TW201516782A - A touch structure and the manufacturing method thereof - Google Patents

A touch structure and the manufacturing method thereof Download PDF

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Publication number
TW201516782A
TW201516782A TW102138012A TW102138012A TW201516782A TW 201516782 A TW201516782 A TW 201516782A TW 102138012 A TW102138012 A TW 102138012A TW 102138012 A TW102138012 A TW 102138012A TW 201516782 A TW201516782 A TW 201516782A
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Taiwan
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film
touch
roll
touch sensing
manufacturing
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TW102138012A
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Chinese (zh)
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Hsiao-Wen Kuo
Wei-Chuan Chen
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Rtr Tech Technology Co Ltd
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Abstract

A touch structure and the manufacturing method thereof are provided, the manufacturing method includes steps of: provided a flexible supporting substrate by roll-to-roll process; coating liquid material on the flexible supporting substrate by roll-to-roll process; solidifying the liquid material coated on the flexible supporting substrate to form a first film on the flexible supporting substrate; forming a touch sensing structure on the first film; and stripping the flexible supporting substrate from the first film, such that the manufacturing method can be used to provide the touch structure of the present invention.

Description

觸控結構及其製造方法 Touch structure and manufacturing method thereof

本發明係有關於一種觸控結構及其製造方法,尤指一種可減少厚度、重量、容易製造之觸控結構及製造方法。 The present invention relates to a touch structure and a method of fabricating the same, and more particularly to a touch structure and a manufacturing method that can reduce thickness, weight, and ease of manufacture.

隨著時代進步,個人數位助理(Personal Digital Assistant,PDA)、手機、車用導航系統、平板電腦等具有觸控輸入功能的電子產品已日趨廣泛,而這些產品的顯示螢幕上一般係建置有觸控面板,以供使用者利用指頭或觸控筆輸入資訊,且觸控面板具有多種觸控技術,其中,電阻式及電容式是藉由使用者以手指或感應筆對面板表面進行觸碰,而於受觸碰位置的面板內部產生電容值的變化,據以偵測出面板表面所接受觸碰的位置,以達到觸控感測之目的。 With the advancement of the times, personal digital assistants (PDAs), mobile phones, car navigation systems, tablet computers and other electronic products with touch input functions have become more and more popular, and the display screens of these products are generally built. The touch panel is used for the user to input information by using a finger or a stylus, and the touch panel has a plurality of touch technologies, wherein the resistive type and the capacitive type touch the surface of the panel by the user with a finger or an inductive pen. The change of the capacitance value is generated inside the panel of the touched position, thereby detecting the position of the touched surface of the panel to achieve the purpose of touch sensing.

而一般電容式觸控面板結構,中通常利用玻璃或聚對苯二甲酸丙二酯(以下稱為PTT)作為觸控基板,成為玻璃/玻璃(G/G)、玻璃/薄膜/薄膜(G/F/F)、玻璃/薄膜(G/F)或單片玻璃方案(OGS)等的構成,或者直接將觸控感測器整合於顯示面板中,稱為內嵌式(In-cell或On-cell)觸控顯示器或觸控顯示裝置。單片玻璃方案(OGS),與2片玻璃(G/G)或(G/F/F)比較,雖可減少整體的厚度,卻仍嫌不足,而且玻璃比塑膠重,模組的重量仍嫌太重,單片塑膠片方案(OPS)雖可減輕重量,使用的塑膠片厚度太厚(>0.5mm)且易有表面不平整、在貼合時可能產生顯示器表面的凸起的問題,以及因無法使用捲對捲製程(roll-to-roll process),且單 片製造時又比單片玻璃方案困難,有不易製造生產、製造成本高等問題;而內嵌式觸控顯示器,雖然厚度變薄且重量變輕,卻有訊號干擾、產品的良率不佳的問題。 In general, a capacitive touch panel structure generally uses glass or polytrimethylene terephthalate (hereinafter referred to as PTT) as a touch substrate to become a glass/glass (G/G), glass/film/film (G). /F/F), glass/film (G/F) or monolithic glass (OGS), or directly integrate the touch sensor into the display panel, called in-cell (In-cell or On-cell) touch display or touch display device. The monolithic glass scheme (OGS), compared with two sheets of glass (G/G) or (G/F/F), can reduce the overall thickness, but it is still insufficient, and the glass is heavier than the plastic, and the weight of the module is still It is too heavy, although the single-piece plastic sheet solution (OPS) can reduce the weight, the thickness of the plastic sheet used is too thick (>0.5mm) and it is easy to have uneven surface, which may cause the convexity of the display surface when it is fitted. And because the roll-to-roll process cannot be used, and the single When the film is manufactured, it is more difficult than the single-chip glass solution, and it is difficult to manufacture and manufacture, and the manufacturing cost is high. The in-cell touch display, although thinner in thickness and lighter in weight, has signal interference and poor product yield. problem.

為解決此課題,本發明提供一種觸控結構製造方法可減少厚度、重量、容易製造的技術手段。 To solve the problem, the present invention provides a technical method for manufacturing a touch structure capable of reducing thickness, weight, and ease of manufacture.

為達成上述之目的,本發明之觸控結構包含:一第一薄膜以及一第一觸控感測結構,其中,第一薄膜係由液態材料固化成型,第一觸控感測結構則位於第一薄膜上。 To achieve the above objective, the touch structure of the present invention comprises: a first film and a first touch sensing structure, wherein the first film is solidified by a liquid material, and the first touch sensing structure is located at the first On a film.

為達成上述之目的,所述觸控結構更包括有一第二觸控感測結構,第二觸控感測結構係位於一第二薄膜上,並具有一黏合層位於該第一薄膜與該第二薄膜間。 In order to achieve the above, the touch structure further includes a second touch sensing structure, the second touch sensing structure is located on a second film, and has an adhesive layer located on the first film and the first Two film rooms.

為達成上述之目的,所述觸控結構更包括有一第二觸控感測結構,第二觸控感測結構係位於一軟性基材上,並具有一黏合層位於該第一薄膜與該軟性基材間。 To achieve the above objective, the touch structure further includes a second touch sensing structure, the second touch sensing structure is disposed on a flexible substrate, and has an adhesive layer located on the first film and the soft Between the substrates.

為達成上述之目的,所述觸控結構更包括有一第二觸控感測結構,第一觸控感測結構位於第一薄膜之上表面,第二觸控感測結構位於第一薄膜之下表面。 To achieve the above, the touch structure further includes a second touch sensing structure, the first touch sensing structure is located on the upper surface of the first film, and the second touch sensing structure is located under the first film. surface.

為達成上述之目的,本發明之觸控結構之製造方法,至少包含下列步驟:捲對捲提供一軟性支撐基板;捲對捲塗佈液態材料於軟性支撐基板;將液態材料固化,於軟性支撐基板上成型一第一薄膜;捲對捲形成一第一觸控感測結構於第一薄膜上;以及將軟性支撐基板剝離於第一薄膜。 To achieve the above object, the method for manufacturing the touch structure of the present invention comprises at least the following steps: providing a soft support substrate for the roll-to-roll; coating the liquid material on the soft support substrate by roll-to-roll; curing the liquid material for soft support Forming a first film on the substrate; forming a first touch sensing structure on the first film by roll-to-roll; and peeling the soft support substrate from the first film.

為達成上述之目的,所述觸控結構之製造方法更包括:捲對捲提供一軟性支撐基板;捲對捲塗佈液態材料於軟性支撐基板;將液態材料固化,於軟性支撐基板上成型一第二薄膜; 捲對捲形成一第二觸控感測結構於第二薄膜上;將軟性支撐基板剝離於第二薄膜;以及貼合第一薄膜和第二薄膜。 In order to achieve the above object, the manufacturing method of the touch structure further comprises: providing a soft support substrate for the roll-to-roll; coating the liquid material on the soft support substrate by roll-to-roll; curing the liquid material, forming a soft support substrate; Second film; The roll-to-roll forms a second touch sensing structure on the second film; the flexible support substrate is peeled off from the second film; and the first film and the second film are bonded.

為達成上述之目的,所述觸控結構之製造方法更包括:捲對捲形成一第二觸控感測結構於一軟性基材上;以及貼合第一薄膜和軟性基材。 To achieve the above object, the manufacturing method of the touch structure further comprises: forming a second touch sensing structure on a flexible substrate by roll-to-roll; and bonding the first film and the soft substrate.

上述之液態材料為聚亞醯胺(PI;polyimide)。 The above liquid material is polyimine (PI; polyimide).

上述將液態材料固化方式為加熱攝氏140度至350度。 The liquid material is cured in the above manner by heating at 140 to 350 degrees Celsius.

上述之軟性支撐基板係為聚對苯二甲酸乙二酯(PET;polyethylene terephthalate)、銅膜、不銹鋼材質或軟性耐熱材質。 The soft support substrate described above is polyethylene terephthalate (PET), copper film, stainless steel or a soft heat-resistant material.

110,210,310,410,510,610,710‧‧‧第一薄膜 110,210,310,410,510,610,710‧‧‧first film

120,220,320,420,520,620,720‧‧‧第一觸控感測結構 120,220,320,420,520,620,720‧‧‧ first touch sensing structure

121,221,321,421,521,621,721‧‧‧第一透明感測串列 121,221,321,421,521,621,721‧‧‧first transparent sensing series

122,222,322,422,522,622,722‧‧‧第一周邊線路 122,222,322,422,522,622,722‧‧‧First perimeter line

230,330,430,630,730‧‧‧第二觸控感測結構 230,330,430,630,730‧‧‧second touch sensing structure

231,331,431,631,731‧‧‧第二透明感測串列 231,331,431,631,731‧‧‧Second transparent sensing series

232,332,432,632,732‧‧‧第二周邊線路 232, 332, 432, 632, 732 ‧ ‧ second peripheral line

240,340,440,640‧‧‧硬質透明基板 240,340,440,640‧‧‧hard transparent substrate

350,650‧‧‧第二薄膜 350,650‧‧‧second film

460,760‧‧‧軟性基材 460,760‧‧‧Soft substrate

571,671‧‧‧軟性支撐基板 571,671‧‧‧Soft support substrate

572‧‧‧液態材料 572‧‧‧Liquid materials

573‧‧‧成形輪 573‧‧‧Forming wheel

680,780‧‧‧黏著層 680,780‧‧‧ adhesive layer

591,691,791‧‧‧透明導電層 591,691,791‧‧‧Transparent conductive layer

592,692,792‧‧‧金屬層 592,692,792‧‧‧metal layer

第1圖所示為本發明中觸控結構之第一實施例示意圖。 FIG. 1 is a schematic view showing a first embodiment of a touch structure according to the present invention.

第2圖所示為本發明中觸控結構之第二實施例示意圖。 FIG. 2 is a schematic view showing a second embodiment of the touch structure of the present invention.

第3圖所示為本發明中觸控結構之第三實施例示意圖。 FIG. 3 is a schematic view showing a third embodiment of the touch structure of the present invention.

第4圖所示為本發明中觸控結構之第四實施例示意圖。 FIG. 4 is a schematic view showing a fourth embodiment of the touch structure of the present invention.

第5a圖至第5e圖所示為本發明中觸控結構之製造方法之第一實施例示意圖。 5a to 5e are schematic views showing a first embodiment of a method of manufacturing a touch structure according to the present invention.

第6a圖至第6f圖所示為本發明中觸控結構之製造方法之第二實施例示意圖。 6a to 6f are schematic views showing a second embodiment of the manufacturing method of the touch structure of the present invention.

第7a圖至第7d圖所示為本發明中觸控結構之製造方法之第三實施例示意圖。 7A to 7d are schematic views showing a third embodiment of a method of manufacturing a touch structure according to the present invention.

請參閱第1圖所示為本發明第一實施例之觸控結構示意圖。首先,本發明之觸控結構包括一第一薄膜110以及第一 觸控感測結構120;其中,第一薄膜110係由液態材料固化成型。其液態材料為聚亞醯胺(PI;polyimide)。 Please refer to FIG. 1 , which is a schematic diagram of a touch structure according to a first embodiment of the present invention. First, the touch structure of the present invention includes a first film 110 and a first The touch sensing structure 120; wherein the first film 110 is solidified by a liquid material. Its liquid material is polyimine (PI; polyimide).

第一觸控感測結構120位於該第一薄膜110上,具有複數相互連接之第一透明感測串列121以及第一周邊線路122。其中第一透明感測串列使用具有透光能力且導電能力之材質,例如可為金屬氧化物所構成,其中金屬氧化物例如可為氧化銦錫(indium tin oxide,ITO)、氧化銦鋅(indium zinc oxide,IZO)、氧化鎘錫(cadmium tin oxide,CTO)、氧化鋁鋅(aluminum zinc oxide,AZO)、氧化銦鋅錫(indium tin zinc oxide,ITZO)、氧化鋅(zinc oxide)、氧化鎘(cadmium oxide)、氧化鉿(hafnium oxide,HfO)、氧化銦鎵鋅(indium gallium zinc oxide,InGaZnO)、氧化銦鎵鋅鎂(indium gallium zinc magnesium oxide,InGaZnMgO)、氧化銦鎵鎂(indium gallium magnesium oxide,InGaMgO)或氧化銦鎵鋁(indium gallium aluminum oxide,InGaAlO)等。當然,第一觸控感測結構可為電容式觸控面板之單面架橋結構,亦可為電阻式觸控面板。 The first touch sensing structure 120 is located on the first film 110 and has a plurality of first transparent sensing series 121 and a first peripheral line 122 connected to each other. The first transparent sensing series is made of a material having light transmissive ability and electrical conductivity, for example, may be a metal oxide, wherein the metal oxide may be, for example, indium tin oxide (ITO) or indium zinc oxide (indium tin oxide). Indium zinc oxide, IZO), cadmium tin oxide (CTO), aluminum zinc oxide (AZO), indium tin zinc oxide (ITZO), zinc oxide, oxidation Cadmium oxide, hafnium oxide (HfO), indium gallium zinc oxide (InGaZnO), indium gallium zinc magnesium oxide (InGaZnMgO), indium gallium oxide (indium gallium) Magnesium oxide, InGaMgO) or indium gallium aluminum oxide (InGaAlO). Of course, the first touch sensing structure can be a single-sided bridging structure of the capacitive touch panel or a resistive touch panel.

如第2圖之第二實施例所示,本發明之觸控結構包括一第一薄膜210、第一觸控感測結構220以及第二觸控感測結構230,第一觸控感測結構220位於第一薄膜210之上表面,其具有複數相互連接之第一透明感測串列221以及第一周邊線路222,第二觸控感測結構230位於第一薄膜210之下表面,其具有複數相互連接之第二透明感測串列231以及第二周邊線路232,第一透明感測串列221與第二透明感測串列231係相互交錯;再將第一薄膜210貼合於硬質透明基板240(例如可以為強化玻璃)。 As shown in the second embodiment of FIG. 2, the touch structure of the present invention includes a first film 210, a first touch sensing structure 220, and a second touch sensing structure 230. The first touch sensing structure The 220 is located on the upper surface of the first film 210, and has a plurality of first transparent sensing series 221 and a first peripheral circuit 222 connected to each other. The second touch sensing structure 230 is located on the lower surface of the first film 210, and has The plurality of interconnected second transparent sensing series 231 and the second peripheral line 232, the first transparent sensing series 221 and the second transparent sensing series 231 are interlaced; and the first film 210 is attached to the hard The transparent substrate 240 (for example, may be tempered glass).

如第3圖之第三實施例所示,本發明之觸控結構包括一第一薄膜310、第一觸控感測結構320以及第二觸控感測結構330,第一觸控感測結構320位於第一薄膜310之上表面,其具有 複數相互連接之第一透明感測串列321以及第一周邊線路322,第二觸控感測結構330係位於一第二薄膜350上,第二薄膜350係黏貼固定於第一薄膜310之下,其具有複數相互連接之第二透明感測串列331以及第二周邊線路332,第一透明感測串列321與第二透明感測串列331係相互交錯;再將第一薄膜310貼合於硬質透明基板340(例如可以為強化玻璃)。 As shown in the third embodiment of FIG. 3, the touch structure of the present invention includes a first film 310, a first touch sensing structure 320, and a second touch sensing structure 330. The first touch sensing structure 320 is located on the upper surface of the first film 310, which has The first transparent sensing series 321 and the first peripheral circuit 322 are connected to each other, the second touch sensing structure 330 is located on a second film 350, and the second film 350 is adhered and fixed under the first film 310. The second transparent sensing series 331 and the second transparent sensing series 331 are interlaced with each other; the first thin film 310 is pasted It is combined with a hard transparent substrate 340 (for example, it may be tempered glass).

如第4圖之第四實施例所示,本發明之觸控結構包括一第一薄膜410、第一觸控感測結構420以及第二觸控感測結構430,第一觸控感測結構420位於第一薄膜410之上表面,其具有複數相互連接之第一透明感測串列421以及第一周邊線路422,第二觸控感測結構430係位於一軟性基材460上,軟性基材460係黏貼固定於第一薄膜410之下,其具有複數相互連接之第二透明感測串列431以及第二周邊線路432,第一透明感測串列421與第二透明感測串列431係相互交錯;再將第一薄膜410貼合於硬質透明基板440(例如可以為強化玻璃)。 As shown in the fourth embodiment of FIG. 4, the touch structure of the present invention includes a first film 410, a first touch sensing structure 420, and a second touch sensing structure 430. The first touch sensing structure The 420 is located on the upper surface of the first film 410, and has a plurality of first transparent sensing series 421 and a first peripheral circuit 422 connected to each other. The second touch sensing structure 430 is disposed on a flexible substrate 460. The material 460 is adhesively fixed under the first film 410, and has a plurality of interconnected second transparent sensing series 431 and a second peripheral line 432. The first transparent sensing series 421 and the second transparent sensing series The 431 series are interlaced; the first film 410 is attached to the rigid transparent substrate 440 (for example, it may be tempered glass).

本發明藉由液態材料固化成型之薄膜,其厚度可為1μm~25μm,以5μm~15μm為佳,作為觸控結構之載體用於觸控面板時,相較一般觸控面板可大幅降低其整體厚度而達到更輕薄之需求。 The film formed by curing the liquid material can have a thickness of 1 μm to 25 μm and preferably 5 μm to 15 μm. When used as a carrier of the touch structure, the touch panel can greatly reduce the overall size of the touch panel. Thickness to achieve a lighter and thinner demand.

請參閱第5a圖至第5e圖所示為本發明之觸控結構之製造方法示意圖。首先,捲對捲提供一軟性支撐基板571;軟性支撐基板571為可撓曲之材質所構成,可以捲曲成滾筒狀。軟性支撐基板571之材質例如可為聚對苯二甲酸乙二酯(PET;polyethylene terephthalate)、銅膜、不銹鋼材質或軟性耐熱材質之一。 Please refer to FIGS. 5a to 5e for a schematic diagram of a manufacturing method of the touch structure of the present invention. First, the roll-to-roll is provided with a flexible support substrate 571; the flexible support substrate 571 is made of a flexible material and can be crimped into a roll shape. The material of the flexible supporting substrate 571 may be, for example, polyethylene terephthalate (PET), copper film, stainless steel or a soft heat-resistant material.

再經由捲對捲塗佈液態材料572於軟性支撐基板571 表面,其液態材料為聚亞醯胺(PI;polyimide),並可於軟性支撐基板571表面之液態材料572上方進一步設置有成形輪573,使液態材料572形成預定厚度,其厚度可為1μm~25μm,以5μm~15μm為佳。 The liquid material 572 is applied to the flexible support substrate 571 via the roll-to-roll. The liquid material of the surface is polyimine (PI), and a forming wheel 573 is further disposed on the surface of the liquid material 572 on the surface of the flexible supporting substrate 571 to form the liquid material 572 to a predetermined thickness, and the thickness thereof can be 1 μm. 25 μm is preferably 5 μm to 15 μm.

並將液態材料572固化,於軟性支撐基板571上成型一第一薄膜510,如第5b圖所示;其中,固化方式可以採用照射UV燈或是加熱方式,例如可加熱攝氏140度至350度進行固化而將液態材料572成型。 The liquid material 572 is cured, and a first film 510 is formed on the flexible support substrate 571, as shown in FIG. 5b; wherein the curing method can be performed by irradiating a UV lamp or heating, for example, heating 140 degrees Celsius to 350 degrees Celsius. The liquid material 572 is molded by curing.

捲對捲形成一第一觸控感測結構520於第一薄膜510上;其中先於第一薄膜510之表面依序形成透明導電層591和金屬層592,如第5c圖所示,以形成多層之透明堆疊結構。其中形成透明堆疊結構的方式例如可採用捲對捲物理氣相沉積(PVD)、捲對捲化學氣相沉積(CVD)、捲對捲電鍍、捲對捲塗佈製程等手段。而透明導電層591可為金屬氧化物所構成,其中金屬氧化物例如可為氧化銦錫(indium tin oxide,ITO)、氧化銦鋅(indium zinc oxide,IZO)、氧化鎘錫(cadmium tin oxide,CTO)、氧化鋁鋅(aluminum zinc oxide,AZO)、氧化銦鋅錫(indium tin zinc oxide,ITZO)、氧化鋅(zinc oxide)、氧化鎘(cadmium oxide)、氧化鉿(hafnium oxide,HfO)、氧化銦鎵鋅(indium gallium zinc oxide,InGaZnO)、氧化銦鎵鋅鎂(indium gallium zinc magnesium oxide,InGaZnMgO)、氧化銦鎵鎂(indium gallium magnesium oxide,InGaMgO)或氧化銦鎵鋁(indium gallium aluminum oxide,InGaAlO)等;金屬層592可為至少一層導電金屬層,或者多層導電金屬層。其材質可為銅合金、鋁合金、金、銀、鋁、銅、鉬等導電金屬或導電合金。多層導電金屬層之結構,例如可為鉬層/鋁層/鉬層之堆疊結構,或者可為選自銅合金、鋁合金、金、銀、鋁、銅、鉬等導電金屬或導電合金之一種 或多種材質而堆疊之多層導電金屬層結構。 The roll-to-roll forms a first touch-sensing structure 520 on the first film 510; wherein a transparent conductive layer 591 and a metal layer 592 are sequentially formed on the surface of the first film 510, as shown in FIG. 5c, to form Multi-layer transparent stack structure. The manner in which the transparent stacked structure is formed may be, for example, a roll-to-roll physical vapor deposition (PVD), a roll-to-roll chemical vapor deposition (CVD), a roll-to-roll plating, a roll-to-roll coating process, or the like. The transparent conductive layer 591 can be composed of a metal oxide. The metal oxide can be, for example, indium tin oxide (ITO), indium zinc oxide (IZO), or cadmium tin oxide. CTO), aluminum zinc oxide (AZO), indium tin zinc oxide (ITZO), zinc oxide, cadmium oxide, hafnium oxide (HfO), Indium gallium zinc oxide (InGaZnO), indium gallium zinc magnesium oxide (InGaZnMgO), indium gallium magnesium oxide (InGaMgO) or indium gallium aluminum oxide , InGaAlO), etc.; the metal layer 592 can be at least one layer of a conductive metal, or a plurality of layers of a conductive metal. The material may be a conductive metal or a conductive alloy such as a copper alloy, an aluminum alloy, gold, silver, aluminum, copper or molybdenum. The structure of the multi-layer conductive metal layer may be, for example, a stacked structure of a molybdenum layer/aluminum layer/molybdenum layer, or may be a conductive metal or a conductive alloy selected from the group consisting of copper alloy, aluminum alloy, gold, silver, aluminum, copper, molybdenum, and the like. A multi-layer conductive metal layer structure stacked with a plurality of materials.

再施以圖案化,如第5d圖所示,圖案化製程可採用捲對捲黃光製程或捲對捲雷射製程,較佳為採用捲對捲黃光製程,將上述多層之透明堆疊結構進行第一道黃光製程,將透明導電層591和金屬層592圖案化。其中第一道黃光製程包括形成圖案化光阻層(圖未示)於金屬層592之上,光阻層之材質可為液態光阻或乾膜光阻。然後進行蝕刻步驟,蝕刻去除未受光阻層保護之透明導電層591和金屬層592,以及去除圖案化光阻層。接著再進行第2道黃光製程,移除部分位於透明導電層591上之金屬層,形成相互連接之第一透明感測串列521以及第一周邊線路522,而於第一薄膜510上形成第一觸控感測結構520。 Then, the patterning process is performed. As shown in FIG. 5d, the patterning process may adopt a roll-to-roll yellow process or a roll-to-roll laser process, preferably a roll-to-roll yellow process, and the above-mentioned multilayer transparent stack structure. A first yellow light process is performed to pattern the transparent conductive layer 591 and the metal layer 592. The first yellow light process includes forming a patterned photoresist layer (not shown) over the metal layer 592. The material of the photoresist layer may be a liquid photoresist or a dry film photoresist. An etching step is then performed to etch away the transparent conductive layer 591 and the metal layer 592 that are not protected by the photoresist layer, and to remove the patterned photoresist layer. Then, a second yellow light process is performed to remove a portion of the metal layer on the transparent conductive layer 591 to form a first transparent sensing series 521 and a first peripheral line 522 connected to each other, and formed on the first film 510. The first touch sensing structure 520.

最後,再將軟性支撐基板571剝離於第一薄膜510,如第5e圖所示,而完成觸控結構。其中,本發明利用液態材料固化成型,其整體厚度可大為降低且重量變輕,其厚度可為1μm~25μm,以5μm~15μm為佳,以符合輕薄短小之產品需求。 Finally, the flexible supporting substrate 571 is peeled off from the first film 510, as shown in FIG. 5e, to complete the touch structure. Wherein, the invention is solidified and formed by using a liquid material, and the overall thickness thereof can be greatly reduced and the weight is light, and the thickness thereof can be 1 μm to 25 μm, preferably 5 μm to 15 μm, in order to meet the demand of light and thin products.

請參閱第6a圖至第6f圖所示為本發明之第二實施例之觸控結構之製造方法示意圖。利用上述製程完成第一薄膜610,第一薄膜610上具有第一觸控感測結構620,如第6a圖所示,其具有複數相互連接之第一透明感測串列621以及第一周邊線路622,同樣利用上述製程形成一第二觸控感測結構,先於軟性支撐基板671上利用液態材料固化成型一第二薄膜650,如第6b圖所示;捲對捲形成一第二觸控感測結構630於第二薄膜650上,其中先於第二薄膜650之表面依序形成透明導電層691和金屬層692,如第6c圖所示,以形成多層之透明堆疊結構。其中形成透明堆疊結構的方式例如可採用捲對捲物理氣相沉積(PVD)、捲對捲化學氣相沉積(CVD)、捲對捲電鍍、捲對捲塗佈製程等手段。而透明導電 層691可為金屬氧化物所構成,其中金屬氧化物例如可為氧化銦錫(indium tin oxide,ITO)、氧化銦鋅(indium zinc oxide,IZO)、氧化鎘錫(cadmium tin oxide,CTO)、氧化鋁鋅(aluminum zinc oxide,AZO)、氧化銦鋅錫(indium tin zinc oxide,ITZO)、氧化鋅(zinc oxide)、氧化鎘(cadmium oxide)、氧化鉿(hafnium oxide,HfO)、氧化銦鎵鋅(indium gallium zinc oxide,InGaZnO)、氧化銦鎵鋅鎂(indium gallium zinc magnesium oxide,InGaZnMgO)、氧化銦鎵鎂(indium gallium magnesium oxide,InGaMgO)或氧化銦鎵鋁(indium gallium aluminum oxide,InGaAlO)等;金屬層692可為至少一層導電金屬層,或者多層導電金屬層。其材質可為銅合金、鋁合金、金、銀、鋁、銅、鉬等導電金屬或導電合金。多層導電金屬層之結構,例如可為鉬層/鋁層/鉬層之堆疊結構,或者可為選自銅合金、鋁合金、金、銀、鋁、銅、鉬等導電金屬或導電合金之一種或多種材質而堆疊之多層導電金屬層結構。 Please refer to FIGS. 6a to 6f to illustrate a manufacturing method of a touch structure according to a second embodiment of the present invention. The first film 610 is completed by the above process. The first film 610 has a first touch sensing structure 620. As shown in FIG. 6a, the first transparent sensing series 621 and the first peripheral circuit are connected to each other. 622, the second touch sensing structure is formed by using the above process, and a second film 650 is solidified by using a liquid material on the flexible supporting substrate 671, as shown in FIG. 6b; The sensing structure 630 is on the second film 650, wherein a transparent conductive layer 691 and a metal layer 692 are sequentially formed before the surface of the second film 650, as shown in FIG. 6c, to form a multilayer transparent stack structure. The manner in which the transparent stacked structure is formed may be, for example, a roll-to-roll physical vapor deposition (PVD), a roll-to-roll chemical vapor deposition (CVD), a roll-to-roll plating, a roll-to-roll coating process, or the like. Transparent conductive The layer 691 can be composed of a metal oxide, wherein the metal oxide can be, for example, indium tin oxide (ITO), indium zinc oxide (IZO), cadmium tin oxide (CTO), Aluminum zinc oxide (AZO), indium tin zinc oxide (ITZO), zinc oxide, cadmium oxide, hafnium oxide (HfO), indium gallium oxide Indium gallium zinc oxide (InGaZnO), indium gallium zinc magnesium oxide (InGaZnMgO), indium gallium magnesium oxide (InGaMgO) or indium gallium aluminum oxide (InGaAlO) The metal layer 692 can be at least one layer of conductive metal or a plurality of layers of conductive metal. The material may be a conductive metal or a conductive alloy such as a copper alloy, an aluminum alloy, gold, silver, aluminum, copper or molybdenum. The structure of the multi-layer conductive metal layer may be, for example, a stacked structure of a molybdenum layer/aluminum layer/molybdenum layer, or may be a conductive metal or a conductive alloy selected from the group consisting of copper alloy, aluminum alloy, gold, silver, aluminum, copper, molybdenum, and the like. A multi-layer conductive metal layer structure stacked with a plurality of materials.

再施以圖案化,如第6d圖所示,圖案化製程可採用捲對捲黃光製程或捲對捲雷射製程,較佳為採用捲對捲黃光製程,將上述多層之透明堆疊結構進行第一道黃光製程,將透明導電層691和金屬層692圖案化。其中第一道黃光製程包括形成圖案化光阻層(圖未示)於金屬層692之上,光阻層之材質可為液態光阻或乾膜光阻。然後進行蝕刻步驟,蝕刻去除未受光阻層保護之透明導電層691和金屬層692,以及去除圖案化光阻層。接著再進行第2道黃光製程,移除部分位於透明導電層691上之金屬層,形成相互連接之第二透明感測串列631以及第二周邊線路632,而於第二薄膜650上形成第二觸控感測結構630。 Then, patterning is performed. As shown in FIG. 6d, the patterning process may adopt a roll-to-roll yellow process or a roll-to-roll laser process, preferably a roll-to-roll yellow process, and the above-mentioned multilayer transparent stack structure A first yellow light process is performed to pattern the transparent conductive layer 691 and the metal layer 692. The first yellow light process includes forming a patterned photoresist layer (not shown) over the metal layer 692. The material of the photoresist layer may be a liquid photoresist or a dry film photoresist. An etching step is then performed to etch away the transparent conductive layer 691 and the metal layer 692 that are not protected by the photoresist layer, and to remove the patterned photoresist layer. Then, a second yellow light process is performed to remove a portion of the metal layer on the transparent conductive layer 691 to form a second transparent sensing series 631 and a second peripheral line 632 connected to each other, and formed on the second film 650. The second touch sensing structure 630.

再將該軟性支撐基板671剝離於第二薄膜650,如第6e圖所示;最後利用一黏著層680貼合第一薄膜610和第二薄膜 650,如第6f圖所示,而完成本發明之觸控結構;然後,亦可將上述之觸控結構以黏著層680黏貼於硬質透明基板640。其中硬質透明基板640之材質可為玻璃、強化玻璃或硬質塑膠,提供保護作用。其中上述之黏著層680之材質可為壓克力膠、UV膠、水膠或光學膠。 The flexible supporting substrate 671 is further peeled off from the second film 650 as shown in FIG. 6e; finally, the first film 610 and the second film are bonded by an adhesive layer 680. 650, as shown in FIG. 6f, to complete the touch structure of the present invention; then, the touch structure can be adhered to the hard transparent substrate 640 by the adhesive layer 680. The material of the rigid transparent substrate 640 can be glass, tempered glass or hard plastic to provide protection. The material of the adhesive layer 680 may be acrylic glue, UV glue, water glue or optical glue.

請參閱第7a圖至第7d圖所示為本發明之第三實施例之觸控結構之製造方法示意圖。利用上述製程完成第一薄膜710,第一薄膜710上具有第一觸控感測結構720,如第7a圖所示,其具有複數相互連接之第一透明感測串列721以及第一周邊線路722。捲對捲形成一第二觸控感測結構於一軟性基材上,其中先提供捲對捲一軟性基材760,如第7b圖所示,先於軟性基材760之表面依序形成透明導電層791和金屬層792,以形成多層之透明堆疊結構。其中形成透明堆疊結構的方式例如可採用捲對捲物理氣相沉積(PVD)、捲對捲化學氣相沉積(CVD)、捲對捲電鍍、捲對捲塗佈製程等手段。再施以圖案化,如第7c圖所示,形成相互連接之第二透明感測串列731以及第二周邊線路732,而於軟性基材760上形成第二觸控感測結構730;最後利用一黏著層780貼合該第一薄膜710和軟性基材760,如第7d圖所示,而完成本發明之觸控結構。 Please refer to FIGS. 7a to 7d for a schematic view showing a manufacturing method of a touch structure according to a third embodiment of the present invention. The first film 710 is completed by the above process. The first film 710 has a first touch sensing structure 720. As shown in FIG. 7a, the first transparent sensing series 721 and the first peripheral line are connected to each other. 722. The roll-to-roll forms a second touch sensing structure on a flexible substrate, wherein a roll-to-roll soft substrate 760 is first provided, as shown in FIG. 7b, which is formed transparently on the surface of the flexible substrate 760. Conductive layer 791 and metal layer 792 to form a multilayer transparent stack. The manner in which the transparent stacked structure is formed may be, for example, a roll-to-roll physical vapor deposition (PVD), a roll-to-roll chemical vapor deposition (CVD), a roll-to-roll plating, a roll-to-roll coating process, or the like. And then patterned, as shown in FIG. 7c, forming the second transparent sensing series 731 and the second peripheral line 732 connected to each other, and forming the second touch sensing structure 730 on the flexible substrate 760; The first film 710 and the flexible substrate 760 are bonded by an adhesive layer 780, as shown in FIG. 7d, to complete the touch structure of the present invention.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明。任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之保護範圍當視申請專利範圍所界定者為準。 Although the present invention has been disclosed above by way of example, it is not intended to limit the invention. The scope of the present invention is defined by the scope of the claims, and the scope of the invention is intended to be limited by the scope of the invention.

510‧‧‧第一薄膜 510‧‧‧First film

520‧‧‧第一觸控感測結構 520‧‧‧First touch sensing structure

571‧‧‧軟性支撐基板 571‧‧‧Soft support substrate

572‧‧‧液態材料 572‧‧‧Liquid materials

573‧‧‧成形輪 573‧‧‧Forming wheel

Claims (12)

一種觸控結構,其包含:一第一薄膜,係由液態材料固化成型;一第一觸控感測結構,位於該第一薄膜上。 A touch structure includes: a first film formed by solidification of a liquid material; and a first touch sensing structure disposed on the first film. 如請求項1所述之觸控結構,其中,更包括有一第二觸控感測結構,該第一觸控感測結構位於該第一薄膜之上表面,該第二觸控感測結構位於該第一薄膜之下表面。 The touch control structure of claim 1, further comprising a second touch sensing structure, wherein the first touch sensing structure is located on an upper surface of the first film, and the second touch sensing structure is located The lower surface of the first film. 如請求項1所述之觸控結構,其中,更包括有一第二觸控感測結構,該第二觸控感測結構係位於一第二薄膜上,並具有一黏合層位於該第一薄膜與該第二薄膜間。 The touch structure of claim 1, further comprising a second touch sensing structure, the second touch sensing structure being located on a second film and having an adhesive layer on the first film Between the second film and the second film. 如請求項1所述之觸控結構,其中,更包括有一第二觸控感測結構,該第二觸控感測結構係位於一軟性基材上,並具有一黏合層位於該第一薄膜與該軟性基材間。 The touch control structure of claim 1, further comprising a second touch sensing structure, the second touch sensing structure being on a flexible substrate and having an adhesive layer on the first film Between this soft substrate. 如請求項1所述之觸控結構,其第一薄膜之厚度可為1μm~25μm。 The touch structure according to claim 1, wherein the first film has a thickness of 1 μm to 25 μm. 一種觸控結構之製造方法,其包含:捲對捲提供一軟性支撐基板;捲對捲塗佈液態材料於該軟性支撐基板;將該液態材料固化,於該軟性支撐基板上成型一第一薄膜;捲對捲形成一第一觸控感測結構於該第一薄膜上;以及將該軟性支撐基板剝離於該第一薄膜。 A method for manufacturing a touch structure, comprising: providing a soft support substrate on a roll-to-roll; coating a liquid material on the flexible support substrate; and solidifying the liquid material to form a first film on the flexible support substrate Roll-to-roll forming a first touch sensing structure on the first film; and peeling the flexible support substrate from the first film. 如請求項6所述觸控結構之製造方法,更包括:捲對捲提供一軟性支撐基板;捲對捲塗佈液態材料於該軟性支撐基板;將該液態材料固化,於該軟性支撐基板上成型一第二薄膜;捲對捲形成一第二觸控感測結構於該第二薄膜上;將該軟性支撐基板剝離於該第二薄膜;以及貼合該第一薄膜和該第二薄膜。 The method for manufacturing a touch structure according to claim 6, further comprising: providing a flexible support substrate for the roll-to-roll; applying a liquid material to the flexible support substrate by roll-to-roll; curing the liquid material on the flexible support substrate Forming a second film; forming a second touch sensing structure on the second film; winding the flexible support substrate to the second film; and bonding the first film and the second film. 如請求項6所述觸控結構之製造方法,更包括:捲對捲形成一第二觸控感測結構於一軟性基材上;以及貼合該第一薄膜和該軟性基材。 The method of manufacturing the touch structure of claim 6, further comprising: forming a second touch sensing structure on the flexible substrate by roll-to-roll; and bonding the first film and the flexible substrate. 如請求項6所述觸控結構之製造方法,其中該液態材料為聚亞醯胺(PI;polyimide)。 The method of manufacturing a touch structure according to claim 6, wherein the liquid material is polyimine. 如請求項6所述觸控結構之製造方法,其中將該液態材料固化方式為加熱攝氏140度至350度。 The method of manufacturing a touch structure according to claim 6, wherein the liquid material is cured by heating at 140 to 350 degrees Celsius. 如請求項6至10其中任一項所述觸控結構之製造方法,其中該軟性支撐基板係為聚對苯二甲酸乙二酯(PET;polyethylene terephthalate)、銅膜、不銹鋼材質或軟性耐熱材質。 The method for manufacturing a touch structure according to any one of claims 6 to 10, wherein the flexible support substrate is polyethylene terephthalate (PET), copper film, stainless steel or soft heat resistant material. . 如請求項6至10其中任一項所述觸控結構之製造方法,其中捲對捲塗佈液態材料於該軟性支撐基板之塗佈厚度可為1μm~25μm。 The method for manufacturing a touch structure according to any one of claims 6 to 10, wherein the coating thickness of the roll-to-roll coating liquid material on the flexible support substrate may be from 1 μm to 25 μm.
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