TW201700257A - Device for bonding film - Google Patents

Abstract

Provided is a device (1) for bonding a film (60) to a first surface (51) of a substrate (50). The device (1) has: a first unit (10) provided with a member supporting surface (12) that supports the substrate (50) so as to make the first surface (51) face outward; a film supporting surface (22) that supports a part of the film (60) using suction; a second unit (20) that tilts the film supporting surface (22) so as to form an acute angle relative to the first surface (12), with the film supporting surface (22) facing the first surface (12), and that holds the film supporting surface (22) with one end (22a) thereof close to the first surface (51); a roller (30); and a unit (41) that moves the first unit (10).

Description

Membrane bonding device

The present invention relates to an apparatus for bonding a film to a member such as a film or a substrate.

Japanese Laid-Open Patent Publication No. 2008-207451 discloses a device that can bond workpieces to each other. The apparatus includes a first stage including a first support surface for sucking and supporting the first workpiece, and a second stage including a state in which the first workpiece and the second workpiece are opposed to each other (2) a portion other than the one end portion of the workpiece attracts the supported second support surface; the roller is configured to press the one end portion of the second workpiece against the first workpiece from the opposite side of the first workpiece; and to hold the first stage and A moving device that relatively moves the position of the first stage to the position of the second stage and the roller in a state where the second stage is spaced apart.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2008-207451

In the case where the attached workpiece is a film, it is important to stably hold the film of the sheet-like workpiece in advance during bonding or attachment.

One aspect of the present invention is an apparatus for bonding a film to a first surface of a first member. The apparatus includes a first unit including a member supporting surface that supports the first member so that the first surface faces outward, a film supporting surface that attracts and supports a part of the film, and a second unit that presses the film The support surface is inclined to the first surface so as to form an acute angle with the first surface in a state in which the first surface of the first member is supported by the first unit, and the one end is close to the first surface. Holding a roller disposed adjacent to one end of the film support surface, and pushing a film extending from one end of the film support surface to a first surface of the first member supported by the first unit; The first unit is relatively moved to the film supporting surface and the roller so that the one end of the film supporting surface and the roller move along the first surface of the first member supported by the first unit.

This device has a film supporting surface which faces the first surface of the object to which the film is attached and which is disposed at an acute angle with respect to the first surface. Therefore, the film supported in the state of the film supporting surface can be supplied to the contact portion of the roller and the first surface more linearly. Typically, the film support surface may also face the tangential direction of the outer peripheral surface of the roller. When the film is linearly supplied from the film supporting surface to the roller, the force in the direction in which the film is peeled off from the film supporting surface is less likely to occur when the film is attached to the first surface by the roller. Therefore, it is easy to keep thin with the film support surface while the film is being attached. membrane.

Alternatively, the second unit may include a support plate having a film support surface, and an end surface close to the first support surface of the support plate may have an end surface that forms an acute angle with the film support surface (an end surface having an acute angle with the film support surface). The distance between one end of the film support surface and the roller can be shortened, and it is easier to supply the film linearly from the film support surface toward the roller. In particular, it is effective when the first surface is a concave surface or a flat surface.

The first member may be a member having a three-dimensional (three-dimensional) shape of the first surface, or may be a sheet-shaped member. When the first member is a sheet-shaped member, the first surface of the first member supported by the first unit and the member supporting surface are parallel. Therefore, the second unit may be such that the film supporting surface is inclined to the member supporting surface in such a manner as to form an acute angle with the member supporting surface and the member supporting surface, and is held in a state in which one end approaches the member supporting surface. . Alternatively, the moving unit may move the first unit to the film supporting surface and the roller in such a manner that one end of the film supporting surface and the roller move along the supporting surface of the member.

The film support surface and the roller may also be disposed below the member support surface. That is, the member supporting surface may be facing downward, and the film may be supplied from the lower side in the vertical direction to the first surface. Therefore, the front end of the film can be supported by the roller at the front end of the film which is likely to hang down due to gravity. Further, it is also possible to suppress peeling of the film from the film supporting surface.

The first surface may also be a surface that is curved into a convex shape or a concave shape. Typically, the first surface may also be a cylindrical surface forming a part of the outer or inner surface of the cylinder, and the first surface may also be convex or concave. Cylindrical face.

The moving unit moves the first unit to the film supporting surface and the roller in a two-dimensional direction such that one end of the film supporting surface and the roller move along the first surface or the member supporting surface. Specifically, the moving unit can also move the first unit to the film supporting surface and the roller in a two-dimensional direction other than the axial direction of the roller, that is, perpendicular to the axial direction of the roller. By arranging the film supporting surface at an acute angle with respect to the first surface, even if the first surface is a cylindrical surface, particularly a concave cylindrical surface, the film can be attached to the film supporting surface without interfering with the first surface. Attached to the cylindrical surface.

The moving unit can move the first unit, and the second unit and the roller including the film supporting surface can be moved, and the first unit, the second unit, and the roller can be moved. The moving unit may include a first moving unit that moves the first unit in the horizontal direction and the vertical direction. In the case where the first surface is a curved surface, the apparatus may further have a control unit that synchronously controls the amount of movement of the first unit in the horizontal direction and the amount of movement in the vertical direction in accordance with the curvature of the first surface. In the control unit, the amount of movement in the horizontal direction and the amount of movement in the vertical direction of the first unit may be controlled in synchronization with the position of the portion in which the cylindrical first surface is in contact with the roller in the vertical direction.

1, 1a, 1b, 1c‧‧‧ adhesive device

10‧‧‧Unit 1

11‧‧‧vacuum

12‧‧‧Substrate support surface

13‧‧‧Multiple holes

19‧‧‧vacuum

20‧‧‧Unit 2

21‧‧‧Support board

21a‧‧‧ Output

22‧‧‧Film support surface

22a‧‧‧ Output

23‧‧‧Multiple holes

24‧‧‧ face

25‧‧‧ board support unit

26‧‧‧Axis

30‧‧‧ Roller

31‧‧‧Axis

32‧‧‧Cylinder unit

33‧‧‧Drive direction

35‧‧‧Cylinder support unit

39‧‧‧ Surface

40‧‧‧Mobile system

41‧‧‧Mobile station

42‧‧‧X-axis unit

43‧‧‧Z-axis unit

44‧‧‧Guide unit

45‧‧‧Control unit

46‧‧‧Preparation control unit

46‧‧‧Preparation control unit

47‧‧‧Action Control Unit

50‧‧‧Substrate

51‧‧‧ Face

55‧‧‧Substrate

56‧‧‧ face

57‧‧‧Substrate

58‧‧‧ Face

60‧‧‧ film

61‧‧‧ Attachment

62‧‧‧ front end

64‧‧‧ Backend

71‧‧‧Support table

72‧‧‧Frame

80‧‧‧Unit 3

80‧‧‧Auxiliary unit

81‧‧‧Auxiliary board

θ 1‧‧‧ angle

θ 3‧‧‧ angle

△X‧‧‧moving amount

△Z‧‧‧moving amount

R‧‧‧ radius of curvature

88‧‧‧1st camera

89‧‧‧2nd camera

Figure 1 is a schematic view showing an adhesive device.

Fig. 2 is a view showing a state in which a film is attached, and Fig. 2(a) is attached. In the start state, Fig. 2(b) is the intermediate state, and Fig. 2(c) shows the final state.

Fig. 3(a) shows an example in which the support plates are inclined, and Fig. 3(b) shows an example in which the support plates are arranged in parallel.

Figure 4 is a schematic view showing different bonding devices.

Figure 5 is a schematic view showing another different bonding device.

Fig. 6 is a view showing an initial state of bonding a film.

Fig. 7 is a view showing a state in which a film is being bonded.

Fig. 1 shows an example of a device (attaching device) for bonding a film to a substrate having a concave surface. The bonding apparatus (attaching apparatus) 1 has a first unit 10 that supports a surface of a flat or sheet-like substrate (workpiece, first member) 50 to which the film 60 is attached (attached surface, first Face) 51. The substrate 50 of the first member is provided with a cylindrical concave surface (a surface on which an arc-shaped surface, a cylinder or a part of a cylinder is formed) as a surface (attached surface, first surface) 51 to which the film 60 is attached. The bonding apparatus 1 includes a second unit 20 including a film supporting surface 22 for sucking and supporting the film 60, a roller 30 for pushing the film 60 to the first surface 51, and a moving system (moving device) 40 for attaching the roller When the direction of the second unit 20 and the roller 30 extending from the first unit 10 is set to the Y direction, the shaft 31 of the 30 is in the two directions perpendicular to the Y direction, in this example, in the horizontal direction (X direction) and vertical. The direction (Z direction) moves relatively.

The bonding device 1 comprises: as a movement of the mobile system 40 A moving table (moving unit) 41 that moves the first unit 10 with respect to the horizontal support table (chassis) 71 in the X direction and the Z direction, and a control unit 45 that controls the movement of the moving table 41. The moving unit 41 includes appropriate actuators and mechanisms, such as well-known actuators such as motors and cylinders, and well-known mechanisms such as cams and gears. The moving system 40 may be a system that moves the second unit 20 and the roller 30 in the X direction and the Z direction, or may be a system that moves the first unit 10 and the second unit 20 and the roller 30 to each other. The moving stage 41 includes a Z-axis unit 43 that supports the first unit 10 and expands and contracts in the Z direction, a guiding unit 44 that guides the movement of the first unit 10 in the Z-axis direction, and an X-axis unit 42 that causes the Z-axis unit 43 to And the guiding unit 44 moves in the X direction.

The first unit 10 includes a vacuum table 11 that sucks and supports a sheet-shaped member (workpiece, workpiece, substrate, first member) 50 having a cylindrical concave surface 51. The vacuum stage 11 includes a concave (curved) circular substrate supporting surface (workpiece supporting surface, member supporting surface) 12; and a plurality of holes 13 provided in the substrate supporting surface 12 to adsorb the substrate 50. The plurality of holes 13 for adsorption are connected to a vacuum pump (not shown), and can be fixed by vacuum-adsorbing the cylindrical substrate 50 to the support surface 12. The method of fixing the substrate 50 is not limited to vacuum adsorption, and may be fixed by magnetic force or mechanically. An example of the first surface (attached surface, bonding target surface) 51 of the substrate 50 is a cylindrical concave surface having a curvature radius of about 1000 mm.

The substrate 50 may be a highly rigid substrate such as metal or plastic, or may be a thin film film or a part thereof. It is a three-dimensional member or part of the cylindrical surface to be attached to the surface 51. The radius of curvature of the first surface 51 is not limited to 1000 mm, and may be close to a plane. Conversely, the radius of curvature may be about 200 mm or less. When the radius of curvature is small, there is a case where it is necessary to adjust the inclination of the film supporting surface 22 by the second unit 20 which will be described later.

The second unit 20 supporting the film 60 attached to the first surface 51 of the substrate 50 is a support plate 21 including a flat film support surface 22 of the support film 60, and the support plate 21 is included to be used on the film support surface 22. The film 60 attracts a plurality of fixed apertures 23. The plurality of holes 23 are connected to a blower (not shown) to form a negative pressure. The film 60 of the sheet-like member (film, layer, workpiece) is fixed to the film support surface 22 by the wind pressure and the negative pressure formed by the airflow sucked by the blower. Further, as will be described later, when the film 60 is pulled by the roller 30, the film 60 slides along the film supporting surface 22 and is continuously supplied to the roller 30.

The bonding apparatus 1 further includes a board supporting unit 25 that supports the supporting plate 21 of the second unit 20 to the frame 72 that rises from the chassis 71 in the Z direction (vertical direction). The board support unit 25 includes a suitable actuator such as a motor, a cylinder, or the like, and a known mechanism such as a cam, and can adjust the position of the support plate 21 in the Z direction and the angle of the film support surface 22 to the horizontal direction (for the X direction). Tilt) θ 1. The range of the angle θ 1 , for example, the angle formed in the horizontal direction (X direction) (inclination in the horizontal direction) is 5 to 60 degrees. The board support unit 25 can further reverse the support plate 21 about the axis 26 extending in the X direction. Thereby, the film supporting surface 22 can be reversed from the state in which the film 60 is set upward to the first surface 51 of the substrate 50. The upper surface of the adhesive film 60 is opposed to the first surface 51 (the opposite side), and the substrate 50 is supported on the substrate supporting surface 12 such that the first surface 51 faces outward (upper side).

This bonding device 1 includes a third unit 80 that can attach and detach the auxiliary plate 81 to the support plate 21. In order to prepare the film 60 to be attached to the first surface 51, first, the auxiliary plate 81 is attached to the output end 21a of the support plate 21, and the film is set in the state of extending the output end (one end) 22a of the film supporting surface 22. 60. Then, after the protective film (not shown) is detached from the attaching surface 61 of the film 60, the auxiliary plate 81 is retracted in the X direction, and the support plate 21 is reversed. Thereby, the attaching surface 61 of the film 60 can be disposed facing the first surface 51 of the substrate 50 (opposing in a facing direction), and the substrate 50 is supported on the substrate supporting surface such that the first surface 51 faces outward. 12. Then, the front end 62 of the film 60 is extended from the output end 22a of the film supporting surface 22 in an unconstrained state, and the leading end 62 of the film 62 is initially pushed by the film 30 to the first surface 51 by the roller 30.

A face 24 that forms an acute angle with respect to the film support surface 22 is formed at the output end 21a of the support plate 21. When the support plate 21 is reversed, the roller 30 can be disposed at a position close to the film support surface 22.

The roller 30 is a cylindrical rotating body in which the shaft 31 extends in the Y direction. The bonding apparatus 1 includes a cylinder unit 32 that applies pressure to the roller 30, and a cylinder supporting unit 35 that supports the cylinder unit 32 to a frame 72 that rises from the chassis 71 in the Z direction (vertical direction). The cylinder supporting unit 35 includes a suitable actuator, such as a motor, a cylinder, etc., and a mechanism such as a cam, and can adjust the position of the cylinder unit 32 in the Z direction, and the gas. The driving direction 33 of the cylinder unit 32 and the angle θ 2 of the Z direction. The angle θ 2 is, for example, an angle (vertical to the vertical direction) formed in the vertical direction (the vertical direction, the Z direction) is 0 to 60 degrees, and may be 0 to 30 degrees or 0 to 15 degrees.

The control unit 45 for controlling the movable mechanism of the moving unit (mobile station) 41, the plate supporting unit 25, and the cylinder supporting unit 35 of the bonding device 1 includes a preparation control unit 46 that controls the second unit 20 and the auxiliary unit 80. And a movable mechanism such as a position and a direction of the roller 30, the film 60 is prepared to be attached to the first surface 51 of the substrate 50, and the operation control unit 47 controls the movable device 1 of the moving table 41 or the like. The mechanism relatively moves the first unit 10 in the two-dimensional direction (XZ direction) so that the second unit 20 and the roller 30 are along the first surface 51. More specifically, the motion control unit 47 controls the mobile station 41 and the like so that one end (output end) 22a of the film supporting surface 22 and the roller 30 move along the first surface 51 of the substrate 50 supported by the first unit 10. In this manner, the first unit 10 relatively moves the film supporting surface 22 and the roller 30. In this example, more specifically, the motion control unit 47 controls the mobile station 41 and the like so that the output end 22a of the film supporting surface 22 and the roller 30 move along the substrate supporting surface 12, so that the first unit 10 is opposed to the film. The support surface 22 and the roller 30 move relative to each other.

In the bonding apparatus 1, the operation control unit 47 controls the X-axis unit of the moving table (moving unit) 41 in synchronization with the curvature (curvature radius) of the first surface 51 in order to bond the film 60 to the curved first surface 51. Movement of the horizontal direction (X direction) of the first unit 10 of 42 The amount and the amount of movement in accordance with the vertical direction (Z direction) of the Z-axis unit 43. Specifically, in order to attach the film 60 to the cylindrical curved surface 51, when the first unit 10 is moved in the X direction, the position of the portion where the cylindrical first surface 51 and the roller 30 are in contact with each other in the Z direction is constant. The way to synchronize control.

The control unit 45 can be implemented using a computer and a software that enables the computer to function. The functions of the preparation control unit 46 and the operation control unit 47 can be provided by software (program, program), and can also be provided through the Internet or recorded on a suitable recording medium such as a memory chip or a disc. .

FIG. 2 shows a state in which the film 60 is attached (bonded) to the cylindrical first surface 51 of the substrate 50 by the function control bonding device 1 of the control unit 45 (control method). As shown in FIG. 2(a), the second unit 20 reverses the support plate 21 by the plate supporting unit 25 so that the film supporting surface 22 faces the first surface 51 of the substrate 50. Therefore, the bonding surface 61 of the film 60 is opposed to the first surface 51 of the substrate 50 to which the first unit 10 is fixed upward by the first surface 51 of the substrate 50. The plate supporting unit 25 is such that the support plate 21 is inclined at an angle θ 1 in the horizontal direction (X direction) so that the film supporting surface 22 is inclined and the first surface 51 forms an acute angle. As a result, the film supporting surface 22 is held in a state where the output end 22a is closest to the first surface 51. For example, the angle θ 1 between the film supporting surface 22 and the first surface 51 ranges from 5 to 60 degrees, preferably from 10 to 45 degrees, more preferably from 10 to 30 degrees. In this example, the angle θ 1 is, for example, 20 degrees.

In the case where the sheet-like substrate 50 is used as the workpiece bonding film 60, the substrate supporting surface 12 of the first unit 10 is a curved surface parallel to the first surface 51 of the substrate 50, and the thickness of the substrate 50 is several μm to several mm. Since the left and right are mostly, the first surface 51 is substantially equivalent to the substrate supporting surface 12. Therefore, the film supporting surface 22 is inclined toward the substrate supporting surface 12 at an acute angle with the substrate supporting surface 12 and at an acute angle with the substrate supporting surface 12, and is close to the substrate supporting surface at the output end 22a of the film supporting surface 22. The state of 12 is maintained.

In this example, the plate support unit 25 inclines the X direction and the film supporting surface 22 at an angle θ 1 (held at an acute angle), and the angle θ 3 between the first surface 51 and the film supporting surface 22 is formed to be an acute angle. The inclination of the film supporting plate 21 can be controlled by the plate supporting unit 25, and the angle of the film supporting plate 21 can be controlled so that the angle θ 1 becomes constant, and the angle θ 3 can be controlled to be constant.

The motion control unit 47 controls the amount of movement of the X-axis unit 42 and the Z-axis unit 43 of the mobile station 41, and the front end 62 of the film 60 supported by the film supporting surface 22 and the substrate supported by the vacuum table 11 of the first unit 10. The end 52 of the first face 51 of 50 is aligned. Then, the roller 30 is aligned with the front end 62 of the film 60, and the film 60 is pressurized from the upper side (the back side of the film 60 and the side opposite to the attaching surface), and the operation of attaching the film 60 to the first surface 51 is started ( engineering).

The motion control unit 47 adjusts the movement amount ΔZ of the Z-axis unit 43 of the moving table 41 supporting the vacuum table 11 in the Z-axis direction according to the curvature of the first surface 51, that is, the curvature (radius of curvature) of the substrate supporting surface 12. X The amount of movement ΔX of the shaft unit 42 in the X direction is controlled in synchronization. Specifically, the motion control unit 47 synchronizes the movement amount ΔZ in the Z-axis direction of the Z-axis unit 43 of the moving table 41 that supports the vacuum table 11 with the movement amount ΔX in the X direction of the X-axis unit 42. The value calculated by the radius of curvature R of the first surface 51 of the cylindrical type is controlled. In this example, the movement amount ΔZ is controlled to the positive direction (upper side) with respect to the movement amount ΔX from the start of attachment to the intermediate position shown in Fig. 2(b), from the intermediate position to Fig. 2(c) The movement amount ΔZ is synchronously controlled in the negative direction (lower side) with respect to the movement amount ΔX until the position where the attachment is completed.

By the control of the motion control unit 47, the cylindrical first surface 51 is moved in the X direction in the concave direction of the substrate 50 supported by the vacuum table 11 and held at a position (height) in contact with the roller 30. Therefore, the roller 30 continuously pressurizes the cylindrical first surface 51.

Further, since the support plate 21 of the support film 60 is inclined in the Z direction with respect to the X direction, even if the concave first surface 51 moves in the Z direction, it does not interfere with the vacuum stage 11. Therefore, the film 60 supported by the film supporting surface 22 is continuously pushed up by the roller 30 to the cylindrical first surface 51 and sent out from the film supporting surface 22 to the first surface 51. Thus, the film 60 can be attached to the first surface 51 bent into a cylindrical shape by a predetermined pressure by the bonding apparatus 1, instead of being planar.

Further, since the film supporting surface 22 of the support film 60 is inclined, the film 60 is linearly supplied from the film supporting surface 22 toward the roller 30, and the film 60 is not easily peeled off from the film supporting surface 22. Therefore, as shown in FIG. 2(c), even if the roller 30 is close to the state of the rear end 64 of the film 60, The film 60 that is attracted and supported by the film supporting surface 22 can be prevented from being peeled off from the film supporting surface 22.

Figures 3 (a) and (b) show different bonding devices 1a. The bonding apparatus 1a includes a first unit 10 including a flat vacuum stage 19, and a film 60 is attached to a flat first surface 56 of a flat plate (workpiece) 55 supported by a flat substrate supporting surface 12.

3(a) shows a case where the film supporting surface 22 is inclined, and FIG. 3(b) shows a case where the film supporting surface 22 is set in parallel to the flat first surface 56 and the substrate supporting surface 12. As shown in FIG. 3(b), when the film supporting surface 22 is parallel to the first surface 56 and the substrate supporting surface 12 instead of being inclined, when the film 60 is supplied from the film supporting surface 22 to the roller 30, the film 60 is in the film. The support surface 22 and the roller 30 are vertically inclined, and the film 60 tends to be peeled off from the front end 22a of the film support surface 22.

On the other hand, as shown in FIG. 3( a ), the film supporting surface 22 is inclined at an acute angle θ 1 (θ 3 ) with respect to the X direction or the first surface 56 (substrate supporting surface 12 ) to be bonded. The film support surface 22 is disposed in the tangential direction of the surface (outer peripheral surface) 39 of the roller 30. Therefore, the film 60 can be supplied substantially linearly from the film supporting surface 22 to the roller 30, and the peeling of the film 60 from the front end 22a of the film supporting surface 22 can be suppressed. Therefore, it is possible to further suppress the occurrence of skew or wrinkles when the film 60 is attached to the substrate 55, and the film support surface 22 can more reliably hold the rear end 64 of the film 60. Therefore, the film 60 can be attached to the first surface 56 of the substrate 55 by the application of pressure from the roller 30, and the film 60 can be more uniformly attached to the surface 56 of the substrate 55. Even as in the example above, The substrate to be attached (the surface to be bonded and the first surface) of the substrate is curved in a concave shape, and the substrate is also curved in a convex shape as in the following example.

In the case where the substrate is a flat plate and is bent into a concave shape, when the film supporting surface 22 is inclined, although the output end 21a side of the supporting plate 21 may interfere with the roller 30, the output end 21a of the supporting plate 21 is made relatively The surface 24 having an acute angle on the film supporting surface 22 can also suppress interference with the roller 30. Therefore, the distance from the end 22a on the output side of the film supporting surface 22 to the roller 30 can be made close. Since the film 60 is supplied to the roller 30 while supporting the film 60 on the output side end 22a of the film supporting surface 22 by tilting the film supporting surface 22, the film 60 becomes unconstrained between the film supporting surface 22 and the roller 30. The distance is very short. Therefore, the control of the bonding start position of the film 60 is facilitated, and the film 60 can be attached to the surface 56 of the attached object more accurately and accurately.

Figure 4 shows a different bonding device 1b. In the bonding apparatus 1b, the second unit 20 and the roller 30 are disposed below the first unit 10 (lower side in the vertical direction). That is, the substrate supporting surface 12 of the first unit 10 faces downward, and the film supporting surface 22 of the second unit 20 is disposed to face upward on the lower side of the substrate supporting surface 12, and faces the substrate supporting surface 12. Therefore, the positional relationship between the substrate 50 of the bonding target and the film 60 is reversed, and the film 60 can be attached upward. Since the film 60 is placed on the film supporting surface 22 facing upward, the weight of the film 60 does not act in the direction of peeling off from the film supporting surface 22. Therefore, peeling of the film 60 from the film supporting surface 22 can be further suppressed. Moreover, the attaching operation of the film 60 is started in the front end 62 of the film 60 in a state where the roller 30 is supported from the lower side.

When the film 60 is suction-supported from the upper side by the film supporting surface 22, when the film 60 is very thin and the film 60 is protruded from the film supporting surface 22 into an unconstrained state, the film itself has no rigidity which can maintain a straight line (hardness). In the case of the case, the front end 62 of the film 60 may hang down and the positioning of the front end 62 may become difficult. By supporting the film 60 from the lower side by the film supporting surface 22, the front end 62 of the film 60 is supported from the lower side by the roller 30, and even if the thin film 60 is thin and rigid, the front end 62 of the film 60 can be attached. The first surface 51 of the object is linearly extended. Therefore, the film 60 can be attached to the first surface 51 of the substrate 50 with high precision.

Figures 5 to 7 show another different bonding device 1c. The bonding apparatus 1c is a device for bonding the film 60 to a sheet-like substrate 57 having a convex cylindrical shape and a convex cylindrical surface which is the first surface 58. The first unit 10 includes a vacuum stage 11 having a substrate supporting surface 12 that is curved in a convex shape. The second unit 20 includes a plate supporting unit 25 that reverses (rotates) the film supporting plate 21.

As shown in FIG. 5, the preparation control unit 46 of the bonding apparatus 1c mounts the film 60 on the film supporting surface 22 of the film supporting plate 21 of the second unit 20, and the position of the front end 62 is recognized by the first camera 88. Moreover, the preparation control unit 46 confirms the position of the end 59 of the first surface 58 of the substrate 57 mounted on the substrate supporting surface 12 of the vacuum stage 11 by which the film 60 starts to be bonded by the second camera 89. Thereafter, the preparation control unit 46 is configured to retract the auxiliary plate 81 from the support plate 21, and the support plate 21 is attracted to the film supporting surface 22 by a portion of the film 60 (except for the front end 62) by the plate supporting unit 25. In the state of support Turn around 180 degrees. Further, the first unit 10 is moved to the lower side of the support plate 21 by the moving unit 41.

As shown in Fig. 6, the preparation control unit 46 re-rotates the film supporting plate 21 so that the angle θ 1 formed by the film supporting surface 22 and the horizontal direction X becomes an acute angle. Thereby, the film supporting surface 22 can be opposed to the first surface 58 (substrate supporting surface 12) in a state of being opposed to the substrate supporting surface 12 of the first unit 10 and the first surface 58 of the substrate 57 supported thereby. The angle θ 3 is maintained in an acute angle. Further, by tilting the substrate supporting surface 12 against the first surface 58 and the substrate supporting surface 12, the output end 22a can be held in a state close to the first surface 58 and the substrate supporting surface 12.

Then, the preparation control unit 46 extends the roller 30 disposed near the output end 22a of the film supporting surface 22 toward the first surface 58 (substrate supporting surface 12), and extends the film 60 from the output end 22a of the film supporting surface 22. The front end 62 is pushed against the first side 58.

Thereafter, the operation control unit 47 controls the moving unit 41 to move the first unit 10 such that the output end 22a of the film supporting surface 22 and the roller 30 move along the first surface 58 of the substrate 57 supported by the first unit 10. The film support surface 22 and the roller 30 are relatively moved. Specifically, the first unit 10 is lowered (shortened) in the Z direction (up and down direction) in synchronization with the movement of the first unit 10 in the X direction in the X direction in accordance with the radius of curvature of the convex curved surface 58.

The first unit 10 is controlled by the moving unit 41 to synchronize the movement amount ΔX in the X direction and the movement amount ΔZ in the Z direction with the curvature of the first surface 58. As shown in Fig. 7, the film supporting surface 22 can be prevented. Output 22a The film 60 is attached to the convex surface 58 while the roller 30 is moving.

Also in this example, the film supporting surface 22 is inclined with respect to the horizontal direction X and is arranged along the tangential direction of the outer peripheral surface 39 of the roller 30. Therefore, the film 60 adsorbed and supported by the film supporting surface 22 is detachably attached to the first surface 58 by the roller 30 on the film supporting surface 22, and is not easily peeled off from the film supporting surface 22, and wrinkles or bubbles can be used. The attachment to the end of the film 60 is performed so as not to enter the first surface 58.

Further, in the above-described bonding apparatuses 1, 1a, 1b, and 1c, the first unit 10 of the support substrate 50 is moved in the X direction and the Z direction by the moving unit 41, but the second unit 20 of the supporting film 60 and the second unit 20 may be The roller 30 moves relative to the first unit 10, and the case where both sides can be moved is as described above. Further, the object (workpiece) to be bonded to the film 60 is not limited to a sheet-like substrate, and may be a three-dimensional (three-dimensional) structure.

1‧‧‧Adhesive device

10‧‧‧Unit 1

11‧‧‧vacuum

12‧‧‧Substrate support surface

20‧‧‧Unit 2

21‧‧‧Support board

21a‧‧‧ Output

22‧‧‧Film support surface

22a‧‧‧ Output

24‧‧‧ face

30‧‧‧ Roller

31‧‧‧Axis

39‧‧‧ Surface

41‧‧‧Mobile station

42‧‧‧X-axis unit

43‧‧‧Z-axis unit

44‧‧‧Guide unit

47‧‧‧Action Control Unit

50‧‧‧Substrate

51‧‧‧ Face

52‧‧‧End

60‧‧‧ film

61‧‧‧ Attachment

62‧‧‧ front end

θ 1‧‧‧ angle

θ 3‧‧‧ angle

△X‧‧‧moving amount

△Z‧‧‧moving amount

Claims (8)

A film bonding apparatus which is a device for bonding a film to a first surface of a first member, comprising: a first unit having a member supporting surface for supporting the first member so that the first surface faces outward; a support surface that sucks and supports a part of the film; and a second unit that faces the film support surface and the first member that is supported by the first unit in the first direction The first surface is inclined at an acute angle to the first surface, and is held in a state in which one end is close to the first surface. The roller is disposed on a roller adjacent to the one end of the film supporting surface, and is a roller. a film extending from the one end of the film supporting surface to a roller on the first surface of the first member supported by the first unit; and a moving unit, the one end of the film supporting surface and the aforementioned The roller moves the first support unit to the film support surface and the roller so as to move along the first surface of the first member supported by the first unit. The film bonding apparatus of claim 1, wherein the second unit holds the film supporting surface in a tangential direction of an outer circumferential surface of the roller. A film laminating device according to claim 1 or 2, wherein The second unit includes a support plate having the film support surface, and the support plate has an end surface that forms an acute angle with the film support surface at one end. The film bonding apparatus according to any one of claims 1 to 3, wherein the first member is a sheet-like member, and the second unit has a state in which the film supporting surface faces the member supporting member The member supporting surface is inclined to form an acute angle with the member supporting surface, and is held in a state in which the one end is close to the member supporting surface, and the moving unit is along the one end of the film supporting surface and the roller is along The first unit is relatively moved to the film supporting surface and the roller in such a manner that the member supporting surface moves. The film bonding apparatus according to any one of claims 1 to 4, wherein the film supporting surface and the roller are disposed below the member supporting surface. The film bonding apparatus according to any one of claims 1 to 5, wherein the first surface is curved into a convex or concave surface, and the moving unit has the one end of the film supporting surface and the roller In the first surface movement, the first unit is relatively moved in the two-dimensional direction with respect to the film supporting surface and the roller. The film bonding apparatus according to any one of claims 1 to 5, wherein the first member includes a sheet-like member of the first surface that is curved in a convex or concave shape, and the moving unit is supported by the film. The one end of the surface and the roller are moved along the member supporting surface such that the first unit relatively moves the film supporting surface and the roller in a two-dimensional direction. The film bonding apparatus according to claim 6 or 7, wherein the moving unit includes a first moving unit that moves the first unit in a horizontal direction and a vertical direction, and further includes a control unit that changes curvature of the first surface according to the bending The amount of movement in the horizontal direction and the amount of movement in the vertical direction of the first unit are synchronously controlled.