TW201530102A - Optical measuring apparatus - Google Patents

Abstract

There is provided an optical measuring apparatus for measuring optical properties of optical elements, which can achieve a reliable measurement result with a simple structure. The optical measuring apparatus includes: an optical attenuator that attenuates the light emitted from an optical element; a measuring device that measures the optical property of the light attenuated by the optical attenuator; and a controller that determines the amount of the attenuation by the optical attenuator, based on the amount of the light emitted from the optical element.

Description

Optical measuring device

The present invention relates to an optical measuring device.

Patent Document 1 discloses an inspection apparatus for performing optical inspection of an LED (Light Emitting Diode).

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2013-11542

However, in the apparatus disclosed in Patent Document 1, the optical characteristics of the LED are measured using a spectroscope, and there is still room for improvement in the reliability of the measurement result in terms of the characteristics of the spectroscope.

The present invention has been made in view of the above circumstances as a problem. That is, an object of the present invention is to provide an optical measuring apparatus which has a simple structure and can obtain a highly reliable measurement result in measurement of optical characteristics of a light-emitting element.

An optical measuring apparatus according to claim 1 of the present invention includes: an optical attenuator that attenuates light emitted from the light emitting element; a measuring device that measures optical characteristics of light attenuated by the optical attenuator; and a control a light according to the light emitted by the light-emitting element Quantity, set the attenuation of the optical attenuator.

3‧‧‧Optical measuring device

101‧‧‧Lighting elements

101a‧‧‧Lighting surface

103‧‧‧Loading table

103a‧‧‧glass table

103b‧‧‧cutting piece

105‧‧‧Photodetector

108‧‧·score ball

108a‧‧‧ inner wall

108b‧‧‧take entrance

108c‧‧‧Export

109‧‧‧Probe

111‧‧‧Signal line

113‧‧‧Amplifier

117‧‧‧ fiber optic

117a‧‧‧Fiber head

117b‧‧‧Light transmission path

117c‧‧‧ entrance port

117d‧‧‧First path

117e‧‧‧second path

120‧‧‧Light Guide

121‧‧‧Spectroscope

123‧‧‧Light attenuator

123a‧‧‧Polar plate

123b‧‧‧Polar plate

123c‧‧‧bukers unit

125‧‧‧Electrical Characteristics Measurement Department

151‧‧‧Control Department

153‧‧‧HV unit

155‧‧‧ESD unit

157‧‧‧Switch unit

159‧‧‧ Positioning unit

163‧‧‧Output Department

A‧‧‧Distance from the center of the light-emitting element 101 to be measured to the outer edge

B‧‧‧Distance between adjacent light-emitting elements 101

D‧‧‧Distance from the center of the light-emitting element 101 to the outer edge of the range S ₀ when the range S _{0 is} projected onto the light-emitting element 101

L‧‧‧ Distance between the light-emitting element 101 and the optical fiber 117 to be measured

LCA‧‧‧Lighting Center Shaft

S ₀ ‧‧‧The range indicated by the numerical aperture NA

S10‧‧‧ steps

S20‧‧‧ steps

S30‧‧‧ steps

S40‧‧‧ steps

S50‧‧ steps

S60‧‧ steps

S70‧‧‧ steps

S80‧‧‧ steps

X‧‧‧ Distance from the center of the light-emitting element 101 to be measured to the outer edge of the light-emitting element 101 adjacent to the light-emitting element 101 to be measured

α‧‧‧Maximum angle of incidence of light obtained by total reflection in fiber 117

Θ‧‧‧ When the Φ is fixed, it will be angled with the central axis of the illumination LCA

Φ‧‧‧ When the direction including the plane of the light-emitting surface 101a is taken as the reference axis (x-axis), the angle of rotation from the x-axis on the plane is counterclockwise

Only a few embodiments of the present invention will be described below with reference to the drawings.

Fig. 1 (a) to (c) show the measurement of the light emission state of the light-emitting element by an optical measuring device.

Fig. 2 is a view schematically showing the configuration of an optical measuring device.

Fig. 3 is an enlarged view of an optical fiber and a light-emitting element included in the optical measuring device.

Fig. 4 is a view showing the configuration of an optical attenuator included in the optical measuring device.

Fig. 5A shows the photoelectric conversion characteristics of the spectroscope.

Fig. 5B shows an example of the spectral characteristics of the light-emitting element measured by the spectroscope.

Fig. 6 is a flowchart for explaining processing performed when the control unit of the optical measuring apparatus performs optical characteristic measurement.

Fig. 7 is an explanatory view showing a modification 1 of the optical measuring device.

Fig. 8 is an explanatory view showing a second modification of the optical measuring device.

Fig. 9 is a flow chart for explaining processing performed when the control unit shown in Fig. 8 performs optical characteristic measurement.

Fig. 10 is an explanatory view showing a modification 3 of the optical measuring device.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below are only a few examples of the present invention, and the present invention is not limited by the contents thereof. In addition, all the structures and operations described in the respective embodiments are not essential structures or operations of the present invention. In addition, the same components are denoted by the same reference numerals, and the duplicated description is omitted.

<Lighting condition of light-emitting element>

The state of light emission of the light-emitting element 101 measured by the optical measuring device 3 will be described with reference to Fig. 1 .

Fig. 1 shows the measurement of the light-emitting state of the light-emitting element 101 by the optical measuring device 3.

The light-emitting element 101 includes at least an electrode and a light-emitting portion, which is an element that emits light of a specific wavelength range when power is supplied. The light emitting element 101 can be, for example, a light emitting diode.

As shown in FIG. 1(a), the light emitted from the light-emitting surface 101a of the light-emitting element 101 is radially formed.

The light emitting surface 101a is located on the surface of the light emitting element 101. The normal line of the light-emitting surface 101a of the light-emitting element 101 is referred to as an emission center axis LCA. In Fig. 1(a), the light-emitting surface 101a is a surface of the light-emitting element 101 on the positive side of the light-emitting central axis LCA.

When a direction on the plane including the light-emitting surface 101a is taken as the reference axis (x-axis), the angle rotated counterclockwise from the x-axis on the plane is defined as Φ. Further, when Φ is fixed, the angle with the center axis of illumination LCA is defined as θ.

When the light-emitting element 101 emits light, the intensity of light emitted from the light-emitting surface 101a differs depending on the angle θ or the like between the light-emitting central axis LCA.

The amount of light is such that the value of Φ is from 0° to 360°, and the value of θ is from 0° to 90°, and the light intensity is calculated for the back side of the light-emitting element 101, and two of them are calculated. The total value of the person.

By knowing the amount of light, it is possible to check whether or not the light-emitting element 101 is suitable for various modes of use.

The value of the light intensity emitted from the light-emitting element 101 differs depending on the different θ and Φ. In order to visually express the light intensity, it is explained using the figure of FIG. 1(b).

In Fig. 1(b), the intersection of the x-axis and the y-axis is represented by θ = 0°. Each point on the circle represents the position of each Φ of θ = 90°.

Figure 1 (c) is a cross-sectional view of the Φ value at a fixed position.

Here, the light intensity is defined as the light distribution intensity E(θ) at the same distance from the light-emitting element 101 and at an angle θ with respect to the light-emitting central axis LCA. The light distribution intensity E(θ) corresponds to the light distribution intensity distribution of each θ as shown in the figure.

In addition, once you know the distribution of light distribution, you can follow the next steps to find out The amount of light of the light-emitting element 101.

That is, the light distribution intensity E(θ) is integrated by the circumference around the light emission center axis LCA (integrally from Φ=0° to 360°), and the circumferential light distribution intensity J(θ) is obtained. The circumferential light intensity J(θ) is J(θ)=E(θ). 2πr. Sin θ is expressed. By integrating θ=0° to θ° of the circumferential light distribution intensity J(θ), the amount of light K(θ) on the surface side of the light-emitting element 101 can be obtained.

Further, by multiplying K(θ) by the fixed coefficient κ, the amount of light on the back side of the light-emitting element 101 can be calculated.

Next, the amount of light K (θ) on the surface side is added to the amount of light K (θ) on the back side. κ, the amount of light of the light-emitting element 101 can be calculated.

In addition, it is understood that the light-emitting element 101 manufactured by the same process has a substantially constant difference between the amount of light on the surface side of the light-emitting element 101 and the amount of light on the back side. Therefore, as long as the amount of light of one light-emitting element 101 is actually measured and the coefficient κ is obtained, the other light-emitting elements 101 can also apply this value.

In the description of Fig. 1, it is assumed that the light-emitting element 101 can be regarded as one point, assuming that the measurement is made far enough from the light-emitting element 101. The light-emitting element 101 is extremely small compared to the general photodetector 105 (see FIG. 2), and thus such an assumption can be established. Unless otherwise stated in the description of FIG. 2 and subsequent steps, the same is true.

<Configuration of Optical Measuring Device>

The structure of the optical measuring device 3 will be described with reference to Figs. 2 and 3 .

FIG. 2 schematically shows the configuration of the optical measuring device 3. 3 is an enlarged view of the optical fiber 117 and the light-emitting element 101 included in the optical measuring device 3.

The optical measuring device 3 is a device that measures the optical characteristics of light emitted from the light-emitting element 101. The optical characteristics measured by the optical measuring device 3 include at least the amount of light, the wavelength, and the chromaticity of the light emitted from the light-emitting element 101.

The optical measuring device 3 supplies electric power to the light-emitting element 101 to emit light, and measures the optical characteristics of the light emitted from the light-emitting element 101. The light-emitting element 101 has a plurality of arranged states Then, the optical measuring device 3 sequentially supplies electric power to the light-emitting elements 101 to be measured among the plurality of arranged light-emitting elements 101 to measure the optical characteristics of the light emitted by the light-emitting elements 101 to be measured.

The optical measuring device 3 can be applied to an inspection device used in an inspection step included in the process of the light-emitting element 101. The optical measuring device 3 can measure the electrical characteristics in addition to the optical characteristics of the light-emitting element 101.

The optical measuring apparatus 3 includes at least a mounting table 103, a probe 109, an optical fiber 117, a signal line 111, a spectroscope 121, an optical attenuator 123, an electrical characteristic measuring unit 125, a control unit 151, and an output unit 163.

The mounting table 103 is a measurement sample stage on which the light-emitting element 101 to be measured is placed.

The placing table 103 has a substantially uniform flat shape and is provided to be substantially horizontal.

The mounting table 103 and the light-emitting elements 101 mounted thereon are substantially parallel to each other.

The mounting table 103 has at least a glass table 103a and a dicing sheet 103b.

The glass table 103a uses a light-transmitting material such as sapphire or glass to form a substantially uniform flat plate shape.

The surface of the dicing sheet 103b has adhesiveness and is laminated on the glass table 103a. The light-emitting element 101 is placed on this dicing sheet 103b.

The mounting table 103 having the dicing sheet 103b can easily transfer the light-emitting element 101 to the mounting table 103 at the time of measurement, and suppress the displacement thereof.

Further, in the process of the light-emitting element 101, when a plurality of light-emitting elements 101 are arranged in advance on the dicing sheet 103b, the light-emitting element 101 and the dicing sheet 103b may be placed together on the glass table 103a.

The probe 109 supplies electric power to the light emitting element 101 to cause the light emitting element 101 to emit light. The probe 109 is substantially parallel to the light-emitting surface 101a of the light-emitting element 101, and radially extends in a direction perpendicular to the normal to the light-emitting element 101.

The probe 109 of FIG. 2 contacts the light-emitting element when measuring the optical characteristics of the light-emitting element 101. The electrode of 101 is applied to it. Further, the probe 109 is connected to the electrical characteristic measuring unit 125, and the electrical characteristics of the light-emitting element 101 can be simultaneously measured. The probe 109 is disposed on the upper surface, the lower surface, or the upper and lower surfaces of the light-emitting element 101 in accordance with the electrode position of the light-emitting element 101.

When the probe 109 is brought into contact with the light-emitting element 101, the probe 109 can be moved while the mounting table 103 and the light-emitting element 101 are fixed. Conversely, the mounting table 103 and the light-emitting element 101 may be moved while the probe 109 is stationary.

The optical fiber 117 takes in light emitted from the light-emitting element 101 and conducts light to the spectroscope 121. The optical fiber 117 takes in light using a predetermined numerical aperture.

As shown in FIG. 3, the optical fiber 117 includes a fiber tip 117a, an optical transmission path 117b, and an entrance port 117c.

The optical fiber head 117a is a portion that takes in light.

The optical fiber head 117a is formed in a cylindrical shape. The tip end of the optical fiber head 117a is provided with an opening for allowing light to enter, that is, an entrance port 117c. The optical fiber head 117a is disposed such that the entrance port 117c faces the light emitting surface 101a of the light emitting element 101. The central axis of the entrance port 117c is substantially the same as the central axis of illumination LCA of the light-emitting element 101 to be measured. The central axis of the fiber tip 117a is substantially the same as the central axis of the entrance port 117c.

The entrance port 117c makes light incident in a range corresponding to the numerical aperture of the predetermined optical fiber 117.

The optical transmission path 117b is optically connected to the optical fiber head 117a at the end opposite to the distal end of the entrance port 117c and the beam splitter 121.

The light transmission path 117b guides light incident from the entrance port 117c to the beam splitter 121. The light transmission path 117b totally reflects the light incident from the entrance port 117c inside, and reduces the transmission loss as much as possible, and guides the light to the spectroscope 121.

The spectroscope 121 detects the light emitted from the light-emitting element 101 via the optical fiber 117 and the optical attenuator 123, and measures the optical characteristics.

Among the optical characteristics measured by the spectroscope 121, at least the light-emitting element 101 is included The amount of light, wavelength and chromaticity of the light.

The spectroscope 121 includes a light receiving element. Once light is incident on the light receiving element, the spectroscope 121 generates a charge corresponding to the incident light by photoelectric conversion. The light receiving element of the spectroscope 121 is, for example, a CCD (Charge Coupled Device) or a photodiode array.

The spectroscope 121 wavelength-scatters the incident light, and obtains the light intensity of each wavelength after dispersion. The light intensity at each wavelength corresponds to the wavelength spectrum information of the incident light. The spectroscope 121 calculates the component ratios of the red (R), green (G), and blue (B) tristimulus values from the wavelength spectrum information, and obtains the chromaticity of the incident light. Further, the spectroscope 121 accumulates the light intensities of the respective wavelengths after dispersion, and obtains the amount of incident light. The beam splitter 121 can find other optical characteristics as needed.

The beam splitter 121 produces electrical signals corresponding to the various optical characteristics found. The spectroscope 121 outputs the generated electric signal to the control unit 151 via the signal line 111. The electrical signal corresponds to wavelength spectrum information, chromaticity information, and light amount information measured by the beam splitter 121.

The optical attenuator 123 is disposed on the optical transmission path 117b of the optical fiber 117 between the optical fiber head 117a where the entrance port 117c is provided and the optical splitter 121.

The optical attenuator 123 attenuates the light emitted by the light emitting element 101 and guides the attenuated light to the beam splitter 121. The light detected by the spectroscope 121 is the light attenuated by the optical attenuator 123.

The detailed configuration of the optical attenuator 123 will be described later using FIG.

Here, as shown in FIG. 3, the distance between the light-emitting element 101 to be measured and the optical fiber 117 is defined as L. The distance from the center to the outer edge of the light-emitting element 101 to be measured is defined as A. The distance between adjacent light-emitting elements 101 is defined as B. The distance from the center of the light-emitting element 101 to be measured to the outer edge of the light-emitting element 101 adjacent to the light-emitting element 101 to be measured is defined as X.

Further, the maximum value of the incident angle of the light obtained by total reflection in the optical fiber 117 is defined as α. The medium between the optical fiber 117 and the light-emitting element 101 is assumed to be air, and its refractive index = 1 is defined. The numerical aperture of the optical fiber 117 is defined as NA, and the range indicated by the numerical aperture NA is defined as S ₀ . The distance from the center of the light-emitting element 101 to the outer edge of the range S ₀ when the range S _{0 is} projected onto the light-emitting element 101 is defined as D.

At this time, the numerical aperture NA is NA = sinα. The distance X is X=A+B. The distance D is D = Ltan α.

When the light-emitting element 101 exists in the range S ₀ indicated by the numerical aperture NA, the light emitted from the light-emitting element 101 is totally reflected in the optical fiber 117 and is guided to the spectroscope 121. On the other hand, if the light-emitting element 101 does not exist in the range S ₀ , the light emitted from the light-emitting element 101 cannot be guided to the spectroscope 121.

Therefore, the range S ₀ indicated by the numerical aperture NA corresponds to the range in which the light can be detected by the spectroscope 121.

In the present embodiment, the range in which the light is detected by the spectroscope 121 may be referred to as a "detection range".

Further, the detection range of the spectroscope 121 corresponds to the range of light in which the optical measurement device 3 can measure optical characteristics.

In the optical measuring apparatus 3, the distance L satisfying the following formula is set in advance so that the light-emitting element 101 to be measured is located in the range S ₀ and the light-emitting elements 101 other than the measurement target are not located in the range S ₀ .

A/tanα≦L≦X/tanα

As a result, in the state in which the plurality of light-emitting elements 101 are arranged, the optical measuring device 3 does not detect the unintended light emitted from the light-emitting element 101 other than the measurement target, and only detects the light emitted as the measurement target. Light emitted by element 101.

The "unexpected light emitted from the light-emitting element 101 other than the measurement target" refers to light emitted from the light-emitting element 101 other than the measurement target caused by the light emission of the light-emitting element 101 to be measured.

For example, light emitted from the light-emitting element 101 to be measured is incident on the measurement target. The light-emitting element 101 other than the light-emitting element 101 causes the light-emitting element 101 other than the measurement target to be excited to emit light.

Alternatively, for example, the light emitted from the light-emitting element 101 to be measured is incident on the light-emitting element 101 other than the measurement target, and the light emitted from the light-emitting element 101 other than the measurement target is reflected by the reflection.

The electrical characteristic measurement unit 125 includes at least a positioning unit 159, an HV unit 153, an ESD unit 155, and a switching unit 157.

The positioning unit 159 positions and fixes the probe 109. Specifically, in the form in which the placement table 103 moves, the positioning unit 159 has a function of holding the tip end position of the probe 109 at a fixed position. Conversely, in the form in which the probe 109 is moved, the positioning unit 159 has a predetermined position at which the tip end position of the probe 109 is moved to the mounting table 103 on which the light-emitting element 101 is placed, and thereafter held therein. The function of the location.

The HV unit 153 has a function of applying a rated voltage and detecting various electrical characteristics of the light-emitting element 101 of the rated voltage.

Normally, the light emitted from the light-emitting element 101 is measured by the spectroscope 121 in a state where the voltage from the HV unit 153 is applied.

The various characteristic messages detected by the HV unit 153 are output to the control unit 151.

The ESD unit 155 is a unit that applies an instantaneous large voltage to the light-emitting element 101 to cause electrostatic discharge and checks whether it is subjected to electrostatic breakdown or the like.

The static electricity destruction information detected by the ESD unit 155 is output to the control unit 151.

The switching unit 157 performs switching of the HV unit 153 and the ESD unit 155.

The voltage applied to the light-emitting element 101 by the probe 109 is changed by the switching unit 157. Then, by this change, the inspection items of the light-emitting element 101 can be changed to detect various characteristics at the rated voltage, respectively, or to detect whether they are damaged by static electricity.

The control unit 151 generally controls the operation of the optical measurement device 3.

Wavelength spectrum information, chromaticity information, and light amount information measured by the spectroscope 121 It is input to the control unit 151. The various electrical characteristic information output by the HV unit 153 is input to the control unit 151. The electrostatic breakdown information detected by the ESD unit 155 is also input to the control unit 151.

The control unit 151 classifies and analyzes various characteristics of the light-emitting element 101 by these inputs. After analyzing various characteristics, the control unit 151 outputs the analysis result by the output unit 163 for information such as video output. Further, based on the analysis result, the control unit 151 controls each component of the optical measurement device 3 as needed.

<Optical Attenuator>

The optical attenuator 123 will be described using FIG.

4 shows the configuration of the optical attenuator 123 included in the optical measuring device 3.

The optical attenuator 123 attenuates the light emitted from the light-emitting element 101, and guides the attenuated light to the spectroscope 121.

The optical attenuator 123 can be configured, for example, by an electro-optical element.

As shown in FIG. 4, the optical attenuator 123 composed of an electro-optical element includes a polarizing plate 123a, a polarizing plate 123b, and a Pockels unit 123c.

The polarizing plate 123a and the polarizing plate 123b are for converting the polarization state of the incident light into linearly polarized light. The polarizing plate 123a and the polarizing plate 123b are disposed substantially perpendicular to the incident light. The polarizing plate 123a and the polarizing plate 123b are arranged in a state of being orthogonally polarized.

The Pockels unit 123c is formed of a birefringent material.

The Pockels unit 123c is disposed between the polarizing plate 123a and the polarizing plate 123b. The Pockels cell 123c is configured to be substantially perpendicular to the incident light.

The Pockels unit 123c is connected to a voltage source not shown. The voltage source applies a voltage to the Pockels cell 123c to generate an electric field in the same direction as the direction of travel of the incident light. This voltage source is connected to the control unit 151. The voltage source adjusts the voltage applied to the Pockels cell 123c in accordance with the control signal input from the control unit 151.

Once the voltage from the voltage source is applied to the Pockels cell 123c, it will be due to electricity. The light effect, whose refractive index changes according to the applied voltage. Therefore, the Pockels cell 123c modulates the phase of the incident light converted into linearly polarized light by the polarizing plate 123a, and the incident light can be converted into elliptically polarized light delayed with the applied voltage.

Next, the incident light of the elliptically polarized light delayed by the applied voltage is converted by the Pockels cell 123c, and converted into linearly polarized light by the polarizing plate 123b.

Therefore, the optical attenuator 123 having the Pockels cell 123c can be amplitude-modulated by the phase modulation of the incident light according to the applied voltage, and thus the light intensity of the incident light can be modulated according to the applied voltage.

Thereby, the optical attenuator 123 having the Pockels cell 123c can attenuate the incident light with an attenuation amount corresponding to the control signal input from the control unit 151.

Further, the optical attenuator 123 may be an electro-optical element having no Pockels cell 123c, but an electro-optical element having a Kerr cell. Even the optical attenuator 123 may be composed of a magneto-optical element, an acousto-optic element, or a liquid crystal optical element instead of an electro-optical element.

Further, the optical attenuator 123 may be configured by disposing an optical fiber coupling, that is, a fiber optic connector, on the optical transmission path 117b, and providing an air gap in the optical fiber coupling.

In addition, the optical attenuator 123 may not have the Pockels unit 123c. The optical attenuator 123 may include a polarizing plate and an analyzer which are disposed in a state of orthogonal polarization. Further, the optical attenuator 123 can take an axis inclined by 45° with respect to the transmission axis of the polarizing plate as a rotation axis, rotate the polarizing plate to convert the polarization state of the incident light, and convert the polarization plate into linear polarized light and then emit it. Further, the optical attenuator 123 may also include two polarizing plates. The two polarizing plates may also be configured such that at least the polarizing plate located on the downstream side of the incident light is rotatable. On the other hand, the optical attenuator 123 can also convert the polarization state into linearly polarized light by the polarizing plate located on the upstream side of the incident light, and attenuate the incident light by rotating the polarizing plate located on the downstream side.

Further, the optical attenuator 123 also has a configuration in which the amount of attenuation is zero.

<Measurement performance of the spectroscope>

The measurement performance of the spectroscope 121 will be described with reference to FIGS. 5A and 5B.

FIG. 5A shows the photoelectric conversion characteristics of the spectroscope 121.

The thick line in Fig. 5A represents the relationship between the amount of incident light in the spectroscope 121 and the output current. The broken line in Fig. 5A represents the relationship between the amount of incident light in the photodetector and the output current.

The proportional relationship between input and output is called "linear". The relationship between the amount of incident light in the spectroscope 121 and the output current shows the photoelectric conversion characteristics of the spectroscope 121. That is, the linearity in the photoelectric conversion characteristics of the spectroscope 121 is exhibited in a proportional relationship between the amount of incident light and the output current. The linearity in the photoelectric conversion characteristics of the spectroscope 121 is an index indicating the measurement performance of the spectroscope 121.

As shown in FIG. 5A, it is understood that the linearity of the photoelectric conversion characteristics of the spectroscope 121 is not as good as that of the photodetector.

Furthermore, the range in which the proportional relationship between input and output is established is referred to as "dynamic range". The dynamic range is a range in which linearity is established. The dynamic range in the photoelectric conversion characteristics of the spectroscope 121 is a range in which the proportional relationship between the incident light amount and the output current is established, and is also a range in which the photoelectric conversion characteristics are linearly established.

As shown in FIG. 5A, it is understood that the dynamic range in the photoelectric conversion characteristics of the spectroscope 121 is narrower than that of the photodetector.

FIG. 5B shows an example of the spectral characteristics of the light-emitting element measured by the spectroscope 121.

FIG. 5B shows an example of the spectral characteristics of an element that emits light of a specific wavelength range when power is supplied by the spectroscope 121.

As shown in FIG. 5B, at least in the wavelength range of less than 870 nm and the wavelength range of more than 1000 nm, the relative intensity of the spectroscope 121 is 10% or less, and the sensitivity is not good. Therefore, the spectroscope 121 cannot at least measure the amount of light of a wavelength range lower than 870 nm and a wavelength range higher than 1000 nm. The black portion of Fig. 5B shows the range in which the spectroscope 121 cannot measure the amount of light.

In order to obtain the amount of light to which the measurement accuracy is fixed, for example, when the spectroscope 121 is used in a range of 20 to 80% relative intensity, the spectroscope 121 can measure only the amount of light in the wavelength range of 880 nm to 920 nm and 950 nm to 990 nm. This is because the linearity in the photoelectric conversion characteristics of the spectroscope 121 is lowered in the range of the relative intensity of 20% or less and 80% or more, and thus the measurement accuracy is lowered. The hatched portion of Fig. 5B indicates the range in which the spectroscope 121 can measure the amount of light.

Further, although not shown, the dynamic range in the photoelectric conversion characteristics of the photodetector is extremely large, so that the amount of light in the wavelength range of 800 nm to 1100 nm shown in Fig. 5B can be measured with high precision.

As described above, when the optical characteristics of the light-emitting element 101 are measured using the spectroscope 121, the measurement result of the spectroscope 121 may be incorrect due to the amount of incident light entering the spectroscope 121.

Therefore, there is a need for a technique capable of measuring the optical characteristics of the light-emitting element 101 with high reliability.

In addition, the light-emitting characteristics of different types of light-emitting elements 101 are often different depending on the type. Therefore, when measuring the optical characteristics of the different types of light-emitting elements 101, there is often a case where the amount of incident light entering the spectroscope 121 is different. Therefore, it is necessary to adjust the appropriate amount of incident light in accordance with each type of the light-emitting element 101.

However, in order to adjust the amount of incident light entering the spectroscope 121, the measurement environment is changed depending on the respective types of the light-emitting elements 101, which causes a great burden.

For example, when the light-emitting time of the light-emitting element 101 is fixed to adjust the amount of incident light entering the spectroscope 121, it may be necessary to change the distance between the optical fiber 117 and the light-emitting element 101. In this case, when the difference in light amount difference is 100 times due to the type of the light-emitting element 101, it may be necessary to change the distance between the optical fiber 117 and the light-emitting element 101 by a factor of 10. Changing the distance between the optical fiber 117 and the light-emitting element 101 by a factor of 10 causes a great burden. In particular, when the light-emitting element 101 is a pseudo-white light-emitting diode, once the distance is changed, the chromaticity of the light emitted by the light-emitting element 101 will change, thereby causing a difference. The measurement accuracy of the optical characteristics of the optical device 121 is lowered.

Further, for example, when the distance between the fixed optical fiber 117 and the light-emitting element 101 is adjusted to adjust the amount of incident light entering the spectroscope 121, it may be necessary to change the light-emitting time of the light-emitting element 101. In this case, the light-emitting element 101 generates a temperature change, and the wavelength of the light emitted by the light-emitting element 101 and the amount of light also change, thereby causing a decrease in the measurement accuracy of the optical characteristics of the spectroscope 121.

Therefore, there is a need for a technique capable of measuring with high precision in the same measurement environment even when measuring optical characteristics of different types of light-emitting elements 101.

<Processing of Control Unit at the Time of Optical Characteristic Measurement>

When the optical characteristics of the light-emitting element 101 are measured, light emitted from the light-emitting element 101 to be measured is incident on the optical fiber 117. The light incident on the optical fiber 117 is attenuated by the optical attenuator 123, and then guided to the spectroscope 121.

When the spectroscope 121 detects light guided through the optical attenuator 123, various optical characteristics of the detected light including the amount of light are measured. The spectroscope 121 outputs the measurement results of various optical characteristics including the amount of light to the control unit 151.

The control unit 151 for controlling the operation of the optical measuring apparatus 3 as a whole mainly performs the following processing at the time of optical characteristic measurement.

The processing performed by the control unit 151 at the time of optical characteristic measurement will be described with reference to Fig. 6 .

FIG. 6 is a flowchart for explaining processing performed when the control unit 151 of the optical measurement device 3 performs optical characteristic measurement.

In step S10, the control unit 151 determines whether or not the measurement result of the spectroscope 121 has been input.

The control unit 151 stands by until the measurement result of the spectroscope 121 is input. On the other hand, when the control unit 151 determines that the measurement result of the spectroscope 121 has been input, it stores it in a predetermined storage area. Next, the control unit 151 executes step S20.

In step S20, the control unit 151 includes the measurement result included in the spectroscope 121. The light quantity measurement result verifies the correctness of the measurement result of the spectroscope 121.

The control unit 151 verifies the accuracy of the measurement result of the spectroscope 121, and can perform verification using, for example, the following method.

For example, the control unit 151 stores in advance a range of the light amount measurement result of the spectroscope 121 that can be acquired in the dynamic range of the photoelectric conversion characteristics of the spectroscope 121. Next, the control unit 151 determines whether or not the light amount measurement result input in step S10 is within the range of the light amount measurement result stored in advance. Then, when the light amount measurement result input in step S10 is within the range of the light amount measurement result stored in advance, the control unit 151 determines that the measurement result of the spectroscope 121 input in step S10 is correct. On the other hand, if the light amount measurement result input in step S10 is out of the range of the light amount measurement result stored in advance, the control unit 151 determines that the measurement result of the spectroscope 121 input in step S10 is incorrect.

In step S30, the control unit 151 determines whether or not the measurement result of the spectroscope 121 is correct.

When the control unit 151 determines that the measurement result of the spectroscope 121 is correct by the verification of step S20, step S40 is executed. On the other hand, when the control unit 151 determines that the measurement result of the spectroscope 121 is incorrect by the verification of step S20, step S60 is executed.

In step S40, the control unit 151 makes the measurement result of the spectroscope 121 valid.

In step S50, the control unit 151 outputs the measurement result of the spectroscope 121 to the output unit 163. Next, the control unit 151 ends the measurement of the optical characteristics.

The measurement result of the spectroscope 121 is outputted by the output unit 163.

In step S60, the control unit 151 invalidates the measurement result of the spectroscope 121.

In step S70, the control unit 151 sets the amount of attenuation of the optical attenuator 123.

The control unit 151 confirms the light amount measurement result including the measurement result of the spectroscope 121 that was invalidated in step S60. Next, the control unit 151 obtains the amount of attenuation in the optical attenuator 123 based on the light amount measurement result. The control unit 151 outputs a control signal including the obtained attenuation amount to the optical attenuator 123, and sets the attenuation amount of the optical attenuator 123.

The control unit 151 obtains the amount of attenuation in the optical attenuator 123, and can use, for example, the following squares. The law comes to seek. In other words, the control unit 151 calculates the difference between the critical value of the range of the light quantity measurement result of the spectroscope 121 that can be obtained in the dynamic range of the photoelectric conversion characteristics of the spectroscope 121 and the light quantity measurement result that is invalid in step S60. Find the amount of attenuation.

In step S80, the control unit 151 instructs the spectroscope 121 to perform measurement again.

The control unit 151 outputs a control signal to the spectroscope 121 and instructs the spectroscope 121 to perform the re-measurement.

When the measurement is performed again, the spectroscope 121 can detect the light attenuated by the attenuation amount set in step S70, and measure the optical characteristics. Then, the measurement result of the spectroscope 121 measured again is input again to the control unit 151, and the verification in step S20 is performed. Thereby, the measurement results of the spectroscope 121 outputted in step S50 are all highly reliable measurements.

In this way, the optical measuring device 3 selectively takes the measurement result of the spectroscope 121 into consideration in consideration of the dynamic range in the photoelectric conversion characteristics of the spectroscope 121.

Therefore, the optical measuring device 3 can output only the measurement result with high reliability as the effective measurement of the optical characteristics of the light-emitting element 101.

Thereby, the measurement result of the optical characteristics of the optical measuring apparatus 3 can obtain high reliability.

Further, if the measurement result of the spectroscope 121 is incorrect, the optical measuring device 3 automatically adjusts the incident light of the spectroscope 121 to an appropriate amount of light. Further, the optical measuring device 3 can cause the spectroscope 121 to measure the optical characteristics of the incident light adjusted to an appropriate amount of light again.

Therefore, even when the optical measuring device 3 measures the optical specificity of the light-emitting element 101 having different light-emitting characteristics, it is possible to automatically maintain the rationality of the amount of incident light entering the spectroscope 121 without changing the measurement environment.

Thereby, the optical measuring device 3 can accurately measure the optical characteristics of the light-emitting elements 101 of different types in the same measurement environment. Further, the optical measuring device 3 can obtain a highly reliable measurement result with a simple configuration.

<Modification of Optical Measuring Device>

A modification of the optical measuring device 3 will be described with reference to Figs. 7 to 10 .

In the structure of the optical measuring device 3 shown in FIGS. 7 to 10, the description of the same structure as the optical measuring device 3 shown in FIGS. 2 to 6 will be omitted.

A modification 1 of the optical measuring device 3 will be described with reference to Fig. 7 .

FIG. 7 is an explanatory diagram of a modification 1 of the optical measuring device 3.

The optical measuring apparatus 3 of the first modification has a larger structure of the integrating sphere 108 than the optical measuring apparatus 3 shown in FIGS. 2 to 6 .

The integrating sphere 108 is formed in a hollow slightly spherical shape.

The integrating sphere 108 has an inner wall 108a, an intake port 108b, and a take-out port 108c.

The inner wall 108a forms an inner space of the integrating sphere 108. The inner wall 108a is made of a material having high reflectance and good diffusibility.

An inlet 108b and a outlet 108c are provided in the inner wall 108a.

The inlet 108b is an opening for taking in light emitted from the light-emitting element 101 to be measured.

The size of the inlet port 108b is much larger than the entrance port 117c of the fiber 117.

The central axis of the opening of the inlet 108b is substantially the same as the central axis of illumination LCA of the light-emitting element 101 to be measured.

The intake port 108b guides the light emitted from the light-emitting element 101 to the inside of the integrating sphere 108. The light guided from the intake port 108b to the inside of the integrating sphere 108 is repeatedly reflected on the inner wall 108a, and reaches the take-out port 108c.

The take-out port 108c is an opening for taking out the light reflected from the inner wall 108a to the outside of the integrating sphere 108.

The take-out port 108c is provided at a position different from the take-in port 108b of the inner wall 108a.

An optical fiber 117 is provided in the take-out port 108c in Fig. 7.

The take-out port 108c in FIG. 7 guides the light reflected by the inner wall 108a to the optical fiber 117. guide Light to the optical fiber 117 is incident on the optical fiber 117, and is guided to the optical splitter 121 via the optical attenuator 123.

In the optical measuring apparatus 3 of the first modification, the light emitted from the light-emitting element 101 to be measured is taken in by the inlet 108b of the integrating sphere 108 which is much larger than the entrance port 117c of the optical fiber 117. Further, the optical measuring device 3 in the first modification causes the light taken in by the integrating sphere 108 to enter the optical fiber 117 provided in the take-out port 108c. Therefore, the optical measuring apparatus 3 in the first modification can detect more light by the spectroscope 121 and measure the amount of light with higher precision.

The other structure of the optical measuring device 3 in the first modification is the same as that of the optical measuring device 3 shown in FIGS. 2 to 6 .

Modification 2 of the optical measuring device 3 will be described with reference to Figs. 8 and 9 .

FIG. 8 is an explanatory diagram of a second modification of the optical measuring device 3. Fig. 9 is a flowchart for explaining processing performed when the control unit 151 shown in Fig. 8 performs optical characteristic measurement.

The optical measuring device 3 according to the second modification has a larger structure of the optical waveguide 120, the photodetector 105, and the amplifier 113 than the optical measuring device 3 of the first modification shown in FIG.

The optical waveguide 120 is provided on the optical transmission path 117b between the optical fiber head 117a of the optical fiber 117 provided with the entrance port 117c and the optical attenuator 123.

The optical waveguide 120 branches the optical transmission path 117b into a first path 117d toward the spectroscope 121 and a second path 117e toward the photodetector 105. The first path 117d is an optical transmission path 117b connecting the optical waveguide 120 and the spectroscope 121. The second path 117e is an optical transmission path 117b connecting the optical waveguide 120 and the photodetector 105.

The optical waveguide 120 totally reflects the incident light inside thereof to suppress the transmission loss as much as possible, and branches and guides the light to the first path 117d and the second path 117e. The light guided to the first path 117d and the second path 117e is guided to the spectroscope 121 and the photodetector 105, respectively.

The photodetector 105 detects the light emitted from the light-emitting element 101 via the optical fiber 117 and the optical waveguide 120, and measures the optical characteristics thereof.

Among the optical characteristics measured by the photodetector 105, at least the amount of light emitted by the light-emitting element 101 is included.

The photodetector 105 has a light receiving element. Once the light is incident on the light receiving element, the photodetector 105 generates a charge corresponding to the incident light by photoelectric conversion. The light receiving element of the photodetector 105 is, for example, a photodiode or the like.

The photodetector 105 accumulates all the light intensities of the incident light, and obtains the amount of incident light. The photodetector 105 generates an electrical signal corresponding to the determined amount of light. The photodetector 105 outputs the generated electrical signal to the amplifier 113 via the signal line 111. This electrical signal corresponds to the amount of light information measured by the photodetector 105.

The amplifier 113 amplifies the electric signal output from the photodetector 105 and outputs it to the control unit 151.

In the optical measuring device 3 of the second modification, the optical characteristics of the light-emitting element 101 to be measured can be measured in each of the photodetector 105 and the spectroscope 121. In particular, the optical measuring device 3 in the second modification measures the amount of light in the photodetector 105, and measures the optical characteristics including the amount of light in the spectroscope 121.

The control unit 151 for controlling the operation of the optical measuring apparatus 3 as a whole performs a process different from the processing shown in FIG. 6 at the time of optical characteristic measurement.

The processing performed by the control unit 151 included in the optical measuring apparatus 3 of the second modification at the time of optical characteristic measurement will be described with reference to FIG.

In addition, the same processing description as FIG. 6 is abbreviate|omitted in each step shown in FIG.

In step S10, the control unit 151 determines whether or not the light amount measurement result of the photodetector 105 and the measurement result of the spectroscope 121 have been input.

The control unit 151 waits until the light amount measurement result of the photodetector 105 and the measurement result of the spectroscope 121 are input. On the other hand, when the control unit 151 determines that the light amount measurement result of the photodetector 105 and the measurement result of the spectroscope 121 have been input, the control unit 151 stores the corresponding results in a predetermined storage area. Next, the control unit 151 executes step S20.

In step S20, the control unit 151 verifies the accuracy of the measurement result of the spectroscope 121 based on the light amount measurement result of the photodetector 105.

The control unit 151 can verify the measurement result of the spectroscope 121 using, for example, the following method.

For example, the control unit 151 confirms the light amount measurement result included in the measurement result of the spectroscope 121 input in step S10. Next, the control unit 151 obtains the difference between the light amount measurement result of the spectroscope 121 and the light amount measurement result of the photodetector 105 input in step S10. Then, the control unit 151 determines whether the difference is within a predetermined allowable range. Then, if the difference is within the predetermined allowable range, the control unit 151 determines that the measurement result of the spectroscope 121 input in step S10 is correct. On the other hand, if the difference is not within the predetermined allowable range, the control unit 151 determines that the measurement result of the spectroscope 121 input in step S10 is incorrect.

Further, for example, the control unit 151 stores in advance a range of the light amount measurement result of the spectroscope 121 acquired in the dynamic range of the photoelectric conversion characteristics of the spectroscope 121. Next, the control unit 151 determines whether or not the light amount measurement result of the photodetector 105 input in step S10 is within the range of the light amount measurement result of the spectroscope 121 stored in advance. Then, if the light amount measurement result of the photodetector 105 input in step S10 is within the range of the light amount measurement result of the spectroscope 121 stored in advance, the control unit 151 determines the spectroscope 121 input in step S10. The measurement result is correct. On the other hand, if the light quantity measurement result of the photodetector 105 input in step S10 is not within the range of the light amount measurement result of the spectroscope 121 stored in advance, the control unit 151 determines the spectroscope input in step S10. The measurement result of 121 is incorrect.

In steps S30 to S60, the control unit 151 performs the same processing as that of FIG. 6.

In step S70, the control unit 151 sets the amount of attenuation of the optical attenuator 123.

The control unit 151 confirms the measurement result of the spectroscope 121 that was invalidated in step S60 and the light amount measurement result of the photodetector 105 associated with the result. Next, the control unit 151 obtains the amount of attenuation in the optical attenuator 123 based on the light amount measurement result. The control unit 151 outputs a control signal including the obtained attenuation amount to the optical attenuator 123, and sets the optical attenuator. The amount of attenuation of 123.

The control unit 151 can determine the amount of attenuation in the optical attenuator 123 using, for example, the following method.

For example, in the verification of step S20, the control unit 151 obtains the difference between the light quantity measurement result of the spectroscope 121 and the light quantity measurement result of the photodetector 105, and verifies the difference, and obtains the difference so that the difference can be controlled at the difference. The amount of attenuation within the allowable range of values.

Further, for example, when the control unit 151 performs verification in the step S20, using the range of the light amount measurement result of the spectroscope 121 acquired in the dynamic range of the photoelectric conversion characteristics of the spectroscope 121, the following method can be used. In other words, the control unit 151 obtains the amount of attenuation in the optical attenuator 123 based on the difference between the critical value of the range and the light amount measurement result of the photodetector 105.

In step S80, the control unit 151 instructs the photodetector 105 and the spectroscope 121 to perform measurement again.

The control unit 151 outputs a control signal to the photodetector 105 and the spectroscope 121, and instructs the photodetector 105 and the spectroscope 121 to perform the re-measurement.

As described above, the optical measuring apparatus 3 according to the second modification can selectively make the measurement result of the spectroscope 121 effective based on the measurement result of the light amount measured by the photodetector 105 having a larger dynamic range than the spectroscope 121.

Therefore, in the optical measurement device 3 according to the second modification, only the measurement result with higher reliability can be effectively outputted when the optical characteristics of the light-emitting element 101 are measured.

Thereby, the measurement result of the optical characteristics of the optical measuring apparatus 3 in the modification 2 can have higher reliability.

The other structure of the optical measuring device 3 of the second modification is the same as that of the optical measuring device 3 of the first modification shown in FIG.

A modification 3 of the optical measuring device 3 will be described with reference to Fig. 10 .

FIG. 10 is an explanatory diagram of a modification 3 of the optical measuring device 3.

The optical measuring device 3 according to the third modification has a structure in which the photodetectors 105 included in the optical measuring device 3 according to the second modification shown in FIGS. 8 and 9 are disposed at different positions.

The optical measuring device 3 in the third modification does not include the optical waveguide 120.

The optical transmission path 117b of the optical fiber 117 is not branched, and only the optical attenuator 123 and the optical splitter 121 are connected.

The photodetector 105 is disposed on the inner wall 108a of the integrating sphere 108. The position of the photodetector 105 in the inner wall 108a is a position where the intake port 108b and the take-out port 180c are not disposed.

The light emitted from the light-emitting element 101 of the measurement object is guided from the intake port 108b to the inside of the integrating sphere 108. The light guided from the intake port 108b to the inside of the integrating sphere 108 is repeatedly reflected on the inner wall 108a, and is incident on the optical fiber 117 and the photodetector 105. Next, after the light is attenuated via the optical attenuator 123, the chromaticity or the like is measured by the spectroscope 121, and the amount of light is measured by the photodetector 105.

In the optical measuring apparatus 3 of the third modification, the light incident on the optical fiber 117 is not branched, but the light detector 105 provided on the inner wall 108a directly detects the light taken in by the integrating sphere 108, and the amount of light is measured.

Therefore, the optical measuring device 3 in the third modification can detect more light by the photodetector 105 and measure the amount of light with higher precision.

The other structure of the optical measuring device 3 in the third modification is the same as that of the optical measuring device 3 according to the second modification shown in FIGS. 8 and 9 .

In the above-described embodiments, it will be apparent to those skilled in the art that the techniques of the various embodiments including the modifications can be applied to each other.

The above description is intended to be illustrative only and not limiting. Therefore, it will be apparent to those skilled in the art that the embodiments of the invention can be modified without departing from the scope of the invention.

All terms used in this specification and the scope of the patent application are to be construed as "unqualified". For example, the terms "including" or "included" should be interpreted as "The included is not limited to those described." The term "having" should be interpreted as "the possession is not limited to those described." In addition, the indefinite article “a” or “an” or “an”

<Structure and Effect of Embodiment>

The optical measuring apparatus 3 of the present embodiment includes an optical attenuator 123 that attenuates light emitted from the light-emitting element 101, a spectroscope 121 that measures optical characteristics of light attenuated by the optical attenuator 123, and a control unit. 151, which sets the amount of attenuation of the optical attenuator 123 based on the amount of light emitted by the light-emitting element 101.

With this configuration, the optical measuring device 3 can appropriately maintain the entry into the spectroscope 121 without changing the measurement environment, without using a complicated method, even when measuring the optical characteristics of the light-emitting elements 101 having different light-emitting characteristics. The amount of incident light. Further, the optical measuring device 3 can obtain a highly reliable measurement result with a simple configuration.

Further, the optical measuring apparatus 3 of the present embodiment is provided with an optical fiber 117 including an entrance port 117c for causing light emitted from the light-emitting element 101 to be incident, and an optical transmission path 117b for use from the incident port 117c. The incident light is guided to the beam splitter 121. The optical attenuator 123 can be disposed on the optical transmission path 117b between the entrance port 117c and the beam splitter 121.

With this configuration, the optical measuring device 3 can realize the entry into the spectroscope 121 appropriately without changing the measurement environment even when the optical characteristics of the light-emitting elements 101 having different light-emitting characteristics are measured with a simpler configuration. The amount of incident light. Further, the optical measuring device 3 can obtain a highly reliable measurement result with a simpler structure.

Further, the control unit 151 of the optical measurement device 3 of the present embodiment can set the attenuation amount of the optical attenuator 123 based on the amount of light of one of the optical characteristics measured by the spectroscope 121.

With this configuration, the optical measuring device 3 can appropriately maintain the entry into the spectroscope 121 without changing the measurement environment, without using a complicated method, even when measuring the optical characteristics of the light-emitting elements 101 having different light-emitting characteristics. The amount of incident light. And optical measurement The fixing device 3 can obtain a more reliable measurement result with a simple configuration.

Further, the optical measuring apparatus 3 of the present embodiment includes a photodetector 105 having a larger dynamic range than the spectroscope 121 for measuring the amount of light emitted from the light-emitting element 101. The control unit 151 sets the amount of attenuation of the optical attenuator 123 based on the amount of light measured by the photodetector 105.

With this configuration, the optical measuring device 3 can maintain the entry into the spectroscope 121 more appropriately without changing the measurement environment even when measuring the optical characteristics of the light-emitting elements 101 having different light-emitting characteristics without using a complicated method. The amount of incident light. Further, the optical measuring device 3 can obtain a measurement result with higher reliability with a simple configuration.

Further, the optical transmission path 117b of the optical fiber 117 of the optical measuring device 3 of the present embodiment can be branched toward the photodetector 105 between the entrance port 117c and the optical attenuator 123, and the incident light is branched and guided to the spectroscope 121. And a photodetector 105.

With this configuration, the optical measuring device 3 can realize the entry into the spectroscope 121 appropriately without changing the measurement environment even when the optical characteristics of the light-emitting elements 101 having different light-emitting characteristics are measured with a simpler configuration. The amount of incident light. Further, the optical measuring device 3 can obtain a highly reliable measurement result with a simpler structure.

Further, the optical measuring apparatus 3 of the present embodiment includes an integrating sphere 108 for taking in light emitted from the light-emitting element 101 into the inside thereof. The optical fiber 117 causes light taken into the integrating sphere 108 to be incident from the entrance port 117c. The photodetector 105 can measure the amount of light taken into the integrating sphere 108.

With this configuration, the optical measuring device 3 can maintain the entry into the spectroscope 121 more appropriately without changing the measurement environment even when measuring the optical characteristics of the light-emitting elements 101 having different light-emitting characteristics without using a complicated method. The amount of incident light. Further, the optical measuring device 3 can obtain a measurement result with higher accuracy and high reliability with a simple configuration.

<define, etc.>

"Dynamic range" is the range in which the proportional relationship between input and output is established.

An example of the "dynamic range" of the present invention is in "measuring device" or "light measurement". The dynamic range in the photoelectric conversion characteristics of the device. The dynamic range in the photoelectric conversion characteristic is a range in which the proportional relationship between the amount of incident light and the output current is established.

The spectroscope 121 is an example of the "measuring device" of the present invention.

The photodetector 105 is an example of the "light quantity measuring device" of the present invention.

The control unit 151 is an example of the "control unit" of the present invention.

The optical attenuator 123 is an example of the "optical attenuator" of the present invention.

The optical fiber 117 is an example of the "light guide tube" of the present invention.

The entrance port 117c is an example of the "incident port" of the present invention.

The optical transmission path 117b is an example of the "optical transmission path" of the present invention.

The integrating sphere 108 is an example of the "integral sphere" of the present invention.

3‧‧‧Optical measuring device

101‧‧‧Lighting elements

103‧‧‧Loading table

103a‧‧‧glass table

103b‧‧‧cutting piece

109‧‧‧Probe

111‧‧‧Signal line

117‧‧‧ fiber optic

121‧‧‧Spectroscope

123‧‧‧Light attenuator

125‧‧‧Electrical Characteristics Measurement Department

151‧‧‧Control Department

153‧‧‧HV unit

155‧‧‧ESD unit

157‧‧‧Switch unit

159‧‧‧ Positioning unit

163‧‧‧Output Department

Claims (6)

An optical measuring device comprising: an optical attenuator that attenuates light emitted by the light emitting element; a measuring device that measures optical characteristics of light attenuated by the optical attenuator; and a control unit according to the light emitting element The amount of light emitted is set to the amount of attenuation of the optical attenuator. The optical measuring device according to claim 1, wherein the light measuring device comprises: a light guiding tube comprising: an entrance port for allowing light emitted by the light emitting element to enter; and an optical transmission path for incident from the incident port The light is guided to the measuring device, and the optical attenuator is disposed on the optical transmission path between the incident port and the measuring device. The optical measuring device according to claim 2, wherein the control unit sets the attenuation amount of the optical attenuator based on the amount of light of one of the optical characteristics measured by the measuring device. The optical measuring device according to claim 2, further comprising a light quantity measuring device having a dynamic range larger than a dynamic range of the measuring device for measuring the amount of light emitted by the light emitting element. The control unit sets the attenuation amount of the optical attenuator based on the amount of light measured by the light amount measuring device. The optical measuring device according to claim 4, wherein the light transmission path of the light guide tube branches toward the light quantity measuring device between the incident port and the optical attenuator for branching and guiding the incident light. To the measuring device and the light quantity measuring device. The optical measuring device according to claim 4, wherein an integrating sphere is provided, the light emitted by the light emitting element is taken into the interior, and the light guiding tube is taken into the integrating sphere Light is incident from the entrance port, and the light quantity measuring device measures the amount of light taken into the integrating sphere.