TWM480069U - High recycling rate gas analyzer sampling device - Google Patents

Description

High recovery gas analyzer sampling device

This creation is about a gas analyzer sampling device, especially for a gas analyzer sampling device that can improve recovery.

According to the clean room of the general semiconductor or panel industry, it is usually necessary to target AMC (Airborne Molecular Contamination) or VOC (Volatile Organic Compound) in the air. The concentration of organic compounds is measured and monitored to prevent these harmful gases from affecting the yield of the product or the expensive and expensive machinery. Currently, for the measurement and monitoring of AMC or VOC in a clean room environment, please refer to the first figure. Generally, it is manually sampled by a tool such as a gas bag or a stainless steel bucket, or automatically sampled by a sampling line to obtain an air sample A1, and then the air sample A1 is sent to an analyzer through an injection line 10. The measurement device 2 is subjected to measurement analysis, wherein the analysis device 2 can be a Gas Chromatography-Mass Spectrometer (GC-MS, Gas Chromatography-Mass Spectrometer), a Gas Chromatography Flame Ionization Detector (GC-FID, Gas) Chromatography-Flame Ionization Detector), Selected Ion Flow Tube Mass Spectrometry (SIFT-MS), Flight Mass Spectrometer (TOF-MS, Time-of-Flight Mas) a gas chemical analysis device such as Spectrometry, Ion Chromatography, or the like, which is usually connected to a pump 13 through a pumping line 11, which can be built in In addition to or independent of the analysis device 2, the air sample A1 to be analyzed is caused to flow through the analysis device 2 for gas analysis, and further, before the air sample A1 enters the analysis device 2, Sometimes, a pre-processing device such as a thermal desorption (TD) device is used to perform pre-processing of the sample. Here, the basic structure, operation principle and function of the pre-processing device and the analysis device 2 are It is well known to those skilled in the art and will not be described here.

The conventional gas measurement analysis framework can achieve the purpose of sampling and analyzing the air sample A1, but all the air samples A1 can only enter and exit the analysis device from the single injection line 10 and the suction line 11. In this way, the flow rate of the air sample A1 is lowered, so that the pollutants to be analyzed in the air sample A1 are likely to remain attached to the respective pipelines, resulting in concentration and recovery of the air sample A1 (percent recovery, %R). ) lowering, which in turn affects the accuracy of the measurement and the reliability of the product. If it is to avoid or alleviate the aforementioned defects, the length of the sampling line must be shortened, but this will limit the installation location of the analysis device 2, affecting the operation or use. Convenience, in addition, the low flow rate of the air sample A1 is also likely to cause pollution to the injection line 10 and interference with the next measurement. Therefore, how to improve the above-mentioned defects, that is, the applicant of the present invention wants to solve the problem. Technical difficulties are at the point.

In view of the existing gas measurement and analysis architecture, the purpose of this creation is to provide a gas analyzer that can improve the recovery rate because the flow rate of the air sample is lower during the injection, which causes the recovery rate to decrease and affects the accuracy of the measurement analysis. Sampling device.

To achieve the above objectives, the present invention provides a high recovery gas analyzer sampling device comprising: an analysis device having an inlet and a sample port, the injection port is connected to a sample line; a first pump, the first pump and the analysis device are connected through a suction line between the sample outlets, and the first pump Connected to an exhaust line; an injection split circuit, one end of the injection split circuit is connected to one side of the injection line, and the exhaust line is connected to one side of the injection split circuit; Pu, the second pump is set on the injection shunt circuit.

With the creation of the injection split circuit and the second pump, the 俾 can improve the flow rate of the air sample by moderately diverting the air sample and the synergistic pumping action of the second pump, so as to avoid the air sample being too low in flow rate. The adhesion remains in the pipeline, resulting in a decrease in the recovery rate of the analyte, resulting in a lack of measurement accuracy, which in turn enables the creation to improve the accuracy of measurement and product reliability.

[Use]

10‧‧‧Injection line

11‧‧‧Exhaust line

12‧‧‧Exhaust line

13‧‧‧

2‧‧‧Analytical device

A1‧‧‧ air sample

[this creation]

3‧‧‧Analytical device

31‧‧‧Inlet

32‧‧‧Outlet

33‧‧‧Injection line

331‧‧‧ heating device

34‧‧‧Exhaust line

35‧‧‧Exhaust line

4‧‧‧First pump

41‧‧‧First flowmeter

5‧‧‧Injection shunt circuit

51‧‧‧Second flowmeter

6‧‧‧Second pump

7‧‧‧Expandable sampling device

71‧‧‧Valve assembly

711‧‧‧ sample export

712‧‧‧Non-sample exports

713‧‧‧ sample entrance

72‧‧‧Non-sample exhaust line

73‧‧‧Sampling tube

A2‧‧‧ air sample

The first picture is a schematic diagram of the structure of the application.

The second picture is a schematic diagram of the architecture of this creation.

The second A diagram is a schematic diagram of the architecture of the second embodiment of the present invention.

The third picture is a schematic diagram of the action of this creation.

The fourth figure is a schematic diagram of the architecture of the third embodiment of the present creation.

Referring to the second figure, the present invention provides a high-recovery gas analyzer sampling device, which comprises: an analyzing device 3. Specifically, the analyzing device 3 can be a gas chromatography mass spectrometer (G°C- Gas chemical analysis device such as MS), detailed structure of the gas chemical analysis device The operation principle is a prior art and is not a technical feature of the present invention. For details, the analysis device 3 has an inlet 31 and an outlet 32. The inlet 31 is connected with a sample line 33. Referring again to the third figure, the air sample A2 is passed through and enters the analysis device 3, where the air sample A2 can pass through the injection line 33 (or the sampling line extending therefrom) directly It is obtained in an automated manner at the site (e.g., in an area of the clean room to be monitored or analyzed), or the air sample A2 can also be manually sampled, and the detailed operation of this portion is also well known to those skilled in the art. It is not described in detail here. Further, preferably, a heating device 331 may be further disposed around the sampling line 33. The heating device 331 may be a heating tube; a first pump 4, the first pump 4 Connected to the sample outlet 32 of the analysis device 3 through a suction line 34 for providing air sample A2 to and from the analysis device 3, and the first pump 4 is connected to an exhaust line. 35, for discharging the air sample A2, and the exhaust pipe A first flow meter 41 can be further disposed on the 35, that is, in the embodiment, the first pump 4 is externally connected to the outside of the analyzing device 3; in addition, please refer to the second figure A. A second embodiment of the present invention, wherein the first pump 4 is also built into the analysis device 3, and the air suction line 34 is connected to the inlet 31 of the analysis device 3, The exhaust line 35 is connected to the sample outlet 32; an injection split circuit 5, one end of the sample split circuit 5 is connected to the side of the sample line 33, and the exhaust line 35 and the injection line The side of the shunt circuit 5 is connected to each other; a second pump 6 is disposed on the injection shunt circuit 5, and further, the injection shunt circuit 5 behind the second pump 6 can be further provided. There is a second flow meter 51, that is, the second pump 6 is located between the second flow meter 51 and the injection line 33; please refer to the second and third figures, The injection split The circuit 5 and the second pump 6, after the air sample A2 enters the sample line 33, when it passes through the sample split circuit 5, the air sample A2 is due to the first pump 4 and the second pump The power of 6 is divided into two, so a part of the air sample A2 will flow to the analysis device 3 for measurement analysis, and another part of the air sample A2 will flow directly into the injection and shunt circuit 5, That is, compared to the conventional gas measurement analysis framework, the air sample A2 of the present creation does not all enter the analysis device 3 from the injection line 33, where the air sample A2 is appropriately shunted and the second pump is The synergistic pumping action of 6 can significantly increase the flow rate of the air sample A2, and the air sample A2 can be prevented from adhering and remaining in the pipeline due to the low flow rate, resulting in the concentration of the air sample A2 measured by the analysis device 3 and The recovery rate is reduced, resulting in the lack of measurement accuracy, so that the creation can achieve the effect of improving the measurement accuracy and product reliability; in addition, a first flow meter is disposed on the exhaust line 35. 41, the injection shunt circuit 5 is provided with a second The flow meter 51 allows the operator to immediately know the flow rate or flow rate of the air sample A2, and can adjust the running speed of the first pump 4 or the second pump 6 by automatic control or manual operation as needed, thereby fine-tuning Controlling the air sample A2 and the flow rate, the utility of the present invention can be improved; in addition, the heating device 331 is disposed around the injection line 33, so that the sample line 33 can maintain a certain temperature. The air sample A2 in the injection line 33 causes the molecular kinetic energy to rise due to the temperature rise, and is less likely to fall and adhere to the inner wall of the pipeline, thereby enabling the creation of the product to achieve better product reliability; Referring to the fourth embodiment, a third embodiment of the present invention is further included, which further includes an expandable sampling device 7 including a valve assembly 71, which may be a solenoid valve or a manual valve. The valve member can be used as a line switching, at least one non-sample exhaust line 72 and at least two sampling tubes 73 having the same outlet 711, at least one non-sample outlet 712, and at least two with the sampling Tube 73 corresponds A sample inlet 713, Each of the sampling tubes 73 is respectively connected to the sample inlet 713 of the valve assembly 71, and the other end of each of the sampling tubes 73 is respectively disposed at a place to be sampled according to the user's requirements. The valve assembly 71 is The sample outlet 711 can be connected to the injection line 33. One end of the non-sample exhaust line 72 is connected to the non-sample outlet 712 of the valve assembly 71, and the other end of the non-sample exhaust line 72 is second. The pump 6 is connected, whereby the creation can control the direction and the opening time of each valve member in the valve assembly 71, so that only one of the air samples A2 of the sampling tube 73 can pass through the same time. The sample outlet 711 enters the injection line 33, and the air sample A2 of the other sampling tube 73 is discharged by the second pump 6 via the non-sample outlet 712 and the non-sample exhaust line 72, so that the creation can be The utility model has the function of multi-sampling, and at the same time, the valve assembly 71 is used in the embodiment to replace the multi-directional valve with a fixed number of holes, and the number of the valve components of the valve assembly 71 can be expanded and adjusted according to actual needs. Resiliency of configuration or expansion, This can achieve the creation of a better product availability.

3‧‧‧Analytical device

31‧‧‧Inlet

32‧‧‧Outlet

33‧‧‧Injection line

331‧‧‧ heating device

34‧‧‧Exhaust line

35‧‧‧Exhaust line

4‧‧‧First pump

41‧‧‧First flowmeter

5‧‧‧Injection shunt circuit

51‧‧‧Second flowmeter

6‧‧‧Second pump

Claims (10)

A high-recovery gas analyzer sampling device comprises: an analyzing device having an inlet and an outlet, the injection port is connected with a sample line; a first pump, the first A pump is connected to the outlet of the analysis device through a suction line for providing an air sample to and from the analysis device, and the first pump is connected to an exhaust line for Discharging the air sample; an injection shunt circuit, one end of the injection shunt circuit is connected to one side of the injection line, and the exhaust line is connected to one side of the injection shunt circuit; a second pump, The second pump is disposed on the injection split circuit. The high-recovery gas analyzer sampling device according to claim 1, wherein the exhaust pipe is provided with a first flow meter. The high-recovery gas analyzer sampling device according to claim 1, wherein a second flow meter is disposed on the injection split circuit behind the second pump. The high-recovery gas analyzer sampling device according to claim 1, wherein a heating device is disposed around the injection line. The high-recovery gas analyzer sampling device according to any one of claims 1 to 4, further comprising an expandable sampling device. The high recovery rate gas analyzer sampling device according to claim 5, wherein the expandable sampling device comprises a valve assembly, at least one non-sample exhaust line and at least two sampling tubes, the valve assembly respectively Connected to each of the sampling tube, the injection line, and the non-sample exhaust line. A high-recovery gas analyzer sampling device comprises: an analyzing device having an inlet and an outlet, the injection port is connected with a sample line; a first pump, the first a pump is disposed in the analysis device, and the first pump is connected to the inlet of the analysis device through an air suction pipe for providing air samples to and from the analysis device, and the power source A pump is connected to an exhaust line for discharging the air sample, the exhaust line is connected to the sample outlet; and an injection split circuit is connected to one side of the sample line And the exhaust line is connected to one side of the injection split circuit; and a second pump is disposed on the injection split circuit. The high-recovery gas analyzer sampling device according to claim 7, wherein a first flow meter is disposed on the exhaust line, and a second flow is disposed on the injection split circuit behind the second pump. meter. The high-recovery gas analyzer sampling device according to claim 7, wherein a heating device is disposed around the injection line. The high-recovery gas analyzer sampling device according to any one of claims 7 to 9, further comprising an expandable sampling device, wherein the expandable sampling device comprises a valve assembly, at least one The non-sample exhaust line is connected to at least two sampling tubes, and the valve assembly is respectively connected to each of the sampling tube, the injection line, and the non-sample exhaust line.