TW201612603A - Substrate, manufacturing method of a film-formation substrate and coating device - Google Patents

Substrate, manufacturing method of a film-formation substrate and coating device

Info

Publication number
TW201612603A
TW201612603A TW104131672A TW104131672A TW201612603A TW 201612603 A TW201612603 A TW 201612603A TW 104131672 A TW104131672 A TW 104131672A TW 104131672 A TW104131672 A TW 104131672A TW 201612603 A TW201612603 A TW 201612603A
Authority
TW
Taiwan
Prior art keywords
film
substrate
formation area
groove
manufacturing
Prior art date
Application number
TW104131672A
Other languages
Chinese (zh)
Other versions
TWI672548B (en
Inventor
Masaki Nishinaka
Shinji Kajiwara
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW201612603A publication Critical patent/TW201612603A/en
Application granted granted Critical
Publication of TWI672548B publication Critical patent/TWI672548B/en

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  • Liquid Crystal (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

A subject of this invention is to suppress thickness unevenness formed in a film-formation area. A substrate 1 of this invention is provided with a groove 10 that surrounds the periphery of a film-formation area 2. Between the groove 10 and the film-formation area 2, a concave part group 20N having multiple concave parts 20 aligned side by side is included. Each concave part 20 of the concave part group 20N is formed into a shape that makes the fluid coated onto the substrate 1 harder to flow in a direction from the groove 10 to the film-formation area 2, as compared to a direction from the film-formation area 2 to the groove 10.
TW104131672A 2014-09-26 2015-09-25 Substrate, method of manufacturing film-forming substrate, and coating device TWI672548B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014-197486 2014-09-26
JP2014197486 2014-09-26
JP2015-175722 2015-09-07
JP2015175722A JP6602610B2 (en) 2014-09-26 2015-09-07 Substrate, film-forming substrate manufacturing method and coating apparatus

Publications (2)

Publication Number Publication Date
TW201612603A true TW201612603A (en) 2016-04-01
TWI672548B TWI672548B (en) 2019-09-21

Family

ID=55866872

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104131672A TWI672548B (en) 2014-09-26 2015-09-25 Substrate, method of manufacturing film-forming substrate, and coating device

Country Status (2)

Country Link
JP (2) JP6602610B2 (en)
TW (1) TWI672548B (en)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100987678B1 (en) * 2004-12-03 2010-10-13 엘지디스플레이 주식회사 Liquid Crystal Display and Method of Fabricating the Same
JP4768393B2 (en) * 2005-10-21 2011-09-07 Ｎｅｃ液晶テクノロジー株式会社 Liquid crystal display device and manufacturing method thereof
US8125608B2 (en) * 2006-04-11 2012-02-28 Sharp Kabushiki Kaisha Board for display device and display device
JP4651580B2 (en) * 2006-05-31 2011-03-16 株式会社 日立ディスプレイズ Liquid crystal display device
JP2009198633A (en) * 2008-02-20 2009-09-03 Brother Ind Ltd Method of manufacturing display panel, and display panel and display device manufactured with method thereof
WO2011129065A1 (en) * 2010-04-16 2011-10-20 シャープ株式会社 Display device
CN102236208A (en) * 2010-04-22 2011-11-09 北京京东方光电科技有限公司 Liquid crystal display
JP5693943B2 (en) * 2010-12-22 2015-04-01 芝浦メカトロニクス株式会社 Alignment film forming liquid coating apparatus and alignment film forming substrate manufacturing method
US20130235310A1 (en) * 2012-03-06 2013-09-12 Guofu Tang LCD Panel and LCD Device
JP5726829B2 (en) * 2012-09-21 2015-06-03 株式会社東芝 Film forming method and liquid crystal display device
KR102059801B1 (en) * 2013-03-22 2020-02-12 삼성디스플레이 주식회사 Display panel and manufacturing method of the same
US10025141B2 (en) * 2013-09-26 2018-07-17 Sharp Kabushiki Kaisha Display component and display device

Also Published As

Publication number Publication date
JP2016071352A (en) 2016-05-09
JP2020021090A (en) 2020-02-06
TWI672548B (en) 2019-09-21
JP6602610B2 (en) 2019-11-06
JP6793236B2 (en) 2020-12-02

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