TW201515725A - Cleaning device of substrate end face - Google Patents

Cleaning device of substrate end face Download PDF

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Publication number
TW201515725A
TW201515725A TW102148521A TW102148521A TW201515725A TW 201515725 A TW201515725 A TW 201515725A TW 102148521 A TW102148521 A TW 102148521A TW 102148521 A TW102148521 A TW 102148521A TW 201515725 A TW201515725 A TW 201515725A
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Taiwan
Prior art keywords
brush
substrate
cleaning device
guiding
groove
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Application number
TW102148521A
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Chinese (zh)
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TWI530331B (en
Inventor
Sohichi Yanagisawa
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Nagaoka Seisakusho Corp
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Publication of TWI530331B publication Critical patent/TWI530331B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/20Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00Cleaning by electrostatic means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02Feeding of components

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Cleaning In General (AREA)

Abstract

A cleaning device (1) has: a guiding unit (21) comprising a guiding part (27), whose front (22) having a trench (24) formed thereon for the end face (5a) of the substrate (5) to pass through; and a brush (50) whose position of front end (51) is controlled by the back face (23) of guiding part (27). The trench (24) comprises an opening (25) penetrating the guiding part (27), and the front end (51) of brush (50) contacts with the end face (5a) of substrate (5) passing the trench (24) through the opening (25). The guiding unit (21) comprises: a recess part (70) which accepts at least the front end (51) of brush (50); a sucking opening (73) to suck dusts from the recess part (70).

Description

基板端面清潔裝置 Substrate end face cleaning device

本發明係有關一種對基板的端面進行清潔之裝置。 The present invention relates to an apparatus for cleaning an end face of a substrate.

日本國特許公開公報2010-207687號中記載:提供一種能用比以往還短的時間從基板的雙面進行除去塵埃的作業之裝置。專利文獻1的裝置具有:搬送手段,其進行基板搬送;及一對旋轉刷輥,其以包夾藉搬送手段搬送的基板之方式上下配置,且分別朝與基板的搬送方向交叉之方向延伸。搬送手段具備:第1輸送帶,其用於基板搬送,係配置在一對旋轉刷輥的上游側;及第2輸送帶,其用於基板搬送,係配置在一對旋轉刷輥的下游側。第1輸送帶和第2輸送帶係一對旋轉刷輥以隔著可與基板接觸的間隙的方式作配置。 Japanese Laid-Open Patent Publication No. 2010-207687 discloses an apparatus capable of removing dust from both sides of a substrate in a shorter time than in the past. The apparatus of the patent document 1 has the conveyance means which carries out a board|substrate conveyance, and the pair of rotating brush roll which arrange|positions up the board|substrate which carried out by the carrying- The transporting means includes a first conveyor belt for transporting the substrate, and is disposed on the upstream side of the pair of rotating brush rollers, and a second conveyor belt for transporting the substrate, and is disposed on the downstream side of the pair of rotating brush rollers. . The first conveyor belt and the second conveyor belt are arranged such that a pair of rotating brush rollers are interposed therebetween so as to be in contact with the substrate.

[先行技術文獻] [Advanced technical literature] [專利文獻] [Patent Literature] [專利文獻1] [Patent Document 1]

日本國特許公開公報2010-207687號 Japanese Patent Open Gazette 2010-207687

引用文獻1所記載之裝置適合於清潔基板的表背面。更被要求對基板的表背面之端面進行清潔之裝置。 The device described in the cited document 1 is suitable for cleaning the front and back surfaces of the substrate. A device that is required to clean the end faces of the front and back surfaces of the substrate.

本發明的一形態為,一種清潔裝置,具有:導引單元,包含導引部,其在前面形成有供基板端面通過的溝;及刷,其前端的位置受導引部的後面所控制,溝係包含有貫通導引部的開口,刷的前端經由開口與通過溝的基板端面接觸。利用前端的位置是受導引部的後面所控制的刷,可經由開設於溝上的開口對通過溝的基板端面進行清潔。因此,能使基板端面順著溝通過且一邊予以支撐一邊在不易對搭載於基板的表面或背面之電路、電路元件造成影響的狀態下,利用刷從基板端面除去塵埃等之不要物。 According to an aspect of the present invention, a cleaning apparatus includes: a guiding unit including a guiding portion having a groove for receiving an end surface of the substrate at a front surface; and a brush having a front end position controlled by a rear surface of the guiding portion, The groove includes an opening penetrating the guide portion, and the tip end of the brush is in contact with the end surface of the substrate passing through the groove via the opening. The position of the front end is a brush controlled by the rear of the guiding portion, and the end surface of the substrate passing through the groove can be cleaned through an opening formed in the groove. Therefore, it is possible to remove unnecessary substances such as dust from the end surface of the substrate by the brush while the substrate end surface is supported by the groove and while supporting the circuit or the circuit element mounted on the surface or the back surface of the substrate.

較理想為,導引單元包含:凹部,其收納刷的至少前端;及吸引口,其從凹部吸引塵埃。可利用凹部抑制由刷所除去的塵埃擴散,回收或除去來自吸引口的塵埃。 Preferably, the guiding unit includes a concave portion that accommodates at least a front end of the brush, and a suction port that attracts dust from the concave portion. The concave portion can be used to suppress the diffusion of dust removed by the brush, and the dust from the suction port can be recovered or removed.

更佳為,導引單元包含溝,其在凹部內之導引部的後面繫接前述吸引口。能經由背面的溝從吸引口回收或除去到達刷的前端之塵埃等。因此,能抑制塵埃再度附著於基板。 More preferably, the guiding unit includes a groove that engages the suction opening behind the guiding portion in the recess. Dust or the like reaching the tip end of the brush can be recovered or removed from the suction port through the groove on the back surface. Therefore, it is possible to suppress dust from adhering to the substrate again.

刷可以是能旋轉、前後、上下、左右移動者。旋轉軸可以是與導引部的後面平行者。含有與導引部的後面呈垂直的旋轉軸的刷,係對通過導引部的溝之基板端面從上下不同的方向接觸,故可有效率地清潔基板端面。旋轉軸和導引部的後面或前面呈平行的刷,藉由控制旋轉軸的位置可控 制刷的前端之位置。相對地,旋轉軸和導引部的後面呈垂直的刷,旋轉軸的位置無法控制,難以控制刷的前端之位置。在此裝置中,透過抵住、按住導引部的後面可控制刷的前端的位置。又,就算是刷的前端因為經過清潔而有摩耗的情況,亦能以導引部的後面為基準來控制刷的前端之位置。因此,能使刷的前端穩定地和通過導引部的溝之基板端面接觸,能獲得穩定的清潔效果。 The brush can be rotated, front, back, up and down, left and right. The axis of rotation may be parallel to the rear of the guide. The brush including the rotation axis perpendicular to the rear surface of the guide portion contacts the end surface of the substrate passing through the groove of the guide portion from the upper and lower sides, so that the end surface of the substrate can be efficiently cleaned. a rotating brush parallel to the rear or front of the guide, controlled by controlling the position of the rotary shaft The position of the front end of the brush. In contrast, the rotating shaft and the rear of the guiding portion are vertical brushes, and the position of the rotating shaft cannot be controlled, and it is difficult to control the position of the front end of the brush. In this device, the position of the front end of the brush can be controlled by abutting against and holding the rear of the guide. Moreover, even if the front end of the brush is worn out due to cleaning, the position of the front end of the brush can be controlled based on the rear of the guide portion. Therefore, the front end of the brush can be stably brought into contact with the end surface of the substrate passing through the groove of the guide portion, and a stable cleaning effect can be obtained.

較理想為,導引單元包含支撐部,其從導引部的供基板端面通過之溝朝向旋轉軸方向突出。能更穩定地控制旋轉刷的位置。典型的旋轉刷有旋轉圓刷。 Preferably, the guide unit includes a support portion that protrudes from the substrate end surface of the guide portion through the groove toward the rotation axis direction. The position of the rotating brush can be controlled more stably. A typical rotating brush has a rotating round brush.

較理想為,此清潔裝置更具有:將刷朝導引部的後面加壓的單元;及在刷的前端自導引部的後面偏離的狀態下固定刷的位置的單元。在需要清潔基板端面時,透過將刷向導引部的後面加壓,可藉由導引部的後面來控制刷的前端位置。又,在不對基板端面進行清潔時,利用固定的單元能在刷不與基板端面接觸的狀態下退避。 Preferably, the cleaning device further includes: a unit that presses the brush toward the rear of the guiding portion; and a unit that fixes the position of the brush in a state where the leading end of the brush is deviated from the rear of the guiding portion. When it is necessary to clean the end surface of the substrate, by pressing the brush toward the rear of the guide portion, the position of the front end of the brush can be controlled by the rear surface of the guide portion. Further, when the end surface of the substrate is not cleaned, the fixed unit can be retracted in a state where the brush does not come into contact with the end surface of the substrate.

此清潔裝置可為基板清潔裝置,亦可為端面清潔裝置。較理想為,清潔裝置具有:複數個導引單元,以表面的溝在基板的兩端面通過的位置呈對向的方式配置;及複數個刷,以前端的位置受複數個導引單元的導引部的後面所控制的方式配置。再者,較理想為,清潔裝置具有:以基板兩端可分別通過複數個導引單元之導引部的前面的溝之方式搬送基板的單元。能一邊搬送基板一邊對兩端同時進行清潔。 The cleaning device can be a substrate cleaning device or an end surface cleaning device. Preferably, the cleaning device has: a plurality of guiding units arranged in such a manner that the groove of the surface passes oppositely at the end faces of the substrate; and the plurality of brushes are guided by the plurality of guiding units at the position of the front end Configured in the manner controlled by the back of the department. Furthermore, it is preferable that the cleaning device has means for transporting the substrate so that the both ends of the substrate can pass through the grooves on the front surface of the plurality of guiding portions of the guiding unit. It is possible to simultaneously clean both ends while transporting the substrate.

2‧‧‧表面 2‧‧‧ surface

3‧‧‧下面(背面) 3‧‧‧ below (back)

5‧‧‧基板(印刷配線板) 5‧‧‧Substrate (printed wiring board)

5a、5b‧‧‧端面 5a, 5b‧‧‧ end face

9‧‧‧搬送路(移動路徑、移動路、通路) 9‧‧‧Transportation path (moving path, moving path, access)

10‧‧‧清潔裝置(基板清潔裝置) 10‧‧‧ cleaning device (substrate cleaning device)

11‧‧‧外殼 11‧‧‧Shell

12‧‧‧輸入埠 12‧‧‧ Input埠

13‧‧‧輸出埠 13‧‧‧ Output埠

20‧‧‧端面清潔裝置 20‧‧‧End face cleaning device

21‧‧‧導引塊(導引單元) 21‧‧‧Guiding block (guiding unit)

21a‧‧‧下部塊 21a‧‧‧lower block

21b‧‧‧上部塊 21b‧‧‧ upper block

22‧‧‧前面 22‧‧‧ front

22a‧‧‧前面(表面) 22a‧‧‧ front (surface)

23‧‧‧後面(背面) 23‧‧‧Back (back)

24‧‧‧溝 24‧‧‧ditch

25‧‧‧開口 25‧‧‧ openings

24b、24c‧‧‧兩端 24b, 24c‧‧‧ both ends

24a‧‧‧中心 24a‧‧ Center

24f‧‧‧平坦的部分 24f‧‧‧flat part

27‧‧‧導引部 27‧‧‧ Guidance Department

28a‧‧‧上端 28a‧‧‧Upper

28b‧‧‧下端 28b‧‧‧Bottom

29a、29b‧‧‧導引壁 29a, 29b‧‧‧ Guide wall

30‧‧‧雙面清潔裝置 30‧‧‧Double cleaning device

31、32‧‧‧清潔輥 31, 32‧‧‧ cleaning roller

33‧‧‧輸送帶 33‧‧‧Conveyor belt

40‧‧‧基板搬送單元(輸送帶單元) 40‧‧‧Substrate transport unit (conveyor unit)

41a、41b、42a、42b‧‧‧輥 41a, 41b, 42a, 42b‧‧ ‧ rolls

44‧‧‧馬達 44‧‧‧Motor

45‧‧‧驅動皮帶 45‧‧‧Drive belt

50‧‧‧刷 50‧‧‧ brush

51‧‧‧前端 51‧‧‧ front end

52‧‧‧中心部分 52‧‧‧ central part

55‧‧‧中心軸(旋轉軸) 55‧‧‧Center axis (rotary axis)

56‧‧‧馬達 56‧‧‧Motor

61‧‧‧幫浦(真空幫浦) 61‧‧‧Gongpu (vacuum pump)

62‧‧‧吸引軟管 62‧‧‧ suction hose

65‧‧‧板 65‧‧‧ boards

66‧‧‧連接機構 66‧‧‧Connecting mechanism

70‧‧‧凹部 70‧‧‧ recess

71‧‧‧突起 71‧‧‧Protrusion

73‧‧‧吸引孔 73‧‧‧Attraction hole

74‧‧‧溝 74‧‧‧ditch

75‧‧‧凹穴 75‧‧‧ recess

79‧‧‧貫通孔 79‧‧‧through holes

80‧‧‧支撐板 80‧‧‧support board

82‧‧‧彈簧(加壓單元) 82‧‧‧Spring (pressurizing unit)

85‧‧‧退避單元 85‧‧‧Retraction unit

85a‧‧‧銷 85a‧‧ sales

85b‧‧‧突起 85b‧‧‧ Protrusion

h1‧‧‧寬度(高度) H1‧‧‧Width (height)

W1‧‧‧寬度 W1‧‧‧Width

W2‧‧‧長度(距離) W2‧‧‧ length (distance)

W3‧‧‧深度 W3‧‧ depth

【圖1】係顯示基板清潔裝置的概略構成之圖。 Fig. 1 is a view showing a schematic configuration of a substrate cleaning device.

【圖2】係放大顯示端面清潔裝置的導引塊及刷子近旁的構成之剖面圖,圖2(a)係圖1的IIa,圖2(b)係圖1的IIb剖面圖,圖2(c)係圖1的IIa剖面圖,顯示使刷退避至後方的態樣。 Fig. 2 is a cross-sectional view showing the structure of the guide block and the brush in the vicinity of the brush of the end face cleaning device. Fig. 2(a) is IIa of Fig. 1, Fig. 2(b) is a sectional view of IIb of Fig. 1, Fig. 2 (Fig. 2) c) is a sectional view of IIa of Fig. 1 showing the state in which the brush is retracted to the rear.

【圖3】係顯示沿著端面清潔裝置之基板的通路的構成之上視圖。 Fig. 3 is a top view showing the configuration of the passage along the substrate of the end face cleaning device.

【圖4】係顯示導引塊的下部塊的概略構成之斜視圖。 Fig. 4 is a perspective view showing a schematic configuration of a lower block of the guide block.

【圖5】係顯示下部塊的構成之圖,圖5(a)是前視圖,圖5(b)是水平方向的剖面圖,圖5(c)是後視圖,圖5(d)是側視圖,圖5(e)是縱向的剖面圖,圖5(f)是在偏離中心的位置之縱向剖面圖。 Fig. 5 is a view showing a configuration of a lower block, Fig. 5(a) is a front view, Fig. 5(b) is a horizontal sectional view, Fig. 5(c) is a rear view, and Fig. 5(d) is a side view Fig. 5(e) is a longitudinal sectional view, and Fig. 5(f) is a longitudinal sectional view at an off-center position.

【圖6】係顯示在導引單元的導引部設定刷子以進行基板端面清潔之態樣的剖面圖,圖6(a)係顯示在導引部的凹部設定刷子的態樣,圖6(b)係顯示在凹部設定刷子的前端,圖6(c)係顯示對基板端面進行清潔的態樣。 Fig. 6 is a cross-sectional view showing a state in which a brush is set at a guiding portion of a guiding unit to perform end surface cleaning of the substrate, and Fig. 6(a) shows a state in which a brush is set in a concave portion of the guiding portion, Fig. 6 (Fig. 6 b) shows the front end of the brush set in the recess, and Fig. 6(c) shows the aspect in which the end face of the substrate is cleaned.

【圖7】係顯示不同刷子的例圖,圖7(a)係顯示刷子前端接著固定於本體之圖,圖7(b)係顯示刷子前端埋入本體。 Fig. 7 is a view showing an example of different brushes. Fig. 7(a) shows a front end of the brush attached to the main body, and Fig. 7(b) shows the front end of the brush embedded in the main body.

圖1顯示基板清潔裝置10的概略構成。此基板 清潔裝置10係為可設置在進行基板5之搬送的路線中途的裝置,可對搬送中之基板(印刷配線板)5的表背面之兩端面作清潔。基板清潔裝置10包含:外殼11;配置在外殼11的內部之端面清潔裝置20;及雙面清潔裝置30。基板5係從外殼11的輸入埠12通過端面清潔裝置20、雙面清潔裝置30而從輸出埠13排出。雙面清潔裝置30包含:清潔輥31及32,用以分別對基板5的表面2及下面(背面)3進行清潔;及搬送基板5之輸送帶33。 FIG. 1 shows a schematic configuration of a substrate cleaning device 10. This substrate The cleaning device 10 is a device that can be installed in the middle of the route for transporting the substrate 5, and can clean both end faces of the front and back surfaces of the substrate (printed wiring board) 5 being conveyed. The substrate cleaning device 10 includes a casing 11 , an end surface cleaning device 20 disposed inside the casing 11 , and a double-sided cleaning device 30 . The substrate 5 is discharged from the output port 13 from the input port 12 of the casing 11 through the end face cleaning device 20 and the double-sided cleaning device 30. The double-sided cleaning device 30 includes cleaning rollers 31 and 32 for cleaning the surface 2 and the lower surface (back surface) 3 of the substrate 5, respectively, and a conveying belt 33 for conveying the substrate 5.

端面清潔裝置(端面清潔器)20包含:導引塊(導引單元)21,其在基板5的一端面5a的近旁進行支撐並引導;輸送帶單元40,以端面5a可沿著導引塊21移動的方式進行引導。導引塊21係於前面(表面)22形成有供基板5的端面5a通過的溝24。端面清潔裝置20更具有藉導引塊21控制前端51的位置之刷50。溝24包含貫通導引塊21所開設的開口25,刷50的前端51經由開口25與通過溝24之基板5的端面5a接觸而對端面5a進行清潔。 The end face cleaning device (end face cleaner) 20 includes: a guiding block (guide unit) 21 that supports and guides near an end surface 5a of the substrate 5; the conveyor belt unit 40 with the end surface 5a along the guiding block 21 moves the way to boot. The guide block 21 is formed with a groove 24 through which the end surface 5a of the substrate 5 passes, in front (surface) 22. The end face cleaning device 20 further has a brush 50 that controls the position of the front end 51 by the guide block 21. The groove 24 includes an opening 25 through which the guide block 21 is opened, and the front end 51 of the brush 50 is in contact with the end surface 5a of the substrate 5 passing through the groove 24 via the opening 25 to clean the end surface 5a.

輸送帶單元40包含:輥41a及41b、42a及42b,其等在溝24的前後以上下包夾基板5的端部的方式使之移動;對該等的輥41a至42b進行驅動之馬達44;及驅動皮帶45。馬達44的位置、驅動皮帶45的配置有各式各樣,不侷限於本例。導引塊21包含:下部塊21a,其包含下部的輥41b及42b和溝24;及上部塊21b,用以支撐上部的輥41a及42a。 The conveyor belt unit 40 includes rollers 41a and 41b, 42a and 42b which are moved in such a manner as to cover the ends of the substrate 5 before and after the grooves 24, and the motors 44 for driving the rollers 41a to 42b. ; and drive belt 45. The position of the motor 44 and the arrangement of the drive belt 45 are various, and are not limited to this example. The guide block 21 includes a lower block 21a including lower rollers 41b and 42b and a groove 24, and an upper block 21b for supporting the upper rollers 41a and 42a.

端面清潔裝置20更包含:幫浦(真空幫浦)61,其用以將利用刷50從基板5除去的塵埃自導引塊21進行吸 引並除去;及吸引軟管62。 The end face cleaning device 20 further includes a pump (vacuum pump) 61 for sucking dust removed from the substrate 5 by the brush 50 from the guiding block 21. Introduced and removed; and suction hose 62.

圖2以縱向的剖面放大顯示端面清潔裝置20的導引塊21及刷50之近旁的構成。圖3利用上視圖顯示端面清潔裝置20在順著基板5的通路之構成。端面清潔裝置20為,一對的導引塊21呈對峙(對面)地配置,俾清潔通過搬送路之基板5的兩端面5a及5b,且各個導引塊21裝設有清潔用的刷50。端面清潔裝置20更包含:板65,將該等導引塊21及刷50進行支撐;連接機構66,可適當調整板65彼此的距離。端面清潔裝置20之左右的構成是共通的,故具體構成主要以左側所示的導引塊21為中心作說明。 2 is an enlarged cross-sectional view showing the configuration of the guide block 21 of the end face cleaning device 20 and the vicinity of the brush 50. Figure 3 shows the construction of the end face cleaning device 20 along the path of the substrate 5 in a top view. In the end face cleaning device 20, the pair of guide blocks 21 are disposed oppositely (opposite), and the end faces 5a and 5b of the substrate 5 passing through the conveyance path are cleaned, and each of the guide blocks 21 is provided with a cleaning brush 50. . The end face cleaning device 20 further includes a plate 65 for supporting the guide blocks 21 and the brush 50, and a connecting mechanism 66 for appropriately adjusting the distance between the plates 65. Since the left and right configurations of the end face cleaning device 20 are common, the specific configuration is mainly described mainly on the guide block 21 shown on the left side.

端面清潔裝置20包含配置在板(台盤)65之上的:導引塊21;刷50,裝設於導引塊21;馬達56,用以旋轉刷50;支撐板80,用以支撐馬達56及刷50;彈簧(加壓單元)82,藉由支撐板80將刷50向導引塊21的方向加壓;及退避單元85,將支撐板80固定在偏離導引塊21的位置。加壓單元82不限於彈簧,亦可為其他賦予彈性力的機構、空氣缸等之加壓機構。 The end face cleaning device 20 comprises: a guiding block 21 disposed on the plate (the tray) 65; a brush 50 mounted on the guiding block 21; a motor 56 for rotating the brush 50; and a supporting plate 80 for supporting the motor 56 and brush 50; a spring (pressurizing unit) 82 that pressurizes the brush 50 in the direction of the guide block 21 by the support plate 80; and a retracting unit 85 that fixes the support plate 80 at a position deviated from the guide block 21. The pressurizing unit 82 is not limited to a spring, and may be another pressurizing mechanism such as a mechanism for imparting an elastic force or an air cylinder.

如圖2(a)、(b)及圖3所示,藉由包含有輥41a及41b、42a及42b的基板搬送單元(輸送帶單元)40,使得基板5在端面清潔裝置20的搬送路(移動路徑、移動路、通路)9中搬送,被搬送的基板5的兩端面5a及5b係通過設在兩側的導引塊21的前面22之溝24。導引塊21的背側插設有刷50,其在藉由支撐板80被彈簧82朝溝24的方向加壓的狀態下以中心軸(旋轉軸)55為中心作旋轉。溝24係包含貫通 導引塊21的前方壁之開口25,從開口25向基板5的方向突出的刷50的前端51係一邊旋轉一邊碰觸兩端面5a及5b,以清潔基板5的兩端面5a及5b。 As shown in FIGS. 2(a), (b) and 3, the substrate transport unit (conveyor unit) 40 including the rollers 41a and 41b, 42a and 42b is used to transport the substrate 5 to the end surface cleaning device 20. The (removed path, the moving path, the path) 9 is transported, and both end faces 5a and 5b of the substrate 5 to be transported pass through the groove 24 provided on the front surface 22 of the guide block 21 on both sides. A brush 50 is inserted on the back side of the guide block 21, and is rotated about the central axis (rotation axis) 55 in a state where the support plate 80 is pressed by the spring 82 in the direction of the groove 24. Ditch 24 series includes The opening 25 of the front wall of the guide block 21, the front end 51 of the brush 50 projecting from the opening 25 toward the substrate 5, touches both end faces 5a and 5b while rotating, to clean both end faces 5a and 5b of the substrate 5.

如圖2(c)所示,在不對端面5a及5b作清潔時,利用退避單元85使刷50藉由支撐板80而退避至導引塊21的後方。退避單元85包含設於支撐板80側的銷85a及設於台盤板65之側的突起85b,藉由將銷85a勾在從台盤板65之上的導引塊21偏離之位置的突起85b上,可將支撐板80固定在自導引塊21偏離的位置。可在支撐板80與導引塊21分離的狀態下交換刷50、或因應基板5的種類或髒污等狀態交換刷50的種類。 As shown in FIG. 2(c), when the end faces 5a and 5b are not cleaned, the brush 50 is retracted to the rear of the guide block 21 by the support plate 80 by the retracting unit 85. The retracting unit 85 includes a pin 85a provided on the side of the support plate 80 and a projection 85b provided on the side of the dial plate 65, and a projection of the pin 85a at a position deviated from the guide block 21 above the dial plate 65 At 85b, the support plate 80 can be fixed at a position deviated from the guide block 21. The brush 50 can be exchanged in a state where the support plate 80 is separated from the guide block 21, or the type of the brush 50 can be exchanged depending on the type of the substrate 5 or the state of the substrate.

4係抽出導引塊21的下部塊21a藉斜視圖來顯示概略構成。圖5(a)是下部塊21a的前視圖,圖5(b)是水平方向的剖面圖,圖5(c)是後視圖,圖5(d)是側視圖,圖5(e)是縱向剖面圖,及圖5(f)是在偏中心的位置處的縱向剖面圖。 The lower block 21a of the 4-series extraction guide block 21 shows a schematic configuration in an oblique view. Figure 5 (a) is a front view of the lower block 21a, Figure 5 (b) is a horizontal cross-sectional view, Figure 5 (c) is a rear view, Figure 5 (d) is a side view, Figure 5 (e) is a portrait The cross-sectional view, and Fig. 5(f), is a longitudinal cross-sectional view at a position offset from the center.

下部塊21a係整體呈凸字型的塊,前面(表面)22的中央部分成為基板5的朝通路9的方向(前方)突出的導引部27。導引部27包含以包夾通路9的方式突出的導引壁29a及29b。下側的導引壁29a的上端28a及上側的導引壁29b的下端28b係包夾基板5所通過的通路9呈對稱的形狀,藉由上端28a及下端28b在導引部27的前面(表面)22a形成供基板5的端部(端面)5a通過的溝24。溝24為,兩端24b及24c在上下方向比中心24a寬廣,而在中心24a形成有順著 通路9的方向延伸之平坦的部分24f。 The lower block 21a is a block of a convex shape as a whole, and a central portion of the front surface (surface) 22 serves as a guide portion 27 of the substrate 5 that protrudes in the direction (front) of the passage 9. The guide portion 27 includes guide walls 29a and 29b that protrude in such a manner as to surround the passage 9. The upper end 28a of the lower guide wall 29a and the lower end 28b of the upper guide wall 29b are symmetrically shaped by the passage 9 through which the substrate 5 is passed, with the upper end 28a and the lower end 28b in front of the guide portion 27 ( The surface 22a forms a groove 24 through which the end (end surface) 5a of the substrate 5 passes. The groove 24 is such that both ends 24b and 24c are wider in the up and down direction than the center 24a, and are formed along the center 24a. The flat portion 24f extends in the direction of the passage 9.

溝24之中心24a的寬度(高度)h1以2~6mm左右較佳,2~4mm左右更佳。又,中心部之平坦的部分24f的長度以10~30mm左右較佳,15~25mm左右更佳。再者,兩端24b及24c與中心部之平坦的部分24f所呈的開角以30~80度的較理想,40~70度更理想。 The width (height) h1 of the center 24a of the groove 24 is preferably about 2 to 6 mm, more preferably about 2 to 4 mm. Further, the length of the flat portion 24f of the center portion is preferably about 10 to 30 mm, more preferably about 15 to 25 mm. Further, the opening angles of the both ends 24b and 24c and the flat portion 24f of the center portion are preferably 30 to 80 degrees, more preferably 40 to 70 degrees.

上側的導引壁29b及下側的導引壁29a,係藉由從溝24的中央部分朝向導引部27的後面(背面、背面)23的方向突出之突起71連接。本例的導引壁29a及29b係在下部塊21a的前面22突出者且和下部塊21a成為一體。上側的導引壁29b及下側的導引壁29a是將藉由朝向背面側突出的突起71所形成一體的板提供作為導引部27的單元,亦可安裝於導引塊21。 The upper guide wall 29b and the lower guide wall 29a are connected by a projection 71 projecting from the central portion of the groove 24 toward the rear (back surface, rear surface) 23 of the guide portion 27. The guide walls 29a and 29b of this example are protruded from the front surface 22 of the lower block 21a and are integrated with the lower block 21a. The upper guide wall 29b and the lower guide wall 29a are means for providing a plate integrally formed by the projections 71 projecting toward the back side as a guide portion 27, and may be attached to the guide block 21.

下部塊21a的導引部27即導引壁29a及29b的背側(後側)係成為圓筒狀的凹部70,在凹部70,以清潔用的刷50其前端51抵住凹部70的底面即導引部27的後面23之方式收納刷50。由導引壁29a及29b所形成的溝24係包含貫通導引部27並朝向凹部70開設的開口25。刷50的前端51係從開口25向溝24的內部突出與通過溝24之基板5的端面5a碰觸而進行清潔。導引部27的開口25,除了溝24之中心的突起71外,在圓筒狀之凹部70的內部,設置成與溝24相同形狀。 The guide portion 27 of the lower block 21a, that is, the back side (rear side) of the guide walls 29a and 29b is a cylindrical recess 70 in which the front end 51 of the cleaning brush 50 abuts against the bottom surface of the recess 70. That is, the brush 50 is accommodated in such a manner that the rear surface 23 of the guide portion 27 is formed. The groove 24 formed by the guide walls 29a and 29b includes an opening 25 that penetrates the guide portion 27 and opens toward the recess 70. The front end 51 of the brush 50 protrudes from the opening 25 toward the inside of the groove 24 and is in contact with the end surface 5a of the substrate 5 passing through the groove 24 to be cleaned. The opening 25 of the guide portion 27 is provided in the same shape as the groove 24 in the inside of the cylindrical recess 70 except for the projection 71 at the center of the groove 24.

具體言之,下部塊21a的前面22當中的導引部27之導引壁29a及29b的前面22a是成為供基板5通過的溝 24的上面。另一方面,下部塊21a的表面22當中的其他部分之表面22b是成為與溝24的下面(底面)對應的表面。刷50的前端51所抵接且用以控制前端51的位置之導引壁29a及29b的後面23,係位在比成為溝24的底面之前面22b還靠基近板的通路9之側,刷50的前端51係從溝24的底面22b向通路9之側突出。因此,刷50的前端51係以被控制在導引部27之導引壁29a及29b的後面23的位置之狀態下與通過溝24之基板5的端面5a碰觸而清潔端面5a。就本例而言,係使導引部27相對於下部塊21a的其他部分向前面突出以形成溝24,但溝24的形狀及形成之方法不受此所限。可於下部塊21a的前面形成溝24,僅以導引部27形成下部塊21a亦可。 Specifically, the front surface 22a of the guide walls 29a and 29b of the guide portion 27 in the front surface 22 of the lower block 21a is a groove through which the substrate 5 passes. The top of 24. On the other hand, the surface 22b of the other portion among the surfaces 22 of the lower block 21a is a surface corresponding to the lower surface (bottom surface) of the groove 24. The rear surface 23 of the guide walls 29a and 29b, which abuts the front end 51 of the brush 50 and controls the position of the front end 51, is fastened to the side of the passage 9 which is closer to the base plate than the front surface 22b which is the bottom surface of the groove 24. The front end 51 of the brush 50 protrudes from the bottom surface 22b of the groove 24 toward the side of the passage 9. Therefore, the front end 51 of the brush 50 is cleaned against the end surface 5a of the substrate 5 passing through the groove 24 while being controlled at the position of the rear surface 23 of the guide walls 29a and 29b of the guide portion 27, thereby cleaning the end surface 5a. In this example, the guide portion 27 is protruded forward with respect to other portions of the lower block 21a to form the groove 24, but the shape and formation method of the groove 24 are not limited thereto. The groove 24 may be formed in front of the lower block 21a, and the lower block 21a may be formed only by the guide portion 27.

溝24的寬度(上面22a與下面22b之距離)W1以1~5mm左右較佳,2~4mm左右更佳。導引壁29a及29b的背面23與溝的下面22b之距離W2係以0.5~2mm左右較佳,0.5~1.5mm左右更佳。 The width of the groove 24 (the distance between the upper surface 22a and the lower surface 22b) W1 is preferably about 1 to 5 mm, more preferably about 2 to 4 mm. The distance W2 between the back surface 23 of the guide walls 29a and 29b and the lower surface 22b of the groove is preferably about 0.5 to 2 mm, more preferably about 0.5 to 1.5 mm.

下部塊21a更包含開設於凹部70的下面之吸引孔73。吸引孔73係和吸引軟管62連接,將被刷50所帶進凹部70的塵埃向外部排出。就本例而言,吸引孔73係從凹部70的後面23之側向下側延伸。刷50係在將進入溝24的基板5朝下側壓制的方向旋轉,防止基板5的前端在溝24的內部亂動。因此,被刷50扒取的塵埃首先向下側排出,通過吸引孔73被排出。因此,可抑制塵埃再度附著於基板5。 The lower block 21a further includes a suction hole 73 formed in a lower surface of the recess 70. The suction hole 73 is connected to the suction hose 62, and the dust carried by the brush 50 into the concave portion 70 is discharged to the outside. In the present example, the suction hole 73 extends from the side of the rear surface 23 of the recess 70 to the lower side. The brush 50 is rotated in a direction in which the substrate 5 entering the groove 24 is pressed downward, and the tip end of the substrate 5 is prevented from being swayed inside the groove 24. Therefore, the dust picked up by the brush 50 is first discharged to the lower side and discharged through the suction hole 73. Therefore, it is possible to suppress the dust from adhering to the substrate 5 again.

下部塊21a更包含排出用的溝74,其在成為圓筒狀之凹部70的底面之導引部27的後面(背面)23延伸於半 徑方向,和吸引孔73繋接,深度為0.5~2mm左右。刷50的前端51係一邊抵接導引部27的後面23一邊旋轉,而在一到達排出用的溝74時,前端51在排出用的溝74之中成為不受拘束(free),到達前端51之塵埃被放出至排出用的溝74。在端面清潔上多採用強韌且具撓性的刷50,故當前端51一從抵住後面23的狀態在排出用的溝74成為不受拘束時,塵埃容易被放出,然後排出用的溝74被吸引而容易成為負壓,故被放出的塵埃直接被回收。 The lower block 21a further includes a groove 74 for discharge which extends to the rear (back surface) 23 of the guide portion 27 which is the bottom surface of the cylindrical recess 70. The radial direction is connected to the suction hole 73, and the depth is about 0.5 to 2 mm. The distal end 51 of the brush 50 rotates while abutting against the rear surface 23 of the guide portion 27, and when reaching the discharge groove 74, the distal end 51 is unconstrained in the discharge groove 74 and reaches the front end. The dust of 51 is discharged to the groove 74 for discharge. In the end face cleaning, the strong and flexible brush 50 is used. Therefore, when the current end 51 is in the state of being pressed against the rear face 23, the dust is easily released when the discharge groove 74 is unconstrained, and then the drain is discharged. 74 is attracted and easily becomes a negative pressure, so the dust that is released is directly recovered.

下部塊21a更包含凹穴75,其沿著成為圓筒狀之凹部70的底面之後面23的開口25的上下變寬廣,且深度W3為0.5~2mm左右。刷50的前端51係一邊抵接導引部27的後面23一邊旋轉,當到達凹穴75時,前端51成為不受拘束,前端51從貫通導引部27的開口25向基板5之側突出。因此,刷50的前端51是對基板5的端面5a大致垂直地突出(延伸)的狀態,容易從基板5除去塵埃。又,在開口25的前後,刷50的前端51以不與導引部27抵接或不易抵接的狀態進行旋轉。因此,到達刷50的前端51之塵埃難以再度附著,容易回收利用刷50所扒取的塵埃。 The lower block 21a further includes a recess 75 which is widened up and down along the opening 25 of the surface 23 after the bottom surface of the cylindrical recess 70, and has a depth W3 of about 0.5 to 2 mm. The distal end 51 of the brush 50 rotates while abutting against the rear surface 23 of the guiding portion 27, and when reaching the recess 75, the distal end 51 is unconstrained, and the distal end 51 protrudes from the opening 25 of the through guiding portion 27 toward the side of the substrate 5. . Therefore, the tip end 51 of the brush 50 is in a state of projecting (extending) substantially perpendicularly to the end surface 5a of the substrate 5, and it is easy to remove dust from the substrate 5. Further, the front end 51 of the brush 50 is rotated in a state where it does not abut against the guide portion 27 or is not easily abutted before and after the opening 25. Therefore, it is difficult for the dust reaching the tip end 51 of the brush 50 to adhere again, and it is easy to collect the dust picked up by the brush 50.

下部塊21a更包含貫通孔79,其支撐下側的輥41b及42b且供要驅動的軸(未圖示)從下部塊21a的背側插入。 The lower block 21a further includes a through hole 79 that supports the lower rollers 41b and 42b and is inserted into a shaft (not shown) to be driven from the back side of the lower block 21a.

裝設在下部塊21a之圓筒狀的凹部70的刷50,係如圖4所示為旋轉圓刷,以旋轉軸55與凹部70的底面即導引部27的後面23呈垂直的方式設置。刷50的前端51係 由尼龍、丙烯酸等的樹脂製的無數毛所構成,整體纏成圓筒狀。前端51的中心部分52呈空洞,藉由使中心部分52與從凹部70的底面(後面)23朝後方突出的突起71對位而成為突起71在刷50的旋轉軸55的方向延伸的支撐部。因此,刷50係在凹部70的內部以更穩定的狀態旋轉。 The brush 50 attached to the cylindrical recess 70 of the lower block 21a is a rotating circular brush as shown in Fig. 4, and the rotating shaft 55 is disposed perpendicular to the bottom surface of the recess 70, that is, the rear surface 23 of the guiding portion 27. . The front end 51 of the brush 50 is It is composed of a myriad of wool made of a resin such as nylon or acrylic, and is integrally wound into a cylindrical shape. The center portion 52 of the front end 51 is hollow, and the center portion 52 is aligned with the projection 71 projecting rearward from the bottom surface (back surface) 23 of the recess portion 70 to form a support portion in which the projection 71 extends in the direction of the rotation shaft 55 of the brush 50. . Therefore, the brush 50 is rotated inside the recess 70 in a more stable state.

在本例中,突起71被設置在與基板5所通過的溝24之中心部相對應的位置,刷50是以基板5的端部5a為中心旋轉。因此,刷50的前端51以上下逆向的方式在溝24的導入側的開口25與排出側的開口25抵接基板5的端部5a而從上下雙方對基板5的端部5a進行清潔。如上述,為抑制基板5的前端亂動,以在導入方向的開口25中使刷50的前端51對基板5從上到下抵住的方式使刷50旋轉較理想。因此,係以刷50的前端51在基板5之排出側的開口25,從下到上抵住端部5a的方式旋轉。刷50的旋轉軸55亦可從溝24的中心朝前後及上下偏移。 In this example, the projection 71 is provided at a position corresponding to the central portion of the groove 24 through which the substrate 5 passes, and the brush 50 is rotated about the end portion 5a of the substrate 5. Therefore, the front end 51 of the brush 50 is opposed to the end portion 5a of the substrate 5 at the opening 25 on the introduction side of the groove 24 and the opening 25 on the discharge side, and the end portion 5a of the substrate 5 is cleaned from both the upper and lower sides. As described above, in order to suppress the turbulence of the tip end of the substrate 5, it is preferable to rotate the brush 50 such that the tip end 51 of the brush 50 abuts against the substrate 5 from the top to the bottom in the opening 25 in the introduction direction. Therefore, the front end 51 of the brush 50 is rotated in such a manner that the opening 25 on the discharge side of the substrate 5 abuts against the end portion 5a from bottom to top. The rotating shaft 55 of the brush 50 can also be offset from the center of the groove 24 toward the front and rear and up and down.

圖6係放大顯示在導引單元21的導引部27設定刷50以對基板5的端面5a進行清潔的態樣。如圖6(a)所示,在導引部27的前面22a設有供基板5的端面5a通過的溝24,在導引部27的後方設有用以收納刷50的前端51之圓筒狀的凹部70。如圖6(b)所示,當在凹部70設定刷50的前端51時,前端51係與導引部27的後壁(後面)23抵接,前端51係在前端51的位置受控制的狀態下向溝24突出。如圖6(c)所示,刷50係旋轉而對通過溝24之基板5的端面5a進行清潔。 Fig. 6 is an enlarged view showing a state in which the guide portion 27 of the guide unit 21 sets the brush 50 to clean the end surface 5a of the substrate 5. As shown in Fig. 6(a), a groove 24 through which the end surface 5a of the substrate 5 passes is provided in the front surface 22a of the guide portion 27, and a cylindrical shape for accommodating the front end 51 of the brush 50 is provided at the rear of the guide portion 27. The recess 70. As shown in FIG. 6(b), when the front end 51 of the brush 50 is set in the recess 70, the front end 51 abuts against the rear wall (rear surface) 23 of the guide portion 27, and the front end 51 is controlled at the position of the front end 51. In the state, it protrudes toward the groove 24. As shown in FIG. 6(c), the brush 50 is rotated to clean the end surface 5a of the substrate 5 passing through the groove 24.

刷50係依彈簧82而被朝後壁23加壓進行清潔,就算是前端51因摩耗造成刷50的長度產生變化,仍舊可維持一定的推抵量。因此,刷50的位置係以摩耗的前端51可抵住後壁23的方式受到控制,刷50的前端51始終以向溝24的內部突出既定長度的狀態下旋轉,對基板5的端面5a進行清潔。 The brush 50 is pressed against the rear wall 23 by the spring 82 to be cleaned, and even if the front end 51 changes in the length of the brush 50 due to wear, a certain amount of pushing can be maintained. Therefore, the position of the brush 50 is controlled such that the worn front end 51 can abut against the rear wall 23, and the front end 51 of the brush 50 is always rotated in a state of protruding toward the inside of the groove 24 by a predetermined length, and the end surface 5a of the substrate 5 is subjected to the end surface 5a. clean.

刷50的前端51係抵接導引部27的後壁23可精度佳地控制位置。因此,可精度佳地控制前端51向溝24突出的量(長度),且機械性地決定前端51的位置,所以刷50的前端51與基板5接觸的長度及位置之精度極高且可靠性高。因此,就算使用刷毛稍硬的刷50,也幾乎沒有對基板5造成損傷、對基板5上的電路或電路要件造成損傷的可能性。又,因為使用稍硬的刷50以前端51抵住後壁23的方式控制前端51的位置,所以前端51的位置精度提升。因此,關於此端面清潔裝置20,不僅是塵埃,藉由使用稍硬的刷50也可對應進行除去因基板切斷等所致毛邊之作業。 The front end 51 of the brush 50 abuts against the rear wall 23 of the guide portion 27 to accurately control the position. Therefore, the amount (length) of the tip end 51 protruding toward the groove 24 can be accurately controlled, and the position of the tip end 51 can be mechanically determined, so that the length and position of the front end 51 of the brush 50 in contact with the substrate 5 are extremely high and reliable. high. Therefore, even if the brush 50 having a slightly hard bristles is used, there is almost no possibility of damage to the substrate 5 and damage to circuits or circuit components on the substrate 5. Further, since the position of the distal end 51 is controlled such that the distal end 51 abuts against the rear wall 23 by using the slightly stiffer brush 50, the positional accuracy of the distal end 51 is improved. Therefore, in the end face cleaning device 20, not only dust but also a rough brush 50 can be used to remove the burrs caused by the cutting of the substrate or the like.

而且,在凹部70設有從後面23的中央也就是溝24朝向後方突出之突起71,圓刷50的中央部分(中心部分)52成為凹穴被插入有突起71。因此,刷50的前端51係中央部分52一邊被突起71導引一邊旋轉。因此,刷50係以旋轉軸55為中心而包含前端51在內穩定地旋轉。因此,更可減低在基板5發生損傷之可能性。 Further, the recess 70 is provided with a projection 71 projecting rearward from the center of the rear surface 23, that is, the groove 24. The central portion (center portion) 52 of the round brush 50 is inserted into the projection 71 as a recess. Therefore, the front end 51 of the brush 50 is rotated while being guided by the projection 71. Therefore, the brush 50 is stably rotated including the distal end 51 around the rotation shaft 55. Therefore, the possibility of damage on the substrate 5 can be further reduced.

又,在後面23的開口25的上下設有深度W3的凹穴75,使前端(毛尖)51不受拘束且以立著狀態抵住基板 5的端面5a。因此,能以前端51清掃端面5a的方式作清潔,提升塵埃的除去效率。凹穴75的深度W3係以與前端51朝向溝24突出的長度W2同等者較理想。 Further, a recess 75 having a depth W3 is provided on the upper and lower sides of the opening 25 of the rear face 23, so that the front end (hair point) 51 is unconstrained and abuts against the substrate in an upright state. End face 5a of 5. Therefore, the front end 51 can be cleaned so that the end face 5a is cleaned, and the dust removal efficiency can be improved. The depth W3 of the pocket 75 is preferably equal to the length W2 at which the tip end 51 protrudes toward the groove 24.

在收納刷50的前端51之凹部70,設有吸引溝(排出用的溝)74及與吸引溝74繋接的吸引孔73。因此,被刷50所扒取的塵埃係藉該等吸引機構從凹部70被排出,可抑制再度附著於基板5。又,就算塵埃再度附著於基板5的表面2或背面3,仍可利用配置於端面清潔裝置20下游的雙面清潔裝置30進行除去。因此,端面清潔裝置20配置於雙面清潔裝置30的上游較理想。 A suction groove (discharge groove) 74 and a suction hole 73 that is coupled to the suction groove 74 are provided in the recessed portion 70 of the front end 51 of the accommodating brush 50. Therefore, the dust picked up by the brush 50 is discharged from the concave portion 70 by the suction means, and the adhesion to the substrate 5 can be suppressed again. Further, even if the dust adheres again to the front surface 2 or the back surface 3 of the substrate 5, it can be removed by the double-sided cleaning device 30 disposed downstream of the end surface cleaning device 20. Therefore, it is preferable that the end face cleaning device 20 is disposed upstream of the double-sided cleaning device 30.

圖7顯示可裝設在端面清潔裝置20上的幾個不同刷50的例。刷50亦可為如圖7(a)所示將前端(刷毛部分)51接著固定於本體53者,亦可為如圖7(b)所示將前端51埋入本體53者。前端51的材質可以是像金屬線刷那種強度高的硬物,也可以是刷毛、布等之柔軟物。刷50的交換係如圖2(c)所示,能在使刷50退避的狀態下簡單地進行。又,亦可將具備強度或硬度不同的刷之端面清潔裝置20輪流地排列在基板5的搬送方向以清潔基板端面。 FIG. 7 shows an example of several different brushes 50 that can be mounted on the end face cleaning device 20. The brush 50 may be such that the front end (bristle portion) 51 is then fixed to the main body 53 as shown in Fig. 7(a), or the front end 51 may be embedded in the main body 53 as shown in Fig. 7(b). The material of the front end 51 may be a hard material such as a metal wire brush, or a soft object such as a bristles or a cloth. The exchange system of the brush 50 can be easily performed in a state where the brush 50 is retracted as shown in Fig. 2(c). Further, the end face cleaning device 20 having brushes having different strengths or hardnesses may be alternately arranged in the conveying direction of the substrate 5 to clean the end faces of the substrates.

如以上說明,此基板清潔裝置10在對搬送中之基板5的雙面進行清潔的雙面清潔裝置30之上游包含有端面清潔裝置20。因此,可一邊搬送基板5一邊除去基板5的雙面和兩端面(側面)5a及5b的塵埃。 As described above, the substrate cleaning apparatus 10 includes the end surface cleaning device 20 upstream of the double-sided cleaning device 30 that cleans both sides of the substrate 5 being conveyed. Therefore, the dust on both sides and both end faces (side faces) 5a and 5b of the substrate 5 can be removed while the substrate 5 is conveyed.

此外,以上是以內建在基板清潔裝置10的端面清潔裝置20為例作說明,端面清潔裝置20係以導引塊21為 中心將含有複數個輥之搬送單元、刷50等單元化,亦容易附加於進行基板搬送的輸送帶等之既有設備上。 In addition, the above description is taken as an example of the end surface cleaning device 20 built in the substrate cleaning device 10, and the end surface cleaning device 20 is guided by the guiding block 21 The center unitizes a transport unit including a plurality of rollers, a brush 50, and the like, and is also easily attached to an existing device such as a conveyor belt that performs substrate transport.

2‧‧‧表面 2‧‧‧ surface

3‧‧‧下面(背面) 3‧‧‧ below (back)

5‧‧‧基板(印刷配線板) 5‧‧‧Substrate (printed wiring board)

5a‧‧‧端面 5a‧‧‧ end face

9‧‧‧搬送路(移動路徑、移動路、通路) 9‧‧‧Transportation path (moving path, moving path, access)

10‧‧‧清潔裝置(基板清潔裝置) 10‧‧‧ cleaning device (substrate cleaning device)

11‧‧‧外殼 11‧‧‧Shell

12‧‧‧輸入埠 12‧‧‧ Input埠

13‧‧‧輸出埠 13‧‧‧ Output埠

20‧‧‧端面清潔裝置 20‧‧‧End face cleaning device

21‧‧‧導引塊(導引單元) 21‧‧‧Guiding block (guiding unit)

21a‧‧‧下部塊 21a‧‧‧lower block

21b‧‧‧上部塊 21b‧‧‧ upper block

22‧‧‧前面 22‧‧‧ front

24‧‧‧溝 24‧‧‧ditch

25‧‧‧開口 25‧‧‧ openings

30‧‧‧雙面清潔裝置 30‧‧‧Double cleaning device

31、32‧‧‧清潔輥 31, 32‧‧‧ cleaning roller

33‧‧‧輸送帶 33‧‧‧Conveyor belt

40‧‧‧基板搬送單元(輸送帶單元) 40‧‧‧Substrate transport unit (conveyor unit)

41a、41b、42a、42b‧‧‧輥 41a, 41b, 42a, 42b‧‧ ‧ rolls

44‧‧‧馬達 44‧‧‧Motor

45‧‧‧驅動皮帶 45‧‧‧Drive belt

50‧‧‧刷 50‧‧‧ brush

51‧‧‧前端 51‧‧‧ front end

61‧‧‧幫浦(真空幫浦) 61‧‧‧Gongpu (vacuum pump)

62‧‧‧吸引軟管 62‧‧‧ suction hose

Claims (9)

一種清潔裝置,具有:導引單元,包含導引部,其在前面形成有供基板端面通過的溝;及刷,其前端的位置受前述導引部的後面所控制,前述溝係包含有貫通前述導引部的開口,前述刷的前端經由前述開口與通過前述溝的基板端面接觸。 A cleaning device includes: a guiding unit including a guiding portion formed with a groove through which an end surface of the substrate passes; and a brush whose front end is controlled by a rear surface of the guiding portion, wherein the groove includes a through hole In the opening of the guiding portion, the front end of the brush is in contact with the end surface of the substrate passing through the groove via the opening. 如請求項1之清潔裝置,其中前述導引單元包含:凹部,其收納前述刷的至少前端;及吸引口,其從前述凹部吸引塵埃。 The cleaning device of claim 1, wherein the guiding unit comprises: a concave portion that accommodates at least a front end of the brush; and a suction port that sucks dust from the concave portion. 如請求項2之清潔裝置,其中前述導引單元包含溝,其在前述凹部內之前述導引部的後面繫接前述吸引口。 The cleaning device of claim 2, wherein the guiding unit comprises a groove that is coupled to the suction opening behind the guiding portion in the recess. 如請求項1之清潔裝置,其中前述刷包含旋轉軸,其相對於前述導引部的後面呈垂直。 The cleaning device of claim 1, wherein the brush comprises a rotating shaft that is perpendicular to a rear surface of the guiding portion. 如請求項4之清潔裝置,其中前述導引單元包含支撐部,其從前述導引部的供基板端面通過之前述溝朝向前述旋轉軸方向突出。 The cleaning device according to claim 4, wherein the guiding unit includes a supporting portion that protrudes from the groove through which the substrate end surface of the guiding portion passes in the direction of the rotation axis. 如請求項4之清潔裝置,其中前述刷係旋轉圓刷。 The cleaning device of claim 4, wherein the brush system rotates the round brush. 如請求項1之清潔裝置,其中具有:將前述刷朝前述導引部的後面加壓的單元;及在前述刷的前端自前述導引部的後面偏離的狀態下固定前述刷的位置的單元。 A cleaning device according to claim 1, comprising: a unit for pressing the brush toward a rear surface of the guiding portion; and a unit for fixing a position of the brush in a state where a front end of the brush is deviated from a rear surface of the guiding portion . 如請求項1至7中任一項之清潔裝置,其中具有:複數個前述導引單元,以前述前面的溝在基板的兩端面通過的位置呈對向的方式配置;及複數個前述刷,以前端的位置受前述複數個導引單元的前述導引部的後面所控制的方式配置。 The cleaning device according to any one of claims 1 to 7, further comprising: a plurality of the guiding units, wherein the front groove is disposed in a direction opposite to a position at which both end faces of the substrate pass; and a plurality of the aforementioned brushes, The position of the front end is arranged in such a manner as to be controlled by the rear of the aforementioned guiding portions of the plurality of guiding units. 如請求項8之清潔裝置,其中具有:以基板兩端可分別通過前述複數個導引單元之前述導引部的前述前面的溝之方式搬送基板的單元。 A cleaning device according to claim 8, further comprising: means for transporting the substrate so that both ends of the substrate can pass through the front grooves of the plurality of guiding units.
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