TW201507562A - Printed circuit board and method for manufacturing same - Google Patents

Printed circuit board and method for manufacturing same Download PDF

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TW201507562A
TW201507562A TW102124005A TW102124005A TW201507562A TW 201507562 A TW201507562 A TW 201507562A TW 102124005 A TW102124005 A TW 102124005A TW 102124005 A TW102124005 A TW 102124005A TW 201507562 A TW201507562 A TW 201507562A
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layer
dielectric layer
conductive
conductive circuit
circuit board
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TW102124005A
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TWI594675B (en
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Wen-Hung Hu
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Zhen Ding Technology Co Ltd
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Abstract

A printed circuit board includes a first dielectical layer, a first trace layer , a metal bump, and a second dielectical layer. The first dielectrical layer connects with the second dilelctrical layer. The first dielectical layer includes a first surface far away the first dielectrical layer. The first trace layer is formed between the first dielectrical layer and the second dielectrical layer. The metal bump connects with and extends from the first trace layer, and run through the first surface of the first dielectical layer. The present disclosure also provides a method for manufacturing the same.

Description

電路板及其製作方法Circuit board and manufacturing method thereof

本發明涉及電路板製作領域,尤其涉及一種具有金屬凸塊的電路板及其製作方法。The present invention relates to the field of circuit board manufacturing, and in particular to a circuit board having metal bumps and a manufacturing method thereof.

在將電路板與其他電子元件進行組裝時,通常需要在電路板的外層導電線路一側製作金屬凸塊。所述金屬凸塊與電子元件的電性接觸墊相對應,通過焊接的方式將電路板與電子元件進行組裝,現有技術中,所述的金屬凸塊的製作方法包括步驟:首先在覆蓋於外層導電線路表面的防焊層中形成第一開口,使得導電線路層中的電性接觸墊露出。然後,在防焊層的表面形成光致抗蝕劑圖形層,所述光致抗蝕劑圖形層中形成有與第一開口相對應的第二開口。為了使得第二開口能夠完全暴露出第一開口,第二開口的大小需要大於第一開口的大小。最後,採用製作導電線路相似的方法,在第一開口和第二開口內填充導電金屬。去除光致抗蝕劑圖形層後,所述的填充金屬凸出於防焊層,形成金屬凸塊。When assembling a circuit board with other electronic components, it is usually necessary to make metal bumps on the outer conductive line side of the circuit board. The metal bumps are corresponding to the electrical contact pads of the electronic component, and the circuit board and the electronic component are assembled by soldering. In the prior art, the method for manufacturing the metal bump includes the steps of: first covering the outer layer A first opening is formed in the solder resist layer of the surface of the conductive trace such that the electrical contact pads in the conductive trace layer are exposed. Then, a photoresist pattern layer is formed on the surface of the solder resist layer, and a second opening corresponding to the first opening is formed in the photoresist pattern layer. In order to enable the second opening to fully expose the first opening, the size of the second opening needs to be larger than the size of the first opening. Finally, a conductive metal is filled in the first opening and the second opening in a similar manner to the fabrication of the conductive trace. After the photoresist pattern layer is removed, the fill metal protrudes from the solder resist layer to form metal bumps.

然後,採用上述的方法須二次對位元,金屬凸塊的間隙難以縮小,故不利於排布密集的金屬凸塊的製作。另外,由於導電線路的電性接觸墊與金屬凸塊先後分別形成,並非為一體成型。這樣,在封裝完成後,應力容易集中於結構交界處,將導致電性接觸墊與金屬凸塊相互分離的現象。Then, the above method is required for secondary alignment, and the gap of the metal bumps is difficult to be reduced, which is disadvantageous for the fabrication of densely arranged metal bumps. In addition, since the electrical contact pads of the conductive lines and the metal bumps are formed separately, they are not integrally formed. Thus, after the package is completed, stress tends to concentrate at the structural interface, which will cause the electrical contact pads and the metal bumps to separate from each other.

因此,有必要提供一種電路板的製作及其方法,可以得到具有密集分佈的金屬凸塊的電路板。Therefore, it is necessary to provide a circuit board and a method thereof, and a circuit board having densely distributed metal bumps can be obtained.

一種電路板,包括第一介電層、第一導電線路層、金屬凸塊和第二介電層,所述第一介電層和第二介電層相互連接,所述第一介電層具有遠離第二介電層的第一表面,所述第一導電線路層形成於第一介電層和第二介電層之間,所述金屬凸塊由第一導電線路層一體連接延伸而出,並凸出於第一介電層的第一表面。A circuit board includes a first dielectric layer, a first conductive circuit layer, a metal bump, and a second dielectric layer, wherein the first dielectric layer and the second dielectric layer are connected to each other, the first dielectric layer Having a first surface away from the second dielectric layer, the first conductive circuit layer is formed between the first dielectric layer and the second dielectric layer, the metal bumps are integrally connected by the first conductive circuit layer And protruding from the first surface of the first dielectric layer.

一種電路板的製作方法,包括步驟:提供載板;在所述載板的表面壓合第一介電層,得到多層基板;在所述多層基板內形成第一盲孔,所述第一盲孔貫穿所述第一介電層並延伸至所述載板內;在所述第一盲孔內形成金屬凸塊,並在第一介電層的表面形成第一導電線路層,所述金屬凸塊與第一導電線路層一體成型;在所述第一導電線路層一側壓合第二介電層;以及去除載板,得到電路板。A method for manufacturing a circuit board, comprising the steps of: providing a carrier board; pressing a first dielectric layer on a surface of the carrier board to obtain a multi-layer substrate; forming a first blind hole in the multi-layer substrate, the first blind a hole penetrating through the first dielectric layer and extending into the carrier; forming a metal bump in the first blind hole, and forming a first conductive circuit layer on a surface of the first dielectric layer, the metal The bump is integrally formed with the first conductive circuit layer; the second dielectric layer is pressed on the side of the first conductive circuit layer; and the carrier is removed to obtain a circuit board.

一種電路板的製作方法,包括步驟:提供載板及第一銅箔,所述第一銅箔形成於載板的一個表面,所述載板用於支撐所述第一銅箔;在所述第一銅箔的表面壓合第一介電層,得到多層基板;在所述多層基板內形成第一盲孔,所述第一盲孔貫穿所述第一介電層及第一銅箔並延伸至所述載板內;在所述第一盲孔內形成金屬凸塊,並在第一介電層的表面形成第一導電線路層,所述金屬凸塊與第一導電線路層一體成型;在所述第一導電線路層一側壓合第二介電層;以及去除載板及第一銅箔,得到電路板。A method of manufacturing a circuit board, comprising the steps of: providing a carrier plate and a first copper foil, the first copper foil being formed on one surface of the carrier plate, the carrier plate for supporting the first copper foil; Forming a first dielectric layer on the surface of the first copper foil to obtain a multilayer substrate; forming a first blind via in the multilayer substrate, the first blind via penetrating the first dielectric layer and the first copper foil Extending into the carrier; forming a metal bump in the first blind via, and forming a first conductive circuit layer on a surface of the first dielectric layer, the metal bump and the first conductive circuit layer being integrally formed And pressing the second dielectric layer on one side of the first conductive circuit layer; and removing the carrier and the first copper foil to obtain a circuit board.

本技術方案提供的電路板及其製作方法,所述金屬凸塊通過電鍍的方式與第一導電線路層同時製作。這樣在相同的電路板面積內,可以設置更多的金屬凸塊,從而使得電路板的線路分佈的更為密集。並且,由於金屬凸塊與第一導電線路層一體成型,從而使得金屬凸塊與第一導電線路層連接緊密,避免封裝過程中由於應力而導致的金屬凸塊與第一導電線路層分離。The circuit board provided by the technical solution and the manufacturing method thereof, the metal bumps are fabricated simultaneously with the first conductive circuit layer by electroplating. In this way, more metal bumps can be placed in the same board area, which makes the circuit board distribution more dense. Moreover, since the metal bumps are integrally formed with the first conductive circuit layer, the metal bumps are closely connected to the first conductive circuit layer, and the metal bumps due to stress during the packaging process are prevented from being separated from the first conductive circuit layer.

100‧‧‧電路板100‧‧‧ boards

110‧‧‧載板110‧‧‧ Carrier Board

120‧‧‧第一銅箔120‧‧‧First copper foil

130‧‧‧第一介電層130‧‧‧First dielectric layer

140‧‧‧多層基板140‧‧‧Multilayer substrate

141‧‧‧第一盲孔141‧‧‧ first blind hole

142‧‧‧金屬凸塊142‧‧‧Metal bumps

150‧‧‧第一導電線路層150‧‧‧First conductive circuit layer

160‧‧‧第二介電層160‧‧‧Second dielectric layer

162‧‧‧第二盲孔162‧‧‧ second blind hole

161‧‧‧導電盲孔161‧‧‧ Conductive blind holes

170‧‧‧第二導電線路層170‧‧‧Second conductive circuit layer

171‧‧‧電性接觸墊171‧‧‧Electrical contact pads

180‧‧‧防焊層180‧‧‧ solder mask

181‧‧‧開口181‧‧‧ openings

190‧‧‧保護層190‧‧‧Protective layer

101‧‧‧第一表面101‧‧‧ first surface

102‧‧‧第二表面102‧‧‧ second surface

圖1是本技術方案實施例提供的第一銅箔及載板的剖面示意圖。1 is a schematic cross-sectional view of a first copper foil and a carrier plate provided by an embodiment of the present technical solution.

圖2是圖1的第一銅箔表面壓合介電層形成多層基板的剖面示意圖。2 is a schematic cross-sectional view showing the surface of the first copper foil of FIG. 1 with a dielectric layer laminated to form a multilayer substrate.

圖3是圖2的多層基板中形成第一盲孔後的剖面示意圖。3 is a schematic cross-sectional view showing the first blind via hole formed in the multilayer substrate of FIG. 2.

圖4是圖3的第一盲孔內形成金屬凸塊並在第一介電層表面形成第一導電線路層後的剖面示意圖。4 is a cross-sectional view showing the formation of a metal bump in the first blind via hole of FIG. 3 and forming a first conductive wiring layer on the surface of the first dielectric layer.

圖5是在圖4的第一導電線路層一側壓合第二介電層後的剖面示意圖。FIG. 5 is a cross-sectional view showing the second dielectric layer being pressed on the side of the first conductive wiring layer of FIG. 4. FIG.

圖6是在圖5的第二介電層內形成第一盲孔的剖面示意圖。6 is a schematic cross-sectional view showing the formation of a first blind via in the second dielectric layer of FIG. 5.

圖7是在圖6的第二介電層表面形成第二導電線路層後的剖面示意圖。FIG. 7 is a schematic cross-sectional view showing the second conductive wiring layer formed on the surface of the second dielectric layer of FIG. 6. FIG.

圖8是圖7的第二導電線路層表面形成防焊層後的剖面示意圖。FIG. 8 is a schematic cross-sectional view showing the surface of the second conductive wiring layer of FIG. 7 after the solder resist layer is formed.

圖9是圖8去除載板及第一銅箔後的剖面示意圖。FIG. 9 is a cross-sectional view of FIG. 8 after removing the carrier and the first copper foil.

圖10是本技術方案製作的電路板的剖面示意圖。FIG. 10 is a schematic cross-sectional view of a circuit board fabricated by the present technical solution.

本技術方案提供的電路板製作方法包括如下步驟:The circuit board manufacturing method provided by the technical solution includes the following steps:

第一步,請參閱圖1,提供載板110及第一銅箔120。In the first step, referring to FIG. 1, the carrier 110 and the first copper foil 120 are provided.

所述載板110用於支撐所述第一銅箔120。所述第一銅箔120為薄銅箔,所述第一銅箔120的厚度為2微米至5微米。所述載板110為採用與第一銅箔120材料不同的金屬材料製成或者採用非金屬材料製成。金屬載板110具有足夠的機械強度以支撐第一銅箔120。The carrier 110 is used to support the first copper foil 120. The first copper foil 120 is a thin copper foil, and the first copper foil 120 has a thickness of 2 micrometers to 5 micrometers. The carrier 110 is made of a metal material different from the material of the first copper foil 120 or made of a non-metal material. The metal carrier 110 has sufficient mechanical strength to support the first copper foil 120.

第二步,請一併參閱圖2,在第一銅箔120的表面壓合第一介電層130,所述載板110、第一銅箔120及第一介電層130共同構成多層基板140。In the second step, referring to FIG. 2, the first dielectric layer 130 is pressed on the surface of the first copper foil 120. The carrier 110, the first copper foil 120 and the first dielectric layer 130 together form a multilayer substrate. 140.

所述第一介電層130可以通過在第一銅箔120表面半固化膠片形成。The first dielectric layer 130 may be formed by pre-curing a film on the surface of the first copper foil 120.

第三步,請參閱圖3,在所述多層基板140內形成多個第一盲孔141。In the third step, referring to FIG. 3, a plurality of first blind holes 141 are formed in the multilayer substrate 140.

本實施例中,所述載板110採用鋁製成。所述第一盲孔141可以採用鐳射燒蝕的方式形成。所述第一盲孔141自所述多層基板140的第一介電層130一側延伸至載板110內部。即所述第一盲孔141貫穿第一介電層130、第一銅箔120及部分的載板110。本實施例中,由於多個第一盲孔141採用鐳射燒蝕的方式形成,所述第一盲孔141在第一介電層130一側的開口端的橫截面積大於位於載板110內部的底端的橫截面積。所述第一盲孔141的縱截面的形狀為梯形。In this embodiment, the carrier 110 is made of aluminum. The first blind hole 141 may be formed by laser ablation. The first blind hole 141 extends from the side of the first dielectric layer 130 of the multilayer substrate 140 to the inside of the carrier 110. That is, the first blind via 141 penetrates through the first dielectric layer 130, the first copper foil 120, and a portion of the carrier 110. In this embodiment, since the plurality of first blind holes 141 are formed by laser ablation, the cross-sectional area of the first blind hole 141 on the open end of the first dielectric layer 130 is larger than that located inside the carrier 110. The cross-sectional area of the bottom end. The shape of the longitudinal section of the first blind hole 141 is trapezoidal.

第四步,請參閱圖4,在所述第一盲孔141內形成金屬凸塊142,並同時在第一介電層130的表面形成第一導電線路層150,所述金屬凸塊142與與其電連接的第一導電線路層150一體成型。In the fourth step, referring to FIG. 4, a metal bump 142 is formed in the first blind via 141, and a first conductive trace layer 150 is formed on the surface of the first dielectric layer 130. The metal bump 142 is The first conductive wiring layer 150 electrically connected thereto is integrally formed.

所述金屬凸塊142及第一導電線路層150可以採用半加成法制作。具體可以為:首先通過化學鍍等方式在第一盲孔141的內壁及第一介電層130的表面形成電鍍種子層。然後,在所述電鍍種子層的表面形成光致抗蝕劑圖形層,使得每個第一盲孔141被暴露出,並且位於第一介電層130的電鍍種子層的表面形成與第一導電線路層150的形狀互補的光致抗蝕劑圖形。接著,通過電鍍的方式,將每個第一盲孔141被完全填充形成金屬凸塊142,並在光致抗蝕劑圖形的空隙內形成第一導電線路層150。最後,去除光致抗蝕劑圖形及採用蝕刻去除被光致抗蝕劑圖形覆蓋的電鍍種子層。The metal bumps 142 and the first conductive wiring layer 150 may be fabricated by a semi-additive method. Specifically, the plating seed layer may be formed on the inner wall of the first blind via 141 and the surface of the first dielectric layer 130 by electroless plating or the like. Then, a photoresist pattern layer is formed on the surface of the plating seed layer such that each of the first blind vias 141 is exposed, and a surface of the plating seed layer of the first dielectric layer 130 is formed and first conductive The shape of the circuit layer 150 is complementary to the photoresist pattern. Next, each of the first blind vias 141 is completely filled to form the metal bumps 142 by electroplating, and the first conductive wiring layer 150 is formed in the voids of the photoresist pattern. Finally, the photoresist pattern is removed and the electroplated seed layer covered by the photoresist pattern is removed by etching.

由於所述第一導電線路層150與金屬凸塊142同時形成,所以金屬凸塊142與其連接的第一導電線路層150一體成型。Since the first conductive wiring layer 150 is formed simultaneously with the metal bumps 142, the metal bumps 142 are integrally formed with the first conductive wiring layer 150 connected thereto.

第五步,請參閱圖5,在所述第一導電線路層150一側壓合第二介電層160。In the fifth step, referring to FIG. 5, the second dielectric layer 160 is pressed on the side of the first conductive circuit layer 150.

本步驟可以採用與第二步相同的方式形成第二介電層160。This step can form the second dielectric layer 160 in the same manner as the second step.

第六步,請參閱圖6及圖7,在所述第二介電層160的表面形成第二導電線路層170。In the sixth step, referring to FIG. 6 and FIG. 7, a second conductive circuit layer 170 is formed on the surface of the second dielectric layer 160.

本步驟中,還一併在第二介電層160內形成有導電盲孔161,以使得第一導電線路層150和第二導電線路層170相互電連通。本步驟具體可以採用如下方法完成:In this step, a conductive via hole 161 is also formed in the second dielectric layer 160 such that the first conductive wiring layer 150 and the second conductive wiring layer 170 are in electrical communication with each other. This step can be specifically accomplished by the following methods:

首先,在第二介電層160內形成多個第二盲孔162。First, a plurality of second blind vias 162 are formed in the second dielectric layer 160.

所述第二盲孔162可以採用鐳射燒蝕的方式形成。The second blind hole 162 may be formed by laser ablation.

然後,按照上述與製作金屬凸塊142及第一導電線路層150相同的方法,在第二盲孔162內填充導電金屬形成導電盲孔161,並在第二介電層160的表面形成第二導電線路層170,所述第一導電線路層150與第二導電線路層170通過導電盲孔161相互電導通。Then, in the same manner as the fabrication of the metal bumps 142 and the first conductive wiring layer 150, the conductive vias are filled in the second blind vias 162 to form conductive vias 161, and a second surface is formed on the surface of the second dielectric layer 160. The conductive circuit layer 170, the first conductive circuit layer 150 and the second conductive circuit layer 170 are electrically connected to each other through the conductive blind vias 161.

第七步,請參閱圖8,在第二導電線路層170的表面形成防焊層180。In the seventh step, referring to FIG. 8, a solder resist layer 180 is formed on the surface of the second conductive wiring layer 170.

本步驟可以採用印刷液態防焊油墨的方式形成防焊層180。所述防焊層180內形成有多個開口181,部分第二導電線路層170內的導電線路從開口181露出,形成電性接觸墊171。In this step, the solder resist layer 180 can be formed by printing liquid solder resist ink. A plurality of openings 181 are formed in the solder resist layer 180, and the conductive lines in the portion of the second conductive wiring layer 170 are exposed from the openings 181 to form the electrical contact pads 171.

第八步,請一併參閱圖9,去除載板110及第一銅箔120。In the eighth step, please refer to FIG. 9 together to remove the carrier 110 and the first copper foil 120.

本實施例中,載板110採用鋁製成,本步驟可以採用化學蝕刻的方式將載板110去除。In this embodiment, the carrier 110 is made of aluminum. In this step, the carrier 110 can be removed by chemical etching.

當載板110採用非金屬材料如樹脂等製成時,可以採用與採用化學溶劑溶解的方式去除。When the carrier 110 is made of a non-metallic material such as a resin or the like, it can be removed by dissolution with a chemical solvent.

將載板110去除後,可以採用蝕刻的方式將第一銅箔120去除。由於第一銅箔120的厚度較小,從而可以採用較短的蝕刻時間將第一銅箔120去除,而金屬凸塊142僅去除較少部分。After the carrier 110 is removed, the first copper foil 120 may be removed by etching. Since the thickness of the first copper foil 120 is small, the first copper foil 120 can be removed with a shorter etching time, while the metal bumps 142 remove only a small portion.

當載板110去除後,金屬凸塊142部分突出於第一介電層130。When the carrier 110 is removed, the metal bumps 142 partially protrude from the first dielectric layer 130.

第九步,請參閱圖10,在金屬凸塊142的表面及電性接觸墊171的表面形成保護層190,得到電路板100。In the ninth step, referring to FIG. 10, a protective layer 190 is formed on the surface of the metal bump 142 and the surface of the electrical contact pad 171 to obtain the circuit board 100.

所述保護層190可以為有機保焊膜(OSP),也可以為鎳金層或鎳鈀金層。The protective layer 190 may be an organic solder mask (OSP) or a nickel gold layer or a nickel palladium gold layer.

可以理解的是,本步驟中也可以僅提供載板110而不需提供第一銅箔120。因為第一銅箔120在後續的電鍍過程中僅起到更到的更好導電作用,如果不設置第一銅箔120,形成的金屬種子層可以起到導電作用。當第一步中載板110的表面沒有形成第一銅箔120時,第一介電層130可以直接形成於載板110的表面。然後,形成的第一盲孔141貫穿第一介電層130並延伸至載板110內。並且,在第八步時,也無需將第一銅箔120去除。It can be understood that only the carrier 110 can be provided in this step without providing the first copper foil 120. Since the first copper foil 120 only plays a more favorable conductive role in the subsequent electroplating process, if the first copper foil 120 is not provided, the formed metal seed layer can function as a conductive. When the first copper foil 120 is not formed on the surface of the carrier 110 in the first step, the first dielectric layer 130 may be directly formed on the surface of the carrier 110. Then, the formed first blind via 141 penetrates through the first dielectric layer 130 and extends into the carrier 110. Also, in the eighth step, it is not necessary to remove the first copper foil 120.

請參閱圖10,本技術方案還提供一種電路板100,所述電路板100包括第一介電層130、金屬凸塊142、第二介電層160及第一導電線路層150。Referring to FIG. 10 , the technical solution further provides a circuit board 100 . The circuit board 100 includes a first dielectric layer 130 , a metal bump 142 , a second dielectric layer 160 , and a first conductive circuit layer 150 .

所述第一介電層130和第二介電層160相互連接。所述第一導電線路層150位於第一介電層130和第二介電層160之間。所述第一介電層130具有遠離第二介電層160的第一表面101,所述第二介電層160具有遠離第一介電層130的第二表面102。金屬凸塊142與第一導電線路層150相互電連接並一體成型,所述金屬凸塊142貫穿所述第一介電層130並凸出於所述第一表面101。The first dielectric layer 130 and the second dielectric layer 160 are connected to each other. The first conductive wiring layer 150 is located between the first dielectric layer 130 and the second dielectric layer 160. The first dielectric layer 130 has a first surface 101 away from the second dielectric layer 160 , and the second dielectric layer 160 has a second surface 102 remote from the first dielectric layer 130 . The metal bumps 142 are electrically connected to the first conductive circuit layer 150 and integrally formed, and the metal bumps 142 penetrate the first dielectric layer 130 and protrude from the first surface 101.

所述電路板還可以包括第二導電線路層170和導電盲孔161。所述第二導電線路層170形成於所述第二表面102,所述導電盲孔161形成於第二介電層160內,第一導電線路層150和第二導電線路層170通過所述導電盲孔161相互電導通。The circuit board may further include a second conductive wiring layer 170 and a conductive blind via 161. The second conductive circuit layer 170 is formed on the second surface 102. The conductive via hole 161 is formed in the second dielectric layer 160, and the first conductive circuit layer 150 and the second conductive circuit layer 170 pass through the conductive layer. The blind holes 161 are electrically connected to each other.

所述電路板100還可以進一步包括防焊層180,所述防焊層180形成於第二導電線路層170表面及第二表面102。所述防焊層180內形成有開口181。部分第二導電線路層170的導電線路從所述開口181露出,形成電性接觸墊171。The circuit board 100 may further include a solder resist layer 180 formed on the surface of the second conductive wiring layer 170 and the second surface 102. An opening 181 is formed in the solder resist layer 180. A conductive line of a portion of the second conductive wiring layer 170 is exposed from the opening 181 to form an electrical contact pad 171.

所述電路板100還可以包括保護層190,所述保護層190形成於電性接觸墊171及金屬凸塊142的表面。The circuit board 100 may further include a protective layer 190 formed on the surface of the electrical contact pads 171 and the metal bumps 142.

與其他電子元件進行封裝時,所述金屬凸塊142可以用於與其他電子元件通過焊球進行焊接。When packaged with other electronic components, the metal bumps 142 can be used for soldering with other electronic components through solder balls.

本技術方案提供的電路板及其製作方法,所述金屬凸塊通過電鍍的方式與第一導電線路層同時製作。這樣在相同的電路板面積內,可以設置更多的金屬凸塊,從而使得電路板的線路分佈的更為密集。並且,由於金屬凸塊與第一導電線路層一體成型,從而使得金屬凸塊與第一導電線路層連接緊密。避免封裝完成後,由於應力容易集中於金屬凸塊與第一導電線路的交界處,而導致的金屬凸塊與第一導電線路層分離的現象。The circuit board provided by the technical solution and the manufacturing method thereof, the metal bumps are fabricated simultaneously with the first conductive circuit layer by electroplating. In this way, more metal bumps can be placed in the same board area, which makes the circuit board distribution more dense. Moreover, since the metal bumps are integrally formed with the first conductive wiring layer, the metal bumps are closely connected to the first conductive wiring layer. After the package is completed, the stress is likely to concentrate on the boundary between the metal bump and the first conductive line, and the metal bump is separated from the first conductive circuit layer.

可以理解的是,本技術方案的電路板製作方法可以應用於高密度互連電路板(HDI)的製作。It can be understood that the circuit board manufacturing method of the present technical solution can be applied to the fabrication of a high density interconnect circuit board (HDI).

惟,以上所述者僅為本發明之較佳實施方式,自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士爰依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

no

100‧‧‧電路板 100‧‧‧ boards

130‧‧‧第一介電層 130‧‧‧First dielectric layer

142‧‧‧金屬凸塊 142‧‧‧Metal bumps

150‧‧‧第一導電線路層 150‧‧‧First conductive circuit layer

160‧‧‧第二介電層 160‧‧‧Second dielectric layer

170‧‧‧第二導電線路層 170‧‧‧Second conductive circuit layer

171‧‧‧電性接觸墊 171‧‧‧Electrical contact pads

180‧‧‧防焊層 180‧‧‧ solder mask

190‧‧‧保護層 190‧‧‧Protective layer

101‧‧‧第一表面 101‧‧‧ first surface

102‧‧‧第二表面 102‧‧‧ second surface

Claims (10)

一種電路板,包括第一介電層、第一導電線路層、金屬凸塊和第二介電層,所述第一介電層和第二介電層相互連接,所述第一介電層具有遠離第二介電層的第一表面,所述第一導電線路層形成於第一介電層和第二介電層之間,所述金屬凸塊由第一導電線路層一體連接延伸而出,並凸出於第一介電層的第一表面。A circuit board includes a first dielectric layer, a first conductive circuit layer, a metal bump, and a second dielectric layer, wherein the first dielectric layer and the second dielectric layer are connected to each other, the first dielectric layer Having a first surface away from the second dielectric layer, the first conductive circuit layer is formed between the first dielectric layer and the second dielectric layer, and the metal bumps are integrally connected by the first conductive circuit layer And protruding from the first surface of the first dielectric layer. 如請求項第1項所述的電路板,其中,還包括第二導電線路層,所述第二介電層具有遠離所述第一介電層的第二表面,所述第二導電線路層形成於所述第二表面。The circuit board of claim 1, further comprising a second conductive circuit layer, the second dielectric layer having a second surface away from the first dielectric layer, the second conductive circuit layer Formed on the second surface. 如請求項第2項所述的電路板,其中,還包括導電盲孔,所述導電盲孔形成於第二介電層內,所述第一導電線路層與第二導電線路層通過所述導電盲孔相互電導通。The circuit board of claim 2, further comprising a conductive via hole, the conductive via hole being formed in the second dielectric layer, wherein the first conductive circuit layer and the second conductive circuit layer pass through The conductive blind holes are electrically connected to each other. 如請求項第2項所述的電路板,其中,所述第二導電線路層及第二表面形成有防焊層,所述防焊層內具有開口,部分第二導電線路層從所述開口露出形成電性接觸墊。The circuit board of claim 2, wherein the second conductive circuit layer and the second surface are formed with a solder resist layer, the solder resist layer has an opening therein, and a portion of the second conductive circuit layer is from the opening Exposed to form an electrical contact pad. 如請求項第4項所述的電路板,其中,所述電性接觸墊的表面及金屬凸塊的表面形成有保護層。The circuit board of claim 4, wherein the surface of the electrical contact pad and the surface of the metal bump are formed with a protective layer. 一種電路板製作方法,包括步驟:
提供載板;
在所述載板的表面壓合第一介電層,得到多層基板;
在所述多層基板內形成第一盲孔,所述第一盲孔貫穿所述第一介電層並延伸至所述載板內;
在所述第一盲孔內形成金屬凸塊,並在第一介電層的表面形成第一導電線路層,所述金屬凸塊與第一導電線路層一體成型;
在所述第一導電線路層一側壓合第二介電層;以及
去除載板,得到電路板。
A circuit board manufacturing method includes the steps of:
Providing a carrier board;
Pressing a first dielectric layer on a surface of the carrier to obtain a multilayer substrate;
Forming a first blind via in the multilayer substrate, the first blind via extending through the first dielectric layer and extending into the carrier;
Forming a metal bump in the first blind hole, and forming a first conductive circuit layer on a surface of the first dielectric layer, the metal bump being integrally formed with the first conductive circuit layer;
Pressing a second dielectric layer on one side of the first conductive circuit layer; and removing the carrier to obtain a circuit board.
如請求項第6項所述的電路板製作方法,其中,在所述第一導電線路層一側壓合第二介電層之後,還包括在第二介電層遠離第一介電層的表面形成第二導電線路層。The method of fabricating a circuit board according to claim 6, wherein after the second dielectric layer is pressed on the side of the first conductive circuit layer, the second dielectric layer is further away from the first dielectric layer. The surface forms a second conductive wiring layer. 如請求項第7項所述的電路板製作方法,其中,在形成所述第二導電線路層時,還在第二介電層內形成導電盲孔,所述第一導電線路層與第二導電線路層通過所述導電盲孔相互電連通。The method of fabricating a circuit board according to claim 7, wherein, when the second conductive circuit layer is formed, a conductive via hole is formed in the second dielectric layer, the first conductive circuit layer and the second conductive layer The conductive circuit layers are in electrical communication with each other through the conductive vias. 一種電路板製作方法,包括步驟:
提供載板及第一銅箔,所述第一銅箔形成於載板的一個表面,所述載板用於支撐所述第一銅箔;
在所述第一銅箔的表面壓合第一介電層,得到多層基板;
在所述多層基板內形成第一盲孔,所述第一盲孔貫穿所述第一介電層及第一銅箔並延伸至所述載板內;
在所述第一盲孔內形成金屬凸塊,並在第一介電層的表面形成第一導電線路層,所述金屬凸塊與第一導電線路層一體成型;
在所述第一導電線路層一側壓合第二介電層;以及
去除載板及第一銅箔,得到電路板。
A circuit board manufacturing method includes the steps of:
Providing a carrier plate and a first copper foil, the first copper foil being formed on one surface of the carrier plate, the carrier plate for supporting the first copper foil;
Pressing the first dielectric layer on the surface of the first copper foil to obtain a multilayer substrate;
Forming a first blind via in the multi-layer substrate, the first blind via extending through the first dielectric layer and the first copper foil and extending into the carrier;
Forming a metal bump in the first blind hole, and forming a first conductive circuit layer on a surface of the first dielectric layer, the metal bump being integrally formed with the first conductive circuit layer;
Pressing the second dielectric layer on one side of the first conductive circuit layer; and removing the carrier and the first copper foil to obtain a circuit board.
如請求項第9項所述的電路板製作方法,其中,在所述第一導電線路層一側壓合第二介電層之後,還包括在第二介電層遠離第一介電層的表面形成第二導電線路層,並在第二介電層內形成導電盲孔,所述第一導電線路層與第二導電線路層通過所述導電盲孔相互電導通。The method of fabricating a circuit board according to claim 9, wherein after the second dielectric layer is pressed on the side of the first conductive circuit layer, the second dielectric layer is further away from the first dielectric layer. Forming a second conductive circuit layer on the surface, and forming a conductive blind hole in the second dielectric layer, wherein the first conductive circuit layer and the second conductive circuit layer are electrically connected to each other through the conductive blind hole.
TW102124005A 2013-06-27 2013-07-04 Printed circuit board and method for manufacturing same TWI594675B (en)

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