TW201721786A - Vacuum chamber device - Google Patents

Abstract

The invention discloses a vacuum chamber device, which comprises a chamber and a mounting plate, wherein the inside of the chamber can be vacuumized; the mounting plate is arranged in the chamber; at least three mounting assemblies are arranged on a bottom plate of the chamber; the mounting plate is arranged on the bottom plate of the chamber through the at least three mounting assemblies; and a space is reserved between the mounting plate and the bottom plate of the chamber. The mounting plate finishes an individual deformation-free reference surface by virtue of supports of at least three points of the mounting assemblies and the strength of a material in the chamber; the space is reserved between the mounting plate and the bottom plate of the chamber; an inner chamber is formed in the vacuum chamber; all mechanisms which are originally arranged on the bottom plate of the chamber are arranged on the mounting plate in the inner chamber; only overall deviation and inclination of the mounting plate of the inner chamber are caused by deformation of the chamber; internal parts are not affected; the debugging and production efficiency of the parts is relatively high; and the scrap cost caused by the deformation of the chamber is eliminated. According to the vacuum chamber device disclosed by the invention, internal benchmark loss of the vacuum chamber can be reduced or even eliminated.

Description

Vacuum chamber device

The invention belongs to the technical field of vacuum equipment, and in particular to a vacuum chamber device used for vacuum production of parts.

Some parts of industrial production operations need to be operated in a vacuum chamber, especially some precision-adjusted parts or instruments, or all plasma etching and cleaning systems that require vacuum.

The adjustment and installation in the vacuum chamber are carried out under atmospheric pressure and the inside of the chamber is operated under a vacuum environment. Therefore, after the chamber is evacuated, the chamber deformation causes all levels and vertical references to be lost. Since the reference is lost, all the parts attached to the inside of the chamber are offset due to the accumulated error, which causes a great quality impact on the production operation, resulting in a large amount of production scrap.

The existing vacuum chamber is made of high-strength aluminum alloy or stainless steel. The vacuum chamber is generally rectangular or cylindrical. All the outer surfaces of the chamber are subjected to atmospheric pressure during operation. 101325 N/m ² As shown in Fig. 1, the original vacuum chamber is deformed by the pressure difference between the vacuum and the atmospheric pressure. The current method is to strengthen the material on all surfaces or chambers, such as increasing the thickness of the material or adding reinforcing ribs. However, this can only slightly slow down the deformation caused by the pressure difference between the atmospheric pressure and the vacuum state, and the deformation still exists. Unable to solve. As shown in Fig. 2, the reinforcing ribs are added on the surface of the vacuum chamber, and the amount of deformation is reduced, but it still exists. At this time, the manufacturing process and the welding process are used in many places, and the difficulty in making the chamber is already great. As shown in Fig. 3, the vacuum chamber is made of double-thickness material, and the problem of compression and deformation by atmospheric pressure still exists, and the relative improvement is not large. At this time, the manufacturing cost and the welding difficulty are already very high (the thicker the material) The welding difficulty and the welding temperature and deformation amount increase exponentially).

The vacuum chambers made in the prior art are still deformed by conventional methods, and the deformation is amplified by multiple fits so as to be far from the expected result, or even impossible to use. There are various defects and deficiencies in the prior art: 1. The deformation of the vacuum chamber causes the reference inside the vacuum chamber to be lost, and the parts inside the vacuum chamber cannot work normally according to the designed size, clearance and precision, which greatly reduces the service life; 2. Reference point Because the chamber is deflected and displaced, all the production that needs to be driven is directly scrapped; 3. Even if the vacuum chamber is made by thickening the material and replacing the harder and stronger material, the deformation can not be avoided, and the reinforcement chamber is reduced. The deformation is not linear, which means that no matter how hardened, the deformation will always exist, and the effect of thickening the material and replacing the harder and stronger material is not obvious; 4, and the replacement is thicker and more The harder and stronger material costs a lot, the work is very difficult, and the material is too thick and hard, which makes the assembly and welding precision and difficulty increase exponentially.

Therefore, it is necessary to provide a vacuum chamber device that can reduce the influence of vacuum chamber deformation on the components in the vacuum chamber, and can reduce or even eliminate the loss of the reference inside the vacuum chamber.

Based on this, the present invention overcomes the deficiencies of the prior art and provides a vacuum chamber device capable of reducing the loss of the reference inside the vacuum chamber.

The technical solution is as follows: a vacuum chamber device is provided, which comprises an inner vacuum chamber, which further comprises a mounting plate disposed in the chamber, and at least three mounting elements are disposed on the bottom plate of the chamber, The mounting plate is mounted on the chamber floor by the at least three mounting elements and there is a space between the mounting plate and the bottom plate of the chamber. The mounting plate completes a separate undeformed reference surface in the chamber by means of a minimum of three points of support of the mounting component and the strength of the material itself, leaving a space between the chamber and the bottom plate of the chamber, forming an inner chamber in the vacuum chamber, originally installed in the cavity All the mechanisms of the bottom plate of the chamber are installed on the mounting plate of the inner chamber, and the deformation of the chamber only causes the mounting plate of the inner chamber to be entirely offset and inclined, but is mounted on the mounting plate (that is, inside the inner chamber). The parts are relatively unchanged, that is, they are not affected by the deformation of the chamber. A small part of the transmission parts that must be connected to the outside through the wall of the chamber. Through the buffering of the belt, the failure of the parts inside the chamber originally caused by the deformation of the chamber can be turned into all the unified benchmarks to achieve the accuracy of the drawings, which makes debugging and production more efficient and eliminates The cost of scrapping due to chamber deformation. Therefore, the vacuum chamber device of the invention can be reduced to eliminate the loss of the reference inside the vacuum chamber.

In the following, a further technical solution is described. In a preferred embodiment, the mounting component includes a chassis disposed on the bottom plate, and a bolt connecting the mounting plate and the chassis. The mounting plate is provided with a bolt hole at a corresponding position, and the mounting plate passes through a bolt is connected to the at least three chassis, and a space is left between the mounting plate and the bottom plate of the chamber distance.

In a preferred embodiment, the chassis is mounted in a mounting groove provided in the bottom plate of the chamber, and the surface of the chassis is flush with the surface of the bottom plate. In a preferred embodiment, the chassis is cylindrical.

In a preferred embodiment, the at least three mounting components are distributed at a corner location of the chamber weld. In a preferred embodiment, the vacuum chamber device is provided with four mounting assemblies. The mounting plate of the inner chamber is supported by four bolts distributed at four corners of the chamber weld. The main deformation of the chamber is concentrated at the center of the plate closest to the door frame. All the mounting parts close to these areas will be deformed by local tension, which will seriously reduce the accuracy of the transmission type and even fail, so it is welded in the chamber. The mounting assembly is placed at four corners.

In a preferred embodiment, the distance between the mounting plate and the bottom plate of the chamber is 3 to 10 mm, preferably 5 mm, and the proper distance between the mounting plate and the bottom plate of the chamber is maintained, so that the deformation of the chamber does not affect the components of the inner chamber. The distance between the mounting plate and the bottom plate of the chamber is suspended by 3~10mm, and is fixed by the gravity of the part. The deformation of the chamber will only cause the whole mounting plate of the inner chamber to be offset and tilted, but the components on the mounting plate. Relatively unchanged.

In a preferred embodiment, the mounting plate is provided with a column. After the introduction of the inner chamber, all the mechanisms in the chamber are installed on the mounting plate of the inner chamber, and the column is mounted on the mounting plate, and the components that need to be installed on the side of the mounting can be mounted on the column.

Further, in a preferred embodiment, one of the at least three mounting components is a buffer mounting component, including a buffer chassis disposed on the bottom plate, a buffer bolt with a spring slot, and a spring mounted on the spring slot of the buffer bolt Inner and connecting the buffer bolt and the buffer chassis, the mounting plate is connected to the buffer chassis through the buffer bolt and the spring; the remaining mounting components include a bolt, a chassis disposed on the bottom plate, the mounting plate is connected to the chassis by bolts, and the mounting plate is There is a gap between the bottom plates of the chamber. By the elastic force of the spring, the mounting plate of the inner chamber plays a role of supporting and buffering, further solving the problem that the deformation amount in the middle of the mounting plate accumulates over time and becomes concave, and at the same time, avoids transportation. The impact of the impact on the middle of the chamber causes the middle of the chamber to be deformed. The presence of this cushioning mounting member causes the impact force to be absorbed by the spring, so that the mounting plate in the chamber is not affected, and the parts of the inner chamber are not affected by the impact force. .

Through the combination of the mounting component and the buffer mounting component, the deformation of the chamber can be prevented from affecting the internal mechanism operation, and the inner chamber can be operated independently, which makes the precision original operation of the chamber smooth, and eliminates the problem of the reference loss inside the vacuum chamber. .

In a preferred embodiment, the buffer chassis is provided with a protrusion for mounting a spring. The spring is installed at one end in the spring groove of the buffer bolt, and the other end is sleeved on the protrusion of the buffer chassis. In a preferred embodiment, the projection of the buffer chassis is flush with the surface of the chamber floor.

The principle, effect, and the like of the foregoing technical solution are described. The vacuum chamber device of the present invention is provided with a mounting plate in the chamber, and the mounting plate is independently deformed by the minimum three-point support of the mounting component and the strength of the material itself in the chamber. The reference surface, which is spaced from the bottom plate of the chamber, forms an inner chamber in the vacuum chamber, and all the mechanisms originally installed on the bottom plate of the chamber are mounted on the mounting plate of the inner chamber, the chamber and the chamber If the key components in the room are not directly matched, then the deformation of the chamber will not affect the components in the chamber, or the impact on the precision parts in the chamber will be reduced to an acceptable range. Therefore, the vacuum chamber device of the invention can reduce or eliminate the loss of the reference inside the vacuum chamber; establish the same reference point for the atmospheric pressure inside the chamber, and is not affected by the deformation of the vacuum chamber in the vacuum environment.

Compared with the prior art, the advantages of the technical solution of the present invention:

1. The vacuum chamber device of the present invention can reduce or eliminate the inside of the vacuum chamber The reference is lost; the same reference point as the atmospheric pressure is established inside the chamber, and is not affected by the deformation of the vacuum chamber in a vacuum environment.

2. The conventional chamber plate is thickened and the reinforcing strip is replaced by a mounting plate forming an inner chamber and a simple mechanism, and the total production cost is reduced.

3. The total production cycle is reduced. In the conventional scheme, the thickening of the chamber plate and the welding of the reinforcing strip require a large amount of time for the welder. The technical solution of the invention is simple to manufacture, can save time and greatly shorten the production cycle.

4. Elimination of deformation leads to abnormal transmission system, eliminating the problem of material scrapping due to abnormal transmission system in actual production, greatly reducing production yield and equipment failure rate, and reducing equipment maintenance time, which is equivalent to reducing user cost and increasing production capacity. .

5. The structure provided with the buffer mounting component of the present invention can further support and buffer the mounting plate of the inner chamber by the elastic force of the spring, and further solves the problem that the deformation amount in the middle of the mounting plate accumulates over time. The problem of the recess, at the same time, also avoids the problem that the impact of the chamber may be deformed due to the impact force received during transportation. The presence of the buffer mounting member causes the impact force to be absorbed by the spring, so that the mounting plate in the chamber is not affected. The parts of the inner chamber are also unaffected by the impact force.

1‧‧‧Installation board

2‧‧‧Installation components

3‧‧‧floor

4‧‧‧buffer mounting components

11‧‧‧Bolt holes

21‧‧‧Chassis

22‧‧‧ bolt

31‧‧‧Installation slot

41‧‧‧ cushion chassis

42‧‧‧ Spring

43‧‧‧buffer bolt

410‧‧‧ bumps

1 is a schematic view showing the influence of atmospheric pressure on a general vacuum chamber in the prior art; FIG. 2 is a schematic view showing the influence of atmospheric pressure on a vacuum chamber provided with a reinforcing rib in the prior art; and FIG. 3 is a view of the influence of atmospheric pressure on a vacuum chamber having double thickness in the prior art. Figure 4 is a schematic view showing the structure of an embodiment of the vacuum chamber device of the present invention.

The embodiment of the present invention will be described in detail below. Referring to Figure 4, the vacuum chamber device of the present invention comprises a chamber which can be evacuated, a mounting plate 1 disposed in the chamber, and three on the bottom plate 3 of the chamber. Mounting element 2 and a buffer mounting element 4, the mounting plate 1 being mounted on the chamber floor 3 by means of the three mounting elements 2 and a buffer mounting element 4, and leaving between the mounting plate 1 and the bottom plate 3 of the chamber spacing. The three mounting elements 2 and one of the buffer mounting elements 4 are distributed at four corners of the chamber weld.

The mounting plate 1 completes a separate undeformed reference surface in the chamber by means of three mounting elements 2 and a four-point support of the buffer mounting element 4 and the material itself, and a space is provided between the chamber and the chamber floor 3, in the vacuum An inner chamber is formed in the chamber, and all the mechanisms originally installed on the bottom plate of the chamber are mounted on the mounting plate of the inner chamber, and the deformation of the chamber only causes the mounting plate 1 of the inner chamber to be entirely offset and inclined. However, the components mounted on the mounting plate 1 (that is, in the inner chamber) are relatively unchanged, that is, they are not affected by the deformation of the chamber. A small part of the transmission parts that must be connected to the outside through the wall of the chamber. Through the buffering of the belt, the failure of the parts inside the chamber originally caused by the deformation of the chamber can be turned into all the unified benchmarks to achieve the accuracy of the drawings, which makes debugging and production more efficient and eliminates The cost of scrapping due to chamber deformation. Therefore, the vacuum chamber device of the invention can be reduced to eliminate the loss of the reference inside the vacuum chamber.

As shown in FIG. 4, the bottom plate 3 is provided with four corresponding mounting slots 31. The mounting assembly 2 includes a chassis 21 disposed on the mounting slot 31 of the base plate 3, and bolts 22 connecting the mounting plate 1 and the chassis 21. The surface of the chassis 21 is flush with the surface of the bottom plate 3. The chassis 21 is cylindrical. The mounting plate 1 is provided with bolt holes 11 at corresponding positions. The mounting plate 1 is connected to the chassis by bolts 22. 21 is connected and there is a space between the mounting plate 1 and the bottom plate 3 of the chamber.

The buffer mounting assembly 4 includes a buffer chassis 41 disposed on the mounting groove 31 of the bottom plate 3, a buffer bolt 43 with a spring groove, and a spring 42 provided with a boss 410 for mounting a spring, the spring 42 being mounted at one end In the spring groove of the buffer bolt 43, the other end is sleeved on the protrusion 410 of the buffer chassis 41. The spring 42 is connected to the buffer bolt 43 and the buffer chassis 41. The mounting plate 1 is connected to the buffer chassis 41 through the buffer bolt 43 and the spring 42. And the mounting plate 1 is spaced from the bottom plate 3 of the chamber. The projection of the buffer chassis is flush with the surface of the chamber floor 3.

By the elastic force of the spring, the mounting plate 1 of the inner chamber plays a role of supporting and buffering, further solving the problem that the deformation amount in the middle of the mounting plate accumulates over time and becomes concave, and at the same time, avoids transportation. On the way, due to the impact force that will cause the middle of the chamber to deform, the presence of this cushioning mounting member causes the impact force to be absorbed by the spring, so that the mounting plate 1 in the chamber is not affected, and the parts of the inner chamber are not affected. Force influence.

Through the combination of the mounting component and the buffer mounting component, the deformation of the chamber can be prevented from affecting the internal mechanism operation, and the inner chamber can be operated independently, which makes the precision original operation of the chamber smooth, and eliminates the problem of the reference loss inside the vacuum chamber. .

In this embodiment, the distance between the mounting plate 1 and the chamber bottom plate 3 is 3 to 10 mm, preferably 5 mm. By the gravity pressing of the part, the deformation of the chamber will only cause the mounting plate of the inner chamber to be offset and tilted as a whole, but the components on the mounting plate are relatively unchanged.

A column is mounted on the mounting plate 1. After the introduction of the inner chamber, all the mechanisms in the chamber are installed on the mounting plate 1 of the inner chamber, and the column is mounted on the mounting plate, and the components that need to be installed on the side of the mounting can be mounted on the column.

The above-mentioned embodiments are merely illustrative of specific embodiments of the invention, and the description thereof is not to be construed as limiting the scope of the invention. It should be noted that a number of variations and modifications may be made by those skilled in the art without departing from the spirit and scope of the invention.

1‧‧‧Installation board

2‧‧‧Installation components

3‧‧‧floor

4‧‧‧buffer mounting components

11‧‧‧Bolt holes

21‧‧‧Chassis

22‧‧‧ bolt

31‧‧‧Installation slot

41‧‧‧ cushion chassis

42‧‧‧ Spring

43‧‧‧buffer bolt

410‧‧‧ bumps

Claims (10)

A vacuum chamber apparatus including an inner evacuatable chamber, further comprising a mounting plate disposed within the chamber, the bottom plate of the chamber being provided with at least three mounting members, the mounting plate The at least three mounting elements are mounted on the chamber floor and there is a space between the mounting plate and the bottom plate of the chamber. The vacuum chamber device of claim 1, wherein the mounting member comprises a chassis disposed on the bottom plate, and a bolt connecting the mounting plate and the chassis, wherein the mounting plate is provided with a bolt hole at a corresponding position, and the mounting plate passes A bolt is coupled to the at least three chassis and a spacing is left between the mounting plate and the bottom plate of the chamber. The vacuum chamber device of claim 1, wherein the chassis is mounted in a mounting groove provided in the bottom plate of the chamber, and the surface of the chassis is flush with the surface of the bottom plate. The vacuum chamber device of claim 1, wherein one of the at least three mounting members is a buffer mounting member comprising a buffer chassis disposed on the bottom plate, a buffer bolt with a spring groove, and a spring mounted In the spring groove of the buffer bolt and connecting the buffer bolt and the buffer chassis, the mounting plate is connected to the buffer chassis through the buffer bolt and the spring; the remaining mounting components include a bolt, a chassis disposed on the bottom plate, and the mounting plate is connected to the chassis by bolts. And there is a gap between the mounting plate and the bottom plate of the chamber. The vacuum chamber device of claim 4, wherein the buffer chassis is provided with a protrusion for mounting a spring, the spring being mounted at one end in a spring groove of the buffer bolt and at the other end being sleeved on the protrusion of the buffer chassis. The vacuum chamber device of claim 5, wherein the projection of the buffer chassis is flush with the surface of the chamber floor. The vacuum chamber device of any of claims 1 to 6, wherein the at least three mounting assemblies are distributed at a corner location of the chamber weld. The vacuum chamber device according to any one of claims 1 to 6, wherein the distance between the mounting plate and the bottom plate of the chamber is 3 to 10 mm. The vacuum chamber device of any one of claims 1 to 6, wherein the mounting plate is provided with a post. The vacuum chamber device of claim 2, wherein the chassis is cylindrical.