TW201607056A - 背側接觸層結構元件及其之製造方法 - Google Patents

背側接觸層結構元件及其之製造方法 Download PDF

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TW201607056A
TW201607056A TW104121633A TW104121633A TW201607056A TW 201607056 A TW201607056 A TW 201607056A TW 104121633 A TW104121633 A TW 104121633A TW 104121633 A TW104121633 A TW 104121633A TW 201607056 A TW201607056 A TW 201607056A
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molybdenum
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雅塞Ｃ 渥爾
普瑟 鮑爾森
唐納德 佩森
丹尼斯 賀拉斯
布魯斯Ｄ 海曲曼
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努渥孫公司
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Abstract

範例性裝置提供導電背接觸層及其製法。範例性方法可以包括：(a)提供導電基板，其具有第一側和第二側；(b)施加至少一預先反應層到基板的第二側，其中預先反應層包括導電材料；(c)將至少一預先反應層暴露於含硒或含硫氣體；以及(d)施加至少一層的導電抗氧化材料到第二側。

Description

背側接觸層結構元件及其之製造方法 相關申請案之交互參照
本申請案主張2014年7月7日所提申的美國臨時申請案第62/021,247號的優先權，其通過引用將其整體併入本文中。
本發明有關於背側接觸層結構元件及其製造方法。
除非在此另有所指，否則本節所述的材料對於本案的申請專利範圍而言不是先前技藝，並且不因包含於本節而承認是先前技藝。
目前有在基板上形成背側接觸的方法和裝置以舉例而言製作可撓性太陽能電池。一種已知的方法涉及經由材料移除過程來形成接觸區域，其中從基板上的目標接觸區域移除半導體層。太陽能電池然後可以透過接線過程而連接，其係將沒有高電阻之半導體層的每個接觸區域連接到相鄰之太陽能電池的端子。這做法須要移除主動元件層，這轉而減少了能量產出。附帶而言，元件在材料移除過程期間可以易於受損。此外，材料移除過程可以費時並且無助於大量製造。
其他的方法可以涉及使用導電基板，並且藉由使電池的前側接觸到相鄰電池的背側而透過那些導電基板來提供相鄰者的電接觸。這可 以要求太陽能電池使用保護性背接觸層以在處理之後維持良好的接觸表面。這些方法涉及沉積一或多個保護性披覆到基板的背側，例如雙層。沉積的第一層可以是鉻，接著是第二層的鉬或鉬與Ti、Zr、Hf、V、Nb、Ta、Al或Si的合金。基板和雙層都經歷硒化過程，其可以增加背接觸層的電阻。
其他提供保護層給薄膜太陽能電池的方法涉及在基板上沉積鉬的氧化物和氮化物。然而鉬的氧化物和氮化物典型而言不像單獨金屬那麼的導電，並且有效的增加太陽能電池的背接觸電阻。
範例性具體態樣提供導電背接觸層(其可以具有次層)及其製法。本發明有利的允許製造太陽能電池，其中捲筒的背側可以在高溫下暴露於硒或硫氣體而仍維持無顆粒和導電的。於某些具體態樣，藉由披覆基板(例如不鏽鋼)作為預防措施，則舉例而言可以避免大量的硒化鐵形成為顆粒。附帶而言，保護性背接觸層可以避免太陽能電池材料當捲起時受損，並且舉例而言也可以避免在過程設備裡的嚴重維護考量(其可以源於擦到硒化鐵)。保護性背接觸層可以在整個太陽能電池製程中有利的維持完好如初。附帶而言，可以使用保護和導電的背接觸層以在太陽能電池之間生成互連，包括使用這背側接觸層作為電接觸。在暴露於測試(例如升高的溫度和/或溼度)之後，根據本發明的背接觸層也可以有利的維持導電的。
因此，於一方面，提供的方法包括以下步驟：(a)提供導電基板，其具有第一側和第二側；(b)施加至少一預先反應層到基板的第二側，其中預先反應層包括導電材料；(c)將至少一預先反應層暴露於含硒或含硫氣體；以及(d)施加至少一層的導電抗氧化材料到第二側。
於另一方面，提供的裝置包括：(a)導電基板，其具有第一側和第二側；(b)至少一導電材料層，其附著於基板的第二側；(c)至少部分的該至少一導電材料，其與硒或硫反應；以及(d)至少一層的導電抗氧化材料，其附著於導電材料的反應部分。
此技藝中的一般技術者在適當參考伴隨圖式下來閱讀以下的【實施方式】時將明白這些以及其他的方面、優點和替代例。
100‧‧‧方法
105~120‧‧‧步驟
200‧‧‧裝置
205‧‧‧導電基板
206‧‧‧第一側
207‧‧‧第二側
210‧‧‧導電材料層
211‧‧‧反應部分
215‧‧‧導電的抗氧化材料
220‧‧‧光伏元件結構
圖1是根據一範例性具體態樣的方法流程圖。
圖2顯示根據一範例性具體態樣的太陽能電池裝置。
圖3顯示高溫硒化的預先反應層在暴露於氧化環境條件下而有和沒有導電之抗氧化層的效果。
在此描述的是範例性方法和系統。在此所述的任何範例性具體態樣或特色未必是要解讀成更偏好或更有利於其他的具體態樣或特色。在此所述的範例性具體態樣並不意謂為限制性的。將輕易理解揭示之系統和方法的特定方面可以採取各式各樣不同的廣泛組態來排列和組合，而在此思及所有此等組態。
此外，圖中所示的特殊安排不應該視為限制性的。應該了解其他的具體態樣可以包括多於或少於給定圖中所示的每個元件。此外，所示範的某些元件可加以組合或省略。再者，範例性具體態樣可以包括圖中並未示範的元件。
如在此所用的，有關測量而言，「大約」(about)意謂±10%。
本具體態樣有利的提供導電背接觸層(其可以具有次層)及其製法。現在參見圖1，顯示的是方法100的流程圖，其包括步驟105：提供具有第一側和第二側的導電基板。於某些具體態樣，基板可以是金屬箔，舉例而言例如不鏽鋼、鋁、鈦、鉬、鋼或銅。
方法100進一步包括步驟110：施加至少一預先反應層到基板的第二側，其中預先反應層包括導電材料。於多樣的具體態樣，預先反應層可以包括鈮、鉬鈮合金、鉬鈦合金、鉬鉻合金、鉬鉭合金、鈦、鈦氮合金或鎢碳合金。於一具體態樣，預先反應層可以具有大約50奈米或更大的厚度、從大約50奈米到大約300奈米的厚度、或較佳而言範圍從大約100奈米到大約300奈米的厚度。於另一具體態樣，在硒化或硫化之前，可以施加多個預先反應層到第二側。於一具體態樣，可以有第一預先反應層(其作為黏著層)、第二預先反應層(其進一步披覆和覆蓋第一預先反應層和基板的第二側)、第三預先反應層(其在硒化或硫化操作之後提供導電的表面)。
方法100也包括步驟115：將至少一預先反應層暴露於含硒或含硫氣體。於另一具體態樣，預先反應層對含硒或含硫氣體的暴露可以發生在範圍從大約350℃到大約800℃的溫度。在硒化或硫化期間和之後，預先反應層可以維持完好如初而高度導電的。於進一步具體態樣，預先反應層對含硒或含硫氣體的暴露可以發生在範圍從大約大氣壓到大約10-5托耳的壓力。
方法100包括步驟120：施加至少一層的導電抗氧化材料到第二側。如在此所用的，「抗氧化」(oxidation-resistant)是指層或材料當暴露於氧化環境時可以維持導電的，而不管材料是否已經與氧結合。換言之，導 電的抗氧化材料層可以幫助維持低電阻。於某些具體態樣、導電抗氧化材料可以包括錫、錫鉍合金、鉬鈮合金、鉬鈦合金、鉬鉻合金、鉬鉭合金、鈦、鈦氮合金、鎢碳合金、鎢氮合金、銀、鉬或導電氧化物(例如氧化鋁鋅或氧化銦錫)。於一具體態樣，該層的導電抗氧化材料可以具有大約50奈米或更大的厚度，較佳而言可以具有範圍從大約100奈米到大約300奈米的厚度。於進一步具體態樣，也可以施加多層的導電抗氧化材料到第二側。於一具體態樣，可以有第一導電的抗氧化層(其作為黏著層)、第二導電的抗氧化層(其進一步披覆和覆蓋第一預先反應層和預先反應層)、第三導電的抗氧化層(其提供進一步的抗氧化性和導電性)。如圖3所示，相對於僅利用預先反應層的元件而言，這層導電的抗氧化材料使背側接觸層維持在低程度的電阻。
於一具體態樣，至少一預先反應層和至少一導電之抗氧化層對第二側的施加發生在至少一預先反應層暴露於氧化條件之前。
於又一具體態樣，導電之抗氧化材料對第二側的施加可以包括：(a)在預先反應層暴露於氧化條件之前，施加第一層的導電抗氧化材料到基板的第二側；以及(b)在第一層的導電抗氧化材料暴露於氧化條件之後，施加第二層的導電抗氧化材料到第二側。
於一具體態樣，預先反應材料和導電之抗氧化材料對基板之第二表面的施加尤其可以包括濺鍍、蒸鍍、化學氣相沉積、脈波式雷射沉積或鍍覆。
於多樣的其他具體態樣，方法可以進一步包括以下步驟：施加一或更多層的光伏元件結構到基板的第一表面。
於某些具體態樣，方法可以進一步包括以下步驟：經由可撓性導體而將至少一層的導電抗氧化材料連接到配置在第二薄可撓性基板上之光伏元件結構的頂面，以形成一捲電整合的互連薄膜太陽能電池材料。於一具體態樣，導體可以包括薄金屬箔或薄金屬篩。於進一步具體態樣，導體可以經由黏著性垂片而連接到導電的抗氧化材料。於替代性具體態樣，導體經由夾箝力而連接到至少一層的導電抗氧化材料。於再進一步具體態樣，導體具有第一表面和第二表面，並且導體的第一表面可以直接接觸導電的抗氧化材料，而導體的第二表面可以直接接觸配置在第二薄可撓性基板上之光伏元件結構的頂面。
於一範例性具體態樣，使用鈮作為預先反應層以保護抵抗在硒化之後的導電率損失。於本具體態樣，鈮可以形成比較導電的硒化物。然而，鈮可以在比較溫和的環境條件下氧化，因而喪失導電性。為了保護以抵抗氧化，鉬層可以施加到反應過的鈮層。可以在硒化之後但在反應過的鈮層氧化之前的任何時候來施加鉬層。於一具體態樣，鉬層可以施加到基板的第二側，而與透明的導電氧化物施加到基板的第一側同時。
於本發明的第二方面，如圖2所示，裝置200包括導電基板205，其具有第一側206和第二側207。裝置200進一步包括至少一導電材料層210，其附著於基板205的第二側207。至少一導電材料210的至少部分211已經與硒或硫反應。裝置200也包括至少一層的導電抗氧化材料215，其附著於導電材料層210的反應部分211。基板205、導電材料層、導電的抗氧化材料可以具有相同的性質，如上面關於本發明之第一方面所討論的。
於一具體態樣，光伏元件結構220可以附著於導電基板205 的第一側206。
以上【實施方式】參考伴隨圖形而描述了揭示之裝置和方法的多樣特色和功能。雖然已經在此揭示了多樣的方面和具體態樣，不過熟於此技藝者將明白有其他方面和具體態樣。本發明之不同方面裡的所有具體態樣可加以組合，除非上下文明確另有所指示。在此揭示之多樣的方面和具體態樣是為了示範而不打算是限制性的，真正的範圍和精神則如以下申請專利範圍所指出。
100‧‧‧方法
105~120‧‧‧步驟

Claims (15)

  1. 一種方法，該方法包括：提供導電基板，其具有第一側和第二側；施加至少一預先反應層到該基板的該第二側，其中該預先反應層包括導電材料；將該至少一預先反應層暴露於含硒或含硫氣體；以及施加至少一層的導電抗氧化材料到該第二側。
  2. 如申請專利範圍第1項的方法，其中該至少一預先反應層包括鈮、鉬鈮合金、鉬鈦合金、鉬鉭合金、鉬鉻合金、鈦、鈦氮合金或鎢碳合金。
  3. 如申請專利範圍第1或2項的方法，其中該至少一層的導電抗氧化材料包括錫、錫鉍合金、鉬鈮合金、鉬鈦合金、鉬鉭合金、鉬鉻合金、鈦、鈦氮合金、鎢碳合金、鎢氮合金、銀、鉬或導電氧化物。
  4. 如申請專利範圍第1或2項的方法，其中施加該至少一導電的抗氧化層到該第二側發生在將該至少一預先反應層暴露於氧化條件之前。
  5. 如申請專利範圍第1或2項的方法，其中施加該至少一層的導電抗氧化材料到該第二側包括：在該至少一預先反應層暴露於氧化條件之前，施加第一層的導電抗氧化材料到該第二側；以及在該第一層的導電抗氧化材料暴露於氧化條件之後，施加第二層的導電抗氧化材料到該第二側。
  6. 如申請專利範圍第1或2項的方法，其中將該至少一預先反應層暴露於含硒或含硫氣體發生在範圍從大約350℃到大約800℃的溫度和範圍從 大約大氣壓到大約10-5托耳的壓力。
  7. 如申請專利範圍第1或2項的方法，其中該金屬箔包括不鏽鋼、鋁、鈦、鉬、鋼或銅。
  8. 如申請專利範圍第1或2項的方法，其中該至少一預先反應層具有範圍從大約50奈米到大約300奈米的厚度。
  9. 如申請專利範圍第1或2項的方法，其中該層的導電抗氧化材料具有範圍從大約50奈米到大約300奈米的厚度。
  10. 如申請專利範圍第1或2項的方法，其進一步包括：施加一或更多層的光伏元件結構到該基板的該第一表面。
  11. 如申請專利範圍第1或2項的方法，其進一步包括：經由可撓性導體而將該至少一層的導電抗氧化材料連接到配置在第二薄可撓性基板上之光伏元件結構的頂面，以形成一捲電整合的互連薄膜太陽能電池材料。
  12. 一種裝置，其包括：導電基板，其具有第一側和第二側；光伏元件結構，其附著於該導電基板的該第一側；至少一導電材料層，其附著於該基板的該第二側；至少部分的該至少一導電材料，其與硒或硫反應；以及至少一層的導電抗氧化材料，其附著於該導電材料的反應部分。
  13. 如申請專利範圍第12項的裝置，其中該至少一導電材料層包括鈮、鉬鈮合金、鉬鈦合金、鉬鉭合金、鉬鉻合金、鈦、鈦氮合金或鎢碳合金。
  14. 如申請專利範圍第12或13項的裝置，其中該至少一導電材料層包 括鈮。
  15. 如申請專利範圍第12或13項的方法，其中該至少一層的導電抗氧化材料包括錫、錫鉍合金、鉬鈮合金、鉬鈦合金、鉬鉭合金、鉬鉻合金、鈦、鈦氮合金、鎢碳合金、鎢氮合金、銀、鉬或導電氧化物。
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