WO2015019923A1 - Stamper for microcontact printing and method for producing structure using same - Google Patents

Stamper for microcontact printing and method for producing structure using same Download PDF

Info

Publication number
WO2015019923A1
WO2015019923A1 PCT/JP2014/070086 JP2014070086W WO2015019923A1 WO 2015019923 A1 WO2015019923 A1 WO 2015019923A1 JP 2014070086 W JP2014070086 W JP 2014070086W WO 2015019923 A1 WO2015019923 A1 WO 2015019923A1
Authority
WO
WIPO (PCT)
Prior art keywords
stamper
ink
coating film
resin layer
inorganic
Prior art date
Application number
PCT/JP2014/070086
Other languages
French (fr)
Japanese (ja)
Inventor
綾太 小島
Original Assignee
綜研化学株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 綜研化学株式会社 filed Critical 綜研化学株式会社
Publication of WO2015019923A1 publication Critical patent/WO2015019923A1/en

Links

Images

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41NPRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00Printing plates or foils; Materials therefor
    • B41N1/12Printing plates or foils; Materials therefor non-metallic other than stone, e.g. printing plates or foils comprising inorganic materials in an organic matrix
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites

Definitions

  • the present invention relates to a microcontact printing stamper and a method of manufacturing a structure using the same.
  • Micro contact printing is a technique for attaching ink to the surface of a material to be transferred by attaching ink to the tip of a fine-shaped convex part and imprinting it on the material to be transferred (the principle of stamping).
  • PDMS polydimethylsiloxane
  • the stamper for micro contact printing attaches a specific ink to the stamper and transfers the ink to a material to be transferred. Further, in the conventional stamper, the surface treatment of the stamper is performed so that the releasability with respect to a specific ink is enhanced so that the transfer is appropriately performed.
  • Such a stamper can be used for microcontact printing using an ink having the same polarity as the above-mentioned specific ink (having the same degree of hydrophilicity / lipophilicity), but the polarity is different from that of the above-mentioned specific ink. Since it cannot be used for micro contact printing using ink, there is a problem that the application range is narrow.
  • the conventional stamper cannot be used for microcontact printing using two or more types of inks having different polarities, for example, when it is desired to perform microcontact printing of a plurality of types of inks simultaneously, the polarity of the plurality of types of inks is used. It is necessary to match and is troublesome.
  • the present invention has been made in view of such circumstances, and provides a stamper for microcontact printing that can be applied to two or more types of inks having different polarities.
  • a microcontact printing stamper provided on a resin layer having a concavo-convex shape with a non-porous coating film that covers at least the concavo-convex convex portion and includes at least one of an inorganic substance and an inorganic oxide.
  • the conventional approach is that the stamper is designed and manufactured so that the releasability of the ink from the stamper is as high as possible, with an emphasis on ensuring that the ink is transferred onto the transfer material. It was. Contrary to this common sense, the present inventor thought that the releasability of the ink from the stamper may not actually be so high. The reason is that the ink adhering to the stamper has a certain thickness, so even if the ink releasability is low, the portion of the ink adhering to the stamper that is not in contact with the stamper surface is covered without any problem. I thought it was transferred to the transfer material.
  • the surface energy of the stamper is increased by forming a non-porous coating film containing at least one of an inorganic substance and an inorganic oxide on a resin layer having an uneven shape, and the wettability of the ink to the stamper Improved.
  • the transferability of the ink was not significantly different from the conventional one, and the polarity of the ink was changed.
  • the epoch-making result that the transfer property of the ink does not change greatly was obtained, and the present invention was completed.
  • the coating film has a thickness of 5 to 100 nm.
  • the inorganic element of the inorganic substance or inorganic oxide is at least one selected from aluminum, nickel, copper, titanium, silicon, iron, cobalt, chromium, and tin.
  • the inorganic element of the inorganic substance or inorganic oxide is at least one selected from aluminum, nickel, copper, and titanium.
  • the height of the convex portion is 10 nm to 500 ⁇ m.
  • the step of preparing the above-described microcontact printing stamper and bringing the ink into a portion of the coating film covering the convex portion by bringing the ink into contact with the coating film comprising a step of attaching, and a step of transferring the ink attached to the coating film to a transfer material.
  • a method for manufacturing a structure comprising a step of attaching, and a step of transferring the ink attached to the coating film to a transfer material.
  • at least two types of inks having different polarities are attached to the coating film.
  • FIG. 1 shows a microcontact printing stamper 1 according to an embodiment of the present invention, in which (a) is a cross-sectional view showing a state before the coating film 7 is formed, and (b) shows a state after the coating film 7 is formed. It is sectional drawing shown. It is sectional drawing corresponding to FIG.1 (b) which shows the modification of the shape of the coating film.
  • 4 is a cross-sectional view showing a state in which inks 8a and 8b are attached to a stamper 1.
  • FIG. 3 is a cross-sectional view showing a state in which a material to be transferred 9 is brought into contact with inks 8a and 8b on a stamper 1.
  • FIG. 3 is a cross-sectional view showing a state in which a transfer material 9 is separated from a stamper 1.
  • FIG. It is a perspective view which shows the structure of the stamper 1 used in the Example of this invention.
  • (A) to (b) are optical micrographs showing transfer results in Example 3 of the present invention, (a) showing results for water-based ink and (b) showing results for oil-based ink.
  • the microcontact printing stamper 1 covers at least the convex portion 3a of the concavo-convex shape 3 on the resin layer 6 having the concavo-convex shape 3.
  • a non-porous coating film 7 including at least one of an inorganic substance and an inorganic oxide is provided.
  • the resin layer 6 having the concavo-convex shape 3 can be formed by a known imprint technique, and in one example, is formed on a flexible resin base 4 as shown in FIG.
  • the resin substrate 4 is made of, for example, one selected from the group consisting of polyethylene terephthalate, polycarbonate, polyester, polyolefin, polyimide, polysulfone, polyethersulfone, cyclic polyolefin, and polyethylene naphthalate.
  • examples of the resin forming the resin layer 6 include a thermoplastic resin, a thermosetting resin, and a photocurable resin.
  • examples of the resin include acrylic resins, styrene resins, olefin resins, polycarbonate resins, polyester resins, epoxy resins, silicone resins, and mixtures of these resins. These resins are preferably used to facilitate the provision of the uneven shape, and when used as a stamper for microcontact printing, the shape stability of the uneven shape is superior to a stamper made of polydimethylsiloxane (PDMS) ( This is a photo-curing resin using an acrylic resin or a styrene resin whose aspect ratio can be 2 or more.
  • PDMS polydimethylsiloxane
  • the thickness of the resin layer 6 is usually 50 nm to 1 mm, preferably 500 nm to 500 ⁇ m. If it is such thickness, it is easy to form the convex part 3a of moderate height.
  • the mold for forming the concavo-convex shape is pressed with a press thickness of 0.5 to 50 MPa while the resin layer 6 is heated to a temperature equal to or higher than the glass transition temperature (Tg). After holding and pressing for 10 to 600 seconds, the resin layer 6 is cooled to a temperature of Tg or less, and the mold is separated from the resin layer 6, whereby the uneven shape 3 can be formed on the resin layer 6.
  • the resin forming the resin layer 6 is a photocurable resin
  • the resin layer 6 is cured with light (UV light, visible light) in a state where a mold for forming an uneven shape is pressed against the liquid resin layer 6.
  • the resin layer 6 is cured by irradiating an energy beam capable of curing a resin such as an electron beam, and then the mold is separated, whereby the uneven shape 3 can be formed on the resin layer 6.
  • the light may be irradiated from the resin base material 4 side, and may be irradiated from the mold side when the mold is transparent to the light.
  • the resin forming the resin layer 6 is a thermosetting resin
  • the resin layer 6 is heated to the curing temperature in a state in which a mold for forming an uneven shape is pressed against the liquid resin layer 6.
  • the uneven shape 3 can be formed in the resin layer 6 by curing 6 and then separating the mold.
  • the light may be irradiated from the resin base material 4 side, and may be irradiated from the mold side when the mold is transparent to light.
  • the concavo-convex shape 3 of the resin layer 6 is not particularly limited, but the convex portion 3a of the concavo-convex shape 3 preferably has a height of 10 nm to 500 ⁇ m, more preferably 50 nm to 1 ⁇ m. If the height of the convex portion 3a is too low, ink adheres to the concave portion 3b of the concavo-convex shape 3 or the ink is easily transferred to the material to be transferred, so that the accuracy of microcontact printing is lowered. On the other hand, if the height of the convex portion 3a is too high, the convex portion 3a is easily deformed when the convex portion 3a is pressed against the material to be transferred. Examples of the uneven shape 3 include a lattice shape, a moth eye, a line, a cylinder, a monolith, a cone, a polygonal pyramid, and a microlens.
  • the surface of the resin layer 6 has a releasability with respect to the ink used so that the ink used can be easily detached from the stamper and transferred to the transfer material.
  • the surface treatment or the like has been performed so as to be higher, but in the present embodiment, on the contrary, as shown in FIG. 1B, in order to obtain a stamper 1 applicable to two or more types of inks having different polarities.
  • a non-porous coating film 7 containing at least one of an inorganic substance and an inorganic oxide is provided so as to cover at least the convex part 3 a of the concave-convex shape 3 of the resin layer 6.
  • An inorganic substance or an inorganic oxide generally has a surface energy higher than that of a resin, and by providing the coating film 7 on the convex portion 3a, the wettability with respect to various inks on the convex portion 3a is increased. ing.
  • the coating film 7 may be formed along the concavo-convex shape 3 as shown in FIG. 1B, or may be formed only on the convex portion 3a as shown in FIG.
  • Corona discharge treatment is known as a method for improving wettability on the surface.
  • the concavo-convex shape 3 is very small in the microcontact printing stamper 1, the concavo-convex shape 3 is destroyed during the corona discharge treatment. In some cases, we gave up improving the wettability by corona discharge treatment.
  • the surface of the resin layer 6 may be modified with a chemical substance, the surface modification with a chemical substance can improve the wettability of a specific ink, but the wettability of two or more types of inks having different polarities. Since it is not easy to improve the nature, we gave up on this method.
  • the present inventor conceived of providing a non-porous coating film 7 containing at least one of an inorganic substance and an inorganic oxide, and destroying the uneven shape 3 by providing this coating film 7. And succeeded in improving the wettability of two or more inks having different polarities.
  • the coating film 7 contains at least one of an inorganic substance and an inorganic oxide, and may be any of a film made of an inorganic substance, a film made of an inorganic oxide, and a laminated film of an inorganic substance and an inorganic oxide. Further, when a film made of an inorganic material is formed, the surface thereof may be naturally oxidized by oxygen in the air. However, a film containing an inorganic oxide by such natural oxidation may be used.
  • the inorganic element of an inorganic substance or an inorganic oxide should just be a solid at 20 degreeC, and metals, such as aluminum, nickel, copper, titanium, iron, cobalt, chromium, tin, silicon, etc. are mentioned.
  • the coating film 7 is not specifically limited, For example, sputtering, vapor deposition, etc. are mentioned. Moreover, in this embodiment, the coating film 7 is non-porous.
  • the stamper of this embodiment can be applied to two or more types of inks having different polarities, and changing the type of ink is also assumed as a use, but if the coating film 7 is porous, the coating film The ink is absorbed in the ink 7 and it is difficult to remove the ink from the stamper, and it is difficult to change the type of ink.
  • the stamper since the ink is directly applied onto the resin stamper, the stamper absorbs the ink and swells, and there is a problem that the durability is lowered. Since the resin layer 6 is covered with the coating film 7, the problem of swelling of the resin layer 6 does not occur, and the durability of the stamper 1 is improved.
  • the inks 8 a and 8 b are attached to the portion 7 a of the coating film 7 that covers the convex portions 3 a by bringing the inks 8 a and 8 b into contact with the coating film 7 of the stamper 1.
  • FIG. 3 shows a state where the inks 8a and 8b are attached only to the portion 7a, the ink 8a and 8b are attached to the portion 7b covering the side surface of the convex portion 3a and the portion 7c covering the region between the adjacent convex portions 3a. Since the transferred ink is not transferred, the ink may adhere to these portions 7b and 7c.
  • FIG. 3 shows a state where the inks 8a and 8b are attached only to the portion 7a, the ink 8a and 8b are attached to the portion 7b covering the side surface of the convex portion 3a and the portion 7c covering the region between the adjacent convex portions 3a. Since the transferred ink is not transferred, the ink may adhere to these portions 7b and 7c.
  • the type of ink to be attached may be one type or three or more types.
  • “different in polarity” means that the degree of hydrophilicity / lipophilicity is different, and typical examples of the two types of inks 8a and 8b having different polarities are oil-based ink and water-based ink. It is.
  • the “ink” means a liquid transferred to a material to be transferred by microcontact printing, in which a pigment, a dye, a resin is dispersed or dissolved in a liquid such as water or an organic solvent, Liquid resin is included.
  • the inks 8a and 8b are transferred. Transferred to material 9.
  • the inks 8a and 8b tend to remain on the coating film 7 as shown in FIG.
  • a desired pattern can be formed with the inks 8a and 8b transferred to the transfer material 9.
  • substantially all of the inks 8a and 8b are transferred to the transfer material 9 by increasing the surface energy of the transfer material 9 or optimizing the force for pressing the transfer material 9 against the inks 8a and 8b. You may make it do.
  • a structure in which the inks 8a and 8b are transferred onto the transfer material 9 is obtained.
  • An example of the structure is a mold having fine unevenness used in the imprint technique, but the object of the present embodiment is not limited to this, and is intended for various structures that can be manufactured by the above method.
  • a resin layer 6 having a lattice-like uneven shape 3 was formed on a resin base material 4, and this resin layer 6 was covered with a coating film 7 to form a stamper 1.
  • a polyethylene terephthalate (PET) substrate was used as the resin substrate 4, and the resin layer 6 was formed of UV curable resin in Examples 1 to 4 in Table 1, and was formed of polydimethylsiloxane (PDMS) in Comparative Example 1. .
  • the peritoneum 7 was formed to a thickness of 20 nm by sputtering with aluminum, nickel, copper, and titanium.
  • the convex part 3a of the concave / convex shape 3 has a width of 20 ⁇ m, and the concave part 3b has a square shape with a side of 200 ⁇ m.
  • the height of the convex part 3a was 20 ⁇ m.
  • oil-based ink or water-based ink was attached to the portion 7a of the coating film 7 covering the convex portion 3a, and this ink was transferred to the material to be transferred.
  • a PET film was used as the material to be transferred.
  • a pressure of 0.1 MPa was applied between the stamper 1 and the material to be transferred.
  • As the oil-based ink a mixed liquid (50 wt%) diluted with isopropyl alcohol in UV curable resin PAK-01 (manufactured by Toyo Gosei Co., Ltd.) for nanoimprinting was used.
  • water-based ink commercially available water-based WA-RI91 (manufactured by Dragonfly Pencil Co., Ltd., water 70 wt%, polyhydric alcohol 20 wt%, pigment 10 wt%) was used.
  • Example 3 As shown in Table 1, in any of Examples 1 to 4, the transfer evaluation results were good for both the water-based ink and the oil-based ink. Among Examples 1 to 4, the most excellent result was obtained in Example 3 in which the coating film was formed with copper. The transfer result obtained in Example 3 is shown in FIG. It can be seen that a grid-like shape is printed with both water-based ink and oil-based ink. On the other hand, in Comparative Example 1, good results were obtained for the oil-based ink, but transfer could not be performed with the water-based ink.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Provided is a stamper for microcontact printing, which is applicable to two or more kinds of ink having different polarities. The present invention provides a stamper for microcontact printing, which is provided, on a resin layer that has a recessed and projected pattern, with a non-porous coating film that covers at least the projected parts of the recessed and projected pattern and contains an inorganic material and/or an inorganic oxide.

Description

マイクロコンタクトプリント用スタンパ、及びこれを用いた構造体の製造方法Stamper for micro contact printing and method for manufacturing structure using the same
本発明は、マイクロコンタクトプリント用スタンパ、及びこれを用いた構造体の製造方法に関する。 The present invention relates to a microcontact printing stamper and a method of manufacturing a structure using the same.
 マイクロコンタクトプリント(μCP)は、微細形状の凸部先端にインクを付着させ、それを被転写材料にインプリント(スタンプの原理)することで被転写材料表面にインクを付着させる技術である。 Micro contact printing (μCP) is a technique for attaching ink to the surface of a material to be transferred by attaching ink to the tip of a fine-shaped convex part and imprinting it on the material to be transferred (the principle of stamping).
 従来のコンタクトインプリント用スタンパには主にポリジメチルシロキサン(PDMS)が用いられてきた(例えば、特許文献1)。その理由として、成型の簡便さ、曲面への対応可能な柔軟性があること、インクを被転写材料に転写(=付着させる)可能な離型性が備わっているためである。 Conventionally, polydimethylsiloxane (PDMS) has been mainly used for a contact imprint stamper (for example, Patent Document 1). The reason is that it is easy to mold, flexible enough to handle curved surfaces, and has releasability capable of transferring (= attaching) ink to a material to be transferred.
特許4048877号Japanese Patent No. 4048887
 従来技術では、マイクロコンタクトプリント用スタンパは、特定のインクをスタンパに付着させ、このインクを被転写材料に転写させることが想定されていた。また、従来のスタンパでは、転写が適切に行われるように、特定のインクに対する離型性が高くなるようにスタンパの表面処理等が行われていた。このようなスタンパは、上記の特定のインクと極性が同じ(親水性・親油性の程度が同じ)インクを用いたマイクロコンタクトプリントには用いることができるが、上記の特定のインクと極性が異なるインクを用いたマイクロコンタクトプリントには用いることができないので、適用範囲が狭いという問題がある。また、従来のスタンパは、極性の異なる2種以上のインクを用いたマイクロコンタクトプリントに用いることもできないので、例えば複数種の色のインクを同時にマイクロコンタクトプリントしたい場合には、複数種インクの極性をあわせる必要があり、面倒である。 In the prior art, it has been assumed that the stamper for micro contact printing attaches a specific ink to the stamper and transfers the ink to a material to be transferred. Further, in the conventional stamper, the surface treatment of the stamper is performed so that the releasability with respect to a specific ink is enhanced so that the transfer is appropriately performed. Such a stamper can be used for microcontact printing using an ink having the same polarity as the above-mentioned specific ink (having the same degree of hydrophilicity / lipophilicity), but the polarity is different from that of the above-mentioned specific ink. Since it cannot be used for micro contact printing using ink, there is a problem that the application range is narrow. In addition, since the conventional stamper cannot be used for microcontact printing using two or more types of inks having different polarities, for example, when it is desired to perform microcontact printing of a plurality of types of inks simultaneously, the polarity of the plurality of types of inks is used. It is necessary to match and is troublesome.
 本発明は、このような実情に鑑みてなされたものであり、極性の異なる2種以上のインクに適用可能なマイクロコンタクトプリント用スタンパを提供するものである。 The present invention has been made in view of such circumstances, and provides a stamper for microcontact printing that can be applied to two or more types of inks having different polarities.
 本発明によれば、凹凸形状を有する樹脂層上に、前記凹凸形状の凸部を少なくとも覆い且つ無機物と無機酸化物の少なくとも一方を含む非多孔性の被覆膜を備えるマイクロコンタクトプリント用スタンパが提供される。 According to the present invention, there is provided a microcontact printing stamper provided on a resin layer having a concavo-convex shape with a non-porous coating film that covers at least the concavo-convex convex portion and includes at least one of an inorganic substance and an inorganic oxide. Provided.
 従来のアプローチは、インクを被転写材料に確実に転写させることを重要視して、スタンパからのインクの離型性ができるだけ高くなるように、スタンパの設計・製造が行うというのが常識であった。本発明者はこの常識に反して、スタンパからのインクの離型性は、実際はそれほど高くなくてもいいのではないかと考えた。その理由としては、スタンパに付着するインクはある程度の厚さがあるので、インクの離型性が低くても、スタンパに付着しているインクのうちスタンパ表面に接触していない部分は問題なく被転写材料に転写されると考えた。そして、この発想に基づき、凹凸形状を有する樹脂層上に無機物と無機酸化物の少なくとも一方を含む非多孔性の被覆膜を形成することによってスタンパの表面エネルギーを高めてスタンパに対するインクの濡れ性を向上させた。そして、このような従来とは逆のアプローチで作製したスタンパを用いて、マイクロコンタクトプリントを行ってみたところ、インクの転写性は従来とは大きくは変わらず、しかも、インクの極性を変えてもインクの転写性が大きくは変化しないという画期的な結果が得られ、本発明の完成に到った。 The conventional approach is that the stamper is designed and manufactured so that the releasability of the ink from the stamper is as high as possible, with an emphasis on ensuring that the ink is transferred onto the transfer material. It was. Contrary to this common sense, the present inventor thought that the releasability of the ink from the stamper may not actually be so high. The reason is that the ink adhering to the stamper has a certain thickness, so even if the ink releasability is low, the portion of the ink adhering to the stamper that is not in contact with the stamper surface is covered without any problem. I thought it was transferred to the transfer material. Based on this idea, the surface energy of the stamper is increased by forming a non-porous coating film containing at least one of an inorganic substance and an inorganic oxide on a resin layer having an uneven shape, and the wettability of the ink to the stamper Improved. When microcontact printing was performed using a stamper produced by the opposite approach to the conventional method, the transferability of the ink was not significantly different from the conventional one, and the polarity of the ink was changed. The epoch-making result that the transfer property of the ink does not change greatly was obtained, and the present invention was completed.
 以下、本発明の種々の実施形態を例示する。以下に示す実施形態は、互いに組み合わせ可能である。
 好ましくは、前記被覆膜は、厚さが5~100nmである。
 好ましくは、前記無機物または無機酸化物の無機元素は、アルミニウム、ニッケル、銅、チタン、ケイ素、鉄、コバルト、クロム、錫から選択される少なくとも一種である。
 好ましくは、前記無機物または無機酸化物の無機元素は、アルミニウム、ニッケル、銅、チタンから選択される少なくとも一種である。
 好ましくは、前記凸部の高さは、10nm~500μmである。
 また、別の観点では、上記記載のマイクロコンタクトプリント用スタンパを用意する工程と、前記被覆膜にインクを接触させることによって、前記被覆膜のうちの前記凸部を覆う部分に前記インクを付着させる工程と、前記被覆膜に付着させた前記インクを被転写材料に転写させる工程を備える、構造体の製造方法が提供される。
 好ましくは、前記被覆膜には極性が異なる少なくとも2種類のインクを付着させる。
Hereinafter, various embodiments of the present invention will be exemplified. The embodiments described below can be combined with each other.
Preferably, the coating film has a thickness of 5 to 100 nm.
Preferably, the inorganic element of the inorganic substance or inorganic oxide is at least one selected from aluminum, nickel, copper, titanium, silicon, iron, cobalt, chromium, and tin.
Preferably, the inorganic element of the inorganic substance or inorganic oxide is at least one selected from aluminum, nickel, copper, and titanium.
Preferably, the height of the convex portion is 10 nm to 500 μm.
In another aspect, the step of preparing the above-described microcontact printing stamper and bringing the ink into a portion of the coating film covering the convex portion by bringing the ink into contact with the coating film. There is provided a method for manufacturing a structure, comprising a step of attaching, and a step of transferring the ink attached to the coating film to a transfer material.
Preferably, at least two types of inks having different polarities are attached to the coating film.
本発明の一実施形態のマイクロコンタクトプリント用スタンパ1を示し、(a)は被覆膜7の形成前の状態を示す断面図であり、(b)は被覆膜7の形成後の状態を示す断面図である。1 shows a microcontact printing stamper 1 according to an embodiment of the present invention, in which (a) is a cross-sectional view showing a state before the coating film 7 is formed, and (b) shows a state after the coating film 7 is formed. It is sectional drawing shown. 被覆膜7の形状の変形例を示す図1(b)に対応する断面図である。It is sectional drawing corresponding to FIG.1 (b) which shows the modification of the shape of the coating film. スタンパ1にインク8a,8bを付着させた状態を示す断面図である。4 is a cross-sectional view showing a state in which inks 8a and 8b are attached to a stamper 1. FIG. スタンパ1上のインク8a,8bに被転写材料9を接触させた状態を示す断面図である。3 is a cross-sectional view showing a state in which a material to be transferred 9 is brought into contact with inks 8a and 8b on a stamper 1. 被転写材料9をスタンパ1から離した状態を示す断面図である。3 is a cross-sectional view showing a state in which a transfer material 9 is separated from a stamper 1. FIG. 本発明の実施例で用いたスタンパ1の構成を示す斜視図である。It is a perspective view which shows the structure of the stamper 1 used in the Example of this invention. (a)~(b)は、本発明の実施例3での転写結果を示す光学顕微鏡写真であり、(a)は水性インク、(b)は油性インクについての結果を示す。(A) to (b) are optical micrographs showing transfer results in Example 3 of the present invention, (a) showing results for water-based ink and (b) showing results for oil-based ink.
 以下、図面を参照しながら本発明の実施形態について具体的に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
 図1(a)~(b)に示すように、本発明の一実施形態のマイクロコンタクトプリント用スタンパ1は、凹凸形状3を有する樹脂層6上に、凹凸形状3の凸部3aを少なくとも覆い且つ無機物と無機酸化物の少なくとも一方を含む非多孔性の被覆膜7を備える。
 以下、各構成要素を詳細に説明する。
As shown in FIGS. 1A and 1B, the microcontact printing stamper 1 according to an embodiment of the present invention covers at least the convex portion 3a of the concavo-convex shape 3 on the resin layer 6 having the concavo-convex shape 3. A non-porous coating film 7 including at least one of an inorganic substance and an inorganic oxide is provided.
Hereinafter, each component will be described in detail.
 凹凸形状3を有する樹脂層6は、公知のインプリント技術により形成可能であり、一例では、図1(a)に示すようにフレキシブルな樹脂基材4上に形成する。 The resin layer 6 having the concavo-convex shape 3 can be formed by a known imprint technique, and in one example, is formed on a flexible resin base 4 as shown in FIG.
 樹脂基材4は、具体的には例えば、ポリエチレンテレフタレート、ポリカーボネート、ポリエステル、ポリオレフィン、ポリイミド、ポリサルフォン、ポリエーテルサルフォン、環状ポリオレフィンおよびポリエチレンナフタレートからなる群から選ばれる1種からなるものである。 Specifically, the resin substrate 4 is made of, for example, one selected from the group consisting of polyethylene terephthalate, polycarbonate, polyester, polyolefin, polyimide, polysulfone, polyethersulfone, cyclic polyolefin, and polyethylene naphthalate.
 一方、樹脂層6を形成する樹脂としては、熱可塑性樹脂、熱硬化性樹脂または光硬化性樹脂が挙げられる。樹脂として、アクリル系樹脂、スチレン系樹脂、オレフィン系樹脂、ポリカーボネート樹脂、ポリエステル系樹脂、エポキシ樹脂、シリコーン系樹脂、およびこれら樹脂の混合物等が挙げられる。これらの樹脂で好ましいのは、凹凸形状の付与を容易にしたり、マイクロコンタクトプリント用スタンパとして用いた場合に、ポリジメチルシロキサン(PDMS)製スタンパに比べ、凹凸形状の形状安定性に優れたりする(アスペクト比が2以上にできる)アクリル系樹脂、スチレン系樹脂を用いた光硬化性樹脂である。 On the other hand, examples of the resin forming the resin layer 6 include a thermoplastic resin, a thermosetting resin, and a photocurable resin. Examples of the resin include acrylic resins, styrene resins, olefin resins, polycarbonate resins, polyester resins, epoxy resins, silicone resins, and mixtures of these resins. These resins are preferably used to facilitate the provision of the uneven shape, and when used as a stamper for microcontact printing, the shape stability of the uneven shape is superior to a stamper made of polydimethylsiloxane (PDMS) ( This is a photo-curing resin using an acrylic resin or a styrene resin whose aspect ratio can be 2 or more.
 上記した樹脂層6の厚さは、通常50nm~1mm、好ましくは、500nm~500μmである。このような厚さとすれば、適度な高さの凸部3aを形成しやすい。 The thickness of the resin layer 6 is usually 50 nm to 1 mm, preferably 500 nm to 500 μm. If it is such thickness, it is easy to form the convex part 3a of moderate height.
 樹脂層6を形成する樹脂が熱可塑性樹脂である場合は、樹脂層6をガラス転移温度(Tg)以上の温度に加熱した状態で、凹凸形状形成用のモールドを0.5~50MPaのプレス厚で10~600秒間保持してプレスした後、樹脂層6をTg以下の温度にまで冷却し、モールドを樹脂層6から引き離すことによって、樹脂層6に凹凸形状3を形成することができる。一方、樹脂層6を形成する樹脂が光硬化性樹脂である場合は、液状の樹脂層6に凹凸形状形成用のモールドを押し付けた状態で樹脂層6に対して硬化光(UV光、可視光、電子線などの樹脂を硬化可能なエネルギー線の総称)を照射することによって樹脂層6を硬化し、その後、モールドを引き離すことによって、樹脂層6に凹凸形状3を形成することができる。光は、樹脂基材4側から照射してもよく、モールドが光に対して透明である場合には、モールド側から照射してもよい。また、樹脂層6を形成する樹脂が熱硬化性樹脂である場合は、液状の樹脂層6に凹凸形状形成用のモールドを押し付けた状態で樹脂層6を硬化温度にまで加熱することによって樹脂層6を硬化し、その後、モールドを引き離すことによって、樹脂層6に凹凸形状3を形成することができる。光は、樹脂基材4側から照射してもよく、モールドが光に対して透過性を有する場合には、モールド側から照射してもよい。 When the resin forming the resin layer 6 is a thermoplastic resin, the mold for forming the concavo-convex shape is pressed with a press thickness of 0.5 to 50 MPa while the resin layer 6 is heated to a temperature equal to or higher than the glass transition temperature (Tg). After holding and pressing for 10 to 600 seconds, the resin layer 6 is cooled to a temperature of Tg or less, and the mold is separated from the resin layer 6, whereby the uneven shape 3 can be formed on the resin layer 6. On the other hand, when the resin forming the resin layer 6 is a photocurable resin, the resin layer 6 is cured with light (UV light, visible light) in a state where a mold for forming an uneven shape is pressed against the liquid resin layer 6. The resin layer 6 is cured by irradiating an energy beam capable of curing a resin such as an electron beam, and then the mold is separated, whereby the uneven shape 3 can be formed on the resin layer 6. The light may be irradiated from the resin base material 4 side, and may be irradiated from the mold side when the mold is transparent to the light. When the resin forming the resin layer 6 is a thermosetting resin, the resin layer 6 is heated to the curing temperature in a state in which a mold for forming an uneven shape is pressed against the liquid resin layer 6. The uneven shape 3 can be formed in the resin layer 6 by curing 6 and then separating the mold. The light may be irradiated from the resin base material 4 side, and may be irradiated from the mold side when the mold is transparent to light.
 樹脂層6の凹凸形状3は、特に制限はないが、凹凸形状3の凸部3aは、高さ10nm~500μmのものが好ましく、50nm~1μmのものがより好ましい。凸部3aの高さが低すぎると凹凸形状3の凹部3bにもインクが付着したり、そのインクが被転写材料に転写されやすいので、マイクロコンタクトプリントの精度が低下する。一方、凸部3aの高さが高すぎると凸部3aを被転写材料に押し付けた時に凸部3aが変形しやすくなる。凹凸形状3としては、格子状、モスアイ、線、円柱、モノリス、円錐、多角錐、マイクロレンズが挙げられる。 The concavo-convex shape 3 of the resin layer 6 is not particularly limited, but the convex portion 3a of the concavo-convex shape 3 preferably has a height of 10 nm to 500 μm, more preferably 50 nm to 1 μm. If the height of the convex portion 3a is too low, ink adheres to the concave portion 3b of the concavo-convex shape 3 or the ink is easily transferred to the material to be transferred, so that the accuracy of microcontact printing is lowered. On the other hand, if the height of the convex portion 3a is too high, the convex portion 3a is easily deformed when the convex portion 3a is pressed against the material to be transferred. Examples of the uneven shape 3 include a lattice shape, a moth eye, a line, a cylinder, a monolith, a cone, a polygonal pyramid, and a microlens.
 従来は、樹脂層6の表面は、使用するインクがスタンパから容易に離脱して被転写材料に転写されるようにするために樹脂層6の表面は、使用するインクに対して離型性が高くなるように表面処理等が行われていたが、本実施形態ではこれとは逆に、極性の異なる2種類以上のインクに適用可能なスタンパ1を得るべく、図1(b)に示すように樹脂層6の凹凸形状3の凸部3aを少なくとも覆うように、無機物と無機酸化物の少なくとも一方を含む非多孔性の被覆膜7を設けている。無機物または無機酸化物は、一般に、樹脂よりも高い表面エネルギーを有しており、凸部3a上に被覆膜7を設けることによって、凸部3a上での、種々のインクに対する濡れ性を高めている。なお、被覆膜7は、図1(b)に示すように凹凸形状3に沿うように形成してもよく、図2に示すように凸部3a上のみに形成してもよい。 Conventionally, the surface of the resin layer 6 has a releasability with respect to the ink used so that the ink used can be easily detached from the stamper and transferred to the transfer material. The surface treatment or the like has been performed so as to be higher, but in the present embodiment, on the contrary, as shown in FIG. 1B, in order to obtain a stamper 1 applicable to two or more types of inks having different polarities. A non-porous coating film 7 containing at least one of an inorganic substance and an inorganic oxide is provided so as to cover at least the convex part 3 a of the concave-convex shape 3 of the resin layer 6. An inorganic substance or an inorganic oxide generally has a surface energy higher than that of a resin, and by providing the coating film 7 on the convex portion 3a, the wettability with respect to various inks on the convex portion 3a is increased. ing. The coating film 7 may be formed along the concavo-convex shape 3 as shown in FIG. 1B, or may be formed only on the convex portion 3a as shown in FIG.
 表面での濡れ性を高める方法としてはコロナ放電処理が知られているが、マイクロコンタクトプリント用スタンパ1では凹凸形状3のサイズが非常に小さいのでコロナ放電処理の際に凹凸形状3が破壊されてしまう場合があり、コロナ放電処理によって濡れ性を向上させることは断念した。また、樹脂層6の表面を化学物質で表面修飾することも考えたが、化学物質による表面修飾では特定のインクの濡れ性を高めることはできても、極性の異なる2種以上のインクの濡れ性を高めることは容易ではないのでこれの方法も断念した。このような状況において本発明者は、無機物と無機酸化物の少なくとも一方を含む非多孔性の被覆膜7を設けることを思いつき、この被覆膜7を設けることによって凹凸形状3を破壊することなく、極性の異なる2種以上のインクの濡れ性を高めることに成功した。 Corona discharge treatment is known as a method for improving wettability on the surface. However, since the size of the concavo-convex shape 3 is very small in the microcontact printing stamper 1, the concavo-convex shape 3 is destroyed during the corona discharge treatment. In some cases, we gave up improving the wettability by corona discharge treatment. In addition, although the surface of the resin layer 6 may be modified with a chemical substance, the surface modification with a chemical substance can improve the wettability of a specific ink, but the wettability of two or more types of inks having different polarities. Since it is not easy to improve the nature, we gave up on this method. Under such circumstances, the present inventor conceived of providing a non-porous coating film 7 containing at least one of an inorganic substance and an inorganic oxide, and destroying the uneven shape 3 by providing this coating film 7. And succeeded in improving the wettability of two or more inks having different polarities.
 被覆膜7は、無機物と無機酸化物の少なくとも一方を含むものであり、無機物からなる膜、無機酸化物からなる膜、無機物と無機酸化物の積層膜の何れであってもよい。また、無機物からなる膜を形成するとその表面は空気中の酸素によって自然酸化される場合があるが、このような自然酸化による無機酸化物を含む膜であってもよい。無機物または無機酸化物の無機元素は、20℃で固体であるものであればよく、アルミニウム、ニッケル、銅、チタン、鉄、コバルト、クロム、錫等の金属や、ケイ素などが挙げられる。このうち、工業的に利用されかつ薄膜の形成が比較的容易で方法が確立されているという観点から、アルミニウム、ニッケル、銅、チタンが好ましい。
 被覆膜7の形成方法は、特に限定されないが、例えば、スパッタリングや蒸着などが挙げられる。また、本実施形態では、被覆膜7は、非多孔性である。本実施形態のスタンパは極性の異なる2種以上のインクに適用可能なものであり、インクの種類を変更することも用途として想定されるが、被覆膜7が多孔性であると被覆膜7内にインクが吸収されてしまってスタンパからインクを除去することが困難となり、インクの種類を変更が困難となる。
The coating film 7 contains at least one of an inorganic substance and an inorganic oxide, and may be any of a film made of an inorganic substance, a film made of an inorganic oxide, and a laminated film of an inorganic substance and an inorganic oxide. Further, when a film made of an inorganic material is formed, the surface thereof may be naturally oxidized by oxygen in the air. However, a film containing an inorganic oxide by such natural oxidation may be used. The inorganic element of an inorganic substance or an inorganic oxide should just be a solid at 20 degreeC, and metals, such as aluminum, nickel, copper, titanium, iron, cobalt, chromium, tin, silicon, etc. are mentioned. Of these, aluminum, nickel, copper, and titanium are preferred from the viewpoints of being industrially used, forming a thin film relatively easily, and establishing a method.
Although the formation method of the coating film 7 is not specifically limited, For example, sputtering, vapor deposition, etc. are mentioned. Moreover, in this embodiment, the coating film 7 is non-porous. The stamper of this embodiment can be applied to two or more types of inks having different polarities, and changing the type of ink is also assumed as a use, but if the coating film 7 is porous, the coating film The ink is absorbed in the ink 7 and it is difficult to remove the ink from the stamper, and it is difficult to change the type of ink.
 また、従来技術では、樹脂製のスタンパ上にインクを直接塗布していたので、スタンパがインクを吸収して膨潤してしまい、耐久性が低下するという問題があったが、本実施形態では、樹脂層6が被覆膜7で覆われているので、樹脂層6の膨潤の問題が生じず、スタンパ1の耐久性が向上する。 In the prior art, since the ink is directly applied onto the resin stamper, the stamper absorbs the ink and swells, and there is a problem that the durability is lowered. Since the resin layer 6 is covered with the coating film 7, the problem of swelling of the resin layer 6 does not occur, and the durability of the stamper 1 is improved.
 次に、図3~図5を用いて、本実施形態のスタンパ1を用いたマイクロコンタクトプリントについて説明する。
 まず、図3に示すようにスタンパ1の被覆膜7にインク8a,8bを接触させることによって、被覆膜7のうちの凸部3aを覆う部分7aにインク8a,8bを付着させる。図3では、部分7aにのみインク8a,8bが付着している状態を示しているが、凸部3aの側面を覆う部分7bや、隣接する凸部3aの間の領域を覆う部分7cに付着したインクは転写されないので、これらの部分7b,7cにインクが付着していてもよい。図3では、極性の異なる2種類のインク8a,8bを付着させているが、付着させるインクの種類は1種類でもよく、3種類以上でもよい。本明細書において、「極性の異なる」とは、親水性・親油性の程度が異なるということを意味しており、極性の異なる2種類のインク8a,8bの典型例は、油性インクと水性インクである。また、本明細書において「インク」とは、マイクロコンタクトプリントによって被転写材料に転写される液体を意味し、水や有機溶媒などの液体中に顔料、染料、樹脂が分散又は溶解したものや、液状樹脂が含まれる。
Next, microcontact printing using the stamper 1 of the present embodiment will be described with reference to FIGS.
First, as shown in FIG. 3, the inks 8 a and 8 b are attached to the portion 7 a of the coating film 7 that covers the convex portions 3 a by bringing the inks 8 a and 8 b into contact with the coating film 7 of the stamper 1. Although FIG. 3 shows a state where the inks 8a and 8b are attached only to the portion 7a, the ink 8a and 8b are attached to the portion 7b covering the side surface of the convex portion 3a and the portion 7c covering the region between the adjacent convex portions 3a. Since the transferred ink is not transferred, the ink may adhere to these portions 7b and 7c. In FIG. 3, two types of inks 8a and 8b having different polarities are attached, but the type of ink to be attached may be one type or three or more types. In this specification, “different in polarity” means that the degree of hydrophilicity / lipophilicity is different, and typical examples of the two types of inks 8a and 8b having different polarities are oil-based ink and water-based ink. It is. Further, in the present specification, the “ink” means a liquid transferred to a material to be transferred by microcontact printing, in which a pigment, a dye, a resin is dispersed or dissolved in a liquid such as water or an organic solvent, Liquid resin is included.
 次に、図4に示すように被転写材料9をインク8a,8bに接触させた後、図5に示すように被転写材料9をインク8a,8bから離すと、インク8a,8bが被転写材料9に転写される。なお、本実施形態では、被覆膜7の表面エネルギーが大きいので、インク8a,8bは、図5に示すように被覆膜7にも残りやすい。このようにインク8a,8bの一部が被覆膜7に残ったとしても、被転写材料9に転写されたインク8a,8bで所望のパターンを形成することができるので特に問題ない。但し、被転写材料9の表面エネルギーを大きくしたり、被転写材料9をインク8a,8bに押し付ける力を最適化したりすることによってインク8a,8bの実質的に全量が被転写材料9に転写されるようにしてもよい。 Next, after the material to be transferred 9 is brought into contact with the inks 8a and 8b as shown in FIG. 4, when the material 9 to be transferred is separated from the inks 8a and 8b as shown in FIG. 5, the inks 8a and 8b are transferred. Transferred to material 9. In this embodiment, since the surface energy of the coating film 7 is large, the inks 8a and 8b tend to remain on the coating film 7 as shown in FIG. Thus, even if a part of the inks 8a and 8b remains on the coating film 7, there is no particular problem because a desired pattern can be formed with the inks 8a and 8b transferred to the transfer material 9. However, substantially all of the inks 8a and 8b are transferred to the transfer material 9 by increasing the surface energy of the transfer material 9 or optimizing the force for pressing the transfer material 9 against the inks 8a and 8b. You may make it do.
 以上の方法で、被転写材料9上にインク8a,8bが転写された構造体が得られる。構造体の一例は、インプリント技術で用いる微細な凹凸を有するモールドであるが、本実施形態の対象は、これに限定されず、上記方法で製造可能な種々の構造体を対象としている。 By the above method, a structure in which the inks 8a and 8b are transferred onto the transfer material 9 is obtained. An example of the structure is a mold having fine unevenness used in the imprint technique, but the object of the present embodiment is not limited to this, and is intended for various structures that can be manufactured by the above method.
 図6に示すように、樹脂基材4上に格子状の凹凸形状3を有する樹脂層6を形成し、この樹脂層6を被覆膜7で被覆してスタンパ1を形成した。樹脂基材4にはポリエチレンテレフタレート(PET)基材を用い、樹脂層6は、表1の実施例1~4ではUV硬化樹脂で形成し、比較例1ではポリジメチルシロキサン(PDMS)で形成した。被腹膜7は、表1の実施例1~4ではアルミニウム、ニッケル、銅、チタンでスパッタリングすることによって厚さ20nmで形成した。凹凸形状3の凸部3aは、幅20μmとし、凹部3bは、一辺が200μmの正方形とした。凸部3aの高さは20μmとした。 As shown in FIG. 6, a resin layer 6 having a lattice-like uneven shape 3 was formed on a resin base material 4, and this resin layer 6 was covered with a coating film 7 to form a stamper 1. A polyethylene terephthalate (PET) substrate was used as the resin substrate 4, and the resin layer 6 was formed of UV curable resin in Examples 1 to 4 in Table 1, and was formed of polydimethylsiloxane (PDMS) in Comparative Example 1. . In Examples 1 to 4 in Table 1, the peritoneum 7 was formed to a thickness of 20 nm by sputtering with aluminum, nickel, copper, and titanium. The convex part 3a of the concave / convex shape 3 has a width of 20 μm, and the concave part 3b has a square shape with a side of 200 μm. The height of the convex part 3a was 20 μm.
 次に、被覆膜7のうちの凸部3aを覆う部分7aに油性インク又は水性インクを付着させ、このインクを被転写材料に転写させた。被転写材料には、PETフィルムを用いた。また、転写の際には、スタンパ1と被転写材料の間に0.1MPaの圧力を加えた。油性インクとしては、ナノインプリント用UV硬化樹脂PAK-01(東洋合成社製)にイソプロピルアルコールで希釈した混合液(50wt%)を用いた。水性インクとしては、市販水性のWA-RI91(トンボ鉛筆社製、水70wt%。多価アルコール20wt%、顔料10wt%)を用いた。 Next, oil-based ink or water-based ink was attached to the portion 7a of the coating film 7 covering the convex portion 3a, and this ink was transferred to the material to be transferred. A PET film was used as the material to be transferred. Further, during the transfer, a pressure of 0.1 MPa was applied between the stamper 1 and the material to be transferred. As the oil-based ink, a mixed liquid (50 wt%) diluted with isopropyl alcohol in UV curable resin PAK-01 (manufactured by Toyo Gosei Co., Ltd.) for nanoimprinting was used. As the water-based ink, commercially available water-based WA-RI91 (manufactured by Dragonfly Pencil Co., Ltd., water 70 wt%, polyhydric alcohol 20 wt%, pigment 10 wt%) was used.
 被転写材料への転写の状態を以下の基準で評価した。その結果を表1に示す。
◎:均一な太さの線を転写することができた
○:線の途切れなく転写が行われたが線の太さの均一でなかった
△:転写は行われたが線に途切れが見られた
×:全く転写されなかった
The state of transfer to the material to be transferred was evaluated according to the following criteria. The results are shown in Table 1.
◎: A line having a uniform thickness could be transferred. ○: Transfer was performed without interruption of the line, but the thickness of the line was not uniform. △: Transfer was performed, but the line was interrupted. ×: not transcribed at all
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 表1に示すように、実施例1~4の何れにおいても、水性インクと油性インクの両方で転写評価の結果が良好になった。また、実施例1~4のうち、銅で被覆膜を形成した実施例3において最も優れた結果が得られた。実施例3で得られた転写結果を図7に示す。水性インクと油性インクの両方で格子状の形状がプリントされていることが分かる。
 一方、比較例1では、油性インクについては良好な結果が得られたが、水性インクでは転写を行うことができなかった。
As shown in Table 1, in any of Examples 1 to 4, the transfer evaluation results were good for both the water-based ink and the oil-based ink. Among Examples 1 to 4, the most excellent result was obtained in Example 3 in which the coating film was formed with copper. The transfer result obtained in Example 3 is shown in FIG. It can be seen that a grid-like shape is printed with both water-based ink and oil-based ink.
On the other hand, in Comparative Example 1, good results were obtained for the oil-based ink, but transfer could not be performed with the water-based ink.
1:マイクロコンタクトプリント用スタンパ、3:凹凸形状、4:樹脂基材、6:樹脂層、7:被覆膜 1: stamper for micro contact printing, 3: uneven shape, 4: resin base material, 6: resin layer, 7: coating film

Claims (7)

  1. 凹凸形状を有する樹脂層上に、前記凹凸形状の凸部を少なくとも覆い且つ無機物と無機酸化物の少なくとも一方を含む非多孔性の被覆膜を備えるマイクロコンタクトプリント用スタンパ。 A stamper for microcontact printing, comprising: a resin layer having a concavo-convex shape; and a nonporous coating film that covers at least the concavo-convex convex portion and includes at least one of an inorganic substance and an inorganic oxide.
  2. 前記被覆膜は、厚さが5~100nmである、請求項1に記載のスタンパ。 The stamper according to claim 1, wherein the coating film has a thickness of 5 to 100 nm.
  3. 前記無機物または無機酸化物の無機元素は、アルミニウム、ニッケル、銅、チタン、ケイ素、鉄、コバルト、クロム、錫から選択される少なくとも一種である、請求項1又は2に記載のスタンパ。 The stamper according to claim 1 or 2, wherein the inorganic element or inorganic element of the inorganic oxide is at least one selected from aluminum, nickel, copper, titanium, silicon, iron, cobalt, chromium, and tin.
  4. 前記無機物または無機酸化物の無機元素は、アルミニウム、ニッケル、銅、チタンから選択される少なくとも一種である、請求項1又は請求項2に記載のスタンパ。 The stamper according to claim 1 or 2, wherein the inorganic element or the inorganic element of the inorganic oxide is at least one selected from aluminum, nickel, copper, and titanium.
  5. 前記凸部の高さは、10nm~500μmである、請求項1~請求項4の何れか1つに記載のスタンパ。 The stamper according to any one of claims 1 to 4, wherein a height of the convex portion is 10 nm to 500 µm.
  6. 請求項1~請求項5の何れか1つに記載のマイクロコンタクトプリント用スタンパを用意する工程と、
    前記被覆膜にインクを接触させることによって、前記被覆膜のうちの前記凸部を覆う部分に前記インクを付着させる工程と、
    前記被覆膜に付着させた前記インクを被転写材料に転写させる工程を備える、構造体の製造方法。
    Preparing a microcontact printing stamper according to any one of claims 1 to 5,
    Attaching the ink to a portion of the coating film that covers the convex portion by bringing the ink into contact with the coating film;
    A method for producing a structure, comprising a step of transferring the ink adhered to the coating film onto a material to be transferred.
  7. 前記被覆膜には極性が異なる少なくとも2種類のインクを付着させる請求項6に記載の構造体の製造方法。 The structure manufacturing method according to claim 6, wherein at least two types of inks having different polarities are attached to the coating film.
PCT/JP2014/070086 2013-08-09 2014-07-30 Stamper for microcontact printing and method for producing structure using same WO2015019923A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-166171 2013-08-09
JP2013166171A JP2016181530A (en) 2013-08-09 2013-08-09 Stamper for micro contact printing, and method for producing structure using the same

Publications (1)

Publication Number Publication Date
WO2015019923A1 true WO2015019923A1 (en) 2015-02-12

Family

ID=52461259

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/070086 WO2015019923A1 (en) 2013-08-09 2014-07-30 Stamper for microcontact printing and method for producing structure using same

Country Status (3)

Country Link
JP (1) JP2016181530A (en)
TW (1) TW201522100A (en)
WO (1) WO2015019923A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017103384A (en) * 2015-12-03 2017-06-08 大日本印刷株式会社 Imprint mold, method for manufacturing the same, and imprint method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004006790A (en) * 2002-04-19 2004-01-08 Kri Inc Metal oxide pattern forming method, metal wiring pattern forming method, and wiring substrate
JP2006168297A (en) * 2004-12-20 2006-06-29 Sony Corp Printing plate and method for manufacturing printing plate
JP2007522914A (en) * 2003-10-04 2007-08-16 ダウ・コーニング・コーポレイション Thin film deposition
WO2008149544A1 (en) * 2007-06-04 2008-12-11 Scivax Corporation Form, microprocessed article, and their manufacturing methods
JP2009051178A (en) * 2007-08-29 2009-03-12 Ricoh Co Ltd Silicone elastomer stamp and manufacturing method of thin film transistor using the stamp
WO2011016549A1 (en) * 2009-08-07 2011-02-10 綜研化学株式会社 Resin mold for imprinting and method for producing same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004006790A (en) * 2002-04-19 2004-01-08 Kri Inc Metal oxide pattern forming method, metal wiring pattern forming method, and wiring substrate
JP2007522914A (en) * 2003-10-04 2007-08-16 ダウ・コーニング・コーポレイション Thin film deposition
JP2006168297A (en) * 2004-12-20 2006-06-29 Sony Corp Printing plate and method for manufacturing printing plate
WO2008149544A1 (en) * 2007-06-04 2008-12-11 Scivax Corporation Form, microprocessed article, and their manufacturing methods
JP2009051178A (en) * 2007-08-29 2009-03-12 Ricoh Co Ltd Silicone elastomer stamp and manufacturing method of thin film transistor using the stamp
WO2011016549A1 (en) * 2009-08-07 2011-02-10 綜研化学株式会社 Resin mold for imprinting and method for producing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017103384A (en) * 2015-12-03 2017-06-08 大日本印刷株式会社 Imprint mold, method for manufacturing the same, and imprint method

Also Published As

Publication number Publication date
TW201522100A (en) 2015-06-16
JP2016181530A (en) 2016-10-13

Similar Documents

Publication Publication Date Title
JP6173354B2 (en) Light transmission type imprint mold, large area mold manufacturing method
TWI662591B (en) Step-and-repeat embossing method using step-and-repeat embossing mold, and manufacturing method of step-and-repeat embossing mold
TWI313788B (en) Pattern replication with intermediate stamp
TWI477824B (en) Optical substrate and light emitting device
KR100805229B1 (en) Method For Forming Fine Pattern Using Nanoimprint
US20170203471A1 (en) Imprint template and method for producing the same
KR101565835B1 (en) Fabrication method of replication mold, fine structures using the same and its applications thereof.
JP2008149727A (en) Printing plate
JP5361011B2 (en) Method for forming conductor pattern using nano metal ink
WO2015019923A1 (en) Stamper for microcontact printing and method for producing structure using same
US9180608B2 (en) Stamp, method of manufacturing the same, and imprinting method using the stamp
JP2017217886A (en) Card and method for manufacturing card
TWI252520B (en) Reversal micro/nano imprinting process without residual layer of resist
WO2020084895A1 (en) Transfer sheet and decorative article using same
KR101738659B1 (en) Mask-less patterning method using difference of surface energy
KR101993385B1 (en) method for manufacturing stamp
JP2018098470A (en) Pattern forming method and production method of replica mold
JP2002205452A (en) Thick pile-up printing method by screen printing, and printing body
JP5257932B2 (en) Method of forming information display body in blank pattern format
JP2005067165A (en) Manufacturing process of lens sheet
JP2006032177A (en) Plate, manufacturing method of plate, board and its manufacturing method
JP2016013665A (en) Printing plate and reverse offset printing method
JP2015189114A (en) Printing plate and manufacturing method of printing plate
JP2006507522A (en) Colored nanolithography on glass and plastic substrates
JP2015189163A (en) Printing plate and manufacturing method of printing plate

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14835457

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14835457

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP