TW201721232A - 使用整合在3d封裝中的單色cmos影像感測器的高解析度彩色視頻 - Google Patents

使用整合在3d封裝中的單色cmos影像感測器的高解析度彩色視頻 Download PDF

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TW201721232A
TW201721232A TW105131618A TW105131618A TW201721232A TW 201721232 A TW201721232 A TW 201721232A TW 105131618 A TW105131618 A TW 105131618A TW 105131618 A TW105131618 A TW 105131618A TW 201721232 A TW201721232 A TW 201721232A
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monochromatic
image
monochrome
light
cmos image
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虹 沈
亮 王
桂蓮 高
亞卡爾古德R 西塔朗
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英帆薩斯公司
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Abstract

本發明提供使用整合在3D封裝中的單色CMOS影像感測器的HD彩色視頻。用於彩色視頻的範例3DIC包括分束器,以將接收到的影像流的光分成多個光輸出。多個單色CMOS影像感測器是每一者被耦合至多個光輸出中的一者,以用接收到的光的各自成分波長感測單色影像流。每一個單色CMOS影像感測器是被特別地建構、摻雜、控制以及調整以符合其各自波長的光。平行處理的積分器或中介件晶片將各自的單色影像流非均勻地合併成全頻譜彩色視頻流,包括紅外線或紫外線流的平行處理。單色影像流的平行處理提供在低光位準下HD或4K HD彩色視頻的重建。一個中介件晶片的平行處理亦提升速度、空間分辨率、感測性、低光效能和色彩重建。

Description

使用整合在3D封裝中的單色CMOS影像感測器的高解析度彩色視頻
本發明有關於使用整合在3D封裝中的單色CMOS影像感測器的高解析度彩色視頻。
相關申請案
本申請案請求Shen等人在2015年10月2日所申請的名稱為「使用整合在3D封裝中的單色CMOS影像感測器的高解析度彩色視頻(HD Color Video Using Monochromatic CMOS Image Sensors Integrated In 3D Package)」的美國臨時專利申請案第62/236,693號的優先權的權益,並且在此處以引用之方式將其整體併入。
習知影像感測器封裝在晶圓級有很多改善的空間。舉例而言,習知背照式(BSI)CMOS影像感測器封裝在設計上浪費許多像素。在彩色像素之間亦有不希望的漏電流。習知設計在色彩重製、影像細節和速度/外形因素上強加許多限制。這些限制是由不同波長的光(不同顏色)與習知整體式濾光片和均一影像感測器材料相互作用上的差異而以各種方式所造成。藍色波長以相對淺的方式穿透,而紅色波長則穿透的更深。
如圖1中所示,習知非平均拜耳濾光片馬賽克陣列 (unbalanced Bayer filter mosaic array)50是將紅色-綠色-藍色(RGB)彩色濾光片配置在由光感測器所組成的正方形網格上的一種彩色濾光片陣列(CFA)。該濾光片圖案有50%的綠色、25%的紅色和25%的藍色,而提供一種RGGB所組成的濾光片60。習知非平均拜耳濾光片馬賽克陣列50中的綠色濾光片是藍色或紅色濾光片的兩倍多,從而減少個別像素的精確色彩重製。由於常用於拜耳濾光片中的染料的穿透頻譜曲線70的緣故,紅色濾光片的量子效率是比綠色和藍色濾光片的量子效率(它們在整體效率上是彼此接近的)要顯著地大。在影像流通過習知拜耳濾光片50之後,由於習知感測表面的材料是整體式的,所以不能對感測器材料的厚度和摻雜分佈進行每一個顏色的最佳化。為這些習知缺陷提供補償會在影像感測器封裝的習知CMOS BSI設計上導致額外的複雜度。此外,目前最新技術水平的16M或更高的高解析度(high-definition,HD)視頻需要約1.0奈秒的感測和處理時間。
在習知設計50中,四個像素中的三個(RGGB像素群組中的RGG像素)傳遞黃色光(在波長585nm)加上20%的藍色光(435nm)。藍色像素(B)僅傳遞藍色光(435nm)。這種不平衡降低了空間分辨率和感測性。習知設計將給定像素的顏色(色度)和強度(亮度)與鄰近的像素作比較,以利用各種線性的(linear)、近鄰的(next-neighbor)、三次的(cubic)、三次螺旋的(cubic spiral)、三次仿樣的(Cubic spline)以及正弦函數的(sinc)內插圖案來重建R、G、B的訊號。對於沒有鄰近像素的邊緣像素而言,該重建是被浪費了。習知設計的其他固有問題包括雜訊和串音,而必需犧牲速度以執行晶片上的抑制和主動的去耦合。
本發明提供使用整合在3D封裝中的單色CMOS影像感測器的HD彩色視頻。用於彩色視頻的範例3DIC包括分光器,以將接收到的影像流的光分成多個光輸出。多個單色CMOS影像感測器是每一者被耦合至多個光輸出中的一者,以用接收到的光的各自成分波長感測單色影像流。每一個單色CMOS影像感測器是被特別地建構、摻雜、控制以及調整以符合其各自波長的光。平行處理的積分器或中介件晶片將各自的單色影像流非均勻地合併成全頻譜彩色視頻流,包括紅外線或紫外線流的平行處理。單色影像流的平行處理提供在低光位準下HD或4K HD彩色視頻的重建。一個中介件晶片的平行處理亦提升速度、空間分辨率、感測性、低光效能和色彩重建。
本發明內容並不旨在指明所要求保護的主題的關鍵或必要特徵,也不旨在使用以作為限制所要求保護的主題的範圍的輔助。
50‧‧‧拜耳濾光片馬賽克陣列
60‧‧‧RGGB所組成的濾光片
70‧‧‧穿透頻譜曲線
200‧‧‧分束器
202‧‧‧輸入
204‧‧‧輸出
206‧‧‧感測器
208‧‧‧感測器
210‧‧‧感測器
212‧‧‧感測器
300‧‧‧3DIC影像感測器封裝
302‧‧‧抗反射層
304‧‧‧抗反射層
306‧‧‧抗反射層
308‧‧‧抗反射層
310‧‧‧邏輯構件
312‧‧‧視頻輸出
402‧‧‧積分器
404‧‧‧單色感測器控制器
406‧‧‧控制器
408‧‧‧控制器
將在下文參考隨附圖式而描述本揭示的某些實施例,其中相同的參考數字表示相同的元件。然而,應當理解的是,隨附圖式解釋在此處所描述的各種實作且並且不打算限制在此處所描述的各種技術的範圍。
圖1是現有技術的拜耳圖案濾光片馬賽克的限制的表示圖。
圖2是將影像流分離成多個束以用於每一者皆專用於一種顏色或波長範圍的影像感測器的範例系統的表示圖。
圖3是用於全頻譜HD視頻的範例3維(3D)積體電路(IC)封裝的區塊圖。
圖4是圖3的範例3DIC的包括平行積分器以合併單色影像流的範例邏輯構件的區塊圖。
圖5是平行地利用多個單色CMOS影像感測器以重建HD彩色視頻流的範例方法的流程圖。
圖6是建構和控制單色影像流感測器的範例方法的流程圖,每一個單色影像流感測器被建構和控制以感測特定波長或顏色的光。
概述
本揭示描述使用整合在3D封裝中的單色CMOS影像感測器的範例高解析度(HD)彩色視頻。
圖2示出捕捉且將影像流分離成屬於相同視頻流的多個束以用於每一者皆專用於一種顏色或波長範圍的影像感測器。在實作中,用於產生全頻譜HD彩色視頻的範例3DIC封裝包括光學分“束(beam)”器200,以將接收到的影像流的光分成多個光輸出。分束器200可具有單一光學輸入202,其分支至多個光學輸出204而傳送與輸入202所接收到的影像流相同的影像流。替代物(諸如棱鏡)可被使用以替代光纖或樹型耦合器分束器(tree coupler beam splitter)200。因而,光學分流器200可以是樹型耦合器、棱鏡、光纖耦合器或其他光學分束器。多個單色CMOS影像感測器(諸如紅色感測器206、綠色感測器208、藍色感測器210和紅外線或紫外線感測器212)每一者被耦合至多個光輸出中的一者,以用接收到的光的各自成分波長以單色的方式感測對應影像流。積分器或中介件晶片將各自單色影像流非均勻地合併成全頻譜彩色視頻流。不同的單色影像流是被平 行地處理,以重建全頻譜視頻流,包括選擇性的平行處理紅外線或紫外線流。單色影像流的平行處理改善量子效率,並且可在非常低光的等級下提供HD或4K HD彩色視頻的重建。一個中介件晶片的平行處理亦提升速度、空間分辨率、感測性、低光效能和色彩重建。
縮寫字“CMOS”意指“互補金屬氧化物半導體(complementary-metal-oxide-semiconductor)”。在此處所使用的“單色(Monochromatic)”意指單一色彩或單一波長的光,或是接近單一色彩的一相鄰波長的範圍,諸如紅色或一紅色的範圍,如同由人類所感測到的或是如同界定一明確範圍或一有限系列的相鄰電磁輻射波長所科學上定義的。
不同波長的空乏區寬度的考量
在實作中,用於彩色視頻的範例3DIC封裝包括多個單色CMOS影像感測器206、208、210和212,其每一者被耦合至分束器200的光輸出204,以用接收到的光的各自成分波長感測來自全頻譜影像流的單色影像流。在實作中,為了感測特定波長的光,若是具有各別介電常數的半導體材料,空乏層寬度W可以由方程式(1)~(4)來決定:
其中,NA/ND是載子濃度,V0是橫跨接面的電位(亦即,被個別計算的內建電壓),xp是空間電荷區於p側中的穿透深度(penetration),並且xn是於n側中的穿透深度。空乏區的總體寬度W是xp和xn的總和。因此,輕度摻雜的半導體的空乏寬度大,而重度摻雜的半導體的空乏寬度較小。
想要的空乏寬度(對於給定的波長而言)可藉由對於每一個個別單色CMOS影像感測器來選擇電壓電位和適當摻雜物來達成。單色(如在此處所使用的和上面所介紹的)意指特定波長或有限範圍的波長,其具有電磁輻射頻譜中的某一成分的特性或是包括電磁輻射頻譜中的某一成分,例如一範圍的波長而近似紅色或近似一範圍或一系列的紅色顏色。
用於最佳化地感測藍色、綠色和紅色的波長的材料需要不同的空乏區以提升量子效率。例如,藍色是在0.1微米的範圍。另一方面,紅色是在1.0~5.0微米的範圍(不大可能耗盡(deplete)的那麼深)。在實作中,多個單色CMOS影像感測器206、208、210和212中的每一者具有不同的電壓電位和不同的摻雜,以用於各自要被感測的顏色(波長或波長範圍)。此外,每一個單色CMOS影像感測器206、208、210和212可具有適於感測各自顏色(波長)的不同厚度並且具有亦適於感測各自顏色(波長)的各自抗反射層。對於要被感測的每一個波長的這些訂製在習知影像感測器設計中是不可能的。
範例系統
圖3示出使用四個個別的單色CMOS感測器的範例3DIC影像感測器封裝300,舉例而言,每一個感測器各用於紅色206、綠色208、藍色210和紅外線212。紫外線感測器(或另一波長範圍)亦可被用以取代 紅外線感測器212。紅外線單色CMOS感測器2121可包括InGaAs或類似的材料。整合材料以感測紅外線212是不太容易以習知CMOS影像感測器設計來執行,而可因為在紅外線中可得的額外視覺資訊以及由紅外線所提供的夜視能力而提高效能。
圖3的範例3DIC影像感測器封裝300可提供全頻譜HD視頻。範例3DIC影像感測器封裝300包括分束器200,但是在一些實作中分束器200或類似的替代物亦可個別位於遠離3DIC 300的地方。3DIC封裝300可包括多個抗反射層,其每一者處於和被調整以符合對應各自單色CMOS影像感測器的感測能力的顏色的光或光波長。因而,紅色抗反射層302可與紅色感測器206相關聯,綠色抗反射層304可與綠色感測器208相關聯,藍色抗反射層306可與藍色感測器210相關聯,並且紅外線或紫外線抗反射層308可與紅外線或紫外線抗感測器212相關聯。
每一個單色CMOS影像感測器206、208、210和212是被個別耦合至邏輯構件310,其可通過平行處理將感測到的單色影像流整合成經整合的全頻譜(全色彩)影像流。全頻譜影像流可被傳送至HD視頻輸出312。
圖4以更詳細的方式示出圖3的範例邏輯構件310。在範例實作中,邏輯構件310包括單色流平行積分器402和單色感測器控制器404。單色感測器控制器404可進一步包括反向偏壓控制器(諸如4通道控制器406),用以個別控制紅色感測器206、綠色感測器208、藍色感測器210和紅外線或紫外線感測器212的每一者的反向偏壓。單色感測器控制器404亦可進一步包括工作週期控制器(諸如4通道控制器408),用以個別控制 紅色感測器206、綠色感測器208、藍色感測器210和紅外線或紫外線感測器212的每一者的工作週期。
在實作中,包括邏輯構件310的3DIC封裝300具有多個晶片而平行地感測和處理,從而提供對於習知設計在速度上多方面的改善,尤其是對於HD視頻。每一個抗反射層302、304、306和308亦比習知的層更便宜,並且在針對特定波長範圍上更有效率,而不是習知寬頻帶的方式,其需要更多抗反射層。
範例3DIC影像感測器封裝300可用標準CMOS製造技術來構成。可訂製出(map out)非主動式或去活化的光二極體。由感測器所產生的不同單色影像流可被不均勻地整合至一個平行積分器402上,諸如中介件晶片,以提供更快的速度。
範例感測器材料
將III-V族半導體材料整合(例如)至CMOS影像感測器晶圓以用於感測紅外線212引起一些挑戰,但可以在低光等級或夜視光等級下提供較高感測性、較高空間分辨率以及精確色彩重製。III-V族半導體材料對紅外光波長比對可見光波長更具有感測性。要被使用的III-V族晶圓尺寸可以是小的(最高達150mm)。然而,在範例系統中,有利的是經由晶片至晶圓接合將III-V族晶粒整合至CMOS影像感測器(CIS)晶圓,以用於與可見光成像平行的紅外線成像。下面的表(1)示出了在範例系統中用於感測紅外線的材料:
多個單色CMOS影像感測器206、208、210和212中的每一者可具有被調整以最佳化接收到的光的特定各自單色成分波長在高分辨率下(甚至在低光等級或夜視光等級下)的光偵測的不同厚度和不同摻雜分佈。
範例積分器、中介件或其他邏輯電子310可被配置以施加不同反向偏壓406至多個單色CMOS影像感測器206、208、210和212中的每一者,以控制或最佳化每一個個別的單色CMOS影像感測器206、208、210和212的空乏寬度。
範例積分器、中介件或其他邏輯電子310亦可被配置以施加不同工作週期408至多個單色CMOS影像感測器206、208、210和212中的每一者,以調整多個單色CMOS影像感測器中的每一者以改善效能,諸如 對於接收到的光的特定成分波長的經調整的感測性和/或在接收到的光的特定成分波長下的經改善的量子效率。
多個單色CMOS影像感測器206、208、210和212中的至少一者可以包括除了矽光二極體材料的材料。例如,除了矽光二極體材料的材料可以是:砷化銦鎵(InGaAs)、鍺(Ge)、硫化鉛(PbS)、硒化鉛(PbSe)、光電導銻化銦(InSb)、砷化銦(InAs)、矽化鉑(PtSi)、光二極體型銻化銦(InSb)、碲化汞鎘(MCT,HgCdTe)、碲化汞鋅(MZT,HgZnTe)、鉭酸鋰(LiTaO 3)和三甘胺酸硫酸酯(TGS和DTGS)。
範例3DIC封裝300可包括用以偵測紅外線光子的上轉換材料和/或偵測紫外線光子的下轉換材料。
在實作中,範例3DIC封裝300可包括進一步利用被調整以符合接收到的光的成分波長的量子點光偵測器(QDP)或其他量子點光感測材料之多個單色CMOS影像感測器206、208、210和212中的至少一者。
在各種實作中,多個單色CMOS影像感測器206、208、210和212亦可將它們的單色輸出與全頻譜感測器、RGB感測器、白色感測器、黑白紅外線感測器、紫外線感測器、高頻微波感測器等等整合。
範例方法
圖5示出平行地利用多個單色CMOS影像感測器以重建HD彩色視頻流的範例方法500。在該流程圖中,幾個操作被表示為個別的區塊。
在區塊502,多個單色CMOS影像感測器被排列在3DIC封裝中,多個單色CMOS影像感測器中的每一者被調整以符合接收到的影像流中的不同成分波長範圍。
在區塊504,不同單色影像流是藉由多個單色CMOS影像感測器在不同的各別波長範圍被平行地感測。
在區塊506,不同單色影像流是被平行地處理,以重建全頻譜HD視頻流。
範例方法500可進一步包括以與可見光的單色影像流平行的方式,感測且處理紅外線單色影像流或紫外線單色影像流。
範例方法500可包括在低光等級或夜視光等級下經由多個單色CMOS影像感測器感測不同單色影像流以及從在低光等級或夜視光等級下所感測到的不同單色影像流重建HD全頻譜彩色影像流或4K HD彩色視頻流。
範例方法500可包括將不同單色影像流整合在一個中介件晶片上,以增加平行處理的速度和重建全頻譜影像流的速度。
範例方法500亦可包括將不同單色影像流非均勻地整合成全頻譜影像流,以達成提升的空間分辨率、更高的感測性、改善的低光效能或改善的色彩重建。
圖6示出建構和控制單色影像流感測器的範例方法600,每一個單色影像流感測器被建構和控制以用於特定波長或顏色的光。在該流程圖中,幾個操作被表示為個別的區塊。
在區塊602,單色影像流感測器利用特別適合用於感測每一個不同波長的半導體材料被建構以用於紅色、綠色、藍色和紅外線(或紫外線)波長中的每一者。
在區塊604,用於每一個單色影像流感測器的半導體材料利 用特別適合用於每一個各別的不同波長的摻雜物來摻雜。
在區塊606,將抗反射層與每一個單色影像流感測器整合,每一個抗反射層特別適合用於對應單色影像流感測器的各別波長。
在區塊608,用於紅色、綠色、藍色和紅外線或紫外線的每一者的單色影像流感測器被整合至3DIC封裝中。
在區塊610,反向偏壓以訂製的方式被控制以用於每一個紅色、綠色、藍色和紅外線或紫外線影像流感測器。
在區塊612,工作週期以訂製的方式被控制以用於每一個紅色、綠色、藍色和紅外線或紫外線影像流感測器。
雖然已揭露有限數目的實施例,但是該領域中習知此技術者在了解本揭示的益處後將知道可從在此處所提供的描述做出許多修改和變化。隨附的申請專利範圍意圖如同落入本揭示的真實精神和範圍內那樣涵蓋此些修改和變化。
200‧‧‧分束器
206‧‧‧感測器
208‧‧‧感測器
210‧‧‧感測器
212‧‧‧感測器
300‧‧‧3DIC影像感測器封裝
302‧‧‧抗反射層
304‧‧‧抗反射層
306‧‧‧抗反射層
308‧‧‧抗反射層
310‧‧‧邏輯構件
312‧‧‧視頻輸出

Claims (20)

  1. 一種用於彩色視頻的3DIC封裝,其包括:光學分流器,以將接收到的影像流的光分成多個光輸出,所述多個光輸出中的每一者包括一束接收到的所述光;多個單色CMOS影像感測器,所述多個單色CMOS影像感測器中的每一者被耦合至所述光學分流器的所述多個光輸出中的一者,以用接收到的所述光的各自成分波長感測單色影像流;以及積分器,用以從所述多個單色CMOS影像感測器將各自的所述單色影像流非均勻地(heterogeneously)合併成全頻譜彩色影像流。
  2. 如申請專利範圍第1項所述的3DIC封裝,其中所述多個單色CMOS影像感測器進一步包括用以感測由紅色波長所組成的第一單色影像流的第一單色CMOS影像感測器、用以感測由綠色波長所組成的第二單色影像流的第二單色CMOS影像感測器以及用以感測由藍色波長所組成的第三單色影像流的第三單色CMOS影像感測器。
  3. 如申請專利範圍第1項所述的3DIC封裝,進一步包括用以感測由紅外線波長或紫外線波長所組成的第四單色影像流的第四單色CMOS影像感測器。
  4. 如申請專利範圍第3項所述的3DIC封裝,其中用以感測由紅外線波長所組成的所述第四單色影像流的所述第四單色CMOS影像感測器包括由III-V族類型的半導體材料所製成的晶粒,其利用晶片至晶圓製程被接合至CMOS影像感測器(CIS)晶圓上。
  5. 如申請專利範圍第1項所述的3DIC封裝,其中所述多個單色CMOS 影像感測器中的每一者包括被調整以符合接收到的所述光在高分辨率和低光等級或夜視光等級下的特定成分波長的光偵測的不同厚度和不同摻雜分佈。
  6. 如申請專利範圍第1項所述的3DIC封裝,進一步包括與所述多個單色CMOS影像感測器中的每一者相關聯的抗反射層,每一抗反射層被調整以符合相關聯的所述單色CMOS影像感測器的特定波長範圍。
  7. 如申請專利範圍第1項所述的3DIC封裝,其中所述積分器包括用以合併所述多個單色影像流的中介件或用以平行處理所述多個單色影像流的處理器的其中一者。
  8. 如申請專利範圍第1項所述的3DIC封裝,其中所述光學分流器是由以下所組成的群組中所選出的:樹型耦合器(tree coupler)、一或多個棱鏡以及光纖耦合器。
  9. 如申請專利範圍第1項所述的3DIC封裝,進一步包括單色感測器控制器,其包括反向偏壓控制器以施加不同反向偏壓至所述多個單色CMOS影像感測器中的每一者,以控制每一個個別單色CMOS影像感測器的空乏寬度,用以感測接收到的所述光的特定成分波長。
  10. 如申請專利範圍第1項所述的3DIC封裝,進一步包括單色感測器控制器,其包括工作週期控制器以對於接收到的所述光的特定成分波長的感測性和在接收到的所述光的所述特定成分波長下的量子效率的改善調整所述多個單色CMOS影像感測器中的每一者。
  11. 如申請專利範圍第1項所述的3DIC封裝,其中所述多個單色CMOS影像感測器中的至少一者包括除了矽光二極體材料的材料,所述材料選自 由以下所組成的群組:砷化銦鎵(InGaAs)、鍺(Ge),硫化鉛(PbS)、硒化鉛(PbSe)、光電導銻化銦(InSb)、砷化銦(InAs)、矽化鉑(PtSi)、光二極體型銻化銦(InSb)、碲化汞鎘(mercury cadmium telluride)(MCT,HgCdTe)、碲化汞鋅(mercury zinc telluride)(MZT,HgZnTe)、鉭酸鋰(lithium tantalite)(LiTaO3)和三甘胺酸硫酸酯(triglycine sulfate)(TGS和DTGS)。
  12. 如申請專利範圍第11項所述的3DIC封裝,進一步包括用以偵測紅外線光子的上轉換材料或偵測紫外線光子的下轉換材料。
  13. 如申請專利範圍第1項所述的3DIC封裝,其中所述多個單色CMOS影像感測器中的至少一者進一步包括被調整以符合接收到的所述光的成分波長的量子點光偵測器(QDP)或量子點光感測材料。
  14. 一種方法,其包括:將多個單色CMOS影像感測器排列在3DIC封裝中,所述多個單色CMOS影像感測器中的每一者被調整以符合接收到的影像流的不同成分波長範圍;以不同的各自波長範圍平行地感測不同單色影像流;以及平行地處理所述不同單色影像流,以重建全頻譜影像流。
  15. 如申請專利範圍第14項所述的方法,進一步包括以與可見單色影像流平行的方式,感測且處理紅外線單色影像流或紫外線單色影像流。
  16. 如申請專利範圍第14項所述的方法,進一步包括在低光等級或夜視光等級下經由所述多個單色CMOS影像感測器感測所述不同單色影像流,以及從在所述低光等級或所述夜視光等級下所感測到的所述不同單色影像流重建HD全頻譜彩色影像流或4K HD彩色視頻流。
  17. 如申請專利範圍第14項所述的方法,進一步包括將所述不同單色影像流整合在一個中介件晶片上,以增加平行處理的速度和重建全頻譜影像流的速度。
  18. 如申請專利範圍第14項所述的方法,進一步包括將所述不同單色影像流非均勻地整合成全頻譜彩色影像流,以達成提升的空間分辨率、更高的感測性、改善的低光效能或改善的色彩重建。
  19. 一種方法,其包括:利用特別適合用於感測每一個不同波長的半導體材料來建構用於紅色、綠色、藍色和紅外線或紫外線波長中的每一者的單色影像流感測器;利用特別適合用於每一個各別的不同波長的摻雜物來摻雜用於每一個單色影像流感測器的所述半導體材料;將抗反射層與每一個單色影像流感測器整合,每一個抗反射層特別適合用於對應的所述單色影像流感測器的各別波長;以及將用於紅色、綠色、藍色和紅外線或紫外線中的每一者的所述單色影像流感測器整合至3DIC封裝中。
  20. 如申請專利範圍第19項所述的方法,進一步包括以訂製的方式控制用於每一個紅色、綠色、藍色和紅外線或紫外線影像流感測器的反向偏壓;以及以訂製的方式控制用於每一個紅色、綠色、藍色和紅外線或紫外線影像流感測器的工作週期。
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