JP5505828B2 - Composite metal foil and method for producing the same - Google Patents

Composite metal foil and method for producing the same Download PDF

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JP5505828B2
JP5505828B2 JP2009050364A JP2009050364A JP5505828B2 JP 5505828 B2 JP5505828 B2 JP 5505828B2 JP 2009050364 A JP2009050364 A JP 2009050364A JP 2009050364 A JP2009050364 A JP 2009050364A JP 5505828 B2 JP5505828 B2 JP 5505828B2
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metal foil
release layer
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行弘 大城
博一 長谷川
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Fukuda Metal Foil and Powder Co Ltd
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本発明は、複合金属箔及びその製造方法に関するものである。 The present invention relates to a composite metal foil and a manufacturing how.

周知のとおり、携帯電話機やデジタルカメラなどに代表される電子機器は、小型化される傾向にある一方、多機能化が目覚しく処理速度の向上が要求されている。このため、これらの電子機器に部品として組み込まれるプリント配線板は、小型化及び処理速度の向上という二つの要求を満たすことができるように高密度化が進められている。   As is well known, electronic devices typified by mobile phones and digital cameras tend to be miniaturized, but are remarkably multi-functional and require improved processing speed. For this reason, printed wiring boards incorporated as components in these electronic devices have been increased in density so as to satisfy the two requirements of downsizing and improvement in processing speed.

プリント配線板の高密度化を実現させるためには、プリント配線板を構成する基材に貼り付けられる銅箔を薄くすることによって回路をファインパターン化する必要があり、現在では厚さが12μm以下の極薄銅箔が使用されている。このような極薄銅箔は、基材に貼り付ける際にシワや亀裂が生じ易く、非常に取り扱い難かった。   In order to realize high-density printed wiring boards, it is necessary to make the circuit a fine pattern by thinning the copper foil attached to the substrate that constitutes the printed wiring board. Ultra-thin copper foil is used. Such an ultrathin copper foil is likely to be wrinkled or cracked when attached to a substrate, and is very difficult to handle.

このため、極薄銅箔を基材に貼り付ける際にシワや亀裂を生じされることなく容易に貼り付けることができる方法として、例えば、後出特許文献1には、クロメート処理によって剥離層を形成した担体に厚さ0.3〜1.5μmの剥離性を有する緻密微細な粉状銅層からなる導電性層を電着形成してなる印刷配線基板用導電性素材を用いて基材に導電性層を転写する方法が開示されている。また、後出特許文献2には、支持体金属層と極薄銅箔との間に有機系剥離層を有するプリント配線基板形成用複合銅箔を用いて基材に極薄銅箔を転写する方法が開示されている。   For this reason, as a method that can be easily attached without causing wrinkles or cracks when attaching an ultrathin copper foil to a substrate, for example, in Patent Document 1 described later, a release layer is formed by chromate treatment. A conductive layer is formed on a substrate using a conductive material for a printed wiring board, in which a conductive layer made of a fine and fine powdery copper layer having a peelability of 0.3 to 1.5 μm is formed on the formed carrier. Is disclosed. Further, in Patent Document 2 described later, an ultrathin copper foil is transferred to a substrate using a composite copper foil for forming a printed wiring board having an organic release layer between a support metal layer and an ultrathin copper foil. A method is disclosed.

ところが、前記特許文献1に開示されたクロメート処理によって形成された剥離層や、前記特許文献2に開示された有機系剥離層は、極薄銅箔を基材に転写した際に、剥離層が大量に極薄銅箔と共に基材側へ転写されてしまうという問題点があった。そして、樹脂基板に転写された剥離層残渣は、極薄銅箔に回路を形成するためのマスキング工程・エッチング工程・厚メッキ工程において不具合を生じさせる原因となり、特に、厚メッキ工程によって形成された厚メッキ層が剥離してしまう原因となっていた。   However, when the release layer formed by the chromate treatment disclosed in Patent Document 1 or the organic release layer disclosed in Patent Document 2 is transferred to an ultrathin copper foil, There was a problem that a large amount was transferred to the base material side together with the ultrathin copper foil. The peeling layer residue transferred to the resin substrate causes problems in the masking process, the etching process, and the thick plating process for forming a circuit on the ultrathin copper foil, and is particularly formed by the thick plating process. This caused the thick plating layer to peel off.

このため、後出特許文献3には、支持体金属層と極薄銅箔との間に有機系剥離層を有するプリント配線基板形状用複合銅箔を絶縁基材に、極薄銅箔と絶縁基材とが接触するように積層し、前記プリント配線基板形成用複合銅箔から前記支持体金属層を剥離して、極薄銅箔を露出させ、かつ、前記極薄銅箔表面に残存する有機系剥離層をアルカリ水溶液または塩酸水溶液で洗浄除去する銅張り積層板の製造方法が開示されている。   For this reason, in the following Patent Document 3, a composite copper foil for forming a printed wiring board having an organic release layer between a support metal layer and an ultrathin copper foil is used as an insulating substrate, and insulated from the ultrathin copper foil. Lamination is performed so that the substrate comes into contact, the support metal layer is peeled from the composite copper foil for forming a printed wiring board, the ultrathin copper foil is exposed, and the ultrathin copper foil remains on the surface. A method for producing a copper clad laminate in which an organic release layer is removed by washing with an aqueous alkali solution or aqueous hydrochloric acid solution is disclosed.

特公昭56−34115号公報Japanese Patent Publication No.56-34115 特開平11−317574号公報JP-A-11-317574 特開2000−315848号公報JP 2000-315848 A

前記のとおり、従来の各種複合金属箔では、極薄銅箔を基材へ転写した際に、剥離層が大量に極薄銅箔と共に基材側へ転写してしまうため、前記特許文献3に開示されているように剥離層残渣を取り除く処理を施す必要があり、非常に製造効率が悪かった。   As described above, in various conventional composite metal foils, when the ultrathin copper foil is transferred to the base material, a large amount of the release layer is transferred together with the ultrathin copper foil to the base material side. As disclosed, it was necessary to perform a treatment for removing the release layer residue, and the production efficiency was very poor.

そこで、本発明は、極薄銅箔を基材へ転写した際に、剥離層が回路を形成するための各工程において不具合を生じさせない程度しか転写されない複合金属箔及びその製造方法を得ることを技術的課題として、その具現化をはかるべく、試作・実験を繰り返した結果、複合金属箔を構成する剥離層をクロム酸と有機化合物とを含有する溶液を付着させることによって形成すればよいという刮目すべき知見を得、前記技術的課題を達成したものである。 The present invention, when transferring the ultra-thin copper foil to the substrate, the release layer to obtain a composite metal foil and a manufacturing how only a degree not causing a problem not transcribed in the step for forming the circuit As a technical issue, as a result of repeating trial production and experimentation, in order to realize its realization, the release layer constituting the composite metal foil may be formed by attaching a solution containing chromic acid and an organic compound. We have obtained remarkable knowledge and achieved the above technical problem.

前記技術的課題は、次の通りの本発明によって解決できる。   The technical problem can be solved by the present invention as follows.

即ち、本発明に係る複合金属箔の製造方法は、金属箔からなる支持体の表面にクロム酸とアジピン酸、安息香酸、サリチル酸、トルイル酸、スルファニル酸、テレフタル酸から選択される一種又は二種以上の有機化合物とを含有する溶液を付着させることによってCrを0.01〜1.0mg/m2含有した剥離層を形成する剥離層形成工程と、剥離層に金属箔からなる転写層を形成する転写層形成工程とを有するものである。 That is, the method for producing a composite metal foil according to the present invention comprises one or two selected from chromic acid and adipic acid, benzoic acid, salicylic acid, toluic acid, sulfanilic acid, terephthalic acid on the surface of the support made of the metal foil. A release layer forming step for forming a release layer containing 0.01 to 1.0 mg / m 2 of Cr by attaching a solution containing the above organic compound, and a transfer layer for forming a transfer layer made of a metal foil on the release layer Forming step.

また、本発明は、前記複合金属箔の製造方法において、剥離層形成工程において金属箔からなる支持体の表面にクロム酸とアジピン酸、安息香酸、サリチル酸、トルイル酸、スルファニル酸、テレフタル酸から選択される一種又は二種以上の有機化合物とを含有する溶液を付着させた状態で該溶液を電解することによって剥離層を形成するものである。   Further, the present invention provides the method for producing a composite metal foil, wherein in the release layer forming step, the surface of the support made of the metal foil is selected from chromic acid, adipic acid, benzoic acid, salicylic acid, toluic acid, sulfanilic acid, and terephthalic acid. The release layer is formed by electrolyzing the solution in a state where a solution containing one or two or more organic compounds is adhered.

また、本発明は、前記いずれかの複合金属箔の製造方法において、クロム酸が、酸化クロム、重クロム酸カリウム、重クロム酸ナトリウム、クロム酸リチウムから選択される一種又は二種以上のものである。   Further, the present invention provides the method for producing any one of the composite metal foils, wherein the chromic acid is one or more selected from chromium oxide, potassium dichromate, sodium dichromate, and lithium chromate. is there.

また、本発明に係る複合金属箔は、金属箔からなる支持体と、支持体の表面にクロム酸とアジピン酸、安息香酸、サリチル酸、トルイル酸、スルファニル酸、テレフタル酸から選択される一種又は二種以上の有機化合物とを含有する溶液を付着させることによって形成されるCrを0.01〜1.0mg/m2含有した剥離層と、剥離層に形成される金属箔からなる転写層を備えているものである。 Further, the composite metal foil according to the present invention comprises a support made of a metal foil, and one or two selected from chromic acid and adipic acid, benzoic acid, salicylic acid, toluic acid, sulfanilic acid, and terephthalic acid on the surface of the support. Provided with a release layer containing 0.01 to 1.0 mg / m 2 of Cr formed by adhering a solution containing more than one kind of organic compound, and a transfer layer made of a metal foil formed on the release layer It is.

本発明によれば、複合金属箔を構成する剥離層をクロム化合物と有機化合物とを含有する溶液を支持体に付着させることによって形成したので、極薄銅箔を基材に転写させた際に、剥離層が回路を形成するための各工程に対して不具合を生じさせない程度しか基材側へ転写されず、これにより、転写後の極薄銅箔に対して剥離層残渣を除去する処理を施すことなく、回路を形成することができる。   According to the present invention, since the release layer constituting the composite metal foil is formed by adhering a solution containing a chromium compound and an organic compound to the support, the ultrathin copper foil is transferred to the substrate. The release layer is transferred to the substrate side only to the extent that it does not cause a problem with respect to each step for forming a circuit, thereby removing the release layer residue from the ultrathin copper foil after transfer. A circuit can be formed without application.

従って、本発明の産業上利用性は非常に高いといえる。   Therefore, it can be said that the industrial applicability of the present invention is very high.

実施の形態に係る複合金属箔を示した断面図である。It is sectional drawing which showed the composite metal foil which concerns on embodiment. 変形例に係る複合金属箔を示した断面図である。It is sectional drawing which showed the composite metal foil which concerns on a modification. 実施の形態に係る複合金属箔によって転写層を基材に転写する工程を示した断面図である。It is sectional drawing which showed the process of transcribe | transferring a transfer layer to a base material with the composite metal foil which concerns on embodiment.

以下、本発明の実施の形態を説明する。   Embodiments of the present invention will be described below.

図1は、本発明における複合金属箔を示した断面図である。図2は本発明における複合金属箔の変形例を示した断面図である。図3は本発明における複合金属箔によって転写層を基材に転写する工程を示した断面図である。これらの図において、1は、支持体2と、支持体2の表面にクロム酸と有機化合物とを含有する溶液を付着させることによって形成される剥離層3と、剥離層3に形成される金属箔からなる転写層4からなる複合金属箔である。   FIG. 1 is a cross-sectional view showing a composite metal foil in the present invention. FIG. 2 is a sectional view showing a modification of the composite metal foil in the present invention. FIG. 3 is a cross-sectional view showing a process of transferring a transfer layer to a substrate with the composite metal foil in the present invention. In these drawings, reference numeral 1 denotes a support 2, a release layer 3 formed by attaching a solution containing chromic acid and an organic compound to the surface of the support 2, and a metal formed in the release layer 3. It is a composite metal foil made of a transfer layer 4 made of foil.

支持体2は、耐熱性を有する金属箔であれば限定されない。例えば、圧延法や電解法によって形成された銅箔、銅合金箔、鉄箔、鉄合金箔、ニッケル箔、ニッケル合金箔、アルミ箔などを使用することが好ましく、特に銅箔を使用することが好ましい。支持体2として銅箔を使用する場合には、その銅箔の厚さを18〜100μmにすることが好ましく、18〜35μmにすることがより好ましい。   The support 2 is not limited as long as it is a metal foil having heat resistance. For example, it is preferable to use a copper foil, a copper alloy foil, an iron foil, an iron alloy foil, a nickel foil, a nickel alloy foil, an aluminum foil or the like formed by a rolling method or an electrolytic method, and in particular, use a copper foil. preferable. When a copper foil is used as the support 2, the thickness of the copper foil is preferably 18 to 100 μm, and more preferably 18 to 35 μm.

剥離層3は、支持体2の表面にクロム酸と有機化合物とを含有する溶液を付着させることによって形成される。具体的には、クロム酸と有機化合物とを含有する溶液を支持体2の表面に付着させることによって支持体の表面に剥離層が析出されて形成される。そして、支持体2の表面に形成された剥離層3にはCrが0.01〜1.0mg/m2含有されることが好ましく、0.1〜1.0mg/m2含有されることが好ましい。なお、剥離層3に含有されるCrが前記範囲内の場合には、転写時における支持体2と転写層4との引き剥がし強さが0.01〜0.15KN/mとなり、支持体2に対してある程度外力が加わらないと転写層4が剥がれないことから、製造工程において取り扱い易くなる。 The release layer 3 is formed by attaching a solution containing chromic acid and an organic compound to the surface of the support 2. Specifically, a release layer is deposited on the surface of the support by depositing a solution containing chromic acid and an organic compound on the surface of the support 2. The release layer 3 formed on the surface of the support 2 preferably contains 0.01 to 1.0 mg / m 2 of Cr, and more preferably 0.1 to 1.0 mg / m 2 . When the Cr contained in the release layer 3 is within the above range, the peel strength between the support 2 and the transfer layer 4 at the time of transfer is 0.01 to 0.15 KN / m. If the external force is not applied to some extent, the transfer layer 4 is not peeled off, so that it becomes easy to handle in the manufacturing process.

クロム酸としては、酸化クロム、重クロム酸カリウム、重クロム酸ナトリウム、クロム酸リチウムから選択される一種又は二種以上のものを使用すればよい。なお、重クロム酸ナトリウムを使用する場合には、前記溶液に対して0.01〜10g/l含有させることが好ましく、0.01〜1g/l含有させることがより好ましい。   As chromic acid, one or more selected from chromium oxide, potassium dichromate, sodium dichromate, and lithium chromate may be used. In addition, when using sodium dichromate, it is preferable to contain 0.01-10 g / l with respect to the said solution, and it is more preferable to contain 0.01-1 g / l.

有機化合物としては、アジピン酸、安息香酸、サリチル酸、トルイル酸、スルファニル酸、テレフタル酸から選択される一種又は二種以上のものを使用すればよい。なお、有機化合物は、前記溶液に対して0.01〜10g/l含有させることが好ましく、0.01〜1.0g/l含有させることがより好ましい。   As the organic compound, one or more selected from adipic acid, benzoic acid, salicylic acid, toluic acid, sulfanilic acid, and terephthalic acid may be used. In addition, it is preferable to contain 0.01-10 g / l of organic compounds with respect to the said solution, and it is more preferable to contain 0.01-1.0 g / l.

転写層4は、プリント配線板を構成する基材に転写される層であり、導電性の高い金属箔を使用すればよい。具体的には、銅箔を使用することが好ましい。なお、転写層の厚みは、プリント配線板を構成する基材に転写された際に回路のファインパターン化に影響を与えるため、0.1〜12μmにすることが好ましく、0.1μm〜9μmにすることがより好ましい。   The transfer layer 4 is a layer that is transferred to the base material constituting the printed wiring board, and a highly conductive metal foil may be used. Specifically, it is preferable to use a copper foil. The thickness of the transfer layer is preferably 0.1 to 12 μm, and preferably 0.1 to 9 μm, because it affects the fine patterning of the circuit when transferred to the substrate constituting the printed wiring board. More preferred.

なお、剥離層3及び転写層4は、図1に示すように、支持体2のいずれか一方面のみに形成してもよく、図2に示すように、支持体2の両面に形成してもよい。   The release layer 3 and the transfer layer 4 may be formed on only one side of the support 2 as shown in FIG. 1, or on both sides of the support 2 as shown in FIG. Also good.

次に、本発明に係る複合金属箔の製造方法を説明する。   Next, the manufacturing method of the composite metal foil which concerns on this invention is demonstrated.

先ず、圧延法や電解法によって形成された金属箔からなる支持体2を用意する。次に、クロム酸と有機化合物とを含有する溶液を作製し、その溶液中に支持体2の表面を浸漬させて支持体2の表面に溶液を付着させる。これにより、支持体2の表面に付着した溶液によって剥離層3が析出される(剥離層形成工程)。そして、支持体2に形成された剥離層3の表面を電着浴に浸漬させて厚さ0.1〜1.0μmの金属箔を電着させることによって転写層4を形成する(転写層形成工程)。これにより、複合金属箔1が形成される。   First, a support 2 made of a metal foil formed by a rolling method or an electrolytic method is prepared. Next, a solution containing chromic acid and an organic compound is prepared, and the surface of the support 2 is immersed in the solution to attach the solution to the surface of the support 2. Thereby, the peeling layer 3 is deposited by the solution adhering to the surface of the support 2 (peeling layer forming step). Then, the transfer layer 4 is formed by immersing the surface of the release layer 3 formed on the support 2 in an electrodeposition bath and electrodepositing a metal foil having a thickness of 0.1 to 1.0 μm (transfer layer forming step). Thereby, the composite metal foil 1 is formed.

なお、前記剥離層形成工程においては、支持体2の表面を溶液に浸漬させて剥離層3を析出しているが、支持体2の表面を溶液に浸漬させた状態で該溶液を電気分解して剥離層3を析出してもよい。   In the release layer forming step, the surface of the support 2 is immersed in the solution to deposit the release layer 3, but the solution is electrolyzed in a state where the surface of the support 2 is immersed in the solution. The release layer 3 may be deposited.

なお、剥離層形成工程において支持体2を溶液に浸漬する時間は、溶液に含有されるクロム酸や有機化合物の濃度や溶液を電気分解するか否かによって変動とするため適宜調整し、少なくとも析出される剥離層に含有されるCr量が0.01〜1.0mg/m2になるように調節することが好ましく、0.1〜1.0mg/m2になるように調節することがより好ましい。 Note that the time for immersing the support 2 in the solution in the release layer forming step is appropriately adjusted to vary depending on the concentration of chromic acid and organic compounds contained in the solution and whether or not the solution is electrolyzed, and at least precipitation The amount of Cr contained in the release layer is preferably adjusted to 0.01 to 1.0 mg / m 2, and more preferably 0.1 to 1.0 mg / m 2 .

また、剥離層3の表面に金属箔を電着させる電着浴としては、pH値が弱酸性からアルカリ性を示す電着浴を使用することが好ましく、具体的には、pH値が4以上を示す電着浴であることが好ましい。そして、転写層4は、前記pH値を示す電着浴のみによって所望の厚さに達する金属箔を電着して形成してもよいが、複数の電着浴を併用して所望の厚さに達する金属箔を電着して形成してもよい。複数の電着浴を併用する場合には、剥離層3の表面に金属箔を電着させる1次電着浴に前記pH値を示す電着浴を使用して所望の厚さよりも薄く金属箔を電着させた後、2次電着浴以降に前記pH値に限定されない電着浴を使用して所望の厚さに達するまで金属箔を電着すればよい。前記pH値を示す電着浴としては、ピロリン酸銅電着浴やクエン酸銅電着浴などがあり、また、前記pH値に限定されない電着浴としては、硫酸銅電着浴などがある。   Further, as the electrodeposition bath for electrodepositing a metal foil on the surface of the release layer 3, it is preferable to use an electrodeposition bath having a pH value of weakly acidic to alkaline, and specifically, a pH value of 4 or more. The electrodeposition bath shown is preferred. The transfer layer 4 may be formed by electrodeposition of a metal foil that reaches a desired thickness only by the electrodeposition bath exhibiting the pH value. It may be formed by electrodeposition. When a plurality of electrodeposition baths are used in combination, an electrodeposition bath having the above pH value is used as the primary electrodeposition bath for electrodepositing a metal foil on the surface of the release layer 3, and the metal foil is made thinner than desired After the electrodeposition, the metal foil may be electrodeposited until the desired thickness is reached using an electrodeposition bath not limited to the pH value after the secondary electrodeposition bath. Examples of the electrodeposition bath exhibiting the pH value include a copper pyrophosphate electrodeposition bath and a copper citrate electrodeposition bath, and examples of the electrodeposition bath not limited to the pH value include a copper sulfate electrodeposition bath. .

また、転写層4には、プリント配線板を構成する基材との物理的な結合を向上させるために粗化処理、粗化処理によって形成される銅粉の脱落を防止するために被覆処理、また、プリント配線板を構成する基材との化学的な結合の向上、耐熱性や耐薬品性の向上、酸化の防止のために不働態化処理及び有機防錆処理などを施してもよい。粗化処理を施す場合には、転写層4を硫酸銅−硫酸溶液中で限界電流密度近傍にて陰極電気分解し、デンドライド状又は微細状の銅粉を析出させればよい。また、被覆処理を施す場合には、転写層4を硫酸銅−硫酸溶液中で通常の電流密度にて陰極電気分解し、銅箔を析出させて銅粉を被覆すればよい。また、不働態化処理を施す場合には、Zn、Cr、Co、Mo、Ni、P、Wなどの銅とは異金属によるコーティング、重クロム酸イオンを含有する溶液によるクロメートコーティングを行えばよい。また、有機防錆処理を施す場合には、ベンゾドリアゾール、シランカップリング剤又はこれらの誘導体を含有する溶液による被膜を形成すればよい。   In addition, the transfer layer 4 is coated with a roughening treatment to improve physical bonding with the substrate constituting the printed wiring board, and a coating treatment to prevent the copper powder formed by the roughening treatment from falling off. Moreover, you may give a passivation process, an organic rust prevention process, etc. in order to improve a chemical bond with the base material which comprises a printed wiring board, an improvement in heat resistance and chemical resistance, and oxidation prevention. When the roughening treatment is performed, the transfer layer 4 may be cathodic electrolyzed in the vicinity of the limit current density in a copper sulfate-sulfuric acid solution to deposit dendritic or fine copper powder. When the coating treatment is performed, the transfer layer 4 is cathodic electrolyzed in a copper sulfate-sulfuric acid solution at a normal current density, and a copper foil is deposited to cover the copper powder. In addition, when performing passivation treatment, coating with a different metal from copper such as Zn, Cr, Co, Mo, Ni, P, W, etc., or chromate coating with a solution containing dichromate ions may be performed. . Moreover, what is necessary is just to form the film by the solution containing a benzodriazole, a silane coupling agent, or these derivatives when performing organic rust prevention processing.

次に、本発明に係る複合金属箔を使用してプリント配線板を作製する工程を図3に基づいて説明する。   Next, the process of producing a printed wiring board using the composite metal foil according to the present invention will be described with reference to FIG.

先ず、複合金属箔1の転写層4をプリント配線板を構成する基材5に密着させる(図3の(a)参照)。次に、基材5に転写層4を密着させた状態で複合金属箔1を支持体側から加熱圧縮して転写層4を基材5に結合させて積層体6を形成する(図3の(b)参照)。この後、転写層4から支持体2を剥がし取ることによって基材5に転写層4が転写される(図3の(c)参照)。そして、転写層4に対して回路を形成することによってプリント配線板が形成される。   First, the transfer layer 4 of the composite metal foil 1 is brought into close contact with the base material 5 constituting the printed wiring board (see FIG. 3A). Next, the composite metal foil 1 is heated and compressed from the support side with the transfer layer 4 in close contact with the substrate 5 to bond the transfer layer 4 to the substrate 5 to form a laminate 6 (FIG. 3 ( b)). Thereafter, the transfer layer 4 is transferred to the substrate 5 by peeling off the support 2 from the transfer layer 4 (see FIG. 3C). Then, a printed wiring board is formed by forming a circuit on the transfer layer 4.

実施例1   Example 1

先ず、支持体を形成するために、硫酸100g/lと硫酸銅五水和物250g/lとを含有する電解液で満たした電着浴を用意した。そして、浴温40℃に維持した電解浴を電流密度10A/dm2にて15分35秒間電気分解し、チタン板の表面に析出された厚さ35μmの銅箔を剥がし取って支持体を作製した。この支持体を1.8wt%硫酸に60秒間浸した後、イオン交換水によって15秒間洗浄した。 First, in order to form a support, an electrodeposition bath filled with an electrolytic solution containing 100 g / l sulfuric acid and 250 g / l copper sulfate pentahydrate was prepared. The electrolytic bath maintained at a bath temperature of 40 ° C was electrolyzed at a current density of 10 A / dm 2 for 15 minutes and 35 seconds, and the 35 μm thick copper foil deposited on the surface of the titanium plate was peeled off to produce a support. did. This support was immersed in 1.8 wt% sulfuric acid for 60 seconds and then washed with ion-exchanged water for 15 seconds.

次に、支持体に剥離層を形成するために、アジピン酸0.05g/lと重クロム酸ナトリウム0.10g/lとを含有する水溶液で満たした剥離層形成浴を用意した。そして、浴温25℃に維持した剥離層形成浴に支持体を30秒間浸漬し、支持体の表面に剥離層を形成した。この剥離層をイオン交換水によって15秒間洗浄した。   Next, in order to form a release layer on the support, a release layer forming bath filled with an aqueous solution containing 0.05 g / l adipic acid and 0.10 g / l sodium dichromate was prepared. Then, the support was immersed in a release layer forming bath maintained at a bath temperature of 25 ° C. for 30 seconds to form a release layer on the surface of the support. This release layer was washed with ion exchange water for 15 seconds.

次に、剥離層に転写層を二段階の電気分解で形成するために、ピロリン酸銅50g/lとピロリン酸カリウム500g/lとを含有するpH値8.5の電解液で満たした1次電着浴と、硫酸100g/lと硫酸銅五水和物250g/lを含有する電解液で満たした2次電着浴を用意した。そして、浴温50℃に維持した1次電着浴に支持体を浸漬して電流密度3.0A/dm2にて89秒間電気分解して厚さ1.0μmの銅箔を形成し、この後、この銅箔をイオン交換水によって15秒間洗浄した。さらに、浴温40℃に維持した2次電着浴に支持体を浸漬して電流密度5A/dm2にて214秒間電気分解して厚さ4.0μmの銅箔を形成した。これにより、剥離層に5.0μmの銅箔からなる転写層を形成した。 Next, in order to form a transfer layer on the release layer by two-stage electrolysis, primary electrodeposition filled with an electrolyte having a pH value of 8.5 containing 50 g / l copper pyrophosphate and 500 g / l potassium pyrophosphate. A bath and a secondary electrodeposition bath filled with an electrolyte containing 100 g / l sulfuric acid and 250 g / l copper sulfate pentahydrate were prepared. Then, the support was immersed in a primary electrodeposition bath maintained at a bath temperature of 50 ° C. and electrolyzed at a current density of 3.0 A / dm 2 for 89 seconds to form a 1.0 μm thick copper foil. This copper foil was washed with ion exchange water for 15 seconds. Further, the support was immersed in a secondary electrodeposition bath maintained at a bath temperature of 40 ° C. and electrolyzed at a current density of 5 A / dm 2 for 214 seconds to form a copper foil having a thickness of 4.0 μm. Thereby, a transfer layer made of 5.0 μm copper foil was formed on the release layer.

そして、最後に転写層に対して粗化処理、被覆処理、不働態化処理、有機被膜形成処理を順番に行った。具体的には、粗化処理を施すために、硫酸銅五水和物50g/lと硫酸100g/lとを含有する硫酸銅水溶液で満たした粗化処理浴を用意し、浴温40℃に維持した粗化処理浴に転写層を浸漬して電流密度10A/dm2にて10秒間電気分解し、転写層の表面に微細状の銅粉を析出させた。次に、被覆処理を施すために、硫酸銅五水和物250g/lと硫酸100g/lとを含有する硫酸銅水溶液で満たした被覆処理浴を用意し、浴温40℃に維持した被覆処理浴に転写層を浸漬して電流密度5.0A/dm2にて80秒間電気分解し、転写層の表面に微細状の銅粉を被覆する銅箔を析出させた。次に、不働態化処理を施すために、重クロム酸ナトリウム5g/lを含有し、水酸化ナトリウムにてpH13に調整した不働態化処理浴を用意し、浴温30℃に維持した不働態化処理浴に転写層を浸漬して電流密度2.0A/dm2にて5秒間電気分解し、転写層の表面にクロメート被膜を析出させた。次に、プリント配線板を構成する基材との化学的な結合力の向上及び防錆力の向上のために、γ-アミノプロピルトリエトキシシランを2m/lを含有するシランカップリング剤の水溶液からなる有機被膜形成処理浴を用意し、浴温30℃に維持した防錆処理浴に転写層を15秒間浸漬して乾燥し、転写層の表面にシランカップリング剤被膜を析出させた。以上の各工程を経て複合金属箔を得た。 Finally, a roughening process, a covering process, a passivating process, and an organic film forming process were sequentially performed on the transfer layer. Specifically, a roughening treatment bath filled with an aqueous copper sulfate solution containing copper sulfate pentahydrate 50 g / l and sulfuric acid 100 g / l is prepared for the roughening treatment, and the bath temperature is set to 40 ° C. The transfer layer was immersed in the maintained roughening bath and electrolyzed at a current density of 10 A / dm 2 for 10 seconds to deposit fine copper powder on the surface of the transfer layer. Next, a coating treatment bath filled with an aqueous copper sulfate solution containing 250 g / l of copper sulfate pentahydrate and 100 g / l of sulfuric acid was prepared for the coating treatment, and the coating treatment was maintained at a bath temperature of 40 ° C. The transfer layer was immersed in a bath and electrolyzed at a current density of 5.0 A / dm 2 for 80 seconds to deposit a copper foil covering the surface of the transfer layer with fine copper powder. Next, in order to perform the passivation treatment, a passivation treatment bath containing sodium dichromate 5 g / l and adjusted to pH 13 with sodium hydroxide was prepared, and the passivation temperature was maintained at 30 ° C. The transfer layer was immersed in a heat treatment bath and electrolyzed at a current density of 2.0 A / dm 2 for 5 seconds to deposit a chromate film on the surface of the transfer layer. Next, an aqueous solution of a silane coupling agent containing 2 m / l of γ-aminopropyltriethoxysilane in order to improve the chemical bond strength with the base material constituting the printed wiring board and the rust prevention capability. An organic film forming treatment bath was prepared, and the transfer layer was dipped in a rust prevention treatment bath maintained at a bath temperature of 30 ° C. for 15 seconds and dried to deposit a silane coupling agent film on the surface of the transfer layer. A composite metal foil was obtained through the above steps.

続いて、プリント配線板を構成する基材としてガラス繊維にエポキシ樹脂を含浸させたプリプレグを用意した。そして、基材に転写層を密着させるように複合金属箔を重ねた状態で170℃・4MPaにて加熱圧着し、転写層を基材の表面に結合させた積層体を得た。   Subsequently, a prepreg in which glass fiber was impregnated with an epoxy resin was prepared as a base material constituting the printed wiring board. Then, a laminated body in which the composite metal foil was laminated so as to adhere the transfer layer to the substrate and heat-pressed at 170 ° C. and 4 MPa was obtained to bond the transfer layer to the surface of the substrate.

実施例2   Example 2

前記実施例1において、剥離層に転写層を形成するために、ピロリン酸銅50g/lとピロリン酸カリウム500g/lとを含有するpH値8.5の電解液で満たした電着浴のみを用意し、浴温50℃に維持した電着浴に支持体を浸漬して電流密度3.0A/dm2にて89秒間電気分解し、厚さ1.0μmの銅箔からなる転写層を形成した外は、前記実施例1と同様にして積層体を得た。 In Example 1, in order to form a transfer layer in the release layer, only an electrodeposition bath filled with an electrolyte solution having a pH value of 8.5 containing copper pyrophosphate 50 g / l and potassium pyrophosphate 500 g / l was prepared. The substrate was immersed in an electrodeposition bath maintained at a bath temperature of 50 ° C., electrolyzed at a current density of 3.0 A / dm 2 for 89 seconds, and a transfer layer made of a 1.0 μm thick copper foil was formed. A laminate was obtained in the same manner as in Example 1.

実施例3〜7及び比較例1〜8   Examples 3-7 and Comparative Examples 1-8

前記実施例1において、支持体に剥離層を形成するために、表に示す有機化合物及び/又はクロム酸を含有する水溶液で満たした剥離層形成浴を用意した外は、前記実施例1と同様にして積層体を得た。   In Example 1, the same procedure as in Example 1 except that a release layer forming bath filled with an aqueous solution containing an organic compound and / or chromic acid shown in the table was prepared to form a release layer on the support. Thus, a laminate was obtained.

比較例9   Comparative Example 9

前記実施例1において、剥離層形成浴に支持体を3分間浸漬した外は、前記実施例1と同様にして積層体を得た。 In Example 1, the outer that the support was immersed for 3 minutes in the peeling layer formation bath, to obtain a laminate in the same manner as in Example 1.

前記各実施例1〜7及び各比較例1〜9で得られた積層体に対して次の測定及び評価を行った。測定及び評価の結果を表に示す。
a.引き剥がし強さの測定
転写層と支持体との間の引き剥がし強さをJIS-C-6481(1996)に基づいて測定した。
b.剥離状態の評価
縦100mm×横100mmのサイズに裁断した積層体を試料として用意し、その試料の転写層に対する支持体の剥離状態を目視にて確認した。なお、転写層から支持体が全範囲に渡って剥離しているものを「〇」、転写層から支持体が一部のみ剥離しているものを「△」、転写層から支持体が全く剥離していないものを「×」として評価した。
c.Cr付着量の測定
前記剥離状態の評価で「〇」又は「△」の評価が得られた試料を10mm×40mmの大きさに切断し、転写層側及び支持体側に付着した剥離層をそれぞれ希硝酸100mlで溶解し、その溶液中に含まれるCr量をICP分析法にて測定した。また、対となる転写層と支持体から測定されたCr量の合計を剥離層に含有される総Cr量として算出した。
The following measurements and evaluations were performed on the laminates obtained in Examples 1 to 7 and Comparative Examples 1 to 9. The results of measurement and evaluation are shown in the table.
a. Measurement of peel strength The peel strength between the transfer layer and the support was measured based on JIS-C-6481 (1996).
b. Evaluation of peeled state A laminated body cut to a size of 100 mm long × 100 mm wide was prepared as a sample, and the peeled state of the support with respect to the transfer layer of the sample was visually confirmed. “◯” indicates that the support is peeled from the transfer layer over the entire range, “△” indicates that the support is only partially peeled from the transfer layer, and the support is completely peeled from the transfer layer. Those that were not evaluated were evaluated as “x”.
c. Measurement of Cr adhesion amount Samples that were evaluated as “◯” or “Δ” in the evaluation of the release state were cut into a size of 10 mm × 40 mm, and the release layers attached to the transfer layer side and the support side were diluted. After dissolving in 100 ml of nitric acid, the amount of Cr contained in the solution was measured by ICP analysis. Further, the total amount of Cr measured from the paired transfer layer and the support was calculated as the total amount of Cr contained in the release layer.

Figure 0005505828
Figure 0005505828

前記測定及び評価の結果より、クロム酸又は有機化合物のいずれか一方しか含有されていない剥離層形成浴によって剥離層が形成された複合金属箔では、基材に転写層を転写させた後に支持体を完全に剥離することができないのに対し、クロム酸及び有機化合物のいずれもが含有された剥離層形成浴によって剥離層が形成された複合金属箔では、基材に転写層を転写させた後に支持体が完全に剥離することができることが分かる。   From the result of the measurement and evaluation, in the composite metal foil in which the release layer is formed by the release layer forming bath containing only one of chromic acid or the organic compound, the support is formed after the transfer layer is transferred to the substrate. In the composite metal foil in which the release layer is formed by the release layer forming bath containing both chromic acid and the organic compound, the transfer layer is transferred to the base material. It can be seen that the support can be completely peeled off.

また、比較例8又は9のように剥離層に含有されるCr量が1.0mg/m2を越える複合金属箔では、引き剥がし強さが極端に低下して取り扱い難いものとなった。 Moreover, in the composite metal foil in which the amount of Cr contained in the release layer exceeded 1.0 mg / m 2 as in Comparative Example 8 or 9, the peel strength was extremely reduced, making it difficult to handle.

1 複合金属箔
2 支持体
3 剥離層
4 転写層
5 基材
6 積層体
DESCRIPTION OF SYMBOLS 1 Composite metal foil 2 Support body 3 Release layer 4 Transfer layer 5 Base material 6 Laminated body

Claims (4)

金属箔からなる支持体の表面にクロム酸とアジピン酸、安息香酸、サリチル酸、トルイル酸、スルファニル酸、テレフタル酸から選択される一種又は二種以上の有機化合物とを含有する溶液を付着させることによってCrを0.01〜1.0mg/m2含有した剥離層を形成する剥離層形成工程と、剥離層に金属箔からなる転写層を形成する転写層形成工程とを有すること特徴とする複合金属箔の製造方法。 By attaching a solution containing chromic acid and one or more organic compounds selected from adipic acid, benzoic acid, salicylic acid, toluic acid, sulfanilic acid and terephthalic acid to the surface of the support made of metal foil a peeling layer formation step of forming a 0.01 to 1.0 mg / m 2 containing the release layer of cr, the separation layer of the composite metal foil and having a transfer layer forming step of forming a transfer layer made of a metal foil Production method. 剥離層形成工程において金属箔からなる支持体の表面にクロム酸とアジピン酸、安息香酸、サリチル酸、トルイル酸、スルファニル酸、テレフタル酸から選択される一種又は二種以上の有機化合物とを含有する溶液を付着させた状態で該溶液を電解することによって剥離層を形成する請求項1記載の複合金属箔の製造方法。 Solution containing one or more organic compounds selected from chromic acid and adipic acid, benzoic acid, salicylic acid, toluic acid, sulfanilic acid, terephthalic acid on the surface of the support made of metal foil in the release layer forming step The method for producing a composite metal foil according to claim 1, wherein the release layer is formed by electrolyzing the solution in a state where the metal is adhered. クロム酸が、酸化クロム、重クロム酸カリウム、重クロム酸ナトリウム、クロム酸リチウムから選択される一種又は二種以上のものである請求項1又は2のいずれかに記載の複合金属箔の製造方法。 The method for producing a composite metal foil according to claim 1 or 2, wherein the chromic acid is one or more selected from chromium oxide, potassium dichromate, sodium dichromate, and lithium chromate. . 金属箔からなる支持体と、支持体の表面にクロム酸とアジピン酸、安息香酸、サリチル酸、トルイル酸、スルファニル酸、テレフタル酸から選択される一種又は二種以上の有機化合物とを含有する溶液を付着させることによって形成されるCrを0.01〜1.0mg/m2含有した剥離層と、剥離層に形成される金属箔からなる転写層を備えていることを特徴とする複合金属箔。 A support comprising a metal foil, and a solution containing one or more organic compounds selected from chromic acid and adipic acid, benzoic acid, salicylic acid, toluic acid, sulfanilic acid and terephthalic acid on the surface of the support. A composite metal foil comprising a release layer containing 0.01 to 1.0 mg / m 2 of Cr formed by adhesion and a transfer layer made of a metal foil formed on the release layer.
JP2009050364A 2009-03-04 2009-03-04 Composite metal foil and method for producing the same Active JP5505828B2 (en)

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CN102883533B (en) * 2012-09-17 2015-09-30 东莞康源电子有限公司 The manufacture method of ultrathin copper-clad laminate
JP6329727B2 (en) * 2013-03-06 2018-05-23 Jx金属株式会社 Copper foil with carrier, method for producing copper foil with carrier, printed wiring board, printed circuit board, copper-clad laminate, and method for producing printed wiring board
JP2015157392A (en) * 2014-02-24 2015-09-03 パナソニックIpマネジメント株式会社 Laminate for see-through type electrode and production method for the same, see-through type electrode material and device
JP5859155B1 (en) * 2015-03-11 2016-02-10 福田金属箔粉工業株式会社 Composite metal foil, method for producing the same, and printed wiring board
US11317522B2 (en) * 2017-03-21 2022-04-26 Mitsui Mining & Smelting Co., Ltd. Wiring board manufacturing method
CN113403650A (en) * 2021-06-21 2021-09-17 集美大学 Method for improving coating uniformity of release agent by using discrete crystal nuclei
CN113403651A (en) * 2021-06-21 2021-09-17 集美大学 Method for improving coating uniformity of release agent by using nano coating
CN115233262B (en) * 2022-08-01 2023-12-12 九江德福科技股份有限公司 Preparation method of extra-thin copper foil with carrier

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