TW201710687A - Interposer and vertical probe card assembly using the same - Google Patents

Interposer and vertical probe card assembly using the same Download PDF

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Publication number
TW201710687A
TW201710687A TW104129032A TW104129032A TW201710687A TW 201710687 A TW201710687 A TW 201710687A TW 104129032 A TW104129032 A TW 104129032A TW 104129032 A TW104129032 A TW 104129032A TW 201710687 A TW201710687 A TW 201710687A
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Taiwan
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circuit board
connecting device
interface connecting
probe card
vertical probe
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TW104129032A
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Chinese (zh)
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TWI593972B (en
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李逸隆
范宏光
蔡易琛
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旺矽科技股份有限公司
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Abstract

An interposer includes at least one guide board, a conductive casing, and a spring pin. The guide board has a through hole. The conductive casing is disposed at the through hole and has an accommodating space. The spring pin is disposed at the accommodating space and slidably contacts the conductive casing. The spring pin is hollow and has a wall thickness, and the wall thickness is 4-15 micrometers.

Description

介面連接裝置及應用其之垂直式探針卡組 裝 Interface connecting device and vertical probe card set using same Loading

本發明是有關於一種介面連接裝置及應用其之垂直式探針卡組裝。 The present invention relates to an interface connecting device and a vertical probe card assembly using the same.

第11圖為繪示一種習知之垂直式探針卡4的爆炸示意圖。垂直式探針卡4包含印刷電路板40、導電膠片41、下框板42、電連接板43、上框板44,以及探頭45等組件。導電膠片41電性連接印刷電路板40,下框板42經對位後鎖固在印刷電路板40,電連接板43電性連接導電膠片41,上框板44亦是經對位後鎖固在印刷電路板40,探頭45具有複數個直立式的探針,各探針可依待測物排列,以電性連接電連接板43。 Figure 11 is a schematic exploded view of a conventional vertical probe card 4. The vertical probe card 4 includes components such as a printed circuit board 40, a conductive film 41, a lower frame plate 42, an electrical connection plate 43, an upper frame plate 44, and a probe 45. The conductive film 41 is electrically connected to the printed circuit board 40. The lower frame plate 42 is locked to the printed circuit board 40 after being aligned, and the electrical connection plate 43 is electrically connected to the conductive film 41. The upper frame plate 44 is also locked after being aligned. In the printed circuit board 40, the probe 45 has a plurality of upright probes, and the probes are arranged according to the object to be tested to electrically connect the electrical connection plates 43.

然而,上述的導電膠片41的缺點即在於可壓縮量太小,容易一邊已接觸,但另一邊卻呈現翹曲狀態,故無法吸收介面間的距離差異。並且,若導電膠片41有部份損壞了,還必須將導電膠片41自垂直式探針卡4拆下,需更換新的導電膠片41。 另外,目前還有一種以習知的彈簧針(pogo pin)取代上述導電膠片41作為介面連接的裝置,然而使用彈簧針的缺點是,若彈簧針的兩端至少一端與金屬外殼焊接或熔接的話,會有容易變形以及無法使用在微小間距的缺點。 However, the above-mentioned conductive film 41 has a drawback in that the compressible amount is too small, it is easy to be contacted on one side, but the other side is in a warped state, so that the difference in the distance between the interfaces cannot be absorbed. Further, if the conductive film 41 is partially damaged, the conductive film 41 must be removed from the vertical probe card 4, and a new conductive film 41 needs to be replaced. In addition, there is also a conventional device for replacing the above-mentioned conductive film 41 as a interface by a conventional pogo pin. However, the disadvantage of using a pogo pin is that if at least one end of the spring pin is welded or welded to the metal case at least one end. There are disadvantages that are easily deformed and cannot be used in small pitches.

有鑑於此,本發明之一目的在於提出一種可解決上述問題的介面連接裝置。 In view of the above, it is an object of the present invention to provide an interface connecting device that can solve the above problems.

為了達到上述目的,依據本發明之一實施方式,一種介面連接裝置包含至少一導板、導電外殼以及彈簧針。導板具有穿孔。導電外殼設置於穿孔,並具有容置空間。彈簧針設置於容置空間,並與導電外殼可分離地滑動接觸。彈簧針呈中空狀並具有一壁厚,且此壁厚為4~15微米。 In order to achieve the above object, according to an embodiment of the present invention, an interface connecting device includes at least one guide plate, a conductive outer casing, and a pogo pin. The guide plate has perforations. The conductive outer casing is disposed on the perforation and has a receiving space. The pogo pin is disposed in the accommodating space and slidably contacts the conductive housing. The spring pin is hollow and has a wall thickness of 4 to 15 microns.

本發明另提出一種可解決上述問題的垂直式探針卡組裝。依據本發明之一實施方式,一種垂直式探針卡組裝包含電路板、空間轉換器以及上述的介面連接裝置。介面連接裝置設置於電路板與空間轉換器之間。彈簧針電性連接電路板與空間轉換器。 The present invention further provides a vertical probe card assembly that solves the above problems. In accordance with an embodiment of the present invention, a vertical probe card assembly includes a circuit board, a space transformer, and the above-described interface connection device. The interface connecting device is disposed between the circuit board and the space converter. The spring pin is electrically connected to the circuit board and the space converter.

本發明再提出一種可解決上述問題的垂直式探針卡組裝。依據本發明之一實施方式,一種垂直式探針卡組裝包含電路板、介面連接裝置以及固接元件。介面連接裝置可分離地連接於電路板。介面連接裝置包含至少一導板、導電外殼以及彈簧針。導板具有穿孔。導電外殼設置於穿孔,並具有容置空間。彈簧針設置於容置空間,並與導電外殼可分離地滑動接 觸。彈簧針呈中空狀並具有壁厚,且壁厚為4~15微米。固接元件設置於電路板,用以固接導板。導電外殼係可滑動地設置於穿孔,並具有抵靠部,用以抵靠導板面向電路板的表面。導電外殼具有開放端以及封閉端。彈簧針係穿出開放端以接觸電路板,並且彈簧針係壓縮於電路板與封閉端之間。 The present invention further proposes a vertical probe card assembly that can solve the above problems. In accordance with an embodiment of the present invention, a vertical probe card assembly includes a circuit board, an interface connection device, and a securing member. The interface connection device is detachably coupled to the circuit board. The interface connecting device includes at least one guide plate, a conductive outer casing, and a pogo pin. The guide plate has perforations. The conductive outer casing is disposed on the perforation and has a receiving space. The pogo pin is disposed in the accommodating space and slidably connected to the conductive housing touch. The spring pin is hollow and has a wall thickness and a wall thickness of 4 to 15 microns. The fixing component is disposed on the circuit board for fixing the guide plate. The conductive outer casing is slidably disposed on the through hole and has an abutting portion for abutting against a surface of the guide plate facing the circuit board. The electrically conductive outer casing has an open end and a closed end. The spring pin is threaded out of the open end to contact the circuit board, and the spring pin is compressed between the circuit board and the closed end.

1‧‧‧垂直式探針卡組裝 1‧‧‧Vertical probe card assembly

10‧‧‧電路板 10‧‧‧ boards

12‧‧‧空間轉換器 12‧‧‧ Space Converter

14、34‧‧‧介面連接裝置 14, 34‧‧‧Interface connection device

140‧‧‧導板 140‧‧‧ Guide

140a‧‧‧穿孔 140a‧‧‧Perforation

142、342‧‧‧導電外殼 142, 342‧‧‧ Conductive housing

144‧‧‧彈簧針 144‧‧ ‧ spring needle

144a‧‧‧管體 144a‧‧‧ tube body

144a1‧‧‧彈簧結構 144a1‧‧‧Spring structure

144a2‧‧‧接觸端 144a2‧‧‧Contact end

144a3‧‧‧簧片結構 144a3‧‧‧Reed structure

144b‧‧‧第一鏤空部 144b‧‧‧The first time

342b‧‧‧封閉端 342b‧‧‧closed end

342b1‧‧‧接觸端點 342b1‧‧‧Contact endpoint

342c‧‧‧抵靠部 342c‧‧‧Abutment

36‧‧‧固接元件 36‧‧‧Fixed components

C‧‧‧中心軸 C‧‧‧ center axis

E‧‧‧斜端面 E‧‧‧ oblique end face

P‧‧‧接觸端點 P‧‧‧Contact endpoint

S‧‧‧容置空間 S‧‧‧ accommodating space

G‧‧‧間隙 G‧‧‧ gap

4‧‧‧垂直式探針卡 4‧‧‧Vertical probe card

40‧‧‧印刷電路板 40‧‧‧Printed circuit board

41‧‧‧導電膠片 41‧‧‧Conductive film

42‧‧‧下框板 42‧‧‧ lower frame

144c‧‧‧第二鏤空部 144c‧‧‧Second Air Force

15‧‧‧探針頭 15‧‧‧Probe head

16‧‧‧探針 16‧‧‧ probe

342a‧‧‧開放端 342a‧‧‧Open end

43‧‧‧電連接板 43‧‧‧Electrical connection plate

44‧‧‧上框板 44‧‧‧Upper board

45‧‧‧探頭 45‧‧‧ Probe

為讓本發明之上述和其他目的、特徵、優點與實施方式能更明顯易懂,所附圖式之說明如下:第1圖為繪示本發明一實施方式之垂直式探針卡組裝的示意圖。 The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; .

第2圖為繪示本發明一實施方式之垂直式探針卡組裝的局部剖視圖。 2 is a partial cross-sectional view showing the assembly of a vertical probe card according to an embodiment of the present invention.

第3A圖為繪示本發明一實施方式之導電外殼與彈簧針的組合圖。 FIG. 3A is a combination diagram of a conductive outer casing and a pogo pin according to an embodiment of the present invention.

第3B圖為繪示第3A圖中之導電外殼與彈簧針的爆炸圖。 Fig. 3B is an exploded view showing the conductive case and the pogo pin in Fig. 3A.

第4圖為繪示本發明一實施方式之彈簧針的局部立體圖。 Fig. 4 is a partial perspective view showing a pogo pin according to an embodiment of the present invention.

第5圖為繪示第4圖中之彈簧針於導電外殼中的剖視圖。 Figure 5 is a cross-sectional view showing the pogo pin of Figure 4 in a conductive housing.

第6圖為繪示本發明另一實施方式之彈簧針的局部立體圖。 Fig. 6 is a partial perspective view showing a pogo pin according to another embodiment of the present invention.

第7圖為繪示第6圖中之彈簧針於導電外殼中的剖視圖。 Figure 7 is a cross-sectional view showing the pogo pin of Figure 6 in a conductive housing.

第8圖為繪示本發明再一實施方式之彈簧針的局部立體圖。 Fig. 8 is a partial perspective view showing a pogo pin according to still another embodiment of the present invention.

第9圖為繪示本發明另一實施方式之垂直式探針卡組裝的局部剖視圖。 Figure 9 is a partial cross-sectional view showing the assembly of a vertical probe card according to another embodiment of the present invention.

第10圖為繪示本發明再一實施方式之垂直式探針卡組裝的局部剖視圖。 Figure 10 is a partial cross-sectional view showing the assembly of a vertical probe card according to still another embodiment of the present invention.

第11圖為繪示一種習知之垂直式探針卡的爆炸示意圖。 Figure 11 is a schematic exploded view of a conventional vertical probe card.

以下將以圖式揭露本發明之複數個實施方式,為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,應瞭解到,這些實務上的細節不應用以限制本發明。也就是說,在本發明部分實施方式中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。 The embodiments of the present invention are disclosed in the following drawings, and the details of However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.

請參照第1圖以及第2圖。第1圖為繪示本發明一實施方式之垂直式探針卡組裝1的示意圖。第2圖為繪示本發明一實施方式之垂直式探針卡組裝1的局部剖視圖。 Please refer to Figure 1 and Figure 2. FIG. 1 is a schematic view showing a vertical probe card assembly 1 according to an embodiment of the present invention. Fig. 2 is a partial cross-sectional view showing the vertical probe card assembly 1 according to an embodiment of the present invention.

如第1圖與第2圖所示,於本實施方式中,垂直式探針卡組裝1包含電路板10、空間轉換器(space transformer)12以及介面連接裝置14。在此要說明的是,進一步,垂直式探針卡組裝1包含複數個探針16,這些探針16可以是一種藉由 線材經機械沖壓成形所產生的成形針、或是一種垂直挫屈針(vertical bucking probe)、或是一種彈簧針(pogo pin)或是一種藉由微機電(micro electro mechanical systems;MEMS)製程所產生的微機電探針(MEMS probe)等任何形式的探針,不應用以限制本發明。此外,這些探針16進一步亦可藉由一探針頭(probe head)15加以固定之,探針頭15為所屬技術領域中的習知技藝,在此容不贅述,亦不應用以限制本發明。介面連接裝置14設置於電路板10與空間轉換器12之間。介面連接裝置14包含複數個彈簧針144。彈簧針144用以直接電性連接電路板10與空間轉換器12。探針16設置於空間轉換器12相對於介面連接裝置14的另一側,而空間轉換器12用以使這些彈簧針144分別間接電性連接至這些探針16。因此,垂直式探針卡組裝1可藉由空間轉換器12來符合這些探針16對應待測物(device under test,DUT)上對應的電性接點的設置,進而可使這些探針16直接電性連接待測物上對應的電性接點。 As shown in FIGS. 1 and 2, in the present embodiment, the vertical probe card assembly 1 includes a circuit board 10, a space transformer 12, and a interface connecting device 14. It is to be noted that, further, the vertical probe card assembly 1 includes a plurality of probes 16, which may be one type A forming needle produced by mechanical stamping of a wire, or a vertical bucking probe, or a pogo pin or a micro electro mechanical systems (MEMS) process. Any form of probe such as a MEMS probe produced is not intended to limit the invention. In addition, the probes 16 can be further fixed by a probe head 15. The probe head 15 is a well-known art in the art, and is not described here, nor is it intended to limit the present. invention. The interface connecting device 14 is disposed between the circuit board 10 and the space converter 12. The interface connection device 14 includes a plurality of pogo pins 144. The spring pin 144 is used to directly electrically connect the circuit board 10 and the space converter 12. The probe 16 is disposed on the other side of the space transformer 12 with respect to the interface connecting device 14, and the space transformer 12 is used to electrically connect the spring pins 144 to the probes 16, respectively. Therefore, the vertical probe card assembly 1 can be adapted to the corresponding electrical contacts of the probes 16 corresponding to the device under test (DUT) by the space converter 12, thereby enabling the probes 16 to be Directly electrically connecting the corresponding electrical contacts on the object to be tested.

請參照第3A圖以及第3B圖。第3A圖為繪示本發明一實施方式之導電外殼142與彈簧針144的組合圖。第3B圖為繪示第3A圖中之導電外殼142與彈簧針144的爆炸圖。 Please refer to Figure 3A and Figure 3B. FIG. 3A is a combination diagram of the conductive housing 142 and the pogo pin 144 according to an embodiment of the present invention. FIG. 3B is an exploded view showing the conductive housing 142 and the pogo pin 144 in FIG. 3A.

如第3A圖與第3B圖所示,並請配合參照第2圖,於本實施方式中,介面連接裝置14還包含導板140以及複數個導電外殼142(第2圖僅繪示一個作為示例)。導板140具有複數個穿孔140a(第2圖僅繪示一個作為示例)。每一導電外殼142設置於對應的穿孔140a,並具有容置空間S。每一彈簧針144設置於對應之導電外殼142的容置空間S,並與導電外殼142可 分離地滑動接觸(即兩者不相互固定)。彈簧針144用以接觸電路板10與空間轉換器12,此外,在不受力的狀態(即自由狀態)下導電外殼142的長度小於彈簧針144的長度。也就是說,在不受力的狀態(即自由狀態)下彈簧針144之總長係大於導電外殼142之總長。特別來說,彈簧針144呈中空狀並具有一壁厚,且此壁厚為4~15微米。壁厚設置為4~15微米的好處為在於微小間距(Fine Pitch)下仍可以保有足夠地機械承載力。此外,本實施方式採用使導電外殼142與彈簧針144不相互固定的作法,不僅可減少一道固定製程,例如:焊接、熔接製程的組裝成本,相較於習知的彈簧針需要利用焊接或熔接等製程將兩者相互固定的實施樣態,還可解決習知的彈簧針容易變形以及不能達到微小間距的缺點。 As shown in FIG. 3A and FIG. 3B , and referring to FIG. 2 , in the present embodiment, the interface connecting device 14 further includes a guiding plate 140 and a plurality of conductive outer casings 142 (only one example is shown in FIG. 2 as an example). ). The guide plate 140 has a plurality of perforations 140a (the second figure shows only one as an example). Each of the conductive outer casings 142 is disposed on the corresponding through hole 140a and has an accommodation space S. Each of the pogo pins 144 is disposed in the receiving space S of the corresponding conductive housing 142, and is electrically connected to the conductive housing 142. Sliding contact separately (ie, the two are not fixed to each other). The pogo pin 144 is for contacting the circuit board 10 and the space transformer 12, and further, the length of the conductive housing 142 is less than the length of the pogo pin 144 in an unstressed state (ie, a free state). That is, the total length of the pogo pins 144 is greater than the total length of the conductive outer casing 142 in the unstressed state (i.e., the free state). In particular, the pogo pin 144 is hollow and has a wall thickness of 4 to 15 microns. The advantage of setting the wall thickness to 4 to 15 microns is that sufficient mechanical load can be maintained at the Fine Pitch. In addition, the embodiment adopts the method that the conductive outer casing 142 and the spring pin 144 are not fixed to each other, and the fixing process can be reduced, for example, the assembly cost of the welding and welding process, and the welding or welding is required compared with the conventional spring pin. The process of fixing the two to each other can also solve the disadvantage that the conventional spring pin is easily deformed and the small pitch cannot be achieved.

具體來說,彈簧針144包含管體144a。管體144a具有第一鏤空部144b。第一鏤空部144b螺旋環繞管體144a的中心軸C而形成於管體144a上。並且,在中心軸C的方向上,管體144a位於第一鏤空部144b兩端之間的部分形成可壓縮的彈簧結構144a1。此彈簧結構144a1可提供彈簧針144壓縮行程與彈簧力。此外,管體144a還具有兩接觸端144a2,分別用以電性連接電路板10與空間轉換器12。於本實施方式中,每一接觸端144a2具有兩接觸端點P,但本發明並不以此為限。 Specifically, the pogo pin 144 includes a tube body 144a. The tube body 144a has a first hollow portion 144b. The first hollow portion 144b is spirally formed around the central axis C of the pipe body 144a on the pipe body 144a. Also, in the direction of the central axis C, the portion of the tube body 144a located between both ends of the first hollow portion 144b forms a compressible spring structure 144a1. This spring structure 144a1 can provide a spring pin 144 compression stroke and spring force. In addition, the tube body 144a further has two contact ends 144a2 for electrically connecting the circuit board 10 and the space converter 12, respectively. In the present embodiment, each contact end 144a2 has two contact end points P, but the invention is not limited thereto.

當然地,本發明之介面連接裝置14,亦可用以電性連接兩電路板,不應用以限制本發明。 Of course, the interface connecting device 14 of the present invention can also be used to electrically connect two circuit boards, and is not used to limit the present invention.

於本發明的一個或多個實施方式中,上述的彈簧結構144a1為雷射加工結構。也就是說,管體144a與第一鏤空 部144b可藉由雷射加工製程而同時被製作完成,且彈簧結構144a1為管體144a在雷射加工,例如:雷射曝光或雷射雕刻等製程後具有可壓縮能力的部位。由此可知,相較於習知將針尖與針尾分別固定至彈簧兩端來製作彈簧針的複雜作法,本發明的彈簧針144不僅在結構顯得相對簡單,且僅需一道工即可同時製作出彈簧針144的兩接觸端144a2(即針尖、針尾)與彈簧結構144a1,因此,彈簧結構144a1本身並無其他的接觸接點。另外,需留意的是,彈簧結構144a1其截面形狀呈矩形(可參照第2圖),本發明的介面連接裝置14,由於需要長期處於壓縮狀態,故選用截面形狀呈矩形的彈簧針144,相較於截面形狀呈圓形的習知的彈簧針來說,截面形狀呈矩形的彈簧結構144a1可儲存更多能量,且耐久壽命亦更長於截面形狀呈圓形的習知的彈簧針。 In one or more embodiments of the present invention, the spring structure 144a1 is a laser processing structure. That is, the tube body 144a and the first hollow The portion 144b can be simultaneously fabricated by a laser processing process, and the spring structure 144a1 is a portion of the tube body 144a that has compressibility after laser processing, such as laser exposure or laser engraving. Therefore, it can be seen that the spring pin 144 of the present invention is not only relatively simple in structure but also requires only one work at the same time, compared with the conventional practice of fixing the needle tip and the needle tail to the two ends of the spring respectively to make the spring pin. The two contact ends 144a2 (i.e., the needle tip, the needle tail) of the spring pin 144 are coupled to the spring structure 144a1. Therefore, the spring structure 144a1 itself has no other contact points. In addition, it should be noted that the spring structure 144a1 has a rectangular cross-sectional shape (refer to FIG. 2). Since the interface connecting device 14 of the present invention needs to be in a compressed state for a long time, a spring pin 144 having a rectangular cross-sectional shape is selected. Compared with the conventional spring pin having a circular cross-sectional shape, the spring structure 144a1 having a rectangular cross-sectional shape can store more energy, and the durability life is longer than that of the conventional spring pin having a circular cross-sectional shape.

根據以上結構配置,當彈簧針144在電路板10與空間轉換器12之間傳遞電訊號時,由於彈簧針144與導電外殼142為可分離地滑動接觸,故不需要焊接或熔接,因此電訊號可直接走導電外殼142,可避免完全走較長的彈簧結構144a1的螺旋路徑,因此不僅可縮短電路傳導路徑,還可避免電訊號太大造成彈簧結構144a1的毀損,例如:燒毀,因此本發明的介面連接裝置14具有高耐電流的功效;此外,還可以避免如習知的彈簧探針般使用純螺旋結構之電感特性亦會影響電訊號傳遞頻寬。 According to the above configuration, when the pogo pin 144 transmits an electric signal between the circuit board 10 and the space converter 12, since the pogo pin 144 is slidably contacted with the conductive outer casing 142, welding or welding is not required, so the electric signal is The conductive outer casing 142 can be directly removed, so that the spiral path of the long spring structure 144a1 can be avoided, thereby not only shortening the circuit conduction path, but also avoiding the damage of the spring structure 144a1 caused by the excessive electrical signal, for example, burning, so the present invention The interface connection device 14 has a high current withstand capability; in addition, the inductance characteristics of the pure spiral structure as in the conventional spring probe can be prevented from affecting the electrical signal transmission bandwidth.

於本發明的一個或多個實施方式中,位於管體144a的至少一接觸端144a2的接觸端點P數量為兩個,且這些 接觸端點P排列呈冠狀(crown)。然而,於實際應用中,接觸端144a2的接觸端點P數量並不以此為限,可依據實際需求而彈性地改變。 In one or more embodiments of the present invention, the number of contact end points P at the at least one contact end 144a2 of the tube body 144a is two, and these The contact end points P are arranged in a crown. However, in practical applications, the number of contact terminals P of the contact end 144a2 is not limited thereto, and may be elastically changed according to actual needs.

於本發明的一個或多個實施方式中,導板140數量可為複數。舉例來說,介面連接裝置14可包含複數個導板140疊合在一起,且各導板140上的穿孔140a係互相對位,以供對應之導電外殼142設置。 In one or more embodiments of the present invention, the number of the guide plates 140 may be plural. For example, the interface connecting device 14 may include a plurality of guide plates 140 stacked together, and the through holes 140a on the respective guide plates 140 are aligned with each other for the corresponding conductive outer casing 142.

請參照第4圖以及第5圖。第4圖為繪示本發明一實施方式之彈簧針144的局部立體圖。第5圖為繪示第4圖中之彈簧針144於導電外殼142中的剖視圖。 Please refer to Figure 4 and Figure 5. Fig. 4 is a partial perspective view showing a pogo pin 144 according to an embodiment of the present invention. FIG. 5 is a cross-sectional view showing the pogo pin 144 of FIG. 4 in the conductive housing 142.

如第4圖與第5圖所示,於本實施方式中,彈簧針144的管體144a的至少一接觸端144a2具有斜端面E。斜端面E係由管體144a的中心軸C的一側傾斜至另一側。並且,在中心軸C的方向上,接觸端點P係位於斜端面E上最遠離第一鏤空部144b(可參照第3B圖)之處。換句話說,接觸端點P相對於管體144a的中心軸C來說是偏心設置。因此,由第5圖可以清楚得知,當彈簧針144以接觸端144a2接觸電路板10或空間轉換器12時,例如:接觸端144a2沿著第5圖中之空心箭頭的方向受力,彈簧針144會因受力不均而側向抵靠導電外殼142的內壁,進而可使彈簧針144與導電外殼142之間更確實地電性接觸,使得電訊號可直接走導電外殼142,亦可以改變及縮短電路傳導路徑。 As shown in FIGS. 4 and 5, in the present embodiment, at least one contact end 144a2 of the tubular body 144a of the pogo pin 144 has an inclined end surface E. The inclined end face E is inclined from one side of the central axis C of the pipe body 144a to the other side. Further, in the direction of the central axis C, the contact end point P is located on the oblique end surface E farthest from the first hollow portion 144b (see Fig. 3B). In other words, the contact end point P is eccentrically disposed with respect to the central axis C of the tube body 144a. Therefore, as is clear from FIG. 5, when the pogo pin 144 contacts the circuit board 10 or the space transformer 12 with the contact end 144a2, for example, the contact end 144a2 is forced along the direction of the hollow arrow in FIG. 5, the spring The needle 144 is laterally abutted against the inner wall of the conductive outer casing 142 due to uneven force, so that the spring pin 144 and the conductive outer casing 142 can be more reliably electrically contacted, so that the electric signal can directly go to the conductive outer casing 142. The circuit conduction path can be changed and shortened.

請參照第6圖以及第7圖。第6圖為繪示本發明另一實施方式之彈簧針144的局部立體圖。第7圖為繪示第6圖中之彈簧針144於導電外殼142中的剖視圖。 Please refer to Figure 6 and Figure 7. Fig. 6 is a partial perspective view showing a pogo pin 144 according to another embodiment of the present invention. FIG. 7 is a cross-sectional view showing the pogo pin 144 of FIG. 6 in the conductive housing 142.

如第6圖與第7圖所示,於本實施方式中,彈簧針144的管體144a還具有第二鏤空部144c。彈簧針144還包含簧片結構144a3位於第二鏤空部144c並連接管體144a。簧片結構144a3係延伸遠離管體144a的中心軸C,且於置入於導電外殼142中時,簧片結構144a3可以抵接導電外殼142的內壁。藉由簧片結構144a3的設計,同樣可使彈簧針144與導電外殼142之間更確實地電性接觸,使得電訊號可直接走導電外殼142,亦可以改變及縮短電路傳導路徑。當然地,此簧片結構144a3可以分別設置於彈簧針144的兩接觸端144a2(即針尖、針尾)上,或擇一設置皆可,本發明並不以此為限。 As shown in FIGS. 6 and 7, in the present embodiment, the tubular body 144a of the pogo pin 144 further has a second hollow portion 144c. The pogo pin 144 further includes a reed structure 144a3 located at the second hollow portion 144c and connected to the tube body 144a. The reed structure 144a3 extends away from the central axis C of the tubular body 144a, and the reed structure 144a3 can abut the inner wall of the electrically conductive outer casing 142 when placed in the electrically conductive outer casing 142. By the design of the reed structure 144a3, the spring pin 144 and the conductive outer casing 142 can also be electrically contacted more reliably, so that the electric signal can directly go through the conductive outer casing 142, and the circuit conduction path can be changed and shortened. Of course, the reed structure 144a3 can be disposed on the two contact ends 144a2 (ie, the needle tip, the needle tail) of the pogo pin 144, or alternatively, the invention is not limited thereto.

請參照第8圖,其為繪示本發明再一實施方式之彈簧針144的局部立體圖。如第8圖所示,本實施方式的彈簧針144相較於第6圖所示之實施方式的彈簧針144的差異,在於第6圖所示之彈簧針144的簧片結構144a3係實質上係延伸遠離管體144a的中心軸C,而本實施方式的彈簧針144係實質上沿著環繞管體144a的中心軸C的方向延伸。需說明的是,本發明之簧片結構可根據實際需求,設計形狀、方向與設置處,只要該簧片結構係用來與導電外殼電性接觸即可,並不以上述之第6圖與第8圖之簧片結構144a3為限。需留意的是,彈簧結構144a1與簧片結構144a3係為相同材料且經過一次性加工而同時形成,例如:雷射曝光或雷射雕刻等製程。如此一來,可以 減少額外接觸接點的施作,因為若有額外接觸接點的話,該額外接觸接點的電阻值會被提高。 Please refer to FIG. 8 , which is a partial perspective view of a pogo pin 144 according to still another embodiment of the present invention. As shown in Fig. 8, the difference between the pogo pin 144 of the present embodiment and the pogo pin 144 of the embodiment shown in Fig. 6 is that the reed structure 144a3 of the pogo pin 144 shown in Fig. 6 is substantially The spring pin 144 of the present embodiment extends substantially away from the central axis C of the tubular body 144a. It should be noted that the reed structure of the present invention can be designed according to actual needs, shape, direction and arrangement, as long as the reed structure is used for electrical contact with the conductive outer casing, and is not in the above-mentioned FIG. The reed structure 144a3 of Fig. 8 is limited. It should be noted that the spring structure 144a1 and the reed structure 144a3 are made of the same material and are simultaneously formed by one-time processing, for example, laser exposure or laser engraving. In this way, you can Reduce the application of additional contact contacts, because if there are additional contact contacts, the resistance of the additional contact contacts will be increased.

於本發明的一個或多個實施方式中,介面連接裝置14可進一步包含高導電薄膜塗層(圖未示),此高導電薄膜塗層可藉由已知表面處理技術塗佈於導電外殼142的內壁、導電外殼142的外殼以及彈簧針144的表面,藉以降低導電外殼142與彈簧針144接觸時的電阻值,並可避免導電外殼142與彈簧針144氧化。 In one or more embodiments of the present invention, the interface connecting device 14 may further comprise a highly conductive thin film coating (not shown) that may be applied to the conductive housing 142 by known surface treatment techniques. The inner wall, the outer casing of the conductive outer casing 142, and the surface of the pogo pin 144 are used to reduce the resistance value of the conductive outer casing 142 in contact with the pogo pin 144, and to prevent oxidation of the electrically conductive outer casing 142 and the pogo pin 144.

請參照第9圖,其為繪示本發明另一實施方式之垂直式探針卡組裝1的局部剖視圖。如第9圖所示,於本實施方式中,垂直式探針卡組裝1同樣包含電路板10、空間轉換器12、介面連接裝置34以及複數個探針16(配合參照第1圖與第2圖)。本實施方式的垂直式探針卡組裝1相較於第2圖所示之實施方式的垂直式探針卡組裝1的差異,在於本實施方式係針對介面連接裝置34的導電外殼342進行改良。 Please refer to FIG. 9 , which is a partial cross-sectional view showing the vertical probe card assembly 1 according to another embodiment of the present invention. As shown in FIG. 9, in the present embodiment, the vertical probe card assembly 1 also includes the circuit board 10, the space converter 12, the interface connecting device 34, and a plurality of probes 16 (refer to FIG. 1 and FIG. 2 in cooperation). Figure). The difference between the vertical probe card assembly 1 of the present embodiment and the vertical probe card assembly 1 of the embodiment shown in FIG. 2 is that the conductive housing 342 of the interface connection device 34 is improved in the present embodiment.

具體來說,本實施方式的導電外殼342具有開放端342a以及封閉端342b。彈簧針144的一接觸端144a2係穿出導電外殼342的開放端342a以接觸電路板10,且彈簧針144的另一接觸端144a2係經由導電外殼342的封閉端342b以電性連接空間轉換器12。進一步來說,本實施方式的垂直式探針卡組裝1還包含固接元件36。固接元件36設置於電路板10,用以固接介面連接裝置34的導板140。導電外殼342係可滑動地設置於導板140的穿孔140a,並具有抵靠部342c。導電外殼342的抵靠部342c係用以抵靠導板140面向電路板10的一表面。彈簧 針144係壓縮於電路板10與導電外殼342的封閉端342b之間。當導電外殼342的抵靠部342c抵靠導板140面向電路板10的表面時,導電外殼342的封閉端342b突出於穿孔140a外,因此可與空間轉換器12接觸,而彈簧針144的一接觸端144a2即可隔著封閉端342b電性連接空間轉換器12。 Specifically, the conductive outer casing 342 of the present embodiment has an open end 342a and a closed end 342b. A contact end 144a2 of the spring pin 144 passes through the open end 342a of the conductive housing 342 to contact the circuit board 10, and the other contact end 144a2 of the spring pin 144 is electrically connected to the space converter via the closed end 342b of the conductive housing 342. 12. Further, the vertical probe card assembly 1 of the present embodiment further includes a fixing member 36. The fixing component 36 is disposed on the circuit board 10 for fixing the guide 140 of the interface connecting device 34. The conductive outer casing 342 is slidably disposed on the through hole 140a of the guide plate 140 and has an abutting portion 342c. The abutting portion 342c of the conductive outer casing 342 is for abutting against a surface of the circuit board 10 against the guide plate 140. spring The pin 144 is compressed between the circuit board 10 and the closed end 342b of the conductive housing 342. When the abutting portion 342c of the conductive outer casing 342 abuts against the surface of the guide plate 140 facing the circuit board 10, the closed end 342b of the conductive outer casing 342 protrudes beyond the through hole 140a, and thus can be in contact with the space transformer 12, and one of the spring pins 144 The contact end 144a2 can be electrically connected to the space transformer 12 via the closed end 342b.

根據上述結構配置,即可在導板140與電路板10之間形成一間隙G,且當導電外殼342的封閉端342b接觸到空間轉換器12時,導電外殼342以及彈簧針144位於封閉端342b的另一接觸端144a2可同時被推擠而往上述間隙G移動。此外,由於導電外殼342可相對導板140滑動,並非相互固定,因此可更方便地拆裝介面連接裝置34內的各部元件。舉例來說,在拆卸時,只要將介面連接裝置34由固接元件36拆卸下來,介面連接裝置34的導板140、導電外殼342與彈簧針144三者就可輕易地分離,有利於維修人員進行元件的維修或更換。需特別說明的是,本發明中所指的封閉端,可以是指完全封閉的封閉端(請參照第9圖),或者,也可以是指不完全封閉的封閉端,也就是說,只要可阻止對應的彈簧針穿出的封閉端即為本發明所指的封閉端。 According to the above configuration, a gap G can be formed between the guide 140 and the circuit board 10, and when the closed end 342b of the conductive housing 342 contacts the space transformer 12, the conductive housing 342 and the pogo pin 144 are located at the closed end 342b. The other contact end 144a2 can be pushed simultaneously to move toward the gap G described above. In addition, since the conductive outer casing 342 can slide relative to the guide plate 140 and is not fixed to each other, it is possible to more easily disassemble the various components in the interface connecting device 34. For example, when disassembling, the interface connecting device 34 is detached from the fixing component 36, and the guiding plate 140, the conductive outer casing 342 and the spring pin 144 of the interface connecting device 34 can be easily separated, which is beneficial to the maintenance personnel. Repair or replace components. It should be particularly noted that the closed end referred to in the present invention may refer to a closed end that is completely closed (please refer to FIG. 9), or may also refer to a closed end that is not completely closed, that is, as long as The closed end that prevents the corresponding spring pin from penetrating is the closed end referred to in the present invention.

於實際應用中,固接元件36可為任何一種可與電路板10相互固接的元件,例如:螺絲、螺栓或墊片等,但本發明並不以此為限。 In practical applications, the fastening component 36 can be any component that can be fixed to the circuit board 10, such as a screw, a bolt or a gasket, but the invention is not limited thereto.

於另一實施方式中,亦可將固接元件36設置於空間轉換器12,並將第9圖中之介面連接裝置34上下倒置。亦即,於本實施方式中,彈簧針144的一接觸端144a2係穿出導 電外殼342的開放端342a以接觸空間轉換器12,且彈簧針144的另一接觸端144a2係經由導電外殼342的封閉端342b以電性連接電路板10,同樣可達到利用介面連接裝置34電性連接電路板10與空間轉換器12的目的。 In another embodiment, the fastening element 36 can also be placed in the space transformer 12, and the interface connecting device 34 in FIG. 9 can be placed upside down. That is, in the present embodiment, a contact end 144a2 of the pogo pin 144 is threaded out. The open end 342a of the electrical housing 342 contacts the space transformer 12, and the other contact end 144a2 of the spring pin 144 is electrically connected to the circuit board 10 via the closed end 342b of the conductive housing 342, and the same can be achieved by using the interface connecting device 34. The purpose of connecting the circuit board 10 to the space converter 12 is sexually connected.

當然地,本發明之介面連接裝置34,亦可用以電性連接兩電路板,不應用以限制本發明。 Of course, the interface connecting device 34 of the present invention can also be used to electrically connect two circuit boards, and is not used to limit the present invention.

請參照第10圖,其為繪示本發明再一實施方式之垂直式探針卡組裝1的局部剖視圖。如第10圖所示,本實施方式的垂直式探針卡組裝1相較於第9圖所示之實施方式的垂直式探針卡組裝1的差異,在於本實施方式的導電外殼342的封閉端342b的外側進一步包含複數個接觸端點342b1,用以與空間轉換器12電性接觸。於本實施方式中,這些接觸端點342b1呈冠狀,但本發明並不以此為限。當然同樣地,於另一實施方式中,亦可將第10圖中之介面連接裝置34上下倒置,亦即,導電外殼342的封閉端342b的外側進一步包含複數個接觸端點342b1,用以與電路板10電性接觸。 Please refer to FIG. 10, which is a partial cross-sectional view showing the vertical probe card assembly 1 according to still another embodiment of the present invention. As shown in FIG. 10, the difference between the vertical probe card assembly 1 of the present embodiment and the vertical probe card assembly 1 of the embodiment shown in FIG. 9 is that the conductive outer casing 342 of the present embodiment is closed. The outer side of the end 342b further includes a plurality of contact terminals 342b1 for electrically contacting the space transformer 12. In the present embodiment, the contact end points 342b1 are crowned, but the invention is not limited thereto. Of course, in another embodiment, the interface connecting device 34 in FIG. 10 can also be inverted upside down, that is, the outer side of the closed end 342b of the conductive housing 342 further includes a plurality of contact terminals 342b1 for The circuit board 10 is in electrical contact.

由以上對於本發明之具體實施方式之詳述,可以明顯地看出,本發明的介面連接裝置中的彈簧針,係採用由相同材料且經過一次性加工而同時形成的彈簧針裝入導電外殼而可以作為電路板與空間轉換器之間的介面連接裝置。特別來說,本發明的導電外殼與彈簧針採用不相互固定的作法不僅可減少組裝成本,相較於習知的彈簧針需要利用焊接或熔接等製程將兩者相互固定的實施樣態,還可解決習知的彈簧針容易變形以及不能達到微小間距的缺點。並且,本發明的彈簧針還透 過偏心的接觸端點設計或簧片結構設計,確保彈簧針於作動時能確實地接觸導電外殼的內壁,使得電訊號可直接走導電外殼,進而可以改變及縮短電路傳導路徑。以及,本發明的介面連接裝置可以根據實際需求,更換損壞的彈簧針,並不需要如習知的導電膠片般,需要重新更換一張新的導電膠片。 From the above detailed description of the specific embodiments of the present invention, it can be clearly seen that the pogo pins in the interface connecting device of the present invention are assembled into a conductive housing by a spring pin formed of the same material and simultaneously formed by one-time processing. It can be used as an interface connection between the board and the space converter. In particular, the method of not fixing each other between the conductive outer casing and the pogo pin of the present invention not only reduces the assembly cost, but also requires a conventional spring pin to be fixed to each other by a process such as welding or welding. The conventional spring pin can be easily deformed and the short distance cannot be achieved. Moreover, the pogo pin of the present invention is also transparent The over-eccentric contact end design or the reed structure design ensures that the spring pin can positively contact the inner wall of the conductive housing when it is actuated, so that the electrical signal can directly go out of the conductive outer casing, thereby changing and shortening the circuit conduction path. Moreover, the interface connecting device of the present invention can replace the damaged pogo pin according to actual needs, and does not need to replace a new conductive film as in the conventional conductive film.

雖然本發明已以實施方式揭露如上,然其並不用以限定本發明,任何熟習此技藝者,在不脫離本發明的精神和範圍內,當可作各種的更動與潤飾,因此本發明的保護範圍當視後附的申請專利範圍所界定者為準。 The present invention has been disclosed in the above embodiments, and is not intended to limit the scope of the present invention, and the invention may be modified and modified in various ways without departing from the spirit and scope of the invention. The scope is subject to the definition of the scope of the patent application.

142‧‧‧導電外殼 142‧‧‧Electrical housing

144‧‧‧彈簧針 144‧‧ ‧ spring needle

144a‧‧‧管體 144a‧‧‧ tube body

144a1‧‧‧彈簧結構 144a1‧‧‧Spring structure

144a2‧‧‧接觸端 144a2‧‧‧Contact end

144b‧‧‧第一鏤空部 144b‧‧‧The first time

P‧‧‧接觸端點 P‧‧‧Contact endpoint

S‧‧‧容置空間 S‧‧‧ accommodating space

Claims (19)

一種介面連接裝置,包含:至少一導板,具有一穿孔;一導電外殼,設置於該穿孔,並具有一容置空間;以及一彈簧針,設置於該容置空間,並與該導電外殼可分離地滑動接觸,其中該彈簧針呈中空狀並具有一壁厚,且該壁厚為4~15微米。 An interface connecting device comprising: at least one guiding plate having a through hole; a conductive outer casing disposed on the through hole and having an accommodating space; and a pogo pin disposed in the accommodating space and electrically connected to the conductive outer casing The sliding contact is separately separated, wherein the spring pin is hollow and has a wall thickness, and the wall thickness is 4-15 microns. 如請求項第1項所述之介面連接裝置,其中該彈簧針包含一管體,該管體具有一第一鏤空部,該第一鏤空部螺旋環繞該管體的一中心軸而形成於該管體上,並且在該中心軸的方向上,該管體位於該第一鏤空部兩端之間的部分形成可壓縮的一彈簧結構。 The interface connecting device of claim 1, wherein the pogo pin includes a tube body having a first hollow portion, the first hollow portion spirally surrounding a central axis of the tube body On the tubular body, and in the direction of the central axis, the portion of the tubular body between the ends of the first hollow portion forms a compressible spring structure. 如請求項第2項所述之介面連接裝置,其中該管體還具有兩接觸端,該些接觸端至少其一具有至少一接觸端點。 The interface connecting device of claim 2, wherein the tubular body further has two contact ends, at least one of the contact ends having at least one contact end. 如請求項第3項所述之介面連接裝置,其中該至少一接觸端點的數量為複數,且該些接觸端點排列呈冠狀。 The interface connecting device of claim 3, wherein the number of the at least one contact end points is plural, and the contact end points are arranged in a crown shape. 如請求項第3項所述之介面連接裝置,其中該管體具有兩接觸端,該些接觸端至少其一具有一斜端面,該斜端面由該中心軸的一側傾斜至另一側,並且在該中心軸的 方向上,該接觸端點係位於該斜端面上最遠離該第一鏤空部之處。 The interface connecting device of claim 3, wherein the tubular body has two contact ends, at least one of the contact ends having an inclined end surface inclined from one side of the central axis to the other side, And on the central axis In the direction, the contact end is located on the inclined end face farthest from the first hollow portion. 如請求項第3項所述之介面連接裝置,其中該管體還具有一第二鏤空部,該彈簧針還包含一簧片結構位於該第二鏤空部並連接該管體,且該簧片結構係延伸遠離該中心軸並抵接該導電外殼的內壁。 The interface connecting device of claim 3, wherein the tubular body further has a second hollow portion, the spring pin further comprising a reed structure at the second hollow portion and connecting the tubular body, and the reed The structural system extends away from the central axis and abuts the inner wall of the electrically conductive outer casing. 如請求項第6項所述之介面連接裝置,其中該彈簧結構與該簧片結構為相同材料且經過一次性加工而同時形成。 The interface connecting device of claim 6, wherein the spring structure and the reed structure are of the same material and are simultaneously formed by one-time processing. 如請求項第2項所述之介面連接裝置,其中該彈簧結構的截面形狀呈矩形。 The interface connecting device of claim 2, wherein the spring structure has a rectangular cross-sectional shape. 如請求項第1項所述之介面連接裝置,其中該導電外殼的長度小於該彈簧針的長度。 The interface connecting device of claim 1, wherein the length of the conductive housing is less than the length of the spring pin. 一種垂直式探針卡組裝,包含:一電路板;一空間轉換器;以及一如請求項第1至9項任一所述之介面連接裝置,設置於該電路板與該空間轉換器之間,其中該彈簧針電性連接該電路板與該空間轉換器。 A vertical probe card assembly, comprising: a circuit board; a space converter; and an interface connecting device according to any one of claims 1 to 9, disposed between the circuit board and the space converter The spring pin is electrically connected to the circuit board and the space converter. 如請求項第10項所述之垂直式探針卡組裝,進一步更包含複數個探針,該些探針位在該空間轉換器相對於該介面連接裝置之另一側,其中該彈簧針電性連接該電路板、該空間轉換器與該些探針。 The vertical probe card assembly of claim 10, further comprising a plurality of probes located on the other side of the space transformer relative to the interface connecting device, wherein the spring pin is electrically The circuit board, the space converter and the probes are connected. 如請求項第10項所述之垂直式探針卡組裝,其中該彈簧針之總長係大於該導電外殼之總長以接觸該電路板與該空間轉換器。 The vertical probe card assembly of claim 10, wherein the total length of the pogo pins is greater than the total length of the conductive housing to contact the circuit board and the space transformer. 如請求項第10項所述之垂直式探針卡組裝,其中該導電外殼具有一開放端以及一封閉端,該彈簧針係穿出該開放端以接觸該電路板,並經由該封閉端以電性連接該空間轉換器。 The vertical probe card assembly of claim 10, wherein the conductive housing has an open end and a closed end, the spring pin passing through the open end to contact the circuit board, and via the closed end The space converter is electrically connected. 如請求項第13項所述之垂直式探針卡組裝,還包含一固接元件,該固接元件設置於該電路板,用以固接該至少一導板,其中該導電外殼係可滑動地設置於該穿孔,並具有一抵靠部,用以抵靠該導板面向該電路板的一表面,並且該彈簧針係壓縮於該電路板與該封閉端之間。 The vertical probe card assembly of claim 13 further comprising a fastening component disposed on the circuit board for fixing the at least one guide plate, wherein the conductive outer casing is slidable The hole is disposed on the through hole and has an abutting portion for facing a surface of the circuit board facing the circuit board, and the spring pin is compressed between the circuit board and the closed end. 如請求項第14項所述之垂直式探針卡組裝,其中當該抵靠部抵靠該導板面向該電路板的該表面時,該封閉端突出於該穿孔外。 The vertical probe card assembly of claim 14, wherein the closed end protrudes beyond the perforation when the abutment abuts the surface of the guide plate facing the circuit board. 一種垂直式探針卡組裝,包含: 一電路板;一介面連接裝置,可分離地連接於該電路板,其中該介面連接裝置包含:至少一導板,具有一穿孔;一導電外殼,設置於該穿孔,並具有一容置空間;以及一彈簧針,設置於該容置空間,並與該導電外殼可分離地滑動接觸,其中該彈簧針呈中空狀並具有一壁厚,且該壁厚為4~15微米;以及一固接元件,該固接元件設置於該電路板,用以固接該至少一導板,其中該導電外殼係可滑動地設置於該穿孔,並具有一抵靠部,用以抵靠該導板面向該電路板的一表面;其中該導電外殼具有一開放端以及一封閉端,該彈簧針係穿出該開放端以接觸該電路板,並且該彈簧針係壓縮於該電路板與該封閉端之間。 A vertical probe card assembly that includes: a circuit board; an interface connecting device, detachably connected to the circuit board, wherein the interface connecting device comprises: at least one guiding plate having a through hole; a conductive outer casing disposed on the through hole and having an accommodating space; And a pogo pin disposed in the accommodating space and slidably contacting the conductive housing, wherein the pogo pin is hollow and has a wall thickness, and the wall thickness is 4-15 microns; and a fixing An affixing component is disposed on the circuit board for fixing the at least one guiding plate, wherein the conductive outer casing is slidably disposed on the through hole, and has an abutting portion for abutting against the guiding plate a surface of the circuit board; wherein the conductive housing has an open end and a closed end, the spring pin passes through the open end to contact the circuit board, and the spring pin is compressed on the circuit board and the closed end between. 如請求項第16項所述之垂直式探針卡組裝,其中當該抵靠部抵靠該導板面向該電路板的該表面時,該封閉端突出於該穿孔外。 The vertical probe card assembly of claim 16, wherein the closed end protrudes beyond the perforation when the abutting portion abuts the surface of the guide plate facing the circuit board. 如請求項第16項所述之垂直式探針卡組裝,進一步更包含一空間轉換器,該介面連接裝置設置於該電路板與該空間轉換器之間,其中該彈簧針電性連接該電路板與該空間轉換器。 The vertical probe card assembly of claim 16, further comprising a space converter disposed between the circuit board and the space converter, wherein the spring pin is electrically connected to the circuit Board with the space converter. 如請求項第18項所述之垂直式探針卡組裝,進一步更包含複數個探針,該些探針位在該空間轉換器相對於該介面連接裝置之另一側,其中該彈簧針電性連接該電路板、該空間轉換器與該些探針。 The vertical probe card assembly of claim 18, further comprising a plurality of probes located on the other side of the space transformer relative to the interface connecting device, wherein the spring pin is electrically The circuit board, the space converter and the probes are connected.
TW104129032A 2015-09-02 2015-09-02 Interposer and vertical probe card assembly using the same TWI593972B (en)

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TWI642943B (en) * 2017-07-14 2018-12-01 泰可廣科技股份有限公司 Integrated circuit board and spring pin circuit board

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* Cited by examiner, † Cited by third party
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TWI642943B (en) * 2017-07-14 2018-12-01 泰可廣科技股份有限公司 Integrated circuit board and spring pin circuit board

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