TW201522100A - Stamper for microcontact printing and method for producing structure using same - Google Patents

Stamper for microcontact printing and method for producing structure using same Download PDF

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Publication number
TW201522100A
TW201522100A TW103126846A TW103126846A TW201522100A TW 201522100 A TW201522100 A TW 201522100A TW 103126846 A TW103126846 A TW 103126846A TW 103126846 A TW103126846 A TW 103126846A TW 201522100 A TW201522100 A TW 201522100A
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Taiwan
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stamper
ink
coating film
inorganic
resin
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TW103126846A
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Chinese (zh)
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Ryota Kojima
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Soken Kagaku Kk
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41NPRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00Printing plates or foils; Materials therefor
    • B41N1/12Printing plates or foils; Materials therefor non-metallic other than stone, e.g. printing plates or foils comprising inorganic materials in an organic matrix
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Provided is a stamper for microcontact printing, which is applicable to two or more kinds of ink having different polarities. The present invention provides a stamper for microcontact printing, which is provided, on a resin layer that has a recessed and projected pattern, with a non-porous coating film that covers at least the projected parts of the recessed and projected pattern and contains an inorganic material and/or an inorganic oxide.

Description

微接觸印刷用壓模,以及使用該壓膜的結構體之 製造方法 a stamper for microcontact printing, and a structure using the film Production method

本發明涉及使用微接觸印刷用壓模(Stamper for Microcontact printing),以及使用該壓膜的結構體之製造方法。 The present invention relates to a method of using a stamper for microcontact printing and a method of manufacturing a structure using the film.

微接觸印刷(μ CP),是讓墨(ink)附著於微小形狀的凸部前端,將其壓印(imprint)於“被轉印材料”(stamp原理),由此使被轉印材料表面上附著墨的技術。 Micro-contact printing (μ CP) is to let ink adhere to the front end of a minute-shaped convex portion and imprint it on the "transfer material" (stamp principle), thereby making the surface of the material to be transferred The technique of attaching ink to it.

現有技術中的接觸壓印(Contact imprint)用壓模,主,要使用的是聚二甲矽氧烷(PDMS)(例如專利文獻1)。其理由是:成形簡單,對於曲面可以具有柔軟性,具有將墨轉印(使之附著)於被轉印材料的脫模性。 A contact die for a contact imprint in the prior art is used, and a polydimethyl siloxane (PDMS) is mainly used (for example, Patent Document 1). The reason for this is that the molding is simple, and it is flexible to the curved surface, and has a mold release property of transferring (adhering to) the ink to the material to be transferred.

【背景技術文獻】 [Background Technical Literature]

【專利文獻】 [Patent Literature]

【專利文獻1】日本專利4048877號 [Patent Document 1] Japanese Patent No. 4048877

現有技術中,假想為:就微接觸印刷用壓模而言,使特定的墨附著於壓模上,使該墨轉印於被轉印材料上。另外,現有技術的壓模中,為了使轉印合適地進行,對壓模表面進行處理等從而對於特定墨的脫模性增大。於使用了與上述特定墨極性相同(親水性.親油性的程度相同)的墨的微接觸印刷中,雖然能夠使用這樣的壓模;但是使用了與上述特定墨極性不同的墨的微接觸印刷中,卻不能使用這樣的壓模,所以其問題是適用範圍窄。並且,於使用了極性不同的2種以上的墨的微接觸印刷中,也不能使用現有技術中的壓模。所以,例如欲將多種顏色的墨同時用於微接觸印刷時,需要匹配多種墨的極性,這很麻煩。 In the prior art, it is assumed that, in the microcontact printing stamper, a specific ink is attached to the stamper, and the ink is transferred onto the material to be transferred. Further, in the prior art stamper, in order to appropriately perform the transfer, the surface of the stamper is treated to increase the mold release property with respect to the specific ink. In the microcontact printing using an ink having the same polarity (the same degree of hydrophilicity and lipophilicity) as the above specific ink, although such a stamper can be used, microcontact printing using an ink different in polarity from the above specific ink is used. However, such a stamper cannot be used, so the problem is that the scope of application is narrow. Further, in the microcontact printing using two or more kinds of inks having different polarities, the stamper of the prior art cannot be used. Therefore, for example, when a plurality of colors of ink are to be used for microcontact printing at the same time, it is necessary to match the polarity of a plurality of inks, which is troublesome.

本發明鑒於上述實際中遇到的問題,提供一種可以應用於極性不同的2種以上墨的微接觸印刷用的壓模。 The present invention has been made in view of the above problems encountered in practice, and provides a stamper for microcontact printing which can be applied to two or more kinds of inks having different polarities.

本發明提供一種微接觸印刷用壓模,其具有:在凹凸形的樹脂層上至少覆蓋所述凹凸形狀的凸部、並且含有無機物和無機氧化物中至少一個的非多孔性包覆膜。 The present invention provides a stamper for microcontact printing comprising a non-porous coating film containing at least one of an inorganic material and an inorganic oxide on a concave-convex resin layer covering at least the convex portion of the uneven shape.

現有技術中的方法是,重視將轉印墨確實轉印於被轉印材料上,設計.製造壓膜使來自壓模的墨的脫模性盡可能增大,這是常識。本發明人與該常識相反,認為:實際上來自壓模的墨的脫模性不那麼大,是不是也是可行的?其想到的理由是,附著於壓模的墨因為有一定厚度,墨的脫模性即使低,附著於壓模的墨中,沒有接觸壓模表面的部分也毫無問題地被轉印於被轉印材料上。接著,根據該想法,在具有凹凸形狀的樹脂層上,形成一非多孔性包覆膜,且該非多孔性包覆膜包含至少一個有無機物和無機氧化物,由此提高壓模表面能量,對於壓模的墨的潤濕性得以提高。接著,以這樣和現有技術相反的方法製造壓模、使用,嘗試進行微接觸印刷時,結果發現:墨的轉印性沒有大變化,並且即使改變墨的極性,墨的轉印性也沒有大變化。這是突破性的結果,從而完成了本發明。 The method in the prior art is to pay attention to the transfer of the transfer ink to the material to be transferred, design. It is common knowledge to manufacture a film to make the release property of the ink from the stamper as large as possible. The inventors, contrary to this common sense, believe that it is practically possible that the release property of the ink from the stamper is not so large. The reason for the thought is that the ink attached to the stamper has a certain thickness, and the mold release property of the ink is low, and the portion of the ink attached to the stamper that is not in contact with the surface of the stamper is transferred to the sheet without any problem. On the transfer material. Next, according to the idea, a non-porous coating film is formed on the resin layer having the uneven shape, and the non-porous coating film contains at least one inorganic substance and inorganic oxide, thereby increasing the surface energy of the stamper. The wettability of the ink of the stamper is improved. Then, when the stamper was produced and used in the opposite manner to the prior art, when attempting to perform microcontact printing, it was found that the transfer property of the ink did not largely change, and even if the polarity of the ink was changed, the transferability of the ink was not large. Variety. This is a breakthrough result, thus completing the present invention.

以下,舉例說明本發明的各種實施例。以下所述的實施例,可以互相組合。 Hereinafter, various embodiments of the invention are exemplified. The embodiments described below can be combined with each other.

優選為,所述包覆膜的厚度為5~100nm。 Preferably, the coating film has a thickness of 5 to 100 nm.

優選為,所述無機物或無機氧化物的無機元素是由鋁,鎳,銅,鈦,矽,鐵,鈷,鉻,錫中的至少一種。 Preferably, the inorganic element of the inorganic or inorganic oxide is at least one of aluminum, nickel, copper, titanium, ruthenium, iron, cobalt, chromium, and tin.

優選為,所述無機物或無機氧化物的無機元素是由鋁,鎳,銅,鈦中的至少一種。 Preferably, the inorganic element of the inorganic substance or inorganic oxide is at least one of aluminum, nickel, copper, and titanium.

優選為,所述凸部的高度是10nm~500μm。 Preferably, the height of the convex portion is 10 nm to 500 μm.

另外,從其他角度出發,提供一種結構體的製造方法,具有如下步驟: 準備上述微接觸印刷用壓模的步驟,使墨接觸所述包覆膜,由此使所述墨附著於覆蓋所述包覆膜的所述凸部的步驟,以及將附著於所述包覆膜的墨轉印於被轉印材料的步驟。 In addition, from another viewpoint, a method for manufacturing a structure is provided, which has the following steps: Preparing the above-described step of the microcontact printing stamper, bringing the ink into contact with the coating film, thereby attaching the ink to the convex portion covering the coating film, and attaching the coating to the coating The step of transferring the ink of the film to the material to be transferred.

優選為,於所述包覆膜上附著極性不同的至少2種墨。 Preferably, at least two kinds of inks having different polarities are attached to the coating film.

1‧‧‧微接觸印刷用壓模 1‧‧‧Microcontact printing stamper

3‧‧‧凹凸形狀 3‧‧‧ concave shape

4‧‧‧樹脂基材 4‧‧‧Resin substrate

6‧‧‧樹脂層 6‧‧‧ resin layer

7‧‧‧包覆膜 7‧‧‧ Cover film

圖1表示的是本發明的一個實施例的微接觸印刷用壓模1,(a)是包覆膜7形成前狀態的斷面圖,(b)是包覆膜7形成後狀態的斷面圖。 Fig. 1 shows a stamper 1 for microcontact printing according to an embodiment of the present invention, wherein (a) is a cross-sectional view of a state before the coating film 7 is formed, and (b) is a section of a state after the coating film 7 is formed. Figure.

圖2是與表示包覆膜7形狀的變形例的圖1(b)相對應的斷面圖。 Fig. 2 is a cross-sectional view corresponding to Fig. 1(b) showing a modification of the shape of the coating film 7.

圖3是表示於壓膜1上附著8a,8b的狀態的斷面圖。 Fig. 3 is a cross-sectional view showing a state in which 8a, 8b are adhered to the pressure film 1.

圖4是表示使被轉印材料9接觸壓模1的墨8a,8b的狀態的斷面圖。 4 is a cross-sectional view showing a state in which the material to be transferred 9 is brought into contact with the inks 8a, 8b of the stamper 1.

圖5是表示轉印材料9離開壓模1的狀態的斷面圖。 FIG. 5 is a cross-sectional view showing a state in which the transfer material 9 is separated from the stamper 1.

圖6是以本發明實施例中使用的壓模1結構的立體圖。 Figure 6 is a perspective view showing the structure of a stamper 1 used in the embodiment of the present invention.

圖7(a)~(b)是本發明實施例3中轉印結果的光學顯微鏡照片,(a)表示的是水性墨、(b)表示的是油性墨的結果。 7(a) to 7(b) are optical micrographs of the transfer result in Example 3 of the present invention, wherein (a) shows an aqueous ink and (b) shows an oily ink.

以下,參照附圖詳細說明本發明的實施例。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

如圖1(a)~(b)所示,本發明的一個實施例的微接觸印刷用壓模1具有: 在具備凹凸形狀3的樹脂層6上,設置一非多孔性包覆膜7,非多孔性包覆膜7至少覆蓋凹凸形狀3的凸部3a、且具有無機物和無機氧化物中至少一種。 As shown in FIGS. 1(a) to (b), a micro-contact printing stamper 1 according to an embodiment of the present invention has: The non-porous coating film 7 is provided on the resin layer 6 having the uneven shape 3, and the non-porous coating film 7 covers at least one of the inorganic material and the inorganic oxide at least the convex portion 3a of the uneven shape 3.

以下,詳細地說明各結構要素。 Hereinafter, each component will be described in detail.

具備凹凸形狀3的樹脂層6可以由公知的壓印技術而形成,舉一個例子,如圖1(a)中所示的在柔性(Flexible)樹脂基材4上形成。 The resin layer 6 having the uneven shape 3 can be formed by a known imprint technique, and is formed on the flexible resin substrate 4 as shown in Fig. 1(a) as an example.

就樹脂基材4而言,具體的舉個例子是:由聚對苯二甲酸乙二醇酯(Polyethylene terephthalate),聚碳酸酯(Polycarbonate),聚酯,聚烯烴(Polyolefin),聚醯亞胺(polyimide),聚碸(Polysulfone),聚醚碸(polyether sulfone),環狀聚烯烴及聚乙烯萘二甲酸(Polyethylene naphthalate)中的1種組成。 As the resin substrate 4, specific examples are: polyethylene terephthalate, polycarbonate, polyester, polyolefin, polyimine (polyimide), polysulfone, polyether sulfone, cyclic polyolefin, and polyethylene naphthalate.

另一方面,作為形成樹脂層6的樹脂有:例如熱塑性樹脂,熱硬化性樹脂或光可固化性樹脂。就樹脂而言,有:例如丙烯酸樹脂(Acrylic resin),苯乙烯類樹脂,烯烴類樹脂,聚碳酸酯樹脂,聚酯類樹脂,環氧樹脂(Epoxy resin),矽酮類樹脂(Silicone resin),以及這些樹脂的混合物。這些樹脂中優選的是使用了如下樹脂的光可固化性樹脂,即其中使用了:容易賦予凹凸形狀、或是作為微接觸印刷用壓模使用時,與聚二甲矽氧烷(PDMS)製壓模相比,凹凸形狀的形狀穩定性好(長寬比可以是2以上)的丙烯類樹脂、苯乙烯類樹脂。 On the other hand, as the resin forming the resin layer 6, for example, a thermoplastic resin, a thermosetting resin or a photocurable resin is used. As the resin, there are, for example, an acrylic resin, a styrene resin, an olefin resin, a polycarbonate resin, a polyester resin, an epoxy resin, and a silicone resin. And a mixture of these resins. Among these resins, a photocurable resin using a resin which is used in the case of easily providing a concave-convex shape or a die for microcontact printing, and polydimethyl siloxane (PDMS) is preferably used. An acrylic resin or a styrene resin having a shape stability of an uneven shape (an aspect ratio of 2 or more) can be obtained as compared with a stamper.

上述樹脂層6的厚度通常時50nm~1mm,優選為500nm~500μm。如果是這樣的厚度,容易形成合適高度的凸部3a。 The thickness of the resin layer 6 is usually 50 nm to 1 mm, preferably 500 nm to 500 μm. If it is such a thickness, it is easy to form the convex part 3a of a suitable height.

形成樹脂層6的樹脂為熱塑性樹脂的情況下,將熱樹脂層6加熱到玻璃化轉變溫度(Tg)以上溫度的狀態下,以0.5~50MPa的壓力加壓於凹凸形狀成形用模具,保持加壓10~600秒後,將樹脂層6冷卻到Tg以下溫度,將模具從樹脂層6分離,由此於樹脂層6上可以形成凹凸形狀3。另一方面,形成樹脂層6的樹脂為光可固化性樹脂時,將凹凸形狀成形用模具緊壓於液狀樹脂層6上的狀態下,對樹脂層6以硬化光(UV光,可見光,電子束等可以硬化樹脂的能量線之總稱)照射,硬化樹脂層6後撤離模具,由此可以於樹脂層6上形成凹凸形狀3。光可以從樹脂基材4一側照射,模具如果透光的情況下,也可以從模具側照射。另外,樹脂層6樹脂為熱硬化性樹脂時,將凹凸形狀成形用模具緊壓於液狀樹脂層6上的狀態下,加熱樹脂層6至硬化溫度,使樹脂層6硬化,之後撤離模具,由此可以於樹脂層6上形成凹凸形狀3。光可以從樹脂基材4一側照射,模具如果透光的情況下,也可以從模具側照射。 When the resin forming the resin layer 6 is a thermoplastic resin, the hot resin layer 6 is heated to a temperature equal to or higher than the glass transition temperature (Tg), and is pressed against the concave-convex shape molding die at a pressure of 0.5 to 50 MPa. After pressing for 10 to 600 seconds, the resin layer 6 is cooled to a temperature lower than Tg, and the mold is separated from the resin layer 6, whereby the uneven shape 3 can be formed on the resin layer 6. On the other hand, when the resin forming the resin layer 6 is a photocurable resin, the resin layer 6 is cured with light (UV light, visible light, in a state in which the concave-convex shape molding die is pressed against the liquid resin layer 6). Irradiation is performed by an electron beam or the like which is a general term of the energy line of the hardened resin. After the resin layer 6 is cured, the mold is removed, whereby the uneven shape 3 can be formed on the resin layer 6. Light can be irradiated from the resin substrate 4 side, and if the mold is light-transmitted, it can be irradiated from the mold side. In the case where the resin of the resin layer 6 is a thermosetting resin, the resin layer 6 is heated to a curing temperature in a state where the concave-convex shape molding die is pressed against the liquid resin layer 6, and the resin layer 6 is cured, and then the mold is removed. Thereby, the uneven shape 3 can be formed on the resin layer 6. Light can be irradiated from the resin substrate 4 side, and if the mold is light-transmitted, it can be irradiated from the mold side.

對於樹脂層6凹凸形狀3,沒有特別限製,不過凹凸形狀3凸部3a的高度優選10nm~500μm,更優選為50nm~1μm。因為凸部3a的高度太低的話,墨附著於凹凸形狀3的凹部3b上,或是該墨容易轉印於被轉印材料上,所以微接觸印刷的精度下降。另一方面,凸部3a的高度太高的話,被轉印 材料被緊壓於凸部3a時,凸部3a容易變形。凹凸形狀3可以是,例如格子狀,蛾眼(Moth-eye)狀,線狀,圓柱狀,巨石狀(Monolith),圓錐狀,多角錐狀,微透鏡狀(Microlens)。 The uneven shape 3 of the resin layer 6 is not particularly limited, but the height of the convex portion 3a of the uneven shape 3 is preferably 10 nm to 500 μm, and more preferably 50 nm to 1 μm. Since the height of the convex portion 3a is too low, the ink adheres to the concave portion 3b of the uneven shape 3, or the ink is easily transferred onto the material to be transferred, so that the precision of microcontact printing is lowered. On the other hand, if the height of the convex portion 3a is too high, it is transferred. When the material is pressed against the convex portion 3a, the convex portion 3a is easily deformed. The concavo-convex shape 3 may be, for example, a lattice shape, a Moth-eye shape, a linear shape, a cylindrical shape, a monolith shape, a conical shape, a polygonal pyramid shape, or a microlens shape.

在現有技術中,就樹脂層6的表面而言,為了讓所用的墨容易從壓模脫離,轉印於被轉印材料上,在樹脂層6表面,對於使用的墨進行表面處理使脫模性增大,不過本實施例中與此相反,為了得到可以應用於極性不同的2種以上墨之壓模1,如圖1(b)所示,為了至少覆蓋樹脂層6的凹凸形狀3的凸部3a,設置有:具有無機物和無機氧化物中至少一種的非多孔性包覆膜7。無機物或無機氧化物,一般來講,具有比樹脂大的表面能量,由於在凸部3a上設置包覆膜7,對於在凸部3a上的各種墨的潤濕性得以提高。另外,包覆膜7如圖1(b)所示,可以沿著凹凸形狀3形成,也可以如圖2所示僅在凸部3a上形成。 In the prior art, in order to allow the ink to be easily detached from the stamper, the surface of the resin layer 6 is transferred onto the material to be transferred, and the surface of the resin layer 6 is surface-treated to release the ink. In the present embodiment, in contrast to this, in order to obtain a stamper 1 which can be applied to two or more types of inks having different polarities, as shown in FIG. 1(b), in order to cover at least the uneven shape 3 of the resin layer 6. The convex portion 3a is provided with a non-porous coating film 7 having at least one of an inorganic substance and an inorganic oxide. The inorganic substance or the inorganic oxide generally has a larger surface energy than the resin, and since the coating film 7 is provided on the convex portion 3a, the wettability with respect to various inks on the convex portion 3a is improved. Further, as shown in FIG. 1(b), the cover film 7 may be formed along the uneven shape 3, or may be formed only on the convex portion 3a as shown in FIG. 2.

作為提高在表面的潤濕性的方法,電暈放電處理是為人所知的,不過因為微接觸印刷用壓模1凹凸形狀3非常小,電暈放電處理時有時破壞凹凸形狀3,所以不再考慮通過電暈放電處理來提高潤濕性。另外,發明人也考慮過用化學物質來修飾樹脂層6的表面,不過即使使用化學物質表面修飾可以提高特定墨的潤濕性,也不容易提高極性不同2種以上的墨的潤濕性,所以該方法也行不通。這種情況下,本發明人想到:通過設置包括無機物和無機氧化物中至少一種的非多孔性包覆膜7,由於設置了該包覆膜7,凹凸形狀3不被破壞,提高極性不同2種以上墨的潤濕性得以成功。 Corona discharge treatment is known as a method for improving the wettability on the surface. However, since the uneven shape 3 of the micro-contact printing stamper 1 is extremely small, the uneven shape 3 may be destroyed during the corona discharge treatment. It is no longer considered to improve the wettability by corona discharge treatment. Further, the inventors have considered that the surface of the resin layer 6 is modified with a chemical substance. However, even if the surface modification using a chemical substance can improve the wettability of a specific ink, it is not easy to improve the wettability of two or more kinds of inks having different polarities. So this method will not work. In this case, the inventors thought that by providing the non-porous coating film 7 including at least one of an inorganic substance and an inorganic oxide, since the coating film 7 is provided, the uneven shape 3 is not broken, and the polarity is increased by 2 The wettability of the above inks was successful.

包覆膜7含有無機物和無機氧化物中的至少一種,可以是:由無機物組成的膜,由無機氧化物組成的膜,由無機物和無機氧化物的疊層膜(Laminated film)中的任意一種。另外,如果形成由無機物組成的膜的話,有時出現其表面因空氣中的氧導致自然氧化的情況,也可以是含有這樣自然氧化的無機氧化物的膜。無機物或無機氧化物的無機元素,如果在20℃為固體的話即可,例如可以是鋁,鎳,銅,鈦,鐵,鈷,鉻,錫等金屬,或矽。其中,考慮到工業上的應用,並且形成薄膜比較容易、其方法也已被確立,優選鋁,鎳,銅,鈦。就包覆膜7形成方法而言,沒有特別限定,可以是例如,濺射法或蒸鍍法(Sputtering or vapor deposition)等。並且,本實施例中包覆膜7是非多孔性的。本實施例的壓模可以應用於極性不同的2種以上的墨,假設其用途之一為變換墨的種類,不過包覆膜7是多孔性的話,在包覆膜7中墨被吸收,從壓模中除去墨變得困難,使得變換墨種類變困難。 The coating film 7 contains at least one of an inorganic substance and an inorganic oxide, and may be a film composed of an inorganic substance, a film composed of an inorganic oxide, or a laminated film of an inorganic substance and an inorganic oxide. . Further, when a film composed of an inorganic substance is formed, there is a case where the surface is naturally oxidized by oxygen in the air, and a film containing such an naturally oxidized inorganic oxide may be used. The inorganic element of the inorganic or inorganic oxide may be solid at 20 ° C, and may be, for example, a metal such as aluminum, nickel, copper, titanium, iron, cobalt, chromium, tin, or ruthenium. Among them, aluminum, nickel, copper, and titanium are preferable in view of industrial application, and it is relatively easy to form a film and a method thereof has been established. The method for forming the coating film 7 is not particularly limited, and may be, for example, a sputtering method or a vapor deposition method. Further, in the present embodiment, the coating film 7 is non-porous. The stamper of the present embodiment can be applied to two or more kinds of inks having different polarities, and one of the uses is assumed to be the type of the ink to be changed. However, if the cover film 7 is porous, the ink is absorbed in the cover film 7 from It is difficult to remove the ink in the stamper, making it difficult to change the kind of ink.

另外在現有技術中,在樹脂製的壓模上直接塗布墨,所以壓模吸收墨膨脹,出現耐久性下降這樣的問題,不過本實施例中,樹脂層6被包覆膜7覆蓋,樹脂層6膨脹的問題不發生,壓模1的耐久性提高。 Further, in the prior art, since the ink is directly applied to the resin stamper, the stamper absorbs the ink to swell and the durability is lowered. However, in the present embodiment, the resin layer 6 is covered with the cover film 7, and the resin layer The problem of expansion 6 does not occur, and the durability of the stamper 1 is improved.

其次,結合圖3~圖5,對於本實施例的壓模1的微接觸印刷進行說明。 Next, the microcontact printing of the stamper 1 of the present embodiment will be described with reference to Figs. 3 to 5 .

首先,如圖3所示,使墨8a,8b接觸壓模1包覆膜7,由此使墨8a,8b附著於:將包覆膜7凸部3a覆蓋的部分7a上。 First, as shown in Fig. 3, the inks 8a, 8b are brought into contact with the stamper 1 of the stamper 1, whereby the inks 8a, 8b are attached to the portion 7a covering the convex portion 3a of the cover film 7.

在圖3中,只顯示了附著於部分7a的墨8a,8b的狀態,不過覆蓋凸部3a側面的部分7b、或將相鄰凸部3a之間的區域覆蓋的部分7c上不轉印附著的墨,在這些部分7b,7c上不附著墨也是可以的。在圖3中,使極性不同的2種類墨8a,8b附著,不過附著墨的種類為也可是1種,也可以是3種以上。在本說明書中,所謂「極性不同」的意思是,親水性.親油性的程度不同,極性不同的2種類墨8a,8b的典型例子是:油性墨和水性墨。並且,本說明書中所謂「墨」,意思是以微接觸印刷於被轉印材料上被轉印的液體,包括:於水或有機溶劑等液體中分散或溶解了顏料、染料、樹脂後的物質,或是液狀樹脂。 In Fig. 3, only the state of the inks 8a, 8b attached to the portion 7a is shown, but the portion 7b covering the side of the convex portion 3a or the portion 7c covering the region between the adjacent convex portions 3a is not transferred and attached. It is also possible that ink is not attached to these portions 7b, 7c. In FIG. 3, the two types of inks 8a and 8b having different polarities are attached, but the type of the adhered ink may be one type or three or more types. In this specification, the term "different polarity" means hydrophilicity. Typical examples of the two types of inks 8a, 8b having different degrees of lipophilicity are: oily ink and aqueous ink. In addition, the term "ink" in the present specification means a liquid which is printed by microcontact printing on a material to be transferred, and includes a substance in which a pigment, a dye, or a resin is dispersed or dissolved in a liquid such as water or an organic solvent. , or liquid resin.

其次,如圖4所示,使墨8a、8b接觸被轉印材料9後,如圖5所示,墨8a、8b離開被轉印材料9的話,墨8a,8b轉印於被轉印材料9上。另外,在本實施例中,包覆膜7表面能量大,墨8a,8b如圖5表示容易殘留於被覆膜7上。這樣即使墨8a,8b的一部分殘留於包覆膜7上,被轉印於被轉印材料9的墨8a,8b可以形成希望的圖形,所以也沒有特別的問題。但是被轉印材料9的表面能量大,或是對於將被轉印材料9緊壓於墨8a,8b上的按壓力進行最優化,由此墨8a,8b實質上全部被轉印於轉印材料9上也是可以的。 Next, as shown in Fig. 4, after the inks 8a, 8b are brought into contact with the material to be transferred 9, as shown in Fig. 5, when the inks 8a, 8b are separated from the material to be transferred 9, the inks 8a, 8b are transferred to the material to be transferred. 9 on. Further, in the present embodiment, the surface energy of the coating film 7 is large, and the inks 8a, 8b are easily left on the coating film 7 as shown in Fig. 5 . Thus, even if a part of the inks 8a, 8b remains on the cover film 7, and the inks 8a, 8b transferred to the material to be transferred 9 can form a desired pattern, there is no particular problem. However, the surface energy of the material to be transferred 9 is large, or the pressing force for pressing the material 9 to be pressed against the inks 8a, 8b is optimized, whereby the inks 8a, 8b are substantially all transferred to the transfer. Material 9 is also possible.

在以上的方法中,可以得到將墨8a,8b轉印於被轉印材料9上的結構體。結構體的一個例子是,在壓印(Imprint)技術中所使用的具有微小凹凸的模具,不過本實施例的物件,不為此所限定,針對的物件可以是:以上 述方法可以製造出的各種結構體。 In the above method, a structure in which the inks 8a, 8b are transferred onto the material to be transferred 9 can be obtained. An example of the structure is a mold having minute irregularities used in the Imprint technique, but the article of the present embodiment is not limited thereto, and the object to be used may be: Various structures that can be fabricated by the method.

【實施例】 [Examples]

如圖6所示,於樹脂基材4上,形成具有格子狀凹凸形狀3的樹脂層6,覆該樹脂層6被包覆膜7覆蓋而形成壓模1。於樹脂基材4上使用聚對苯二甲酸乙二醇酯(PET)基材,在表1的實施例1~4中,樹脂層6是以UV固化性樹脂形成,在比較例1中是以聚二甲矽氧烷(PDMS)形成。在表1的實施例1~4中,就被腹膜7而言,使用鋁,鎳,銅,鈦,進行濺射,其所形成的厚度為20nm。凹凸形狀3的凸部3a的寬為20μm,凹部3b為邊長200μm的正方形。凸部3a的高度為20μm。 As shown in FIG. 6, a resin layer 6 having a lattice-like uneven shape 3 is formed on the resin substrate 4, and the resin layer 6 is covered with the coating film 7 to form a stamper 1. A polyethylene terephthalate (PET) substrate was used for the resin substrate 4, and in Examples 1 to 4 of Table 1, the resin layer 6 was formed of a UV curable resin, and in Comparative Example 1, It is formed by polydimethyl siloxane (PDMS). In Examples 1 to 4 of Table 1, the peritoneum 7 was sputtered using aluminum, nickel, copper, and titanium, and the thickness thereof was 20 nm. The width of the convex portion 3a of the uneven shape 3 is 20 μm, and the concave portion 3b is a square having a side length of 200 μm. The height of the convex portion 3a is 20 μm.

其次,將包覆膜7中的凸部3a覆蓋的部分7a上,附著油性墨或水性墨,使該墨轉印於被轉印材料上。在被轉印材料上使用PET膜(film)。另外,轉印時壓模1和被轉印材料之間施加0.1MPa的壓力。作為油性墨,使用的是:於奈米壓印(Nanoimprint)用UV固化性樹脂PAK-01(東洋合成製造)中,使用異丙醇(isopropyl alcohol)稀釋而得到的混合液(50wt%)。作為水性墨,使用的是:市售的水性WA-RI91(蜻蜓鉛筆公司(Tombow公司)製造,水70wt%,多元醇20wt%、顏料10wt%)。 Next, an oily ink or an aqueous ink is adhered to the portion 7a covered by the convex portion 3a in the coating film 7, and the ink is transferred onto the material to be transferred. A PET film was used on the material to be transferred. Further, a pressure of 0.1 MPa was applied between the stamper 1 and the material to be transferred at the time of transfer. As the oil-based ink, a mixed liquid (50% by weight) obtained by diluting with isopropyl alcohol in a UV curable resin PAK-01 (manufactured by Toyo Seisakusho Co., Ltd.) was used. As the aqueous ink, commercially available water-based WA-RI91 (manufactured by Tombow Co., Ltd., water 70% by weight, polyol 20% by weight, pigment 10% by weight) was used.

對於向被轉印材料的轉印的狀態,用以下基準進行評價。其結果如表1所示。 The state of the transfer to the material to be transferred was evaluated by the following criteria. The results are shown in Table 1.

◎:可以轉印均一粗細的線 ◎: It is possible to transfer a line of uniform thickness

○:轉印過程中,線不間斷,但是線的粗細不均一 ○: During the transfer process, the line is uninterrupted, but the thickness of the line is uneven.

△:雖然進行了轉印,但線在中途斷了 △: Although the transfer was performed, the line was broken in the middle.

×:完全不被轉印 ×: not transferred at all

如表1所示,在實施例1~4中的任意一項中,水性墨和油性墨兩者的轉印評價結果均良好。另外,在實施例1~4中,以銅形成包覆膜的實施例3中得到的結果最好。圖7中顯示了由實施例3得到的轉印結果。在水性墨和油性墨兩者中,印出了格子狀形狀。 As shown in Table 1, in any of Examples 1 to 4, the transfer evaluation results of both the aqueous ink and the oily ink were good. Further, in Examples 1 to 4, the results obtained in Example 3 in which a coating film was formed of copper were the best. The transfer result obtained in Example 3 is shown in FIG. In both the aqueous ink and the oily ink, a lattice-like shape is printed.

另一方面,比較例1中,雖然就油性墨而言得到了良好結果,但是水性墨不能進行轉印。 On the other hand, in Comparative Example 1, although good results were obtained with respect to the oily ink, the aqueous ink could not be transferred.

1‧‧‧微接觸印刷用壓模 1‧‧‧Microcontact printing stamper

3‧‧‧凹凸形狀 3‧‧‧ concave shape

4‧‧‧樹脂基材 4‧‧‧Resin substrate

6‧‧‧樹脂層 6‧‧‧ resin layer

7‧‧‧包覆膜 7‧‧‧ Cover film

Claims (7)

一種微接觸印刷用壓模,其具有:一非多孔性包覆膜,該非多孔性包覆膜設置在具有凹凸形狀的樹脂層上,至少覆蓋所述凹凸形狀的凸部、並且含有無機物和無機氧化物中至少一個。 A micro-contact printing stamper comprising: a non-porous coating film provided on a resin layer having a concavo-convex shape, covering at least the convex portion of the concavo-convex shape, and containing inorganic substances and inorganic substances At least one of the oxides. 如請求項1中所述的壓模,其中所述包覆膜的厚度是5~100nm。 The stamper as claimed in claim 1, wherein the thickness of the coating film is 5 to 100 nm. 如請求項1或2中所述的壓模,其中,所述無機物或無機氧化物的無機元素可以是鋁、鎳、銅、鈦、矽、鐵、鈷、鉻、錫中的至少一種。 The stamper according to claim 1 or 2, wherein the inorganic element of the inorganic or inorganic oxide may be at least one of aluminum, nickel, copper, titanium, ruthenium, iron, cobalt, chromium, and tin. 如請求項1或2中所述的壓模,其中,所述無機物或無機氧化物的無機元素是鋁、鎳、銅、鈦中的至少一種。 The stamper according to claim 1 or 2, wherein the inorganic element of the inorganic or inorganic oxide is at least one of aluminum, nickel, copper, and titanium. 如請求項1~4的任意一項中所述的壓模,其中,所述凸部的高度是10nm~500μm。 The stamper according to any one of claims 1 to 4, wherein the height of the convex portion is 10 nm to 500 μm. 一種結構體的製造方法,具有如下步驟:準備如請求項1~5的任意一項中所述的微接觸印刷用壓模的步驟;使墨接觸所述包覆膜,藉以使所述墨,附著於覆蓋所述包覆膜的所述凸部的部分的步驟;以及將附著於所述包覆膜的墨轉印於被轉印材料的步驟。 A method of manufacturing a structure, comprising the steps of: preparing a micro-contact printing stamper according to any one of claims 1 to 5; contacting the ink with the coating film, thereby causing the ink to a step of adhering to a portion covering the convex portion of the coating film; and a step of transferring ink adhered to the coating film to a material to be transferred. 如請求項6中所述的結構體的製造方法,其中,所述包覆膜上附著極性不同的至少2種墨。 The method for producing a structure according to claim 6, wherein at least two kinds of inks having different polarities are attached to the coating film.
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