連接部位於架體之另端,用以伸入插孔內。 In one or more embodiments of the present invention, the connecting needle holder includes a frame body, a first connecting portion and a second connecting portion. The first connecting portion is located at one end of the frame body for holding the elastic probe, and the second connecting portion is located at the other end of the frame body for extending into the socket.

在本發明一或複數個實施方式中,連接針架更包含一限位部。限位部位於架體介於第一連接部與第二連接部之間,用以將連接針架定位於導接墊上。 In one or more embodiments of the present invention, the connecting needle holder further includes a limiting portion. The limiting portion is located between the first connecting portion and the second connecting portion for positioning the connecting needle frame on the guiding pad.

在本發明一或複數個實施方式中,連接針架之另端具有一U字形連接部、一環狀連接部、一筒形連接部或一迴紋針形連接部。 In one or more embodiments of the present invention, the other end of the connecting needle holder has a U-shaped connecting portion, an annular connecting portion, a cylindrical connecting portion or a embossed needle-shaped connecting portion.

在本發明一或複數個實施方式中,連接針架具有多個凸肋,凸肋分別橫向伸出且抵靠導接墊,用以將連接針架懸掛於插孔上。 In one or more embodiments of the present invention, the connecting needle holder has a plurality of ribs that extend laterally and abut against the guiding pads for suspending the connecting needle holder from the socket.

在本發明一或複數個實施方式中,連接針架之那一端具有一倒勾部或一彈性緊配部,用以固定於插孔內。 In one or more embodiments of the present invention, the end of the connecting needle holder has a barb portion or an elastic fitting portion for fixing in the socket.

以上所述僅係用以闡述本發明所欲解決的問題、解決問題的技術手段、及其產生的功效等等,本發明之具體細節將在下文的實施方式及相關圖式中詳細介紹。 The above description is only for explaining the problems to be solved by the present invention, the technical means for solving the problems, the effects thereof, and the like, and the specific details of the present invention will be described in detail in the following embodiments and related drawings.

10、11‧‧‧探針卡檢測裝置 10, 11‧‧ ‧ probe card detection device

100、101‧‧‧探針組 100, 101‧‧ ‧ probe set

110‧‧‧探針基板 110‧‧‧Probe substrate

120‧‧‧彈性探針 120‧‧‧elastic probe

121、122‧‧‧末端 End of 121, 122‧‧

130‧‧‧頂針 130‧‧‧ thimble

200、200A~200F‧‧‧連接針架 200, 200A~200F‧‧‧ connecting needle holder

201‧‧‧第一端 201‧‧‧ first end

202‧‧‧第二端 202‧‧‧ second end

210‧‧‧架體 210‧‧‧ ‧ body

210L‧‧‧長軸方向 210L‧‧‧Long-axis direction

220‧‧‧第一連接部 220‧‧‧First connection

221‧‧‧U字形連接部 221‧‧‧U-shaped joint

222‧‧‧U字形凹槽 222‧‧‧U-shaped groove

223‧‧‧環狀連接部 223‧‧‧Annual connection

224‧‧‧封閉開口 224‧‧‧Closed opening

224L‧‧‧開口軸向 224L‧‧‧ opening axial

225‧‧‧筒形連接部 225‧‧‧tubular connection

226‧‧‧筒槽 226‧‧‧cylinder

226L‧‧‧長軸方向 226L‧‧‧Long-axis direction

227‧‧‧迴紋針形連接部 227‧‧‧ Reed needle joint

230‧‧‧第二連接部 230‧‧‧Second connection

231‧‧‧倒勾部 231‧‧‧Backrest

232‧‧‧傾斜肋 232‧‧‧ ribbed ribs

233‧‧‧銳角夾角 233‧‧‧ acute angle

234‧‧‧彈性緊配部 234‧‧‧Elastic Elastic Department

240‧‧‧限位部 240‧‧‧Limited

241‧‧‧第一凸肋 241‧‧‧First rib

242‧‧‧第二凸肋 242‧‧‧second rib

243‧‧‧夾角 243‧‧‧ angle

300‧‧‧測試電路板 300‧‧‧Test circuit board

310‧‧‧導接墊 310‧‧‧ Guide pad

311‧‧‧插孔 311‧‧‧ jack

400‧‧‧第一焊料部 400‧‧‧First Solder

500‧‧‧第二焊料部 500‧‧‧Second solder department

D‧‧‧待測物 D‧‧‧Test object

為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之說明如下:第1圖繪示探針卡檢測裝置的使用方塊圖;第2圖繪示依照本發明一實施方式之探針卡檢測裝置的側視圖;第3圖繪示依照本發明另一實施方式之探針卡檢測裝置的側視圖;第4A圖~第4D圖繪示依照本發明多個實施方式之連接支架的示意圖;以及第5A圖~第5B圖繪示依照本發明多個實施方式之連接支架的示意圖。 The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; A side view of a probe card detecting device according to an embodiment of the present invention; FIG. 3 is a side view of a probe card detecting device according to another embodiment of the present invention; FIGS. 4A to 4D are diagrams according to the present invention. A schematic view of a connection bracket of various embodiments; and FIGS. 5A-5B illustrate schematic views of a connection bracket in accordance with various embodiments of the present invention.

以下將以圖式揭露本發明之複數個實施方式,為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,應瞭解到,這些實務上的細節不應用以限制本發明。也就是說,在本發明部分實施方式中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。 The embodiments of the present invention are disclosed in the following drawings, and the details of However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.

第1圖繪示探針卡檢測裝置10的使用方塊圖。第2圖繪示依照本發明一實施方式之探針卡檢測裝置10的側視圖。如第1圖與第2圖所示,在本實施方式中,探針卡檢測裝置10包含一探針組100、一測試電路板300、多個連接針架200、 第一焊料部400(如焊球或焊條)與第二焊料部500(如焊球或焊條)。測試電路板300包含多個導接墊310。這些導接墊310彼此間隔配置於測試電路板300之一面,且每一導接墊310開設有一插孔311。探針組100包含一探針基板110與多個彈性探針120。探針基板110可分離地連接測試電路板300。探針基板110例如透過機構(圖中未示)直接或間接耦合(如焊接)測試電路板300。這些彈性探針120固定地集中於探針基板110上,用以測試一待測物D(第1圖)(Device Under Test,DUT)。 FIG. 1 is a block diagram showing the use of the probe card detecting device 10. 2 is a side view of the probe card detecting device 10 according to an embodiment of the present invention. As shown in FIG. 1 and FIG. 2 , in the present embodiment, the probe card detecting device 10 includes a probe set 100 , a test circuit board 300 , a plurality of connection pin holders 200 , The first solder portion 400 (such as a solder ball or an electrode) and the second solder portion 500 (such as a solder ball or an electrode). Test circuit board 300 includes a plurality of via pads 310. The conductive pads 310 are disposed on one side of the test circuit board 300 , and each of the conductive pads 310 defines a socket 311 . The probe set 100 includes a probe substrate 110 and a plurality of elastic probes 120. The probe substrate 110 is detachably connected to the test circuit board 300. The probe substrate 110 is directly or indirectly coupled (e.g., soldered) to the test circuit board 300, for example, through a mechanism (not shown). These elastic probes 120 are fixedly concentrated on the probe substrate 110 for testing a D under test (Dut. 1).

在本實施方式中,彈性探針120相對測試電路板300之末端121分別伸出探針基板110相對測試電路板300之一面,以直接觸接上述待測物D(第1圖)之連接墊或連接端子(圖中未示),然而,本發明不限於此。這些連接針架200介於探針組100與測試電路板300之間,且電性連接彈性探針120與測試電路板300,以便測試電路板300得以透過連接針架200及彈性探針120而對待測物D(第1圖)進行測試的存取。 In the present embodiment, the elastic probe 120 extends from the end 121 of the test circuit board 300 to one side of the probe substrate 110 opposite to the test circuit board 300 to directly contact the connection pad of the object D (FIG. 1). Or a connection terminal (not shown), however, the invention is not limited thereto. The connection pin holder 200 is interposed between the probe set 100 and the test circuit board 300, and electrically connects the elastic probe 120 and the test circuit board 300 so that the test circuit board 300 can pass through the connection pin holder 200 and the elastic probe 120. Access to the test object D (Fig. 1) for testing.

具體來說,連接針架200包含相對之第一端201與第二端202。連接針架200之第一端201藉由第一焊料部400耦合(如焊接)彈性探針120之一端,連接針架200之第二端202藉由第二焊料部500耦合(如焊接)測試電路板300上之其中一導接墊310。 Specifically, the connecting needle holder 200 includes a first end 201 and a second end 202 opposite to each other. The first end 201 of the connection pin holder 200 is coupled (eg, soldered) to one end of the elastic probe 120 by the first solder portion 400, and the second end 202 of the connection pin holder 200 is coupled (eg, soldered) by the second solder portion 500. One of the pads 310 on the circuit board 300.

需瞭解到,第一焊料部400具有第一熔點,使得第一焊料部400被加溫至第一熔點的溫度時,第一焊料部400會被熔化,並使連接針架200脫離彈性探針120。舉例來說,第一焊料部400之第一熔點為攝氏130度~攝氏200度,更具體 地,第一焊料部400之第一熔點為攝氏140度。第二焊料部500不同第一焊料部400,且具有大於第一熔點之第二熔點,使得第二焊料部500被加溫至第二熔點的溫度時,第二焊料部500才會被熔化,並使連接針架200脫離測試電路板300之導接墊310。舉例來說,第二焊料部500之熔點為攝氏220度~攝氏280度,更具體地,第二焊料部500之第二熔點為攝氏240度。然而,只要第一焊料部與第二焊料部的熔點不同,本發明不限於是否具有不同之材料、配方或添加物。 It is to be understood that the first solder portion 400 has a first melting point such that when the first solder portion 400 is heated to a temperature of the first melting point, the first solder portion 400 is melted and the connecting needle holder 200 is detached from the elastic probe. 120. For example, the first melting point of the first solder portion 400 is 130 degrees Celsius to 200 degrees Celsius, more specific The first melting point of the first solder portion 400 is 140 degrees Celsius. The second solder portion 500 is different from the first solder portion 400 and has a second melting point greater than the first melting point, so that the second solder portion 500 is melted when the second solder portion 500 is heated to a temperature of the second melting point. The connecting needle holder 200 is disengaged from the guiding pad 310 of the test circuit board 300. For example, the second solder portion 500 has a melting point of 220 degrees Celsius to 280 degrees Celsius, and more specifically, the second melting point of the second solder portion 500 is 240 degrees Celsius. However, as long as the melting points of the first solder portion and the second solder portion are different, the present invention is not limited to whether or not there are different materials, formulations or additives.

如此,為了將彈性探針120重新植針而必須更換或拆卸探針組100時,使用者只要藉由解耦(Desoldering)工具控制溫度至第一焊料部400之第一熔點,但不超過第二焊料部500之第二熔點,使用者便可只解除彈性探針120與連接針架200之結合,但不會解除連接針架200與測試電路板300之結合,以致彈性探針120順利脫離測試電路板300,而不致對測試電路板300造成內部損壞。此外,由於測試電路板300與彈性探針120透過連接針架200彼此間接連接,並非是直接耦合(如焊接)在一起,因此,也降低了彈性探針直接傷害測試電路板300的導接墊310或內部電路的機會。 As such, in order to re-needle the elastic probe 120 to replace or disassemble the probe set 100, the user only needs to control the temperature to the first melting point of the first solder portion 400 by a desoldering tool, but does not exceed the first The second melting point of the solder portion 500 allows the user to release only the combination of the elastic probe 120 and the connecting needle holder 200, but does not release the connection between the connecting needle holder 200 and the test circuit board 300, so that the elastic probe 120 is smoothly separated. The circuit board 300 is tested without causing internal damage to the test circuit board 300. In addition, since the test circuit board 300 and the elastic probe 120 are indirectly connected to each other through the connection needle holder 200, they are not directly coupled (eg, soldered) together, and therefore, the conductive probe directly damages the conductive pad of the test circuit board 300. 310 or an opportunity for internal circuitry.

更具體地,如第2圖所示,每個連接針架200包含一架體210、一第一連接部220與一第二連接部230。第一連接部220位於架體210之一端,固持彈性探針120之末端122,以便彈性探針120之末端122透過第一焊料部400耦合於第一連接部220上。第二連接部230位於架體210之另端,插入導接墊310之插孔311內,以便連接針架200透過第二焊料部500耦合 於導接墊310上。在本實施方式中,連接針架200更包含一限位部240。限位部240位於架體210上介於第一連接部220與第二連接部230之間,用以將連接針架200定位於導接墊310上。在本實施方式中,舉例來說,限位部240包含二個第一凸肋241。這些第一凸肋241處於同平面,且分別相對橫向伸出。 More specifically, as shown in FIG. 2, each of the connecting needle holders 200 includes a frame body 210, a first connecting portion 220 and a second connecting portion 230. The first connecting portion 220 is located at one end of the frame body 210 and holds the end 122 of the elastic probe 120 such that the end 122 of the elastic probe 120 is coupled to the first connecting portion 220 through the first solder portion 400. The second connecting portion 230 is located at the other end of the frame body 210 and inserted into the insertion hole 311 of the guiding pad 310 so that the connecting pin holder 200 is coupled through the second solder portion 500. On the pad 310. In the embodiment, the connecting needle holder 200 further includes a limiting portion 240. The limiting portion 240 is located between the first connecting portion 220 and the second connecting portion 230 on the frame 210 for positioning the connecting needle holder 200 on the guiding pad 310. In the present embodiment, for example, the limiting portion 240 includes two first ribs 241. These first ribs 241 are in the same plane and respectively extend laterally.

當連接針架200之第二連接部230伸入插孔311內時,這些第一凸肋241恰好抵靠於插孔311外圍之導接墊310上,使得連接針架200被懸掛於導接墊310(插孔311)上,不致繼續掉入插孔311內。此外,這些第一凸肋241所提供的較大的附著面積也有助第二焊料部500更穩固地將連接針架固定於導接墊310(插孔311)上。然而,本發明不限於此,其他實施方式中,連接針架並非必須具備這些部件。 When the second connecting portion 230 of the connecting needle holder 200 protrudes into the insertion hole 311, the first protruding ribs 241 just abut against the guiding pad 310 on the periphery of the insertion hole 311, so that the connecting needle holder 200 is suspended from the guiding connection. On the pad 310 (the jack 311), it does not continue to fall into the jack 311. In addition, the larger adhesion area provided by the first ribs 241 also helps the second solder portion 500 to more securely fix the connecting needle holder to the conductive pad 310 (the insertion hole 311). However, the present invention is not limited thereto, and in other embodiments, it is not necessary to provide these components for connecting the needle holder.

第3圖繪示依照本發明另一實施方式之探針卡檢測裝置11的側視圖。本實施方式之探針卡檢測裝置11與上述實施方式之電路測試探針10大致相同,其差異為,如第3圖所示,在本實施方式中,探針組101更包含多個頂針130。這些頂針130間隔地插設於探針基板110相對測試電路板300之一面,且電性連接彈性探針120相對測試電路板300之末端121。舉例來說,頂針130為彈簧式頂針(pogo-pin connector)。彈簧式頂針之一端於探針基板110內部電性連接彈性探針120,且彈簧式頂針可伸縮地位於探針基板110上,用以吸收觸壓待測物D(第1圖)所回傳之壓力。如此,透過頂針130與待測物D(第1圖)之電性連接,測試電路板300藉此與待測物D(第1圖)交換測試信號。 FIG. 3 is a side view of the probe card detecting device 11 according to another embodiment of the present invention. The probe card detecting device 11 of the present embodiment is substantially the same as the circuit test probe 10 of the above-described embodiment, and the difference is that, as shown in FIG. 3, in the present embodiment, the probe set 101 further includes a plurality of ejector pins 130. . The thimbles 130 are interposed on one side of the probe substrate 110 opposite to the test circuit board 300 and electrically connected to the end 121 of the test circuit board 300. For example, the thimble 130 is a pogo-pin connector. One end of the spring type thimble is electrically connected to the elastic probe 120 inside the probe substrate 110, and the spring type thimble is telescopically located on the probe substrate 110 for absorbing the back pressure of the touch object D (Fig. 1). The pressure. Thus, the test circuit board 300 exchanges the test signal with the object D (FIG. 1) by electrically connecting the ejector pin 130 to the object D (FIG. 1).

第4A圖~第4D圖繪示依照本發明多個實施方式之連接支架200A~200D的示意圖。本實施方式之連接支架200A~200D與上述實施方式之連接支架200大致相同,其差異為,舉一例來說,如第4A圖與第2圖所示,連接針架200A具有一U字形連接部221,U字形連接部221具有一U字形凹槽222。U字形凹槽222用以接受彈性探針120之末端122(第2圖)。由於U字形連接部221提供較大的附著面積,有助第一焊料部400更穩固地將彈性探針120之末端122固持於U字形連接部221上。 4A to 4D are schematic views showing the connection brackets 200A to 200D according to various embodiments of the present invention. The connection brackets 200A to 200D of the present embodiment are substantially the same as the connection brackets 200 of the above-described embodiment, and the difference is that, as shown in FIG. 4A and FIG. 2, the connection needle holder 200A has a U-shaped connection portion. 221, the U-shaped connecting portion 221 has a U-shaped groove 222. The U-shaped groove 222 is for receiving the end 122 of the elastic probe 120 (Fig. 2). Since the U-shaped connecting portion 221 provides a large adhesion area, the first solder portion 400 is more securely held by the end 122 of the elastic probe 120 on the U-shaped connecting portion 221.

另舉一例來說,如第4B圖與第2圖所示,連接針架200具有一環狀連接部223。環狀連接部223具有一封閉開口224。封閉開口224之開口軸向224L與架體210之長軸方向210L相互正交。封閉開口224用以接受彈性探針120之末端122(第2圖)。由於封閉開口224可降低彈性探針120之末端122輕易脫離環狀連接部223的機會,有助第一焊料部400更穩固地將彈性探針120之末端122固持於環狀連接部223上。 As another example, as shown in FIG. 4B and FIG. 2, the connecting needle holder 200 has an annular connecting portion 223. The annular connecting portion 223 has a closed opening 224. The opening axial direction 224L of the closed opening 224 and the long axis direction 210L of the frame body 210 are orthogonal to each other. The closed opening 224 is adapted to receive the end 122 of the resilient probe 120 (Fig. 2). Since the closing opening 224 reduces the chance of the end 122 of the elastic probe 120 being easily detached from the annular connecting portion 223, the first solder portion 400 is more securely held by the end 122 of the elastic probe 120 on the annular connecting portion 223.

又舉一例來說,如第4C圖與第2圖所示,連接針架200C具有一筒形連接部225。筒形連接部225具有一筒槽226。筒槽226之長軸方向226L與平行架體210之長軸方向210L共軸。筒槽226用以接受彈性探針120之末端122(第2圖)。由於筒槽226底部可避免第一焊料部流出筒形連接部225,有助第一焊料部400更穩固地將彈性探針120之末端122固持於筒形連接部225上。 As another example, as shown in FIGS. 4C and 2, the connecting needle holder 200C has a cylindrical connecting portion 225. The cylindrical connecting portion 225 has a cylindrical groove 226. The long axis direction 226L of the cylindrical groove 226 is coaxial with the long axis direction 210L of the parallel frame body 210. The slot 226 is adapted to receive the end 122 of the resilient probe 120 (Fig. 2). Since the bottom portion of the cylindrical groove 226 can prevent the first solder portion from flowing out of the cylindrical connecting portion 225, the first solder portion 400 is more securely held by the end 122 of the elastic probe 120 on the cylindrical connecting portion 225.

又舉一例來說,如第4D圖與第2圖所示,連接針 架200D具有一迴紋針形連接部227。彈性探針120之末端122(第2圖)受夾合於迴紋針形連接部227上,以便第一焊料部將受固持於迴紋針形連接部227上之彈性探針耦合於迴紋針形連接部227上。 As another example, as shown in FIG. 4D and FIG. 2, the connecting needle The frame 200D has a corrugated needle-shaped connecting portion 227. The end 122 (Fig. 2) of the elastic probe 120 is clamped to the stencil-shaped connecting portion 227 so that the first solder portion couples the elastic probe held by the embossed needle-shaped connecting portion 227 to the striated pattern. On the needle-shaped connecting portion 227.

然而,本發明不限於此,其他實施方式中,第一連接部並非必須為這些種類之第一連接部。 However, the present invention is not limited thereto, and in other embodiments, the first connecting portion does not have to be the first connecting portion of these kinds.

又舉一例來說,如第4A圖所示,限位部240包含三個分別相對橫向伸出之第二凸肋242。這些第二凸肋242處於同平面,任二相鄰之這些第二凸肋242之間相隔有一120度的夾角243。如此,參考第2圖,當連接針架200之第二連接部230伸入插孔311內時,若限位部240包含這些第二凸肋242時,這些第二凸肋242恰好均勻地分布於插孔311外圍之導接墊310上,使得連接針架200被懸掛於導接墊310(插孔311)上,不致繼續掉入插孔311內。如此,第二焊料部500得以將受定位於導接墊310上之連接支架耦合於測試電路板300上。此外,這些第二凸肋242所提供的較大的附著面積也有助第二焊料部500更穩固地將連接針架固定於導接墊310(插孔311)上。然而,本發明不限於此,其他實施方式中,限位部並非必須為這種第二連接部。 As another example, as shown in FIG. 4A, the limiting portion 240 includes three second ribs 242 that extend outwardly from each other. The second ribs 242 are in the same plane, and any two adjacent ribs 242 are separated by an angle 243 of 120 degrees. Thus, referring to FIG. 2, when the second connecting portion 230 of the connecting needle holder 200 protrudes into the insertion hole 311, if the limiting portion 240 includes the second protruding ribs 242, the second protruding ribs 242 are evenly distributed. On the guiding pad 310 on the periphery of the jack 311, the connecting pin holder 200 is suspended from the guiding pad 310 (the jack 311) so as not to fall into the jack 311. As such, the second solder portion 500 can couple the connection bracket positioned on the conductive pad 310 to the test circuit board 300. In addition, the larger adhesion area provided by the second ribs 242 also helps the second solder portion 500 to more securely fix the connecting needle holder to the conductive pad 310 (the insertion hole 311). However, the present invention is not limited thereto, and in other embodiments, the limiting portion does not have to be such a second connecting portion.

第5A圖~第5B圖繪示依照本發明多個實施方式之連接支架200E~200F的示意圖。如第5A圖所示,其他本實施方式之探針卡檢測裝置10與上述實施方式之電路測試探針大致相同,其差異為,如第5A圖所示,連接針架200不具限位部240,只靠第二連接部230將連接針架200定位於導接墊310 上。第二連接部230例如具有一倒勾部231。倒勾部231具有多個傾斜肋232。這些傾斜肋232環繞地連接架體210,且每一傾斜肋232與架體210之間具有一銳角夾角233。如此,當倒勾部231伸入插孔311內時,這些傾斜肋232恰好抵靠插孔311內壁,使得連接針架200不致輕易從插孔311內移出,進而將連接針架200定位於導接墊310上,不致繼續掉入插孔311內。如此,第二焊料部500得以將受定位於導接墊310上之連接支架200耦合於測試電路板300上。 5A-5B are schematic views of the connection brackets 200E-200F according to various embodiments of the present invention. As shown in FIG. 5A, the other probe card detecting device 10 of the present embodiment is substantially the same as the circuit test probe of the above-described embodiment, and the difference is that, as shown in FIG. 5A, the connecting needle holder 200 has no limiting portion 240. Positioning the connecting needle holder 200 to the guiding pad 310 only by the second connecting portion 230 on. The second connecting portion 230 has, for example, a barb portion 231. The undercut portion 231 has a plurality of inclined ribs 232. The inclined ribs 232 are circumferentially connected to the frame body 210, and each of the inclined ribs 232 and the frame body 210 has an acute angle 233. Thus, when the hook portion 231 protrudes into the insertion hole 311, the inclined ribs 232 just abut against the inner wall of the insertion hole 311, so that the connection needle holder 200 is not easily removed from the insertion hole 311, thereby positioning the connection needle holder 200 at The lead pad 310 does not continue to fall into the socket 311. As such, the second solder portion 500 can couple the connection bracket 200 positioned on the conductive pad 310 to the test circuit board 300.

另舉一例來說,如第5B圖所示,第二連接部230具有一彈性緊配部234。彈性緊配部234之體積略大於插孔311。如此,當彈性緊配部234伸入插孔311內時,彈性緊配部234恰好緊配於插孔311內壁,使得連接針架200不致輕易從插孔311內移出,進而將連接針架200定位於導接墊310上,不致繼續掉入插孔311內。如此,第二焊料部500得以將受定位於導接墊310上之連接支架耦合於測試電路板300上。然而,本發明不限於此,其他實施方式中,限位部240並非必須為這些種類之第二連接部230。 As another example, as shown in FIG. 5B, the second connecting portion 230 has an elastic fitting portion 234. The elastic tight portion 234 is slightly larger than the insertion hole 311. Thus, when the elastic fitting portion 234 protrudes into the insertion hole 311, the elastic fitting portion 234 just fits tightly on the inner wall of the insertion hole 311, so that the connection needle holder 200 is not easily removed from the insertion hole 311, thereby connecting the needle holder The 200 is positioned on the conductive pad 310 so as not to fall into the insertion hole 311. As such, the second solder portion 500 can couple the connection bracket positioned on the conductive pad 310 to the test circuit board 300. However, the present invention is not limited thereto. In other embodiments, the limiting portion 240 is not necessarily the second connecting portion 230 of these types.

最後,上述所揭露之各實施例中,並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,皆可被保護於本發明中。因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Finally, the various embodiments disclosed above are not intended to limit the invention, and those skilled in the art can be protected in various modifications and refinements without departing from the spirit and scope of the invention. In the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

10‧‧‧探針卡檢測裝置 10‧‧‧Probe card detection device

100‧‧‧探針組 100‧‧‧ probe set

110‧‧‧探針基板 110‧‧‧Probe substrate

120‧‧‧彈性探針 120‧‧‧elastic probe

121、122‧‧‧末端 End of 121, 122‧‧

200‧‧‧連接針架 200‧‧‧Connecting needle holder

201‧‧‧第一端 201‧‧‧ first end

202‧‧‧第二端 202‧‧‧ second end

210‧‧‧架體 210‧‧‧ ‧ body

220‧‧‧第一連接部 220‧‧‧First connection

230‧‧‧第二連接部 230‧‧‧Second connection

240‧‧‧限位部 240‧‧‧Limited

241‧‧‧第一凸肋 241‧‧‧First rib

300‧‧‧測試電路板 300‧‧‧Test circuit board

310‧‧‧導接墊 310‧‧‧ Guide pad

311‧‧‧插孔 311‧‧‧ jack

400‧‧‧第一焊料部 400‧‧‧First Solder

500‧‧‧第二焊料部 500‧‧‧Second solder department

Claims (16)

一種探針卡檢測裝置,包含:至少一彈性探針,該彈性探針之一端用以測試一待測物;一測試電路板,包含至少一導接墊;至少一第一焊料部,具有第一熔點;至少一第二焊料部,不同於該第一焊料部,且具有大於該第一熔點之第二熔點;以及至少一連接針架,電性連接該彈性探針與該測試電路板,其中該連接針架之一端藉由該第一焊料部耦合至該彈性探針之另端,該連接針架之另端藉由該第二焊料部耦合至該導接墊上。 A probe card detecting device comprising: at least one elastic probe, one end of the elastic probe is used for testing a test object; a test circuit board comprising at least one conductive pad; at least one first solder portion having a first a melting point; at least one second solder portion different from the first solder portion and having a second melting point greater than the first melting point; and at least one connecting pin holder electrically connecting the elastic probe to the test circuit board, One end of the connecting pin holder is coupled to the other end of the elastic probe by the first solder portion, and the other end of the connecting pin holder is coupled to the guiding pad by the second solder portion. 如請求項1所述之探針卡檢測裝置,更包含:一探針組,包含一探針基板與該彈性探針,該探針基板可分離地連接該測試電路板,該彈性探針固定於該探針基板上。 The probe card detecting device of claim 1, further comprising: a probe set comprising a probe substrate and the elastic probe, the probe substrate being detachably connected to the test circuit board, the elastic probe fixed On the probe substrate. 如請求項2所述之探針卡檢測裝置,其中該彈性探針之該端伸出該探針基板相對該測試電路板之一面,用以直接觸接該待測物。 The probe card detecting device of claim 2, wherein the end of the elastic probe extends from the probe substrate to a side of the test circuit board for directly contacting the object to be tested. 如請求項2所述之探針卡檢測裝置,其中該探針組更包含至少一頂針,該頂針插設於該探針基板相對該測試電路板之一面,且電性連接該彈性探針之該端,用以直接觸接該待測物。 The probe card detecting device of claim 2, wherein the probe set further comprises at least one thimble, the thimble being inserted on one side of the probe substrate opposite to the test circuit board, and electrically connected to the elastic probe The end is used for directly contacting the object to be tested. 如請求項1所述之探針卡檢測裝置,其中該導接墊具有一插孔;以及該連接針架包含一架體、一第一連接部與一第二連接部,該第一連接部位於該架體之一端,用以固持該彈性探針之該另端,該第二連接部位於該架體之另端,用以插入該插孔內。 The probe card detecting device of claim 1, wherein the guiding pad has a jack; and the connecting pin holder comprises a frame body, a first connecting portion and a second connecting portion, the first connecting portion The other end of the frame is located at one end of the frame for holding the other end of the elastic probe, and the second connecting portion is located at the other end of the frame for inserting into the socket. 如請求項5所述之探針卡檢測裝置,其中該連接針架更包含一限位部,該限位部位於該架體上且介於該第一連接部與該第二連接部之間,用以將該連接針架定位於該導接墊上。 The probe card detecting device of claim 5, wherein the connecting needle holder further comprises a limiting portion, the limiting portion is located on the frame and between the first connecting portion and the second connecting portion The positioning needle holder is positioned on the guiding pad. 如請求項1所述之探針卡檢測裝置,其中該連接針架之該端具有一U字形連接部、一環狀連接部、一筒形連接部或一迴紋針形連接部。 The probe card detecting device according to claim 1, wherein the end of the connecting needle holder has a U-shaped connecting portion, an annular connecting portion, a cylindrical connecting portion or a stylus-shaped connecting portion. 如請求項1所述之探針卡檢測裝置,其中該連接針架具有多個分別橫向伸出之凸肋,該些凸肋用以抵靠於該導接墊上。 The probe card detecting device of claim 1, wherein the connecting pin holder has a plurality of laterally extending ribs for abutting against the guiding pad. 如請求項1所述之探針卡檢測裝置,其中該連接針架之該另端具有一倒勾部或一彈性緊配部,用以固定於該導接墊之一插孔內。 The probe card detecting device of claim 1, wherein the other end of the connecting needle holder has a barb portion or an elastic fitting portion for fixing in one of the sockets of the guiding pad. 如請求項1所述之探針卡檢測裝置,其中該第一焊料部之該第一熔點為攝氏130度~攝氏200度。 The probe card detecting device of claim 1, wherein the first melting point of the first solder portion is 130 degrees Celsius to 200 degrees Celsius. 一種探針卡檢測裝置,包含:一測試電路板,包含多個導接墊,該些導接墊彼此間隔配置,每一該些導接墊中具有一插孔;以及多個連接針架,每一該些連接針架之一端藉由一焊料部耦合至該些導接墊其中之一,且插入該導接墊之該插孔內,其另端用以耦合至一彈性探針上,其中該焊料部之熔點為攝氏220度~攝氏280度。 A probe card detecting device comprising: a test circuit board comprising a plurality of guiding pads, wherein the guiding pads are spaced apart from each other, each of the guiding pads has a jack therein; and a plurality of connecting pin holders, One end of each of the connecting pin holders is coupled to one of the guiding pads by a solder portion, and is inserted into the socket of the guiding pad, and the other end is coupled to an elastic probe. The melting point of the solder portion is 220 degrees Celsius to 280 degrees Celsius. 如請求項11所述之探針卡檢測裝置,其中每一該些連接針架包含一架體、一第一連接部與一第二連接部,該第一連接部位於該架體之一端,用以固持該彈性探針,該第二連接部位於該架體之另端,用以插入該插孔內。 The probe card detecting device of claim 11, wherein each of the connecting pin holders comprises a frame body, a first connecting portion and a second connecting portion, wherein the first connecting portion is located at one end of the frame body. The elastic probe is fixed, and the second connecting portion is located at the other end of the frame for inserting into the jack. 如請求項12所述之探針卡檢測裝置,其中每一該些連接針架更包含一限位部,該限位部位於該架體介於該第一連接部與該第二連接部之間,用以將該連接針架定位於該導接墊上。 The probe card detecting device of claim 12, wherein each of the connecting pin holders further comprises a limiting portion, wherein the limiting portion is located at the first connecting portion and the second connecting portion For positioning the connecting needle holder on the guiding pad. 如請求項11所述之探針卡檢測裝置,其中每一該些連接針架之該另端具有一U字形連接部、一環狀連接部、一筒形連接部或一迴紋針形連接部。 The probe card detecting device of claim 11, wherein the other end of each of the connecting needle holders has a U-shaped connecting portion, an annular connecting portion, a cylindrical connecting portion or a skein-shaped connecting portion. unit. 如請求項11所述之探針卡檢測裝置,其中每一該些連接針架包含多個凸肋,該些凸肋分別橫向伸出且抵靠該導接墊,用以將該連接針架懸掛於該插孔上。 The probe card detecting device of claim 11, wherein each of the connecting pin holders comprises a plurality of ribs extending laterally and against the guiding pad for connecting the connecting needle frame Hanging on this jack. 如請求項11所述之探針卡檢測裝置,其中每一該些連接針架之該端具有一倒勾部或一彈性緊配部,用以固定於該些插孔其中之一內。 The probe card detecting device of claim 11, wherein the end of each of the connecting pin holders has a barb portion or an elastic fitting portion for fixing in one of the sockets.
TW105107930A 2016-03-15 2016-03-15 Probe card inspection device TWI564570B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW105107930A TWI564570B (en) 2016-03-15 2016-03-15 Probe card inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW105107930A TWI564570B (en) 2016-03-15 2016-03-15 Probe card inspection device

Publications (2)

Publication Number Publication Date
TWI564570B TWI564570B (en) 2017-01-01
TW201732298A true TW201732298A (en) 2017-09-16

Family

ID=58407985

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105107930A TWI564570B (en) 2016-03-15 2016-03-15 Probe card inspection device

Country Status (1)

Country Link
TW (1) TWI564570B (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030116346A1 (en) * 2001-12-21 2003-06-26 Forster James Allam Low cost area array probe for circuits having solder-ball contacts are manufactured using a wire bonding machine
CN201047867Y (en) * 2007-06-18 2008-04-16 中华精测科技股份有限公司 IC test carrier non-soldering package assembly
US8832933B2 (en) * 2011-09-15 2014-09-16 Taiwan Semiconductor Manufacturing Co., Ltd. Method of fabricating a semiconductor test probe head
JP5863168B2 (en) * 2011-11-10 2016-02-16 株式会社日本マイクロニクス Probe card and manufacturing method thereof
JP6513639B2 (en) * 2013-05-06 2019-05-15 フォームファクター, インコーポレイテッド Probe card assembly for testing electronic devices

Also Published As

Publication number Publication date
TWI564570B (en) 2017-01-01

Similar Documents

Publication Publication Date Title
KR101020025B1 (en) A inspecting probe for electronic component
KR102001351B1 (en) Interface device, interface unit, probe device and connection method
KR101183473B1 (en) The testing tool of flexible circuit board
JP4660616B2 (en) Board inspection equipment
JP2006302906A (en) Socket for integrated circuit device, and substrate
US20080245566A1 (en) Adaptor and testing device for electrical connector
JP2007017234A (en) Socket for inspection device
JP2020504302A (en) Inspection probe and socket
JP2011038831A (en) Tool for substrate inspection, and method for substrate inspection
TWI564570B (en) Probe card inspection device
US8333623B2 (en) Cable connector retention clips
JPWO2009102030A1 (en) Probe unit
JP2008134170A (en) Electrically connecting device
JP6454467B2 (en) High bandwidth solderless lead and measurement system
KR20160065562A (en) Semiconductor chip test for connector pin
TWI481876B (en) Probe module (3)
KR20140127446A (en) Burn-in socket module
TW201447323A (en) Testing device
KR101707546B1 (en) Interface probe pin
CN107192863A (en) Probe card detection device
US20060267608A1 (en) Adaptive test meter probe system and method of operation
JPH07254468A (en) Ic measuring socket
KR101949841B1 (en) A multi probe-pin for testing electrical connector
TW201728906A (en) Probe fastening and conducting structure of electronic component inspection device easily detach terminal lug and do not hinder connection of lead wire from rotation regulation of the fastening portion
TWM467064U (en) Circuit test quick adapter module