TW201544636A - Copper foil having carrier, manufacturing method for producing the copper foil having carrier, copper clad laminate and printed wiring board using the copper foil having carrier - Google Patents

Copper foil having carrier, manufacturing method for producing the copper foil having carrier, copper clad laminate and printed wiring board using the copper foil having carrier Download PDF

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TW201544636A
TW201544636A TW104114623A TW104114623A TW201544636A TW 201544636 A TW201544636 A TW 201544636A TW 104114623 A TW104114623 A TW 104114623A TW 104114623 A TW104114623 A TW 104114623A TW 201544636 A TW201544636 A TW 201544636A
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carrier
copper foil
layer
organic
copper
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TW104114623A
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TWI582275B (en
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Kenichiro Iwakiri
Ayumu Tateoka
Hiroyuki Watanabe
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Mitsui Mining & Smelting Co
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/04Wires; Strips; Foils
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/20Separation of the formed objects from the electrodes with no destruction of said electrodes
    • C25D1/22Separating compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing & Machinery (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

The purpose of the present invention is to provide a copper foil having carrier which would be peeled stably with decreasing bias of the peel strength between the interface of the copper foil layer and the carrier. To achieve the purpose, a CV of the peel strength between the carrier and the copper foil of the copper foil having carrier lower than 0.2 is used through the medium of the interface layer on carrier surface of the copper foil having carrier which has copper layer. Therefore, a copper foil having stable-peeling carrier in width direction of the carrier with a lower bias of peel strength is obtained.

Description

具有載體之銅箔、具有載體之銅箔之製造方法、使用具有載體之銅箔所得之貼 銅積層板及印刷配線板 Copper foil with carrier, method for producing copper foil with carrier, paste obtained by using copper foil with carrier Copper laminate and printed wiring board

本申請案之發明係有關具有載體之銅箔、具有載體之銅箔之製造方法、使用具有載體之銅箔所得之貼銅積層板及印刷配線板。 The invention of the present application relates to a copper foil having a carrier, a method for producing a copper foil having a carrier, a copper-clad laminate obtained by using a copper foil having a carrier, and a printed wiring board.

過去以來,具有載體之銅箔已使用作為在電氣、電子產業領域所用之印刷配線板製造之材料。通常,該具有載體之銅箔藉由熱壓成形,而與預浸片等之絕緣層構成材積層作成貼銅積層板,而用於印刷配線板之製造。 In the past, a copper foil having a carrier has been used as a material for manufacturing a printed wiring board used in the electrical and electronic industries. Usually, the copper foil with a carrier is formed by heat-pressing, and an insulating layer such as a prepreg or the like is formed into a copper-clad laminate to be used for the production of a printed wiring board.

尤其,近年來之電子機器要求輕薄短小化,伴隨此而要求尺寸縮小化或低消耗電力化,組裝於該等電子機器之印刷配線板由於亦根據該尺寸縮小化等之要求,而使配線電路之導體厚度減薄,設置細間距之配線電路之印刷配線板設計變得必要。因此,欲實現根據該等市場之要求,於製造該印刷配線板時,已廣泛使用具有載體之銅箔。 In particular, in recent years, electronic devices have been required to be thinner and lighter, and accordingly, reduction in size and power consumption have been demanded, and printed wiring boards incorporated in such electronic devices have been required to be shrunk according to the size reduction. The thickness of the conductor is reduced, and the design of a printed wiring board in which a fine pitch wiring circuit is provided becomes necessary. Therefore, in order to achieve the requirements of these markets, a copper foil having a carrier has been widely used in the production of the printed wiring board.

該具有載體之銅箔係藉由熱壓成形,而與絕緣層構成材積層作成貼銅積層板後,自該貼銅積層板剝下載體而去除之可剝離 型之具有載體之銅箔。該可剝離型之具有載體之銅箔於市面上已供給有種種具備剝離層之具有載體之銅箔。 The copper foil with a carrier is formed by hot-pressing, and the copper-clad laminate is formed by laminating the insulating layer with a layer of the insulating layer, and then peeled off from the copper-clad laminate to be peeled off. A copper foil with a carrier. The peelable type copper foil with a carrier has been supplied with various kinds of copper foils having a release layer and having a carrier.

例如,專利文獻1所揭示之具有載體之銅箔係具有銅箔載體、積層於銅箔載體上之中間層、及形成於中間層上之極薄銅層的具有載體之銅箔,其中中間層係在銅箔載體上依序積層鎳與鉬或鈷或鉬-鈷合金而成。亦即,專利文獻1之具有載體之銅箔係在銅箔載體與極薄銅層之間,形成有使用鎳與鉬或鈷等之無機材之剝離層者。 For example, the copper foil with a carrier disclosed in Patent Document 1 has a copper foil carrier, an intermediate layer laminated on the copper foil carrier, and a copper foil with a carrier formed on the intermediate layer, wherein the intermediate layer It is formed by sequentially laminating nickel and molybdenum or cobalt or molybdenum-cobalt alloy on a copper foil carrier. In other words, the copper foil with a carrier of Patent Document 1 is formed between a copper foil carrier and an ultra-thin copper layer, and a release layer using an inorganic material such as nickel and molybdenum or cobalt is formed.

又,專利文獻2所揭示之具有載體之電解銅箔係在載體表面上具備接合界面層,且於該接合界面層上具備輔助金屬層及電解銅箔層者,載體係使用具有粗糙度(Rz)0.05μm~4.0μm之平滑面之薄膜或金屬材,於該載體之平滑面側具備使用有機劑或金屬材形成之接合界面層,於該接合界面層之表層上具備作為輔助金屬層之0.08μm~2.0μm厚之鎳層或0.05μm~3.0μm厚之鈷層,於該輔助金屬層之表層上具備由主體(bulk)層與微細銅粒所成之電解銅箔層。亦即,專利文獻2之具有載體之電解銅箔係於載體與電解銅箔層之間,形成有使用有機劑或金屬材之接合界面層、與使用鎳或鈷等之無機材之輔助金屬層。 Further, the electrodeposited copper foil having a carrier disclosed in Patent Document 2 is provided with a joint interface layer on the surface of the carrier, and an auxiliary metal layer and an electrolytic copper foil layer are provided on the joint interface layer, and the carrier has roughness (Rz). a film or a metal material having a smooth surface of 0.05 μm to 4.0 μm, having a bonding interface layer formed of an organic agent or a metal material on the smooth surface side of the carrier, and 0.08 as an auxiliary metal layer on the surface layer of the bonding interface layer A nickel layer of μm~2.0 μm thick or a cobalt layer of 0.05 μm~3.0 μm thick has an electrolytic copper foil layer formed of a bulk layer and fine copper particles on the surface layer of the auxiliary metal layer. That is, the electrodeposited copper foil of the patent document 2 is formed between the carrier and the electrodeposited copper foil layer, and is formed with a bonding interface layer using an organic agent or a metal material, and an auxiliary metal layer using an inorganic material such as nickel or cobalt. .

【先前技術文獻】 [Previous Technical Literature]

【專利文獻】 [Patent Literature]

【專利文獻1】日本專利第5228130號 [Patent Document 1] Japanese Patent No. 5228130

【專利文獻2】日本特開2001-308477號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2001-308477

然而,專利文獻1中,藉由電解處理而於載體表面形成由鎳與鉬或鈷等所成之中間層時,構成中間層之鎳及鉬或鈷之附著量 會對該載體與極薄銅層之剝離強度帶來影響。該鎳之附著量不足而鉬或鈷之附著量過多時,銅箔載體與中間層之接著力變小,會有處理時產生不期望之載體剝離之情況。除此之外,載體剝離時會有中間層殘留於極薄銅層之情況。且,鎳之附著量過多時,於極薄銅層側之表面針孔變多,導致印刷配線板之性能不良。 However, in Patent Document 1, when an intermediate layer made of nickel, molybdenum or cobalt is formed on the surface of the carrier by electrolytic treatment, the adhesion amount of nickel and molybdenum or cobalt constituting the intermediate layer is obtained. This will affect the peel strength of the carrier and the ultra-thin copper layer. When the amount of adhesion of nickel is insufficient and the amount of adhesion of molybdenum or cobalt is too large, the adhesion between the copper foil carrier and the intermediate layer becomes small, and undesired carrier peeling may occur during handling. In addition to this, when the carrier is peeled off, there is a case where the intermediate layer remains in the extremely thin copper layer. Further, when the amount of adhesion of nickel is too large, pinholes are formed on the surface of the ultra-thin copper layer side, resulting in poor performance of the printed wiring board.

再者,形成中間層之電解處理時,電極端部相較於電極中心部電流更易於集中,而處於電流密度提高之傾向,因此銅箔載體全體之電流密度變得不均。尤其,使用寬廣之電解裝置進行電解處理時,電流密度之不均一性變得顯著。因此,難以於銅箔載體表面均一地形成鎳層及由鉬或鈷等所成之層,尤其,剝離強度於銅箔載體之寬度方向產生偏差。 Further, in the electrolytic treatment for forming the intermediate layer, the electrode end portion is more likely to concentrate than the current at the center of the electrode, and the current density tends to increase, so that the current density of the entire copper foil carrier becomes uneven. In particular, when electrolytic treatment is performed using a wide electrolytic apparatus, the unevenness of current density becomes remarkable. Therefore, it is difficult to uniformly form a nickel layer and a layer made of molybdenum or cobalt on the surface of the copper foil carrier, and in particular, the peel strength varies in the width direction of the copper foil carrier.

於銅箔載體與極薄銅箔之間剝離強度於銅箔載體之寬度方向有偏差時,處理時載體會部分地剝離,與絕緣層構成材積層後,剝除載體時,會有部分地該載體難以剝離之情況。尤其,亦有與絕緣層構成材之加壓步驟後部分的載體難以剝離,於極薄銅層上產生破裂之情況。且,載體之剝離強度部分較大時,會對基板施加必要以上之負擔,而成為基板翹曲或扭曲之原因。 When the peel strength between the copper foil carrier and the ultra-thin copper foil varies in the width direction of the copper foil carrier, the carrier is partially peeled off during the treatment, and when the carrier layer is laminated with the insulating layer, the carrier may be partially removed. The case where the carrier is difficult to peel off. In particular, there is a case where the carrier of the insulating layer is hardly peeled off after the pressing step, and cracking occurs on the extremely thin copper layer. Further, when the peel strength of the carrier is large, a load of more than necessary is applied to the substrate, which causes the substrate to warp or twist.

另一方面,專利文獻2之具有載體之電解銅箔的情況,於使用有機劑之接合界面層之表層上,使用鎳及鈷等之無機材,藉由電解處理形成輔助金屬層。因此,專利文獻2之具有載體之電解銅箔,亦與專利文獻1之具有載體之銅箔同樣,於電解處理時,電極端部相較於電極中心部電流更易於集中,而處於電流密度變高之傾向,因此難以均一地形成輔助金屬層,難以充分減低具有載體之電解銅箔之剝離強度於寬度方向之偏差。 On the other hand, in the case of the electrodeposited copper foil having a carrier of Patent Document 2, an auxiliary metal layer is formed by electrolytic treatment using an inorganic material such as nickel or cobalt on the surface layer of the joint interface layer using the organic agent. Therefore, the electrolytic copper foil having a carrier of Patent Document 2 is also similar to the copper foil having a carrier of Patent Document 1, and the electrode end portion is more likely to concentrate than the current at the center of the electrode during the electrolytic treatment, and the current density is changed. Since the tendency is high, it is difficult to form the auxiliary metal layer uniformly, and it is difficult to sufficiently reduce the deviation of the peel strength of the electrodeposited copper foil having the carrier in the width direction.

基於上述,本發明之目的在於提供使載體與銅箔層之界面的剝離強度安定之具有載體之銅箔。 Based on the above, it is an object of the present invention to provide a copper foil having a carrier which stabilizes the peel strength of the interface between the carrier and the copper foil layer.

本發明人等藉由採用下述之具有載體之銅箔而終於解決上述課題。 The present inventors have finally solved the above problems by using the following copper foil having a carrier.

具有載體之銅箔:本發明之具有載體之銅箔,其特徵係於載體之表面上介隔接合界面層而具備銅箔層者,其中該載體與該銅箔層之剝離強度之變動係數(CV)為0.2以下。 Copper foil with carrier: The copper foil with carrier of the present invention is characterized in that a copper foil layer is interposed on the surface of the carrier by interposing the interface layer, wherein the variation coefficient of the peel strength of the carrier and the copper foil layer ( CV) is 0.2 or less.

具有載體之銅箔之製造方法:本發明之具有載體之銅箔之製造方法係如上述之具有載體之銅箔之製造方法,且特徵係具備以下所述步驟A、步驟B、步驟C。 A method for producing a copper foil having a carrier: a method for producing a copper foil having a carrier according to the present invention is a method for producing a copper foil having a carrier as described above, and the method includes the following steps A, B, and C.

步驟A:於載體表面形成剝離層作為接合界面層之步驟;步驟B:使用作為金屬成分源之含有硫酸鹽,且氯化物離子濃度為1g/L以下之含有機成分之溶液,於該剝離層表面形成含有金屬成分之有機層作為前述接合界面層之一部分之步驟;C步驟:於該含有金屬成分之有機層表面形成銅箔層之步驟。 Step A: a step of forming a peeling layer on the surface of the carrier as a bonding interface layer; and step B: using a solution containing an organic component as a source of a metal component and having a chloride ion concentration of 1 g/L or less, in the peeling layer a step of forming an organic layer containing a metal component as a part of the bonding interface layer; and a step of forming a copper foil layer on the surface of the organic component containing the metal component.

貼銅積層板:本發明之貼銅積層板之特徵係使用如上述之具有載體之銅箔而得。 Copper-clad laminate: The copper-clad laminate of the present invention is characterized by using a copper foil having a carrier as described above.

印刷配線板:本發明之印刷配線板之特徵係使用如上述之具有載體之銅箔而得。 Printed wiring board: The printed wiring board of the present invention is characterized by using a copper foil having a carrier as described above.

依據本發明之具有載體之銅箔,由於載體與銅箔層之剝離強度之變動係數(CV)為0.2以下,故於載體寬度方向之剝離強度之偏差較小,可安定地剝離載體。 According to the copper foil with a carrier of the present invention, since the coefficient of variation (CV) of the peel strength of the carrier and the copper foil layer is 0.2 or less, the variation in peel strength in the width direction of the carrier is small, and the carrier can be stably peeled off.

且,依據本發明之具有載體之銅箔之製造方法,藉由抑制氯化物離子混入含有金屬成分之有機層中,而金屬成分不會與氯化物離子反應,而可有效率地與有機成分結合。因此,可於剝離層表面安定地形成含有金屬成分之有機層。 Further, according to the method for producing a copper foil with a carrier of the present invention, by inhibiting the incorporation of chloride ions into the organic layer containing the metal component, the metal component does not react with the chloride ion, and can be efficiently combined with the organic component. . Therefore, an organic layer containing a metal component can be stably formed on the surface of the release layer.

1‧‧‧具有載體之銅箔 1‧‧‧ copper foil with carrier

2‧‧‧載體 2‧‧‧ Carrier

3‧‧‧剝離層 3‧‧‧ peeling layer

4‧‧‧含有金屬成分之有機層 4‧‧‧Organic layer containing metal components

5‧‧‧銅箔層 5‧‧‧copper layer

6‧‧‧接合界面層 6‧‧‧ joint interface layer

圖1係顯示本發明之具有載體之銅箔之層構成的剖面示意圖。 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing the constitution of a copper foil having a carrier of the present invention.

圖2係剝離強度之偏差評價所用之試料製作之示意圖。 Fig. 2 is a schematic view showing the preparation of a sample used for the evaluation of the deviation of the peel strength.

圖3係顯示實施例2之各試料之剝離強度測定結果之圖,表中之數值單位均為g/cm。 Fig. 3 is a graph showing the results of measurement of the peel strength of each sample of Example 2, and the numerical unit in the table is g/cm.

以下,說明本發明之具有載體之銅箔、具有載體之銅箔之製造方法、使用具有載體之銅箔所得之貼銅積層板及印刷配線板之實施形態。 Hereinafter, an embodiment of a copper foil having a carrier, a method for producing a copper foil having a carrier, a copper-clad laminate obtained by using a copper foil having a carrier, and a printed wiring board will be described.

<具有載體之銅箔> <copper foil with carrier>

本發明之具有載體之銅箔,其特徵係於載體之表面上介隔接合界面層而具備銅箔層的具有載體之銅箔,其中該載體與該銅箔層之剝離強度之變動係數(CV)為0.2以下。圖1係顯示本發明之具有載體之銅箔之基本層構成的剖面示意圖。又,圖1係記載為可掌握各層之積層狀態者,並非反映現實上之各層厚度者。如圖1所示,本發明之具有載體之銅箔1具備載體2/接合界面層6/銅箔層5之層構成。以下中,針對「載體與銅箔層之剝離強度之變動係數(CV)」、「載體」、「接合界面層」、「銅箔層」依序加以說明。 The copper foil with a carrier of the present invention is characterized in that the copper foil with a carrier having a copper foil layer interposed on the surface of the carrier and interposing the interface layer, wherein the carrier and the copper foil layer have a coefficient of variation of the peel strength (CV) ) is 0.2 or less. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing the constitution of a base layer of a copper foil having a carrier of the present invention. In addition, FIG. 1 is described as being able to grasp the state of the layers of each layer, and does not reflect the thickness of each layer in reality. As shown in Fig. 1, the copper foil 1 having a carrier of the present invention comprises a layer structure of a carrier 2/joining interface layer 6/copper foil layer 5. Hereinafter, the "coefficient of variation (CV)" of the peel strength of the carrier and the copper foil layer, the "carrier", the "joint interface layer", and the "copper foil layer" will be described in order.

載體與銅箔層之剝離強度之變動係數(CV):本發明之具有載體之銅箔,其載體與銅箔層之剝離強度之變動係數(CV)為0.2以下。該載體與銅箔層之更佳剝離強度之變動係數(CV)為0.15以下。該剝離強度係依據JIS C 6481-1996進行測定時之值。而且該剝離強度之變動係數(CV)係基於具有載體之銅箔於寬度方向及長度方向之各部位之剝離強度之標準偏差(stdev)與平均值(ave)而算出之值,成為載體之剝離強度偏差之指標。具體而言,變動係數(CV)係藉如下所示之式 求得:變動係數(CV)=標準偏差(stdev)/平均值(ave)…(式) Coefficient of variation (CV) of the peel strength of the carrier and the copper foil layer: The copper foil with a carrier of the present invention has a coefficient of variation (CV) of the peel strength of the carrier and the copper foil layer of 0.2 or less. The variation coefficient (CV) of the peel strength of the carrier and the copper foil layer is 0.15 or less. The peel strength is a value measured in accordance with JIS C 6481-1996. Further, the coefficient of variation (CV) of the peel strength is a value calculated based on the standard deviation (stdev) and the average value (ave) of the peel strength of each portion of the copper foil having the carrier in the width direction and the longitudinal direction, and is a peeling of the carrier. Indicator of intensity deviation. Specifically, the coefficient of variation (CV) is based on the following formula. Find: coefficient of variation (CV) = standard deviation (stdev) / average (ave) ... (form)

本發明由於該變動係數(CV)為0.2以下,故於載體與銅箔層之間,寬度方向上之剝離強度之偏差較小。因此,可避免因剝離強度之偏差大而產生之剝除作業性惡化,可安定地剝離載體。所以,載體剝除時,不會於銅箔層表面殘留載體之斷片。此處,雖未決定剝離強度之變動係數(CV)之下限值,但該變動係數(CV)越小,具有載體之銅箔之全區域中之剝離強度之均一性越高,越可提高製品品質。 In the present invention, since the coefficient of variation (CV) is 0.2 or less, the variation in the peel strength in the width direction between the carrier and the copper foil layer is small. Therefore, it is possible to avoid the deterioration of the peeling workability due to the large deviation of the peel strength, and it is possible to stably peel off the carrier. Therefore, when the carrier is peeled off, the carrier fragments are not left on the surface of the copper foil layer. Here, although the lower limit of the coefficient of variation (CV) of the peel strength is not determined, the smaller the coefficient of variation (CV), the higher the uniformity of the peel strength in the entire region of the copper foil having the carrier, and the higher the Product quality.

又,本發明之具有載體之銅箔較好載體與銅箔層之剝離強度為3g/cm~50g/cm,更好為5g/cm~30g/cm,進而更好為7g/cm~20g/cm。一般,載體與銅箔層之界面中之剝離強度越小,剝離作業越容易。然而,剝離強度低於3g/cm時,具有載體之銅箔之製造時之捲取或貼銅積層板之製造時等中,載體與銅箔會不期望地部分分離而膨起,容易發生錯開等之不良。另一方面,剝離強度超過50g/cm時,難以自銅箔層剝除載體。 Further, the copper foil with a carrier of the present invention preferably has a peel strength of the carrier and the copper foil layer of from 3 g/cm to 50 g/cm, more preferably from 5 g/cm to 30 g/cm, and even more preferably from 7 g/cm to 20 g/ Cm. Generally, the smaller the peel strength in the interface between the carrier and the copper foil layer, the easier the peeling operation. However, when the peeling strength is less than 3 g/cm, the carrier and the copper foil are undesirably partially separated and swelled during the production of the copper foil having the carrier, or the like, and the copper foil is likely to be staggered. Waiting for the bad. On the other hand, when the peel strength exceeds 50 g/cm, it is difficult to remove the carrier from the copper foil layer.

載體:本發明中,載體係為了提高銅箔厚度較薄之銅箔層之處理性所用之具備特定厚度之材料,材質並未特別限定。然而,於銅箔層係藉由電解形成時,較好使用例如鋁箔、銅箔、表面經金屬塗覆之樹脂薄膜等之可通電材料作為載體。且,載體厚度並未特別限制,使用銅箔作為載體時,可慮處理性時,較好為7μm~210μm。作為載體之銅箔上,於期待作為防止皺褶發生之補強材之角色時,必須為至少7μm之厚度。 Carrier: In the present invention, the carrier is a material having a specific thickness for improving the copper foil layer having a thin copper foil thickness, and the material is not particularly limited. However, when the copper foil layer is formed by electrolysis, an energizable material such as an aluminum foil, a copper foil, or a metal-coated resin film is preferably used as the carrier. Further, the thickness of the carrier is not particularly limited, and when a copper foil is used as the carrier, the handleability is preferably from 7 μm to 210 μm. The copper foil as a carrier is required to have a thickness of at least 7 μm when it is expected to function as a reinforcing material for preventing wrinkles from occurring.

接合界面層:本發明中,接合界面層係以夾持於載體與銅箔層之間之狀態存在,成為可使載體自銅箔層剝除之層。本發明中之具有載體之銅箔中,較好接合界面層係由設於載體表面之「剝離層」與設於該剝離層表面之「含有金屬成分之有機層」所成。於上述 之圖1中,接合界面層6係由剝離層3及含有金屬成分之有機層4所成。本發明中,剝離層3較好使用「有機剝離層」或「無機剝離層」之任一者。 Bonding Interface Layer: In the present invention, the bonding interface layer is present in a state of being sandwiched between the carrier and the copper foil layer, and is a layer which allows the carrier to be peeled off from the copper foil layer. In the copper foil having a carrier in the present invention, it is preferred that the bonding interface layer be formed of a "peeling layer" provided on the surface of the carrier and a "metal component-containing organic layer" provided on the surface of the release layer. Above In Fig. 1, the joint interface layer 6 is formed of a peeling layer 3 and an organic layer 4 containing a metal component. In the present invention, the release layer 3 preferably uses either an "organic release layer" or an "inorganic release layer".

「有機剝離層」中,作為有機成分較好使用自含氮有機化合物、含硫有機化合物及羧酸中選出之1種或2種以上而構成。具體而言,作為含氮有機化合物,較好使用具有取代基之三唑化合物的1,2,3-苯并三唑、羧基苯并三唑(以下稱為「CBTA」)、N’,N’-雙(苯并三唑基甲基)脲、1H-1,2,4-三唑及3-胺基-1,2,4-三唑等。而且,含硫有機化合物較好使用巰基本并噻唑、三硫代氰尿酸及2-苯并咪唑硫醇等。且,羧酸尤其較好使用單羧酸,其中,較好使用油酸、亞油酸及亞麻酸。而且,該有機剝離層之厚度較好為1nm~10nm。 In the "organic release layer", one or two or more selected from the group consisting of a nitrogen-containing organic compound, a sulfur-containing organic compound, and a carboxylic acid are preferably used as the organic component. Specifically, as the nitrogen-containing organic compound, 1,2,3-benzotriazole having a substituent of a triazole compound, carboxybenzotriazole (hereinafter referred to as "CBTA"), N', N is preferably used. '-Bis(benzotriazolylmethyl)urea, 1H-1,2,4-triazole and 3-amino-1,2,4-triazole and the like. Further, as the sulfur-containing organic compound, hydrazine basic thiazole, trithiocyanuric acid, 2-benzimidazole thiol or the like is preferably used. Further, as the carboxylic acid, a monocarboxylic acid is particularly preferably used, and among them, oleic acid, linoleic acid and linolenic acid are preferably used. Further, the thickness of the organic release layer is preferably from 1 nm to 10 nm.

另一方面,「無機剝離層」中,作為無機成分可使用鉻、鎳、鉬、鐵、鈦、鎢、磷、鋅、鉭、釩等之金屬,或該等所列舉之金屬之合金、或該等所列舉之金屬之氧化物、或該等所列舉之金屬之合金之氧化物等。例如,作為二元系合金,可使用鎳-鉻、鈷-鉻、鉻-鎢、鉻-銅、鉻-鐵、鉻-鈦等。且,作為三元系合金,可使用鎳-鐵-鉻、鎳-鉻-鉬、鎳-鉻-鎢、鎳-鉻-銅、鎳-鉻-磷、鈷-鐵-鉻、鈷-鉻-鉬、鈷-鉻-鎢、鈷-鉻-銅、鈷-鉻-磷等。而且,該無機剝離層之厚度較好為1nm~300nm,更好為2nm~50nm。 On the other hand, in the "inorganic release layer", as the inorganic component, a metal such as chromium, nickel, molybdenum, iron, titanium, tungsten, phosphorus, zinc, antimony or vanadium, or an alloy of the metals listed therein, or The oxides of the metals listed, or the oxides of the alloys of the metals listed therein. For example, as the binary alloy, nickel-chromium, cobalt-chromium, chromium-tungsten, chromium-copper, chromium-iron, chromium-titanium or the like can be used. Further, as the ternary alloy, nickel-iron-chromium, nickel-chromium-molybdenum, nickel-chromium-tungsten, nickel-chromium-copper, nickel-chromium-phosphorus, cobalt-iron-chromium, cobalt-chromium- can be used. Molybdenum, cobalt-chromium-tungsten, cobalt-chromium-copper, cobalt-chromium-phosphorus, and the like. Further, the thickness of the inorganic release layer is preferably from 1 nm to 300 nm, more preferably from 2 nm to 50 nm.

其次,含有金屬成分之有機層4較好與上述剝離層一起構成接合界面層。含有金屬成分之有機層係含有金屬成分與有機成分之層,較好係於載體表面設置剝離層後,設於該剝離層表面。藉由採用該含有金屬成分之有機層,而使剝離層之表面成為有機成分與無機成分共存之狀態。該含有金屬成分之有機層較好使用相對於金屬成分濃度為10g/L~50g/L共存有0.5mg/L~10mg/L之有機成分之含有有機成分之溶液藉由電解法而形成。因此,使用寬度較廣之電解裝置進行電 解處理時,於比電極之中心部電流更易集中之電極端部,不僅是金屬成分會附著而且有機成分亦會附著,而可避免金屬成分局部集中。所以,於剝離層之表面形成有機成分於金屬成分中均一分散之狀態。因此,可有效地減低於寬度方向之剝離強度之偏差,於加壓成形後,不會引起部分剝離不良,而可安定地剝離載體。 Next, the organic layer 4 containing a metal component preferably forms a joint interface layer together with the above-mentioned release layer. The organic layer containing a metal component contains a layer of a metal component and an organic component, and is preferably provided on the surface of the release layer after the release layer is provided on the surface of the carrier. By using the organic layer containing the metal component, the surface of the release layer is in a state in which the organic component and the inorganic component coexist. The organic component-containing organic layer is preferably formed by an electrolytic method using a solution containing an organic component having an organic component content of 0.5 mg/L to 10 mg/L in a concentration of 10 g/L to 50 g/L. Therefore, use a wide-width electrolysis device for electricity At the end of the electrode where the current is more concentrated than the current at the center of the electrode, not only the metal component adheres but also the organic component adheres, and local concentration of the metal component can be avoided. Therefore, a state in which the organic component is uniformly dispersed in the metal component is formed on the surface of the release layer. Therefore, it is possible to effectively reduce the deviation of the peel strength in the width direction, and after the press molding, the partial peeling failure is not caused, and the carrier can be stably peeled off.

且,含有金屬成分之有機層中所含之有機成分,較好使用上述之「有機剝離層」之作為有機成分所列舉之有機成分。上述有機成分於高溫之加壓成形時,不易產生載體及銅箔層之相互擴散。因此,含有金屬成分之有機層於剝離層表面中,以有機成分於金屬成分中均一分散之狀態存在,因此可有效地減低寬度方向之剝離強度之偏差。上述之金屬成分較好使用包含鎳及/或鈷作為主成分者。係由於加工成貼銅積層板時之耐熱安定性優,且對於載體之剝離特性不會產生變動之故。又,含有金屬成分之有機層厚度較好為5nm~100nm。若為該範圍內,則可更均一地形成含有金屬成分之有機層。 Further, as the organic component contained in the organic layer containing the metal component, the organic component exemplified as the organic component of the above-mentioned "organic release layer" is preferably used. When the organic component is press-formed at a high temperature, mutual diffusion of the carrier and the copper foil layer is less likely to occur. Therefore, the organic layer containing the metal component exists in the state in which the organic component is uniformly dispersed in the metal component on the surface of the release layer, so that the variation in the peel strength in the width direction can be effectively reduced. As the metal component described above, it is preferred to use nickel and/or cobalt as a main component. It is excellent in heat stability when processed into a copper-clad laminate, and does not change the peeling characteristics of the carrier. Further, the thickness of the organic layer containing a metal component is preferably from 5 nm to 100 nm. If it is in this range, the organic layer containing a metal component can be formed more uniformly.

銅箔層:銅箔層並未特別限定形成方法,但較好採用電解法。銅箔層係與絕緣層構成材積層作成貼銅積層板,用於電路形成。銅箔層之厚度並未特別限定,但較好為12μm以下。係因為比12μm厚之情況下,作為具有載體之銅箔之意義將被忽略之故。且,於銅箔層之表面可根據用途而施以防銹處理、矽烷偶合劑處理等之表面處理。例如,為了獲得錨定效果而施以粗化處理,藉此相較於未施以粗化處理之情況,可提高密著強度或耐熱性等。 Copper foil layer: The copper foil layer is not particularly limited in the formation method, but an electrolytic method is preferably used. The copper foil layer and the insulating layer constitute a material layer to form a copper laminated board for circuit formation. The thickness of the copper foil layer is not particularly limited, but is preferably 12 μm or less. Since it is thicker than 12 μm, the meaning as a copper foil having a carrier will be ignored. Further, the surface of the copper foil layer may be subjected to a surface treatment such as rustproof treatment or decane coupling agent treatment depending on the application. For example, in order to obtain an anchoring effect, a roughening treatment is applied, whereby adhesion strength, heat resistance, and the like can be improved as compared with the case where the roughening treatment is not applied.

<具有載體之銅箔之製造方法> <Method for Producing Copper Foil with Carrier>

本發明之具有載體之銅箔之製造方法係如上述之具有載體之銅箔之製造方法,且特徵係具備以下所述步驟A、步驟B、步驟C。以下針對每一個步驟加以說明。 The method for producing a copper foil with a carrier according to the present invention is a method for producing a copper foil having a carrier as described above, and the method includes the following steps A, B, and C. The following is a description of each step.

步驟A:步驟A係於載體表面形成剝離層作為接合界面層之步驟。步驟A較好係使用溶解有形成有機剝離層或無機剝離層之有機成分或無機成分所得之溶液,利用將載體浸漬於該溶液中之浸漬法;對於形成剝離層之面之淋洗法、噴霧法、滴加法及電鍍法等形成剝離層。但,本發明之剝離層之形成方法並不限定於本文所列舉之方法。 Step A: Step A is a step of forming a release layer on the surface of the carrier as a bonding interface layer. Step A is preferably a solution obtained by dissolving an organic component or an inorganic component which forms an organic release layer or an inorganic release layer, by a dipping method in which a carrier is immersed in the solution; a rinsing method and a spray for forming a surface of the release layer A peeling layer is formed by a method, a dropping method, an electroplating method, or the like. However, the method of forming the release layer of the present invention is not limited to the methods enumerated herein.

形成有機剝離層時,作為有機成分,如上述,可較好地使用自含氮有機化合物、含硫有機化合物、羧酸之中選擇之1種或2種以上混合者。另一方面,形成無機剝離層時,作為無機成分,如上述,可使用鉻、鎳、鉬、鐵、鈦、鎢、磷、鋅、鉭、釩等之金屬,或該等所列舉之金屬之合金、或該等所列舉之金屬之氧化物、或該等所列舉之金屬之合金之氧化物等。關於溶解有機成分或無機成分之溶液中之有機成分或無機成分之濃度、液溫、處理時間等,只要適當設定即可。 When the organic layer is formed, as the organic component, as described above, one or a mixture of two or more selected from the group consisting of a nitrogen-containing organic compound, a sulfur-containing organic compound, and a carboxylic acid can be preferably used. On the other hand, when the inorganic release layer is formed, as the inorganic component, as described above, a metal such as chromium, nickel, molybdenum, iron, titanium, tungsten, phosphorus, zinc, antimony or vanadium, or the like An alloy, or an oxide of the metal as exemplified, or an oxide of an alloy of the above-mentioned metals. The concentration of the organic component or the inorganic component in the solution in which the organic component or the inorganic component is dissolved, the liquid temperature, the treatment time, and the like may be appropriately set.

步驟B:步驟B係使用作為金屬成分源之含有硫酸鹽,且氯化物離子濃度為1g/L以下之含有機成分之溶液,於步驟A中所得之剝離層表面形成含有金屬成分之有機層作為前述接合界面層之一部分之步驟。步驟B係將形成有剝離層之載體浸漬於共存有金屬成分之含有有機成分之溶液中,對於剝離層表面配置陰極電極,藉由使該溶液電解,而可於剝離層表面形成含有金屬成分之有機層。 Step B: In step B, a solution containing an organic component containing a sulfate as a source of a metal component and having a chloride ion concentration of 1 g/L or less is used, and an organic layer containing a metal component is formed on the surface of the release layer obtained in the step A. The aforementioned step of joining a portion of the interface layer. In the step B, the carrier in which the release layer is formed is immersed in a solution containing an organic component in which a metal component is present, and a cathode electrode is disposed on the surface of the release layer, and by electrolyzing the solution, a metal component can be formed on the surface of the release layer. Organic layer.

作為形成含有金屬成分之有機層中使用之有機成分,可使用上述有機剝離層之形成中所列舉之有機成分。尤其,形成有機剝離層作為剝離層時,作為含有金屬成分之有機層之有機成分,較好使用與有機剝離層之形成中所用之有機成分相同者。另一方面,作為形成包含金屬成分之有機層所用之金屬成分,如上述,可較好地使用鎳及/或鈷。 As the organic component used for forming the organic layer containing the metal component, the organic component exemplified in the formation of the above organic release layer can be used. In particular, when the organic release layer is formed as the release layer, the organic component used as the organic layer containing the metal component is preferably the same as the organic component used in the formation of the organic release layer. On the other hand, as the metal component for forming the organic layer containing the metal component, as described above, nickel and/or cobalt can be preferably used.

又,含有有機成分之溶液為作為金屬成分源之含有硫酸鹽者,且氯化物離子濃度為1g/L以下之溶液。含有有機成分之溶液之氯化物離子濃度超過1g/L時,氯化物離子與金屬成分進行化學反應,而易於阻礙金屬成分與該有機成分之化學結合,但藉由抑制氯化物離子之混入,可促進金屬成分與有機成分之化學結合,可於剝離層表面安定地形成含有金屬成分之有機層。 Further, the solution containing the organic component is a solution containing a sulfate as a source of a metal component and having a chloride ion concentration of 1 g/L or less. When the chloride ion concentration of the solution containing the organic component exceeds 1 g/L, the chloride ion chemically reacts with the metal component, and it is easy to hinder the chemical combination of the metal component and the organic component, but by inhibiting the incorporation of chloride ions, The chemical combination of the metal component and the organic component is promoted, and the organic layer containing the metal component can be stably formed on the surface of the release layer.

又,含有有機成分之溶液中之有機成分與金屬成分之含有比例,相對於金屬成分濃度10g/L~50g/L,有機成分較好含有0.5m/L~10mg/L。若為該範圍內,則可實現充分改善金屬成分電鍍時之均一性。 Further, the content ratio of the organic component to the metal component in the solution containing the organic component is preferably from 0.5 m/L to 10 mg/L with respect to the metal component concentration of 10 g/L to 50 g/L. If it is in this range, the uniformity at the time of electroplating of a metal component can fully be improved.

再者,含有有機成分之溶液之電解條件較好為電流密度0.01A/dm2~10A/dm2Further, the electrolytic condition of the solution containing the organic component is preferably a current density of 0.01 A/dm 2 to 10 A/dm 2 .

C步驟:步驟C係於步驟B中所得之含有金屬成分之有機層表面形成銅箔層之步驟。步驟C中之銅箔層形成方法並未特別限制,但較好採用電解法。採用電解法時,可使用硫酸銅系溶液、焦磷酸銅系溶液、胺基磺酸銅系溶液、氰化銅系溶液等之電解液。步驟C係將形成有含有金屬成分之有機層之載體浸漬於該電解液中,對於含有金屬成分之有機層之表面配置陰極,藉由使該電解液電解,而可於含有金屬成分之有機層表面形成銅箔層。又,考慮長期保存性等,亦可於銅箔層表面上施以防銹處理。 Step C: Step C is a step of forming a copper foil layer on the surface of the organic layer containing the metal component obtained in Step B. The method of forming the copper foil layer in the step C is not particularly limited, but an electrolytic method is preferably employed. When the electrolysis method is used, an electrolyte solution such as a copper sulfate-based solution, a copper pyrophosphate-based solution, an ammonium sulfonate-based solution, or a copper cyanide-based solution can be used. Step C: immersing a carrier in which an organic layer containing a metal component is formed in the electrolytic solution, and disposing a cathode on a surface of the organic layer containing the metal component, and electrolyzing the electrolyte solution to form an organic layer containing a metal component A copper foil layer is formed on the surface. Further, in consideration of long-term storage properties and the like, rust-preventing treatment may be applied to the surface of the copper foil layer.

<貼銅積層板之形態> <Form of copper laminated board>

本發明之貼銅積層板之特徵係使用上述之具有載體之銅箔所得。本發明中所謂貼銅積層板之概念係包含硬質貼銅積層板與可撓性貼銅積層板兩者。若為硬質貼銅積層板,則可使用熱加壓方式或連續層合方式製造。而且,若為可撓性貼銅積層板,則可使用輥層合方式或澆鑄方式。 The copper-clad laminate of the present invention is characterized by using the above-described copper foil having a carrier. The concept of the copper-clad laminate in the present invention includes both a hard copper-clad laminate and a flexible copper-clad laminate. In the case of a hard copper-clad laminate, it can be produced by a hot press method or a continuous lamination method. Further, in the case of a flexible copper-clad laminate, a roll lamination method or a casting method can be used.

本發明之貼銅積層板中,所積層之載體與銅箔層之剝離強度之變動係數(CV)為0.2以下。因此,該貼銅積層板由於所積層之載體與銅箔層之於載體寬度方向之剝離強度之偏差較小,故可自銅箔層安定地剝離載體。 In the copper-clad laminate of the present invention, the coefficient of variation (CV) of the peel strength of the carrier and the copper foil layer to be laminated is 0.2 or less. Therefore, since the copper-clad laminate has a small deviation from the peel strength of the laminated carrier and the copper foil layer in the width direction of the carrier, the carrier can be stably peeled off from the copper foil layer.

<印刷配線板之形態> <Form of printed wiring board>

本發明之印刷配線板之特徵係使用上述之具有載體之銅箔所得。關於本發明之印刷配線板之製造方法並未特別限定。例如若將上述之硬質貼銅積層板進行蝕刻加工等而形成電路,則可獲得硬質印刷配線板。且,若將上述之可撓性貼銅積層板進行蝕刻加工等而形成電路,則可獲得具備良好彎曲性能之可撓性印刷配線板。本發明之具有載體之銅箔中,所積層之載體與銅箔層之剝離強度之變動係數(CV)為0.2以下,因此所積層之載體與銅箔層之於載體寬度方向之剝離強度之偏差較小,故可自銅箔層安定地剝離載體。 The printed wiring board of the present invention is characterized by using the above-described copper foil having a carrier. The method for producing the printed wiring board of the present invention is not particularly limited. For example, when the hard copper-clad laminate is etched or the like to form an electric circuit, a hard printed wiring board can be obtained. In addition, when the flexible copper-clad laminate is etched or the like to form an electric circuit, a flexible printed wiring board having good bending performance can be obtained. In the copper foil with a carrier of the present invention, the coefficient of variation (CV) of the peel strength of the layered carrier and the copper foil layer is 0.2 or less, so that the deviation of the peel strength between the carrier of the layer and the copper foil layer in the width direction of the carrier Smaller, the carrier can be stably stripped from the copper foil layer.

接著,針對本發明之具有載體之銅箔之實施例加以說明。實施例1~實施例3中,僅形成有機層之溶液中之有機成分含量不同,其他製作條件均相同。因此,針對實施例1加以說明後,關於實施例2及實施例3則針對與實施例1不同之處加以說明。 Next, an embodiment of the copper foil with a carrier of the present invention will be described. In Examples 1 to 3, the content of the organic component in the solution in which only the organic layer was formed was different, and the other production conditions were the same. Therefore, with reference to the first embodiment, the second embodiment and the third embodiment will be described with respect to differences from the first embodiment.

【實施例1】 [Example 1]

實施例1中,作為載體係使用寬度1350mm、厚度18μm之電解銅箔,浸漬於硫酸濃度150g/L、液溫30℃之稀硫酸溶液中30秒進行酸洗處理,將附著於表面之油脂成分或表面氧化被膜去除。 In the first embodiment, an electrolytic copper foil having a width of 1350 mm and a thickness of 18 μm was used as a carrier, and it was immersed in a dilute sulfuric acid solution having a sulfuric acid concentration of 150 g/L and a liquid temperature of 30 ° C for 30 seconds to carry out pickling treatment, and the oil component adhered to the surface was applied. Or the surface oxide film is removed.

其次,水洗已進行酸洗處理之載體後,浸漬於CBTA濃度5g/L、液溫40℃、pH5之溶液中30秒,於該載體表面形成厚度5nm之有機剝離層。 Next, the carrier which had been subjected to the pickling treatment was washed with water, and then immersed in a solution having a CBTA concentration of 5 g/L, a liquid temperature of 40 ° C, and a pH of 5 for 30 seconds to form an organic peeling layer having a thickness of 5 nm on the surface of the carrier.

接著,將形成有有機剝離層之載體浸漬於硫酸鎳濃度240g/L、CBTA濃度0.5mg/L、液溫40℃、pH3之溶液中,以電流密度 8A/dm2之條件進行電解,以使具有有機剝離層與含有金屬成分之有機層的接合界面層全體厚度成為15nm之方式,於有機剝離層之表面形成含有金屬成分之有機層。本實施例中,形成含有金屬成分之有機層所用之溶液由於未使用氯化鎳作為金屬成分源,因此氯化物離子濃度為1g/L以下。 Next, the carrier on which the organic release layer was formed was immersed in a solution having a nickel sulfate concentration of 240 g/L, a CBTA concentration of 0.5 mg/L, a liquid temperature of 40 ° C, and a pH of 3, and electrolysis was carried out under the conditions of a current density of 8 A/dm 2 . The thickness of the joint interface layer having the organic release layer and the organic layer containing the metal component was 15 nm, and an organic layer containing a metal component was formed on the surface of the organic release layer. In the present embodiment, since the solution for forming the organic layer containing the metal component is not used as the metal component source, the chloride ion concentration is 1 g/L or less.

隨後,將形成有包含金屬成分之有機層的載體浸漬於銅濃度65g/L、硫酸濃度50g/L、液溫45℃之銅電解液中,以電流密度15A/dm2之條件電解,於含有金屬成分之有機層表面形成厚度3μm之銅箔層。接著,將形成有銅箔層之載體進行水洗後,進行防銹處理,獲得依載體/接合界面層(有機剝離層/含有金屬成分之有機層)/銅箔層之順序積層之具有載體之銅箔。 Subsequently, the carrier in which the organic layer containing the metal component is formed is immersed in a copper electrolytic solution having a copper concentration of 65 g/L, a sulfuric acid concentration of 50 g/L, and a liquid temperature of 45 ° C, and is electrolyzed under the conditions of a current density of 15 A/dm 2 . A copper foil layer having a thickness of 3 μm was formed on the surface of the organic layer of the metal component. Next, the carrier on which the copper foil layer was formed was washed with water, and then subjected to rust-preventing treatment to obtain a copper having a carrier laminated in the order of the carrier/bonding interface layer (organic release layer/organic component containing metal component)/copper foil layer. Foil.

【實施例2】 [Example 2]

實施例2中,將形成含有金屬成分之有機層的溶液之CBTA濃度設為2mg/L。 In Example 2, the CBTA concentration of the solution forming the organic layer containing the metal component was set to 2 mg/L.

【實施例3】 [Example 3]

實施例3中,將形成含有金屬成分之有機層的溶液之CBTA濃度設為5mg/L。 In Example 3, the CBTA concentration of the solution forming the organic layer containing the metal component was set to 5 mg/L.

[比較例1] [Comparative Example 1]

比較例1中,除了作為形成含有金屬成分之有機層之溶液係使用不含有有機分,硫酸鎳濃度240g/L之溶液以外,以與實施例1同樣條件,製作比較例1之具有載體之銅箔。 In Comparative Example 1, a copper having a carrier of Comparative Example 1 was produced under the same conditions as in Example 1 except that a solution containing no organic component and a nickel sulfate concentration of 240 g/L was used as a solution for forming an organic layer containing a metal component. Foil.

[比較例2] [Comparative Example 2]

比較例2中,作為形成含有金屬成分之有機層之溶液,係使用硫酸鎳濃度240g/L、氯化鎳濃度50g/L、CBTA濃度2mg/L之溶液。該溶液之氯化物離子濃度為15g/L。除此以外,以與實施例1同樣條件,製作比較例2之具有載體之銅箔。 In Comparative Example 2, as a solution for forming an organic layer containing a metal component, a solution having a nickel sulfate concentration of 240 g/L, a nickel chloride concentration of 50 g/L, and a CBTA concentration of 2 mg/L was used. The solution had a chloride ion concentration of 15 g/L. A copper foil having a carrier of Comparative Example 2 was produced under the same conditions as in Example 1 except for the above.

[評價] [Evaluation]

將上述之實施例1~實施例3及比較例1、比較例2之具有載體之銅箔分別抵接於預浸片(三菱瓦斯化學股份有限公司製:GHPL-830MBT),使用真空加壓機,以加壓25kg/cm2、溫度220℃、加壓時間90分鐘之條件予以積層,製作貼銅積層板。接著,將使用各實施例1~實施例3及比較例1、比較例2之具有載體之銅箔而製作之貼銅積層板,如圖2之示意圖所示,於具有載體之銅箔之寬度方向切出13個部位、於長度方向切出5個部位,作成合計65個100mm×70mm之試料,針對各試料測定剝離強度。又,各試料之剝離強度之測定係依據JIS C6481-1996進行。 The copper foils having the carriers of the above-mentioned Examples 1 to 3 and Comparative Examples 1 and 2 were respectively brought into contact with a prepreg (manufactured by Mitsubishi Gas Chemical Co., Ltd.: GHPL-830MBT), and a vacuum presser was used. The laminate was laminated under the conditions of a pressure of 25 kg/cm 2 , a temperature of 220 ° C, and a pressurization time of 90 minutes to prepare a copper-clad laminate. Next, a copper-clad laminate produced by using the copper foil of the carrier of each of Examples 1 to 3 and Comparative Example 1 and Comparative Example 2, as shown in the schematic view of FIG. 2, is used for the width of the copper foil having the carrier. Thirteen sites were cut out in the direction, and five sites were cut out in the longitudinal direction to prepare a total of 65 samples of 100 mm × 70 mm, and the peel strength was measured for each sample. Further, the measurement of the peel strength of each sample was carried out in accordance with JIS C6481-1996.

圖3顯示針對實施例2之具有載體之銅箔之各試料測定剝離強度時之結果。圖3顯示對應於具有載體之銅箔之寬度方向及長度方向切開前之位置之各試料的剝離強度。 Fig. 3 shows the results of measuring the peel strength for each of the samples of the copper foil with a carrier of Example 2. Fig. 3 shows the peel strength of each sample corresponding to the width direction of the copper foil having the carrier and the position before the slit in the longitudinal direction.

接著,針對各實施例及比較例,算出65個試料之剝離強度之平均值與標準偏差,並且算出由剝離強度之平均值與標準偏差算出之變動係數(CV)。算出結果示於表1。 Next, for each of the examples and the comparative examples, the average value and the standard deviation of the peel strengths of the 65 samples were calculated, and the coefficient of variation (CV) calculated from the average value of the peel strength and the standard deviation was calculated. The calculation results are shown in Table 1.

如表1所示,具備共存有金屬成分與有機成分之有機層的各實施例之具有載體之銅箔,剝離強度之變動係數(CV)為0.17以下。且,各實施例之具有載體之銅箔之剝離強度平均為20g/cm以下。相對於此,具備不含有有機成分而僅以金屬成分構成之金屬層代替含 有金屬成分之有機層的比較例1之具有載體之銅箔,剝離強度平均為24.6g/cm,但剝離強度之變動係數(CV)為0.276,高於0.2。且形成含有金屬成分之有機層的溶液係使用氯化物離子濃度為15g/L之溶液的比較例2之具有載體之銅箔,剝離強度平均為7.3g/cm,雖與CBTA濃度之條件相同之實施例2同等,但剝離強度之變動係數(CV)為0.222,與比較例1同樣超過0.2。 As shown in Table 1, the copper foil having a carrier of each of the examples in which the organic layer of the metal component and the organic component are present has a peeling strength coefficient of variation (CV) of 0.17 or less. Further, the peeling strength of the copper foil with a carrier of each of the examples was 20 g/cm or less on average. On the other hand, a metal layer which does not contain an organic component and consists only of a metal component is provided instead of The copper foil with a carrier of Comparative Example 1 having an organic layer of a metal component had an average peel strength of 24.6 g/cm, but the coefficient of variation (CV) of the peel strength was 0.276, which was higher than 0.2. Further, the solution containing the organic layer containing the metal component was a copper foil with a carrier of Comparative Example 2 using a solution having a chloride ion concentration of 15 g/L, and the peel strength was 7.3 g/cm on average, although the conditions were the same as those of the CBTA concentration. In the case of Example 2, the coefficient of variation (CV) of the peel strength was 0.222, which was more than 0.2 as in Comparative Example 1.

由以上結果可知,藉由形成構成接合界面層之含有金屬成分之有機層,可使具有載體之銅箔之剝離強度之變動係數(CV)亦即剝離強度之偏差程度減低。此外,確認藉由使用氯化物離子濃度為1g/L以下之溶液形成含有金屬成分之有機層,可進一步減低具有載體之銅箔之剝離強度之變動係數(CV)。 From the above results, it is understood that the degree of variation in the coefficient of variation (CV) of the peel strength of the copper foil having the carrier, that is, the peel strength, can be reduced by forming the organic layer containing the metal component constituting the joint interface layer. Further, it was confirmed that the organic layer containing the metal component was formed by using a solution having a chloride ion concentration of 1 g/L or less, and the coefficient of variation (CV) of the peel strength of the copper foil having the carrier was further reduced.

【產業上之可利用性】 [Industrial Availability]

依據本發明之具有載體之銅箔,由於載體與銅箔層之剝離強度之變動係數(CV)為0.2以下,故載體於寬度方向之剝離強度之偏差較小,可安定地自銅箔層剝離載體。 According to the copper foil with a carrier of the present invention, since the coefficient of variation (CV) of the peel strength of the carrier and the copper foil layer is 0.2 or less, the deviation of the peel strength of the carrier in the width direction is small, and it can be stably peeled off from the copper foil layer. Carrier.

1‧‧‧具有載體之銅箔 1‧‧‧ copper foil with carrier

2‧‧‧載體 2‧‧‧ Carrier

3‧‧‧剝離層 3‧‧‧ peeling layer

4‧‧‧含有金屬成分之有機層 4‧‧‧Organic layer containing metal components

5‧‧‧銅箔層 5‧‧‧copper layer

6‧‧‧接合界面層 6‧‧‧ joint interface layer

Claims (9)

一種具有載體之銅箔,其特徵係於載體之表面上介隔接合界面層而具備銅箔層之具有載體之銅箔,其中該載體與該銅箔層之剝離強度之變動係數(CV)為0.2以下。 A copper foil having a carrier characterized by a copper foil having a carrier with a copper foil layer interposed on the surface of the carrier and interposing the interface layer, wherein a coefficient of variation (CV) of the peel strength of the carrier and the copper foil layer is 0.2 or less. 如請求項1之具有載體之銅箔,其中前述接合界面層係由設於前述載體表面之剝離層、與設於該剝離層表面之包含金屬成分之有機層所成。 The copper foil with a carrier according to claim 1, wherein the bonding interface layer is formed of a release layer provided on the surface of the carrier and an organic layer containing a metal component provided on the surface of the release layer. 如請求項1之具有載體之銅箔,其中前述金屬成分為鎳及/或鈷。 A copper foil having a carrier according to claim 1, wherein the aforementioned metal component is nickel and/or cobalt. 如請求項2或3之具有載體之銅箔,其中前述剝離層係由有機成分所成。 A copper foil having a carrier according to claim 2 or 3, wherein the peeling layer is formed of an organic component. 如請求項4之具有載體之銅箔,其中前述有機層包含在前述剝離層所用之有機成分。 The copper foil having a carrier according to claim 4, wherein the organic layer comprises an organic component used in the peeling layer. 如請求項2或3之具有載體之銅箔,其中前述剝離層係由無機成分所成。 A copper foil having a carrier according to claim 2 or 3, wherein the peeling layer is made of an inorganic component. 一種製備如請求項1至6中任一項之具有載體之銅箔之製造方法,其特徵係具備以下所述步驟A、步驟B、步驟C:步驟A:於載體表面形成剝離層作為界面接合層之步驟;步驟B:使用作為金屬成分源之含有硫酸鹽,且氯化物離子濃度為1g/L以下之含有機成分之溶液,於該剝離層表面形成含有金屬成分之有機層作為前述接合界面層之一部分之步驟;C步驟:於該含有金屬成分之有機層表面形成銅箔層之步驟。 A method for producing a copper foil with a carrier according to any one of claims 1 to 6, characterized in that it comprises the following steps A, B, and C: Step A: forming a release layer on the surface of the carrier as an interface bonding a step of layering; step B: using a solution containing an organic component containing a sulfate as a source of a metal component and having a chloride ion concentration of 1 g/L or less, and forming an organic layer containing a metal component on the surface of the release layer as the bonding interface Step of one part of the layer; Step C: a step of forming a copper foil layer on the surface of the organic layer containing the metal component. 一種貼銅積層板,其特徵係使用如請求項1至6中任一項之具有載體之銅箔而得。 A copper-clad laminate, which is characterized by using a copper foil having a carrier according to any one of claims 1 to 6. 一種印刷配線板,其特徵係使用如請求項1至6中任一項之具有載體之銅箔而得。 A printed wiring board characterized by using a copper foil having a carrier according to any one of claims 1 to 6.
TW104114623A 2014-05-07 2015-05-07 Copper foil having carrier, manufacturing method for producing the copper foil having carrier, copper clad laminate and printed wiring board using the copper foil having carrier TWI582275B (en)

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TWI796042B (en) * 2020-12-10 2023-03-11 韓商Ymt股份有限公司 Release layer for metal foil with carrier and metal foil comprising the same

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