TW201619582A - Method for vibration monitoring and alarming using autoregressive models - Google Patents
Method for vibration monitoring and alarming using autoregressive models Download PDFInfo
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本發明是有關於一種監測方法,特別是指一種適用於監測土木結構及產業機房其振動狀況的含自回歸分析模型的振動監測警報方法。 The invention relates to a monitoring method, in particular to a vibration monitoring and alarming method comprising an autoregressive analysis model suitable for monitoring the vibration condition of a civil structure and an industrial machine room.
隨著精密工業及高科技的發展,土木結構及產業機房對於感受環境振動之限制與要求越趨嚴格,以預防其對於人員及產業可能構成的危害。而歸納這些環境振動的來源,最常見的即是自然引起的地震,或是經由交通、施工等人為因素所產生的振動,當這些振動傳遞至橋樑或是建築物的樓板時,不僅干擾人員的生活作息,影響身心健康,嚴重的話,甚至會為人員的生命及財產安全帶來重大威脅和傷害。在產業方面,對於近年來大量林立的高科技半導體廠房、或是設有高靈敏度精密儀器實驗室來說,環境中的產生的振動則直接影響產品的良率或不良率,進而造成相關業者的獲利損失。因此,基於上述,實有對上述土木結構與產業機房等結構體進行振動監測之必要。 With the development of precision industry and high technology, civil engineering and industrial equipment rooms are becoming more and more strict with the limitations and requirements for sensing environmental vibrations to prevent their possible harm to personnel and industry. And to summarize the sources of these environmental vibrations, the most common are natural earthquakes, or vibrations caused by human factors such as traffic and construction. When these vibrations are transmitted to the bridge or the floor of a building, they not only interfere with the personnel. Life and work, affecting physical and mental health, and serious, even bring serious threats and harm to the lives and property of personnel. In terms of industry, for the high-tech semiconductor factories that have been established in recent years, or the laboratories with high-sensitivity precision instruments, the vibration generated in the environment directly affects the yield or defect rate of the products, which in turn causes the relevant industry to Loss of profit. Therefore, based on the above, it is necessary to perform vibration monitoring on the above-described civil structure and industrial equipment room.
然而,現有的振動監測方法,欲得到可靠的監 測數據,必須在上述結構體的各個欲監測位置佈設對應數目的感測器進行監測,並根據各感測器於其所在位置所量測到的感測信號,評估環境中的振動狀況是否有造成危害的可能。但是在實際裝設時,經常會受到建築物本身的樓層結構限制、或是因為廠房中大量機具擺設,使得感測器的架置及線路的佈設受到阻礙,進而大幅影響到監測數據的可靠度;再者,感測器及線材的價格昂貴,在上述結構體中大規模的佈設也並不符合成本考量。 However, existing vibration monitoring methods are intended to be reliably monitored. The measured data must be monitored by a corresponding number of sensors at each of the locations to be monitored, and the vibration conditions in the environment are evaluated based on the sensed signals measured by the sensors at their locations. The possibility of harm. However, in actual installation, it is often limited by the floor structure of the building itself, or because of the large number of machine tools in the plant, which hinders the installation of the sensor and the layout of the circuit, which greatly affects the reliability of the monitoring data. Moreover, sensors and wires are expensive, and large-scale deployment in the above structures is not cost-effective.
因此,本發明之目的,即在提供一種在裝設感測器時不受結構體本身限制,並且能減少佈設成本的含自回歸分析模型的振動監測警報方法。 Accordingly, it is an object of the present invention to provide a vibration monitoring and alarming method including an autoregressive analysis model that is not limited by the structure itself when the sensor is installed, and which can reduce the cost of deployment.
於是,本發明含自回歸分析模型的振動監測警報方法,監測一待監測的結構體的M個固定監測位置和相異於該M個固定監測位置的N個待監測位置的振動狀況,其中M、N均為正整數,且該含自回歸分析模型的振動監測警報方法包含一步驟(A)、一步驟(B)、一步驟(C),及一步驟(D)。 Accordingly, the present invention comprises a vibration monitoring and alarming method of an autoregressive analysis model, which monitors M fixed monitoring positions of a structure to be monitored and vibration states of N to be monitored positions different from the M fixed monitoring positions, wherein M N is a positive integer, and the vibration monitoring alarm method including the autoregressive analysis model includes a step (A), a step (B), a step (C), and a step (D).
該步驟(A)是在一監測時間內,利用M個供量測振動的感測單元佈設於該結構體的M個固定監測位置,並量測得到M個對應其所在之固定監測位置的振動狀況。 The step (A) is to use the M sensing units for measuring the vibration to be arranged in the M fixed monitoring positions of the structure within a monitoring time, and measure the vibrations of the M corresponding fixed monitoring positions. situation.
該步驟(B)是在該監測時間內的一預備時段,利用N個供量測振動的感測單元佈設於該結構體的N個待監測位置,並量測得到N個對應其所在之待監測位置的振動 狀況。 The step (B) is a preliminary period of the monitoring time, and the sensing units of the N-measured vibrations are arranged in the N to be monitored positions of the structure, and the N corresponding to the measured position are measured. Monitoring position vibration situation.
該步驟(C)是以一處理單元於該預備時段將該M個固定監測位置的振動狀況,及將該N個待監測位置的振動狀況進行時序自相關運算而建立一振動狀況轉換模型。 The step (C) is to establish a vibration condition conversion model by performing a time series autocorrelation operation on the vibration conditions of the M fixed monitoring positions in the preparation period and the vibration conditions of the N positions to be monitored.
該步驟(D)是以該M個感測單元於該預備時段後的一選取時段量測該M個固定監測位置的振動狀況並輸入該振動狀況轉換模型,而得知該選取時段的N個待監測位置的預測振動狀況。 The step (D) is to measure the vibration condition of the M fixed monitoring positions by using the M sensing units in a selected period after the preliminary period, and input the vibration condition conversion model, and learn the N times of the selection period. The predicted vibration condition of the location to be monitored.
本發明之功效在於:藉由在該預備時段所建立的振動狀況轉換模型,而在該預備時段後的任一選取時段除了量得該M個固定監測位置的振動狀況,更可直接將其轉換成該N個待監測位置的預測振動狀況,因此不僅可對該結構體難以架置感測器的位置進行監測,更因不需在位置實際佈設感測器而減少佈設成本。 The effect of the invention is that: by the vibration condition conversion model established in the preparation period, the vibration state of the M fixed monitoring positions can be directly converted in any selected period after the preparation period, and the vibration condition can be directly converted. The predicted vibration state of the N positions to be monitored can not only monitor the position of the structure in which the structure is difficult to be mounted, but also reduce the installation cost by actually disposing the sensor at the position.
1‧‧‧第一步驟 1‧‧‧First steps
2‧‧‧第二步驟 2‧‧‧Second step
3‧‧‧第三步驟 3‧‧‧ third step
4‧‧‧第四步驟 4‧‧‧ fourth step
5‧‧‧第五步驟 5‧‧‧ fifth step
6‧‧‧結構體 6‧‧‧ Structure
61‧‧‧固定監測位置 61‧‧‧Fixed monitoring position
62‧‧‧待監測位置 62‧‧‧Location to be monitored
7‧‧‧感測單元 7‧‧‧Sensor unit
8‧‧‧處理單元 8‧‧‧Processing unit
81‧‧‧頻道積分器 81‧‧‧Channel Integrator
82‧‧‧資料擷取器 82‧‧‧ data extractor
83‧‧‧電腦 83‧‧‧ computer
本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1是一流程圖,說明本發明含自回歸分析模型的振動監測警報方法的一實施例;圖2是一示意圖,輔助圖1說明該實施例;及圖3是一示意圖,輔助圖2說明該實施例所使用的一振動監測系統。 Other features and effects of the present invention will be apparent from the following description of the drawings. FIG. 1 is a flow chart illustrating an embodiment of the vibration monitoring and alarming method of the present invention including an autoregressive analysis model; 2 is a schematic view, and FIG. 3 is a schematic view, and FIG. 3 is a schematic view. FIG. 2 illustrates a vibration monitoring system used in the embodiment.
配合參閱圖1、圖2及圖3,本發明含自回歸分析模型的振動監測警報方法的一實施例包含一第一步驟1、一第二步驟2、一第三步驟3、一第四步驟4及一第五步驟5,並用如圖3所示的一振動監測系統監測該結構體6的M個固定監測位置61(圖中僅示出其中四個固定監測位置61)和相異於該M個固定監測位置61的N個待監測位置62(圖中僅示出其中三個待監測位置62)的振動狀況,其中,M、N均為正整數,且該振動監測系統包括多數供量測振動的感測單元7,及一將結構體的振動狀況處理成監測數據的處理單元8,該任一感測單元7是選自加速度計,及速度計其中之至少一所構成,該處理單元8具有一頻道積分器81、一資料擷取器82,及一電腦83,為方便清楚說明,其作用容後再述。 Referring to FIG. 1 , FIG. 2 and FIG. 3 , an embodiment of the vibration monitoring and alarming method of the present invention including an autoregressive analysis model includes a first step 1, a second step 2, a third step 3, and a fourth step. 4 and a fifth step 5, and monitoring the M fixed monitoring positions 61 of the structure 6 with a vibration monitoring system as shown in FIG. 3 (only four fixed monitoring positions 61 are shown in the figure) and different from the M vibration conditions of N fixed monitoring positions 61 (only three of which are to be monitored 62 are shown in the figure), wherein M and N are positive integers, and the vibration monitoring system includes most of the supply a vibration sensing unit 7 and a processing unit 8 for processing the vibration state of the structure into monitoring data, the sensing unit 7 being selected from at least one of an accelerometer and a speedometer, the processing The unit 8 has a channel integrator 81, a data extractor 82, and a computer 83. For convenience of explanation, the function will be described later.
該第一步驟1是在一監測時間內,利用M個感測單元7佈設於該結構體6的該M個固定監測位置61,量測得到M個對應其所在之固定監測位置61的振動狀況,並根據所擺設的感測單元7為加速度計或速度計,而對應得到反映該M個固定監測位置61的振動狀況的加速度信號或是速度信號,但為便於以下說明,以下僅以感測單元7為加速度計,且量得加速度信號為例。 The first step 1 is to use the M sensing units 7 to be disposed in the M fixed monitoring positions 61 of the structure 6 during a monitoring time, and measure the vibration status of the M fixed monitoring positions 61 corresponding thereto. And according to the accented sensing unit 7 as an accelerometer or a speedometer, corresponding to an acceleration signal or a speed signal reflecting the vibration condition of the M fixed monitoring positions 61, but for the following description, the following only senses The unit 7 is an accelerometer, and the acceleration signal is taken as an example.
該第二步驟2是在該監測時間內的一預備時段,利用N個感測單元7佈設於該結構體6的該N個待監測位置62並量測得到N個反映其所在之待監測位置62的振動狀況的加速度信號。 The second step 2 is a preliminary period of the monitoring time, and the N sensing units 7 are disposed on the N to-be-monitored locations 62 of the structure 6 and the N positions to be monitored are measured. The acceleration signal of the vibration condition of 62.
該第三步驟3是於該預備時段利用該頻道積分器81將分別對應該M個固定監測位置61及對應該N個待監測位置62的振動狀況的加速度信號進行濾波以及積分處理藉以提高信號雜訊比,接著利用該資料擷取器82分別對濾波及積分處理後的加速度信號進行離散時間取樣,並根據所設定的取樣點數將得到的多個反映該M個固定監測位置61的振動狀況的外變數參數資料,及多個反映該N個待監測位置62的振動狀況的自回歸參數資料輸入該電腦83。接著,該電腦83將兩者依時間先後次序進行線性疊加而建立一自回歸外變數模型而進一步表示如以下所示:
值得一提的是,該電腦83還會確認該多個外變數參數資料及該多個自回歸參數資料藉由該自回歸外變數模型轉換匹配的妥適程度(Best fit),以使得到的預測振動狀況更加可靠。而在確認該自回歸外變數模型確能提供可靠的預測結果之後,便能於該預備時段後,將該N個佈設於待監測位置62的感測單元7移除,僅留下該M個佈設於固定監測位置61的感測單元7。 It is worth mentioning that the computer 83 also confirms that the plurality of extrinsic parameter data and the plurality of autoregressive parameter data are matched by the autoregressive external variable model to match the appropriate fit (Best fit), so that the Predicting vibration conditions is more reliable. After confirming that the autoregressive external variable model can provide a reliable prediction result, the N sensing units 7 disposed at the position to be monitored 62 can be removed after the preliminary period, leaving only the M The sensing unit 7 is disposed at the fixed monitoring position 61.
該第四步驟4是以該M個感測單元7於該預備時段後的一選取時段量測該M個固定監測位置61的振動狀況而對應得到加速度信號,再由該電腦83進行離散時間取樣處理成多個外變數參數資料矩陣輸入該自回歸外變數模型而得知該選取時段的N個待監測位置62的預測振動狀況Y’。 The fourth step 4 is to measure the vibration condition of the M fixed monitoring positions 61 by using the M sensing units 7 in a selected period after the preparation period, and correspondingly obtain an acceleration signal, and then the computer 83 performs discrete time sampling. The plurality of extrinsic parameter data matrices are processed to input the autoregressive outer variable model to obtain the predicted vibration condition Y' of the N to-be-monitored positions 62 of the selected time period.
該第五步驟5是利用該電腦83在該M個固定監測位置61的加速度信號振幅值以及該N個待監測位置62的加速度信號振幅值超過一預設值時發出警報。並且,該電腦83還會將該M個固定監測位置61的振動狀況以及該N個待監測位置62的預測振動狀況進行快速傅立葉轉換,得到三分之一八音頻頻譜,藉以供人員觀察頻譜的振幅而 迅速得知在哪一個監測位置具有異常的振動狀況。另外,該資料擷取器82還可將在該三步驟3中得到的該多個外變數參數資料及該多個自回歸參數資料上傳至一雲端伺服器並供在遠端的人員即時得知振動資訊。 The fifth step 5 is to use the computer 83 to issue an alarm when the acceleration signal amplitude value of the M fixed monitoring positions 61 and the acceleration signal amplitude value of the N to-be-monitored positions 62 exceed a preset value. Moreover, the computer 83 also performs fast Fourier transform on the vibration conditions of the M fixed monitoring positions 61 and the predicted vibration conditions of the N to-be-monitored positions 62 to obtain a one-eighth audio spectrum for the personnel to observe the spectrum. Amplitude Quickly know which monitoring location has an abnormal vibration condition. In addition, the data extractor 82 can also upload the plurality of external variable parameter data obtained in the third step 3 and the plurality of autoregressive parameter data to a cloud server for immediate knowledge by a remote person. Vibration information.
本發明含自回歸分析模型的振動監測警報方法在使用時,雖然無法預先得知振動波會如何進入該結構體6,但根據一般振動波的特性是經由該結構體6的四周及柱子來產生進入該結構體6的傳遞路徑,並且根據剛性柔板假設,鄰近該結構體6中央的振動模式會與該結構體6的四周或是柱子周遭的振動模式相近,因而一般藉由本發明含自回歸分析模型的振動監測警報方法監測該結構體6的振動狀況時,是將該M個固定監測位置61是設定於該結構體6的角落或是柱子的附近,並將該N個待監測位置62設定在該結構體6的中央,然而位置的安排並不以此為限,亦得視監測需要而設定於產生振動的傳遞路徑周遭,例如可設置於半導體機台的桌面,或是設置於柱頭上等,皆能達到良好的監測效果。 In the vibration monitoring and alarming method of the present invention including the autoregressive analysis model, although it is not known in advance how the vibration wave enters the structure 6, the characteristics of the general vibration wave are generated via the circumference of the structure 6 and the column. Entering the transmission path of the structure 6, and according to the assumption of the rigid flexible plate, the vibration mode adjacent to the center of the structure 6 is similar to the vibration mode around the structure 6 or the column, and thus generally includes autoregression by the present invention. When the vibration monitoring alarm method of the analysis model monitors the vibration condition of the structure 6, the M fixed monitoring positions 61 are set at the corner of the structure 6 or near the column, and the N positions to be monitored 62 It is disposed in the center of the structure 6. However, the positional arrangement is not limited thereto, and may be set around the transmission path where the vibration is generated depending on the monitoring requirements, for example, may be set on the desktop of the semiconductor machine or on the column head. Good results can achieve good monitoring results.
而當決定了該N個待監測位置62,該處理單元8先在該預備時段藉由在該M個固定監測位置61佈設該M個感測單元7,及在該N個待監測位置62佈設該N個感測單元7進行量測,值得一提的是,該M個感測單元7及該N個感測單元7可視監測需要,而擺放量測垂直向振動的加速度計或是量測水平向振動的加速度計,該電腦83並將所得到的加速度信號決定階數q後進行大量統計建立出的 自回歸外變數模型,並在確認該自回歸外變數模型的妥適程度後,在經過該預備時段後的任一選取時段,當該處理單元8在該選取時段再次取得該M個固定監測位置61的加速度信號時,即能直接藉由輸入該自回歸外變數模型而得到該N個待監測位置62在該選取時段的加速度信號,此時,原先在該預備時段佈設於該N個待監測位置62的該N個感測單元7便能移除,因此藉以改善現有的含自回歸分析模型的振動監測警報方法須根據待監測位置的數目佈設對應數目的感測單元的缺失,達到節省感測單元佈設成本的功效,除此之外,更同時克服以往欲監測的待監測位置因建築物的樓層結構不易佈設、或是受限於須供機具擺設而無法進行裝設的問題,進而在節省佈設成本之餘更不受到待監測結構體本身環境的限制,而增加監測的便利性。 When the N positions to be monitored 62 are determined, the processing unit 8 first arranges the M sensing units 7 at the M fixed monitoring positions 61 and the N positions to be monitored 62 in the preliminary period. The N sensing units 7 are measured. It is worth mentioning that the M sensing units 7 and the N sensing units 7 are capable of visually monitoring, and the accelerometers or measuring the vertical vibrations are measured. An accelerometer that measures horizontal vibration, the computer 83 and the obtained acceleration signal is determined by the order q and then a large number of statistics are established. The autoregressive external variable model, and after confirming the appropriate degree of the autoregressive external variable model, the processing unit 8 obtains the M fixed monitoring positions again in the selected time period after any of the selected time periods after the preliminary period When the acceleration signal of 61 is input, the acceleration signals of the N to-be-monitored positions 62 in the selected period are obtained directly by inputting the autoregressive external variable model. At this time, the N to be monitored are originally scheduled to be in the preliminary period. The N sensing units 7 of the position 62 can be removed, so that the existing vibration monitoring alarm method with the autoregressive analysis model needs to be arranged according to the number of the positions to be monitored to save the sense of the missing number of sensing units. In addition to the cost of measuring the cost of the unit, in addition to overcoming the problem that the location to be monitored to be monitored in the past is difficult to install due to the floor structure of the building, or is limited by the need for the installation of the machine, and then Saving the cost of deployment is not limited by the environment of the structure to be monitored, and the convenience of monitoring is increased.
要再進一步說明的是,在第二步驟2中,當受限於感測成本而無法在該預備時段相對應地於該N個待監測位置62佈設等數目的感測單元7時,能在該二步驟2中決定優先關注該N個待監測位置62的其中N’個位置,N’為小於N的正整數,並進行第三步驟3建立對應有該N’個位置的振動狀況轉換模型,接著再回到第二步驟2中決定關注其中N”個位置,N”為小於N的正整數,並接著進行第三步驟3建立對應有該N”個位置的振動狀況轉換模型後,反覆進行數次直到關於該N個待監測位置62的振動狀況轉換模型建立完成,該處理單元8同樣能在該預備時段後的任一選取時段取得該M個固定監測位置61的振動狀況 後,直接輸入該振動狀況轉換模型而取得該N個待監測位置62的預測振動狀況,進而達到節省佈設成本的功效。 It is to be further explained that, in the second step 2, when the number of sensing units 7 cannot be disposed in the N to-be-monitored positions 62 corresponding to the sensing time and is not limited by the sensing cost, In the second step 2, it is decided to pay attention to the N' positions of the N to-be-monitored positions 62, N' is a positive integer smaller than N, and the third step 3 is performed to establish a vibration state conversion model corresponding to the N' positions. Then, returning to the second step 2, it is decided to pay attention to N" positions, N" is a positive integer smaller than N, and then performing the third step 3 to establish a vibration condition conversion model corresponding to the N" positions, and then repeating Several times until the establishment of the vibration condition conversion model for the N positions to be monitored 62 is completed, the processing unit 8 can also obtain the vibration status of the M fixed monitoring positions 61 in any of the selected periods after the preliminary period. Then, the vibration condition conversion model is directly input to obtain the predicted vibration state of the N to-be-monitored positions 62, thereby achieving the effect of saving the layout cost.
綜上所述,藉由在該預備時段所建立的振動狀況轉換模型,而在該預備時段後的任一選取時段量測得到該M個固定監測位置61的振動狀況時,更直接將其轉換成該N個待監測位置62的預測振動狀況,故並不需在該N個待監測位置62實際佈設感測單元7即能預測該些位置的振動狀況,因此不僅因而減少佈設成本,更同時克服以往待監測位置因建築物的樓層結構不易佈設或是受限於須供機具擺設而無法進行裝設的問題,故更不受到待監測結構體本身環境的限制,增加監測的便利性,故確實能達成本發明之目的。 In summary, when the vibration state of the M fixed monitoring positions 61 is measured in any of the selected time periods after the preliminary period by the vibration condition conversion model established in the preliminary period, the converter is more directly converted. As the predicted vibration conditions of the N positions to be monitored 62, it is not necessary to actually arrange the sensing unit 7 at the N positions to be monitored 62 to predict the vibration condition of the positions, thereby not only reducing the installation cost, but also simultaneously Overcoming the problem that the location of the building to be monitored is difficult to install due to the floor structure of the building or is limited by the need for the machine to be installed, so it is not limited by the environment of the structure to be monitored, and the convenience of monitoring is increased. It is indeed possible to achieve the object of the invention.
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications made by the patent application scope and patent specification content of the present invention, All remain within the scope of the invention patent.
1‧‧‧第一步驟 1‧‧‧First steps
2‧‧‧第二步驟 2‧‧‧Second step
3‧‧‧第三步驟 3‧‧‧ third step
4‧‧‧第四步驟 4‧‧‧ fourth step
5‧‧‧第五步驟 5‧‧‧ fifth step
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