TW201637876A - Peeling apparatus - Google Patents

Abstract

This invention is a peeling apparatus for peeling two plate-like bodies which are bonded together with each other. A holding surface 310 of a holding member 30 is provided with an opening portion 314, and a supporting member for supporting the first plate-like body is disposed with respect to the opening portion 314. A plurality of roller assemblies 40 for limiting advancement of peeling are axially spaced apart and provided. Abutting clamping portions formed by the respective roller assemblies 40 are axially spaced from each other, and the positions of rear end portions of the abutting clamping portions along the peeling direction are the same as the peeling direction, and the opening portion 314 of the holding surface 310 is provided at a position corresponding to a gap portion between two adjacent abutting clamping portions in the axial direction.

Description

Stripping device

The present invention relates to a peeling device for peeling two sheet-like bodies that are bonded to each other.

As a technique for forming a specific pattern or film on a plate-like body such as a glass substrate or a semiconductor substrate, a pattern or a film (hereinafter referred to as a "pattern" or the like) carried on another plate-like body is transferred to the substrate. The above. In this technique, after the two sheet-like bodies are adhered to each other and the pattern or the like is transferred from the other to the other, it is necessary to peel off the two sheet-like bodies without causing damage to the pattern or the like.

For example, it is described in Japanese Laid-Open Patent Publication No. 2014-189350 (Patent Document 1). In this technique, the first plate-shaped body and the second plate-shaped body which are in close contact with each other are held in a horizontal posture by being held by the first plate-shaped body on the mounting table. Then, the plurality of peeling devices arranged on the second plate-like body side sequentially abut against the second plate-shaped body, and while moving away from the first plate-shaped body while holding the second plate-shaped body, thereby moving The peeling between the first plate-shaped body and the second plate-shaped body is advanced in a specific peeling direction. At this time, the roller-shaped abutting member is moved in the peeling direction while abutting against the surface of the second plate-shaped body, thereby managing the peeling at a fixed speed.

If the size of the plate body is increased, further modifications are required in the above prior art. good. In other words, since the large plate-shaped body is easily deflected, it is necessary to maintain the plate-like body in a horizontal state while carrying it in and out of the apparatus, and a special mechanism is required. Further, as the size of the plate-like body increases, the roll-shaped abutting member also lengthens in the axial direction. Therefore, the pressing force applied to the plate-like body may become uneven due to the deflection of the roller. Such a difference in pressing force may be a cause of damage and peeling of the transferred material.

As described above, in order to perform peeling well for a large plate-shaped body, it is necessary to cope with the deflection of the plate-like body and the roll-shaped member. At this point, there is room for improvement in the above prior art.

The present invention has been made in view of the above-described problems, and it is an object of the present invention to provide a peeling apparatus for peeling two sheet-like members bonded to each other, and a technique for performing peeling on a large-sized sheet-like body can be favorably performed.

In one aspect of the present invention, in a peeling device in which a first plate-shaped body and a second plate-shaped body which are bonded to each other are bonded to each other, in order to achieve the above object, a holding device is provided, and an upper surface thereof is substantially horizontally held. a surface of the holding surface is provided with an opening, and the first plate-shaped body placed on the holding surface is held downward from a surface opposite to the second plate-shaped body; and the supporting member is at the upper end portion The opening portion moves toward a protruding position that protrudes upward from the holding surface, and the upper end portion moves between the opening portion and the retracted position that is lower than the holding surface, and the first plate-shaped body is separated from the protruding position. The holding surface is supported from below; the peeling device holds the second plate-shaped body and moves in a direction away from the first plate-shaped body, so that the second plate-shaped body is retained by the holding And removing the first plate-shaped body held by the device; and the limiting device abutting on a surface of the second plate-shaped body opposite to the first plate-shaped body, and restricting the peeling of the first portion by the peeling device 2 plate body Into.

Here, the restriction device includes: a plurality of roller members each abutting on the second plate-like body to form a contact nip portion with the second plate-shaped body; and a support portion surrounding the edge a rotation axis parallel to the axial direction of the above-mentioned holding surface is freely rotatable and individually supports the above Each of the plurality of roller members; and a moving mechanism that moves the support portion in a peeling direction parallel to the holding surface and orthogonal to the axial direction; and the abutting clip formed by each of the roller members The holding portions are spaced apart from each other in the axial direction, and the positions of the rear end portions in the peeling direction of the contact nip portion are the same in the peeling direction, and the openings are provided in the two adjacent to the axial direction. The position corresponding to the gap portion between the clamping portions is abutted.

In the invention configured as described above, the peeling means moves the second plate-like body in a direction in which it is pulled away from the first plate-shaped body held by the holding surface of the holding means, thereby performing peeling. Further, the abutting nip portion formed by the contact between the roller member and the second plate-shaped body restricts the progress of the peeling, and the abutting nip portion moves in the peeling direction to manage the progress of the peeling. Thereby, the peeling can be promoted well.

When the roller member for restricting the advancement of the peeling is a single one, if the size of the second plate-shaped body, particularly the length in the axial direction of the roller, becomes large, the roll diameter in the axial direction or the scratch during the operation tends to occur. song. Therefore, there is a difference in the axial direction of the abutting contact portion of the abutting nip portion with respect to the second plate-shaped body. If there is a difference in the abutment pressure as described above, the function of restricting the peeling differs depending on the axial position, so that the advancement of the peeling cannot be properly managed, and the peeling failure may be caused. Moreover, in order to manufacture a long roll member with high machining accuracy, a higher manufacturing technique is required, which leads to an increase in the cost of the device.

On the other hand, in the present invention, a plurality of roller members are disposed in the axial direction, and the roller members are supported independently of each other. Therefore, the axial length of each of the roller members can be made shorter, and the variation or deflection of the roll diameter can be reduced. Thereby, the abutment pressure of the abutting nip can be made uniform, and the peeling can be favorably advanced. Moreover, the manufacturing cost can be suppressed as compared with the case of manufacturing a long roll.

Moreover, in the present invention, a support member is provided in the opening provided in the holding surface of the holding device. The support member is supported in a state where the first plate-shaped body is separated from the holding surface. Thereby, for example, the first plate-shaped body and the second plate-shaped body after bonding are placed on the holding surface. When the first plate-shaped body after peeling is carried out from the holding surface, the deflection of the first plate-shaped body can be suppressed, and entry from the outside can be facilitated.

In the first plate-like body placed on the holding surface, a portion corresponding to the periphery of the opening portion of the holding surface is characterized in that a high stress is locally applied to the portion of the first plate-shaped body corresponding to the opening of the holding surface when pressed by the roller member. The first plate-shaped body is damaged. Moreover, such stress concentration is a trigger for poor peeling. On the other hand, in the present invention, an opening portion is provided at a position corresponding to a gap between a plurality of abutting nip portions formed by a plurality of roller members. Therefore, the first and second plate-shaped bodies are not pressed by the roller member right above the opening. Thereby, it is possible to prevent damage to the plate-shaped body due to pressing on the opening portion and peeling failure.

As described above, in the present invention, the plurality of roller members arranged in the axial direction abut against the second plate-like body to form the contact nip portion. Further, a support member is provided which protrudes from the opening to support the first plate-shaped body, and the opening is provided in a portion of the holding surface of the holding device that hits a gap between the nip portions in the axial direction. Therefore, in the present invention, even when the size of the first and second plate-like members is large, the peeling can be performed satisfactorily.

1‧‧‧ peeling device

3‧‧‧Station block

4‧‧‧ Roller unit (restricted device)

5‧‧‧Upper adsorption block

11‧‧‧Main frame

30‧‧‧Station (holding device)

31‧‧‧Water Platform Department

32‧‧‧Wedge table

33‧‧‧Initial stripping unit

36‧‧‧ Lifting institutions

40‧‧‧ Roller assembly

41‧‧‧Sliding parts

42‧‧‧Sliding parts

43‧‧‧low angle steel

44‧‧‧ Lifting mechanism

45‧‧‧ Upper angle steel (base member, support part)

46‧‧‧ screw

50‧‧‧Support framework

51‧‧‧Adsorption unit (peeling device, first adsorption unit)

52‧‧‧Adsorption unit (peeling device, second adsorption unit)

53‧‧‧Adsorption unit (peeling device, third adsorption unit)

54‧‧‧Adsorption unit (peeling device, 4th adsorption unit)

70‧‧‧Control unit

74‧‧‧Negative pressure supply department

310‧‧‧ (surface of water platform section 31) upper surface (holding surface)

311‧‧‧ slot

312‧‧‧ slot

313‧‧‧1st opening (opening)

314‧‧‧2nd opening (opening)

320‧‧‧ (of the wedge-shaped table) upper surface

321‧‧‧ horizontal plane

322‧‧‧Wedge surface

331‧‧‧ Pressing members

332‧‧‧Support arm

333‧‧‧rail

334‧‧‧column components

335‧‧‧ Lifting mechanism

336‧‧‧ base

337‧‧‧Location adjustment agency

351‧‧‧rail

352‧‧‧rail

353‧‧‧Motor (mobile agency)

354‧‧‧Rolling screw mechanism (moving mechanism)

361‧‧‧Top pin (support member)

362‧‧‧ Shell

363‧‧‧ Drive Department

365‧‧‧ Lifting mechanism

401‧‧‧ peeling roll (roller member)

403‧‧‧shims (spacer)

402‧‧‧Roll support department (support frame, support department)

451‧‧‧through holes

452‧‧‧ positioning datum

461‧‧‧ peeling roller

462‧‧‧ peeling roll

463‧‧‧ peeling roll

517‧‧‧Adsorption pad

521‧‧‧beam components

522‧‧‧column components

523‧‧‧column components

524‧‧‧Board components

525‧‧‧ Lifting mechanism

526‧‧‧pad support members

527‧‧‧Adsorption pad

537‧‧‧Adsorption pad

547‧‧‧Adsorption pad

701‧‧‧CPU

702‧‧‧Motor Control Department

703‧‧‧Valve Control Department

704‧‧‧ Negative Pressure Control Department

705‧‧‧Users face

AR‧‧‧Active area

BL‧‧‧ blanket (1st plate)

Dx‧‧‧ (opening 314) diameter

E‧‧‧ ridge line

G12‧‧‧ gap

G23‧‧‧ gap

N1‧‧‧Abutment gripping section

N2‧‧‧ Abutment gripping section

N3‧‧‧Abutment clamping part

N61‧‧‧Abutment clamping part

N62‧‧‧Abutment clamping part

N63‧‧‧Abutment clamping part

R‧‧‧roller components

R1‧‧‧ area

R2‧‧‧ area

R3‧‧‧ area

R4‧‧‧ area

R5‧‧‧ area

R6‧‧‧ area

SB‧‧‧ substrate (2nd plate)

V3‧‧‧ valve group

V5‧‧‧ valve group

WK‧‧‧ workpiece

+X‧‧‧ directions

-X‧‧‧ directions

+Y‧‧ Direction

-Y‧‧ Direction

+Z‧‧‧ directions

-Z‧‧‧ directions

Fig. 1 is a perspective view showing an embodiment of a peeling device of the present invention.

Fig. 2 is a perspective view showing the main configuration of the peeling device.

3A and 3B are views showing the structure of a roller unit.

4A, 4B, and 4C are cross-sectional views showing a configuration example of a lifting mechanism.

Fig. 5 is a block diagram showing the electrical configuration of the peeling device.

6A, 6B, 6C, and 6D are views showing the operation of each part during the peeling operation.

Fig. 7 is a view showing a state in which the roller unit is in contact with the workpiece.

8A, 8B, and 8C are views in which the peeling rolls are single and compared with a plurality of cases.

9A and 9B are views showing the positional relationship between the opening portion on the mounting table and the peeling roller.

Fig. 10 is a view showing the positional relationship between the mounting table and the workpiece placed on the mounting table.

Fig. 11 is a view showing a modification of the peeling device.

12A and 12B are views showing a combination example of peeling rolls having different roll diameters.

Fig. 1 is a perspective view showing an embodiment of a peeling device of the present invention. To uniformly represent the directions in the respective figures, the XYZ orthogonal coordinate axes are set as shown in the lower right of FIG. Here, the XY plane represents a horizontal plane. Further, the Z axis represents a vertical axis, and more specifically, the (-Z) direction indicates a direction that is vertically downward.

This peeling device 1 is a device for peeling off two sheet-like bodies carried in a state in which the main surfaces are in close contact with each other. For example, it can be used in one of the pattern forming processes for forming a specific pattern on the surface of a substrate such as a glass substrate or a semiconductor substrate. More specifically, in the pattern forming process, a pattern forming material (coating step) is uniformly applied to the surface of the blanket, and the blanket serves as a pattern for transferring the substrate as the transfer target as a temporary load. Carrier. Then, the coated layer which has been subjected to the surface processing according to the pattern shape is pressed against the coating layer on the blanket, thereby patterning the coating layer (patterning step). The blanket formed with the pattern in this manner is adhered to the substrate (transfer step), whereby the pattern is finally transferred from the blanket to the substrate.

At this time, the apparatus can be suitably applied in order to separate the substrate and the blanket which are in close contact with each other in the patterning step and the blanket or in the transfer step. Of course, it can be used for both of these purposes, and can also be used for other purposes. For example, the apparatus can be applied to a peeling process when a film supported on a carrier is transferred onto a substrate. Further, the apparatus can be applied to a whole process in which two plate-like bodies which are in close contact with each other through a thin layer such as a film are peeled off. Hereinafter, the pattern and the film are collectively referred to as "patterns and the like".

The peeling device 1 has a structure in which the mounting table block 3 and the upper adsorption block 5 are fixed to the main frame 11 attached to the casing. In Fig. 1, the internal structure of the device is shown, and the illustration of the housing is omitted. Further, in addition to the respective blocks, the peeling device 1 also includes a control unit 70 (Fig. 5).

The mounting table block 3 has a mounting table 30 for placing a close-contact body (hereinafter referred to as a "workpiece") formed by bonding a plate to a blanket or a substrate and a blanket. The mounting table 30 includes a water platform portion 31 whose upper surface is a substantially horizontal plane, and a wedge-shaped land portion 32 whose upper surface has a plane having an inclination of several degrees (for example, about 2 degrees) with respect to a horizontal plane. An initial peeling unit 33 is provided in the vicinity of the end portion on the (-Y) side of the wedge-shaped land portion 32 of the mounting table 30. Further, the roller unit 4 is provided so as to straddle the water platform portion 31.

On the other hand, the upper adsorption block 5 is provided with a support frame 50 which is provided in such a manner that the autonomous frame 11 stands up and covers the upper portion of the stage block 3. The first adsorption unit 51, the second adsorption unit 52, the third adsorption unit 53, and the fourth adsorption unit 54 are attached to the support frame 50. The adsorption units 51 to 54 are sequentially arranged in the (+Y) direction. Further, the number of the adsorption units is arbitrary and is not limited to the above number.

Fig. 2 is a perspective view showing the main configuration of the peeling device. More specifically, FIG. 2 shows the structure of the mounting table 30, the roller unit 4, and the second adsorption unit 52 in each configuration of the peeling device 1. The mounting table 30 includes a water platform portion 31 whose upper surface 310 is a substantially horizontal surface, and a wedge-shaped land portion 32 whose upper surface 320 is a wedge-shaped surface that is inclined by a few degrees with respect to a horizontal plane. The upper surface 310 of the water platform portion 31 has a planar size that is slightly larger than the planar size of the workpiece being placed.

The wedge-shaped land portion 32 is provided in close contact with the (-Y)-side end portion of the water platform portion 31, and the upper surface 320 has a horizontal surface 321 and a wedge-shaped surface 322. More specifically, the portion of the upper surface 320 of the wedge-shaped land portion 32 that is in contact with the water platform portion 31 is a horizontal surface 321 located at the same height (Z-direction position) as the upper surface 310 of the water platform portion 31. On the other hand, on the (-Y) direction side of the horizontal plane 321 , the upper surface 320 of the wedge-shaped land portion 32 has a (-Y) accompanying from the water platform portion 31. The direction of the deviation is downward, that is, the wedge-shaped surface 322 of the slope is retreated downward in the (-Z) direction. Therefore, from the entire mounting table 30, the horizontal plane of the upper surface 310 of the water platform portion 31 and the horizontal surface 321 of the upper surface 320 of the wedge-shaped land portion 32 are continuous and become an integrated horizontal plane at the (-Y) side end of the horizontal plane. A wedge surface 322 is connected to the portion. The ridge portion E connected to the wedge surface 322 by the horizontal surface 321 is formed in a linear shape extending in the X direction.

A lattice-like groove is formed in the upper surface 310 of the water platform portion 31. More specifically, a lattice-shaped groove 311 is provided at a central portion of the upper surface 310 of the water platform portion 31. Further, a groove 312 is provided on the peripheral portion of the upper surface 310 of the water platform portion 31 so as to surround the region in which the groove 311 is formed. The grooves 311 and 312 are connected to the negative pressure supply unit 74 (FIG. 5) via a control valve, and have a function as an adsorption tank for sucking and holding the workpiece placed on the mounting table 30 by the supply of the negative pressure. The two types of grooves 311, 312 are not connected to the mounting table, and are connected to the negative pressure supply portion 74 via independent control valves. Therefore, in addition to using two tanks for strong adsorption, it is also possible to use only one tank for adsorption.

As shown in FIG. 1, the initial peeling unit 33 is disposed in the vicinity of the (-Y) side end portion of the mounting table 30. The initial peeling unit 33 has a rod-shaped pressing member 331 extending in the X direction above the wedge-shaped land portion 32, and the pressing member 331 is supported by the support arm 332. The support arm 332 is attached to the column member 334 so as to be freely movable up and down via a guide rail 333 extending in the vertical direction. The support arm 332 is moved up and down relative to the column member 334 by the action of the lifting mechanism 335. The column member 334 is supported by the base portion 336 attached to the main frame 11, but the position of the column member 334 in the Y direction can be adjusted within the specific range on the base portion 336 by the position adjustment mechanism 337.

As described below, the (-Y)-side end portion of the workpiece protrudes above the wedge-shaped land portion 32 in a state where the workpiece is placed at a specific position on the mounting table upper surface 310. The support arm 332 moves downward according to a control command from the control unit 70, and the lower end of the pressing member 331 abuts against the workpiece to press the workpiece downward. This creates an opportunity for stripping.

The roller unit 4 is provided so as to span the mounting table 30 configured as described above. Specifically, a pair of guide rails are extended in the Y direction along both end portions of the water platform portion 31 in the X direction. 351 and 352, the guide rails 351 and 352 are fixed to the main frame 11. Further, the roller unit 4 is attached so as to be slidable relative to the guide rails 351 and 352.

The roller unit 4 includes sliders 41 and 42 that are slidably engaged with the guide rails 351 and 352, respectively. The lower angle steel 43 is extended in the X direction so as to connect the sliders 41 and 42 so as to connect the upper portions of the mounting table 30. The upper angle steel 45 is attached to the lower angle steel 43 so as to be freely movable up and down via the elevating mechanism 44. Further, a plurality of sets of roller assemblies 40 are attached to the upper angle steel 45 in this example.

3A and 3B are views showing the structure of a roller unit. More specifically, FIG. 3A is an exploded perspective view showing a configuration of a main portion of the roller unit 4, and FIG. 3B is a view showing a main portion of the roller unit 4 viewed from the X direction. Each of the roller units 40 includes a cylindrical peeling roller 401 that sets the X direction in the longitudinal direction, and a roller supporting portion 402 that supports the peeling roller 401 so as to be rotatable around the rotation axis in the X direction.

The peeling roller 401 is formed to cover the surface of the cored bar formed of a metal material such as iron, stainless steel, aluminum alloy, or brass with a surface layer made of an elastic material such as rubber, and the surface thereof has elasticity. The roller support portion 402 pivotally detaches the peeling roller 401, and the peeling roller 401 is freely rotatable about the rotation axis.

Each roller assembly 40 is secured to the upper angle 45 by a suitable securing member such as a screw 46. The upper angle 45 is a member having a cross-sectional shape perpendicular to the X direction and having a substantially L-shape and extending in the X direction. The upper angle steel 45 is provided with a plurality of through holes 451 having an elliptical cross section in which the Y direction is set to the longitudinal direction, and a screw 46 is inserted into each of the through holes 451. Two through holes 451 are provided corresponding to both end portions of the roller support portion 402 in the X direction with respect to one roller unit 40.

Each of the roller assemblies 40 is fixed to the upper angle 45 by two screws 46, respectively. As shown in FIG. 3B, a positioning reference surface 452 that is processed into a vertical plane is provided at a lower portion of the upper angle 45. The position of each roller unit 40 is aligned by causing the (+Y) side end surface of the roller support portion 402 to contact the positioning reference surface 452. The through hole 451 is a long hole, so each roller assembly 40 is at the upper portion. The mounting position on the angle 45 can be adjusted within a specific range in the Y direction and around the Z axis. Further, a separately prepared spacer (spacer) 403 is interposed between the upper angle 45 and the roller support portion 402, thereby adjusting the position of the roller unit 40 in the Z direction.

Each of the roller assemblies 40 has the same structure, and by adopting the above configuration, it is possible to correct the misalignment due to the difference in the machining size by the adjustment work. When the roller unit 40 is assembled to the upper angle 45, the position adjustment function is used, and the rotation axes of the respective peeling rolls 401 are adjusted in advance so as to coincide with each other.

In this example, the three sets of roller assemblies 40 all have the same configuration, and the size of the peeling roller 401, that is, the diameter and the length in the X direction are equal. Further, the rotation axes of the plurality of peeling rolls 401 coincide with each other. However, as described below, a plurality of peeling rolls having different sizes and rotation axes from each other may be used.

Returning to Figure 2, the description continues. When the upper angle steel 45 is lowered downward in the (-Z) direction by the elevating mechanism 44, the lower surface of the peeling roller 401 abuts against the upper surface of the workpiece placed on the mounting table 30. On the other hand, in a state in which the upper angle steel 45 is positioned above the (+Z) direction by the elevating mechanism 44, the peeling roller 401 is formed to be apart from the upper surface of the workpiece.

The roller unit 4 is movable in the Y direction by a motor 353 attached to the main frame 11. More specifically, the lower angle steel 43 is coupled to, for example, a ball screw mechanism 354 as a conversion mechanism that converts the rotational motion of the motor 353 into a linear motion. When the motor 353 rotates, the lower angle steel 43 moves in the Y direction along the guide rails 351, 352, whereby the roller unit 4 moves in the Y direction. The movable range of the peeling roller 401 accompanying the movement of the roller unit 4 is set to the vicinity of the (-Y) side end portion of the water platform portion 31 in the (-Y) direction, and is set to the (+Y) direction to The position reached by the (+Y) side end portion of the water platform portion 31 on the outer side, that is, on the (+Y) side.

Next, the configuration of the second adsorption unit 52 will be described. Further, each of the first to fourth adsorption units 51 to 54 has the same structure, and is represented by the structure of the second adsorption unit 52. And explain. The second adsorption unit 52 has a beam member 521 that is extended in the X direction and fixed to the support frame 50. In the beam member 521, a pair of column members 522 and 523 extending in the (-Z) direction, which is vertically downward, are attached to each other in the X direction. The plate members 524 and 523 are attached to the plate member 524 so as to be lifted and lowered by a guide rail (not shown), and the plate member 524 is driven up and down by a lifting mechanism 525 including a motor and a switching mechanism (for example, a ball screw mechanism).

A square rod-shaped pad supporting member 526 extending in the X direction is attached to the lower portion of the plate member 524. A plurality of adsorption pads 527 are arranged at equal intervals in the X direction on the lower surface of the pad supporting member 526. In FIG. 2, the second adsorption unit 52 is moved to a position above the actual position. When the plate member 524 is moved downward by the elevating mechanism 525, the adsorption pad 527 can be lowered to be close to the water platform portion 31. The position of the upper surface 310. In a state where the workpiece is placed on the mounting table 30, the suction pad 527 abuts against the upper surface of the workpiece. Each of the adsorption pads 527 is given a negative pressure from the negative pressure supply portion 74 described below, and the upper surface of the workpiece is adsorbed and held.

The water platform portion 31 of the mounting table 30 is formed separately from the wedge-shaped base portion 32 and is separable. The wedge-shaped land portion 32 can be moved in the horizontal direction and moved away from the water platform portion 31 by a horizontal movement mechanism (not shown). The water platform portion 31 and the wedge-shaped base portion 32 integrally function as the mounting table 30 by the wedge-shaped land portion 32 being in close contact with the side surface of the water platform portion 31.

On the upper surface 310 of the water platform portion 31, in addition to the adsorption grooves 311 and 312, openings 313 and 314 having mutually different shapes are also provided. More specifically, a plurality of first openings 313 having an elliptical shape are dispersedly disposed at a plurality of positions on the flat portion between the adsorption groove 311 and the adsorption groove 312 in the upper surface 310 of the water platform portion 31. Further, a substantially circular second opening 314 is provided at four positions apart from each other at a central portion of the upper surface 310 of the water platform portion 31. The first opening 313 and the second opening 314 are not connected to the adsorption grooves 311 and 312 on the upper surface 310 of the water platform portion 31. In order to achieve this configuration, the adsorption groove 311 is cut away around the second opening 314. A lifting mechanism is disposed inside the openings 313, 314.

4A to 4C are cross-sectional views showing a configuration example of a lifting mechanism. Here, the structure of the lifting mechanism 36 disposed in the second opening 314 will be described as an example. However, by appropriately changing the shape of the jacking pin, the same structure can be applied to the lifting mechanism disposed in the first opening 313. The lift mechanism 36 includes a jacking pin 361, a casing 362, and a driving portion 363. The jacking pin 361 is inserted into the second opening 314 provided in the water platform portion 31. The outer casing 362 is attached to the bottom surface of the water platform portion 31, and the driving portion 363 is disposed on the outer casing 362 to raise and lower the jacking pin 361. As the drive unit 363, various actuators such as an air cylinder, a solenoid, and a piezoelectric actuator can be used.

The drive unit 363 is actuated in response to a control command from the control unit 70, whereby the jacking pin 361 is moved up and down between the retracted position shown in Fig. 4A and the projected position shown in Fig. 4B. The retracted position is a position at which the upper end of the jacking pin 361 is retracted below the upper surface 310 of the mounting table as shown in FIG. 4A. The protruding position is a position where the upper end of the jacking pin 361 protrudes upward from the upper surface 310 of the mounting table as shown in FIG. 4B. As shown in Fig. 4C, by holding a plurality of jacking pins 361 in the projecting position, the workpiece WK can be supported in a state where the workpiece WK (described below) is separated from the upper surface 310 of the stage. If the jacking pin 361 is placed in such a manner that the upper ends of the plurality of jacking pins 361 are at the same height, the workpiece WK can be supported in a horizontal posture. In order to hold the workpiece more reliably, each of the jacking pins 361 may also have an adsorption holding function.

Fig. 5 is a block diagram showing the electrical configuration of the peeling device. The various parts of the device are controlled by the control unit 70. The control unit 70 includes a CPU (Central Processing Unit) 701 that is responsible for the overall operation of the device, a motor control unit 702 that controls the motor-type mechanism provided in each unit, and a valve control unit 703 that is disposed on the The valve mechanism of each unit performs control; the negative pressure control unit 704 controls the negative pressure supplied to each unit; and the user interface (UI) unit 705, which has an operation input from the user and reports the status of the device. Give the user a function.

The motor control unit 702 pairs the motor 353 and the elevating mechanisms 335, 44, and 365 of the mounting table block 3, the horizontal moving mechanism, and the motor group such as the elevating mechanism 525 of each of the adsorption units 51 to 54 provided in the upper adsorption block 5, respectively. Drive control. Again, here, Although a motor is typically described as a driving source of each movable portion, the present invention is not limited thereto, and various actuators such as a cylinder, a solenoid, and a piezoelectric element may be used as a driving source depending on the application. The negative pressure control unit 704 controls the magnitude of the negative pressure generated by the negative pressure supply unit 74 and supplied to each unit of the apparatus as needed. Further, when the negative pressure supplied from the outside such as the factory utility electric power can be utilized, the peeling device may not have the negative pressure supply portion.

The valve control unit 703 controls the valve group V3, the valve group V5, and the like; the valve group V3 is provided on the piping path connected to the adsorption grooves 311 and 312 provided in the water platform unit 31 from the negative pressure supply unit 74, for The adsorption tanks are individually supplied with a specific negative pressure; the valve group V5 is provided in a piping path from the negative pressure supply unit 74 to the adsorption pads 517 of the adsorption units 51 to 54, and the like, for supplying the adsorption pads 517 and the like. Specific negative pressure.

Next, the operation of the peeling device 1 configured as described above will be described. The peeling operation performed by the peeling device 1 is basically the same as the peeling operation of the peeling device described in the above-mentioned Patent Document 1 (Japanese Laid-Open Patent Publication No. 2014-189350). Therefore, the detailed description of the peeling operation of the peeling device 1 will be omitted. Here, the behavior of each portion in the peeling operation will be briefly described.

6A to 6D are views showing the operation of each portion during the peeling operation. Here, the blanket BL is a pattern carrier in which a predetermined pattern or the like is formed by a pattern forming material, and the substrate SB is a transfer target for transferring the pattern or the like, and the blanket BL and the substrate SB are bonded via a pattern. The adult becomes the workpiece WK as the object to be peeled off. The operation of peeling off the blanket BL and the substrate SB from the workpiece WK will be described. The CPU 701 executes a specific control program, and the control unit 70 controls the respective parts of the apparatus, thereby performing the peeling action.

First, the workpiece WK is carried into the peeling device 1 from the outside, and the workpiece WK is placed at a specific position of the mounting table 30. At this time, by positioning the jacks disposed in the openings 313 and 314 at the protruding positions that protrude upward from the upper surface 310 of the mounting table, the workpiece WK from the external conveying device can be easily transferred. The jacking pin is lowered to the retracted position after being received to the workpiece WK, whereby the workpiece WK is placed on the mounting table upper surface 310.

In the initial state immediately after the workpiece WK is loaded, the workpiece WK is adsorbed and held by one or both of the adsorption grooves 311, 312. The pressing member 331 of the initial peeling unit 33, the peeling roller 401 of the roller unit 4, and the adsorption pads 517 to 547 of the first to fourth adsorption units 51 to 54 are all away from the workpiece WK. Each of the adsorption units 51 to 54 is disposed between the adsorption pads 517 to 547 and the substrate SB with a sufficient gap so as not to interfere with the roller unit 4 that has moved in the Y direction. Further, the peeling roller 401 is located slightly closer to the (+Y) side than the suction pad 517 of the first adsorption unit 51, and is in a state of being away from the workpiece WK. The peeling action is performed from this state.

In the peeling operation, first, the first adsorption unit 51 is lowered, and the adsorption pad 517 is in contact with the upper surface of the (-Y) side end portion of the substrate SB, and the substrate SB is adsorbed and held by the negative pressure. Further, the peeling roller 401 is lowered and abuts against the upper surface of the substrate SB. From this state, as shown in FIG. 6A, the pressing member 331 is lowered and the end portion of the blanket BL is pressed downward. The end of the blanket BL protrudes above the wedge-shaped land portion 32, and a gap exists between the lower surface thereof and the upper surface 320 of the wedge-shaped mounting table 32. Therefore, the end portion of the blanket BL is pressed downward by the pressing member 331, and the end portion of the blanket BL is bent downward along the wedge-shaped surface of the wedge-shaped land portion 32. As a result, the end portion of the substrate SB adsorbed and held by the first adsorption unit 51 is separated from the blanket BL, and peeling starts.

Then, as shown in FIG. 6B, the first adsorption unit 51 starts to rise, and the peeling roller 401 rotates while abutting against the surface of the substrate SB, and moves in one (+Y) direction. Thereby, the peeling of the substrate SB and the blanket BL advances in the (+Y) direction. Since the peeling roller 401 is brought into contact with each other, the peeling does not advance beyond the area where the peeling roller 401 abuts on the substrate SB. By moving the peeling roller 401 to the (+Y) direction at a fixed speed while abutting against the substrate SB, the peeling advancement speed can be maintained constant.

With respect to the peeling roller 401, the adsorption units 52, 53, 54 are sequentially lowered by the subsequent substrate SB, and abut against the substrate SB after peeling from the blanket BL and holding the substrate SB. Specifically, as shown in FIG. 6C, once the peeling roller 401 is positioned directly below the second adsorption unit 52, the second adsorption unit 52 starts to descend and advances toward the substrate SB. If the adsorption pad 527 When the upper surface of the substrate SB is in contact with the negative pressure supplied from the negative pressure supply unit 74, the second adsorption unit 52 starts to adsorb and hold the substrate SB.

When the second adsorption unit 52 starts to adsorb and hold the substrate SB, it starts to rise. After that, the substrate SB is held by the first adsorption unit 51 and the second adsorption unit 52. Thereby, the substrate SB which is being peeled off from the blanket BL is more reliably held, and the substrate SB can be prevented from being bent downward to be in contact with the blanket BL or falling off from the adsorption pad 517. Further, when the boundary between the peeled region where the substrate SB and the blanket BL has been peeled off and the unpeeled region which has not been peeled off is referred to as a "peeling boundary line", the substrate SB and the blanket BL in the vicinity of the peeling boundary are appropriately held. From the viewpoint of the angle, it is also possible to obtain an effect of promoting the peeling well.

Similarly, in the other adsorption units (53, 54), once the peeling roller 401 is under the adsorption unit, the adsorption unit starts to descend, and the adsorption pad starts to adsorb and rise when the adsorption pad abuts against the substrate SB, thereby the substrate The SB pulls up. Each of the adsorption units is stopped at a point in time when it rises to a specific height from the mounting table 30.

The adsorption unit 54 on the most downstream side of the peeling advancement direction, that is, the most (+Y) side, holds the substrate SB and rises to a specific position, whereby as shown in FIG. 6D, the substrate SB and the blanket BL are completely separated, thereby completing the peeling. The peeling roller 401 and the pressing member 331 are retracted to a position separated from both the substrate SB and the blanket BL, whereby the substrates SB and the blanket BL which are separated from each other can be carried out. At this time, the jacking pin is again positioned at the protruding position, whereby the blanket BL remaining on the mounting table 30 is supported in a state of being separated from the upper surface 310 of the mounting table. Thereby, it is easy to implement the delivery of the blanket BL to the external conveying device. The substrate SB and the blanket BL are carried out in this manner, and the peeling operation is completed.

Fig. 7 is a view showing a state in which the roller unit is in contact with the workpiece. When the roller unit 4 is lowered in a state where the workpiece WK is placed on the mounting table 30, the three peeling rollers 401 abut against the upper surface of the substrate SB to form an abutting nip portion. As shown in FIG. 7, the three abutting portions formed between the three peeling rolls 401 and the upper surface of the substrate SB are sequentially marked with symbols N1, N2 from the (-X) side toward the (+X) side. N3. Each of the abutting nips N1, N2, and N3 is spaced apart from each other in the X direction. In other words, the gap G12 between the abutting nips N1 and N2 in the X direction and the gap G23 between the abutting nips N2 and N3 are both greater than zero.

Further, in the Y direction, as shown by the broken line in the figure, the positions of the (-Y) side end portions of the abutting nip portions N1 to N3 extending in the X direction are the same. With the movement of the roller unit 4, the abutting nips N1 to N3 move in the (+Y) direction, and the (-Y) side end portions of the abutting nips N1 to N3 correspond to the rear end portions in the moving direction. Since the substrate SB is advanced from the peeling system of the blanket BL toward the (+Y) direction, the (-Y) side end portion of the abutting nip portions N1 to N3 may be referred to as a rear end portion in the peeling advance direction.

After the end portions of the nip portions N1 to N3 are in contact with the nip portions N1 to N3, the upstream side of the peeling advancement direction, that is, the (-Y) side, is pulled by the suction unit 51 or the like, so that the substrate SB is peeled off and separated. The state of the blanket BL. On the other hand, on the downstream side (+Y) side of the end portion after the contact portions N1 to N3 are abutted, the peeling roller 401 is restricted by the peeling roller 401, so that the substrate SB and the blanket BL are still in close contact with each other. State. Therefore, after the abutting of the nip portions N1 to N3, the end portion hits the boundary between the peeled region and the unpeeled region.

When the three contact nips N1 to N3 are in the same position in the Y direction, the contact nips N1 to N3 are moved in the (+Y) direction while maintaining the relationship. Thereby, the peeling boundary line between the peeled region and the unpeeled region always advances in the (+Y) direction in a state in which one straight line extends in the X direction. Thereby, the influence of the stress concentration due to the local variation of the peeling propagation speed can be reduced, and the peeling can be favorably advanced. In order to prevent the disorder of the peeling boundary line, it is preferable to narrow the gaps G12 and G23 between the abutting portions in a structurally feasible range. In the case of the substrate of the inventor of the present application, for example, when the substrate SB is a substrate having a relatively high rigidity like a glass substrate, even if the gap between the separation rolls is set to about 10 mm, the peeling quality is not problematic.

From the viewpoint of forming a linear peeling boundary line, it is preferable to press from the (-X) side end portion to the (+X) side end portion of the substrate SB by a single roller member. However, this setting is not necessarily easy in terms of achieving an increase in the size of the substrate.

8A to 8C are views showing a case where the peeling roller is single and a plurality of cases. In the case where the peeling roller is set as a single member, as shown in Fig. 8A, the length of the roller member R must be at least longer than the length of the substrate SB in the X direction. In recent years, there has been a case where the length of the roller member R is 1 m or more, and it is difficult to precisely manufacture a roller member having sufficient strength with such a length. Although it is also conceivable to enlarge the roll diameter, the suction pad 517 or the like cannot be brought into contact with the substrate SB in the vicinity of the nip portion, and thus the quality of the peeling is problematic. Further, as the quality of the rolls increases, it is necessary to increase the rigidity and size of the surrounding members, which increases the manufacturing cost.

Further, as shown in FIG. 8B, when the long roller member R is pressed against the substrate SB, the roller member R is deflected, and even if a sufficient pressing force acts on the substrate SB near the end portion of the bearing, Especially in the central part, there is sufficient pressing force. Such uneven pressing may be the cause of poor peeling. Although the deflection may be suppressed by abutting the backup roller against the roller member R, in particular, when the surface of the roller contains an elastic material, there is a case where the effect of the support cannot be sufficiently obtained due to the elastic deformation of the surface layer.

In view of such a problem, in the roller unit 4 of this embodiment, as shown in Fig. 8C, the peeling roller 401 is divided into a plurality of pieces in the X direction, and the positions are aligned after the positions are aligned. By setting in this way, the same peeling restriction effect as that of the single roller member is obtained, and the problem of the above-mentioned single roller is solved. In other words, by shortening the length of each of the peeling rolls 401 in the X direction, it is possible to form a structure in which the difference in size is suppressed and the deflection is less likely to occur.

Further, even if each of the peeling rolls 401 is short, in the structure in which these are supported by a single fulcrum, the pressing force may be uneven due to the deflection of the fulcrum. In this embodiment, each of the peeling rollers 401 is independently supported by the roller support portion 402. Thereby, the fluctuation of the position of both ends of each peeling roller 401 can be suppressed, and the pressing force with respect to the board|substrate SB can be more uniform.

Further, by dividing the peeling roller, the effect of pressing the substrate SB can be avoided by opening the opening of the mounting table. That is, in this embodiment, as shown in Fig. 8C, the relationship between the size of the peeling roller 401 and the position of the opening 314 is set by the gap between the adjacent two peeling rolls. It is set in such a manner as to be placed above the opening 314 of the upper surface 310 of the mounting table.

When the workpiece WK is increased in size, it is difficult to maintain the workpiece WK in a horizontal posture when the workpiece WK is carried into the mounting table 30 and the workpiece WK is carried out from the mounting table 30. In this embodiment, the jacking pins are protruded from the openings 313 and 314 which are disposed on the upper surface 310 of the mounting table, and the workpiece WK is supported from below. By setting as such, the deflection of the workpiece WK is suppressed to maintain the horizontal posture. However, at the point of pressing by the peeling roller, the mounting table is preferably as flat as possible and has no opening.

9A and 9B are views showing the positional relationship between the opening portion on the mounting table and the peeling roller. As shown in FIG. 9A, when the peeling roller is a single roller member R, or when the peeling roller is divided into plural pieces but one roller member R is disposed on the upper portion of the opening 314, the workpiece WK pressed by the roller member R The substrate SB and the blanket BL are pressed into the inside of the opening 314 at the position of the opening 314. At this time, particularly in the position corresponding to the peripheral portion of the opening 314, stress is concentrated on the substrate SB and the blanket BL, and thus the substrate SB or the blanket BL is damaged. Further, when a pattern or the like is carried between the substrate SB and the blanket BL, the pattern or the like is broken at the position.

In this embodiment, as shown in FIG. 9B, the gap between the two peeling rolls 401 is located above the opening 314 of the water platform portion 31. Further, the interval G12 (or G23) between the peeling rolls 401 is larger than the diameter of the opening 314 (more strictly, the opening width in the X direction) Dx. Therefore, it is avoided that the workpiece WK is pressed by the peeling roller 401 above the opening 314 or its peripheral portion, so that stress concentration as described above does not occur.

As described above, from the viewpoint of the quality of the peeling, it is desirable that the gap between the opening on the mounting table and the peeling roller be as small as possible. Therefore, it is preferable to make the jacking pin thin as much as possible and to reduce the opening in a range in which the strength of the workpiece can be sufficiently secured. Further, it is preferable to make the gap between the peeling rolls as small as possible.

Fig. 10 is a view showing the positional relationship between the mounting table and the workpiece. In the workpiece WK formed by bonding the substrate SB and the blanket BL, the blanket BL has a plane rule larger than the substrate SB. Inch. Therefore, the entire surface of the substrate SB is opposed to the blanket BL. On the other hand, the central portion of the blanket BL faces the substrate SB, but the peripheral portion becomes a margin portion that does not face the substrate SB. In the central portion other than the peripheral portion of the surface region of the substrate SB, an effective region AR for effectively transferring the pattern or the like and functioning as a device is set.

The workpiece WK is placed on the mounting table 30 such that the entire effective area AR of the substrate SB is located on the upper surface 310 of the water platform portion 31. On the other hand, on the outer side of the more effective area AR, the (-Y) side end portion of the substrate SB is located on the (-Y) side of the ridge line portion E which is at the boundary between the horizontal surface of the mounting table 30 and the wedge surface. position.

In the figure, a region R1 indicating a spot is a region where the blanket BL is adsorbed by the adsorption groove 311. The region R1 adsorbed by the adsorption groove 311 covers the entire effective region AR. Further, the region R2 indicates a region where the blanket BL is adsorbed by the adsorption groove 312. The adsorption groove 312 adsorbs the blanket BL on the outer side of the more effective area AR. Therefore, for example, in the aspect in which the blanket BL is adsorbed only by the adsorption groove 312, the influence of the pattern or the like in the effective region AR is prevented.

The region R3 indicates a region where the pressing member 331 of the initial peeling unit 33 abuts on the substrate SB at the start of peeling. In this region R3, the blanket BL is pressed downward (in the (-Z) direction by the pressing member 331). Thereby, peeling starts between the substrate SB and the blanket BL.

The region R4 indicates a region in the upper surface of the substrate SB that is adsorbed by the adsorption pad 517 of the adsorption unit 51. The substrate SB is adsorbed and held by the adsorption unit 51 in the region R4, and is pulled upward (+Z) direction, whereby the substrate SB is separated from the blanket BL to promote peeling.

The area R5 indicates the opening position of the opening 314 on the mounting table. The opening 314 is a central portion that supports the workpiece WK with the jacking pin 361, and is disposed in the effective area AR of the substrate SB. Therefore, if the workpiece WK is pressed by the peeling roller 401 above the opening 314, the pattern is damaged. In this embodiment, the region R5 corresponding to the opening 314 is set in the gap portion between the abutting nip portions N1, N2, and N3 formed between the three peeling rollers 401 and the substrate SB. The direction is generated. In other words, in the effective area of the substrate SB An opening 314 is provided in the AR below the portion where the three peeling rolls 401 are not in contact with each other.

In this example, two total of four regions R5 corresponding to the opening 314 are provided in different positions in the X direction and the Y direction. The two regions R5 having different positions in the X direction are dispersedly disposed in a gap portion between the abutting nip portions N1 and N2 and a gap portion between the abutting nip portions N2 and N3. Further, the two regions R5 having different positions in the Y direction are at the same position in the X direction, and are located at positions where they contact the gap portion of the abutting nip portion. By forming such an arrangement, it is avoided that all of the four regions R5 are pressed by the peeling roller 401. Thereby, the pattern at the opening 314 can be prevented from being broken or the like.

On the other hand, from the viewpoint of promoting the peeling well, it is preferable to form the contact nip portion as continuously as possible from the (-X) side end portion to the (+X) side end portion of the substrate SB. Therefore, at the position of the opening 314 in the X direction, only a minimum gap for avoiding the opening 314 is provided, and for the other regions, a continuous abutting nip portion is formed. That is, in consideration of a virtual strip-shaped region having a width substantially the same as the length of the opening 314 in the X direction and a position including the opening 314 and extending in the Y direction, it is preferable that the peeling roller 401 abuts one by one by a strip shape. Each of the partial regions formed by the upper surface of the substrate SB is divided. The length of each of the peeling rolls 401 in the X direction is preferably as close as possible to the width of the corresponding partial area.

As shown in FIG. 10, in this example, the region other than the thin strip-shaped region including the region R5 corresponding to the opening 314 in the upper surface of the substrate SB is abutted against the nip portion N1 by the three peeling rolls 401. Any of N3 passes and is pressed by the peeling roller 401. By providing a plurality of openings 314 in one strip-shaped region, the number of the jacking pins can be increased without increasing the area of the region of the substrate SB that is not pressed by the peeling roller 401.

Further, a region R6 indicates a lower surface area of the blanket BL to which the top pin of the opening 313 disposed on the mounting table abuts. The jacking pin abuts against the lower surface of the blanket BL in a region where the substrate SB overlaps the blanket BL in the workpiece WK and is located outside the effective area AR. Thereby, it is possible to prevent the pressing force from being applied to the pattern or the like in the effective area AR when the support is supported by the jacking pin. Moreover, the rigidity of the substrate SB and the rigidity of the blanket BL are supported. Since the workpiece WK is a workpiece WK which is large and has a large self-weight, it can be surely supported.

As described above, in this embodiment, from the viewpoint of avoiding the pressing at the opening 314 and pressing the peeling roller 401 as much as possible within the range of the substrate SB as much as possible, the peeling is favorably advanced, and a plurality of jackings are disposed. From the viewpoint of the pin 361 and maintaining the horizontal posture of the workpiece WK, the arrangement and size of each portion are determined in consideration of such a manner.

As described above, in the embodiment, the workpiece WK formed by bonding the blanket BL and the substrate SB is sucked and held by the mounting table 30. Further, in order to peel the layers apart, the adsorption unit 51 or the like holds the substrate SB while moving upward in the direction away from the blanket BL. At this time, the peeling roller 401 abuts against the substrate SB and moves in the direction of the peeling direction (+Y) in conjunction with the movement of the adsorption unit 51 or the like, thereby restricting the advancement of the peeling.

The peeling rolls 401 are arranged in plural in the X direction orthogonal to the peeling direction, and these are integrally moved in the peeling direction. Thereby, the peeling boundary line at the boundary between the peeled region and the unpeeled region is maintained linearly while being peeled off in the peeling direction. According to this configuration, it is possible to suppress the peeling failure caused by the local variation of the peeling speed. In the case where the peeling roller is set as a single roller member, there is a problem that the pressing force is uneven due to the deflection of the roller, or the manufacturing cost of the roller is increased. This problem can be avoided by dividing into a plurality of peeling rolls 401.

Further, in order to hold the workpiece WK in a horizontal posture in the vicinity of the mounting table 30, in this embodiment, the jacking pin 361 protrudes from the upper surface 310 of the mounting table and supports the workpiece WK from the lower surface. In order to provide the jacking pin 361, an opening 314 is provided in the upper surface 310 of the mounting table. The opening 314 is provided at a position corresponding to a gap portion between the abutting nip portions N1 to N3 formed by the plurality of peeling rollers 401 in the upper surface 310 of the mounting table. Therefore, the workpiece WK is not pressed by the peeling roller 401 above the opening 314. As a result, stress concentration at the workpiece WK at the position of the opening 314 is prevented from occurring, resulting in peeling failure.

As described above, in this embodiment, the blanket BL and the substrate SB are respectively phased. It is the "first plate-shaped body" and the "second plate-shaped body" of the present invention. Further, in the above embodiment, the mounting table 30 functions as the "holding means" of the present invention, and the upper surface 310 of the water platform portion 31 corresponds to the "holding surface" of the present invention. Further, the second opening 314 corresponds to the "opening portion" of the present invention. Moreover, in the above-described embodiment, the jacking pin 361 functions as the "support member" of the present invention, and the suction units 51 to 54 function as the "peeling device" of the present invention.

Further, the roller unit 4 functions as a "restricting means" of the present invention, and the peeling roller 401 functions as a "roller member" of the present invention. Further, the roller support portion 402 and the upper angle steel 45 function as the "support frame" and the "base member" of the present invention, and these members function integrally as the "support portion" of the present invention. Further, the motor 353 and the ball screw mechanism 354 function as a "moving mechanism" of the present invention.

The present invention is not limited to the above-described embodiments, and various modifications can be made in addition to the above without departing from the spirit thereof. For example, the peeling device 1 of the above-described embodiment includes four sets of adsorption units 51 to 54 as the "peeling device" of the present invention. However, the number of the peeling devices is arbitrary, and for example, there may be only one as follows.

Fig. 11 is a view showing a main part of a modification of the peeling device. In the above-described modification, the second to fourth adsorption units 52 to 54 are omitted from the peeling device 1 of the above embodiment, and only one adsorption unit 51 is provided as the "peeling device". The configuration of each unit other than this point is the same as that of the above embodiment, and detailed description thereof will be omitted. In this modification, the adsorption unit 51 holds the (-Y) side end portion of the substrate SB on which the workpiece WK is formed, moves in conjunction with the rise of the adsorption unit 51, and the peeling roller 4 (01 moves in the (+Y) direction, thereby pushing the peeling off. In this manner, in the configuration of only one peeling device, the above-described mounting table 30 and the roller unit 4 can be applied, and the same effects as those of the above embodiment can be obtained.

Further, in the above embodiment, the three sets of roller assemblies 40 have the same structure, and the three peeling rolls 401 have the same size. However, the plurality of peeling rolls may also have different lengths, and the peeling rolls may have different diameters as exemplified below.

12A and 12B are views showing a combination example of peeling rolls having different roll diameters. In the example shown in Fig. 12A, three peeling rolls 461, 462, and 463 are arranged from the (-X) side to the (+X) side. The center of the peeling roller 462 has a larger diameter than the other peeling rolls 461 and 463, and the axial direction (X direction) is shorter than the other peeling rolls 461 and 463. The position of the rotation axis (shown by the two-dot chain line) of the center peeling roller 462 is different from the position of the rotation axis (shown by the single-point chain line) of the other peeling rolls 461 and 463 in the Z direction, so that peeling can be performed. The rollers 461, 462, and 463 are all in contact with the substrate.

As shown in FIG. 12B, the abutting nips N61, N62, and N63 formed by the peeling rolls 461, 462, and 463 abutting on the substrate SB need to be the end portions in the (+Y) direction as the peeling direction. The Y-direction positions of the (-Y) side end portions of the nip portions are aligned with each other as indicated by broken lines. As described above, after the abutting of the nip portion, the end portion is a boundary between the peeled portion and the unpeeled portion, and if the position of the rear end portion of the abutting nip portion formed by the plurality of peeling rolls is aligned, the peeling can be performed. The boundary line becomes a straight line in the X direction. The end portion before the abutment of the nip portion is in the unpeeled region, and there is no need to align the position between the abutting nip portions. This positional relationship can be realized by making the position of the rotating shaft of the center peeling roller 462 different from the position of the rotating shafts of the other peeling rolls 461 and 463 in the Y direction.

In this manner, the plurality of peeling rolls may be dispersed in the axial direction as long as the position where the abutting nip portion is formed, and the position of the rear end portion of the nip portion in the peeling direction may be aligned, and it is not necessary to have the same shape. When all the roller members are set to the same shape as in the above embodiment, the manufacturing cost can be reduced as compared with the case of manufacturing the roller members of different shapes. On the other hand, when it is necessary to change the size of the contact nip, the size or position of each peeling roller is adjusted, and the contact nip may be in the above positional relationship.

Further, in the above embodiment, all of the three sets of roller assemblies 40 can be adjusted relative to the position of the upper angle 45. However, the position of one of the plurality of peeling rolls may be predetermined in advance. The reason for this is that the positional adjustment of the other peeling rolls can be performed by using the position of the peeling roll as a reference, and the same positional relationship as described above can be obtained.

Further, although the above embodiment includes three peeling rolls 401, the number of peeling rolls is not limited thereto. The number of the top pins is also the same.

As described above, as exemplified in the specific embodiment, in the present invention, the plurality of roller members may have the same diameter and the respective rotation axes thereof coincide with each other. By making the diameters of the plurality of roller members the same, the manufacturing cost of the member can be reduced. When the diameters of the roller members are the same, by aligning the respective rotation axes, the positions of the abutting nips can be aligned, and the abutment pressures between the abutting nips can be made uniform.

Further, the support portion may have a plurality of support frames that individually support the respective roller members, and a base member that integrally holds the plurality of support frames. By separately providing the support frame for each roller member, the assembly and adjustment work of the support portion can be easily performed. Further, by attaching the support frame to the common base member, the contact nip portions can be moved in accordance with the movement of the base member while maintaining the relative positional relationship between the nip portions.

In this case, at least one of the support frames is preferably adjustable in position relative to the base member. According to this configuration, the alignment between the plurality of abutting nip portions formed by the plurality of roller members can be performed, and the push-up management by the roller member can be more appropriately performed.

Further, each of the support frames can also rotatably support both end portions of the axial direction of one roller member. In such a configuration, since the positions of both ends of each roller member are stabilized, the difference in the abutment pressure of the abutting nip portion can be reduced.

Further, the peeling device may be a device that holds the second plate-shaped body on the upstream side of the roller member in the peeling direction. The first plate-shaped body can be separated from the first plate-shaped body by the peeling means by the peeling means on the upstream side of the roller member that moves in the peeling direction while abutting on the second plate-shaped body The peeling from the second plate-shaped body is unidirectionally advanced in the peeling direction. In this case, the peeling device can be configured such that the second plate-shaped body is separated from the first plate-shaped body by holding the upstream end portion in the peeling direction of the second plate-shaped body.

Further, the holding surface of the holding device may be provided with a plurality of openings having different positions in the axial direction, and the main surface opposite to the first plate-shaped body of the second plate-shaped body. Each of the plurality of partial regions divided by the band-shaped region formed by extending the opening in the peeling direction virtually, the roller members abut one by one. The support member is disposed by providing a plurality of openings in different positions in the axial direction, so that the first plate-like body can be supported more stably. In this case, as long as one roller member is disposed between the two openings in the axial direction, the nip portion can be continuously formed without gaps in the region between the openings.

Further, a plurality of openings having the same position in the axial direction and different positions in the peeling direction may be provided on the holding surface. By providing a plurality of openings in different positions in the peeling direction, the first plate-like body can be supported more stably. In this case, if the axial positions of the plurality of openings are the same, the axial gap positions between the abutting nips that avoid the openings can be used.

Further, the present invention is particularly suitable for the case where the surface of each roller member contains an elastic material. When the roll member having the elastic layer on the surface is formed in a long shape, it is particularly difficult to form the abutting nip portion having a uniform contact pressure. By applying a plurality of roller members by applying the present invention, it is possible to form a contact nip portion having a uniform contact pressure and to facilitate the peeling.

[Industrial availability]

The present invention can be preferably applied to a peeling treatment in which two sheet-like members bonded to each other are peeled off, and in particular, the size of the sheet-like body can be increased.

4‧‧‧roll unit

30‧‧‧Station (holding device)

31‧‧‧Water Platform Department

32‧‧‧Wedge table

40‧‧‧ Roller assembly

41, 42‧‧‧Sliding parts

43‧‧‧low angle steel

44‧‧‧ Lifting mechanism

45‧‧‧ upper angle steel

52‧‧‧2nd adsorption unit

310‧‧‧ (water platform) upper surface (holding surface)

311, 312‧‧‧ slots

313, 314‧‧‧ openings (openings)

320‧‧‧ (of the wedge-shaped table) upper surface

321‧‧‧ horizontal plane

322‧‧‧Wedge surface

351, 352‧ ‧ rail

353‧‧‧Motor

354‧‧‧Rolling screw mechanism

521‧‧‧beam components

522, 523‧‧‧ column components

524‧‧‧Board components

525‧‧‧ Lifting mechanism

526‧‧‧pad support members

527‧‧‧Adsorption pad

E‧‧‧ ridge line

Claims (10)

A peeling device comprising a first plate-shaped body and a second plate-shaped body which are bonded to each other, and a holding device, wherein an upper surface thereof is a substantially horizontal holding surface, and the holding surface is provided on the holding surface The opening portion holds the first plate-shaped body placed on the holding surface with the surface opposite to the second plate-shaped body facing downward, and the support member is disposed at an upper end portion from the opening portion toward the holding surface a protruding position that protrudes upward is moved between the upper end portion and the retracted position that is retracted below the holding surface in the opening, and the first plate-shaped body is separated from the holding surface at the protruding position and is provided from below. a peeling device that holds the second plate-shaped body and moves in a direction away from the first body, and causes the second plate-shaped body to be held by the holding device And a limiting device that abuts against a surface of the second plate-shaped body opposite to the first plate-shaped body, and restricts pushing of the second plate-shaped body by the peeling device; and the limiting device With: Each of the roller members abuts against the second plate-like body to form a contact nip portion with the second plate-shaped body, and a support portion that surrounds the axial direction parallel to the holding surface The rotating shaft is freely rotatable and individually supports each of the plurality of roller members; and a moving mechanism that moves the support portion in a peeling direction parallel to the holding surface and orthogonal to the axial direction; and the roller member The abutting nip portions formed by the respective ones are spaced apart from each other in the axial direction, and the positions of the rear end portions of the abutting nip portion in the peeling direction are The peeling directions are the same as each other, and the opening is provided at a position corresponding to a gap portion between the two abutting nip portions adjacent to each other in the axial direction. The peeling device of claim 1, wherein the plurality of roller members have the same diameter and the respective rotation axes coincide. The peeling device of claim 1, wherein the support portion has a plurality of support frames that individually support the respective roller members and a base member that integrally holds the plurality of support frames. A peeling device according to claim 3, wherein at least one of said support frames is adjustable in position relative to said base member. A peeling device according to claim 3, wherein each of said support frames rotatably supports said axial end portions of said roller member. The peeling device according to any one of claims 1 to 5, wherein the peeling device holds the second plate-shaped body on the upstream side of the roller member in the peeling direction. The peeling device according to claim 6, wherein the peeling means holds the upstream end portion of the second plate-shaped body in the peeling direction to separate the second plate-shaped body from the first plate-shaped body. The peeling device according to any one of claims 1 to 5, wherein the holding surface is provided with a plurality of the openings having different positions in the axial direction, and the first plate is opposed to the second plate-shaped body Each of the plurality of partial regions defined by the strip-shaped region formed by extending the opening portion virtually in the peeling direction in the main surface on the opposite side, the roller members abut one by one. The peeling device according to any one of claims 1 to 5, wherein the holding surface is provided with a plurality of openings having the same position in the axial direction and different positions in the peeling direction. A peeling device according to any one of claims 1 to 5, wherein the surface of each of the above roller members is formed of an elastic material.