TW201709586A - Gas barrier film, transfer printing method for gas barrier film, wavelength conversion film, phase difference film having gas barrier layer, and organic EL laminated body having a higher gas barrier property after transfer printing - Google Patents
Gas barrier film, transfer printing method for gas barrier film, wavelength conversion film, phase difference film having gas barrier layer, and organic EL laminated body having a higher gas barrier property after transfer printing Download PDFInfo
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- TW201709586A TW201709586A TW105110837A TW105110837A TW201709586A TW 201709586 A TW201709586 A TW 201709586A TW 105110837 A TW105110837 A TW 105110837A TW 105110837 A TW105110837 A TW 105110837A TW 201709586 A TW201709586 A TW 201709586A
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- gas barrier
- layer
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Classifications
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- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/308—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising acrylic (co)polymers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
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Abstract
Description
本發明涉及一種阻氣膜及阻氣膜的轉印方法、以及使用了該阻氣膜之波長轉換膜、帶阻氣層之相位差膜及有機EL層疊體。The present invention relates to a method for transferring a gas barrier film and a gas barrier film, and a wavelength conversion film using the gas barrier film, a retardation film having a gas barrier layer, and an organic EL laminate.
近年來,在有機EL設備(有機電致發光設備)、太陽能電池、量子點薄膜等設備或顯示器材料、及容裝藉由水分或氧變質之藥劑之輸液袋等包裝材料中要求較高的阻氣性。 藉此,為了賦予必要的阻氣性而對該些構件貼附阻氣膜,或藉由阻氣膜進行密封。In recent years, high resistance is required in packaging materials such as organic EL devices (organic electroluminescence devices), solar cells, quantum dot films, and the like, and packaging materials such as infusion bags that contain agents that are degraded by moisture or oxygen. Gas. Thereby, a gas barrier film is attached to the members in order to impart necessary gas barrier properties, or is sealed by a gas barrier film.
為了將阻氣膜應用於要求較高的阻氣性之領域,在專利文獻1中,作為提高阻氣性之方法記載有如下:使用無機層作為阻氣層之結構;將阻氣層多層化之結構;及在玻璃轉移溫度Tg較高之樹脂薄膜中形成阻氣層。In order to apply a gas barrier film to a field requiring high gas barrier properties, Patent Document 1 discloses a method for improving gas barrier properties as follows: a structure in which an inorganic layer is used as a gas barrier layer; and a gas barrier layer is multilayered. a structure; and forming a gas barrier layer in the resin film having a high glass transition temperature Tg.
具有較高的阻氣性之阻氣膜已發展為複數種電子設備或功能性薄膜,並能夠對以往不易進行密封之材料進行密封。 例如,在專利文獻2中,作為用於LCD等的背光單元之量子點薄膜記載有利用兩片阻氣膜來夾持量子點層(QD熒光體材料薄膜層),藉此對量子點進行了保護之層疊型量子點薄膜。 又,專利文獻3中記載有使用阻氣膜密封有機EL元件之情況。Gas barrier films with high gas barrier properties have been developed into a variety of electronic devices or functional films, and are capable of sealing materials that were previously difficult to seal. For example, Patent Document 2 discloses that a quantum dot film used as a backlight unit for an LCD or the like has a quantum dot layer (a QD phosphor material thin film layer) sandwiched between two gas barrier films, thereby performing quantum dots. Protected laminated quantum dot film. Further, Patent Document 3 describes a case where an organic EL element is sealed with a gas barrier film.
如此,藉由使用阻氣性較高之阻氣膜,能夠進行顯示器等複數種電子設備的薄型化、輕量化及柔性化。從而,若能夠使阻氣膜進一步薄型化,則能夠進行電子設備的進一步的薄型化、輕量化等。 如專利文獻1等記載,此種阻氣膜具有如下結構,亦即將樹脂薄膜作為基板,並在該基板上形成了阻氣層。因此,在使阻氣膜薄型化時可想到使基板薄型化。 在此,具有較高的阻氣性之阻氣層為較薄的無機層。因此,即使在微小的壓曲或接觸下阻氣層亦易破裂,若破裂則性能降低。藉此,在薄型基板上層疊阻氣層時,需要使搬送穩定化,以使能夠防止基板被壓曲。By using a gas barrier film having a high gas barrier property, it is possible to reduce the thickness, weight, and flexibility of a plurality of types of electronic devices such as displays. Therefore, if the gas barrier film can be further reduced in thickness, it is possible to further reduce the thickness and weight of the electronic device. As described in Patent Document 1 and the like, such a gas barrier film has a structure in which a resin film is used as a substrate, and a gas barrier layer is formed on the substrate. Therefore, it is conceivable to make the substrate thinner when the gas barrier film is made thinner. Here, the gas barrier layer having a higher gas barrier property is a thinner inorganic layer. Therefore, the gas barrier layer is easily broken even in a slight buckling or contact, and the performance is lowered if it is broken. Therefore, when the gas barrier layer is laminated on the thin substrate, it is necessary to stabilize the transfer so that the substrate can be prevented from being buckled.
專利文獻4中記載有如下:在基板的背面側貼附保護材料,藉此能夠確保基板的自支撐性,在使用了較薄的基板之情況下,亦能夠適當地形成阻氣層而不會產生基板的壓曲。 若利用此種方法,則在10數μm左右之較薄的基板上亦能夠形成阻氣層。然而,若基板變得更薄,則一邊搬送較薄的基板,一邊在該基板上貼合加強用保護材料之情況本身變得更難。Patent Document 4 discloses that a protective material is attached to the back surface side of the substrate, whereby the self-supporting property of the substrate can be ensured, and when a thin substrate is used, the gas barrier layer can be appropriately formed without being formed. The buckling of the substrate is produced. According to this method, a gas barrier layer can be formed on a thin substrate of about 10 μm. However, when the substrate is made thinner, it is more difficult to bond the reinforcing protective material to the substrate while transporting the thin substrate.
作為解決伴隨此種阻氣膜的薄型化之問題之方案,提出有僅將阻氣層轉印於密封對象物(被轉印體)之轉印方法。As a solution to the problem of the thinning of the gas barrier film, a transfer method in which only the gas barrier layer is transferred to the object to be sealed (the transfer target) has been proposed.
例如,專利文獻5中記載有如下:在基板與阻氣層之間形成離型層,並使阻氣層從基板剝離而轉印於被轉印體。 [先前技術文獻] [專利文獻]For example, Patent Document 5 describes that a release layer is formed between a substrate and a gas barrier layer, and the gas barrier layer is peeled off from the substrate and transferred to the transfer target. [Prior Technical Literature] [Patent Literature]
[專利文獻1]美國專利5654084號公報 [專利文獻2]日本特表2013-544018號公報 [專利文獻3]日本特開2014-197537號公報 [專利文獻4]日本特開2015-66812號公報 [專利文獻5]日本特開2007-118564號公報[Patent Document 1] Japanese Patent Laid-Open No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Patent Document 5] Japanese Patent Laid-Open Publication No. 2007-118564
如前述,為了實現較高的阻氣性,存在在阻氣層使用無機層之結構。 在此,依本發明人之研究可知,如專利文獻5所記載,將阻氣層從基板剝離而轉印於被轉印體之轉印方式的阻氣膜中存在如下情況:在使阻氣層與基板剝離時,由於對阻氣層施加剪切力而導致藉由該剪切力無機層易破裂,轉印後之阻氣層無法顯現充分的阻氣性。As described above, in order to achieve high gas barrier properties, there is a structure in which an inorganic layer is used in the gas barrier layer. According to the research of the inventors of the present invention, as described in Patent Document 5, in the gas barrier film in which the gas barrier layer is peeled off from the substrate and transferred to the transfer target, there is a case where the gas barrier is caused. When the layer is peeled off from the substrate, the inorganic layer is easily broken by the shearing force due to the shearing force applied to the gas barrier layer, and the gas barrier layer after the transfer cannot exhibit sufficient gas barrier properties.
本發明的目的在於解決此種現有技術的問題點,並提供一種較薄且能夠轉印,並且轉印之後亦具有較高的阻氣性之阻氣膜及阻氣膜的轉印方法,進而提供一種使用了該阻氣膜之波長轉換膜、帶阻氣層之相位差膜及有機EL層疊體。The object of the present invention is to solve the problems of the prior art, and to provide a transfer method of a gas barrier film and a gas barrier film which are thin and capable of being transferred, and which has a high gas barrier property after transfer, and further A wavelength conversion film using the gas barrier film, a retardation film having a gas barrier layer, and an organic EL laminate are provided.
本發明人為了實現上述課題而深入研究之結果發現藉由具有基板、設置於基板的一個表面側,並具有一組以上的無機層和成為無機層的形成面之有機層的組合之阻氣層、及設置於基板與阻氣層之間,與有機層黏附,並且用於剝離基板和阻氣層之剝離樹脂層能夠解決上述課題,並完成了本發明。 亦即,本發明提供以下結構之阻氣膜和阻氣膜之製造方法、以及使用了該阻氣膜之波長轉換膜、帶阻氣層之相位差膜及有機EL層疊體。As a result of intensive studies to achieve the above-mentioned problems, the present inventors have found that a gas barrier layer having a substrate and a combination of one or more inorganic layers and an organic layer forming a surface of the inorganic layer is provided on one surface side of the substrate. And the peeling resin layer provided between the substrate and the gas barrier layer and adhered to the organic layer and used for peeling off the substrate and the gas barrier layer can solve the above problems, and completed the present invention. That is, the present invention provides a method for producing a gas barrier film and a gas barrier film having the following structure, and a wavelength conversion film using the gas barrier film, a retardation film having a gas barrier layer, and an organic EL laminate.
(1)一種阻氣膜,具有: 基板; 阻氣層,設置於基板的一個表面側,具有一組以上的無機層和作為該無機層的形成面之有機層的組合;及 剝離樹脂層,設置於基板與阻氣層之間,與有機層黏附,並且用於剝離基板和阻氣層。 (2)如(1)所述之阻氣膜,其中 剝離樹脂層比有機層厚。 (3)如(1)或(2)所述之阻氣膜,其中 剝離樹脂層的形成材料係玻璃轉移溫度Tg為100℃以上之環狀烯烴樹脂。 (4)如(3)所述之阻氣膜,其中 剝離樹脂層的形成材料係環烯烴共聚物。 (5)如(1)至(4)中任一方案所述之阻氣膜,其中 剝離樹脂層的厚度為0.1~25μm。 (6)如(1)至(5)中任一方案所述之阻氣膜,其中 無機層的形成材料係氮化矽、氧化矽、或它們的混合物。 (7)如(1)至(6)中任一方案所述之阻氣膜,其中 有機層的形成材料係紫外線硬化樹脂或電子束硬化樹脂,硬化後之玻璃轉移溫度Tg為200℃以上。 (8)如(7)所述之阻氣膜,其中 有機層的形成材料包含5%以上且小於50%的1官能以上之丙烯酸酯,該1官能以上之丙烯酸酯具有金剛烷骨架。 (9)如(7)所述之阻氣膜,其中 有機層的形成材料包含5%以上且小於50%的2官能以上之丙烯酸酯,該2官能以上之丙烯酸酯具有茀骨架。 (10)如(1)至(9)中任一方案所述之阻氣膜,其中 有機層的厚度為0.1~5μm。 (11)如(1)至(10)中任一方案所述之阻氣膜,其中 進一步具有設置在阻氣層上之保護膜或有機保護層。 (12)如(11)所述之阻氣膜,其中 有機保護層為丙烯酸系黏著劑。 (13)如(11)或(12)所述之阻氣膜,其中 進一步具有設置在有機保護層上之保護膜。 (14)如(11)至(13)中任一方案所述之阻氣膜,其中 有機保護層的厚度為0.1~50μm。 (15)如(1)至(14)中任一方案所述之阻氣膜,其中 基板係賦予了離型層之聚對苯二甲酸乙二酯膜。 (16)如(1)至(15)中任一方案所述之阻氣膜,其中 除去了基板之結構的水蒸氣透過率小於0.01g/(m2 ・day)。 (17)如(1)至(16)中任一方案所述之阻氣膜,其中 除去了基板之結構的可見光透射率為85%以上、延遲值為30nm以下。 (18)一種阻氣膜的轉印方法,將具備阻氣層及剝離樹脂層之轉印層轉印於被轉印體,其中 將(1)至(17)中任一方案所述之阻氣膜的與基板相反一側的表面貼附於被轉印體,並剝離基板。 (19)如(18)所述之阻氣膜的轉印方法,其中 被轉印體係波長轉換材料、相位差膜、有機EL元件、及形成在有機EL元件上之鈍化膜的任意者。 (20)一種波長轉換膜,具有: 波長轉換層;及 轉印層,層疊在波長轉換層上,且具備從(1)至(17)中任一方案所述之阻氣膜除去了基板的阻氣層和剝離樹脂層。 (21)一種帶阻氣層之相位差膜,具有: 相位差膜;及 轉印層,層疊在相位差膜上,且具備從(1)至(17)中任一方案所述之阻氣膜除去了基板的阻氣層和剝離樹脂層。 (22)一種有機EL層疊體,具有: 有機EL元件;及 轉印層,層疊在有機EL元件上,且具備從(1)至(17)中任一方案所述之阻氣膜除去了基板的阻氣層和剝離樹脂層。 (23)如(22)所述之有機EL層疊體,其中 在有機EL元件與轉印層之間具有鈍化膜。 (24)如(22)或(23)所述之有機EL層疊體,其中 進一步具有支撐有機EL元件之元件基板, 該元件基板包括轉印層,該轉印層具備從(1)至(17)中任一方案所述之阻氣膜除去了基板的阻氣層和剝離樹脂層。(1) A gas barrier film comprising: a substrate; a gas barrier layer provided on one surface side of the substrate, having a combination of one or more inorganic layers and an organic layer as a formation surface of the inorganic layer; and a release resin layer, It is disposed between the substrate and the gas barrier layer, adheres to the organic layer, and is used for peeling off the substrate and the gas barrier layer. (2) The gas barrier film according to (1), wherein the release resin layer is thicker than the organic layer. (3) The gas barrier film according to (1) or (2), wherein the material for forming the release resin layer is a cyclic olefin resin having a glass transition temperature Tg of 100 ° C or more. (4) The gas barrier film according to (3), wherein the material for forming the release resin layer is a cyclic olefin copolymer. (5) The gas barrier film according to any one of (1) to (4) wherein the peeling resin layer has a thickness of 0.1 to 25 μm. (6) The gas barrier film according to any one of (1) to (5) wherein the inorganic layer forming material is tantalum nitride, cerium oxide, or a mixture thereof. (7) The gas barrier film according to any one of (1) to (6) wherein the material for forming the organic layer is an ultraviolet curable resin or an electron beam curable resin, and the glass transition temperature Tg after curing is 200 ° C or higher. (8) The gas barrier film according to (7), wherein the organic layer forming material contains 5% or more and less than 50% of a monofunctional or higher acrylate having an adamantane skeleton. (9) The gas barrier film according to (7), wherein the organic layer forming material contains 5% or more and less than 50% of a bifunctional or higher acrylate having an anthracene skeleton. (10) The gas barrier film according to any one of (1) to (9) wherein the organic layer has a thickness of 0.1 to 5 μm. (11) The gas barrier film according to any one of (1) to (10), further comprising a protective film or an organic protective layer provided on the gas barrier layer. (12) The gas barrier film according to (11), wherein the organic protective layer is an acrylic adhesive. (13) The gas barrier film according to (11) or (12), further comprising a protective film provided on the organic protective layer. (14) The gas barrier film according to any one of (11) to (13) wherein the organic protective layer has a thickness of 0.1 to 50 μm. (15) The gas barrier film according to any one of (1) to (14) wherein the substrate is provided with a polyethylene terephthalate film of the release layer. (16) The gas barrier film according to any one of (1) to (15), wherein a structure in which the substrate is removed has a water vapor transmission rate of less than 0.01 g/(m 2 day). The gas barrier film according to any one of (1) to (16), wherein the structure in which the substrate is removed has a visible light transmittance of 85% or more and a retardation value of 30 nm or less. (18) A method of transferring a gas barrier film, wherein a transfer layer having a gas barrier layer and a release resin layer is transferred to a transfer target, wherein the resistance according to any one of (1) to (17) is blocked The surface of the gas film opposite to the substrate is attached to the object to be transferred, and the substrate is peeled off. (19) The method of transferring a gas barrier film according to (18), wherein the wavelength conversion material, the retardation film, the organic EL element, and the passivation film formed on the organic EL element are transferred. (20) A wavelength conversion film comprising: a wavelength conversion layer; and a transfer layer laminated on the wavelength conversion layer, and having the gas barrier film according to any one of (1) to (17), wherein the substrate is removed A gas barrier layer and a release resin layer. (21) A retardation film having a gas barrier layer, comprising: a retardation film; and a transfer layer laminated on the retardation film, and having the gas barrier according to any one of (1) to (17) The film removes the gas barrier layer and the release resin layer of the substrate. (22) An organic EL laminate comprising: an organic EL device; and a transfer layer laminated on the organic EL device, and having the gas barrier film according to any one of (1) to (17), wherein the substrate is removed The gas barrier layer and the release resin layer. (23) The organic EL laminate according to (22), wherein a passivation film is provided between the organic EL element and the transfer layer. (24) The organic EL laminate according to (22), further comprising an element substrate supporting the organic EL element, the element substrate including a transfer layer having (1) to (17) The gas barrier film according to any one of the aspects removes the gas barrier layer and the release resin layer of the substrate.
依此種本發明,能夠提供一種較薄且能夠轉印,並且在轉印之後亦具有較高的阻氣性之阻氣膜及阻氣膜的轉印方法,並提供使用了該阻氣膜之波長轉換膜、帶阻氣層之相位差膜及有機EL層疊體。According to the present invention, it is possible to provide a transfer method of a gas barrier film and a gas barrier film which are thin and capable of being transferred, and which has a high gas barrier property after transfer, and provide the gas barrier film. A wavelength conversion film, a retardation film with a gas barrier layer, and an organic EL laminate.
以下,關於本發明之阻氣膜,依據圖式中所示之較佳實施形態進行詳細說明。Hereinafter, the gas barrier film of the present invention will be described in detail based on the preferred embodiment shown in the drawings.
本發明之阻氣膜為如下阻氣膜,該阻氣膜具有:基板;阻氣層,設置於基板的一個表面側,並具有一組以上的無機層和成為該無機層的形成面之有機層的組合;及剝離樹脂層,設置於基板與阻氣層之間,與有機層黏附,並且用於與基板剝離。該阻氣膜係僅剝離基板而將包含阻氣層及剝離樹脂層之轉印層轉印於被轉印體來使用者。The gas barrier film of the present invention is a gas barrier film having: a substrate; a gas barrier layer disposed on one surface side of the substrate and having a plurality of inorganic layers and an organic surface forming the inorganic layer a combination of layers; and a release resin layer disposed between the substrate and the gas barrier layer, adhered to the organic layer, and used for peeling off from the substrate. This gas barrier film removes only the substrate and transfers the transfer layer including the gas barrier layer and the release resin layer to the user to be transferred.
圖1(A)中概括示出本發明之阻氣膜的一例。 圖1(A)所示之阻氣膜10a實質上藉由具有如下而構成,亦即具有:基板12;阻氣層18,層疊於基板12的一個表面,並具有有機層14及無機層16;及剝離樹脂層20,層疊於基板12與阻氣層18之間。 又,如圖1(A)所示,阻氣層18中有機層14朝向剝離樹脂層20側層疊,無機層16層疊在有機層14上。亦即,剝離樹脂層20層疊在基板12與有機層14之間。An example of the gas barrier film of the present invention is schematically shown in Fig. 1(A). The gas barrier film 10a shown in FIG. 1(A) is basically constituted by having a substrate 12, a gas barrier layer 18 laminated on one surface of the substrate 12, and having an organic layer 14 and an inorganic layer 16 And the peeling resin layer 20 is laminated between the substrate 12 and the gas barrier layer 18. Further, as shown in FIG. 1(A), the organic layer 14 of the gas barrier layer 18 is laminated toward the release resin layer 20 side, and the inorganic layer 16 is laminated on the organic layer 14. That is, the release resin layer 20 is laminated between the substrate 12 and the organic layer 14.
在此,如圖1(B)所示,阻氣膜10a中,剝離樹脂層20構成為與有機層14黏附,並且在與基板12之界面能夠與基板12剝離。亦即,有機層14與剝離樹脂層20之間的剝離力(黏附力)比基板12與剝離樹脂層20之間的剝離力大。 藉此,阻氣膜10a中,僅剝離基板12而能夠將包含阻氣層18及剝離樹脂層20之轉印層30轉印於作為密封對象物之被轉印體。 另外,將轉印層30轉印於被轉印體時,實質上係將阻氣膜10a的阻氣層18側貼附於被轉印體之後,從阻氣膜10a剝離基板12,藉此將轉印層30轉印於被轉印體,但亦可以在從阻氣膜10a剝離基板12而取出轉印層30之後,將轉印層30貼附於被轉印體。Here, as shown in FIG. 1(B), in the gas barrier film 10a, the release resin layer 20 is configured to adhere to the organic layer 14, and is capable of being peeled off from the substrate 12 at the interface with the substrate 12. That is, the peeling force (adhesion force) between the organic layer 14 and the release resin layer 20 is larger than the peeling force between the substrate 12 and the release resin layer 20. Thereby, in the gas barrier film 10a, only the substrate 12 is peeled off, and the transfer layer 30 including the gas barrier layer 18 and the release resin layer 20 can be transferred to the object to be transferred as the object to be sealed. Further, when the transfer layer 30 is transferred to the transfer target, the gas barrier layer 18 side of the gas barrier film 10a is attached to the transfer target body, and the substrate 12 is peeled off from the gas barrier film 10a. Although the transfer layer 30 is transferred to the transfer target, the transfer layer 30 may be attached to the transfer target after the transfer layer 30 is taken out by peeling off the substrate 12 from the gas barrier film 10a.
如前述,作為更薄型之阻氣膜,提出有在基板與阻氣層之間形成離型層,使阻氣層從基板剝離而轉印於被轉印體之轉印方式的阻氣膜。 然而,依本發明人之研究可知,此種轉印方式的阻氣膜中存在如下情況:在使阻氣層與基板剝離時,由於對阻氣層施加剪切力而導致藉由該剪切力無機層易破裂,轉印後之阻氣層無法顯現充分的阻氣性。As described above, as a thinner gas barrier film, a gas barrier film in which a release layer is formed between a substrate and a gas barrier layer, and a gas barrier layer is peeled off from the substrate to be transferred to the transfer target is proposed. However, according to the study by the present inventors, it is known that the gas barrier film of such a transfer method has a case where the shearing force is applied to the gas barrier layer by the shearing force when the gas barrier layer is peeled off from the substrate. The inorganic layer is easily broken, and the gas barrier layer after transfer cannot exhibit sufficient gas barrier properties.
相對於此,本發明如下構成:具有有機層14來作為顯現阻氣性之無機層16的基底,在該有機層14與基板12之間具有剝離樹脂層20,該剝離樹脂層20與有機層14黏附,並且在與基板12之界面上能夠與基板12剝離。 剝離時,在剝離樹脂層20與基板12之界面剝離,藉此存在於無機層16與剝離面之間之剝離樹脂層20成為應力緩和層,能夠防止籍由使基板12剝離時所需之剪切力之無機層16的破裂。On the other hand, the present invention has a structure in which the organic layer 14 is provided as a base for exhibiting the gas barrier inorganic layer 16, and a release resin layer 20 is provided between the organic layer 14 and the substrate 12, and the release resin layer 20 and the organic layer are provided. 14 adheres and is capable of peeling off from the substrate 12 at the interface with the substrate 12. At the time of peeling, the interface between the peeling resin layer 20 and the substrate 12 is peeled off, whereby the peeling resin layer 20 existing between the inorganic layer 16 and the peeling surface serves as a stress relieving layer, and the shear required for peeling off the substrate 12 can be prevented. The rupture of the inorganic layer 16 of the shear force.
在此,如前述,關於剝離樹脂層20,需要以在與基板12之界面進行剝離之方式調整剝離力,並且需要使其具有作為應力緩和層之功能。因此,作為無機層16的基底層而無法設為適當者。尤其,為了獲得具有較高阻氣性之無機層16,而要求成為無機層16的基底之層需要具有適當硬度,並且需要具有較高的耐熱性。 因此,在剝離樹脂層20與無機層16之間不具有有機層14之結構的情況下,亦即,在剝離樹脂層20上直接形成了無機層16之情況下,無法合理地形成無機層16,並無法得到較高的阻氣性。Here, as described above, in the peeling of the resin layer 20, it is necessary to adjust the peeling force so as to peel off from the interface with the substrate 12, and it is necessary to have a function as a stress relieving layer. Therefore, it is not suitable as a base layer of the inorganic layer 16. In particular, in order to obtain the inorganic layer 16 having high gas barrier properties, it is required to have a suitable hardness as a layer of the substrate of the inorganic layer 16, and it is required to have high heat resistance. Therefore, in the case where the structure of the organic layer 14 is not provided between the release resin layer 20 and the inorganic layer 16, that is, in the case where the inorganic layer 16 is directly formed on the release resin layer 20, the inorganic layer 16 cannot be formed reasonably. And can not get a higher gas barrier.
相對於此,本發明之阻氣膜中,在剝離樹脂層20上具有有機層14來作為無機層16的形成面,因此具備較佳的基底層。藉此,能夠合理地形成無機層16,並能夠獲得較高的阻氣性。On the other hand, in the gas barrier film of the present invention, since the organic layer 14 is provided on the release resin layer 20 as the formation surface of the inorganic layer 16, it has a preferable underlayer. Thereby, the inorganic layer 16 can be formed reasonably, and high gas barrier properties can be obtained.
又,本發明之阻氣膜中,在阻氣層18上進一步具有用於保護阻氣層18(更具體而言為無機層16)之保護膜為較佳。 藉由具有保護膜,在搬送或捲取阻氣膜時能夠防止無機層16被破裂。 另外,具有保護膜之情況下,阻氣膜將該保護膜剝離而使阻氣層18顯露之後將其轉印於被轉印體即可。Further, in the gas barrier film of the present invention, it is preferable to further provide a protective film for protecting the gas barrier layer 18 (more specifically, the inorganic layer 16) on the gas barrier layer 18. By having a protective film, it is possible to prevent the inorganic layer 16 from being broken when the gas barrier film is transferred or wound. Further, when the protective film is provided, the gas barrier film may be peeled off to expose the gas barrier layer 18, and then transferred to the object to be transferred.
又,如圖2(A)所示之阻氣膜10b,阻氣層18(更具體而言為無機層16)上具有用於保護阻氣層18之有機保護層24亦為較佳。 藉由具有有機保護層24,在搬送或捲取阻氣膜時能夠防止無機層16被破裂。 另外,具有有機保護層24之情況下,剝離樹脂層20、阻氣層18及有機保護層24成為轉印層30,有機保護層24與剝離樹脂層20及阻氣層18一同轉印於被轉印體。Further, as the gas barrier film 10b shown in Fig. 2(A), it is also preferable to have the organic protective layer 24 for protecting the gas barrier layer 18 on the gas barrier layer 18 (more specifically, the inorganic layer 16). By having the organic protective layer 24, the inorganic layer 16 can be prevented from being broken when the gas barrier film is transferred or wound. Further, when the organic protective layer 24 is provided, the release resin layer 20, the gas barrier layer 18, and the organic protective layer 24 become the transfer layer 30, and the organic protective layer 24 is transferred together with the release resin layer 20 and the gas barrier layer 18 Transfer body.
又,有機保護層24可以係具有黏著性之黏著層。 藉由有機保護層24具有黏著性,將轉印層30轉印於被轉印體時,能夠輕易進行轉印,而無需進行黏著劑的塗佈等。Further, the organic protective layer 24 may be an adhesive layer having an adhesive property. When the organic protective layer 24 has adhesiveness and the transfer layer 30 is transferred to the transfer target, the transfer can be easily performed without applying the adhesive or the like.
又,如圖2(B)所示之阻氣膜10c,可以在阻氣層18上具有有機保護層24,進而可以在有機保護層24上具有保護膜26。 藉由具有有機保護層24及保護膜26,在搬送或捲取阻氣膜時能夠防止無機層16被破裂。 又,在有機保護層24為黏著層之情況下,藉由具有保護膜26,能夠輕鬆地搬送或捲取阻氣膜,並且能夠防止雜質等附著於黏著層中,並能夠防止黏著性降低。Further, as the gas barrier film 10c shown in FIG. 2(B), the organic gas barrier layer 24 may be provided on the gas barrier layer 18, and the protective film 26 may be provided on the organic protective layer 24. By having the organic protective layer 24 and the protective film 26, it is possible to prevent the inorganic layer 16 from being broken when the gas barrier film is transferred or wound. Further, when the organic protective layer 24 is an adhesive layer, the gas barrier film can be easily transported or wound by the protective film 26, and impurities and the like can be prevented from adhering to the adhesive layer, and the adhesiveness can be prevented from being lowered.
又,圖1(A)所示之例子中,將阻氣層18設為具有1層有機層14和1層無機層16之結構,但並不限定於此,可以分別具有1層以上之有機層和無機層,亦可以具有2組以上之無機層16與成為該無機層16的基底層之有機層14的組合。 例如,圖3所示之阻氣膜10d具有在剝離樹脂層20上依次形成有有機層14、無機層16、有機層14、及無機層16之阻氣層18。亦即,阻氣膜10d的阻氣層18係具有2組有機層14與無機層16的組合之結構。 如此,藉由具有2組以上之有機層14與無機層16的組合,能夠進一步提高阻氣性。Further, in the example shown in FIG. 1(A), the gas barrier layer 18 has a structure in which one organic layer 14 and one inorganic layer 16 are provided. However, the present invention is not limited thereto, and may have one or more organic layers. The layer and the inorganic layer may have a combination of two or more inorganic layers 16 and an organic layer 14 which is a base layer of the inorganic layer 16. For example, the gas barrier film 10d shown in FIG. 3 has the gas barrier layer 18 in which the organic layer 14, the inorganic layer 16, the organic layer 14, and the inorganic layer 16 are sequentially formed on the release resin layer 20. That is, the gas barrier layer 18 of the gas barrier film 10d has a structure in which two sets of the organic layer 14 and the inorganic layer 16 are combined. As described above, by combining two or more organic layers 14 and inorganic layers 16, the gas barrier properties can be further improved.
在此,本發明之阻氣膜中,從該阻氣膜除去基板12之結構的水蒸氣透過率小於0.01[g/(m2 ・day)]為較佳,為0.005[g/(m2 ・day)]以下更為佳,為0.001[g/(m2 ・day)]以下為特佳。例如,在該阻氣膜由基板12、阻氣層18、及剝離樹脂層20構成之情況下,從阻氣膜除去基板12之結構係指由阻氣層18和剝離樹脂層20構成之轉印層30。又,在阻氣膜由基板12、阻氣層18、剝離樹脂層20、及有機保護層24構成之情況下,從阻氣膜除去基板12之結構係指由阻氣層18、剝離樹脂層20、及有機保護層24構成之轉印層30。 本發明之阻氣膜具有較低的水蒸氣透過率為較佳。 本發明之阻氣膜中,即使轉印層30的阻氣性較高,亦能夠防止無機層16的破裂,並且能夠以維持較高的阻氣性之狀態適當地進行轉印。Here, the gas barrier film of the present invention in which the gas barrier film is removed from the water vapor transmission rate of the substrate structure 12 is less than 0.01 [g / (m 2 · day)] is preferred, of 0.005 [g / (m 2・day)] The following is more preferable, and it is particularly preferable that it is 0.001 [g/(m 2・day)] or less. For example, in the case where the gas barrier film is composed of the substrate 12, the gas barrier layer 18, and the release resin layer 20, the structure in which the substrate 12 is removed from the gas barrier film means that the gas barrier layer 18 and the release resin layer 20 are formed. Print layer 30. Further, in the case where the gas barrier film is composed of the substrate 12, the gas barrier layer 18, the release resin layer 20, and the organic protective layer 24, the structure for removing the substrate 12 from the gas barrier film means that the gas barrier layer 18 and the peeling resin layer are formed. 20. The transfer layer 30 formed of the organic protective layer 24. The gas barrier film of the present invention has a low water vapor transmission rate. In the gas barrier film of the present invention, even if the gas barrier property of the transfer layer 30 is high, the inorganic layer 16 can be prevented from being broken, and the transfer can be appropriately performed while maintaining high gas barrier properties.
又,本發明之阻氣膜中,從該阻氣膜除去基板12之結構的可見光透射率為85%以上為較佳。又,轉印層30的延遲值為30nm以下為較佳。 藉由將轉印層30的可見光透射率和延遲值設為上述範圍,將本發明之阻氣膜進行轉印而密封量子點薄膜等波長轉換層或有機EL元件等光學構件之情況下,或者對相位差膜等光學膜賦予阻氣性之情況下,能夠密封光學構件或賦予阻氣性,而不會影響該些被轉印體的光學性能。Further, in the gas barrier film of the present invention, the visible light transmittance of the structure in which the substrate 12 is removed from the gas barrier film is preferably 85% or more. Further, the retardation value of the transfer layer 30 is preferably 30 nm or less. When the gas barrier film of the present invention is transferred by the transfer of the visible light transmittance and the retardation value of the transfer layer 30 to the above, the wavelength conversion layer such as a quantum dot film or an optical member such as an organic EL device is sealed, or When gas barrier properties are imparted to an optical film such as a retardation film, the optical member can be sealed or gas barrier properties can be imparted without affecting the optical properties of the transfer target.
接著,對本發明之阻氣膜的各構成要素的材料及結構等進行說明。以下、有時將阻氣膜10a~10d統稱為“阻氣膜10”。Next, the materials, structures, and the like of the respective constituent elements of the gas barrier film of the present invention will be described. Hereinafter, the gas barrier films 10a to 10d are collectively referred to as "gas barrier film 10".
阻氣膜10中,基板12能夠利用在各種阻氣膜或各種層疊式阻氣膜中被用作基板(支撐體)之各種公知之片狀物。In the gas barrier film 10, the substrate 12 can be used as various known sheets which are used as a substrate (support) in various gas barrier films or various laminated gas barrier films.
具體而言,作為基板12可較佳地例示出由低密度聚乙烯(LDPE)、高密度聚乙烯(HDPE)、聚萘二甲酸乙二醇酯(PEN)、聚醯胺(PA)、聚對苯二甲酸乙二酯(PET)、聚氯乙烯(PVC)、聚乙烯醇(PVA)、聚丙烯酸腈(PAN)、聚醯亞胺(PI)、透明聚醯亞胺、聚甲基丙烯酸甲酯樹脂(PMMA)、聚炭酸酯(PC)、聚丙烯酸酯、聚甲基丙烯酸酯、聚丙烯(PP)、聚苯乙烯(PS)、ABS、環烯烴共聚物(COC)、環烯烴聚合物(COP)、及三醋酸纖維素(TAC)等的各種樹脂材料構成之薄膜(樹脂薄膜)。Specifically, as the substrate 12, preferably, low density polyethylene (LDPE), high density polyethylene (HDPE), polyethylene naphthalate (PEN), polyamine (PA), poly Ethylene terephthalate (PET), polyvinyl chloride (PVC), polyvinyl alcohol (PVA), polyacrylonitrile (PAN), polyimine (PI), transparent polyimide, polymethacrylic acid Methyl ester resin (PMMA), polycarbonate (PC), polyacrylate, polymethacrylate, polypropylene (PP), polystyrene (PS), ABS, cyclic olefin copolymer (COC), cyclic olefin polymerization A film (resin film) composed of various resin materials such as COP and cellulose triacetate (TAC).
本發明中,作為基板12可以使用在此種薄膜的表面形成有保護層、黏結層、光反射層、防反射層、遮光層、平坦化層、緩衝層、應力緩和層、離型層等顯現必要功能之層(膜)者。In the present invention, as the substrate 12, a protective layer, a bonding layer, a light reflecting layer, an antireflection layer, a light shielding layer, a planarization layer, a buffer layer, a stress relaxation layer, a release layer, and the like may be formed on the surface of such a film. The layer (film) of the necessary function.
其中,從破斷伸長率較高且搬送時不易破斷而能夠設為較薄,熔點較高且具有耐熱性,能夠輕鬆地在與剝離樹脂層20之界面上進行剝離,且價格低廉等觀點考慮,作為基板12,形成有離型層之PET薄膜為較佳。更具體而言,PET薄膜中,在形成剝離樹脂層20之面上形成有離型層者為較佳。Among them, the elongation at break is high, and it is not easy to be broken during transportation, and the thickness can be made thin, the melting point is high, and heat resistance can be easily performed at the interface with the release resin layer 20, and the price is low. It is considered that as the substrate 12, a PET film having a release layer formed thereon is preferable. More specifically, in the PET film, a release layer is preferably formed on the surface on which the release resin layer 20 is formed.
關於基板12的厚度,依據阻氣膜10的用途和形成材料等適當設定即可。 依本發明人等之研究,基板12的厚度為5~125μm為較佳,5~100μm更為佳,10~50μm為特佳。 藉由將基板12的厚度設為上述範圍,能夠充分確保阻氣膜10的機械強度的同時能夠在進行轉印時輕易進行剝離,在這些方面為較佳。The thickness of the substrate 12 may be appropriately set depending on the use of the gas barrier film 10, the forming material, and the like. According to the study by the inventors of the present invention, the thickness of the substrate 12 is preferably 5 to 125 μm, more preferably 5 to 100 μm, and particularly preferably 10 to 50 μm. By setting the thickness of the substrate 12 to the above range, the mechanical strength of the gas barrier film 10 can be sufficiently ensured, and peeling can be easily performed at the time of transfer, which is preferable.
有機層14係由有機化合物構成之層,實質上係聚合(交聯)構成有機層14之單體或低聚物等者。The organic layer 14 is a layer composed of an organic compound, and is substantially polymerized (crosslinked) to constitute a monomer or oligomer of the organic layer 14.
有機層14係無機層16的形成面。具體而言,在阻氣膜10中,有機層14主要作為用於合理地形成顯現阻氣性之無機層16之基底層而發揮功能。 藉由具有此種有機層14,能夠包埋剝離樹脂層20(或下層的無機層16)的表面的凹凸或附著於剝離樹脂層20(或下層的無機層16)的表面之異物而將對無機層16進行成膜之面設為適於對該無機層16進行成膜之狀態。藉此,能夠除去如剝離樹脂層20(或下層的無機層16)的表面的凹凸或異物的附著所引起之凹凸而使得形成無機層16之無機化合物難以著膜之區域而在整個剝離樹脂層20(或下層的無機層16)的表面,以無間隙的方式合理地對無機層16進行成膜,並能夠形成具有較高的阻氣性之無機層16。The organic layer 14 is a formation surface of the inorganic layer 16. Specifically, in the gas barrier film 10, the organic layer 14 functions mainly as a base layer for appropriately forming the inorganic layer 16 exhibiting gas barrier properties. By having such an organic layer 14, it is possible to embed the unevenness of the surface of the release resin layer 20 (or the inorganic layer 16 of the lower layer) or the foreign matter adhering to the surface of the release resin layer 20 (or the inorganic layer 16 of the lower layer). The surface on which the inorganic layer 16 is formed is in a state suitable for forming the inorganic layer 16 into a film. By this, it is possible to remove irregularities caused by the unevenness of the surface of the release resin layer 20 (or the inorganic layer 16 of the lower layer) or the adhesion of foreign matter, so that the inorganic compound forming the inorganic layer 16 is difficult to form a film, and the entire resin layer is peeled off. The surface of 20 (or the inorganic layer 16 of the lower layer) is formed into a film with a gap-free manner, and the inorganic layer 16 having a high gas barrier property can be formed.
又,有機層14的玻璃轉移溫度Tg比剝離樹脂層20的玻璃轉移溫度Tg高為較佳,為200℃以上為較佳。 藉由設為玻璃轉移溫度Tg為200℃以上之具有較高的耐熱性之有機層14,能夠合理地對無機層16進行成膜。 又,為了防止無機層16的破裂等而有機層14具有適當的柔軟性為較佳。 另外,玻璃轉移溫度Tg依據JIS K 7121進行測定即可。Further, the glass transition temperature Tg of the organic layer 14 is preferably higher than the glass transition temperature Tg of the release resin layer 20, and is preferably 200 ° C or more. By setting the organic layer 14 having a high heat resistance such that the glass transition temperature Tg is 200 ° C or higher, the inorganic layer 16 can be formed into a film. Moreover, it is preferable that the organic layer 14 has appropriate flexibility in order to prevent cracking of the inorganic layer 16 or the like. Further, the glass transition temperature Tg may be measured in accordance with JIS K 7121.
阻氣膜10中,有機層14的形成材料並無限定,可以利用各種公知之有機化合物。 具體而言,可較佳地例示出聚酯、(甲基)丙烯酸樹脂、甲基丙烯酸-馬來酸共聚物、聚苯乙烯、透明氟樹脂、聚醯亞胺、氟化聚醯亞胺、聚醯胺、聚醯胺-醯亞胺、聚醚醯亞胺、纖維素醯化物、聚氨酯、聚醚醚酮、聚炭酸酯、脂環式聚烯烴、聚芳酯、聚醚碸、聚碸、茀環改性聚炭酸酯、脂環改性聚炭酸酯、茀環改性聚酯、丙烯酸化合物等熱塑性樹脂、聚矽氧烷或其他有機矽化合物之膜。它們可以並用複數種。In the gas barrier film 10, the material for forming the organic layer 14 is not limited, and various known organic compounds can be used. Specifically, a polyester, a (meth)acrylic resin, a methacrylic acid-maleic acid copolymer, a polystyrene, a transparent fluororesin, a polyimine, a fluorinated polyimine, or a fluorinated polyimide may be preferably exemplified. Polyamide, polyamine-imine, polyether oximine, cellulose oxime, polyurethane, polyetheretherketone, polycarbonate, alicyclic polyolefin, polyarylate, polyether oxime, polyfluorene A film of a thermoplastic resin such as an anthracene-modified polycarbonate, an alicyclic modified polycarbonate, an anthracene-modified polyester, an acrylic compound, a polyoxyalkylene or other organic hydrazine compound. They can be used in combination.
其中,從玻璃轉移溫度和強度優異等方面,由自由基硬化性化合物和/或在官能基團中具有醚基之陽離子硬化性化合物的聚合物構成之有機層14為較佳。 其中,從折射率較低,透明性較高且光學特性優異等方面考慮,作為有機層14,尤其可較佳地例示出將丙烯酸酯和/或甲基丙烯酸酯的單體或低聚物的聚合物作為主成分之丙烯酸樹脂或甲基丙烯酸樹脂。 其中,尤其可較佳地例示出將二丙二醇二(甲基)丙烯酸酯(DPGDA)、三羥甲基丙烷三(甲基)丙烯酸酯(TMPTA)、二季戊四醇六(甲基)丙烯酸酯(DPHA)等2官能以上、尤其3官能以上的丙烯酸酯和/或甲基丙烯酸酯的單體或低聚物等聚合物作為主成分之丙烯酸樹脂或甲基丙烯酸樹脂。又,使用複數種該些丙烯酸樹脂或甲基丙烯酸樹脂為較佳。Among them, the organic layer 14 composed of a radical curable compound and/or a polymer of a cationically curable compound having an ether group in a functional group is preferable from the viewpoint of excellent glass transition temperature and strength. Among them, from the viewpoints of a lower refractive index, higher transparency, and excellent optical characteristics, as the organic layer 14, a monomer or oligomer of acrylate and/or methacrylate is particularly preferably exemplified. An acrylic resin or a methacrylic resin having a polymer as a main component. Among them, dipropylene glycol di(meth)acrylate (DPGDA), trimethylolpropane tri(meth)acrylate (TMPTA), dipentaerythritol hexa(meth)acrylate (DPHA) can be preferably exemplified. An acrylic resin or a methacrylic resin containing, as a main component, a polymer such as a monomer or oligomer of a acrylate or/or methacrylate having two or more functional groups, particularly a trifunctional or higher functional group. Further, it is preferred to use a plurality of these acrylic resins or methacrylic resins.
在此,有機層14的形成材料係紫外線硬化樹脂或電子束硬化樹脂為較佳。 使用紫外線硬化樹脂或電子束硬化樹脂作為有機層14的形成材料,藉此能夠藉由紫外線或電子線的照射量而輕鬆地調整與剝離樹脂層20的剝離力,並能夠實現較強的剝離力。從而,能夠將阻氣膜10設為在剝離樹脂層20與基板12之界面進行剝離之結構。Here, the material for forming the organic layer 14 is preferably an ultraviolet curable resin or an electron beam curable resin. By using an ultraviolet curable resin or an electron beam curable resin as a material for forming the organic layer 14, the peeling force with the peeling resin layer 20 can be easily adjusted by the irradiation amount of ultraviolet rays or electron beams, and strong peeling force can be realized. . Therefore, the gas barrier film 10 can be configured to be peeled off at the interface between the peeling resin layer 20 and the substrate 12.
又,有機層14的形成材料係包含5%以上且小於50%的具有金剛烷骨架之1官能以上的丙烯酸酯之樹脂材料,或包含5%以上且小於50%的具有茀骨架之2官能以上的丙烯酸酯之樹脂材料為較佳。 藉由使用包含具有金剛烷骨架之1官能以上的丙烯酸酯,或包含具有茀骨架之2官能以上的丙烯酸酯之樹脂材料來作為有機層14的形成材料,能夠以維持較高的玻璃轉移溫度Tg之狀態降低硬化收縮時的收縮率,並能夠防止形成在有機層14上之無機層16被破裂。Further, the material for forming the organic layer 14 is a resin material containing 5% or more and less than 50% of an acrylate having one or more functional groups of an adamantane skeleton, or a bismuth or more having a fluorene skeleton of 5% or more and less than 50%. The acrylate resin material is preferred. By using a resin material containing a monofunctional or higher acrylate having an adamantane skeleton or a acrylate having a bifunctional or higher functional group having an anthracene skeleton as a material for forming the organic layer 14, it is possible to maintain a high glass transition temperature Tg. The state reduces the shrinkage ratio at the time of hardening shrinkage, and can prevent the inorganic layer 16 formed on the organic layer 14 from being broken.
關於此種有機層14,依據所形成之有機層14,並以形成由有機化合物構成之層的公知之方法形成(成膜)即可。作為一例子,可例示出塗佈法。The organic layer 14 may be formed (formed into a film) by a known method of forming a layer composed of an organic compound in accordance with the formed organic layer 14. As an example, a coating method can be exemplified.
有機層14能夠如下形成:製備例如包含有機溶剤、成為有機層14之有機化合物(單體、二聚體、三聚體、低聚物、聚合物等)、及交聯劑之塗佈組成物,將該塗佈組成物塗佈於剝離樹脂層20上來形成塗膜,並對塗膜進行乾燥和硬化。 利用塗佈法來形成,藉此可得到較薄的有機層14。The organic layer 14 can be formed by preparing a coating composition containing, for example, an organic solvent, an organic compound (monomer, dimer, trimer, oligomer, polymer, etc.) which becomes the organic layer 14, and a crosslinking agent. The coating composition is applied onto the release resin layer 20 to form a coating film, and the coating film is dried and hardened. It is formed by a coating method, whereby a thinner organic layer 14 can be obtained.
另外,當阻氣膜10具有複數個有機層14時,各有機層14的厚度可以相同,亦可以相互不同。又,各有機層14的形成材料可以相同,亦可以不同。In addition, when the gas barrier film 10 has a plurality of organic layers 14, the thickness of each of the organic layers 14 may be the same or different from each other. Further, the material for forming each of the organic layers 14 may be the same or different.
無機層16係由無機化合物構成之層。 阻氣膜10中,目標阻氣性主要藉由無機層16而顯現。The inorganic layer 16 is a layer composed of an inorganic compound. In the gas barrier film 10, the target gas barrier property is mainly exhibited by the inorganic layer 16.
無機層16的形成材料並無限定,能夠利用由顯現阻氣性之無機化合物構成之各種層。 具體而言,可較佳地例示出由氧化鋁、氧化鎂、氧化鉭、氧化鋯、氧化鈦、氧化銦錫(ITO)等金屬氧化物;氮化鋁等金屬氮化物;炭化鋁等金屬炭化物;氧化矽、氧化氮化矽、氧炭化矽、氧化氮化炭化矽等矽氧化合物;氮化矽、氮化炭化矽等矽氮化物;炭化矽等矽炭化物;它們的氫化物;它們的2種以上的混合物;及它們的含氫物等無機化合物構成之膜。又,能夠利用它們的2種以上的混合物。 尤其,金屬氧化物及氮化物,具體而言,氮化矽、氧化矽、氧氮化矽、氧化鋁、它們的2種以上的混合物在透明性較高,且顯現優異的阻氣性之方面可較佳地利用。其中,尤其氮化矽、氧化矽、它們的混合物除了優異的阻氣性,透明性亦較高,並且柔軟性亦較高,因此可進一步較佳地利用。The material for forming the inorganic layer 16 is not limited, and various layers composed of an inorganic compound exhibiting gas barrier properties can be used. Specifically, a metal oxide such as aluminum oxide, magnesium oxide, cerium oxide, zirconium oxide, titanium oxide or indium tin oxide (ITO); a metal nitride such as aluminum nitride; and a metal carbide such as aluminum carbide can be preferably exemplified. Oxide compounds such as cerium oxide, cerium oxide oxynitride, cerium oxide cerium oxide, cerium oxide oxysulfide, cerium nitride such as tantalum nitride or cerium nitride; cerium carbide such as cerium carbide; hydride thereof; a mixture of the above; and a film composed of an inorganic compound such as a hydrogen-containing substance. Further, a mixture of two or more of them can be used. In particular, the metal oxide and the nitride, specifically, tantalum nitride, cerium oxide, cerium oxynitride, aluminum oxide, or a mixture of two or more thereof, have high transparency and exhibit excellent gas barrier properties. It can be preferably utilized. Among them, in particular, cerium nitride, cerium oxide, and a mixture thereof are further preferably used in addition to excellent gas barrier properties, high transparency, and high flexibility.
關於此種無機層16的形成,依據無機層16的形成材料等,利用CCP-CVD(電容耦合型等離子體化學氣相沉積法)、ICP-CVD(感應耦合型等離子體化學氣相沉積法)、濺射、真空沉積等公知的氣相成膜法進行即可。Regarding the formation of such an inorganic layer 16, CCP-CVD (capacitive coupling type plasma chemical vapor deposition method) or ICP-CVD (inductively coupled plasma chemical vapor deposition method) is used depending on the formation material of the inorganic layer 16. A known vapor phase film formation method such as sputtering or vacuum deposition may be used.
關於無機層16的膜厚,依據形成材料,可適當確定能夠顯現目標阻氣性之厚度即可。依本發明人等之研究,無機層16的厚度為10~200nm為較佳,15~100nm更為佳,20~75nm為特佳。 藉由將無機層16的厚度設為10nm以上,可穩定地顯現充分的阻氣性能。又,無機層16通常較脆,若過厚,則有可能產生破裂或裂紋、剝離等,而藉由將無機層16的厚度設為200nm以下,能夠防止產生破裂。Regarding the film thickness of the inorganic layer 16, the thickness of the target gas barrier property can be appropriately determined depending on the material to be formed. According to the study by the inventors of the present invention, the thickness of the inorganic layer 16 is preferably from 10 to 200 nm, more preferably from 15 to 100 nm, and particularly preferably from 20 to 75 nm. By setting the thickness of the inorganic layer 16 to 10 nm or more, sufficient gas barrier performance can be stably exhibited. Further, the inorganic layer 16 is usually brittle, and if it is too thick, cracking, cracking, peeling, or the like may occur, and by setting the thickness of the inorganic layer 16 to 200 nm or less, cracking can be prevented.
另外,阻氣膜10具有複數個無機層16之情況下,各無機層16的厚度可以相同亦可以不同。又,各無機層16的形成材料可以相同亦可以不同。Further, when the gas barrier film 10 has a plurality of inorganic layers 16, the thickness of each of the inorganic layers 16 may be the same or different. Further, the material for forming each of the inorganic layers 16 may be the same or different.
阻氣膜10在基板12與有機層14之間具有剝離樹脂層20。 如前述,剝離樹脂層20係與有機層14黏附,並且在與基板12的界面能夠與該基板12剝離之樹脂層。剝離樹脂層20對基板12與阻氣層18進行剝離。剝離樹脂層20為如下層,亦即在對基板12進行剝離時作為抑制向無機層16施加剪切力之應力緩和層亦發揮功能。又,基板12剝離之後,剝離樹脂層20亦作為支撐體而發揮功能。The gas barrier film 10 has a release resin layer 20 between the substrate 12 and the organic layer 14. As described above, the release resin layer 20 is a resin layer which is adhered to the organic layer 14 and which can be peeled off from the substrate 12 at the interface with the substrate 12. The release resin layer 20 peels off the substrate 12 from the gas barrier layer 18. The release resin layer 20 is a layer that functions as a stress relaxation layer that suppresses application of shear force to the inorganic layer 16 when the substrate 12 is peeled off. Further, after the substrate 12 is peeled off, the release resin layer 20 also functions as a support.
剝離樹脂層20的含水性較低,耐熱性較高為較佳。 如前述,顯現較高阻氣性之無機層16藉由等離子體CVD等真空成膜而形成。若剝離樹脂層20的含水性較高,則即使進行真空抽引亦放出水分,因此存在無法將真空度設為較高,並無法形成無機層16之憂。又,即使在已形成無機層16之情況下,若藉由水分的吸收和放出而剝離樹脂層20伸縮,則存在無機層16被破裂,且無法得到較高的阻氣性之憂。從而,剝離樹脂層20的含水性較低為較佳。又,為了藉由等離子體CVD等形成無機層16而耐熱性較高為較佳。The release resin layer 20 has a low water content and is preferably high in heat resistance. As described above, the inorganic layer 16 exhibiting high gas barrier properties is formed by vacuum film formation such as plasma CVD. When the water content of the release resin layer 20 is high, moisture is released even if vacuum extraction is performed. Therefore, there is a fear that the degree of vacuum cannot be made high and the inorganic layer 16 cannot be formed. In addition, even when the inorganic layer 16 is formed, if the resin layer 20 is stretched and contracted by absorption and release of moisture, the inorganic layer 16 is broken, and high gas barrier properties cannot be obtained. Therefore, the water content of the release resin layer 20 is preferably low. Further, in order to form the inorganic layer 16 by plasma CVD or the like, heat resistance is preferably high.
從基板12與有機層14的黏附性、含水性及耐熱性等觀點考慮,作為剝離樹脂層20的形成材料,環烯烴共聚物(COC)、環烯烴聚合物(COP)等玻璃轉移溫度Tg為100℃以上的環狀烯烴樹脂為較佳。The glass transition temperature Tg of the cycloolefin copolymer (COC) or the cycloolefin polymer (COP) is a material for forming the release resin layer 20 from the viewpoints of adhesion of the substrate 12 to the organic layer 14, water resistance, heat resistance, and the like. A cyclic olefin resin of 100 ° C or more is preferred.
又,如前述,在剝離樹脂層20上,有機層14例如藉由塗佈而形成。藉此,從成為有機層14之塗佈組成物的塗佈性的觀點和耐溶劑性、及延遲(RETARDATION)等光學特性的觀點考慮,使用環烯烴共聚物(COC)作為剝離樹脂層20的形成材料為較佳。Further, as described above, the organic layer 14 is formed on the release resin layer 20 by, for example, coating. Thereby, a cycloolefin copolymer (COC) is used as the release resin layer 20 from the viewpoint of the coating property of the coating composition of the organic layer 14 and the optical properties such as solvent resistance and retardation (RETARDATION). It is preferred to form a material.
此種剝離樹脂層20例如能夠利用與有機層14相同的塗佈法而形成。 利用塗佈法而形成,藉此可得到較薄的剝離樹脂層20。Such a release resin layer 20 can be formed, for example, by the same coating method as the organic layer 14. It is formed by a coating method, whereby a thin peeling resin layer 20 can be obtained.
關於剝離樹脂層20的厚度,依據剝離樹脂層20的形成材料,或有機層14、無機層16及基板12的特性適當設定即可。依本發明人等之研究,將剝離樹脂層20的厚度設為0.1~25μm為較佳,設為0.5~15μm更為佳,設為1~10μm為特佳。 將剝離樹脂層20的厚度設為0.1μm以上,藉此能夠適當控制與基板12及有機層14的黏附性,能夠在與基板12之界面輕鬆地進行剝離,並且能夠在對基板12進行剝離時降低施加於無機層16之剪切力而防止無機層16被破裂。 又,將剝離樹脂層20的厚度設為25μm以下,藉此能夠較佳地抑制產生由於剝離樹脂層20過厚而導致之剝離樹脂層20的龜裂和阻氣膜10的翹曲等問題,並且能夠將阻氣膜10輕鬆地捲取成卷狀。The thickness of the release resin layer 20 may be appropriately set depending on the material for forming the release resin layer 20 or the characteristics of the organic layer 14, the inorganic layer 16, and the substrate 12. According to the study by the inventors of the present invention, the thickness of the release resin layer 20 is preferably 0.1 to 25 μm, more preferably 0.5 to 15 μm, and particularly preferably 1 to 10 μm. When the thickness of the peeling resin layer 20 is 0.1 μm or more, the adhesion to the substrate 12 and the organic layer 14 can be appropriately controlled, and the peeling can be easily performed at the interface with the substrate 12, and the substrate 12 can be peeled off. The shear force applied to the inorganic layer 16 is lowered to prevent the inorganic layer 16 from being broken. In addition, when the thickness of the peeling resin layer 20 is 25 μm or less, problems such as cracking of the peeling resin layer 20 and warpage of the gas barrier film 10 due to the excessive thickness of the peeling resin layer 20 can be preferably suppressed. Further, the gas barrier film 10 can be easily wound into a roll shape.
又,從對基板12進行剝離時的應力緩和的觀點考慮,剝離樹脂層20的硬度比有機層14的硬度低為較佳,並且剝離樹脂層20的楊氏模量比有機層14的楊氏模量低為較佳。亦即,剝離樹脂層20比有機層14柔軟為較佳。Moreover, from the viewpoint of stress relaxation at the time of peeling off the substrate 12, the hardness of the release resin layer 20 is preferably lower than the hardness of the organic layer 14, and the Young's modulus of the release resin layer 20 is younger than that of the organic layer 14. A low modulus is preferred. That is, it is preferable that the release resin layer 20 is softer than the organic layer 14.
在此,剝離樹脂層20的厚度比有機層14的厚度厚為較佳。 如前述,成為無機層16的基底層之有機層14的耐熱性較高為較佳。從而,使用玻璃轉移溫度Tg較高的材料作為有機層14的形成材料為較佳。在此,通常玻璃轉移溫度Tg較高的材料較硬且難以延伸,因此將較硬的有機層14的厚度設為較薄,將較柔軟的剝離樹脂層20的厚度設為較厚,藉此能夠將剝離樹脂層20作為應力緩和層而使其合理地發揮功能,並藉由在對基板12進行剝離時防止無機層16被破裂而能夠得到較高的阻氣性。Here, the thickness of the release resin layer 20 is preferably thicker than the thickness of the organic layer 14. As described above, the heat resistance of the organic layer 14 which is the underlayer of the inorganic layer 16 is preferably high. Therefore, it is preferable to use a material having a high glass transition temperature Tg as a material for forming the organic layer 14. Here, in general, a material having a high glass transition temperature Tg is hard and difficult to extend, so that the thickness of the harder organic layer 14 is made thinner, and the thickness of the softer release resin layer 20 is made thicker. The release resin layer 20 can be used as a stress relaxation layer to function reasonably, and high gas barrier properties can be obtained by preventing the inorganic layer 16 from being broken when the substrate 12 is peeled off.
又,關於剝離樹脂層20與基板12的剝離力、及剝離樹脂層20與有機層14的剝離力,若剝離樹脂層20與有機層14的剝離力比剝離樹脂層20與基板12的剝離力高,則並不限定。 又,剝離樹脂層20與基板12的剝離力為0.04N/25mm~1N/25mm為較佳。 將剝離樹脂層20與基板12的剝離力設為上述範圍,藉此能夠抑制因剝離力過弱而導致在搬送中等時被剝離之情況,並且能夠抑制因剝離力過強而導致在對基板12進行剝離時損傷無機層16,及導致阻氣膜10變形等不良情況。 另外,剝離力(黏附力)依據JIS Z 0237的180°剝離試驗方法進行測定即可。Moreover, the peeling force of the peeling resin layer 20 and the substrate 12, and the peeling force of the peeling resin layer 20 and the organic layer 14 are the peeling force of the peeling resin layer 20 and the organic layer 14 rather than the peeling force of the peeling resin layer 20 and the board|substrate 12. High is not limited. Further, the peeling force of the release resin layer 20 and the substrate 12 is preferably 0.04 N/25 mm to 1 N/25 mm. When the peeling force of the peeling resin layer 20 and the substrate 12 is in the above range, it is possible to suppress the peeling force from being excessively peeled off during transportation, and it is possible to suppress the peeling force from being excessively strong on the substrate 12 . The inorganic layer 16 is damaged during the peeling, and the gas barrier film 10 is deformed. Further, the peeling force (adhesion force) may be measured in accordance with the 180° peeling test method of JIS Z 0237.
有機保護層24為由有機化合物構成之層,且為形成於阻氣層18(更具體而言為無機層16)的上側,並對該阻氣層18進行保護之層。The organic protective layer 24 is a layer composed of an organic compound, and is a layer formed on the upper side of the gas barrier layer 18 (more specifically, the inorganic layer 16) and protecting the gas barrier layer 18.
有機保護層24的形成材料並無特別限定,能夠利用與有機層14相同的各種公知之有機化合物。The material for forming the organic protective layer 24 is not particularly limited, and various known organic compounds similar to those of the organic layer 14 can be used.
有機保護層24為黏著層之情況下,並不限定其形成材料,能夠利用複數種公知之黏附材料。 從光學特性,尤其從延遲和霧度等觀點考慮,作為黏附材料使用丙烯酸系黏著劑為較佳。 作為丙烯酸系黏著劑可例示出SK DYNE系列(Soken Chemical & Engineering Co., Ltd.製)等。When the organic protective layer 24 is an adhesive layer, the material for forming it is not limited, and a plurality of well-known adhesive materials can be used. From the viewpoint of optical characteristics, particularly from the viewpoints of retardation and haze, an acrylic adhesive is preferably used as the adhesive material. As the acrylic adhesive, SK DYNE series (manufactured by Soken Chemical & Engineering Co., Ltd.) and the like can be exemplified.
有關有機保護層24的厚度,依據有機保護層24的形成材料或無機層16的特性適當設定即可。依本發明人等之研究,將有機保護層24的厚度設為0.1~50μm為較佳,設為0.5~25μm更為佳,設為1~10μm為特佳。 將有機保護層24的厚度設為0.1μm以上,藉此能夠合理地保護無機層16。又,將有機保護層24的厚度設為50μm以下,藉此能夠提高將阻氣膜10貼附於被轉印體時之操作性。The thickness of the organic protective layer 24 may be appropriately set depending on the material of the organic protective layer 24 or the characteristics of the inorganic layer 16. According to the study by the inventors of the present invention, the thickness of the organic protective layer 24 is preferably 0.1 to 50 μm, more preferably 0.5 to 25 μm, and particularly preferably 1 to 10 μm. The thickness of the organic protective layer 24 is set to 0.1 μm or more, whereby the inorganic layer 16 can be reasonably protected. Moreover, the thickness of the organic protective layer 24 is 50 μm or less, whereby the workability when the gas barrier film 10 is attached to the object to be transferred can be improved.
保護膜26能夠利用被用作公知之保護膜之各種公知之片狀物。 作為一例子,可較佳地例示出由在前述基板12中進行例示之各種樹脂材料構成之薄膜(樹脂薄膜)。The protective film 26 can utilize various known sheets which are used as a known protective film. As an example, a film (resin film) composed of various resin materials exemplified in the substrate 12 can be preferably exemplified.
將保護膜26形成於阻氣層18(更具體而言為無機層16)的表面上之情況下,該保護膜26的形成材料的楊氏模量為6GPa以下為較佳。在該情況下,保護膜26貼附於阻氣膜10所具有之成為阻氣層18的最上層之無機層16上,在將阻氣膜10進行轉印時,從無機層16剝離而利用。將保護膜26的形成材料的楊氏模量設為6GPa以下,藉此能夠進一步較佳地防止對保護膜26進行剝離時所產生的無機層16的損傷,並能夠得到較高的阻氣性。從該方面考慮,可較佳地例示出LDPE、HDPE、PP、PET、PEN、PVC、PI等作為保護膜26的形成材料。In the case where the protective film 26 is formed on the surface of the gas barrier layer 18 (more specifically, the inorganic layer 16), the Young's modulus of the material for forming the protective film 26 is preferably 6 GPa or less. In this case, the protective film 26 is attached to the inorganic layer 16 of the gas barrier layer 10 which is the uppermost layer of the gas barrier layer 18, and is peeled off from the inorganic layer 16 when the gas barrier film 10 is transferred. . When the Young's modulus of the material for forming the protective film 26 is 6 GPa or less, damage to the inorganic layer 16 generated when the protective film 26 is peeled off can be further preferably prevented, and high gas barrier properties can be obtained. . From this viewpoint, LDPE, HDPE, PP, PET, PEN, PVC, PI, or the like can be preferably exemplified as a material for forming the protective film 26.
關於保護膜26的厚度,依據阻氣膜10的所需厚度、保護膜26的形成材料的楊氏模量等適當設定即可。 依本發明人等之研究,保護膜26的厚度為10~300μm為較佳,30~50μm為更加。 將保護膜26的厚度設為10μm以上,藉此能夠較佳地防止在捲取時等由從外部接收之衝擊等引起之無機層16的損傷,並能夠抑制搬送時所產生之褶皺及變形,在這些方面為較佳。 將保護膜26的厚度設為300μm以下,藉此能夠防止阻氣膜10變得過厚,在此方面為較佳。The thickness of the protective film 26 may be appropriately set depending on the desired thickness of the gas barrier film 10, the Young's modulus of the material forming the protective film 26, and the like. According to the study by the inventors of the present invention, the thickness of the protective film 26 is preferably 10 to 300 μm, more preferably 30 to 50 μm. By setting the thickness of the protective film 26 to 10 μm or more, it is possible to preferably prevent damage of the inorganic layer 16 caused by an impact or the like received from the outside during winding, and it is possible to suppress wrinkles and deformation generated during transportation. It is preferred in these respects. The thickness of the protective film 26 is set to 300 μm or less, whereby the gas barrier film 10 can be prevented from being excessively thick, which is preferable in this respect.
保護膜26中,可以在無機層16側的一面形成黏著層。In the protective film 26, an adhesive layer can be formed on one surface of the inorganic layer 16 side.
接著,對本發明之阻氣膜的轉印方法(亦稱為“本發明之轉印方法”)進行說明。 本發明之阻氣膜的轉印方法中,將上述阻氣膜的與基板相反側的一面貼附於被轉印體,並對基板進行剝離,藉此將具備阻氣層和剝離樹脂層之轉印層轉印於被轉印體。 以下,籍由圖4(A)~圖4(C)及圖5對本發明之轉印方法進行說明。Next, a transfer method of the gas barrier film of the present invention (also referred to as "transfer method of the present invention") will be described. In the method for transferring a gas barrier film of the present invention, one surface of the gas barrier film opposite to the substrate is attached to the transfer target, and the substrate is peeled off, thereby providing a gas barrier layer and a release resin layer. The transfer layer is transferred to the transfer target. Hereinafter, the transfer method of the present invention will be described with reference to FIGS. 4(A) to 4(C) and FIG.
圖4(A)~圖4(C)係示出如下例子者,亦即作為阻氣膜使用如圖2(A)所示之作為黏著層具有有機保護層24之阻氣膜10b,並將該阻氣膜10b轉印於作為被轉印體之相位差膜112。4(A) to 4(C) show an example in which a gas barrier film 10b having an organic protective layer 24 as an adhesive layer as shown in FIG. 2(A) is used as a gas barrier film, and This gas barrier film 10b is transferred to the retardation film 112 as a transfer target.
首先,如圖4(A)及圖4(B)所示,將阻氣膜10b的與基板12相反側的一面,亦即將有機保護層24側朝向相位差膜112側進行貼合。 貼合方法並無限定,能夠利用各種公知之薄膜狀物的貼合方法。又,此種貼合可以以薄片型進行,亦可以使用長尺寸的阻氣膜10b及相位差膜112,並藉由卷對卷(以下,還稱為RtoR)進行貼合。First, as shown in FIG. 4(A) and FIG. 4(B), one surface of the gas barrier film 10b on the opposite side to the substrate 12, that is, the organic protective layer 24 side is bonded to the retardation film 112 side. The bonding method is not limited, and a bonding method of various known film materials can be used. Further, such bonding may be carried out in a sheet type, or a long-sized gas barrier film 10b and a retardation film 112 may be used, and may be bonded by roll-to-roll (hereinafter also referred to as RtoR).
另外,圖示例中,將阻氣膜10b設為具有黏著層之結構,但並不限定於此,在與阻氣膜10b貼合之前,可以向被轉印體塗佈黏著劑來與阻氣膜10b貼合。 又,在有機保護層24(或無機層16)上具有保護膜26之情況下,在將阻氣膜貼合於被轉印體之前,對保護膜26進行剝離來貼合於被轉印體即可。Further, in the illustrated example, the gas barrier film 10b is configured to have an adhesive layer. However, the present invention is not limited thereto, and the adhesive can be applied to the transfer target before being bonded to the gas barrier film 10b. The gas film 10b is attached. Further, when the protective film 26 is provided on the organic protective layer 24 (or the inorganic layer 16), the protective film 26 is peeled off and attached to the transferred body before the gas barrier film is bonded to the transfer target. Just fine.
接著,如圖4(C)所示,從貼合在相位差膜112上之阻氣膜10b剝離基板12。 基板12的剝離方法並無限定,能夠利用各種公知之薄膜狀物的剝離方法。 又,此種基板12的剝離可以以薄片型進行,亦可以藉由RtoR進行。Next, as shown in FIG. 4(C), the substrate 12 is peeled off from the gas barrier film 10b bonded to the retardation film 112. The method of peeling off the substrate 12 is not limited, and various known methods of peeling off the film can be used. Further, the peeling of the substrate 12 may be performed in a sheet type or by RtoR.
藉此,將阻氣膜10b的轉印層30轉印於作為被轉印體之相位差膜112而能夠設為如圖5所示之帶阻氣層之相位差膜110。 本發明之阻氣膜的轉印方法能夠在基板12被剝離時防止無機層16破裂,因此能夠以維持較高的阻氣性之狀態將轉印層30轉印於被轉印體。 又,能夠將轉印層30的厚度設為非常薄,因此能夠降低針對透明性和延遲值等光學特性的影響。Thereby, the transfer layer 30 of the gas barrier film 10b is transferred to the retardation film 112 as the transfer target, and the retardation film 110 having the gas barrier layer as shown in FIG. 5 can be used. In the transfer method of the gas barrier film of the present invention, the inorganic layer 16 can be prevented from being broken when the substrate 12 is peeled off. Therefore, the transfer layer 30 can be transferred to the transfer target while maintaining high gas barrier properties. Moreover, since the thickness of the transfer layer 30 can be made very thin, it is possible to reduce the influence on optical characteristics such as transparency and retardation value.
另外,本發明中,對阻氣膜進行轉印之被轉印體並無限定。從具有較高的阻氣性,並且透明性較高,低延遲時光學特性優異之方面考慮,可較佳地使用於要求較高的阻氣性之有機EL元件和波長轉換材料等光學構件的密封中。又,對各種光學膜賦予較高的阻氣性,藉此作為光學膜兼阻氣膜而利用。Further, in the present invention, the transfer target to which the gas barrier film is transferred is not limited. From the viewpoint of having high gas barrier properties, high transparency, and excellent optical characteristics at low retardation, it can be preferably used for optical members such as organic EL elements and wavelength conversion materials which require high gas barrier properties. Sealed. Moreover, it is used as an optical film and a gas barrier film by providing a high gas barrier property to various optical films.
以下,對使用了本發明之阻氣膜之構件進行說明。 使用了本發明之阻氣膜且作為本發明之帶阻氣層之相位差膜的一例之圖5所示之帶阻氣層之相位差膜110具有在相位差膜112上層疊有轉印層30之結構,該轉印層30具有有機保護層24、無機層16、有機層14及剝離樹脂層20。 關於該帶阻氣層之相位差膜110,由於轉印層30的厚度非常薄,因此以抑制厚度增加之狀態能夠在相位差膜本身的光學特性的基礎上,設為具有較高的阻氣性之薄膜。Hereinafter, members using the gas barrier film of the present invention will be described. The retardation film 110 with a gas barrier layer shown in FIG. 5 which is an example of the retardation film with a gas barrier layer of the present invention, which has a gas barrier film of the present invention, has a transfer layer laminated on the retardation film 112. In the structure of 30, the transfer layer 30 has an organic protective layer 24, an inorganic layer 16, an organic layer 14, and a release resin layer 20. In the retardation film 110 with a gas barrier layer, since the thickness of the transfer layer 30 is extremely thin, it is possible to have a high gas barrier based on the optical characteristics of the retardation film itself in order to suppress the increase in thickness. Film of sex.
圖6係將本發明之阻氣膜進行轉印而將波長轉換層進行密封之波長轉換膜的一例。 圖6所示波長轉換膜100具有波長轉換層102、層疊在波長轉換層102的一個表面之阻氣膜104、及層疊在波長轉換層102的另一表面之轉印層30。Fig. 6 is an example of a wavelength conversion film in which a gas barrier film of the present invention is transferred to seal a wavelength conversion layer. The wavelength conversion film 100 shown in FIG. 6 has a wavelength conversion layer 102, a gas barrier film 104 laminated on one surface of the wavelength conversion layer 102, and a transfer layer 30 laminated on the other surface of the wavelength conversion layer 102.
波長轉換層102係具有將入射光之波長進行轉換來射出之功能者,例如係將量子點分散於樹脂等黏結劑中而成之量子點層。 量子點層中所含有之量子點的種類並無特別限定,依據所需波長轉換的性能等,適當選擇複數種公知之量子點即可。 又,量子點層中所含有之黏結劑的種類亦並無特別限定,依據量子點的種類、所需性能等適當選擇複數種公知之黏結劑即可。The wavelength conversion layer 102 has a function of converting and outputting the wavelength of incident light, and is, for example, a quantum dot layer in which quantum dots are dispersed in a binder such as a resin. The type of the quantum dot contained in the quantum dot layer is not particularly limited, and a plurality of well-known quantum dots may be appropriately selected depending on the performance of the desired wavelength conversion or the like. Further, the type of the binder contained in the quantum dot layer is not particularly limited, and a plurality of known binders may be appropriately selected depending on the type of the quantum dot, the desired performance, and the like.
阻氣膜104係用於對波長轉換層102進行密封者,只要係具有對波長轉換層102進行密封時所需的阻氣性則並無特別限定,能夠適當利用公知之阻氣膜。The gas barrier film 104 is used for sealing the wavelength conversion layer 102, and is not particularly limited as long as it has gas barrier properties required for sealing the wavelength conversion layer 102, and a known gas barrier film can be suitably used.
如圖6所示,波長轉換膜100係利用以往的阻氣膜104對波長轉換層102的一個表面進行密封,並利用從本發明之阻氣膜10轉印之轉印層30對另一表面進行密封者。 如此,利用本發明之阻氣膜對波長轉換層的至少一個表面進行密封,藉此能夠將波長轉換膜整體的厚度設為較薄。As shown in FIG. 6, the wavelength conversion film 100 seals one surface of the wavelength conversion layer 102 by the conventional gas barrier film 104, and uses the transfer layer 30 transferred from the gas barrier film 10 of the present invention to the other surface. Perform the seal. As described above, at least one surface of the wavelength conversion layer is sealed by the gas barrier film of the present invention, whereby the thickness of the entire wavelength conversion film can be made thin.
另外,圖6所示之例子中,設為利用本發明之阻氣膜對波長轉換層的一個表面進行密封之結構,但並不限定於此,亦可以設為利用本發明之阻氣膜對波長轉換層的兩個表面進行密封之結構。藉此,能夠將波長轉換膜整體的厚度設為進一步較薄。Further, in the example shown in FIG. 6, the gas barrier film of the present invention is used to seal one surface of the wavelength conversion layer. However, the present invention is not limited thereto, and the gas barrier film pair of the present invention may be used. The structure in which the two surfaces of the wavelength conversion layer are sealed. Thereby, the thickness of the entire wavelength conversion film can be made thinner.
圖7(A)~圖7(C)分別為對本發明之阻氣膜進行轉印而對有機EL元件進行密封之有機EL層疊體的一例。7(A) to 7(C) are examples of the organic EL laminate in which the organic EL element is sealed by transferring the gas barrier film of the present invention.
圖7(A)所示之有機EL層疊體120a具有元件基板122、形成在元件基板122上之有機EL元件124、及包覆有機EL元件124而層疊之轉印層30。 元件基板122能夠利用用於各種有機EL裝置之所有元件基板。具體而言,可例示出由玻璃、塑料、金屬、及陶瓷等構成之元件基板。又,為了防止因水分等而引起之有機EL元件124的劣化,能夠防止水分等滲透元件基板122而到達有機EL元件124為較佳。因此,關於元件基板122,使用如玻璃和金屬等,由水分等的含量較低,並且水分等的透過率較低的材料構成之基板為較佳。The organic EL laminate 120a shown in FIG. 7A has an element substrate 122, an organic EL element 124 formed on the element substrate 122, and a transfer layer 30 laminated with the organic EL element 124. The element substrate 122 can utilize all of the element substrates for various organic EL devices. Specifically, an element substrate made of glass, plastic, metal, ceramics or the like can be exemplified. Moreover, in order to prevent deterioration of the organic EL element 124 due to moisture or the like, it is preferable to prevent the water from penetrating the element substrate 122 and to reach the organic EL element 124. Therefore, as the element substrate 122, a substrate made of a material such as glass or metal, which has a low content of moisture or the like and a low transmittance of moisture or the like is preferably used.
另外,如圖7(B)所示之有機EL層疊體120b,可以使用本發明之阻氣膜10(更具體而言為轉印層30)來作為元件基板。或者,可以使用將本發明之阻氣膜10轉印至樹脂基材者來作為元件基板。Further, as the organic EL laminate 120b shown in Fig. 7(B), the gas barrier film 10 (more specifically, the transfer layer 30) of the present invention can be used as the element substrate. Alternatively, a person who transfers the gas barrier film 10 of the present invention to a resin substrate can be used as the element substrate.
有機EL元件124係例如具有有機電致發光層、作為對有機電致發光層進行夾持之電極對之透明電極及反射電極之公知之有機EL元件。 如圖所示,有機EL元件124藉由由本發明之阻氣膜10轉印之轉印層30而被密封。 如此,利用本發明之阻氣膜對有機EL元件124進行密封,藉此能夠將有機EL層疊體整體的厚度設為較薄。The organic EL element 124 is, for example, a known organic EL element having an organic electroluminescence layer, a transparent electrode and a reflection electrode as an electrode pair sandwiching the organic electroluminescence layer. As shown in the figure, the organic EL element 124 is sealed by the transfer layer 30 transferred by the gas barrier film 10 of the present invention. By sealing the organic EL element 124 by the gas barrier film of the present invention, the thickness of the entire organic EL laminate can be made thin.
另外,有機EL層疊體可以係從轉印層30側射出光之頂部發光型,亦可以係從元件基板122側射出光之底部發光型。Further, the organic EL laminate may be a top emission type that emits light from the transfer layer 30 side, or may be a bottom emission type that emits light from the element substrate 122 side.
又,如圖7(C)所示之有機EL層疊體120c,可以在有機EL元件124與轉印層30之間具有鈍化膜126。 亦即,可以設為利用鈍化膜126對有機EL元件124進行密封,並在該鈍化膜126上轉印轉印層30之結構。 鈍化膜126係用於防止水分和氧等到達有機EL元件124而使有機EL元件124劣化者。 可利用於公知之有機EL裝置,且能夠利用由顯現阻氣性之材料構成之各種膜(層)作為此種鈍化膜126。具體而言,可例示出與無機層16同樣地具有阻氣性,且由氮化矽、氧化矽等無機化合物構成之膜。 關於鈍化膜126,利用依據膜的形成材料之公知之方法進行成膜即可。Further, as the organic EL laminate 120c shown in FIG. 7(C), a passivation film 126 may be provided between the organic EL element 124 and the transfer layer 30. That is, the organic EL element 124 can be sealed by the passivation film 126, and the structure of the transfer layer 30 can be transferred onto the passivation film 126. The passivation film 126 is for preventing moisture, oxygen, and the like from reaching the organic EL element 124 and degrading the organic EL element 124. It can be used for a known organic EL device, and various films (layers) composed of a material exhibiting gas barrier properties can be used as such a passivation film 126. Specifically, a film having gas barrier properties similar to the inorganic layer 16 and composed of an inorganic compound such as tantalum nitride or ruthenium oxide can be exemplified. The passivation film 126 may be formed by a known method depending on the material for forming the film.
以下,參閱圖8(A)及圖8(B),對本發明之阻氣膜的製造方法進行說明。 另外,以下的例子中,使用長尺寸基板12和保護膜26等,並藉由RtoR而製造阻氣膜者作為較佳之方案。如眾所周知,RtoR係指從捲繞長尺寸被處理物而成之輥送出被處理物,並且沿長邊方向搬送的同時進行成膜等處理,將已處理之被處理物再次捲繞成卷狀之製造方法。Hereinafter, a method for producing a gas barrier film of the present invention will be described with reference to Figs. 8(A) and 8(B). Further, in the following examples, it is preferable to use the long-length substrate 12, the protective film 26, and the like, and to manufacture a gas barrier film by RtoR. As is well known, RtoR refers to a process in which a material to be processed is wound from a roll obtained by winding a long-sized object to be processed, and is conveyed in the longitudinal direction while film formation is performed, and the processed object to be processed is again wound into a roll. Manufacturing method.
首先,使用在圖8(A)中概括表示之成膜裝置在基板12上形成剝離樹脂層20。 具體而言,製備例如包含有機溶剤和成為剝離樹脂層20之有機化合物之塗佈組成物。 另一方面,將基板輥Ra裝填於有機成膜裝置的規定位置,該基板輥Ra藉由將長尺寸基板12捲繞成卷狀而成。接著,從基板輥Ra送出基板12而沿到達捲取位置之規定路徑進行通紙。進而,將成為剝離樹脂層20之塗佈組成物填充於塗佈部40的規定位置。成膜裝置具有用於將基板12沿規定路徑進行搬送之搬送輥對48。 而且,從基板輥Ra送出基板12而沿長邊方向搬送的同時在塗佈部40將所製備之塗佈組成物塗佈於基板12,接著在乾燥部42對已塗佈之塗佈組成物進行乾燥,進而依據需要在硬化部44進行紫外線照射或加熱等,藉此形成剝離樹脂層20。又,將在基板12上形成有剝離樹脂層20之長尺寸薄膜捲繞成卷狀而作為基材輥Rb。 另外,雖省略圖示,但作為優選方案,在形成剝離樹脂層20之後層疊保護膜,其次進行捲取而作為基材輥Rb。First, the release resin layer 20 is formed on the substrate 12 by using the film forming apparatus schematically shown in FIG. 8(A). Specifically, for example, a coating composition containing an organic solvent and an organic compound which becomes the release resin layer 20 is prepared. On the other hand, the substrate roll Ra is loaded at a predetermined position of the organic film forming apparatus, and the substrate roll Ra is formed by winding the long-sized substrate 12 into a roll shape. Next, the substrate 12 is fed out from the substrate roll Ra to pass the paper in a predetermined path to the winding position. Further, the coating composition to be the release resin layer 20 is filled in a predetermined position of the coating portion 40. The film forming apparatus has a transport roller pair 48 for transporting the substrate 12 along a predetermined path. Then, the substrate 12 is sent out from the substrate roll Ra and transported in the longitudinal direction, and the prepared coating composition is applied to the substrate 12 in the coating portion 40, and then the applied coating composition is applied to the drying portion 42. Drying is carried out, and ultraviolet light irradiation or heating or the like is performed on the hardened portion 44 as necessary to form the release resin layer 20. Moreover, the long-length film in which the peeling resin layer 20 was formed on the board|substrate 12 was wound in the roll shape as the base material roll Rb. Moreover, although illustration is abbreviate|omitted, it is preferable to laminate|stack the protective film after formation of the peeling resin layer 20, and it is winding up as the base material roll Rb.
接著,將形成有剝離樹脂層20之基板12設為被成膜基材Za,被成膜基材Za的剝離樹脂層20上形成有機層14。關於有機層14的形成,實質上以與使用如圖8(A)所示之有機成膜裝置來形成剝離樹脂層20之方式相同的方式進行即可。 亦即,製備例如包含有機溶剤、成為有機層14之有機化合物、及聚合起始劑之塗佈組成物。 又,將基材輥Rb裝填於有機成膜裝置的規定位置,該基材輥Rb藉由將長尺寸被成膜基材Za捲繞成卷狀而成。接著,從基材輥Rb送出被成膜基材Za而沿到達捲取位置之規定路徑進行通紙。進而,將成為有機層14之塗佈組成物填充於塗佈部40的規定位置。 而且,從基材輥Rb送出被成膜基材Za而沿長邊方向搬送的同時在塗佈部40將所製備之塗佈組成物塗佈於剝離樹脂層20上,接著在乾燥部42對已塗佈之塗佈組成物進行乾燥,並在硬化部44藉由紫外線照射等對有機化合物進行聚合(交聯)而形成有機層14。又,將形成了有機層14之長尺寸被成膜基材Za捲取成卷狀而作為基材輥Rc。Next, the substrate 12 on which the release resin layer 20 is formed is used as the film formation substrate Za, and the organic layer 14 is formed on the release resin layer 20 of the film formation substrate Za. The formation of the organic layer 14 may be carried out in substantially the same manner as the method of forming the release resin layer 20 using the organic film forming apparatus shown in FIG. 8(A). That is, a coating composition containing, for example, an organic solvent, an organic compound which becomes the organic layer 14, and a polymerization initiator is prepared. Further, the substrate roll Rb is loaded at a predetermined position of the organic film forming apparatus, and the base roll Rb is formed by winding a long film-formed substrate Za into a roll shape. Next, the film formation substrate Za is sent out from the substrate roll Rb, and the paper is passed through a predetermined path to the winding position. Further, the coating composition to be the organic layer 14 is filled in a predetermined position of the coating portion 40. Then, the coated substrate 30 is fed from the substrate roll Rb and transported in the longitudinal direction, and the prepared coating composition is applied onto the release resin layer 20 in the coating unit 40, followed by the drying unit 42. The applied coating composition is dried, and the organic layer 14 is formed by polymerizing (crosslinking) the organic compound in the hardened portion 44 by ultraviolet irradiation or the like. Moreover, the long dimension of the organic layer 14 is formed by winding the film formation substrate Za into a roll shape as the substrate roll Rc.
另外,可以在形成有機層14之後,將保護膜貼附於有機層14。關於保護膜的貼附,在有機層14與導輥等其他構件接觸之前進行為較佳。 藉此,能夠防止作為無機層16的基底層之有機層14受損,並能夠在平滑的有機層14上合理地形成無機層16,因此能夠得到顯現較高的阻氣性之阻氣膜。 又,上述例中,設為分別進行剝離樹脂層20的成膜和有機層14的成膜之結構,但並不限定於此,在剝離樹脂層的成膜後,可以在未進行捲取之狀態下持續進行有機層14的成膜。亦即,可以使用成膜裝置來連續進行剝離樹脂層20的成膜和有機層14的成膜,該成膜裝置在基板12的搬送路徑中配置有用於形成剝離樹脂層20之塗佈部40、乾燥部42及硬化部44、以及用於形成有機層14之塗佈部40、乾燥部42及硬化部44。In addition, the protective film may be attached to the organic layer 14 after the organic layer 14 is formed. The attachment of the protective film is preferably performed before the organic layer 14 comes into contact with other members such as the guide rolls. Thereby, the organic layer 14 which is the underlying layer of the inorganic layer 16 can be prevented from being damaged, and the inorganic layer 16 can be formed reasonably on the smooth organic layer 14, so that a gas barrier film which exhibits high gas barrier properties can be obtained. Moreover, in the above-described example, the film formation of the peeling resin layer 20 and the film formation of the organic layer 14 are respectively performed. However, the present invention is not limited thereto, and after the film formation of the release resin layer, the film may be unwound. The film formation of the organic layer 14 is continued in the state. In other words, the film formation apparatus can continuously perform the film formation of the release resin layer 20 and the film formation of the organic layer 14, and the film formation apparatus can arrange the coating portion 40 for forming the release resin layer 20 in the conveyance path of the substrate 12. The drying unit 42 and the curing unit 44, and the coating unit 40, the drying unit 42, and the curing unit 44 for forming the organic layer 14.
接著,在如圖8(B)中概括表示之無機成膜裝置中,在形成有剝離樹脂層20和有機層14之基板12(以下,有時稱為“被成膜基材Zb”)上形成無機層16,並且在無機層16上貼附保護膜26來製作阻氣膜10。 圖8(B)所示之無機成膜裝置係作為一例而藉由CCP-CVD(電容耦合型等離子體化學氣相沉積法)形成無機層16者,並具有供給室50、成膜室52、及捲取室54。 首先,將基材輥Rc裝填於供給室50的規定位置。其次,從基材輥Rc送出被成膜基材Zb而沿從供給室50經由成膜室52而到達捲取室54之規定路徑進行通紙。關於基材輥Rc,以有機層14成為成膜室52中的成膜面的方式進行裝填。 又,將保護膜輥26R裝填於成膜室52的規定位置。接著,從保護膜輥26R送出保護膜26而沿從成膜室52到達捲取室54之規定路徑進行通紙。Next, in the inorganic film forming apparatus generally shown in FIG. 8(B), the substrate 12 on which the release resin layer 20 and the organic layer 14 are formed (hereinafter, sometimes referred to as "film formation substrate Zb") is used. The inorganic layer 16 is formed, and the protective film 26 is attached to the inorganic layer 16 to form the gas barrier film 10. The inorganic film forming apparatus shown in FIG. 8(B) is an example in which the inorganic layer 16 is formed by CCP-CVD (capacitive coupling type plasma chemical vapor deposition method), and has a supply chamber 50 and a film forming chamber 52. And the take-up chamber 54. First, the substrate roll Rc is loaded into a predetermined position of the supply chamber 50. Next, the film formation substrate Zb is sent out from the substrate roll Rc, and the paper passes through a predetermined path from the supply chamber 50 to the winding chamber 54 through the film forming chamber 52. The substrate roll Rc is loaded so that the organic layer 14 becomes a film formation surface in the film formation chamber 52. Further, the protective film roll 26R is loaded at a predetermined position of the film forming chamber 52. Next, the protective film 26 is sent out from the protective film roll 26R, and the paper passes through a predetermined path from the film forming chamber 52 to the winding chamber 54.
接著,將供給室50藉由真空排氣手段50a,將成膜室52藉由真空排氣手段52a,將捲取室54藉由真空排氣手段54a分別進行排氣而對各室進行減壓直至成為規定壓力。 在各室成為規定壓力之後開始搬送被成膜基材Zb和保護膜26。Next, the supply chamber 50 is evacuated to the film forming chamber 52 by the vacuum exhausting means 52a, and the winding chamber 54 is exhausted by the vacuum exhausting means 54a to evacuate the respective chambers. Until it becomes the prescribed pressure. After the respective chambers have reached a predetermined pressure, the film formation substrate Zb and the protective film 26 are started to be conveyed.
關於被成膜基材Zb,從基材輥Rc被送出並被引導至導輥58,藉此被搬送至成膜室52。 被搬送至成膜室52的被成膜基材Zb被引導至導輥60而捲繞於圓筒狀的滾筒62的周面。滾筒62係還作為CCP-CVD中的電極而發揮作用者。另外,作為較佳方案,滾筒62具有溫度調節功能。被成膜基材Zb被設為如下層疊膜,亦即藉由滾筒62而沿規定路徑被搬送的同時藉由CCP-CVD形成無機層16,並在基板12上形成有剝離樹脂層20和有機層14與無機層16的組合。CCP-CVD係具有由滾筒62和噴淋頭電極(shower electrode)64構成之電極對、原料氣體供給部68、及高頻電源70等之成膜手段。 關於依據等離子體CVD之無機層16的形成,藉由依據無機層16的形成材料等之公知之方法進行即可。又,關於無機層16的形成,除了CCP-CVD以外,還能夠利用ICP-CVD(感應耦合型等離子體化學氣相沉積法)、濺射、真空沉積等各種公知之氣相成膜法。The film formation substrate Zb is sent out from the substrate roll Rc and guided to the guide roller 58, thereby being conveyed to the film formation chamber 52. The film formation substrate Zb conveyed to the film formation chamber 52 is guided to the guide roller 60 and wound around the circumferential surface of the cylindrical drum 62. The roller 62 also functions as an electrode in CCP-CVD. Further, as a preferred embodiment, the drum 62 has a temperature adjustment function. The film formation substrate Zb is formed as a laminated film in which the inorganic layer 16 is formed by CCP-CVD while being conveyed along a predetermined path by the roller 62, and the release resin layer 20 and the organic layer are formed on the substrate 12. The combination of layer 14 and inorganic layer 16. The CCP-CVD system has a film forming means such as an electrode pair composed of a drum 62 and a shower electrode 64, a material gas supply unit 68, and a high-frequency power source 70. The formation of the inorganic layer 16 by plasma CVD may be carried out by a known method in accordance with the formation material of the inorganic layer 16 or the like. Further, in addition to CCP-CVD, various known vapor phase film formation methods such as ICP-CVD (inductively coupled plasma chemical vapor deposition), sputtering, and vacuum deposition can be used for the formation of the inorganic layer 16.
另一方面,與該被成膜基材Zb的搬送同步從保護膜輥26R送出保護膜26並沿長邊方向搬送。 藉由層疊輥對72層疊並壓合形成有無機層16之被成膜基材Zb和保護膜26,藉此製作阻氣膜10。 另外,可以在與保護膜26的無機層16對向之表面形成黏著層。On the other hand, in synchronization with the conveyance of the film formation substrate Zb, the protective film 26 is sent out from the protective film roll 26R and conveyed in the longitudinal direction. The film-forming substrate Zb on which the inorganic layer 16 is formed and the protective film 26 are laminated and laminated by the laminating roller pair 72, whereby the gas barrier film 10 is produced. Further, an adhesive layer may be formed on the surface opposite to the inorganic layer 16 of the protective film 26.
藉由RtoR製作阻氣膜10時,保護膜26的貼附在形成無機層16之後,且無機層16與導輥等其他構件接觸之前進行為較佳。 藉此,防止無機層16受損而可得到顯現目標阻氣性之阻氣膜10。When the gas barrier film 10 is produced by RtoR, it is preferable that the protective film 26 is attached after the inorganic layer 16 is formed, and before the inorganic layer 16 is brought into contact with other members such as a guide roll. Thereby, the inorganic layer 16 is prevented from being damaged, and the gas barrier film 10 exhibiting the target gas barrier property can be obtained.
藉由依據層疊輥對72之層疊膜與保護膜26的層疊和貼附所製作之阻氣膜10從成膜室52被搬送至捲取室54,並藉由導輥76沿規定路徑被引導而被捲取而成為捲繞長尺寸阻氣膜10之阻隔膜輥Rd。The gas barrier film 10 produced by laminating and attaching the laminated film of the laminated roller pair 72 and the protective film 26 is conveyed from the film forming chamber 52 to the winding chamber 54, and guided by the guide roller 76 along a predetermined path. The film is taken up to form a barrier film roll Rd for winding the long-size gas barrier film 10.
另外,被成膜基材Zb為在有機層14上具有保護膜者之情況下,在無機層16的成膜前,對保護膜進行剝離之後進行無機層16的成膜即可。 關於保護膜的剝離,在到達無機層16的成膜手段之路徑,亦即在不存在與有機層14接觸之導輥等構件之位置進行為較佳。In addition, when the film formation substrate Zb is a protective film on the organic layer 14, the inorganic layer 16 may be formed after the protective film is peeled off before the inorganic layer 16 is formed. The peeling of the protective film is preferably carried out at a position of a film forming means that reaches the inorganic layer 16, that is, at a position where a member such as a guide roll that is in contact with the organic layer 14 is not present.
另外,在無機層16上進一步形成有機保護層24之情況下,將形成有剝離樹脂層20、有機層14及無機層16之基板12作為被成膜基材,並使用如圖8(A)所示之有機成膜裝置,以與剝離樹脂層20和有機層14相同的方式形成即可。Further, when the organic protective layer 24 is further formed on the inorganic layer 16, the substrate 12 on which the release resin layer 20, the organic layer 14 and the inorganic layer 16 are formed is used as a film formation substrate, and as shown in Fig. 8(A) The organic film forming apparatus shown may be formed in the same manner as the peeling resin layer 20 and the organic layer 14.
以上、對本發明之阻氣膜進行了詳細說明,但本發明並不限定於上述實施形態,在不脫離本發明之宗旨的範圍內能夠進行各種改良或變更。 [實施例]The gas barrier film of the present invention has been described in detail above, but the present invention is not limited to the above-described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention. [Examples]
以下,舉出本發明之具體實施例進一步詳細地對本發明進行說明。Hereinafter, the present invention will be described in further detail with reference to specific embodiments of the invention.
[實施例1] 作為實施例1製作圖1(A)所示之阻氣膜10a。[Example 1] As the first example, the gas barrier film 10a shown in Fig. 1(A) was produced.
<剝離樹脂層20的形成> 作為基板12使用了寬度1000mm、厚度50μm、長度100m之長尺寸PET薄膜(TOYOBO CO., LTD.製、Cosmo shine A4100)。 在該基板12的未底塗表面側依以下步驟形成了剝離樹脂層20。<Formation of Release Resin Layer 20> A long-length PET film (Cosmo shine A4100, manufactured by TOYOBO CO., LTD.) having a width of 1000 mm, a thickness of 50 μm, and a length of 100 m was used as the substrate 12. The release resin layer 20 is formed on the unprimed surface side of the substrate 12 in the following procedure.
使用環己烷來溶解COC樹脂(Mitsui Chemicals, Inc.製 APEL 6015T)而製備固體成分濃度10%之塗佈液來作為成為剝離樹脂層20之塗佈液A1。 將該塗佈液A1填充於如圖8(A)所示之依據RtoR之成膜裝置的塗佈部40。塗佈部40使用了模塗佈機。又,將基板12捲繞成卷狀而成之基板輥Ra裝填於規定位置來沿規定搬送路徑插通基板12。 而且,將基板12沿長邊方向搬送的同時以乾燥膜厚成為2μm的方式藉由塗佈部40將塗佈液A1塗佈於基板12上,並在乾燥部42,以乾燥溫度100℃乾燥3分鐘,藉此在基板12上形成了剝離樹脂層20。此時未使用硬化部44。 亦即,剝離樹脂層20的形成材料係環烯烴共聚物。The COC resin (APEL 6015T manufactured by Mitsui Chemicals, Inc.) was dissolved in cyclohexane to prepare a coating liquid having a solid concentration of 10% as the coating liquid A1 to be the release resin layer 20. This coating liquid A1 is filled in the coating portion 40 of the film forming apparatus according to RtoR as shown in Fig. 8(A). The coating unit 40 uses a die coater. Moreover, the substrate roll Ra in which the substrate 12 is wound into a roll is loaded at a predetermined position, and the substrate 12 is inserted through the predetermined transport path. In addition, the coating liquid A1 is applied onto the substrate 12 by the coating portion 40 so that the dried film thickness is 2 μm while the substrate 12 is conveyed in the longitudinal direction, and dried at a drying temperature of 100 ° C in the drying portion 42. The peeling resin layer 20 was formed on the substrate 12 by 3 minutes. The hardened portion 44 is not used at this time. That is, the material forming the release resin layer 20 is a cyclic olefin copolymer.
藉由高感度差示掃描量熱計(Hitachi High-Tech Science Corporation.製、DSC7000X),並依據JIS K 7121對所形成之剝離樹脂層20的玻璃轉移溫度Tg進行測定之結果為145℃。The glass transition temperature Tg of the formed release resin layer 20 was measured by a high-sensitivity differential scanning calorimeter (manufactured by Hitachi High-Tech Science Corporation, DSC7000X) in accordance with JIS K 7121, and the result was 145 °C.
<有機層14的形成> 接著,在所形成之剝離樹脂層20上依以下步驟形成了有機層14。 準備A-DPH(Shin-Nakamura Chemical Co.,Ltd製)及光聚合起始劑(BASF JAPAN LTD.製 Irg819),以重量比率成為97:3之方式進行稱量,並將它們溶解於甲基乙基酮來製備固體成分濃度15%之塗佈液而作為成為有機層14之塗佈液B1。<Formation of Organic Layer 14> Next, the organic layer 14 is formed on the formed release resin layer 20 in the following procedure. A-DPH (manufactured by Shin-Nakamura Chemical Co., Ltd.) and a photopolymerization initiator (Irg 819 manufactured by BASF JAPAN LTD.) were prepared and weighed in such a manner that the weight ratio became 97:3, and they were dissolved in methyl group. A coating liquid having a solid concentration of 15% was prepared as ethyl ketone to obtain a coating liquid B1 as the organic layer 14.
將該塗佈液B1填充於如圖8(A)所示之依據RtoR之成膜裝置的塗佈部40。塗佈部40使用了模塗佈機。又,將具有剝離樹脂層20之基板12(以下,有時稱為“被成膜基材Za”)捲繞成卷狀而成之基板輥Rb裝填於規定位置來沿規定搬送路徑插通被成膜基材Za。 而且,將被成膜基材Za沿長邊方向搬送的同時以乾燥膜厚成為1μm的方式藉由塗佈部40將塗佈液B1塗佈於被成膜基材Za的剝離樹脂層20上,並在乾燥部42,以乾燥溫度50℃乾燥3分鐘,並在硬化部44照射紫外線(累積照射量約700mJ/cm2 )來使其硬化,藉此在剝離樹脂層20上形成了有機層14。 另外,使有機層14硬化之後且在與最初接觸於有機層14側的表面之輥接觸之前,在有機層14上貼附聚乙烯保護膜之後進行了捲取。This coating liquid B1 is filled in the coating portion 40 of the film forming apparatus according to RtoR as shown in Fig. 8(A). The coating unit 40 uses a die coater. In addition, the substrate roll Rb obtained by winding the substrate 12 having the peeling resin layer 20 (hereinafter sometimes referred to as "film formation substrate Za") into a roll shape is loaded at a predetermined position and inserted through a predetermined transport path. Film-forming substrate Za. In addition, the coating liquid B1 is applied onto the release resin layer 20 of the film formation substrate Za by the coating portion 40 so that the film thickness of the film formation substrate is in the longitudinal direction and the dry film thickness is 1 μm. And drying in the drying section 42 at a drying temperature of 50 ° C for 3 minutes, and curing the hardened portion 44 with ultraviolet rays (accumulated irradiation amount of about 700 mJ/cm 2 ), thereby forming an organic layer on the release resin layer 20. 14. Further, after the organic layer 14 is hardened and before the contact with the roll which is initially in contact with the surface on the organic layer 14 side, a polyethylene protective film is attached to the organic layer 14, and then wound up.
藉由高感度差示掃描量熱計(Hitachi High-Tech Science Corporation.製、DSC7000X),並依據JIS K 7121對所形成之有機層14的玻璃轉移溫度Tg進行測定之結果為250℃以上之測定上限。The glass transition temperature Tg of the formed organic layer 14 was measured by a high-sensitivity differential scanning calorimeter (manufactured by Hitachi High-Tech Science Co., Ltd., DSC7000X) in accordance with JIS K 7121, and the result was measured at 250 ° C or higher. Upper limit.
<無機層16的形成> 接著,在所形成之有機層14上依以下步驟形成了無機層16。 將形成有剝離樹脂層20和有機層14之基板12(以下,有時稱為“被成膜基材Zb”)捲繞成卷狀而成之基材輥Rc裝填於如圖8(B)所示之成膜裝置的供給室50的規定位置,並將保護膜輥26R裝填於成膜室52的規定位置。進而,從基材輥Rc送出被成膜基材Zb並沿從供給室50經由成膜室52而到達捲取室54之規定搬送路徑進行了通紙。又,從保護膜輥26R送出保護膜26並沿從成膜室52到達捲取室54之規定搬送路徑進行了通紙。 在此種狀態下,將被成膜基材Zb和保護膜26同步進行搬送的同時通過將要成膜之前之薄膜表面接觸輥之後從被成膜基材Zb剝離保護膜,在被支撐/引導至成膜室52內的滾筒62之被成膜基材Zb的有機層14表面藉由CCP-CVD形成氮化矽膜作為無機層16。接著,藉由層疊輥對72在無機層16上層疊並貼附保護膜26來製作如圖1所示之阻氣膜10a而進行捲取。<Formation of Inorganic Layer 16> Next, the inorganic layer 16 is formed on the formed organic layer 14 in the following procedure. The substrate roll Rc obtained by winding the substrate 12 on which the release resin layer 20 and the organic layer 14 are formed (hereinafter sometimes referred to as "film formation substrate Zb") into a roll shape is loaded as shown in FIG. 8(B). A predetermined position of the supply chamber 50 of the film forming apparatus is shown, and the protective film roll 26R is loaded at a predetermined position of the film forming chamber 52. Further, the film formation substrate Zb is sent out from the substrate roll Rc, and the paper is conveyed in a predetermined conveyance path from the supply chamber 50 to the winding chamber 54 through the film formation chamber 52. Moreover, the protective film 26 is sent out from the protective film roll 26R, and the paper is conveyed along the predetermined conveyance path from the film forming chamber 52 to the winding chamber 54. In this state, the film-forming substrate Zb and the protective film 26 are simultaneously conveyed, and the protective film is peeled off from the film-formed substrate Zb after the film surface before the film formation is brought into contact with the roll, and is supported/guided to A surface of the organic layer 14 of the film formation substrate Zb of the roll 62 in the film formation chamber 52 is formed as a inorganic layer 16 by CCP-CVD. Next, the gas barrier film 10a shown in FIG. 1 is formed by laminating and laminating the protective film 26 on the inorganic layer 16 by the laminating roller pair 72, and winding up.
無機層16的形成中,使用了矽烷氣體(流量160sccm)、氨氣(流量370sccm)及氫氣(流量2000sccm)作為原料氣體。電源使用頻率13.56MHz之高頻電源,並將等離子體激發電力設為8kW。將成膜壓力設為40Pa。無機層16的膜厚為30nm。 保護膜26的貼附在形成無機層16之後且在無機層16與其他構件接觸之前進行。又,使用聚乙烯薄膜作為保護膜26。In the formation of the inorganic layer 16, a decane gas (flow rate: 160 sccm), ammonia gas (flow rate: 370 sccm), and hydrogen gas (flow rate: 2000 sccm) were used as a material gas. The power supply uses a high frequency power supply having a frequency of 13.56 MHz, and the plasma excitation power is set to 8 kW. The film formation pressure was set to 40 Pa. The film thickness of the inorganic layer 16 was 30 nm. The attachment of the protective film 26 is performed after the inorganic layer 16 is formed and before the inorganic layer 16 is brought into contact with other members. Further, a polyethylene film is used as the protective film 26.
[實施例2] 進而,在無機層16上形成了以下所示之有機保護層24,除此以外,以與實施例1相同之方式製作了如圖2(A)所示之阻氣膜10b。[Example 2] A gas barrier film 10b as shown in Fig. 2(A) was produced in the same manner as in Example 1 except that the organic protective layer 24 shown below was formed on the inorganic layer 16. .
以重量比率成為78:10:10:2之方式對聚氨酯骨架丙烯酸聚合物(TAISEI FINE CHEMICAL CO., LTD.製 ACRIT 8BR930)、光聚合起始劑(BASF JAPAN LTD.製 Irg184)、矽烷偶聯劑(Shin-Etsu Chemical Co., Ltd.製 KBM5103)、軟化劑(TOYOBO CO., LTD.製 BYRON U1400)進行稱量,並將它們溶解於甲基乙基酮來製備固體成分濃度15%的塗佈液而作為成為有機保護層24之塗佈液C1。 將該塗佈液C1填充於如圖8(A)所示之依據RtoR之成膜裝置的塗佈部40。塗佈部40使用了模塗佈機。又,將形成有剝離樹脂層20、有機層14及無機層16之基板12(以下,有時稱為“被成膜基材Zc”)捲繞成卷狀而成之基板輥裝填於規定位置來沿規定搬送路徑插通被成膜基材Zc。 而且,將被成膜基材Zc沿長邊方向搬送的同時以乾燥膜厚成為1μm的方式藉由塗佈部40將塗佈液C1塗佈於被成膜基材Zc的無機層16上,並在乾燥部42,以乾燥溫度100℃乾燥3分鐘,並在硬化部44照射紫外線(累積照射量約600mJ/cm2 )來使其硬化,藉此在無機層16上形成了有機保護層24。Polyurethane skeleton acrylic polymer (ACRIT 8BR930 manufactured by TAISEI FINE CHEMICAL CO., LTD.), photopolymerization initiator (Irg 184 manufactured by BASF JAPAN LTD.), decane coupling in a weight ratio of 78:10:10:2 A solution (KBM5103 manufactured by Shin-Etsu Chemical Co., Ltd.) and a softener (BYRON U1400 manufactured by TOYOBO CO., LTD.) were weighed and dissolved in methyl ethyl ketone to prepare a solid concentration of 15%. The coating liquid serves as the coating liquid C1 which becomes the organic protective layer 24. This coating liquid C1 is filled in the coating portion 40 of the film forming apparatus according to RtoR as shown in Fig. 8(A). The coating unit 40 uses a die coater. Further, the substrate 12 on which the peeling resin layer 20, the organic layer 14 and the inorganic layer 16 are formed (hereinafter sometimes referred to as "film formation substrate Zc") is wound into a roll, and the substrate roll is loaded in a predetermined position. The film formation substrate Zc is inserted through the predetermined conveyance path. In addition, the coating liquid C1 is applied onto the inorganic layer 16 of the film formation substrate Zc by the coating portion 40 so that the film thickness of the film formation substrate Zc is increased in the longitudinal direction, and the dry film thickness is 1 μm. The drying portion 42 is dried at a drying temperature of 100 ° C for 3 minutes, and is cured by irradiating ultraviolet rays (accumulated irradiation amount of about 600 mJ/cm 2 ) to the hardened portion 44, whereby an organic protective layer 24 is formed on the inorganic layer 16. .
[實施例3] 使用以下的塗佈液C2作為成為有機保護層24之塗佈液,將有機保護層24的厚度設為3μm,在形成機保護層24之後,以與上述相同之方式藉由最初之薄膜表面接觸輥貼附隔膜(FUJIMORI KOGYO CO.,LTD.製FILM BYNA BD)作為保護膜26,除此以外,以與實施例2相同之方式製作了如圖2(B)所示之阻氣膜10c。 關於塗佈液C2,將硬化剤L-45(Soken Chemical & Engineering Co., Ltd.製)以100:2比率添加於SK DYNE NT21(Soken Chemical & Engineering Co., Ltd.製),並將其稀釋於乙酸丁酯而製備成固體成分濃度15%。 該有機保護層24係丙烯酸系黏著劑。[Example 3] The following coating liquid C2 was used as the coating liquid to be the organic protective layer 24, and the thickness of the organic protective layer 24 was set to 3 μm, and after the machine protective layer 24 was formed, by the same manner as described above In the same manner as in Example 2, as shown in Fig. 2(B), the first film surface contact roller was attached with a separator (FILM BYNA BD manufactured by FUJIMORI KOGYO CO., LTD.) as the protective film 26. Gas barrier film 10c. With respect to the coating liquid C2, hardened 剤L-45 (manufactured by Soken Chemical & Engineering Co., Ltd.) was added to SK DYNE NT21 (manufactured by Soken Chemical & Engineering Co., Ltd.) at a ratio of 100:2, and Dilute to butyl acetate to prepare a solid concentration of 15%. The organic protective layer 24 is an acrylic adhesive.
[實施例4] 使用聚氨酯系黏合劑(ROCK PAINT CO., LTD.製96號)作為成為有機保護層24之塗佈液C3,除此以外,以與實施例3相同之方式製作了阻氣膜10c。 該有機保護層24係聚氨酯系黏合劑。[Example 4] A gas barrier was produced in the same manner as in Example 3 except that a polyurethane-based adhesive (No. 96 manufactured by ROCK PAINT CO., LTD.) was used as the coating liquid C3 to be the organic protective layer 24. Film 10c. The organic protective layer 24 is a polyurethane-based adhesive.
[實施例5] 使用以下的塗佈液A2作為成為剝離樹脂層20之塗佈液,除此以外,以與實施例1相同之方式製作了阻氣膜10a。 關於塗佈液A2,使用環己烷來溶解COC樹脂(Mitsui Chemicals, Inc.製 APEL 6509T),以固體成分濃度成為10%之方式進行了製備。 以與上述相同之方式對所形成之剝離樹脂層20的玻璃轉移溫度Tg進行測定之結果為70℃。[Example 5] A gas barrier film 10a was produced in the same manner as in Example 1 except that the coating liquid A2 was used as the coating liquid to be the release resin layer 20. With respect to the coating liquid A2, COC resin (APEL 6509T manufactured by Mitsui Chemicals, Inc.) was dissolved in cyclohexane, and the solid content concentration was 10%. The glass transition temperature Tg of the formed release resin layer 20 was measured in the same manner as above, and was 70 °C.
[實施例6] 使用以下的塗佈液A3作為成為剝離樹脂層20之塗佈液,除此以外,以與實施例1相同之方式製作了阻氣膜10a。 關於塗佈液A3,使用環己烷來溶解COC樹脂(Mitsui Chemicals, Inc.製 APEL 6011T),以固體成分濃度成為10%之方式進行了製備。 以與上述相同之方式對所形成之剝離樹脂層20的玻璃轉移溫度Tg進行測定之結果為105℃。[Example 6] A gas barrier film 10a was produced in the same manner as in Example 1 except that the following coating liquid A3 was used as the coating liquid to be the release resin layer 20. With respect to the coating liquid A3, COC resin (APEL 6011T manufactured by Mitsui Chemicals, Inc.) was dissolved in cyclohexane, and the solid content concentration was 10%. The glass transition temperature Tg of the formed release resin layer 20 was measured in the same manner as above, and was 105 °C.
[實施例7] 使用以下的塗佈液A4作為成為剝離樹脂層20之塗佈液,除此以外,以與實施例1相同之方式製作了阻氣膜10a。 關於塗佈液A4,使用環己烷來溶解COP樹脂(JSR Corporation製 ARTON D4540),以固體成分濃度成為10%之方式進行了製備。 以與上述相同之方式對所形成之剝離樹脂層20的玻璃轉移溫度Tg進行測定之結果為128℃。[Example 7] A gas barrier film 10a was produced in the same manner as in Example 1 except that the coating liquid A4 was used as the coating liquid to be the release resin layer 20. In the coating liquid A4, COP resin (ARTON D4540 manufactured by JSR Corporation) was dissolved in cyclohexane, and the solid content concentration was 10%. The glass transition temperature Tg of the formed release resin layer 20 was measured in the same manner as above, and was 128 °C.
[實施例8] 改變成為剝離樹脂層20之塗佈液A1的固體成分濃度和塗佈量並將乾燥膜厚設為20μm,除此以外,以與實施例1相同之方式製作了阻氣膜10a。[Example 8] A gas barrier film was produced in the same manner as in Example 1 except that the solid content concentration and the coating amount of the coating liquid A1 to be the release resin layer 20 were changed to a dry film thickness of 20 μm. 10a.
[實施例9] 改變成為剝離樹脂層20之塗佈液A1的固體成分濃度和塗佈量並將乾燥膜厚設為10μm,除此以外,以與實施例1相同之方式製作了阻氣膜10a。[Example 9] A gas barrier film was produced in the same manner as in Example 1 except that the solid content concentration and the coating amount of the coating liquid A1 to be the release resin layer 20 were changed to a dry film thickness of 10 μm. 10a.
[實施例10] 改變成為剝離樹脂層20之塗佈液A1的固體成分濃度和塗佈量並將乾燥膜厚設為0.5μm,除此以外,以與實施例1相同之方式製作了阻氣膜10a。[Example 10] A gas barrier was produced in the same manner as in Example 1 except that the solid content concentration and the coating amount of the coating liquid A1 to be the release resin layer 20 were changed, and the dry film thickness was 0.5 μm. Film 10a.
[實施例11] 改變成為剝離樹脂層20之塗佈液A1的固體成分濃度和塗佈量並將乾燥膜厚設為0.1μm,除此以外,以與實施例1相同之方式製作了阻氣膜10a。[Example 11] A gas barrier was produced in the same manner as in Example 1 except that the solid content concentration and the coating amount of the coating liquid A1 to be the release resin layer 20 were changed to a dry film thickness of 0.1 μm. Film 10a.
[實施例12] 使用以下的塗佈液B2作為成為有機層14之塗佈液,除此以外,以與實施例1相同之方式製作了阻氣膜10a。 關於塗佈液B2,以成為4:1之方式混合A-DPH(Shin-Nakamura Chemical Co.,Ltd製 Tg250℃以上)和A-600(Shin-Nakamura Chemical Co.,Ltd製 Tg-22℃),以重量比率成為97:3之方式對其和光聚合起始劑(BASF JAPAN LTD.製 Irg819)進行稱量並溶解於甲基乙基酮而製備成固體成分濃度15%。 以與上述相同之方式對所形成之有機層14的玻璃轉移溫度Tg進行測定之結果為180℃。[Example 12] A gas barrier film 10a was produced in the same manner as in Example 1 except that the coating liquid B2 was used as the coating liquid to be the organic layer 14. With respect to the coating liquid B2, A-DPH (Tg 250 ° C or higher manufactured by Shin-Nakamura Chemical Co., Ltd.) and A-600 (Tg-22 ° C manufactured by Shin-Nakamura Chemical Co., Ltd.) were mixed in a 4:1 manner. The photopolymerization initiator (Irg 819 manufactured by BASF JAPAN LTD.) was weighed and dissolved in methyl ethyl ketone at a weight ratio of 97:3 to prepare a solid concentration of 15%. The glass transition temperature Tg of the formed organic layer 14 was measured in the same manner as above, and was 180 °C.
[實施例13] 使用以下的塗佈液B3作為成為有機層14之塗佈液,除此以外,以與實施例1相同之方式製作了阻氣膜10a。 關於塗佈液B3,以成為1:1之方式混合A-DPH(Shin-Nakamura Chemical Co.,Ltd製 Tg250℃以上)和A-600(Shin-Nakamura Chemical Co.,Ltd製 Tg-22℃),以重量比率成為97:3之方式對其和光聚合起始劑(BASF JAPAN LTD.製 Irg819)進行稱量並溶解於甲基乙基酮而製備成固體成分濃度15%。 以與上述相同之方式對所形成之有機層14的玻璃轉移溫度Tg進行測定之結果為114℃。[Example 13] A gas barrier film 10a was produced in the same manner as in Example 1 except that the coating liquid B3 was used as the coating liquid to be the organic layer 14. With respect to the coating liquid B3, A-DPH (Tg 250 ° C or higher manufactured by Shin-Nakamura Chemical Co., Ltd.) and A-600 (Tg-22 ° C manufactured by Shin-Nakamura Chemical Co., Ltd.) were mixed in a ratio of 1:1. The photopolymerization initiator (Irg 819 manufactured by BASF JAPAN LTD.) was weighed and dissolved in methyl ethyl ketone at a weight ratio of 97:3 to prepare a solid concentration of 15%. The glass transition temperature Tg of the formed organic layer 14 was measured in the same manner as above, and was 114 °C.
[實施例14] 使用以下的塗佈液B4作為成為有機層14之塗佈液,除此以外,以與實施例1相同之方式製作了阻氣膜10a。 關於塗佈液B4,以重量比率成為97:3之方式對DAICEL-ALLNEX LTD.製EB3702(Tg53℃)和光聚合起始劑(BASF JAPAN LTD.製 Irg819)進行稱量,並將它們溶解於甲基乙基酮而製備成固體成分濃度15%。 以與上述相同之方式對所形成之有機層14的玻璃轉移溫度Tg進行測定之結果為53℃。[Example 14] A gas barrier film 10a was produced in the same manner as in Example 1 except that the coating liquid B4 was used as the coating liquid to be the organic layer 14. EB3702 (Tg53 ° C) and photopolymerization initiator (Irg 819 manufactured by BASF JAPAN LTD.) manufactured by DAICEL-ALLNEX LTD. were weighed and dissolved in a coating liquid B4 at a weight ratio of 97:3. The ethyl ketone was prepared to have a solid concentration of 15%. The glass transition temperature Tg of the formed organic layer 14 was measured in the same manner as above, and was 53 °C.
[實施例15] 使用以下的塗佈液B5作為成為有機層14之塗佈液,除此以外,以與實施例1相同之方式製作了阻氣膜10a。 關於塗佈液B5,以成為1:1之方式混合A-DPH(Shin-Nakamura Chemical Co.,Ltd製 Tg250℃以上)和1-ADMA(1-金剛烷基甲基丙烯酸酯 OSAKA ORGANIC CHEMICAL INDUSTRY LTD.製 Tg250℃),以重量比率成為97:3之方式對其與光聚合起始劑(BASF JAPAN LTD.製 Irg819)進行稱量並溶解於甲基乙基酮而製備成固體成分濃度15%。 亦即,有機層的形成材料係包含具有金剛烷骨架之1官能以上的丙烯酸酯者。 以與上述相同之方式對所形成之有機層14的玻璃轉移溫度Tg進行測定之結果為250℃。[Example 15] A gas barrier film 10a was produced in the same manner as in Example 1 except that the coating liquid B5 was used as the coating liquid to be the organic layer 14. With respect to the coating liquid B5, A-DPH (Tg 250 ° C or higher manufactured by Shin-Nakamura Chemical Co., Ltd.) and 1-ADMA (1-adamantyl methacrylate OSAKA ORGANIC CHEMICAL INDUSTRY LTD) were mixed in a ratio of 1:1. Tg 250 ° C), and a photopolymerization initiator (Irg 819 manufactured by BASF JAPAN LTD.) was weighed and dissolved in methyl ethyl ketone at a weight ratio of 97:3 to prepare a solid concentration of 15%. . That is, the material for forming the organic layer contains one or more functional acrylates having an adamantane skeleton. The glass transition temperature Tg of the formed organic layer 14 was measured in the same manner as above, and was 250 °C.
[實施例16] 使用以下的塗佈液B6作為成為有機層14之塗佈液,除此以外,以與實施例1相同之方式製作了阻氣膜10a。 關於塗佈液B6,以成為1:1之方式混合A-DPH(Shin-Nakamura Chemical Co.,Ltd製 Tg250℃以上)和EA-200(丙烯酸酯單體 Osaka Gas Chemicals Co., Ltd.製 Tg211℃),以重量比率成為97:3之方式對其與光聚合起始劑(BASF JAPAN LTD.製 Irg819)進行稱量並溶解於甲基乙基酮而製備成固體成分濃度15%。 亦即,有機層的形成材料係包含具有茀骨架之2官能以上的丙烯酸酯者。 以與上述相同之方式對所形成之有機層14的玻璃轉移溫度Tg進行測定之結果為230℃。[Example 16] A gas barrier film 10a was produced in the same manner as in Example 1 except that the coating liquid B6 was used as the coating liquid to be the organic layer 14. With respect to the coating liquid B6, A-DPH (Tg 250 ° C or higher manufactured by Shin-Nakamura Chemical Co., Ltd.) and EA-200 (Tg211 manufactured by acrylate monomer Osaka Gas Chemicals Co., Ltd.) were mixed in a ratio of 1:1. °C), a photopolymerization initiator (Irg 819 manufactured by BASF JAPAN LTD.) was weighed and dissolved in methyl ethyl ketone at a weight ratio of 97:3 to prepare a solid concentration of 15%. That is, the material for forming the organic layer contains a bifunctional or higher acrylate having an anthracene skeleton. The glass transition temperature Tg of the formed organic layer 14 was measured in the same manner as above, and was 230 °C.
[實施例17] 形成氧化鋁膜(氧化鋁薄膜)作為無機層16,除此以外,以與實施例1相同之方式製作了阻氣膜10a。 氧化鋁膜藉由通常之濺射裝置而形成。具體而言,將氧化鋁燒結體用作目標並藉由DC磁控濺射來形成了由氧化鋁膜構成之無機層16。[Example 17] A gas barrier film 10a was produced in the same manner as in Example 1 except that an aluminum oxide film (aluminum oxide film) was formed as the inorganic layer 16. The aluminum oxide film is formed by a usual sputtering apparatus. Specifically, an alumina sintered body was used as a target and an inorganic layer 16 composed of an aluminum oxide film was formed by DC magnetron sputtering.
[實施例18] 改變成為有機層14之塗佈液B1的固體成分濃度和塗佈量並將乾燥膜厚設為5μm,除此以外,以與實施例1相同之方式製作了阻氣膜10a。[Example 18] A gas barrier film 10a was produced in the same manner as in Example 1 except that the solid content concentration and the coating amount of the coating liquid B1 to be the organic layer 14 were changed to a dry film thickness of 5 μm. .
[實施例19] 改變成為有機層14之塗佈液B1的固體成分濃度和塗佈量並將乾燥膜厚設為0.1μm,除此以外,以與實施例1相同之方式製作了阻氣膜10a。[Example 19] A gas barrier film was produced in the same manner as in Example 1 except that the solid content concentration and the coating amount of the coating liquid B1 to be the organic layer 14 were changed to a dry film thickness of 0.1 μm. 10a.
[實施例20] 使用矽酮剝離薄膜(FUJIMORI KOGYO CO.,LTD.製 FILM BYNA BD)作為基板12,除此以外,以與實施例1相同之方式製作了阻氣膜10a。[Example 20] A gas barrier film 10a was produced in the same manner as in Example 1 except that an oxime release film (FILM BYNA BD manufactured by FUJIMORI KOGYO CO., LTD.) was used as the substrate 12.
[實施例21] 改變成為有機保護層24之塗佈液C2的固體成分濃度和塗佈量並將乾燥膜厚設為50μm,除此以外,以與實施例3相同之方式製作了阻氣膜10c。[Example 21] A gas barrier film was produced in the same manner as in Example 3 except that the solid content concentration and the coating amount of the coating liquid C2 to be the organic protective layer 24 were changed to a dry film thickness of 50 μm. 10c.
[實施例22] 改變成為有機保護層24之塗佈液C2的固體成分濃度和塗佈量並將乾燥膜厚設為0.1μm,除此以外,以與實施例3相同之方式製作了阻氣膜10c。[Example 22] A gas barrier was produced in the same manner as in Example 3 except that the solid content concentration and the coating amount of the coating liquid C2 to be the organic protective layer 24 were changed to a dry film thickness of 0.1 μm. Film 10c.
[比較例1] 未形成剝離樹脂層20,除此以外,以與實施例1相同之方式製作了阻氣膜。[Comparative Example 1] A gas barrier film was produced in the same manner as in Example 1 except that the release resin layer 20 was not formed.
[比較例2] 在形成剝離樹脂層20時,在乾燥後照射累積照射量約3000mJ/cm2 之紫外線並使其硬化來進行了捲取。接著,將形成有機層14時之紫外線的累積照射量改變為約50mJ/cm2 。除此以外,以與實施例1相同之方式製作了阻氣膜。 藉此,強化剝離樹脂層20與基板12的剝離力的同時減弱有機層14與剝離樹脂層20的剝離力。藉此,將有機層14與剝離樹脂層20的剝離力設為比剝離樹脂層20與基板12的剝離力弱。亦即,設為可在剝離樹脂層20與有機層14之間進行剝離。[Comparative Example 2] When the release resin layer 20 was formed, after drying, ultraviolet rays having an accumulated irradiation amount of about 3000 mJ/cm 2 were irradiated and cured to be wound up. Next, the cumulative irradiation amount of the ultraviolet rays when the organic layer 14 was formed was changed to about 50 mJ/cm 2 . A gas barrier film was produced in the same manner as in Example 1 except the above. Thereby, the peeling force of the peeling resin layer 20 and the substrate 12 is strengthened, and the peeling force of the organic layer 14 and the peeling resin layer 20 is weakened. Thereby, the peeling force of the organic layer 14 and the peeling resin layer 20 is made weaker than the peeling force of the peeling resin layer 20 and the board|substrate 12. That is, it is considered that peeling can be performed between the peeling resin layer 20 and the organic layer 14.
[評價] 關於所製作之實施例1~22及比較例1、2的阻氣膜,對阻氣性和光學特性進行評價。[Evaluation] The gas barrier films of Examples 1 to 22 and Comparative Examples 1 and 2 which were produced were evaluated for gas barrier properties and optical properties.
<阻氣性> (轉印製程) 準備將光學黏結薄膜(PDS1 PANAC Corporation製)貼合於FUJITAC(TD80 Fujifilm Corporation製)之帶黏著層之200mm見方的TAC薄膜來作為被轉印體。 將所製作之阻氣膜10的保護膜26剝離之後,藉由層壓機(Fellowes Japan K.K.製Proteus)進行貼合,以使被轉印體的黏著層與阻氣膜10的無機層16相接。藉此,得到了200mm見方的貼合薄膜。將層壓壓力設為0.5MPa,將搬送速度設為5m/min。 貼合後,阻氣膜10的基板12被剝離。如以下,對基板12進行了剝離。首先,利用湯姆森刀片將200mm見方的貼合薄膜沖切成100mm見方,以使端面被可靠地剝離。其次,使TAC薄膜側朝向下方,藉由平面性較高之吸附板吸附保持TAC薄膜表面之後,在端部貼附2cm左右的用於抓緊基板12之黏結膠帶(NITTO SELLO TAPE(註冊商標))。接著,對於基板12以與180度剝離試驗相同地畫圓弧之方式,將黏結膠帶平行於樣品來拉開。如此,對基板12進行了剝離。剝離時,在溫度25℃、湿度50%RH之環境下進行。 另外,關於在無機層16上具有成為黏著層之有機保護層24之實施例3、實施例4、實施例21及實施例22,將未貼合黏結薄膜之FUJITAC(TD80 Fujifilm Corporation製)作為被轉印體,除此以外,以相同的方式進行轉印。<Gas-Containing Property> (Transfer Process) A 200 mm square TAC film with an adhesive layer of FUJITAC (manufactured by TD80 Fujifilm Corporation) was attached as an object to be transferred, and an optical adhesive film (manufactured by PDS1 PANAC Corporation) was attached. After the protective film 26 of the gas barrier film 10 thus produced is peeled off, it is bonded by a laminator (Proteus manufactured by Fellowes Japan KK) so that the adhesive layer of the transfer target body and the inorganic layer 16 of the gas barrier film 10 are bonded. Pick up. Thereby, a bonded film of 200 mm square was obtained. The lamination pressure was set to 0.5 MPa, and the conveyance speed was set to 5 m/min. After bonding, the substrate 12 of the gas barrier film 10 is peeled off. The substrate 12 was peeled off as follows. First, a 200 mm square laminated film was punched into a 100 mm square using a Thomson blade so that the end faces were reliably peeled off. Next, the TAC film side is directed downward, and the surface of the TAC film is adsorbed and held by the flat plate having a high planarity, and then about 2 cm of the adhesive tape for gripping the substrate 12 (NITTO SELLO TAPE (registered trademark)) is attached to the end portion. . Next, the bonding tape was pulled apart from the sample in such a manner that the substrate 12 was drawn in the same manner as the 180-degree peeling test. Thus, the substrate 12 is peeled off. At the time of peeling, it was carried out in an environment of a temperature of 25 ° C and a humidity of 50% RH. In addition, in the third embodiment, the fourth embodiment, the twenty-first embodiment, and the twenty-second embodiment, the organic protective layer 24 having the adhesive layer on the inorganic layer 16 is a FUJITAC (manufactured by TD80 Fujifilm Corporation) which is not bonded with a bonded film. Transfer was carried out in the same manner except for the transfer body.
(水蒸氣透過率測定) 藉由鈣腐蝕法(日本特開2005-283561號公報中所記載之方法),對轉印於被轉印體並對基板12進行剝離之阻氣膜10的水蒸氣透過率進行測定。關於恆溫恆濕處理條件,將溫度設為40℃,相對濕度設為90%RH。 又,FUJITAC單體的水蒸氣透過率為400[g/(m2 ・day)]。 基於所測定之水蒸氣透過率,依以下基準進行了評價。 A:水蒸氣透過率小於5×10-5 [g/(m2 ・day)] B:水蒸氣透過率為5×10-5 以上,且小於1×10-4 [g/(m2 ・day)] C:水蒸氣透過率為1×10-4 以上,且小於5×10-4 [g/(m2 ・day)] D:水蒸氣透過率為5×10-4 以上,且小於1×10-3 [g/(m2 ・day)] E:水蒸氣透過率為1×10-3 [g/(m2 ・day)]以上(Water vapor transmission rate measurement) The water vapor of the gas barrier film 10 which is transferred to the object to be transferred and which is peeled off from the substrate 12 by a calcium etching method (method described in JP-A-2005-283561) The transmittance is measured. Regarding the constant temperature and humidity treatment conditions, the temperature was set to 40 ° C and the relative humidity was set to 90% RH. Further, the water vapor transmission rate of the FUJITAC monomer was 400 [g/(m 2 day)]. Based on the measured water vapor transmission rate, it was evaluated based on the following criteria. A: water vapor transmission rate is less than 5 × 10 -5 [g / (m 2 · day)] B: water vapor transmission rate is 5 × 10 -5 or more, and less than 1 × 10 -4 [g / (m 2 • Day)] C: water vapor transmission rate is 1 × 10 -4 or more, and less than 5 × 10 -4 [g / (m 2 · day)] D: water vapor transmission rate is 5 × 10 -4 or more, and is smaller than 1 × 10 -3 [g / (m 2 · day)] E: water vapor transmission rate is 1 × 10 -3 [g / (m 2 · day)] or more
<光學特性> 將所製作之阻氣膜10的保護膜26剝離之後,對基板12進行剝離而取出包含剝離樹脂層20和阻氣層18(有機層14和無機層16)之轉印層30。接著,對該轉印層30的總光線透過率和延遲值進行了測定。 (總光線透過率) 利用分光光度計(NIPPON DENSHOKU INDUSTRIES Co.,LTD製霧度計SH7000),對所取出之轉印層30的總光線透過率進行了測定。 依據所測定之總光線透過率並依以下基準進行了評價。 A:總光線透過率為90%以上 B:總光線透過率為88%以上,且小於90% C:總光線透過率為86%以上,且小於88% D:總光線透過率為84%以上,且小於86%<Optical Characteristics> After the protective film 26 of the gas barrier film 10 thus produced is peeled off, the substrate 12 is peeled off to take out the transfer layer 30 including the release resin layer 20 and the gas barrier layer 18 (the organic layer 14 and the inorganic layer 16). . Next, the total light transmittance and retardation value of the transfer layer 30 were measured. (Total Light Transmittance) The total light transmittance of the extracted transfer layer 30 was measured by a spectrophotometer (haze meter SH7000 manufactured by NIPPON DENSHOKU INDUSTRIES Co., LTD). The total light transmittance measured was evaluated based on the following criteria. A: Total light transmittance is 90% or more B: Total light transmittance is 88% or more and less than 90% C: Total light transmittance is 86% or more and less than 88% D: Total light transmittance is 84% or more And less than 86%
(延遲值) 以KOBRA-WR(Oji Scientific Instruments製)對所取出之轉印層30的延遲值(Re値)進行了測定。 依據所測定之延遲值並依以下基準進行了評價。 A:延遲值為5nm以下 B:延遲值大於5nm,且為10nm以下 C:延遲值大於10nm,且2為0nm以下 D:延遲值大於20nm 將結果示於下述表中。(delay value) The retardation value (Re値) of the extracted transfer layer 30 was measured by KOBRA-WR (manufactured by Oji Scientific Instruments). The evaluation was based on the measured delay values and based on the following criteria. A: retardation value is 5 nm or less B: retardation value is more than 5 nm and is 10 nm or less C: retardation value is more than 10 nm, and 2 is 0 nm or less D: retardation value is more than 20 nm The results are shown in the following table.
【表1】
如上述表1所示,在基板與阻氣層之間具有剝離樹脂層,並在剝離樹脂層與基板的界面進行剝離之本發明之實施例中,與比較例進行比較之結果可知,阻氣性與光學特性優異。 又,從實施例1、實施例5及實施例6之對比可知,剝離樹脂層係玻璃轉移溫度Tg為100℃以上之環狀烯烴樹脂為較佳。 又,從實施例1與實施例7之對比可知,剝離樹脂層為環烯烴共聚物為較佳。 又,從實施例1及實施例8~實施例11之對比可知,剝離樹脂層的厚度為0.1~25μm為較佳,0.5~15μm更為佳。As shown in the above Table 1, in the embodiment of the present invention in which the peeling resin layer is provided between the substrate and the gas barrier layer and the interface between the peeling resin layer and the substrate is peeled off, the result of comparison with the comparative example shows that the gas barrier is obtained. Excellent in properties and optical properties. Moreover, from the comparison of Example 1, Example 5, and Example 6, it is understood that the cyclic olefin resin having a peeling resin layer-based glass transition temperature Tg of 100 ° C or more is preferable. Further, from the comparison between Example 1 and Example 7, it is understood that the release resin layer is preferably a cycloolefin copolymer. Further, from the comparison between Example 1 and Examples 8 to 11, it is understood that the thickness of the release resin layer is preferably 0.1 to 25 μm, more preferably 0.5 to 15 μm.
又,從實施例1、實施例12~實施例14之對比可知,有機層的玻璃轉移溫度Tg為200℃以上為較佳。 又,從實施例1、實施例15及實施例16之對比可知,有機層包含5%以上,且小於50%的具有金剛烷骨架之1官能以上的丙烯酸酯為較佳,或包含5%以上,且小於50%的具有茀骨架之2官能以上的丙烯酸酯為較佳。 又,從實施例1、實施例18及實施例19之對比可知,有機層的厚度為0.1~50μm為較佳,為0.1~5μm更為佳,0.2~3μm進一步較佳。 又,從實施例1與實施例17之對比可知,無機層為氮化矽為較佳。Further, from the comparison of Example 1 and Example 12 to Example 14, it is understood that the glass transition temperature Tg of the organic layer is preferably 200 ° C or higher. Further, from the comparison of Example 1, Example 15, and Example 16, it is understood that the organic layer contains 5% or more and less than 50% of an acrylate having one or more functional groups having an adamantane skeleton, or more preferably 5% or more. Preferably, less than 50% of the acrylate having 2 or more functional groups having an anthracene skeleton is preferred. Further, from the comparison of Example 1, Example 18 and Example 19, the thickness of the organic layer is preferably 0.1 to 50 μm, more preferably 0.1 to 5 μm, still more preferably 0.2 to 3 μm. Further, from the comparison between Example 1 and Example 17, it is understood that the inorganic layer is preferably tantalum nitride.
又,從實施例2~實施例4、實施例21、實施例22可知,在無機層16上具有有機保護層24為較佳。 又,從實施例3與實施例4之對比可知,使用丙烯酸系黏著劑作為有機保護層24為較佳。 又,從實施例3、實施例21及實施例22之對比可知,有機保護層24的厚度為0.1~50μm為較佳,0.5~25μm更為佳。Further, from Examples 2 to 4, Example 21, and Example 22, it is preferable to have the organic protective layer 24 on the inorganic layer 16. Further, from the comparison between Example 3 and Example 4, it is preferable to use an acrylic pressure-sensitive adhesive as the organic protective layer 24. Further, from the comparison of Example 3, Example 21, and Example 22, the thickness of the organic protective layer 24 is preferably 0.1 to 50 μm, more preferably 0.5 to 25 μm.
[實施例23] 使用所製作之阻氣膜10來製作了如圖6所示之波長轉換膜100。波長轉換膜為具有量子點層作為波長轉換層之量子點薄膜。[Example 23] A wavelength conversion film 100 as shown in Fig. 6 was produced using the gas barrier film 10 produced. The wavelength conversion film is a quantum dot film having a quantum dot layer as a wavelength conversion layer.
<量子點層形成用組成物的製備> 製備下述量子含點聚合性組成物A,以孔徑0.2μm的聚丙烯製薄膜進行濾過之後,減壓乾燥30分鐘來用作塗佈組成物。以下的甲苯分散液中的量子點濃度為1質量%。 (含量子點聚合性組成物A) 量子點1的甲苯分散液(發光最大值:520nm) 10.0質量部 量子點2的甲苯分散液(發光最大值:630nm) 1.0質量部 ・十二烷基甲基丙烯酸酯 80.8質量部 ・三羥甲基丙烷三丙烯酸酯 18.2質量部 ・光聚合起始劑 1.0質量部 (IRGACURE 819(BASF公司製))<Preparation of Composition for Forming Quantum Dot Layer> The following quantum dot-containing polymerizable composition A was prepared, filtered through a polypropylene film having a pore size of 0.2 μm, and then dried under reduced pressure for 30 minutes to be used as a coating composition. The concentration of quantum dots in the following toluene dispersion was 1% by mass. (content-based polymerizable composition A) Toluene dispersion of quantum dot 1 (luminescence maximum: 520 nm) Toluene dispersion of 10.0 mass fraction of quantum dot 2 (luminescence maximum: 630 nm) 1.0 mass fraction / dodecyl group Acrylate 80.8 parts by mass and trimethylolpropane triacrylate 18.2 part by mass and photopolymerization initiator 1.0 part by mass (IRGACURE 819 (manufactured by BASF Corporation))
<量子點薄膜的製作> 準備實施例1的阻氣膜10a作為兩個薄膜(第一薄膜和第二薄膜)。亦即,使用結構相同者作為第一薄膜和第二薄膜。 首先,以1m/分、60N/m之張力連續搬送第一薄膜的同時對無機層16上的保護膜26進行剝離,在無機層16上利用模塗佈機塗佈以上述方式製備之塗佈組成物來形成了厚度50μm的塗膜。 接著,將形成有塗膜之薄膜捲繞於支撐輥。從第二薄膜剝離保護膜26,並朝向無機層16表面與塗膜相接的方向進行了層壓。如此,以第一薄膜和第二薄膜夾持塗膜。 在該狀態下連續搬送的同時,在60℃的加熱區域通過3分鐘之後,利用160W/cm的氣冷金屬鹵化燈(EYE GRAPHICS CO., LTD.製)照射紫外線來使其硬化,並形成了含量子點之量子點層(波長轉換層102)。另外,紫外線的照射量為2000mJ/cm2 。 分別從第一薄膜和第二薄膜剝離基板12來製作了量子點薄膜(波長轉換膜100)。<Preparation of Quantum Dot Film> The gas barrier film 10a of Example 1 was prepared as two films (a first film and a second film). That is, the same structure is used as the first film and the second film. First, the protective film 26 on the inorganic layer 16 is peeled off while continuously conveying the first film at a tension of 1 m/min and 60 N/m, and the coating prepared in the above manner is applied onto the inorganic layer 16 by a die coater. The composition was used to form a coating film having a thickness of 50 μm. Next, the film on which the coating film was formed was wound around a support roll. The protective film 26 is peeled off from the second film, and laminated in the direction in which the surface of the inorganic layer 16 is in contact with the coating film. Thus, the coating film is sandwiched between the first film and the second film. In the state of continuous conveyance in this state, the air-cooled metal halide lamp (manufactured by EYE GRAPHICS CO., LTD.) of 160 W/cm was cured by ultraviolet rays after being passed through a heating zone of 60 ° C for 3 minutes. A quantum dot layer (wavelength conversion layer 102) of a sub-point. Further, the irradiation amount of ultraviolet rays was 2000 mJ/cm 2 . A quantum dot film (wavelength conversion film 100) was produced by peeling off the substrate 12 from the first film and the second film, respectively.
[評價] 關於所製作之實施例23的波長轉換膜100,對耐久性進行了評價。[Evaluation] The durability of the wavelength conversion film 100 of Example 23 produced was evaluated.
具體而言,對剛製作完後的波長轉換膜100的輝度,及溫度60℃、湿度90%RH的環境下放置1000小時之後(加濕後)的輝度進行測定,並以其變化量對耐久性進行評價。 如以下,對輝度進行測定。 首先,分解市售之液晶顯示裝置(Amazon公司製 Kindle Fire HDX7"),並取出具備藍色光源之背光單元。其次,在背光單元的導光板上放置切成矩形之波長轉換膜,在其上,以與表面的凹凸圖案的朝向正交之方式層疊配置從上述液晶顯示裝置取出之2片棱鏡片。 點亮背光單元,並利用設置在從背光單元的前面沿垂直方向距離740mm之位置之輝度計(TOPCON CORPORATION製 SR3)測定了輝度。Specifically, the luminance of the wavelength conversion film 100 immediately after the fabrication and the luminance at a temperature of 60 ° C and a humidity of 90% RH are measured for 1000 hours (after humidification), and the amount of change is durable. Sexual evaluation. The luminance was measured as follows. First, a commercially available liquid crystal display device (Kindle Fire HDX7 manufactured by Amazon Inc.) is decomposed, and a backlight unit having a blue light source is taken out. Next, a wavelength conversion film cut into a rectangular shape is placed on the light guide plate of the backlight unit, on which The two prism sheets taken out from the liquid crystal display device are stacked and disposed so as to be orthogonal to the direction of the concave-convex pattern on the surface. The backlight unit is turned on and the luminance is set at a position 740 mm in the vertical direction from the front surface of the backlight unit. The luminance was measured by SR (manufactured by TOPCON CORPORATION).
測定之結果,加濕前後之輝度的變化為1%以下。從而,可知利用本發明之阻氣膜進行密封之波長轉換膜具有較高的耐久性。As a result of the measurement, the change in luminance before and after humidification was 1% or less. Therefore, it is understood that the wavelength conversion film sealed by the gas barrier film of the present invention has high durability.
[實施例24] 使用所製作之阻氣膜10來製作如圖5所示之帶阻氣層之相位差膜110。 使用特殊聚炭酸酯W138(TEIJIN LIMITED.製)作為相位差膜112。 首先,在相位差膜112上貼合光學黏結薄膜(PDS1 PANAC Corporation製)。 其次,對實施例1的阻氣膜10a的保護膜26進行剝離之後,藉由層壓機(Fellowes Japan K.K.製Proteus)進行貼合,以使相位差膜112的黏著層側與阻氣膜10的無機層16相接。貼合後,剝離阻氣膜10的基板12來製作帶阻氣層之相位差膜110。[Example 24] Using the produced gas barrier film 10, a retardation film 110 with a gas barrier layer as shown in Fig. 5 was produced. A special polycarbonate F138 (manufactured by TEIJIN LIMITED) was used as the retardation film 112. First, an optical bonding film (manufactured by PDS1 PANAC Corporation) was bonded to the retardation film 112. After the protective film 26 of the gas barrier film 10a of the first embodiment is peeled off, it is bonded by a laminator (Proteus manufactured by Fellowes Japan KK) so that the adhesive layer side of the retardation film 112 and the gas barrier film 10 are adhered. The inorganic layers 16 are joined. After bonding, the substrate 12 of the gas barrier film 10 is peeled off to form a retardation film 110 having a gas barrier layer.
[評價] 關於所製作之實施例24的帶阻氣層之相位差膜110,對光學特性進行了評價。[Evaluation] The optical characteristics of the retardation film 110 with a gas barrier layer of Example 24 produced were evaluated.
具體而言,分別對相位差膜112單體、及帶阻氣層之相位差膜110的延遲值進行測定之結構,差為2%以下。從而,可知將本發明之阻氣膜進行轉印之帶阻氣層之相位差膜110在維持光學特性的同時具有較高的阻氣性。Specifically, the difference between the retardation values of the retardation film 112 alone and the retardation film 110 having the gas barrier layer was 2% or less. Therefore, it is understood that the retardation film 110 with the gas barrier layer for transferring the gas barrier film of the present invention has high gas barrier properties while maintaining optical characteristics.
[實施例25] 使用所製作之阻氣膜10來製作如圖7(A)所示之有機EL層疊體120a。[Example 25] An organic EL laminate 120a as shown in Fig. 7(A) was produced using the gas barrier film 10 produced.
<有機EL元件的製作> 準備厚度500μm、大小20×20mm的玻璃板作為元件基板122。 藉由陶瓷掩蔽該元件基板122的周邊2mm。進而,將實施了掩蔽之元件基板裝填於通常的真空沉積裝置中並藉由真空沉積形成厚度100nm的金屬鋁所構成之電極,並且,形成了厚度1nm的氟化鋰層。接著,在該元件基板122上,藉由真空沉積依次形成了以下有機化合物層。 ・(發光層兼電子傳輸層)三(8-羥基喹啉)鋁:膜厚60nm ・(第2電洞傳輸層)N,N’-二苯基-N,N’-二萘基聯苯胺:膜厚40nm ・(第1電洞傳輸層)銅酞菁:膜厚10nm 進而,將形成該些層之元件基板122裝填於通常的濺射裝置中並將ITO(Indium Tin Oxide 氧化銦錫)用作目標,藉由DC磁控濺射形成了厚度0.2μm的ITO薄膜所構成之透明電極。如此,在元件基板122上形成了作為使用有機EL材料之發光元件之有機EL元件124。<Preparation of Organic EL Element> A glass plate having a thickness of 500 μm and a size of 20 × 20 mm was prepared as the element substrate 122. The periphery of the element substrate 122 was masked by ceramic by 2 mm. Further, the masked element substrate was loaded in a usual vacuum deposition apparatus, and an electrode made of metal aluminum having a thickness of 100 nm was formed by vacuum deposition, and a lithium fluoride layer having a thickness of 1 nm was formed. Next, on the element substrate 122, the following organic compound layers were sequentially formed by vacuum deposition.・(Light-emitting layer and electron transport layer) Tris(8-hydroxyquinoline) aluminum: Film thickness: 60 nm ・(Second hole transport layer) N,N'-diphenyl-N,N'-dinaphthylbenzidine Film thickness: 40 nm ・(first hole transport layer) copper phthalocyanine: film thickness: 10 nm Further, the element substrate 122 on which these layers are formed is loaded in a normal sputtering apparatus and ITO (Indium Tin Oxide Indium Tin Oxide) As a target, a transparent electrode composed of an ITO thin film having a thickness of 0.2 μm was formed by DC magnetron sputtering. In this manner, the organic EL element 124 as a light-emitting element using an organic EL material is formed on the element substrate 122.
<阻氣膜的轉印> 接著,從形成有機EL元件124之元件基板122除去掩蔽。在除去了掩蔽之元件基板122上塗佈丙烯酸系黏結劑。其次,從實施例1的阻氣膜10a剝離保護膜26,將無機層16側朝向黏結劑表面而貼合於阻氣膜10a之後,對阻氣膜10a的基板進行剝離來製作有機EL層疊體120a。<Transfer of Gas Barrier Film> Next, the mask is removed from the element substrate 122 on which the organic EL element 124 is formed. An acrylic adhesive is applied onto the masked element substrate 122. Then, the protective film 26 is peeled off from the gas barrier film 10a of the first embodiment, and the inorganic layer 16 is bonded to the gas barrier film 10a toward the surface of the adhesive, and then the substrate of the gas barrier film 10a is peeled off to prepare an organic EL laminate. 120a.
[實施例26] 除去掩蔽之後,將形成有有機EL元件124之元件基板122裝填於通常的等離子體CVD裝置中,並藉由等離子體CVD(CCP-CVD)形成由氮化矽構成之厚度1500nm的鈍化膜126,除此以外,以與實施例25相同的方式製作如圖7(C)所示之有機EL層疊體120c。[Example 26] After the masking was removed, the element substrate 122 on which the organic EL element 124 was formed was loaded in a general plasma CVD apparatus, and a thickness of 1500 nm composed of tantalum nitride was formed by plasma CVD (CCP-CVD). An organic EL laminate 120c as shown in Fig. 7(C) was produced in the same manner as in Example 25 except for the passivation film 126.
[實施例27] 使用了實施例1的阻氣膜10a來作為元件基板122,除此以外,以與實施例25相同的方式製作了有機EL層疊體124。 具體而言,將實施例1的阻氣膜10a轉印於在FUJITAC(TD80 Fujifilm Corporation製)上貼合有光學黏結薄膜(PDS1 PANAC Corporation製)之帶黏著層之TAC薄膜,並將對基板12進行了剝離之層疊體用作元件基板122。又,在該元件基板122的剝離樹脂層20上形成了有機EL元件124。 接著,以與上述相同的方式,以又1片阻氣膜10a對有機EL元件124進行密封來製作了有機EL層疊體124。[Example 27] An organic EL laminate 124 was produced in the same manner as in Example 25 except that the gas barrier film 10a of Example 1 was used as the element substrate 122. Specifically, the gas barrier film 10a of the first embodiment was transferred to a TAC film with an adhesive layer of an optical adhesive film (manufactured by PDS1 PANAC Corporation) bonded to FUJITAC (manufactured by TD80 Fujifilm Corporation), and the substrate 12 was bonded. The laminated body which has been peeled off is used as the element substrate 122. Moreover, the organic EL element 124 is formed on the peeling resin layer 20 of the element substrate 122. Then, the organic EL element 124 was sealed with another gas barrier film 10a in the same manner as described above to produce the organic EL laminate 124.
[評價] 關於所製作之實施例25~27的有機EL層疊體,對耐久性進行了評價。[Evaluation] The durability of the organic EL laminates of Examples 25 to 27 produced was evaluated.
具體而言,在溫度60℃、湿度90%RH之環境下,將所製作之有機EL層疊體124放置了200小時。放置後,利用Keithlel公司製SMU2400型源測量單元,對各有機EL層疊體124施加7V的電壓來使其發光。藉由顯微鏡,從阻氣膜10a側進行觀察而確認有無產生黑斑,並依以下基準進行了評價。 A:完全沒有發現黑斑的產生 B:發現產生了微量的黑斑 C:清楚地觀察到黑斑的產生 D:黑斑的面積比率較大 進行評價之結果,實施例25~實施例27的有機EL層疊體均為A。 依以上結果,本發明之効果係顯而易見的。Specifically, the produced organic EL laminate 124 was allowed to stand for 200 hours in an environment of a temperature of 60 ° C and a humidity of 90% RH. After standing, a voltage of 7 V was applied to each of the organic EL laminates 124 by a SMU 2400 type source measuring unit manufactured by Keithlel Co., Ltd. to emit light. Observation was made from the side of the gas barrier film 10a by a microscope to confirm the presence or absence of dark spots, and the evaluation was performed based on the following criteria. A: No occurrence of black spots was observed at all B: A small amount of dark spots C was observed: C was clearly observed to be produced D: The area ratio of dark spots was large, and the results of Examples 25 to 27 were evaluated. The organic EL laminates were all A. Based on the above results, the effects of the present invention are apparent.
10‧‧‧阻氣膜
12‧‧‧基板
14‧‧‧有機層
16‧‧‧無機層
18‧‧‧阻氣層
20‧‧‧剝離樹脂層
24‧‧‧有機保護層
26‧‧‧保護膜
30‧‧‧轉印層
40‧‧‧塗佈部
42‧‧‧乾燥部
44‧‧‧硬化部
48‧‧‧搬送輥對
50‧‧‧供給室
50a、52a、54a‧‧‧真空排氣手段
52‧‧‧成膜室
54‧‧‧捲取室
58、60、76‧‧‧導輥
62‧‧‧滾筒
64‧‧‧噴淋頭電極
68‧‧‧原料氣體供給部
70‧‧‧高頻電源
72‧‧‧層疊輥對
100‧‧‧波長轉換膜
102‧‧‧波長轉換層
104‧‧‧阻氣膜
110‧‧‧帶阻氣層之相位差膜
112‧‧‧相位差膜
120‧‧‧有機EL層疊體
122‧‧‧元件基板
124‧‧‧有機EL元件
126‧‧‧鈍化膜10‧‧‧ gas barrier film
12‧‧‧Substrate
14‧‧‧Organic layer
16‧‧‧Inorganic layer
18‧‧‧ gas barrier
20‧‧‧ peeling resin layer
24‧‧‧Organic protective layer
26‧‧‧Protective film
30‧‧‧Transfer layer
40‧‧‧ Coating Department
42‧‧‧Drying Department
44‧‧‧ Hardening Department
48‧‧‧Transport roller pair
50‧‧‧Supply room
50a, 52a, 54a‧‧‧ vacuum evacuation means
52‧‧‧ Filming room
54‧‧‧The take-up room
58, 60, 76‧‧ ‧ guide rollers
62‧‧‧Roller
64‧‧‧Spray head electrode
68‧‧‧Material Gas Supply Department
70‧‧‧High frequency power supply
72‧‧‧Laminating roller pair
100‧‧‧ wavelength conversion film
102‧‧‧wavelength conversion layer
104‧‧‧ gas barrier film
110‧‧‧ phase difference film with gas barrier
112‧‧‧ phase difference film
120‧‧‧Organic EL laminate
122‧‧‧ element substrate
124‧‧‧Organic EL components
126‧‧‧passivation film
圖1(A)係概括表示本發明之阻氣膜的一例之圖,圖1(B)係概括表示從圖1(A)之阻氣膜剝離基板之狀態之圖。 圖2(A)及圖2(B)係分別概括表示本發明之阻氣膜的另一例之圖。 圖3係概括表示本發明之阻氣膜的另一例之圖。 圖4(A)至圖4(C)係用於說明本發明之阻氣膜的轉印方法之概括圖。 圖5係概括表示本發明之帶阻氣層之相位差膜的一例之圖。 圖6係概括表示本發明之波長轉換膜的一例之圖。 圖7(A)至圖7(C)係分別概括表示本發明之有機EL層疊體的一例之圖。 圖8(A)及圖8(B)係概括表示製造本發明之阻氣膜之成膜裝置的一例之圖。Fig. 1(A) is a view schematically showing an example of a gas barrier film of the present invention, and Fig. 1(B) is a view schematically showing a state in which a substrate is peeled off from the gas barrier film of Fig. 1(A). 2(A) and 2(B) are views schematically showing another example of the gas barrier film of the present invention. Fig. 3 is a view schematically showing another example of the gas barrier film of the present invention. 4(A) to 4(C) are schematic views for explaining a transfer method of the gas barrier film of the present invention. Fig. 5 is a view schematically showing an example of a retardation film with a gas barrier layer of the present invention. Fig. 6 is a view schematically showing an example of a wavelength conversion film of the present invention. 7(A) to 7(C) are diagrams each showing an example of the organic EL laminate of the present invention. 8(A) and 8(B) are views schematically showing an example of a film forming apparatus for producing a gas barrier film of the present invention.
10a‧‧‧阻氣膜 10a‧‧‧ gas barrier film
12‧‧‧基板 12‧‧‧Substrate
14‧‧‧有機層 14‧‧‧Organic layer
16‧‧‧無機層 16‧‧‧Inorganic layer
18‧‧‧阻氣層 18‧‧‧ gas barrier
20‧‧‧剝離樹脂層 20‧‧‧ peeling resin layer
30‧‧‧轉印層 30‧‧‧Transfer layer
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JP2015169184A JP6527053B2 (en) | 2015-08-28 | 2015-08-28 | Gas barrier film and transfer method of gas barrier film |
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KR (1) | KR102103091B1 (en) |
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