TW201718377A - Transportation jig for transporting a plate member - Google Patents

Abstract

A transportation jig includes a base, a blower assembly, a pressure sensor, and a control module. A hollow chamber is formed in the base. A plate member is placed above the base. The blower assembly is disposed below the base and coupled to the hollow chamber for generating a flow into the hollow chamber. The pressure sensor is disposed in the hollow chamber for detecting a pressure value of the flow in the hollow chamber. The control module is coupled to the blower assembly and the pressure detecting device. The control module controls an output power of the blower assembly according to the pressure value detected by the pressure sensor.

Description

Transport vehicle for transporting flat members

The present invention relates to a transport vehicle, and more particularly to a transport vehicle for transporting a flat member.

Recently, the glass substrate of the display has been developed in the direction of enlargement and thinning. At the time of manufacture, the conventional conveying system includes an air intake device for providing an air flow to lift the glass substrate. However, the conventional conveying system The included air intake device cannot automatically adjust the airflow provided according to the situation on site, so that the air intake device included in the conventional conveyor system needs to be manually adjusted manually, and even the on-site environment may change after a period of use. For example, the air pressure of the airflow generated by the air intake device is blocked by the filter device or the dust accumulation at the site blocks the air outlet, so that the airflow generated by the air intake device is gradually weakened. When the air pressure is gradually weakened, the stable distance between the glass substrate and the conveying system cannot be maintained, so that the glass substrate may interfere or collide with the conveying system. Therefore, how to design a transport carrier that maintains a stable distance between the glass substrate and the transport system and an intelligent transport system with an automatically adjusted intake airflow has become an issue that the industry has to work hard.

Accordingly, the present invention provides an intelligent transport carrier for transporting a flat member and having a function of automatically adjusting intake airflow to solve the above problems.

In order to achieve the above object, the present invention discloses a transport carrier for transporting a flat member, which comprises a base, an air flow device set, a pressure sensor and a control module. A hollow chamber is formed in the base, the flat member is placed above the base, and the air flow device is disposed below the base and coupled to the hollow chamber for feeding a gas flow into the hollow chamber. The pressure sensor is disposed in the hollow chamber for sensing a gas pressure value of the airflow in the hollow chamber. The control module is coupled to the airflow device group and the pressure sensor, and the control module is The output power of one of the airflow device groups is controlled according to the air pressure value sensed by the pressure sensor.

According to one embodiment of the present invention, the transport carrier further includes a particle sensor disposed in the hollow cavity and coupled to the control module for sensing the hollow cavity interior. The concentration of one of the particles contained in the airflow is generated by the control module when the concentration of the particle sensed by the particle sensor exceeds a predetermined value.

According to one embodiment of the present invention, the transporting carrier further includes a screen structure disposed between the base and the airflow device set, wherein the particle concentration sensed by the particle sensor exceeds the pre-measurement When the value is set, the control module generates the prompt signal for replacing the filter structure.

According to one embodiment of the present invention, the pedestal is formed with a plurality of vent structures connected to the hollow chamber, and the airflow partially entering the hollow chamber is ejected through the plurality of vent structures to push up the A plate member is above the base.

According to one embodiment of the present invention, the pedestal is further formed with a plurality of flow path structures communicating with the hollow chamber, the plurality of flow path structures respectively guiding the other portion into the air flow chamber It is not ejected perpendicular to the direction of the plate member.

According to one embodiment of the present invention, the plurality of flow channel structures respectively include a concave cup structure and a flow guiding structure formed on the base and recessed toward the hollow chamber, the concave cup structure having a concave side wall having a venting opening communicating with the hollow chamber, the concave side wall being inclined with respect to an upper surface of the base, the flow guiding structure being disposed in the concave cup structure and having a flow guiding sidewall parallel to the sidewall of the concave cup and having a gap between the sidewall of the concave cup, and the other portion entering the hollow chamber is ejected through the gap in a direction not perpendicular to the upper surface .

According to one of the embodiments of the present invention, the gap is smaller than the aperture of each of the vent structures.

In accordance with one embodiment of the present invention, an open normal direction of the plurality of vent structures is substantially perpendicular to the plate member.

According to one embodiment of the invention, the particle sensor is disposed in the hollow chamber adjacent to the screen structure.

According to one of the embodiments of the present invention, the pressure sensor is disposed in the hollow chamber adjacent to the airflow device group.

According to one embodiment of the present invention, the airflow device set includes a first axial flow device and a second axial flow device, the first axial flow device includes a first axial body and a plurality of first blades, The first shaft has a first axis, and the plurality of first blades respectively protrude radially from the first shaft, and when the first shaft drives the plurality of first blades to rotate along a first direction The plurality of first blades generate a gas flow at a first pressure in a wind direction parallel to one of the first axes, and the second axial flow device is disposed between the first axial flow device and the base Included in the second shaft body and the plurality of second blades, the plurality of second blades respectively protrude radially from the second shaft body, and the first shaft body drives the plurality of first blades along the first When a steering is rotated, the second shaft drives the plurality of second blades to rotate the plurality of second blades along a second steering opposite to the first steering, so that the plurality of second blades are along the The wind direction sends the airflow at a second pressure, so that the airflow can enter the hollow chamber Wherein the second pressure is greater than the first pressure.

In accordance with one of the embodiments of the present invention, the second shaft has a second axis and the second axis is substantially aligned with the first axis.

According to one embodiment of the present invention, the airflow device group further includes a third axial flow device disposed between the base and the second axial flow device, the third axial flow device and the first axial axis. The flow devices have the same structural configuration.

In summary, the present invention utilizes a pressure sensor to sense the air pressure value of the airflow in the hollow chamber, and the control module controls the output power of the airflow device group according to the air pressure value sensed by the pressure sensor to achieve intelligent feedback control. The purpose of the airflow device group, whereby the transport vehicle can control the pressure of the airflow according to different environmental parameters (such as the size of the flat member), so that the transport carrier can be more flexibly applied to different environments, for example, transporting different sizes. The plate member maintains a stable distance between the plate member and the base having different sizes. In addition, the present invention further utilizes a particle sensor to sense the concentration of particles contained in the airflow in the hollow chamber. When the particle concentration sensed by the particle sensor exceeds a preset value, the control module generates a filter for replacement. The prompt signal of the network structure allows the user to replace the new filter structure according to the prompt signal, so that not only the cleanliness of the airflow can be maintained, but also the airflow pressure is gradually weakened due to excessive blockage of the filter structure, so that the plate member and the base may be generated. Collision or interference problems. The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the embodiments of the invention.

The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only directions referring to the additional drawings. Therefore, the directional terminology used is for the purpose of illustration and not limitation. Please refer to FIG. 1 to FIG. 3 . FIG. 1 is a schematic view showing the appearance of a transporting vehicle 1 according to an embodiment of the present invention. FIG. 2 is a schematic view showing the explosion of the transporting vehicle 1 according to an embodiment of the present invention, and FIG. 3 is an embodiment of the present invention. For example, a functional block diagram of the transport vehicle 1 is provided. The transporting vehicle 1 is configured to transport a plate member 2 and includes a base 10, a screen structure 11, an airflow device group 12, a pressure sensor 13, a control module 14, and a particle sensor 15. As shown in FIG. 1 and FIG. 2, a hollow chamber 101 is formed in the base 10, and the flat member 2 is placed above the base 10. The airflow device group 12 is disposed below the base 10 and coupled to the hollow chamber 101. For sending a gas stream F into the hollow chamber 101, the screen structure 11 is disposed between the base 10 and the airflow device group 12, and the pressure sensor 13 is disposed in the hollow chamber 101 near the airflow device group 12. The particle sensor 15 is disposed in the hollow chamber 101 near the screen structure 11. In addition, as shown in FIG. 3, the control module 14 is coupled to the airflow device group 12, the pressure sensor 13, and the particle sensor 15.

Please refer to FIG. 4, which is a cross-sectional view of the susceptor 10 according to the first embodiment of the present invention. A plurality of pore structures 103 communicating with the hollow chamber 101 and a plurality of flow channel structures 105 are formed on the base 10, and an opening normal direction of each of the pore structures 103 is substantially perpendicular to the plate member 2, and each of the flow channel structures 105 includes There is a concave cup structure 1050 and a flow guiding structure 1052. The concave cup structure 1050 is formed on the base 10 and is recessed toward the hollow chamber 101. The concave cup structure 1050 has a concave cup side wall 1054, and the concave cup side wall 1054 is formed with a communication. The venting opening 1058 of the hollow chamber 101 is inclined with respect to an upper surface of the base 10. The flow guiding structure 1052 is disposed in the concave cup structure 1050 and has a guiding side wall 1060. The guiding side wall 1060 is parallel to the concave surface. The cup sidewall 1054 has a gap G between the sidewall of the recessed cup 1054.

Further, please refer to FIG. 5, which is a schematic diagram showing the internal structure of the airflow device group 12 according to the first embodiment of the present invention. In this embodiment, the airflow device group 12 includes a first axial flow device 121 and a second axial flow device 123. The second axial flow device 123 is disposed between the first axial flow device 121 and the base 10, that is, In this embodiment, the screen structure 11 is disposed between the base 10 and the second axial flow device 123 of the airflow device group 12. The first axial flow device 121 includes a first shaft body 1210 and a plurality of first blades 1212. The first shaft body 1210 has a first axis X1, and the plurality of first blades 1212 respectively protrude radially from the first axis. The body 1210, that is, the plurality of first blades 1212 protrudes from the first shaft body 1210 in a radial direction of the first shaft body 1210, wherein the radial direction is perpendicular to the first axis X1. The second axial flow device 123 includes a second shaft body 1230 and a plurality of second fan blades 1232. The second axial flow device 123 is disposed in series with the first axial flow device 121, that is, the second shaft body 1230 has a second The axis X2 is assembled on the first axial flow device 121 in such a manner that the second axial flow device 123 is substantially aligned with the first axis X1 of the first axial flow device 121 during assembly. In addition, the plurality of second blades 1232 respectively protrude radially from the second shaft body 1230, that is, the plurality of second blades 1232 protrude from the second shaft body 1230 in a radial direction of the second shaft body 1230, wherein The radial direction is perpendicular to the second axis X2.

As shown in FIG. 1 to FIG. 5, when the control module 14 controls the first shaft body 1210 to drive the plurality of first blades 1212 to rotate along a first direction R1, the plurality of first blades 1212 can be parallel to One of the first axis X1 enters the wind direction Y to generate a flow F at a first pressure, and when the control module 14 controls the first shaft 1210 to drive the plurality of first blades 1212 to rotate along the first direction R1, the control mode The group 14 further controls the second axle body 1230 to drive the plurality of second blades 1232 to rotate the plurality of second blades 1232 in a direction opposite to the second steering R2 of the first steering R1. In other words, when the transport carrier 1 of the present invention is in operation, the steering of the second blade 1232 of the second axial flow device 123 is opposite to the steering of the first blade 1212 of the first axial flow device 121, that is, the airflow of the present invention. The device group 12 is a double reverse axial flow device group.

As described above, when the first shaft 1210 of the first axial flow device 121 drives the first blade 1212 to rotate along the first direction R1, the first blade 1212 can follow the wind direction Y parallel to the first axis X1. A gas flow F having the first pressure is generated, and the gas flow F having the first pressure is sent to the second axial flow device 123. Then, the airflow F enters the second axial flow device 123. At this time, the second shaft body 1230 of the second axial flow device 123 rotates the plurality of second blades 1232 along the second steering R2 opposite to the first steering R1 to make a plurality of The two blades 1232 can further feed the airflow F into the hollow chamber 101 at a second pressure in the wind direction Y. In this way, the second axial flow device 123 can pressurize the airflow F from the first axial flow device 121, that is, the second pressure is greater than the first pressure. In other words, in this embodiment, the transporting carrier 1 pressurizes the airflow F generated by the first axial flow device 121 by the second axial flow device 123 stacked on the first axial flow device 121 to pressurize Airflow F entering the hollow chamber 101.

The airflow F sent by the plurality of second blades 1232 at the second pressure enters the hollow chamber 101 via the screen structure 11, whereby the airflow F entering the hollow chamber 101 can be filtered by the screen structure 11 to achieve The efficacy of the clean airflow F is in accordance with the environmental specifications of the operating site of the transport vehicle 1 of the present invention. When the airflow F sent by the plurality of second blades 1232 at the second pressure enters the hollow chamber 101 via the screen structure 11, the partial airflow F1 is ejected through the plurality of pore structures 103 to generate a lifting force, and then push The lifting plate member 2 is above the base 10, and the other portion of the airflow F2 is ejected in a direction not perpendicular to the upper surface via the gap G of the plurality of flow channel structures 105. The plate member 2 is adjacent to the respective channel structures 105 due to the airflow F2. The air in the space between the base 10 and the base 10 is taken out in a direction not perpendicular to the plate member 2. According to the white effort law, the air flow F2 causes the pressure on the lower side of the plate member 2 to be smaller than the pressure on the upper side, thereby causing the plate member 2 The upper and lower sides create a pressure difference between the plate member 2 and the base member 10, so that the pressure difference caused by the airflow F2 to the plate member 2 can be balanced with the lift force provided by the airflow F1 to the plate member 2. In order to maintain a stable spacing between the plate member 2 and the base 10. In addition, in this embodiment, the gap G may be smaller than a hole diameter D of each of the air hole structures 103, whereby the flow rate of the air flow F2 flowing through the gap G is greater than the flow rate of the air flow F1 flowing through each of the air hole structures 103 to accelerate the above Balance process.

It is to be noted that, in the above process, the pressure sensor 13 disposed in the hollow chamber 101 near the airflow device group 12 continuously senses the air pressure value of the airflow F in the hollow chamber 101, and the control module 14 The output power of one of the airflow device groups 12 is controlled according to the air pressure value sensed by the pressure sensor 13. For example, when the air pressure value sensed by the pressure sensor 13 is gradually reduced, the control module 14 controls the airflow device group. 12, the output power is increased. When the pressure value sensed by the pressure sensor 13 is gradually increased, the control module 14 controls the airflow device group 12 to reduce the output power, thereby achieving energy saving and voltage stabilization effects. In addition, the user can also set the corresponding air pressure value according to various thicknesses of glass, so that various thicknesses of glass can be stably raised on the base 10 and maintain a stable distance from the base 10.

In addition, in the above process, the particle sensor 15 disposed in the hollow chamber 101 near the filter structure 11 continuously senses the concentration of one of the particles contained in the airflow F in the hollow chamber 101. When the concentration of the particles sensed by the particle sensor 15 exceeds a predetermined value, the control module 14 generates the prompt signal for replacing the filter structure 11, that is, when the transport carrier 1 is continuously used, the filter structure 11 is The dust accumulation is generated to weaken the filtering function, so that the concentration of the particles of the airflow F entering the hollow chamber 101 is increased, and the concentration of the particles sensed by the particle sensor 15 disposed in the hollow chamber 101 exceeds the preset value. The control module 14 can generate the prompt signal for replacing the filter structure 11 to remind the user to replace the filter structure 11 and maintain the particle concentration of the airflow F entering the hollow chamber 101 according to the field operation specification. Not only can the cleanliness of the airflow F be maintained, but also the problem that the pressure of the airflow F is gradually weakened due to excessive blockage of the mesh structure 11 can cause collision or interference between the flat member 2 and the base 10. In the present invention, a display device (for example, a display panel) may be disposed to display the prompt signal in a visualized interface, but the present invention is not limited thereto.

Please refer to FIG. 6 and FIG. 7. FIG. 6 is a schematic view showing the appearance of a transporting vehicle 1' according to a second embodiment of the present invention. FIG. 7 is a schematic view showing the internal structure of a flow device group 12' according to a second embodiment of the present invention. . Different from the foregoing embodiment, the airflow device group 12' further includes a third axial flow device 125 disposed between the base 10 and the second axial flow device 123 and including a third shaft body 1250 and a plurality of The third blade 1252, the third axial flow device 125 has the same structural configuration as the first axial flow device 121, and the third axial body 1250 has a third axis X3, the first axis X1, the second axis X2 and the third axis X3 Align with each other. Therefore, when the first shaft body 1210 drives the plurality of first blades 1212 to rotate along the first direction R1, the plurality of first blades 1212 generate the airflow F at the first pressure along the air inlet direction Y parallel to the first axis X1. At this time, the second shaft body 1230 drives the plurality of second blades 1232 to rotate the plurality of second blades 1232 along the second direction R2 opposite to the first direction R1, so that the plurality of second blades 1232 are in the wind direction Y. The airflow F is sent out at the second pressure, and the third shaft body 1250 drives the plurality of third blades 1252 to rotate the plurality of third blades 1252 along the first steering R1, so that the plurality of third blades 1252 are in the wind direction. Y sends the airflow F to the hollow chamber 101 via the screen structure 14 at a third pressure. In this embodiment, the third axial flow device 125 is a triple reverse axial flow device group and passes through the third axis. After the flow device 125 and the second axial flow device 123 are pressurized, the third pressure is greater than the second pressure, and the second pressure is greater than the first pressure. The components of the embodiment having the same reference numerals as in the above embodiments have the same structural design and function principle, and are not described herein for brevity.

Compared with the prior art, the present invention utilizes a pressure sensor to sense the air pressure value of the airflow in the hollow chamber, and the control module controls the output power of the airflow device group according to the air pressure value sensed by the pressure sensor to achieve intelligent feedback. The purpose of controlling the airflow device group, whereby the transport vehicle can control the pressure of the airflow according to different environmental parameters (such as the size of the flat member), so that the transport carrier can be more flexibly applied to different environments, for example, the transport is different. A slab member of a size maintains a stable distance from a slab member having a different size to the pedestal. In addition, the present invention further utilizes a particle sensor to sense the concentration of particles contained in the airflow in the hollow chamber. When the particle concentration sensed by the particle sensor exceeds a preset value, the control module generates a filter for replacement. The prompt signal of the network structure allows the user to replace the new filter structure according to the prompt signal, so that not only the cleanliness of the airflow can be maintained, but also the airflow pressure is gradually weakened due to excessive blockage of the filter structure, so that the plate member and the base may be generated. Collision or interference problems The system wind resistance is too large, causing excessive energy consumption in production. The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

1, 1'‧‧‧ transport vehicles
10‧‧‧ Pedestal
101‧‧‧ hollow room
103‧‧‧ vent structure
105‧‧‧Flow structure
1050‧‧‧ concave cup structure
1052‧‧‧Guide structure
1054‧‧‧ concave cup sidewall
1058‧‧‧ venting holes
1060‧‧‧ Diversion sidewall
11‧‧‧Filter structure
12, 12'‧‧‧Airflow device group
121‧‧‧First axial flow device
1210‧‧‧First Axis
1212‧‧‧First leaf
123‧‧‧Second axial flow device
1230‧‧‧Second axle
1232‧‧‧second leaf
125‧‧‧ Third axial flow device
1250‧‧‧third axle
1252‧‧‧third leaf
13‧‧‧ Pressure Sensor
14‧‧‧Control Module
15‧‧‧Particle sensor
2‧‧‧Table components
D‧‧‧ aperture
F, F1, F2‧‧‧ airflow
G‧‧‧ gap
R1‧‧‧ first turn
R2‧‧‧ second turn
X1‧‧‧first axis
X2‧‧‧second axis
X3‧‧‧ third axis
Y‧‧‧Into the wind direction

Fig. 1 is a schematic view showing the appearance of a transporting vehicle according to a first embodiment of the present invention. Fig. 2 is a schematic view showing the explosion of the transporting carrier of the first embodiment of the present invention. Figure 3 is a functional block diagram of a transport carrier according to a first embodiment of the present invention. Figure 4 is a cross-sectional view showing the susceptor of the first embodiment of the present invention. Fig. 5 is a schematic view showing the internal structure of a flow device group according to a first embodiment of the present invention. Figure 6 is a schematic view showing the appearance of a transporting carrier according to a second embodiment of the present invention. Figure 7 is a schematic view showing the internal structure of a flow device group according to a second embodiment of the present invention.

1‧‧‧Transportation vehicle

10‧‧‧ Pedestal

101‧‧‧ hollow room

103‧‧‧ vent structure

105‧‧‧Flow structure

11‧‧‧Filter structure

12‧‧‧Airflow device group

13‧‧‧ Pressure Sensor

15‧‧‧Particle sensor

Claims (13)

A transport carrier for transporting a flat member comprises: a base having a hollow chamber formed therein, the flat member being placed above the base; a flow device set disposed below the base And being coupled to the hollow chamber for feeding a gas flow into the hollow chamber; a pressure sensor disposed in the hollow chamber for sensing a gas pressure value of the gas flow in the hollow chamber And a control module coupled to the airflow device group and the pressure sensor, the control module controlling an output power of the airflow device group according to the air pressure value sensed by the pressure sensor. The transport vehicle of claim 1, further comprising: a particle sensor disposed in the hollow chamber and coupled to the control module for sensing the airflow in the hollow chamber The concentration of one of the particles is such that when the concentration of the particle sensed by the particle sensor exceeds a predetermined value, the control module generates a prompt signal. The transport vehicle of claim 2, further comprising: a screen structure disposed between the base and the airflow device set, wherein the particle concentration sensed by the particle sensor exceeds the pre-measurement When the value is set, the control module generates the prompt signal for replacing the filter structure. The transport vehicle of claim 1, wherein the base is formed with a plurality of vent structures connected to the hollow chamber, and the airflow partially entering the hollow chamber is ejected through the plurality of vent structures to push The plate member is raised above the base. The transport vehicle of claim 4, wherein the base is further formed with a plurality of flow path structures connected to the hollow chamber, the plurality of flow path structures respectively guiding another portion into the hollow chamber The gas stream is ejected in a direction that is not perpendicular to the plate member. The transport carrier of claim 5, wherein the plurality of flow path structures respectively comprise: a concave cup structure formed on the base and recessed toward the hollow chamber, the concave cup structure having a concave cup sidewall a sidewall of the concave cup is formed with a venting opening communicating with the hollow chamber, the concave sidewall is inclined with respect to an upper surface of the base; and a flow guiding structure disposed in the concave cup structure and having a a flow guiding sidewall, the flow guiding sidewall is parallel to the sidewall of the concave cup and has a gap between the sidewall of the concave cup, and the other portion of the flow entering the hollow chamber is ejected through the gap in a direction not perpendicular to the upper surface. The transport vehicle of claim 6, wherein the gap is smaller than the aperture of each of the vent structures. The transport carrier of claim 4, wherein an open normal direction of the plurality of vent structures is substantially perpendicular to the plate member. The transport vehicle of claim 3, wherein the particle sensor is disposed in the hollow chamber adjacent to the filter structure. The transport vehicle of claim 1, wherein the pressure sensor is disposed in the hollow chamber adjacent to the airflow device group. The transport vehicle of claim 1, wherein the airflow device set comprises: a first axial flow device comprising: a first axle body having a first axis; and a plurality of first fan blades And respectively protruding radially from the first shaft body, when the first shaft body drives the plurality of first blades to rotate along a first direction, the plurality of first blades are parallel to the first axis One of the air inlet directions generates a gas flow at a first pressure ; and a second axial flow device disposed between the first axial flow device and the base and includes: a second shaft body; and a plurality of a second blade that protrudes radially from the second shaft, respectively. When the first shaft drives the plurality of first blades to rotate along the first direction, the second shaft drives the plurality of The second blade rotates the plurality of second blades along a second steering opposite to the first steering, so that the plurality of second blades send the airflow at a second pressure along the air inlet direction to make the airflow The chamber can be accessed, wherein the second pressure is greater than the first pressure. The transport carrier of claim 11, wherein the second shaft has a second axis and the second axis is substantially aligned with the first axis. The transport vehicle of claim 11, wherein the airflow device set further comprises: a third axial flow device disposed between the base and the second axial flow device, the third axial flow device The first axial flow device has the same structural configuration.