TW201531684A - Sampling device of gas analyzer with high recovery rate - Google Patents

Abstract

A sampling device of a gas analyzer with a high recovery rate is provided. The sampling device comprises an analyzing device which is provided with a sample inlet and a sample outlet, a first pump, a sample inlet dividing loop and a second pump, wherein the sample inlet is connected with a sample inlet pipeline; the first pump is connected with the sample outlet of the analyzing device through a suction pipeline or is built in the analyzing device and is further connected with an exhaust pipeline; one end of the sample inlet dividing loop is communicated with one side of the sample inlet pipeline, and the exhaust pipeline is further communicated with one side of the sample inlet dividing loop; the second pump is arranged on the sample inlet dividing loop. By means of the sample inlet dividing loop and the second pump, the flow velocity of an air sample is improved through moderately dividing the air sample and cooperatively exhausting by the second pump so as to avoid a defect that the air sample is attached to the pipeline due to a slow flow velocity and then leads to a reduction of the recovery rate of the air sample, and consequently, deteriorate the accuracy of measurement. The disclosed is therefore capable of improving the accuracy of measurement and product reliability.

Description

High recovery gas analyzer sampling device

The present invention relates to a gas analyzer sampling device, and more particularly to a gas analyzer sampling device capable of improving recovery.

According to the clean room of the general semiconductor or panel industry, it is usually necessary to target AMC (Airborne Molecular Contamination) or VOC (Volatile Organic Compound) in the air. The concentration of organic compounds is measured and monitored to prevent these harmful gases from affecting the yield of the product or the expensive and expensive machinery. Currently, for the measurement and monitoring of AMC or VOC in a clean room environment, please refer to the first figure. Generally, it is manually sampled by a tool such as a gas bag or a stainless steel bucket, or automatically sampled by a sampling line to obtain an air sample A1, and then the air sample A1 is sent to an analyzer through an injection line 10. The measurement device 2 is subjected to measurement analysis, wherein the analysis device 2 can be a Gas Chromatography-Mass Spectrometer (GC-MS, Gas Chromatography-Mass Spectrometer), a Gas Chromatography Flame Ionization Detector (GC-FID, Gas) Chromatography-Flame Ionization Detector), Selected Ion Flow Tube Mass Spectrometry (SIFT-MS), Flight Mass Spectrometer (TOF-MS, Time-of-Flight Mas) a gas chemical analysis device such as a Spectrometry, an Ion Chromatography, or the like, which is usually connected to a pump 13 through an exhaust line 11, which can be built into the analysis device 2 Or independent of the analysis device 2, for extracting the air sample A1 to be analyzed Flowing through the analysis device 2 to perform gas analysis. In addition, the air sample A1 may be subjected to pretreatment such as a thermal desorption (TD) device before entering the analysis device 2. The device performs pre-processing of the sample. Here, the basic structure, operation principle and function of the pre-processing device and the analysis device 2 are well known to those skilled in the art, and details are not described herein.

The conventional gas measurement analysis framework can achieve the purpose of sampling and analyzing the air sample A1, but all the air samples A1 can only enter and exit the analysis device from the single injection line 10 and the suction line 11. In this way, the flow rate of the air sample A1 is lowered, so that the pollutants to be analyzed in the air sample A1 are likely to remain attached to the respective pipelines, resulting in concentration and recovery of the air sample A1 (percent recovery, %R). ) lowering, which in turn affects the accuracy of the measurement and the reliability of the product. If it is to avoid or alleviate the aforementioned defects, the length of the sampling line must be shortened, but this will limit the installation location of the analysis device 2, affecting the operation or use. Convenience, in addition, the low flow rate of the air sample A1 is also likely to cause pollution to the injection line 10 and interference of the next measurement, so how to improve the above-mentioned defects, that is, the inventor of the present invention wants to solve Technical difficulties are at the point.

In view of the existing gas measurement and analysis architecture, the gas analyzer is capable of improving the recovery rate because the flow rate of the air sample is low during the injection, which causes the recovery rate to decrease and affects the accuracy of the measurement analysis. Sampling device.

In order to achieve the above object, the present invention provides a high recovery gas analyzer sampling device, comprising: an analysis device having an inlet and an outlet, and the inlet is connected to a sample introduction tube Road; a first pump, the first pump and analysis The outlets of the device are connected through an air suction pipe, and the first pump is connected with an exhaust pipe; an injection shunt circuit, one end of the injection shunt circuit is connected to one side of the injection pipeline And the exhaust line is connected to one side of the injection split circuit; a second pump, the second pump is disposed on the injection split circuit.

According to the present invention, the injection split circuit and the second pump are provided, and the air flow can be increased by the moderate splitting of the air sample and the synergistic pumping action of the second pump, so that the air sample can be prevented from being too low. The adhesion remains in the pipeline, resulting in a decrease in the recovery rate of the analyte, resulting in a lack of measurement accuracy, thereby enabling the invention to improve the accuracy of measurement and product reliability.

[Use]

10‧‧‧Injection line

11‧‧‧Exhaust line

12‧‧‧Exhaust line

13‧‧‧

2‧‧‧Analytical device

A1‧‧‧ air sample

〔this invention〕

3‧‧‧Analytical device

31‧‧‧Inlet

32‧‧‧Outlet

33‧‧‧Injection line

331‧‧‧ heating device

34‧‧‧Exhaust line

35‧‧‧Exhaust line

4‧‧‧First pump

41‧‧‧First flow meter

5‧‧‧Injection shunt circuit

51‧‧‧Second flowmeter

6‧‧‧Second pump

7‧‧‧Expandable sampling device

71‧‧‧Valve assembly

711‧‧‧ sample export

712‧‧‧Non-sample exports

713‧‧‧ sample entrance

72‧‧‧Non-sample exhaust line

73‧‧‧Sampling tube

A2‧‧‧ air sample

The first picture is a schematic diagram of the structure of the application.

The second figure is a schematic diagram of the architecture of the present invention.

The second A diagram is a schematic diagram of the architecture of the second embodiment of the present invention.

The third figure is a schematic diagram of the action of the present invention.

The fourth figure is a schematic diagram of the architecture of the third embodiment of the present invention.

Referring to the second figure, the present invention provides a high recovery gas analyzer sampling device, comprising: an analysis device 3, in particular, the analysis device 3 can be a gas chromatography mass spectrometer (GC-MS) The gas chemical analysis device, the detailed structure or the operation principle of the gas chemical analysis device belongs to the prior art and is not a technical feature of the present invention, and the analysis device 3 is not described herein again. An injection port 31 and an outlet port 32 are connected to the injection port 31. Please refer to the third figure for the air sample A2 to pass through and enter the analysis device 3, Here, the air sample A2 can be obtained directly through the injection line 33 (or the sampling line extended therefrom) in an automated manner, such as an area in a clean room to be monitored or analyzed, or The air sample A2 can also be sampled by hand. The detailed operation mode of this part is also well known to those skilled in the art, and will not be described in detail herein. Further, preferably, the sample line 33 can be further disposed around. There is a heating device 331, which can be a heating tube; a first pump 4, the first pump 4 and the sampling device 32 of the analyzing device 3 are connected through an air suction line 34 for providing The air sample A2 enters and exits the analysis device 3 outside the power source, and the first pump 4 is connected with an exhaust line 35 for discharging the air sample A2, and the exhaust line 35 can further be provided with a first a flow meter 41, that is, in the embodiment, the first The pump 4 is externally connected to the outside of the analyzing device 3; in addition, please refer to the second embodiment A, which shows a second embodiment of the present invention, wherein the first pump 4 can also be built in the analyzing device 3, At this time, the suction line 34 is connected to the inlet 31 of the analysis device 3, and the exhaust line 35 is connected to the outlet 32; an injection bypass circuit 5, one end of the injection bypass circuit 5 Connected to one side of the injection line 33, the exhaust line 35 is in communication with the side of the injection split circuit 5; a second pump 6, the second pump 6 is disposed in the injection split circuit In addition, a second flow meter 51 may be further disposed on the injection split circuit 5 behind the second pump 6, that is, the second pump 6 is located in the second flow meter 51 and the injection line. Between 33; please refer to the second and third figures. With the present invention, the injection shunt circuit 5 and the second pump 6 are provided, and when the air sample A2 enters the sample line 33, Passing through When the shunt circuit 5 is injected, the air sample A2 is divided into two by the power of the first pump 4 and the second pump 6, so that a part of the air sample A2 flows to the analyzing device 3. Measurement analysis, another part of the air sample A2 will flow directly into the injection split circuit 5, that is, compared to the conventional gas measurement analysis architecture, the air sample A2 of the present invention will not all be injected by the sample. The line 33 enters the analysis device 3, where the flow rate of the air sample A2 can be significantly increased by appropriately diverting the air sample A2 and the synergistic pumping action of the second pump 6, so that the air sample A2 can be prevented from being flown. If the adhesion is too low and the adhesion remains in the pipeline, the concentration and recovery rate of the air sample A2 measured by the analyzer 3 are reduced, resulting in a lack of measurement accuracy, thereby enabling the invention to improve the measurement accuracy and In addition, a first flow meter 41 is disposed on the exhaust line 35, and a second flow meter 51 is disposed on the sample split circuit 5 to enable the operator to immediately know the air. Sample A2 flow or flow rate, but It is necessary to adjust the operating speed of the first pump 4 or the second pump 6 by automatic control or manual operation, thereby finely adjusting the flow rate of the air sample A2 and improving the practicability of the present invention; The heating device 331 is disposed around the injection line 33, so that the sample line 33 can maintain a certain temperature, and the air sample A2 in the sample line 33 is increased in temperature due to an increase in temperature. It is not easy to fall and adhere to the inner wall of the pipeline, so that the invention can achieve the effect of achieving better product reliability; please refer to the fourth figure for the third embodiment of the present invention, which further includes an expandable a sampling device 7, the expandable sampling device 7 includes a valve assembly 71, which may be a solenoid valve or a manual valve, etc., which can be used as a pipeline switching valve, at least one non-sample exhaust line 72 and at least two a sampling tube 73 having the same outlet 711, at least one non-sample outlet 712, and at least two sample inlets 713 corresponding to the sampling tube 73, wherein each of the sampling tubes 73 is respectively associated with the valve Sample of component 71 The entrances 713 are connected, and The other end of each of the sampling tubes 73 can be respectively disposed at each place to be sampled according to the user's needs. The sample outlet 711 of the valve assembly 71 can be connected to the sampling line 33. One end of the non-sample exhaust line 72 The non-sample outlet 712 is connected to the valve assembly 71, and the other end of the non-sample exhaust line 72 is in communication with the second pump 6, whereby the present invention can control each valve in the valve assembly 71. The direction of the piece and the opening time, so that at the same time, only the air sample A2 of one of the sampling tubes 73 can pass through the sample outlet 711 and enter the injection line 33, while the air sample A2 of the other sampling tube 73 passes through The non-sample outlet 712 and the non-sample exhaust line 72 are discharged by the second pump 6, so that the present invention can have the function of multi-point sampling, and at the same time, the valve assembly 71 is used to replace the general number of holes by the present embodiment. The fixed multi-directional valve can conveniently adjust and adjust the number of valve members of the valve assembly 71 according to actual needs, thereby improving the flexibility of system configuration or expansion, thereby enabling the invention to achieve better product practicability.

3‧‧‧Analytical device

31‧‧‧Inlet

32‧‧‧Outlet

33‧‧‧Injection line

331‧‧‧ heating device

34‧‧‧Exhaust line

35‧‧‧Exhaust line

4‧‧‧First pump

41‧‧‧First flow meter

5‧‧‧Injection shunt circuit

51‧‧‧Second flowmeter

6‧‧‧Second pump

Claims (10)

A high-recovery gas analyzer sampling device comprises: an analyzing device having an inlet and an outlet, the injection port is connected with a sample line; a first pump, the first A pump is connected to the outlet of the analysis device through a suction line for providing an air sample to and from the analysis device, and the first pump is connected to an exhaust line for Discharging the air sample; an injection shunt circuit, one end of the injection shunt circuit is connected to one side of the injection line, and the exhaust line is connected to one side of the injection shunt circuit; a second pump, The second pump is disposed on the injection split circuit. The high-recovery gas analyzer sampling device according to claim 1, wherein the exhaust pipe is provided with a first flow meter. The high-recovery gas analyzer sampling device according to claim 1, wherein a second flow meter is disposed on the injection split circuit behind the second pump. The high-recovery gas analyzer sampling device according to claim 1, wherein a heating device is disposed around the injection line. The high-recovery gas analyzer sampling device according to any one of claims 1 to 4, further comprising an expandable sampling device. The high recovery rate gas analyzer sampling device according to claim 5, wherein the expandable sampling device comprises a valve assembly, at least one non-sample exhaust line and at least two sampling tubes, the valve assembly respectively Connected to each of the sampling tube, the injection line, and the non-sample exhaust line. A high-recovery gas analyzer sampling device comprises: an analyzing device having an inlet and an outlet, the injection port is connected with a sample line; a first pump, the first a pump is disposed in the analysis device, and the first pump is connected to the inlet of the analysis device through an air suction pipe for providing air samples to and from the analysis device, and the power source A pump is connected to an exhaust line for discharging the air sample, the exhaust line is connected to the sample outlet; and an injection split circuit is connected to one side of the sample line And the exhaust line is connected to one side of the injection split circuit; and a second pump is disposed on the injection split circuit. The high-recovery gas analyzer sampling device according to claim 7, wherein a first flow meter is disposed on the exhaust line, and a second flow is disposed on the injection split circuit behind the second pump. meter. The high-recovery gas analyzer sampling device according to claim 7, wherein a heating device is disposed around the injection line. The high-recovery gas analyzer sampling device according to any one of claims 7 to 9, further comprising an expandable sampling device, wherein the expandable sampling device comprises a valve assembly, at least one The non-sample exhaust line is connected to at least two sampling tubes, and the valve assembly is respectively connected to each of the sampling tube, the injection line, and the non-sample exhaust line.