TW201640203A - Photo alignment apparatus - Google Patents

Photo alignment apparatus Download PDF

Info

Publication number
TW201640203A
TW201640203A TW105108974A TW105108974A TW201640203A TW 201640203 A TW201640203 A TW 201640203A TW 105108974 A TW105108974 A TW 105108974A TW 105108974 A TW105108974 A TW 105108974A TW 201640203 A TW201640203 A TW 201640203A
Authority
TW
Taiwan
Prior art keywords
light
led
alignment device
polarizing
polarizing plates
Prior art date
Application number
TW105108974A
Other languages
Chinese (zh)
Inventor
尹炯烈
橋詰幸司
Original Assignee
韓商Wi-A股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 韓商Wi-A股份有限公司 filed Critical 韓商Wi-A股份有限公司
Publication of TW201640203A publication Critical patent/TW201640203A/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polarising Elements (AREA)

Abstract

The present invention discloses a photo alignment apparatus. The photo alignment apparatus according to one embodiment of the present invention treats an alignment film used for aligning liquid crystal in a non-contact manner; the photo alignment apparatus comprises: a light source part, in which LED elements are arranged to emit light, and a polarizing part used for controlling polarization, and is characterized in: in the light source part, the LED elements are arranged in multiple lines to form LED straight light; in the polarizing part, a plurality of polarizers are arranged in a line, and multiple beams of the LED straight light are incident into the polarizing part at an interval so as not to interfere with each other.

Description

光配向裝置Light alignment device

本發明係關於一種光配向裝置,特別是一種利用LED(發光二極體)的光配向裝置。The present invention relates to a light alignment device, and more particularly to a light alignment device using an LED (Light Emitting Diode).

為了使液晶顯示元件的配向膜玻璃的配向膜沿著規定方向配向,光配向裝置向配向膜照射具有規定波長的偏振光束以進行配向,代替將摩擦輥接觸於配向膜而進行機械磨刷的摩擦(rubbing)方式。為了進行光配向,使用照射規定強度的光的高壓汞燈或者金屬鹵化物燈等UV燈。In order to align the alignment film of the alignment film glass of the liquid crystal display device in a predetermined direction, the optical alignment device irradiates the alignment film with a polarized light beam having a predetermined wavelength to perform alignment, instead of mechanically rubbing the friction roller in contact with the alignment film. (rubbing) way. For the light alignment, a UV lamp such as a high-pressure mercury lamp or a metal halide lamp that emits light of a predetermined intensity is used.

以往的UV燈需要用於限制波長的光學系統,以防止照射不必要的波長的光,然而由於該光學系,透光率受到影響,使得到達配向膜的光能減小,而且燈的價格相當昂貴。此外,以往的UV燈中需要設置複雜的反射鏡(mirror),以控制相對於燈管光軸的擴散光。為了實現配向狀態的高精密化,入射的光需要垂直於配向膜,然而聚焦擴散光而進行大範圍照射的UV燈的反射鏡很難只抽選出垂直入射的光。並且以往的UV燈的開關(on-off)需要大量的等待時間。Conventional UV lamps require an optical system for limiting wavelengths to prevent illumination of light of unnecessary wavelengths. However, due to the optical system, the light transmittance is affected, so that the light energy reaching the alignment film is reduced, and the price of the lamps is equivalent. expensive. In addition, in conventional UV lamps, it is necessary to provide a complicated mirror to control the diffused light with respect to the optical axis of the lamp. In order to achieve high precision of the alignment state, the incident light needs to be perpendicular to the alignment film, but it is difficult for the mirror of the UV lamp that focuses the diffused light to perform a wide range of illumination to extract only the light that is normally incident. And the conventional on-off of UV lamps requires a large amount of waiting time.

所要解決的技術問題Technical problem to be solved

因此,本發明是為了解決上述問題而提出的,其目的在於,提供一種設備結構簡單的光配向裝置。Accordingly, the present invention has been made to solve the above problems, and an object thereof is to provide a light alignment device having a simple device structure.

通過下面描述的實施例,本發明的其它目的將變得更為明確。Other objects of the present invention will become more apparent from the embodiments described below.

解決技術問題的方法Ways to solve technical problems

本發明所揭露的電池負壓檢測系統,具有至少一電池化成設備及檢測治具。每一個電池化成設備具有多個負壓管路,電池化成設備透過通訊網路接收第一控制指令,並依據第一控制指令執行檢測程式。檢測治具具有多個檢測介面,檢測治具用以選擇性地對電池化成設備進行檢測程式。於檢測程式中,電池化成設備的每一個負壓管路連接一個檢測介面,且電池化成設備透過負壓管路對檢測介面進行抽氣,使檢測治具產生量測結果。檢測治具傳送量測結果至電池化成設備。The battery negative pressure detecting system disclosed in the present invention has at least one battery forming device and a detecting fixture. Each of the battery forming devices has a plurality of negative pressure lines, and the battery forming device receives the first control command through the communication network, and executes the detecting program according to the first control command. The test fixture has a plurality of detection interfaces for selectively detecting the battery formation device. In the detection program, each negative pressure line of the battery formation device is connected to a detection interface, and the battery formation device suctions the detection interface through the negative pressure line, so that the detection fixture produces a measurement result. The test fixture transmits the measurement result to the battery formation device.

本發明提供了一種光配向裝置,以非接觸方式處理用於使液晶配向的配向膜,所述光配向裝置包括排列有LED元件以照射光的光源部以及用於進行偏振控制的偏振部,其特徵在於,在光源部中,LED元件排列成多列,以形成LED直線光,在偏振部中,多個偏振片排列成一列,多束LED直線光以相互不干涉的間隔入射到偏振部。The present invention provides a light alignment device that processes an alignment film for aligning liquid crystals in a non-contact manner, the light alignment device including a light source portion in which LED elements are arranged to illuminate light, and a polarization portion for performing polarization control. In the light source unit, the LED elements are arranged in a plurality of rows to form LED linear light. In the polarizing unit, a plurality of polarizing plates are arranged in a line, and the plurality of LED linear lights are incident on the polarizing portion at intervals that do not interfere with each other.

本發明涉及的光配向裝置可以具有一個或者多個如下實施例。例如,在一實施例中,選擇並配置峰值波長彼此不同的多束LED直線光,以控制照射強度。The optical alignment device to which the present invention relates may have one or more of the following embodiments. For example, in one embodiment, multiple bundles of LED linear light having peak wavelengths different from each other are selected and configured to control the illumination intensity.

在一實施例中,單獨控制LED元件,以使通過偏振部下部的配向膜從多束LED直線光中所接收的光量均勻。In one embodiment, the LED elements are individually controlled such that the amount of light received by the alignment film at the lower portion of the polarizer from the multi-beam LED linear light is uniform.

在一實施例中,多束所述LED直線光在透射偏振部時相互交叉。In an embodiment, the plurality of LED linear lights intersect each other when transmitting the polarized portion.

在一實施例中,多束LED直線光的照射角度相互對稱,從而在透射偏振部時形成連續的照射集中部。In one embodiment, the illumination angles of the plurality of LED linear lights are symmetrical with each other to form a continuous illumination concentration portion when transmitting the polarization portion.

在一實施例中,光源部具備透鏡,所述透鏡使光線形成為擴散光或者直線光。In one embodiment, the light source portion is provided with a lens that causes the light to be diffused or linear.

在一實施例中,偏振部包括偏振片,偏振片之間形成有間隙,間隙的下部設有遮光構件,以防止LED光線透射。In one embodiment, the polarizing portion includes a polarizing plate, a gap is formed between the polarizing plates, and a light shielding member is disposed at a lower portion of the gap to prevent transmission of the LED light.

在一實施例中,遮光構件的寬度小於等於4.5mm。In an embodiment, the width of the light shielding member is less than or equal to 4.5 mm.

在一實施例中,偏振部包括偏振片,偏振片具有不位於其中央的旋轉中心,並且能夠通過旋轉來調節角度。In an embodiment, the polarizing portion includes a polarizing plate having a center of rotation not located at the center thereof, and is capable of adjusting an angle by rotation.

在一實施例中,相鄰的偏振片的旋轉中心配置在互為相反一側。In an embodiment, the centers of rotation of adjacent polarizing plates are disposed on opposite sides of each other.

在一實施例中,通過調節光配向裝置的相對於配向膜的垂直高度,來控制配向膜的反應時間。In one embodiment, the reaction time of the alignment film is controlled by adjusting the vertical height of the photoalignment device relative to the alignment film.

在一實施例中,具備用於接收LED直線光到達配向膜時所產生的螢光的螢光感測器,並利用螢光感測器來測定配向膜的配向度。In one embodiment, a fluorescent sensor for receiving fluorescence generated when the linear light of the LED reaches the alignment film is provided, and the alignment of the alignment film is measured by a fluorescent sensor.

本發明的一實施方式涉及的光配向方法,其特徵在於,使用LED直線光以及多個偏振片進行光配向,LED直線光是由多個LED元件形成的線性狀態的光,為了對LED直線光進行偏振控制,多個偏振片排列成一列,並且平行光形式的多束LED直線光以相互不干涉的間隔入射到多個偏振片。An optical alignment method according to an embodiment of the present invention is characterized in that LED linear light and a plurality of polarizing plates are used for optical alignment, and LED linear light is linear state light formed by a plurality of LED elements, in order to linearly light the LED Polarization control is performed, a plurality of polarizing plates are arranged in a line, and a plurality of LED linear lights in the form of parallel light are incident on the plurality of polarizing plates at intervals that do not interfere with each other.

發明效果Effect of the invention

本發明能夠提供一種結構簡單的光配向裝置。The invention can provide a light alignment device with a simple structure.

以上之關於本揭露內容之說明及以下之實施方式之說明係用以示範與解釋本發明之精神與原理,並且提供本發明之專利申請範圍更進一步之解釋。The above description of the disclosure and the following description of the embodiments of the present invention are intended to illustrate and explain the spirit and principles of the invention, and to provide further explanation of the scope of the invention.

本發明可以進行各種變形,也可以有各種實施例,下面在附圖中例示出具體實施例並進行詳細說明。然而,應當理解為,本發明並非限定於具體的實施方式,而是包括本發明的思想及技術範圍內的所有變形、等同物乃至替代物。在對本發明進行說明時,如果認為相關的公知技術的具體說明有可能混淆本發明的要旨,則省略對其的詳細說明。The present invention can be variously modified, and various embodiments can be made. The specific embodiments are exemplified and described in detail below. However, it is to be understood that the invention is not limited to the specific embodiment, but all modifications, equivalents and alternatives are included within the scope of the spirit and scope of the invention. In the description of the present invention, if it is considered that the specific description of the related art may obscure the gist of the present invention, the detailed description thereof will be omitted.

本申請中所使用的術語只是用來說明具體的實施例,並非旨在限定本發明。除非文章中有明確的其它含義,否則單數表示包括複數表示。在本申請中,諸如“包括”或者“具有”等術語只是用來表示存在說明書中所記載的特徵、數位、步驟、動作、構成要素、部件或者它們的組合,並不排除存在或增加一個或多個其它特徵、數位、步驟、動作、構成要素、部件或者它們的組合的可能性。The terminology used in the description is for the purpose of illustration and description A singular representation includes the plural unless the context clearly dictates otherwise. In the present application, terms such as "including" or "having" are used to indicate that there are any features, digits, steps, acts, components, components or combinations thereof described in the specification, and do not exclude the presence or addition of one or The possibility of multiple other features, digits, steps, actions, components, components, or combinations thereof.

第一、第二等術語可以用來說明各種構成要素,但是,所述構成要素不應被所述術語限定。所述術語只是用來區分一個構成要素與另一個構成要素。The terms first, second, etc. may be used to describe various constituent elements, but the constituent elements should not be limited by the terms. The terms are only used to distinguish one component from another.

下面,參照附圖對本發明涉及的實施例進行詳細說明,在參照附圖進行說明時,與圖的編號無關,對相同或對應的構成要素賦予相同的附圖標記,並省略對其的重複說明。In the following, the embodiments of the present invention will be described in detail with reference to the drawings, and the same reference numerals will be given to the same or corresponding components, and the repeated description thereof will be omitted. .

圖1及圖2是例示出本發明的一實施例涉及的光配向裝置100的立體圖,圖1例示了輸出一束LED直線光122的狀態,圖2例示了輸出三束LED直線光122的狀態。並且,圖3是例示出光配向裝置100中排列有LED(發光二極體)元件112的LED模組120的俯視圖,圖4是例示出在LED元件112的下部配置透鏡116以形成LED直線光122的狀態的示意圖。此外,圖5是例示出根據LED元件112與透鏡116之間的間隔a的聚光程度的示意圖。1 and 2 are perspective views illustrating an optical alignment device 100 according to an embodiment of the present invention, wherein FIG. 1 illustrates a state in which one bundle of LED linear light 122 is output, and FIG. 2 illustrates a state in which three LED linear light beams 122 are output. . 3 is a plan view showing an LED module 120 in which an LED (Light Emitting Diode) element 112 is arranged in the optical alignment device 100, and FIG. 4 is a view in which a lens 116 is disposed under the LED element 112 to form an LED linear light 122. Schematic diagram of the state. In addition, FIG. 5 is a schematic view illustrating the degree of light collection according to the interval a between the LED element 112 and the lens 116.

參照圖1至圖5,本發明的一實施例涉及的光配向裝置100包括:光源部110,具備多個LED元件112,用於照射線性狀態的LED直線光122;偏振部130,具備排成一列的多個偏振片132,以對LED直線光122進行偏振控制;防護玻璃片150,配置在偏振部130和形成有配向膜162的配向膜玻璃160之間。1 to 5, an optical alignment device 100 according to an embodiment of the present invention includes a light source unit 110, and includes a plurality of LED elements 112 for illuminating LED linear light 122 in a linear state; and a polarizing unit 130 having alignment The plurality of polarizing plates 132 are arranged in a row to control the polarization of the LED linear light 122; the protective glass sheet 150 is disposed between the polarizing portion 130 and the alignment film glass 160 on which the alignment film 162 is formed.

光配向裝置100將由光源部110形成的多束LED直線光122入射到偏振片132之後使其偏振以對配向膜162進行配向,其特徵在於,光源部110利用多個LED元件112作為光源。比起以往的UV燈,基於LED元件112的光源部110的優點在於,能量消耗低,可便於開閉(on-off),亮燈後短時間內快速升溫。此外,基於LED元件112的光源部110可以形成為較長(例如,1m),因此,能夠對應於面積大的配向膜玻璃160,並且無需具備冷光鏡(cold mirror)以及反射鏡等,因此,能夠簡化結構。In the optical alignment device 100, the plurality of LED linear lights 122 formed by the light source unit 110 are incident on the polarizing plate 132 and then polarized to align the alignment film 162. The light source unit 110 uses the plurality of LED elements 112 as a light source. Compared with the conventional UV lamp, the light source unit 110 based on the LED element 112 has an advantage in that energy consumption is low, and it is easy to open-close (on-off), and the temperature is rapidly increased in a short time after lighting. Further, the light source portion 110 based on the LED element 112 can be formed to be long (for example, 1 m), and therefore, can correspond to the alignment film glass 160 having a large area, and does not need to have a cold mirror, a mirror, etc., and therefore, Can simplify the structure.

光源部110可以具備包含多個LED元件112的至少一個LED模組120。LED模組120可以排成一列或者兩列以上,本實施例涉及的光源部110例示出具備排成三列的LED模組120。可以對各LED模組120進行獨立控制。The light source unit 110 may include at least one LED module 120 including a plurality of LED elements 112. The LED modules 120 may be arranged in a row or in two rows. The light source unit 110 according to the present embodiment is exemplified by the LED modules 120 arranged in three rows. Each LED module 120 can be independently controlled.

多個LED模組120可以輸出不同波長的LED光線。例如,一個LED模組120輸出的LED光線的峰值波長可以為365nm,另一個LED模組120輸出的LED光線的峰值波長可以為385nm,又另一個LED模組120輸出的LED光線的峰值波長可以為395nm。如此,可以使各LED模組120輸出不同波長的LED光線,從而能夠輸出最優化配向膜162的配向特性的波長的LED光線。The plurality of LED modules 120 can output LED light of different wavelengths. For example, the peak wavelength of the LED light output by one LED module 120 may be 365 nm, and the peak wavelength of the LED light output by the other LED module 120 may be 385 nm, and the peak wavelength of the LED light output by the other LED module 120 may be It is 395nm. In this way, each of the LED modules 120 can output LED light of different wavelengths, thereby being able to output LED light of a wavelength that optimizes the alignment characteristics of the alignment film 162.

例示了LED模組120具備一個板114,然而,也可以具備多個板114。如此,可以使LED模組120具備多個板114,從而使安裝在板114上的LED元件112的輸出強度以及波長等彼此不同。It is exemplified that the LED module 120 includes one plate 114. However, a plurality of plates 114 may be provided. In this manner, the LED module 120 can be provided with a plurality of plates 114 such that the output intensity, wavelength, and the like of the LED elements 112 mounted on the board 114 are different from each other.

本實施例涉及的光配向裝置100,其特徵在於,多束LED直線光122彼此以相互不干涉的間隔而入射到排列有一列多個偏振片132的偏振部130。如此,通過使多束LED直線光122透射形成為一列的光學系統,能夠防止在照射面上發生配向誤差,並且通過利用多束LED直線光,能夠提高生產率。The optical alignment device 100 according to the present embodiment is characterized in that the plurality of LED linear lights 122 are incident on the polarization portion 130 in which a plurality of the polarizing plates 132 are arranged at intervals without interfering with each other. As described above, by transmitting the plurality of LED linear lights 122 in a single line optical system, it is possible to prevent an alignment error from occurring on the irradiation surface, and it is possible to improve the productivity by using a plurality of LED linear lights.

參照圖4,各LED模組120的下部設有透鏡116。透鏡116使從LED元件112輸出的LED光線聚光或者形成為平行光。LED光線通過透鏡116形成為LED直線光122,或者不通過透鏡116而是由自身就形成為LED直線光122。LED直線光122是沿著與平臺170的移動方向(圖1及圖2中的箭頭方向)成直角的方向連續形成的較長的矩形光線。LED直線光122的長度可以形成為能夠全部包含在排成一列的多個偏振片132內的程度。Referring to FIG. 4, a lens 116 is disposed at a lower portion of each of the LED modules 120. The lens 116 condenses or forms the LED light output from the LED element 112 into parallel light. The LED light is formed as LED linear light 122 through lens 116, or is formed as LED linear light 122 by itself without passing through lens 116. The LED linear light 122 is a long rectangular light beam continuously formed in a direction perpendicular to the moving direction of the stage 170 (the direction of the arrow in FIGS. 1 and 2). The length of the LED linear light 122 can be formed to the extent that it can be entirely contained in the plurality of polarizing plates 132 arranged in a line.

透鏡116可以是截面為圓形(參照圖4及圖5)並且長長地形成的棒形透鏡(rod lens)。棒形透鏡可以沿著LED模組120的長度方向配置,並且如圖4所示,使相當於擴散光的LED光線形成為平行光形式的LED直線光122。The lens 116 may be a rod lens that is circular in cross section (refer to FIGS. 4 and 5) and formed long. The rod lens may be disposed along the longitudinal direction of the LED module 120, and as shown in FIG. 4, the LED light corresponding to the diffused light is formed into the LED linear light 122 in the form of parallel light.

當然,本實施例涉及的透鏡116不僅可以是棒形透鏡,只要能夠使從LED元件112輸出的LED光線聚光或者形成為平行光,就可以是任何種類。Of course, the lens 116 according to the present embodiment may be not only a rod lens, but may be of any kind as long as the LED light output from the LED element 112 can be condensed or formed into parallel light.

參照圖5,可以通過調節LED元件112與棒形透鏡之間的間隔a來使LED直線光122形成為擴散光或者平行光。即,可以如圖4所示,減小LED元件112與棒形透鏡之間的間隔,從而使從LED元件112輸出的LED光線全部入射於棒形透鏡116以形成平行光形式的LED直線光122。此外,如圖5所示,可以使LED元件112與棒形透鏡116之間的間隔a稍大,從而使從LED元件112輸出的LED光線中的一部分(例如,20%)不入射於棒形透鏡116而是作為擴散光輸出,其餘的LED光線(例如,80%)入射於棒形透鏡116以形成平行光形式的LED直線光122。Referring to FIG. 5, the LED linear light 122 can be formed as diffused light or parallel light by adjusting the interval a between the LED element 112 and the rod lens. That is, as shown in FIG. 4, the spacing between the LED element 112 and the rod lens can be reduced such that all of the LED light output from the LED element 112 is incident on the rod lens 116 to form LED linear light 122 in the form of parallel light. . Further, as shown in FIG. 5, the interval a between the LED element 112 and the rod lens 116 can be made slightly larger, so that a part (for example, 20%) of the LED light output from the LED element 112 is not incident on the rod shape. The lens 116 is instead output as diffused light, with the remaining LED light (e.g., 80%) being incident on the rod lens 116 to form LED linear light 122 in the form of parallel light.

當然,光源部110可以不使用透鏡116就形成擴散光形式的LED直線光122。此外,即便是配置在同一個LED模組120中的LED元件112,也可以混用具備透鏡116的LED元件112以及不具備透鏡116的LED元件112。Of course, the light source portion 110 can form the LED linear light 122 in the form of diffused light without using the lens 116. Further, even in the LED element 112 disposed in the same LED module 120, the LED element 112 including the lens 116 and the LED element 112 not including the lens 116 may be mixed.

圖6是例示出從LED元件112輸出的擴散光形式的LED直線光122到達配向膜162的狀態的示意圖。FIG. 6 is a schematic view illustrating a state in which the LED linear light 122 in the form of diffused light output from the LED element 112 reaches the alignment film 162.

參照圖6,擴散光形式的LED直線光122可以到達配向膜162。可以形成照射總寬度c為照射集中部126寬度a的兩倍以下的擴散光形式的LED直線光122,所述照射總寬度c是照射強度達到平均值的5%為止作為有效的區域的寬度。由此,其與照射總寬度c中除去照射集中部126寬度a後的剩餘部分的寬度b之間成立如下關係: a + 2b = c 2a≥cReferring to Figure 6, LED linear light 122 in the form of diffused light can reach alignment film 162. It is possible to form the LED linear light 122 in the form of diffused light having a total irradiation width c which is twice or less the width a of the irradiation concentrated portion 126, and the total irradiation width c is the width of the effective region until the irradiation intensity reaches 5% of the average value. Therefore, the following relationship is established between the total width c and the width b of the remaining portion after the width a of the irradiation concentrated portion 126 is removed: a + 2b = c 2a ≥ c

圖7是例示出LED直線光122通過偏振片132後交叉的狀態的示意圖。FIG. 7 is a schematic view illustrating a state in which the LED linear light 122 crosses through the polarizing plate 132.

當光源部110只照射平行光形式的LED直線光122時,雖然光的方向性能提高,但是累積光量降低,從而使得量產性下降。為了解決這些問題,如圖7所例示,可以使從多個LED模組120輸出的擴散光形式的LED直線光122通過偏振片132後相互交叉,由此增加照射面積,特別是增加形成在中央的照射集中部126的大小。When the light source unit 110 illuminates only the LED linear light 122 in the form of parallel light, although the directional performance of light is improved, the amount of accumulated light is lowered, so that mass productivity is lowered. In order to solve these problems, as illustrated in FIG. 7 , the LED linear light 122 in the form of diffused light output from the plurality of LED modules 120 may pass through the polarizing plate 132 and cross each other, thereby increasing the irradiation area, particularly increasing in the center. The size of the illumination concentration portion 126.

圖8是例示出在LED模組120中形成傾斜角以使LED直線光122交叉的狀態的示意圖。FIG. 8 is a schematic view illustrating a state in which an inclination angle is formed in the LED module 120 to intersect the LED linear light 122.

參照圖8,其特徵在於,為了進一步集中從三個LED模組120輸出的擴散光形式的LED直線光122,將兩側的LED模組120左右對稱地傾斜配置。由此,能夠增加照射集中部126的面積以及集中光量。Referring to FIG. 8, in order to further concentrate the LED linear light 122 in the form of diffused light output from the three LED modules 120, the LED modules 120 on both sides are obliquely arranged bilaterally symmetrically. Thereby, the area of the irradiation concentrated portion 126 and the amount of concentrated light can be increased.

下面,參照圖1至圖2以及圖9至圖10,對本實施例涉及的光配向裝置100的偏振部130進行說明。Hereinafter, the polarizing unit 130 of the optical alignment device 100 according to the present embodiment will be described with reference to FIGS. 1 to 2 and 9 to 10.

圖9是例示出圖1所例示的光配向裝置100的偏振部130的俯視圖,圖10是圖9所例示的偏振部130的主視圖。FIG. 9 is a plan view illustrating a polarization portion 130 of the optical alignment device 100 illustrated in FIG. 1 , and FIG. 10 is a front view of the polarization portion 130 illustrated in FIG. 9 .

參照圖9至圖10,偏振部130對從光源部110輸出的LED直線光122進行偏振控制,其包括:多個偏振片132,排成一列;遮光構件140,位於形成在偏振片132之間的間隙138的垂直下部。9 to 10, the polarization portion 130 performs polarization control on the LED linear light 122 output from the light source portion 110, including: a plurality of polarizing plates 132 arranged in a line; and a light blocking member 140 located between the polarizing plates 132 The vertical lower portion of the gap 138.

從光源部110輸出的LED直線光122透射偏振片132後沿特定方向偏振。偏振片132可以使用布儒斯特偏振片或者線柵型偏振片。The LED linear light 122 output from the light source unit 110 is transmitted through the polarizing plate 132 and is polarized in a specific direction. The polarizer 132 may use a Brewster polarizer or a wire grid polarizer.

布儒斯特偏振片是由電介質多層膜構成的偏振片,利用布儒斯特角分成p波偏振分量和s波偏振分量,能夠設定高的消光比(偏振比)。線柵型偏振片能夠通過配置在其內部的金屬線(柵)的間隙任意改變波段。線柵型偏振片能夠通過圖案轉移的簡單工藝來製造。The Brewster polarizer is a polarizer composed of a dielectric multilayer film, and is divided into a p-wave polarization component and an s-wave polarization component by the Brewster angle, and a high extinction ratio (polarization ratio) can be set. The wire grid type polarizing plate can arbitrarily change the wavelength band by the gap of the metal wire (gate) disposed inside it. Wire grid type polarizers can be fabricated by a simple process of pattern transfer.

多個偏振片132排成一列,相互之間形成規定的間隙138。通過在偏振片132之間形成間隙138,能夠旋轉各偏振片132以調節偏振方向。偏振片132的兩個端部設有支撐構件134。The plurality of polarizing plates 132 are arranged in a line to form a predetermined gap 138 therebetween. By forming the gap 138 between the polarizing plates 132, the respective polarizing plates 132 can be rotated to adjust the polarization direction. Both ends of the polarizing plate 132 are provided with a support member 134.

在未設置偏振片132的間隙138的下部配置遮光構件140,以防止未偏振的LED直線光122到達配向膜。遮光構件140由不透光的金屬等材料形成,其寬度大於間隙138的寬度,並且比偏振片132更長。考慮到LED直線光122透射,遮光構件140的寬度可以小於等於4.5mm。The light shielding member 140 is disposed at a lower portion of the gap 138 where the polarizing plate 132 is not disposed to prevent the unpolarized LED linear light 122 from reaching the alignment film. The light shielding member 140 is formed of a material such as a light-impermeable metal, has a width larger than the width of the gap 138, and is longer than the polarizing plate 132. The width of the light blocking member 140 may be less than or equal to 4.5 mm in consideration of the transmission of the LED linear light 122.

遮光構件140位於偏振片132的下部並且隔著規定間隔,這是為了防止偏振片132因遮光構件140而受損。The light shielding member 140 is located at a lower portion of the polarizing plate 132 with a predetermined interval therebetween in order to prevent the polarizing plate 132 from being damaged by the light shielding member 140.

偏振部130的下部設有防護玻璃片150。防護玻璃片150用於防止由於照射配向膜162而產生的水蒸氣(vapor)附著到偏振片132上。防護玻璃片150可以由使LED直線光12透射的玻璃等材料形成。防護玻璃片150可以設有一個或者多個。A protective glass piece 150 is provided at a lower portion of the polarizing portion 130. The cover glass 150 is used to prevent vapor which is generated by the irradiation of the alignment film 162 from adhering to the polarizing plate 132. The cover glass 150 may be formed of a material such as glass that transmits the LED linear light 12. The cover glass 150 may be provided with one or more.

圖11是例示出偏振部130的偏振片132被調節之前的狀態的俯視圖,圖12是例示出圖11中的偏振片132被調節之後的狀態的俯視圖。FIG. 11 is a plan view illustrating a state before the polarizing plate 132 of the polarizing portion 130 is adjusted, and FIG. 12 is a plan view illustrating a state after the polarizing plate 132 of FIG. 11 is adjusted.

參照圖11及圖12,各偏振片132可以以旋轉中心136為中心旋轉規定角度。旋轉中心136可以形成在用於支撐偏振片132兩端部的支撐構件134上而不是形成在偏振片132的中心。如圖11所示,當偏振片132未沿著所期望的方向排列時,可以以旋轉中心136為中心旋轉各偏振片132,從而將偏振片132調節為如圖12所示。Referring to FIGS. 11 and 12, each of the polarizing plates 132 may be rotated by a predetermined angle around the rotation center 136. The rotation center 136 may be formed on the support member 134 for supporting both end portions of the polarizing plate 132 instead of being formed at the center of the polarizing plate 132. As shown in FIG. 11, when the polarizing plates 132 are not arranged in the desired direction, the respective polarizing plates 132 may be rotated centering on the rotation center 136, thereby adjusting the polarizing plate 132 as shown in FIG.

相鄰的偏振片132的旋轉中心136設置在相反側的端部。這是為了防止因偏振片132之間的間隙138小而導致偏振片132相撞。The center of rotation 136 of the adjacent polarizing plate 132 is disposed at the end on the opposite side. This is to prevent the polarizing plates 132 from colliding due to the small gap 138 between the polarizing plates 132.

本實施例涉及的光配向裝置100具備光源部110以及偏振部130,而不另外具備用於聚光的反射鏡(未圖示),因此,結構簡單,能夠調節相對於配向膜162的高度。如此,可以通過調節相對於配向膜162的光配向裝置100的高度,來調節到達配向膜162的LED直線光122的照射強度,因此,能夠照射對配向膜162的配向特性最優化的光。The optical alignment device 100 according to the present embodiment includes the light source unit 110 and the polarization unit 130, and does not separately include a mirror (not shown) for collecting light. Therefore, the optical alignment device 100 has a simple structure and can adjust the height with respect to the alignment film 162. In this manner, the irradiation intensity of the LED linear light 122 reaching the alignment film 162 can be adjusted by adjusting the height of the light alignment device 100 with respect to the alignment film 162, and therefore, the light optimized for the alignment characteristics of the alignment film 162 can be irradiated.

本實施例涉及的光配向裝置100可以具備螢光感測器(無附圖標記),用於接收當LED直線光122到達配向膜162時所產生的螢光。本實施例涉及的光配向裝置100利用LED元件112,因此,螢光感測器不需要特定的波長,僅通過接收螢光即可測定配向度。The optical alignment device 100 according to the present embodiment may be provided with a fluorescent sensor (without reference numerals) for receiving the fluorescent light generated when the LED linear light 122 reaches the alignment film 162. Since the optical alignment device 100 according to the present embodiment uses the LED element 112, the fluorescence sensor does not require a specific wavelength, and the alignment degree can be measured only by receiving the fluorescence.

本實施例涉及的光配向裝置100具備用於放置配向膜玻璃160的平臺170,平臺170可以沿著圖1中的箭頭方向移動配向膜玻璃160。平臺170及其驅動方法是常規技術,因此,省略具體說明。The optical alignment device 100 according to the present embodiment is provided with a stage 170 for placing the alignment film glass 160, and the stage 170 can move the alignment film glass 160 in the direction of the arrow in FIG. The platform 170 and its driving method are conventional techniques, and therefore, a detailed description is omitted.

以上參照本發明的一實施例進行了說明,然而,本領域的普通技術人員應理解為,在不脫離說明書與申請專利範圍中記載的本發明的思想及領域的範圍內能夠對本發明進行各種修改及變更。The present invention has been described with reference to an embodiment of the present invention. However, it will be understood by those skilled in the art that various modifications of the invention can be made without departing from the scope of the invention and the scope of the invention. And changes.

100‧‧‧光配向裝置
110‧‧‧光源部
112‧‧‧LED元件
116‧‧‧透鏡
120‧‧‧LED模組
122‧‧‧LED直線光
130‧‧‧偏振部
132‧‧‧偏振片
140‧‧‧遮光構件
150‧‧‧防護玻璃片
160‧‧‧配向膜玻璃
100‧‧‧Light alignment device
110‧‧‧Light source department
112‧‧‧LED components
116‧‧‧ lens
120‧‧‧LED module
122‧‧‧LED linear light
130‧‧ ‧Polarization
132‧‧‧Polarizer
140‧‧‧ shading members
150‧‧‧Stained glass
160‧‧‧Alignment film glass

圖1及圖2是例示出本發明的一實施例涉及的光配向裝置的立體圖。 圖3是例示出圖2所例示的光配向裝置中排列有LED(發光二極體)元件的LED模組的俯視圖。 圖4是例示出在LED元件的下部配置透鏡以形成LED直線光的狀態的示意圖。 圖5是例示出根據LED元件與透鏡之間的間隔的聚光程度的示意圖。 圖6是例示出擴散光形式的LED直線光到達配向膜的狀態的示意圖。 圖7是例示出多束LED直線光通過偏振片後交叉狀態的示意圖。 圖8是例示出給LED模組賦予傾斜角以使LED直線光交叉的狀態的示意圖。 圖9是例示出圖1所例示的光配向裝置的偏振部的俯視圖。 圖10是圖9所例示的偏振部的主視圖。 圖11是例示出偏振部的偏振片被調節之前的狀態的俯視圖。 圖12是例示出圖11中的偏振片被調節之後的狀態的俯視圖。1 and 2 are perspective views illustrating an optical alignment device according to an embodiment of the present invention. 3 is a plan view showing an LED module in which an LED (Light Emitting Diode) element is arranged in the optical alignment device illustrated in FIG. 2 . 4 is a schematic view illustrating a state in which a lens is disposed at a lower portion of the LED element to form a linear light of the LED. FIG. 5 is a schematic view illustrating the degree of light collection according to the interval between the LED element and the lens. FIG. 6 is a schematic view illustrating a state in which linear light of LEDs in the form of diffused light reaches an alignment film. Fig. 7 is a schematic view showing a state in which a plurality of LEDs linear light passes through a polarizing plate. FIG. 8 is a schematic view illustrating a state in which an inclination angle is given to an LED module to cause linear light of the LEDs to intersect. Fig. 9 is a plan view illustrating a polarization portion of the optical alignment device illustrated in Fig. 1 . Fig. 10 is a front elevational view of the polarizing portion illustrated in Fig. 9. FIG. 11 is a plan view illustrating a state before the polarizing plate of the polarizing portion is adjusted. Fig. 12 is a plan view illustrating a state after the polarizing plate of Fig. 11 is adjusted.

100‧‧‧光配向裝置 100‧‧‧Light alignment device

110‧‧‧光源部 110‧‧‧Light source department

112‧‧‧LED元件 112‧‧‧LED components

116‧‧‧透鏡 116‧‧‧ lens

120‧‧‧LED模組 120‧‧‧LED module

122‧‧‧LED直線光 122‧‧‧LED linear light

130‧‧‧偏振部 130‧‧ ‧Polarization

132‧‧‧偏振片 132‧‧‧Polarizer

140‧‧‧遮光構件 140‧‧‧ shading members

150‧‧‧防護玻璃片 150‧‧‧Stained glass

160‧‧‧配向膜玻璃 160‧‧‧Alignment film glass

Claims (13)

一種光配向裝置,以非接觸方式處理用於使液晶配向的一配向膜,該光配向裝置包括排列有LED元件以照射光的光源部以及用於進行偏振控制的一偏振部,其中,在該光源部中,LED元件排列成多列,以形成LED直線光,在該偏振部中,多個偏振片排列成一列,多束的該LED直線光以相互不干涉的間隔入射到該偏振部。A light alignment device that processes an alignment film for aligning liquid crystals in a non-contact manner, the light alignment device including a light source portion in which LED elements are arranged to illuminate light, and a polarization portion for performing polarization control, wherein In the light source unit, the LED elements are arranged in a plurality of rows to form LED linear light. In the polarizing portion, a plurality of polarizing plates are arranged in a line, and the plurality of LED linear lights are incident on the polarizing portion at intervals that do not interfere with each other. 根據請求項1所述的光配向裝置,其中,選擇並配置峰值波長彼此不同的多束的該LED直線光,以控制照射強度。The optical alignment device according to claim 1, wherein the plurality of LED linear lights having different peak wavelengths are selected and arranged to control the irradiation intensity. 根據請求項2所述的光配向裝置,其中,單獨控制該LED元件,以使通過該偏振部的下部的該配向膜從多束LED直線光中所接收的光量均勻。The optical alignment device according to claim 2, wherein the LED element is individually controlled such that the amount of light received by the alignment film passing through the lower portion of the polarizing portion from the plurality of LED linear lights is uniform. 根據請求項1所述的光配向裝置,其中,多束的該LED直線光在透射該偏振部時相互交叉。The optical alignment device according to claim 1, wherein the plurality of bundles of the LED linear light cross each other when transmitting the polarizing portion. 根據請求項1所述的光配向裝置,其中,多束的該LED直線光的照射角度相互對稱,從而在透射該偏振部時形成連續的照射集中部。The optical alignment device according to claim 1, wherein the plurality of beams of the LED linear light are symmetrical to each other, thereby forming a continuous irradiation concentrating portion when the polarizing portion is transmitted. 根據請求項1所述的光配向裝置,其中,該光源部具備透鏡,該透鏡使LED光線形成為擴散光或者直線光。The optical alignment device according to claim 1, wherein the light source unit includes a lens that forms the LED light into diffused light or linear light. 根據請求項1所述的光配向裝置,其中,該偏振部包括該些偏振片,該些偏振片之間形成有間隙,該間隙的下部設有遮光構件,以防止LED光線透射。The light alignment device according to claim 1, wherein the polarizing portion includes the polarizing plates, and a gap is formed between the polarizing plates, and a light shielding member is disposed at a lower portion of the gap to prevent transmission of LED light. 根據請求項7所述的光配向裝置,其中,該遮光構件的寬度小於等於4.5mm。The light alignment device according to claim 7, wherein the light shielding member has a width of 4.5 mm or less. 根據請求項1所述的光配向裝置,其中,該偏振部包括該些偏振片,該些偏振片具有不位於其中央的旋轉中心,並且能夠通過旋轉來調節角度。The optical alignment device according to claim 1, wherein the polarizing portion includes the polarizing plates, the polarizing plates have a center of rotation not located at a center thereof, and are capable of adjusting an angle by rotation. 根據請求項9所述的光配向裝置,其中,相鄰的該些偏振片的旋轉中心配置在互為相反一側。The optical alignment device according to claim 9, wherein the centers of rotation of the adjacent polarizing plates are disposed on opposite sides of each other. 根據請求項1所述的光配向裝置,其中,調節光配向裝置的相對於該配向膜的垂直高度,來控制該配向膜的反應時間。The photo-alignment device according to claim 1, wherein the vertical height of the photo-alignment device relative to the alignment film is adjusted to control the reaction time of the alignment film. 根據請求項1所述的光配向裝置,其中,具備用於接收該LED直線光到達該配向膜時所產生的螢光的螢光感測器,並利用該螢光感測器來測定該配向膜的配向度。The optical alignment device according to claim 1, further comprising: a fluorescence sensor for receiving fluorescence generated when the linear light of the LED reaches the alignment film, and the fluorescence sensor is used to measure the alignment The degree of alignment of the film. 一種光配向方法,包括:使用LED直線光以及多個偏振片進行光配向;該LED直線光是由多個LED元件形成的線性狀態的光;以及該些偏振片排列成一列,並且多束的該LED直線光以相互不干涉的間隔入射到該些偏振片,以對該LED直線光進行偏振控制。A photo-alignment method comprising: performing optical alignment using LED linear light and a plurality of polarizing plates; the LED linear light is a linear state light formed by a plurality of LED elements; and the polarizing plates are arranged in a row and multi-beam The LED linear light is incident on the polarizing plates at intervals that do not interfere with each other to perform polarization control of the LED linear light.
TW105108974A 2015-05-06 2016-03-23 Photo alignment apparatus TW201640203A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR20150063060 2015-05-06

Publications (1)

Publication Number Publication Date
TW201640203A true TW201640203A (en) 2016-11-16

Family

ID=57471535

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105108974A TW201640203A (en) 2015-05-06 2016-03-23 Photo alignment apparatus

Country Status (3)

Country Link
JP (1) JP6240654B2 (en)
CN (1) CN106125407B (en)
TW (1) TW201640203A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI625573B (en) * 2017-05-31 2018-06-01 國立中央大學 Broadband linear polarization rotator

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106681058B (en) * 2016-12-28 2020-01-14 深圳市华星光电技术有限公司 Optical alignment equipment
JP6945716B2 (en) * 2018-03-09 2021-10-06 富士フイルム株式会社 Method for forming a photoalignment film and method for manufacturing a laminate
CN110824780B (en) 2018-08-08 2022-04-08 夏普株式会社 Method for manufacturing substrate having photo-alignment film
CN114174930A (en) * 2019-08-07 2022-03-11 Asml控股股份有限公司 Laser module assembly of alignment system, metrology system and lithographic apparatus
CN117518621A (en) * 2023-11-07 2024-02-06 成都瑞波科材料科技有限公司 Optical alignment device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4604661B2 (en) * 2004-11-05 2011-01-05 ウシオ電機株式会社 Polarized light irradiation device for photo-alignment
JP2008107702A (en) * 2006-10-27 2008-05-08 Nakan Corp Apparatus for forming photo-alignment layer
KR101462273B1 (en) * 2012-04-19 2014-11-17 가부시키가이샤 에프케이 코우카쿠 겐큐쇼 Light illuminating apparatus for photo-alignment
JP6201310B2 (en) * 2012-12-14 2017-09-27 東芝ライテック株式会社 Polarized light irradiation device
KR20140087432A (en) * 2012-12-29 2014-07-09 엘지디스플레이 주식회사 Ultra Violet Irradiation Apparatus Including Light Emitting Diode Light Source
JP5344105B1 (en) * 2013-03-08 2013-11-20 ウシオ電機株式会社 Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment
JP2014191072A (en) * 2013-03-26 2014-10-06 Toshiba Lighting & Technology Corp Polarized light irradiation device
JP2015018065A (en) * 2013-07-10 2015-01-29 株式会社ジャパンディスプレイ Liquid crystal display device and method for manufacturing the same, and method for determining regulation force for liquid crystal alignment
JP5862616B2 (en) * 2013-07-17 2016-02-16 ウシオ電機株式会社 Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment
CN103558714B (en) * 2013-11-01 2016-09-07 京东方科技集团股份有限公司 A kind of light orientation equipment and alignment method thereof and display device production system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI625573B (en) * 2017-05-31 2018-06-01 國立中央大學 Broadband linear polarization rotator

Also Published As

Publication number Publication date
JP2016212376A (en) 2016-12-15
CN106125407A (en) 2016-11-16
CN106125407B (en) 2020-05-22
JP6240654B2 (en) 2017-11-29

Similar Documents

Publication Publication Date Title
TW201640203A (en) Photo alignment apparatus
JP5966704B2 (en) Substrate inspection device and transmission illumination device for substrate inspection device
TW201310086A (en) Polarizer unit, light irradiation device using the same, and transmittance setting method for the same
US20130039030A1 (en) Light irradiation apparatus
TW201403256A (en) Exposure apparatus
TWI585466B (en) Polarized light illuminating device
KR100510891B1 (en) A polarizing element of a polarized light illuminating apparatus used for light orientation of liquid crystal orientation film
KR20140023214A (en) A device and a method for detecting a transmittivity spectrum of a light guiding plate
KR101110516B1 (en) Light s0urce f0r exp0sure
TWI558044B (en) Continuous spectrum generation apparatus and assembling method thereof
TW201725407A (en) Light irradiation device
WO2007029561A1 (en) Aligner
JP2015106015A (en) Polarized light irradiation device, polarized light irradiation method and polarized light irradiation program
KR101589519B1 (en) Photo alignment device using led
CN105093847B (en) Exposure machine
TWI649515B (en) Polarized illumination system and polarized illumination modulation method
KR101650962B1 (en) Lamp unit and light irradiation apparatus comprising the same
JP2010122047A (en) Lighting system
CN103792732A (en) Polarized light irradiating device
KR101053211B1 (en) Top backlight assembly and test system using the same
KR101121470B1 (en) Surface light source for exposure equipment
JP2016040582A (en) Light irradiation device
KR20120032426A (en) Light irradiation apparatus and light irradiation method
JP2012221726A (en) Lamp unit, and light irradiation device having the same
TWI725690B (en) Exposure system and photoetching machine