TW201729934A - Laser de-flash method, laser processing method, and laser processing apparatus - Google Patents

Abstract

A laser de-flashing method, and a laser processing method and apparatus using the laser de-flashing method are provided. The laser de-flashing method is removing at least one of a heat-affected zone and metal particles generated around a cutting line of a metal material, and includes the operation of forming an oil pattern on a cut area of the metal material and the operation of radiating a first laser beam to the cut area having the oil pattern thereon to cut the metal material and then radiating a second laser beam to around the cutting line of the metal material to remove at least one of the heat-affected zone and the metal particles.

Description

Laser deburring method, laser processing method and laser processing device

The present invention relates to a laser deburring technique, and more particularly to a heat-affected zone (HAZ: Heat Affected Zone) generated by laser removal to the periphery of a cutting line when a metal material is cut by a laser. And a laser deburring method for metal particles, a laser processing method and apparatus using the same.

As a scheme for removing impurities remaining on the surface of the material, methods such as a method using electrolysis, a method of chemically removing using a chemical, and a method of mechanically removing high-pressure water are used. However, these methods require the use of chemicals which are harmful to the human body, and there is a problem that the product is damaged during the process of removing impurities, and there is a problem that it is difficult to completely remove the impurities.

Recently, in order to solve such a problem, a laser de-flash technique using a laser to remove impurities remaining on a surface of a material has been attracting attention. This kind of laser deburring technology uses laser to remove impurities, so it has the advantages of environmental protection, faster processing speed and less maintenance cost.

In the case of cutting a metal material by laser, a heat affected portion (HAZ) is generated around the cut line due to the optical characteristics of the laser, and the metal particles are vapor-deposited around the cut line by the laser plasma effect. Here, the heat-affected zone (HAZ) is a portion that does not melt due to heat generated when laser cutting is performed, but its properties change. Laser deburring technology can be used to remove heat affected parts and metal particles generated by laser cutting metal materials. However, in the process of laser deburring, the metal material is damaged by the laser beam which is emitted to a narrow space with a strong energy, and there is a possibility of secondary vapor deposition due to the plasma effect.

[Problem to be Solved by the Invention] An embodiment of the present invention provides a method of using a oil pattern to more effectively remove a heat-affected zone (HAZ) and metal particles generated around a cutting line when a metal material is cut by a laser. Laser deburring method, laser processing method and device using the same. [Means for solving the problem]

In one aspect of the invention, there is provided a laser deburring method for removing at least one of a heat affected portion and a metal particle generated around a cutting line of a metal material, the laser deburring method comprising the following steps : a step of forming an oil pattern in the cut region of the metal material; and cutting the metal material after the first laser beam is irradiated onto the cut region in which the oil pattern is formed to cut the metal material The step of irradiating the second laser beam around to remove at least one of the heat affected portion and the metal particles.

The above oil pattern may include, for example, a silicone oil. The first laser beam may be focused to a cutting area of the metal material, and the second laser beam may be defocused in such a manner as to have a uniform incidence to the heat-affected portion.

The first laser beam and the second laser beam may have the same wavelength. For example, the first and second laser beams described above may have wavelengths in the visible range. Specifically, the first laser beam and the second laser beam may include a pulsed laser beam having a wavelength of 532 nm.

The first laser beam may have an energy greater than the second laser beam. For example, the first laser beam and the second laser beam may have an energy of 20 W and 10 W, respectively.

The second laser beam may have a lower frequency than the first laser beam. For example, the frequencies of the first laser beam and the second laser beam may be 60 kHz and 20 kHz, respectively.

In another aspect of the present invention, a laser processing method is provided, comprising the steps of: forming an oil pattern in a cut region of a metal material; and irradiating a first region with the cut region of the metal material on which the oil pattern is formed a step of cutting the metal material by the laser beam; and removing at least one of the heat-affected portion and the metal particles generated by cutting the metal material by irradiating the second laser beam around the cutting line of the metal material .

The oil pattern can be formed by coating a specific oil so as to cover the above-described cutting region. For example, the above oil pattern may include an oxime oil.

The first laser beam may be focused to a cutting area of the metal material, and the second laser beam may be defocused in such a manner as to have a uniform incidence to the heat-affected portion. The first laser beam and the second laser beam may be emitted from the same laser source and may have the same wavelength. The first and second laser beams may include a pulsed laser beam having a wavelength in the visible range. Additionally, the first laser beam may have a higher frequency than the second laser beam and an energy greater than the second laser beam.

In another aspect, a laser processing apparatus is provided, comprising: an oil coating unit that applies a specific oil to form a oil pattern in a cutting region of a metal material; a laser light source that emits a first laser beam for cutting and Deburring a second laser beam; a mirror, changing a path of the first laser beam and the second laser beam; and a focusing lens for focusing the first laser beam and the second laser beam; and The control unit controls the first laser beam and the second laser beam.

The first laser beam may be cut by irradiating the cutting region formed with the oil pattern, and the second laser beam may be removed by illuminating the cutting line of the metal material by cutting the metal At least one of a heat affected portion and a metal particle produced by the material. Here, the first laser beam may be focused to a cutting region of the metal material, and the second laser beam may be defocused in such a manner as to have a uniform incidence to the heat-affected portion. [Effect of the invention]

If a metal material is cut by laser, a heat-affected zone and metal particles are generated around the cutting line. According to an embodiment of the present invention, before the metal material is cut, the metal material is cut by forming an oil pattern in advance in the region where the cutting is performed. Further, when a defocused laser beam is irradiated around the cutting line of such a metal material, the heat-affected portion and the metal particles generated by cutting the metal material can be effectively removed without damaging the metal material. Moreover, by performing a deburring process using a laser, an environmentally friendly cutting process can be realized, the speed of the cutting process can be increased, and the cost can be reduced.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The examples exemplified below are not intended to limit the scope of the invention, but are provided to illustrate the invention to those skilled in the art. In the drawings, the same reference numerals are given to the same components, and the size or thickness of each component can be exaggerated for clarity of description. Further, when it is described that a specific substance layer exists on a substrate or another layer, the substance layer may exist in direct contact with the substrate or other layers, or may exist before the substance layer and the substrate or other layer. Three floors. Further, in the following examples, the substances constituting the respective constituent elements are exemplified, and other materials may be used.

Fig. 1 is a view schematically showing a laser processing apparatus according to an embodiment of the present invention. The laser processing apparatus shown in FIG. 1 can perform a process of forming an oil pattern (300 of FIG. 2a), a process of cutting a metal material W, and a heat influence around a cutting line generated by the metal material W in a cutting region of the metal material W. HAZ: Heat Affected Zone and the process of metal particles. Here, the heat-affected zone (HAZ) is a portion that does not melt due to heat generated when laser cutting is performed, but its properties change.

Here, the metal material W may include, for example, copper or the like, but the above is merely an example, and other various metal substances may be included. This metallic material W can be stacked onto a platform S that is movably arranged.

Referring to Fig. 1, a laser processing apparatus of the present embodiment includes an oil coating unit 150, a laser source 110, a mirror 120, a focusing lens 140, and a control unit. (controller unit) 150.

The oil application unit 150 functions to form an oil pattern (300 of FIG. 2a) in the dicing region of the metal material W before cutting the metal material W. That is, the oil application unit 150 may form the oil pattern 300 by coating a specific oil on a cutting region of the metal material W stacked on the stage S. As described below, such an oil pattern 300 can function to prevent the metal material W from being damaged by the laser beam during the laser deburring process. Here, the oil may include, for example, a silicone oil having a viscosity of approximately 100 cs. However, the above-mentioned fluorenone oil is merely an example, and besides, the oil may include other various substances.

The laser light source 110 emits a laser beam for cutting or a laser beam for deburring. Specifically, the laser light source 110 emits the first laser beam L1, that is, the laser beam for cutting, in the process of cutting the metal material W. In addition, the laser light source 110 can emit the second laser beam L2, that is, deburring, in the process of removing the heat-affected zone and/or the metal particles generated around the cutting line of the metal material W, that is, the laser deburring process. Laser beam.

As the first laser beam L1 and the second laser beam L2, a pulse type laser beam having a relatively short pulse width of the same wavelength can be used. However, it is not necessarily limited to this, and in addition to this, a continuous wave type laser beam can also be used. For example, the first laser beam L1 and the second laser beam L2 emitted from the laser light source 110 may be pulsed laser beams having wavelengths in the visible light range. As a specific example, the first laser beam L1 and the second laser beam L2 may be pulsed laser beams having a wavelength of approximately 532 nm. Here, a laser beam of a wavelength of 532 nm can be generated in the following manner: for example, a laser beam of a wavelength of 808 nm generated by a power station is converted into a wavelength of 532 nm by a laser optical system. On the other hand, the wavelengths of the first laser beam L1 and the second laser beam L2 are merely examples, and the wavelengths of the first laser beam L1 and the second laser beam L2 can be variously modified.

The first laser beam L1 as the laser beam for cutting may have energy larger than the second laser beam L2 as the deburring laser beam. For example, the first laser beam L1 and the second laser beam L2 may have energy of 20 W and 10 W, respectively. However, the above is merely an example, and the energy of the first laser beam L1 and the second laser beam L2 can be variously modified.

The second laser beam L2 for deburring may have a lower frequency than the first laser beam L1 as the laser beam for cutting. The frequency of the first laser beam L1 and the second laser beam L2 can be adjusted by the control unit 115. For example, the first laser beam L1 as a laser beam for cutting may have a frequency of approximately 60 kHz, and the second laser beam L2 as a deburring laser beam may have, for example, a frequency of 20 kHz. However, the above is merely an example, and the frequencies of the first laser beam L1 and the second laser beam L2 can be variously modified.

The traveling path of the laser beams L1, L2 emitted from the laser light source 110 can be changed to a desired position by the mirror surface 120. Further, the laser beam reflected by the mirror surface 120 is irradiated to the position of the metal material W stacked on the stage S to be processed via the focus lens 140. Here, on the optical path between the mirror 120 and the focus lens 140, a beam amplifier 130 (BET: Beam Expanding Telescope) that magnifies the size of the laser beam may be further provided.

In the laser cutting process, the focus lens 140 functions to focus the first laser beam L1 emitted from the laser light source 110 and irradiate it to the cutting region of the metal material W. As described above, after the first laser beam L1 is focused by the focus lens 140 and irradiated to the metal material W, it is moved along the cutting region, thereby performing a process of cutting the metal material W.

On the other hand, in the process of removing the heat-affected zone and/or the metal particles generated around the cutting line of the metal material W, that is, in the laser deburring process, the focus lens 140 functions as a second mine that is emitted from the laser light source 110. The beam L2 is defocused and irradiated to the periphery of the cutting line of the metal material W. Defocusing of such second laser beam L2 can be performed by moving the focus lens 140. That is, defocusing of the second laser beam L2 can be performed by moving the focus lens 140 a fixed distance in a direction opposite to the metal material W. As described above, after the second laser beam L2 is defocused by the focus lens 140 and irradiated around the cutting line of the metal material W, line scanning is performed along the cutting line, thereby performing removal of the cutting line generated from the metal material W. The process of heat affected parts and / or metal particles.

The laser processing apparatus of this embodiment may further include a control unit 115 for controlling the laser beams L1, L2. Such a control unit 115 can control the wavelength, frequency, and the like of the laser beams L1 and L2 to a desired value.

In the laser processing apparatus described above, first, an oil pattern (300 of FIG. 2a) is formed in the dicing region of the metal material W by the oil coating unit 150, and then the first ray is irradiated to the cutting region where the oil pattern 300 is formed. The beam L1, that is, the laser beam for cutting, thereby performing a laser cutting process on the metal material W. Next, the second laser beam L2, that is, the deburring laser beam is defocused and irradiated around the cutting line of the metal material W, whereby the metal material W is cut by the first laser beam L1. Heat affected parts and / or metal particles. Thereby, the heat-affected zone and the metal particles generated by cutting the metal material W can be effectively removed without damaging the metal material W. Moreover, by performing a deburring process using a laser, an environmentally friendly cutting process can be realized, the speed of the cutting process can be increased, and the cost can be reduced.

2a to 2e are views showing a laser processing method for cutting a metal material W by the laser processing apparatus shown in Fig. 1 to remove a heat-affected zone and metal particles generated around a cutting line of the metal material W.

Referring to FIG. 2a, an oil pattern 300 is formed in a cut region of the metal material W. Such an oil pattern 300 can be formed by applying a specific oil to a cutting region of the metal material W stacked on the stage S by the oil coating unit 150 of the laser processing apparatus shown in FIG. As the oil used herein, for example, an oxime oil can be included. In this case, the silicone oil may have a viscosity of approximately 100 cs, but is not limited thereto. On the other hand, in the present embodiment, as the oil for forming the oil pattern 300, other various substances may be used in addition to the fluorenone oil. As described above, after the oil pattern 300 is formed in the cut region of the metal material W, the stage S is moved, whereby the metal material W can be located at the lower portion of the focus lens 140. As described above, if the oil pattern 300 is formed in the cut region of the metal material W, the metal material W can be prevented from being damaged by the deburring laser beam in the laser deburring process to be described later.

Referring to FIG. 2b, a cutting process is performed on the metal material W by irradiating the cutting region where the oil pattern 300 is formed with the first laser beam L1 as a laser beam for cutting. Specifically, the first laser beam L1 as a laser beam for cutting is emitted from the laser light source 110 shown in FIG. Here, the first laser beam L1 may be a pulsed laser beam having a wavelength in the visible light range. As a specific example, the first laser beam L1 may be a pulsed laser beam having a wavelength of approximately 532 nm. Moreover, the energy and frequency of the first laser beam L1 can be 20 W and 60 kHz, respectively. However, the wavelength, energy, and frequency of the first laser beam L1 mentioned above are merely examples, and various modifications can be realized.

The first laser beam L1 as the laser beam for cutting emitted from the laser light source 110 can be irradiated to the cutting region of the metal material W on which the oil pattern 300 is formed via the mirror 120, the beam amplifier 130, and the focus lens 140. Here, the first laser beam L1 is focused by the focus lens 140 to be irradiated to the cutting area, and the first laser beam L1 focused in this manner is moved along the cutting area, whereby the metal material W can be cut.

Fig. 2c is a cross-sectional view showing a state in which the metal material W is cut by the first laser beam L1 as the laser beam for cutting. Referring to FIG. 2c, a heat affected portion (HAZ) 210 is generated around the cutting line 250 of the metal material W due to the laser cutting process using the first laser beam L1, and the heat affected portion is not subjected to laser cutting. The heat generated but melted, but its properties change. Further, during the laser cutting process, metal particles 220 are vapor-deposited around the cutting line 250 due to the phenomenon of laser plasma. Such heat-affected zone 210 and metal particles 220 reduce the quality of the product and therefore need to be removed. On the other hand, although the heat-affected zone 210 and the metal particles 220 have been described above by the use of the laser-cut metal material W, only the heat-affected zone 210 and the metal particles may be generated by the laser cutting process. Any of 220.

Referring to Fig. 2d, the heat-affected portion 210 and the metal particles 220 generated by cutting the metal material W are removed by irradiating the periphery of the cutting line 250 of the metal material W with a deburring laser beam. Specifically, the second laser beam L2 as a deburring laser beam is emitted from the laser light source 110 shown in FIG. Here, the second laser beam L2 may have the same wavelength as the first laser beam L1. For example, the second laser beam L2 may be a pulsed laser beam having a wavelength in the visible range. As a specific example, the second laser beam L2 may be a pulsed laser beam having a wavelength of approximately 532 nm.

The second laser beam L2 as a deburring laser beam may have an energy smaller than the first laser beam L1 as a laser beam for cutting. For example, in the case where the first laser beam L1 has an energy of 20 W, the second laser beam L2 may have an energy of 10 W. However, the above is merely an example, and the energy of the first laser beam L1 and the second laser beam L2 can be variously modified.

Also, the second laser beam L2 as the deburring laser beam may have a lower frequency than the first laser beam L1 as the cutting laser beam. For example, in the case where the first laser beam L1 has a frequency of 60 kHz, the second laser beam L2 may have a frequency of 20 kHz. However, the above is merely an example, and the frequencies of the first laser beam L1 and the second laser beam L2 can be variously modified.

The second laser beam L2 as a deburring laser beam emitted from the laser light source 110 can be irradiated to the periphery of the cutting line 250 of the metal material W via the mirror 120, the beam amplifier 130, and the focus lens 140. Here, the second laser beam L2 is irradiated to the periphery of the cutting line 250 (for example, the heat-affecting portion 210) by being defocused by the focus lens 140. For example, the defocus distance d of the second laser beam L2 may be approximately 7 mm, but the above is merely an example, and the above-described defocusing distance d can achieve various deformations. Further, if the second laser beam L2 irradiated in such a manner is defocused and moved around the cutting line 250 of the metal material W, the heat influence generated around the cutting line 250 can be removed by the first laser beam L1. The portion 210 and the metal particles 220.

In FIG. 2d, the case where the defocused second laser beam L2 is irradiated to the periphery of the cutting line 250 on the left side to remove the heat-affected zone 210 and the metal particles 220 is shown. On the other hand, the process of removing the heat-affected zone 210 and the metal particles 220 generated around the cut line 250 on the right side is also the same as the case on the left side. Here, the heat-affected zone 210 located on the left side and the heat-affected zone 210 located on the right side may be sequentially removed, and the heat-affected zone 210 located on the left side and the heat-affected zone 210 located on the right side may be simultaneously removed. In the case of simultaneous removal, a beam splitter (not shown) that splits the second laser beam L2 into two laser beams can be used.

FIG. 2e shows a case where the heat-affected zone 210 and the metal particles 220 around the cut line 250 are removed by the above-described laser deburring process. On the other hand, after the laser deburring process is completed, the oil pattern 300 remaining on the surface of the metal material W can be removed.

As described above, in the present embodiment, the oil pattern 300 is formed in advance in the cutting region of the metal material W before cutting the metal material W, thereby preventing the metal material W from being irradiated to the second laser in the laser deburring process. The bundle L2 is damaged.

Fig. 3 is a photograph obtained by photographing a heat-affected zone and metal particles generated around a cutting line by cutting a metal material.

Referring to Fig. 3, when a cutting process is performed by irradiating a dicing region of a metal material with a first laser beam as a laser beam for dicing, a heat-affecting portion is formed around the dicing line, and metal particles are vapor-deposited.

Fig. 4a is a photograph obtained by photographing a case where a metal material is formed without forming a pattern of a metal material. In addition, Fig. 4b is a photograph taken around the cutting line shown in Fig. 4a.

4a and 4b, it is understood that the metal material is cut by the first laser beam as the laser beam for cutting without forming an oil pattern in the cut region of the metal material, and is irradiated around the cutting line of the metal material as a deburring. The second laser beam of the laser beam removes most of the heat affected portion and the metal particles, but a part remains. On the other hand, in the case where an oil pattern is not formed in the cut region of the metal material, there is a flaw in the metal material due to the laser deburring process.

Fig. 5a is a photograph obtained by photographing a metal material after forming an oil pattern in advance in a cut region of a metal material according to an embodiment of the present invention. In addition, Fig. 5b is a photograph taken around the cutting line shown in Fig. 5a.

Referring to FIGS. 5a and 5b, it is known that an oil pattern is formed in advance in the cut region of the metal material before cutting the metal material, and then the metal material is cut by the first laser beam as the laser beam for cutting, and the metal material is cut. When the second laser beam as the deburring laser beam is irradiated around the line, the heat-affected portion and the metal particles generated around the cutting line are almost completely removed. Further, by forming an oil pattern in advance in the cutting region of the metal material before cutting the metal material, it is also possible to prevent the metal material from being damaged by the laser deburring process.

As described above, when the metal material is cut by laser, a heat-affected portion and metal particles are generated around the cutting line. According to an embodiment of the present invention, before the metal material is cut, the metal material is cut by forming an oil pattern in advance in the region where the cutting is performed. Further, when a defocused laser beam is irradiated around the cutting line of such a metal material, the heat-affected portion and the metal particles generated by cutting the metal material can be effectively removed without damaging the metal material. Moreover, by performing a deburring process using a laser, an environmentally friendly cutting process can be realized, the speed of the cutting process can be increased, and the cost can be reduced.

The embodiments of the present invention have been described above, but the above-described embodiments are merely examples, and those skilled in the art should understand that various modifications and equivalent embodiments can be implemented in accordance with the embodiments described above.

110‧‧‧Laser light source
115‧‧‧Control Department
120‧‧‧Mirror
130‧‧‧ Beam Amplifier
140‧‧‧focus lens
150‧‧‧ oil coating unit
210‧‧‧The Ministry of Thermal Impact
220‧‧‧ metal particles
250‧‧‧ cutting line
300‧‧‧ oil pattern
D‧‧‧ Defocus distance
L1‧‧‧first laser beam
L2‧‧‧second laser beam
S‧‧‧ platform
W‧‧‧Metal materials

Fig. 1 is a view schematically showing a laser processing apparatus according to an embodiment of the present invention. 2a to 2e are views showing a laser processing method of cutting a metal material by the laser processing apparatus shown in Fig. 1 to remove a heat-affected zone and metal particles generated around a cutting line of a metal material. Fig. 3 is a photograph obtained by photographing a heat-affected zone and metal particles generated around a cutting line by cutting a metal material. Fig. 4a is a photograph obtained by photographing a case where an oil pattern is formed on a metal material and a metal material is cut. Figure 4b is a photograph taken around the cutting line shown in Figure 4a. Fig. 5a is a photograph obtained by cutting a metal material after forming an oil pattern in advance in a cutting region of a metal material. Fig. 5b is a photograph taken around the cutting line shown in Fig. 5a.

110‧‧‧Laser light source

115‧‧‧Control Department

120‧‧‧Mirror

130‧‧‧ Beam Amplifier

140‧‧‧focus lens

150‧‧‧ oil coating unit

L1‧‧‧first laser beam

L2‧‧‧second laser beam

S‧‧‧ platform

W‧‧‧Metal materials

Claims (20)

A laser deburring method for removing at least one of a heat affected portion and a metal particle generated around a cutting line of a metal material, the laser deburring method comprising the steps of: cutting a region of the metal material a step of forming an oil pattern; and irradiating the first laser beam to the cutting region where the oil pattern is formed to smear the metal material, and then irradiating a second laser beam around the cutting line of the metal material The step of removing at least one of the heat affected portion and the metal particles. The laser deburring method of claim 1, wherein the oil pattern comprises an anthrone oil. The laser deburring method of claim 1, wherein the first laser beam is focused to a cutting area of the metallic material, and the second laser beam is uniformly incident to the heat The size of the affected part is defocused. The laser deburring method of claim 3, wherein the first laser beam and the second laser beam have the same wavelength. The laser deburring method of claim 4, wherein the first laser beam and the second laser beam have wavelengths in the visible range. The laser deburring method of claim 5, wherein the first laser beam and the second laser beam comprise a pulsed laser beam having a wavelength of 532 nm. The laser deburring method of claim 5, wherein the first laser beam has an energy greater than the second laser beam. The laser deburring method of claim 7, wherein the first laser beam and the second laser beam have energy of 20 W and 10 W, respectively. The laser deburring method of claim 7, wherein the second laser beam has a lower frequency than the first laser beam. The laser deburring method of claim 9, wherein the first laser beam and the second laser beam have frequencies of 60 kHz and 20 kHz, respectively. A laser processing method comprising the steps of: forming an oil pattern in a cut region of a metal material; irradiating a cut region of the metal material on which the oil pattern is formed with a first laser beam to cut the metal material And removing the at least one of the heat affected portion and the metal particles generated by cutting the metal material by irradiating the second laser beam around the cutting line of the metal material. The laser processing method according to claim 11, wherein the oil pattern is formed by coating a specific oil in such a manner as to cover the cutting region. The laser processing method of claim 12, wherein the oil pattern comprises an anthrone oil. The laser processing method of claim 11, wherein the first laser beam is focused to a cutting area of the metal material, and the second laser beam has a uniform incidence to the thermal influence The size of the part is defocused. The laser processing method of claim 14, wherein the first laser beam and the second laser beam are emitted from the same laser source and have the same wavelength. The laser processing method of claim 15, wherein the first laser beam and the second laser beam comprise a pulsed laser beam having a wavelength in the visible range. The laser processing method of claim 15, wherein the first laser beam has a higher frequency than the second laser beam and greater than an energy of the second laser beam. A laser processing apparatus comprising: an oil coating unit that coats a specific oil in a cutting region of a metal material to form an oil pattern; a laser light source that emits a first laser beam for cutting and a second laser beam for deburring Mirroring, changing a path of the first laser beam and the second laser beam; focusing a lens to focus the first laser beam and the second laser beam; and a control unit for the first mine The beam and the second laser beam are controlled. The laser processing apparatus of claim 18, wherein the first laser beam cuts the metal material by irradiating to the cutting region in which the oil pattern is formed, the second mine The beam removes at least one of the heat affected portion and the metal particles generated by cutting the metal material by irradiating around the cutting line of the metal material. The laser processing apparatus of claim 19, wherein the first laser beam is focused to a cutting area of the metallic material, and the second laser beam has a uniform incidence to the thermal influence The size of the part is defocused.